Adsorption nozzle inspection device and adsorption nozzle management device

Abstract

To provide a suction nozzle inspection device that can acquire images that can determine the state of accumulation of foreign matter inside a suction nozzle, the presence or absence of constriction deformation of the suction nozzle, and the like.SOLUTION: A suction nozzle inspection device includes a nozzle holding unit that removably holds a suction nozzle that receives negative pressure air from the proximal end to an air flow path and suctions components at the distal opening, a first light that irradiates with illumination light from the base end side of the suction nozzle inward through a communication flow path that communicates with the air flow path of the held suction nozzle, and a camera that captures an image of the tip and the interior of the suction nozzle to obtain a first image when the first light emits the illumination light.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This specification relates to a suction nozzle inspection device for inspecting a suction nozzle that performs a component mounting operation, and a suction nozzle management device configured to include this suction nozzle inspection device.

Background Art

[0002] Techniques for mass-producing substrate products by performing substrate work on a substrate on which a circuit pattern is formed have become widespread. As a typical example of a substrate working machine that performs substrate work, there is a component mounting machine that performs a component mounting operation. Many component mounting machines use a suction nozzle that sucks a component by supplying negative pressure air and mounts it on a substrate. When a suction nozzle is used over a long period of time, foreign substances such as dust may enter and accumulate in the internal air flow path, and there is a risk that the performance may deteriorate. As a countermeasure, a suction nozzle management device that cleans the inside of the suction nozzle or inspects the performance of the suction nozzle has been put into practical use. Technical examples related to the suction nozzle management device are disclosed in Patent Documents 1 and 2.

[0003] In the suction nozzle management device of Patent Document 1, after cleaning the inside of the suction nozzle with cleaning water, air is blown in alternately from above and below the suction nozzle to perform drying. According to this, it is said that the suction nozzle can be sufficiently dried, and the effect of not reducing the accuracy of the load inspection and air flow rate inspection performed thereafter is produced.

[0004] Further, the article holding head of Patent Document 2 includes a nozzle that holds an article at the tip, a transparent holding member that is made of a transparent material and holds the nozzle, and an imaging space that is formed on the proximal end side of the nozzle and images the article through the transparent holding member. According to this, it is said that by imaging through the transparent holding member, the positional relationship between the nozzle and the article can be recognized, and the positioning accuracy when placing the article on the mounting object can be improved.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] International Publication No. 2019 / 244197 [Patent Document 2] Japanese Patent Publication No. 2022-36448 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] Incidentally, in the apparatus described in Patent Document 1, whether or not foreign matter is accumulating in the air passage inside the suction nozzle is indirectly inspected by air flow rate testing. However, because this is an indirect inspection method, depending on the required accuracy of the determination of the foreign matter accumulation, sufficient results may not be obtained. In particular, for small-diameter suction nozzles, the air flow rate during operation is low, so the accuracy of the determination tends to decrease due to measurement errors and the effects of air leaks. For this reason, imaging inspection is performed as a method to directly inspect the foreign matter accumulation visually. In imaging inspection, illumination light is shone from the tip of the suction nozzle towards the inside, and imaging is performed using a camera. However, with small-diameter suction nozzles, the illumination light does not reach the inside, making it difficult to image foreign matter.

[0007] Furthermore, even if the method of imaging an adsorption nozzle from the proximal end side disclosed in Patent Document 2 is applied to imaging foreign objects, the nozzle holder that holds the adsorption nozzle is included in the camera's field of view and obstructs imaging, making it difficult to image the inside of the adsorption nozzle. In addition, even if imaging is performed through a nozzle holder made of a transparent material as disclosed, there is a risk of image quality degradation due to scattering of illumination light and a decrease in the amount of transmitted light, and sufficient judgment accuracy cannot be expected.

[0008] Therefore, the problem to be solved in this specification is to provide an adsorption nozzle inspection device that can acquire images capable of determining the accumulation of foreign matter inside the adsorption nozzle and whether or not there is narrowing deformation of the adsorption nozzle, and an adsorption nozzle management device comprising this adsorption nozzle inspection device. [Means for solving the problem]

[0009] This specification discloses an adsorption nozzle inspection apparatus comprising: a nozzle holding unit that detachably holds an adsorption nozzle to which negative pressure air is supplied from the base end to an air passage and which adsorbs a part at an opening on the tip end; a first light that irradiates illumination light from the base end of the held adsorption nozzle toward the interior; and a camera that, when the first light is irradiating the interior with illumination light, captures an image of the interior from the tip end to acquire a first image.

[0010] Furthermore, this specification discloses an adsorption nozzle management device comprising the adsorption nozzle inspection device described above, a cleaning device for cleaning the inside of the adsorption nozzle with a liquid or blowing it with a gas, a heterogeneous inspection device for performing inspection items different from those of the adsorption nozzle inspection device, and a history management device for managing the history of at least the cleaning and inspection of the adsorption nozzle.

[0011] Furthermore, this specification discloses the technical idea of ​​changing "the adsorption nozzle inspection device described in claim 1 or 2" to "the adsorption nozzle inspection device described in any one of claims 1 to 3" in claim 4 of the original application; the technical idea of ​​changing "the adsorption nozzle inspection device described in claim 1 or 2" to "the adsorption nozzle inspection device described in any one of claims 1 to 5" in claim 6 of the original application; the technical idea of ​​changing "the adsorption nozzle inspection device described in claim 1 or 2" to "the adsorption nozzle inspection device described in any one of claims 1 to 6" in claim 7 of the original application; and the technical idea of ​​changing "the adsorption nozzle inspection device described in claim 3" to "the adsorption nozzle inspection device described in claim 3 or 5" in claim 9 of the original application. In addition, this specification discloses the technical idea of ​​changing "the adsorption nozzle management device described in claim 10" to "the adsorption nozzle management device described in claim 10 or 11" in claim 12 of the original application. [Effects of the Invention]

[0012] In the suction nozzle inspection device and suction nozzle management device disclosed herein, when the first light illuminates the interior of the suction nozzle from the base end, a camera captures the interior from the tip end to acquire a first image. At this time, the passage of the illumination light changes from normal according to foreign matter accumulated inside the suction nozzle or narrowing deformation of the suction nozzle, and this is reflected in the first image. Therefore, it is possible to acquire an image that allows for the determination of the accumulation of foreign matter inside the suction nozzle and the presence or absence of narrowing deformation of the suction nozzle. [Brief explanation of the drawing]

[0013] [Figure 1] This is a perspective view of a parts mounting machine that uses a suction nozzle. [Figure 2] This is a perspective view showing the appearance of the suction nozzle. [Figure 3] This is a perspective view showing the external appearance of an adsorption nozzle management system, which includes an adsorption nozzle inspection device. [Figure 4] This is a perspective view showing the internal structure of the adsorption nozzle management device with the outer casing removed. [Figure 5] This is a schematic cross-sectional view of the side of the suction nozzle and a partial cross-sectional view illustrating the configuration of the suction nozzle inspection apparatus of the first embodiment. [Figure 6] This diagram schematically shows an example of the first image when the inside of the adsorption nozzle is normal. [Figure 7] This is a schematic side cross-sectional view illustrating the situation in which foreign matter is accumulating inside the suction nozzle. [Figure 8] This diagram schematically shows an example of the first image, where foreign matter is trapped inside the suction nozzle. [Figure 9] This is a schematic side cross-sectional view showing the configuration of the suction nozzle inspection device according to the second embodiment. [Figure 10] This is a diagram illustrating the operation flow of the suction nozzle inspection device according to the second embodiment. [Figure 11] This is a schematic diagram illustrating an example of the second image. [Figure 12] This is a schematic diagram illustrating an example of the first image. [Figure 13] It is a diagram schematically showing a composite image obtained by compositing the second image in FIG. 11 and the first image in FIG. 12 by bright priority processing. [Figure 14] It is a diagram of an operation flow explaining the overall operation of the suction nozzle management device.

Embodiments for Carrying out the Invention

[0014] 1. Configuration of the suction nozzle 60 and the component mounter 14 First, the configuration of the suction nozzle 60 to be inspected by the suction nozzle inspection device 170 (see FIG. 5) of the first embodiment, and the component mounter 14 that uses the suction nozzle 60 will be described with reference to FIGS. 1, 2, and 5. As shown in FIG. 1, two component mounters 14 are arranged adjacent to each other on the system base 12. The direction in which the component mounters 14 line up coincides with the X-axis direction for transporting the substrate, and the horizontal direction orthogonal to the X-axis direction is the Y-axis direction. The component mounter 14 includes a mounter housing 20, a substrate transfer device 22, a head moving device 24, a mounting head 26, a component supply device 28, a nozzle station 30, and a component camera 31, etc.

[0015] The mounter housing 20 is composed of a frame portion 32 and a beam portion 34 spanned over the upper part of the frame portion 32. Further, an openable and closable cover 35 is provided above the beam portion 34. The cover 35 is shown in the component mounter 14 on the left back side, and is omitted in the component mounter 14 on the right front side.

[0016] The substrate transfer device 22 includes two sets of conveyor devices (40, 42) and a substrate holding mechanism (not shown). The two conveyor devices (40, 42) are provided on the frame portion 32 so as to be parallel to each other and extend in the X-axis direction. Each of the conveyor devices (40, 42) is rotationally driven by a motor (not shown) to transport the supported substrate in the X-axis direction. The two substrate holding mechanisms are arranged at approximately the center of the lower part of each of the conveyor devices (40, 42). Each of the substrate holding mechanisms holds the substrate at a predetermined mounting work position.

[0017] As shown in Figure 1, the parts supply device 28 is configured with a plurality of tape feeders 72 arranged in the X-axis direction. Each tape feeder 72 rotatably houses a tape reel. A carrier tape is wound around the tape reel, holding multiple parts in a row. Each tape feeder 72 uses a tape feeding mechanism (not shown) to feed the carrier tape to the supply position in a pitch manner. In this way, the tape feeder 72 supplies parts at the supply position.

[0018] The head moving device 24 is an XY robot type device. The head moving device 24 includes an X-axis motor (not shown) for sliding the slider 50 in the X-axis direction, and a Y-axis motor (not shown) for sliding the slider 50 in the Y-axis direction. A mounting head 26 is attached to the side of the slider 50. The mounting head 26 can be moved to any position on the frame 32 by being driven by the X-axis motor and the Y-axis motor. A suction nozzle 60 is provided on the underside of the mounting head 26. The mounting head 26 uses the suction nozzle 60 to pick up a component from the supply position of the tape feeder 72 and mounts the component onto the substrate.

[0019] As shown in Figure 2, the suction nozzle 60 consists of a body cylinder 61, two locking pins 62, a flange portion 64, a suction tube 66, and a biasing spring 74 (see Figure 5). The body cylinder 61 has an upright cylindrical shape. The two locking pins 62 are located at a height near the upper end of the body cylinder 61, 180° apart in the circumferential direction. Each of the locking pins 62 extends radially outward from the outer circumferential surface of the body cylinder 61 (see Figure 2) and protrudes radially inward from the inner circumferential surface of the body cylinder 61 (see Figure 5).

[0020] The flange portion 64 is formed from an annular plate-shaped member and is fixed to the lower side of the body cylinder 61. The flange portion 64 protrudes circumferentially outward and circumferentially inward from the body cylinder 61. A two-dimensional code 65 is attached to the upper surface of the flange portion 64. The two-dimensional code 65 includes at least individual identification information for the suction nozzle 60, and other information such as how to handle the suction nozzle 60 may be associated with it. In addition, a code of a different format from the two-dimensional code 65, such as a barcode or a numerical sequence code, may be attached to the suction nozzle 60.

[0021] The suction tube 66 has an upright cylindrical shape with a smaller diameter than the body cylinder 61 and is longer than the body cylinder 61. The suction tube 66 is positioned inside the body cylinder 61 and the flange portion 64, and protrudes downward from the flange portion 64. The upper surface of the suction tube 66 becomes the base end 67 of the suction nozzle 60, and the lower surface of the suction tube 66 becomes the tip 68 of the suction nozzle 60. The inside of the suction tube 66 also serves as an air passage 70. The air passage 70 communicates from the base end 67 side to the opening 71 on the tip 68 side. In the following description, the inside of the suction nozzle 60 where foreign matter may accumulate mainly refers to the air passage 70.

[0022] An oval shape can be used as an example of the opening shape of the opening 71 (see Figure 6). A suction nozzle 60 having an oval opening 71 is suitable for adsorbing parts with a rectangular surface to be adsorbed. However, it is not limited to this, and the opening shape of the opening 71 may be circular, elliptical, gourd-shaped, etc. Furthermore, the suction tube 66 is manufactured, for example, by firing zirconia, and there are individual differences in shape. For this reason, the opening area of ​​the opening 71, which varies, is manufactured and controlled within a range that allows for a positive error in the minimum opening area. In other words, the actual opening area of ​​the openings 71 of multiple suction nozzles 60 will vary by more than or equal to the minimum opening area.

[0023] As shown in Figure 5, a flange portion 73 is provided on the outer surface of the suction tube 66 at approximately the midpoint of its height, projecting radially outward. A coil-shaped biasing spring 74 is inserted in a compressed state on the outside of the suction tube 66. The biasing spring 74 is located between a locking pin 62 projecting radially inward from the body cylinder 61 and the flange portion 73 of the suction tube 66. The biasing spring 74 biases the suction tube 66 downward relative to the body cylinder 61. With this configuration, the suction tube 66 can move up and down relative to the body cylinder 61, in other words, it can extend and retract relatively. Furthermore, under normal circumstances, the suction tube 66 is in an extended state where the flange portion 73 contacts the flange portion 64 (as shown in Figure 5).

[0024] The suction nozzle 60, provided on the mounting head 26, moves up and down driven by a nozzle lifting mechanism (not shown). The base end 67 side of the air passage 70 of the suction nozzle 60 is connected to a positive and negative pressure supply device (not shown) via a negative pressure air passage and a positive pressure air passage (not shown). When negative pressure air is supplied to the air passage 70 from the base end 67 side, the suction nozzle 60 picks up a component at the opening 71 on the tip end 68 side. When positive pressure air is supplied to the air passage 70, the suction nozzle 60 releases the component at the opening 71 and attaches it to the substrate.

[0025] When the suction nozzle 60 descends to pick up a part, the tip 68 of the suction tube 66 contacts the part, and then the body cylinder 61 descends slightly further. At this time, the suction tube 66 compresses the biasing spring 74, changing to a shortened state where the flange portion 73 is separated from the flange portion 64. As a result, a downward load is generated from the biasing spring 74 acting on the part via the suction tube 66. Also, when the suction nozzle 60 descends to mount a part, the body cylinder 61 descends slightly further after the part held by the tip 68 of the suction tube 66 contacts the substrate. At this time, the suction tube 66 changes from an extended state to a shortened state, as described above. As a result, a downward load is generated from the biasing spring 74 acting on the part and the substrate via the suction tube 66. Even if no part is present, a downward load will be generated if the suction tube 66 descends and contacts any object.

[0026] Returning to Figure 1, the nozzle station 30 is located adjacent to the parts supply device 28. The nozzle station 30 has a nozzle tray 76 in which multiple suction nozzles 60 are interchangeably housed. At the nozzle station 30, the suction nozzles 60 attached to the mounting head 26 are exchanged with the suction nozzles 60 housed in the nozzle tray 76 as needed. The nozzle tray 76 is detachable from the nozzle station 30 and can be loaded into and unloaded from the suction nozzle management device 80, which will be described later.

[0027] The component camera 31 is installed between the substrate transport device 22 and the component supply device 28. The component camera 31 is positioned so that its optical axis is facing upward. The component camera 31 images and recognizes the component held by the suction nozzle 60 from below as the mounting head 26 moves from the component supply device 28 to the substrate. This allows the position and orientation of the component relative to the suction nozzle 60 to be detected and reflected in the mounting operation. As an example of a component camera 31, a digital imaging device having an image sensor such as a CCD or CMOS can be used.

[0028] In the component mounting machine 14, components are mounted to a substrate held in the mounting position by the substrate transport device 22 using a suction nozzle 60 provided on the mounting head 26. When the suction nozzle 60 is used for a long period of time, the risk of malfunctions such as foreign matter such as dust entering the internal air passage 70, narrowing deformation of the suction nozzle 60, and other malfunctions increases. For this reason, it is preferable to maintain and manage the suction nozzle 60 periodically or as needed. A suction nozzle management device 80 can be used to manage the suction nozzle 60.

[0029] 2. Overall configuration of the suction nozzle management device 80 Next, the overall configuration of the suction nozzle management device 80 will be described with reference to Figures 3 and 4. The suction nozzle management device 80 is composed of the suction nozzle inspection device 170 of the first embodiment. As shown in Figure 3, the suction nozzle management device 80 has an appearance that is generally a vertically elongated rectangular parallelepiped. A door 82 is provided at approximately the middle height of the front of the suction nozzle management device 80. The door 82 allows for the insertion and removal of the nozzle tray 76 described above. A touch panel 86 is provided above the door 82. The touch panel 86 allows for the display of various information and input operations by the operator.

[0030] As shown in Figure 4, the suction nozzle management device 80 consists of a housing 90, a pallet storage device 92, a transfer device 94, a different-type inspection device 96, a washing device 98, a drying device 100, a control device 160, and a suction nozzle inspection device 170. The housing 90 consists of a frame section 102 with a hollow frame structure and a beam section 104 with a structure that spans above the frame section 102.

[0031] The pallet storage device 92 is located inside the frame portion 102 and is exposed on the upper surface of the frame portion 102. The pallet storage device 92 has a plurality of pallet racks 106 and support arms 108. The plurality of pallet racks 106 are arranged in a vertical direction. The pallet racks 106 are shelves for placing nozzle pallets 110. Each nozzle pallet 110 houses a plurality of suction nozzles 60.

[0032] The support arm 108 is driven by an arm drive mechanism (not shown) to move up and down in front of the multiple pallet racks 106, and also moves closer to and further away from the pallet racks 106. As a result, the support arm 108 removes the nozzle pallet 110 to be operated from the pallet rack 106 and stores the nozzle pallet 110 in the reverse direction. The nozzle pallet 110 removed from the pallet rack 106 moves to the upper side of the frame section 102 as the support arm 108 rises. This makes it possible to remove the suction nozzle 60 from the nozzle pallet 110. The nozzle tray 76 is generally the same shape as the nozzle pallet 110 and may be handled in the same way as the nozzle pallet 110.

[0033] The transfer device 94 is installed on the beam section 104. The transfer device 94 has a transfer head 120 and a head drive mechanism 122. The head drive mechanism 122 is an XYZ type drive mechanism that moves the transfer head 120 in the front-rear, left-right, and up-down directions on the frame section 102. On the other hand, two fixed stages 131 for setting the nozzle tray 76 are provided on the upper front surface of the frame section 102. The transfer device 94 transfers the suction nozzle 60 between the nozzle tray 76, which has been brought in and set on the fixed stages 131, and the nozzle pallet 110, which is supported by the support arm 108 of the pallet storage device 92. Furthermore, the transfer device 94 operates in various situations where the suction nozzle 60 is moved, as will be described later. On the lower surface of the transfer head 120 are a downward-facing camera 126, a nozzle holding section 128 for detachably holding the suction nozzle 60, and an air supply device 130.

[0034] The heterogeneous inspection device 96 performs different inspection items than the suction nozzle inspection device 170. The heterogeneous inspection device 96 has a load cell 142 and a joint 146, and is composed of a transfer device 94. The load cell 142 is positioned on the upper surface of the frame portion 102. A load test is performed using the load cell 142 to inspect the extension and retraction state of the suction tube 66 of the suction nozzle 60. In detail, the suction nozzle 60 to be inspected has its body cylinder 61 held by the nozzle holding portion 128 of the transfer head 120. Next, the head drive mechanism 122 lowers the transfer head 120 and the suction nozzle 60, bringing the suction tube 66 into contact with the load cell 142. At this time, the load cell 142 measures the load acting from the biasing spring 74 through the suction tube 66. Based on the measured load, the quality of the extension and retraction state of the suction tube 66 is determined.

[0035] The joint 146 is positioned on the underside of the air supply device 130, and air is supplied from the air supply device 130 to it. The air flow rate of the suction nozzle 60 is inspected using the air supplied from the air supply device 130 to the joint 146. More specifically, the joint 146 is driven by the head drive mechanism 122 to move above the suction nozzle 60, which is placed on the cleaning pallet 158 ​​(described later), and connects to the suction nozzle 60. Next, air is supplied from the air supply device 130 to the suction nozzle 60 via the joint 146. When the air is supplied, the air flow rate is measured, and the quality of the air flow inside the suction nozzle 60 is determined. As the air supplied for the inspection, for example, positive-pressure air with a known pressure is used. Alternatively, instead of the air flow rate inspection, an inspection to measure the pressure of the flowing air may be performed.

[0036] The cleaning device 98 is located next to the pallet storage device 92. The cleaning device 98 has an exposed position (the position where the cleaning pallet 158 ​​is shown in Figure 4) and consists of a cleaning and drying mechanism 150 and a cleaning pallet moving mechanism 152, etc. In the exposed position, the suction nozzle 60 is transferred to the cleaning pallet 158 ​​by the transfer device 94. The cleaning and drying mechanism 150 performs cleaning using a liquid such as cleaning water and drying by blowing a gas such as air onto the suction nozzle 60 that has been transferred to the cleaning pallet 158. The cleaning pallet moving mechanism 152 moves the cleaning pallet 158 ​​between the exposed position and the inside of the cleaning and drying mechanism 150. The cleaning device 98 is one embodiment of a cleaning device that cleans the inside of the suction nozzle 60 with a liquid, and may be replaced with a cleaning device that blows gas into the inside of the suction nozzle 60.

[0037] The drying device 100 is installed next to the washing pallet 158, which is located in an exposed position. The drying device 100 performs the final drying of the suction nozzle 60. More specifically, in the washing and drying mechanism 150, the suction nozzle 60 is dried while mounted on the washing pallet 158, which may result in insufficient drying. In particular, washing water may remain between the relatively movable body cylinder 61 and the suction tube 66 of the suction nozzle 60, which may affect the load inspection. Therefore, the drying device 100 alternately sends drying air into the interior of the suction nozzle 60 from the base end 67 and the tip end 68 to ensure sufficient final drying.

[0038] Multiple waste boxes 148 are provided on the upper surface of the frame section 102. Suction nozzles 60 that are judged to be defective in any inspection are sorted based on their size or type, the inspection item in which they were judged to be defective, and whether or not they can be reused, and are discarded in the waste boxes 148. On the other hand, suction nozzles 60 that are judged to be good in all inspections are returned to the nozzle pallet 110 or nozzle tray 76. In addition, suction nozzles 60 that are judged to be defective may not be discarded immediately, but may be reinspected after maintenance is performed by the washing device 98 and the drying device 100.

[0039] The control device 160 is configured using a computer equipped with a CPU, memory, etc. The control device 160 controls the display of the communication-connected touch panel 86 and accepts input operations. The control device 160 controls or drives the pallet storage device 92, transfer device 94, different-type inspection device 96, washing device 98, drying device 100, air supply device 130, and suction nozzle inspection device 170.

[0040] The history management device 162 is configured using the software of the control device 160. The history management device 162 stores and manages the history of at least the cleaning (washing) and inspection of the suction nozzle 60 in the memory 164. The stored history is transferred to a higher-level host control device (not shown) that manages the operation of the component mounting machine 14. In addition, the control unit of the component mounting machine 14 stores the usage history of the suction nozzle 60 and transfers it to the host control unit. The host control unit edits the history data for each suction nozzle 60 and manages it centrally. The history data is updated as needed and made accessible from the history management device 162 and the control unit of the component mounting machine 14.

[0041] 3. Configuration of the suction nozzle inspection device 170 of the first embodiment Next, the configuration of the suction nozzle inspection device 170 of the first embodiment will be described with reference to Figure 5. The suction nozzle inspection device 170 is a device that visually inspects the internal condition of the suction nozzle 60 using images captured by the camera 182, or displays inspection images. In addition to the nozzle holding unit 128 described above, the suction nozzle inspection device 170 consists of a first light 178, a camera 182, and an image processing unit 184, etc.

[0042] As shown in Figure 5, the nozzle holding section 128 has a three-part chuck 172 on its lower side. The three chucks 172 grip the body cylinder 61 of the suction nozzle 60 by moving closer together, and release the gripped suction nozzle 60 by moving further apart from each other. The three chucks 172 have a structure that ensures airtightness and watertightness by moving closer together. Note that the number of chucks 172 is not limited to three. A communication passage 174 is formed in the nozzle holding section 128. The communication passage 174 consists of a straight communication passage 175 and a linking passage 176. The straight communication passage 175 extends vertically and communicates with the base end 67 side of the air passage 70 of the suction nozzle 60 held by the chuck 172. The linking passage 176 extends horizontally and connects the air supply device 130 and the straight communication passage 175.

[0043] The connecting passage 174 allows air to be supplied from the air supply device 130 to the suction nozzle 60. Therefore, even if the connecting passage 174 is used instead of the joint 146, it is possible to perform an air flow rate test by circulating air through the suction nozzle 60 to check its performance. The connecting passage 174 may also be used for drying the suction nozzle 60 with gas after cleaning, or for cleaning the inside of the suction nozzle 60 by blowing gas through it. Furthermore, the connecting passage 174 may be a passage through which a liquid such as cleaning water flows, and may be used for cleaning the inside of the suction nozzle 60 with liquid.

[0044] The first light 178 is positioned above the nozzle holding portion 128, on the extension of the straight communication channel 175 extending upward. The first light 178 emits illumination light L1 downward. The illumination light L1 passes through the straight communication channel 175 into the interior of the suction nozzle 60 and does not leak to the outside. In other words, the first light 178 is positioned close to the held suction nozzle 60 and does not allow the illumination light L1 to leak to the outside. The first light 178 can be, for example, a surface light emitter, and is not limited to this. A convex lens 180 is provided on the lower side of the first light 178. The convex lens 180 has a dimming function and also plays a role in maintaining the airtightness of the communication channel 174.

[0045] Furthermore, the first light 178 may be miniaturized and placed inside the straight-line communication channel 175. Also, the convex lens 180 may be omitted, or a cover glass to maintain airtightness may be used instead of the convex lens 180. Moreover, the first light 178 can be placed in a position where direct light cannot be emitted except above the suction nozzle 60 held by the chuck 172. In other words, by using optical components such as prisms or mirrors, the illumination light L1 emitted from the first light 178 can be refracted or reflected to reach the suction nozzle 60.

[0046] As shown in Figure 4, camera 182 is positioned next to the load cell 142 on the upper surface of frame 102, with its optical axis facing upward. A digital imaging device having an image sensor such as a CCD or CMOS is used as camera 182. Camera 182 requires an imaging field of view that can capture at least the tip 68 of the suction nozzle 60. Camera 182 may be a monochrome camera that detects only brightness (luminance) without detecting color. There are no special restrictions on the number of pixels or brightness levels of camera 182. When the suction nozzle inspection device 170 is operating, the optical axis of camera 182 is directed towards the opening 71 of the suction nozzle 60.

[0047] The first light 178 and camera 182 operate according to imaging commands from the control device 160. When the first light 178 is illuminating with illumination light L1, camera 182 images the tip 68 and interior of the suction nozzle 60 to acquire a first image. At this time, a portion of the illumination light L1 passes through the straight communication channel 175, enters the interior of the suction nozzle 60 through the base end 67, and then passes through the opening 71 of the tip 68 to reach camera 182. Camera 182 transfers the acquired first image to image processing unit 184.

[0048] The image processing unit 184 is configured by the software of the control device 160. The image processing unit 184 performs image processing on the first image to determine whether the condition inside the suction nozzle 60 is good or bad. Specifically, the image processing unit 184 can determine the condition of foreign matter accumulation inside the suction nozzle 60 and the condition of narrowing deformation of the suction nozzle 60. The image processing unit 184 may also be located inside the camera 182 and transmit the determination results to the control device 160. Alternatively, the image processing unit 184 may simply display the first image. In this case, the determination of whether the condition is good or bad is left to the operator who visually inspects the first image.

[0049] The image processing unit 184, which determines whether the image is good or bad, calculates the effective aperture area occupied by the illumination light L1 that has passed through the inside of the suction nozzle 60 at the opening 71, based on the brightness of each of the multiple pixels contained in the first image. Specifically, the image processing unit 184 calculates the effective aperture area corresponding to the number of pixels whose brightness is above a predetermined value, and then compares the effective aperture area with a predetermined area set in advance to determine whether the image is good or bad. The first image, the processed image, the calculation contents, and the judgment result are displayed on the touch panel 86 or other display device as appropriate. The area corresponding to one pixel is automatically determined from the known separation distance between the tip 68 of the suction nozzle 60 and the camera 182.

[0050] As an example, let's consider a case where brightness is represented in 256 steps, from 0 representing pure black to 255 representing pure white. In this case, for example, a predetermined value is set to 128. Then, pixels with a brightness of 128 or higher become pixels that the illumination light L1 reaches and become part of the effective aperture area. On the other hand, pixels with a brightness of less than 128 are pixels that image areas other than the aperture 71, or pixels that image the aperture 71 but where the illumination light L1 is blocked due to the presence of foreign objects or narrowing deformation, and are excluded from the effective aperture area.

[0051] Furthermore, the predetermined area is set as the minimum opening area multiplied by an allowable reduction rate of less than 1. For example, 0.9 is adopted as the allowable reduction rate. In other words, if an effective opening area of ​​90% or more of the minimum opening area is secured, performance degradation due to the accumulation of foreign matter is not considered a problem, and the adsorption nozzle 60 is judged to be good. Note that the number of brightness levels, predetermined value, and predetermined area may be values ​​other than those exemplified.

[0052] 4. Operation of the suction nozzle inspection device 170 Next, the operation of the suction nozzle inspection device 170 will be explained with reference to Figures 6 to 8. In the operation of the suction nozzle inspection device 170, first, the nozzle holding unit 128 and the suction nozzle 60 are driven by the head drive mechanism 122 to move directly above the camera 182. This establishes the positional relationship shown in Figure 5. Next, the first light 178 and the camera 182 proceed with imaging preparation according to the imaging command from the control device 160, and then perform imaging with illumination light L1 irradiated. The camera 182 acquires the first image GB1 illustrated in Figure 6 and transfers it to the image processing unit 184.

[0053] The image processing unit 184 compares the brightness of each pixel in the first image GB1 with a predetermined value to distinguish between bright areas that are brighter than the predetermined value and dark areas that are darker than the predetermined value. In Figure 6, bright areas are shown with a white background, and dark areas are shown with hatching (the same applies to Figure 8). Bright areas indicate the effective aperture area reached by the illumination light L1. If the inside of the suction nozzle 60 is normal, the bright areas will be approximately equal to the actual aperture shape and aperture area of ​​the aperture 71. In other words, the image processing unit 184 can recognize the actual aperture shape and aperture area of ​​the aperture 71. On the other hand, the image processing unit 184 cannot recognize the external shape of the tip 68, which is shown by a dashed line in Figure 6.

[0054] Here, as shown in Figure 7, foreign matter X1 may accumulate inside the suction nozzle 60. Foreign matter X1 may include airborne dust that enters when the cover 35 is opened, torn pieces of carrier tape used by the tape feeder 72, or fine fragments of damaged parts. If foreign matter X1 is present, the camera 182 acquires the first image GB2 as illustrated in Figure 8 and transmits it to the image processing unit 184.

[0055] In the first image GB2, the foreign object X1, the tip 68 of the suction nozzle 60, and the area outside the tip 68 are all dark regions and indistinguishable. Nevertheless, because part of the illumination light L1 is blocked by the foreign object X1, the bright region is reduced to about half compared to the first image GB1. In other words, the passage of illumination light L1 changes depending on the presence of the foreign object X1, and the first image GB1 changes to the first image GB2. The effective aperture area indicated by the bright region is smaller than the predetermined area. Therefore, the image processing unit 184 determines that the suction nozzle 60 is defective. The suction nozzle 60 is discarded or undergoes maintenance using the cleaning device 98 and drying device 100.

[0056] Furthermore, as can be seen from the image processing and quality determination methods described above, the suction nozzle inspection device 170 can determine defects in the narrowing deformation of the suction nozzle 60. It should be noted that the image processing unit 184 may simply display the first images (GB1, GB2) without calculating the effective aperture area. In this case, the operator can visually inspect the first images (GB1, GB2) and appropriately determine the quality of the suction nozzle 60.

[0057] In the suction nozzle inspection device 170 of the first embodiment, when the first light 178 irradiates illumination light L1 from the base end 67 side of the suction nozzle 60 toward the interior, the camera 182 captures images of the interior (air passage 70) from the tip end 68 side and acquires first images (GB1, GB2). At this time, the passage of illumination light L1 changes from normal according to foreign matter X1 accumulated inside the suction nozzle 60 or narrowing deformation of the suction nozzle 60, and this is reflected in the first images (GB1, GB2). Therefore, it is possible to acquire images that can determine the accumulation of foreign matter inside the suction nozzle 60 and whether or not there is narrowing deformation of the suction nozzle 60.

[0058] Furthermore, by including an image processing unit 184, it becomes possible to automatically determine the quality of the suction nozzle 60 through a visual inspection that distinguishes between bright and dark areas. In addition, while the nozzle holding unit 128 holds the suction nozzle 60, it is possible to perform air flow rate inspection using the communication channel 174, as well as drying and cleaning by air blowing, and to inspect the quality of the internal condition of the suction nozzle 60. In contrast, in the conventional technology, it was necessary to move the suction nozzle 60 to the lower side of the communication channel to perform air flow rate inspection, drying and cleaning by air blowing, etc., and then move the suction nozzle 60 to the upper side of the camera to inspect the internal condition. Therefore, according to the first embodiment, the maintenance time required for inspection and cleaning is shortened compared to the conventional technology.

[0059] 5. Configuration of the suction nozzle inspection device 200 of the second embodiment Next, the configuration of the suction nozzle inspection apparatus 200 of the second embodiment will be described with reference to Figure 9. In the second embodiment, compared to the first embodiment, a side light 202 and an incident light 204 are added. The side light 202 and the incident light 204 correspond to second lights that irradiate illumination light (L2, L3) toward the tip 68 of the suction nozzle 60. In addition, a second image processing unit 210 is provided in place of the image processing unit 184.

[0060] Multiple side-emitting lights 202 are provided at peripheral positions away from the optical axis above the camera 182. The side-emitting lights 202 may be surface-emitting bodies similar to the first light 178, or they may be composed of multiple light sources such as LEDs. The side-emitting lights 202 irradiate illumination light L2 toward the tip 68 of the suction nozzle 60, which is located diagonally above. The illumination light L2 is incident on the tip 68 of the suction nozzle 60 from a diagonally downward direction.

[0061] The reflected light 204 is provided in combination with a half mirror 206. The half mirror 206 is positioned at a 45-degree inclination angle on the optical axis of the camera 182. The reflected light 204 is positioned at the same height as the half mirror 206, but at a peripheral position away from the optical axis of the camera 182. The reflected light 204 emits illumination light L3 horizontally towards the half mirror 206. The illumination light L3 is reflected by the half mirror 206 and directed upward, entering the tip 68 of the suction nozzle 60 from directly below.

[0062] A portion of the illumination light L2 and illumination light L3 is reflected by the tip 68 of the suction nozzle 60 and becomes reflected light R4 that travels downward. The reflected light R4 passes through the half mirror 206 and reaches the camera 182. Similarly, the illumination light L1 that is irradiated from the first light 178 and passes through the inside of the suction nozzle 60 passes through the half mirror 206 and reaches the camera 182. Note that either the side light 202 or the incident light 204 may be omitted.

[0063] Camera 182 acquires a second image by imaging the tip 68 of the suction nozzle 60 when the side light 202 and incident light 204 are emitting illumination light (L2, L3) and the first light 178 is not emitting illumination light L1. Furthermore, when the first light 178 is emitting illumination light L1 and the side light 202 and incident light 204 are not emitting illumination light (L2, L3), camera 182 acquires a first image by imaging the interior from the tip 68 side. Camera 182 transfers the acquired second image and first image to the dual image processing unit 210. The first image acquired in the second embodiment is identical to the first image acquired in the first embodiment because the illumination conditions are the same as in the first embodiment.

[0064] The dual image processing unit 210 is configured by the software of the control device 160. The dual image processing unit 210 performs image processing on the second image and the first image to determine whether the condition inside the suction nozzle 60 is good or bad. Alternatively, the dual image processing unit 210 may be located inside the camera 182 and transmit the determination results to the control device 160. In addition, the dual image processing unit 210 may simply display the second image, the first image, and the processed image after image processing. In this case, the determination of whether the condition is good or bad is left to the operator who visually inspects the images.

[0065] The dual image processing unit 210 consists of a first calculation unit 212, a second calculation unit 214, an area determination unit 216, and an image synthesis unit 220. The first calculation unit 212 operates automatically when the second image is transferred. Based on the brightness of each of the multiple pixels included in the second image, the first calculation unit 212 calculates the outer shape of the tip 68 of the suction nozzle 60 and determines whether the appearance is good or bad. Furthermore, based on the brightness of each of the multiple pixels included in the second image, the first calculation unit 212 calculates the actual opening area of ​​the opening 71 of the suction nozzle 60.

[0066] The second calculation unit 214 operates automatically when the first image is transferred. Based on the brightness of each of the multiple pixels included in the first image, the second calculation unit 214 calculates the effective aperture area occupied by the illumination light L1 that has passed inside the adsorption nozzle 60 at the opening 71. Specifically, the second calculation unit 214 performs the same calculation processing as the image processing unit 184 of the first embodiment.

[0067] The area determination unit 216 operates automatically after the calculation processing of the first calculation unit 212 and the second calculation unit 214 is completed. Based on the actual opening area calculated by the first calculation unit 212 and the effective opening area calculated by the second calculation unit 214, the area determination unit 216 determines whether the condition inside the suction nozzle is good or bad.

[0068] The image synthesis unit 220 operates according to operation commands from the operator. For example, if the operator wants to check the status of a suction nozzle 60 that has been determined to be defective, or if the determination result of the area determination unit 216 is questionable, the operator inputs an operation command to the touch panel 86 to operate the image synthesis unit 220. Upon receiving the operation command, the image synthesis unit 220 creates a composite image by combining the second image and the first image using brightness-prioritizing processing. Brightness-prioritizing processing is a process that prioritizes the pixel with higher brightness among multiple pairs of pixels that are included in the second image and the first image and correspond to each other in terms of position. The functions of the dual image processing unit 210 (first calculation unit 212, second calculation unit 214, area determination unit 216, image synthesis unit 220) will be described in more detail in the following operation description.

[0069] 6. Operation of the suction nozzle inspection device 200 Next, the operation of the suction nozzle inspection device 200 will be explained with reference to Figures 10 to 13. In the operation of the suction nozzle inspection device 200, first, the nozzle holding unit 128 and the suction nozzle 60 are driven by the head drive mechanism 122 to move directly above the camera 182. This establishes the positional relationship shown in Figure 9. After this, the operation flow shown in Figure 10 is executed.

[0070] In step S1 of Figure 10, the side-emitting light 202, the incident light 204, and the camera 182 prepare for imaging according to the imaging command from the control device 160, and then perform imaging with illumination light L2 and illumination light L3. The camera 182 acquires the second image GF1 illustrated in Figure 11 and transmits it to the second image processing unit 210.

[0071] In the next step S2, the first calculation unit 212 of the second image processing unit 210 determines whether the appearance of the suction nozzle 60 is good or bad. Specifically, the first calculation unit 212 calculates a ring-shaped bright region in the second image GF1 consisting of multiple pixels whose brightness is equal to or greater than a first predetermined value. The first predetermined value may be the same as or different from the predetermined value in the first embodiment. In Figure 11, the bright region is shown with a white background, and the dark region is shown with hatching (the same applies to Figure 12). The bright region refers to the plane of the tip 68 of the suction nozzle 60 that reflects illumination light (L2, L3) to become reflected light R4. The dark region refers to the part of the suction nozzle 60 outside the tip 68 where the reflected light R4 is reduced, and the part inside the opening 71.

[0072] Therefore, the outer boundary line of the ring-shaped bright area coincides with the outline 77 of the tip 68. The first calculation unit 212 determines that the shape is good if the difference between the shape of the determined outline 77 and the predetermined outline shape set in advance matches within the range of tolerance. On the other hand, the first calculation unit 212 determines that the shape is defective, such as deformation of the tip 68, if the difference between the shape of the outline 77 and the predetermined outline shape exceeds the range of tolerance.

[0073] In the next step S3, the first calculation unit 212 calculates the actual aperture area of ​​the opening 71 of the suction nozzle 60. More specifically, the inner boundary line of the ring-shaped bright region coincides with the contour line 78 that represents the actual aperture shape of the opening 71. Therefore, the first calculation unit 212 can calculate the actual aperture area based on the number of pixels in the dark region located inside the contour line 78. At this time, since the entire opening 71 is a dark region, the conditions inside the suction nozzle 60 do not affect the calculation of the actual aperture area.

[0074] In the next step S4, the first light 178 and camera 182 proceed with imaging preparation according to the imaging command from the control device 160, and then perform imaging with illumination light L1. Camera 182 acquires the first image GB3 illustrated in Figure 12 and transfers it to the second image processing unit 210. This first image GB3 is an image when foreign matter X2 is trapped inside the suction nozzle 60. The first image when the inside of the suction nozzle 60 is normal has already been shown in Figure 6.

[0075] In the next step S5, the second calculation unit 214 performs image processing on the first image GB3 to calculate the effective aperture area of ​​the opening 71 of the suction nozzle 60. The image processing and calculation methods are the same as in the first embodiment. However, the second predetermined value for distinguishing between light and dark regions is preferably the same as the predetermined value in the first embodiment, and may differ from the first predetermined value described above. In the first image GB3, a portion of the illumination light L1 is blocked by foreign matter X2 adhering in an annular shape to the inner circumferential surface of the suction tube 66. The second calculation unit 214 cannot distinguish between the flat surface of the tip 68 of the suction nozzle 60 and the foreign matter X2, but it can calculate the effective aperture area reached by the illumination light L1.

[0076] In the next step S6, the area determination unit 216 determines whether the condition inside the suction nozzle 60 is good or bad. Specifically, the area determination unit 216 makes a determination by comparing the effective aperture ratio, which is obtained by dividing the effective aperture area by the actual aperture area, with a predetermined aperture ratio set in advance. For example, 0.9 is used as the predetermined aperture ratio. In other words, if an effective aperture area of ​​90% or more of the actual aperture area is secured, it is considered that there is no problem with performance degradation due to the accumulation of foreign matter X2, and the suction nozzle 60 is determined to be good. According to this, the dual image processing unit 210 can make an appropriate determination for multiple suction nozzles 60 whose actual aperture areas vary using the predetermined aperture ratio.

[0077] Although omitted in the operation flow, the image synthesis unit 220 operates according to the operation command from the operator. The image synthesis unit 220 creates a composite image GM1, as illustrated in Figure 13, by brightness-prioritizing processing applied to the second image GF1 and the first image GB3. In the composite image GM1, the bright area of ​​the second image GF1 is prioritized for the plane of the tip 68 of the suction nozzle 60. Also, the bright area of ​​the first image GB3 is prioritized for the opening 71 of the suction nozzle 60. As a result, the foreign matter X2, shown in the dark area, is clearly distinguishable from the tip 68 of the suction nozzle 60 and the internal space, shown in the bright area. Therefore, the operator can visually confirm the detailed situation of the foreign matter X2 accumulating inside the suction nozzle 60.

[0078] According to the second embodiment of the suction nozzle inspection device 200, similar to the first embodiment, it is possible to acquire an image that allows for the determination of the quality of the internal condition of the suction nozzle 60. Furthermore, by including a first calculation unit 212, a second calculation unit 214, and an area determination unit 216, it becomes possible to make appropriate quality determinations for multiple suction nozzles 60 whose actual opening areas vary. In addition, by including an image synthesis unit 220, the detailed internal condition of the suction nozzle 60, such as the accumulation of foreign matter X2, is clearly displayed, allowing the operator to easily visually inspect and make appropriate quality determinations.

[0079] In addition, the nozzle holding unit 128 can inspect both the external and internal condition of the suction nozzle 60 while it is still holding the suction nozzle 60. In contrast, in the conventional technology, it was necessary to inspect the external appearance of the suction nozzle 60 by imaging it with the first camera, then move the suction nozzle 60 so that the internal condition could be imaged, and then image it with the second camera. Therefore, according to the second embodiment, the inspection time is shortened and the increase in equipment costs is suppressed compared to the conventional technology.

[0080] 7. Overall operation of the suction nozzle management device 80 Next, the overall operation of the suction nozzle management device 80 will be explained with reference to the operation flow in Figure 14. The suction nozzle management device 80 is assumed to be composed of the suction nozzle inspection device 200 of the second embodiment. The suction nozzle management device 80 allows for setting of the operation mode. Specifically, the setting can be changed between normal mode and inspection mode by setting operations using the touch panel 86, etc. The washing device 98 and the drying device 100 operate in normal mode but do not operate in inspection mode. Prior to the execution of the operation flow, the door 82 is opened by the operator and the nozzle tray 76 containing multiple suction nozzles 60 is brought into the fixed stage 131.

[0081] In step S11 of Figure 14, the control device 160 checks the operating mode and determines the next step to be performed. In step S12, which is performed in normal mode, the control device 160 performs cleaning and drying with the cleaning device 98, and after completion, proceeds to step S13 of the operation flow. In inspection mode, the control device 160 skips step S12 and immediately proceeds to step S13 of the operation flow.

[0082] In step S13, the control device 160 performs an air flow rate test using the air supply device 130 and joint 146, or an air flow rate test using the air supply device 130 and communication channel 174. In the next step S14, the control device 160 performs a load test using the load cell 142. If step S12 has already been performed in normal mode, final drying using the drying device 100 is performed before the load test. In the next step S15, the control device 160 investigates the type of suction nozzle 60 and determines the next step to be performed.

[0083] In step S16, when the suction nozzle 60 is small or medium-sized, the control device 160 operates the suction nozzle inspection device 200 and performs a pass / fail judgment using the second image processing unit 210. For large suction nozzles 60, the pass / fail judgment of the internal condition can be performed by the air flow rate inspection in step S13. In this case, the control device 160 proceeds directly from step S15 to step S18. In addition, for some special suction nozzles 60, such as suction nozzles 60 in which the air passage 70 widens downward in a trumpet shape, the internal condition (foreign matter, etc.) is captured in the second image. In this case, in step S17, the control device 160 operates the suction nozzle inspection device 200, acquires only the second image and performs image processing (second image processing) to determine the pass / fail judgment of the internal condition of the suction nozzle 60. After executing step S16 or step S17, the control device 160 proceeds to step S18.

[0084] In step S18, the control device 160 checks the inspection results for each of the air flow rate test, load test, and visual inspection of the internal condition. If all inspection results are good, in step S19 the control device 160 returns the suction nozzle 60. If one or more inspection results are poor, in step S20 the control device 160 disposes of the suction nozzle 60. As mentioned above, the control device 160 may not immediately dispose of a suction nozzle 60 that has been determined to be poor, but may repeat the processes from step S11 to step S18 within a specified number of times. After executing step S19 or step S20, the control device 160 proceeds to step S21 in the operation flow.

[0085] In step S21, the history management device 162 within the control device 160 stores and manages the history of the execution of steps S12, S13, S14, S16, and S17 in the memory 164. In the next step S22, the control device 160 determines whether the processing of all suction nozzles 60 housed in the nozzle tray 76 has been completed. If not, the control device 160 repeats the operation flow from step S11 for the next suction nozzle 60. The operation flow ends when the processing of all suction nozzles 60 has been completed. As described above, the suction nozzle management device 80 can perform cleaning and drying of multiple suction nozzles 60, perform multiple inspection items, and manage their history.

[0086] 8. Applications and Variations of Embodiments In the first embodiment, the nozzle holding unit 128, the air supply device 130, and the first light 178 may be fixed, and the camera 182 may move to perform optical axis alignment and distance adjustment. In the second embodiment, the image synthesis unit 220 creates a composite image GM1 that retains the original multi-stage brightness, but it may also create a composite image consisting of binarized light and dark regions. Alternatively, a configuration in which the image synthesis unit 220 is omitted may be adopted. Conversely, the first calculation unit 212, the second calculation unit 214, and the area determination unit 216 may be omitted, and the image synthesis unit 220 may operate automatically. In this configuration, the operator determines the quality of the internal condition of the suction nozzle 60 (such as the accumulation of foreign matter X2) by visual inspection of the composite image GM1.

[0087] Furthermore, the suction nozzle management device 80 may be configured to be an inspection device that performs multiple inspection items by omitting the cleaning device 98 and the drying device 100. Also, the suction nozzle management device 80 may be configured in a simpler form with fewer inspection items by omitting either the load cell 142 or the joint 146, or in a configuration that omits the history management device 162. The suction nozzle inspection devices (170, 200) and the suction nozzle management device 80 of the first and second embodiments can be applied and modified in various other ways. [Explanation of Symbols]

[0088] 14: Part mounting machine 60: Suction nozzle 61: Body cylinder 66: Suction tube 67: Base end 68: Tip 70: Air passage 71: Opening 77: Outline 78: Contour 80: Suction nozzle management device 94: Transfer device 96: Different type inspection device 130: Air supply device 160: Control device 162: History management device 170: Suction nozzle inspection device 172: Chuck 174: Communication passage 178: First light 182: Camera 184: Image processing unit 200: Suction nozzle inspection device 202: Side light 204: Incident light 206: Half mirror 210: Second image processing unit 212: First calculation unit 214: Second calculation unit 216: Area determination unit 220: Image synthesis unit GB1, GB2, GB3: First image GF1: Second image GM1: Composite image L1, L2, L3: Illumination light R4: Reflected light X1, X2: Foreign objects

Claims

1. A nozzle holding section that detachably holds a suction nozzle that is supplied with negative pressure air from the base end to the air passage and which attracts parts at the opening on the tip end, A first light emits illumination light from the base end side of the held suction nozzle toward the interior, A camera that captures the interior from the tip side and acquires a first image when the first light is irradiating the illumination light, The system includes a second light that illuminates the tip of the suction nozzle, The aforementioned camera, When the second light emits the illumination light and the first light does not emit the illumination light, the tip is imaged to acquire a second image, and further, When the first light emits the illumination light and the second light does not emit the illumination light, the interior is imaged from the tip side to acquire a first image. Furthermore, the system includes a second image processing unit that performs image processing on the second image and the first image to determine or display the state of foreign matter that may remain inside the adsorption nozzle. Adsorption nozzle inspection device.

2. The suction nozzle inspection apparatus according to claim 1, wherein the first light is positioned in close proximity to the held suction nozzle and prevents the illumination light from leaking to the outside.

3. The adsorption nozzle inspection apparatus according to claim 1 or 2, further comprising a communication channel communicating with the base end side of the held adsorption nozzle.

4. The suction nozzle inspection apparatus according to claim 1 or 2, wherein the nozzle holding portion has a plurality of chucks for gripping the suction nozzle.

5. The first light is positioned in an airtight manner inside the communication channel that is in a straight line with the air passage, or on an extension of the communication channel. The suction nozzle inspection apparatus according to claim 3.

6. The suction nozzle inspection apparatus according to claim 1 or 2, further comprising an image processing unit that performs image processing on the first image to determine or display the state of foreign matter accumulation that may accumulate inside the suction nozzle.

7. The adsorption nozzle inspection apparatus according to claim 3, wherein the communication channel is used for one or more of the following purposes: cleaning the inside of the adsorption nozzle with a liquid; drying it with a gas after cleaning; blowing the inside of the adsorption nozzle with a gas; and inspecting the performance of the adsorption nozzle by circulating a gas through it.

8. A suction nozzle inspection device comprising: a nozzle holding unit that detachably holds a suction nozzle to which negative pressure air is supplied from the base end to an air passage and which adsorbs a part at the opening on the tip end; a first light that irradiates illumination light from the base end of the held suction nozzle toward the interior; and a camera that, when the first light is irradiating the illumination light, takes an image of the interior from the tip end and acquires a first image, A cleaning device for cleaning the inside of the adsorption nozzle with a liquid or blowing it with a gas, wherein the device is capable of switching between a normal mode and an inspection mode, and comprises a cleaning device that operates in the normal mode but not in the inspection mode, The suction nozzle inspection device inspects the suction nozzle after it has been cleaned by the cleaning device when the normal mode is set, and inspects the suction nozzle that has not been cleaned when the inspection mode is set. Adsorption nozzle management device.

9. A suction nozzle inspection device comprising: a nozzle holding unit that detachably holds a suction nozzle to which negative pressure air is supplied from the base end to an air passage and which adsorbs a part at an opening on the tip end; a first light that irradiates illumination light from the base end of the held suction nozzle toward the interior; and a camera that, when the first light is irradiating the interior light, takes an image of the interior from the tip end and acquires a first image; The system comprises a heterogeneous inspection device that performs different inspection items from the aforementioned suction nozzle inspection device, Depending on the type of adsorption nozzle, whether or not at least one of the adsorption nozzle inspection device and the heterogeneity inspection device operates is changed. Adsorption nozzle management device.

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