Top-illuminated X-ray fluorescence analyzer and top-illuminated X-ray fluorescence analysis system

Abstract

The present invention provides a top-illumination type X-ray fluorescence analyzer in which a sample holder loaded with a sample can be directly picked up by a holder transporter within the loading machine. [Solution] An overhead-irradiation type X-ray fluorescence analyzer comprising: a holder transporter that lifts a sample holder having a tray, a frame, and a biasing member that biases the tray upward and transports it to a preparation position; a holder receiver provided within the transport range of the holder transporter; a sample moving mechanism that moves a sample transported by the sample transporter, which extends between the outside and inside of the transport range of the holder transporter, onto the tray of a sample holder placed on the holder receiver; and a pressing mechanism having an arm pivotally supported so as to be rotatable between a pressing position that pushes the tray downward and a retracted position that avoids interference with the holder transporter, wherein the sample moving mechanism moves the sample onto the tray when the arm is in the pressing position, and the holder transporter lifts the sample holder upward when the arm is in the retracted position.

Description

Technical Field

[0001] The present invention relates to an upper irradiation type X-ray fluorescence analyzer and an upper irradiation type X-ray fluorescence analysis system.

Background Art

[0002] As an apparatus for analyzing elements contained in a sample, an X-ray fluorescence analyzer is known. Some X-ray fluorescence analyzers are equipped with a holder transporter that transports a sample holder placed on a tray to a preparation position. Generally, the holder transporter descends from directly above the sample holder toward the sample holder and grips the sample holder by sandwiching or adsorbing the sample holder. There is also an X-ray fluorescence analyzer that is used together with a sample transporter that transports a sample to near the tray.

[0003] By installing the holder transporter and the sample transporter together, it becomes possible to transport a sample located at a location away from the X-ray fluorescence analyzer to the X-ray fluorescence analyzer and analyze it without the user's hands. In this case, a loader is provided for loading the sample transported by the sample transporter into the sample holder.

[0004] As a sample holder into which a sample can be loaded by a loader, a sample holder provided with a tray in which a sample is placed and a biasing member inside a cylindrical frame is known. By the biasing member biasing the tray from the lower part to the upper part of the frame, the sample is arranged so that the surface of the sample is located at the X-ray irradiation position by the upper irradiation type X-ray fluorescence analyzer.

[0005] Conventional loaders are provided with a pressing mechanism for pressing down the tray from directly above the sample holder toward the lower part of the frame when loading a sample, and an extrusion mechanism for extruding the sample from the sample transporter onto the tray while the tray is pressed down. Thereby, the sample can be loaded into the sample holder at the loading position in the loader.

[0006] Here, the holder transporter is a device that transports sample holders, which are originally placed on trays, to the preparation position. Therefore, its operation is limited to a certain transport range that includes the preparation position and the area where the trays are placed. For this reason, when a sample is loaded into a sample holder in the loading machine, the sample holder is transported from the loading position in the loading machine to the transport range of the holder transporter. After that, the holder transporter picks up the sample holder and transports it to the preparation position. [Overview of the project] [Problems that the invention aims to solve]

[0007] In the conventional X-ray fluorescence analyzer described above, the sample is loaded into the sample holder outside the transport range of the holder transporter. However, in order to make the device configuration simpler and more compact, it is conceivable to load the sample into the sample holder within the transport range of the holder transporter, and for the holder transporter to directly pick up the sample holder at the loaded position. In other words, it is conceivable to make the sample loading position by the loader and the sample holder pick-up position by the holder transporter the same. However, in conventional loaders, there is a problem in that when the holder transporter attempts to pick up the sample holder at the loaded position within the loader, the holder transporter and the pressing mechanism described above interfere with each other.

[0008] This disclosure has been made in view of the above-mentioned problems, and its purpose is to provide a top-illumination type X-ray fluorescence analyzer with a simple and compact configuration, in which a holder transporter can directly pick up a sample holder loaded with a sample inside the loading machine. [Means for solving the problem]

[0009] (1) An overhead-irradiated X-ray fluorescence analyzer according to one aspect of the present disclosure includes a holder transporter that lifts a sample holder, which has a tray on which a sample is placed, a frame in which the tray is positioned, and a biasing member that biases the tray upward inside the frame, and transports the sample holder upward to a preparation position; a holder receiver provided within the transport range of the holder transporter and on which the sample holder is positioned; and the sample, which is transported from the outside to the inside of the transport range by the sample transporter extending between the outside and inside of the transport range of the holder transporter, is placed in the holder receiver. The device comprises a sample moving mechanism for moving the sample holder onto the receiving tray, and a pressing mechanism having an arm pivotally supported so as to be rotatable between a pressing position in which the receiving tray of the sample holder, which is positioned on the holder receiver, is pushed downward inside the frame, and a retracted position to avoid interference with the holder transporter, wherein the sample moving mechanism moves the sample onto the receiving tray when the arm is in the pressing position, and the holder transporter picks up the sample holder when the arm is in the retracted position.

[0010] (2) In another embodiment of the present disclosure, the holder transporter transports the sample holder from the preparation position to the holder receiver when the arm is in the retracted position, and the sample moving mechanism moves the sample from the receiving tray onto the sample transporter when the arm is in the pressed position.

[0011] (3) In another aspect of the present disclosure, the top-illuminated X-ray fluorescence analyzer, the arm has a contact portion that contacts the receiving tray when in the pressed position, and the contact portion has a curved shape that bulges out toward the side that contacts the receiving tray.

[0012] (4) In another aspect of the present disclosure, the top-illuminated X-ray fluorescence analyzer is characterized in that the arm further has one end rotatably supported by an actuator and the other end having a base to which the contact portion is rotatably supported.

[0013] (5) In another aspect of the present disclosure, the top-illuminated X-ray fluorescence analyzer is characterized in that the contact portion includes a first contact portion and a second contact portion, the first contact portion and the second contact portion are provided in positions that clamp the sample holder when the arm is in the pressed position.

[0014] (6) In another aspect of the present disclosure, the top-illuminated X-ray fluorescence analyzer is characterized in that the sample transfer mechanism includes a first extrusion unit that pushes out the sample when it is moved from the sample transporter onto the tray, and a second extrusion unit that pushes out the sample when it is moved from the tray onto the sample transporter.

[0015] (7) A top-illumination type X-ray fluorescence analyzer according to another aspect of the present disclosure further comprises: a second holder transporter for transporting the sample holder positioned in the preparation position to a measurement chamber; an X-ray source for irradiating the sample placed on the sample holder in the measurement chamber with primary X-rays from above; and a detector for measuring the intensity of fluorescent X-rays emitted from the sample.

[0016] (8) An overhead irradiation type X-ray fluorescence analysis system according to one aspect of the present disclosure is characterized by including an overhead irradiation type X-ray fluorescence analysis apparatus as described in any of the above.

[0017] (9) A top-illumination X-ray fluorescence analysis system according to one aspect of the present disclosure is characterized in that the top-illumination X-ray fluorescence analysis system further includes the sample transporter. [Brief explanation of the drawing]

[0018] [Figure 1] This is a diagram showing a top-illumination type X-ray fluorescence analysis system. [Figure 2] This diagram shows the inside of a top-illumination X-ray fluorescence analyzer. [Figure 3] This figure shows the sample transporter, sample loader, and holder transporter. [Figure 4] This diagram shows the various parts of the sample loading machine. [Figure 5]It is a diagram showing an example of a sample holder. [Figure 6] It is a diagram for explaining the operation of the arm. [Figure 7] It is a schematic diagram showing the inside of the measurement chamber. [Figure 8] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 9] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 10] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 11] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 12] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 13] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 14] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 15] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 16] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 17] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 18] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 19] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 20] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 21] It is a diagram for explaining the operation of the upper surface irradiation type fluorescent X-ray analysis system. [Figure 22] It is a diagram for explaining a modified example of the arm.

Embodiments for Carrying Out the Invention

[0019] Hereinafter, preferred embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described with reference to the figures. Figure 1 is an overview view of the top-illumination type X-ray fluorescence analysis system 100. As shown in Figure 1, the top-illumination type X-ray fluorescence analysis system 100 includes a top-illumination type X-ray fluorescence analyzer 102 including a sample loader 106, and a sample transporter 104.

[0020] The top-illumination X-ray fluorescence analyzer 102 irradiates the sample with X-rays from above and analyzes the elements contained in the sample based on the fluorescent X-rays emitted from the sample. Details of the top-illumination X-ray fluorescence analyzer 102 will be described later. In the following, the top-illumination X-ray fluorescence analyzer 102 will also be referred to simply as the X-ray fluorescence analyzer 102.

[0021] The sample transporter 104 extends between the outside and inside of the transport range of the holder transporter 302 (described later) and transports the sample. Specifically, for example, the sample transporter 104 is a belt conveyor that transports the sample with the sample placed on top. The sample transporter 104 transports the sample between a location away from the X-ray fluorescence analyzer 102 and the vicinity of the sample loader 106 installed inside the housing of the X-ray fluorescence analyzer 102. For example, if the X-ray fluorescence analyzer 102 is installed in a silicon substrate manufacturing plant, the sample transporter 104 transports the silicon substrate between the silicon substrate mass production line and the vicinity of the sample loader 106 installed in the X-ray fluorescence analyzer 102. Note that the sample transporter 104 is not limited to a belt conveyor, but may be a roller conveyor or the like, as long as it has the function of transporting samples.

[0022] The sample loader 106 loads the sample, which has been transported by the sample transporter 104 to the transport range of the holder transporter 302, into the sample holder 502. The sample loader 106 also places the sample loaded in the sample holder 502 onto the sample transporter 104. Details of the sample loader 106 will be described later.

[0023] Figure 2 shows the interior of the top-illumination X-ray fluorescence analysis system 100. Figure 2 is a view from above of a horizontal cross-section of the housing of the top-illumination X-ray fluorescence analyzer 102, at a height where the entire sample loader 106 is visible. The sample loader 106, holder tray 108, holder transporter 302, and part of the sample transporter 104 are arranged inside the housing of the X-ray fluorescence analyzer 102. Note that the holder transporter 302 is located above the sample loader 106 and is not shown in Figure 2 (see Figure 3). The holder tray 108 is a tray on which multiple sample holders 502 are placed. The holder tray 108 is used to temporarily place the sample holders 502 when analyzing multiple samples consecutively.

[0024] Furthermore, a holder loading space 202, a measurement chamber 204, and a pre-exhaust chamber 206 are provided inside the housing of the X-ray fluorescence analyzer 102. The holder loading space 202 is a space located inside the transport range of the holder transporter 302.

[0025] The holder transporter 302 transports the sample holder 502 between the holder receiver 208 and the holder input space 202 of the sample loader 106. Specifically, for example, the holder transporter 302 has a moving mechanism (not shown) and a gripping mechanism 304. The moving mechanism moves in a horizontal plane within a predetermined transport range. The predetermined range includes the position of the holder receiver 208 and a preparation position. The moving mechanism also moves vertically at a position directly above the sample holder 502. The gripping mechanism 304 is composed of, for example, two openable and closable hook-shaped members (see Figure 8(b)) and grips the sample holder 502. The holder transporter 302 transports the sample holder 502 by moving the moving mechanism in a horizontal plane while the gripping mechanism 304 is gripping the sample holder 502. The horizontal plane refers to the plane parallel to the bottom plate portion 510 (described later) of the sample holder 502 when the sample holder 502 is positioned on the holder receiver 208 or the like. The vertical direction refers to the direction perpendicular to the horizontal plane. The gripping mechanism 304 may be composed of a member that adsorbs the sample holder 502, rather than a claw-shaped member that grips the sample holder 502 by clamping it.

[0026] The holder receiver 208 is located within the transport range of the holder transporter 302 and is the part where the sample holder 502 is placed. The holder receiver 208 is, for example, the part where the sample holder 502 of the holder rotation mechanism 404 (described later) is placed. The holder receiver 208 is also the position where the sample is loaded. If the holder rotation mechanism 404 is omitted, the holder receiver 208 may be the part of the base plate 402 (described later) to which the holder rotation mechanism 404 is attached.

[0027] Measurement chamber 204 is the space where the sample is irradiated with X-rays. The following explanation assumes that the inside of measurement chamber 204 is under vacuum, but it may also be under atmospheric pressure. Details of measurement chamber 204 will be described later.

[0028] The pre-exhaust chamber 206 is a space where the sample holder 502 is temporarily placed and is equipped with a vacuum pump and a leak valve (not shown). Specifically, for example, the pre-exhaust chamber 206 is a chamber for loading and unloading samples and is also called a load lock. The pre-exhaust chamber 206 is located adjacent to the holder loading space 202, and a vacuum shutter is located between the pre-exhaust chamber 206 and the holder loading space 202. This vacuum shutter is normally closed and is opened when transporting the sample holder 502 between the pre-exhaust chamber 206 and the holder loading space 202. The pre-exhaust chamber 206 is also located adjacent to the measurement chamber 204, and a vacuum shutter is located between the pre-exhaust chamber 206 and the measurement chamber 204. This vacuum shutter is normally closed and is opened when transporting a sample between the pre-exhaust chamber 206 and the measurement chamber 204. The leak valve is a valve that introduces air into the pre-exhaust chamber 206. The sample holder 502 is transported between the holder input space 202 and the measurement chamber 204 via the pre-evacuation chamber 206. When the sample holder 502 is transported between the holder input space 202 and the pre-evacuation chamber 206, the inside of the pre-evacuation chamber 206 is at atmospheric pressure, and the pre-evacuation chamber 206 and the measurement chamber 204 are separated. When the sample holder 502 is transported between the measurement chamber 204 and the pre-evacuation chamber 206, the inside of the pre-evacuation chamber 206 is under vacuum, and the pre-evacuation chamber 206 and the holder input space 202 are separated.

[0029] Figure 3 shows the sample transporter 104, the sample loader 106, and the holder transporter 302. As shown in Figure 3, the sample transporter 104 is positioned so that its end is adjacent to the holder receiver 208 provided on the sample loader 106. The arrow on the sample transporter 104 indicates the direction of movement of the sample when loading it. In Figures 1 to 3, the sample loader 106 is positioned along the housing end face (hereinafter referred to as housing end face A) which is on the opposite side of the measurement chamber 204 (lower side in Figure 2) with the holder tray 108 in between, and the sample transporter 104 is positioned to transport the sample to the sample loader 106 inside the housing through an opening provided on housing end face A. However, the path by which the sample transporter 104 transports the sample is not limited to this. In other words, the sample loader 106 may be positioned along the end face of the housing where the holder input space 202 is provided (the left end face of the housing shown in Figure 2, hereinafter referred to as housing end face B) or the opposite end face (the right end face of the housing shown in Figure 2, hereinafter referred to as housing end face C). In this case, the sample transporter 104 is positioned to transport the sample to the sample loader 106 inside the housing through an opening provided in housing end face B or housing end face C of the housing where the sample loader 106 is positioned. By changing the position of the sample transporter 104, it becomes possible to transport the sample into the housing from different directions.

[0030] The sample loader 106 loads the sample, which has been transported to its end, into the sample holder 502 located on the holder receiver 208. Here, the sample loader 106 is positioned so that its end is located near the holder receiver 208. After the analysis is complete, the sample loader 106 moves the sample from the sample holder 502 located on the holder receiver 208 to the sample transporter 104.

[0031] The holder transporter 302 lifts the sample holder 502 upwards and transports it to the preparation position. The preparation position may be any of the holder storage positions provided in the holder tray 108, the holder input space 202, and the pre-exhaust chamber 206, but the following explanation will assume that the preparation position is the holder storage position provided in the holder input space 202. After the analysis is completed, the holder transporter 302 lifts the sample holder 502 from the preparation position upwards and transports it to the holder receiver 208 of the sample loader 106.

[0032] Figure 4 shows the various parts of the sample loading machine 106. As shown in Figure 4, the sample loading machine 106 has a base plate 402, a holder rotation mechanism 404, a sample moving mechanism 406, and a pressing mechanism 408. The base plate 402, the holder rotation mechanism 404, the sample moving mechanism 406, and the pressing mechanism 408 are combined in the direction of the arrows shown in Figure 4 to form the sample loading machine 106 shown in Figure 3.

[0033] The base plate 402 is a base member to which the holder rotation mechanism 404, the pressing mechanism 408, and the sample moving mechanism 406 are attached, and which fixes the position of each mechanism. If the holder rotation mechanism 404 is omitted, the part of the base plate 402 to which the holder rotation mechanism 404 is attached functions as a holder support 208.

[0034] The holder rotation mechanism 404 holds the sample holder 502 and rotates it in a horizontal plane. Specifically, for example, the holder rotation mechanism 404 includes a base 410, a frame member 412, and a base actuator 414. The base 410 is a member attached to the base plate 402, on which the sample holder 502 shown in Figure 5 is placed. The frame member 412 is a flat plate-shaped member having a hole that matches the shape of the sample holder 502, and by placing the sample holder 502 in the hole, it has the function of preventing the sample holder 502 from moving in a horizontal plane. The base actuator 414 rotates the sample holder 502, which is placed in the hole of the frame member 412, in a horizontal plane by moving a belt (not shown). In a configuration in which the holder rotation mechanism 404 is not omitted, the base 410 functions as a holder receiver 208.

[0035] Here, an example of a sample holder 502 used in this embodiment will be described. Figures 5(a) and 5(b) show an example of a sample holder 502 used in this embodiment. Figure 5(a) shows the sample holder 502 without a sample loaded, and Figure 5(b) shows the sample holder 502 with a sample loaded. As shown in Figures 5(a) and 5(b), the sample holder 502 has a frame 504, a tray 506, and a biasing member 508.

[0036] The frame 504 has a receiving tray 506 positioned inside. Specifically, the frame 504 has a bottom plate portion 510, a mask portion 512, and a guide portion 514. The bottom plate portion 510 is a substantially disc-shaped member, but it may be any other shape as long as it is stably positioned in the holder receiver 208. The mask portion 512 is a disc-shaped member with approximately the same diameter as the bottom plate portion 510 and has a hole for irradiating X-rays from above. The guide portion 514 is a member that fixes the bottom plate portion 510 and the mask portion 512 while maintaining a predetermined distance. Two sets of guide portions 514 are provided along the outer edge of the bottom plate portion 510, with the center of the bottom plate portion 510 in between. One set of guide portions 514 consists of two columnar members that extend substantially perpendicularly from the surface of the bottom plate portion 510. The two sets of guide sections 514 have the function of maintaining a predetermined distance between the bottom plate section 510 and the mask section 512, and guiding the tray 506 so that it does not rotate in the horizontal plane.

[0037] The receiving tray 506 is a component on which the sample is placed. Specifically, for example, the receiving tray 506 is roughly disc-shaped, and the sample is placed on top of it. The receiving tray 506 is also positioned between the guide portions 514 provided on the frame 504 and has a protruding portion 516 that, in a plan view, protrudes outward from the mask plate of the frame 504. In this embodiment, the receiving tray 506 is provided at two locations on either side of the center of the disc-shaped receiving tray 506. The receiving tray 506 is positioned between the bottom plate portion 510 and the mask portion 512 such that the protruding portion 516 is sandwiched between the columnar members that constitute the guide portion 514.

[0038] The biasing member 508 biases the tray 506 upward inside the frame 504. Specifically, for example, the biasing member 508 is a helical spring and is positioned between the bottom plate 510 and the tray 506. The biasing member 508 biases the tray 506 from the bottom plate 510 toward the mask 512. As shown in Figure 5(a), when no sample is placed, the surface of the tray 506 is in contact with the back surface of the mask 512. As shown in Figure 5(b), when a sample is placed, a portion of the sample's surface is in contact with the back surface of the mask 512, and a portion of the sample's surface is exposed through the holes in the mask 512.

[0039] The pressing mechanism 408 includes an arm 416 and an actuator 418. The arm 416 is pivotally supported so as to be able to rotate between a pressing position and a retracted position. Specifically, the arm 416 is pivotally supported so as to be able to rotate between a pressing position, where it pushes down the tray 506 of the sample holder 502, which is placed on the holder receiver 208, inside the frame 504, and a retracted position, where it avoids interference with the holder transporter 302. For example, the arm 416 has an L-shape when viewed from the side. One end of the arm 416 is pivotally supported by the actuator 418, and the actuator 418 rotates the arm 416, causing the arm 416 to rotate between the pressing position and the retracted position. The arm 416 has a contact portion 420 (the other end) that contacts the receiving tray 506 when in the pressed position, and the contact portion 420 has a curved shape that bulges out on the side that contacts the receiving tray 506. The curved shape is, for example, an arc shape. The contact portion 420 includes a first contact portion 420A and a second contact portion 420B. The first contact portion 420A and the second contact portion 420B are positioned to clamp the sample holder 502 when the arm 416 is in the pressed position. The actuator 418 is, for example, a DC motor.

[0040] Figures 6(a), 6(b), and 6(c) are diagrams illustrating the operation of the arm 416. Figures 6(a) and 6(b) show the state in which the arm 416 is rotating from the retracted position to the pressed position, and Figure 6(c) shows the state in which the arm 416 is in the pressed position. Note that the state in which the arm 416 is in the retracted position is the state shown in Figure 3, in which the entire arm 416 is not in the area directly above the holder receiver 208.

[0041] When the arm 416, which is in the retracted position, rotates to the pressed position, as shown in Figure 6(a), first a part of the contact portion 420 (the left end of the curved contact portion 420 in the drawing) comes into contact with the protruding portion 516 of the receiving tray 506. Subsequently, when the arm 416 rotates clockwise in the drawing by the actuator 418, as shown in Figure 6(b), the contact portion 420 pushes down the protruding portion 516 of the receiving tray 506, causing the protruding portion 516 to move downward. As a result, the receiving tray 506 moves downward (towards the center of the frame 504 in Figure 6(b)). At this time, a part of the contact portion 420 (the central part of the curved contact portion 420 in the drawing) comes into contact with the protruding portion 516 of the receiving tray 506. Furthermore, when the arm 416 is rotated clockwise in the drawing by the actuator 418, the contact portion 420 pushes down the protrusion 516 of the receiving tray 506, as shown in Figure 6(c), causing the protrusion 516 to move downward. This moves the receiving tray 506 downward (to the bottom of the frame 504 in Figure 6(c)). At this time, a part of the contact portion 420 (the right end of the curved contact portion 420) comes into contact with the protrusion 516 of the receiving tray 506. As the receiving tray 506 is pushed down to near the bottom plate portion 510, a gap is created between the receiving tray 506 and the mask portion 512. The sample is placed on the receiving tray 506 through this gap.

[0042] As shown in Figures 6(a), 6(b), and 6(c), the position of the contact portion 420 that abuts the protruding portion 516 changes depending on the height of the receiving tray 506. The shape of the contact portion 420 may be straight when viewed from the side, but it is preferable that the contact portion 420 has a curved shape that bulges out on the side that abuts the receiving tray 506. If the shape of the contact portion 420 is straight when viewed from the side, the angle between the end face of the straight contact portion 420 and the surface of the bottom plate portion 510 changes depending on the height of the receiving tray 506. In this case, the receiving tray 506 may tilt along the end face of the contact portion 420, which may cause the position of the sample placed in the receiving tray 506 to shift. This problem becomes particularly noticeable when the sample loader 106 is made smaller in order to miniaturize the X-ray fluorescence analyzer 102, as it is necessary to shorten the length of the arm 416. However, because the contact portion 420 has a curved shape that bulges out on the side that contacts the receiving tray 506, the receiving tray 506 can be made horizontal regardless of its height.

[0043] The sample transfer mechanism 406 moves the sample, which is being transported from the outside to the inside of the transport range by the sample transporter 104 that extends between the outside and inside of the transport range of the holder transporter 302, onto the receiving tray 506 of the sample holder 502 located on the holder receiver 208. Specifically, for example, the sample transfer mechanism 406 has a first extrusion section 422 and a second extrusion section 424. The first extrusion section 422 extrudes the sample when moving it from the sample transporter 104 onto the receiving tray 506. The second extrusion section 424 extrudes the sample when moving it from the receiving tray 506 to the sample transporter 104. The first extrusion section 422 and the second extrusion section 424 have recesses formed in the parts that come into contact with the sample so that the sample can be extruded. Furthermore, the first extrusion section 422 and the second extrusion section 424 are positioned to match the height of the surface of the receiving tray 506 when the receiving tray 506 is in its lowest position towards the bottom plate 510, and the height of the surface of the belt of the sample transporter 104, so that the sample can be extruded. The sample moving mechanism 406 moves the sample from the sample transporter 104 onto the receiving tray 506 when the arm 416 is in the pressed position. The sample moving mechanism 406 also moves the sample from the receiving tray 506 onto the sample transporter 104 when the arm 416 is in the pressed position. In Figures 3 and 4, the first extrusion section 422 and the second extrusion section 424 are formed integrally, but the first extrusion section 422 and the second extrusion section 424 may be separate. If they are separate, the first extrusion section 422 and the second extrusion section 424 may operate independently.

[0044] Figure 7 is a schematic diagram showing the interior of the measurement chamber 204. The measurement chamber 204 is the chamber in which the sample is analyzed. Specifically, as shown in Figure 7, the measurement chamber 204 is equipped with a sample stage 702, an X-ray source 704, a spectrometer 706, and a detector 708.

[0045] The sample stage 702 is the stage on which the sample holder 502 is placed. The X-ray source 704 irradiates the sample placed on the sample holder 502 in the measurement chamber 204 with primary X-rays from above. The primary X-rays generated by the X-ray source 704 irradiate the surface of the sample exposed through the holes in the mask 512. The spectrometer 706 spectrally analyzes fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 708 is positioned where the fluorescent X-rays spectrally analyzed by the spectrometer 706 are incident. The detector 708 measures the intensity of the fluorescent X-rays emitted from the sample. The detector 708 is, for example, a proportional counter. The intensity of the fluorescent X-rays is obtained by a counter (not shown) counting the pulse signals output from the detector 708. The spectrometer 706 and detector 708 may be provided for each element to be analyzed, or a single set of spectrometer 706 and detector 708 may be rotated for measurement. When rotating a pair of spectroscopic elements 706 and detectors 708, a mechanism (goniometer) for rotating the spectroscopic elements 706 and detectors 708 is placed in the measurement chamber 204.

[0046] Next, the operation of the top-illumination type X-ray fluorescence analysis system 100 will be explained with reference to the drawings. Figures 8 to 15 show the steps from when the sample on the sample transporter 104 is transported to the measurement chamber 204. In Figures 8 to 15, an embodiment is shown in which the sample loader 106 is positioned along the housing end face C of the housing, and the sample is transported from the housing end face C to the inside of the housing.

[0047] First, the sample holder 502 without a sample is transported to the holder receiver 208 (Figure 8(a)). Specifically, for example, in the initial state, the sample holder 502 without a sample is placed in a predetermined position on the holder tray 108. The holder transporter 302 first moves to a position directly above the sample holder 502. Then, the holder transporter 302 descends towards the sample holder 502 (moves vertically downward) and grasps the sample holder 502 (Figure 8(b)). The holder transporter 302 then picks up the sample holder 502 while grasping it and moves to a position directly above the holder receiver 208. Furthermore, the holder transporter 302 descends to a height where the sample holder 502 is in contact with the holder receiver 208, releases the sample holder 502, and then rises. As a result, the sample holder 502 without a sample is placed on the holder receiver 208. Note that if, in the initial state, the sample holder 502 without a sample placed in it is positioned on the holder receiver 208, this step may be omitted.

[0048] Next, the holder rotation mechanism 404 rotates the sample holder 502 (Figure 9). Specifically, for example, the holder rotation mechanism 404 rotates the sample holder 502 so that the guide section 514 and the sample do not interfere with each other, by rotating the base actuator 414. As shown in Figure 9, if the belt of the sample transporter 104 extends in the vertical direction in the drawing, and the holder receiver 208 is located on the right side of the belt, the sample moves from left to right. In this case, the holder rotation mechanism 404 rotates the sample holder 502 so that the two sets of guide sections 514 are located on the upper and lower sides in the drawing. Known techniques may be used to control the rotation angle.

[0049] Next, the arm 416 rotates from the retracted position to the pressed position (Figures 10(a) to 10(c)). Specifically, for example, as shown in Figure 10(a), when the arm 416 is in the retracted position, the arm 416 is not in contact with the receiving tray 506 of the sample holder 502. At this time, since the receiving tray 506 is biased toward the mask portion 512, the surface of the receiving tray 506 and the back surface of the mask portion 512 are in contact. Then, as shown in Figure 10(b), when the arm 416 rotates from the retracted position to the pressed position, as shown in Figure 10(c), the contact portion 420 comes into contact with the protruding portion 516 of the receiving tray 506, and the receiving tray 506 is pushed downward. Note that Figures 10(a) and 10(c) are views of Figure 10(b) from the right side.

[0050] Next, the sample transfer mechanism 406 moves the first extrusion section 422 and the second extrusion section 424 so that the space between them is located above the sample transporter 104 (Figures 11(a) and 11(b)). Figure 11(a) is a schematic diagram showing the positional relationship between the sample transporter 104, the first extrusion section 422, and the second extrusion section 424. Figure 11(b) is an overhead view of the sample transporter 104 and the sample loader 106. When the sample holder 502 is transported (Figure 8(a)), the space between the first extrusion section 422 and the second extrusion section 424 is located above the holder receiver 208. As the first extrusion unit 422 and the second extrusion unit 424 move in the direction of the arrows in Figures 11(a) and 11(b), the space between the first extrusion unit 422 and the second extrusion unit 424 is positioned above the sample transporter 104.

[0051] Next, the sample transporter 104 transports the sample to the end of the sample loader 106 (near the holder receiver 208) (Figure 12). Specifically, for example, as shown in Figure 12, the sample transporter 104 transports the sample so that it is positioned between the first extrusion section 422 and the second extrusion section 424 by moving the sample in the direction of the arrow.

[0052] Next, the sample transfer mechanism 406 moves the sample onto the receiving tray 506 of the sample holder 502 (Figures 13(a) and 13(b)). Specifically, for example, as shown in Figures 13(a) and 13(b), the sample transfer mechanism 406 moves the first extrusion unit 422 and the second extrusion unit 424 so that the space between them is located above the receiving tray 506. At this time, the first extrusion unit 422 pushes the sample from the sample transporter 104 onto the receiving tray 506, thereby placing the sample on the receiving tray 506.

[0053] Next, the arm 416 rotates from the pressed position to the retracted position (Figures 14(a) and 14(b)). Specifically, for example, as shown in Figure 14(a), when the arm 416 rotates from the pressed position to the retracted position, as shown in Figure 14(b), the receiving tray 506 is biased toward the mask portion 512 by the biasing member 508. As a result, the surface of the sample comes into contact with the back surface of the mask portion 512.

[0054] Next, when the arm 416 is in the retracted position, the holder transporter 302 picks up the sample holder 502 and transports it to the preparation position (Figures 15(a) and 15(b)). Specifically, the arm 416 is rotated to the retracted position by the steps shown in Figure 14(a). Therefore, even when the holder transporter 302 descends towards the sample holder 502 (moves vertically downward), it does not interfere with the arm 416. The holder transporter 302 grasps the sample holder 502 and picks it up, similar to Figure 8(b). Furthermore, while grasping the sample holder 502, the holder transporter 302 moves in the horizontal plane and descends in the area directly above the holder input space 202. As a result, the sample holder 502 with the sample placed in it is positioned in the preparation position in the holder input space 202.

[0055] Furthermore, a second holder transfer device (not shown) transfers the sample holder 502, which is positioned in the preparation location, to the measurement chamber 204. Specifically, the second holder transfer device is, for example, a robotic arm. The second holder transfer device transfers the sample holder 502, which is positioned in the preparation location, to the measurement chamber 204 via the pre-exhaust chamber 206. Note that the second holder transfer device that transfers the sample holder 502 from the preparation location to the pre-exhaust chamber 206 and the second holder transfer device that transfers the sample holder 502 from the pre-exhaust chamber 206 to the measurement chamber 204 may each have an independent configuration. The sample is placed in the sample holder 502 that has been transferred to the measurement chamber 204. The sample is analyzed according to the configurations described in Figure 7.

[0056] Figures 16 to 21 illustrate the steps involved in transporting a sample from the measurement chamber 204 onto the sample transporter 104. First, after the measurement is complete, the second holder transporter transports the sample holder 502, which is located in the measurement chamber 204, to the preparation position. Furthermore, with the arm 416 in the retracted position, the holder transporter 302 picks up the sample holder 502 from the preparation position and transports it to the holder receiver 208 (Figure 16).

[0057] Next, the holder rotation mechanism 404 rotates the sample holder 502 (Figure 17). The steps in Figure 17 are the same as those in Figure 9. The holder rotation mechanism 404 rotates the sample holder 502 so that the two sets of guide sections 514 are positioned on the upper and lower sides of the drawing.

[0058] Next, the arm 416 rotates from the retracted position to the pressed position (Figures 18(a) to 18(c)). The steps in Figures 18(a) to 18(c) are the same as those in Figures 10(a) to 10(c), except that the sample is placed in the receiving tray 506.

[0059] Next, the sample transfer mechanism 406 moves the sample from the tray 506 of the sample holder 502 onto the sample transporter 104 (Figures 19(a) and 19(b)). Specifically, for example, as shown in Figures 19(a) and 19(b), the sample transfer mechanism 406 moves the first extrusion unit 422 and the second extrusion unit 424 so that the space between them is located above the sample transporter 104. At this time, the second extrusion unit 424 pushes the sample from the tray 506 onto the sample transporter 104, thereby positioning the sample on the sample transporter 104.

[0060] Finally, the sample transporter 104 transports the sample from the end of the sample loader 106 back to its original position (Figure 20). Specifically, for example, as shown in Figure 20, the sample transporter 104 transports the sample back to its original position by moving the sample in the direction of the arrow.

[0061] As described above, according to the present invention, the sample loading position by the sample loading machine 106 and the position where the sample holder 502 is picked up by the holder transporter 302 can be made the same. Furthermore, by configuring the arm 416 to be rotatable between a retracted position and a pushed-down position, interference between the holder transporter 302 and the arm 416 can be avoided when the holder transporter 302 picks up the sample holder 502 upward.

[0062] The present invention is not limited to the above embodiments, and various modifications are possible. For example, Figures 22(a) to 22(c) show an arm 416 according to a modified example. The arm 416 according to this modified example has a base portion 2204, a second biasing member 2206, and a contact portion 420.

[0063] Specifically, the arm 416 has a base 2204 at one end that is rotatably supported by an actuator 418, and at the other end that a contact portion 2202 is rotatably supported. The base 2204 is an L-shaped, plate-like member, with one end rotatably supported by the actuator 418, etc. (referred to as axis A of this axis). The other end is rotatably supported with the contact portion 2202 (referred to as axis B of this axis).

[0064] The arm 416 has a contact portion 2202. The contact portion 2202 is a plate-like member that is substantially rectangular and wider on the side closer to the axis B, and is pivotally supported at the end of the base portion 2204. It is desirable that the contact portion 2202 has a curved shape that bulges out on the side that contacts the receiving tray 506, as in the above embodiment. However, in this modified example, the portion that contacts the receiving tray 506 may be straight. The contact portion 2202 is pivotally supported at the end of the base portion 2204. Also, as in the above embodiment, the contact portion 2202 may include a first contact portion 2202A and a second contact portion 2202B. In this case, it is desirable that the first contact portion 2202A and the second contact portion 2202B have the same shape, and that the first contact portion 2202A and the second contact portion 2202B are fixed together.

[0065] The second biasing member 2206 biases the contact portion 2202 in a direction (clockwise direction around axis B in Figures 22(a) to 22(c)) such that the portion of the contact portion 2202 that contacts the receiving plate 506 approaches axis A, with axis B as the center. Specifically, for example, the second biasing member 2206 is a spring that applies a pulling force so that the distance between its two ends becomes shorter. One end of the second biasing member 2206 is locked to the end of the base portion 2204, and the other end is locked to the end of the contact portion 2202. The position where the second biasing member 2206 of the base portion 2204 is locked is the axis A side end of the wider portion (the lower left part of axis B in the drawing). The position where the second biasing member 2206 of the contact portion 2202 is locked is on the opposite side (upper side) from the portion that contacts the receiving tray 506, and is the end portion furthest from shaft A (the lower right portion of shaft B in the drawing). The second biasing member 2206 applies a pulling force so that the distance between the locked portion of the base portion 2204 and the locked portion of the contact portion 2202 becomes smaller. In this modified example, shaft A is rotated by the actuator 418, but shaft B is rotated by the second biasing member 2206.

[0066] Furthermore, it is desirable that the length between axis A and axis B be designed such that when the contact portion 2202 is in contact with the protruding portion 516 of the receiving tray 506 at the highest position, axis B is positioned directly above the center of the sample holder 502. In addition, it is desirable that the arc-shaped portion of the contact portion 2202 be an arc centered on axis B.

[0067] When the arm 416, which is in the retracted position, rotates to the pressed position, as shown in Figure 22(a), first a part of the contact portion 2202 (the lower end of the center of the curved contact portion 2202 in the drawing) comes into contact with the protrusion 516 of the receiving tray 506. Subsequently, when the arm 416 rotates clockwise in the drawing by the actuator 418, as shown in Figure 22(b), the contact portion 2202 pushes down the protrusion 516 of the receiving tray 506, causing the protrusion 516 to move downward. As a result, the receiving tray 506 moves downward (towards the center of the frame 504 in Figure 22(b)). At this time, a part of the contact portion 2202 (the lower end of the center of the curved contact portion 2202 in the drawing) comes into contact with the protrusion 516 of the receiving tray 506. Furthermore, when the arm 416 is rotated clockwise in the drawing by the actuator 418, the contact portion 2202 pushes down the protruding portion 516 of the receiving tray 506, as shown in Figure 22(c), causing the protruding portion 516 to move downward. As a result, the receiving tray 506 moves downward (towards the center of the frame 504 in Figure 22(c)). At this time, a part of the contact portion 2202 (the lower end of the center of the curved contact portion 2202 in the drawing) comes into contact with the protruding portion 516 of the receiving tray 506.

[0068] As shown in Figures 22(a) to 22(c), when the contact portion 2202 comes into contact with the projection 516, there is a risk that the contact portion 2202 may rotate irregularly. However, in this modified example, the second biasing member 2206 applies a pulling force so that the distance between the locked portion of the base portion 2204 and the locked portion of the contact portion 2202 becomes smaller. As a result, regardless of the position of the base portion 2204, the position of the contact portion 2202 that comes into contact with the projection 516 of the receiving tray 506 can be kept substantially the same. That is, since the contact portion 2202 is pivotally supported relative to the base portion 2204, the contact portion 2202 rotates in accordance with the rotation of the base portion 2204, thereby keeping the position of the contact portion 2202 that comes into contact with the projection 516 the same. Therefore, wear of the contact portion 2202 and noise generated when rubbing can be avoided.

[0069] In the above configuration, the top-illumination X-ray fluorescence analyzer 102 includes a sample loader 106, a holder tray 108, a holder input space 202, a measurement chamber 204, a pre-exhaust chamber 206, and a holder transporter 302. Furthermore, the top-illumination X-ray fluorescence analysis system 100 includes the top-illumination X-ray fluorescence analyzer 102 and the sample transporter 104. However, the top-illumination X-ray fluorescence analysis system 100 does not necessarily have to include the sample transporter 104. That is, the top-illumination X-ray fluorescence analysis system 100 may include the sample loader 106, a holder tray 108, a holder input space 202, a measurement chamber 204, a pre-exhaust chamber 206, and a holder transporter 302. [Explanation of Symbols]

[0070] 100 Top-illuminated X-ray fluorescence analysis system, 102 Top-illuminated X-ray fluorescence analyzer, 104 Sample transporter, 106 Sample Loader, 108 holder tray, 202 Space for inserting holders, 204 Measurement room, 206 Pre-exhaust chamber, 208 Holder receiver, 302 Holder transfer machine, 304 gripping mechanism, 402 base plate, 404 Holder rotation mechanism, 406 Sample transfer mechanism, 408 Push mechanism, 410 base, 412 Frame members, 414 Base actuator, 416 Arm, 418 actuators, 420,2202 Contact part, 420A,2202A 1st contact part, 420B, 2202B 2nd contact part, 2204 base, 422 First extrusion section, 424 Second extrusion section, 502 Sample holder, 504 frame, 506 Drip tray 508 Biasing member, 510 Bottom plate part, 512 Mask section, 514 Guide section, 516 protrusion, 702 Sample stage, 704 X-ray source, 706 Spectroscopic element, 708 detectors, 2204 base, 2206 Second biasing member.

Claims

1. A holder conveyor that lifts a sample holder, which has a tray on which a sample is placed, a frame in which the tray is positioned inside, and a biasing member inside the frame that biases the tray upward, and transports the sample holder upward to a preparation position, A holder holder is provided at the loading position, on which the sample holder is placed, A sample transfer mechanism moves the sample, which is being transported from the outside to the inside of the transport range by a sample transfer machine extending between the outside and inside of the transport range of the holder transfer machine, onto the receiving tray of the sample holder placed on the holder receiver. A pressing mechanism having an arm pivotally supported so as to be rotatable between a pressing position that pushes the receiving tray of the sample holder, which is positioned on the holder receiver, downward within the frame, and a retracted position that avoids interference with the holder transporter, It has, The preparation position and the loading position are different positions, and both are located inside the transport range of the holder transporter. The sample moving mechanism moves the sample onto the receiving tray when the arm is in the pressed position. The holder transporter lifts the sample holder upward when the arm is in the retracted position. A top-illumination type X-ray fluorescence analyzer characterized by the following features.

2. The holder transporter transports the sample holder from the preparation position to the holder receiver when the arm is in the retracted position. The sample transfer mechanism moves the sample from the receiving tray onto the sample transporter when the arm is in the pressed position. The top-irradiation type X-ray fluorescence analyzer according to feature 1.

3. The top-illumination type X-ray fluorescence analyzer according to claim 2, characterized in that the arm has a contact portion that contacts the receiving tray when in the pressed position, and the contact portion has a curved shape that bulges out on the side that contacts the receiving tray.

4. The top-illumination type X-ray fluorescence analyzer according to claim 3, wherein the arm further has one end pivotably supported by an actuator, and the other end has a base to which the contact portion is pivotably supported.

5. The aforementioned contact portion includes a first contact portion and a second contact portion, The first contact portion and the second contact portion are provided in positions that clamp the sample holder when the arm is in the pressed position. The top-irradiation type X-ray fluorescence analyzer according to feature 4.

6. The aforementioned sample transfer mechanism is When moving the sample from the sample transporter onto the receiving tray, the first extrusion unit pushes out the sample, When moving the sample from the receiving tray to the sample transporter, a second extrusion unit pushes out the sample, The top-irradiation type X-ray fluorescence analyzer according to claim 2, characterized by having the above features.

7. A second holder transporter transports the sample holder positioned at the aforementioned preparation location to the measurement chamber. An X-ray source that irradiates the sample placed in the sample holder of the measurement chamber with primary X-rays from above, A detector for measuring the intensity of fluorescent X-rays emitted from the sample, The top-irradiation type X-ray fluorescence analyzer according to any one of claims 1 to 6, further comprising the above.

8. A top-irradiation type X-ray fluorescence analysis system characterized by including the top-irradiation type X-ray fluorescence analysis apparatus described in any one of claims 1 to 6.

9. Furthermore, the top-irradiation type X-ray fluorescence analysis system according to claim 8, characterized in that it includes the sample transporter.

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