Magnetic sensor and magnetic measurement method

Abstract

A magnetic sensor 1 according to an aspect of the present invention comprises: a magnetic detection unit 2 that includes a magnetoresistance effect element 10 having a fixed magnetic layer 11, a free magnetic layer 13, and an intermediate layer 12 formed between the fixed magnetic layer 11 and the free magnetic layer 13; a magnetic field calculation unit 4 that calculates a measurement magnetic field on the basis of outputs from the magnetic detection unit 2; and a saturation magnetic field application unit 3 that applies a magnetic field to the free magnetic layer 13 in a direction along the measurement magnetic field to magnetically saturate the free magnetic layer 13. The magnetic field calculation unit 4 calculates the measurement magnetic field on the basis of a first output from the magnetic detection unit 2 obtained when the measurement magnetic field is being applied to the free magnetic layer 13 and a second output from the magnetic detection unit 2 obtained when the free magnetic layer 13 is magnetically saturated, so that 1 / f noise can be removed and a small magnetic field can be measured with high accuracy.

Description

Technical Field

[0001] The present invention relates to a magnetic sensor provided with a magnetoresistive effect element and a magnetic measurement method.

Background Art

[0002] As a magnetic sensor for detecting and measuring a magnetic field, there is one provided with a magnetoresistive effect element using a GMR (giant magnetoresistance) effect or a TMR (tunnel magnetoresistance) effect. The magnetoresistive effect element in these magnetic sensors has a structure in which a fixed magnetic layer, a nonmagnetic intermediate layer, and a free magnetic layer are laminated in this order. In the magnetoresistive effect element, when an external magnetic field to be measured is applied, the magnetization direction of the free magnetic layer changes, and a resistance change corresponding to the angle formed by the magnetization direction of the free magnetic layer and the magnetization direction of the fixed magnetic layer occurs. A magnetic sensor provided with a magnetoresistive effect element can detect a magnetic field using the resistance change of the magnetoresistive effect element.

[0003] A magnetic sensor provided with a magnetoresistive effect element has 1 / f noise that cannot be removed by a filter. Since 1 / f noise is inversely proportional to the frequency and increases as the frequency decreases, it may be an inhibiting factor when performing high-precision measurement. For this reason, various methods are used to remove 1 / f noise.

[0004] Patent Document 1 discloses a magnetic sensor that removes 1 / f noise by taking the difference between the output when a bias magnetic field is applied in a certain direction (+X direction) and the output when a bias magnetic field is applied in the opposite direction (-X direction) in an even-function type magnetic sensor.

[0005] Patent Document 2 discloses a measuring device that removes noise due to a Schottky barrier generated between an electrode and a sample when measuring the Hall electromotive force of a semiconductor sample, by shifting the frequency band of a voltage difference Vm to the low-frequency side and removing the frequency band of the voltage difference Vm that is greatly affected by 1 / f noise.

[0006] Patent Document 3 discloses a magnetic field sensing device that samples a bridge signal for a first current and a second current by switching between two sampling and hold modes, and determines the value of the magnetic field from the difference between the sampled first and second bridge signals.

[0007] Patent Document 4 discloses a sensor device that uses a modulator to switch the positive and negative polarity of the sensor signal and then takes the difference between the modulated signals in order to remove 1 / f noise from the output signal. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2018-115972 [Patent Document 2] Japanese Patent Publication No. 2020-148727 [Patent Document 3] Special Publication No. 2012-518788 [Patent Document 4] Special Publication No. 2009-544004 [Disclosure of the Invention] [Problems that the invention aims to solve]

[0009] Magnetic sensors equipped with magnetoresistive elements have a problem in which 1 / f noise in the low-frequency range reduces the detection accuracy of the magnetic sensor. Various devices and methods have been proposed to solve this problem. The present invention aims to provide a magnetic sensor equipped with a magnetoresistive element and a magnetic measurement method that can remove 1 / f noise with a configuration different from conventional ones and measure small magnetic fields with high accuracy. [Means for solving the problem]

[0010] In one embodiment, the present invention provides a magnetic sensor comprising: a magnetic detection unit having a magnetoresistive element having a fixed magnetic layer, a free magnetic layer, and an intermediate layer formed between the fixed magnetic layer and the free magnetic layer; a magnetic field calculation unit that calculates a measurement magnetic field based on the output of the magnetic detection unit; and a saturation magnetic field application unit that applies a magnetic field to the free magnetic layer along the direction of the measurement magnetic field to magnetically saturate the free magnetic layer, wherein the magnetic field calculation unit calculates the measurement magnetic field based on a first output of the magnetic detection unit when the measurement magnetic field is applied to the free magnetic layer and a second output of the magnetic detection unit when the free magnetic layer is magnetically saturated.

[0011] The magnetic field calculation unit may calculate the measured magnetic field based on the difference between the first output and the second output.

[0012] The first output includes the output of the measured magnetic field and 1 / f noise, while the second output includes the output of the free magnetic layer in a magnetically saturated state and 1 / f noise. Therefore, the 1 / f noise can be removed from the first output based on the first and second outputs. For example, the 1 / f noise can be removed from the first output by using the difference between the first and second outputs. Furthermore, since the output of the free magnetic layer in a magnetically saturated state is known, the measured magnetic field from which the influence of 1 / f noise has been removed can be obtained based on the first output, the second output, and the known output.

[0013] The fixed magnetic layer has a magnetization direction fixed in the first direction, and the free magnetic layer has a magnetization direction perpendicular to the first direction when no magnetic field is applied, and the direction of the measurement magnetic field may be parallel or antiparallel to the first direction.

[0014] In this configuration, the relationship between the magnetization direction of the free magnetic layer and the magnetization direction of the fixed magnetic layer differs depending on the direction of the measurement magnetic field. Therefore, the resistance value of the magnetoresistive element changes in opposite directions depending on whether the direction of the measurement magnetic field is parallel or antiparallel to the first direction. Consequently, the relationship between the measurement magnetic field and the resistance of the magnetoresistive element becomes an odd function, allowing the magnitude and direction of the measurement magnetic field to be measured.

[0015] The device may be equipped with multiple magnetoresistive elements, and these multiple magnetoresistive elements may constitute a bridge circuit. By using a bridge circuit composed of multiple magnetoresistive elements, the output corresponding to the measured magnetic field becomes larger than when using a single magnetoresistive element, thus improving the measurement accuracy of the magnetic sensor.

[0016] The fixed magnetic layer has a magnetization direction fixed in the first direction, the free magnetic layer has a magnetization direction perpendicular to the first direction when no magnetic field is applied, the direction of the measurement magnetic field is the first direction, and in each of the plurality of magnetoresistive elements, the direction in which the magnetic field is applied to the free magnetic layer by the saturation magnetic field application unit may be parallel or antiparallel to the first direction.

[0017] In this configuration, when the free magnetic layer of the magnetoresistive element is saturated, the multiple magnetoresistive elements constituting the bridge circuit will have the same resistance value. Therefore, the second output from the bridge circuit is obtained, which contains only 1 / f noise, with the known output in the saturated magnetic field state removed. In addition, since the voltage value obtained as the second output from the bridge circuit is small, the calculation of the measured magnetic field becomes simpler.

[0018] The saturation magnetic field application unit may be a coil, a current line, or a magnet. By applying a magnetic field using a coil, a current line, or a magnet, the free magnetic layer can be magnetically saturated.

[0019] In another aspect, the present invention is a magnetic measurement method for measuring a measurement magnetic field based on the output of a magnetic detection unit including a magnetic resistance effect element having a fixed magnetic layer, a free magnetic layer, and an intermediate layer formed between the fixed magnetic layer and the free magnetic layer. The method includes: a magnetic field measurement step of obtaining a first output of the magnetic detection unit when the measurement magnetic field is applied; a saturation magnetic field measurement step of applying a magnetic field along the direction of the measurement magnetic field to saturate the free magnetic layer and obtaining a second output of the magnetic detection unit; and a magnetic field calculation step of calculating the measurement magnetic field based on the first output and the second output. The magnetic measurement method is characterized by including these steps.

[0020] The magnetic field calculation step may calculate the measurement magnetic field based on the difference between the first output and the second output.

[0021] By calculating the measurement magnetic field based on the first output obtained in the magnetic field measurement step and the second output obtained in the saturation magnetic field measurement step, a measurement magnetic field from which 1 / f noise of the magnetic resistance effect element is removed can be obtained. For example, by using the difference between the first output and the second output, 1 / f noise can be removed from the first output.

Advantages of the Invention

[0022] According to the present invention, since 1 / f noise can be removed from the measurement magnetic field, a magnetic sensor and a magnetic measurement method with high magnetic resolution that can measure a small magnetic field with high accuracy can be provided.

Brief Description of the Drawings

[0023] [Figure 1] It is a block diagram of a magnetic sensor according to an embodiment. [Figure 2] It is a perspective view schematically showing a stacked structure of a magnetic resistance effect element. [Figure 3] It is a perspective view schematically showing a stacked structure of a magnetic resistance effect element according to a modification. [Figure 4]This graph shows the relationship between the 1 / f noise generated in the magnetoresistive element and the output of the magnetic detection unit. [Figure 5A] This is a flowchart of the magnetic measurement method according to the embodiment. [Figure 5B] This is a flowchart illustrating a specific example of a magnetic measurement method. [Figure 6] This is a schematic diagram of the magnetic state of the magnetoresistive element and the output of the magnetic detection unit in each step of the magnetic measurement method according to the embodiment. [Figure 7] This graph shows the relationship between the magnetic field applied to the free magnetic layer and the output of the magnetic detection unit. [Figure 8] This diagram illustrates an example of the operating sequence of a magnetic sensor. [Figure 9] This diagram illustrates another example of the operating sequence of a magnetic sensor. [Figure 10] Figure 9 illustrates the saturation magnetic field measurement step in the operating sequence shown. [Figure 11] This is a block diagram of a modified magnetic sensor. [Figure 12] This is a block diagram of a full-bridge circuit used as the magnetic detection unit of a magnetic sensor. [Figure 13] This block diagram shows the state in which a magnetic field is applied to the full-bridge circuit in Figure 12, causing the free magnetic layer to saturate. [Figure 14A] This graph shows the first output in the simulation. [Figure 14B] This graph shows the relationship between the frequency of the first output and the noise in the simulation. [Figure 15A] This graph shows the second output in the simulation. [Figure 15B] This graph shows the relationship between the frequency of the second output in the simulation and the noise. [Figure 16A] This graph shows the output of the measured magnetic field in the simulation. [Figure 16B] This graph shows the relationship between the frequency of the output of the measured magnetic field in the simulation and the noise. [Figure 17] This is a block diagram showing variations of a full-bridge circuit. [Figure 18] This is a block diagram showing variations of a full-bridge circuit. [Figure 19] This is a block diagram showing variations of a full-bridge circuit. [Best Mode for Carrying Out the Invention]

[0024] Embodiments of the present invention will be described below with reference to the accompanying drawings. In each drawing, the same component is given the same number, and its description is omitted. Reference coordinates are shown in each drawing as appropriate to indicate the positional relationship of each component.

[0025] Figure 1 is a block diagram of the magnetic sensor 1 according to this embodiment. As shown in the figure, the magnetic sensor 1 of this embodiment includes a magnetic detection unit 2, a saturated magnetic field application unit 3, a magnetic field calculation unit 4 and an amplifier 5, an analog-to-digital conversion circuit 6 and a control unit 7.

[0026] The magnetic detection unit 2 detects the external magnetic field to be measured. The magnetic detection unit 2 is composed of a magnetoresistive element 10 (see Figure 2), a full-bridge circuit 15, and half-bridge circuits 21a and 21b (see Figure 12) which are composed of multiple magnetoresistive elements 10.

[0027] Figure 2 is a schematic perspective view showing the structure of the magnetoresistive element 10 provided in the magnetic detection unit 2. For example, a GMR element (giant magnetoresistive element) or a TMR element (tunnel magnetoresistive element) can be used as the magnetoresistive element 10, and it has a configuration in which a fixed magnetic layer 11, an intermediate layer 12, and a free magnetic layer 13 are stacked in this order. The resistance value of the magnetoresistive element 10 changes depending on the relative magnetization directions of the fixed magnetic layer 11, whose magnetization direction is fixed, and the free magnetic layer 13, whose magnetization direction changes depending on the external magnetic field. The magnetic sensor 1 can measure the direction and strength of the external magnetic field to be measured based on the change in the resistance value of the magnetoresistive element 10. Hereinafter, the magnetization direction of the fixed magnetic layer 11 will also be referred to as the Pin direction.

[0028] When the magnetoresistive element 10 is a GMR element, the fixed magnetic layer 11 is made of a ferromagnetic layer such as a CoFe alloy (cobalt-iron alloy). The intermediate layer 12 is made of a non-magnetic intermediate layer such as Cu. The free magnetic layer 13 is made of a soft magnetic material such as a CoFe alloy or a NiFe alloy (nickel-iron alloy), and is formed as a single-layer structure, a multilayer structure, a multilayer ferristructure, etc.

[0029] A bias magnetic field is applied to the free magnetic layer 13 in a direction perpendicular to the sensitivity axis, i.e., the direction of the external magnetic field (measurement magnetic field) being measured (indicated by a double-headed arrow in Figure 2, the Y-axis direction), in order to stabilize the output of the magnetic sensor 1. This makes it possible to align the magnetization direction of the soft magnetic material forming the free magnetic layer 13 when no magnetic field is applied.

[0030] The fixed magnetic layer 11 of the magnetoresistive element 10 has its magnetization direction fixed in the first direction (Y1 direction of the Y axis, indicated by the white arrow in Figure 2). The free magnetic layer 13 has a magnetization direction perpendicular to the first direction when no magnetic field is applied (X2 direction of the X axis, indicated by the black arrow in Figure 2).

[0031] Therefore, the resistance value of the magnetoresistive element 10 changes in opposite directions depending on whether the direction of the measurement magnetic field, indicated by the double-headed arrows in the figure, is in the Y1 or Y2 direction in the Y-axis direction. The sign of the resistance value is reversed depending on whether the direction of the measurement magnetic field is in the Y1 or Y2 direction in the first direction, the Y-axis. In other words, since the resistance value is an odd function with respect to the measurement magnetic field, the direction and magnitude of the measurement magnetic field can be measured continuously.

[0032] A TMR element may be used as the magnetoresistive element 10 instead of the GMR element described above. In this case, the intermediate layer 12 is an insulating barrier layer composed of MgO, Al2O3, titanium oxide, etc.

[0033] The saturation magnetic field application unit 3 shown in Figure 1 applies a magnetic field to the magnetoresistive element 10 of the magnetic detection unit 2 to magnetically saturate the free magnetic layer 13, and is composed of, for example, a coil, a current line, or a magnet. When a TMR element is used as the magnetoresistive element 10, STT (Spin Transfer Torque) can be used instead of a coil, a current line, or a magnet as a means to saturate the free magnetic layer 13.

[0034] The magnetic field calculation unit 4 calculates the measured magnetic field based on the output of the magnetic detection unit 2, and is composed of, for example, a CDS (Correlated Double Sampling) circuit. The magnetic field calculation unit 4 calculates the measured magnetic field based on a first output when the measured magnetic field is applied to the free magnetic layer 13 and a second output when the free magnetic layer 13 is magnetically saturated. For example, 1 / f noise can be removed from the first output by taking the difference between the first output and the second output.

[0035] In the magnetic sensor 1, the magnetic field calculation unit 4 calculates the measurement magnetic field, then the signal corresponding to the calculated measurement magnetic field is amplified by the amplifier 5, and then converted into digital data by the analog-to-digital conversion circuit 6. The control unit 7 controls each component of the magnetic sensor 1 and is configured as a CPU (Central Processing Unit) and a program, etc.

[0036] Figure 3 is a schematic perspective view showing the stacked structure of a modified magnetoresistive element 20. The magnetoresistive element 20 shown in this figure has a different relative relationship between the magnetization direction of the fixed magnetic layer 11 and the magnetization direction of the free magnetic layer 13 compared to the magnetoresistive element 10 shown in Figure 2. That is, when no saturation magnetic field is applied to the free magnetic layer 13 of the magnetoresistive element 20, the magnetization direction is the same as the magnetization direction of the fixed magnetic layer 11, which is the X2 direction of the X axis.

[0037] The magnetoresistive element 20 exhibits the same resistance change regardless of whether the direction of the measurement magnetic field, indicated by double-headed arrows in the figure, is in the Y1 direction or the Y2 direction in the Y-axis direction. In other words, the resistance of the magnetoresistive element 20 changes similarly regardless of the direction of the measurement magnetic field and is an even function of the measurement magnetic field. For this reason, the magnetoresistive element 10 in Figure 2 is preferable to the magnetoresistive element 20 in Figure 3 in that it provides a large signal and an output with excellent linearity.

[0038] Figure 4 is a graph showing the relationship between the 1 / f noise generated in the magnetoresistive element 10 and the output from the magnetic detection unit 2, which is equipped with one magnetoresistive element 10. The 1 / f noise included in the output from the magnetic detection unit 2 increases as the frequency decreases, so low-frequency signals are buried in the 1 / f noise. For this reason, it was difficult to measure small magnetic fields using the magnetic sensor 1 equipped with the magnetoresistive element 10.

[0039] The 1 / f noise generated in the magnetoresistive element 10 can be reduced to a certain extent by adjusting the physical properties, shape, and size of the materials in each layer. However, it has been difficult to reduce the 1 / f noise to near white noise. According to the present invention, by using a second output measured with the free magnetic layer 13 saturated, the 1 / f noise can be removed from the first output, which includes the measured magnetic field, making it possible to measure small magnetic fields with high precision.

[0040] Figure 5A is a flowchart of the magnetic measurement method according to this embodiment, and Figure 5B is a flowchart of the magnetic measurement method according to one specific example. Figure 6 is a schematic diagram illustrating the magnetic state of the magnetoresistive element 10 and the output of the magnetic detection unit in each step of the magnetic measurement method according to this embodiment. In this figure, the magnetization state of the fixed magnetic layer 11 and the free magnetic layer 13 of the magnetoresistive element 10 in each step is shown on the left, and the output of the magnetic detection unit 2 (see Figure 1) equipped with one magnetoresistive element 10 is shown on the right.

[0041] As shown in Figure 5A, the magnetic measurement method comprises a magnetic field measurement step S1, a saturated magnetic field measurement step S2, and a magnetic field calculation step S3. By measuring the external magnetic field through these steps, the 1 / f noise can be removed from the first output obtained in the magnetic field measurement step S1 to obtain a measurement magnetic field. Because the magnetic measurement method of the present invention can remove 1 / f noise, it becomes possible to measure small magnetic fields with low frequencies with high accuracy.

[0042] The magnetic field measurement step S1 and the saturated magnetic field measurement step S2 may be performed in any order. The magnetic field calculation step S3 uses the first output obtained in the magnetic field measurement step S1 and the second output obtained in the saturated magnetic field measurement step S2 to calculate the measured magnetic field. For this reason, the magnetic field calculation step S3 must be performed after the magnetic field measurement step S1 and the saturated magnetic field measurement step S2.

[0043] The magnetic field measurement step S1 and the saturation magnetic field measurement step S2 may each be performed multiple times, and the first and second outputs may be determined based on the multiple measurement results. For example, the first and second outputs may be determined as the average value of the multiple measurement results obtained from multiple measurements. Alternatively, the maximum and minimum values ​​from the multiple measurement results obtained from multiple measurements may be excluded, and the first and second outputs may be determined by averaging the remaining measurement results.

[0044] In the magnetic field measurement step S1, the first output of the magnetic detection unit 2 is measured when the measurement magnetic field is applied to the free magnetic layer 13 (see Figure 2). The first output obtained from this measurement includes the signal of the measurement magnetic field and 1 / f noise.

[0045] The magnetic field measured in magnetic field measurement step S1 may be a magnetic field in only one direction or a magnetic field in multiple directions. Examples of magnetic fields in multiple directions include magnetic fields in the X-axis, Y-axis, and Z-axis directions of mutually orthogonal XYZ coordinates. When measuring magnetic fields in multiple directions, they may be measured simultaneously or sequentially.

[0046] In the saturation magnetic field measurement step S2, a magnetic field is applied to the free magnetic layer 13 by the saturation magnetic field application unit 3, and the second output of the magnetic detection unit 2 is measured when the free magnetic layer 13 is magnetically saturated. When the free magnetic layer 13 is magnetically saturated, the resistance value of the magnetoresistive element 10 does not change even if the magnetic field becomes larger. The saturation magnetic field Hs applied by the saturation magnetic field application unit 3 is applied in a direction parallel or antiparallel to the direction of the measurement magnetic field, so as to be large enough to saturate the free magnetic layer 13.

[0047] Figure 7 is a graph showing the relationship between the magnetic field applied to the free magnetic layer 13 and the output of the magnetic detection unit 2. Using this figure, we will explain the saturation magnetic field Hs that magnetically saturates the free magnetic layer 13. Ideally, as shown by the dashed line in the figure, the output of the magnetic detection unit 2 changes until the magnetic field applied to the free magnetic layer 13 becomes the saturation magnetic field Hs or saturation magnetic field -Hs, and remains constant in the range where the external magnetic field is above the saturation magnetic field +Hs and below the saturation magnetic field -Hs. However, in reality, as shown by the solid line in the figure, the output of the magnetic detection unit 2 changes smoothly before and after the saturation magnetic field +Hs and saturation magnetic field -Hs, and changes slightly after the external magnetic field becomes the saturation magnetic field +Hs and saturation magnetic field -Hs.

[0048] In this embodiment, "the free magnetic layer is magnetically saturated" means that a magnetic field greater than or equal to the saturation magnetic field +Hs, or less than or equal to the saturation magnetic field -Hs, is applied to the free magnetic layer 13. Here, the saturation magnetic field Hs is the magnetic field at the point where the parallel line +LP from the saturation point +Ps of the output from the magnetic detection unit 2 intersects with the tangent line L0 near the zero point where no magnetic field is applied to the free magnetic layer 13, and the saturation magnetic field -Hs is the magnetic field at the point where the parallel line -LP from the saturation point -Ps of the output from the magnetic detection unit 2 intersects with the tangent line L0.

[0049] In reality, the magnetic detection unit 2 retains some sensitivity even when the free magnetic layer 13 is magnetically saturated. Therefore, sensitivity correction of the magnetic detection unit 2 (offset correction in the saturated magnetic field measurement step S2 described below) is performed so that the output is constant above the saturated magnetic field +Hs and below the saturated magnetic field -Hs. For this reason, as shown in Figure 7, the parallel line +LP from the saturation point +Ps and the parallel line -LP from the saturation point -Ps are both parallel to the horizontal axis which indicates the magnitude of the magnetic field.

[0050] The second output obtained in the saturation magnetic field measurement step S2 includes a signal indicating the magnetically saturated state of the free magnetic layer 13 (hereinafter also referred to as the saturated magnetic field signal) and a 1 / f noise signal. The saturated magnetic field signal is a known signal whose direction of magnetic saturation of the free magnetic layer 13 is determined by whether it is in the same direction (parallel) or opposite direction (antiparallel) to the Pin direction of the fixed magnetic layer 11. Therefore, the 1 / f noise output is obtained by subtracting the saturated magnetic field signal from the second output obtained in the saturation magnetic field measurement step S2. In this case, the saturated magnetic field signal is an offset signal, and offset correction is performed by subtracting the saturated magnetic field signal from the second output.

[0051] The magnetic field calculation step S3 calculates the measured magnetic field based on the first output measured in the magnetic field measurement step S1 and the second output measured in the saturation magnetic field measurement step S2. The first output contains the signal of the measured magnetic field and 1 / f noise, while the second output contains the saturation magnetic field signal and 1 / f noise. Therefore, by using the first and second outputs, the 1 / f noise can be removed from the first output.

[0052] As mentioned above, the saturated magnetic field signal included in the second signal is known. Therefore, by further subtracting the saturated magnetic field signal from the difference between the first output and the second output, a measurement magnetic field signal free from 1 / f noise can be obtained.

[0053] Figure 5B is a flowchart of a magnetic measurement method according to one specific example. The magnetic measurement method shown in the figure performs a magnetic field calculation step S3' after the magnetic field measurement step S1 and the saturated magnetic field measurement step S2. In the magnetic field calculation step S3', the 1 / f noise is removed from the first output by calculating the difference between the first output and the second output, and the measured magnetic field is calculated.

[0054] Figure 8 is a diagram illustrating an example of the operation sequence of the magnetic sensor 1, showing the signal output from the magnetic detection unit 2. In this figure, the order of the magnetic field measurement step S1 and the saturated magnetic field measurement step S2 is shown in the reverse order of the flowchart shown in Figure 5A. After turning on the measurement circuit of the magnetic sensor 1, first, as the saturated magnetic field measurement step S2, a magnetic field is applied to the free magnetic layer 13 of the magnetoresistive element 10, and a measurement is performed in a saturated state to obtain a second output. Then, as the magnetic field measurement step S1, the external magnetic field is measured without applying a magnetic field to saturate the free magnetic layer 13, and a first output is obtained. Then, the magnetic field calculation step S3 is performed, and the external magnetic field, i.e., the measured magnetic field, with 1 / f noise removed, is calculated based on the first output and the second output.

[0055] In Figure 8, the free magnetic layer 13 is saturated in the (+) direction, but instead, the saturated magnetic field measurement step S2 may be performed with the layer saturated in the (-) direction. Here, a state of saturation in the (+) direction means that the free magnetic layer 13 is saturated by applying a magnetic field in the same direction (parallel) along the Pin direction, and is also referred to as (+) saturation as appropriate. A state of saturation in the (-) direction means that the free magnetic layer 13 is saturated by applying a magnetic field in the opposite direction (antiparallel) along the Pin direction, and is also referred to as (-) saturation as appropriate.

[0056] Figure 9 illustrates another example of the operation sequence of the magnetic sensor 1. In the operation sequence shown in this figure, in the saturated magnetic field measurement step S2, the free magnetic layer of the magnetoresistive element is saturated in both the (+) and (-) directions, and measurements are taken in the two states of (+) saturation and (-) saturation. The second output is obtained using the two measurement results obtained.

[0057] Figure 10 illustrates the saturated magnetic field measurement step S2 in the operation sequence shown in Figure 9. In Figure 10, the free magnetic layer 13 of the magnetoresistive element 10 is first measured in a (+) saturated state, and then measured in a (-) saturated state. Since the saturated magnetic field signal has a large absolute value of signal intensity, the measurement results in the saturated state, including the saturated magnetic field signal, have a large absolute value of signal intensity in both the (+) saturated and (-) saturated states. However, since the saturated magnetic field signal included in the (+) saturated measurement result and the saturated magnetic field signal included in the (-) saturated measurement result have opposite polarities, the absolute value of the signal intensity can be reduced by adding these measurement results to obtain a second output, or by using the average of both values ​​as the second output. This reduces the absolute value of the signal intensity processed in the magnetic field calculation unit 4, amplifier 5, and analog-to-digital conversion circuit 6 (A / D conversion circuit, see Figure 1), which is advantageous from the viewpoint of increasing the amplification factor of the amplifier and improving the resolution during A / D conversion.

[0058] As described above, by using the measurement results in the (+) saturated and (-) saturated states, the absolute value of the signal intensity of the second output can be reduced. However, the second output may contain an offset signal due to variations in the magnetoresistive element 10. If the second output contains an offset signal, offset correction is performed to remove the offset signal.

[0059] Figure 11 is a block diagram of a modified magnetic sensor 8. In the modified magnetic sensor 8, the first and second outputs from the magnetic detection unit 2 are amplified by the amplifier 5, converted to a digital signal by the analog-to-digital conversion circuit 6, and then the magnetic field calculation unit 4 calculates the measured magnetic field. Each part of the magnetic sensor can be configured to determine the measured magnetic field based on the first and second outputs, and is not limited to the examples shown in Figures 1 and 11.

[0060] Figure 12 is a schematic diagram of a full-bridge circuit 15 used as the magnetic detection unit 2 (see Figure 1) of the magnetic sensor 1. As shown in the figure, the full-bridge circuit 15 includes magnetoresistive elements 10a, 10b, 10c, and 10d (if not distinguished, they are appropriately referred to as magnetoresistive elements 10). The four magnetoresistive elements 10 may be provided on the same substrate (1 chip).

[0061] The full-bridge circuit 15 has a configuration in which a half-bridge circuit 21a and a half-bridge circuit 21b are connected in parallel between the power supply terminal Vdd, which is the power supply point, and the ground terminal Gnd. In the half-bridge circuit 21a, magnetoresistive elements 10a and 10b are connected in series, and in the half-bridge circuit 21b, magnetoresistive elements 10c and 10d are connected in series.

[0062] The half-bridge circuit 21a has an output terminal Va between magnetoresistive elements 10a and 10b. The half-bridge circuit 21b has an output terminal Vb between magnetoresistive elements 10c and 10d. The potential difference (Va-Vb, midpoint potential difference) from these two output terminals Va and Vb allows for the quantitative measurement of the magnitude of an externally applied magnetic field as the measurement field.

[0063] The pair of magnetoresistive elements 10a and 10b forming the half-bridge circuit 21a have the magnetization direction (Pin direction) of the fixed magnetic layer 11 in the Y1 direction and Y2 direction, respectively. Similarly, the pair of magnetoresistive elements 10c and 10d forming the half-bridge circuit 21b have the magnetization direction (Pin direction) of the fixed magnetic layer 11 in the Y2 direction and Y1 direction, respectively.

[0064] In half-bridge circuits 21a and 21b, the pin directions of the magnetoresistive elements 10a and 10c on the power supply terminal Vdd side are opposite (antiparallel). Also, the pin directions of the magnetoresistive elements 10b and 10d on the ground terminal Gnd side are opposite (antiparallel).

[0065] Furthermore, the magnetization direction of the free magnetic layer 13 of the four magnetoresistive elements 10a, 10b, 10c, and 10d is the same X1 direction when no external magnetic field is applied.

[0066] With the above configuration, as the magnitude of the measured magnetic field in the Y-axis direction changes, the outputs from the output terminal Va of the half-bridge circuit 21a and the output terminal Vb of the half-bridge circuit 21b change in opposite directions. Therefore, a large output is obtained as the potential difference between the two output terminals Va and Vb. Thus, by using the full-bridge circuit 15 as the magnetic detection unit 2, the measured magnetic field can be detected with high precision. In addition, half-bridge circuits 21a and 21b or the magnetoresistive element 10 can also be used as the magnetic detection unit 2 instead of the full-bridge circuit 15.

[0067] Near each magnetoresistive element 10a, 10b, 10c, and 10d, saturation magnetic field application sections 22a, 22b, 22c, and 22d are provided to apply a magnetic field to the free magnetic layer 13 (see Figure 2). Each of the saturation magnetic field application sections 22a, 22b, 22c, and 22d is composed of, for example, a coil, a current line, or a magnet. In Figure 12, the saturation magnetic field application sections 22a, 22b, 22c, and 22d are connected in such a way that a saturation magnetic field in the same direction is applied to magnetoresistive elements 10a and 10c, while a saturation magnetic field in the opposite direction to that of magnetoresistive element 10d is applied equally to magnetoresistive elements 10b and 10d.

[0068] Figure 13 is a block diagram of a full-bridge circuit 15 showing the state in which a saturation magnetic field is applied to the magnetic sensor 1 of Figure 12 and the free magnetic layer 13 is saturated. In the example shown in this figure, the free magnetic layer 13 in each magnetoresistive element 10a, 10b, 10c, and 10d is saturated in a direction parallel to the magnetization direction of the fixed magnetic layer 11. Therefore, the resistance values ​​of each magnetoresistive element 10a, 10b, 10c, and 10d are equal.

[0069] The half-bridge circuits 21a and 21b that constitute the full-bridge circuit 15 are equipped with magnetoresistive elements 10 whose relative magnetization directions are the same as those of the free magnetic layer 13 and the fixed magnetic layer 11 when the free magnetic layer 13 is magnetically saturated. Therefore, the second output obtained based on the outputs from output terminals Va and Vb does not include the saturated magnetic field signal and only includes 1 / f noise. Thus, the measured magnetic field can be determined based only on the first and second outputs, without using the known saturated magnetic field signal when the free magnetic layer 13 is saturated. Furthermore, by making each magnetoresistive element 10 have the same resistance value when the free magnetic layer 13 is saturated, the output from the full-bridge circuit 15 is reduced, which has the advantage of making subsequent signal processing easier.

[0070] (simulation) A simulation was performed on a magnetic sensor 1 in which a full-bridge circuit 15 is formed by four magnetoresistive elements 10 as shown in Figure 13. Figures 14A and 14B show graphs of the first output obtained from the simulation and graphs showing the relationship between frequency and noise. Figures 15A and 15B show graphs of the second output obtained from the simulation and graphs showing the relationship between frequency and noise. Figures 16A and 16B show graphs of the output based on the first and second outputs in this embodiment and graphs showing the relationship between frequency and noise in said output.

[0071] As shown in Figure 15A, the second output is obtained as a signal with a small absolute value of signal intensity. This is because the saturated magnetic field signal cancels out in the second output when the free magnetic layer 13 of the magnetoresistive element 10 constituting the full-bridge circuit 15 is saturated.

[0072] In an ideal state where the magnetoresistive elements 10a, 10b, 10c, and 10d constituting the full-bridge circuit 15 are exactly the same except for the direction of Pin and the direction in which the saturation magnetic field is applied, the second output contains only 1 / f noise and does not contain the saturation magnetic field signal. However, if there is variation in the magnetoresistive elements 10a, 10b, 10c, and 10d, the second output from the full-bridge circuit 15 contains an offset signal due to the variation in addition to the 1 / f noise. If the second output contains an offset signal, offset correction is performed to remove the offset signal.

[0073] As shown in Figure 16A, a low-noise measurement magnetic field can be obtained by taking the difference between the first output shown in Figure 14A and the second output shown in Figure 15A. As shown in Figure 16B, the spectrum after noise reduction shows overall noise reduction, including noise components in the low-frequency region, compared to the spectrum of the first output shown in Figure 14B. In this way, the present invention makes it possible to reduce 1 / f noise contained in the measurement magnetic field.

[0074] (modified version) Figure 17 is a block diagram showing a modified full-bridge circuit 16 in which the free magnetic layer 13 of Figure 13 is saturated. In the example shown in this figure, the free magnetic layer 13 in each magnetoresistive element 10a, 10b, 10c, and 10d is saturated in a direction antiparallel to the magnetization direction of the fixed magnetic layer 11.

[0075] Figure 18 is a block diagram showing a modified full-bridge circuit 17. In the example shown in this figure, the free magnetic layers 13 of the magnetoresistive elements 10a and 10c are saturated in a direction parallel to the magnetization direction of the fixed magnetic layer 11, while the free magnetic layers 13 of the magnetoresistive elements 10b and 10d are saturated in a direction antiparallel to the magnetization direction of the fixed magnetic layer 11. To achieve this configuration, the full-bridge circuit 17 has a different wiring method for the saturated magnetic field application sections 22a, 22b, 22c, and 22d compared to the full-bridge circuit 15.

[0076] Figure 19 is a block diagram showing a modified full-bridge circuit 18. The full-bridge circuit 18 shown in this example has the same circuit configuration as the full-bridge circuit 17, but the power supply direction to the saturation magnetic field application sections 22a, 22b, 22c, and 22d is opposite. As a result, the free magnetic layer 13 in the magnetoresistive elements 10a and 10c is saturated in a direction antiparallel to the magnetization direction of the fixed magnetic layer 11. The free magnetic layer 13 in the magnetoresistive elements 10b and 10d is saturated in a direction parallel to the magnetization direction of the fixed magnetic layer 11.

[0077] In the modified full-bridge circuits 16-18 shown in Figures 17-19, the half-bridge circuits 21a and 21b are composed of magnetoresistive elements 10 whose relative magnetization directions are the same between the free magnetic layer 13 and the fixed magnetic layer 11 when the free magnetic layer 13 is magnetically saturated. Therefore, similar to the full-bridge circuit 15 in Figure 13, the saturation magnetic field signal is not included in the output from output terminals Va and Vb. Consequently, a second output is obtained as the difference between the outputs from output terminals Va and Vb, which does not include the saturation magnetic field signal when the free magnetic layer 13 is saturated and includes 1 / f noise.

[0078] The embodiments disclosed herein are illustrative in all respects and are not limited thereto. The scope of the present invention is indicated by the claims rather than solely by the above-described embodiments, and all modifications within the meaning and scope of the claims are intended to be included. For example, in the above description, a saturation magnetic field was applied to the magnetoresistive elements 10a, 10b, 10c, and 10d by the saturation magnetic field application units 22a, 22b, 22c, and 22d, but is not limited thereto. For example, when measuring the induced magnetic field generated by the current to be measured flowing through a current line placed near the magnetic sensor 1, a large current may be passed through this current line to generate an induced magnetic field that magnetically saturates the free magnetic layer 13. [Industrial applicability]

[0079] The present invention is useful as a magnetic sensor and magnetic measurement method with high magnetic resolution that can detect low-frequency magnetism with high sensitivity. [Explanation of Symbols]

[0080] 1: Magnetic sensor 2: Magnetic detection unit 3: Saturated magnetic field application section 4: Magnetic field calculation unit 5: Amplifier 6: Analog-to-Digital Conversion Circuit 7: Control Unit 8: Magnetic sensor 10: Magnetoresistive element 10a: Magnetoresistive element 10b: Magnetoresistive element 10c: Magnetoresistive element 10d: Magnetoresistive element 11: Fixed magnetic layer 12: Middle Class 13: Free magnetic layer 15: Full-bridge circuit 16: Full-bridge circuit 17: Full-bridge circuit 18: Full-bridge circuit 20: Magnetoresistive element 21a: Half-bridge circuit 21b: Half-bridge circuit 22a: Saturated magnetic field application section 22b: Saturated magnetic field application section 22c: Saturated magnetic field application section 22d: Saturated magnetic field application section Hs: Saturation magnetic field +Hs: Saturation magnetic field -Hs: Saturation magnetic field +Ps :Saturation point -Ps: Saturation point +LP :Parallel line -LP:Parallel line L0: Tangent Vdd: Power terminal Gnd: Ground terminal Va: Output terminal Vb: Output terminal

Claims

1. A magnetic detection unit comprising a magnetoresistive element having a fixed magnetic layer with a magnetization direction fixed in a first direction, a free magnetic layer, and an intermediate layer formed between the fixed magnetic layer and the free magnetic layer, A magnetic field calculation unit calculates a magnetic field to be measured based on the output of the magnetic detection unit, The system includes a saturation magnetic field application unit that applies a magnetic field to the free magnetic layer along the direction of the measurement magnetic field to magnetically saturate the free magnetic layer, The magnetic detection unit is A first half-bridge circuit having two magnetoresistive elements, the fixed magnetic layers having their magnetization directions fixed in opposite directions to each other, A second half-bridge circuit having two other magnetoresistive elements, the fixed magnetic layers having their magnetization directions fixed in opposite directions to each other, It features a full bridge circuit with parallel connections, The magnetic field calculation unit, The first output of the magnetic detection unit when the measurement magnetic field is applied to the free magnetic layer, Based on the second output of the magnetic detection unit when the free magnetic layer is magnetically saturated, the measured magnetic field is calculated. The second output described above is, By applying a magnetic field in a first direction, which is one of the first directions, to the free magnetic layers of the two magnetoresistive elements of the first half-bridge circuit, the free magnetic layers are saturated. When the free magnetic layers of the two magnetoresistive elements of the second half-bridge circuit are saturated by applying a magnetic field in a second direction antiparallel to the first direction, This is the measurement result of the full-bridge circuit. A magnetic sensor characterized by the following features.

2. The magnetic field calculation unit calculates the measured magnetic field based on the difference between the first output and the second output. The magnetic sensor according to claim 1.

3. The magnetization direction of the free magnetic layer when no magnetic field is applied is perpendicular to the first direction. The direction of the measurement magnetic field is parallel or antiparallel to the first direction. The magnetic sensor according to claim 1 or claim 2.

4. The saturation magnetic field application part is a coil, a current line, or a magnet. The magnetic sensor according to claim 1 or claim 2.

5. The saturation magnetic field application section is a coil or a current line, Two saturation magnetic field application units are provided corresponding to each of the two magnetoresistive elements of the first half-bridge circuit, and these two saturation magnetic field application units are connected in series. The magnetic sensor according to claim 4, wherein two saturation magnetic field application units are provided corresponding to each of the two magnetoresistive elements of the second half-bridge circuit, and the two saturation magnetic field application units are connected in series.

6. A magnetic measurement method for measuring a magnetic field based on the output of a magnetic detection unit that includes a magnetoresistive element having a fixed magnetic layer whose magnetization direction is fixed in a first direction, a free magnetic layer, and an intermediate layer formed between the fixed magnetic layer and the free magnetic layer, The magnetic detection unit is A first half-bridge circuit having two magnetoresistive elements, the fixed magnetic layers having their magnetization directions fixed in opposite directions to each other, A second half-bridge circuit having two other magnetoresistive elements, the fixed magnetic layers having their magnetization directions fixed in opposite directions to each other, It features a full bridge circuit with parallel connections, A magnetic field measurement step to obtain the first output of the magnetic detection unit when the measurement magnetic field is applied, A saturated magnetic field measurement step is performed in which a magnetic field is applied along the direction of the measurement magnetic field, and the second output of the magnetic detection unit is obtained in a state in which the free magnetic layer is saturated, The system includes a magnetic field calculation step for calculating the measurement magnetic field based on the first output and the second output, The second output described above is, A magnetic field in a first direction, which is one of the first directions, is applied to the free magnetic layers of the two magnetoresistive elements of the first half-bridge circuit, thereby saturating the free magnetic layers. When a magnetic field in a second direction antiparallel to the first direction is applied to the free magnetic layers of the two magnetoresistive elements of the second half-bridge circuit, thereby saturating the free magnetic layers, This is the measurement result of the full-bridge circuit. A magnetic measurement method characterized by the following.

7. The magnetic field calculation step calculates the measured magnetic field based on the difference between the first output and the second output. The magnetic measurement method according to claim 6.

8. The saturation magnetic field application unit, which applies a magnetic field along the direction of the measurement magnetic field to saturate the free magnetic layer, is a coil or a current line. Two saturation magnetic field application units are provided corresponding to each of the two magnetoresistive elements of the first half-bridge circuit, and these two saturation magnetic field application units are connected in series. The magnetic measurement method according to claim 7, wherein two saturation magnetic field application units are provided corresponding to each of the two magnetoresistive elements of the second half-bridge circuit, and the two saturation magnetic field application units are connected in series.

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