Anodes for lithium-based energy storage devices

Abstract

The anode for the energy storage device includes a current collector having a conductive layer and a surface layer disposed on the conductive layer. The surface layer can include a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer. The first surface sublayer can include zinc. The second surface sublayer can include a metal-oxygen compound, the metal-oxygen compound including a transition metal other than zinc. The current collector has a surface roughness R a ≧250 nm. The anode further includes a continuous porous lithium storage layer covering the surface layer. The continuous porous lithium storage layer can have an average thickness of at least 7 μm and can include at least 40 atomic % silicon, germanium, or a combination thereof, and can be substantially free of a carbon-based binder.

Description

[Technical Field]

[0001] Cross-reference of related applications This application claims priority to U.S. Provisional Application No. 63 / 045,570, filed on 29 June 2020, and U.S. Provisional Application No. 63 / 179,971, filed on 26 April 2021, each of which is incorporated herein by reference in whole.

[0002] This disclosure relates to lithium-ion batteries and related energy storage devices. [Background technology]

[0003] Silicon has been proposed as an alternative for lithium-ion batteries to conventional carbon-based anodes, which have a limited storage capacity of approximately 370 mAh / g. Silicon readily alloys with lithium and has a theoretically much higher storage capacity (approximately 3600-4200 mAh / g at room temperature) than carbon anodes. However, insertion and extraction of lithium into a silicon matrix causes significant volume expansion (>300%) and contraction. As a result, silicon can be rapidly pulverized into small particles, potentially leading to electrical disconnection from the current collector.

[0004] The industry has recently turned to nanostructured or microstructured silicon, i.e., silicon in the form of spaced nanowires or microwires, tubes, pillars, or particles, in order to reduce the problem of pulverization. The theory is that by making the structure nanoscale to avoid crack propagation and spacing them apart, more space is allowed for volume expansion, thereby reducing stress and allowing silicon to absorb lithium in a more stable state compared to, for example, a macroscopic layer of bulk silicon.

[0005] Despite research into various methods, silicon-based batteries have not yet had a significant impact on the market due to unresolved issues. [Overview of the project] [Problems that the invention aims to solve]

[0006] There is still a demand for anodes for lithium-based energy storage devices such as Li-ion batteries that are easy to manufacture, robust to handle, offer high charging capacity suitable for fast charging (e.g., at least 1C), and are resistant to dimensional changes. [Means for solving the problem]

[0007] According to one embodiment of the present disclosure, an anode for an energy storage device includes a current collector having a conductive layer and a surface layer disposed on the conductive layer. The surface layer may include a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer. The first surface sublayer may include zinc. The second surface sublayer may include a metal-oxygen compound, the metal-oxygen compound may include a transition metal other than zinc. The current collector may be characterized by a surface roughness Ra ≥ 250 nm. The anode further includes a continuous porous lithium storage layer covering the surface layer. The continuous porous lithium storage layer may have an average thickness of at least 7 μm and may contain at least 40 atomic percent of silicon, germanium, or a combination thereof, and may substantially not contain a carbon-based binder.

[0008] This disclosure provides an anode for an energy storage device that can have at least one or more of the following advantages compared to conventional anodes: improved stability at rapid charging rates of ≥1C; higher total area charging capacity; higher charging capacity per gram of lithium storage material (e.g., silicon); improved physical durability; simplified manufacturing process; more repeatable manufacturing process; or reduced dimensional changes during operation. [Brief explanation of the drawing]

[0009] [Figure 1] This is a cross-sectional view of a non-limiting example of an anode according to several embodiments.

[0010] [Figure 2]This is a cross-sectional view of a conventional anode.

[0011] [Figure 3] This is a cross-sectional view of a non-limiting example of an anode according to several embodiments.

[0012] [Figure 4] This is a cross-sectional view of a non-limiting example of an anode according to several embodiments.

[0013] [Figure 5A] This is a cross-sectional view of a non-limiting example of a current collector having a first type of nanopillar, according to several embodiments.

[0014] [Figure 5B] This is a cross-sectional view of a non-limiting example of a current collector having a second type of nanopillar, according to several embodiments.

[0015] [Figure 5C] SEM cross-sectional views of some non-limiting examples of current collectors having a broad, coarse mechanism according to several embodiments.

[0016] [Figure 6] This is a cross-sectional view of a non-limiting example of an anode according to several embodiments.

[0017] [Figure 7] This is an example of a cross-sectional SEM image of anode E-1A.

[0018] [Figure 8A] This is a top view SEM diagram of the current collector used in Example E-14B.

[0019] [Figure 8B] This is a cross-sectional SEM image of the current collector used in Example E-14B.

[0020] [Figure 8C] This is a cross-sectional SEM image of the anode of Example E-14B.

[0021] [Figure 9] This is a cross-sectional SEM image of the current collector used in Example E-16B.

[0022] [Figure 10A] This is a 45-degree SEM perspective view of the current collector used in Example E-14B.

[0023] [Figure 10B] This is a cross-sectional SEM image of the current collector used in Example E-14B.

[0024] [Figure 10C] This is a cross-sectional SEM image of the anode of Example E-14B.

[0025] [Figure 11] This is a 45-degree SEM perspective view of the current collector used in Example E-3B. [Modes for carrying out the invention]

[0026] Please understand that the drawings are for illustrative purposes only and may not be to scale. Terms such as “overlaying” and “over” do not necessarily imply such direct contact unless noted or clearly required for functionality. However, embodiments of “overlaying” or “over” may include layers that are in direct contact.

[0027] Figure 1 is a cross-sectional view of an anode according to several embodiments of the present disclosure. The anode 100 includes a current collector 101 and a continuous porous lithium storage layer 107 covering the current collector. The current collector 101 includes a conductive layer 103, for example, a surface layer 105 provided on a conductive metal layer. In the figure, for convenience, the surface of the current collector is shown as flat, but the current collector may have a rough surface as described below. The continuous porous lithium storage layer 107 is provided on the surface layer 105. In some embodiments, the upper part of the continuous porous lithium storage layer 107 corresponds to the upper surface 108 of the anode 100. In some embodiments, the continuous porous lithium storage layer 107 is in physical contact with the surface layer 105. In some embodiments, the continuous porous lithium storage layer includes a material that can form an electrochemically reversible alloy with lithium. In some embodiments, the continuous porous lithium storage layer includes silicon, germanium, tin, or alloys thereof. In some embodiments, the continuous porous lithium storage layer comprises at least 40 atomic percent of silicon, germanium, or a combination thereof. In some embodiments, the continuous porous lithium storage layer is provided by a chemical vapor deposition (CVD) process, for example, but not limited to hot-wire CVD or plasma-enhanced chemical vapor deposition (PECVD).

[0028] In this disclosure, continuous porous lithium storage layers substantially do not include high aspect ratio nanostructures, such as spaced wires, pillars, tubes, or regular linear perpendicular channels extending through the lithium storage layer. Figure 2 shows a cross-sectional view of a prior art anode 170, including some non-limiting examples of lithium storage nanostructures such as nanowires 190, nanopillars 192, nanotubes 194, and nanochannels 196 provided on a current collector 180. Unless otherwise specified, the term “lithium storage nanostructure” as used herein generally refers to lithium storage active material structures (e.g., structures of silicon, germanium, or alloys thereof) having at least one cross-sectional dimension less than about 2,000 nm, except for dimensions substantially perpendicular to the underlying substrate (such as layer thickness) and dimensions caused by random pores and channels. Similarly, the terms “nanowire,” “nanopillar,” and “nanotube” refer to wires, pillars, and tubes, respectively, having at least a portion of their diameter less than 2,000 nm. A “high aspect ratio” nanostructure has an aspect ratio greater than 4:1, and the aspect ratio is generally the height or length of the mechanism (which can be measured along the mechanism axis aligned at an angle of 45 to 90 degrees with respect to the current collector surface below) divided by the width of the mechanism (which can be measured approximately perpendicular to the mechanism axis). In some embodiments, a continuous porous lithium storage layer is considered “substantially free” of lithium storage nanostructures if the anode has an average (e.g., mean, median, or mode) of fewer than 10 lithium storage nanostructures per 1600 square micrometers (in this specification, the number of lithium storage nanostructures is the sum of the number of nanowires, nanopillars, and nanotubes in the same unit area, and such lithium storage nanostructures have an aspect ratio of 4:1 or greater). Alternatively, there may be fewer than 1 such lithium storage nanostructure per 1600 square micrometers on average. As will be described later, the current collector may have a high surface roughness or may contain nanostructures, but these mechanisms are separate from the continuous porous lithium storage layer and are different from lithium storage nanostructures.

[0029] In some embodiments, the deposition conditions are selected in combination with the current collector so that the continuous porous lithium storage layer is relatively smooth and provides an anode having a diffuse reflectance or total reflectance of at least 10% or at least 20% (measured on the continuous porous lithium storage layer side) at 550 nm. In some embodiments, an anode having such diffuse reflectance or total reflectance may be less susceptible to damage from physical handling. In some embodiments, an anode substantially free of lithium storage nanostructures may have lower reflectance and may be more susceptible to damage from physical handling.

[0030] The anode of this disclosure may optionally be bilateral. For example, Figure 3 is a cross-sectional view of a bilateral anode according to several embodiments. The current collector 301 may include a conductive layer 303 and surface layers (305a, 305b) provided on both sides of the conductive layer 303. The negative electrode 300 is formed by arranging continuous porous lithium storage layers (307a, 307b) on both sides. The surface layers 305a and 305b may be the same or different in terms of composition, thickness, roughness, or any other property. Similarly, the continuous porous lithium storage layers 307a and 307b may be the same or different in terms of composition, thickness, porosity, or any other property.

[0031] Current collector

[0032] In some embodiments, the current collector or conductive layer can be characterized by its tensile strength Rm or yield strength Re. In some cases, the tensile and yield strength characteristics of the current collector depend primarily on the conductive layer, and in some embodiments, the conductive layer may be thicker than the surface layer. If the tensile strength is too high or too low, handling may become difficult in manufacturing processes such as roll-to-roll processes. If the tensile strength is too low, deformation of the anode may occur during the electrochemical cycle of the anode, or if the tensile strength is too high, the adhesion of the continuous porous lithium storage layer may be impaired.

[0033] Anode deformation is not necessarily a problem for all products, and such deformation may only occur at higher capacities, i.e., higher loading amounts of lithium storage layer material. For such products, the current collector or conductive layer has a tensile strength R in the range of 100-150 MPa, or 150-200 MPa, or 200-250 MPa, or 250-300 MPa, or 300-350 MPa, or 350-400 MPa, or 400-500 MPa, or 500-600 MPa, or 600-700 MPa, or 700-800 MPa, or 800-900 MPa, or 900-1000 MPa, or 1000-1200 MPa, or 1200-1500 MPa, or any combination of those ranges. m It can be characterized by the following.

[0034] In some embodiments, while significant anode deformation should be avoided, low battery capacity may be unacceptable. For example, the anode may contain amorphous silicon of 7 μm or more, and / or the electrochemical cycle capacity may be 1.5 mAh / cm². 2 In the above case, the current collector or conductive layer has a tensile strength R greater than 600 MPa. mThe invention may be characterized by the following: In such embodiments, the tensile strength can be in the range of 601-650 MPa, or 650-700 MPa, or 700-750 MPa, or 750-800 MPa, or 800-850 MPa, or 850-900 MPa, or 900-950 MPa, or 950-1000 MPa, or 1000-1200 MPa, or 1200-1500 MPa, or any combination of these ranges. In some embodiments, the current collector or conductive layer may have a tensile strength exceeding 1500 MPa. In some embodiments, the current collector or conductive layer is in the form of a foil having a tensile strength greater than 600 MPa and an average thickness in the range of 4-8 μm, or 8-10 μm, or 10-15 μm, or 10-15 μm, or 15-20 μm, or 20-25 μm, or 25-30 μm, or 30-40 μm, or 40-50 μm, or any combination of these ranges.

[0035] In some embodiments, the conductive layer is at least 10 3 S / m, or at least 10 6 S / m, or at least 10 7 It can have a conductivity of S / m and may include inorganic or organic conductive materials or combinations thereof. In the case of anodes with low capacitance and / or when there are no concerns about deformation of the anode during use, a wide variety of conductive materials can be used as the conductive layer.

[0036] In some embodiments, the conductive layer includes a metallic material, such as titanium (and its alloys), nickel (and its alloys), copper (and its alloys), or stainless steel. In some embodiments, the conductive layer includes conductive carbon such as carbon black, carbon nanotubes, graphene, graphene oxide, reduced graphene oxide, and graphite. In some embodiments, the conductive layer may be in the form of a foil, mesh, or sheet of conductive material. Hereinafter, “mesh” includes any conductive structure having openings, such as woven wires, foam structures, or foils with arrays of holes. In some embodiments, the conductive layer may include multiple layers of different conductive materials. The conductive layer may be in the form of layers deposited on an insulating substrate (e.g., a polymer sheet or ceramic substrate coated on both sides optionally with a conductive material including but not limited to nickel or copper). In some embodiments, the conductive layer includes a mesh or sheet of conductive carbon, including but not limited to those formed from bundled carbon nanotubes or nanofibers.

[0037] If higher tensile strength is desired, the conductive layer may include nickel (and certain alloys) or certain copper alloys, such as brass (an alloy primarily composed of copper and zinc), bronze (an alloy primarily composed of copper and tin), CuMgAgP (an alloy primarily composed of copper, magnesium, silver, and phosphorus), CuFe2P (an alloy primarily composed of copper, iron, and phosphorus), CuNi3Si (an alloy primarily composed of copper, nickel, and silicon). The nomenclature of metal alloys is not a stoichiometric molecular formula used in chemistry, but rather a nomenclature used by those skilled in the art of alloying. For example, CuNi3Si does not mean that there are 3 atoms of nickel and 1 atom of silicon for every atom of copper. In some embodiments, these nickel or copper-based conductive layers with higher tensile strength may include roll-formed nickel or copper alloy foils.

[0038] Alternatively, a mesh or sheet of conductive carbon, including but not limited to those formed from bundled carbon nanotubes or nanofibers, can provide a conductive layer with higher tensile strength. In some embodiments, a conductive metal interlayer may be interposed between the conductive carbon and the surface layer.

[0039] In some embodiments, one of the conductive layers described above (low or high tensile strength) acts as a primary conductive layer and may further include a conductive intermediate layer, such as a metal intermediate layer, disposed between the primary conductive layer and the surface layer. Figure 4 is a cross-sectional view of such an anode according to some embodiments, in this case a cross-sectional view of a double-sided anode. The current collector 401 may include a conductive layer 403 and surface layers (405a, 405b) provided on both sides of the conductive layer 403. The negative electrode 400 is formed by providing continuous porous lithium storage layers (407a, 407b) on both sides. The conductive layer 403 includes a primary conductive layer 402 with metal intermediate layers (404a, 404b) on both sides. The metal intermediate layers 404a and 404b may be the same or different in terms of composition, thickness, roughness, or any other property. Similarly, the surface layers 405a and 405b may be the same or different in terms of composition, thickness, roughness, or any other property. Similarly, the continuous porous lithium storage layers 407a and 407b may be the same or different in terms of composition, thickness, porosity, or any other property.

[0040] The metal interlayer can be applied, for example, by sputtering, vapor deposition, electroplating, electroless plating, or any other convenient method. Generally, the metal interlayer has an average thickness of less than 50% of the average thickness of the entire conductive layer, i.e., the combined thickness of the primary conductive layer and the metal interlayer. In some embodiments, the surface layer can be formed more uniformly on the metal interlayer than on the primary conductive layer, or adhere better to the metal interlayer than to the primary conductive layer.

[0041] In some embodiments, the current collector can be characterized by having a surface roughness. In some embodiments, the upper surface 108 of the lithium storage layer 107 can have a surface roughness lower than that of the surface of the current collector 101. In this specification, the comparison and measurement of surface roughness are based on the roughness average (R a ), RMS roughness (R q ), maximum profile peak height roughness (R p ), average maximum height of the profile (R z ), or peak density (P c ). In some embodiments, the current collector can be characterized by having both a surface roughness R z ≥ 2.5 μm and a surface roughness R a ≥ 0.25 μm. In some embodiments, R z is in the range of 2.5 - 3.0 μm, or 3.0 - 3.5 μm, or 3.5 - 4.0 μm, or 4.0 - 4.5 μm, or 4.5 - 5.0 μm, or 5.0 - 5.5 μm, or 5.5 - 6.0 μm, or 6.0 - 6.5 μm, or 6.5 - 7.0 μm, or 7.0 - 8.0 μm, or 8.0 - 9.0 μm, or 9.0 - 10 μm, 10 - 12 μm, 12 - 14 μm, or any combination of these ranges. In some embodiments, R a is in the range of 0.25 - 0.30 μm, or 0.30 - 0.35 μm, or 0.35 - 0.40 μm, or 0.40 - 0.45 μm, or 0.45 - 0.50 μm, or 0.50 - 0.55 μm, or 0.55 - 0.60 μm, or 0.60 - 0.65 μm, or 0.65 - 0.70 μm, or 0.70 - 0.80 μm, or 0.80 - 0.90 μm, or 0.90 - 1.0 μm, or 1.0 - 1.2 μm, or 1.2 - 1.4 μm, or any combination of these ranges.

[0042] In some embodiments, some or most of the surface roughness of the current collector can be imparted by a conductive layer and / or a metallic interlayer. Alternatively, some or most of the surface roughness of the current collector may be imparted by a surface layer. Alternatively, any combination of the conductive layer, the metallic interlayer, and the surface layer may substantially contribute to the surface roughness.

[0043] In some embodiments, a conductive layer, such as a metal interlayer, may include an electrodeposited copper roughening mechanism to increase surface roughness. For example, a relatively smooth copper foil can be placed in a first acidic copper plating solution having 50-250 g / L of sulfuric acid and less than 10 g / L of copper, provided as copper sulfate. The copper mechanism involves the cathode polarization of the copper foil and an electrodeposition of about 0.05-0.3 A / cm². 2 The copper foil can be deposited at room temperature by applying a current density of several seconds to several minutes. In some embodiments, the copper foil can then be placed in a second acidic copper plating solution having 50 to 200 g / L of sulfuric acid and more than 50 g / L of copper, provided as copper sulfate. The second acidic copper bath may optionally be heated to a temperature of about 30°C to 50°C. Cathode polarization and about 0.05 to 0.2 A / cm² 2 By applying this current density for several seconds to several minutes, a thin copper layer can be electroplated onto the copper mechanism, fixing the particles to the copper foil.

[0044] Alternatively, or in combination with an electrodeposited copper roughening mechanism, the conductive layer may undergo another electrochemical, chemical, or physical treatment to impart a desired surface roughness before the formation of the surface layer.

[0045] In some embodiments, a metal foil, including but not limited to rolled copper foil, can be first heated in an oven in air (e.g., between 100°C and 200°C) for a certain period of time (e.g., 10 minutes to 24 hours) to remove volatile materials from its surface and induce some surface oxidation. In some embodiments, the heat-treated foil can then be subjected to an additional chemical treatment, such as immersion in a chemical etching agent, e.g., an acid or a hydrogen peroxide / HCl solution, followed by optional rinsing with deionized water. The chemical etching agent removes the oxidized metal. Such treatment can increase surface roughness. In some embodiments, heating is not performed, but the treatment is carried out with a chemical etching agent containing an oxidizing agent. In some embodiments, the oxidizing agent can be dissolved oxygen, hydrogen peroxide, or any other suitable oxidizing agent. Such a chemical etching agent may further include an organic acid such as methanesulfonic acid, or an inorganic acid such as hydrochloric acid or sulfuric acid. After the chemical etching, rinsing with deionized water may be optional. Such treatments described in this paragraph may be referred to herein as “chemical roughening” treatments. In the case of copper foil, any chemical surface roughening treatment performed under ambient conditions is expected to form at least a single layer of copper oxide after rinsing and drying. Such a copper oxide (or other metal oxide) surface can readily accept further treatment, such as silicon compounds.

[0046] In some embodiments, the electrodeposited copper roughening mechanism may feature a nanopillar mechanism. Figure 5A is a cross-sectional view of a non-limiting example of an electrodeposited copper roughening mechanism according to some embodiments. In some cases, the current collector 501 may include a plurality of nanopillar mechanisms 520 (electrodeposited copper roughening mechanisms) disposed on the conductive layer 503. The nanopillar mechanisms 520 are distinguished from the nanopillars 192 in Figure 2 by at least their composition, their layers, their dimensions, the process used to form the nanopillars, their surface density, and / or their orientation. The nanopillar mechanisms 520 may include a metal-containing nanopillar core 522 (e.g., a copper-containing core) and a surface layer 505 provided at least partially and optionally on the conductive layer in the gap region between the nanopillar mechanisms. Each nanopillar mechanism may be characterized by a height H, a base width B, and a maximum width W. The base width B may be the minimum width across the bottom or base of the nanopillar mechanism. The maximum width W can be measured over the widest part perpendicular to the nanopillar mechanism axis. The height H can be measured along the nanopillar mechanism axis from the base to the end of the nanopillar mechanism. The nanopillar axis is the longitudinal axis of the nanopillar mechanism. In some cases, the nanopillar mechanism axis may pass through the center of gravity of the nanopillar mechanism.

[0047] In some embodiments, the nanopillar mechanism may feature first and second type nanopillars. The second type may be less desirable than the first type. In some cases, the first type nanopillar may be characterized by a H in the range of 0.4 μm to 3.0 μm, a B in the range of 0.2 μm to 1.0 μm, a W / B ratio in the range of 1 to 1.5, an H / B (aspect ratio) in the range of 0.8 to 4.0, and an angle of the longitudinal axis of the nanopillar mechanism with respect to the plane of the conductive layer in the range of 60° to 90°. For example, all of the nanopillar mechanisms in Figure 5A may be first type nanopillars. Examples of SEM cross-sections can be found in Figures 8A and 8B, which will be discussed later. In some embodiments, in optical analysis or SEM analysis, the cross-section of the current collector with an average length of 20 μm may include at least two nanopillars of the first type, or at least three, at least four, at least five, at least six, at least seven, at least eight, or at least ten nanopillars of the first type. In some embodiments, in optical analysis or SEM analysis, the cross-section of the current collector with an average length of 20 μm may include 2-4, or 4-6, or 6-8, or 8-10, or 10-12, or 12-14, or 14-16, or 16-20, or 20-25, or 25-30, or any combination of these ranges. Note that the 20 μm length in the analysis refers to the lateral distance along the length of the current collector, for example, as shown in Figure 5A.

[0048] In some cases, the second type of nanopillar may be characterized by a H of at least 1.0 μm and a W / B ratio greater than 1.5. That is, the second type of nanopillar tends to spread out from its base. An example of an SEM cross-section can be found in Figure 9, which will be discussed later. Figure 5B is a cross-sectional view of a non-limiting example of the second type of nanopillar. For clarity, the nanopillar core and surface layer are not defined separately. The second type of nanopillar may have a significantly wider upper portion (sometimes referred to herein as the “wide-top roughening mechanism”), such as the nanopillar mechanism 524. Alternatively, the second type of nanopillar may include a branched or tree-like structure, such as the nanopillar mechanism 526. The “trunks” and “branches” are all similar in width, but the entire mechanism spreads significantly upward, as shown by the effective cross-sectional profile 526'. The effective cross-sectional profile 526' is the shape formed by lines drawn between the outermost points of the continuous branches or trunks of the nanopillar mechanism. Such branched structures can have the same effect as solid nanopillar mechanisms like 524. In some embodiments, in optical analysis or SEM analysis, the cross-section of the current collector with an average length of 20 μm may contain fewer second-type nanopillars than first-type nanopillars. In some embodiments, in optical analysis or SEM analysis, the cross-section of the current collector with an average length of 20 μm may contain fewer than four, or fewer than three, two, or fewer than one second-type nanopillar.

[0049] In some embodiments, the surface roughness is R a or R z While relatively large in relation to the surface roughness, the mechanism itself may be a broad rough mechanism, for example, as bumps and hills spaced at least approximately 2 μm apart on average. Figure 5C is an SEM cross-sectional view of a part of a current collector having a broad rough mechanism. The current collector 501C includes a conductive layer 503C (the surface layer is not easily distinguishable in SEM). This current collector has a measured surface roughness R aIt had a peak height of 508 nm. The broad coarse mechanism can be characterized by the peak height P and the trough separation V. The ratio P / V represents the aspect ratio of the broad coarse mechanism. In some embodiments, on average, V is at least 3 μm, or at least greater than 4 μm, and P / V is less than 0.8, or less than 0.6. In some embodiments, on average, V is in the range of 3-4 μm, or 4-5 μm, or 5-6 μm, or 6-8 μm, or 8-10 μm, or 10-12 μm, or 12-15 μm, and P / V is in the range of 0.2-0.3, or 0.3-0.4, or 0.4-0.5, or 0.5-0.6, or 0.6-0.7, or 0.7-0.8, or any combination of those ranges with respect to V and P / V. In some embodiments, V is the same as the inter-peak separation. This same current collector will be described later with reference to Figures 8A and 8B.

[0050] In some embodiments, the chemically roughened current collector surface may appear pitted, cratered, or corroded. A non-limiting example is shown in Figure 11. Some areas, such as Type A regions, which closely correspond to the original surface, are still visible and can be distinguished from the original roll-formed surface. The majority of the surface is etched, resulting in a very rough and random crater topology that is much rougher than the original surface. In some embodiments, at least 50% of the surface of the conductive layer is etched to a depth of at least 0.5 μm, or at least 1.0 μm, from the original surface, resulting in a surface roughness R aThe surface area is at least 400 nm, or at least 500 nm, or at least 600 nm, or at least 700 nm. Numerous pits / craters are visible. In some embodiments, when examined by SEM analysis, an average 100 square micron area of ​​a chemically roughened current collector may contain at least one, or at least two, three, or four recognizable pits. In some embodiments, a “pit” can be a mechanism characterized by width and depth, with a depth-to-width ratio of at least 0.25, or at least 0.5. A pit can be a recess defined by the current collector. The top of a pit can be the top surface of the current collector. In some embodiments, a pit can be at least 2 μm wide. In some embodiments, a pit can occupy 2% to 5%, or 5% to 10%, or 10% to 20%, or 20% to 30%, or 30% to 40%, or 40% to 50% of the surface area of ​​the current collector. In some embodiments, some etching or pitting regions may have a finer roughness structure formed from a collection of smaller secondary pits or craters. Such secondary pits may have an average width or diameter of less than about 2 μm or less than about 1 μm. In some embodiments, the secondary pits may occupy 5% to 10%, or 5% to 10%, or 10% to 20%, or 20% to 30%, or 30% to 40%, or 40% to 50%, or 50% to 60%, or 60% to 70%, or 70% to 90% of the surface area of ​​the current collector.

[0051] surface layer

[0052] In some embodiments, the surface layer may include zinc, a metal-oxygen compound, or a silicon compound, or a combination thereof. In some embodiments, the surface layer may include at least a metal-oxygen compound in addition to either zinc or a silicon compound, or in addition to both zinc and a silicon compound. The surface layer may optionally include additional materials. In some embodiments, the surface layer may include two or more sublayers. Each of the two or more sublayers may have a different composition from adjacent sublayers. The composition in each sublayer may be homogeneous or heterogeneous. In some embodiments, at least one sublayer contains zinc, a metal-oxygen compound, or a silicon compound. In some embodiments, at least one sublayer contains a metal-oxygen compound, and at least one other sublayer contains zinc or a silicon compound. A non-limiting example is shown in Figure 6, which shows a surface layer 605 having up to four surface sublayers. Surface sublayer 605-1 covers the conductive layer 603. Surface sublayer 605-2 covers surface sublayer 605-1, surface sublayer 605-3 covers surface sublayer 605-2, and surface sublayer 605-4 covers surface sublayer 605-3. The continuous porous lithium storage layer 607 can be placed on the uppermost sublayer, i.e., the sublayer furthest from the conductive layer 603, which in Figure 6 is sublayer 605-4 when all four sublayers are present.

[0053] In some embodiments, the surface layer or sublayer may include zinc ("Surface Material A"). In some embodiments, the surface layer or sublayer may include a metal-oxygen compound ("Surface Material B"). In some embodiments, the surface layer or sublayer may include a silicon compound ("Surface Material C") containing or derived from siloxanes, silanes (i.e., silane-containing compounds), silazanes, or reaction products thereof. In this specification, "silicon compound" does not include elemental silicon such as amorphous silicon. In some embodiments, the sublayer may include a metal oxide or metal chalcogenide ("Surface Material D"). These materials are described in more detail below. To facilitate the explanation using Figure 6, Table 1 provides some non-limiting examples of surface layers, listing the surface materials as A, B, C, and / or D, and in which sublayers they are located. In some cases, "B&C" refers to a mixture of those two within a single surface sublayer. In embodiments where B or D is provided as a sublayer 605-2 on top of A in sublayer 605-1, the metal of B or D is something other than zinc. [Table 1]

[0054] Zinc (Surface material A)

[0055] In some embodiments, the surface layer or sublayer contains metallic zinc or a zinc alloy that can be deposited, for example, by electroplating, electroless plating, physical vapor deposition, chemical vapor deposition, or sputtering. Typical electroplating solutions include those based on zinc pyrophosphate, zinc chloride, zinc cyanide, or zinc sulfate. For example, a zinc pyrophosphate plating solution with a zinc concentration of 5 g / l to 30 g / l, a potassium pyrophosphate concentration of 50 g / l to 500 g / l, and a pH of 9 to 12 can be used. Plating can be carried out for several seconds to several minutes at a solution temperature of 20°C to 50°C by cathode polarization of the conductive layer under a current density of 0.003 A / cm² to 0.10 A / cm². In some embodiments, the zinc plating solution may further contain manganese, tin, or nickel salts for forming a zinc-manganese alloy, zinc-tin alloy, or zinc-nickel alloy. In this specification, a zinc alloy includes a zinc-containing layer in which less than 98 atomic percent of the total metal atoms are zinc. Conversely, non-alloyed zinc includes a zinc-containing layer in which at least 98 atomic percent is zinc. In some embodiments, zinc-nickel alloys may contain 3-5 atomic percent nickel, or 5-10 atomic percent nickel, or 10-15 atomic percent nickel, or 15-20 atomic percent nickel, or 20-30 atomic percent nickel, or 30-45 atomic percent nickel. Numerous other plating compositions and conditions are available and can be used instead.

[0056] In some embodiments, the amount of zinc in the surface layer or sublayer can be at least 1 mg / m², or at least 2 mg / m², or at least 5 mg / m². In some embodiments, the amount of zinc is less than 1000 mg / m². In some embodiments, the amount of zinc can be in the range of 1-2 mg / m², or 2-5 mg / m², or 5-10 mg / m², or 10-20 mg / m², or 20-50 mg / m², or 50-75 mg / m², or 75-100 mg / m², or 100-250 mg / m², or 250-500 mg / m², or 500-1000 mg / m², or 1000-2000 mg / m², or 2000-3000 mg / m², or 3000-4000 mg / m², or 4000-5000 mg / m², or any combination of these ranges. In some embodiments, a surface layer or sub-layer containing a zinc-nickel alloy may contain at least 500 mg / m2 of zinc. In some embodiments, a surface layer or sub-layer containing non-alloy zinc may contain less than 500 mg / m2 of zinc. In some embodiments, a surface layer or sub-layer having a zinc-containing material may have a thickness of at least 0.2 nm, or at least 0.5 nm, or at least 1 nm, or at least 2 nm. In some embodiments, a surface layer or sub-layer having a zinc-containing material may have a thickness in the range of 0.2 to 0.5 nm, or 0.5 to 1.0 nm, or 1.0 to 2.0 nm, or 2.0 to 5.0 nm, or 5.0 to 10 nm, or 10 to 20 nm, or 20 to 50 nm, or 50 to 100 nm, or 100 to 200 nm, or 200 to 300 nm, or 300 to 400 nm, or 400 to 500 nm, 500 to 700 nm, or any combination of these ranges.

[0057] Metal-oxygen compound (surface material B)

[0058] In some embodiments, the surface layer or surface sublayer comprises a metal-oxygen compound containing a transition metal. Unless otherwise specified, the term “transition metal” as used anywhere in this application includes any element from Groups 3 through 12 of the periodic table, including lanthanides and actinides. The metal-oxygen compound may include a transition metal oxide, a transition metal hydroxide, a transition oxometalate, or a mixture thereof. It should be noted that oxometalates can be considered a subset of metal oxides related to cations that are essentially anionic and optionally alkali metals, alkaline earth metals, or transition metals (the same or different transition metals as in the oxometalate). In some embodiments, the transition metal of the metal-oxygen compound may include titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. In some embodiments, the metal-oxygen compound may include, but is not limited to, a transition oxometalate containing a chromate, tungstate, or molybdate. Metal-oxygen compounds may be coated from a solution, electroplated, or electroless plated (including "dip plating"). In some embodiments, such electroplating or electroless plating may use a solution containing transition oxometalates. In some cases, the properties of the deposited coating may include a mixture of transition metal oxides, hydroxides, and / or oxometalates.

[0059] A non-limiting, typical electrolytic chromate solution may have a chromic acid or potassium chromate concentration of 2 g / l to 7 g / l and a pH of 10 to 12. Chromium-containing metal-oxygen compounds can be deposited by optionally heating the solution to a temperature of 30°C to 40°C and applying a cathode current density of 0.02 to 8 A / cm² to the conductive layer, typically for several seconds. In some embodiments, such a surface layer or surface sublayer may be referred to as a chromate-treated layer. The deposited chromium-containing metal-oxygen compound may include one or more of chromium oxide, chromium hydroxide, or chromate. At least a portion of the chromium may exist as chromium(III).

[0060] In some embodiments, the amount of chromium in the surface layer or sublayer can be at least 0.5 mg / m², or at least 1 mg / m², or at least 2 mg / m². In some embodiments, the amount of chromium is less than 250 mg / m². In some embodiments, the amount of chromium can be in the range of 0.5 to 1 mg / cm², or 1 to 2 mg / m², or 2 to 5 mg / m², or 5 to 10 mg / m², or 10 to 20 mg / m², or 20 to 50 mg / m², or 50 to 75 mg / m², or 75 to 100 mg / m², or 100 to 250 mg / m², or any combination of these ranges. In some embodiments, the surface layer or sublayer having the chromium-containing material can be at least 0.2 nm thick, or at least 0.5 nm thick, or at least 1 nm thick, or at least 2 nm thick. In some embodiments, the surface layer or sublayer having a chromium-containing material has a thickness in the range of 0.2 to 0.5 nm, or 0.5 to 1.0 nm, or 1.0 to 2.0 nm, or 2.0 to 5.0 nm, or 5.0 to 10 nm, or 10 to 20 nm, or 20 to 50 nm, or 50 to 100 nm, or any combination of these ranges.

[0061] Silicon compound (surface material C)

[0062] In some embodiments, the surface layer or sublayer comprises a silicon compound formed by treatment with a silane, siloxane, or silazane compound, any of which may be referred to herein as the silicon compound agent. In some embodiments, the silicon compound agent treatment can increase adhesion to the overlying sublayer or continuous porous lithium storage layer. In some embodiments, the silicon compound may be a polymer including, but not limited to, a polysiloxane. In some embodiments, the siloxane compound may have a general structure such as that shown in formula (1): Si(R) n (OR') 4-n (1) (wherein n=1, 2, or 3, and R and R' are independently selected from substituted or unsubstituted alkyl, alkenyl, or aryl groups).

[0063] The silicon compound in the layer or sublayer may originate from a silicon compound agent, but has a different chemical structure from the agent used to form it. In some embodiments, the silicon compound may react with the underlying surface to form bonds such as metal-oxygen-silicon bonds, thereby causing the silicon compound to lose one or more functional groups (e.g., OR' groups derived from siloxane). In some embodiments, the silicon compound agent may contain groups that polymerize to form polymers. In some embodiments, the silicon compound agent may form a matrix of Si-O-Si crosslinks. In some embodiments, PECVD deposition of lithium storage material may alter the chemical structure of the silicon compound agent or even form secondary derivative species. The silicon compound contains silicon. The silicon compound may be the result of a silicon compound agent reacting with reactants 1, 2, 3, or 4 in different reactions 1, 2, 3, or 4.

[0064] The silicon compound agent may be provided, for example, as an aqueous solution or organic solvent solution of about 0.3 g / l to 15 g / l. Methods for adsorption of the silicon compound agent include, but are not limited to, immersion, shower, and spray methods. In some embodiments, the silicon compound agent may be provided as a vapor and adsorbed onto a sublayer. In some embodiments, the silicon compound agent may be deposited by initiated chemical vapor deposition (iCVD). In some embodiments, the silicon compound agent may optionally contain an olefin-functionalized silane moiety, an epoxy-functionalized silane moiety, an acrylic-functionalized silane moiety, an amino-functionalized silane moiety, or a mercapto-functionalized silane moiety in combination with a siloxane or silazane group. In some embodiments, the silicon compound agent may be a siloxysilane. In some embodiments, the silicon compound agent may undergo polymerization during or after deposition. Some non-limiting examples of silicon compound agents include hexamethyldisilazane (HMDS), vinyltrimethoxysilane, vinylphenyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 4-glycidylbutyltrimethoxysilane, 3-aminopropyltriethoxysilane, N-2-(aminoethyl)-3-aminopropyltrimethoxysilane, N Examples include -3-(4-(3-aminopropoxy)butoxy)propyl-3-aminopropyltrimethoxysilane, imidazolesilane, triazinesilane, 3-mercaptopropyltrimethoxysilane, 1,3,5,7-tetravinyl-1,3,5,7-tetramethylcyclotetrasiloxane, 1,3,5-trivinyl-1,3,5-trimethylcyclotrisiloxane, pentavinylpentamethylcyclopentasiloxane, and octavinyl-T8-silquioxane. In some embodiments, the layer or sublayer containing the silicon compound may contain silicon, oxygen, and carbon, and may further contain nitrogen or sulfur.

[0065] In some embodiments, the treatment with the silicon compound agent may be followed by a step of removing the solvent or initiating polymerization or another chemical transformation, which may involve heating, contact with a reactive reagent, or both. The surface sublayer formed from the silicon compound agent should not be so thick as to form a significant barrier to charge conduction between the current collector and the continuous porous lithium storage layer. In some embodiments, the sublayer formed from the silicon compound agent may have a density of 0.1-0.2 mg / m². 2 The range, or 0.1-0.25 mg / m² 2 The range, or 0.25-0.5 mg / m² 2 The range, or 0.5-1 mg / m² 2 The range, or 1-2 mg / m² 2 , or 2-5 mg / m² 2 , or 5-10 mg / m² 2 , or 10-20 mg / m² 2 , or 20-50 mg / m² 2 , or 50-100 mg / m² 2 , or 100-200 mg / m² 2 , or 200-300 mg / m² 2 , or any combination of those ranges, the silicon content may be 1, 2, 4, 6, 8, 10, 15, 20, 50, 100, or 200 of the silicon compound or its reaction products. The surface layer or surface sublayer having the silicon compound may be porous. In some embodiments, the silicon compound may decompose or partially decompose during the deposition of the lithium storage layer.

[0066] Metal oxide or metal chalcogenide (surface material D)

[0067] In some embodiments, the surface sublayer may contain a metal oxide, and such a surface sublayer may be called a metal oxide sublayer. In some embodiments, the metal oxide sublayer contains a transition metal oxide. In some embodiments, the metal oxide sublayer contains oxides of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. In some embodiments, the metal oxide sublayer is a conductive doped oxide, but is not limited to indium-doped tin oxide (ITO) or aluminum-doped zinc oxide (AZO). In some embodiments, the metal oxide sublayer contains an alkali metal oxide or an alkaline earth metal oxide. In some embodiments, the metal oxide sublayer contains a lithium oxide. The metal oxide sublayer may contain a mixture of metals. For example, "nickel oxide" may optionally contain other metals in addition to nickel. In some embodiments, the metal oxide sublayer contains oxides of alkali metals (e.g., lithium or sodium) or alkaline earth metals (e.g., magnesium or calcium) along with oxides of transition metals (e.g., titanium, nickel, or copper). In some embodiments, the metal oxide sublayer may contain small amounts of hydroxide such that the ratio of oxygen atoms in hydroxide form to oxide is less than 1 to 4, respectively. The metal oxide sublayer may contain stoichiometric oxides, non-stoichiometric oxides, or both. In some embodiments, the metal in the metal oxide sublayer may exist in multiple oxidation states. Generally, oxometalates can be considered a subclass of metal oxides. For clarity, any reference to “metal oxides” in this specification with respect to their use in surface sublayers excludes oxometalates.

[0068] In some embodiments, the metal oxide sublayer may be at least one single layer with a thickness of at least 2, 3, 5, or 10. In some embodiments, the metal oxide sublayer may have an average thickness of at least 0.1 nm or at least 0.2 nm. In some embodiments, the metal oxide sublayer may have an average thickness of less than 5000 nm or less than 3000 nm. In some embodiments, the metal oxide sublayer has an average thickness in the range of 0.5-1 nm, or 1-2 nm, or 2-5 nm, or 5-10 nm, or 10-20 nm, or 20-50 nm, or 50-100 nm, or 100-200 nm, or 200-500 nm, or 500-1000 nm, or 1000-1500 nm, or 1500-2000 nm, or 2000-2500 nm, or 2500-3000 nm, or 3000-4000 nm, or 4000-5000 nm, or any combination of these ranges.

[0069] In some embodiments, the metal oxide sublayer is formed by atomic layer deposition (ALD), chemical vapor deposition (CVD), hot vapor deposition, or sputtering.

[0070] In some embodiments, a metal oxide sublayer precursor composition can be coated or applied onto a current collector having one or more surface sublayers, and then treated to form the metal oxide sublayer. Some non-limiting examples of metal oxide precursor compositions include sol-gels (metal alkoxides), metal carbonates, metal acetates (including organic acetates), metal hydroxides, and metal oxide dispersions. The metal oxide precursor composition may also be heat-treated to form the metal oxide sublayer.

[0071] In some embodiments, the precursor composition for the metal oxide sublayer includes a metal, such as metal-containing particles or a sputtered metal layer. The metal may then be oxidized (e.g., thermally) in the presence of oxygen, electrolytically, or chemically oxidized in an oxidizing liquid or gaseous medium to form the metal oxide sublayer.

[0072] In some embodiments, the sublayer may include a metal chalcogenide such as a metal sulfide or metal selenide. The metal chalcogenide can be deposited by ALD, CVD, hot vapor deposition, or sputtering. Alternatively, the metal chalcogenide may be deposited by a coating method from a solution or mixture. In some embodiments, the metal chalcogenide sublayer can be formed by chemically reacting a metal with a metal sulfide-forming reactant. In some embodiments, the metal chalcogenide sublayer has an average thickness of at least 0.1 nm, or at least 0.2 nm. In some embodiments, the metal chalcogenide sublayer may have an average thickness of less than 5000 nm, or less than 3000 nm. In some embodiments, the metal oxide sublayer has an average thickness in the range of 0.5-1 nm, or 1-2 nm, or 2-5 nm, or 5-10 nm, or 10-20 nm, or 20-50 nm, or 50-100 nm, or 100-200 nm, or 200-500 nm, or 500-1000 nm, or 1000-1500 nm, or 1500-2000 nm, or 2000-2500 nm, or 2500-3000 nm, or 3000-4000 nm, or 4000-5000 nm, or any combination of these ranges.

[0073] In some embodiments, the ratio of the average thickness of the surface layer (including all sublayers, if present) to the average thickness of the conductive layer is less than 1, or less than 0.5, or less than 0.2, or less than 0.1, or less than 0.05, or less than 0.02, or less than 0.01, or less than 0.005.

[0074] In some embodiments, the current collector can be heat-treated (optionally under inert conditions) before depositing the continuous porous lithium storage layer. Such heating can improve the physical properties of the current collector, for example, by reducing internal stress, improving adhesion between the various layers and sublayers of the current collector, or both. The temperature and time of the aforementioned heat treatment step depend largely on the choice of material. In some embodiments, the heat treatment includes heating at temperatures in the range of 100–200°C, or 200–300°C, or 300–400°C, or 400–500°C, or any combination of these ranges. In some embodiments, the heat treatment step includes exposure to one of the above temperature ranges for a period of time in the range of 1–10 minutes, or 10–30 minutes, or 30–60 minutes, or 1–2 hours, or 2–4 hours, or 4–8 hours, or 8–16 hours, or 16–24 hours, or any combination of these ranges.

[0075] Lithium storage layer

[0076] In some embodiments, the lithium storage layer may be a continuous porous lithium storage layer comprising a porous material capable of reversibly incorporating lithium. In some embodiments, the continuous porous lithium storage layer comprises silicon, germanium, antimony, tin, or a mixture of two or more of these elements. In some embodiments, the continuous porous lithium storage layer is substantially amorphous. In some embodiments, the continuous porous lithium storage layer comprises substantially amorphous silicon. Such a substantially amorphous storage layer may contain small amounts (e.g., less than 20 atomic percent) of crystalline material dispersed therein. The continuous porous lithium storage layer may contain dopants such as hydrogen, boron, phosphorus, sulfur, fluorine, aluminum, gallium, indium, arsenic, antimony, bismuth, nitrogen, or metallic elements. In some embodiments, the continuous porous lithium storage layer may contain porous, substantially amorphous silicon hydride (a-Si:H) having, for example, a hydrogen content of 0.1 to 20 atomic percent or higher. In some embodiments, the continuous porous lithium storage layer contains methylated amorphous silicon. Note that, unless otherwise specified, atomic percent measurements used herein for lithium storage materials or layers refer to atoms other than hydrogen.

[0077] In some embodiments, the continuous porous lithium storage layer contains at least 40 atomic percent, or at least 50 atomic percent, or at least 60 atomic percent, or at least 70 atomic percent, or at least 80 atomic percent, or at least 90 atomic percent of silicon, germanium, or a combination thereof. In some embodiments, the continuous porous lithium storage layer contains at least 40 atomic percent, or at least 50 atomic percent, or at least 60 atomic percent, or at least 70 atomic percent, or at least 80 atomic percent, or at least 90 atomic percent, or at least 95 atomic percent, or at least 97 atomic percent of silicon. Note that in the case of pre-lithiumized anodes, as described later, the lithium content is excluded from this atomic percent characterization.

[0078] In some embodiments, the continuous porous lithium storage layer contains less than 10 atomic percent, or less than 5 atomic percent, or less than 2 atomic percent, or less than 1 atomic percent, or less than 0.5 atomic percent of carbon. In some embodiments, the continuous porous lithium storage layer is substantially free of carbon-based binders, graphitic carbon, graphene, graphene oxide, reduced graphene oxide, carbon black, and conductive carbon (i.e., the continuous porous lithium storage layer contains them in amounts less than 1% by weight, or less than 0.5% by weight). Some non-limiting examples of carbon-based binders include organic polymers such as those based on styrene-butadiene rubber, polyvinylidene fluoride, polytetrafluoroethylene, polyacrylic acid, carboxymethylcellulose, or polyacrylonitrile.

[0079] A continuous porous lithium storage layer may contain voids or gaps (pores) that are random or heterogeneous in terms of size, shape, and distribution. Such porosity does not result in, and does not arise from, the formation of any recognizable lithium storage nanostructures such as nanowires, nanopillars, nanotubes, or regular nanochannels. In some embodiments, the pores may be polydispersible. In some embodiments, the continuous porous lithium storage layer may be characterized by a nanoporous structure. In some embodiments, the continuous porous lithium storage layer may have a concentration of 1.0–1.1 g / cm³. 3 , or 1.1~1.2 g / cm³ 3 , or 1.2-1.3 g / cm³ 3 , or 1.3~1.4 g / cm³ 3 , or 1.4~1.5 g / cm³ 3 , or 1.5~1.6 g / cm³ 3 , or 1.6~1.7 g / cm³ 3 , or 1.7~1.8 g / cm³ 3 , or 1.8~1.9 g / cm³ 3 , or 1.9~2.0 g / cm³ 3 , or 2.0~2.1 g / cm³ 3 , or 2.1~2.2 g / cm³ 3 , or 2.2~2.25 g / cm³ 3, or 2.25~2.29 g / cm³ 3 Having an average density within the range of, or any combination of, those ranges, and containing at least 70 atomic% silicon, 80 atomic% silicon, or at least 85 atomic% silicon, or at least 90 atomic% silicon, or at least 95 atomic% silicon. 2.3 g / cm³ 3 Please note that densities below a certain level are evidence of the porous nature of the a-Si-containing lithium storage layer.

[0080] In some embodiments, the majority of the active material (e.g., silicon, germanium, or alloys thereof) of the continuous porous lithium storage layer has substantially lateral connectivity over a portion of the current collector, and such connectivity extends around random pores and gaps. Referring again to Figure 1, in some embodiments, “substantially lateral connectivity” means that the active material at one point X of the continuous porous lithium storage layer 107 can connect to the active material at a second point X’ of the layer, which is at a linear lateral distance LD that is at least the same size as the average thickness T of the continuous porous lithium storage layer, or a lateral distance that is at least twice the thickness, or at least three times the thickness. Although not shown, the total path distance of material connectivity may be longer than LD, including bypassing pores and following the topography of the current collector. In some embodiments, the continuous porous lithium storage layer can be described as a matrix of interconnected silicon, germanium, or alloys thereof, with random pores and gaps filled in. In some embodiments, the continuous porous lithium storage layer may have a spongy morphology. It should be noted that a continuous porous lithium storage layer does not necessarily extend across the entire anode without lateral breaks, and may still be considered continuous while containing random discontinuities or cracks. In some embodiments, such discontinuities may occur more frequently on rough current collector surfaces. In some embodiments, the continuous porous lithium storage layer may include adjacent columns of silicon and / or silicon nanoparticle aggregates.

[0081] In some embodiments, the continuous porous lithium storage layer is made of silicon (SiO₂). x ), germanium (GeO x ) or tin (SnO x The material comprises a quasi-stoichiometric oxide of ), where the ratio of oxygen atoms to silicon, germanium, or tin atoms is less than 2:1, i.e., x < 2, or less than 1:1, i.e., x < 1. In some embodiments, x is in the range of 0.02 to 0.95, or 0.02 to 0.10, or 0.10 to 0.50, or 0.50 to 0.95, or 0.95 to 1.25, or 1.25 to 1.50, or any combination of these ranges.

[0082] In some embodiments, the continuous porous lithium storage layer is made of silicon (SiN y ), germanium (GeN y ) or tin (SnN y The lithium storage bed contains a quasi-stoichiometric nitride of silicon, where the ratio of nitrogen atoms to silicon, germanium, or tin atoms is less than 1.25:1, i.e., y < 1.25. In some embodiments, y is 0.02 to 0.95, or 0.02 to 0.10, or 0.10 to 0.50, or 0.50 to 0.95, or 0.95 to 1.20, or any combination of these ranges. Lithium storage beds having a quasi-stoichiometric nitride of silicon are sometimes called nitrogen-doped silicon or silicon-nitrogen alloys.

[0083] In some embodiments, the continuous porous lithium storage layer is made of silicon (SiO₂). x N y ), germanium (GeO x N y ) or tin (SnO x N y The material comprises a quasi-stoichiometric oxynitride of ) and the ratio of total oxygen and nitrogen atoms to silicon, germanium, or tin atoms is less than 1:1, i.e., (x+y)<1. In some embodiments, (x+y) is 0.02 to 0.95, or 0.02 to 0.10, or 0.10 to 0.50, or 0.50 to 0.95, or any combination of these ranges.

[0084] In some embodiments, the above-mentioned quasi-stoichiometric oxides, nitrides, or oxynitrides are supplied by a CVD process, including but not limited to a PECVD process. Oxygen and nitrogen may be uniformly supplied within the continuous porous lithium storage bed, or the oxygen or nitrogen content may vary as a function of the thickness of the storage bed.

[0085] CVD

[0086] CVD generally involves flowing a precursor gas, a gasified liquid (in the case of direct liquid injection CVD), or a gas and liquid into a chamber containing one or more heated objects to be coated, typically. Chemical reactions occur on and near the high-temperature surface, allowing a thin film to be deposited on the surface. This is accompanied by the generation of chemical byproducts, which are discharged from the chamber along with unreacted precursor gases. As expected for the wide variety of materials to be deposited and the wide range of applications, there are many variations of CVD that can be used to form lithium storage layers, surface layers or sublayers, auxiliary layers (see below), or other layers. In some embodiments, this can be carried out in hot-wall or cold-wall reactors, with and without carrier gases, at pressures from below Torr to above atmospheric pressure, and at temperatures typically in the range of 100 to 1600°C. There are also various enhanced CVD processes that involve the use of plasma, ions, photons, lasers, hot filaments, or combustion reactions to increase the deposition rate and / or decrease the deposition temperature. Deposition can be controlled using a variety of process conditions, including but not limited to temperature, precursor material, gas flow rate, pressure, substrate voltage bias (if applicable), and plasma energy (if applicable).

[0087] As described above, continuous porous lithium storage layers, such as silicon or germanium or both, can be provided by plasma-enhanced chemical vapor deposition (PECVD). Compared to conventional CVD, deposition by PECVD is often carried out at lower temperatures and higher rates, which can be advantageous for higher manufacturing throughput. In some embodiments, PECVD is used to deposit a substantially amorphous silicon layer (optionally doped) on a surface layer. In some embodiments, PECVD is used to deposit a substantially amorphous continuous porous silicon layer on a surface layer.

[0088] In the PECVD process, according to various embodiments, the plasma can be generated in or upstream of the chamber where the substrate is placed and supplied to the chamber. Various types of plasma can be used, including but not limited to capacitively coupled plasma, inductively coupled plasma, and conductively coupled plasma. Any suitable plasma source can be used, including DC, AC, RF, VHF, combinatorial PECVD, and microwave sources. In some embodiments, magnetron-assisted RF PECVD can be used.

[0089] PECVD process conditions (temperature, pressure, precursor gas, carrier gas, dopant gas, flow rate, energy, etc.) may vary depending on the specific process and tools used, as is well known in the art.

[0090] In some embodiments, the PECVD process is an expanding thermal plasma chemical vapor deposition (ETP-PECVD) process. In such a process, a plasma-generating gas passes through a DC arc plasma generator along with a web or other substrate containing a current collector in an adjacent vacuum chamber to form a plasma. A silicon source gas is injected into the plasma, generating radicals. The plasma expands through a branching nozzle and is injected into the vacuum chamber and toward the substrate. An example of a plasma-generating gas is argon (Ar). In some embodiments, ionized argon species in the plasma collide with silicon source molecules to form silicon source radical species, which are deposited on the current collector. Exemplary ranges for the voltage and current of the DC plasma source are 60–80 volts and 40–70 amperes, respectively.

[0091] Any suitable silicon source can be used to deposit silicon. In some embodiments, the silicon source may be a silane-containing gas, including but not limited to silane (SiH4), dichlorosilane (H2SiCl2), monochlorosilane (H3SiCl), trichlorosilane (HSiCl3), silicon tetrachloride (SiCl4), and diethylsilane. Depending on the gas used, the silicon layer can be formed by decomposition or reaction with another compound, such as by hydrogen reduction. In some embodiments, the gas may include a silicon source such as silane, a noble gas such as helium, argon, neon, or xenon, and optionally one or more dopant gases, and may substantially not contain hydrogen. In some embodiments, the gas may include argon, silane, and hydrogen, and optionally several dopant gases. In some embodiments, the gas flow ratio of argon to the combined gas flow of silane and hydrogen is at least 3.0, or at least 4.0. In some embodiments, the gas flow ratio of argon to the combined gas flow of silane and hydrogen is in the range of 3 to 5, or 5 to 10, or 10 to 15, or 15 to 20, or any combination of these ranges. In some embodiments, the gas flow ratio of hydrogen gas to silane is in the range of 0 to 0.1, or 0.1 to 0.2, or 0.2 to 0.5, or 0.5 to 1, or 1 to 2, or 2 to 5, or any combination of these ranges. In some embodiments, increasing the gas flow ratio of silane to the combined gas flow of silane and hydrogen can form silicon with higher porosity and / or increase the silicon deposition rate. In some embodiments, the dopant gas is borane or phosphine, which can be optionally mixed with the carrier gas.In some embodiments, the gas flow rate ratio of the dopant gas (e.g., borane or phosphine) to the silicon source gas (e.g., silane) is in the range of 0.0001 to 0.0002, or 0.0002 to 0.0005, or 0.0005 to 0.001, or 0.001 to 0.002, or 0.002 to 0.005, or 0.005 to 0.01, or 0.01 to 0.02, or 0.02 to 0.05, or 0.05 to 0.10, or any combination of these ranges. Such gas flow rate ratios described above can refer, for example, to the relative gas flow rate at standard cubic centimeters per minute (SCCM). In some embodiments, the PECVD deposition conditions and gases may be modified during the deposition process.

[0092] In some embodiments, the temperature of the current collector during at least part of the PECVD deposition time is in the range of 20°C to 50°C, 50°C to 100°C, 100°C to 200°C, 200°C to 300°C, 300°C to 400°C, 400°C to 500°C, or 500°C to 600°C, or any combination thereof. In some embodiments, the temperature may change during the PECVD deposition time. For example, the temperature at the initial time of PECVD may be higher than at the later time. Alternatively, the temperature at the later time of PECVD may be higher than at the initial time.

[0093] The thickness or mass per unit area of ​​the continuous porous lithium storage layer depends on the storage material, the desired charge capacity, and other operational and lifetime considerations. Increasing the thickness generally results in greater capacity. If the continuous porous lithium storage layer becomes too thick, the electrical resistance may increase, and stability may decrease. In some embodiments, the anode is at least 1.0 mg / cm³. 2 or at least 1.5 mg / cm³ 2 , or at least 3 mg / cm³ 2 , or at least 5 mg / cm³ 2 It can be characterized by having an active silicon surface density of 1.5 to 2 mg / cm³. In some embodiments, the lithium storage structure has a lithium density of 1.5 to 2 mg / cm³.2 The range, or 2-3 mg / cm³ 2 The range, or 3-5 mg / cm³ 2 The range, or 5-10 mg / cm³ 2 The range, or 10-15 mg / cm³ 2 The range, or 15-20 mg / cm³ 2 The device may be characterized by having an active silicon surface density within a range, or any combination of a continuous range thereof. "Active silicon" refers to silicon that is electrically in communication with the current collector, which is available for reversible lithium storage, at the start of the cell cycle, for example, after the "electrochemical formation" of the anode described later. "Surface density" refers to the surface area of ​​the conductive layer on which active silicon is provided. In some embodiments, not all of the silicon content is active silicon; that is, some may be bound in the form of inactive silicides or electrically insulated from the current collector.

[0094] In some embodiments, the continuous porous lithium storage layer has an average thickness of at least 1 μm, or at least 2.5 μm, or at least 6.5 μm. In some embodiments, the continuous porous lithium storage layer has an average thickness in the range of about 0.5 μm to about 50 μm. In some embodiments, the continuous porous lithium storage layer contains at least 80 atomic% amorphous silicon and / or 1 to 1.5 μm, or 1.5 to 2.0 μm, or 2.0 to 2.5 μm, or 2.5 to 3.0 μm, or 3.0 to 3.5 μm, or 3.5 to 4.0 μm, or 4.0 to 4.5 μm, or 4.5 to 5.0 μm, or 5.0 to 5.5 μm, or The thickness is 5.5-6.0 μm, or 6.0-6.5 μm, or 6.5-7.0 μm, or 7.0-8.0 μm, or 8.0-9.0 μm, or 9.0-10 μm, or 10-15 μm, or 15-20 μm, or 20-25 μm, or 25-30 μm, or 30-40 μm, or 40-50 μm, or any combination of these ranges.

[0095] Other anode mechanisms

[0096] The anode may optionally include various additional layers and mechanisms. The current collector may include one or more mechanisms to ensure reliable electrical connections within the energy storage device. In some embodiments, an auxiliary layer is provided on top of the patterned lithium storage structure. In some embodiments, the auxiliary layer is a protective layer to increase lifespan or physical durability. The auxiliary layer may be an oxide formed from the lithium storage material itself, e.g., silicon dioxide in the case of silicon, or some other suitable material. The auxiliary layer can be deposited, for example, by ALD, CVD, PECVD, vapor deposition, sputtering, solution coating, inkjet, or any method compatible with the anode. In some embodiments, the upper surface of the auxiliary layer may correspond to the upper surface of the anode.

[0097] The auxiliary layer should be moderately conductive to lithium ions, allowing lithium ions to enter and exit the patterned lithium storage structure during charging and discharging. In some embodiments, the lithium ion conductivity of the auxiliary layer is at least 10 -9 S / cm, or at least 10 -8 S / cm, or at least 10 -7 S / cm, or at least 10 -6 The ratio is S / cm. In some embodiments, the auxiliary layer acts as a solid electrolyte.

[0098] Some non-limiting examples of materials used in the auxiliary layer include those containing metal oxides, nitrides, or oxynitrides, such as aluminum, titanium, vanadium, zirconium, hafnium, or tin, or mixtures thereof. The metal oxides, metal nitrides, or metal oxynitrides may also contain other components such as phosphorus or silicon. The auxiliary layer may also contain lithium phosphate nitride (LIPON), lithium phosphate, lithium aluminum oxide, or (Li,La) x Ti y O z , or Li x Si yLithium-containing materials such as Al2O3 may be included. In some embodiments, the auxiliary layer comprises a metal oxide, metal nitride, or metal oxynitride and has an average thickness of less than about 100 nm, for example, in the range of about 0.1 to about 10 nm, or in the range of about 0.2 nm to about 5 nm. LIPON or other solid electrolyte materials having excellent lithium transport properties may have a thickness greater than 100 nm, or may be in the range of about 1 to about 50 nm.

[0099] In some embodiments, the continuous porous lithium storage layer can be at least partially pre-lithified before the first electrochemical cycle after battery assembly, or before battery assembly. That is, even before the first battery cycle, some lithium can be incorporated into the continuous porous lithium storage layer to form a lithified storage layer. In some embodiments, the lithified storage layer can be broken down into smaller structures, including but not limited to platelets, that remain electrochemically active and continue to reversibly store lithium. Note that "lithified storage layer" simply means that at least a portion of the potential storage capacity of the lithium storage layer is filled, and it is not necessarily required that it be fully filled. In some embodiments, the lithiated storage layer may contain lithium in the range of 1% to 5%, or 5% to 10%, or 10% to 15%, or 15% to 20%, or 20% to 30%, or 30% to 40%, or 40% to 50%, or 50% to 60%, or 60% to 70%, or 70% to 80%, or 80% to 90%, or 90% to 100%, or any combination of those ranges, of the theoretical lithium storage capacity of the continuous porous lithium storage layer. In some embodiments, the surface layer may capture some of the lithium, and such capture may need to be taken into account to achieve the desired lithium range in the lithiated storage layer.

[0100] In some embodiments, pre-lithiation may include depositing lithium metal on a continuous porous lithium storage layer, between one or more lithium storage sublayers, or both, for example by vapor deposition, electron beam, or sputtering. Alternatively, pre-lithiation may include contacting the anode with a reducing lithium organic compound, such as lithium naphthalene or n-butyllithium. In some embodiments, pre-lithiation may include incorporating lithium by electrochemical reduction of lithium ions in a pre-lithiation solution. In some embodiments, pre-lithiation may include heat treatment to facilitate the diffusion of lithium into the lithium storage layer.

[0101] In some embodiments, the anode can be heat-treated before battery assembly. In some embodiments, heat treatment of the anode can improve the adhesion or conductivity of various layers by inducing, for example, the migration of atoms from the metal or optional auxiliary layer from the current collector to the continuous porous lithium storage layer. In some embodiments, the continuous porous lithium storage layer comprises at least 80 atomic percent amorphous silicon and at least 0.05 atomic percent copper, or at least 0.1 atomic percent copper, or at least 0.2 atomic percent copper, or at least 0.5 atomic percent copper, or at least 1 atomic percent copper. In some embodiments, the continuous porous lithium storage layer may contain at least 80 atomic percent amorphous silicon and may also contain copper in atomic percent ranges of 0.05-0.1%, or 0.1-0.2%, or 0.2-0.5%, or 0.5-1%, or 1-2%, or 2-3%, or 3-5%, or 5-7%, or any consecutive combination of those ranges. In some embodiments, the copper in the above atomic percent range is, for example, at least 1 μm. 2This can correspond to the cross-sectional area of ​​the continuous porous lithium storage layer, which can be measured by energy-dispersive X-ray spectroscopy (EDS). In some embodiments, there is a gradient in which the concentration of copper is higher in the portion of the continuous porous lithium storage layer closer to the current collector than in the portion further away from the current collector. In some embodiments, instead of or in addition to copper, the continuous porous lithium storage layer may contain other transition metals such as zinc, chromium, or titanium, for example, if the surface layer contains a metal oxide layer of TiO2. The atomic percent of such transition metals (Zn, Cr, or Ti) can be present in the continuous porous lithium storage layer in any of the atomic percent ranges described above with respect to copper. In some embodiments, the continuous porous lithium storage layer may contain more copper than other transition metals. Special heat treatment is not necessarily required to achieve the migration of transition metals into the lithium storage layer.

[0102] In some embodiments, the anode heat treatment can be carried out in a controlled environment with low oxygen and low water content (e.g., less than 10 ppm or partial pressure less than 0.1 Torr, or less than 0.01 Torr, to prevent degradation). In some embodiments, anode heat treatment can be performed using an oven, an infrared heating element, contact with a hot plate, or exposure to a flash lamp. The temperature and time of anode heat treatment depend on the anode material. In some embodiments, anode heat treatment involves heating the anode to a temperature in the range of at least 50°C, optionally 50°C to 950°C, or 100°C to 250°C, or 250°C to 350°C, or 350°C to 450°C, or 450°C to 550°C, or 550°C to 650°C, or 650°C to 750°C, or 750°C to 850°C, or 850°C to 950°C, or a combination of these ranges. In some embodiments, the heat treatment can be applied for a period of 0.1 to 120 minutes.

[0103] In some embodiments, one or more of the processing steps described above can be carried out using a roll-to-roll method, where the conductive layer or current collector is in the form of a roll of rolled film, such as metal foil, mesh, or fabric.

[0104] Battery mechanism

[0105] The above description primarily concerns the anode / negative electrode of a lithium-ion battery (LIB). An LIB typically includes a cathode / positive electrode, an electrolyte, and a separator (if a solid electrolyte is not used). As is well known, a battery can be formed as a multilayer stack of anodes and cathodes using an intervening separator. Alternatively, the anode / cathode stack may be formed as a so-called jelly roll. Such a structure is housed in a suitable housing with the desired electrical contacts.

[0106] Cathode

[0107] The cathode material is not limited to these, but can also be lithium metal oxide or compound (e.g., LiCoO2, LiFePO4, LiMnO2, LiNiO2, LiMn2O4, LiCoPO4, LiNi x Co y Mn z O2, LiLiLi X Co Y Al Z Examples include metal fluorides such as O2, LiFe2(SO4)3 or Li2FeSiO4, carbon fluoride, and iron fluoride (FeF3), metal oxides, sulfur, selenium, and combinations thereof. The cathode active material can operate, for example, by intercalation, conversion, or combination. The cathode active material is typically mounted on or electrically connected to a conductive cathode current collector.

[0108] Current separator

[0109] Current separators allow ions to flow between the anode and cathode but prevent direct electrical contact. Such separators are typically porous sheets. Non-aqueous lithium-ion separators, particularly for small batteries, are typically single-layer or multilayer polymer sheets made of polyolefin. Most commonly, these are based on polyethylene or polypropylene, but polyethylene terephthalate (PET) and polyvinylidene fluoride (PVdF) can also be used. For example, separators can have porosity exceeding 30%, low ion resistivity, a thickness of about 10–50 μm, and high bulk puncture strength. Alternatively, separators may include, for example, glass materials, ceramic materials, ceramic materials embedded in polymers, ceramic-coated polymers, or some other composite or multilayer structure to provide higher mechanical and thermal stability.

[0110] electrolyte

[0111] The electrolyte in a lithium-ion battery may be liquid, solid, or gel. A typical liquid electrolyte comprises one or more solvents and one or more salts, at least one of which contains lithium. During the first few charging cycles (sometimes called formation cycles), the organic solvent and / or electrolyte can partially decompose on the negative electrode surface to form an SEI (solid-electrolyte-interface) layer. The SEI is generally electrically insulating but ionic conductive, thereby allowing the passage of lithium ions. The SEI can reduce the decomposition of the electrolyte in subsequent charging cycles.

[0112] Some non-aqueous solvents suitable for some lithium-ion batteries include: cyclic carbonates (e.g., ethylene carbonate (EC), fluoroethylene carbonate (FEC), propylene carbonate (PC), butylene carbonate (BC), and vinylethylene carbonate (VEC)), vinylene carbonate (VC), lactones (e.g., gamma-butyrolactone (GBL), gamma-valerolactone (GVL), and alpha-angelicalactone (AGL)), linear carbonates (e.g., dimethyl carbonate (DMC), methyl ethyl carbonate (MEC, also commonly abbreviated as EMC), diethyl carbonate (DEC), methylpropyl carbonate (MPC), and dipropyl carbonate). Pyropropyl carbonate (DPC), methylbutyl carbonate (NBC), and dibutyl carbonate (DBC), ethers (e.g., tetrahydrofuran (THF), 2-methyltetrahydrofuran, 1,4-dioxane, 1,2-dimethoxyethane (DME), 1,2-diethoxyethane, and 1,2-dibutoxyethane), nitriles (e.g., acetonitrile and adiponitrile), linear esters (e.g., methyl propionate, methyl pivalate, butyl pivalate, and octyl pivalate), amides (e.g., dimethylformamide), organic phosphates (e.g., trimethyl phosphate and trioctyl phosphate), organic compounds containing an S=O group (e.g., dimethyl sulfone and divinyl sulfone), and combinations thereof.

[0113] Non-aqueous liquid solvents can be used in combination. These combinations include cyclic carbonate-linear carbonate, cyclic carbonate-lactone, cyclic carbonate-lactone-linear carbonate, cyclic carbonate-linear carbonate-lactone, cyclic carbonate-linear carbonate-ether, and combinations of cyclic carbonate-linear carbonate-linear ester. In some embodiments, a cyclic carbonate can be combined with a linear ester. Further, a cyclic carbonate can be combined with a lactone and a linear ester. In some embodiments, the weight ratio or volume ratio of the cyclic carbonate to the linear ester is in the range of 1:9 to 10:1, or 2:8 to 7:3.

[0114] The salts for the liquid electrolyte can include one or more of the following non-limiting examples: LiPF6, LiBF4, LiClO4, LiAsF6, LiN(CF3SO2)2, LiN(C2F5SO2)2, LiCF3SO3, LiC(CF3SO2)3, LiPF4(CF3)2, LiPF3(C2F5)3, LiPF3(CF3)3, LiPF3(iso-C3F7)3, LiPF5(iso-C3F7), lithium salts having a cyclic alkyl group (e.g., (CF2)2(SO2) 2x Li and (CF2)3(SO2) 2x Li), LiFSI (lithium bis(fluorosulfonyl)imide), LiTDI (lithium 4,5-dicyano-2-(trifluoromethyl)imidazole), and combinations thereof.

[0115] In some embodiments, the total concentration of the lithium salt in the liquid non-aqueous solvent (or combination of solvents) is at least 0.3 M, or at least 0.7 M. The upper limit concentration can be determined by the solubility limit and the operating temperature range. In some embodiments, the concentration of the salt is about 2.5 M or less, or about 1.5 M or less. In some embodiments, the electrolyte can include a saturated solution of the lithium salt and an excess of solid lithium salt.

[0116] In some embodiments, the battery electrolyte comprises a non-aqueous ionic liquid and a lithium salt. Additives may be included in the electrolyte to perform various functions, such as stabilizing the battery. For example, additives such as polymerizable compounds having unsaturated double bonds can be added to stabilize or modify the SEI. Certain amines or borate compounds can act as cathode protectants. Lewis acids can be added to stabilize fluorine-containing anions such as PF6. Safety protectants include those to protect against overcharging, such as anisole, or flame retardants, such as alkyl phosphates.

[0117] Solid electrolytes can be used without a separator because they themselves function as a separator. Solid electrolytes are electrically insulating, ionic conductive, and electrochemically stable. In solid electrolyte configurations, lithium-containing salts, which may be the same as those used in the liquid electrolyte batteries described above, are used, but instead of being dissolved in an organic solvent, they are held in a solid polymer composite. Examples of solid polymer electrolytes are ionic conductive polymers prepared from monomers containing atoms with lone pairs of electrons available to the lithium ions of the electrolyte salt that adhere and move during conduction, such as polyvinylidene fluoride (PVDF) or chlorides or copolymers of their derivatives, poly(chlorotrifluoroethylene), poly(ethylene-chlorotrifluoroethylene) or poly(fluorinated ethylene-propylene), polyethylene oxide (PEO) and oxymethylene-bonded PEO, PEO-PPO-PEO crosslinked with trifunctional urethane, poly(bis(methoxy-ethopropyl)) These include xyethoxide-phosphazene (MEEP), triol-type PEO crosslinked with bifunctional urethane, poly((oligo)oxyethylene) methacrylate-co-alkali metal methacrylate, polyacrylonitrile (PAN), polymethyl methacrylate (PMMA), polymethyl acrylonitrile (PMAN), polysiloxanes and their copolymers and derivatives, acrylate polymers, other similar solvent-free polymers, combinations of the aforementioned polymers condensed or crosslinked to form different polymers, and physical mixtures of any of the aforementioned polymers. Other low-conductivity polymers that can be used in combination with the above polymers to improve the strength of thin laminates include polyester (PET), polypropylene (PP), polyethylene naphthalate (PEN), polyvinylidene fluoride (PVDF), polycarbonate (PC), polyphenylene sulfide (PPS), and polytetrafluoroethylene (PTFE). Such solid polymer electrolytes may further contain small amounts of organic solvents as described above. The polymer electrolyte may also be an ionic liquid polymer.Such polymer-based electrolytes can be coated using any number of conventional methods, such as curtain coating, slot coating, spin coating, inkjet coating, spray coating, or other suitable methods.

[0118] In some embodiments, the original non-cycled anode may undergo structural or chemical changes during electrochemical charging / discharging, for example, from normal battery use or from a previous "electrochemical formation step." As is well known in the art, the electrochemical formation step is commonly used to form the initial SEI layer and involves relatively mild conditions of low current and limited voltage. Modified anodes partially prepared from such electrochemical charging / discharging cycles may still have superior performance characteristics despite such structural and / or chemical changes compared to the original non-cycled anode. In some embodiments, the lithium storage layer of a cycled anode may no longer appear as a continuous layer, but instead may appear as isolated pillars or islands, generally having a height-to-width aspect ratio of less than 2. While not bound by theory, in the case of amorphous silicon, small amounts may delaminate during cycling in high-stress regions. Alternatively, or further, the structural changes during lithiation and delithiation may be asymmetric, resulting in such islands or pillars.

[0119] In some embodiments, the electrochemical cycling conditions can be set to utilize only a portion of silicon's theoretical charge / discharge capacity (3600 mAh / g). In some embodiments, the electrochemical charge / discharge cycle can be configured to utilize 400-600 mAh / g, or 600-800 mAh / g, or 800-1000 mAh / g, or 1000-1200 mAh / g, or 1200-1400 mAh / g, or 1400-1600 mAh / g, or 1600-1800 mAh / g, or 1800-2000 mAh / g, or 2000-2200 mAh / g, or 2200-2400 mAh / g, or 2400-2600 mAh / g, or 2600-2800 mAh / g, or 2800-3000 mAh / g, or 3000-3200 mAh / g, or 3200-3400 mAh / g, or any combination of these ranges. [Examples]

[0120] Test Set A Comparison anode C-1A

[0121] Current collector sample CC-1A is R a =0.164μm, R z The material was a 26 μm thick copper foil with a surface roughness of 1.54 μm. CC-1 did not have the surface layer of the present disclosure. Using an Oxford Plasmalabs System 100 PECVD tool, we attempted to deposit silicon on one side of CC-1 at approximately 300°C for 30 minutes with an RF power of approximately 225 W. The deposition gas was a mixture of silane and argon with gas flow ratios of approximately 1 to 12, respectively. Hydrogen gas was not used. The silicon did not adhere sufficiently for electrochemical testing, and no further characterization was performed.

[0122] Anode E-1A of the example

[0123] Current collector sample CC-2A is R a =0.325μm, R zIt was a commercially available copper foil with a surface roughness of 2.85 μm and a thickness of 10 μm. Based on product literature and analysis data, CC-2A is considered to include the surface layer of the present disclosure having a first surface sublayer of zinc, a second surface sublayer of a metal-oxygen compound containing chromium, and a third surface sublayer of a silicon compound. An adhesive amorphous silicon film (continuous porous lithium storage layer) with a thickness of about 9 μm and a density of about 1.9 mg / cm 3 was deposited on the comparative anode C-1A using the same method as described above, but with a deposition time of 50 minutes. The SEM cross-section is shown in FIG. 7, showing the continuous porous lithium storage layer 707 (amorphous Si) provided on the current collector 701. The surface roughness of the current collector 701 (only a part is shown) is mainly due to the conductive layer 703 (i.e., copper foil). The surface layer 705 is difficult to resolve by SEM, but generally conformally deposits on copper and can have a thickness of less than about 200 nm. Two regions of the continuous porous lithium storage layer were analyzed by energy dispersive X-ray spectroscopy (EDS). Region 1 closest to the current collector was found to have about 5 atomic % copper and 95 atomic % silicon. Region 2 far from the current collector was found to have about 1 atomic % copper and 99 atomic % silicon. As described above, in some embodiments, the conductivity or other physical properties of the anode can be improved by the movement of metal from the current collector into the continuous porous lithium storage layer. The EDS of anode E-1A suggests some movement of copper from the current collector into the continuous porous lithium storage layer, thereby improving the conductivity within the continuous porous lithium storage layer.

[0124] Anode E-2A of the example

[0125] The current collector sample CC-3A has R a = 0.285 μm, R zThe commercially available copper foil was 18 μm thick and had a surface roughness of 2.79 μm. Based on product literature and analytical data, CC-3A is considered to contain a surface layer of the present disclosure having a first surface sublayer of zinc, a second surface sublayer of a metal-oxygen compound containing chromium, and a third surface sublayer of a silicon compound. For comparative anode 1, the same method as described above was used, except that the silane to argon gas flow rate ratio was set to approximately 1 to 11, boron dopant gas was added, and the deposition time was 46 minutes, resulting in a deposition rate of approximately 1.7 g / cm³. 3 An adhesive boron-doped amorphous silicon film with a density of approximately 12 μm thickness was deposited.

[0126] Anode E-3A of the example

[0127] Current collector CC-4A was identical to CC-3A, but had a 50 nm TiO2 layer deposited by ALD as the top surface sublayer. CC-4A also had a surface roughness similar to CC-3A, approximately 1.7 g / cm². 3 An adhesive boron-doped amorphous silicon film with a density of approximately 14 μm thickness was deposited using the same conditions as for anode E-2, but for 50 minutes.

[0128] Electrochemical test - Half cell

[0129] Half cells were constructed using a 0.80 cm diameter punch for each anode. Lithium metal served as a counter electrode, separated from the test anode using a Celgard® separator. The electrolyte consisted of a) 88 wt% 1.0 M LiPF6 in EC:EMC in a 3:7 (weight ratio), b) 10 wt% FEC, and 2 wt% VC. The anodes first underwent an electrochemical formation step. As is well known in the art, the electrochemical formation step is used to form the initial SEI layer. Relatively mild conditions of low current and / or limited voltage can be used to prevent the anodes from being subjected to excessive stress. In this example, the electrochemical formation involved several cycles over a wide voltage range (0.01 or 0.06 to 1.2 V) with a C rate in the range of C / 20 to C / 10. Total active silicon (mg / cm³) available for reversible lithiation. 2 ) and total charging capacity (mAh / cm²) 2 The capacity was determined from electrochemical formation step data. Silicon, when used in lithium-ion batteries, has a theoretical charge capacity of approximately 3600 mAh / g, but it was found that the cycle life is significantly improved when only a portion of the total capacity is used. For all anodes in test set A, the performance cycle was set to use approximately one-third of the total capacity, i.e., approximately 1200 mAh / g. The performance cycle protocol included 3C or 1C charging (considered aggressive in the industry) and C / 3 discharging to approximately 20% charge. A 10-minute rest period was provided between charge-discharge cycles.

[0130] Table 2 summarizes the characteristics and cycle performance of the example anodes E-1A, E-2A, and E-3A. Testing of the comparative anode C-1A was not possible due to insufficient silicon adhesion. For some commercial applications, the anode must provide at least 1.5 mAh / cm². 2The anode should have a charge capacity and be able to charge for at least 100 cycles at a rate of 1C, meaning that the charge capacity after 100 cycles should not fall below 80% of the initial charge capacity. The number of cycles it takes for the anode to fall below 80% of its initial charge is generally called its "80% SoH ("state-of-health") cycle life." All anodes in the examples met these targets. Boron-doped a-Si in anode E-2 of the examples, in combination with this surface layer, can achieve higher charge capacity and life. As shown by anode E-3A of the examples, the cycle life of anode E-2A of the examples can be improved by providing a TiO2 sublayer on top of the silicon compound sublayer. Therefore, if the surface layer contains a metal oxide sublayer, life can be improved. [Table 2]

[0131] Test Set B Silicon was deposited on various current collectors using the Oxford Plasmalabs System 100 PECVD tool. Unless otherwise specified, deposition was performed at approximately 300°C with RF power in the range of approximately 225–300 W. The deposition gas was a mixture of silane and argon, each with a gas flow rate ratio of approximately 1–12. In most tests, a 40-minute deposition time was used to deposit a layer of porous amorphous silicon approximately 7 μm thick. For higher loads, a deposition time of 70–75 minutes was used to deposit approximately 11–12 μm. For a small number of tests, quasi-stoichiometric silicon nitride coatings (SiNx) were prepared. The conditions were similar to those above, but with the addition of ammonia gas at a silane-to-ammonia gas flow rate ratio of approximately 2.25–1, and a 75-minute deposition time was used to produce SiNx approximately 11–12 μm thick.

[0132] A current collector was prepared using three starting foils. Copper foil A (high-purity copper) had a thickness of 25 μm, a tensile strength of approximately 275 MPa, and a surface roughness R. aThe wavelength was 167 nm. Copper foil B (rolled C70250 alloy, sometimes called CuNi3Si) has a thickness of 20 μm, a tensile strength in the range of approximately 690-860 MPa, a yield strength exceeding approximately 655 MPa, and a surface roughness R of 280. a It had the following characteristics: Nickel foil A (rolled nickel) was 20 μm thick, with a tensile strength in the range of approximately 680-750 MPa, a yield strength of over approximately 550 MPa, and a surface roughness R a The number was 279.

[0133] Unless otherwise specified, electrodeposition of metal foil was performed using a plating fixture so that only one side of the metal foil was exposed to electrodeposition. The counter electrode was a platinum / niobium mesh located 1.9 cm away from the metal foil.

[0134] The authors previously found that the above PECVD conditions are not effective for depositing commercially useful amounts of silicon onto newly cleaned copper or nickel foil surfaces that lack a surface layer. The silicon does not adhere and instead peels off.

[0135] Comparison anode C-1B

[0136] This test demonstrates that the electrodeposition copper roughening mechanism alone is generally insufficient to improve silicon adhesion. Copper foil A was first sonicated in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01 M CuSO4 (aqueous solution) containing 1 M H2SO4. The current was 100 mA / cm². 2 The foil was supplied with the solution for 100 seconds (conditions suitable for depositing the copper roughening mechanism), the foil was removed, rinsed with DI water, and air-dried. Surface roughness R a 246nm, surface roughness R z The thickness was 2.3 μm. As described above, when silicon was deposited by PECVD, the silicon was easily removed.

[0137] Comparison anode C-2B

[0138] This test is similar to C-1B, except that, following the deposition of the copper roughening mechanism, the foil was further treated with silicon compound A (3-glycidoxypropyltriethoxysilane). Specifically, the foil was placed in a tray, covered with 180 mL of ethanol solution of 1 mL of silicon compound A, and then filled with DI water up to 200 mL. After immersing the foil for 30 seconds, it was hung to dry. After drying, the foil was placed in an oven at 140°C for 30 minutes to dry / cur the silicon compound. Surface roughness R a 233nm, surface roughness R z The thickness was 2.0 μm. As described above, when silicon was deposited by PECVD, the silicon peeled off easily. Therefore, on newly electrodeposited copper, even if a copper roughening mechanism was present, this silicon compound did not provide an effective surface layer. As shown below, the silicon compound can be more effective on chemically roughened copper foil than on foil electrochemically roughened using the electrodeposited copper roughening mechanism.

[0139] Anode E-1B of the example

[0140] Copper foil A was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01 M CuSO4 (aqueous solution) containing 1 M H2SO4. The current was 50 mA / cm². 2 The foil was supplied with the solution for 200 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the pressure was increased to 10 mA / cm². 2 A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.1 M ZnSO4 and 1 M H2SO4 and supplied with a current density of 10 mA / cm² for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and supplied with a current density of 10 mA / cm². 2The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness R of the current collector a 418nm, surface roughness R z The thickness was 5.3 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on a metal foil roughened by an electrodeposited copper roughening mechanism.

[0141] Anode E-2B of the example

[0142] Anode E-2B of the example was the same as E-1B, except that after the deposition of the chromium-containing metal-oxygen compound, the foil was further treated with silicon compound A (3-glycidoxypropyltriethoxysilane). Specifically, the foil was placed in a tray, covered with 180 mL of ethanol solution of 1 mL of silicon compound A, and then filled with DI water up to 200 mL. After immersing the foil for 30 seconds, it was hung to dry. After drying, the foil was placed in an oven at 140°C for 30 minutes to dry / cur the silicon compound. Surface roughness R a 401nm, surface roughness R z The thickness was 4.7 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface layer of zinc, a second surface layer of a chromium-containing metal-oxygen compound, and a third surface layer of a silicon compound, and such a surface sublayer is provided on a metal foil roughened by an electrodeposited copper roughening mechanism.

[0143] Anode E-3B in the example

[0144] Copper foil A was first sonicated in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in a tray of MSA roughening bath for 10 seconds with gentle swirling. The MSA roughening bath consisted of 40 g / L H2O2, 100 g / L methanesulfonic acid (MSA), 3 g / L 5-aminotetrazole, and 8 g / L benzotriazole. The foil was removed after a short time, rapidly cooled in DI water, and then re-immersed in the MSA bath. A total of six 10-second immersions were performed. This was sufficient to impart some surface roughening. The foil was rinsed with DI water and air-dried. Air drying is expected to form at least a single layer, possibly more than a single layer, of copper oxide. Next, the foil was placed in a tray and covered with a mixture containing silicon compound A (100 μL) and tetrabutylammonium molybdate (0.0322 g) in 10 mL of dichloromethane with 100 μL of water added. The foil was immersed for 30 seconds, then hung to dry. After drying, the foil was placed in a 140°C oven for 30 minutes to dry / cur the silicon compound / molybdate mixture. Surface roughness R a 723nm, surface roughness R z The thickness was 10.3 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this example may be characterized by comprising a first surface sublayer of copper oxide and a second surface sublayer comprising a mixture of a transition metal salt (molybdate) and a silicon compound, such a surface sublayer being provided on a chemically roughened copper foil.

[0145] Anode E-4B of the example

[0146] Anode E-4B in the example was the same as E-3B, except that the foil was further treated with silicon compound B (3-aminopropyltriethoxysilane) after MSA bath treatment. Specifically, the foil was placed in a tray, covered with 180 mL of ethanol solution of 1 mL of silicon compound B, and then filled with DI water up to 200 mL. The foil was immersed for 30 seconds and then hung to dry. After drying, the foil was placed in an oven at 140°C for 30 minutes to dry / cure the silicon compound. Surface roughness R a 902nm, surface roughness R z The thickness was 12.5 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this example may be characterized by comprising a first surface sublayer of copper oxide and a second surface sublayer having a silicon compound, the surface sublayer being provided on a chemically roughened copper foil.

[0147] Anode E-5B of the example

[0148] Copper foil A was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01 M CuSO4 (aqueous solution) containing 1 M H2SO4. The current was 20 mA / cm². 2 The foil was supplied with the solution for 500 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the solution was applied at 10 mA / cm². 2 A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.26 M ZnCl2, 0.13 M NiCl2 and 1 M KCl, the pH was adjusted to approximately 5, and a current density of 10 mA / cm² was supplied for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and a current density of 10 mA / cm² was supplied. 2The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness R of the current collector a 254nm, surface roughness R z The thickness was 2.5 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 75 minutes under the above conditions. The surface layer of this example can be characterized by comprising a first surface sublayer of a zinc-nickel alloy and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on a metal foil roughened by an electrodeposited copper roughening mechanism. The zinc-nickel alloy contained about 8-9 atomic percent nickel.

[0149] Anode E-6B of the example

[0150] Nickel foil A was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01 M CuSO4 (aqueous solution) containing 1 M H2SO4. The current was 100 mA / cm². 2 The foil was supplied with the solution for 100 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the pressure was increased to 10 mA / cm². 2 A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.1 M ZnSO4 and 1 M H2SO4 and supplied with a current density of 10 mA / cm² for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and supplied with a current density of 10 mA / cm². 2 The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness R of the current collector a 464nm, surface roughness R zThe thickness was 5.0 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, and such a surface layer is provided on nickel foil roughened by an electrodeposited copper roughening mechanism.

[0151] Anode E-7B of the example

[0152] Anode E-7B in the example was similar to E-6B, except that after depositing the chromium-containing metal-oxygen compound, the foil was further treated with silicon compound A (3-glycidoxypropyltriethoxysilane). Specifically, the foil was placed in a tray, covered with 180 mL of ethanol solution of 1 mL of silicon compound A, and then filled with DI water up to 200 mL. After immersing the foil for 30 seconds, it was hung to dry. After drying, the foil was placed in an oven at 140°C for 30 minutes to dry / cur the silicon compound. Surface roughness R a 409nm, surface roughness R z The thickness was 4.6 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface sublayer of zinc, a second surface sublayer of a chromium-containing metal-oxygen compound, and a third surface layer of a silicon compound, and such a surface layer is provided on nickel foil roughened by an electrodeposited copper roughening mechanism.

[0153] Anode E-8B of the example

[0154] Copper foil B was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was placed in a 180°C oven (in air) for 15 hours. The foil was covered with 10% sulfuric acid for 5 minutes to remove at least some of the oxides generated during the oven treatment. The foil was rinsed with DI water and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.001M CuSO4 (aqueous solution) containing 1M H2SO4. The current was 10mA / cm². 2The foil was supplied with the solution for 100 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the pressure was increased to 10 mA / cm². 2 A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.1 M ZnSO4 and 1 M H2SO4 and supplied with a current density of 10 mA / cm² for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and supplied with a current density of 10 mA / cm². 2 The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness R of the current collector a 453nm, surface roughness R z The thickness was 5.2 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on nickel foil roughened by an electrodeposited copper roughening mechanism.

[0155] Anode E-9B of the example

[0156] Copper foil B was first sonicated in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was placed in a 180°C oven (in air) for 15 hours. The foil was covered with 10% sulfuric acid for 5 minutes to remove at least some of the oxides generated during oven treatment. The foil was rinsed with DI water, placed in a tray, and treated for 30 seconds in a peroxide / HCl solution (10 mL of 30% H2O2, 240 mL of DI water, 50 mL of concentrated HCl) with gentle swirling. The foil was rinsed with DI water and air-dried. Air-drying is expected to form at least a single layer, possibly more than a single layer, of copper oxide. The foil was further treated with silicon compound A (3-glycidoxypropyltriethoxysilane). Specifically, the foil was placed in a tray, covered with 1 mL of silicon compound A in 180 mL of ethanol solution, and then filled with DI water up to 200 mL. After immersion for 30 seconds, the foil was hung to dry. After drying, the foil was placed in a 140°C oven for 30 minutes to dry / cur the silicon compound. Surface roughness R a 591nm, surface roughness R z The thickness was 11.4 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this example may be characterized by comprising a first surface sublayer of copper oxide and a second surface sublayer having a silicon compound, the surface sublayer being provided on a chemically roughened copper foil.

[0157] Anode E-10B in the example

[0158] Copper foil B was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was placed in a 180°C oven (in air) for 20 minutes. The foil was covered with 10% sulfuric acid for 30 minutes, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01M CuSO4 (aqueous solution) containing 1M H2SO4. The current was 20mA / cm². 2 The foil was supplied with the solution for 500 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the solution was applied at 10 mA / cm². 2A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.26 M ZnCl2, 0.13 M NiCl2 and 1 M KCl, the pH was adjusted to approximately 5, and a current density of 10 mA / cm² was supplied for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and a current density of 10 mA / cm² was supplied. 2 The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness could not be measured optically. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 70 minutes under the above conditions. The surface layer in this embodiment may be characterized by comprising a first surface sublayer of a zinc-nickel alloy and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers provided on a metal foil roughened by an electrodeposited copper roughening mechanism. The zinc-nickel alloy contained about 8-9 atomic percent nickel.

[0159] Anode E-11B of the example

[0160] Copper foil B was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was placed in a 180°C oven (in air) for 20 minutes. The foil was covered with 10% sulfuric acid for 30 minutes, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01M CuSO4 (aqueous solution) containing 1M H2SO4. The current was 50mA / cm². 2 The foil was supplied with the solution for 200 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the pressure was increased to 10 mA / cm². 2A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.1 M ZnSO4 and 1 M H2SO4 and supplied with a current density of 10 mA / cm² for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and supplied with a current density of 10 mA / cm². 2 The current density was supplied for 40 seconds. The fixture was rinsed again with DI water and air-dried. Surface roughness R a 418nm, surface roughness R z The thickness was 5.3 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 70 minutes under the above conditions. The surface layer of this embodiment may be characterized by comprising a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on a metal foil roughened by an electrodeposited copper roughening mechanism.

[0161] Anode E-12B in the example

[0162] Anode E-12B in the example was similar to E-11B, except that after depositing the chromium-containing metal-oxygen compound, the foil was further treated with silicon compound A (3-glycidoxypropyltriethoxysilane). Specifically, the foil was placed in a tray, covered with 180 mL of ethanol solution of 1 mL of silicon compound A, and then filled with DI water up to 200 mL. After immersing the foil for 30 seconds, it was hung to dry. After drying, the foil was placed in an oven at 140°C for 30 minutes to dry / cur the silicon compound. Surface roughness R a 344nm, surface roughness R z The thickness was 3.9 μm. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this example may be characterized by comprising a first surface layer of zinc, a second surface layer of a chromium-containing metal-oxygen compound, and a third surface layer of a silicon compound, and such a surface sublayer is provided on a metal foil roughened by an electrodeposited copper roughening mechanism.

[0163] Anode E-13B in the example

[0164] Current collector sample CC-1B is R a =508nm, R z The sample was a commercially available copper foil with a thickness of 18 μm and a surface roughness of 5.2 μm. Based on product literature and analytical data, CC-1B is considered to include a surface layer of the present disclosure having a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound. As shown below by some SEM, the surface has some roughness, but CC-1B generally does not have an electrodeposition roughening mechanism. An amorphous silicon adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 40 minutes under the above conditions. The surface layer of this example can be characterized by including a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, and such surface sublayers are provided on a rough copper foil that does not have an electrodeposition copper roughening mechanism.

[0165] Anode E-14B of the example

[0166] Copper foil A was first washed by sonication in acetone, then in IPA for 10 minutes, and then rinsed with DI water. The foil was treated with 10% concentrated sulfuric acid for 30 seconds, rinsed with DI water, and placed in an electrodeposition fixture. The fixture was immersed in a bath of 0.01 M CuSO4 (aqueous solution) containing 1 M H2SO4. The current was 20 mA / cm². 2 The foil was supplied with the solution for 500 seconds (conditions suitable for depositing the copper roughening mechanism). The fixture was then placed in a bath of 0.4 M CuSO4 (aqueous solution) and 1 M H2SO4, and the solution was applied at 10 mA / cm². 2A current density of 10 mA / cm² was supplied for 100 seconds. This second copper deposition can overcoat the copper roughening mechanism and help fix them to the foil. The fixture was then removed and rinsed with DI water. After rinsing, the fixture was placed in a bath of 0.26 M ZnCl2, 0.13 M NiCl2 and 1 M KCl, the pH was adjusted to approximately 5, and a current density of 10 mA / cm² was supplied for 100 seconds. After this, the fixture was rinsed again with DI water. The fixture was then placed in a bath of 4 g / L K2CrO4 (pH approximately 12) and a current density of 10 mA / cm² was supplied. 2 The current density was supplied for 40 seconds. After this, the fixture was rinsed again with DI water and air-dried. Surface roughness R of the current collector a 254nm, surface roughness R z The thickness was 2.5 μm. A quasi-stoichiometric silicon nitride adhesive layer (continuous porous lithium storage layer) was deposited by PECVD for 70 minutes under the above conditions. The surface layer of this example can be characterized by comprising a first surface sublayer of a zinc-nickel alloy and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on a metal foil roughened by an electrodeposited copper roughening mechanism. The zinc-nickel alloy contained about 8-9 atomic percent nickel.

[0167] Anode E-15B in the example

[0168] Example anode E-16B was the same as E-14B, except that a quasi-stoichiometric silicon nitride (continuous porous lithium storage layer) was deposited by PECVD for 70 minutes under the above conditions. The surface layer of this example may be characterized by comprising a first surface sublayer of zinc and a second surface sublayer of a chromium-containing metal-oxygen compound, such surface sublayers being provided on a crude copper foil without an electrodeposited copper roughening mechanism.

[0169] Anode of the example

[0170] Current collector sample CC-2B is R a =580nm, R zThe material was a commercially available copper foil with a thickness of 18 μm and a surface roughness of 6.0 μm. Based on product literature and analytical data, CC-2B is thought to contain a first surface sublayer of zinc, a second surface sublayer of a metal-oxygen compound containing chromium, and a third surface sublayer of a silicon compound. The chemical structure of the silicon compound was unknown ("Si cpd X"). A layer of amorphous silicon (continuous porous lithium storage layer) was deposited by PECVD for 65 minutes under the above conditions. In electrochemical tests (see below and Table 3), this anode had very good capacity, but the cycle lifetime was generally not as good as in other examples.

[0171] SEM analysis

[0172] Figures 8 to 11 show the topologies of the various current collectors described above. The current collector of Example E-14B is representative of a current collector having an electrodeposited copper roughening mechanism. Figure 8A is a top view and Figure 8B is a cross-sectional view. These roughening mechanisms can be characterized by nanopillar mechanisms as previously mentioned. The mechanisms are very dense and relatively small, most of which are oriented at 60-90 degrees to the foil, and there are relatively few places where their "tops" extend significantly beyond their bases. Most of these mechanisms can be characterized by the first type of nanopillar mechanism. Figure 8C shows the anode of Example E-14B. As can be seen, the electrodeposited copper roughening mechanism (nanopillar mechanism) can have a suitable geometric shape that generally becomes embedded in the SiNx layer. This can help the adhesion of the continuous porous lithium storage layer. This current collector surface structure can induce several voids at the current collector-SiNx interface. This allows for additional space for silicon swelling during the lithiation cycle, which can reduce structural degradation. Although not shown here, similar images can be observed when using amorphous silicon instead of SiNx.

[0173] Figure 9 shows a cross-sectional view of the current collector of Example E-16B (CC-2B). While it has several mechanisms similar to those in Figure 8B, it also has numerous mechanisms (second type of nanopillars circled in the figure) whose upper sections extend significantly beyond the base. As mentioned above, the electrochemical performance of anodes using this current collector may be acceptable, but such anodes often perform worse than others in this disclosure. The reasons for this are not fully understood, but other current collectors with similar physical properties (broad "upper sections") have been found not to function well. While not theoretically bound, the broad upper sections may prevent the roughening mechanisms from being embedded in the silicon. Alternatively, these structures may be structurally fragile and may fracture at the base. In any case, current collectors with too many such structures may not function well with PECVD-deposited lithium storage materials in some embodiments.

[0174] Figure 10 shows the current collectors of Examples E-14B and E-16B. Figure 10A is a 45-degree view of the surface, and Figure 10B is a cross-sectional view. Although there is a clear roughness, there are no fine roughening mechanisms such as nanopillars. The current collector can be considered a representative example of one having a broad roughening mechanism characterized by bumps and hills, as described above. Figure 10C is a cross-sectional view of the anode E-16B of the example, further showing the profile. Unlike Example E-14B (Figure 8C), this current collector did not appear to induce voids in the SiNx continuous porous lithium storage layer at its interface.

[0175] The current collector of Example E-3B is shown in a 45-degree perspective view in Figure 11. Chemically roughened (etched) current collectors look quite different from other current collectors. In some cases, they can be characterized by having pits or craters that create significant roughness. These pits and associated structures can form strong anchor points for the continuous porous lithium storage layer.

[0176] Electrochemical test - Half cell

[0177] Half cells were constructed using a 0.80 cm diameter punch for each anode. Lithium metal served as a counter electrode, separated from the test anode using a Celgard® separator. The standard electrolyte ("Standard") contained a) 88 wt% 1.2 M LiPF6 in EC:EMC in a 3:7 (weight ratio), b) 10 wt% FEC, and 2 wt% VC. Several tests were performed using commercially available electrolytes that were very similar to the Standard but contained one or more additives (proprietary to the supplier). The anodes first underwent an electrochemical formation step. As is well known in the Art, the electrochemical formation step is used to form the initial SEI layer. Relatively mild conditions of low current and / or limited voltage can be used to prevent the anode from being subjected to excessive stress. In this embodiment, the electrochemical formation involved several cycles over a wide voltage range (0.01 or 0.06 to 1.2 V) with C rates ranging from C / 20 to C / 10. Total active silicon (mg / cm³) available for reversible lithiumization 2 ) and total charging capacity (mAh / cm²) 2 The anodes were determined from electrochemical formation step data. Formation loss was calculated by dividing the change in active area charge capacity (initial initial charge capacity minus final formation discharge capacity) by the initial area initial charge capacity. Silicon, when used in lithium-ion batteries, has a theoretical charge capacity of approximately 3600 mAh / g, but it was found that cycle life can be improved when only a portion of the total capacity is used. For all anodes, the performance cycle was set to use a portion of the total capacity, typically in the range of 950-1700 mAh / g. The performance cycle protocol included 3.2C or 1C charging (considered aggressive in the industry) and C / 3 discharging to approximately 15% charge. A 10-minute pause was included between charge-discharge cycles.

[0178] Table 3 summarizes the characteristics and cycling performance of the comparative anode and example anode from test set B. Note that the surface sublayer containing chromium-containing metal-oxygen compounds is simply labeled "CrOx," and the copper oxide surface sublayer is simply labeled "CuOx." Testing could not be performed on comparative anodes C-1 or C-2 because silicon did not adhere sufficiently. Comparative anode C-3B failed during electrochemical formation, so cycling was not performed.

[0179] For some commercial applications, the anode is required to have at least 1.5 mAh / cm². 2 The anode should have a charge capacity and be able to charge for at least 100 cycles at a rate of 1C, meaning that the charge capacity after 100 cycles should not fall below 80% of the initial charge capacity. The number of cycles it takes for the anode to fall below 80% of its initial charge is generally called its "80% SoH ("state-of-health") cycle life." The anodes in all examples met these targets. One sample (E-1B) cycled for >1000 cycles and was still functional before being removed from the test cycler. Some achieved >500 cycles, some of which were still cyclable. It should also be noted that all a-Si samples had very low formation losses. High formation losses have often been observed to indicate an unstable anode (although there may be exceptions to this rule). Generally, a formation loss of less than 15% is considered very good and may indicate a stable a-Si anode.

[0180] In the case of surface layers containing a zinc sublayer and a chromium-containing metal-oxygen compound sublayer, the anode appears to function better without an additional silicon compound sublayer (E-1B vs. E-2B, E-6B vs. E-7B, and E-18B vs. E-12B). Such anodes with a silicon compound (third surface sublayer) can have good performance in terms of cycle life, but generally not as good as good anodes using current collectors that exclude the silicon compound layer. The use of silicon compounds for coating battery foil may be common in conventional slurry-based anodes, but in some cases, anodes based on PECVD-deposited lithium storage layers are advantageous when a third surface sublayer of silicon compound is absent.

[0181] It has been generally observed that using a zinc-nickel alloy as the first surface sublayer (with a second surface sublayer of a chromium-containing metal-oxygen compound) results in more reliable performance with higher silicon loading rates and / or higher charge rates than similar anodes using pure or nearly pure zinc instead of the alloy (e.g., E-10B vs. E-11B). However, as can be seen, there are numerous examples of excellent performing batteries using pure or nearly pure zinc.

[0182] In general, anodes using a zinc-based first surface sublayer and a chromium-containing oxygen metal compound second surface sublayer exhibited the best performance compared to broader or less finely structured rough structures (e.g., bumps and hills) when the current collector roughening treatment included an electrodeposited copper roughening mechanism (e.g., the nanopillar-type structure described above) (E-8B vs. E-13B or E-14B vs. E15B).

[0183] In the case of SiNx samples, formation losses due to nitrogen doping are greater, but nevertheless, they have a very high charge capacity (3mAh / cm²) along with a high cycle life (up to 518 cycles) and a fast 1C charge rate. 2 We have succeeded in manufacturing an anode using SiNx having the following properties. In some embodiments, it can be shown that SiNx-based anodes swell less than a-Si-based anodes.

[0184] For chemically roughened samples, a simple layer of silicon compound on copper (generally having at least a single layer of surface copper oxide material) has often been found to be sufficient to provide a good-performing anode. These samples (E-3B, E-4B, E-9B) can be prepared more easily as they do not require electrochemical steps. In some cases, the addition of a metal-oxygen compound (e.g., an oxometalate such as molybdate) to the silicon compound (E-3B) can provide an additional cycle life benefit.

[0185] In some embodiments, the anode of the present disclosure has a discharge rate of at least 1.6 mAh / cm² at a charge rate of at least 1 C and a discharge rate of at least C / 3. 2 It can provide a charge capacity and an 80% SoH cycle life of at least 150 cycles. In some embodiments, the anode of the present disclosure may have a cycle life of at least 300 cycles, or at least 400, 500, 600, 700, 800, 900, or 1000 cycles, when tested at 1.7 mAh / cm2 in 1C charge and C / 3 discharge. In some embodiments, the anode of the present disclosure may provide a charge capacity of 3 mAh / cm2 and an 80% SoH cycle life of at least 150 cycles, or at least 300 cycles, or at least 500 cycles in 1C charge and C / 3 discharge. In some embodiments, the anode of the present disclosure may be able to charge at 3C with a charge capacity of 2 mAh / cm2 and an 80% SoH cycle life of at least 400 cycles. [Table 3]

[0186] It should be noted that anodes using copper foil A tended to deform during the cycle, even though the cell was often stable during the cycle. For example, with these silicon loads, wrinkling of the foil was often observed upon disassembly. The expansion and contraction of silicon at these high loads may have stressed copper foil A, causing these deformations. Copper foil A has relatively low tensile strength. Surprisingly, the anodes functioned well during the cycle despite the deformation. Nevertheless, such deformation can be problematic in some battery applications. Examples using high-tensile copper foil B or nickel foil A were found to either not exhibit such deformation or to significantly reduce the problem.

[0187] Test Set C Example E-1C

[0188] In this test, the pre-lithiumized anode was tested in a full-cell configuration. Specifically, the same anode as described in Example E-15B was used. Before full-cell assembly, the anode as described in Example E-15B was incorporated into a half-coin cell having lithium metal as the counter electrode, a Celgard® separator, and a commercially available electrolyte. The anode was then tested at approximately 2.2 mAh / cm². 2 The cells were electrochemically charged (pre-lithified) to a certain degree. The amount of pre-lithification was determined by adding the anode formation loss (pre-determined by a half-cell formation test) and the desired anode lithium inventory (approximately 15%), and then subtracting the expected permanent loss of the cathode paired with the pre-lithified anode. After pre-lithification, the anode was removed from the half-cell and placed in an NMC-based cathode (rated approximately 4 mAh / cm²) with a new separator and electrolyte (commercially available). 2 ) was reassembled into a coin-shaped full cell.

[0189] The newly constructed cells were left to stand for 16 hours, and then electrochemically formed at a slow cycle rate of approximately 2.5–4.2V. The cells were then formed to a capacity of approximately 3mAh / cm². 2The initial charge capacity was evaluated, followed by cycling at 1C (down to 4.05V with C / 20 current cutoff), followed by a 10-minute rest, then discharging to 2.8V at C / 3, followed by another 10-minute rest. In this write test, the full cell example E-1C received 233 cycles and achieved 3.27mAh / cm². 2 The initial charging capacity is 2.93mAh / cm². 2 It decreased slightly to approximately 90% SoH.

[0190] Example E-1C demonstrates that the robust cycling performance of this anode is not limited to half-cell configuration. Furthermore, Example E-1C demonstrates that this anode can be pre-lithiumized.

[0191] In some embodiments, the current collector of the present disclosure can be used with a PECVD deposition method that can deposit a lithium storage layer having at least 40 atomic percent of silicon, germanium, or a combination thereof, wherein such a lithium storage layer may feature something other than a continuous porous lithium storage layer. In some embodiments, the current collector of the present disclosure can be used with a coatable lithium storage material, for example, one containing a carbon-based binder and silicon-containing particles. In some embodiments, the current collector of the present disclosure can be used with a sputter-deposited lithium storage material, such as sputter-deposited silicon. In some embodiments, the current collector of the present disclosure can be used with substantially non-porous silicon such as crystalline silicon, polycrystalline silicon, or high-density amorphous silicon (e.g., 2.95 g / cm³). 3 It can be used with (a higher density)

[0192] While this anode has been described with reference to a battery, in some embodiments, this anode can be used in a hybrid lithium-ion capacitor device.

[0193] Further embodiments of this specification include those listed below. 1. An anode for an energy storage device, a) A current collector comprising a conductive layer and a surface layer disposed on the conductive layer, wherein the surface layer comprises a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer, (i) The first surface sublayer contains zinc, (ii) The second surface sublayer contains a metal-oxygen compound, and the metal-oxygen compound contains a transition metal other than zinc, (iii) The current collector has a surface roughness R a Characterized by ≥250nm, Current collector and, b) A continuous porous lithium storage layer covering the surface layer, (i) Having an average thickness of at least 7 μm, (ii) containing at least 40 atomic percent of silicon, germanium, or a combination thereof, (iii) substantially free of carbon-based binders, Continuous porous lithium storage layer and Anodes, including the anode. 2. The anode according to Embodiment 1, wherein the surface layer further comprises a third surface sublayer provided on a second surface sublayer, and the third surface sublayer comprises a silicon compound. 3. The anode according to Embodiment 2, wherein the silicon compound comprises or is derived from a siloxane, siloxysilane, or silazane. 4. The anode according to Embodiment 2 or 3, wherein the surface layer further comprises a fourth surface sublayer provided on a third surface sublayer, and the fourth surface sublayer comprises a metal oxide. 5. The anode according to Embodiment 4, wherein the metal oxide is a transition metal oxide. 6. The anode according to Embodiment 4, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 7. The anode according to Embodiment 1, wherein the surface layer does not contain a silicon compound. 8. The anode according to Embodiment 1 or 7, wherein the surface layer further comprises a third surface sublayer provided on a second surface sublayer, and the third surface sublayer comprises a metal oxide. 9. The anode according to Embodiment 8, wherein the metal oxide is a transition metal oxide. 10. The anode according to Embodiment 8, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 11. The anode according to any one of Embodiments 1 to 10, wherein the first surface sublayer contains at least 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 12. An anode according to any one of Embodiments 1 to 10, wherein the first surface sublayer comprises a zinc alloy. 13. The anode according to Embodiment 12, wherein the first surface sublayer contains less than 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 14. The anode according to Embodiment 12 or 13, wherein the zinc alloy comprises zinc and nickel. 15. The anode according to Embodiment 14, wherein the first surface sublayer contains 3 to 30 atomic percent nickel. 16. The first surface sublayer is 10-3000 mg / m². 2 An anode according to any one of Embodiments 1 to 15, comprising zinc in the range of [specify range]. 17. The first surface sublayer is 10-100 mg / m². 2 An anode according to Embodiment 11, comprising zinc in the range of [specify range]. 18. The first surface sublayer is 500-3000 mg / m². 2 An anode according to any one of embodiments 12 to 15, comprising zinc in the range of [amount]. 19. The anode according to any one of Embodiments 1 to 18, wherein the metal-oxygen compound includes a metal oxide. 20. An anode according to any one of Embodiments 1 to 19, wherein the metal-oxygen compound comprises an oxometalate. 21. The anode according to any one of Embodiments 1 to 20, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 22. The anode according to any one of Embodiments 1 to 20, wherein the transition metal of the metal-oxygen compound contains chromium. 23. The anode according to Embodiment 22, wherein the second surface sublayer contains chromium in the range of 2 to 50 mg / m 2 . 24. The anode according to any one of Embodiments 1 to 23, wherein the current collector further includes a plurality of nanopillar structures disposed on the conductive layer, each of the plurality of nanopillar structures includes a copper-containing nanopillar core, and the surface layer is at least partially on the copper-containing nanopillar core. 25. Each nanopillar structure is characterized by a height H, a base width B, and a maximum width W, and the cross section of the current collector with an average length of 20 μm is (i) at least five first-type nanopillars, each first-type nanopillar having A) H in the range of 0.4 μm to 3.0 μm, B) B in the range of 0.2 μm to 1.0 μm, C) the W / B ratio in the range of 1 to 1.5, D) the H / B aspect ratio in the range of 0.8 to 4.0, and E) the angle of the longitudinal axis with respect to the plane of the conductive layer in the range of 60° to 90° characterized by at least five first-type nanopillars, and (ii) less than four second-type nanopillars, each second-type nanopillar having A) H of at least 1.0 μm, and B) the W / B ratio greater than 1.5 characterized by less than four second-type nanopillars and including the anode according to Embodiment 24. 26. The anode according to Embodiment 24 or 25, wherein the continuous porous lithium storage layer contains voids within 5 μm from the interface with the nanopillar structure. 27. The anode according to any one of Embodiments 1 to 27, wherein the conductive layer contains nickel within a nickel layer. 28. The anode according to embodiment 27, wherein the conductive layer further includes a metal intermediate layer interposed between the nickel layer and the surface layer. 29. The anode according to embodiment 28, wherein the metal intermediate layer contains copper. 30. The anode according to embodiment 28 or 29, wherein the metal intermediate layer has an average intermediate layer thickness that is less than 50% of the total average thickness of the conductive layer. 31. The anode according to any one of embodiments 1 to 26, wherein the conductive layer contains copper. 32. The anode according to embodiment 31, wherein the conductive layer contains a copper alloy containing copper, magnesium, silver, and phosphorus. 33. The anode according to embodiment 31, wherein the conductive layer contains a copper alloy containing copper, iron, and phosphorus. 34. The anode according to embodiment 31, wherein the conductive layer contains a copper alloy containing brass or bronze. 35. The anode according to embodiment 31, wherein the conductive layer contains a copper alloy containing copper, nickel, and silicon. 36. The anode according to any one of embodiments 1 to 35, wherein the conductive layer contains a mesh of conductive carbon. 37. The anode according to any one of embodiments 1 to 36, wherein the current collector further includes an insulating substrate, and the conductive layer covers the insulating substrate. 38. The anode according to any one of embodiments 1 to 37, wherein the conductive layer or the current collector is characterized by a tensile strength of at least 500 MPa. 39. The anode according to any one of embodiments 1 to 37, wherein the conductive layer or the current collector is characterized by a tensile strength exceeding 600 MPa. 40. The anode according to any one of embodiments 1 to 37, wherein the conductive layer or the current collector is characterized by a tensile strength of at least 700 MPa. 41. The anode according to any one of embodiments 1 to 40, wherein the conductive layer contains a roll-formed metal foil. 42. An anode for an energy storage device, a) A current collector including a conductive layer and a surface layer disposed on the conductive layer, wherein the surface layer includes a first surface sub-layer and a second surface sub-layer disposed on the first surface sub-layer. (i) The first surface sublayer contains a metal oxide, (ii) The second surface sublayer contains a silicon compound, and the silicon compound contains or is derived from siloxane, siloxysilane, or silazane, and (iii) The current collector has a surface roughness R a Characterized by ≥400nm, Current collector and, b) A continuous porous lithium storage layer covering the surface layer, (i) Having an average thickness of at least 7 μm, (ii) containing at least 40 atomic percent of silicon, germanium, or a combination thereof, (iii) substantially free of carbon-based binders, Continuous porous lithium storage layer and Anodes, including the anode. 43. The anode according to Embodiment 42, wherein the metal oxide includes a transition metal. 44. The anode according to Embodiment 42, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 45. The anode according to Embodiment 42, wherein the metal oxide comprises a monolayer of at least copper oxide. 46. ​​The second surface sublayer is 1-100 mg / m². 2 The anode according to Embodiment 42, comprising silicon derived from a silicon compound. 47. The anode according to any one of embodiments 42 to 46, wherein the second surface sublayer further comprises a metal-oxygen compound, the metal-oxygen compound comprising a transition metal other than copper. 48. The anode according to Embodiment 47, wherein the metal-oxygen compound includes a metal oxide. 49. The anode according to Embodiment 47 or 48, wherein the metal-oxygen compound comprises an oxometalate. 50. The anode according to any one of embodiments 47 to 49, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 51. The anode according to any one of embodiments 47 to 50, wherein the transition metal of the metal-oxygen compound is molybdenum. 52. The anode according to any one of embodiments 42 to 51, wherein the conductive layer contains nickel within the nickel layer. 53. The anode according to Embodiment 52, wherein the conductive layer further comprises a metal intermediate layer interposed between the nickel layer and the surface layer. 54. The anode according to embodiment 53, wherein the metal intermediate layer contains copper. 55. The anode according to Embodiment 52 or 53, wherein the metal interlayer has an average interlayer thickness of less than 50% of the total average thickness of the conductive layers. 56. An anode according to any one of embodiments 42 to 51, wherein the conductive layer comprises copper. 57. The anode according to Embodiment 56, wherein the conductive layer comprises a copper alloy containing copper, magnesium, silver, and phosphorus. 58. The anode according to Embodiment 56, wherein the conductive layer comprises a copper alloy containing copper, iron, and phosphorus. 59. The anode according to Embodiment 56, wherein the conductive layer comprises a copper alloy including brass or bronze. 60. The anode according to Embodiment 56, wherein the conductive layer comprises a copper alloy containing copper, nickel, and silicon. 61. An anode according to any one of embodiments 42 to 60, wherein the conductive layer includes a mesh of conductive carbon. 62. The anode according to any one of embodiments 42 to 61, wherein the current collector further includes an insulating substrate, and the conductive layer covers the insulating substrate. 63. The conductive layer or current collector is characterized by a tensile strength of at least 500 MPa, as described in any one of embodiments 42 to 62. 64. The conductive layer or current collector is characterized by a tensile strength of more than 600 MPa, as described in any one of embodiments 42 to 62. 65. The conductive layer or current collector is the anode according to any one of Embodiments 42 to 62, characterized by a tensile strength of at least 700 MPa. 66. The anode according to any one of Embodiments 42 to 65, wherein the conductive layer comprises a roll-formed metal foil. 67. The silicon compound is of formula (1) Si(R) n (OR’) 4-n (1) (where n = 1, 2 or 3, and R and R’ are independently selected from substituted or unsubstituted alkyl, alkenyl or aryl groups) The anode according to any one of Embodiments 42 to 66, comprising or derived from a compound according to. 68. An anode for an energy storage device, a) A current collector comprising a conductive layer and a surface layer disposed on the conductive layer, wherein the surface layer comprises at least a metal-oxygen compound containing a transition metal, (i) The surface layer further comprises a silicon compound, zinc, or both a silicon compound and zinc, (ii) When the surface layer contains zinc, the metal-oxygen compound contains a transition metal other than zinc, (iii) The current collector is characterized by a surface roughness R a ≧250 nm, the current collector and, b) A continuous porous lithium storage layer covering the surface layer, (i) having an average thickness of at least 7 μm, (ii) containing at least 40 atomic% of silicon, germanium, or a combination thereof, and (iii) substantially free of a carbon-based binder, the continuous porous lithium storage layer and comprising an anode. 69. The anode according to Embodiment 68, wherein the surface layer comprises a mixture of a silicon compound and a metal-oxygen compound. 70. The anode according to Embodiment 68, wherein the surface layer comprises a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer. 71. The anode according to Embodiment 70, wherein the first surface sublayer contains zinc and the second surface sublayer contains a metal-oxygen compound. 72. The anode according to Embodiment 71, wherein the second surface sublayer further comprises a silicon compound. 73. The anode according to Embodiment 71, wherein the surface layer further comprises a third surface sublayer on a second surface sublayer, the third surface sublayer comprising a silicon compound. 74. The anode according to Embodiment 70, wherein the first surface sublayer comprises a metal-oxygen compound and the second surface sublayer comprises a silicon compound. 75. The anode according to embodiment 74, wherein the metal-oxygen compound includes a transition metal oxide. 76. The anode according to Embodiment 75, wherein the metal-oxygen compound comprises at least a monolayer of copper oxide. 77. The anode according to any one of embodiments 68 to 76, wherein the silicon compound comprises or is derived from a siloxane, siloxysilane, or silazane. 78. An anode according to any one of embodiments 1 to 77, further comprising one or more auxiliary layers covering a continuous porous lithium storage layer. 79. The anode according to any one of Embodiments 1 to 78, wherein the continuous porous lithium storage layer substantially does not contain lithium storage nanostructures. 80. The anode according to any one of Embodiments 1 to 79, wherein the continuous porous lithium storage layer comprises a quasi-stoichiometric nitride of silicon. 81. The anode according to any one of claims 1 to 79, wherein the continuous porous lithium storage layer comprises at least 80 atomic percent amorphous silicon. 82. The density of the continuous porous lithium storage layer is 1.1 to 2.25 g / cm³. 3 The anode described in Embodiment 81, which is within the range. 83. The anode according to any one of Embodiments 1 to 82, wherein the continuous porous lithium storage layer has an average thickness of at least 10 μm. 84. A lithium-ion battery comprising an anode and a cathode as described in any one of Embodiments 1 to 83. 85. A lithium-ion battery according to embodiment 84, wherein the anode is pre-lithiumized. 86. The battery must have a capacity of at least 1.6 mAh / cm². 2 A lithium-ion battery according to embodiment 84 or 85, characterized by operating by an initial charge capacity and capable of an 80% SoH cycle life of at least 150 cycles at a charge rate of at least 1C and a discharge rate of at least C / 3. 87. A lithium-ion battery according to embodiment 86, wherein the cycle life is at least 500 cycles. 88. The initial charging capacity is at least 3.0mAh / cm². 2 The lithium-ion battery described in embodiment 87. 89. A lithium-ion battery according to embodiment 86, wherein the charge rate is at least 3C and the cycle life is at least 400 cycles. 90. The initial charging capacity is at least 2.0 mA / cm². 2 The lithium-ion battery described in embodiment 89. 91. A lithium-ion battery according to Embodiment 90, wherein the cycle life is at least 500 cycles. 92. A lithium-ion battery according to any one of embodiments 84 to 91, wherein the cathode comprises nickel, manganese, and cobalt. 93. A lithium-ion battery according to any one of embodiments 84 to 91, wherein the cathode comprises sulfur, selenium, or both sulfur and selenium. 94. A lithium-ion battery comprising an anode and a cathode, wherein the anode is partially prepared by applying at least one electrochemical charge / discharge cycle to a non-cycled anode, and the non-cycled anode comprises the anode described in any one of Embodiments 1 to 83. 95. A current collector for the anode of a lithium-ion storage device, a) A conductive layer, b) A plurality of nanopillar mechanisms disposed on a conductive layer, each nanopillar mechanism characterized by a height H, a base width B, and a maximum width W, each of the plurality of nanopillar mechanisms including a copper-containing nanopillar core, the surface layer being at least partially on the copper-containing nanopillar core, The cross-section of the current collector with an average length of 20 μm is, (i) at least five nanopillars of type 1, each nanopillar of type 1 is A) H is in the range of 0.4 μm to 3.0 μm. B) B is in the range of 0.2 μm to 1.0 μm. C) W / B ratio is within the range of 1 to 1.5. D) H / B aspect ratio is within the range of 0.8 to 4.0, E) The angle of the longitudinal axis of the conductive layer with respect to the plane is within the range of 60° to 90°. A nanopillar of at least five first types, characterized in that, (ii) fewer than four second type nanopillars, each second type nanopillar is: A) H is at least 1.0 μm, and B) W / B ratio greater than 1.5 A second type of nanopillar characterized by having fewer than four types A current collector, including a current collector. 96. The current collector according to Embodiment 95, wherein the surface layer includes a first surface sublayer disposed on a copper-containing nanopillar core and a second surface sublayer disposed on the first surface sublayer. 97.(i) The first surface sublayer contains zinc, (ii) The second surface sublayer contains a metal-oxygen compound, and the metal-oxygen compound contains a transition metal other than zinc. A current collector according to Embodiment 96. 98. A current collector according to any one of embodiments 95 to 97, wherein the cross-section, with an average length of 20 μm, includes at least eight nanopillars of a first type and fewer than three nanopillars of a second type. 99. A current collector according to any one of embodiments 95 to 98, wherein the conductive layer contains nickel within the nickel layer. 100. The current collector according to Embodiment 99, wherein the conductive layer further comprises a metal intermediate layer interposed between the nickel layer and the surface layer. 101. The current collector according to Embodiment 100, wherein the metal intermediate layer contains copper. 102. A current collector according to any one of embodiments 95 to 98, wherein the conductive layer contains copper. 103. The current collector according to Embodiment 102, wherein the conductive layer comprises a copper alloy containing copper, magnesium, silver, and phosphorus. 104. The current collector according to Embodiment 102, wherein the conductive layer comprises a copper alloy containing copper, iron, and phosphorus. 105. The current collector according to Embodiment 102, wherein the conductive layer comprises a copper alloy including brass or bronze. 106. The current collector according to Embodiment 102, wherein the conductive layer comprises a copper alloy containing copper, nickel, and silicon. 107. A current collector according to any one of embodiments 95 to 106, wherein the conductive layer or current collector is characterized by a tensile strength of at least 500 MPa. 108. The conductive layer or current collector is characterized by a tensile strength of more than 600 MPa, as described in any one of Embodiments 95 to 106. 109. A current collector according to any one of embodiments 95 to 106, wherein the conductive layer or current collector is characterized by a tensile strength of at least 700 MPa. 110. A current collector according to any one of embodiments 95 to 109, wherein the conductive layer includes a roll-formed metal foil. 111. A current collector according to any one of embodiments 95 to 110, wherein the surface layer is further disposed on top of a conductive layer in the gap region between nanopillar mechanisms. 112. A current collector according to any one of embodiments 95 to 111, wherein the copper-containing nanopillar core is formed by electrochemical deposition. 113. A current collector according to any one of embodiments 96 to 112, wherein the first surface sublayer contains at least 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 114. A current collector according to any one of embodiments 96 to 113, wherein the first surface sublayer comprises a zinc alloy. 115. The current collector according to Embodiment 114, wherein the first surface sublayer contains less than 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 116. A current collector according to embodiment 114 or 115, wherein the zinc alloy comprises zinc and nickel. 117. The current collector according to Embodiment 116, wherein the first surface sublayer contains 3 to 30 atomic percent nickel. 118. The first surface sublayer is 10-3000 mg / m². 2 A current collector according to any one embodiment 96 to 117, comprising zinc in the range of [specify range]. 119. The first surface sublayer is 10-100 mg / m². 2 A current collector according to Embodiment 113, comprising zinc in the range of [specify range]. 120. The first surface sublayer is 500-3000 mg / m² 2 A current collector according to any one of embodiments 114 to 117, comprising zinc in the range of [specify range]. 121. A current collector according to any one of embodiments 97 to 120, wherein the metal-oxygen compound includes a metal oxide. 122. A current collector according to any one of embodiments 97 to 121, wherein the metal-oxygen compound comprises an oxometalate. 123. A current collector according to any one of embodiments 97 to 122, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 124. A current collector according to any one of embodiments 97 to 122, wherein the transition metal of the metal-oxygen compound includes chromium. 125. The second surface sublayer contains 2-50 mg / m². 2 A current collector according to Embodiment 124, comprising chromium in the range. 126. A current collector for the anode of a lithium-ion storage device, wherein the current collector comprises a conductive layer and a surface layer disposed on the conductive layer, and the surface layer comprises a first surface sublayer and a second surface sublayer disposed on the first surface sublayer. (i) The first surface sublayer contains a metal oxide, (ii) The second surface sublayer contains a silicon compound, which contains or is derived from siloxane, siloxysilane, or silazane, and (iii) Current collector, surface roughness R a Characterized by ≥400nm, Current collector. 127. The current collector according to Embodiment 126, wherein the metal oxide includes a transition metal. 128. The current collector according to Embodiment 126, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 129. The current collector according to Embodiment 126, wherein the metal oxide comprises a single layer of at least copper oxide. 130. The second surface sublayer contains 1-100 mg / m². 2 A current collector according to any one of embodiments 126 to 129, comprising silicon in the range of . 131. The current collector according to any one of embodiments 126 to 130, wherein the second surface sublayer further comprises a metal-oxygen compound, the metal-oxygen compound comprising a transition metal other than copper. 132. The current collector according to Embodiment 131, wherein the metal-oxygen compound includes a metal oxide. 133. A current collector according to embodiment 131 or 132, wherein the metal-oxygen compound comprises an oxometalate. 134. A current collector according to any one of Embodiments 131 to 133, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 135. A current collector according to any one of embodiments 131 to 133, wherein the transition metal of the metal-oxygen compound is molybdenum. 136. A current collector according to any one of embodiments 126 to 135, wherein the conductive layer contains nickel within the nickel layer. 137. The current collector according to embodiment 136, wherein the conductive layer further includes a metal intermediate layer interposed between the nickel layer and the surface layer. 138. The current collector according to embodiment 137, wherein the metal intermediate layer contains copper. 139. A current collector according to any one of embodiments 136 to 138, wherein the metal interlayer has an average interlayer thickness of less than 50% of the total average thickness of the conductive layers. 140. A current collector according to any one of embodiments 126 to 135, wherein the conductive layer contains copper. 141. The current collector according to Embodiment 140, wherein the conductive layer comprises a copper alloy containing copper, magnesium, silver, and phosphorus. 142. The current collector according to Embodiment 140, wherein the conductive layer comprises a copper alloy containing copper, iron, and phosphorus. 143. The current collector according to Embodiment 140, wherein the conductive layer comprises a copper alloy including brass or bronze. 144. The current collector according to Embodiment 140, wherein the conductive layer comprises a copper alloy containing copper, nickel, and silicon. 145. A current collector according to any one of embodiments 126 to 144, wherein the conductive layer or current collector is characterized by a tensile strength of at least 500 MPa. 146. The conductive layer or current collector is characterized by a tensile strength of more than 600 MPa, as described in any one of Embodiments 126 to 144. 147. A current collector according to any one of embodiments 126 to 144, wherein the conductive layer or current collector is characterized by a tensile strength of at least 700 MPa. 148. A current collector according to any one of embodiments 126 to 147, wherein the conductive layer comprises a roll-formed metal foil. 149. Silicon compounds are given by formula (1) Si(R) n (OR') 4-n (1) (wherein n=1, 2, or 3, and R and R' are independently selected from substituted or unsubstituted alkyl, alkenyl, or aryl groups.) A current collector according to any one of embodiments 121 to 143, comprising or derived from a compound. 150. A current collector according to any one of embodiments 126 to 149, wherein the surface of the current collector is characterized by pits. 151. A current collector according to Embodiment 150, wherein the pits are formed by chemical roughening using a chemical etching agent. 152. The current collector has a surface roughness R a A current collector according to any one of embodiments 126 to 151, characterized by having a wavelength of ≥550 nm. 153. An anode for a lithium-ion energy storage device, comprising a current collector according to any one of embodiments 95 to 152 and a lithium storage layer disposed on the current collector. 154. The anode according to Embodiment 153, wherein the lithium storage layer contains silicon. 155. The lithium storage layer comprises at least 40 atomic percent of silicon, germanium, or a combination thereof, as described in Embodiment 153 or 154. 156. The anode according to any one of embodiments 153 to 155, wherein the lithium storage layer further comprises a carbon-based binder. 157. An anode according to any one of embodiments 153 to 155, wherein the lithium storage layer is substantially free of a carbon-based binder. 158. The anode according to Embodiment 157, wherein the lithium storage layer comprises a quasi-stoichiometric silicon nitride. 159. The lithium storage layer contains at least 80 atomic percent amorphous silicon, with a concentration of 1.2 to 2.25 g / cm³. 3 An anode according to embodiment 157, having a density in the range of . 160. The anode according to any one of embodiments 157 to 159, wherein the lithium storage layer is a continuous porous lithium storage layer. 161. The lithium storage layer is deposited by a PECVD process, the anode according to any one of embodiments 157 to 160. 162. A method for manufacturing a current collector for use in an energy storage device, The process involves chemically roughening the surface of a copper-containing conductive layer by treatment with a chemical etching agent to form a roughened conductive layer, A step of forming a surface layer on a conductive layer by contacting a roughened conductive layer with a silicon compound agent containing siloxane, siloxysilane, or silane, wherein the surface layer contains the silicon compound agent or a silicon compound derived therefrom. Includes, (i) The current collector has a surface roughness R a Characterized by ≥400nm, (ii) Chemical roughening does not involve electrodeposition. (iii) The step of forming the surface layer does not include electrodeposition. method. 163. The method according to Embodiment 162, wherein the silicon compound agent is provided as a solution or vapor. 164. The method according to Embodiment 162 or 163, further comprising the step of heating the roughened conductive layer to a temperature of at least 100°C after contact with a silicon compound agent. 165. Silicon compound agents are given by formula (1) Si(R) n (OR') 4-n (1) (wherein n=1, 2, or 3, and R and R' are independently selected from substituted or unsubstituted alkyl, alkenyl, or aryl groups.) The method according to any one of embodiments 162 to 164, comprising a compound by [the specified agent]. 166. The method according to any one of Embodiments 162 to 165, wherein a silicon compound agent is provided in a solution, the solution further comprising a metal-oxygen compound, the metal-oxygen compound comprising a transition metal. 167. The method according to embodiment 166, wherein the metal-oxygen compound includes an oxometalate. 168. The method according to Embodiment 166 or 167, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 169. The method according to embodiment 166 or 167, wherein the transition metal of the metal-oxygen compound is molybdenum. 170. The method according to any one of embodiments 162 to 169, wherein the step of forming a surface layer further comprises forming a first surface sublayer adjacent to a roughened conductive layer and forming a second surface sublayer on the first surface sublayer. 171. The method according to Embodiment 170, wherein the first surface sublayer contains a metal oxide and the second surface sublayer contains a silicon compound. 172. The method according to embodiment 171, wherein the metal oxide includes a transition metal. 173. The method according to Embodiment 171, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 174. The method according to embodiment 171, wherein the metal oxide comprises at least a monolayer of copper oxide. 175. The method according to any one of embodiments 162 to 174, wherein the chemical etching agent comprises an oxidizing agent. 176. The method according to any one of embodiments 162 to 175, wherein the chemical etching agent comprises an organic acid. 177. The method according to any one of embodiments 162 to 176, further comprising the step of etching a plurality of pits onto the surface of a conductive layer. 178. A current collector for a lithium-ion storage device anode, wherein the current collector includes a conductive layer and a surface layer disposed on the conductive layer, and the surface layer includes a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer. (i) The first surface sublayer contains zinc, (ii) The second surface sublayer contains a metal-oxygen compound, and the metal-oxygen compound contains a transition metal other than zinc, (iii) Current collector, surface roughness R a Characterized by ≥250nm, Current collector. 179. The current collector according to Embodiment 178, wherein the surface layer further comprises a third surface sublayer provided on a second surface sublayer, and the third surface sublayer comprises a silicon compound. 180. The current collector according to Embodiment 179, wherein the silicon compound comprises or is derived from siloxane, siloxysilane, or silazane. 181. Silicon compounds are given by formula (1) Si(R) n (OR') 4-n (1) (wherein n=1, 2, or 3, and R and R' are independently selected from substituted or unsubstituted alkyl, alkenyl, or aryl groups.) A current collector according to Embodiment 179, comprising or derived from a compound. 182. The current collector according to any one of embodiments 179 to 181, wherein the surface layer further comprises a fourth surface sublayer provided on a third surface sublayer, and the fourth surface sublayer comprises a metal oxide. 183. The current collector according to Embodiment 182, wherein the metal oxide is a transition metal oxide. 184. The current collector according to Embodiment 182, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 185. The current collector according to Embodiment 178, wherein the surface layer does not contain a silicon compound. 186. The current collector according to Embodiment 178 or 185, wherein the surface layer further comprises a third surface sublayer provided on a second surface sublayer, and the third surface sublayer comprises a metal oxide. 187. The current collector according to embodiment 186, wherein the metal oxide is a transition metal oxide. 188. The current collector according to Embodiment 186, wherein the metal oxide includes an oxide of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. 187. A current collector according to any one of embodiments 178 to 188, wherein the first surface sublayer contains at least 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 188. A current collector according to any one of embodiments 178 to 188, wherein the first surface sublayer comprises a zinc alloy. 189. The current collector according to Embodiment 188, wherein the first surface sublayer contains less than 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. 190. A current collector according to embodiment 188 or 189, wherein the zinc alloy comprises zinc and nickel. 191. The current collector according to Embodiment 190, wherein the first surface sublayer contains 3 to 30 atomic percent nickel. 192. The first surface sublayer is 10-3000 mg / m². 2 A current collector according to any one of embodiments 178 to 191, comprising zinc in the range of [specify range]. 193. The first surface sublayer is 10-100 mg / m². 2 A current collector according to Embodiment 187, comprising zinc in the range of [amount]. 194. The first surface sublayer is 500-3000 mg / m². 2 A current collector according to any one of embodiments 188 to 191, comprising zinc in the range. 195. A current collector according to any one of embodiments 178 to 194, wherein the metal-oxygen compound includes a metal oxide. 196. A current collector according to any one of embodiments 178 to 195, wherein the metal-oxygen compound comprises an oxometalate. 197. A current collector according to any one of embodiments 178 to 196, wherein the transition metal of the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. 198. A current collector according to any one of embodiments 178 to 196, wherein the transition metal of the metal-oxygen compound includes chromium. 199. The second surface sublayer contains 2-50 mg / m². 2 A current collector according to Embodiment 198, comprising chromium in the range of [amount]. 200. A current collector according to any one of embodiments 178 to 199, wherein the conductive layer contains nickel within the nickel layer. 201. The current collector according to Embodiment 200, wherein the conductive layer further comprises a metal intermediate layer interposed between the nickel layer and the surface layer. 202. The current collector according to Embodiment 201, wherein the metal intermediate layer contains copper. 203. The current collector according to Embodiment 201 or 202, wherein the metal interlayer has an average interlayer thickness of less than 50% of the total average thickness of the conductive layers. 204. A current collector according to any one of embodiments 178 to 199, wherein the conductive layer contains copper. 205. The current collector according to Embodiment 204, wherein the conductive layer comprises a copper alloy containing copper, magnesium, silver, and phosphorus. 206. The current collector according to Embodiment 204, wherein the conductive layer comprises a copper alloy containing copper, iron, and phosphorus. 207. The current collector according to Embodiment 204, wherein the conductive layer comprises a copper alloy including brass or bronze. 208. The current collector according to Embodiment 204, wherein the conductive layer comprises a copper alloy containing copper, nickel, and silicon. 209. A current collector according to any one of Embodiments 178 to 208, wherein the conductive layer or current collector is characterized by a tensile strength of at least 500 MPa. 210. The conductive layer or current collector is characterized by a tensile strength of more than 600 MPa, as described in any one of Embodiments 178 to 208. 211. A current collector according to any one of embodiments 178 to 208, wherein the conductive layer or current collector is characterized by a tensile strength of at least 700 MPa. 212. A current collector according to any one of embodiments 178 to 211, wherein the conductive layer comprises a roll-formed metal foil. 213. A method for producing an anode for use in an energy storage device, The steps include providing a current collector manufactured by any one of embodiments 95 to 152 or 178 to 212, or by the method described in any one of embodiments 162 to 177, The steps include forming a lithium storage layer on a current collector by chemical vapor deposition using a silane-containing gas, and Methods that include... 214. The method according to Embodiment 213, wherein chemical vapor deposition includes a PECVD process. 215. The method according to Embodiment 214, wherein the PECVD process comprises forming a capacitively coupled plasma or an inductively coupled plasma. 216. The method according to Embodiment 214, wherein the PECVD process includes a DC plasma source, an AC plasma source, an RF plasma source, a VHF plasma source, or a microwave plasma source. 217. The PECVD process is the method according to Embodiment 214, including magnetron-assisted RF PECVD. 218. The method according to Embodiment 214, wherein the PECVD process includes expanding thermal plasma chemical vapor deposition. 219. The method according to embodiment 214, wherein the PECVD process includes hollow cathode PECVD. 220. The method according to any one of embodiments 213 to 219, wherein the lithium storage layer comprises at least 40 atomic percent of silicon, germanium, or a combination thereof. 221. The method according to any one of embodiments 213 to 220, wherein the lithium storage layer contains less than 10 atomic percent of carbon. 222. The method according to any one of embodiments 213 to 221, wherein the lithium storage layer substantially does not contain lithium storage nanostructures. 223. The method according to any one of embodiments 213 to 222, wherein the lithium storage layer is a continuous porous lithium storage layer. 224. The method according to any one of embodiments 213 to 223, wherein the lithium storage layer comprises a quasi-stoichiometric nitride of silicon. 225. The method according to any one of embodiments 213 to 224, wherein the lithium storage layer comprises a quasi-stoichiometric oxide of silicon. 226. The method according to any one of claims 213 to 225, wherein the lithium storage layer comprises at least 80 atomic percent amorphous silicon. 227. The density of the lithium storage layer is 1.1 to 2.25 g / cm³. 3 The method according to embodiment 226, which is within the scope of the embodiment 226. 228. The method according to any one of embodiments 213 to 225, wherein the lithium storage layer contains up to 30% nanocrystalline silicon. 229. The method according to any one of embodiments 213 to 228, wherein the lithium storage layer comprises a column of silicon nanoparticle aggregates. 230. The method according to any one of embodiments 213 to 229, wherein the lithium storage layer has an average thickness of at least 7 μm. 231. The method according to any one of embodiments 213 to 230, wherein the silane-containing gas is silane. 232. The method according to any one of embodiments 213 to 231, further comprising the step of adding hydrogen gas during chemical vapor deposition, wherein the ratio of silane-containing gas to hydrogen gas is 2 or less. 233. The method according to any one of embodiments 213 to 232, further comprising the step of doping a lithium storage layer with boron, phosphorus, sulfur, fluorine, aluminum, gallium, indium, arsenic, antimony, or bismuth, or a combination thereof. 234. A method for producing a pre-lithiumized anode, i) Providing an anode according to any one of Embodiments 1 to 83 or 153 to 161, or an anode manufactured according to any one of Embodiments 213 to 232, ii) The step of incorporating lithium into the lithium storage layer of the anode to satisfy at least 5% of the lithium storage capacity, thereby forming a pre-lithiumized anode. Methods that include... 235. The method according to embodiment 234, further comprising the step of depositing lithium metal on a lithium storage layer. 236. The method according to Embodiment 234, further comprising the step of contacting a lithium storage layer with a reducing lithium organic compound. 237. The method according to Embodiment 234, further comprising the step of electrochemically reducing lithium ions at the anode in a pre-lithiumized solution.

[0194] The specific details of the concrete embodiments can be combined in any suitable manner without departing from the spirit and scope of the embodiments of the present invention. However, other embodiments of the present invention may relate to specific embodiments relating to each individual aspect, or to specific combinations of these individual aspects.

[0195] The above description of exemplary embodiments of the present invention is presented for illustrative and explanatory purposes only. It is not intended to be exhaustive or to limit the invention to the exact forms described, and many modifications and variations are possible in light of the above teachings.

[0196] The foregoing description includes many details to provide an understanding of various embodiments of the Art for illustrative purposes. However, it will be apparent to those skilled in the art that certain embodiments may be carried out without some of these details or with additional details.

[0197] While several embodiments have been described, those skilled in the art will recognize that various modifications, alternative configurations, and equivalents can be used without departing from the spirit of the invention. Furthermore, some well-known processes and elements have not been described in order to avoid unnecessarily obscuring the invention. Moreover, details of any particular embodiment are not necessarily always present in variations of that embodiment and may be added to other embodiments.

[0198] Where a range of values ​​is provided, unless explicitly indicated in the context, each intermediate value between the upper and lower limits of that range, up to one-tenth of the lower limit, is also specifically disclosed. Each smaller range between any stated value or intermediate value of a stated range and any other stated value or intermediate value of that stated range is included. The upper and lower limits of these smaller ranges may be included in or excluded from the range independently, and each range included in a smaller range and containing one limit, neither limit, or both limits is also included in the invention, subject to any specifically excluded limits within the stated range. Where a stated range contains one or both limits, the range excluding one or both of the limits that they contain is also included.

[0199] As used herein and in the appended claims, the singular forms “a,” “an,” and “the” include multiple references unless otherwise explicitly indicated by the context. For example, a reference to “a method” includes multiple such methods, and a reference to “the anode” includes one or more anodes and their equivalents known to those skilled in the art. The present invention has been described in detail for the purposes of clarification and understanding. However, it will be understood that certain changes and modifications may be made within the scope of the appended claims.

[0200] All publications, patents, and patent applications cited herein are incorporated herein by whole or in whole for all purposes. There is no prior art to be found.

Claims

1. an anode for an energy storage device, a) A current collector comprising a conductive layer and a surface layer disposed on the conductive layer, wherein the surface layer comprises a first surface sublayer adjacent to the conductive layer and a second surface sublayer disposed on the first surface sublayer. (i) The first surface sublayer contains zinc, (ii) The second surface sublayer comprises a metal-oxygen compound, the metal-oxygen compound comprises a transition metal other than zinc, and (iii) The current collector has a surface roughness R ａ Characterized by a range of ≥250 nm, Current collector and, b) A continuous porous lithium storage layer covering the surface layer, (i) Having an average thickness of at least 7 μm, (ii) containing at least 40 atomic percent of silicon, germanium, or a combination thereof, (iii) Does not contain carbon-based binders, Continuous porous lithium storage layer and Anode, including

2. The surface layer further includes a third surface sublayer provided on the second surface sublayer, The third surface sublayer contains a silicon compound, The anode according to claim 1.

3. The silicon compound includes or is derived from siloxane, siloxysilane, or silazane. The anode according to claim 2.

4. The surface layer further includes a fourth surface sublayer provided on the third surface sublayer, The fourth surface sublayer contains a metal oxide. The anode according to claim 2 or 3.

5. The aforementioned metal oxide is a transition metal oxide. The anode according to claim 4.

6. The aforementioned metal oxides include oxides of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. The anode according to claim 4.

7. The aforementioned surface layer does not contain silicon compounds. The anode according to claim 1.

8. The surface layer further includes a third surface sublayer provided on the second surface sublayer, The third surface sublayer contains a metal oxide, The anode according to claim 1 or 7.

9. The aforementioned metal oxide is a transition metal oxide. The anode according to claim 8.

10. The aforementioned metal oxides include oxides of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, molybdenum, tungsten, silver, zirconium, hafnium, tin, aluminum, indium, or niobium. The anode according to claim 8.

11. The first surface sublayer contains at least 98 atomic percent zinc relative to all metal atoms in the first surface sublayer. The anode according to any one of claims 1 to 10.

12. The first surface sublayer contains a zinc alloy, The anode according to any one of claims 1 to 10.

13. The aforementioned zinc alloy contains zinc and nickel. The anode according to claim 12.

14. The first surface sublayer contains 3 to 30 atomic percent nickel. The anode according to claim 13.

15. The first surface sublayer is 10 to 3000 mg / m². ２ Including zinc in the range, The anode according to any one of claims 1 to 14.

16. The first surface sublayer is 10 to 100 mg / m². ２ Including zinc in the range, The anode according to claim 11.

17. The first surface sublayer is 500 to 3000 mg / m² ２ Including zinc in the range, The anode according to any one of claims 12 to 14.

18. The aforementioned metal-oxygen compound includes a metal oxide. The anode according to any one of claims 1 to 17.

19. The aforementioned metal-oxygen compound includes an oxometalate. The anode according to any one of claims 1 to 18.

20. The transition metal in the metal-oxygen compound includes titanium, vanadium, chromium, manganese, iron, cobalt, nickel, molybdenum, tungsten, zirconium, or niobium. The anode according to any one of claims 1 to 19.

21. The transition metal in the metal-oxygen compound includes chromium. The anode according to any one of claims 1 to 19.

22. The second surface sublayer contains 2 to 50 mg / m². ２ Including chromium in the range, The anode according to claim 21.

23. The current collector further includes a plurality of nanopillar mechanisms arranged on the conductive layer, Each of the aforementioned plurality of nanopillar mechanisms includes a copper-containing nanopillar core. The surface layer is at least partially on the copper-containing nanopillar core. The anode according to any one of claims 1 to 22.

24. The continuous porous lithium storage layer contains voids within 5 μm from the interface with the nanopillar mechanism. The anode according to claim 23.

25. The conductive layer contains nickel within the nickel layer. The anode according to any one of claims 1 to 24.

26. The conductive layer further includes a metal intermediate layer interposed between the nickel layer and the surface layer. The anode according to claim 25.

27. The aforementioned metal intermediate layer contains copper, The anode according to claim 26.

28. The metal intermediate layer has an average intermediate layer thickness of less than 50% of the total average thickness of the conductive layer. The anode according to claim 26 or 27.

29. The conductive layer contains copper, The anode according to any one of claims 1 to 24.

30. The conductive layer comprises a copper alloy containing copper, magnesium, silver, and phosphorus. The anode according to claim 29.

31. The conductive layer includes a copper alloy containing copper, iron, and phosphorus. The anode according to claim 29.

32. The conductive layer includes a copper alloy containing brass or bronze. The anode according to claim 29.

33. The conductive layer includes a copper alloy containing copper, nickel, and silicon. The anode according to claim 29.

34. The conductive layer includes a mesh of conductive carbon. The anode according to any one of claims 1 to 33.

35. The current collector further includes an insulating substrate, The conductive layer covers the insulating substrate. The anode according to any one of claims 1 to 34.

36. The conductive layer or current collector is characterized by a tensile strength of at least 500 MPa. The anode according to any one of claims 1 to 35.

37. The conductive layer or current collector is characterized by a tensile strength exceeding 600 MPa. The anode according to any one of claims 1 to 35.

38. The conductive layer or current collector is characterized by a tensile strength of at least 700 MPa. The anode according to any one of claims 1 to 35.

39. The conductive layer includes a roll-formed metal foil. The anode according to any one of claims 1 to 38.

40. The continuous porous lithium storage layer does not contain lithium storage nanostructures. The anode according to any one of claims 1 to 39.

41. The continuous porous lithium storage layer contains a quasi-stoichiometric silicon nitride. The anode according to any one of claims 1 to 40.

42. The continuous porous lithium storage layer contains at least 80 atomic percent amorphous silicon. The anode according to any one of claims 1 to 41.

43. The density of the continuous porous lithium storage layer is 1.1 to 2.25 g / cm³. ３ It is within the range of, The anode according to claim 42.

44. The continuous porous lithium storage layer has an average thickness of at least 10 μm. The anode according to any one of claims 1 to 43.

45. The continuous porous lithium storage layer contains silicon nanoparticle aggregates, The anode according to any one of claims 1 to 44.

Images