Sensors, sensor systems, and electronic devices

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, a fixation part, a movable part supported on the fixation part, a first fixation electrode, and a first opposite fixation electrode. The fixation part includes a first center. The movable part includes a first annular part and a second annular part. The first fixation electrode includes a first area and a second area. The first opposite fixation electrode includes a first opposite area and a second opposite area. The first area is provided between the second annular part and the first annular part. The first opposite area is provided between the second annular part and the first area. The second area is provided between the second annular part and the first annular part. The second opposite area is provided between the second annular part and the second area. A first area width of the first area is different from a second area width of the second area. A first opposite area width of the first opposite area is different from a second opposite area width of the second opposite area.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors, sensor systems, and electronic devices.

Background Art

[0002] For example, there are sensors with MEMS (Micro Electro Mechanical Systems) structures. In some cases, electronic devices and the like are controlled based on what is obtained by the sensors. In sensors, improvement in characteristics is desired. information

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a sensor, a sensor system, and an electronic device capable of improving characteristics.

Means for Solving the Problems

[0005] ​According to the embodiment, the sensor includes a substrate including a first surface, a fixed portion fixed to the first surface, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. A first gap is provided between the first surface and the movable portion. The fixed portion includes a first center in a first plane parallel to the first surface. The movable portion includes a first annular portion and a second annular portion. The first fixed electrode includes a first region and a second region. The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region. The first region width of the first region in the radial direction parallel to the first plane and passing through the first center is different from the second region width of the second region in the radial direction. The first opposing region width of the first opposing region in the radial direction is different from the second opposing region width of the second opposing region in the radial direction. [Brief explanation of the drawing]

[0006] [Figure 1] Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 2] Figure 2 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 4] Figure 4 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 7] Figure 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 8]Figure 8 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 9] Figure 9 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 10] Figure 10 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 11] Figure 11 is a schematic diagram illustrating an electronic device according to the second embodiment. [Figure 12] Figures 12(a) to 12(h) are schematic diagrams illustrating applications of the electronic device according to the embodiment. [Figure 13] Figures 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. [Modes for carrying out the invention]

[0007] (First Embodiment) Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. Figure 2 is a schematic plan view illustrating a part of the sensor according to the first embodiment. Figures 3 to 6 are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figure 3 is a cross-sectional view taken along line A1-A2 in Figure 2. Figure 4 is a cross-sectional view taken along line A3-A4 in Figure 2. Figure 5 is a cross-sectional view taken along line A5-A6 in Figure 2. Figure 6 is a cross-sectional view taken along line A7-A8 in Figure 2.

[0008] As shown in Figures 1 to 6, the sensor 110 according to this embodiment includes a base 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B.

[0009] The base 50s includes a first surface 50a. The fixed part 10F is fixed to the first surface 50a. The movable part 10M is supported by the fixed part 10F.

[0010] As shown in FIGS. 3 to 6, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. A fixed part 10F is provided on the insulating member 55. The insulating member 55 is not provided between the first surface 50a and the movable part 10M.

[0011] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon or the like. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon or the like. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide or the like.

[0012] As shown in FIG. 1, the fixed part 10F includes the first center 10C in the first plane PL1 parallel to the first surface 50a.

[0013] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the X-Y plane.

[0014] The movable part 10M includes a first annular part 11 and a second annular part 12. In this example, the second annular part 12 is provided between the fixed part 10F and the first annular part 11. The first annular part 11 may be provided between the fixed part 10F and the second annular part 12.

[0015] As shown in FIG. 2, the first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular part 12 and the first annular part 11. The first opposing region s1 is provided between the second annular part 12 and the first region r1. The second region r2 is provided between the second annular part 12 and the first annular part 11. The second opposing region s2 is provided between the second annular part 12 and the second region r2.

[0016] As shown in Figure 2, the width (length) of the first region r1 in the radial direction Dr parallel to the first plane PL1 and passing through the first center 10C is defined as the first region width wr1. The width (length) of the second region r2 in the radial direction Dr is defined as the second region width wr2. The first region width wr1 is different from the second region width wr2.

[0017] As shown in Figure 2, the width (length) of the first opposing region s1 in the radial direction Dr is defined as the first opposing region width ws1. The width (length) of the second opposing region s2 in the radial direction Dr is defined as the second opposing region width ws2. The first opposing region width ws1 is different from the second opposing region width ws2.

[0018] In this example, the width of the first region wr1 is wider than the width of the second region wr2. The width of the first opposing region ws1 is narrower than the width of the second opposing region ws2.

[0019] For example, the sensor 110 is provided with a plurality of fixed electrodes 30. The plurality of fixed electrodes 30 are fixed to, for example, a first surface 50a. The first fixed electrode 31A and the first opposing fixed electrode 31B are included in the plurality of fixed electrodes 30.

[0020] For example, a signal containing an AC component is applied between a portion of the multiple fixed electrodes 30 and the movable part 10M. This causes the movable part 10M to vibrate. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in capacitance. The change in the vibration state due to the external force is caused by, for example, the Coriolis force. The change in the vibration state can be detected, for example, by another portion of the multiple fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The detection of the change in the vibration state may be performed, for example, by the control unit 70.

[0021] In the sensor 110, the first fixed electrode 31A faces the first annular portion 11. The first opposing fixed electrode 31B faces the second annular portion 12. By providing these electrodes in the narrow region between the second annular portion 12 and the first annular portion 11, the desired vibration can be obtained even when the size of the sensor 110 is reduced. Changes in the vibration state can be detected with high accuracy.

[0022] In the sensor 110, a wide region and a narrow region are provided in each of the first fixed electrode 31A and the first opposing fixed electrode 31B. A connecting member (e.g., bonding wire) can be stably connected to the wide region. For example, a stable electrical connection can be obtained even when the size of the sensor 110 is small. For example, a stable electrical connection enables highly accurate detection with suppressed noise. According to this embodiment, a sensor with improved characteristics can be provided.

[0023] For example, the first region r1 and the second region r2 may be swapped with each other. For example, in this case as well, a wide region and a narrow region are provided. For example, even when the size of the sensor 110 is small, a stable electrical connection can be obtained. In this embodiment, the first annular portion 11 may be inside the second annular portion 12.

[0024] For example, in sensor 110, either the first condition or the second condition may be satisfied. In the first condition, the first region width wr1 is wider than the second region width wr2, and the first opposing region width ws1 is narrower than the second opposing region width ws2. In the second condition, the first region width wr1 is narrower than the second region width wr2, and the first opposing region width ws1 is wider than the second opposing region width ws2.

[0025] The second region r2 is continuous with the first region r1. The second opposing region s2 may be continuous with the first opposing region s1.

[0026] The direction from the second opposing region s2 to the first region r1 follows the circumferential direction Dc centered on the first center 10C. In the circumferential direction Dc, the second opposing region s2 faces the first region r1.

[0027] As shown in Figure 2, the first fixed electrode 31A may further include a third region r3. The first opposing fixed electrode 31B may further include a third opposing region s3. The third region r3 is provided between the second annular portion 12 and the first annular portion 11. At least a portion of the third opposing region s3 is provided between the second annular portion 12 and the third region r3. The first opposing region s1 is located between the second opposing region s2 and the third opposing region s3. The first region width wr1 is different from the third region width wr3 of the third region r3 in the radial direction Dr. The first opposing region width ws1 is different from the third opposing region width ws3 of the third opposing region s3 in the radial direction Dr.

[0028] In this example, the width of the first region wr1 is wider than the width of the second region wr2. The width of the first opposing region ws1 is narrower than the width of the second opposing region ws2. The width of the first region wr1 is wider than the width of the third region wr3. The width of the first opposing region ws1 is narrower than the width of the third opposing region ws3.

[0029] The width of the first region wr1 may be narrower than the width of the second region wr2, and the width of the first opposing region ws1 may be wider than the width of the second opposing region ws2. In this case, the width of the first region wr1 is narrower than the width of the third region wr3, and the width of the first opposing region ws1 is wider than the width of the third opposing region ws3.

[0030] For example, in the circumferential direction Dc centered on the first center 10C, at least a portion of the first region r1 is located between the second region r2 and the third region r3. In the circumferential direction Dc, at least a portion of the first opposing region s1 is located between the second opposing region s2 and the third opposing region s3.

[0031] For example, the first ratio of the first absolute value of the difference between the first domain width wr1 and the second domain width wr2 to the first domain width wr1 may be between 0.9 and 30. The second ratio of the second absolute value of the difference between the first opposing domain width ws1 and the second opposing domain width ws2 to the first opposing domain width ws1 may be between 0.9 and 30.

[0032] The width of the second region wr2 may be between 0.05 and 30 times the width of the first region wr1. The width of the third region wr3 may be between 0.8 and 1.2 times the width of the second region wr2.

[0033] The width of the second opposing region ws2 may be between 0.05 and 30 times the width of the first opposing region ws1. The width of the third opposing region ws3 may be between 0.8 and 1.2 times the width of the second opposing region ws2.

[0034] Figure 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. As shown in Figure 7, in the sensor 110, the length of the second opposing region s2 in the circumferential direction Dc centered on the first center 10C is defined as the second opposing region length Ls2. The length of the third opposing region s3 in the circumferential direction Dc is defined as the third opposing region length Ls3. The second opposing region length Ls2 may be, for example, 0.8 times or more and 1.2 times or less than the third opposing region length Ls3. For example, the second opposing region length Ls2 may be substantially the same as the third opposing region length Ls3. Vibrations with good symmetry can be obtained. For example, noise is suppressed. High-precision detection becomes easier.

[0035] Let the length of the first region r1 in the circumferential direction Dc be the first region length Lr1. The first region length Lr1 may be, for example, 0.1 times or more and 10 times or less the second opposing region length Ls2. The first region length Lr1 may also be, for example, 0.8 times or more and 1.2 times or less the second opposing region length Ls2.

[0036] As shown in Figure 2, the movable part 10M may include a plurality of first connection parts 21. The plurality of first connection parts 21 extend along the radial direction Dr. The plurality of first connection parts 21 connect the first annular part 11 and the second annular part 12. The first fixed electrode 31A and the first opposing fixed electrode 31B are provided between one of the plurality of first connection parts 21 and another of the plurality of first connection parts 21. Another of the plurality of first connection parts 21 is adjacent to one of the plurality of first connection parts 21 in the circumferential direction Dc.

[0037] As shown in Figure 2, the sensor 110 may further include a second fixed electrode 32A and a second opposing fixed electrode 32B. The movable part 10M may further include a third annular part 13. The second annular part 12 is provided between the third annular part 13 and the first annular part 11. In this example, the third annular part 13 is located between the fixed part 10F and the second annular part 12.

[0038] As shown in Figure 2, the second fixed electrode 32A includes a fourth region r4 and a fifth region r5. The second opposing fixed electrode 32B includes a fourth opposing region s4 and a fifth opposing region s5. The fourth region r4 is provided between the third annular portion 13 and the second annular portion 12. The fourth opposing region s4 is provided between the third annular portion 13 and the fourth region r4. The fifth region r5 is provided between the third annular portion 13 and the second annular portion 12. The fifth opposing region s5 is provided between the third annular portion 13 and the fifth region r5.

[0039] The width wr4 of the fourth region r4 in the radial direction Dr is different from the width wr5 of the fifth region r5 in the radial direction Dr. The width ws4 of the fourth opposing region s4 in the radial direction Dr is different from the width ws5 of the fifth opposing region s5 in the radial direction Dr.

[0040] In both the second fixed electrode 32A and the second opposing fixed electrode 32B, a wide region and a narrow region are provided. This facilitates electrical connection. Noise is suppressed, enabling highly accurate detection.

[0041] In this example, the width of the first region wr1 is wider than the width of the second region wr2. The width of the first opposing region ws1 is narrower than the width of the second opposing region ws2. The width of the fourth region wr4 is narrower than the width of the fifth region wr5. The width of the fourth opposing region ws4 is wider than the width of the fifth opposing region ws5.

[0042] As shown in Figure 2, the second fixed electrode 32A may further include a sixth region r6. The second opposing fixed electrode 32B may further include a sixth opposing region s6. The sixth region r6 is provided between the third annular portion 13 and the second annular portion 12. At least a portion of the sixth opposing region s6 is provided between the third annular portion 13 and the sixth region r6. At least a portion of the fourth region r4 is located between the fifth region r5 and the sixth region r6.

[0043] The width of the fourth region wr4 is different from the width of the sixth region wr6 of the sixth region r6 in the radial direction Dr. The width of the fourth opposing region ws4 is different from the width of the sixth opposing region ws6 of the sixth opposing region s6 in the radial direction Dr.

[0044] In this example, the width of the first region wr1 is wider than the width of the second region wr2. The width of the first opposing region ws1 is narrower than the width of the second opposing region ws2. The width of the fourth region wr4 is narrower than the width of the fifth region wr5. The width of the fourth opposing region ws4 is wider than the width of the fifth opposing region ws5. The width of the fourth region wr4 is narrower than the width of the fifth region wr5. The width of the fourth opposing region ws4 is wider than the width of the fifth opposing region ws5. The width of the fourth region wr4 is narrower than the width of the sixth region wr6. The width of the fourth opposing region ws4 is wider than the width of the sixth opposing region ws6.

[0045] For example, the fifth region r5 is provided between the fifth opposing region s5 and the second region r2. For example, the second opposing region s2 is provided between the fifth region r5 and the second region r2.

[0046] Figure 8 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 8, in the sensor 111 according to this embodiment, the configuration of the first fixed electrode 31A and the first opposing fixed electrode 31B differs from the configuration of the sensor 110. The rest of the configuration of the sensor 111 may be the same as that of the sensor 110.

[0047] The sensor 111 also includes a base 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B. A first gap G1 is provided between the first surface 50a of the base 50s and the movable part 10M (see Figures 3 to 6). As shown in Figure 8, the fixed part 10F includes a first center 10C in a first plane PL1 parallel to the first surface 50a.

[0048] The movable part 10M includes a plurality of annular parts 10 and a plurality of connecting parts 20. The plurality of annular parts 10 are arranged around the fixed part 10F with a first center 10C as the center. The plurality of annular parts 10 include a first annular part 11, a second annular part 12, and a third annular part 13. The second annular part 12 is provided between the fixed part 10F and the first annular part 11. The third annular part 13 is provided between the fixed part 10F and the second annular part 12.

[0049] The multiple connection parts 20 include a first connection part 21, a second connection part 22, and a third connection part 23. The first connection part 21 is provided between the second annular part 12 and the first annular part 11, and connects the second annular part 12 and the first annular part 11. The first connection part 21 is aligned with the first radial direction Dr1. The first radial direction Dr1 passes through the first center 10C and aligns with the first plane PL1. The second connection part 22 is provided between the third annular part 13 and the second annular part 12, and connects the third annular part 13 and the second annular part 12. The second connection part 22 is aligned with the second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C and aligns with the first plane PL1. The third connection part 23 is provided between the second annular part 12 and the first annular part 11, and connects the second annular part 12 and the first annular part 11. The third connection part 23 is , along the third radial direction Dr3, The third radial direction Dr3 passes through the first center 10C and lies along the first plane PL1.

[0050] The second radial direction Dr2 intersects the first radial direction Dr1. The third radial direction Dr3 intersects both the first radial direction Dr1 and the second radial direction Dr2. The angle between the second radial direction Dr2 and the first radial direction Dr1 (the first angle) is smaller than the angle between the third radial direction Dr3 and the first radial direction Dr1 (the second angle). In this example, the first angle is effectively half the second angle.

[0051] The first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular portion 12 and the first annular portion 11. The first opposing region s1 is provided between the second annular portion 12 and the first region r1. The second region r2 is provided between the second annular portion 12 and the first annular portion 11. The second opposing region s2 is provided between the second annular portion 12 and the second region r2.

[0052] The first annular portion 11 includes a first intersection point p1 that intersects with the second radial direction Dr2. The second annular portion 12 includes a second intersection point p2 that intersects with the second radial direction Dr2. A first radial gap g1 is provided between the first intersection point p1 and the second intersection point p2, between the first region r1 and the second region r2, and between the first opposing region s1 and the second opposing region s2.

[0053] In the sensor 111, four independent electrode regions (first region r1, second region r2, first opposing region s1, and second opposing region s2) are provided in the region enclosed by the first connection portion 21, the third connection portion 23, the second annular portion 12, and the first annular portion 11. These electrode regions can generate the desired vibration in the second annular portion 12 and the first annular portion 11, or accurately detect the vibration state of the second annular portion 12 and the first annular portion 11. By using four independent electrode regions, for example, noise can be suppressed, high-precision detection becomes possible, and a sensor with improved characteristics can be provided. For example, the influence of noise contained in the electrical signal applied to the fixed electrode 30 can be suppressed.

[0054] The first region r1 and the second region r2 lie on one circumferential direction Dc. The first opposing region s1 and the second opposing region s2 lie on one circumferential direction Dc. The first opposing region s1 and the first region r1 lie on one radial direction Dr. The second opposing region s2 and the second region r2 lie on one radial direction Dr. Such four independent electrode regions constitute a set. Multiple sets may be arranged along the circumferential direction Dc. The first region r1, the second region r2, the first opposing region s1, and the second opposing region s2 are arc-shaped and extend along the circumferential direction Dc.

[0055] In sensor 111, no connection portion 20 is provided between the first intersection point p1 and the second intersection point p2. The movable portion 10M has high flexibility. Vibration can be generated effectively.

[0056] In the sensor 111, the multiple connection points 20 extend along the radial direction Dr.

[0057] Figure 9 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 9, in the sensor 112 according to this embodiment, the configuration of the first fixed electrode 31A and the first opposing fixed electrode 31B differs from the configuration of the sensor 110. The rest of the configuration of the sensor 112 may be the same as that of the sensor 110.

[0058] The sensor 112 also includes a base 50s, a fixed part 10F, a movable part 10M, a first fixed electrode 31A, and a first opposing fixed electrode 31B. A first gap G1 is provided between the first surface 50a of the base 50s and the movable part 10M (see Figures 3 to 6). As shown in Figure 9, the fixed part 10F includes a first center 10C in a first plane PL1 parallel to the first surface 50a.

[0059] In the sensor 112, the movable part 10M includes a plurality of annular parts 10 and a plurality of connecting parts 20. The plurality of annular parts 10 are arranged around the fixed part 10F with a first center 10C as the center. The plurality of annular parts 10 include a first annular part 11, a second annular part 12, and a third annular part 13. The second annular part 12 is provided between the fixed part 10F and the first annular part 11. The third annular part 13 is provided between the fixed part 10F and the second annular part 12. The second annular part 12 is adjacent to the first annular part 11. The third annular part 13 is adjacent to the second annular part 12.

[0060] The multiple connecting parts 20 include a first connecting part 21 and a second connecting part 22. The first connecting part 21 and the second connecting part 22 are provided between the third annular part 13 and the first annular part 11. The first connecting part 21 and the second connecting part 22 connect the third annular part 13, the second annular part 12 and the first annular part 11.

[0061] The first connection point 21 is aligned with the first radial direction Dr1. The first radial direction Dr1 passes through the first center 10C and aligns with the first plane PL1. The second connection point 22 is aligned with the second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C and aligns with the first plane PL1. The second radial direction Dr2 intersects with the first radial direction Dr1. For example, the second radial direction Dr2 is inclined with respect to the first radial direction Dr1.

[0062] The first fixed electrode 31A includes a first region r1 and a second region r2. The first opposing fixed electrode 31B includes a first opposing region s1 and a second opposing region s2. The first region r1 is provided between the second annular portion 12 and the first annular portion 11. The first opposing region s1 is provided between the second annular portion 12 and the first region r1. The second region r2 is provided between the second annular portion 12 and the first annular portion 11. The second opposing region s2 is provided between the second annular portion 12 and the second region r2. The second connecting portion 22 passes between the first region r1 and the second region r2, and between the first opposing region s1 and the second opposing region s2.

[0063] In the sensor 112, the three annular sections 10 are continuously connected by the first connection section 21. The three annular sections 10 are also continuously connected by the second connection section 22. For example, it is easy to obtain a high-intensity signal. Noise can be suppressed by the high-intensity signal. Sensor 112 can also be provided with improved characteristics.

[0064] The first region r1, the second region r2, the first opposing region s1, and the second opposing region s2 are arc-shaped and extend along the circumferential direction Dc.

[0065] In the sensor 112, the multiple connection parts 20 may further include a third connection part 23. The third connection part 23 is provided between the third annular part 13 and the first annular part 11 and connects the third annular part 13, the second annular part 12, and the first annular part 11. The third connection part 23 is along the third radial direction Dr3. The third radial direction Dr3 passes through the first center 10C and is along the first plane PL1. The third radial direction Dr3 intersects the first radial direction Dr1 and the second radial direction Dr2. The angle between the second radial direction Dr2 and the first radial direction Dr1 (first angle) is smaller than the angle between the third radial direction Dr3 and the first radial direction Dr1 (second angle). In this example, the first angle is substantially half of the second angle.

[0066] In the circumferential direction Dc, the first region r1 and the first opposing region s1 are provided between the first connecting portion 21 and the second connecting portion 22. The second region r2 and the second opposing region s2 are provided between the second connecting portion 22 and the third connecting portion 23.

[0067] In sensor 112, the first region r1 and the second region r2 lie on one circumferential direction Dc. The first opposing region s1 and the second opposing region s2 lie on one circumferential direction Dc. The first opposing region s1 and the first region r1 lie on one radial direction Dr. The second opposing region s2 and the second region r2 lie on one radial direction Dr. These four independent electrode regions form a set. Multiple sets may be arranged along the circumferential direction Dc.

[0068] Figure 10 is a schematic plan view illustrating a sensor according to the first embodiment. Figure 10 illustrates the fixed part 10F and the movable part 10M. In the sensor 120 according to this embodiment, the movable part 10M includes a first structure 41. For example, the first structure 41 is connected to the first annular part 11. The first annular part 11 is provided between the fixed part 10F and the first structure 41. The first structure 41 functions, for example, as a weight. This makes it easier to obtain stable vibrations. For example, noise can be suppressed.

[0069] The movable part 10M may include a second structure 42. The second structure 42 is provided between the fixed part 10F and the first annular part 11. The second structure 42 is connected to the first annular part 11, for example. The second structure 42 may also be connected to one of the plurality of connection parts 20. The second structure 42 functions, for example, as a weight. Noise is suppressed.

[0070] As shown in Figure 10, the movable part 10M may further include a first radiating structure 28p. The first radiating structure 28p is connected to one of the plurality of annular parts 10. In this example, the first radiating structure 28p is connected to the fourth annular part 14. The first radiating structure 28p extends from one of the plurality of annular parts 10 along a first radiating direction Dr1. The first radiating structure 28p is away from another of the plurality of annular parts 10 in the first radiating direction Dr1. In this example, the first radiating structure 28p is away from the fifth annular part 15 in the first radiating direction Dr1. The other one of the plurality of annular parts 10 is adjacent to the other one of the plurality of annular parts 10. The other one of the plurality of annular parts 10 is closest to the other one of the plurality of annular parts 10.

[0071] The movable part 10M may further include a second radiating structure 28q. The second radiating structure 28q is connected to one of the plurality of annular parts 10. The second radiating structure 28q is connected to the fifth annular part 15. The second radiating structure 28q extends along the first radiating direction Dr1 from one of the plurality of annular parts 10 to one of the plurality of annular parts 10. The second radiating structure 28q extends along the first radiating direction Dr1 from the fifth annular part 15 to the fourth annular part 14. The second radiating structure 28q is separated from the first radiating structure 28p in the first radiating direction Dr1.

[0072] By providing such a radiating structure, the overall mass distribution can be made uniform without connecting parts of adjacent annular sections 10. This makes it easier to obtain higher performance characteristics. For example, the movable section 10M can vibrate with an appropriate degree of freedom. It can vibrate in a stable state. The signal strength based on the vibration is high. High-sensitivity detection becomes possible.

[0073] As shown in Figure 10, the sensor 120 may include an inner structure 48. The inner structure 48 is fixed to the first surface 50a. A fixing portion 10F is provided around the inner structure 48. Electrical connections may be made through the inner structure 48. In this example, the inner structure 48 includes a first inner structure 48a and a second inner structure 48b. The inner structure 48 (e.g., the first inner structure 48a and the second inner structure 48b) may be electrically insulated from the fixing portion 10F and the movable portion 10M. At least a portion of the inner structure 48 (e.g., the first inner structure 48a and the second inner structure 48b) may be electrically connected to the fixing portion 10F or the movable portion 10M by wiring for electrical connections, etc.

[0074] In the sensor 120, the multiple annular sections 10 include a first annular section 11, a second annular section 12, a third annular section 13, a fourth annular section 14, and a fifth annular section 15. The number of multiple annular sections 10 is arbitrary.

[0075] (Second Embodiment) The second embodiment relates to an electronic device. Figure 11 is a schematic diagram illustrating an electronic device according to the second embodiment. As shown in Figure 11, the electronic device 310 according to the embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a drive device 185. According to the embodiment, for example, a circuit 180 for controlling a drive device 185 can be controlled with high precision.

[0076] As shown in Figure 11, the sensor system 210 according to the embodiment includes a sensor according to the first embodiment (for example, sensor 110) and a member to be detected 81. Sensor 110 is fixed to the member to be detected 81. Sensor 110 can detect signals from the member to be detected 81.

[0077] Figures 12(a) to 12(h) are schematic diagrams illustrating applications of the electronic device according to the embodiment. As shown in Figure 12(a), the electronic device 310 may be at least part of a robot. As shown in Figure 12(b), the electronic device 310 may be at least part of a machine robot installed in a manufacturing plant or the like. As shown in Figure 12(c), the electronic device 310 may be at least part of an automated guided vehicle in a factory or the like. As shown in Figure 12(d), the electronic device 310 may be at least part of a drone (unmanned aerial vehicle). As shown in Figure 12(e), the electronic device 310 may be at least part of an airplane. As shown in Figure 12(f), the electronic device 310 may be at least part of a ship. As shown in Figure 12(g), the electronic device 310 may be at least part of a submarine. As shown in Figure 12(h), the electronic device 310 may be at least part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a mobile body.

[0078] Figures 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Figure 13(a), the sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example in Figure 13(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit the signal obtained from the sensor 110 by, for example, at least one of wireless and wired methods. The sensor 430 is installed, for example, on a slope surface 410 such as a road 400. The sensor 430 can monitor the state of, for example, a facility (e.g., infrastructure). The sensor 430 may be, for example, a state monitoring device.

[0079] For example, the sensor 430 detects changes in the condition of the slope surface 410 of the road 400 with high accuracy. Changes in the condition of the slope surface 410 include, for example, changes in the inclination angle and changes in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transmitting / receiving unit 420. The condition of the facility (e.g., infrastructure) can be monitored, for example, continuously.

[0080] As shown in Figure 13(b), the sensor 430 is installed, for example, on a part of a bridge 460. The bridge 460 is built over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is installed on at least one of the main girder 450 and the pier 440. For example, the angle of at least one of the main girder 450 and the pier 440 may change due to deterioration or other reasons. For example, the vibration state may change in at least one of the main girder 450 and the pier 440. The sensor 430 can detect these changes with high accuracy. The detection results can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0081] The embodiments may include the following technical proposals. (Technical proposal 1) A substrate including the first face, The fixing part fixed to the first surface, The movable part is supported by the fixed part, First fixed electrode and First opposing fixed electrode and Equipped with, A first gap is provided between the first surface and the movable part. The fixing portion includes a first center in a first plane parallel to the first surface, The movable part includes a first annular portion and a second annular portion, The first fixed electrode includes a first region and a second region, The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion, The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, The first region width of the first region in the radial direction parallel to the first plane and passing through the first center is different from the second region width of the second region in the radial direction. A sensor in which the width of the first opposing region in the radial direction is different from the width of the second opposing region in the radial direction.

[0082] (Technical proposal 2) The first condition and the second condition are both met. In the first condition described above, the width of the first region is wider than the width of the second region, and the width of the first opposing region is narrower than the width of the second opposing region. The sensor according to Technical Proposal 1, wherein, in the second condition, the width of the first region is narrower than the width of the second region, and the width of the first opposing region is wider than the width of the second opposing region.

[0083] (Technical proposal 3) The second region is continuous with the first region, The sensor according to Technical Proposal 1 or 2, wherein the second opposing region is continuous with the first opposing region.

[0084] (Technical proposal 4) The direction from the second opposing region to the first region is along the circumferential direction centered on the first center, as described in any one of Technical Proposals 1 to 3.

[0085] (Technical proposal 5) The first fixed electrode further includes a third region, The first opposing fixed electrode further includes a third opposing region, The third region is provided between the second annular portion and the first annular portion, At least a portion of the third opposing region is provided between the second annular portion and the third region, The first opposing region is located between the second opposing region and the third opposing region. The width of the first region differs from the width of the third region in the radial direction, The sensor according to Technical Proposal 1, wherein the width of the first opposing region is different from the width of the third opposing region in the radial direction.

[0086] (Technical proposal 6) The width of the first region is wider than the width of the second region. The width of the first opposing region is narrower than the width of the second opposing region. The width of the first region is wider than the width of the third region. The sensor according to Technical Proposal 5, wherein the width of the first opposing region is narrower than the width of the third opposing region.

[0087] (Technical proposal 7) In the circumferential direction centered on the first center, at least a portion of the first region is provided between the second region and the third region, The sensor according to technical proposal 5 or 6, wherein at least a portion of the first opposing region is provided between the second opposing region and the third opposing region in the circumferential direction.

[0088] (Technical proposal 8) The sensor according to Technical Proposal 5 or 6, wherein the length of the second opposing region of the second opposing region in the circumferential direction centered on the first center is 0.8 times or more and 1.2 times or less the length of the third opposing region of the third opposing region in the circumferential direction.

[0089] (Technical proposal 9) The sensor according to Technical Proposal 8, wherein the length of the first region in the circumferential direction is 0.1 times or more and 10 times or less the length of the second opposing region.

[0090] (Technical proposal 10) The first ratio of the first absolute value of the difference between the first region width and the second region width to the first region width is 0.9 or more and 30 or less. The second ratio of the second absolute value of the difference between the first opposing region width and the second opposing region width to the first opposing region width is 0. 9 and above Top 3 0 or more The sensor described in Technical Proposal 1 is shown below.

[0091] (Technical proposal 11) The movable part includes a plurality of first connecting parts extending along the radial direction, The plurality of first connecting parts connect the first annular part and the second annular part, The first fixed electrode and the first opposing fixed electrode are provided between one of the plurality of first connection parts and another of the plurality of first connection parts. The sensor according to any one of the technical proposals 1 to 10, wherein one of the plurality of first connection parts is adjacent to one of the plurality of first connection parts.

[0092] (Technical proposal 12) The second fixed electrode and The second opposing fixed electrode, Furthermore, The movable part further includes a third annular part, The second annular portion is provided between the third annular portion and the first annular portion. The second fixed electrode includes a fourth region and a fifth region, The second opposing fixed electrode includes a fourth opposing region and a fifth opposing region. The fourth region is provided between the third annular portion and the second annular portion, The fourth opposing region is provided between the third annular portion and the fourth region, The fifth region is provided between the third annular portion and the second annular portion, The fifth opposing region is provided between the third annular portion and the fifth region, The fourth region width in the radial direction is different from the fifth region width in the radial direction. The sensor according to Technical Proposal 1, wherein the width of the fourth opposing region in the radial direction is different from the width of the fifth opposing region in the radial direction.

[0093] (Technical proposal 13) The width of the first region is wider than the width of the second region. The width of the first opposing region is narrower than the width of the second opposing region. The width of the fourth region is narrower than the width of the fifth region. The sensor according to technical proposal 12, wherein the width of the fourth opposing region is wider than the width of the fifth opposing region.

[0094] (Technical proposal 14) The second fixed electrode further includes a sixth region, The second opposing fixed electrode further includes a sixth opposing region, The sixth region is provided between the third annular portion and the second annular portion, At least a portion of the sixth opposing region is provided between the third annular portion and the sixth region, At least a portion of the fourth region lies between the fifth region and the sixth region, The width of the fourth region differs from the width of the sixth region in the radial direction, The sensor according to technical proposal 12, wherein the width of the fourth opposing region is different from the width of the sixth opposing region in the radial direction.

[0095] (Technical proposal 15) The width of the first region is wider than the width of the second region. The width of the first opposing region is narrower than the width of the second opposing region. The width of the fourth region is narrower than the width of the fifth region. The width of the fourth opposing region is wider than the width of the fifth opposing region. The width of the fourth region is narrower than the width of the fifth region. The width of the fourth opposing region is wider than the width of the fifth opposing region. The width of the fourth region is narrower than the width of the sixth region. The sensor according to technical proposal 14, wherein the width of the fourth opposing region is wider than the width of the sixth opposing region.

[0096] (Technical proposal 16) The fifth region is provided between the fifth opposing region and the second region, The second opposing region is the sensor described in technical proposal 15, provided between the fifth region and the second region.

[0097] (Technical proposal 17) A substrate including the first face, The fixing part fixed to the first surface, The movable part is supported by the fixed part, First fixed electrode and First opposing fixed electrode and Equipped with, A first gap is provided between the first surface and the movable part. The fixing portion includes a first center in a first plane parallel to the first surface, The movable part includes a plurality of annular parts and a plurality of connecting parts, The plurality of annular portions are provided around the fixing portion with the first center as the center, The plurality of annular portions include a first annular portion, a second annular portion between the fixing portion and the first annular portion, and a third annular portion between the fixing portion and the second annular portion. The plurality of connection parts include a first connection part, a second connection part, and a third connection part. The first connecting portion is provided between the second annular portion and the first annular portion, and connects the second annular portion and the first annular portion. The first connection portion is aligned with the first radial direction passing through the first center and along the first plane, The second connecting portion is provided between the third annular portion and the second annular portion, and connects the third annular portion and the second annular portion. The second connecting portion is aligned with the second radial direction passing through the first center and along the first plane, The third connecting portion is provided between the second annular portion and the first annular portion, and connects the second annular portion and the first annular portion. The third connection portion is aligned with the third radial direction passing through the first center and along the first plane, The second radial direction intersects with the first radial direction, The third radial direction intersects with the first radial direction and the second radial direction, The first angle between the second radial direction and the first radial direction is smaller than the second angle between the third radial direction and the first radial direction. The first fixed electrode includes a first region and a second region, The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion, The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, The first annular portion includes a first intersection point that intersects with the second radial direction, The second annular portion includes a second intersection point that intersects with the second radial direction, A sensor having a first radiating gap between the first intersection point and the second intersection point, between the first region and the second region, and between the first opposing region and the second opposing region.

[0098] (Technical proposal 18) A substrate including the first face, The fixing part fixed to the first surface, The movable part is supported by the fixed part, First fixed electrode and First opposing fixed electrode and Equipped with, A first gap is provided between the first surface and the movable part. The fixing portion includes a first center in a first plane parallel to the first surface, The movable part includes a plurality of annular parts and a plurality of connecting parts, The plurality of annular portions are provided around the fixing portion with the first center as the center, The plurality of annular portions include a first annular portion, a second annular portion between the fixing portion and the first annular portion, and a third annular portion between the fixing portion and the second annular portion. The plurality of connection parts include a first connection part and a second connection part, The first connecting portion and the second connecting portion are provided between the third annular portion and the first annular portion, and connect the third annular portion, the second annular portion and the first annular portion. The first connection portion is aligned with the first radial direction passing through the first center and along the first plane, The second connecting portion is aligned with the second radial direction passing through the first center and along the first plane, The second radial direction intersects with the first radial direction, The first fixed electrode includes a first region and a second region, The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion, The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, The second connection portion is a sensor that passes between the first region and the second region, and between the first opposing region and the second opposing region.

[0099] (Technical proposal 19) A sensor described in any one of Technical Proposals 1 to 18, The detection target member to which the sensor is fixed, A sensor system equipped with [unspecified features].

[0100] (Technical proposal 20) A sensor described in any one of Technical Proposals 1 to 18, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [the necessary components].

[0101] According to the embodiment, sensors, sensor systems, and electronic devices capable of improving characteristics can be provided.

[0102] In this specification, "perpendicular" and "parallel" do not mean strictly perpendicular and strictly parallel, but also include variations in the manufacturing process, for example, and it is sufficient if they are substantially perpendicular and substantially parallel.

[0103] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the sensor, such as the components, substrate, sensor part, housing, sensor element, base body, fixed part, movable part, and control unit, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known range to implement the present invention in the same way and obtain the same effects.

[0104] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0105] Furthermore, all sensors, sensor systems, and electronic devices that a person skilled in the art can design and implement based on the above-described embodiments of the present invention, insofar as they encompass the gist of the present invention, also fall within the scope of the present invention.

[0106] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0107] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0108] 10: Annular section, 10C: First center, 10F: Fixed section, 10M: Movable section, 11-15: First-fifth annular sections, 20: Connection section, 21-23: First-third connection section, 28p, 28q: First and second radiating structures, 30: Fixed electrode, 31A, 32A: First and second fixed electrodes, 31B, 32B: First and second opposing fixed electrodes, 41, 42: First and second structures, 48: Inner structure, 48a, 48b: First and second inner structures, 50a: First surface, 50s: Base, 55: Insulating member, 70: Control unit, 81: Detectable object, 110-112, 120: Sensor, 170: Circuit control unit, 180: Circuit, 185: Drive unit, 210: Sensor system, 310: Electronic device, 400: Road, 410: Slope surface, 420: Transmitter / receiver unit, 430: Sensor, 440: Bridge pier, 450: Main girder, 460: Bridge, 470: River, Dc: Circumferential direction, Dr: Radial direction, Dr1~Dr3: 1st~3rd radial direction, G1: 1st gap, Lr1: 1st region length, Ls2, Ls3: 2nd, 3rd opposing region length, PL1: 1st plane, S1: Signal, g1: 1st radial gap, p1, p2: 1st, 2nd intersection position, r1~r6: 1st~6th region, s1~s6: 1st~6th opposing region, wr1~wr6: 1st~6th region width, ws1~ws6: 1st~6th opposing region width

Claims

1. A substrate including the first surface, The fixing part fixed to the first surface, The movable part is supported by the fixed part, First fixed electrode and First opposing fixed electrode and Equipped with, A first gap is provided between the first surface and the movable part. The fixing portion includes a first center in a first plane parallel to the first surface, The movable part includes a first annular portion and a second annular portion, The first fixed electrode includes a first region and a second region, The first opposing fixed electrode includes a first opposing region and a second opposing region. The first region is provided between the second annular portion and the first annular portion, The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion, The second opposing region is provided between the second annular portion and the second region, The first region width of the first region in the radial direction parallel to the first plane and passing through the first center is different from the second region width of the second region in the radial direction. A sensor in which the width of the first opposing region in the radial direction is different from the width of the second opposing region in the radial direction.

2. The first condition and the second condition are both met. In the first condition described above, the width of the first region is wider than the width of the second region, and the width of the first opposing region is narrower than the width of the second opposing region. The sensor according to claim 1, wherein, in the second condition, the width of the first region is narrower than the width of the second region, and the width of the first opposing region is wider than the width of the second opposing region.

3. The first fixed electrode further includes a third region, The first opposing fixed electrode further includes a third opposing region, The third region is provided between the second annular portion and the first annular portion, At least a portion of the third opposing region is provided between the second annular portion and the third region, The first opposing region is located between the second opposing region and the third opposing region. The width of the first region differs from the width of the third region in the radial direction. The sensor according to claim 1, wherein the width of the first opposing region is different from the width of the third opposing region in the radial direction.

4. The width of the first region is wider than the width of the second region. The width of the first opposing region is narrower than the width of the second opposing region. The width of the first region is wider than the width of the third region. The sensor according to claim 3, wherein the width of the first opposing region is narrower than the width of the third opposing region.

5. In the circumferential direction centered on the first center, at least a portion of the first region is provided between the second region and the third region, The sensor according to claim 3 or 4, wherein in the circumferential direction, at least a portion of the first opposing region is provided between the second opposing region and the third opposing region.

6. The second fixed electrode and The second opposing fixed electrode, Furthermore, The movable part further includes a third annular part, The second annular portion is provided between the third annular portion and the first annular portion. The second fixed electrode includes a fourth region and a fifth region, The second opposing fixed electrode includes a fourth opposing region and a fifth opposing region. The fourth region is provided between the third annular portion and the second annular portion, The fourth opposing region is provided between the third annular portion and the fourth region, The fifth region is provided between the third annular portion and the second annular portion, The fifth opposing region is provided between the third annular portion and the fifth region, The width of the fourth region in the radial direction is different from the width of the fifth region in the radial direction. The sensor according to claim 1, wherein the width of the fourth opposing region in the radial direction is different from the width of the fifth opposing region in the radial direction.

7. The second fixed electrode further includes a sixth region, The second opposing fixed electrode further includes a sixth opposing region, The sixth region is provided between the third annular portion and the second annular portion, At least a portion of the sixth opposing region is provided between the third annular portion and the sixth region, At least a portion of the fourth region lies between the fifth region and the sixth region, The width of the fourth region differs from the width of the sixth region in the radial direction, The sensor according to claim 6, wherein the width of the fourth opposing region is different from the width of the sixth opposing region in the radial direction.

8. The width of the first region is wider than the width of the second region. The width of the first opposing region is narrower than the width of the second opposing region. The width of the fourth region is narrower than the width of the fifth region. The width of the fourth opposing region is wider than the width of the fifth opposing region. The width of the fourth region is narrower than the width of the fifth region. The width of the fourth opposing region is wider than the width of the fifth opposing region. The width of the fourth region is narrower than the width of the sixth region. The sensor according to claim 7, wherein the width of the fourth opposing region is wider than the width of the sixth opposing region.

9. The sensor according to claim 1, The detection target member to which the sensor is fixed, A sensor system equipped with [unspecified features].

10. The sensor according to claim 1, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [the necessary components].

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