Hollow core fiber optic-based radiation source
JP7844496B2Active Publication Date: 2026-04-13ASML NETHERLANDS BV
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- ASML NETHERLANDS BV
- Filing Date
- 2022-02-17
- Publication Date
- 2026-04-13
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Abstract
1. A radiation source comprising a hollow core optical fiber including a body having a hollow core for confining a working medium, the hollow core optical fiber operable to receive pulsed pump radiation whereby said received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process to modify a spectrum of the pulsed pump radiation to form an output radiation, and the broadband light source device further comprises at least one dispersion control mechanism operable to modify dispersion characteristics in a first portion of the optical fiber to spectrally shift dispersive waves generated in the soliton self-compression process.
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