Hollow core fiber optic-based radiation source

JP7844496B2Active Publication Date: 2026-04-13ASML NETHERLANDS BV
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
ASML NETHERLANDS BV
Filing Date
2022-02-17
Publication Date
2026-04-13

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Abstract

1. A radiation source comprising a hollow core optical fiber including a body having a hollow core for confining a working medium, the hollow core optical fiber operable to receive pulsed pump radiation whereby said received pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber, wherein source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process to modify a spectrum of the pulsed pump radiation to form an output radiation, and the broadband light source device further comprises at least one dispersion control mechanism operable to modify dispersion characteristics in a first portion of the optical fiber to spectrally shift dispersive waves generated in the soliton self-compression process.
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Citation Information

Patent Citations

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