A laser stand for a photolithography machine

Abstract

This utility model provides a laser frame for a lithography machine, including a lower support and an upper support. The top end of the lower support and the bottom end of the upper support are fixedly connected to a connecting plate by bolts. The connecting plate consists of two L-shaped pieces. One side panel of each connecting plate has two parallel elliptical holes. Four spaced-apart upper fixing plates are vertically welded to the upper support, and two spaced-apart lower fixing plates are vertically welded to the lower support. A top fixing plate is vertically welded to the top of the upper support, and a bottom fixing plate is vertically welded to the bottom of the lower support. Eight reinforcing ribs are welded at the connection points between the lower and bottom fixing plates, and between the upper and top fixing plates. This utility model, through the design of the L-shaped connecting plate and the reinforcing ribs, achieves a more robust structure and better vibration damping.

Description

Technical Field

[0001] This utility model relates to the field of integrated circuit process equipment technology, specifically a laser frame for a lithography machine. Background Technology

[0002] The semiconductor industry is developing rapidly, and the precision requirements for semiconductor manufacturing equipment are becoming increasingly stringent. This is especially true for lithography machines, which directly determine the level of semiconductor manufacturing processes. To ensure the normal operation of a lithography machine, its supporting equipment is extremely important, particularly the laser tube used to transmit the laser beam. Typically, the laser tube in a lithography machine can reach a height of five meters, spanning an entire floor, and is usually composed of multiple segments. Given the height of the laser tube itself and the micro-vibrations of the lithography machine during operation, these vibrations are transmitted to the laser tube, and the vibrations are amplified as the height of the laser tube increases. When the vibration amplitude of the laser tube reaches a certain level, the deformation of the laser tube itself directly affects the transmission of the laser beam inside. This is because the laser beam is refracted at the deformed tube wall due to the horizontal deformation of the laser tube, thus damaging the laser beam and further impacting the normal operation of the lithography machine. This indirectly leads to poor product quality, or even the complete scrapping of products. Existing laser frames use ordinary connecting plates, which have problems such as insufficient support structure and poor vibration control of the laser tube. Utility Model Content

[0003] The purpose of this utility model is to provide a laser holder for a lithography machine to solve the problems existing in the background art.

[0004] The technical solution of this utility model is implemented as follows:

[0005] A laser frame for a lithography machine includes a lower support and an upper support. The top end of the lower support and the bottom end of the upper support are fixedly connected to a connecting plate by bolts. The connecting plate consists of two L-shaped pieces. One side panel of the connecting plate has two parallel elliptical holes. Four spaced upper fixing plates are vertically welded to the upper support. Two spaced lower fixing plates are vertically welded to the lower support. A top fixing plate is vertically welded to the top of the upper support. A bottom fixing plate is vertically welded to the bottom of the lower support. Elliptical holes are present at the top and bottom ends of both the upper and lower fixing plates. Eight reinforcing ribs are welded at the connection between the lower support and the bottom fixing plate, and at the connection between the upper support and the top fixing plate. Mounting holes are provided at the four corners and the middle of the edges of both the top and bottom fixing plates.

[0006] Furthermore, both the lower and upper supports are made of square steel tubing.

[0007] Furthermore, there are four bolts arranged in a rectangular pattern on the elliptical hole of the connecting plate.

[0008] Furthermore, the reinforcing ribs are welded in a well-shaped arrangement at the top corners of the four sides of the lower and upper supports.

[0009] Furthermore, the reinforcing rib is triangular in shape with its apex removed.

[0010] The beneficial effects of this utility model are as follows:

[0011] The upper and lower supports of this utility model are bolted together by L-shaped connecting plates. The two L-shaped connecting plates form a rectangular shape, which fits snugly against the four sides of the upper and lower supports for a more stable connection. Eight reinforcing ribs are provided at the connection points between the upper and lower supports and the top and lower fixing plates for a more stable connection. The design of the L-shaped connecting plates and reinforcing ribs makes the structure more robust and the vibration damping effect better. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model.

[0013] Figure 2 This is a cross-sectional view of part AA of this utility model.

[0014] Figure 3 This is a cross-sectional view of the BB section of this utility model.

[0015] In the diagram, 1-lower bracket, 2-upper bracket, 3-connecting plate, 4-upper fixing plate, 5-lower fixing plate, 6-top fixing plate, 7-bottom fixing plate, 8-elliptical hole one, 9-elliptical hole two, 10-bolt, 11-reinforcing rib, 12-mounting hole. Detailed Implementation

[0016] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0017] like Figure 1-3As shown, a laser frame for a lithography machine includes a lower support 1 and an upper support 2. The top end of the lower support 1 and the bottom end of the upper support 2 are fixedly connected to a connecting plate 3 by bolts 10. The connecting plate 3 consists of two L-shaped pieces. One side panel of the connecting plate 3 has two parallel elliptical holes 8. Four spaced upper fixing plates 4 are vertically welded to the upper support 2. Two spaced lower fixing plates 5 are vertically welded to the lower support 1. A top fixing plate 6 is vertically welded to the top of the upper support 2. A bottom fixing plate 7 is vertically welded to the bottom of the lower support 1. Elliptical holes 9 are present at the top and bottom ends of both the upper fixing plate 4 and the lower fixing plate 5. Eight reinforcing ribs 11 are welded at the connection between the lower support 1 and the bottom fixing plate 7, and at the connection between the upper support 2 and the top fixing plate 6. Mounting holes 12 are provided at the four corners and the middle of the edges of the top fixing plate 6 and the bottom fixing plate 7.

[0018] Both the lower support 1 and the upper support 2 are made of square steel pipes.

[0019] There are four bolts 10, which are arranged in a rectangular shape on the elliptical hole 8 of the connecting plate 3.

[0020] The reinforcing ribs 11 are welded to the top corners of the four sides of the lower support 1 and the upper support 2 in a well-shaped arrangement.

[0021] The reinforcing rib 11 is in the shape of a triangle with its top corner removed.

[0022] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A laser holder for a lithography machine, comprising a lower support and an upper support, characterized in that, The top of the lower support and the bottom of the upper support are fixedly connected to the connecting plate by bolts. There are two connecting plates, which are L-shaped. One side of the connecting plate has two parallel elliptical holes. Four spaced upper fixing plates are vertically welded to the upper support. Two spaced lower fixing plates are vertically welded to the lower support. A top fixing plate is vertically welded to the top of the upper support. A bottom fixing plate is vertically welded to the bottom of the lower support. Elliptical holes are present at the top and bottom of both the upper and lower fixing plates. Eight reinforcing ribs are welded at the connection between the lower support and the bottom fixing plate, and at the connection between the upper support and the top fixing plate. Mounting holes are provided at the four corners and the middle of the edges of both the top and bottom fixing plates.

2. A laser holder for a lithography machine according to claim 1, characterized in that, Both the lower and upper supports are made of square steel pipes.

3. A laser holder for a lithography machine according to claim 1, characterized in that, There are four bolts, arranged in a rectangular pattern on the elliptical hole one of the connecting plate.

4. A laser holder for a lithography machine according to claim 1, characterized in that, The reinforcing ribs are welded in a well-shaped arrangement at the top corners of the four sides of the lower and upper supports.

5. A laser holder for a lithography machine according to claim 1, characterized in that, The reinforcing rib is triangular in shape with the top corner removed.

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