Irradiation unit, lamp unit, lamp holder

Abstract

To provide an irradiation unit and a lamp unit which facilitate lamp replacement work and reduce the risk of lamp breakage.SOLUTION: An irradiation unit includes: a lamp unit equipped with an excimer lamp having an arc tube extending in a first direction and a first electrode and a second electrode provided so as to face each other in the radial direction of the arc tube; and a housing in which the excimer lamp is accommodated by inserting the lamp unit. The lamp unit includes: a plate member; a regulating member formed so as to protrude from a first main surface and regulating the movement of the excimer lamp in the housing; and a power supply portion provided on a second main surface side of the plate member located outside the housing and supplying power to the excimer lamp in a state in which the plate member closes an insertion opening.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to an irradiation unit, a lamp unit mounted on the irradiation unit, and a lamp holder mounted on the irradiation unit.

Background Art

[0002] Conventionally, techniques for dry cleaning by irradiating a semiconductor wafer, a display panel, or the like with ultraviolet light, and techniques for curing ink by irradiating printed matter have been known. And, an ultraviolet light irradiation device that irradiates ultraviolet light to a semiconductor wafer arranged at a predetermined position, an ultraviolet light irradiation device that irradiates ultraviolet light to a printed matter sequentially conveyed, and the like are known. For example, Patent Document 1 below describes an ultraviolet light irradiation device used for ink drying related to printing, fine exposure related to semiconductors, adhesive curing related to liquid crystals, and the like.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In recent years, an ultraviolet light irradiation device may be equipped with an elongated ultraviolet lamp having a total length exceeding 1 m so as to be able to irradiate ultraviolet light to a large workpiece (for example, a display panel or the like).

[0005] However, long ultraviolet lamps are very heavy and difficult to handle, making them difficult to carry in narrow passageways or replace in confined spaces. As a result, when workers perform maintenance on ultraviolet irradiation equipment, they sometimes hit the walls of the equipment with the ultraviolet lamp, or in some cases, drop it on the floor. These problems were particularly likely to occur when it was necessary to work inside the ultraviolet irradiation equipment or when the equipment was located in a corner of the workspace with insufficient workspace.

[0006] Therefore, Patent Document 1 proposes an ultraviolet light irradiation device that facilitates the replacement of ultraviolet lamps by using a component called a carrier to pull the ultraviolet lamp out of the lamp housing, allowing the ultraviolet lamp to be replaced outside the lamp housing.

[0007] However, the ultraviolet light irradiation device described in Patent Document 1 requires, in addition to the process of inserting and removing the ultraviolet lamp using a carrier, a process of removing the old ultraviolet lamp to be replaced from the hook and a process of engaging the new ultraviolet lamp with the hook and securing it with a retaining material. As a result, with this configuration of ultraviolet light irradiation device, when replacing the ultraviolet lamp, the ultraviolet lamp may come into contact with the inner wall surface of the lamp housing or the hook, causing damage to the ultraviolet lamp.

[0008] In view of the above problems, the present invention aims to provide an irradiation unit and a lamp unit that facilitate lamp replacement work and reduce the risk of damaging the lamp. [Means for solving the problem]

[0009] The irradiation unit of the present invention is A long excimer lamp extending in the first direction, A lamp holder on which the excimer lamp is mounted, A housing having an insertion opening into which the lamp holder is inserted, A light extraction unit is provided in the housing and extracts ultraviolet light emitted from the excimer lamp mounted on the lamp holder to the outside of the housing, A plate material provided in the lamp holder and closing the insertion opening, With the plate material in a state where it closes the insertion opening, a restricting member is formed to protrude from the first main surface of the main surface of the plate material that is located inside the housing, thereby restricting the movement of the excimer lamp within the housing, The present invention is characterized by comprising a power supply unit provided on the second main surface side of the plate material located outside the housing, which supplies power to the excimer lamp, while the plate material is in a state that it is blocking the insertion opening.

[0010] An excimer lamp is a dielectric barrier discharge lamp that has a discharge tube containing a light-emitting gas inside, and emits light of a wavelength corresponding to the discharge gas when a voltage is applied between electrodes. Excimer lamps can take various shapes, such as single-tube or double-tube shapes with a cylindrical discharge tube, or flattened tube shapes where the cross-section when cut by a plane perpendicular to the tube axis is rectangular. The excimer lamp mounted in the irradiation unit of the present invention may have any of these shapes.

[0011] In this specification, "electrically connected" means either a direct connection or an indirect connection via a metal plate, lead wire, resistor, transformer, or other circuit component, thereby creating a state in which current can flow between the respective components.

[0012] When the lamp unit is inserted into the housing, it is difficult to remove it from the housing if there is no part on the board or other material that a person can grip with their fingers. Therefore, with the above configuration, a worker or robot can remove the excimer lamp from the irradiation unit by pulling the lamp unit out of the housing. Furthermore, the replacement of the excimer lamp mounted on the lamp unit can be performed by moving the lamp unit to a space where the work can be easily performed.

[0013] Then, after the excimer lamp has been replaced, the lamp unit is inserted through the opening in the housing, and the power supply unit, located on the second main surface side of the plate material, i.e., on the outside of the housing, is connected to the power supply unit, thereby completing the installation process on the irradiation unit.

[0014] Furthermore, the excimer lamp is supported at both ends by a pair of regulating members provided on the plate material. As a result, compared to working with the excimer lamp by holding one end, the center of gravity of the discharge tube is closer to the worker, improving operability.

[0015] Therefore, the irradiation unit with the above configuration provides ample space for excimer lamp replacement work, and since there is no need to frequently move or adjust the position of the excimer lamp within the housing, the risk of damaging the excimer lamp during maintenance work is reduced.

[0016] In the above irradiation unit, The excimer lamp may also include a discharge tube having a pair of flat outer wall surfaces facing each other, and a first electrode and a second electrode formed on the pair of outer wall surfaces of the discharge tube so as to face each other via the discharge tube.

[0017] For dry cleaning of semiconductor wafers and display panels, ultraviolet light with wavelengths of 100 nm to 200 nm is often used because it is highly effective in breaking down oil and other contaminants. However, ultraviolet light in this wavelength range is easily absorbed by oxygen in the air, and can only propagate through air over distances of a few millimeters to a few centimeters. Therefore, it is preferable that the excimer lamp mounted on the irradiation unit be positioned as close as possible to the object to be irradiated (hereinafter referred to as "workpiece").

[0018] In the excimer lamp having the above structure, ultraviolet light is emitted from the flat surface of the arc tube. Therefore, by adopting the above structure, the irradiation unit can dispose the excimer lamp in proximity over a wide range to a semiconductor wafer or a display panel which is a plate-like workpiece. That is, the irradiation unit having the above structure can suppress uneven irradiation of ultraviolet light on the plate-like workpiece as described above.

[0019] In the above irradiation unit, the regulating member includes a base member protruding from the first main surface of the plate material in the second direction which is the normal direction of the first main surface, a first support column protruding from the base member in a third direction orthogonal to the first direction and the second direction, a second support column protruding from the base member in the same direction as the first support column at a position farther from the plate material than the first support column, and first clamping members and second clamping members for clamping an end portion of the excimer lamp between the first support column and the second support column. The second clamping member may be fixed so as to connect the first support column and the second support column.

[0020] Furthermore, the above irradiation unit includes a current-carrying member formed of a metal material, which is sandwiched between the first clamping member and the excimer lamp and contacts one of a pair of electrodes provided in the excimer lamp, and a lead wire wired inside a groove or a through hole formed in the base member for electrically connecting the second support column and a second electrode different from the first electrode of the excimer lamp. The first clamping member is formed of a ceramic material, and at least a part of the second clamping member and the second support column is formed of a metal material. When the first clamping member and the second clamping member are fixed in a state of clamping the excimer lamp, one of the power supply parts, the first power supply part, and the first electrode may be electrically connected via the energizing member, and the second power supply part different from the first power supply part of the power supply part and the second electrode may be electrically connected via the second clamping member, the second column, and the lead wire.

[0021] With the above configuration, the lamp unit clamps the excimer lamp with the first clamping member and the second clamping member, and by simply fixing the second clamping member to each column, the connection between the electrode and the power supply part is completed. Therefore, wiring work when mounting the excimer lamp on the lamp unit becomes unnecessary.

[0022] Also, according to the above configuration, the lead wire connecting the second column and the second power supply part is protected by a ceramic material that hardly conducts electricity, so the occurrence of leakage current and short circuit during operation is suppressed.

[0023] In the above irradiation unit, The plate material may include a handle portion protruding from the second main surface.

[0024] According to the above configuration, compared with a lamp unit not provided with a handle portion, it becomes easier for an operator or a robot to pull out the lamp unit from the housing.

[0025] In the above irradiation unit, The housing may be provided with a guide insertion portion extending in a second direction that is the normal direction of the first main surface, and a guide member provided on the plate material and extending in the second direction that restricts the movement of the lamp holder by being inserted into the guide insertion portion.

[0026] With the above configuration, the guide member and guide insertion part guide the lamp unit so that it is inserted in a second direction at a predetermined position in the housing. This reduces the risk of the lamp unit shifting in a direction other than the second direction, or of accidentally colliding the housing with the excimer lamp. In other words, the risk of damaging the excimer lamp's discharge tube is further reduced.

[0027] In the above irradiation unit, The housing may be configured such that the light extraction section is covered with a material that transmits ultraviolet light emitted from the excimer lamp, and the lamp holder is inserted and the insertion opening is closed by the plate material, thereby sealing the space inside the housing.

[0028] With the above configuration, the irradiation unit can fill the inside of its housing with an inert gas during operation, thereby suppressing the absorption of ultraviolet light emitted from the excimer lamp by oxygen inside the housing. As a result, the irradiation unit with the above configuration can irradiate the workpiece with ultraviolet light more efficiently.

[0029] The lamp unit of the present invention is The irradiation unit includes the excimer lamp and the lamp holder, which are applied to the above irradiation unit.

[0030] Furthermore, the lamp holder of the present invention is This is the lamp holder included in the above-mentioned irradiation unit. [Effects of the Invention]

[0031] According to the present invention, an irradiation unit and lamp unit are realized in which lamp replacement work is facilitated and the risk of damaging the lamp is reduced. [Brief explanation of the drawing]

[0032] [Figure 1] This is a schematic perspective view showing one embodiment of an ultraviolet light irradiation device. [Figure 2]This is a perspective view showing the configuration of the irradiation unit. [Figure 3] This is a perspective view showing the lamp unit being inserted into the housing. [Figure 4] This is a perspective view showing the configuration of the enclosure. [Figure 5] This is a perspective view showing the configuration of the lamp unit. [Figure 6A] This is a diagram showing the excimer lamp as viewed in the Y direction. [Figure 6B] This is a cross-sectional view of an excimer lamp cut along the YZ plane. [Figure 7] This is a perspective view showing the lamp unit with the excimer lamp and regulating element removed. [Figure 8] This is a diagram showing the lamp unit viewed from the X direction. [Figure 9] This is a diagram showing the regulatory component in a disassembled state. [Figure 10A] This is a diagram of the area surrounding the base member shown in Figure 9. [Figure 10B] This is a diagram of the area surrounding the base member shown in Figure 9. [Figure 11] This is a schematic perspective view showing a lamp unit included in another embodiment of the irradiation unit. [Figure 12] This is a schematic perspective view showing a lamp unit included in another embodiment of the irradiation unit. [Modes for carrying out the invention]

[0033] The irradiation unit, lamp unit, and lamp holder of the present invention will be described below with reference to the drawings. Note that the following drawings are schematic illustrations, and the dimensional ratios and numbers shown in the drawings do not necessarily correspond to the actual dimensional ratios and numbers.

[0034] Figure 1 is a schematic perspective view showing one embodiment of the ultraviolet light irradiation device 1. As shown in Figure 1, the ultraviolet light irradiation device 1 comprises a transport path 2 through which a workpiece W1, which is the target of ultraviolet light irradiation, is transported, and an irradiation unit 10 that irradiates ultraviolet light onto the irradiation surface W1a, which is one of the main surfaces of the workpiece W1 being transported within the transport path 2.

[0035] In Figure 1, for illustrative purposes, a plate-shaped workpiece W1 with a rectangular main surface is shown. However, the workpiece W1 to which the ultraviolet light irradiation device 1 irradiates ultraviolet light is not limited to this shape. Specifically, the ultraviolet light irradiation device 1 may be configured to irradiate ultraviolet light onto semiconductor wafers, sequentially transported film materials, printed materials, etc.

[0036] Figure 2 is a perspective view showing the configuration of the illumination unit 10, and Figure 3 is a perspective view showing the lamp unit 30 being inserted into the housing 20 to form the illumination unit 10. Figure 4 is a perspective view showing the configuration of the housing 20, and Figure 5 is a perspective view showing the configuration of the lamp unit 30. Note that in Figure 4, the light extraction section 23, which will be described later, is not hatched in order to make it easier to see the internal structure of the housing 20.

[0037] As shown in Figures 2 and 3, the irradiation unit 10 comprises a housing 20 and a lamp unit 30, and as shown in Figure 3, the lamp unit 30 is inserted into the housing 20.

[0038] In the following explanation, as shown in Figure 2, the direction in which ultraviolet light L1 is emitted from the irradiation unit 10 is referred to as the Z direction, as shown in Figure 3, the direction in which the lamp unit 30 is inserted into the housing 20 is referred to as the Y direction, and the direction perpendicular to the Y and Z directions is referred to as the X direction. The X direction corresponds to the "first direction," the Y direction to the "second direction," and the Z direction to the "third direction."

[0039] Furthermore, when expressing direction, if positive and negative directions need to be distinguished, they are written with positive or negative signs, such as "+Z direction" or "-Z direction." When expressing direction without distinguishing between positive and negative directions, it is simply written as "Z direction."

[0040] As shown in Figure 4, the housing 20 includes an insertion opening 21, a guide insertion section 22, and a light extraction section 23. In this embodiment, the light extraction section 23 is an emission window covered with quartz glass.

[0041] Furthermore, the light extraction section 23 may be an emission window covered with a material that transmits vacuum ultraviolet light, such as magnesium fluoride, in addition to quartz glass. Also, if it is desired to bring the excimer lamp 31 mounted on the lamp unit 30 and the workpiece W1 closer together than sealing the inside of the housing 20 and filling it with inert gas, the light extraction section 23 may be a simple opening that is not covered with quartz glass or the like.

[0042] As shown in Figure 5, the lamp unit 30 comprises an excimer lamp 31, a plate material 32, a pair of regulating members (33, 33), a first power supply section 34a, a second power supply section 34b, a guide member 35, and a handle section 36. The configuration of the lamp unit 30 without the excimer lamp 31 corresponds to the lamp holder 30a.

[0043] In this embodiment, the excimer lamp 31 is supported at both ends (31e, 31e) by a pair of restricting members (33, 33) that are provided to protrude in the +Y direction from the first main surface 32a of the plate material 32, and is configured so that the direction in which the discharge tube 31c extends is along the X direction.

[0044] Figure 6A is a view of the excimer lamp 31 in the Y direction, and Figure 6B is a cross-sectional view of the excimer lamp 31 when cut in the YZ plane. As shown in Figure 6B, the excimer lamp 31 has a rectangular cross-sectional shape when cut in the YZ plane, and a pair of electrodes (31b, 31c) facing each other in the Z direction (radial direction) are formed on the flat outer wall surface 31p of the discharge tubes 31c via the discharge tubes 31c. In this embodiment, the electrode on the -Z side corresponds to the first electrode 31a, and the electrode on the +Z side corresponds to the second electrode 31b.

[0045] In this embodiment, the excimer lamp 31 has a light-emitting gas G1 containing Xe sealed inside a light-emitting tube 31c with a length of 0.4 m in the X direction, and emits ultraviolet light with a main emission wavelength of 172 nm by applying a voltage between the first electrode 31a and the second electrode 31b. Here, "main emission wavelength" refers to the wavelength that shows a peak in the intensity spectrum.

[0046] The lamp unit 30 in this embodiment may be equipped with an excimer lamp of a different shape from the excimer lamp 31 shown in Figures 6A and 6B. For example, it may be equipped with an excimer lamp of a single-tube shape or a double-tube shape as described above.

[0047] Furthermore, the light-emitting gas G1 sealed in the discharge tube 31c may be a gas that does not contain Xe, and can be arbitrarily selected depending on the application. In the irradiation unit 10, the ultraviolet light emitted by the excimer lamp 31 preferably has a wavelength of 150 nm to 200 nm, from the viewpoint of being able to decompose dirt such as oil and generating ozone.

[0048] Furthermore, as shown in Figures 6A and 6B, the excimer lamp 31 of this embodiment has a reflective film 31d made of silica (SiO2) formed on the inner wall surface 31q of the discharge tube, which reflects ultraviolet light generated in the discharge tube 31c and traveling toward the -Z side toward the +Z side. If the desired processing can be sufficiently performed with ultraviolet light generated in the discharge tube 31c and traveling directly toward the +Z side, the excimer lamp 31 does not need to have the reflective film 31d formed.

[0049] As shown in Figure 2, when the lamp unit 30 is inserted into the housing 20, the plate material 32 closes the insertion opening 21 of the housing 20 and seals the space inside the housing 20. The housing 20, with its inner space sealed by the plate material 32, is filled with an inert gas (for example, nitrogen gas) during operation. However, as mentioned above, in cases where the light extraction section 23 is left open without being covered with quartz glass or the like, the housing 20 does not need to be sealed by the plate material 32.

[0050] As shown in Figure 5, the first power supply unit 34a and the second power supply unit 34b are positioned to align with the second main surface 32b side (-Y side) of the plate material 32. As shown in Figure 2, when the lamp unit 30 is inserted into the housing 20, the first power supply unit 34a and the second power supply unit 34b are connected to the high-voltage side terminal and the low-voltage side terminal, respectively, of a power supply unit (not shown) mounted on the ultraviolet light irradiation device 1. Note that the first power supply unit 34a and the second power supply unit 34b may be configured to be located on the -Y side of the plate material 32 via lead wires, as shown in Figure 5, or they may be power supply terminals provided to protrude from the second main surface 32b of the plate material 32 toward the -Y side.

[0051] Figure 7 is a perspective view showing the lamp unit 30 with the excimer lamp 31 and regulating member 33 removed, and Figure 8 is a view of the lamp unit 30 from the X side. As shown in Figures 7 and 8, the guide member 35 in this embodiment is a rod-shaped member provided so as to protrude in the +Y direction from the first main surface 32a of the plate material 32, and two of them are provided spaced apart in the X direction. The housing 20 is provided with two guide insertion portions 22 spaced apart in the X direction, as shown in Figure 4.

[0052] With the guide member 35 inserted into the guide insertion portion 22 of the housing 20, the lamp unit 30 is guided to a predetermined insertion position in the housing 20, as shown in Figure 3, and is inserted straight in the Y direction without swinging in the X or Z direction.

[0053] Note that the configuration of the guide insertion section 22 shown in Figure 4 and the configuration of the guide member 35 shown in Figure 7 are merely examples, and the shape and number of guide members 35 and guide insertion section 22 are arbitrary. Also, for example, if the housing 20 is sufficiently large and there is no risk of the excimer lamp 31 and housing 20 coming into contact when inserting the lamp unit 30, the guide member 35 and guide insertion section 22 do not need to be provided.

[0054] As shown in Figure 5, the handle portion 36 is a rod-shaped member with a length of 200 mm that protrudes in the -Y direction from the second main surface 32b of the plate material 32, and is the part that the worker grips with their hand when inserting or removing the lamp unit 30 from the housing 20. To make it easy for a person to grip and not get in the way, the length of the handle portion 36 is more preferably 100 mm to 400 mm.

[0055] Furthermore, the handle portion 36 may be bent or curved to make it easier for a person to grip, and may have a protrusion or recess in part to make it easier for a person's hand or fingers to grip. Also, for example, if a portion for a person to grip is formed in the plate material 32 in order to pull out the lamp unit 30 from the housing 20, the handle portion 36 may not be provided. In addition, the handle portion 36 may be detachable from the housing 20.

[0056] Figure 9 is a diagram showing the regulating member 33 in a disassembled state. In this embodiment, the regulating member 33 comprises a base member 70, a first support column 71a, a second support column 71b, a first clamping member 72a, and a second clamping member 72b, as shown in Figure 9.

[0057] The base member 70 is provided so as to protrude in the +Y direction from the first main surface 32a of the plate material 32, and the first support column 71a is provided so as to protrude in the +Z direction. The base member 70 also includes a second support column 71b, which extends in the +Z direction in part, located on the +Y side of the first support column 71a, that is, further away from the plate material 32.

[0058] The regulating member 33 includes a first clamping member 72a and a second clamping member 72b between the first support column 71a and the second support column 71b, which clamp the discharge tube 31c of the excimer lamp 31. The first clamping member 72a and the second clamping member 72b clamp and support the discharge tube 31c by placing the end of the discharge tube 31c of the excimer lamp 31 on the first clamping member 72a and fixing the second clamping member 72b to the first support column 71a and the second support column 71b with screws.

[0059] In this embodiment, the base member 70, the first support column 71a, and the first clamping member 72a are made of a ceramic material which is an insulating material, while the second support column 71b and the second clamping member 72b are made of a metal material. Specifically, the second support column 71b is made of aluminum, and the second clamping member 72b is made of stainless steel.

[0060] Furthermore, as shown in Figure 9, the first clamping member 72a is equipped with a leaf spring 71c, which is made of beryllium copper, a metallic material, and acts as an electrical conductive member that comes into contact with the first electrode 31a (not shown in Figure 9) when the light-emitting tube 31c is placed on it.

[0061] In this embodiment, the second support column 71b is entirely made of hard anodized aluminum, but it is also acceptable for only a portion of it to be made of a metallic material so that the second electrode 31b and the second power supply unit 34b are electrically connected when the excimer lamp 31 is supported.

[0062] Figure 10A is a view of the area around the base member 70 in Figure 9, and Figure 10B is a view of the area around the base member 70 in Figure 9 from a different angle than in Figure 10A. For the sake of clarity, the first clamping member 72a and the second clamping member 72b are not shown in Figures 10A and 10B. In Figure 10B, the first clamping member 72a is not shown, and only the leaf spring 71c is hypothetically depicted so that the current supply path from the first power supply unit 34a can be understood.

[0063] As shown in Figures 10A and 10B, the base member 70 has a groove 70a formed inside through which the lead wire 80a is routed. The lead wire 80a is routed within the groove 70a of the base member 70 to electrically connect the second support column 71b and the second power supply unit 34b. In the lamp unit 30 of this embodiment, as shown in Figure 10B, a metal plate 80c is connected between the second power supply unit 34b and the lead wire 80a due to the device configuration.

[0064] In other words, the first clamping member 72a and the second clamping member 72b clamp the excimer lamp 31's discharge tube 31c, causing the second support column 71b and the second clamping member 72b to come into contact and be electrically connected. In this embodiment, the base member 70 has a groove 70a for inserting the lead wire 80a, but it may also have a through hole for inserting the lead wire 80a.

[0065] The leaf spring 71c is a component formed by bending a plate made of beryllium copper, a metallic material, and is electrically connected to the first power supply unit 34a via a lead wire 80b, as shown in Figure 10B.

[0066] The above configuration eliminates the need for positional adjustment of the excimer lamp 31 after installation of the lamp unit 30, and the need for complex wiring connections within the housing 20. Furthermore, compared to the case where work is performed while supporting only one end of the discharge tube 31c, the load on the worker and the discharge tube 31c itself during the replacement of the excimer lamp 31 is reduced. Therefore, the replacement of the excimer lamp 31 is made easier, and the risk of damaging the excimer lamp 31 is reduced.

[0067] In this embodiment, the irradiation unit 10 is mounted below the transport path 2 through which the workpiece W1 is transported in the ultraviolet light irradiation device 1, as shown in Figure 1. However, it may also be mounted above the transport path 2 of the workpiece W1. [Alternative Embodiment] The following describes other embodiments.

[0068] <1> Figure 11 is a schematic perspective view showing a lamp unit 30 provided in another embodiment of the irradiation unit 10. As shown in Figure 11, the lamp unit 30 may be configured such that the regulating member 33 has a gripping portion 33a that protrudes in the Y direction from the first main surface 32a of the plate material 32 and grips both ends (31e, 31e) of the discharge tube 31c of the excimer lamp 31. In this configuration, the gripping portion 33a is made of an insulating material such as ceramic material, and each electrode (32a, 32b) of the excimer lamp 31 and each power supply portion (34a, 34b) are electrically connected via lead wires or metal plates (not shown) provided separately from the regulating member 33.

[0069] The above configuration can be used when the voltage applied to the excimer lamp is relatively low, and even if the wiring inside the housing 20 is slightly misaligned, leakage current will not occur in the wiring conduit.

[0070] <2> Figure 12 is a schematic perspective view showing a lamp unit 30 provided in another embodiment of the irradiation unit 10. As shown in Figure 12, the lamp unit 30 may have multiple excimer lamps 31 mounted on it. In this configuration, the lamp unit 30 includes a regulating member 33 whose length is adjusted according to the width on which the excimer lamps 31 are mounted, for example, as shown in Figure 12.

[0071] In the configuration shown in Figure 12, lead wires 80d are provided for connecting leaf springs 71c (not shown) mounted on the first clamping member 72a provided for each excimer lamp 31. The second clamping members 72b are connected to their respective second support columns 71b, and each second support column 71b is connected by lead wires (not shown) wired inside the base member 70.

[0072] <3> The configurations of the irradiation unit 10, lamp unit 30, and lamp holder 30a described above are merely examples, and the present invention is not limited to the illustrated configurations. [Explanation of Symbols]

[0073] 1: Ultraviolet light irradiation device 2: Conveyor path 10: Irradiation unit 20: Cabinet 21: Insertion port 22: Guide insertion section 23: Light extraction section 30: Lamp unit 30a: Lamp holder 31: Excimer Lamp 31a: First electrode 31b: Second electrode 31c: Discharge tube 31d: Reflective film 31e: End 31p: External wall surface 31q: Inner wall surface 32 : Plate material 32a: First principal surface 32b: Second principal surface 33: Regulating member 33a: Grip part 34a: First power supply section 34b: Second power supply section 35: Guide member 36 : Handle part 70: Base components 70a: Groove 71a: First pillar 71b : Second pillar 71c: Leaf spring 72a: First clamping member 72b: Second clamping member 80a, 80b, 80d: Lead wires 80c: metal plate G1: Luminous gas L1: Ultraviolet light W1: Work W1a: Irradiation surface

Claims

1. A long excimer lamp extending in the first direction, A lamp holder on which the excimer lamp is mounted, A housing having an insertion opening into which the lamp holder is inserted, A light extraction unit is provided in the housing and extracts ultraviolet light emitted from the excimer lamp mounted on the lamp holder to the outside of the housing, A plate material provided in the lamp holder and closing the insertion opening, With the plate material in a state where it closes the insertion opening, a restricting member is formed to protrude from the first main surface of the main surface of the plate material that is located inside the housing, thereby restricting the movement of the excimer lamp within the housing, An irradiation unit characterized by comprising a power supply unit for supplying power to the excimer lamp, provided on the second main surface side of the plate material located outside the housing, while the plate material is in a state where it is blocking the insertion opening.

2. The irradiation unit according to claim 1, characterized in that the excimer lamp comprises a discharge tube having a pair of mutually opposing flat outer wall surfaces, and a first electrode and a second electrode formed on the pair of outer wall surfaces of the discharge tube so as to face each other via the discharge tube.

3. The regulating member comprises a base member that protrudes from the first main surface of the plate material in a second direction which is the normal direction of the first main surface, A first support column protrudes from the base member in a third direction perpendicular to the first and second directions, A second support column is provided at a position further from the plate material than the first support column, and protruding from the base member in the same direction as the first support column, The first support column and the second support column are provided with a first clamping member and a second clamping member that clamp the end of the excimer lamp, The irradiation unit according to claim 1, characterized in that the second clamping member is fixed so as to connect the first support column and the second support column.

4. A conductive member made of a metallic material is sandwiched between the first clamping member and the excimer lamp and contacts one of the first electrodes of the pair of electrodes provided by the excimer lamp, The base member comprises a lead wire wired inside a groove or through-hole formed in the base member, which electrically connects the second support column and a second electrode of the excimer lamp that is different from the first electrode, The first clamping member is made of a ceramic material, and at least a portion of the second clamping member and the second support column is made of a metal material. The irradiation unit according to claim 3, characterized in that when the first clamping member and the second clamping member are fixed in a state of clamping the excimer lamp, one of the first power supply units and the first electrode are electrically connected via the current-carrying member, and the second power supply unit, which is different from the first power supply unit of the power supply unit, and the second electrode are electrically connected via the second clamping member, the second support column, and the lead wire.

5. The irradiation unit according to claim 1, characterized in that the plate material has a handle portion protruding from the second main surface.

6. The irradiation unit according to claim 1, further comprising: a guide insertion portion formed in the housing and extending in a second direction which is the normal direction of the first main surface; and a guide member provided on the plate material and extending in the second direction, which restricts the movement of the lamp holder by being inserted into the guide insertion portion.

7. The irradiation unit according to claim 1, characterized in that the housing is covered with a material that transmits ultraviolet light emitted from the excimer lamp, and the space inside the housing is sealed when the lamp holder is inserted and the insertion opening is closed by the plate material.

Images