Fiber laser direct writing system and fiber laser direct writing method

Abstract

This application relates to a fiber laser direct writing system and a fiber laser direct writing method. The fiber laser direct writing system includes a transmitting module, an adjustment module, a fiber compensation module, a grating compensation module, a fiber beam splitting module, and a spatial optical path module. The fiber compensation module and the grating compensation module pre-compensate for linear or nonlinear dispersion generated in the fiber beam splitting module and the spatial optical path. By adjusting the lengths of the first and second fibers, the nonlinear dispersion generated in the two fiber segments cancels out. Furthermore, the grating pairs in the grating compensation module compensate for linear dispersion generated during transmission in the fiber and spatial optical path, eliminating linear and nonlinear pulse width broadening caused by fiber transmission. This solves the problem of low writing accuracy in fiber laser direct writing caused by pulse width broadening in related technologies and improves the writing accuracy of fiber laser direct writing.

Description

Technical Field

[0001] This application relates to the field of optical microfabrication manufacturing, and in particular to fiber laser direct writing systems and methods. Background Technology

[0002] Laser direct writing utilizes a variable-intensity laser beam to expose a photoresist layer on a substrate with varying dosage, and after development, forms the desired relief outline on the photoresist surface. The basic working principle of a laser direct writing system is that a computer-controlled high-precision laser beam scans and directly exposes and writes any designed pattern on the photoresist, thereby directly transferring the design pattern onto a mask.

[0003] In practical applications, due to the short pulse width, femtosecond lasers transmit with very high peak power in optical fibers, which induces nonlinear dispersion effects in the silicon dioxide crystal, resulting in pulse broadening of the light output from the fiber. The degree of pulse broadening is positively correlated with the power of the input laser and the length of the fiber. Common photoresists require femtosecond lasers for two-photon absorption curing to achieve optimal etching accuracy, which necessitates a peak pulse power exceeding the two-photon excitation threshold. If the laser undergoes dispersion after passing through the fiber, broadening the pulse width, the peak power will not reach the two-photon lithography threshold. The photoresist will then cure via single-photon absorption or thermal effects, significantly reducing etching accuracy.

[0004] There is currently no effective solution to the problem of low writing accuracy in fiber laser direct writing technology. Summary of the Invention

[0005] This embodiment provides a fiber laser direct writing system and a fiber laser direct writing method to solve the problem of low writing accuracy in related technologies.

[0006] In a first aspect, this embodiment provides a fiber laser direct writing system, including: a transmitting module, an adjustment module, a fiber compensation module, a grating compensation module, a fiber beam splitter module, and a spatial optical path module, wherein:

[0007] The emission module includes a laser generator for emitting target laser light;

[0008] The adjustment module includes a half-wave plate and a polarization beam splitter, used to adjust the power of the target laser to obtain a first modulated laser;

[0009] The fiber optic compensation module is used to perform nonlinear dispersion compensation on the first modulated laser based on the first fiber to obtain a second modulated laser with positive nonlinear dispersion after compensation.

[0010] The grating compensation module is used to perform linear dispersion compensation on the second modulated laser based on the grating pair to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion;

[0011] The fiber optic beam splitting module is used to split the third modulated laser to obtain a laser array, and to transmit the laser array based on a preset second fiber to obtain a fourth modulated laser; wherein, the negative nonlinear dispersion generated by the transmission of the laser array by the second fiber cancels out the positive nonlinear dispersion of the laser array.

[0012] The spatial optical path module is used to modulate the fourth modulated laser into a target direct-write laser for laser direct writing based on a preset spatial optical path, and to process the target object using the target direct-write laser.

[0013] In some embodiments, the fiber optic compensation module includes a first fiber optic port coupler, a second fiber optic port coupler, and a first fiber optic cable, wherein the first fiber optic port coupler is connected to one end of the first fiber optic cable, and the second fiber optic port coupler is connected to the other end of the first fiber optic cable.

[0014] The first fiber optic port coupler is used to receive the first modulated laser and couple the first modulated laser into the first fiber.

[0015] The first optical fiber is used to transmit the first modulated laser to obtain the emitted second modulated laser with positive nonlinear dispersion;

[0016] The second fiber optic port coupler is used to receive the second modulated laser and couple the second modulated laser to the grating compensation module.

[0017] In some embodiments, the fiber optic compensation module further includes a guide rail, a first slider, a second slider, a first structural adapter, and a second structural adapter; the first fiber optic port coupler is fixed on the first structural adapter, and the second fiber optic port coupler is fixed on the second structural adapter; the first slider and the second slider are mounted on the guide rail; the first structural adapter is connected to the first slider, and the second structural adapter is connected to the second slider;

[0018] The slider is used to adjust the distance between the first fiber optic port coupler and the second fiber optic port coupler; wherein the distance is determined according to the length of the first fiber optic cable.

[0019] In some embodiments, the grating compensation module includes a D-shaped mirror, a first grating, a second grating, and a roof reflector;

[0020] The D-shaped mirror is used to receive the second modulated laser and reflect the second modulated laser back to the first grating;

[0021] The first grating is used to diffract the second modulated laser;

[0022] The second grating is used to diffract the second modulated laser;

[0023] The roof reflector is used to reflect the second modulated laser and change the optical path of the second modulated laser.

[0024] In some embodiments, the grating compensation module further includes a one-dimensional motion platform located below the second grating;

[0025] The one-dimensional motion platform is used to ensure that the second modulated laser and the third modulated laser are parallel and in opposite directions.

[0026] In some embodiments, the fiber optic beam splitter module includes a third fiber optic port coupler, a fiber optic coupler, a second fiber optic cable, and an array output device.

[0027] The third fiber optic port coupler is used to receive the third modulated laser and couple the third modulated laser into the fiber optic coupler;

[0028] The fiber coupler is used to split the third modulated laser beam to obtain the laser array, wherein the laser array has positive nonlinear dispersion;

[0029] The second optical fiber is used to transmit the laser array to obtain the fourth modulated laser, wherein the negative nonlinear dispersion generated during transmission cancels out the positive nonlinear dispersion of the laser array;

[0030] The array output device is used to transmit the fourth modulated laser to the spatial optical path module.

[0031] Secondly, this embodiment provides a fiber laser direct writing method, which is used in a fiber laser direct writing system and includes:

[0032] A first modulated laser is obtained by emitting a target laser from a laser generator and adjusting the power of the target laser.

[0033] Based on the first optical fiber, nonlinear dispersion compensation is performed on the first modulated laser to obtain a second modulated laser with positive nonlinear dispersion after compensation.

[0034] Based on the grating pair, linear dispersion compensation is performed on the second modulated laser to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion;

[0035] The third modulated laser is split to obtain a laser array, and the laser array is transmitted through a preset second optical fiber to obtain a fourth modulated laser; wherein, the negative nonlinear dispersion generated by the transmission of the laser array through the second optical fiber cancels out the positive nonlinear dispersion of the laser array.

[0036] Based on a preset spatial optical path, the fourth modulated laser is modulated into a target direct writing laser for laser direct writing, and the target direct writing laser is used to process the target processing object.

[0037] In some embodiments, the step of performing nonlinear dispersion compensation on the first modulated laser based on the first optical fiber to obtain a compensated second modulated laser with positive nonlinear dispersion includes:

[0038] The first optical fiber is selected based on the physical parameters of the second optical fiber;

[0039] The first modulated laser is injected into the first optical fiber and transmitted through the first optical fiber to obtain the emitted second modulated laser.

[0040] In some embodiments, the step of directing the first modulated laser into the first optical fiber, transmitting the first modulated laser through the first optical fiber, and obtaining the emitted second modulated laser includes:

[0041] The first modulated laser is received through the first fiber optic port coupler, and the first modulated laser is coupled into the first fiber optic cable.

[0042] The first modulated laser is transmitted through the first optical fiber to obtain the emitted second modulated laser with positive nonlinear dispersion.

[0043] The second modulated laser is received through a second fiber optic port coupler.

[0044] In some embodiments, selecting the first optical fiber based on the physical parameters of the second optical fiber includes:

[0045] The target length of the first optical fiber is determined based on the length of the second optical fiber; wherein, the nonlinear dispersion generated by the laser transmitted through the first optical fiber with the target length can cancel each other out with the nonlinear dispersion generated by the laser transmitted through the second optical fiber.

[0046] The first optical fiber is selected based on the target length.

[0047] Compared with related technologies, the fiber laser direct writing system provided in this embodiment includes: a transmitting module, an adjustment module, a fiber compensation module, a grating compensation module, a fiber beam splitting module, and a spatial optical path module. The fiber compensation module and the grating compensation module pre-compensate for linear or nonlinear dispersion generated in the fiber beam splitting module and the spatial optical path. By adjusting the lengths of the first and second fibers, the nonlinear dispersion generated in the two fiber segments cancels out. Furthermore, the grating pairs in the grating compensation module compensate for linear dispersion generated during fiber and spatial optical path transmission, eliminating linear and nonlinear pulse width broadening caused by fiber transmission. This solves the problem of low writing accuracy in fiber direct writing in related technologies and improves the writing accuracy of fiber laser direct writing.

[0048] Details of one or more embodiments of this application are set forth in the following drawings and description to make other features, objects and advantages of this application more readily apparent. Attached Figure Description

[0049] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0050] Figure 1 This is a schematic diagram of the fiber laser direct writing system in this embodiment;

[0051] Figure 2 This is a schematic diagram of the internal structure of the laser direct writing system in this embodiment;

[0052] Figure 3 This is a schematic diagram of the grating compensation module in this embodiment;

[0053] Figure 4 This is a schematic diagram of the internal structure of the fiber optic beam splitter module in this embodiment;

[0054] Figure 5 This is a flowchart of the fiber laser direct writing method in this embodiment;

[0055] Figure 6 This is a diagram illustrating the dispersion compensation effect of the fiber laser direct writing method in this embodiment. Detailed Implementation

[0056] To better understand the purpose, technical solution, and advantages of this application, the application is described and illustrated below in conjunction with the accompanying drawings and embodiments.

[0057] Unless otherwise defined, the technical or scientific terms used in this application shall have the general meaning as understood by one of ordinary skill in the art to which this application pertains. Words such as “a,” “an,” “an,” “the,” “the,” and “these,” used in this application, do not indicate quantitative limitation and may be singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that comprises a series of steps or modules (units) is not limited to the listed steps or modules (units) but may include steps or modules (units) not listed, or may include other steps or modules (units) inherent to such processes, methods, products, or devices. The terms “connected,” “linked,” and “coupled,” used in this application, are not limited to physical or mechanical connections but may include electrical connections, whether direct or indirect. The term “multiple” used in this application refers to two or more. The "and / or" operator describes the relationship between related objects, indicating that three relationships can exist. For example, "A and / or B" can represent three cases: A alone, A and B simultaneously, and B alone. Typically, the character " / " indicates that the objects before and after it are in an "or" relationship. The terms "first," "second," and "third," etc., used in this application are merely for distinguishing similar objects and do not represent a specific ordering of the objects.

[0058] This embodiment provides a fiber laser direct writing system. Figure 1 This is a schematic diagram of the fiber laser direct writing system in this embodiment, as shown below. Figure 1 As shown, the fiber laser direct writing system provided in this embodiment can have the following structure: a transmitting module 10, an adjustment module 20, a fiber compensation module 30, a grating compensation module 40, a fiber beam splitter module 50, and a spatial optical path module 60, wherein:

[0059] The transmitting module 10 includes a laser generator for emitting a target laser; the adjustment module 20 includes a half-wave plate and a polarization beam splitter (PBS) for adjusting the power of the target laser to obtain a first modulated laser; the fiber compensation module 30 is used to perform nonlinear dispersion compensation on the first modulated laser based on a first fiber to obtain a compensated second modulated laser with positive nonlinear dispersion; the grating compensation module 40 is used to perform linear dispersion compensation on the second modulated laser based on a grating pair to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion; the fiber beam splitting module 50 is used to split the third modulated laser to obtain a laser array, and transmit the laser array based on a preset second fiber to obtain a fourth modulated laser; wherein the negative nonlinear dispersion generated by the transmission of the laser array by the second fiber cancels out the positive nonlinear dispersion of the laser array; the spatial optical path module 60 is used to modulate the fourth modulated laser into a target direct-write laser for laser direct writing based on a preset spatial optical path, and use the target direct-write laser to process the target processing object.

[0060] Specifically, the aforementioned laser generator can be a 517nm femtosecond laser with an emission pulse width of approximately 200 fs and an emitted laser wavelength of 517nm. This embodiment uses multiple compensation modules to segmentally compensate for the dispersion that may occur during laser transmission through optical fibers. The target laser emitted from the laser transmitter undergoes power adjustment via adjustment module 20 before being emitted to fiber compensation module 30. Modulation by fiber compensation module 30 can induce positive nonlinear dispersion in the target laser, while modulation by fiber beam splitting module 50 can induce negative nonlinear dispersion. The device structure in fiber compensation module 30 is matched to the device structure in fiber beam splitting module 50, thereby enabling the positive and negative nonlinear dispersions to cancel each other out. Furthermore, grating compensation module 40 can compensate for linear dispersion generated during optical path transmission using grating pairs within the module. After being modulated by the adjustment module 20, the fiber compensation module 30, the grating compensation module 40, and the fiber beam splitting module 50, the target laser finally enters the spatial optical path module 60. Based on a series of preset spatial optical paths, it is modulated into a target direct-write laser for laser direct writing. In this embodiment, the target direct-write laser is used to engrave the target processing object. Since the dispersion generated in the laser fiber transmission is compensated, the pulse width of the target direct-write laser is basically consistent with the pulse width of the target laser.

[0061] exist Figure 1 On this basis, Figure 2 This is a schematic diagram of the internal structure of the laser direct writing system in this embodiment. Figure 2 As shown, the adjustment module 20 includes a half-wave plate 21 and a polarization beam splitter 22.

[0062] Furthermore, in some of these embodiments, such as Figure 2 As shown, the fiber optic compensation module 30 may specifically include a first fiber optic port coupler 31, a second fiber optic port coupler 32, and a first fiber optic cable 33. The first fiber optic port coupler 31 is connected to one end of the first fiber optic cable 33, and the second fiber optic port coupler 32 is connected to the other end of the first fiber optic cable 33.

[0063] The first fiber optic port coupler 31 is used to receive the first modulated laser and couple the first modulated laser to the first fiber 33; the first fiber 33 is used to transmit the first modulated laser to obtain the emitted second modulated laser with positive nonlinear dispersion; the second fiber optic port coupler 32 is used to receive the second modulated laser and couple the second modulated laser to the grating compensation module 40.

[0064] Specifically, the first optical fiber 33 can be a large-mode-field-diameter single-mode fiber. When the laser passes through the first optical fiber 33, it will generate positive chirp, thereby inducing positive nonlinear dispersion.

[0065] Furthermore, in some embodiments, the fiber optic compensation module 30 may further include a guide rail, a first slider, a second slider, a first structural adapter, and a second structural adapter; a first fiber optic port coupler is fixed on the first structural adapter, and a second fiber optic port coupler is fixed on the second structural adapter; the first slider and the second slider are mounted on the guide rail; the first structural adapter is connected to the first slider, and the second structural adapter is connected to the second slider;

[0066] The slider is used to adjust the distance between the first fiber optic port coupler 31 and the second fiber optic port coupler 32; wherein, this distance is determined according to the length of the first fiber optic cable 33. Specifically, the spacing between the two fiber optic port couplers should be slightly less than the length of the first fiber optic cable 33, and the first fiber optic cable 33 is just taut between the two fiber optic port couplers; by controlling the slider to move on the guide rail, the position of the first fiber optic port coupler and / or the second fiber optic port coupler can be changed, thereby adjusting the distance between the first fiber optic port coupler and the second fiber optic port coupler.

[0067] Furthermore, in some of these embodiments, such as Figure 2 As shown, the grating compensation module 40 may specifically include a D-shaped mirror 41, a first grating 42, a second grating 43, and a roof reflector 44.

[0068] D-shaped mirror 41 is used to receive the second modulated laser and reflect it to the first grating 42; the first grating 42 is used to diffract the second modulated laser; the second grating 43 is used to diffract the second modulated laser; the roof reflector 44 is used to reflect the second modulated laser and change the optical path of the second modulated laser.

[0069] Specifically, the first grating 42 and the second grating 43 are arranged in parallel with an adjustable spacing. By adjusting the spacing between the two gratings, the linear pulse width of the laser can be adjusted, thereby compensating for linear dispersion. In addition, the adjustment direction of the spacing between the two gratings is parallel to the diffraction angle of the gratings, thus ensuring that the emission position of the third modulated laser does not change when the spacing between the two gratings is adjusted.

[0070] The second modulated laser is reflected by the D-shaped mirror 41 into the first grating. After being diffracted by the first grating 42, it enters the second grating 43. After being diffracted by the second grating 43, it is reflected twice by the roof reflector 44 and then enters the second grating 43 again. It is then diffracted by the second grating 43 back to the first grating 42. After being diffracted by the first grating 42, the third modulated laser is obtained. The exit direction of the third modulated laser is exactly parallel to and opposite to the direction of the second modulated laser entering the grating compensation module 40.

[0071] and Figure 2 Correspondingly, Figure 3 This is a schematic diagram of the structure of the grating compensation module 40 in this embodiment. In some embodiments, such as... Figure 3 As shown, the grating compensation module 40 may also include a one-dimensional motion platform 45, which is located below the second grating 43 to ensure that the second modulated laser and the third modulated laser are parallel and opposite in direction.

[0072] Specifically, in practical applications, the spacing between the first grating 42 and the second grating 43 may change. Therefore, in this embodiment, a one-dimensional motion platform 45 is arranged below the second grating 43. The motion direction of the one-dimensional motion platform 45 is parallel to the diffraction direction of the second modulated laser after passing through the first grating 42. This ensures that when the spacing between the two gratings is changed, the incident position of the light diffracted from the first grating 42 to the second grating 43 is not affected. This ensures that the second modulated laser incident on the first grating 42 and the third modulated laser emitted from the first grating 42 are parallel to each other but in opposite directions.

[0073] Furthermore, Figure 4 This is a schematic diagram of the internal structure of the fiber optic beam splitter module in this embodiment, as shown below. Figure 4 As shown, in some embodiments, the fiber optic splitting module 50 may specifically include a third fiber optic port coupler 51, a fiber optic coupler 52, a second fiber optic cable 53, and an array output device 54.

[0074] The third fiber optic port coupler 51 is used to receive the third modulated laser and couple the third modulated laser to the fiber optic coupler 52; the fiber optic coupler 52 is used to split the third modulated laser to obtain a laser array, wherein the laser array has positive nonlinear dispersion; the second fiber 53 is used to transmit the laser array to obtain a fourth modulated laser, wherein the negative nonlinear dispersion generated during transmission cancels out the positive nonlinear dispersion of the laser array; the array output device 54 is used to transmit the fourth modulated laser to the spatial optical path module.

[0075] The fiber coupler 52 can have one input port and multiple output ports, thereby splitting the third modulated laser beam from the grating compensation module 40 into a laser array; the second fiber 52 can be a group of single-mode fibers evenly arranged according to a preset design spacing.

[0076] Furthermore, in some of these embodiments, such as Figure 2 As shown, the spatial optical path module 60 includes a fiber optic holder 61, a low-magnification objective lens 62, a field lens 63, a galvanometer lens 64, a scanning lens 65, a sleeve lens 66, an objective lens 67, and a writing stage 68. Specifically, the fourth modulated laser emitted from the fiber optic beam splitter module 50 can be N beams, which are input into the spatial optical module 60 through the fiber optic holder 61. The low-magnification objective lens 62 collimates the N beams emitted from the fiber end face into N converging parallel beams. Through the linear optical information processing system (4-f system) composed of the field lens 63, the focused beam is imaged onto the focal plane of the second sleeve lens. The galvanometer lens 64 is placed at the focal plane of the second sleeve lens. After passing through the scanning lens 65 and the sleeve lens 66, the beam at the galvanometer lens 64 is imaged onto the objective lens 67. After passing through the objective lens 67, the beam forms an N-beam array on the writing stage 68, thereby performing writing processing on the target object.

[0077] The aforementioned fiber laser direct writing system includes: a transmitting module, an adjustment module, a fiber compensation module, a grating compensation module, a fiber beam splitter module, and a spatial optical path module. Dispersion compensation is achieved through the fiber compensation module, grating compensation module, and fiber beam splitter module. By adjusting the lengths of the first and second fibers, the nonlinear dispersion generated in the two fiber segments cancels each other out. Furthermore, the grating pairs in the fiber compensation module compensate for the linear dispersion generated during fiber transmission, eliminating both linear and nonlinear pulse width broadening caused by fiber transmission. This solves the problem of low writing accuracy in fiber laser direct writing caused by pulse width broadening in related technologies, thus improving the writing accuracy of fiber laser direct writing.

[0078] This embodiment also provides a fiber laser direct writing method, which is used in the above-mentioned fiber laser direct writing system. Figure 5 This is a flowchart of the fiber laser direct writing method in this embodiment, as follows: Figure 5 As shown, the process includes the following steps:

[0079] Step S501: The target laser is emitted based on the laser generator, and the power of the target laser is adjusted to obtain the first modulated laser.

[0080] Specifically, the laser generator can be a 517nm femtosecond laser, and the target laser can be a femtosecond laser with a pulse width of 200fs; the power of the target laser is adjusted to a suitable level by using a half-wave plate and a polarization beam splitter.

[0081] Step S502: Based on the first optical fiber, nonlinear dispersion compensation is performed on the first modulated laser to obtain a second modulated laser with positive nonlinear dispersion after compensation.

[0082] Specifically, the first optical fiber can be a large-mode-field-diameter single-mode fiber. When the target laser propagates through the first optical fiber, the spectrum will generate positive chirp, thereby inducing positive nonlinear dispersion in the target laser. This positive nonlinear dispersion causes the pulse broadening of the target laser, that is, the second modulated laser has positive nonlinear dispersion and the pulse width is greater than that of the target laser.

[0083] Step S503: Based on the grating pair, linear dispersion compensation is performed on the second modulated laser to obtain the compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion.

[0084] Specifically, the grating pair can adjust the linear pulse width broadening in the second modulated laser. In addition, after the second modulated laser is modulated by the grating pair, the incident light entering the grating pair (i.e., the second modulated laser) and the outgoing light of the grating pair (i.e., the third modulated laser) are parallel and opposite in direction. Therefore, the chirp in the third modulated laser becomes negative.

[0085] Step S504: The third modulated laser is split to obtain a laser array, and the laser array is transmitted through a preset second optical fiber to obtain a fourth modulated laser; wherein, the negative nonlinear dispersion generated by the transmission of the laser array through the second optical fiber cancels out the positive nonlinear dispersion of the laser array.

[0086] Specifically, when the third modulated laser with negative chirp is split into a laser array and transmitted through the second optical fiber, it will induce negative nonlinear dispersion. Since the lengths of the first and second optical fibers are matched, the negative nonlinear dispersion cancels out the positive nonlinear dispersion introduced when the target laser is transmitted through the first optical fiber. This reduces the laser pulse broadening caused by the transmission of the target laser through the first optical fiber, and restores the pulse width of the fourth modulated laser to the same width as the target laser.

[0087] Step S505: Based on the preset spatial optical path, the fourth modulation laser is modulated into a target direct writing laser for laser direct writing, and the target direct writing laser is used to process the target processing object.

[0088] Figure 6 This is a diagram illustrating the dispersion compensation effect of the fiber laser direct writing method in this embodiment. The dashed curve represents the pulse waveform of the target direct writing laser in this embodiment, while the solid curve represents the pulse waveform of the direct writing laser in a general fiber laser direct writing method in related technologies. The horizontal axis represents time, and the vertical axis represents power. Figure 6 As shown, when the initial pulse width of the target laser emitted by the laser generator is about 0.20 ps, ​​L1 is the pulse width of the target direct-write laser in the fiber laser direct-write method of this embodiment, and its value is about 0.25 ps, which is close to the initial pulse width of the target laser; L2 is the direct-write laser pulse width of the general fiber laser direct-write method in related technologies, and its value is about 20 ps, ​​which is much wider than the initial pulse width of the target laser.

[0089] Through the above steps S501 to S505, a target laser is emitted based on a laser generator, and the power of the target laser is adjusted to obtain a first modulated laser; based on a first optical fiber, nonlinear dispersion compensation is performed on the first modulated laser to obtain a compensated second modulated laser with positive nonlinear dispersion; based on a grating pair, linear dispersion compensation is performed on the second modulated laser to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion; the third modulated laser is split into beams to obtain a laser array, and the laser array is transmitted based on a preset second optical fiber to obtain a fourth modulated laser; wherein the negative nonlinear dispersion generated by the transmission of the laser array through the second optical fiber cancels out the positive nonlinear dispersion of the laser array; based on a preset spatial optical path, the fourth modulated laser is modulated into a target direct-write laser for laser direct writing, and the target direct-write laser is used to process the target processing object. By adjusting the lengths of the first and second optical fibers, the nonlinear dispersion generated in the two fiber segments is canceled out, and the linear dispersion generated in the fiber transmission is compensated by a grating pair. This eliminates the linear and nonlinear pulse width broadening caused by the fiber transmission, thereby solving the problem of low writing accuracy of fiber laser direct writing caused by pulse width broadening in related technologies and improving the writing accuracy of fiber laser direct writing.

[0090] In some embodiments, based on step S502 above, nonlinear dispersion compensation is performed on the first modulated laser based on the first optical fiber to obtain a compensated second modulated laser with positive nonlinear dispersion, which may specifically include:

[0091] Based on the physical parameters of the second optical fiber, the first optical fiber is selected; the first modulated laser is injected into the first optical fiber, and the first modulated laser is transmitted through the first optical fiber to obtain the emitted second modulated laser.

[0092] In some embodiments, the first optical fiber is selected based on the physical parameters of the second optical fiber, which may specifically include:

[0093] The target length of the first fiber is determined based on the length of the second fiber; wherein, the target length is such that the nonlinear dispersion generated by the laser transmitted through the first fiber of the target length can cancel out the nonlinear dispersion generated by the laser transmitted through the second fiber; the first fiber is selected based on the target length.

[0094] Furthermore, in some embodiments, the first modulated laser is incident on a first optical fiber, and the first modulated laser is transmitted through the first optical fiber to obtain the emitted second modulated laser, which may specifically include:

[0095] The first modulated laser is received through a first fiber optic port coupler and coupled into the first fiber; the first modulated laser is transmitted through the first fiber to obtain an emitted second modulated laser with positive nonlinear dispersion; the second modulated laser is received through a second fiber optic port coupler.

[0096] It should be understood that the specific embodiments described herein are merely illustrative of the application and not intended to limit it. All other embodiments derived by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0097] Obviously, the accompanying drawings are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar situations based on these drawings without any creative effort. Furthermore, it is understood that although the work done in this development process may be complex and lengthy, for those skilled in the art, certain design, manufacturing, or production modifications made based on the technical content disclosed in this application are merely conventional technical means and should not be considered as insufficient disclosure of this application.

[0098] The term "embodiment" in this application refers to a specific feature, structure, or characteristic described in connection with an embodiment that may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily imply the same embodiment, nor does it imply that it is mutually exclusive with or independent of other embodiments. It will be clearly or implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0099] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of patent protection. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the appended claims.

Claims

1. A fiber laser direct writing system, characterized in that, include: The system includes a transmission module, an adjustment module, a fiber optic compensation module, a grating compensation module, a fiber optic beam splitter module, and a spatial optical path module, among which: The emission module includes a laser generator for emitting target laser light; The adjustment module includes a half-wave plate and a polarization beam splitter, used to adjust the power of the target laser to obtain a first modulated laser; The fiber optic compensation module is used to perform nonlinear dispersion compensation on the first modulated laser based on the first fiber to obtain a second modulated laser with positive nonlinear dispersion after compensation. The grating compensation module is used to perform linear dispersion compensation on the second modulated laser based on the grating pair to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion; The fiber optic beam splitting module is used to split the third modulated laser to obtain a laser array, and to transmit the laser array based on a preset second fiber to obtain a fourth modulated laser; wherein, the negative nonlinear dispersion generated by the transmission of the laser array by the second fiber cancels out the positive nonlinear dispersion of the laser array. The spatial optical path module is used to modulate the fourth modulation laser into a target direct writing laser for laser direct writing based on a preset spatial optical path, and to process the target processing object using the target direct writing laser; The fiber optic beam splitter module includes a third fiber optic port coupler, a fiber optic coupler, a second fiber optic cable, and an array output device. The third fiber optic port coupler is used to receive the third modulated laser and couple the third modulated laser into the fiber optic coupler; The fiber coupler is used to split the third modulated laser beam to obtain the laser array, wherein the laser array has positive nonlinear dispersion; The second optical fiber is used to transmit the laser array to obtain the fourth modulated laser, wherein the negative nonlinear dispersion generated during transmission cancels out the positive nonlinear dispersion of the laser array; The array output device is used to transmit the fourth modulated laser to the spatial optical path module.

2. The fiber laser direct writing system according to claim 1, characterized in that, The fiber optic compensation module includes a first fiber optic port coupler, a second fiber optic port coupler, and a first fiber optic cable. The first fiber optic port coupler is connected to one end of the first fiber optic cable, and the second fiber optic port coupler is connected to the other end of the first fiber optic cable. The first fiber optic port coupler is used to receive the first modulated laser and couple the first modulated laser into the first fiber. The first optical fiber is used to transmit the first modulated laser to obtain the emitted second modulated laser with positive nonlinear dispersion; The second fiber optic port coupler is used to receive the second modulated laser and couple the second modulated laser to the grating compensation module.

3. The fiber laser direct writing system according to claim 2, characterized in that, The fiber optic compensation module further includes a guide rail, a first slider, a second slider, a first structural adapter, and a second structural adapter; the first fiber optic port coupler is fixed on the first structural adapter, and the second fiber optic port coupler is fixed on the second structural adapter; the first slider and the second slider are mounted on the guide rail; the first structural adapter is connected to the first slider, and the second structural adapter is connected to the second slider; The slider is used to adjust the distance between the first fiber optic port coupler and the second fiber optic port coupler; wherein the distance is determined according to the length of the first fiber optic cable.

4. The fiber laser direct writing system according to claim 1, characterized in that, The grating compensation module includes a D-shaped mirror, a first grating, a second grating, and a roof reflector; The D-shaped mirror is used to receive the second modulated laser and reflect the second modulated laser back to the first grating; The first grating is used to diffract the second modulated laser; The second grating is used to diffract the second modulated laser; The roof reflector is used to reflect the second modulated laser and change the optical path of the second modulated laser.

5. The fiber laser direct writing system according to claim 4, characterized in that, The grating compensation module further includes a one-dimensional motion platform, which is located below the second grating; The one-dimensional motion platform is used to ensure that the second modulated laser and the third modulated laser are parallel and in opposite directions.

6. A fiber laser direct writing method, said method being used in the fiber laser direct writing system according to any one of claims 1 to 5, characterized in that, include: A first modulated laser is obtained by emitting a target laser from a laser generator and adjusting the power of the target laser. Based on the first optical fiber, nonlinear dispersion compensation is performed on the first modulated laser to obtain a second modulated laser with positive nonlinear dispersion after compensation. Based on the grating pair, linear dispersion compensation is performed on the second modulated laser to obtain a compensated third modulated laser, wherein the third modulated laser has positive nonlinear dispersion; The third modulated laser is split to obtain a laser array, and the laser array is transmitted through a preset second optical fiber to obtain a fourth modulated laser; wherein, the negative nonlinear dispersion generated by the transmission of the laser array through the second optical fiber cancels out the positive nonlinear dispersion of the laser array. Based on a preset spatial optical path, the fourth modulated laser is modulated into a target direct writing laser for laser direct writing, and the target direct writing laser is used to process the target processing object.

7. The fiber laser direct writing method according to claim 6, characterized in that, The step of performing nonlinear dispersion compensation on the first modulated laser based on the first optical fiber to obtain a compensated second modulated laser with positive nonlinear dispersion includes: The first optical fiber is selected based on the physical parameters of the second optical fiber; The first modulated laser is injected into the first optical fiber and transmitted through the first optical fiber to obtain the emitted second modulated laser.

8. The fiber laser direct writing method according to claim 7, characterized in that, The step of directing the first modulated laser into the first optical fiber, transmitting the first modulated laser through the first optical fiber, and obtaining the emitted second modulated laser includes: The first modulated laser is received through the first fiber optic port coupler, and the first modulated laser is coupled into the first fiber optic cable. The first modulated laser is transmitted through the first optical fiber to obtain the emitted second modulated laser with positive nonlinear dispersion. The second modulated laser is received through a second fiber optic port coupler.

9. The fiber laser direct writing method according to claim 8, characterized in that, The step of selecting the first optical fiber based on the physical parameters of the second optical fiber includes: The target length of the first optical fiber is determined based on the length of the second optical fiber; wherein, the nonlinear dispersion generated by the laser transmitted through the first optical fiber with the target length can cancel each other out with the nonlinear dispersion generated by the laser transmitted through the second optical fiber. The first optical fiber is selected based on the target length.

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