Parts replacement system

Abstract

To reduce the installation area of ​​systems in the manufacturing of semiconductor devices. [Solution] The parts replacement system for replacing consumable parts comprises a parts storage device and a parts replacement device. The parts storage device stores consumable parts before use. The parts replacement device connects to the processing device and the parts storage device, and replaces used consumable parts installed in the processing device with unused consumable parts stored in the parts storage device. The parts replacement device also moves to the location of the processing device in which the consumable parts to be replaced are installed and connects to the processing device. The parts storage device also moves to the location of the parts replacement device connected to the processing device in which the consumable parts to be replaced are installed and connects to the parts replacement device.

Description

Technical Field

[0001] Various aspects and embodiments of the present disclosure relate to a parts replacement system Mu .

Background Art

[0002] Inside a processing apparatus that processes a substrate, there are consumable parts that are consumed as the substrate is processed. When the consumption amount of such a consumable part becomes larger than a predetermined consumption amount, it is replaced with a consumable part before use. In the replacement of the consumable part, the processing of the substrate in the processing apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable part is manually taken out, and the consumable part before use is attached. Then, the container is closed again, the inside of the container is evacuated, and the processing of the substrate is restarted.

[0003] As described above, in the replacement of the consumable part, since the inside of the processing apparatus is opened to the atmosphere, evacuation of the inside of the processing apparatus after the replacement of the consumable part is required, and the processing stop time becomes long. In addition, since there are also large parts among the consumable parts, it may take time for manual replacement.

[0004] To avoid this, an exchange station having a consumable part before use and an exchange handler for replacing the consumable part is known (see, for example, Patent Document 1 below). In such an exchange station, the processing apparatus and the exchange station are connected, and after the inside of the exchange station is evacuated, a shut-off valve between the processing apparatus and the exchange station is opened. Then, the used consumable part is taken out from the processing apparatus by the exchange handler in the exchange station and replaced with a consumable part before use mounted in the exchange station. Thereby, it becomes possible to replace the consumable part without opening the inside of the processing apparatus to the atmosphere, and the processing stop time can be shortened. In addition, since the replacement of the consumable part is performed by the exchange handler instead of manually, the replacement of the consumable part can be performed in a short time.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Japanese Patent Publication No. 2017-85072 [Overview of the project] [Problems that the invention aims to solve]

[0006] This disclosure provides a component replacement system and component replacement device that can reduce the installation area of ​​a system in the manufacturing of semiconductor devices. [Means for solving the problem]

[0007] One aspect of this disclosure is a parts replacement system for replacing consumable parts, comprising a parts storage device and a parts replacement device. The parts storage device stores consumable parts before use. The parts replacement device connects to a processing device and the parts storage device, and replaces used consumable parts installed in the processing device with unused consumable parts stored in the parts storage device. The parts replacement device also moves to the location of the processing device in which the consumable parts to be replaced are installed and connects to the processing device. The parts storage device also moves to the location of the parts replacement device connected to the processing device in which the consumable parts to be replaced are installed and connects to the parts replacement device. [Effects of the Invention]

[0008] According to various aspects and embodiments of this disclosure, the installation area of ​​a system in the manufacture of a semiconductor device can be reduced. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a system configuration diagram showing an example of a manufacturing system in one embodiment of the present disclosure. [Figure 2] Figure 2 is a schematic cross-sectional view showing an example of a processing apparatus. [Figure 3] Figure 3 is a schematic cross-sectional view showing an example of a parts replacement device. [Figure 4] Figure 4 is a view showing an example of an A-A cross section of the component replacement device illustrated in FIG. 3. [Figure 5] Figure 5 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the component replacement device. [Figure 6] Figure 6 is an enlarged cross-sectional view showing an example of a connection portion between the processing device and the component replacement device. [Figure 7] Figure 7 is a schematic cross-sectional view showing an example of the component storage device. [Figure 8] Figure 8 is a schematic cross-sectional view showing an example of the jig storage device. [Figure 9] Figure 9 is a view for explaining the replacement procedure of the consumable component. [Figure 10] Figure 10 is a view for explaining the replacement procedure of the consumable component. [Figure 11] Figure 11 is a view for explaining the replacement procedure of the consumable component. [Figure 12] Figure 12 is a view for explaining the replacement procedure of the consumable component. [Figure 13] Figure 13 is a view for explaining the replacement procedure of the consumable component. [Figure 14] Figure 14 is a view for explaining the replacement procedure of the consumable component. [Figure 15] Figure 15 is a view for explaining the replacement procedure of the consumable component. [Figure 16] Figure 16 is a view for explaining the replacement procedure of the consumable component. [Figure 17] Figure 17 is a view for explaining the replacement procedure of the consumable component. [Figure 18] Figure 18 is a view for explaining the replacement procedure of the consumable component. [Figure 19] Figure 19 is a block diagram showing an example of the control device. [Figure 20] Figure 20 is a view showing an example of the management table. [Figure 21] Figure 21 is a flowchart showing an example of the processing of the control device. [Figure 22] Figure 22 is a flowchart showing an example of the processing of the control device. [Figure 23] FIG. 23 is a flowchart showing an example of the process of the component replacement device. [Figure 24] FIG. 24 is a flowchart showing an example of the process of the component replacement device. [Figure 25] FIG. 25 is a flowchart showing an example of the process of the component storage device and the jig storage device.

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments of the component replacement system and the component replacement device will be described in detail based on the drawings. Note that the disclosed component replacement system and component replacement device are not limited by the following embodiments.

[0011] Incidentally, in the mass production process of products, since the substrate is processed by a plurality of processing devices, the replacement of consumable parts is performed in the processing devices installed in different locations. Therefore, the exchange station equipped with the consumable parts before use needs to move to the location of the processing device where the replacement of the consumable parts is required.

[0012] When only one consumable part before use is accommodated in the exchange station, the exchange station immediately after the replacement of the consumable part cannot start the next exchange operation until the consumable part before use is replenished. Therefore, the processing device having the consumable part that has reached the replacement time waits for the replacement of the consumable part, and the throughput of the processing decreases. On the other hand, when a plurality of consumable parts before use are accommodated in the exchange station, the replacement of the consumable parts can be continued until the accommodated consumable parts before use are exhausted, so that the decrease in the throughput of the processing can be suppressed.

[0013] However, when the number of consumable parts accommodated in the exchange station increases, the exchange station becomes larger. As a result, it is necessary to widen the width of the passage through which the exchange station moves, and the installation area of the entire semiconductor device manufacturing system increases.

[0014] Therefore, this disclosure provides a technology that can reduce the installation area of ​​a system in the manufacturing of semiconductor devices.

[0015] [Configuration of Manufacturing System 10] Figure 1 is a system configuration diagram showing an example of a manufacturing system 10 in one embodiment of the present disclosure. The manufacturing system 10 is an example of a parts replacement system. In one embodiment, the manufacturing system 10 comprises a control device 20, a plurality of processing groups 30, a plurality of parts replacement devices 50, a plurality of parts storage devices 60, and a plurality of jig storage devices 70. The control device 20 communicates with each of the processing groups 30, parts replacement devices 50, parts storage devices 60, and jig storage devices 70, and controls each of them.

[0016] Each processing group 30 has a vacuum transport chamber 31, multiple processing units 40-1 to 40-6, multiple load lock chambers 32, and an atmospheric transport chamber 33. In the following, when referring to the multiple processing units 40-1 to 40-6 collectively without distinguishing between them, the processing unit 40 will be used.

[0017] Multiple processing units 40 and multiple load lock chambers 32 are connected to the vacuum transport chamber 31. In this embodiment, six processing units 40 are connected to the vacuum transport chamber 31, but five or fewer processing units 40 may be connected to the vacuum transport chamber 31, or seven or more processing units 40 may be connected. Also, in this embodiment, two load lock chambers 32 are connected to the vacuum transport chamber 31, but one load lock chamber 32 may be connected to the vacuum transport chamber 31, or three or more load lock chambers 32 may be connected.

[0018] Each processing unit 40 performs a process on the substrate W, such as etching or film deposition, under low pressure. Each processing unit 40 is equipped with consumable parts that are consumed depending on the process performed on the substrate W. Each processing unit 40 is separated from the vacuum transfer chamber 31 by a gate valve 400. Each processing unit 40 is also provided with a gate valve 401 for removing used consumable parts and adding new consumable parts. Each processing unit 40 may be a device that performs the same process in the manufacturing process, or it may be a device that performs different processes.

[0019] Each load lock chamber 32 has gate valves 320 and 321, which switch the internal pressure from a predetermined vacuum pressure to atmospheric pressure, or from atmospheric pressure to a predetermined vacuum pressure. The load lock chamber 32 and the vacuum transport chamber 31 are separated by gate valve 320. The load lock chamber 32 and the atmospheric transport chamber 33 are separated by gate valve 321.

[0020] A robotic arm 310 is positioned inside the vacuum transport chamber 31. The vacuum transport chamber 31 is maintained at a predetermined vacuum level. In this embodiment, the robotic arm 310 removes the substrate W before processing from the load lock chamber 32, which has been reduced to a predetermined vacuum level, and transports it to one of the processing units 40. The robotic arm 310 also removes the processed substrate W from the processing unit 40 and transports it to another processing unit 40 or the load lock chamber 32.

[0021] A robotic arm 330 is provided inside the atmospheric transport chamber 33. The atmospheric transport chamber 33 is also provided with multiple load ports 331 to which containers (e.g., FOUP: Front Opening Unified Pod) capable of accommodating multiple substrates W before or after processing are connected. The robotic arm 330 removes the substrates W before processing from the containers connected to the load ports 331 and transports them into the load lock chamber 32. The robotic arm 330 also removes the substrates W after processing from the load lock chamber 32 and transports them into the containers connected to the load ports 331. The atmospheric transport chamber 33 may also be provided with an alignment unit to adjust the orientation of the substrates W removed from the containers connected to the load ports 331.

[0022] Each parts replacement device 50 has a robotic arm and a moving mechanism for replacing consumable parts, and moves to the location of a processing device 40 containing the consumable parts that need replacing, in response to instructions from the control device 20, and connects to the processing device 40. Each parts storage device 60 has multiple unused consumable parts and a moving mechanism, and moves to the location of a parts replacement device 50 connected to a processing device 40 containing the consumable parts that need replacing, in response to instructions from the control device 20, and connects to the parts replacement device 50. Each jig storage device 70 has a jig and a moving mechanism for replacing consumable parts, and moves to the location of a parts replacement device 50 connected to a processing device 40 containing the consumable parts that need replacing, in response to instructions from the control device 20, and connects to the parts replacement device 50.

[0023] The robot arm of the parts replacement device 50 retrieves a jig for replacing consumable parts from the jig storage device 70, uses the jig to remove used consumable parts from the processing device 40, and stores the removed consumable parts in the parts storage device 60. Then, the robot arm of the parts replacement device 50 retrieves unused consumable parts from the parts storage device 60 and installs the removed consumable parts into the processing device 40. In this way, used consumable parts and unused consumable parts are exchanged within the processing device 40.

[0024] As described above, in this embodiment, the manufacturing system 10 has a parts replacement device 50 that replaces consumable parts and a parts storage device 60 that houses multiple consumable parts, which move separately to the location of the processing device 40 that has consumable parts that need to be replaced. This makes it possible to miniaturize the parts replacement device 50 and the parts storage device 60 compared to a replacement station equipped with both. As a result, the width of the passage through which the parts replacement device 50 and the parts storage device 60 move can be narrowed. This reduces the overall installation area of ​​the manufacturing system 10.

[0025] [Configuration of the processing unit 40] Figure 2 is a schematic cross-sectional view showing an example of the processing apparatus 40. In this embodiment, the processing apparatus 40 comprises a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system 46.

[0026] The chamber 41 has a support portion 42 and an upper electrode showerhead assembly 43. The support portion 42 is located in the lower region of the processing space 41s within the chamber 41. The upper electrode showerhead assembly 43 is located above the support portion 42 and may function as part of the top plate of the chamber 41.

[0027] The support portion 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support portion 42 includes a lower electrode 421 and an electrostatic chuck 422. The electrostatic chuck 422 is positioned on the lower electrode 421 and is configured to support the substrate W with its upper surface. An edge ring 423 is provided on the upper peripheral surface of the lower electrode 421. The edge ring 423 is positioned on the upper peripheral surface of the lower electrode 421 so as to surround the electrostatic chuck 422 and the substrate W. The edge ring 423 is an example of a consumable part.

[0028] Through holes are formed in the bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422 for passing the lift pin 47 through. The lift pin 47 is raised and lowered by the drive unit 470 when loading and unloading the substrate W. This allows the unprocessed substrate W loaded into the chamber 41 to be received from the robot arm 310 and placed on the electrostatic chuck 422, and the processed substrate W to be passed to the robot arm 310 and unloaded from the chamber 41.

[0029] The upper electrode showerhead assembly 43 is configured to supply one or more types of gas from the gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode showerhead assembly 43 comprises an electrode support unit 43d and an upper electrode 43e. The upper electrode 43e is fixed to the electrode support unit 43d by a fixing member 43f such as a screw. The electrode support unit 43d has a gas inlet 43a and a gas diffusion chamber 43b, and the gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication via the gas inlet 43a.

[0030] Multiple gas outlets 43c are formed in the electrode support portion 43d and the upper electrode 43e, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication via the multiple gas outlets 43c. In this embodiment, the upper electrode showerhead assembly 43 is configured to supply one or more types of gas from the gas inlet 43a into the processing space 41s via the gas diffusion chamber 43b and the multiple gas outlets 43c.

[0031] The gas supply unit 44 includes a plurality of gas sources 440a to 440c, a plurality of flow controllers 441a to 441c, and a plurality of valves 442a to 442c. Gas source 440a is, for example, a source for processing gas, gas source 440b is, for example, a source for cleaning gas, and gas source 440c is, for example, a source for inert gas. In this embodiment, the inert gas is, for example, nitrogen gas. The flow controllers 441a to 441c may include, for example, a mass flow controller or a pressure-controlled flow controller. The gas supply unit 44 may also include one or more flow modulation devices that modulate or pulse the flow rate of one or more processing gases.

[0032] The RF power supply unit 45 is configured to supply RF power, for example, one or more RF signals, to one or more electrodes, such as the lower electrode 421, the upper electrode showerhead assembly 43, or both the lower electrode 421 and the upper electrode showerhead assembly 43. In this embodiment, the RF power supply unit 45 includes two RF generation units 450a, 450b, and two matching circuits 451a, 451b. In this embodiment, the RF power supply unit 45 is configured to supply a first RF signal from the RF generation unit 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum encompasses a portion of the electromagnetic spectrum in the range of 3 Hz to 3000 GHz. With respect to electronic material processes such as semiconductor processes, the frequency of the RF spectrum used for plasma generation is preferably in the range of 100 kHz to 3 GHz, more preferably in the range of 200 kHz to 150 MHz. For example, the frequency of the first RF signal may be in the range of 27 MHz to 100 MHz.

[0033] Furthermore, in this embodiment, the RF power supply unit 45 is configured to supply a second RF signal from the RF generation unit 450b to the lower electrode 421 via the matching circuit 451b. For example, the frequency of the second RF signal may be within the range of 400 [kHz] to 13.56 [MHz]. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generation unit instead of the RF generation unit 450b.

[0034] Furthermore, although not shown in the figures, other embodiments are considered. For example, in the RF power supply unit 45 of an alternative embodiment, an RF generation unit may be configured to supply a first RF signal to the lower electrode 421, and another RF generation unit may be configured to supply a second RF signal to the lower electrode 421. Another RF generation unit may be configured to supply a third RF signal to the upper electrode showerhead assembly 43. In addition, in other alternative embodiments, a DC voltage may be applied to the upper electrode showerhead assembly 43. Furthermore, in various embodiments, the amplitude of one or more RF signals (i.e., a first RF signal, a second RF signal, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of the RF signal between an ON state and an OFF state, or between a plurality of different ON states. Phase matching of the RF signals may also be controlled, and the phase matching of the amplitude modulation of multiple RF signals may be synchronous or asynchronous.

[0035] The exhaust system 46 is connected to an exhaust port 41e located, for example, at the bottom of the chamber 41. The exhaust system 46 may include a vacuum pump such as a pressure valve, a turbomolecular pump, a roughing pump, or a combination thereof.

[0036] [Parts replacement device 50] Figure 3 is a schematic cross-sectional view showing an example of a parts replacement device 50. Figure 4 is a diagram showing an example of cross-section AA of the parts replacement device 50 illustrated in Figure 3. The parts replacement device 50 has an upper container 510, a lower container 511, and a moving mechanism 56. The upper container 510 is provided with an opening 512a connected to a processing device 40 and a gate valve 513a for opening and closing the opening 512a. The upper container 510 is also provided with an opening 512b connected to a parts storage device 60, as shown in Figure 4, for example, and a gate valve 513a for opening and closing the opening 512b. The upper container 510 is also provided with an opening 512c connected to a jig storage device 70 and a gate valve 513c for opening and closing the opening 512c. The opening 512a is an example of a first parts transport port, and the gate valve 513a is an example of a first gate valve. Furthermore, the opening 512b is an example of a second parts transport port, and the gate valve 513b is an example of a second gate valve.

[0037] The upper container 510 is equipped with an operating robot 52a, an operating robot 52b, and a transport robot 53. In the following, when referring to operating robots 52a and 52b collectively without distinction, they will be referred to as operating robot 52.

[0038] The operating robot 52a has an operating arm 520a, and the operating robot 52b has an operating arm 520b. End effectors are attached to the tips of the operating arms 520a and 520b. The operating robots 52a and 52b perform tasks such as sensing within the processing unit 40, removing consumable parts, and installing consumable parts using the end effectors attached to the tips of the operating arms 520a and 520b.

[0039] The transport robot 53 has a transport arm 530. A holding member for holding consumable parts is attached to the tip of the transport arm 530. The transport robot 53 uses the holding member attached to the tip of the transport arm 530 to hold the consumable parts removed by the operating robot 52. The transport robot 53 then unloads the held consumable parts from the processing device 40 and stores the unloaded consumable parts in the parts storage device 60. The transport robot 53 also uses the holding member attached to the tip of the transport arm 530 to unload unused consumable parts from the parts storage device 60. The transport robot 53 then loads the unloaded consumable parts unloaded from the parts storage device 60 into the processing device 40. The unloaded consumable parts loaded into the processing device 40 are attached to the processing device 40 by end effectors attached to the tips of the operating arms 520a and 520b.

[0040] The lower container 511 houses an exhaust device 554, a gas supply device 556, a communication unit 557, a control unit 558, and a storage unit 559. The communication unit 557 is, for example, a wireless communication circuit, which communicates wirelessly with the control device 20, the parts storage device 60, and the jig storage device 70. A sensor 551 is provided on the outer wall of the parts replacement device 50. The sensor 551 senses the area around the parts replacement device 50 and outputs the sensing results to the control unit 558. In this embodiment, the sensor 551 is, for example, an image sensor, which outputs an image of the area around the parts replacement device 50 to the control unit 558. Sensor 551 is an example of a first sensor.

[0041] The exhaust device 554 is connected to the space inside the upper container 510 via a valve 552. The exhaust device 554 draws gas from inside the upper container 510 via the valve 552 and discharges the drawn gas to the outside of the parts replacement device 50. This allows the inside of the upper container 510 to be reduced to a predetermined vacuum level.

[0042] Furthermore, the exhaust device 554 is connected to the opening 512a via valve 553a and piping 550a. After the parts replacement device 50 and the processing device 40 are connected, the exhaust device 554 exhausts the air from the connection between the parts replacement device 50 and the processing device 40 via piping 550a and valve 553a. This allows the connection between the parts replacement device 50 and the processing device 40 to be reduced to a predetermined vacuum level before the gate valve 513a is opened.

[0043] Figures 5 and 6 are enlarged cross-sectional views showing an example of the connection between the processing unit 40 and the parts replacement device 50. A protrusion 410 is provided on the side of the chamber 41 of the processing unit 40 that is connected to the parts replacement device 50. A recess 514 corresponding to the shape of the protrusion 410 is provided on the side of the parts replacement device 50 that is connected to the processing unit 40. The protrusion 410 and the recess 514 support the alignment of the processing unit 40 and the parts replacement device 50 by fitting together, for example as shown in Figure 6, when the processing unit 40 and the parts replacement device 50 are connected.

[0044] Furthermore, a sealing member 515, such as an O-ring, is positioned on the side of the parts replacement device 50 so as to surround the opening 512a. This enhances the airtightness of the space 90 enclosed by the chamber 41, gate valve 401, opening 512a, and gate valve 513a. After the processing device 40 and the parts replacement device 50 are connected, the gas in the space 90 is exhausted via the piping 550a, thereby reducing the pressure inside the space 90 to a predetermined vacuum level. This reduction in pressure inside the space 90 strengthens the connection between the processing device 40 and the parts replacement device 50. When the connection between the processing device 40 and the parts replacement device 50 is disconnected, a valve (not shown) connected to the piping 550a is opened, returning the pressure inside the space 90 to atmospheric pressure.

[0045] Returning to Figure 4, the explanation continues. The exhaust device 554 is connected to the opening 512b via valve 553b and piping 550b. After the parts replacement device 50 and the parts storage device 60 are connected, the exhaust device 554 exhausts the air from the connection between the parts replacement device 50 and the parts storage device 60 via piping 550b and valve 553b. This allows the connection between the parts replacement device 50 and the parts storage device 60 to be reduced to a predetermined vacuum level before the gate valve 513b is opened. The connection between the parts replacement device 50 and the parts storage device 60 is also provided with recesses and protrusions as illustrated in Figures 5 and 6, and these recesses and protrusions support the alignment of the parts replacement device 50 and the parts storage device 60.

[0046] Furthermore, the exhaust device 554 is connected to the opening 512c via a valve 553c and a pipe 550c, as shown in Figure 4, for example. After the parts replacement device 50 and the jig housing device 70 are connected, the exhaust device 554 exhausts the air from the connection between the parts replacement device 50 and the jig housing device 70 via the pipe 550c and valve 553c. This allows the connection between the parts replacement device 50 and the jig housing device 70 to be depressurized to a predetermined degree before the gate valve 513c is opened. The connection between the parts replacement device 50 and the jig housing device 70 is also provided with recesses and protrusions as illustrated in Figures 5 and 6, and these recesses and protrusions support the alignment of the parts replacement device 50 and the jig housing device 70.

[0047] A gas supply device 556 is connected to the upper container 510 via a valve 555. The gas supply device 556 supplies an inert gas, such as nitrogen gas, into the upper container 510 via the valve 555. The control unit 558 controls the valve 555 to supply gas into the upper container 510, thereby maintaining a pressure higher than the pressure inside the processing device 40. This prevents particles from the processing device 40 from entering the upper container 510. The valve 555 is an example of a pressure adjustment mechanism.

[0048] In addition, an inert gas may be supplied to the connection between the parts replacement device 50 and the processing device 40. This creates a gas flow from the connection between the parts replacement device 50 and the processing device 40 into the processing device 40, and a gas flow from the connection between the parts replacement device 50 and the processing device 40 into the parts replacement device 50. This suppresses the entry of particles in the processing device 40 into the upper container 510, and also suppresses the entry of particles in the upper container 510 into the processing device 40. The opening and closing of valves 552, 553a to 553c, and 555 are controlled by the control unit 558.

[0049] The memory unit 559 is a ROM (Read Only Memory), HDD (Hard Disk Drive), or SSD (Solid State Drive), and stores data and programs used by the control unit 558. The control unit 558 is a processor such as a CPU (Central Processing Unit) or DSP (Digital Signal Processor), and controls each part of the parts replacement device 50 by reading and executing programs in the memory unit 559.

[0050] The control unit 558 moves the parts replacement device 50 to the position of the processing unit 40 instructed by the control device 20 by controlling the moving mechanism 56 using, for example, the sensing results from the sensor 551. The control unit 558 is an example of a first control unit, and the moving mechanism 56 is an example of a first moving mechanism.

[0051] The mobile mechanism 56 has a main body 560 and wheels 561. The main body 560 is equipped with a power source such as a battery, a steering mechanism, etc. The wheels 561 are rotated by the power source in the main body 560 and move the parts replacement device 50 in a direction controlled by the steering mechanism in the main body 560. The mobile mechanism 56 may move the parts replacement device 50 by means other than the wheels 561, such as a walking type, as long as it can move the parts replacement device 50.

[0052] [Component housing device 60] Figure 7 is a schematic cross-sectional view showing an example of a parts storage device 60. The parts storage device 60 has an upper container 610, a lower container 611, and a moving mechanism 66. The upper container 610 is provided with an opening 612 connected to a parts replacement device 50 and a gate valve 613 for opening and closing the opening 612. A stage 63 and a drive unit 64 are provided inside the upper container 610. A cassette 62 containing multiple consumable parts 80 arranged vertically before use is placed on the stage 63. Space is provided inside the cassette 62 to accommodate at least one used consumable part 80. In this embodiment, multiple types of consumable parts 80 are stored inside the cassette 62. Consumable parts 80 are, for example, edge rings 423 and upper electrodes 43e.

[0053] The stage 63 is raised and lowered by the drive unit 64. This allows the transport robot 53 in the parts exchange device 50 connected to the parts storage device 60 to remove unused consumable parts 80 from the cassette 62 through the opening 612 and store used consumable parts 80 in the cassette 62. When all the consumable parts 80 in the cassette 62 have become used consumable parts 80, the cassette 62 is replaced with a cassette 62 containing unused consumable parts 80.

[0054] The lower container 611 contains an exhaust device 652, a gas supply device 654, a communication unit 655, a control unit 656, and a storage unit 657. The communication unit 655 is, for example, a wireless communication circuit and communicates wirelessly with the control device 20 and the parts replacement device 50. A sensor 650 is provided on the outer wall of the parts storage device 60. The sensor 650 senses the area around the parts storage device 60 and outputs the sensing results to the control unit 656. In this embodiment, the sensor 650 is, for example, an image sensor and outputs an image of the area around the parts storage device 60 to the control unit 656. Sensor 650 is an example of a second sensor.

[0055] The exhaust device 652 is connected to the space inside the upper container 610 via a valve 651. The exhaust device 652 draws gas from inside the upper container 610 via the valve 651 and discharges the drawn gas to the outside of the component housing device 60. This allows the inside of the upper container 610 to be reduced to a predetermined vacuum level.

[0056] The gas supply device 654 is connected to the upper container 610 via a valve 653. The gas supply device 654 supplies an inert gas, such as nitrogen gas, into the upper container 610 via the valve 653. By supplying gas into the upper container 610, the pressure inside the upper container 610 can be maintained at a higher pressure than the pressure inside the upper container 510 of the parts replacement device 50. This prevents particles from entering the upper container 610 of the parts replacement device 50.

[0057] In addition, an inert gas may be supplied to the connection between the parts storage device 60 and the parts replacement device 50. This creates a gas flow from the connection between the parts storage device 60 and the parts replacement device 50 into the upper container 610, and a gas flow from the connection between the parts storage device 60 and the parts replacement device 50 into the upper container 510. This suppresses the entry of particles from the parts replacement device 50 into the upper container 610, and also suppresses the entry of particles from the upper container 610 into the upper container 510. The opening and closing of valves 651 and 653 are controlled by the control unit 656.

[0058] The storage unit 657 is a ROM, HDD, or SSD, and stores data and programs used by the control unit 656. The control unit 656 is a processor, such as a CPU or DSP, and controls each part of the component housing device 60 by reading and executing programs in the storage unit 657.

[0059] The control unit 656 moves the parts storage device 60 to the position of the parts replacement device 50 connected to the processing unit 40, as instructed by the control device 20, by controlling the moving mechanism 66 using, for example, the sensing results from the sensor 650. The control unit 656 is an example of a second control unit, and the moving mechanism 66 is an example of a second moving mechanism.

[0060] The moving mechanism 66 has a main body 660 and wheels 661. The main body 660 is equipped with a power source such as a battery, a steering mechanism, etc. The wheels 661 are rotated by the power source in the main body 660 and move the parts storage device 60 in a direction controlled by the steering mechanism in the main body 660. The moving mechanism 66 may move the parts storage device 60 by means other than the wheels 661, such as a walking type, as long as it can move the parts storage device 60.

[0061] [Jig housing device 70] Figure 8 is a schematic cross-sectional view showing an example of a jig housing device 70. The jig housing device 70 has an upper container 710, a lower container 711, and a moving mechanism 76. The upper container 710 is provided with an opening 712 connected to a parts exchange device 50 and a gate valve 713 for opening and closing the opening 712. A stage 73 and a drive unit 74 are provided inside the upper container 710. A cassette 72 containing multiple end effectors 81 and multiple holding members 82 arranged vertically is placed on the stage 73.

[0062] The stage 73 is raised and lowered by the drive unit 74. This allows the operating robot 52 in the parts exchange device 50 connected to the jig housing device 70 to attach the end effector 81 in the cassette 72 to the tip of the operating arm 520a through the opening 712. The transport robot 53 can also attach the holding member 82 in the cassette 72 to the tip of the transport arm 530 through the opening 712.

[0063] The lower container 711 houses an exhaust device 752, a gas supply device 754, a communication unit 755, a control unit 756, and a storage unit 757. The communication unit 755 is, for example, a wireless communication circuit and communicates wirelessly with the control device 20 and the parts replacement device 50. A sensor 750 is provided on the outer wall of the jig housing device 70. The sensor 750 senses the area around the jig housing device 70 and outputs the sensing results to the control unit 756. In this embodiment, the sensor 750 is, for example, an image sensor and outputs an image of the area around the jig housing device 70 to the control unit 756.

[0064] The exhaust device 752 is connected to the space inside the upper container 710 via a valve 751. The exhaust device 752 draws gas from inside the upper container 710 via the valve 751 and discharges the drawn gas to the outside of the jig housing device 70. This allows the inside of the upper container 710 to be reduced to a predetermined vacuum level.

[0065] The gas supply device 754 is connected to the upper container 710 via a valve 753. The gas supply device 754 supplies an inert gas, such as nitrogen gas, into the upper container 710 via the valve 753. By supplying gas into the upper container 710, the pressure inside the upper container 710 can be maintained at a higher pressure than the pressure inside the upper container 510 of the parts replacement device 50. This prevents particles from entering the upper container 710 from the upper container 510.

[0066] In addition, an inert gas may be supplied to the connection between the jig housing device 70 and the parts replacement device 50. This creates a gas flow from the connection between the jig housing device 70 and the parts replacement device 50 into the upper container 710, and a gas flow from the connection between the jig housing device 70 and the parts replacement device 50 into the upper container 510. This suppresses the entry of particles from the parts replacement device 50 into the upper container 710, and also suppresses the entry of particles from the upper container 710 into the upper container 510. The opening and closing of valves 751 and 753 are controlled by the control unit 756.

[0067] The storage unit 757 is a ROM, HDD, or SSD, and stores data and programs used by the control unit 756. The control unit 756 is a processor such as a CPU or DSP, and controls each part of the jig housing device 70 by reading and executing programs in the storage unit 757.

[0068] The control unit 756 moves the jig housing device 70 to the position of the parts replacement device 50 connected to the processing unit 40, as instructed by the control device 20, by controlling the moving mechanism 76 using, for example, the sensing results from the sensor 750.

[0069] The moving mechanism 76 has a main body 760 and wheels 761. The main body 760 is equipped with a power source such as a battery, a steering mechanism, etc. The wheels 761 are rotated by the power source in the main body 760 and move the jig housing device 70 in a direction controlled by the steering mechanism in the main body 760. The moving mechanism 76 may move the jig housing device 70 by means other than the wheels 761, such as a walking type, as long as it can move the jig housing device 70.

[0070] [Replacement procedure for consumable part 80] Next, the procedure for replacing the consumable part 80 will be explained with reference to Figures 9 to 18.

[0071] First, the parts replacement device 50, the parts storage device 60, and the jig storage device 70 move to the position of the processing device 40 that has the consumable parts 80 to be replaced, in accordance with the instructions of the control device 20. Then, the parts replacement device 50 is connected to the processing device 40 that has the consumable parts 80 to be replaced, and the parts storage device 60 and the jig storage device 70 are connected to the parts replacement device 50. Then, the processing device 40, the parts replacement device 50, the parts storage device 60, and the jig storage device 70 each adjust their internal pressure and open their gate valves.

[0072] Then, as shown in Figure 9, for example, sensing end effectors 81 are attached to the tips of the operating arm 520a of the operating robot 52a and the operating arm 520b of the operating robot 52b. The sensing end effectors 81 are, for example, image sensors or distance sensors. Used consumable parts 80 (edge ​​rings 423 in the example of Figure 9) are installed inside the processing unit 40, and unused consumable parts 80 (edge ​​rings 423' in the example of Figure 9) are stored inside the cassette 62 of the parts storage device 60.

[0073] Next, the operating robots 52a and 52b sense the used edge ring 423 in the processing unit 40 using an end effector 81 such as an image sensor, as shown in Figure 10, for example. The sensing results are output to the control unit 558 in the parts replacement device 50. Based on the sensing results, the control unit 558 determines whether or not the edge ring 423 can be replaced by the operating robots 52a and 52b. If it is determined that the edge ring 423 cannot be replaced by the operating robots 52a and 52b, the control unit 558 notifies the operator of the manufacturing system 10 of this. For example, if a large amount of reaction by-products (so-called deposits) are attached to the edge ring 423, or if the edge ring 423 is deformed, the control unit 558 will determine that the edge ring 423 cannot be replaced by the operating robots 52a and 52b. The control unit 558 is an example of a determination unit.

[0074] If it is determined that the edge ring 423 can be replaced, an end effector 81 for removing the edge ring 423 is attached to the tip of the operating arm 520a and the operating arm 520b, for example, as shown in Figure 11. In addition, a retaining member 82 for holding the edge ring 423 is attached to the tip of the transport arm 530 of the transport robot 53.

[0075] Next, as shown in Figure 12, for example, the tips of the operating arms 520a and 520b enter the processing apparatus 40, and the edge ring 423 inside the processing apparatus 40 is removed by the operating arms 520a and 520b. When the edge ring 423 is removed, as shown in Figure 13, for example, the edge ring 423 is gripped by the end effector 81 at the tip of the operating arm 520a and the end effector 81 at the tip of the operating arm 520b. Then, as the operating arms 520a and 520b rise, the edge ring 423 is lifted and removed from the lower electrode 421.

[0076] Then, as shown in Figure 14, for example, a holding member 82 attached to the tip of the transport arm 530 is inserted between the lifted edge ring 423 and the lower electrode 421. Then, as the operating arms 520a and 520b descend, the edge ring 423 is placed on the holding member 82. Then, as shown in Figure 15, for example, the end effectors 81 at the tips of the operating arms 520a and 520b are separated from the edge ring 423.

[0077] Next, the transport robot 53 places the used edge ring 423 on the holding member 82 into the cassette 62 of the parts storage device 60, for example, as shown in Figure 16. Then, the transport robot 53 removes the unused edge ring 423' from the cassette 62 and transports it into the processing device 40, for example, as shown in Figure 17. Before the unused edge ring 423' is removed from the cassette 62, the end effectors 81 at the tips of the operating arms 520a and 520b, and the holding member 82 at the tip of the transport arm 530 may be cleaned. This prevents deposits and other particles detached from the used edge ring 423 from becoming particles and adhering to the unused edge ring 423 via the end effectors 81 or the holding member 82. Cleaning can be done by, for example, gas purging by spraying an inert gas.

[0078] Then, the edge ring 423 is sandwiched between the end effector 81 at the tip of the operating arm 520a and the end effector 81 at the tip of the operating arm 520b. As the operating arms 520a and 520b rise, the edge ring 423 is lifted from the holding member 82 at the tip of the transport arm 530. The holding member 82 then retracts from between the lifted edge ring 423' and the lower electrode 421, and as the operating arms 520a and 520b descend, the edge ring 423 is attached to the lower electrode 421.

[0079] Then, as shown in Figure 18, for example, the end effector 81 at the tip of the operating arm 520a and the end effector 81 at the tip of the operating arm 520b are separated from the edge ring 423. The end effectors 81 and the retaining members 82 are then returned to the cassette 72. The gate valves of the processing unit 40, the parts replacement device 50, the parts storage device 60, and the jig storage device 70 are then closed. Finally, the connections between the processing unit 40 and the parts replacement device 50, the parts replacement device 50 and the parts storage device 60, and the parts replacement device 50 and the jig storage device 70 are released.

[0080] When the upper electrode 43e is replaced as a consumable part 80, first, a holding member 82 attached to the tip of the transport arm 530 is inserted below the upper electrode 43e. Then, as the transport arm 530 rises, the holding member 82 comes into contact with the lower surface of the upper electrode 43e. Then, the fixing members 43f, such as screws, are removed by the end effectors 81 attached to the tips of the operating arms 520a and 520b. As a result, the upper electrode 43e is carried out of the processing device 40 by the transport arm 530 via the holding member 82 and stored in the parts storage device 60.

[0081] Then, the unused upper electrode 43e is unloaded from the parts storage device 60 and brought into the processing device 40, and transported to the position on the lower surface of the electrode support portion 43d. The fixing member 43f is then attached by the end effector 81 mounted on the tips of the operating arm 520a and the operating arm 520b, thereby fixing the upper electrode 43e to the electrode support portion 43d. In this way, the upper electrode 43e is replaced.

[0082] [Configuration of the control device 20] Figure 19 is a block diagram showing an example of a control device 20. The control device 20 comprises a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit, and communicates wirelessly with the component replacement device 50, the component storage device 60, and the jig storage device 70 via an antenna 25. The wired communication unit 24 is, for example, a NIC (Network Interface Card), and communicates with each of the processing groups 30. The control device 20 may also communicate wirelessly with each of the processing groups 30.

[0083] The storage unit 21 is a ROM, HDD, or SSD, and stores data and programs used by the control unit 22. A management table 210, such as the one shown in Figure 20, is stored within the storage unit 21.

[0084] Figure 20 shows an example of the management table 210. The management table 210 stores an individual table 212 for each processing unit ID 211 that identifies each processing unit 40. The individual table 212 stores the part ID, replacement date and time, RF cumulative time, and next replacement date. The part ID is information that identifies each consumable part 80. The replacement date and time is the date and time when the consumable part 80 was replaced. The RF cumulative time is information that indicates the cumulative time of processing performed by the processing unit 40 using RF signals. The next replacement date is the date and time when the consumable part 80 will be replaced next.

[0085] The control unit 22 is, for example, a processor such as a CPU or DSP, and controls the entire control device 20 by reading and executing programs in the storage unit 21.

[0086] [Processing by the control device 20] Figures 21 and 22 are flowcharts illustrating an example of the processing performed by the control device 20. Figure 21 illustrates an example of the processing performed by the control device 20 when selecting a parts replacement device 50, parts storage devices 60, and 70 to be moved to the location of the processing device 40 that has the consumable parts 80 to be replaced. Figure 22 illustrates an example of the processing performed by the control device 20 after moving the parts replacement device 50, parts storage devices 60, and 70 to the location of the processing device 40 that has the consumable parts 80 to be replaced. The processing illustrated in Figures 21 and 22 is achieved by the control unit 22 of the control device 20 executing a program read from the storage unit 21. Figure 22 illustrates the processing between the control device 20 and one processing device 40 and one parts replacement device 50.

[0087] In the process illustrated in Figure 21, first, the control unit 22 determines whether or not there are any consumable parts 80 that will need to be replaced within a predetermined time from the current time (S100). The control unit 22 determines whether or not there are any consumable parts 80 that will need to be replaced within a predetermined time from the current time by referring to, for example, the "Next Replacement Time" column in the management table 210. If there are no consumable parts 80 that will need to be replaced within a predetermined time from the current time (S100: No), the control unit 22 executes the process shown in step S100 again.

[0088] On the other hand, if there are consumable parts 80 that will need replacing within a predetermined time from the current time (S100), the control unit 22 identifies the parts replacement device 50, parts storage device 60, and jig storage device 70 that are not currently assigned replacement work. The control unit 22 then instructs the identified parts replacement device 50, parts storage device 60, and jig storage device 70 to move to the location of the processing device 40 that has the consumable parts 80 that will need replacing within a predetermined time (S101). The control unit 22 then executes the process shown in step S100 again.

[0089] In the process illustrated in Figure 22, first, the control unit 22 determines whether or not processing using RF power has been performed in the processing unit 40 (S200). If processing using RF power has not been performed (S200: No), the control unit 22 executes the process shown in step S200 again.

[0090] On the other hand, if processing using RF power is performed (S200: Yes), the control unit 22 updates all "RF cumulative time" in the management table 210 within the individual table 212 corresponding to the processing unit ID 211 of the processing unit 40 that performed processing using RF power. Then, the control unit 22 estimates the "next replacement time" for all consumable parts 80 in the individual table 212 whose "RF cumulative time" has been updated, and updates the "next replacement time" for all consumable parts 80 in the individual table 212 with the estimated "next replacement time" (S201). As a result, the "next replacement time" corresponding to each consumable part 80 is updated according to the actual processing time using RF power.

[0091] Next, the control unit 22 determines, based on the updated "next replacement time," whether the processing of the last batch of consumable parts 80 prior to the replacement time has been completed (S202). If the processing device 40 has not completed processing of the last batch of consumable parts 80 prior to the replacement time (S202: No), the control unit 22 executes the process shown in step S200 again.

[0092] On the other hand, when the processing unit 40 has finished processing the last batch of consumable parts 80 before the replacement time (S202: Yes), the control unit 22 instructs the processing unit 40 to prepare for the replacement of consumable parts 80 (S203). Preparation for the replacement of consumable parts 80 involves processes such as exhausting the processing gas from the chamber 41, cleaning the chamber 41, and adjusting the pressure inside the chamber 41.

[0093] Next, the control unit 22 determines whether or not it has received a connection notification from the parts replacement device 50 (S204). The parts replacement device 50 has started moving to the location of the processing device 40 having the consumable parts 80 to be replaced, as illustrated in Figure 21. If the control unit 22 has not received a connection notification from the parts replacement device 50 (S204: No), it executes the process shown in step S204 again.

[0094] On the other hand, if the control unit 22 receives a connection notification from the parts replacement device 50 (S204: Yes), the control unit 22 instructs the parts replacement device 50 to exhaust the gas in the space 90 at the connection point between the processing device 40 and the parts replacement device 50 (S205). The control unit 558 of the parts replacement device 50 controls the valve 553a and the exhaust device 554a to exhaust the gas in the space 90 at the connection point between the processing device 40 and the parts replacement device 50.

[0095] Next, the control unit 22 determines, based on the measurement values ​​from the sensors in the processing unit 4, whether the pressure P inside the processing unit 40 has reached a predetermined pressure P1 (S206). If the pressure P inside the processing unit 40 is not at pressure P1 (S206: No), the control unit 22 executes the process shown in step S206 again.

[0096] If the pressure P inside the processing unit 40 becomes pressure P1 (S206: Yes), the control unit 22 sends a gate open request to the parts replacement device 50 requesting it to open the gate valve 513a (S207). The control unit 22 then determines whether or not it has received a gate open notification from the parts replacement device 50 indicating that the opening of the gate valve 513a has been completed (S208). If it has not received a gate open notification (S208: No), the control unit 22 executes the process shown in step S208 again.

[0097] On the other hand, if a gate open notification is received (S208: Yes), the control unit 22 controls the processing unit 40 to open the gate valve 401 (S209). Then, the control unit 22 sends a replacement start instruction to the parts replacement device 50 to instruct the start of replacing the consumable parts 80 (S210).

[0098] Furthermore, after the instruction to start replacement is transmitted in step S210, the replacement of the consumable parts 80 is started by the parts replacement device 50. At this time, the control unit 22 may control the processing device 40 to clean the inside of the chamber 41 between the time the used consumable parts 80 are removed and the time the unused consumable parts 80 are brought in. This makes it possible to remove any deposits that have peeled off from the consumable parts 80 and fallen into the chamber 41 when the used consumable parts 80 are removed, before the unused consumable parts 80 are brought in.

[0099] Next, the control unit 22 determines whether or not it has received a replacement completion notification from the parts replacement device 50 indicating that the replacement of the consumable parts 80 has been completed (S211). If it has not received a replacement completion notification from the parts replacement device 50 (S211: No), the control unit 22 executes the process shown in step S211 again.

[0100] On the other hand, if the control unit 22 receives a notification of completion of replacement from the parts replacement device 50 (S211: Yes), the control unit 22 controls the processing device 40 to close the gate valve 401 (S212). The control unit 22 then sends a replacement confirmation notification to the parts replacement device 50 (S213). The control unit 22 then instructs the parts replacement device 50 to stop the exhaust of gas from the space 90 at the connection point between the processing device 40 and the parts replacement device 50 (S214). The control unit 558 of the parts replacement device 50 controls the valve 553a and the exhaust device 554a to stop the exhaust of gas from the space 90 at the connection point between the processing device 40 and the parts replacement device 50, and returns the space 90 to atmospheric pressure.

[0101] Next, the control unit 22 deletes the record containing the "part ID" of the replaced used consumable part 80 in the individual table 212 within the management table 210. Then, the control unit 22 creates a new record in the management table 210 containing the "part ID" of the used consumable part 80 and the replaced pre-use consumable part 80 (S215). In the newly created record, the current date and time are registered in the "exchange date and time" column, and 0 is registered in the "RF cumulative time" column.

[0102] The control unit 22 then estimates the replacement time for the unused consumable part 80 that has been replaced, and registers the estimated replacement time in the "next RF cumulative time" of the newly created record (S216). The control unit 22 then executes the process shown in step S200 again.

[0103] [Processing by parts replacement device 50] Figures 23 and 24 are flowcharts illustrating an example of the processing performed by the parts replacement device 50. For example, when the parts replacement device 50 is instructed by the control device 20 to move to the location of the processing device 40 having the consumable parts 80 to be replaced, and begins moving to the location of the processing device 40, it starts the processing illustrated in Figures 23 and 24. The processing illustrated in Figures 23 and 24 is realized by the control unit 558 executing a program read from the storage unit 559.

[0104] First, the control unit 558 starts adjusting the pressure inside the upper container 510 by controlling the valve 552 and the exhaust device 554 to start exhausting the gas inside the upper container 510 (S300). Then, the control unit 558 determines whether or not the parts replacement device 50 is connected to the processing device 40 based on the sensing result from the sensor 551 (S301). If the parts replacement device 50 is not connected to the processing device 40 (S301: No), the control unit 558 executes the process shown in step S301 again.

[0105] On the other hand, if the parts replacement device 50 is connected to the processing device 40 (S301: Yes), the control unit 558 determines whether the parts replacement device 50 is connected to the parts storage device 60 and the jig storage device 70 (S302). The control unit 558 determines whether the parts replacement device 50 is connected to the parts storage device 60 and the jig storage device 70 by, for example, determining whether it has received a connection notification from the parts storage device 60 and the jig storage device 70 indicating that they are connected to the parts replacement device 50. If the parts replacement device 50 is not connected to the parts storage device 60 and the jig storage device 70 (S302: No), the control unit 558 again executes the process shown in step S302.

[0106] On the other hand, when the parts replacement device 50 is connected to the parts storage device 60 and the jig storage device 70 (S302: Yes), the control unit 558 controls the valve 555 and the gas supply device 556 to supply inert gas into the upper container 510. The control unit 558 then determines whether the pressure P inside the upper container 510 has reached a predetermined pressure P2 (S303). In this embodiment, pressure P2 is higher than the pressure P1 inside the processing device 40, which is adjusted when the consumable parts 80 are replaced. If the pressure P inside the upper container 510 is not at pressure P2 (S303: No), the control unit 558 again executes the process shown in step S303.

[0107] On the other hand, when the pressure P in the upper container 510 becomes pressure P2 (S303: Yes), the control unit 558 opens the gate valve 513b between it and the parts storage device 60 and the gate valve 513c between it and the jig storage device 70 (S304). The control unit 558 then controls the operating robots 52a and 52b to insert the tips of the operating arms 520a and 520b into the cassette 72 of the jig storage device 70. The control unit 558 then attaches the sensing end effectors 81 to the tips of the operating arms 520a and 520b (S305). The control unit 558 then sends a connection notification to the control device 20 via the communication unit 557 indicating that the parts replacement device 50 has connected to the processing device 40 (S306).

[0108] Next, the control unit 558 determines whether or not it has received a gate open request from the control device 20 via the communication unit 557 (S307). If it has not received a gate open request (S307: No), the control unit 558 again executes the process shown in step S307. On the other hand, if it has received a gate open request (S307: Yes), the control unit 558 opens the gate valve 513a between the parts replacement device 50 and the processing device 40 (S308).

[0109] Next, the control unit 558 determines via the communication unit 557 whether or not it has received a replacement start instruction from the control device 20 (S309). If the replacement start instruction has not been received (S309: No), the control unit 558 again executes the process shown in step S309. On the other hand, if the replacement start instruction has been received (S309: Yes), the control unit 558 controls the operating arms 520a and 520b, which are equipped with sensing end effectors 81 at their tips, to sense the inside of the processing device 40 (S310). In step S309, information indicating the state of the consumable parts 80 inside the processing device 40 is acquired, and the reference position inside the parts replacement device 50 and the reference position inside the processing device 40 are aligned (teaching), etc.

[0110] Next, the control unit 558 determines, based on the sensing results from step S309, whether or not it is possible to replace the consumable part 80 as instructed by the control device 20 (S311). If it is determined that it is not possible to replace the consumable part 80 due to a large amount of deposit attached to the consumable part 80 or deformation of the consumable part 80 (S311: No), the control unit 558 notifies the control device 20 of the error via the communication unit 557 (S312). Then, the process shown in this flowchart ends. If an error is notified, the control device 20 notifies the operator of the manufacturing system 10 of the error. The operator instructs the worker to replace the consumable part 80 manually. If an error is notified by the control device 20, the operator may obtain sensing results from the parts replacement device 50. The operator may then use the sensing results to remotely control the operation robot 52a, operation robot 52b, and transport robot 53 to perform the replacement of the consumable part 80.

[0111] On the other hand, if it is determined that the consumable part 80 can be replaced (S311: Yes), the control unit 558 controls the operating robots 52a and 52b to remove the sensing end effectors 81 from the tips of the operating arms 520a and 520b. The control unit 558 then attaches the end effectors 81 for attaching and removing the consumable part 80 to the tips of the operating arms 520a and 520b (S312 in Figure 24). The control unit 558 then controls the transport robot 53 to attach the holding member 82 to the tip of the transport arm 530 (S313).

[0112] Next, the control unit 558 inserts the tips of the operating arms 520a and 520b into the processing unit 40 and controls the operating arms 520a and 520b, which have end effectors 81 attached to their tips, to remove the consumable parts 80 after use (S313).

[0113] Next, the control unit 558 controls the transport robot 53 to insert the holding member 82 at the tip of the transport arm 530 under the consumable parts 80 removed by the operating arms 520a and 520b. Then, it controls the operating robots 52a and 52b to hold the removed consumable parts 80 in the holding member 82. Then, the control unit 558 controls the transport robot 53 to unload the used consumable parts 80 from the processing unit 40 (S315). Finally, the control unit 558 controls the transport robot 53 to store the used consumable parts 80 in the cassette 62 of the parts storage device 60.

[0114] Next, the control unit 558 controls the transport robot 53 to remove the unused consumable parts 80 from the cassette 62 of the parts storage device 60 and transport them into the processing device 40 (S316). Then, the control unit 558 controls the operating robots 52a and 52b to lift the unused consumable parts 80 held by the holding member 82. Then, the control unit 558 controls the transport robot 53 to retract the transport arm 530 from inside the processing device 40. Then, the control unit 558 controls the operating robots 52a and 52b to attach the unused consumable parts 80 (S317). Then, the control unit 558 controls the operating robots 52a and 52b to retract the operating arms 520a and 520b from inside the processing device 40.

[0115] Next, the control unit 558 closes gate valves 513a, 513b, and 513c (S318). Then, the control unit 558 controls valve 552 and exhaust device 554 to stop the exhaust of gas from the upper container 510, and controls valve 555 and gas supply device 556 to stop the supply of inert gas to the upper container 510. The control unit 558 also controls valves 553a, 553b, and 553c to stop the exhaust of gas from the connection part with the parts replacement device 50. Then, the control unit 558 sends a replacement completion notification via the communication unit 557 to the control device 20, parts storage device 60, and jig storage device 70 indicating that the replacement of the consumable parts 80 has been completed (S319). The process shown in this flowchart is then completed.

[0116] [Processing by component housing device 60] Figure 25 is a flowchart showing an example of processing by the parts storage device 60. For example, when the parts storage device 60 is instructed by the control device 20 to move to the location of the processing device 40 which has a consumable part 80 to be replaced, and starts moving to the location of the processing device 40, it starts the processing illustrated in Figure 25. The processing illustrated in Figure 25 is realized by the control unit 656 executing a program read from the storage unit 657.

[0117] First, the control unit 656 starts adjusting the pressure inside the upper container 610 by controlling the valve 651 and the exhaust device 652 to start exhausting the gas inside the upper container 610 (S400). Then, the control unit 656 determines whether the parts storage device 60 is connected to the parts replacement device 50 based on the sensing result from the sensor 650 (S401). If the parts storage device 60 is not connected to the parts replacement device 50 (S401: No), the control unit 656 executes the process shown in step S401 again.

[0118] On the other hand, if the parts storage device 60 is connected to the parts replacement device 50 (S401: Yes), the control unit 656 sends a connection notification to the parts replacement device 50 indicating that the parts storage device 60 has been connected to the parts replacement device 50 (S402). The control unit 656 then controls the valve 653 and the gas supply device 654 to supply inert gas into the upper container 610. The control unit 656 then determines whether the pressure P inside the upper container 610 has reached a predetermined pressure P3 (S403). In this embodiment, pressure P3 is higher than the pressure P2 inside the parts replacement device 50, which is adjusted when the consumable parts 80 are replaced. If the pressure P inside the upper container 610 is not at pressure P3 (S403: No), the control unit 656 again executes the process shown in step S403.

[0119] On the other hand, when the pressure P inside the upper container 610 becomes pressure P3 (S403: Yes), the control unit 656 opens the gate valve 613 (S404). Then, the control unit 656 controls the drive unit 64 in accordance with the loading of used consumable parts 80 and unloading of unused consumable parts 80 by the transport robot 53 of the parts replacement device 50, raising and lowering the cassette 62 (S405).

[0120] Next, the control unit 656 determines via the communication unit 655 whether or not it has received a replacement completion notification from the parts replacement device 50 (S406). If it has not received a replacement completion notification (S406: No), the control unit 656 executes the process shown in step S405 again. On the other hand, if it has received a replacement completion notification (S406: Yes), the control unit 656 closes the gate valve 613 (S406). Then, the control unit 656 controls the valve 651 and the exhaust device 652 to stop the exhaust of gas from the upper container 610, and controls the valve 653 and the gas supply device 654 to stop the supply of inert gas to the upper container 610. The process shown in this flowchart is then completed.

[0121] [Processing of the jig housing device 70] The operation of the jig housing device 70 can be explained using Figure 25, so the explanation will be given with reference to Figure 25. For example, when the jig housing device 70 is instructed by the control device 20 to move to the location of the processing device 40 having the consumable part 80 to be replaced, and starts moving to the location of the processing device 40, it starts the operation illustrated in Figure 25. The operation illustrated in Figure 25 is realized by the control unit 756 executing a program read from the storage unit 757.

[0122] First, the control unit 756 starts adjusting the pressure inside the upper container 710 by controlling the valve 751 and the exhaust device 752 to start exhausting the gas inside the upper container 710 (S400). Then, the control unit 756 determines whether or not the jig housing device 70 is connected to the parts replacement device 50 based on the sensing result from the sensor 750 (S401). If the jig housing device 70 is not connected to the parts replacement device 50 (S401: No), the control unit 756 executes the process shown in step S401 again.

[0123] On the other hand, if the jig housing device 70 is connected to the parts replacement device 50 (S401: Yes), the control unit 756 sends a connection notification to the parts replacement device 50 indicating that the jig housing device 70 has been connected to the parts replacement device 50 (S402). The control unit 756 then controls the valve 753 and the gas supply device 754 to supply inert gas into the upper container 710. The control unit 756 then determines whether the pressure P inside the upper container 710 has reached a predetermined pressure P3 (S403). If the pressure P inside the upper container 710 is not at pressure P3 (S403: No), the control unit 756 again executes the process shown in step S403.

[0124] On the other hand, when the pressure P inside the upper container 710 becomes pressure P3 (S403: Yes), the control unit 756 opens the gate valve 713 (S404). Then, the control unit 756 controls the drive unit 74 in accordance with the movement of the end effector 81 and holding member 82 by the transport robot 53 of the parts replacement device 50, raising and lowering the cassette 72 (S405).

[0125] Next, the control unit 756 determines via the communication unit 755 whether or not it has received a replacement completion notification from the parts replacement device 50 (S406). If it has not received a replacement completion notification (S406: No), the control unit 756 executes the process shown in step S405 again. On the other hand, if it has received a replacement completion notification (S406: Yes), the control unit 756 closes the gate valve 713 (S406). Then, the control unit 756 controls the valve 751 and the exhaust device 752 to stop the exhaust of gas from the upper container 710, and controls the valve 753 and the gas supply device 754 to stop the supply of inert gas to the upper container 710. The process shown in this flowchart is then completed.

[0126] One embodiment has been described above. As described above, this embodiment is a manufacturing system 10 for replacing consumable parts 80, and comprises a parts replacement device 50 and a parts storage device 60. The parts storage device 60 stores consumable parts 80 before use. The parts replacement device 50 is connected to the processing device 40 and the parts storage device 60, and replaces used consumable parts 80 installed in the processing device 40 with unused consumable parts 80 stored in the parts storage device 60. The parts replacement device 50 also moves to the location of the processing device 40 in which the consumable parts 80 to be replaced are installed, and connects to the processing device 40. The parts storage device 60 also moves to the location of the parts replacement device 50 connected to the processing device 40 in which the consumable parts 80 to be replaced are installed, and connects to the parts replacement device 50. This makes it possible to reduce the installation area of ​​the semiconductor device manufacturing system 10.

[0127] Furthermore, the parts replacement device 50 in the above-described embodiment includes an operating robot 52 and a transport robot 53. The transport robot 53 transports consumable parts 80 between the processing device 40 and the parts storage device 60 via the parts replacement device 50. The operating robot 52 removes used consumable parts 80 from inside the processing device 40 and places them on the transport robot 53, and installs unused consumable parts 80 that are on the transport robot 53 into the processing device 40. This makes it possible to exchange used consumable parts 80 with unused consumable parts 80.

[0128] Furthermore, the manufacturing system 10 in the above-described embodiment further includes a jig housing device 70. The jig housing device 70 houses an end effector 81 to be attached to the tip of the operating robot 52, and self-propels to the location of a parts replacement device 50 connected to a processing device 40 where the consumable parts 80 to be replaced are attached, and connects to the parts replacement device 50. The operating robot 52 takes out the end effector 81 used for replacing the consumable parts 80 to be replaced from the jig housing device 70 and attaches it, and uses the attached end effector 81 to replace the consumable parts 80 to be replaced. By changing the end effector 81 attached to the tip of the operating robot 52, it becomes possible to replace different types of consumable parts 80 with a single operating robot 52.

[0129] Furthermore, in the embodiment described above, the end effector 81 includes a sensor. The operating robot 52 senses the state inside the processing unit 40 using the sensor attached to its tip before replacing the consumable part 80. The parts replacement device 50 has a control unit 558 that determines whether or not the consumable part 80 can be replaced based on the sensing results by the operating robot 52, and if the consumable part 80 can be replaced, it causes the operating robot 52 to perform the replacement of the consumable part 80, and if the consumable part 80 cannot be replaced, it notifies the operator to that effect. This makes it possible to replace the consumable part 80.

[0130] Furthermore, in the embodiment described above, the jig housing device 70 houses the holding member 82 that is attached to the tip of the transport robot 53. The transport robot 53 takes out the holding member 82 suitable for replacing the consumable part 80 to be replaced from the jig housing device 70 and attaches it, and uses the attached holding member 82 to transport the consumable part 80 to be replaced. By replacing the holding member 82 attached to the tip of the transport robot 53, it becomes possible to replace different types of consumable parts 80 with a single transport robot 53.

[0131] Furthermore, in the above-described embodiment, the parts storage device 60 stores at least one of each of several types of unused consumable parts 80. This allows for quick replacement of the consumable parts 80.

[0132] Furthermore, the parts replacement device 50 in the above-described embodiment has a valve 555 that controls the pressure inside the parts replacement device 50. When used consumable parts 80 installed in the processing device 40 are replaced, the valve 555 controls the pressure inside the parts replacement device 50 so that the pressure inside the parts replacement device 50 becomes higher than the pressure inside the processing device 40. This prevents particles from the processing device 40 from entering the parts replacement device 50.

[0133] Furthermore, in the above-described embodiment, the parts replacement device 50 has a moving mechanism 56, a sensor 551, and a control unit 558, and the parts storage device 60 has a moving mechanism 66, a sensor 650, and a control unit 656. The moving mechanism 56 has a power source and moves the parts replacement device 50. The sensor 551 senses the area around the parts replacement device 50. The control unit 558 moves the parts replacement device 50 to the position of the processing device 40 to which the consumable parts 80 to be replaced are attached by controlling the moving mechanism 56 using the sensing results from the sensor 551. The moving mechanism 66 has a power source and moves the parts storage device 60. The sensor 650 senses the area around the parts storage device 60. The control unit 656 moves the parts storage device 60 to the position of the parts replacement device 50 connected to the processing device 40 to which the consumable parts 80 to be replaced are attached by controlling the moving mechanism 66 using the sensing results from the sensor 650. This allows the parts replacement device 50 and the parts storage device 60 to move independently.

[0134] Furthermore, the above-described embodiment is a parts replacement device 50 for replacing consumable parts 80, and comprises an opening 512a, an opening 512b, a transport robot 53, and a moving mechanism 56. The opening 512a is connected to the processing device 40 via a gate valve 513a. The opening 512b is connected via a gate valve 513b to a parts storage device 60 that houses consumable parts 80 before use. The operating robot 52 replaces the used consumable parts 80 installed in the processing device 40 with the unused consumable parts 80 stored in the parts storage device 60. The moving mechanism 56 moves the parts replacement device 50 to the position of the processing device 40 where the consumable parts 80 to be replaced are installed. In addition, the parts replacement device 50 and the parts storage device 60 can move independently of each other. This makes it possible to reduce the installation area of ​​the semiconductor device manufacturing system 10.

[0135] [others] Furthermore, the technology disclosed in this application is not limited to the embodiments described above, and numerous modifications are possible within the scope of its essence.

[0136] For example, in the embodiment described above, multiple types of consumable parts 80 are stored in the cassette 62 of the parts storage device 60, but the disclosed technology is not limited to this. In other forms, multiple units of one type of consumable part 80 may be stored in the cassette 62. Furthermore, the parts storage device 60 may be prepared for each type of consumable part 80 stored in the cassette 62. This ensures that consumable parts 80 with approximately the same replacement cycle are stored in the cassette 62, thereby suppressing the unnecessary opening of the gate valve 613 of the parts storage device 60. This also suppresses the adhesion of particles to the consumable parts 80 in the cassette 62 before use.

[0137] Furthermore, in the above-described embodiment, the operating robot 52 and transport robot 53 of the parts replacement device 50 come into contact with both the consumable parts 80 before use and the consumable parts 80 after use, but the disclosed technology is not limited to this. In other embodiments, the parts replacement device 50 may be provided with separate operating robots 52 and transport robots 53 that come into contact with the consumable parts 80 before use, and operating robots 52 and transport robots 53 that come into contact with the consumable parts 80 after use. This prevents deposits and other particles detached from the consumable parts 80 after use from becoming particles and adhering to the consumable parts 80 before use via the operating robot 52 or transport robot 53.

[0138] Furthermore, in the above-described embodiment, the cassette 62 of the parts storage device 60 contains both unused and used consumable parts 80, but the disclosed technology is not limited to this. In another embodiment, the cassette 62 may be partitioned into a space for storing unused consumable parts 80 and a space for storing used consumable parts 80. This prevents deposits and other particles detached from used consumable parts 80 from adhering to unused consumable parts 80.

[0139] Furthermore, in the embodiments described above, the parts replacement device 50, the parts storage device 60, and the jig storage device 70 begin exhausting air from within the devices after receiving instructions from the control device 20, but the disclosed technology is not limited thereto. For example, the parts replacement device 50, the parts storage device 60, and the jig storage device 70 may perform exhausting air from within the devices to a predetermined pressure P even before receiving instructions from the control device 20. This allows for a quicker start to replacing the consumable parts 80.

[0140] Furthermore, in the parts replacement device 50, parts storage device 60, and jig storage device 70 of the above-described embodiment, the gas exhausted by the exhaust device is discharged to the outside of each device, but the disclosed technology is not limited to this. For example, each device and a gas treatment device provided outside each device for treating the exhaust gas may be connected by a flexible hose, and the gas exhausted from each device may be sent to the gas treatment device. This promotes the recycling of the gas exhausted from each device.

[0141] Furthermore, in the parts replacement device 50, parts storage device 60, and jig storage device 70 of the above-described embodiment, the gas inside each device is exhausted by an exhaust device inside each device, but the disclosed technology is not limited to this. For example, each device may be connected to an exhaust device provided outside each device via a flexible hose, and the gas inside each device may be exhausted by the exhaust device. This makes it possible to miniaturize the parts replacement device 50, parts storage device 60, and jig storage device 70.

[0142] Furthermore, in the above-described embodiment, the same parts replacement device 50 is used to remove used consumable parts 80 from the processing device 40 and to load unused consumable parts 80 into the processing device 40. However, the disclosed technology is not limited to this. For example, a parts replacement device 50 for removing used consumable parts 80 from the processing device 40 and a parts replacement device 50 for loading unused consumable parts 80 into the processing device 40 may be provided separately. This prevents deposits and the like that detached from used consumable parts 80 from becoming particles and adhering to unused consumable parts 80.

[0143] In this case, the parts replacement device 50 that transports the unused consumable parts 80 into the processing device 40 may also be connected to the vacuum transport chamber 31 or the atmospheric transport chamber 33. The parts replacement device 50 connected to the vacuum transport chamber 31 passes the unused consumable parts 80 to the robot arm 310 in the vacuum transport chamber 31. The robot arm 310 transports the received unused consumable parts 80 into the processing device 40 where the consumable parts 80 need to be replaced. The parts replacement device 50 connected to the atmospheric transport chamber 33 passes the unused consumable parts 80 to the robot arm 330 in the atmospheric transport chamber 33. The robot arm 330 transports the unused consumable parts 80 into the load lock chamber 32. The unused consumable parts 80 transported into the load lock chamber 32 are then transported by the robot arm 310 in the vacuum transport chamber 31 into the processing device 40 where the consumable parts 80 need to be replaced. When the parts replacement device 50 is connected to the atmospheric transport chamber 33, it becomes unnecessary to install exhaust devices in the parts replacement device 50, the parts storage device 60, and the jig storage device 70, allowing each device to be miniaturized.

[0144] Furthermore, in each of the embodiments described above, the parts replacement device 50 may charge the battery in the mobile mechanism 56 by power supply from the processing device 40 when connected to the processing device 40. In addition, the parts storage device 60 and the jig storage device 70 may charge the batteries in the mobile mechanism 66 and the mobile mechanism 76 via the parts replacement device 50 connected to the processing device 40.

[0145] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. Indeed, the embodiments described above can be embodied in a variety of forms. Furthermore, the embodiments described above may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of Symbols]

[0146] W board 10 Manufacturing Systems 20 Control device 210 Management Tables 30 processing groups 31 Vacuum Transfer Chamber 32 Load Lock Room 33. Air Conveyance Chamber 331 Loadport 40 Processing Unit 41 Chamber 42 Support part 421 Lower electrode 422 Electrostatic Chuck 423 Edge Ring 43 Upper electrode shower head assembly 44 Gas Supply Department 45 RF power supply section 46 Exhaust System 50 Parts replacement device 510 Upper container 511 Lower container 513 Gate valve 52 Operating Robots 520 Operating Arm 53 Transport robots 530 Transport Arm 56 Moving mechanism 60 Component housing device 610 Upper container 611 Lower container 613 Gate valve 62 cassettes 66 Moving mechanism 70. Jig housing device 710 Upper container 711 Lower container 713 Gate valve 72 cassettes 76 Moving mechanism 80 Consumable parts 81 End Effector 82 Retaining member

Claims

1. A component replacement device moves to the location of a processing device that processes a circuit board in response to a first instruction received from a control device via wireless communication, A parts storage device moves to the position of the parts replacement device, which has moved to the position of the processing device, in response to a second instruction from the control device received via wireless communication. Equipped with, The aforementioned parts replacement device is a parts replacement system that removes the parts to be replaced from the processing device and stores them in the aforementioned parts storage device.

2. The parts replacement system according to claim 1, wherein the parts replacement device removes the parts to be replaced from the processing device, stores them in the parts storage device, and then installs the parts to be used into the processing device.

3. The parts storage device stores at least one of each of several types of parts, as described in Claim 1 or 2.

4. The parts replacement system according to claim 1 or 2, wherein the parts storage device accommodates a plurality of parts of a single type.

5. The parts replacement system according to any one of claims 1 to 4, wherein cleaning is performed in the chamber of the processing apparatus before the parts replacement device removes the parts to be replaced from the processing apparatus.

6. The parts replacement system according to any one of claims 1 to 5, wherein the parts are consumable parts.

7. The component replacement system according to claim 6, wherein the consumable part is an edge ring or an upper electrode.

8. The parts replacement system according to any one of claims 1 to 7, wherein the parts replacement device has a first sensor that senses the area around the parts replacement device.

9. The parts replacement system according to claim 8, wherein the parts replacement device has a first moving mechanism that moves the parts replacement device to the position of the processing device based on the sensing result from the first sensor.

10. The component replacement system according to any one of claims 1 to 9, wherein the component housing device has a second sensor for sensing the surroundings of the component housing device.

11. The parts storage device has a second moving mechanism that moves the parts storage device to the position of the parts replacement device based on the sensing result from the second sensor, according to claim 10.

12. The parts replacement system according to any one of claims 1 to 11, wherein the first instruction is transmitted from the control device to the parts replacement device when there is a processing device having a part that is due to be replaced within a predetermined time.

13. The parts replacement system according to any one of claims 1 to 12, wherein the second instruction is transmitted from the control device to the parts storage device when there is a processing device having a part that is due to be replaced within a predetermined time.

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