Filter with improved fluid flow

The tubular housing with a helical fluid channel pattern addresses space constraints in fluid filters by increasing membrane area and flow rate, ensuring efficient filtration without a cage, thus enhancing compact filter performance.

JP7864780B2Active Publication Date: 2026-05-25ENTEGRIS INC
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
ENTEGRIS INC
Filing Date
2024-07-24
Publication Date
2026-05-25

AI Technical Summary

Technical Problem

Existing fluid filters in semiconductor manufacturing face challenges in achieving a compact design while maintaining an appropriate flow rate, as they are often constrained by space and require increased membrane area for efficient filtration.

Method used

The filters incorporate a tubular housing with a helical fluid channel pattern on the inner surface, allowing for a smaller size with increased membrane area and support, eliminating the need for a cage, and maintaining flow efficiency through direct membrane contact with raised housing regions.

Benefits of technology

This design enables a compact filter with enhanced flow rate and membrane support, balancing size constraints and filtration efficiency.

✦ Generated by Eureka AI based on patent content.

Smart Images

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Patent Text Reader

Abstract

To provide a filter housing for achieving a smaller filter with an increased flow rate by increasing the membrane amount while decreasing the size of the filter.SOLUTION: A filter housing 105 comprises: an interior surface; an exterior surface; a fluid channel 170 formed in the interior surface of the filter housing in a helical pattern with a helical pitch HP in an axial direction of the housing less than or equal to about 60 mm, the fluid channel formed between raised portions of the interior surface of the housing; and a first end configured to be connected to a first end cap 115 and a second end configured to be connected to a second end cap 120, where the first end cap includes a first opening acting as an inlet 135a for fluid and a second opening acting as an outlet 135b for the fluid.SELECTED DRAWING: Figure 4
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