Clamping device and rotating support device

Abstract

To provide a clamp device which is excellent in durability and maintainability, and to provide a rotary support device.SOLUTION: A clamp device includes: a body; a drive mechanism provided at the body; a first drive member which is driven in a first direction relative to the body by the drive mechanism; second drive members which are driven in a second direction orthogonal to the first direction relative to the body by the first drive member; guide parts each of which guides the second drive member in the second direction; a cover member having a wall surface part defining an internal space which houses the first drive member, the second drive members, and the guide parts and is supplied with a lubricant, and through holes formed at portions of the wall surface part respectively facing the second drive members along the first direction; holding members each of which is connected to the second drive member through the through hole, moves in the second direction with the second drive member, and holds a fixed object; and sealing members each of which is located at the holding member side of the wall surface part and seals the through hole so as to close the internal space tightly while moving in the second direction with the second drive member and the holding member.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This technology relates to a clamping device and a rotational support device.

Background Art

[0002] Clamping devices for fixing objects to be fixed such as workpieces have been conventionally known. Examples of such clamping devices include those described in Japanese Patent No. 6345321 (Patent Document 1), Japanese Patent Application Laid-Open No. 2019-188574 (Patent Document 2), International Publication No. 2020 / 196582 (Patent Document 3), and International Publication No. 2019 / 244664 (Patent Document 4).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0004] [[ID=*46]] In addition to clamping accurately, clamping devices are required to improve durability and reduce the frequency of maintenance work.

[0005] An object of this technology is to provide a clamping device excellent in durability and maintainability and a rotational support device provided with the same.

Means for Solving the Problems

[0006] Note: There are some consecutive asterisked lines in the original that seem to be a formatting anomaly. I've left them as they are in the translation. If this is an error in the original, you may want to correct it for a more accurate representation.The clamping device according to this technology comprises a main body, a drive mechanism provided on the main body, a first drive member driven in a first direction relative to the main body by the drive mechanism, a second drive member driven in a second direction perpendicular to the first direction relative to the main body by the first drive member, a guide portion that guides the second drive member in the second direction, a cover member having a wall portion that houses the first drive member, the second drive member, and the guide portion and defines an internal space to which lubricant is supplied, and a through hole formed in the wall portion facing the second drive member along the first direction, a gripping member connected to the second drive member through the through hole and moving in the second direction together with the second drive member to grip an object to be fixed, and a sealing member located on the gripping member side of the wall portion and sealing the through hole so as to seal the internal space while moving in the second direction together with the second drive member and the gripping member.

[0007] The rotary support device according to this technology is a rotary support device capable of supporting a workpiece so as to be rotatable around two mutually orthogonal axes, and comprises a first unit and a second unit, a table rotatably supported by the first unit and the second unit around a first axis, a rotation mechanism provided on the table capable of rotating the workpiece around a second axis orthogonal to the first axis, and the clamping device described above provided on the rotation mechanism. [Effects of the Invention]

[0008] This technology makes it possible to provide clamping devices and rotary support devices that offer excellent durability and maintainability. [Brief explanation of the drawing]

[0009] [Figure 1] This figure shows a machine tool to which a clamping device according to one embodiment of this technology is applied. [Figure 2] This figure shows the first state of the machine tool shown in Figure 1, viewed from the A-axis direction. [Figure 3] This figure shows the second state of the machine tool shown in Figure 1, viewed from the A-axis direction. [Figure 4]This figure shows the first state of the machine tool shown in Figure 1, viewed from the C-axis direction. [Figure 5] This is a cross-sectional view (part 1) of the rotating mechanism and chuck. [Figure 6] This is a cross-sectional view (part 2) of the rotating mechanism and chuck. [Figure 7] This is a cross-sectional view (part 3) of the rotating mechanism and chuck. [Figure 8] This is a cross-sectional view (part 4) of the rotating mechanism and chuck. [Figure 9] This is a disassembled perspective view of the chuck. [Figure 10] This diagram shows the assembled chuck. [Figure 11] This is a cross-sectional view of a modified clamping device. [Modes for carrying out the invention]

[0010] Embodiments of this technology are described below. Note that the same or corresponding parts may be denoted by the same reference numerals, and their descriptions may not be repeated.

[0011] In the embodiments described below, when referring to the number, quantity, etc., unless otherwise specified, the scope of this technology is not necessarily limited to that number, quantity, etc. Also, in the embodiments described below, each component is not necessarily essential to this technology unless otherwise specified. Furthermore, this technology is not necessarily limited to achieving all of the effects and advantages mentioned in these embodiments.

[0012] In this specification, the terms "comprise," "include," and "have" are in open-ended form. That is, if a configuration includes one configuration, it may also include other configurations, or it may not.

[0013] In addition, in this specification, when geometric terms and terms representing positional and directional relationships, such as "parallel", "orthogonal", "45° oblique", "coaxial", "along", etc., are used, these terms allow for manufacturing errors or some fluctuations. When terms representing relative positional relationships such as "upper side" and "lower side" are used in this specification, these terms are used to indicate the relative positional relationship in one state, and depending on the installation direction of each mechanism (for example, flipping the entire mechanism upside down, etc.), the relative positional relationship can be reversed or rotated at an arbitrary angle.

[0014] FIG. 1 is a diagram showing a machine tool 1 (machining center) according to one embodiment. As shown in FIG. 1, the machine tool 1 includes a spindle 2 and a cutting tool 3. The machine tool 1 further includes a rotary support device 100 that supports a workpiece W (workpiece to be machined).

[0015] The spindle 2 can hold the cutting tool 3. The cutting tool 3 is a tool for performing cutting on the workpiece W supported by the rotary support device 100.

[0016] The rotary support device 100 includes a first unit 110 (index unit), a second unit 120 (support unit), a base 130, an index table 140, a rotation mechanism 150, and a chuck 160 (workpiece fixing part).

[0017] The first unit 110 and the second unit 120 are provided on the base 130. The rotation mechanism 150 is supported by the index table 140. The chuck 160 fixes the workpiece W. The index table 140 is supported by the first unit 110 and the second unit 120 so as to be rotatable (hereinafter referred to as "A-axis rotation") about the A-axis (first axis). Therefore, it is possible to rotate (hereinafter referred to as "A-axis rotation") the workpiece W fixed to the chuck 160 and realize an arbitrary rotation angle including the first state shown in FIG. 2 and the second state shown in FIG. 3. As a result, the workpiece W can be subjected to cutting by the cutting tool 3 at an arbitrary angle.

[0018] More specifically, the first unit 110 includes a rotary joint 111 and a cross roller bearing 112. The first unit 110 supports the index table 140 so that it can rotate around the A axis via the rotary joint 111 and the cross roller bearing 112. The second unit 120 also supports the index table 140 so that it can rotate around the A axis. The second unit 120 includes a motor 121 and an input shaft 122.

[0019] Power from a servo motor (not shown) located inside the first unit 110 is transmitted to the index table 140 via a roller gear cam 113 and a cam follower 114, causing the index table 140 to rotate along the A axis. By using the roller gear cam 113 and the cam follower 114, torque can be transmitted by rolling contact, resulting in a highly durable rotary support device 100 that enables high-precision and stable operation.

[0020] The chuck 160 is capable of gripping and fixing the workpiece W. The chuck 160 is connected to the rotation mechanism 150. The rotation mechanism 150 is capable of rotating the chuck 160 to a predetermined angle. This allows the workpiece W fixed to the chuck 160 to be rotated around the C-axis (second axis) (referred to as "C-axis rotation" below). The rotation axis of the "A-axis rotation" and the rotation axis of the "C-axis rotation" are orthogonal, but "orthogonal" here is not necessarily limited to the case where the two rotation axes intersect in three-dimensional space. In this specification, even if the rotation axis of the "C-axis rotation" is offset from the rotation axis of the "A-axis rotation" on the index table 140, the rotation axis of the "A-axis rotation" and the rotation axis of the "C-axis rotation" are interpreted as "orthogonal" if the vectors along the extending directions of both rotation axes are "orthogonal".

[0021] More specifically, the rotating mechanism 150 rotatably supports the chuck 160. Power from the motor 121 located inside the second unit 120 is transmitted to the rotating mechanism 150 via the input shaft 122, causing the rotating part of the rotating mechanism 150 to rotate along the C axis. As a result, the chuck 160 supported by the rotating mechanism 150, and the workpiece W fixed to the chuck 160, are rotated along the C axis.

[0022] The first unit 110 is supplied with hydraulic pressure for the chuck 160 to fix the workpiece W. The index table 140 is provided with a flow path 141. The hydraulic pressure supplied to the first unit 110 through port 115B is transmitted from the rotary joint 111 in the first unit 110 to the rotating mechanism 150 via the flow path 141B provided in the index table 140.

[0023] The rotating mechanism 150 is almost entirely integrated into the index table 140. The rotating mechanism 150 includes a rotary joint 151, a drive unit 152, and a rotating member 153. The hydraulic fluid supplied to the drive unit 152 and the hydraulic fluid discharged from the drive unit 152 pass through the rotary joint 151. The cylindrical rotating member 153 is fitted onto the drive unit 152. The rotating member 153 has an input unit 153A to which the driving force for C-axis rotation is input. The input unit 153A receives rotational driving force from the input shaft 122. This provides the driving force for C-axis rotation by the rotating mechanism 150. A roller gear cam mechanism is also used to transmit torque to the rotating member 153.

[0024] Figure 4 shows the machine tool 1 as viewed from the C-axis direction. As shown in Figure 4, the chuck 160 has multiple (three in the example in Figure 4, but not limited to this) jaw members 160A (gripping members) arranged in the circumferential direction around the C-axis. The workpiece W is clamped and unclamped by the reciprocating movement of the jaw members 160A in the radial direction.

[0025] Figures 5 to 8 are cross-sectional views of the rotating mechanism 150 and the chuck 160. Figures 5 to 8 show cross-sections in different directions in the circumferential direction. Figure 9 is an exploded perspective view of the chuck 160, and Figure 10 shows the chuck 160 in its assembled state. In Figure 10, for the sake of explanation, one of the jaw members 160A is omitted from the illustration.

[0026] The structure of the rotating mechanism 150 and the chuck 160 will be described below with reference to Figures 5 to 10.

[0027] As shown in the cross-sectional views of Figures 5 to 8, the rotary joint 151 included in the rotating mechanism 150 includes a shaft portion 151A and a housing 151B. The shaft portion 151A is fixed to the index table 140. The housing 151B is fixed to the drive unit 152 and rotates along the C axis with the drive unit 152.

[0028] The drive unit 152 (drive mechanism) is a fluid pressure cylinder including a cylinder body 152A, a cap member 152B, a piston member 152C, an oil chamber 152D, and a protruding member 152E. This fluid pressure cylinder is mounted coaxially with the rotary joint 151. The drive unit 152 is coupled to the lower body 154 via the rotary joint 151 so as to be mutually rotatable. The lower body 154 is fixed to the index table 140. Therefore, the drive unit 152 can rotate around the C axis relative to the index table 140. The drive unit 152 is coupled to the chuck 160. Therefore, the chuck 160 can also rotate around the C axis relative to the index table 140.

[0029] The cap member 152B of the drive unit 152 is connected to the housing 151B of the rotary joint 151. The internal space formed by the cylinder body 152A and the cap member 152B is partitioned by the piston member 152C, forming two oil chambers 152D.

[0030] Hydraulic fluid is supplied to the two oil chambers 152D from the first unit 110 via a passage 141B provided in the index table 140. This drives the piston member 152C to extend or retract. Alternatively, an elastic member may be provided in one of the oil chambers 152D to limit the hydraulic drive of the piston member 152C to one direction only, and the biasing force of the elastic member may be used to obtain driving force for the piston member 152C in the other direction. The hydraulic fluid supplied to and discharged from the oil chambers 152D passes through the rotary joint 151.

[0031] The protruding member 152E (bolt) is screwed along the central axis of the piston member 152C. The tip of the protruding member 152E is inserted into the chuck 160.

[0032] As shown in the cross-sectional views of Figures 5 to 8, the chuck 160 includes a first drive member 161, a second drive member 162, a main body member 163, a cover member 164, a plug member 165, a base 166, a seal flange 167, and a key member 168.

[0033] The first drive member 161 is connected to the piston member 152C by a protruding member 152E. Therefore, the first drive member 161 is driven by the piston member 152C in the C-axis direction (first direction) relative to the cylinder body 152A. The second drive member 162 is fitted with the first drive member 161, and when the first drive member 161 is driven in the C-axis direction, it is driven radially (second direction) perpendicular to the C-axis by a wedge action.

[0034] As shown in the exploded perspective view of Figure 9, the main body member 163 has a substantially circular planar shape overall. The main body member 163 has a groove 163A (guide portion) into which the second drive member 162 is fitted. The groove 163A is formed to extend in the radial direction (lateral direction in Figures 5 to 8) of the chuck 160 perpendicular to the C axis. The main body member 163 is fixed to the cylinder body 152A of the drive unit 152. Therefore, the main body member 163 can guide the second drive member 162 in the radial direction.

[0035] The cover member 164 is provided so as to cover the upper part of the main body member 163 and is fixed to the main body member 163 by bolts 163B (Figure 8). Together with the main body member 163 and the base 166, the cover member 164 defines the internal space of the chuck 160 that houses the first drive member 161, the second drive member 162, and the groove 163A. Lubricating oil (lubricant) is supplied to the internal space of the chuck 160. This allows the operation of the first drive member 161 and the second drive member 162 to be lubricated. The plug member 165 is a plug attached to the oil supply and discharge port to the internal space of the chuck 160.

[0036] As shown in Figure 9, a through hole 164B is formed in the wall portion 164A that defines the internal space of the chuck 160. The through hole 164B is formed in a position opposite the second drive member 162 along the C-axis direction. As a result, as shown in Figure 10, the second drive member 162 can be exposed through the through hole 164B, so that the claw member 160A and the second drive member 162 can be connected through the through hole 164B.

[0037] A seal flange 167 (sealing member) and a key member 168 are provided between the wall portion 164A of the cover member 164 and the claw member 160A.

[0038] The seal flange 167 is provided on the wall portion 164A so as to face the claw member 160A, and moves radially in the chuck 160 together with the second drive member 162 and the claw member 160A. At this time, the seal flange 167 moves while sealing the through hole 164B so as to seal the internal space of the chuck 160.

[0039] The key member 168 is fixed to the second drive member 162. Furthermore, the claw member 160A is positioned by the key member 168 and fixed by the bolt 160B. As a result, the claw member 160A moves radially in the chuck 160 together with the second drive member 162 to grip an object to be fixed, such as a workpiece W.

[0040] When the piston member 152C of the drive unit 152 is driven downward (away from the chuck 160), the chuck 160 performs a locking operation to fix the workpiece W. Specifically, when the first drive member 161 is driven downward, the second drive member 162 is driven by a wedge action, and the jaw member 160A moves radially inward of the chuck 160 together with the second drive member 162. As a result, the object to be fixed can be clamped on the inner circumference side of the jaw member 160A.

[0041] When the piston member 152C of the drive unit 152 is driven upward (towards the chuck 160), a lock release operation is performed in which the chuck 160 releases the fixation of the workpiece W. Specifically, when the first drive member 161 is driven upward, the second drive member 162 and the jaw member 160A move radially outward from the chuck 160, thereby releasing the clamping of the fixed object by the jaw member 160A.

[0042] When the first drive member 161 moves downward to clamp the workpiece W, the inner circumferential end of the claw member 160A receives a reaction force from the workpiece W directed radially outward. On the other hand, the inner circumferential end of the second drive member 162 receives a driving force from the first drive member 161 directed radially inward (diagonally downward). These forces form a couple, and a moment acts on the claw member 160A and the second drive member 162. On the other hand, the rotation of the second drive member 162 is constrained by the groove 163A of the main body member 163. As a result, a force acts that lifts the inner circumferential end of the claw member 160A.

[0043] In the rotary support device 100 according to this embodiment, the second drive member 162 and the groove 163A are housed in the internal space of the chuck 160, which is sealed by the seal flange 167. Lubricating oil is supplied to the internal space of the chuck 160, and the supplied lubricating oil is reliably retained in the sealed internal space, suppressing leakage. As a result, the clamping operation of the workpiece W can be performed smoothly. Furthermore, wear of the second drive member 162 and the groove 163A is suppressed, and the amount of lift at the end of the jaw member 160A can be stably reduced over a long period of time. In addition, compared to a case where the internal space is not sealed, it is possible to reduce the frequency of maintenance work such as replenishing lubricating oil.

[0044] In addition, in the rotary support device 100 according to this embodiment, the internal space housing the first drive member 161, the second drive member 162, and the groove portion 163A is sealed by the seal flange 167, thereby suppressing the intrusion of chips into the internal space. Furthermore, since the seal flange 167 slides on the substantially flat wall portion 164A, it is possible to suppress the accumulation of chips on the wall portion 164A that would hinder the operation of the claw member 160A. As a result of the above, the durability of the chuck 160 is improved.

[0045] Preferably, the seal 167A (first seal component) provided on the lower side of the seal flange 167 (on the side of the wall portion 164A of the cover member 164) is more easily deformed than the seal 167B (second seal component) provided on the upper side of the seal flange 167 (on the side of the claw member 160A). This makes it easier for the seal flange 167 to be pressed against the wall portion 164A of the cover member 164, and can more effectively suppress the accumulation of chips on the wall portion 164A.

[0046] In this context, "easily deformable" may refer to a material that is made relatively soft to facilitate deformation, or it may refer to a material that is made relatively soft to facilitate deformation by reducing its cross-sectional area.

[0047] As shown in the cross-section of Figure 5, a space 10A is formed between the cylinder body 152A of the rotating mechanism 150 and the base 166 of the chuck 160. Seal 10B seals the space between the oil chamber 152D of the rotating mechanism 150 and space 10A. Seal 10C seals the space between the internal space of the chuck 160 and space 10A.

[0048] Space 10A communicates with space 10E formed on the underside of piston member 152C via flow path 10D. Space 10E communicates with flow path 141A formed in index table 140 via flow path 10F formed in the center of shaft portion 151A of rotary joint 151.

[0049] As shown in the cross-section of Figure 6, the rotating mechanism 150 is provided with detection valves 20A and 30A that detect when the piston member 152C has reached a predetermined position using air pressure. Detection valve 20A can detect when the piston member 152C has reached the upper end of its stroke. Detection valve 30A can detect when the piston member 152C has reached the lower end of its stroke. Detection air at a predetermined pressure is supplied to detection valves 20A and 30A, respectively, via air passages 20B and 30B.

[0050] When the piston member 152C reaches the upper end of its stroke, the detection valve 20A is switched open / closed, and the air pressure or flow velocity in the air passage 20B changes. By detecting the change in air pressure or flow velocity in the air passage 20B with a sensor, it is possible to detect that the piston member 152C has reached the upper end of its stroke.

[0051] When the piston member 152C reaches the lower end of its stroke, the detection valve 30A is switched open / closed, and the air pressure or flow velocity in the air passage 30B changes. By detecting the change in air pressure or flow velocity in the air passage 30B with a sensor, it is possible to detect that the piston member 152C has reached the lower end of its stroke.

[0052] A well-known structure can be applied to the detection valves 20A and 30A. When the piston member 152C reaches a predetermined position (the upper and lower ends of the stroke), the valve bodies of the detection valves 20A and 30A protruding into the oil chamber 152D are pushed in, and the open / closed state of the detection valves 20A and 30A is switched. When the piston member 152C moves away from the predetermined position, the valve bodies of the detection valves 20A and 30A are biased toward the inside of the oil chamber 152D, and the open / closed state of the detection valves 20A and 30A is switched again (returning to the original state). The valve bodies of the detection valves 20A and 30A may be biased by introducing the hydraulic pressure of the oil chamber 152D to the back side of the valve body, by providing an elastic member on the back side of the valve body, or by a combination of hydraulic pressure and elastic force.

[0053] By detecting that the piston member 152C has reached the upper end of its stroke, it is possible to detect that the clamp on the workpiece W has been released. Based on this detection result, the robot can automatically start removing the workpiece W, thereby shortening the cycle time.

[0054] When the workpiece W is properly clamped, the piston member 152C does not reach the lower end of its stroke. Therefore, by detecting when the piston member 152C has reached the lower end of its stroke, it is possible to detect whether the workpiece W is not properly clamped (failure to clamp) or whether the clamping operation was performed without a workpiece W placed on it.

[0055] A predetermined hydraulic pressure (for example, about 7 MPa) is supplied to the oil chamber 152D of the rotating mechanism 150 in order to drive the piston member 152C. On the other hand, the pressure of the lubricating oil supplied to the internal space of the chuck 160 is approximately zero. Therefore, a considerable pressure difference exists between the oil chamber 152D of the rotating mechanism 150 and the internal space of the chuck 160, and if these two spaces are adjacent, it is conceivable that the hydraulic fluid from the oil chamber 152D will flow into the internal space of the chuck 160.

[0056] In the rotary support device 100 according to this embodiment, a space 10A is formed between the oil chamber 152D of the rotary mechanism 150 and the internal space of the chuck 160, thereby preventing the hydraulic fluid from the oil chamber 152D from flowing into the internal space of the chuck 160. In other words, the space 10A functions as a buffer region interposed between two spaces with a pressure difference (the oil chamber 152D of the rotary mechanism 150 and the internal space of the chuck 160).

[0057] Drain air discharged from the detection valve 20A flows into space 10A. The drain air that flows into space 10A is discharged through flow path 10D, space 10E, and flow path 10F into flow path 141A (see Figure 1) formed in the index table 140. Then it is discharged to the outside of the rotating support device 100 through port 115A provided in the first unit 110.

[0058] Drain air discharged from the detection valve 30A flows into space 10E. The drain air that flows into space 10E is discharged through the flow path 10F into the flow path 141A (see Figure 1) formed in the index table 140. Then, it is discharged to the outside of the rotating support device 100 through the port 115A provided in the first unit 110.

[0059] Space 10A may receive some hydraulic fluid that leaks slightly from the oil chamber 152D when the piston member 152C is driven in and out. Space 10E may receive some hydraulic fluid that leaks slightly from the oil chamber 152D when the piston member 152C is driven out. The passages 10D and 10F also function as drain passages for recovering the hydraulic fluid that has leaked into spaces 10A and 10E.

[0060] In this embodiment, the detection air and internal oil drain can be discharged to the outside of the rotating mechanism 150 from the opposite side of the chuck 160, and to the outside of the rotating support device 100 from the port 115A located away from the chuck 160. This reduces the risk of foreign matter such as chips from the cutting process of the workpiece W entering the rotating mechanism 150 and the chuck 160 through the exhaust port.

[0061] As shown in the cross-section of Figure 7, oil passages 40A and 40B are formed in the shaft portion 151A and housing 151B of the rotary joint 151, and in the cylinder body 152A and cap member 152B of the drive unit 152. In order to reciprocate the piston member 152C, a predetermined hydraulic pressure is supplied to the oil passages 40A and 40B via a flow path 141B (see Figure 1) formed in the index table 140.

[0062] As shown in the cross-section of Figure 8, seat detection ports 50A and 50B are provided on the seat base 169 located on both sides of the claw member 160A. Air for detection is supplied to the seat detection ports 50A and 50B through air passages 60A and 60B.

[0063] When the workpiece W is properly seated, the seating detection ports 50A and 50B are closed or their gaps are minimized, and the air pressure or flow velocity in the air passages 60A and 60B changes. By detecting the change in air pressure or flow velocity in the air passages 60A and 60B with a sensor, it is possible to detect that the workpiece W has been seated. By providing multiple seating detection ports 50A and 50B in the circumferential direction, it is also possible to detect the tilt of the workpiece W.

[0064] When repeated clamping operations increase the amount of wear on the groove 163A, the amount of lift of the claw member 160A increases. As a result, this affects the seating detection operation using the seating detection ports 50A and 50B, and may require frequent adjustment of the detection sensors. In the rotary support device 100 according to this embodiment, since the wear on the groove 163A is suppressed, the amount of lift of the claw member 160A remains stable over a long period of time. Therefore, the seating detection operation of the workpiece W can also be kept stable over a long period of time.

[0065] Thus, according to this embodiment, a rotary support device 100 can be obtained that can perform precise clamping operations on the workpiece W and has excellent durability and maintainability.

[0066] Figure 11 is a cross-sectional view of a modified clamping device. In the modified device shown in Figure 11, the drive unit 152 is directly fixed to the plate 1400 (without the rotating member 153 in Figure 1). The plate 1400 may be a fixed plate or a plate that can rotate around the A axis, as in the example in Figure 1. The exhaust ports 1150 of the detection valves 20A and 30A are provided on the lower body 154 located on the opposite side of the chuck 160.

[0067] In the modified example shown in Figure 11, it is possible to obtain a clamping device with excellent durability and maintainability.

[0068] While embodiments of the present technology have been described above, the embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present technology is defined by the claims, and all modifications within the meaning and scope equivalent to the claims are intended to be included. [Explanation of Symbols]

[0069] 1 Machine tool, 2 Spindle, 3 Cutting tool, 10A, 10E Space, 10B, 10C Seal, 10D, 10F Flow path, 20A, 30A Detection valve, 20B, 30B Air passage, 40A, 40B Oil passage, 50A, 50B Seating detection port, 60A, 60B Air passage, 100 Rotary support device, 110 First unit, 111 Rotary joint, 112 Cross roller bearing, 113 Roller gear cam, 114 Cam follower, 115A, 115B Port, 120 Second unit, 121 Motor, 122 Input shaft, 130 Base, 140 Indexing table, 141, 141A, 141B Flow path, 150 Rotary mechanism, 151 Rotary joint, 151A Shaft section, 151B Housing, 152 152A Drive unit, 152B Cylinder body, 152C Cap member, 152D Piston member, 152D Oil chamber, 152E Protruding member, 153 Rotating member, 153A Input unit, 154 Lower body, 160 Chuck, 160A Claw member, 160B Bolt, 161 First drive member, 162 Second drive member, 163 Body member, 163A Groove, 163B Bolt, 164 Cover member, 164A Wall surface, 164B Through hole, 165 Plug member, 166 Base, 167 Seal flange, 167A, 167B Seal, 168 Key member, 169 Seat base, 1150 Exhaust port, 1400 Plate.

Claims

1. The main unit and The drive mechanism provided in the main body, A first drive member is driven in a first direction relative to the main body by the drive mechanism, A second drive member is driven by the first drive member in a second direction perpendicular to the first direction relative to the main body, A guide portion that guides the second drive member in the second direction, A cover member having a wall portion that houses the first drive member, the second drive member, and the guide portion and defines an internal space through which lubricant is supplied, and a through hole formed in the wall portion facing the second drive member along the first direction, A gripping member is connected to the second drive member through the through hole and moves together with the second drive member in the second direction to grip the object to be fixed, The wall portion is located on the gripping member side and includes a sealing member that seals the through hole so as to seal the internal space while moving in the second direction together with the second drive member and the gripping member, The drive mechanism includes a cylinder body, a piston member coupled to the first drive member and driven in a first direction relative to the cylinder body, and an oil chamber partitioned by the cylinder body and the piston member. A clamping device in which a space is formed between the internal space and the oil chamber, the space partitioned by the member defining the internal space together with the wall surface portion of the cover member and the cylinder body.

2. The clamping device according to claim 1, wherein the member defining the internal space and the cylinder body are directly fixed to each other.

3. The present invention further comprises a detection valve that detects by air pressure when the piston member has reached a predetermined position, The clamping device according to claim 1 or claim 2, wherein the air discharged from the detection valve flows into the space.

4. The clamping device according to claim 3, wherein the air that has flowed into the space is discharged to the outside of the clamping device from the opposite side of the gripping member.

5. The main body and The drive mechanism provided in the main body, A first drive member is driven in a first direction relative to the main body by the drive mechanism, A second drive member is driven by the first drive member in a second direction perpendicular to the first direction relative to the main body, A guide portion that guides the second drive member in the second direction, A cover member having a wall portion that houses the first drive member, the second drive member, and the guide portion and defines an internal space through which lubricant is supplied, and a through hole formed in the wall portion facing the second drive member along the first direction, A gripping member is connected to the second drive member through the through hole and moves together with the second drive member in the second direction to grip the object to be fixed, The wall portion is located on the gripping member side and includes a sealing member that seals the through hole so as to seal the internal space while moving in the second direction together with the second drive member and the gripping member, The sealing member includes a first sealing component provided on the wall surface side and a second sealing component provided on the gripping member side. A clamping device in which the first sealing component is more easily deformed than the second sealing component.

6. A rotary support device capable of supporting a workpiece so as to be rotatable around two mutually orthogonal axes, The first unit and the second unit, A table is supported by the first unit and the second unit so as to be rotatable around a first axis, A rotation mechanism provided on the table, capable of rotating the workpiece around a second axis perpendicular to the first axis, A rotating support device comprising a clamping device according to claim 1 or claim 5, provided on the rotating mechanism.

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