Structure, physical quantity sensor, inertial sensor, and method for manufacturing the structure

By positioning the intersection point of different crystal planes within the quartz substrate, the structure mitigates stress concentration, improving resistance to strain and preventing fracture.

JP7868463B2Active Publication Date: 2026-06-02SEIKO EPSON CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SEIKO EPSON CORP
Filing Date
2022-08-31
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

In existing quartz structures with slits defined by intersecting crystal planes, stress concentrates at the intersection points, leading to potential fracture.

Method used

The structure incorporates a quartz substrate with a slit design where the intersection point of different crystal planes is located within the substrate, avoiding stress concentration on the inner wall by forming ridge-like undulations along the crystal planes.

Benefits of technology

This design suppresses stress-induced fracture, enhancing the structure's resistance to strain and maintaining structural integrity under external stress.

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Patent Text Reader

Abstract

To provide a structure that can avoid a trouble caused by a cross point of different crystal surfaces of a quartz substrate, a physical quantity sensor, an inertial sensor, and a method for manufacturing a structure.SOLUTION: A structure 1 is a structure of a quartz substrate 2 provided with a slit SL. The structure 1 includes, as inner walls of the slit SL, a first side face S1, a second side face S2, a first end face EF1, and a second end face EF2. The first side face S1 extends along a first direction DR1 that is a longitudinal direction of the slit SL, and the second side face S2 extends along the first direction DR1. The first end face EF1 continues from the first side face S1 and extends along a first crystal surface of the quartz substrate 2, and a second end face EF2 continues from the second side face S2 and extends along a second crystal surface of the quartz substrate 2. In plan view of the quartz substrate 2, a cross point CP where a first straight line L1 corresponding to the first end face EF1 and a second straight line L2 corresponding to the second end face EF2 cross each other is located inside the quartz substrate 2.SELECTED DRAWING: Figure 1
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