Circuit board storage container

Abstract

To provide a board storage container with a simple structure and a valve body capable of opening and closing a valve by gas pressure.SOLUTION: A board storage container 1 includes a container body that stores a board, a lid body that closes the opening of the container body, and a valve body 40 that controls gas flow to the container body, and the valve body 40 includes a block member 41 in which a communication path is formed that communicates the outside and the inside of the container body 10 via a valve hole 416, and a valve member 45 that opens and closes the valve hole 416, and the flow of gas to the container body 10 is controlled by floating the valve member 45 from the valve hole 416 using only gas pressure.SELECTED DRAWING: Figure 2A

Description

Technical Field

[0001] The present invention relates to a substrate storage container provided with a valve body for controlling the flow of gas to a container body.

Background Art

[0002] A substrate storage container for storing substrates includes a container body, a lid body for closing an opening of the container body, and a valve body for controlling the flow of gas to the container body. This valve body has a check valve function and includes a valve element and a metal elastic member for opening and closing the valve element (see, for example, Patent Documents 1 and 2).

[0003] By the way, in order to store the substrate in an airtight state, gas is supplied from the valve body and discharged through the valve body in the substrate storage container. However, during the processing of the stored substrate, residual substances adhering to the substrate may also be discharged together with the supplied gas. Therefore, the metal elastic member of the valve body or the like may be corroded by the residual substances.

[0004] Therefore, a shutter (valve body) using a spherical body for opening and closing a gas passage without using a metal elastic member as disclosed in Patent Document 3 has also been proposed. This valve body is configured to close the valve hole by the weight of the spherical body and open the valve hole by lifting the spherical body with a lifting rod.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, although the valve body described in Patent Document 3 has a relatively simple structure, it can only be used when supplying gas from the outside to the inside of the container body, and cannot be applied when discharging gas from the inside to the outside of the container body. Furthermore, it requires a push-up rod to push up the sphere from the outside, and the mechanism is not self-contained within the substrate storage container alone, but also depends on the equipment of the semiconductor manufacturing plant, so it cannot be said to be a desirable form.

[0007] Therefore, the present invention has been made in view of the above problems, and aims to provide a substrate storage container equipped with a valve body that has a simple structure and is capable of opening and closing the valve by gas pressure. [Means for solving the problem]

[0008] (1) One aspect of the present invention provides a substrate storage container comprising a container body for storing substrates, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body, wherein the valve body comprises a block member having a communication passage formed therein that connects the outside and inside of the container body via a valve hole, and a valve member for opening and closing the valve hole, and controls the flow of gas to the container body by causing the valve member to float from the valve hole solely by the pressure of the gas supplied to the communication passage. (2) In the embodiment of (1) above, the valve hole may be invisible from the opening of the inflow passage formed on the upper or lower surface of the block member. (3) In the embodiment of (1) or (2) above, the valve member may be spherical, or it may be columnar with the valve hole side formed in a hemispherical or conical shape. (4) In any one embodiment of (1) to (3) above, the valve body may control the flow of gas from the inside to the outside of the container body. (5) In the embodiment of (4) above, the valve hole is located between an inlet passage through which gas flows in and an outlet passage through which gas flows out, the inlet passage is an opening on the upper surface of the block member and extends vertically downward and inverts upward, and the outlet passage is an opening on the lower surface of the block member and extends vertically upward and inverts downward. (6) In any one embodiment of (1) to (3) above, the valve body may control the flow of gas from the outside to the inside of the container body. (7) In any one embodiment of (1) to (6) above, the valve body may have a filter for filtering the gas. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a substrate housing container equipped with a valve body that has a simple structure and is capable of opening and closing the valve using gas pressure. [Brief explanation of the drawing]

[0010] [Figure 1] This is an exploded perspective view showing a substrate storage container according to an embodiment of the present invention. [Figure 2A] This is a cross-sectional view showing the valve body for air supply. [Figure 2B] This is a top view showing the valve body for air intake. [Figure 2C] This is a front view showing the valve body for air intake. [Figure 2D] This is a bottom view showing the valve body for air intake. [Figure 2E] This is a cross-sectional view showing the open state of the air supply valve body. [Figure 3A] This is a cross-sectional perspective view showing the valve body for exhaust. [Figure 3B] This is a cross-sectional perspective view showing the valve body for exhaust. [Figure 3C] This is a top view showing the valve body for exhaust. [Figure 3D] This is a front view showing the exhaust valve body. [Figure 3E] This is a bottom view showing the exhaust valve body. [Figure 3F] It is a cross-sectional view showing the gas flow in the valve open state of the valve body for exhaust. [Figure 3G] It is a top view showing the gas flow in the valve open state of the valve body for exhaust. [Figure 3H] It is a front view showing the gas flow in the valve open state of the valve body for exhaust. [Figure 3I] It is a side view showing the gas flow in the valve open state of the valve body for exhaust. [Figure 4] It is a cross-sectional view showing a valve body having a deformable valve member.

Mode for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of this specification, the same members are denoted by the same reference numerals throughout.

[0012] FIG. 1 is a schematic exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention. It includes a container body 10 for storing a substrate, a lid body 20 for closing an opening 11 of the container body 10, and an annular gasket 30 provided between the container body 10 and the lid body 20.

[0013] The container body 10 is a box-shaped body with an opening 11 formed on the front. This opening 11 is bent with a step so as to spread outward, and the surface of the step portion is formed as a seal surface 12 with which the gasket 30 contacts, on the inner peripheral edge of the front of the opening 11. In addition, since the container body 10 facilitates the insertion operation of substrates with a diameter of 300 mm or 450 mm, a front-open type is preferable.

[0014] Supports 13 are positioned on both the left and right sides inside the container body 10. The supports 13 have the function of supporting and positioning the substrate. Multiple grooves are formed in the height direction of the supports 13, forming so-called groove teeth. The substrate is placed on two groove teeth at the same height on the left and right sides. The material of the supports 13 may be the same as that of the container body 10, but different materials may be used to improve cleanability and sliding properties.

[0015] Furthermore, a rear retainer (not shown) is positioned at the rear (back) of the inside of the container body 10. When the lid 20 is closed, the rear retainer, in conjunction with the front retainer (described later), holds the substrate. However, even without a rear retainer as in this embodiment, the support 13 may have, for example, a "V" shaped or straight substrate holding portion at the back of the groove teeth, so that the substrate is held by the front retainer and the substrate holding portion. These support 13 and rear retainer may be provided in the container body 10 by insert molding or fitting.

[0016] The substrate is supported by the support 13 and housed in the container body 10. While a silicon wafer is one example of a substrate, it is not limited to silicon wafers; for example, a quartz wafer or a gallium arsenide wafer may also be used.

[0017] A robotic flange 14 is detachably provided in the center of the ceiling of the container body 10. The substrate storage container 1, which contains the substrates in a clean and airtight state, is grasped by the robotic flange 14 by a transport robot in the factory and transported to the processing equipment for each step of the substrate processing process.

[0018] Furthermore, manual handles 15, which are held by the operator, are detachably attached to the center of the outer surface on both sides of the container body 10.

[0019] Furthermore, an air supply section 16 and an exhaust section 17 are provided on the bottom surface inside the container body 10, and valve bodies 40 and 50, which will be described later, are attached to the bottom surface outside the container body 10. These are designed to maintain the cleanliness of the inside of the circuit board storage container 1 by supplying an inert gas such as nitrogen gas or dry air from the air supply section 16 to the inside of the circuit board storage container 1, which is closed by the lid 20, and exhausting it from the exhaust section 17 as needed, thereby replacing the gas inside the circuit board storage container 1, maintaining a low humidity airtight state, and blowing away impurities on the circuit boards. In addition to supplying gas from the air supply section 16, the exhaust section 17 may also be connected to a negative pressure (vacuum) generator to forcibly discharge gas from the exhaust section 17.

[0020] Furthermore, by detecting the gas exhausted from the exhaust section 17, it is possible to confirm whether the inside of the substrate storage container 1 has been replaced with the introduced gas. While it is preferable that the air supply section 16 and exhaust section 17 are located away from the position where the substrate is projected onto the bottom surface, the number and location of the air supply section 16 and exhaust section 17 are not limited to those shown in the illustration; they may be located at the four corners of the bottom surface of the container body 10. Additionally, the air supply section 16 and exhaust section 17 may be attached to the side of the lid 20.

[0021] On the other hand, the lid 20 is roughly rectangular in shape and is attached to the front of the opening 11 of the container body 10. The lid 20 has a locking mechanism (not shown), and is locked when a locking piece is fitted into a locking hole (not shown) formed in the container body 10.

[0022] Furthermore, the lid 20 has an elastic front retainer (not shown) attached to its central part by fitting or other means to detachably hold the front edge of the substrate horizontally, or it is integrally formed by insert molding or other means. Since this front retainer, like the groove teeth and substrate holding portion of the support 13, is a part that the wafer directly contacts, a material with good cleanability and sliding properties is used.

[0023] Furthermore, the lid 20 has a mounting groove 21 for attaching the gasket 30. For example, on the surface of the lid 20 facing the container body 10, a protrusion 22 smaller than the stepped portion of the opening 11 is formed in an annular shape, thereby forming a mounting groove 21 with a roughly U-shaped cross-section. This protrusion 22 is designed to recede further than the stepped portion of the opening 11 when the lid 20 is attached to the container body 10.

[0024] Examples of materials for these container bodies 10 and lids 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetheretherketone, and liquid crystal polymer. Conductive agents such as conductive carbon, conductive fibers, metal fibers, and conductive polymers, various antistatic agents, and ultraviolet absorbers may be appropriately added to these thermoplastic resins.

[0025] Next, the gasket 30 is annular in shape corresponding to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10), and in this embodiment, it is rectangular in shape. However, the annular gasket 30 may be ring-shaped before being attached to the lid 20.

[0026] The gasket 30 is positioned between the sealing surface 12 of the container body 10 and the lid 20. When the lid 20 is attached to the container body 10, it tightly seals against the sealing surface 12 and the lid 20, ensuring the airtightness of the substrate storage container 1. This reduces the intrusion of dust, moisture, and other external elements into the substrate storage container 1, as well as reducing gas leakage from the inside to the outside.

[0027] The gasket 30 may be formed using an elastic material such as a thermoplastic elastomer consisting of polyester elastomers, polyolefin elastomers, fluorine elastomers, urethane elastomers, fluororubber, ethylene propylene rubber, or silicone rubber. Various additives may be added to these materials to provide other functions.

[0028] Next, we will describe the valve body 40 for air supply. Figures 2A to 2F show the air supply valve body 40. Figure 2A is a cross-sectional view, Figure 2B is a top view, Figure 2C is a front view, Figure 2D is a bottom view, and Figure 2E is a cross-sectional view showing the valve in the open state. Figure 2A also shows a part of the container body 10 in which the valve body 40 is installed.

[0029] The valve body 40 controls the flow of gas from the outside to the inside of the container body 10, and when attached to the container body 10, it communicates with the air supply section 16 via a gas flow passage (not shown).

[0030] As shown in Figure 2A, the valve body 40 is fitted into a through hole 18 formed by ribs on the bottom surface of the container body 10 (or a bottom plate attached to the bottom surface of the container body 10). Multiple ventilation ribs 19 are formed at the base end of the through hole 18 to ensure the flow of gas to the container body 10.

[0031] The block member 41 is cylindrical in shape, with a first ring groove 411 and a second ring groove 412 formed on its outer circumferential surface. The block member 41 also includes a circular first surface (hereinafter referred to as the "upper surface") 41a facing toward the container body 10, and a circular second surface (hereinafter referred to as the "lower surface") 41b facing away from the container body 10. The upper surface 41a of the block member 41 has partition ribs 419 that extend radially from near the central axis.

[0032] Such block members 41 are molded from thermoplastic resins such as polycarbonate, polyetherimide, polyetheretherketone, and liquid crystal polymers.

[0033] Next, an annular first seal ring 42 is fitted into the first ring groove 411 of the block member 41. The first seal ring 42 has an annular projection 421 on its inner circumference that fits into the first ring groove 411.

[0034] This first sealing ring 42 ensures airtightness between the block member 41 and the through hole 18 when the block member 41 is inserted into the through hole 18 of the container body 10, and also has the function of fixing the block member 41 by fitting into the through hole 18.

[0035] On the other hand, a bottomed, annular second seal ring 43 is fitted into the second ring groove 412 of the block member 41. The second seal ring 43 has an annular projection 432 on its inner circumference that fits into the second ring groove 412. In addition, the second seal ring 43 has a circular through hole 43a formed in the center of the bottom plate.

[0036] This second sealing ring 43 ensures airtightness between the valve body 40 and the nozzle of the load port when the substrate storage container 1 is placed on the load port.

[0037] Furthermore, a U-shaped handle may be foldably attached to the second seal ring 43 to facilitate the attachment and detachment of the valve body 40.

[0038] Furthermore, these first seal rings 42 and second seal rings 43 may be formed from materials such as fluororubber, natural rubber, urethane rubber, ethylene propylene rubber, or thermoplastic elastomers such as polyester elastomers, polyolefin elastomers, fluorine elastomers, or urethane elastomers. In addition, letters, numbers, symbols, or colors may be added to these first seal rings 42 and second seal rings 43 so that the air supply valve body 40 and the exhaust valve body 50, which will be described later, can be distinguished from the outside.

[0039] Here, one or more filters 44 are arranged on the upper surface 41a (above the partition rib 419) of the block member 41 as described above, sandwiched between it and the ventilation rib 19 of the container body 10 (see Figure 2A). However, the filters 44 may be attached to the upper surface 41a of the container body 10 or the block member 41 by means of adhesive or welding, for example.

[0040] This filter 44 filters the supplied or discharged gas and is selected from porous membranes made of polytetrafluoroethylene, polyester fibers, fluororesin, etc., molecular filtration filters made of glass fibers, etc., and chemical filters in which a chemical adsorbent is supported on a filter material such as activated carbon fibers.

[0041] When using multiple filters 44, they may be of the same type, but it is preferable to combine filters with different properties, as this can prevent contamination by organic matter in addition to particles. For example, when cleaning the container body 10, one of the filters 44 may be made of a hydrophobic or hydrophilic material to suppress liquid permeation, as it also serves to suppress the retention of liquids such as water or cleaning solution, or to suppress the passage of liquids.

[0042] Here, the valve member 45 will be described together with the communication passage formed in the block member 41 through which the gas flows.

[0043] The gas passage is formed around the central axis of the block member 41 and includes an inlet passage 414 opening to the lower surface 41b, a valve hole 416, and an outlet passage 418 opening to the upper surface 41a.

[0044] The inlet passage 414 is a cylindrical cavity, with a partition wall 415 provided in a direction perpendicular to the vertical direction (diametrical direction), and a gap 415a formed between it and the circumferential wall. The partition wall 415 should have a size of 25% or more (preferably 50% or more) of the cross-sectional area of ​​the inlet passage 414. Alternatively, the partition wall 415 may be formed to be the same size as the cross-sectional area of ​​the inlet passage 414, and a groove may be formed in the circumferential wall of the inlet passage 414, making it large enough so that the valve hole 416 on the far side of the inlet passage 414 is not visible from the outside.

[0045] On the other hand, the outlet of the outflow passage 418 has a circular outlet facing the upper surface 41a, and a wall surface (conical surface) that slopes inward to narrow towards the valve hole 416 and the lower surface 41b. This conical surface is the valve seat 417, on which the valve member 45, described later, is seated and closes the valve hole 416.

[0046] Furthermore, the outflow passage 418 has multiple guide ribs 419a protruding from its inner surface. These guide ribs 419a guide the valve member 45, which moves freely within the outflow passage 418, to move along its central axis. The guide ribs 419a are formed continuously with the partition ribs 419, but they may be arranged at different positions.

[0047] The cross-sectional areas of these inlet passages 414 and outlet passages 418 are appropriately designed according to the gas flow rate and pressure, or according to the maximum opening amount and Cv value of the valve hole 416.

[0048] Furthermore, the valve member 45 is formed in a spherical shape so as to fit into the valve seat 417 of the conical outflow passage 418.

[0049] The valve member 45 may be formed using various types of rubber or thermoplastic resins depending on the desired mass. Examples of these rubbers and resins include rubbers such as fluororubber and ethylene propylene rubber, thermoplastic elastomers such as polyester elastomers, polyolefin elastomers, fluorine elastomers, and urethane elastomers, and resins such as polycarbonate, polybutylene terephthalate, and polyetheretherketone. Furthermore, the material may be selected according to performance requirements, such as prioritizing sealing (adhesion) with the valve seat 417 or preventing adhesion to the valve seat 417.

[0050] Furthermore, the valve member 45 may contain heavy objects such as metal or magnets inside, as long as it is not exposed to the outside, and the material, shape, dimensions, and mass should be appropriately selected according to the valve opening pressure.

[0051] Next, we will explain how the valve body 40 controls the flow of gas.

[0052] When no positive pressure is applied to the inlet passage 414, the valve member 45 of the valve body 40 adheres tightly to the valve seat 417 due to its own weight, blocking the flow of gas to either side. Then, for example, when a positive pressure exceeding a predetermined value is applied to the inlet passage 414, the valve member 45 floats away from the valve seat 417 according to the magnitude of the positive pressure, opening the valve hole 416 (see Figure 2E). In this way, the gas supplied from outside the container body 10 passes through the inlet passage 414, the gap 415a, the valve hole 416, the outlet passage 418, and the filter 44, and is supplied to the inside of the container body 10.

[0053] Furthermore, if a negative pressure exceeding a predetermined value is applied to the outflow passage 418, the situation is relatively similar to when a positive pressure exceeding a predetermined value is applied to the inflow passage 414, and therefore the valve body 40 performs the same valve opening operation.

[0054] Conversely, if positive pressure is applied to the outflow passage 418, the valve member 45 is pressed further against the valve seat 417 while remaining in close contact with it, so that the gas does not pass through the valve opening 416 and the flow is kept shut off.

[0055] In this valve body 40, the predetermined pressure at which gas can flow depends on the mass (self-weight) of the valve member 45, and can therefore be adjusted by appropriately changing the material, diameter, and mass of the valve member 45.

[0056] Here, we will describe a valve body 140 having a modified valve member 145. Figure 4 is a cross-sectional view showing a valve body 140 having a deformed valve member 145.

[0057] In the above embodiment, the valve member 45 was spherical, but the modified valve member 145 is formed of a polygonal prism or cylindrical base 146 and a tip 147 whose side facing the valve hole 416 (downward in the vertical direction) is formed in a hemispherical or conical shape.

[0058] Furthermore, the valve member 145, like the valve member 45, may contain heavy objects such as metal or magnets inside so that they are not exposed to the outside, and the material and mass should be appropriately selected according to the valve opening pressure. A valve member 145 of this shape can also be applied to the exhaust valve body 50 described later.

[0059] Next, we will explain the exhaust valve body 50. Figures 3A to 3E show the exhaust valve body 50, with Figure 3A being a cross-sectional perspective view, Figure 3B being a cross-sectional perspective view, Figure 3C being a top view, Figure 3D being a front view, and Figure 3E being a bottom view. Figures 3F to 3I show the gas flow when the exhaust valve body 50 is in the open state, with Figure 3F being a cross-sectional view, Figure 3G being a top view, Figure 3H being a front view, and Figure 3I being a side view. Figure 3A also shows a part of the container body 10 in which the valve body 50 is installed. Furthermore, explanations of components identical to the valve body 40 are omitted as appropriate.

[0060] The valve body 50 controls the flow of gas to the container body 10, and when attached to the container body 10, it communicates with the exhaust section 17 via a gas flow passage (not shown).

[0061] As shown in Figure 3A, the valve body 50 is fitted into a through hole 18 formed by ribs on the bottom surface of the container body 10 (or a bottom plate attached to the bottom surface of the container body 10). Multiple ventilation ribs 19 are formed at the base end of the through hole 18 to ensure the flow of gas to the container body 10.

[0062] The block member 51, like the block member 41, is cylindrical in shape with a first ring groove 511 and a second ring groove 512 formed on its outer circumferential surface. The block member 51 also includes a circular first surface (hereinafter referred to as the "upper surface") 51a facing the container body 10 side and a circular second surface (hereinafter referred to as the "lower surface") 51b facing away from the container body 10 side. Dividing ribs 519 extending radially are provided protruding from the upper surface 51a of the block member 51.

[0063] A first annular seal ring 42 is fitted into the first ring groove 511 of the block member 51. On the other hand, a second annular seal ring 43 with a bottom is fitted into the second ring groove 512 of the block member 51.

[0064] The inflow passages 514 open at two locations near the outer circumference of the upper surface 51a of the block member 51 and extend toward the lower surface 51b (see Figure 3B). Then, just before the lower surface 51b, they change direction in the circumferential direction, and the two inflow passages 514 merge and connect to a second inflow passage 514b that extends toward the upper surface 51a (see also Figures 3G to 3I). In addition, the inflow passages 514 may open at one location, or at three or more locations, contrary to the above.

[0065] On the other hand, the outlet of the outflow channel 518 has a roughly circular shape at the outlet facing the lower surface 51b (see Figure 3E) and extends toward the upper surface 51a. Then, just before reaching the upper surface 51a, it changes direction radially from the center and connects to the second outflow channel 518b, which extends toward the lower surface 51b (see also Figures 3G to 3I). Therefore, the inflow channel 514 and the outflow channel 518 are connected to the second inflow channel 514b and the second outflow channel 518b, respectively, so as to be reversed in the vertical direction.

[0066] Furthermore, the second outflow passage 518b includes a conical surface that is inclined to narrow toward the valve hole 516 and the lower surface 51b. This conical surface serves as the valve seat 517, as the valve member 45 sits on it and closes the valve hole 516. Guide ribs (not shown) are provided on the inner circumference of the second outflow passage 518b to guide the valve member 45, similar to the valve body 40.

[0067] By the way, methods for arranging the valve member 45 inside such a block member 51 include providing an insertion opening on the upper surface 51a and sealing the insertion opening after arranging the valve member 45, or using a 3D printer.

[0068] The way in which the exhaust valve body 50 controls the flow of gas is basically in the opposite direction to that of the supply valve body 40, as shown in Figures 3G to 3I, so an explanation will be omitted. Note that the pressure when valve body 50 is open may differ from the pressure when valve body 40 is open.

[0069] As described above, the substrate storage container 1 of the embodiment of the present invention comprises a container body 10 for storing substrates, a lid 20 for closing the opening of the container body 10, and valve bodies 40, 50, 140 for controlling the flow of gas to the container body 10. The valve bodies 40, 50, 140 each have block members 41, 51 with a communication passage formed therein that connects the outside and inside of the container body 10 via valve holes 416, 516, and valve members 45, 145 that open and close the valve holes 416, 516. The flow of gas to the container body 10 is controlled by causing the valve members 45, 145 to float from the valve holes 416, 516 solely by the pressure of the gas.

[0070] As a result, for example, when gas is introduced into one side of the valve bodies 40, 50, and 140 (inlet passages 414, 514) and a positive pressure is created, the valve members 45 and 145 float (levitate) away from the valve seats 417 and 517 and move away from the valve holes 416 and 516, so the introduced gas is supplied to the other side of the valve bodies 40, 50, and 140 (outlet passages 418, 518). Since the valve members 45 and 145 are made to float by the pressure of the gas alone, a simple structure can be used.

[0071] Furthermore, since the circuit board housing container 1 is equipped with valve bodies 40, 50, and 140 that do not use metal components, even if there are metal-corrosive residual substances on the circuit board being housed, metal corrosion problems will not occur, and it is unlikely that the valve bodies 40, 50, and 140 will fail to operate.

[0072] In addition, a humidity retention test was conducted using the substrate storage container 1 of the embodiment, and no significant difference was observed in the decrease in humidity over time compared to the conventional container.

[0073] The valve holes 416, 516 in the embodiment are not visible from the openings of the inflow passages 414, 514 formed on the upper surface 41a or lower surface 51ab of the block members 41, 51. In particular, since the valve body 40 has a partition wall 415, it is not possible to open the valve by pushing up the valve members 45, 145 with the push-up rod described in Patent Document 3.

[0074] In this embodiment, the valve member 45 is spherical, and the valve member 145 is columnar with the valve holes 416 and 516 formed in a hemispherical or conical shape. As a result, the valve members 45 and 145 make uniform contact with the valve seats 417 and 517, ensuring reliable opening and closing of the valve holes 416 and 516. Furthermore, valve members 45 and 145 with desired properties such as adhesion, anti-sticking properties, and elasticity can be easily designed, and the valve opening and closing pressure conditions can also be easily changed.

[0075] In this embodiment, the valve opening 516 is located between the inlet passage 514 through which gas flows in and the outlet passage 518 through which gas flows out. The inlet passage 514 opens on the upper surface 51a of the block member 51, extends vertically downward, and then inverts upward. The outlet passage 518 opens on the lower surface 51b of the block member 51, extends vertically upward, and then inverts downward. As a result, when the substrate storage container 1 is in use, the gas flowing from the inside to the outside is supplied vertically from the top to the bottom, but the valve member 45 can be suspended vertically upward from the valve seat 517 solely by the pressure of the gas.

[0076] The valve body 50 of the embodiment controls the flow of gas from the inside to the outside of the container body 10, and the valve body 40 of the embodiment controls the flow of gas from the outside to the inside of the container body 10. This allows for the control of the flow of gas to the substrate storage container 1, respectively.

[0077] The valve bodies 40, 50, and 140 of the embodiment have a filter 44 for filtering gas. This allows the gas passing through the valve bodies 40, 50, and 140 to be filtered. Furthermore, by sandwiching the filter 44 between the block members 41 and 51 (their partition ribs 419 and 519) and the container body 10 (their ventilation ribs 19), the filter 44 can be prevented from falling out.

[0078] Although preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the embodiments described above, and various modifications and changes are possible within the scope of the gist of the present invention as described in the claims.

[0079] (modified version) In the above embodiment, the filter 44 may be placed separately from the valve bodies 40, 50, and 140 in the gas flow path from the gas supply source to the container body 10.

[0080] In the above embodiment, the valve bodies 40, 50, and 140 are configured to be attached to through holes 18 formed in at least one of the container body 10 and the lid 20. However, they may also be configured to be attached in the middle of a gas flow path (piping) provided in the container body 10 or the like, for example, a gas flow path communicating with at least one of the air supply section 16 or the exhaust section 17. [Explanation of Symbols]

[0081] 1. Circuit board storage container 10 Container body, 11 Opening, 12 Sealing surface, 13 Support, 14 Robotic flange, 15 Manual handle, 16 Air supply port, 17 Exhaust port, 18 Through hole, 19 Ventilation rib 20 Cover, 21 Mounting groove, 22 Protrusion 30 Gaskets 40 Valve body 41 Block member, 411 First ring groove, 412 Second ring groove, 414 Inlet passage, 415 Partition wall, 415a Gap, 416 Valve hole, 417 Valve seat, 418 Outlet passage, 419 Compartment rib, 419a Guide rib, 41a Top surface, 41b Bottom surface 42 First seal ring, 421 Annular protrusion 43 Second seal ring, 432 Annular projection, 43a Through hole 44 filters 45 Valve member 50 Valve body 51 Block member, 511 First ring groove, 512 Second ring groove, 514 Inlet passage, 516 Valve hole, 517 Valve seat, 518 Outlet passage, 51a Top surface, 51b Bottom surface 140 Valve body 145 Valve member, 146 Base, 147 Tip

Claims

1. The main body of the container that houses the circuit board, A lid that closes the opening of the container body, A substrate housing container comprising a valve body for controlling the flow of gas to the container body, The valve body is A block member having a communication passage that connects the outside and inside of the container body, the communication passage including a valve hole, a first flow path extending downward from the valve hole, and a second flow path extending upward from the valve hole, A valve member that closes the valve opening by its own weight and floats from the valve opening toward the second flow path solely by the pressure of the gas supplied to the first flow path, thereby opening and closing the valve opening, It has a plurality of guide ribs that guide the movement of the valve member floating from the valve hole, The inner surface defining the second flow path includes an inner surface extending in the vertical direction and an inclined surface that is inclined to narrow from the inner surface toward the valve hole. Each of the aforementioned guide ribs protrudes from the inner surface and extends in the vertical direction. A circuit board storage container characterized by the following features.

2. The valve body is provided in a direction perpendicular to the vertical direction in the first flow path and further has a partition wall that forms a gap between itself and the peripheral wall defining the first flow path. The substrate storage container according to feature 1.

3. The valve hole is not visible from the opening formed on the lower surface of the block member. The substrate storage container according to feature 2.

4. The valve member is spherical, or columnar with the valve hole side formed in a hemispherical or conical shape. A substrate storage container according to feature 1.

5. The valve body controls the flow of gas from the inside to the outside of the container body. A substrate storage container according to any one of claims 1 to 4.

6. The first flow path opens on the upper surface of the block member, extends vertically downward, and then reverses upward. The second flow path opens on the lower surface of the block member, extends vertically upward, and then reverses downward. The substrate storage container according to feature 5.

7. The valve body controls the flow of gas from the outside to the inside of the container body. A substrate storage container according to any one of claims 1 to 4.

8. The valve body has a filter for filtering the gas. A substrate storage container according to any one of claims 1 to 4.

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