pressure sensor

Abstract

To solve the problem caused by making a pressure sensor correspond to inert.SOLUTION: A pressure sensor includes: a sheet-like diaphragm 8 which is composed of a nonmetal material; a body block 4 which is composed of a nonmetal material, has a diaphragm opposite surface 10 facing a principal plane of the diaphragm and has the diaphragm opposite surface arranged to be covered with the diaphragm and is provided with a fluid inlet 14 and a fluid outlet 18 which are directed to the diaphragm side; and a sensor head 6 which has a recess 22 for storing pressure transmission liquid 24 and an opening of the recess arranged on an opposite side of the body block across the diaphragm so as to be closed by the diaphragm and is configured to detect pressure of fluid flowing between the diaphragm and the diaphragm opposite surface by deformation amount of the diaphragm. The fluid inlet and the fluid outlet are provided to be separated more from the diaphragm than the diaphragm opposite surface.SELECTED DRAWING: Figure 1

Claims

1. A sheet-like diaphragm made of non-metallic material, A main body block made of a non-metallic material, having a diaphragm-facing surface that faces the main plane of the diaphragm, arranged such that the diaphragm-facing surface is covered by the diaphragm, and having a fluid inlet and a fluid outlet facing the diaphragm side, A sensor head having a recess for containing pressure-transmitting fluid, positioned on the opposite side of the main body block from the diaphragm such that the opening of the recess is closed by the diaphragm, and configured to detect the pressure of the fluid flowing between the diaphragm and the surface facing the diaphragm based on the amount of deformation of the diaphragm, A pressure sensor in which the fluid inlet and the fluid outlet are provided at a distance from the diaphragm from the surface facing the diaphragm.

2. The pressure sensor according to claim 1, wherein a recess is provided on the diaphragm-facing surface, and the fluid inlet and the fluid outlet are each provided on the bottom surface of the recess.

3. The pressure sensor according to claim 2, wherein the recess forms a groove connecting the fluid inlet and the fluid outlet.

4. A sheet-like diaphragm made of non-metallic material, A main body block made of a non-metallic material, having a diaphragm-facing surface that faces the main plane of the diaphragm, arranged such that the diaphragm-facing surface is covered by the diaphragm, and having a fluid inlet and a fluid outlet facing the diaphragm side, A sensor head having a recess for containing pressure-transmitting fluid, positioned on the opposite side of the main body block from the diaphragm such that the opening of the recess is closed by the diaphragm, and configured to detect the pressure of the fluid flowing between the diaphragm and the surface facing the diaphragm based on the amount of deformation of the diaphragm, A packing is provided so as to be in contact with the peripheral edge of the diaphragm and prevents leakage of the pressure transmission fluid from the peripheral edge of the diaphragm, A spacer is provided separately from the main body block and surrounds the outer circumference of the diaphragm-facing surface of the main body block, A pressure sensor in which the packing is sandwiched between the surface of the sensor head facing the main body block and the spacer, thereby sealing the peripheral edge of the diaphragm.

5. The pressure sensor according to claim 4, wherein the fluid inlet and the fluid outlet are provided at a distance from the diaphragm from the diaphragm-facing surface.

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