Composition for pattern formation

JP7871806B2Active Publication Date: 2026-06-09NISSAN CHEM CORP

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
NISSAN CHEM CORP
Filing Date
2022-04-21
Publication Date
2026-06-09

AI Technical Summary

Benefits of technology

【0009】 本発明の組成物は、マスキングして露光·硬化させた後、これをアルカリ現像した後、焼成することで、高屈折率で透明性に優れた微細パターンを与える。 本発明の組成物から作製されたパターンは、トリアジン環含有重合体による、高耐熱性、高屈折率、低体積収縮という特性を発揮し得るため、液晶ディスプレイ、有機エレクトロルミネッセンス(EL)ディスプレイ、タッチパネル、光半導体素子、固体撮像素子、有機薄膜太陽電池、色素増感太陽電池、有機薄膜トランジスタ、レンズ、プリズム、カメラ、双眼鏡、顕微鏡、半導体露光装置等を作製する際の一部材など、電子デバイスや光学材料の分野に好適に利用できる。

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Patent Text Reader

Abstract

A composition for pattern formation which comprises: a triazine-ring-containing polymer that includes a repeating unit structure represented by formula (1) and has at least one triazine ring terminal, at least some of the triazine ring terminal having been blocked with an arylamino group substituted by a hydroxyl group; a crosslinking agent; fine inorganic particles each having an alkali-reactive group on the surface; and an organic solvent. (In formula (1), R and R' each independently represent a hydrogen atom or an alkyl, alkoxy, aryl, or aralkyl group, Q represents a C3-C30 divalent group having a ring structure, and * indicates a bond.)
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Claims

1. The material comprises a triazine ring-containing polymer having a repeating unit structure represented by the following formula (1), and having at least one triazine ring end, the triazine ring end of which is sealed with a hydroxyl-substituted arylamino group; a crosslinking agent; inorganic fine particles having alkali-reactive groups on their surface; and an organic solvent. The alkali-reactive group is an acid anhydride group or an epoxy group. The primary particle size of the inorganic fine particles is 20 nm or less. A pattern-forming composition characterized by the following features. 【Chemistry 1】 (In formula (1), R and R' independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Q represents at least one selected from the group represented by formulas (2) to (13) and formulas (102) to (115). * represents a bond.) 【Chemistry 2】 [In formulas (2) to (13), R1 to R92 independently represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, a C1-C10 alkyl group, a C1-C10 halogenated alkyl group, or a C1-C10 alkoxy group.] R93 and R94 represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms. W1 and W2 independently represent a single bond, CR95 R96 (R95 and R96 independently represent a hydrogen atom, a C1-C10 alkyl group (which may together form a ring), or a C1-C10 halogenated alkyl group), C=O, O, S, SO, SO2, or NR97 (R97 represents a hydrogen atom, a C1-C10 alkyl group, or a phenyl group). X1 and X2 are independently of each other, a single bond, an alkylene group having 1 to 10 carbon atoms, or formula (14) 【Transformation 3】 (In formula (14), R 98 to R 101 represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, a C1-C10 alkyl group, a C1-C10 halogenated alkyl group, or a C1-C10 alkoxy group.) Y1 and Y2 independently represent single bonds or alkylene groups having 1 to 10 carbon atoms. * indicates a bonding operation. 【Chemistry 4】 (In formulas (102) to (115), R1 and R2 independently represent alkylene groups having 1 to 5 carbon atoms, which may have a branched structure. * represents a bond.)

2. The pattern-forming composition according to claim 1, wherein the hydroxyl-substituted arylamino group is represented by formula (15). 【Transformation 5】 (In equation (15), * represents a coupling.)

3. The pattern-forming composition according to claim 2, wherein the hydroxyl-substituted arylamino group is represented by formula (16). 【Transformation 6】 (In equation (16), * represents a coupling.)

4. The pattern-forming composition according to claim 1, wherein Q in formula (1) is represented by formula (17). 【Transformation 7】 (In equation (17), * represents a coupling.)

5. The pattern-forming composition according to claim 1, wherein the crosslinking agent is a polyfunctional (meth)acrylic compound.

6. The pattern-forming composition according to claim 1, wherein the inorganic fine particles include a metal oxide, a metal sulfide, or a metal nitride.

7. The pattern-forming composition according to claim 1, for use in the light extraction layer of an organic electroluminescent element.

8. A cured product made from a pattern-forming composition according to any one of claims 1 to 7.

9. An electronic device comprising a substrate and a cured product according to claim 8 formed on the substrate.

10. The electronic device according to claim 9, which is an organic electroluminescent device.

11. An optical member comprising a base material and a cured product according to claim 8 formed on the base material.

12. A method for producing a pattern, characterized by applying a pattern-forming composition according to any one of claims 1 to 7 to a substrate, evaporating an organic solvent, irradiating with light through a mask on which a pattern has been formed, developing the material, and then firing it.