Inspection method and inspection apparatus

Abstract

This inspecting device comprises a lighting device, an imaging device for capturing an image of a sheet and outputting the image, a movement means, and an image processing device. The lighting device emits light a plurality of times onto the sheet during one imaging time. The movement means changes the relative positions of the lighting device, the imaging device, and the sheet during one imaging time. The image processing device extracts a plurality of images of a target object included in the image output by the imaging device, and determines a size of the target object E by combining the plurality of extracted images of the target object.

Description

【Technical Field】 【0001】 The present disclosure relates to an inspection apparatus and an inspection method for a subject. 【Background Art】 【0002】 In the device fields such as semiconductors, electronic devices, and secondary batteries, a defect detection device that uses a photoelectric conversion type image sensor to detect an object (such as a foreign object or a defect) in a subject is known. 【0003】 In recent years, in these fields, due to the high-precision and miniaturization of products, the sizes of foreign objects and defects in the subject have become smaller. Also, improvements in production efficiency and quality are required, and accordingly, speeding up the manufacturing process and improving the yield are demanded. In order to speed up the manufacturing process and improve the yield, higher resolution and higher responsiveness of the image sensor are required. 【0004】 Fabricating a high-resolution and high-responsiveness image sensor requires a large amount of development costs and development periods. For this reason, in Patent Document 1, a plurality of image sensors are arranged and processed simultaneously to realize a high-speed detector. 【Prior Art Documents】 【Patent Documents】 【0005】 【Patent Document 1】 Japanese Patent No. 5172162 【Summary of the Invention】 【0006】 By the way, in Patent Document 1, in order to accurately detect an object, a plurality of images output from an image sensor are combined to generate a high-definition image. In Patent Document 1, after offsetting (correcting) the positions of the plurality of images based on the arrangement of the image sensors, the images are combined. 【0007】 However, the way light strikes an object under inspection may not be consistent, for example, if the direction of light emitted by the lighting device is not constant, or if the object under inspection is three-dimensional. In such cases, the position of the object may be significantly shifted in multiple images output from the image sensor. Therefore, by correcting the position of each of the multiple images based on the arrangement of the image sensors, it may not be possible to correct the shift in the object's position, and the object may not be detected. 【0008】 In particular, when an object to be inspected is being transported, displacement of the object's position is likely to occur. 【0009】 The present invention aims to improve the reproducibility and detection probability of objects in an object being inspected. 【0010】 To achieve the above objective, an inspection method according to one embodiment of the present disclosure is an inspection method for detecting an object included in an object to be inspected by imaging it with an inspection device, wherein the inspection device comprises an imaging device that images the object to be inspected and outputs an image, an illumination device, a moving means, and an image processing device, wherein the illumination device irradiates the object to be inspected with multiple flashes of light in one imaging time, the moving means moves the relative positions of the illumination device and the imaging device and the object to be inspected in one imaging time, and the image processing device extracts multiple images of the object included in the image output by the imaging device and determines the size of the object by synthesizing the extracted multiple images of the object. 【0011】 According to this disclosure, it is possible to improve the reproducibility and detection probability of objects in the object being inspected. [Brief explanation of the drawing] 【0012】 [Figure 1] A side view of the inspection apparatus according to the first embodiment. [Figure 2] A plan view of the inspection apparatus according to the first embodiment. [Figure 3] A plan view showing the configuration of the image sensor according to the first embodiment. [Figure 4] A timing chart showing the imaging timing of the imaging device, the irradiation timing of the illumination device, and the drive timing of the actuator in the inspection apparatus according to the first embodiment. [Figure 5] A flowchart illustrating the overall operation flow of the image processing device according to the first embodiment. [Figure 6] This figure shows an example of an image of a sheet captured by the image sensor according to the first embodiment. [Figure 7] This figure shows an example of an image of a sheet captured by the image sensor according to the first embodiment. [Figure 8] A figure showing an example of the brightness value of a sheet captured by the image sensor according to the first embodiment. [Figure 9] A flowchart illustrating the process of generating a corrected image using the image processing device according to the first embodiment. [Figure 10] A timing chart showing the imaging timing of the imaging device, the irradiation timing of the illumination device, and the drive timing of the actuator in the inspection apparatus according to the second embodiment. [Figure 11] A flowchart illustrating the overall operation flow of the image processing device according to the second embodiment. [Figure 12] This figure shows an example of an image of a sheet captured by the image sensor according to the second embodiment. [Figure 13] This figure shows an example of an image of a sheet captured by the image sensor according to the second embodiment. [Figure 14] A figure showing an example of the brightness values ​​of the extracted image according to the second embodiment. [Figure 15] A figure showing an example of the brightness values ​​of the extracted image according to the second embodiment. [Figure 16] A flowchart illustrating the grouping process of the image processing apparatus according to the second embodiment. [Figure 17] A diagram illustrating the process of generating the original extracted image according to the second embodiment. [Figure 18]Flowchart for explaining the physical property determination process of the image processing apparatus according to the second embodiment. [Figure 19] Figure showing a graph in which the reflectance according to the second embodiment is plotted. [Figure 20] Figure for explaining the generation process of the corrected image of the image processing apparatus according to the second embodiment. 【Embodiments for Carrying Out the Invention】 【0013】 Hereinafter, embodiments of the present invention will be described in detail based on the drawings. The following description of the preferred embodiments is merely exemplary in nature and is not intended to limit the present invention, its applications, or its uses in any way. 【0014】 FIG. 1 shows a side view of the inspection apparatus, and FIG. 2 shows a plan view of the inspection apparatus. As shown in FIGS. 1 and 2, the inspection apparatus A includes an imaging device 1, a lighting device 2, rollers 3 to 5 (moving means), a rotary encoder 6, an image processing device 7, and an actuator 9 (moving means). A conveyor belt 8 is wound around the outer peripheries of the rollers 3 to 5. 【0015】 The inspection apparatus A inspects a sheet S (test object). The sheet S is used, for example, in device fields such as semiconductors, electronic devices, and secondary batteries. In the following description, the case where the test object is in the form of a sheet will be described as an example, but the test object does not have to be in the form of a sheet. Also, when the sheet S is a long object, the sheet S is wound around the rollers 3 to 4 instead of the conveyor belt 8. Then, the sheet S is conveyed in the direction of arrow D by the rollers 3 to 5. 【0016】 Inspection device A detects objects E, such as defects or foreign matter, contained in the sheet S. These defects include not only manufacturing defects or deficiencies in the sheet S, such as short circuits or broken wires, but also damage to the sheet S (for example, scratches caused by the sheet S coming into contact with other components). If the detected object E is larger than a predetermined size, the inspection device determines that the sheet S contains the object. The sheet S is transported on the conveyor belt 8 in the direction of the arrow D shown by the solid line in Figures 1 and 2. 【0017】 The imaging device 1 is equipped with an image sensor 11 and photographs the sheet S being transported by the conveyor belt 8. Here, the imaging device 1 is configured as an area sensor that photographs the entire sheet S between the rollers 4 and 5. 【0018】 The imaging device 1 transmits the pixel signals output from the image sensor 11 to the image processing device 7. In the following description, the scanning direction of the imaging device 1 is the X direction, the sub-scanning direction of the imaging device 1 is the Y direction, and the direction perpendicular to the X and Y directions is the Z direction. 【0019】 The illumination device 2 has a light source composed of, for example, an LED, laser, or halogen light source, and irradiates the scanning area (sheet S) of the imaging device 1 with light between the rollers 4 and 5. Specifically, the illumination device 2 is installed so that the angle of incidence of the light irradiation direction with respect to the conveyor belt 8 is about 10°. Furthermore, the imaging device 1 and illumination device 2 are configured with dark-field optical systems so that the light irradiated by the illumination device 2 does not directly enter the image sensor 11. The imaging device 1 and illumination device 2 may also be configured with bright-field optical systems, but it is preferable to be configured with dark-field optical systems. By configuring with dark-field optical systems, illumination can be applied to the object E at a low angle, so the background of the object E does not light up (the brightness of the background (ground level) where there is no foreign matter becomes low gradation). As a result, the brightness of the object E becomes higher than that of the background, the SN (signal-to-noise ratio (brightness of foreign matter / brightness of background)) increases, making it possible to generate a clear image of the object E. 【0020】 Furthermore, the imaging device 1 and the illumination device 2 are equipped with actuators 9 that move the imaging device 1 and the illumination device 2 in the X direction. The detailed operation of actuator 9 will be described later. 【0021】 The roller 3 is rotated by a drive mechanism (not shown in the figure), which drives the conveyor belt 8 to transport the sheet S in the direction of arrow D. 【0022】 The rotary encoder 6 detects the rotational speed of the roller 4 and detects the amount of movement of the sheet S being transported by the conveyor belt 8. The rotary encoder 6 transmits the detected amount of movement of the sheet S to the image processing device 7. 【0023】 The image processing device 7 is, for example, a computer. The image processing device 7 determines the size of the object E based on the pixel signals received from the imaging device 1 (image sensor 11). Specifically, the image processing device 7 performs the image extraction process, image correction process, and size determination process described later. 【0024】 (First Embodiment) (Regarding the configuration of the image sensor) Figure 3 is a plan view showing the configuration of the image sensor according to the first embodiment. The image sensor 11 is, for example, a CMOS (Complementary MOS) sensor. 【0025】 As shown in Figure 3, the image sensor 11 has a pixel array 12 in which m pixels 10 are arranged in a grid in the X direction and n pixels 10 in the Y direction (508 × 508 in Figure 3). In the following explanation, the i-th pixel 10 in the X direction and the j-th pixel 10 in the Y direction may be referred to as pixel (Xi, Yj). 【0026】 (Regarding the operation of the imaging and illumination equipment) First, the operation of the imaging device 1, illumination device 2, and actuator 9 when imaging the sheet S (object under inspection) will be explained. Figure 4 is a timing chart showing the imaging timing of the imaging device, the irradiation timing of the illumination device, and the drive timing of the actuator in the inspection apparatus according to the first embodiment. In this embodiment, the imaging timing of the imaging device 1, the irradiation timing of the illumination device 2, and the drive timing of the actuator 9 are set based on an encoder pulse. In Figure 4, one encoder pulse is, for example, 1 μm, but is not limited to this. 【0027】 As shown in Figure 4, during one frame, exposure of the pixel 10 (image sensor 11), reading of the pixel signal, and light irradiation by the illumination device 2 occur. If the imaging device 1 is an area sensor, the pixel signal reading interval is set to be less than or equal to the frame rate. Also, if the imaging device 1 is an area sensor, the pixel signal reading interval is set to be less than or equal to the minimum scan rate. In this embodiment, the imaging device 1 is an area image sensor, the frame rate is 240 fps (4.17 mesc / frame), and the transport speed of the sheet S is 3000 mm / sec or less. That is, the pixel signal is read out every 12500 encoder pulses, or every 12.5 mm. In this case, the maximum speed at which the imaging device 1 can take images normally is 12.5 mm ÷ (1 / 240) (sec) = 3000 mm / sec, and the imaging device 1 will operate normally at a feed speed of less than this. 【0028】 Furthermore, as shown in Figure 4, the illumination device 2 is capable of emitting light multiple times in a short period of time. Specifically, the illumination device 2 emits light four times within a single exposure time. More specifically, the illumination device 2 emits the first light after a predetermined number of pulses (e.g., 0 pulses) from the start of exposure. The illumination time at this time is 3 μsec. The illumination device 2 emits the second light after a predetermined number of pulses (e.g., 513 pulses) from the start of exposure. The illumination time at this time is 3 μsec. The illumination device 2 emits the third light after a predetermined number of pulses (e.g., 1500 pulses) from the start of exposure. The illumination time at this time is 3 μsec. The illumination device 2 emits the fourth light after a predetermined number of pulses (e.g., 3013 pulses) from the start of exposure. The illumination time at this time is 3 μsec. In this embodiment, the illumination device 2 irradiates light four times during one imaging time, but it is not limited to this, and the illumination device 2 may irradiate light multiple times (two or more times) during one imaging time. 【0029】 Furthermore, as shown in Figure 4, the actuator 9 is driven between the time the illumination device 2 emits light and the time it emits the next light, in order to shift the imaging position of the sheet S (object E), thereby changing the positions of the imaging device 1 and the illumination device 2. Specifically, the actuator 9 moves the positions of the imaging device 1 and the illumination device 2 in the X direction by a resolution of +1 / N between the time the illumination device 2 emits light for the second time and the time it emits light for the third time. Then, after the illumination device 2 emits light for the fourth time, the actuator 9 moves the positions of the imaging device 1 and the illumination device 2 in the X direction by a resolution of -1 / N, returning the imaging device 1 and the illumination device 2 to their original positions. In this embodiment, since N=2, the amount of movement of the imaging device 1 and the illumination device 2 in the X direction by the actuator 9 is approximately 13 μm. 【0030】 Through the operation of the imaging device 1, illumination device 2, and actuator 9 described above, the imaging position of object E can be shifted in the X and Y directions and imaged. Specifically, using the position of the image of object E captured by the first light as a reference, the image of object E captured by the second light is generated at a position offset by 0 μm in the X direction and 513 μm in the Y direction (hereinafter sometimes referred to as the first offset value), the image of object E captured by the third light is generated at a position offset by 13 μm in the X direction and 1500 μm in the Y direction (hereinafter sometimes referred to as the second offset value), and the image of object E captured by the fourth light is generated at a position offset by 13 μm in the X direction and 3013 μm in the Y direction (hereinafter sometimes referred to as the third offset value). 【0031】 (Regarding the operation of the image processing device) The inspection method for an object to be inspected according to the first embodiment will be described with reference to Figures 4 to 9. Figure 5 is a flowchart illustrating the overall operation flow of the image processing device according to the first embodiment. 【0032】 As described above, the imaging device 1 (image sensor 11) images the sheet S (object to be inspected) being transported by the transport belt 8 between the rollers 4 and 5. At this time, the sheet S is imaged according to the timing chart in Figure 4. The image processing device 7 acquires (receives) the pixel signal output from the imaging device 1 (step S1). 【0033】 Based on the pixel signals acquired from the imaging device 1, the image processing device 7 generates an image P (step S2). Then, the image processing device 7 performs an image extraction process, described later, to generate an extracted image p from image P (step S3). 【0034】 The image processing device 7 determines whether or not the extracted image p of object E is included in image P (step S4). If the image processing device 7 determines that the extracted image p of object E is not included in image P (No. in step S4), it terminates the process. In other words, the image processing device 7 determines that object E is not included in sheet S. 【0035】 If the image processing device 7 determines that the image P contains an image of the object E (Yes in step S4), it generates a corrected image pw from the extracted image p (step S5) and determines the size of the object E (step S6). 【0036】 (Regarding image extraction processing) Next, the image extraction process of the image processing device 7 will be explained with reference to Figures 6 to 8. Figures 6 to 8 show examples of images of a sheet captured by the image sensor according to the first embodiment. Figure 6 shows the region of image P from (x0, y0) to (x507, y59), and Figure 7 shows the region of image P from (x0, y60) to (x507, y180). Figures 8(a) to (h) show the extracted images p1 to p8, respectively. These extracted images p1 to p8 are images of the captured objects E1 to E8. 【0037】 In step S2, the image processing device 7 generates an image P based on the pixel signals acquired from the image sensor 11. 【0038】 In this embodiment, the illumination time of the lighting device 2 is sufficiently short compared to the transport speed of rollers 4 and 5, so the captured image does not stretch in the Y direction. If the illumination time is sufficiently long compared to the transport speed, the image Pi will stretch in the Y direction. For example, if an object E is imaged with a resolution of 25 μm, a transport speed of 2500 mm / sec, and an illumination time of 10 μsec, the image will be 2500 (mm / sec) × 10 μsec = 25 μm, which is approximately 2 pixels longer in the Y direction. 【0039】 Then, in step S3, the image processing device 7 performs an image extraction process. Specifically, the image processing device 7 extracts an extracted image p of the object E based on the feature quantities of each image (xi, yj) in image P. Examples of these feature quantities include the brightness value and lightness of each image (xi, yj) in image P. Alternatively, the feature quantities may be determined based on the feature quantities of sheet S that do not contain the object E. Furthermore, the presence or absence of the object E is determined using feature quantities such as the area value, size in the X direction, size in the Y direction, shape, and sum of density of the object E. In this embodiment, the case where the feature quantities are the brightness values ​​of each image (xi, yj) in image P will be explained as an example. 【0040】 Figure 8 shows the brightness values ​​for each image (xi, yj) in image P. In Figure 8, the brightness values ​​are displayed in 8-bit 256 gradations, with a minimum brightness value of 0 and a maximum brightness value of 255. In Figure 8, the brightness value is 0 when there is no object E on sheet S (ground level). 【0041】 First, the image processing device 7 extracts images (xi, yj) whose brightness values ​​are above a threshold. Then, the image processing device 7 selects multiple adjacent images (xi, yj) from the extracted images as a single object E. Here, "adjacent images" refers to images that are adjacent to one image in the X direction (horizontal direction), Y direction (vertical direction), and X and Y directions (diagonal directions). Specifically, for image (xi, yj), the adjacent images would be images (xi, yj±1), (xi±1, yj), and (xi±1, yj±1). The image processing device 7 then generates an extracted image p that includes the extracted object E. 【0042】 For example, if the luminance threshold is set to 20, the image processing device 7 extracts the region of the image (xi, yj) enclosed by the solid line from Figures 6 and 7 as an image containing the objects E1 to E8. The image processing device 7 then generates extracted images p1 to p8, each containing the objects E1 to E8 (see Figure 8). 【0043】 Furthermore, if the image processing device 7 generates an extracted image p from image P in step S4, it determines that image P contains an extracted image p of the target object E. 【0044】 (Regarding the generation of corrected images and the determination of the object's size) Next, with reference to Figure 9, the process of generating the corrected image pw (step S5) of the image processing device 7 will be explained. Figure 9 is a flowchart illustrating the flow of the corrected image generation process of the image processing device according to the first embodiment. 【0045】 When the image processing device 7 acquires extracted images p (extracted images p1 to p8 in each figure of Figure 8) (step S11), it performs a grouping process on the extracted images p (step S12). Specifically, the image processing device 7 compares the coordinates of the object E contained in each extracted image p and classifies extracted images p that satisfy predetermined conditions into the same group. For example, in Figures 6 and 7, with reference to extracted image p1, extracted image p2 is at a position corresponding to the first offset value, extracted image p3 is at a position corresponding to the second offset value, and extracted image p4 is at a position corresponding to the third offset value, so extracted images p1 to p4 are classified into the same group. Similarly, with reference to extracted image p5, extracted image p6 is at a position corresponding to the first offset value, extracted image p7 is at a position corresponding to the second offset value, and extracted image p8 is at a position corresponding to the third offset value, so extracted images p5 to p8 are classified into the same group. 【0046】 As described above, the illumination device 2 irradiates light four times within a single exposure time. Therefore, in image P, four extracted images p are generated for one object E. Furthermore, the illumination device 2 and actuator 9 are driven so that, using the position of the image of object E captured by the first light as a reference, the image of object E captured by the second light is generated at a position corresponding to the first offset value, the image of object E captured by the third light is generated at a position corresponding to the second offset value, and the image of object E captured by the fourth light is generated at a position corresponding to the third offset value. Therefore, by classifying the extracted images p into groups based on the first to third offset values, it can be determined that extracted images p belonging to the same group represent the same object E. That is, in this embodiment, it can be determined that objects E1 to E4 are the same object, and objects E5 to E8 are the same object. Also, extracted images p1 to p4 belong to the same group, and extracted images p5 to p8 belong to different groups. 【0047】 After step S12, the image processing device 7 doubles the extracted images p1 to p8 in the X and Y directions. Then, the image processing device 7 synthesizes the extracted images p by superimposing the extracted images p belonging to the same group based on the centroid coordinates of the images (step S13). This synthesized extracted image p becomes the corrected image pw (step S5). More specifically, the image processing device 7 generates a corrected image of the object represented by extracted images p1 to p4 by synthesizing extracted images p1 to p4. The image processing device 7 also generates a corrected image of another object represented by extracted images p5 to p8 by synthesizing extracted images p5 to p8. 【0048】 Then, the image processing device 7 determines the size of the object E from the generated corrected image pw (step S6). For example, the size of the object E can be determined by area, maximum length, aspect ratio, height, width, Ferret diameter (maximum value, minimum value, etc.), or principal axis length (maximum value, minimum value, etc.). 【0049】 Alternatively, the size of the object E may be determined after binarization has been performed on each image of the corrected image pw. 【0050】 As described above, the inspection apparatus according to this embodiment comprises an imaging device 1 that images a sheet S (object to be inspected) and outputs an image P, an illumination device 2, rollers 3 to 5 and actuators 9 (moving means), and an image processing device 7. The illumination device 2 irradiates the sheet S with light multiple times during one imaging time. The rollers 3 to 5 and actuators 9 change the relative positions of the illumination device 2, the imaging device 1 and the sheet S during one imaging time. The image processing device 7 extracts images of multiple objects E included in the image P and determines the size of the object E by combining the extracted images of the multiple objects E. With this configuration, during one imaging time, the illumination device 2 irradiates the sheet S with light multiple times, and the rollers 3 to 5 and actuators 9 change the relative positions of the illumination device 2, the imaging device 1 and the sheet S. Therefore, the image P output by the imaging device 1 includes images of multiple objects E. The image processing device 7 then combines the images of the multiple objects E included in the image P. 【0051】 During the imaging time, the illumination device 2 irradiates the sheet S with light multiple times, and the rollers 3-5 and actuator 9 change the relative positions of the illumination device 2, the imaging device 1, and the sheet S. This suppresses the positional displacement of the object E due to the way light hits the sheet S. As a result, the image of the object E can be accurately synthesized, and the size of the object on the inspected object can be accurately detected. Therefore, the reproducibility and detection probability of the object (foreign object or defect) on the inspected object (sheet S) can be improved. 【0052】 Furthermore, the actuator 9 moves the illumination device 2 and the imaging device 1 in the X direction, which is perpendicular to the Y direction, which is the transport direction of the sheet S. This makes it possible to change the relative position between the illumination device 2, the imaging device 1 and the sheet S in either the X or Y direction. 【0053】 (Second Embodiment) The second embodiment differs from the first embodiment in the configuration of the lighting device 2 and the operation of the image processing device. In the second embodiment, the same reference numerals are used for components that are the same as in the first embodiment, and their descriptions are omitted. 【0054】 (Regarding the operation of the imaging and illumination equipment) In the second embodiment, the lighting device 2 is capable of emitting light in different wavelength bands. Specifically, in the second embodiment, the lighting device 2 is capable of emitting light in the first to third wavelength bands and the reference wavelength band. The first wavelength band is the red wavelength band (625 to 780 nm), the second wavelength band is the green wavelength band (500 to 565 nm), the third wavelength band is the blue wavelength band (450 to 485 nm), and the reference wavelength band is 400 to 800 nm. Furthermore, the reference wavelength band does not necessarily have to include the entire range of the first, second, and third wavelength bands; it is sufficient to include a portion of each wavelength band. In other words, the reference wavelength band only needs to overlap with the wavelength bands of the first, second, and third wavelength bands. 【0055】 Figure 10 is a timing chart showing the imaging timing of the imaging device, the illumination timing of the lighting device, and the drive timing of the actuator in the inspection apparatus according to the first embodiment. As shown in Figure 10, exposure of the image sensor 11, reading of the pixel signal, and light irradiation by the lighting device 2 occur within one frame. 【0056】 Illumination device 2 irradiates light from four different wavelength bands (here, the first to third wavelength bands and the reference wavelength band) at different timings within an exposure time of 1. Specifically, illumination device 2 irradiates light from the reference wavelength band after a predetermined number of pulses (e.g., 0 pulses) from the start of exposure. The illumination time at this time is 3 μsec. Illumination device 2 irradiates light from the first wavelength band after a predetermined number of pulses (e.g., 513 pulses) from the start of exposure. The illumination time at this time is 3 μsec. Illumination device 2 irradiates light from the second wavelength band after a predetermined number of pulses (e.g., 1500 pulses) from the start of exposure. The illumination time at this time is 3 μsec. Illumination device 2 irradiates light from the third wavelength band after a predetermined number of pulses (e.g., 3013 pulses) from the start of exposure. The illumination time at this time is 3 μsec. Note that the order of light irradiation in each wavelength band shown in Figure 10 is merely an example, and illumination device 2 may irradiate light in each wavelength band in any order. Furthermore, in this embodiment, the illumination device 2 irradiates light in four wavelength bands at different timings during one imaging time, but is not limited to this, and the illumination device 2 may irradiate light in multiple (two or more) wavelength bands during one imaging time. 【0057】 Furthermore, as shown in Figure 10, the actuator 9 is driven between the time the illumination device 2 emits light and the time it emits the next light, in order to shift the imaging position of the sheet S (object E), thereby changing the positions of the imaging device 1 and the illumination device 2. Specifically, the actuator 9 moves the positions of the imaging device 1 and the illumination device 2 in the X direction by a resolution of +1 / N between the time the illumination device 2 emits light in the first wavelength band and the time it emits light in the second wavelength band. Then, after the illumination device 2 emits light in the third wavelength band, the actuator 9 moves the positions of the imaging device 1 and the illumination device 2 in the X direction by a resolution of -1 / N, returning the imaging device 1 and the illumination device 2 to their original positions. In this embodiment, since N=2, the amount of movement of the imaging device 1 and the illumination device 2 in the X direction by the actuator 9 is approximately 13 μm. 【0058】 Through the operation of the imaging device 1, illumination device 2, and actuator 9 described above, the imaging position of object E can be shifted in the X and Y directions and imaged. Specifically, using the position of the image of object E captured by light in the reference wavelength band as a reference, the image of object E captured by light in the first wavelength band is generated at a position offset by 0 μm in the X direction and 513 μm in the Y direction (second offset value), the image of object E captured by light in the second wavelength band is generated at a position offset by 13 μm in the X direction and 1500 μm in the Y direction (third offset value), and the image of object E captured by light in the third wavelength band is generated at a position offset by 13 μm in the X direction and 3013 μm in the Y direction (fourth offset value). 【0059】 (Regarding the operation of the image processing device) The inspection method for the object to be inspected according to the second embodiment will be described with reference to Figures 10 to 19. Figure 11 is a flowchart illustrating the overall operation flow of the image processing device according to the second embodiment. 【0060】 As shown in Figure 11, in the inspection method for the object to be inspected according to the second embodiment, the image processing device 7 executes the physical property determination process described later (step S7) if step S4 is Yes. 【0061】 (Regarding image extraction processing) The image extraction process of the image processing apparatus 7 according to the second embodiment will be explained with reference to Figures 12 to 17. Figures 12 and 13 show examples of images of a sheet captured by the image sensor according to the second embodiment. Figures 14 and 15 show examples of brightness values ​​of the extracted images according to the second embodiment. Figure 12 shows the region of image P from image (x0, y0) to image (x507, y59), and Figure 13 shows the region of image P from image (x0, y60) to image (x507, y180). Figures 14(a) to (d) and Figures 15(a) to (g) show the extracted images p11 to p21 of Figures 12 and 13, respectively. Furthermore, the objects shown in the extracted images p11 to p21 are referred to as objects E11 to E21. 【0062】 As described above, the illumination device 2 irradiates light from the first to third wavelength bands and the reference wavelength band at different timings within the exposure time 1. As a result, image P will generate 4 extracted images for each object. However, in Figures 12 to 15, only 11 extracted images are formed. This is thought to be because two objects E are in the vicinity of the same X coordinate, causing images of different objects E (extracted image p16 in Figure 12) to overlap. Therefore, in the second embodiment, a grouping process of the extracted images (objects) (Figure 16) is performed, which differs from that in the first embodiment. This makes it possible to extract all objects E without omission. 【0063】 Figure 16 is a flowchart showing the grouping process according to the second embodiment. 【0064】 First, the image processing device 7 performs a binarization process on the extracted images p11 to p21 using a predetermined feature quantity as a threshold (for example, 20), extracts objects E11 to E21 from each extracted image, and registers the extracted objects in a list (step S401). Examples of feature quantities at this time include brightness values, the position of the object, and the fillet diameter. In this embodiment, the case where the feature quantity is a brightness value will be explained as an example. 【0065】 Next, the image processing device 7 extracts the object Ea with the smallest Y coordinate from among the objects E registered in the list (step S402). Then, the image processing device 7 determines whether or not an object Eb exists at the position of the first offset value, using the X and Y coordinates of object Ea as a reference (step S403). The first offset value refers to the distance caused by the timing difference between when the illumination device 2 irradiates light of the reference wavelength band and light of the first wavelength band. 【0066】 If the image processing device 7 determines that an object Eb exists at the position of the first offset value (Yes in step S403), it extracts the object Eb (step S404a). On the other hand, if the image processing device 7 determines that an object Eb does not exist at the position of the first offset (No in step S403), it reads the initial list and extracts the object Eb that exists at the position of the first offset value based on the X,Y coordinates of the object Ea (step S404a). As will be explained in more detail later, the extracted object is deleted from the list. For this reason, if objects overlap (for example, object E16 in Figure 12), the object may have already been deleted from the list. Here, in order to extract all objects E without omission, object Eb is extracted from the initial list. Note that in the processes of steps S406b and S408b described below, the same process as in step S404a is performed for the same reason. 【0067】 After steps S404a and S404b, the image processing device 7 determines whether or not an object Ec exists at the position of the second offset value, based on the X and Y coordinates of the object Ea (step S405). The second offset value refers to the distance caused by the timing difference between when the illumination device 2 irradiates light of the reference wavelength band and light of the second wavelength band, and by the driving of the actuator 9. If the image processing device 7 determines that an object Ec exists at the position of the second offset value (Yes in step S405), it extracts the object Ec (step S406a). On the other hand, if the image processing device 7 determines that an object Ec does not exist at the position of the second offset (No in step S405), it reads the initial list and extracts an object Ec that exists at the position of the second offset value, based on the X and Y coordinates of the object Ea (step S406a). 【0068】 After steps S406a and S406b, the image processing device 7 determines whether or not object Ed exists at the position of the third offset value, based on the X and Y coordinates of object Ea (step S407). The third offset value refers to the distance caused by the timing difference between when the illumination device 2 irradiates light of the reference wavelength band and light of the third wavelength band, and by the driving of the actuator 9. If the image processing device 7 determines that object Ed exists at the position of the third offset value (Yes in step S407), it extracts the object Ed (step S408a). On the other hand, if the image processing device 7 determines that object Ed does not exist at the position of the third offset (No in step S407), it reads the initial list and extracts object Ed that exists at the position of the third offset value, based on the X and Y coordinates of object Ea (step S408a). 【0069】 After steps S406a and S406b, the image processing device 7 classifies the extracted objects Ea to Ed into the same group (step S409). Then, the image processing device 7 removes the extracted objects Ea to Ed from the list (step S410). 【0070】 After step S410, the image processing device 7 determines whether there are any objects remaining in the list (step S411). If the image processing device 7 determines that there are still objects remaining in the list (Yes in step S411), it returns to step S401 and performs the grouping process again. If the image processing device 7 determines that there are no more objects remaining in the list (YNo in step S411), it terminates the process. In other words, the image processing device 7 performs the grouping process until all objects have been classified. As a result of this grouping, objects E classified into the same group will represent the same object E. 【0071】 In step S404b, if the initial list is read and object Ea does not exist at the position of the first offset value based on the X,Y coordinates of object Ea, it is considered that object Ea was not generated by irradiating it with light in the reference wavelength band, but rather by irradiating it with light in one of the first to third wavelength bands. In this case, the image processing device 7 extracts objects at the positions of the first to third offset values ​​based on the X,Y coordinates of this object Ea from the initial list. The extracted object is designated as object Ea, and the processing from step S403 onwards is repeated. As described above, the first to third offset values ​​are set to different values. Therefore, only one true object Ea will be extracted. Note that the offset position for performing this grouping process may have a range to ensure that the image of object E is reliably extracted. 【0072】 For example, in Figures 12 and 13, objects E11 to E21 are registered in the initial list, and in the first grouping process, objects E15, E16, E18, and E20 are classified into the same group. Next, in the second grouping process, objects E11 to E14 are classified into the same group. Then, in the third grouping process, object E17 is determined to be object Ea. At this point, neither object E19 nor E21, which remain in the list, are located at the position of the first offset value when relative to object E17. Therefore, the image processing device 7 cannot extract object Eb. So, the image processing device 7 extracts objects E at the positions of the first to third offsets, relative to object E17. At this point, the image processing device 7 determines that object E16 is the true object Ea because object E16 is located at the position of the first offset when relative to object E17. As a result, the image processing device 7 treats object E16 as object Ea and executes the processing from step S403 onward, classifying objects E16, E17, E19, and E21 into the same group. 【0073】 Here, objects E (extracted images p) classified into the same group can be determined as follows, since the illumination device 2 irradiates light in the order of the first to third reference wavelength bands: the extracted image p with the smallest Y coordinate is the extracted image generated by irradiation with light in the reference wavelength band (hereinafter referred to as the "reference image"), the extracted image p with the second smallest Y coordinate is the extracted image generated by irradiation with light in the first wavelength band (hereinafter referred to as the "first image"), the extracted image p with the third smallest Y coordinate is the extracted image generated by irradiation with light in the third wavelength band (hereinafter referred to as the "second image"), and the extracted image p with the largest Y coordinate is the extracted image generated by irradiation with light in the third wavelength band (hereinafter referred to as the "third image"). For example, in Figures 12 to 15, the reference images are extracted images p11, p15, and p16; the first images are extracted images p12, p16, and p17; the second images are extracted images p13, p18, and p19; and the third images are extracted images p14, p20, and p21. 【0074】 Next, we will explain the process of generating the original extracted image. 【0075】 In the grouping process described above, if one object E is classified into multiple groups, the extracted images p of the overlapping objects E will be grouped. In this case, the physical property determination process described later cannot be performed from the extracted images p of the overlapping objects E. Therefore, the image processing device 7 performs a process to generate an extracted image p of the original object E. In Figure 5, the processing from step S4 onward is performed using the extracted image p generated by this process. 【0076】 One method for generating the original extracted image is, for example, if the reference image overlaps with other extracted images p, the original reference image can be generated by combining the first to third images belonging to the same group. For example, in Figure 14, extracted image p11 can be generated by combining extracted images p12 to p14. 【0077】 Furthermore, if any one of the first to third extracted images overlaps with another extracted image p, that extracted image can be generated by subtracting the extracted image from the first to third images that does not overlap with the other extracted image p from the reference image. For example, in Figure 14, extracted image p12 can be generated by subtracting the feature quantities of extracted images p13 and p14 from the feature quantities of extracted image p11. 【0078】 Furthermore, if any one of the first to third extracted images overlaps with another extracted image p, that extracted image can be generated from the reflectance of the object E that can be calculated (details will be described later). As will be described in detail later, among the extracted images p belonging to the same group, the image with the most features among the reference images is denoted as image δ, the image with the most features among the first images is denoted as image α, the image with the most features among the second images is denoted as image β, and the image with the most features among the third images is denoted as image γ. In this case, the reflectance R of the object E in the first wavelength band is (luminance value of image α) / (luminance value of image δ). The reflectance R of the object E in the second wavelength band is (luminance value of image β) / (luminance value of image δ). The reflectance R of the object E in the third wavelength band is (luminance value of image β) / (luminance value of image δ). 【0079】 For example, in Figures 12 to 15, the extracted image p16 is a superposition of two images of object E. Therefore, the extracted image p16 cannot be used as the first image of object E15. 【0080】 Here, as shown in Figures 14 and 15, from the extracted images p15 and p18 (second image), the reflectance R22 of object E15 (E18, E20) in the second wavelength band is 150 / 255 ≈ 0.59, so the reflectance R22 is 59%. From the extracted images p15 and p20 (third image), the reflectance R23 of object E15 in the third wavelength band is 204 / 255 ≈ 0.8, so the reflectance R23 is 80%. Referring to the spectral reflectance curve in Figure 18, it can be determined that object E15 is made of Cu. From this, the reflectance R21 of object E15 in the first wavelength band can be determined to be approximately 50%. By multiplying this reflectance R23 by the feature quantity (luminance value) of the extracted image p15, an extracted image p16a of the object E15 in the first wavelength band (see Figure 17(a)) can be generated. 【0081】 Furthermore, a reference image of object E17 can be generated by subtracting the estimated extracted image p16a from the extracted image p16. However, in this image generation method, as shown in Figure 17(b), the brightness value in the center of the image is higher than that in the periphery of the image, and the extracted image p16b cannot be correctly estimated. This is thought to be due to the fact that in extracted image p16, the two objects E16 and E17 overlapped, resulting in the highest brightness value exceeding 255. Therefore, a reference image of object E17 can be estimated using extracted image p18, which belongs to the same group as object E17 and does not overlap. Specifically, by multiplying the entire image of extracted image p18 by the maximum magnification of extracted images p16b and p18 (image a2 / image a1 = 150 / 110), an extracted image p16c of object E17 in the reference wavelength band (Figure 17(c)) can be generated. 【0082】 (Regarding the material property determination process) Referring to Figures 18 and 19, the physical property determination process (step S7) of the image processing apparatus 7 according to the second embodiment will be described. Figure 18 is a flowchart illustrating the flow of the physical property determination process of the image processing apparatus according to the second embodiment. 【0083】 When the image processing device 7 acquires extracted images p (in Figure 18, extracted images p11 to p21 and the estimated extracted image) (step S31), it extracts the image δ with the highest number of features from among the extracted images p belonging to the same group, which are included in the reference image (extracted image p with the smallest Y coordinate) (step S32). 【0084】 The image processing device 7 extracts the image α with the highest number of features from among the extracted images p belonging to the same group, which are included in the first image (extracted image p with the second smallest Y coordinate) (step S33). 【0085】 The image processing device 7 extracts the image β with the highest number of features from among the extracted images p belonging to the same group, which are included in the second image (extracted image p with the third smallest Y coordinate) (step S34). 【0086】 The image processing device 7 extracts image γ, which has the highest number of features, from among the extracted images p belonging to the same group, which are included in the third image (extracted image p with the largest Y coordinate) (step S35). 【0087】 For example, in Figure 18, extracted images p11 to p14 are classified into the same group. In Figure 18, among extracted images p11 to p14, image δ4 in extracted image p11 corresponds to image δ, image α4 in extracted image p12 corresponds to image α, image β4 in extracted image p13 corresponds to image β, and image γ4 in extracted image p14 corresponds to image γ. 【0088】 After step S35, the reflectances R31 to R33 of the object E11 (E12 to E14) in the first, second, and third wavelength bands are determined based on the brightness values ​​of image δ and images α, β, and γ (step S36). Specifically, the reflectance R31 can be calculated as (brightness value of image α) / (brightness value of image δ). The reflectance R32 can be calculated as (brightness value of image β) / (brightness value of image δ). The reflectance R33 can be calculated as (brightness value of image γ) / (brightness value of image δ). 【0089】 For example, in Figure 18, the reflectance R31 of object E11 is approximately 0.52 (R31 = 133 / 255 ≈ 0.52), so the reflectance R31 of object E11 is 55%. The reflectance R32 of object E1 is approximately 0.60 (R32 = 155 / 255 ≈ 0.60), so the reflectance R32 of object E11 is 60%. The reflectance R33 of object E11 is approximately 0.58 (R33 = 148 / 255 ≈ 0.58), so the reflectance R33 of object E11 is 58%. Similarly, the reflectance R of objects E15 and E17 can be calculated. 【0090】 After step S36, the reflectance is plotted on a graph (step S37). The reflectance R for each wavelength band obtained is plotted on a graph with wavelength on the X axis and reflectance R on the Y axis. In this embodiment, the reflectance R for each wavelength band is plotted at the median value of the wavelength band (see Figure 19). 【0091】 As shown in Figure 19, the plotted reflectance and spectral reflectance curve are compared, and the closest spectral reflectance curve is selected based on the correlation. Based on the spectral reflectance curve, the physical properties of object E are determined (step S38). The plot of reflectance of object E11 (E12~E14) most closely approximates the spectral reflectance curve of Fe. Therefore, the image processing device 7 determines that object E11 is Fe. The plot of reflectance of object E15 (E16, E18, E20) most closely approximates the spectral reflectance curve of Al. Therefore, the image processing device 7 determines that object E15 is Al. The plot of reflectance R of object E17 (E16, E19, E21) most closely approximates the spectral reflectance curve of Cu. Therefore, the image processing device 7 determines that object E17 is Cu. 【0092】 (Regarding the determination of the object's size) Next, the size determination process (step S6) of the object E in the image processing apparatus according to the second embodiment will be described. 【0093】 As described above, objects E11 to E14 (Figures 12(a) to (d)) are the same object, and extracted images p11 to p14 are images of the same object captured with light in different wavelength bands. In other words, by multiplying the brightness value of each extracted image p12 to p14 by the reciprocal of the reflectance (ratio of maximum brightness values), extracted images p12 to p14 can be corrected to have brightness values ​​similar to those of an image captured with light in the reference wavelength band. 【0094】 As described above, the maximum brightness value of pixels in extracted image p11 (Figure 12(a)) is 255, the maximum brightness value of pixels in extracted image p12 (Figure 12(b)) is 140, the maximum brightness value of pixels in extracted image p13 (Figure 12(c)) is 155, and the maximum brightness value of pixels in extracted image p14 (Figure 12(d)) is 155. Therefore, each image in extracted image p12 is multiplied by 255 / 140, each image in extracted image p13 is multiplied by 255 / 155, and each image in extracted image p14 is multiplied by 255 / 155. As a result, extracted images p12 to p14 are corrected to extracted images p12' to p14' (see Figures 20(a) to (c)). The image processing device 7 generates a corrected image pw using extracted image p11 and the corrected extracted images p12' to p14'. Then, the image processing device 7 determines the size of the object E. 【0095】 As described above, the inspection apparatus according to this embodiment comprises an imaging device 1 that images a sheet S (object to be inspected) and outputs an image P, an illumination device 2, rollers 3 to 5 and actuators 9 (moving means), and an image processing device 7. The illumination device 2 is capable of irradiating light in a first wavelength band, light in a second wavelength band, light in a third wavelength band, and light in a reference wavelength band whose wavelength bands overlap with the first, second, and third wavelength bands. During an imaging time of 1, the illumination device irradiates the sheet S with light in the first wavelength band, light in the second wavelength band, light in the third wavelength band, and light in the reference wavelength band at different timings. Based on the image output by the imaging device 1, the image processing device 7 calculates the first reflectance, which is the reflectance in the first wavelength band, the second reflectance, which is the reflectance in the second wavelength band, and the third reflectance, which is the reflectance in the third wavelength band, of the object E, and determines the physical properties of the object E based on the first reflectance, the second reflectance, and the third reflectance. In this configuration, the illumination device 2 irradiates the sheet S with light from the first wavelength band, the second wavelength band, and the reference wavelength band at different timings during the imaging time 1, thereby forming an extracted image p of the object E using light from the first wavelength band, an extracted image p of the object E using light from the second wavelength band, an extracted image p of the object E using light from the third wavelength band, and an extracted image p of the object E using light from the fundamental wavelength band in the image P. Based on these four extracted images p, the reflectances R31, R32, and R33 of the object E in the first, second, and third wavelength bands can be determined, respectively, and thus the physical properties of the object E can be determined. Furthermore, since the image P includes an extracted image p of the object E using light from the first wavelength band, an extracted image p of the object E using light from the second wavelength band, an extracted image p of the object E using light from the third wavelength band, and an extracted image p of the object E using light from the fundamental wavelength band, it is not necessary to photograph the sheet S for each wavelength band, and the increase in imaging time can be suppressed. Therefore, it is possible to determine the physical properties of the object while suppressing the increase in imaging time. 【0096】 Furthermore, the image processing device 7 determines the physical properties of object E by comparing the reflectances R31, R32, and R33 with spectral reflectance data that shows the spectral reflectances of multiple materials. This allows for a more accurate determination of the physical properties of object E. 【0097】 Furthermore, if there are multiple objects E on the sheet S, the image processing device 7 generates the remaining image from any two of the following images: the first image, which is the extracted image p of an object E using light in the first wavelength band; the second image, which is the extracted image p of an object E using light in the second wavelength band; the third image, which is the extracted image p of an object E using light in the third wavelength band; and the reference image, which is the extracted image p of an object E using light in the reference wavelength band. As a result, even if one of the first image, second image, third image, and reference image overlaps with the extracted image p of another object E in the image P generated from the pixel signal, it is possible to generate that image from the other images among the first image, second image, third image, and reference image, excluding the image in question. 【0098】 Furthermore, the image processing device 7 synthesizes the feature quantities of the first image, the second image, and the third image to generate a reference image. This allows the reference image to be generated from the first image, the second image, and the third image, even if the reference image overlaps with other extracted images p in image P. 【0099】 Furthermore, the image processing device 7 generates a third image by subtracting the feature quantities of the first image from the feature quantities of the reference image. This allows the first image to be generated from the reference image and the second image, even if the first image overlaps with other extracted images p in image P. 【0100】 Furthermore, if multiple objects E exist on the sheet S, the image processing device 7 classifies the first image, second image, and reference image according to each of the multiple objects E. The image processing device 7 also calculates the first reflectance, second reflectance, and third reflectance based on the first image, second image, third image, and reference image classified into the same group. This allows the physical properties of each object E to be determined when multiple objects E exist on the sheet S. 【0101】 (Other embodiments) As described above, embodiments have been explained as examples of the technology disclosed in this application. However, the technology in this disclosure is not limited thereto and can be applied to embodiments that are modified, replaced, added, or omitted as appropriate. 【0102】 In the above embodiment, the imaging device 1 and illumination device 2 are configured as dark-field optical systems, but they may also be configured as bright-field optical systems. Furthermore, the imaging device 1 is configured as a line sensor, but it may also be configured as an area sensor. In addition, the image processing device 7 may generate video or still images from the pixel signals output from the image sensor 11. 【0103】 Furthermore, the arrangement of pixels 10 on the image sensor 11 is not limited to the arrangement described above. Also, the number of pixels on the image sensor 11 is not limited to the number described above. 【0104】 Furthermore, although rollers 3 to 5 and actuator 9 were described as examples of moving means in each of the above embodiments, the means are not limited to these, and any moving means that can change the relative position between the sheet S and the imaging device 1 and the lighting device 2 may be used. [Industrial applicability] 【0105】 The inspection apparatus described herein can be used to inspect for foreign matter, defects, and other issues contained in components used in semiconductors, electronic devices, secondary batteries, and the like. [Explanation of symbols] 【0106】 A Inspection device 1. Imaging device 2. Lighting device 3-5 Roller (means of transportation) 7 Image Processing Device 9. Actuators (means of movement) 10 pixels 11 Image sensor E(E1~E8, E11~E21) Target object P Image p(p1~p8,p11~p21,p16a~p16c) Extracted images PW corrected image

Claims

[Claim 1] An inspection method for detecting objects contained in an object to be inspected by imaging them with an inspection device, The inspection device, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, The system comprises an image processing device and, The illumination device includes an irradiation step in which it irradiates the object to be inspected with light multiple times during an imaging time, The moving means includes a moving step that changes the relative position of the illumination device and the imaging device and the object to be inspected during the imaging time of 1, An inspection method comprising: a determination step in which the image processing device extracts a plurality of images of the object contained in an image output by the imaging device, and determines the size of the object by synthesizing the plurality of extracted images of the object. [Claim 2] In the inspection method described in claim 1, The inspection apparatus further comprises actuators for changing the positions of the illumination device and the imaging device, In the aforementioned movement step, the actuator moves the illumination device and the imaging device in a direction perpendicular to the transport direction of the object to be inspected, in this inspection method. [Claim 3] In the inspection method described in claim 1, The illumination device is capable of irradiating light in a first wavelength band, light in a second wavelength band, light in a third wavelength band, and light in a reference wavelength band whose wavelength bands overlap with the first, second, and third wavelength bands. In the irradiation step, the illumination device irradiates the object to be inspected with light of the first wavelength band, light of the second wavelength band, light of the third wavelength band, and light of the reference wavelength band at different timings during the imaging time of 1. In the determination step, the image processing device calculates a first reflectance, which is the reflectance in the first wavelength band, a second reflectance, which is the reflectance in the second wavelength band, and a third reflectance, which is the reflectance in the third wavelength band, of the object based on the image output by the imaging device, and determines the physical properties of the object based on the first reflectance, the second reflectance, and the third reflectance. [Claim 4] In the inspection method described in claim 3, An inspection method further comprising the step of determining the physical properties of an object by comparing the first reflectance, the second reflectance, and the third reflectance with spectral reflectance data indicating the spectral reflectance of a plurality of substances using the image processing device. [Claim 5] In the inspection method described in claim 3, An inspection method further comprising the step of generating a remaining image from any two of the following images when the object to be inspected has a plurality of objects: a first image which is an image of the object using light in the first wavelength band, a second image which is an image of the object using light in the second wavelength band, a third image which is an image of the object using the third wavelength band, and a reference image which is an image of the object using the reference wavelength band. [Claim 6] In the inspection method described in claim 5, An inspection method comprising the step of generating a reference image by synthesizing the feature quantities of the first image, the second image, and the third image using the image processing device. [Claim 7] In the inspection method described in claim 5, An inspection method comprising the step of generating a third image by subtracting the feature quantities of the first image from the feature quantities of the reference image, using the image processing device. [Claim 8] In the inspection method described in claim 6, An inspection method wherein the aforementioned feature quantity is the brightness value or lightness of the object. [Claim 9] In the inspection method described in claim 3, The image processing apparatus, when there are multiple objects in the object to be inspected, performs the steps of generating, for each of the multiple objects, a first image which is an image of the object using light in the first wavelength band, a second image which is an image of the object using light in the second wavelength band, a third image which is an image of the object using light in the third wavelength band, and a reference image which is an image of the object using the reference wavelength band. The image processing apparatus performs the step of classifying the first image, the second image, the third image, and the reference image according to the plurality of objects, An inspection method further comprising the step of the image processing device calculating a first reflectance and a second reflectance based on a first image, a second image, a third image, and a reference image classified into the same group. [Claim 10] In the inspection method according to claim 1 or 2, In the aforementioned determination step, The image processing device compares the coordinates of the object contained in multiple images of the extracted object and classifies the multiple images of the object that are determined to represent the same object into the same group. An inspection method for determining the size of an object based on an image obtained by combining multiple images of the same object classified into the same group. [Claim 11] An inspection method for detecting objects contained in an object to be inspected by imaging with an inspection device, The inspection device, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, Image processing device and The system includes actuators for changing the position of the illumination device and the imaging device, The illumination device includes an irradiation step in which it irradiates the object to be inspected with light multiple times during an imaging time, The moving means is a moving step that changes the relative positions of the illumination device and the imaging device and the object under inspection during the imaging time of 1, and the actuator moves the illumination device and the imaging device relative to the object under inspection in a direction perpendicular to the transport direction of the object under inspection between the time the illumination device emits light and the time it emits the next light, An inspection method comprising: a determination step in which the image processing device extracts a plurality of images of the object contained in an image output by the imaging device, and determines the size of the object by synthesizing the plurality of extracted images of the object. [Claim 12] An inspection method for detecting objects contained in an object to be inspected by imaging with an inspection device, The inspection device, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, The system comprises an image processing device and, The illumination device includes an irradiation step in which it irradiates the object to be inspected with light multiple times during an imaging time, The moving means includes a moving step that changes the relative position between the illumination device and the imaging device and the object to be inspected during the imaging time of 1, An inspection method comprising: a determination step in which the image processing device extracts multiple images of the same object, which are included in the image output by the imaging device and are generated at different positions due to the change in relative position during the imaging time 1, and determines the size of the object by synthesizing the multiple extracted images of the same object. [Claim 13] An inspection device for detecting objects contained in an object to be inspected, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, The system comprises an image processing device and, The illumination device irradiates the object to be inspected with light multiple times during an imaging time. The moving means changes the relative positions of the illumination device and the imaging device and the object to be inspected during the imaging time of 1. The image processing device is an inspection device that extracts multiple images of the object from the image output by the imaging device and determines the size of the object by combining the extracted multiple images of the object. [Claim 14] In the inspection apparatus according to claim 13, The aforementioned means of transport is a roller for transporting the object to be inspected, in this inspection device. [Claim 15] In the inspection apparatus according to claim 13, An inspection apparatus further comprising actuators for moving the lighting device and the imaging device. [Claim 16] In the inspection apparatus according to any one of claims 13 to 15, The aforementioned image processing device is The coordinates of the object included in multiple images of the extracted object are compared, and multiple images of the object that are determined to represent the same object are classified into the same group. An inspection device that determines the size of an object based on an image obtained by synthesizing multiple images of the same object. [Claim 17] An inspection method for detecting an object contained in an object to be inspected, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, Image processing device and The system includes actuators for changing the position of the illumination device and the imaging device, The illumination device irradiates the object to be inspected with light multiple times during an imaging time. The moving means changes the relative positions of the illumination device and the imaging device and the object under inspection during the imaging time of 1, and the actuator moves the illumination device and the imaging device relative to the object under inspection in a direction perpendicular to the transport direction of the object under inspection between the time the illumination device emits light and the time it emits the next light. The image processing device is an inspection device that extracts multiple images of the object from the image output by the imaging device and determines the size of the object by combining the extracted multiple images of the object. [Claim 18] An inspection method for detecting an object contained in an object to be inspected, An imaging device that images the object to be inspected and outputs the image, Lighting equipment, Means of transportation, The system comprises an image processing device and, The illumination device irradiates the object to be inspected with light multiple times during an imaging time. The moving means changes the relative positions of the illumination device and the imaging device and the object to be inspected during the imaging time of 1, An inspection device in which the image processing device extracts multiple images of the same object that are included in the image output by the imaging device and are generated at different positions due to the change in relative position during the imaging time, and determines the size of the object by synthesizing the multiple extracted images of the same object.

Images