vacuum valve

Abstract

To provide a vacuum valve that allows each of a first valve opening and a second valve opening to be sealed by each of a first valve plate and a second valve plate, in an alternate manner.SOLUTION: In a blocked state, a closure unit (8) situated in a middle position is prohibited from deforming toward an open position in a direction opposite to a longitudinal deforming direction (10). In a release state, the closure unit (8) is permitted to deform toward the open position. In the blocked state, if an actuator causes a transmission unit (16) to deform with respect to a base body (15) from an intermediate position to a second active position in a direction opposite to the longitudinal deforming direction (10), the transmission unit (16) deforms in an oblique deforming direction (19) relative to a support member with deformation of a spring (21). It causes the closure unit (8) to deform in a direction opposite to a transverse deforming direction (12) from the middle position to a second closed position.SELECTED DRAWING: Figure 42

Claims

1. It is a vacuum valve, A valve housing (1) having an axis and a first valve opening (2a) surrounded by a first valve seat (9a), A closing unit (8) comprising: a valve rod (5) protruding from the valve housing (1); a support member (7) firmly connected to the valve rod (5) on the outside of the valve housing (1); and a first valve plate (3a) supported by the valve rod (5) and positioned inside the valve housing (1), wherein the first valve plate (3a) is displaced in the vertical displacement direction (10) from an open position where the first valve opening (2a) is open to an intermediate position where the first valve plate (3a) covers the first valve opening (2a) while being separated from the first valve seat (9a), and is displaced in the lateral displacement direction (12) perpendicular to the vertical displacement direction (10) from the intermediate position to a first closed position where the first valve plate (3a) abuts against the first valve seat (9a), Transmission unit (16), A drive unit (13) having a base (15) firmly connected to the valve housing (1) and at least one actuator (14), At least one vertical linear guide (17) guides the transmission unit (16) so as to be displaceable parallel to the vertical displacement direction (10) relative to the base (15) of the drive unit (13), and at least one actuator (14) displaces the transmission unit (16) relative to the base (15) in the vertical displacement direction (10) from an initial position through an intermediate position to a first operating position, In the plane defined by the vertical displacement direction (10) and the horizontal displacement direction (12), at least one inclined linear guide (18) guides the support member (7) so as to be displaceable relative to the transmission unit (16) in a direction parallel to the inclined displacement direction (19) which is inclined with respect to each of the vertical displacement direction (10) and the horizontal displacement direction (12), At least one spring (21) acts between the transmission unit (16) and the support member (7), and when the transmission unit (16) is displaced relative to the base (15) from the initial position to the intermediate position, it pulls the support member (7) and displaces the closing unit (8) in the vertical displacement direction (10) from the open position to the intermediate position, The system includes a stopping device that stops the displacement of the closing unit (8) in the vertical displacement direction (10) at the intermediate position of the closing unit (8), and stops the support member (7) from being further pulled in the vertical displacement direction (10) when the transmission unit (16) is displaced from the intermediate position to the first operating position relative to the base (15), and causes the closing unit (8) to be displaced from the intermediate position to the first closed position in the lateral displacement direction (12) while the spring (21) deforms in the inclined displacement direction (19) relative to the support member (7), The valve housing (1) is surrounded by a second valve seat (9b) and has a second valve opening (2b) facing the first valve opening (2a), The closure unit (8) is supported by the valve rod (5) and has a second valve plate (3b) positioned inside the valve housing (1), wherein the second valve plate (3b) opens the second valve opening (2b) in the open position of the closure unit (8), the second valve plate (3b) covers the second valve opening (2b) while being separated from the second valve seat (9b) in an intermediate position of the closure unit (8), and the closure unit (8) is displaceable from the intermediate position in the opposite direction to the lateral displacement direction (12) to a second closed position in which the second valve plate (3b) contacts the second valve seat (9b). A block unit (33) is provided that can switch between a blocked state and a released state. In the blocked state, the blocking unit (8) in the intermediate position is prohibited from being displaced toward the open position in the direction opposite to the vertical displacement direction (10). In the released state, the blocking unit (8) in the intermediate position is permitted to be displaced toward the open position in the direction opposite to the vertical displacement direction (10). In the block state of the block unit (33), when the transmission unit (16) is displaced relative to the base (15) from the intermediate position to the second operating position in the opposite direction to the vertical displacement direction (10) by the at least one actuator (14), the transmission unit (16) is displaced relative to the support member (7) in the opposite direction to the inclined displacement direction (19) accompanied by deformation of the spring (21), and consequently the closing unit (8) is displaced from the intermediate position to the second closed position in the opposite direction to the lateral displacement direction (12). Vacuum valve.

2. In the vacuum valve according to claim 1, Each of the vertical linear guide (17) and the inclined linear guide (18) has a guide rail (17a, 18a) and a slider (17b, 18b) that is mounted so as to be displaceable along the guide rail (17a, 18a). Vacuum valve.

3. In the vacuum valve according to claim 1 or 2, The at least one actuator (14) is a pneumatic piston cylinder unit. Vacuum valve.

4. In the vacuum valve according to claim 1, The block unit (33) has a block member (35) whose position is adjusted by at least one position adjustment member (34). Vacuum valve.

5. In the vacuum valve according to claim 4, The block member (35) is displaceable perpendicular to the vertical displacement direction (10) between the released state and the blocked state of the block unit (33). Vacuum valve.

6. In the vacuum valve according to claim 4, The block member (35) protrudes from the valve rod (5) and interacts with at least one projection (5a) located in the end area of ​​the valve rod (5) distal to the first valve plate (3a) and the second valve plate (3b). Vacuum valve.

7. In the vacuum valve according to claim 6, The at least one protruding portion (5a) extending from the valve rod (5) constitutes a stopping component of the stopping device having a stopping surface (32a) fixed to the base (15), and when the transmission unit (16) is displaced from the initial position to the first operating position and the blocking unit (8) reaches the intermediate position, the protruding portion (5a) comes into contact with the stopping surface (32a). Vacuum valve.

8. In the vacuum valve according to claim 1, The support member (7) is fixed to the valve rod (5) in the central area of ​​the longitudinal extension range of the valve rod (5). Vacuum valve.

9. In the vacuum valve according to claim 1, The spring (21) is positioned on the bolt (22), and the spring (21) abuts against the stopper parts (26, 27) at both ends, and the stopper parts (26, 27) are displaceable relative to the bolt (22) and are pressed by the spring (21) against the stopper parts (23, 24) of the bolt (22) or a part connected thereto. Vacuum valve.

10. In the vacuum valve according to claim 9, In the direction of the inclined displacement (19), the rear end of the bolt (22) is connected to the transmission unit (16), the rear stop component (26) in the direction of the inclined displacement (19) abuts against the rear stop surface (28), the front stop component (27) in the direction of the inclined displacement (19) abuts against the front stop surface (29), and the rear stop surface (28) and the front stop surface (29) are positioned on the support member (7) or a component connected thereto. Vacuum valve.

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