Color image sensor and imaging device

Abstract

To provide a highly sensitive color imaging device and a highly sensitive imaging device formed by integrating fine spectroscopic elements which can be easily formed, have a smaller polarization dependency, and can separate an incident light into a 3-wavelength region to face a two-dimensional array.SOLUTION: An imaging element 100 is formed by laminating a low refractive-index transparent layer 111 made of SiO2, for example, and a plurality of microlenses 103 on a two-dimensional pixel array in which pixels 102 including photoelectric conversion elements are arranged in the pattern of an array. In the low refractive-index transparent layer 111, a plurality of fine spectroscopic elements 101 are buried, which have the same thickness (the length in the direction perpendicular to the two-dimensional pixel array) and are made of a fine structure including such materials as SiN having a higher index of refraction than that of the transparent layer 111.SELECTED DRAWING: Figure 3

Claims

1. A pixel array in which multiple pixels, including photoelectric conversion elements, are arranged on a substrate, A transparent layer formed on the aforementioned pixel array, The transparent layer comprises a spectroscopic array in which a plurality of spectroscopic elements are arranged inside or on the transparent layer, Each of the spectroscopic elements includes a set of microstructures arranged in a direction perpendicular to the optical axis, and there exists a specific plane including the optical axis of the incident light such that the wavelengths of the light spectrally separated by a set of spectroscopic elements, which are in a corresponding relationship with respect to the optical axis of the incident light as the axis of symmetry, are different, and the set of microstructures includes microstructures with different structural dimensions in the linear direction formed by the specific plane including the optical axis of the incident light and the plane perpendicular to the incident light, and at least a portion of the light incident on the set of microstructures included in each of the spectroscopic elements is separated into first to third deflected light whose propagation direction is asymmetrical according to wavelength and emitted from each of the spectroscopic elements, and incident on three pixels corresponding to the set of microstructures, which are arranged continuously in one direction of the pixel array.

2. The image sensor according to claim 1, An imaging optical system for forming an optical image on the imaging surface of the image sensor, A signal processing unit that processes the electrical signals output by the image sensor, An imaging device characterized by being equipped with the following features.

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