Inspection module and inspection device

Abstract

The inspection module 10 according to this disclosure includes a probe member 11 that deforms according to the uneven shape C of the surface S of the object OB to be inspected to detect the uneven shape C, and a sensor unit 12 that maintains the deformation function of the probe member 11 to position the probe member 11 and converts the uneven information of the uneven shape C detected based on the deformation of the probe member 11 due to the uneven shape C into an electrical signal.

Description

Technical Field

[0001] The present disclosure relates to an inspection module and an inspection apparatus. This application claims the priority of Japanese Patent Application No. 2024-192492, filed in Japan on October 31, 2024, and the entire disclosure of that application is incorporated herein by reference.

Background Art

[0002] Conventionally, there is a known technique for amplifying the sensitivity of a target, such as a user's finger, to the uneven shape of the surface of an object when the target traces the uneven shape. For example, Patent Document 1 discloses an uneven amplification member and an uneven detection method capable of more appropriately amplifying the user's tactile sensation with respect to the uneven shape of an object.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] <_{ However, in the prior art described in Patent Document 1, the use of the uneven amplification member as a probe member in a part of the inspection module and its application to automatic inspection using a sensor unit incorporated in the inspection apparatus have not been sufficiently studied. In the prior art described in Patent Document 1, the automatic and highly sensitive detection of the uneven shape of the surface of the object to be inspected by the probe member and the sensor unit without depending on the user's tactile sensation has not been considered.

[0005] An object of the present disclosure is to provide an inspection module and an inspection apparatus capable of highly sensitively detecting the uneven shape of the surface of an object to be inspected.

Means for Solving the Problems

[0006] The inspection module to solve the above problems is: A probe member that deforms according to the uneven shape of the surface of the object to be inspected to detect the uneven shape, A sensor unit that maintains the deformation function of the probe member to position the probe member and converts the unevenness information of the uneven shape detected based on the deformation of the probe member due to the uneven shape into an electrical signal, It is equipped with.

[0007] The inspection device that solves the above problems is: The above inspection module and, A control unit that receives the electrical signal from the inspection module that scans the surface and detects the uneven shape, It is equipped with. [Effects of the Invention]

[0008] According to this disclosure, it is possible to provide an inspection module and inspection apparatus capable of detecting surface irregularities of an object under inspection with high sensitivity. [Brief explanation of the drawing]

[0009] [Figure 1] This is a block diagram showing an example of the configuration of an inspection device according to one embodiment of the present disclosure. [Figure 2] Figure 1 is a schematic diagram showing an example of the configuration of the inspection module. [Figure 3] This is a schematic diagram illustrating the first application example of the inspection device shown in Figure 1. [Figure 4] This is a schematic diagram showing an enlarged view of the area enclosed by the dashed line in Figure 3. [Figure 5] This is a schematic diagram illustrating a second application example of the inspection device shown in Figure 1. [Figure 6] Figure 5 is a schematic diagram showing a cross-sectional view of the inside of the device. [Figure 7] This is a schematic diagram showing a first example of the configuration of one side of the inspection module in Figure 1. [Figure 8] This is a schematic diagram showing a second example of the configuration of one side of the inspection module in Figure 1. [Figure 9]This is a schematic diagram showing a third example of the configuration of one side of the inspection module in Figure 1. [Figure 10] This is a schematic diagram showing a fourth example of the configuration of one side of the inspection module in Figure 1. [Figure 11] This is a schematic diagram showing a fifth example of the configuration of one side of the inspection module in Figure 1. [Modes for carrying out the invention]

[0010] In the following, one embodiment of this disclosure will be mainly described with reference to the attached drawings.

[0011] Figure 1 is a block diagram showing an example of the configuration of an inspection device 1 according to one embodiment of the present disclosure. An example of the configuration and function of the inspection device 1 according to one embodiment will be mainly described with reference to Figure 1. The inspection device 1 includes an inspection module 10, a communication unit 20, a storage unit 30, an input unit 40, an output unit 50, and a control unit 60. The inspection module 10 includes a probe member 11 and a sensor unit 12.

[0012] The inspection module 10 deforms the probe member 11 according to the uneven surface shape of the object to be inspected, and the sensor unit 12 converts the unevenness information of the uneven surface shape detected by the probe member 11 into an electrical signal. In this disclosure, "unevenness information" includes, for example, information such as the depth of the concave shape, the height of the convex shape, and the shape of the uneven surface shape itself. The probe member 11 deforms according to the uneven surface shape of the object to be inspected to detect the uneven surface shape. In this disclosure, "sensitivity" means, for example, the degree of signal strength of the electrical signal output by the sensor unit 12 for the uneven surface shape.

[0013] The probe member 11 is configured to be elastically deformable when moving relatively on the surface of the inspected object and coming into contact with the uneven shape of the surface. The probe member 11 may include, for example, a metal coil spring as used in the prior art described in Patent Document 1. Examples of the metal used for the coil spring include, but are not limited to, hard steel wire, piano wire, stainless steel wire, silicon chromium steel oil tempered wire, and Mn-Cr steel hot formed spring material. In addition, the probe member 11 may be made of resin. Examples of the resin include, but are not limited to, polyethylene terephthalate (PET), polyacetal, polycarbonate, ABS (Acrylonitrile-Butadiene-Styrene) resin, polyester, nylon, polypropylene, polyvinyl chloride, and acrylic. The probe member 11 may have any other shape other than a coil spring as long as its function can be realized.

[0014] The sensor unit 12 maintains the deformation function of the probe member 11 to position the probe member 11, and converts the unevenness information of the uneven shape detected based on the deformation of the probe member 11 due to the uneven shape of the surface of the inspected object into an electrical signal. In the present disclosure, the "deformation function of the probe member 11" includes, for example, a function of changing the shape when the probe member 11 moves relatively on the surface of the inspected object and comes into contact with the uneven shape of the surface.

[0015] For example, the sensor unit 12 may include a strain gauge that changes an electrical signal by being distorted in response to the deformation of the probe member 11. For example, the sensor unit 12 may include a sound sensor that changes an electrical signal in response to the sound emitted from the probe member 11 as the probe member 11 deforms. For example, the sensor unit 12 may include a vibration sensor that changes an electrical signal in response to the vibration generated from the probe member 11 as the probe member 11 deforms.

[0016] The communication unit 20 includes one or more communication interfaces that enable direct communication with external devices such as terminal devices via wired or wireless connections. The communication interfaces may support any wired or wireless communication standard for wired or wireless communication. Wired communication standards include communication standards such as USB (Universal Serial Bus). Wireless communication standards include Bluetooth®, Wi-Fi®, ZigBee®, and any other short-range wireless communication standards. In one embodiment, the inspection device 1 may be connected to an external device via the communication unit 20. The inspection device 1 may receive and transmit various types of information to and from the external device via the communication unit 20.

[0017] Without limiting itself to these, the communication interface of the communication unit 20 may support any other communication standards. For example, the communication interface may support mobile communication standards such as 4G (4th Generation) and 5G (5th Generation), wired LAN (Local Area Network) standards, or wireless LAN standards in order to connect to a network including mobile communication networks and the Internet. The inspection device 1 may be connected to the network in a communicative manner via the communication unit 20. The communication unit 20 may receive and transmit various types of information via the network.

[0018] The storage unit 30 includes storage modules such as an HDD (Hard Disk Drive), SSD (Solid State Drive), EEPROM (Electrically Erasable Programmable Read-Only Memory), ROM (Read-Only Memory), and RAM (Random Access Memory). The storage unit 30 stores information necessary to realize the operation of the inspection device 1. The storage unit 30 stores information obtained through the operation of the inspection device 1. The storage unit 30 stores system programs, application programs, and various data acquired by any means such as communication.

[0019] The storage unit 30 may function as a main memory module, an auxiliary memory module, or a cache memory. The storage unit 30 is not limited to one built into the inspection device 1, and may also include an external storage module connected by a digital input / output port such as USB.

[0020] The input unit 40 includes one or more input interfaces that detect user input and acquire input information based on user operations. The input interfaces include physical keys, capacitive keys, a touchscreen integrated with the display of the output unit 50, an imaging module such as a camera, and a microphone that accepts voice input.

[0021] The output unit 50 includes one or more output interfaces that output information to the user. The output interfaces include a display that outputs information visually as an image, a speaker that outputs information aurally as sound, and a vibrator that outputs information tactilely as vibration.

[0022] The control unit 60 includes one or more processors. The processors are general-purpose processors or dedicated processors specialized for specific processing, but are not limited to these. The control unit 60 includes, for example, a CPU (Central Processing Unit). The control unit 60 is communicatively connected to each component constituting the inspection device 1 and controls the operation of the entire inspection device 1.

[0023] Figure 2 is a schematic diagram showing an example of the configuration of the inspection module 10 shown in Figure 1. Figure 2 is a schematic, magnified view of the inspection module 10 as it moves relatively across the surface S of the object OB to be inspected, and attempts to detect the uneven shape C of the surface S using the probe member 11 and the sensor unit 12. In Figure 2, a concave shape is shown as an example of the uneven shape C, but it is not limited to this. The uneven shape C may also be a convex shape.

[0024] The inspection module 10 is used to detect the unevenness shape C of the surface S of the object OB under inspection. In this disclosure, “object OB under inspection” includes, for example, a specimen when the inspection device 1 inspects the unevenness of the surface S using the inspection module 10. The object OB under inspection may include any specimen formed from metal, synthetic resin, rubber, etc. For example, the object OB under inspection includes painted parts for automobiles, painted parts for other transportation equipment, molds used in injection molding and press working, and other industrial products. “Surface S of object OB under inspection” includes, for example, the painted surface of the object OB under inspection. “Unevenness shape C” means, for example, the shape of recesses or protrusions on the surface S of the object OB under inspection relative to a reference plane. Unevenness shape C includes, for example, shapes based on scratches, defects, and other arbitrary unevenness.

[0025] The inspection module 10 is used for inspecting blistering, blemishes, and dents in painted products such as automobiles and transportation equipment, inspecting the unevenness of molds used in injection molding and press working, and inspecting the surface condition of other industrial products. The inspection module 10 may also be used, for example, to detect surface distortion of steel plates and to inspect surfaces during metal surface treatment. The inspection module 10 may also be used to detect fine uneven shapes C on the surface S of the object OB under inspection, where the height dimension of the tip of a protrusion or the bottom of a recess relative to a reference surface is on the order of microns. However, it is not limited to this, and the inspection module 10 may also be used to detect uneven shapes C with a height of 1 mm or more.

[0026] The inspection module 10 moves relatively along the surface S of the object OB, for example, with the probe member 11 positioned on the surface S side of the object OB. The inspection module 10 moves relatively along the surface S of the object OB, keeping the probe member 11 positioned between the surface S of the object OB and the sensor unit 12. When the probe member 11 comes into contact with the uneven shape C of the surface S of the object OB, the probe member 11 deforms. At this time, the sensor unit 12 positioned relative to the probe member 11 converts the unevenness information of the uneven shape C caused by the deformed probe member 11 into an electrical signal and provides the control unit 60 or the like as an output signal.

[0027] Figure 3 is a schematic diagram illustrating the first application example of the inspection device 1 shown in Figure 1. Figure 4 is an enlarged schematic diagram of the area enclosed by the dashed line IV in Figure 3. The first application example of the inspection device 1 shown in Figure 1 will be mainly explained with reference to Figures 3 and 4.

[0028] In the first application example, the inspection device 1 is used to inspect the surface S of an object to be inspected OB, which includes, for example, a cylindrical shaft. The cylindrical shaft, as the object to be inspected OB, may be, for example, a molded product extruded from an extruder. The shaft, as the object to be inspected OB, moves linearly in direction D1, for example, manually or electrically. In addition to linear movement along direction D1, or alternatively, the shaft, as the object to be inspected OB, may rotate along the circumferential direction D2 of the surface S, which is the side surface of the cylindrical shaft.

[0029] The inspection module 10 of the inspection device 1 is positioned relative to the surface S of the object OB to be inspected, such that the probe member 11 is in direct or indirect contact with the surface S. For example, the inspection module 10 is positioned relative to the surface S such that the axial direction of the coil spring constituting the probe member 11 is parallel to direction D1. The probe member 11 may be supported by any support, such as a support rod B attached to a device for moving the object OB to be inspected. At this time, at least one of the inspection module 10 of the inspection device 1 and the device for moving the object OB to be inspected may be further equipped with a pressurizing part including a pressing mechanism to bring the probe member 11 and the surface S of the object OB to be inspected closer together, or a pressurizing part that can vary the pressing force.

[0030] The inspection module 10, for example, remains stationary relative to the surface S of the object OB under inspection, and scans the surface S by moving relative to the inspection module 10. For example, the inspection module 10 may be fixed in a state supported by a support rod B, and move relative to the surface S of the object OB under inspection as the surface S moves in at least one of the directions D1 and the circumferential direction D2.

[0031] In the examples shown in Figures 3 and 4, only one inspection module 10 is positioned on the surface S of the object OB under inspection, but this is not limited to this. Multiple inspection modules 10 may be arranged on the surface S of the object OB under inspection. For example, multiple inspection modules 10 may be arranged in at least one of the directions D1 and the circumferential direction D2. For example, multiple inspection modules 10 may be arranged in series on the surface S along direction D1. For example, multiple inspection modules 10 may be arranged along the circumference of the surface S extending in the circumferential direction D2. Multiple inspection modules 10 may be arranged in parallel on the surface S along the circumferential direction D2.

[0032] The control unit 60 of the inspection device 1 receives an electrical signal as an output signal from the sensor unit 12 of the inspection module 10, which scans the surface S of the object OB to be inspected, and detects the uneven shape C of the surface S of the object OB to be inspected. For example, the control unit 60 receives an output signal from the sensor unit 12 that maintains the deformation function of the probe member 11 and positions the probe member 11, and the output signal is based on the deformation of the probe member 11 due to the uneven shape C, and detects the uneven shape C of the surface S of the shaft. The control unit 60 detects the uneven shape C of the surface S of the object OB to be inspected when the signal intensity of the output signal from the sensor unit 12 changes significantly due to the deformation of the probe member 11 due to the uneven shape C.

[0033] When the control unit 60 of the inspection device 1 detects an uneven shape C on the surface S of the shaft, it may output notification information from the output unit 50 to the user of the inspection device 1, notifying that the uneven shape C has been detected. For example, the control unit 60 may output the notification information visually by displaying the notification information as an image or text on the display of the output unit 50. For example, the control unit 60 may output the notification information aurally by outputting the notification information as sound from the speaker of the output unit 50. For example, the control unit 60 may output the notification information tactilely by vibrating the vibrator of the output unit 50 in a predetermined pattern corresponding to the notification information.

[0034] When the control unit 60 of the inspection device 1 detects an uneven shape C on the surface S of the shaft, it may, for example, acquire the position of the shaft surface S at the time the uneven shape C was detected by any method, and associate the information that the uneven shape C is present with the position of the surface S of the object under inspection OB. The control unit 60 may store the information that is associated with each other as a database in the storage unit 30. When the control unit 60 receives input information requesting access to the database stored in the storage unit 30 based on a user's input operation using the input unit 40, it may output the information from the database to the user in any manner using the output unit 50.

[0035] Figure 5 is a schematic diagram illustrating a second application example of the inspection device 1 shown in Figure 1. Figure 6 is a schematic diagram showing a cross-sectional view of the inside of the device in Figure 5. The second application example of the inspection device 1 shown in Figure 1 will be mainly explained with reference to Figures 5 and 6.

[0036] In the second application example, the inspection device 1 is used, for example, to inspect the surface S of an object to be inspected OB, which includes a cylindrical workpiece. The workpiece OB is fed, for example, from the entrance to the exit of a cylindrical cavity V of the device by a feeding device having a cylindrical feeding section. The workpiece OB is moved linearly in direction D1, for example, manually or electrically. In addition to linear movement along direction D1, or alternatively, the workpiece OB may be rotated along the circumferential direction D2 of the surface S, which is the side surface of the cylindrical workpiece.

[0037] The inspection module 10 of the inspection device 1 is positioned relative to the surface S of the object OB to be inspected such that the probe member 11 is in direct or indirect contact with the surface S. For example, the inspection module 10 is positioned relative to the surface S such that the axial direction of the coil spring constituting the probe member 11 is parallel to direction D1. The inspection module 10 may be attached to the inner surface of the cavity V by any mounting method, including screwing, joining, bonding, engaging, locking, and fitting, in a device for moving the object OB to be inspected.

[0038] The inspection module 10 scans the surface S of the object OB by moving relative to it, for example. For example, the inspection module 10 may be mounted on the inner surface of the cavity V, and a cylindrical feeder having the cavity V may rotate along the circumferential direction D2, thereby rotating relative to the surface S of the object OB. At this time, the object OB may be stationary or moving within the cavity V.

[0039] In the examples shown in Figures 5 and 6, multiple inspection modules 10 are arranged on the surface S of the object OB under inspection. For example, multiple inspection modules 10 are arranged along the circumference of the surface S extending in the circumferential direction D2. Multiple inspection modules 10 are arranged in parallel on the surface S along the circumferential direction D2. However, the inspection modules 10 may be arranged in a direction D1 instead of, or in addition to, the circumferential direction D2. For example, multiple inspection modules 10 may be arranged in series on the surface S along the direction D1. On the other hand, only one inspection module 10 may be placed on the surface S of the object OB under inspection.

[0040] The control unit 60 of the inspection device 1 receives an electrical signal as an output signal from the sensor unit 12 of the inspection module 10, which scans the surface S of the object OB to be inspected, and detects the uneven shape C of the surface S of the object OB to be inspected. For example, the control unit 60 receives an output signal from the sensor unit 12 that maintains the deformation function of the probe member 11 and positions the probe member 11, and the output signal is based on the deformation of the probe member 11 due to the uneven shape C, and detects the uneven shape C of the surface S of the workpiece. The control unit 60 detects the uneven shape C of the surface S of the object OB to be inspected when the signal strength of the output signal from the sensor unit 12 changes significantly due to the deformation of the probe member 11 due to the uneven shape C.

[0041] When the control unit 60 of the inspection device 1 detects an uneven shape C on the surface S of the workpiece, it may output notification information from the output unit 50 to the user of the inspection device 1, notifying that the uneven shape C has been detected. For example, the control unit 60 may output the notification information visually by displaying the notification information as an image or text on the display of the output unit 50. For example, the control unit 60 may output the notification information aurally by outputting the notification information as sound from the speaker of the output unit 50. For example, the control unit 60 may output the notification information tactilely by vibrating the vibrator of the output unit 50 in a predetermined pattern corresponding to the notification information.

[0042] When the control unit 60 of the inspection device 1 detects an uneven shape C on the surface S of the workpiece, it may, for example, acquire the position of the workpiece surface S at the time the uneven shape C was detected by any method, and associate the information that the uneven shape C is present with the position of the surface S of the object under inspection OB. The control unit 60 may store the information that is associated with each other as a database in the storage unit 30. When the control unit 60 receives input information requesting access to the database stored in the storage unit 30 based on a user's input operation using the input unit 40, it may output the information from the database to the user in any manner using the output unit 50.

[0043] Figure 7 is a schematic diagram showing a first example of the configuration of one side of the inspection module 10 shown in Figure 1. Referring to Figure 7, a first example of how to attach the probe member 11 to the sensor unit 12 in the inspection module 10 will be mainly described.

[0044] In addition to the probe member 11 and sensor unit 12 shown in Figure 1, the inspection module 10 further includes a fixing member 13 that maintains the deformation function of the probe member 11 in relation to the uneven shape C and positions the probe member 11 relative to the sensor unit 12. The fixing member 13 includes, for example, tape, adhesive, adhesive sheet, glue, solder, and string.

[0045] The inspection module 10 further includes a first string 14 that is inserted through a through-hole 11a of the probe member 11 and has both ends fixed to the sensor part 12 by fixing members 13. On the surface of the sensor part 12, one end of the first string 14 is fixed to the first fixing part 14a by the fixing member 13, and the other end is fixed to the second fixing part 14b by the fixing member 13. With the first fixing part 14a and the second fixing part 14b fixed to the surface of the sensor part 12 by the fixing member 13, the first string 14 positions the probe member 11 along the first string 14 between the first fixing part 14a and the second fixing part 14b. The first string 14 may or may not be elastic so as to be stretchable and contractible.

[0046] The inspection module 10 may further include a protective sheet 15 positioned on the portion of the probe member 11 that faces the surface S when it moves relative to the surface S of the object OB under inspection. In the following description, the inspection module 10 will be described assuming that it has a protective sheet 15 as an example, but it is not limited to this. The inspection module 10 may not have a protective sheet 15, for example, as shown in Figures 2 to 6. The inspection module 10 is not limited to a configuration in which the probe member 11 indirectly contacts the surface S via the protective sheet 15, and may be configured so that the probe member 11 directly contacts the surface S without the protective sheet 15.

[0047] The protective sheet 15 is made of, for example, tape, resin, nonwoven fabric, woven fabric, rubber, and paper. However, if the protective sheet 15 is made of rubber, it is preferable that a predetermined coating is applied to the rubber to reduce friction with the surface S when the inspection module 10 moves relative to the surface S, thereby making it slippery. In this disclosure, "sheet" means, for example, that it is formed in the form of a film, a membrane, or a foil.

[0048] The protective sheet 15 is positioned between the probe member 11 and the surface S and moves in accordance with the movement of the probe member 11. The protective sheet 15 protects the surface S from being damaged by contact with the probe member 11 when the inspection module 10 moves relative to the surface S. The protective sheet 15 may be a thin, rigid sheet that is elastically deformable. The protective sheet 15 has enough flexibility and pliability to deform along the uneven shape C of the surface S of the object OB under inspection.

[0049] The probe member 11 of the inspection module 10 may be positioned relative to the sensor unit 12 so as to be position-variable with respect to the surface of the sensor unit 12. The probe member 11 is not fixed on the surface of the sensor unit 12 and may be movable within a predetermined range on the surface of the sensor unit 12 when not pressed against the surface S of the object OB to be inspected.

[0050] The probe member 11 may be repositionable along the first string 14. For example, the probe member 11 may be movable along the first string 14 between the two ends of the first string 14, which is fixed to the surface of the sensor unit 12 by the fixing member 13. The probe member 11 may be restricted to moving along the first string 14 by having the first string 14 inserted through the through portion 11a of the probe member 11. Alternatively, the probe member 11 may be movable on the surface of the sensor unit 12 along the first string 14 within the range between the first fixing portion 14a and the second fixing portion 14b of the first string 14, which is fixed by the fixing member 13.

[0051] Figure 8 is a schematic diagram showing a second example of the configuration of one side of the inspection module 10 shown in Figure 1. Referring to Figure 8, a second example of the method for attaching the probe member 11 to the sensor part 12 in the inspection module 10 will be mainly described. In the first example shown in Figure 7, the inspection module 10 was described as further having a first string 14 that is inserted through the through-hole 11a of the probe member 11 and fixed at both ends to the sensor part 12 by fixing members 13, but it is not limited to this.

[0052] In the second example shown in Figure 8, the inspection module 10 may have, in place of the first string 14, a second string 16, one end of which is connected to each end of the probe member 11 and the other end of which is fixed to the sensor part 12 by a fixing member 13. The second string 16 includes one second string 161 connected to one end of the probe member 11 and another second string 162 connected to the other end of the probe member 11. One end of the second string 161 is connected to one end of the probe member 11 on the surface of the sensor part 12 and the other end is fixed to the first fixing part 16a by a fixing member 13. One end of the second string 162 is connected to the other end of the probe member 11 on the surface of the sensor part 12 and the other end is fixed to the second fixing part 16b by a fixing member 13. The second string 16 positions the probe member 11 between the first fixing part 16a and the second fixing part 16b, with the probe member 11 sandwiched between the second string 161 and the second string 162. The second cord 16 may or may not have elasticity so that it can be stretched and contracted.

[0053] In the second example shown in Figure 8, the probe member 11 of the inspection module 10 may be positioned relative to the sensor unit 12 so as to be position-variable with respect to the surface of the sensor unit 12. The probe member 11 is not fixed on the surface of the sensor unit 12 and may be movable within a predetermined range on the surface of the sensor unit 12 when not pressed against the surface S of the object OB to be inspected.

[0054] The probe member 11 may be repositionable, for example, by the bending or stretching of the second string 16. For example, the probe member 11 may be movable while sandwiched between the second string 161 and the second string 162, which are fixed to the surface of the sensor part 12 by the fixing member 13. The probe member 11 may be restricted to movement within the region sandwiched between the second string 161 and the second string 162, based on the bending and stretching of the second string 161 and the second string 162, since both ends of the probe member 11 are connected to the second string 161 and the second string 162, respectively. On the other hand, the probe member 11 may be movable on the surface of the sensor part 12 relative to the second string 16 within the region sandwiched between the second string 161 and the second string 162, which are fixed by the fixing member 13.

[0055] Figure 9 is a schematic diagram showing a third example of the configuration of one side of the inspection module 10 shown in Figure 1. Referring to Figure 9, a third example of how to attach the probe member 11 to the sensor unit 12 in the inspection module 10 will be mainly described. In the first and second examples shown in Figures 7 and 8, respectively, the inspection module 10 is described as having only one probe member 11, but it is not limited to this.

[0056] In the third example shown in Figure 9, the inspection module 10 may have multiple probe members 11. Multiple probe members 11 may be mounted on the same surface of the sensor unit 12. For example, multiple probe members 11 may be mounted on the bottom surface of the sensor unit 12. As an example, two probe members 11 may be mounted on the bottom surface of the sensor unit 12 in parallel to each other.

[0057] In this case, similar to the first example shown in Figure 7, the first string 14 and protective sheet 15 are positioned for each of the two probe members 11. Each of the two first strings 14 is fixed by a fixing member 13 at the first fixing part 14a and the second fixing part 14b. With the first fixing part 14a and the second fixing part 14b fixed by the fixing member 13 at the bottom surface of the sensor part 12, each of the two first strings 14 positions the probe member 11 along the first string 14 between the first fixing part 14a and the second fixing part 14b.

[0058] The multiple probe members 11 of the inspection module 10 may deform according to the uneven shape C of the surface S of the object OB to be inspected, and the magnitude of the unevenness information of the uneven shape C may differ from one another. The magnitude of the unevenness information of the uneven shape C can be adjusted, for example, according to the spring characteristics of the probe member 11, including the shape, length, width, wire diameter, modulus of elasticity, and number of turns.

[0059] For example, the probe member 11 positioned on the surface of the sensor unit 12 where the sensor unit 12 is most sensitive may be adjusted so that the magnitude of the unevenness information of the unevenness shape C is minimized. On the other hand, the probe member 11 positioned on the surface of the sensor unit 12 where the sensor unit 12 is least sensitive may be adjusted so that the magnitude of the unevenness information of the unevenness shape C is maximized.

[0060] Figure 10 is a schematic diagram showing a fourth example of the configuration of one side of the inspection module 10 shown in Figure 1. Referring to Figure 10, a fourth example of how to attach the probe member 11 to the sensor unit 12 in the inspection module 10 will be mainly described. In the first to third examples shown in Figures 7 to 9, respectively, the probe member 11 is described as being positioned relative to the sensor unit 12 so as to be position-variable with respect to the surface of the sensor unit 12, but this is not limited to this. The probe member 11 may be positioned relative to the sensor unit 12 so as to be fixed in position with respect to the surface of the sensor unit 12.

[0061] In the fourth example shown in Figure 10, the probe member 11 may be covered by a fixing member 13 and fixed to the sensor unit 12. For example, the probe member 11 may be directly fixed to the surface of the sensor unit 12 by the fixing member 13, rather than being indirectly attached to the sensor unit 12 by the first string 14 or the second string 16.

[0062] Even in such cases, the probe member 11 is positioned relative to the sensor unit 12 while maintaining its deformability. The probe member 11 is not firmly fixed by the fixing member 13, but its position on the surface of the sensor unit 12 is fixed so that it can move relative to the surface S of the object OB under inspection and be elastically deformable when it encounters an uneven shape C.

[0063] Figure 11 is a schematic diagram showing a fifth example of the configuration of one side of the inspection module 10 shown in Figure 1. Referring to Figure 11, a fifth example of the method for attaching the probe member 11 to the sensor unit 12 in the inspection module 10 will be mainly described. In the fourth example shown in Figure 10, the probe member 11 is covered by a fixing member 13, but is not limited to this.

[0064] In the fifth example shown in Figure 11, the probe member 11 may be fixed to the sensor unit 12 at both ends by fixing members 13. For example, the probe member 11 may be directly fixed to the surface of the sensor unit 12 by fixing members 13, rather than being indirectly attached to the sensor unit 12 by the first string 14 or the second string 16. Both ends of the probe member 11 may be fixed with tape or the like as fixing members 13, or they may be tied and fixed with string or the like as fixing members 13.

[0065] Even in such cases, the probe member 11 is positioned relative to the sensor unit 12 while maintaining its deformability. The probe member 11 is not firmly fixed by the fixing member 13, but its position on the surface of the sensor unit 12 is fixed so that it can move relative to the surface S of the object OB under inspection and be elastically deformable when it encounters an uneven shape C.

[0066] According to the inspection module 10 and inspection device 1 of the above embodiment, the uneven shape C of the surface S of the object OB to be inspected can be detected with high sensitivity. The inspection module 10 has a sensor unit 12, which allows for the mechanical detection of the uneven shape C of the surface S of the object OB to be inspected without relying on human touch. Therefore, the inspection module 10 can be applied to the automatic inspection of the state of the surface S of the object OB by the inspection device 1. In addition, the inspection module 10 positions a probe member 11 that deforms according to the uneven shape C to detect the uneven shape C relative to the sensor unit 12, so that the unevenness information of the uneven shape C detected by the deformation function of the probe member 11 can be easily converted into an electrical signal. Therefore, the inspection module 10 can detect the uneven shape C of the surface S of the object OB to be inspected with high sensitivity.

[0067] The sensor unit 12 includes a strain gauge that changes the electrical signal by deforming in response to the deformation of the probe member 11. This allows the inspection module 10 to deform the sensor unit 12 in response to the deformation of the probe member 11 caused by the uneven surface shape C of the surface S of the object under inspection OB, thereby changing the output signal. The inspection module 10 can directly receive the deformation of the probe member 11 caused by the uneven surface shape C of the surface S of the object under inspection OB via the sensor unit 12, and easily change the output signal depending on the presence or absence of the uneven surface shape C. Therefore, the inspection module 10 can detect the uneven surface shape C of the surface S of the object under inspection OB with high sensitivity.

[0068] The sensor unit 12 includes a sound sensor that changes an electrical signal in response to the sound emitted from the probe member 11 as the probe member 11 deforms. This allows the inspection module 10 to have the sensor unit 12 detect the sound corresponding to the deformation of the probe member 11 due to the uneven shape C of the surface S of the object under inspection OB, and to change the output signal accordingly. The inspection module 10 can directly receive the sound associated with the deformation of the probe member 11 due to the uneven shape C of the surface S of the object under inspection OB via the sensor unit 12, and easily change the output signal according to the presence or absence of the uneven shape C. Therefore, the inspection module 10 can detect the uneven shape C of the surface S of the object under inspection OB with high sensitivity.

[0069] The sensor unit 12 includes a vibration sensor that changes an electrical signal in response to vibrations generated from the probe member 11 as the probe member 11 deforms. This allows the inspection module 10 to have the sensor unit 12 detect vibrations corresponding to the deformation of the probe member 11 due to the uneven shape C of the surface S of the object under inspection OB, and to change the output signal accordingly. The inspection module 10 can directly receive vibrations associated with the deformation of the probe member 11 due to the uneven shape C of the surface S of the object under inspection OB via the sensor unit 12, and easily change the output signal according to the presence or absence of the uneven shape C. Therefore, the inspection module 10 can detect the uneven shape C of the surface S of the object under inspection OB with high sensitivity.

[0070] In addition to the probe member 11, the inspection module 10 includes a fixing member 13 that maintains the deformation function of the probe member 11 for detecting uneven shapes C and positions the probe member 11 relative to the sensor unit 12. By stably positioning the probe member 11 relative to the sensor unit 12 with respect to the fixing member 13, the positional displacement of the probe member 11 relative to the sensor unit 12 when the sensor unit 12 moves relative to the surface S of the object OB under inspection is reduced.

[0071] The probe member 11 is positioned relative to the sensor unit 12 so as to be position-variable. This allows the probe member 11 to easily maintain its deformation function when detecting uneven shapes C without being strongly fixed to the sensor unit 12. Therefore, the detection function of the probe member 11 for uneven shapes C is maintained without hindering the deformation function of the probe member 11. In addition, the inspection module 10 also makes it possible to position the probe member 11 at the position on the surface of the sensor unit 12 where the sensitivity is most sensitive.

[0072] The inspection module 10 further includes a first string 14 that is inserted through a through-hole 11a of the probe member 11 and fixed at both ends to the sensor unit 12 by fixing members 13. The probe member 11 is repositionable along the first string 14. As a result, the probe member 11 is not strongly fixed to the sensor unit 12, and its deformation function can be easily maintained when detecting uneven shapes C. Therefore, the detection function of the probe member 11 for uneven shapes C is maintained without hindering the deformation function of the probe member 11. In addition, the inspection module 10 also makes it possible to position the probe member 11 along the first string 14 at the position on the surface of the sensor unit 12 where the sensitivity is most sensitive.

[0073] The inspection module 10 further includes a second string 16, one end of which is connected to each end of the probe member 11, and the other end of which is fixed to the sensor unit 12 by a fixing member 13. The probe member 11 is repositionable by the deflection of the second string 16. As a result, the probe member 11 is not strongly fixed to the sensor unit 12, and its deformation function can be easily maintained when detecting uneven shapes C. Therefore, the detection function of the probe member 11 for uneven shapes C is maintained without hindering the deformation function of the probe member 11. In addition, the inspection module 10 also makes it possible to position the probe member 11 by the second string 16 at the position on the surface of the sensor unit 12 where the sensitivity is most sensitive.

[0074] The probe member 11 is covered by a fixing member 13 and fixed to the sensor unit 12. This ensures that the probe member 11 is positioned more stably relative to the surface of the sensor unit 12 by the fixing member 13. Therefore, the displacement of the probe member 11 relative to the sensor unit 12 when the sensor unit 12 moves relative to the surface S of the object OB under inspection is further reduced.

[0075] The probe member 11 is fixed to the sensor unit 12 at both ends by fixing members 13. This allows the probe member 11 to be positioned more stably on the surface of the sensor unit 12 by the fixing members 13. Therefore, the displacement of the probe member 11 relative to the sensor unit 12 when the sensor unit 12 moves relative to the surface S of the object OB under inspection is further reduced.

[0076] The inspection device 1 has a control unit 60 that receives an electrical signal from an inspection module 10 that scans the surface S of the object OB to be inspected and detects the uneven shape C. As a result, the inspection device 1, having a sensor unit 12, can mechanically detect the uneven shape C of the surface S of the object OB to be inspected without relying on human touch. Therefore, the inspection device 1 can automatically inspect the condition of the surface S of the object OB to be inspected. In addition, by positioning the probe member 11 relative to the sensor unit 12 in the inspection module 10, the inspection device 1 can easily convert the unevenness information of the detected uneven shape C into an electrical signal using the deformation function of the probe member 11. Therefore, the inspection device 1 can accurately inspect the condition of the surface S of the object OB to be inspected.

[0077] The inspection module 10 of the inspection device 1 scans the surface S of the object OB by moving relative to it. This allows the inspection device 1 to easily scan the surface S of the object OB by moving the inspection module 10 in any way possible, using additional drive units of the inspection device 1 or drive units of other devices different from the inspection device 1.

[0078] The inspection module 10 of the inspection device 1 remains stationary relative to the surface S of the object OB to be inspected, and scans the surface S as the surface S moves relative to the inspection module 10. This allows the inspection device 1 to easily scan the surface S of the object OB to be inspected by moving it using any method, such as a drive unit additionally provided by the inspection device 1 or a drive unit provided by another device different from the inspection device 1.

[0079] Multiple inspection modules 10 of the inspection device 1 are arranged on the surface S of the object OB to be inspected. This allows the inspection device 1 to expand the area on the surface S of the object OB to which the inspection modules 10 are placed. The inspection device 1 can simultaneously inspect the condition of a wider area of ​​the surface S of the object OB to be inspected.

[0080] Multiple inspection modules 10 of the inspection device 1 are arranged along the circumference of the surface S extending in the circumferential direction D2. This allows the inspection device 1 to extend the area on the surface S of the object OB to be inspected along the circumferential direction D2 in which the inspection modules 10 are placed. The inspection device 1 can simultaneously inspect the condition of the surface S of the object OB to be inspected over a wider area along the circumferential direction D2.

[0081] It will be apparent to those skilled in the art that this disclosure can be implemented in other predetermined forms besides the embodiments described above without deviating from its spirit or essential features. Therefore, the prior description is illustrative and not limiting. The scope of the disclosure is defined not by the prior description but by the added claims. Any modifications within their equivalent scope are included therein.

[0082] For example, the shape, pattern, size, arrangement, orientation, type, and number of each component described above are not limited to those shown in the above description and drawings. The shape, pattern, size, arrangement, orientation, type, and number of each component may be configured arbitrarily as long as they can realize their function. The components of the illustrated inspection module 10 and inspection device 1 are functional concepts. The specific form of each component is not limited to those shown.

[0083] In the above embodiment, the sensor unit 12 includes, but is not limited to, at least one of a strain gauge, a sound sensor, and a vibration sensor. The sensor unit 12 may also include any other sensor that changes the output signal based on the deformation of the probe member 11 due to the uneven shape C of the surface S of the object OB under inspection.

[0084] In the above embodiment, as shown in Figure 9, a plurality of probe members 11 are mounted in parallel on the surface of the sensor unit 12, but the embodiment is not limited to this. The plurality of probe members 11 may be mounted on the surface of the sensor unit 12 based on any other arrangement relationship other than the parallel relationship. For example, the plurality of probe members 11 may be mounted diagonally to each other on the surface of the sensor unit 12. In this case, the plurality of probe members 11 may or may not intersect each other.

[0085] In the above embodiment, it was explained that the size of the unevenness information of the uneven shape C differs from that of the multiple probe members 11, but this is not limited to this. The size of the unevenness information of the uneven shape C may be the same for the multiple probe members 11.

[0086] In the above embodiment, the inspection device 1 was described as having a control unit 60 that receives an output signal from an inspection module 10 that scans the surface S of the object OB to be inspected and detects the uneven shape C, but it is not limited to this. The inspection device 1 does not have to have a control unit 60. The inspection device 1 may only perform the detection of the uneven shape C by the inspection module 10 and output the output signal from the sensor unit 12 to another device that has a detection function similar to the control unit 60. The detection process of the uneven shape C by the control unit 60 may be performed by the other device instead of the inspection device 1.

[0087] In the above embodiments, the object under inspection OB was described as including, but is not limited to, a shaft or workpiece having a cylindrical shape. The object under inspection OB may also include objects having a cylindrical shape, a pipe shape, or any other shape.

[0088] In the above embodiment, as shown in Figures 3 to 6, the inspection module 10 of the inspection device 1 is attached to another device different from the inspection device 1, but is not limited thereto. The inspection module 10 may include, for example, a handheld module that scans the surface S of the object OB to be inspected while being held in the user's hand.

[0089] Some embodiments of the present disclosure are described below. However, it should be noted that the embodiments of the present disclosure are not limited to these. [Note 1] A probe member that deforms according to the uneven shape of the surface of the object to be inspected to detect the uneven shape, A sensor unit that maintains the deformation function of the probe member to position the probe member and converts the unevenness information of the uneven shape detected based on the deformation of the probe member due to the uneven shape into an electrical signal, Equipped with, Inspection module. [Note 2] The inspection module described in Appendix 1, The sensor unit includes a strain gauge that changes the electrical signal by deforming in accordance with the deformation of the probe member. Inspection module. [Note 3] An inspection module as described in Appendix 1 or 2, The sensor unit includes a sound sensor that changes the electrical signal in response to the sound emitted from the probe member as the probe member deforms. Inspection module. [Note 4] An inspection module described in any one of the appendices 1 to 3, The sensor unit includes a vibration sensor that changes the electrical signal in response to vibrations generated from the probe member due to the deformation of the probe member. Inspection module. [Note 5] An inspection module described in any one of the appendices 1 to 4, The probe member further comprises a first string which is inserted through a through-hole and has both ends fixed to the sensor part with fixing members. Inspection module. [Note 6] An inspection module described in any one of the appendices 1 to 4, The probe member further comprises a second string, one end of which is connected to each of the two ends, and the other end of which is fixed to the sensor part by a fixing member. Inspection module. [Note 7] An inspection module described in any one of the appendices 1 to 4, The probe member is covered by a fixing member and fixed to the sensor portion. Inspection module. [Note 8] An inspection module described in any one of the appendices 1 to 4, The probe member is fixed to the sensor portion at both ends by fixing members. Inspection module. [Note 9] The inspection module described in any one of the appendices 1 to 8, A control unit that receives the electrical signal from the inspection module that scans the surface and detects the uneven shape, Equipped with, Inspection device. [Note 10] The inspection device described in Appendix 9, The inspection module scans the surface by moving relative to the surface. Inspection device. [Note 11] The inspection device described in Appendix 9, The inspection module remains stationary relative to the surface, and scans the surface as the surface moves relative to the inspection module. Inspection device. [Note 12] An inspection device described in any one of the appendices 9 to 11, The inspection modules are arranged in multiples on the surface, Inspection device. [Note 13] The inspection device described in Appendix 12, Multiple inspection modules are arranged along the circumference of the surface that extends in the circumferential direction. Inspection device. [Explanation of symbols]

[0090] 1. Inspection device 10 Inspection Modules 11 Probe member 11a Penetration 12 Sensor section 13 Fixing member 14 First string 14a 1st fixed part 14b 2nd fixed part 15 protective sheets 16. Second string 161 Second string 162 Second string 16a 1st fixed part 16b Second fixed part 20 Communications Department 30 Storage section 40 Input section 50 Output section 60 Control Unit B Support rod C Uneven shape D1 direction D2 Circumferential direction OB (Object under inspection) S surface V cavity

Claims

1. A probe member that deforms according to the uneven shape of the surface of the object to be inspected to detect the uneven shape, A sensor unit that maintains the deformation function of the probe member to position the probe member and converts the unevenness information of the uneven shape detected based on the deformation of the probe member due to the uneven shape into an electrical signal, A string for positioning the probe member relative to the sensor part, Equipped with, The probe member is positioned relative to the sensor portion such that its position is variable relative to the surface of the sensor portion within the area defined by the string. Inspection module.

2. The inspection module according to claim 1, The sensor unit includes a strain gauge that changes the electrical signal by deforming in accordance with the deformation of the probe member. Inspection module.

3. The inspection module according to claim 1, The sensor unit includes a sound sensor that changes the electrical signal in response to the sound emitted from the probe member as the probe member deforms. Inspection module.

4. An inspection module according to any one of claims 1 to 3, The sensor unit includes a vibration sensor that changes the electrical signal in response to vibrations generated from the probe member due to the deformation of the probe member. Inspection module.

5. An inspection module according to any one of claims 1 to 3, The string includes a first string that is inserted through a penetration in the probe member and has both ends fixed to the sensor part with fixing members. Inspection module.

6. An inspection module according to any one of claims 1 to 3, The string includes a second string, one end of which is connected to each of the ends of the probe member, and the other end of which is fixed to the sensor part by a fixing member. Inspection module.

7. An inspection module according to any one of claims 1 to 3, A control unit that receives the electrical signal from the inspection module that scans the surface and detects the uneven shape, Equipped with, Inspection device.

8. The inspection apparatus according to claim 7, The inspection module scans the surface by moving relative to the surface. Inspection device.

9. The inspection apparatus according to claim 7, The inspection module remains stationary relative to the surface, and scans the surface as the surface moves relative to the inspection module. Inspection device.

10. The inspection apparatus according to claim 7, The inspection modules are arranged in multiples on the surface, Inspection device.

11. An inspection apparatus according to claim 10, Multiple inspection modules are arranged along the circumference of the surface that extends in the circumferential direction. Inspection device.

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