Entrance head assembly

Abstract

An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an exhaust stream from a semiconductor processing tool, the inlet head assembly comprising an inlet head, a pilot nozzle extending into the inlet head and configured to deliver at least one pilot combustion reactant stream to an abatement chamber downstream of the abatement apparatus, and a plurality of inlet nozzles each extending into the inlet head and configured to deliver an associated exhaust stream for abatement in the abatement chamber, the plurality of inlet nozzles positioned around the pilot nozzle. In this manner, the exhaust stream is more closely packed around the pilot nozzle, which improves heating of the exhaust stream, improves DRE, and reduces heat losses, thereby allowing for fewer combustion reactants to be delivered.

Description

Technical Field

[0001] The field of the present invention relates to an inlet head assembly for a pest control device.

Background Art

[0002] Pest control devices are known and are typically used, for example, to treat exhaust gas streams from manufacturing processing tools used in the semiconductor or flat panel display manufacturing industries. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas stream pumped from the processing tool. PFCs are difficult to remove from the exhaust gas, and their release into the environment is undesirable because they are known to have relatively high greenhouse activity.

[0003] Known pest control devices use combustion to remove PFCs and other compounds from the exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The fuel gas is mixed with the exhaust gas stream, and the gas stream mixture is carried to a pest control chamber for pest control therein using an inlet assembly.

Summary of the Invention

Problems to be Solved by the Invention

[0004] There are techniques for treating exhaust gas streams, but each has drawbacks. Therefore, it is desirable to provide an improved technique for treating exhaust gas streams.

Means for Solving the Problems

[0005] According to a first embodiment, an inlet head assembly for abating equipment is provided for abating discharge flow from a semiconductor processing tool, the inlet head assembly comprising an inlet head, an axial pilot nozzle extending into the inlet head and configured to supply at least one pilot combustion reaction flow to a downstream abating chamber of the abating equipment, and a plurality of inlet nozzles, each of which extends into the inlet head at an angle between 5° and 60°, preferably between 5° and 45°, more preferably between 5° and 20° with respect to the axial direction of the pilot nozzle and is configured to supply the relevant discharge flow for abating into the abating chamber, the plurality of inlet nozzles being positioned around the pilot nozzle.

[0006] A first aspect recognizes that a problem with existing configurations is that the amount of combustion reactants consumed to achieve a specific destructive efficiency (DRE) for certain compounds in the exhaust flow may be greater than desired. Therefore, an inlet head assembly is provided. The inlet head assembly may be for a toxin removal device. The toxin removal device can toxin the exhaust flow from a semiconductor processing tool. The inlet head assembly may comprise an inlet head. The inlet head assembly may comprise a pilot nozzle. The pilot nozzle may extend into or through the inlet head. The pilot nozzle may be configured to supply at least one pilot combustion reaction flow to a toxin chamber downstream of the toxin removal device. The inlet head assembly may comprise a plurality of inlet nozzles. Each inlet nozzle may extend into or through the inlet head. Each inlet nozzle may be configured to supply the relevant exhaust flow to be toxinated into the toxin chamber. The inlet nozzles may be positioned around the pilot nozzle. The inlet nozzle can be angled between 5° and 60°, preferably between 5° and 45°, and more preferably between 5° and 20°, with respect to the axial direction of the pilot nozzle. In this way, the exhaust flow is concentrated and closer to the pilot nozzle and directed towards the pilot nozzle, which improves the heating of the exhaust flow, improves DRE, reduces heat loss, and thereby makes it possible to reduce the amount of combustion reactants that need to be supplied.

[0007] Each of the multiple inlet nozzles can be configured to supply different relevant discharge streams for detoxification into the detoxification chamber. Thus, the inlet nozzles can supply different potentially chemically incompatible discharge streams into the detoxification chamber. This ensures that these incompatible discharge streams remain separated outside the detoxification chamber, helping to minimize any undesirable or potentially harmful chemical reactions upstream of the detoxification chamber.

[0008] Each of the multiple inlet nozzles can be configured to supply an exhaust flow along with at least an inner combustion reaction logistics to provide an inner oxidizing flame, and may further include an outer annular nozzle configured to supply an outer combustion reaction logistics that provides a coaxial flame to stabilize the inner oxidizing flame. Thus, the inlet nozzles can generate an inner oxidizing flame stabilized with a coaxial diffusion flame. Typically, these diffusion flames have the advantage of being cooler, with the fuel gas core diffusing into the oxidizer-rich ambient environment, and these flames readily settling on a surface. Grouping each of these inlet nozzles around a pilot helps to share heat between the exhaust flows and reduce heat loss, which allows only a small amount of outer combustion reactants to be supplied to provide a coaxial flame while still maintaining the required DRE.

[0009] Multiple inlet nozzles can be positioned to at least partially surround the pilot nozzle.

[0010] Multiple inlet nozzles can be positioned circumferentially around the pilot nozzle.

[0011] Multiple inlet nozzles can be spaced equally in the circumferential direction around the pilot nozzle.

[0012] Multiple inlet nozzles can be positioned on a pitch circle around the pilot nozzle.

[0013] Multiple inlet nozzles and pilot nozzles can be positioned adjacent to each other but separated by at least one of the following: flow stability and combustion reactant supply distance. Thus, the nozzles can be positioned adjacent to or close to each other with only a small gap or space between them.

[0014] A pilot nozzle can be configured to ignite combustion of at least one pilot combustion reaction logistics, and a plurality of inlet nozzles can be configured to supply at least one combustion reaction logistics to the exhaust flow and positioned to propagate combustion of the combustion reaction logistics supplied by each of the inlet nozzles from at least one pilot combustion reaction logistics. In other words, each of the exhaust flows supplied by each of the inlet nozzles can be directly ignited from the ignition flow supplied by the pilot nozzle.

[0015] The pilot nozzle may comprise an inner nozzle configured to supply a first combustion reaction logistics, and an outer nozzle configured to supply a second combustion reaction logistics as an annular curtain at least partially surrounding the first combustion reaction logistics. Thus, the pilot nozzle may have an inner flow and a coaxial annular outer flow.

[0016] The inlet head assembly may include further combustion reactant nozzles extending into the inlet head and configured to supply at least one further combustion reaction logistics to the abatement chamber downstream of the abatement device. Thus, at least one further or additional combustion reactant nozzle for supplying further combustion reactants may be provided.

[0017] According to a second embodiment, an inlet head assembly for abating

[0018] Unless otherwise specified, the following references to combustion reaction nozzles refer to both the first and second aspects of the present invention.

[0019] Further combustion reactant nozzles can be configured to supply at least one further combustion reactant flow that at least partially surrounds the multiple exhaust flows supplied to the abatement chamber by the multiple inlet nozzles. Thus, further combustion reactants can be supplied around the multiple exhaust flows. This helps maintain the temperature of the exhaust flows within the abatement chamber to improve DRE while reducing heat loss and thus reducing the amount of combustion reactant used.

[0020] Further combustion reaction nozzles can be configured to supply at least one further combustion reaction logistics as an annular curtain that at least partially surrounds the multiple exhaust flows supplied to the detoxification chamber by the multiple inlet nozzles.

[0021] Further combustion reactant nozzles can be positioned to propagate the combustion of at least one further combustion reactant from the combustion reactant supplied by each of the multiple inlet nozzles. In other words, further combustion reactants can be ignited directly by the exhaust flow supplied by the inlet nozzles, and similarly, directly by the combustion reactant supplied by the pilot nozzles.

[0022] A further combustion reactant nozzle may include a first combustion reactant nozzle configured to supply a first combustion reactant logistics, and a second combustion reactant nozzle configured to supply a second combustion reactant logistics.

[0023] The first combustion reaction nozzle may include a first annular nozzle configured to supply a first combustion reaction logistics as a first annular curtain that at least partially surrounds the multiple discharge flows supplied to the decontamination chamber by the multiple inlet nozzles, and the second combustion reaction nozzle may include a second annular nozzle that at least partially surrounds the first annular nozzle and is configured to supply a second combustion reaction logistics as a second annular curtain that at least partially surrounds the first annular curtain.

[0024] Further combustion reactant nozzles can at least partially surround multiple inlet nozzles. Thus, the exhaust flow supplied by the inlet nozzles can be collectively surrounded by both the combustion reaction logistics supplied by the further combustion reactant nozzles and the combustion reaction logistics supplied by the pilot nozzles. This helps maintain the temperature of the exhaust flow within the abatement chamber in order to reduce heat loss, reduce the amount of combustion reactant used, and improve DRE.

[0025] Further combustion reaction nozzles can be positioned concentrically with the pilot nozzle.

[0026] The first combustion reaction logistics may contain fuel, and the second combustion reaction logistics may contain an oxidizer.

[0027] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles according to the second aspect can be oriented parallel to the pilot nozzle.

[0028] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented to supply at least one of the exhaust stream and the additional combustion reactant stream parallel to the pilot combustion reactant stream.

[0029] The additional combustion reactant nozzle according to the first aspect can be oriented to be angled with respect to the pilot nozzle.

[0030] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented to supply at least one of the exhaust stream and the additional combustion reactant stream that is angled with respect to the pilot combustion reactant stream.

[0031] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented toward the pilot nozzle.

[0032] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented to supply at least one of the exhaust stream and the additional combustion reactant stream so as to converge with the pilot combustion reactant stream.

[0033] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented away from the pilot nozzle.

[0034] At least one of the plurality of inlet nozzles and the additional combustion reactant nozzles can be oriented to supply at least one of the exhaust stream and the additional combustion reactant stream so as to diverge from the pilot combustion reactant stream.

[0035] At least one of the multiple inlet nozzles and any further combustion reactant nozzles can be oriented at an angle of up to 60°, preferably up to 45°, preferably up to 20°, preferably up to 15°, preferably up to 12.5°, and preferably up to 10°.

[0036] A third aspect of the invention provides a method for providing an inlet head assembly for a toxicating device for toxicating an exhaust flow from a semiconductor processing tool, the inlet head assembly comprising an inlet head, a pilot nozzle extending into the inlet head and configured to supply at least one pilot combustion reaction flow to a toxicating chamber downstream of the toxicating device, and a plurality of inlet nozzles, each extending into the inlet head and configured to supply an associated exhaust flow for toxication into the toxicating chamber, the plurality of inlet nozzles being positioned around the pilot nozzle.

[0037] This method may include features corresponding to the features of the above-described inlet head assembly.

[0038] Further specific preferred embodiments are described in the attached independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations other than those expressly described in the claims.

[0039] When a feature of a device is described as being capable of operating to produce a certain function, it should be understood that this includes features of the device that produce that function, or that are adapted or configured to produce that function.

[0040] Herein, embodiments of the present invention will be further described with reference to the accompanying drawings. [Brief explanation of the drawing]

[0041] [Figure 1] This shows a vertical cross-sectional view of a portion of the inlet head assembly according to one embodiment, and a view of the inlet head assembly from inside the pollution control chamber. [Figure 2]This is a vertical cross-sectional view of a portion of an inlet head assembly according to one embodiment. [Figure 3] This shows a vertical cross-sectional view of a portion of the inlet head assembly according to one embodiment, and a view of the inlet head assembly from inside the pollution control chamber. [Figure 4] Figure 4 shows the relative performance between the inlet assembly and a conventional inlet assembly where the inlet nozzles are further spaced apart and do not surround the pilot nozzle. [Modes for carrying out the invention]

[0042] Before describing the embodiments in further detail, an overview will be provided first. The embodiments provide a configuration for a torch removal device in which inlet nozzles supplying one or more exhaust streams to the torch removal device for torch removal therein are positioned or located in close proximity to pilot nozzles that supply combustion reactants to help to torch the exhaust streams into the torch removal chamber. Positioning of the inlet nozzles in relation to the pilot nozzles helps to reduce heat loss and increase the temperature of the exhaust streams into the torch removal chamber, which improves the efficiency of the breakdown rate of compounds in the exhaust streams. In some embodiments, the inlet nozzles are positioned around the pilot nozzles to ensure that the combustion reactants supplied by the pilot nozzles are in close proximity to each exhaust stream. In some embodiments, further nozzles are provided surrounding the inlet nozzles, which supply combustion reactants around the exhaust streams supplied by those inlet nozzles. This also helps to increase the DRE by reducing the heat loss received by the exhaust streams and increasing the temperature of the exhaust streams into the torch removal chamber. The pilot nozzles, inlet nozzles and further nozzles can be positioned and / or configured to supply the combustion reaction logistics and exhaust streams parallel to or at an angle to each other. This helps to alter the temperature and / or interaction between the exhaust flow and the combustion reactants in order to change the DRE of compounds in the exhaust flow.

[0043] Inlet head assembly - convergent flow Figure 1 is a cross-sectional view of an inlet head assembly 10 according to one embodiment. The inlet head assembly comprises an inlet head 20 which is attached to a downstream abatement chamber (not shown). The inlet head 20 has a pilot nozzle 30 positioned at the center of the inlet head 20. The pilot nozzle 30 extends into the inlet head 20. The pilot nozzle 30 has an inner nozzle 32 configured to deliver fuel 34 into the abatement chamber (vertically) in the axial direction AA. The pilot nozzle has an outer nozzle 36 configured to deliver compressed dry air (CDA) 38 (or another oxidizer) in the axial direction AA as an annular curtain surrounding the fuel 34.

[0044] Multiple inlet nozzles 40 (in this example, there are six inlet nozzles 40) are equally spaced and surround the pilot nozzle 32 with a predetermined pitch circle diameter. However, it should be understood that other configurations are also possible. The inlet nozzles 40 extend into the inlet head 20. Each of the inlet nozzles 40 is angled at a predetermined angle with respect to the orientation axis of the pilot nozzle 30. In this example, the pilot nozzle 30 is oriented axially AA, and each of the inlet nozzles 40 is angled at a 10° angle with respect to the pilot nozzle (axially AA). The nozzles can be angled between 5° and 60° with respect to axially AA. Each of the inlet nozzles 40 delivers the associated discharge flow 45 (in this example, up to six different discharge flows, but different inlet nozzles 40 can also be configured to deliver the same discharge flow), which is optionally pre-mixed with fuel and / or oxidizer, to the downstream abatement chamber. Therefore, each of the inlet nozzles 40 supplies the associated discharge flow 45 at a predetermined angle to the fuel 34 and CDA 38 supplied to the detoxification chamber by the pilot nozzle 30.

[0045] Further combustion reactant nozzles 50 are provided, surrounding both the pilot nozzle 30 and the multiple inlet nozzles 40. In this example, the further reactant nozzles include an inner combustion reactant nozzle 52, which has an annular opening and supplies an annular curtain 51 of fuel 51 surrounding the exhaust flow supplied by the inlet nozzles 40. The further reactant nozzles 50 also include an outer combustion reactant nozzle 54, which surrounds the inner combustion reactant nozzle 52 and is positioned concentrically with the inner combustion reactant nozzle 52, and also includes an annular outlet that supplies an annular curtain of CDA 53 surrounding the annular curtain of fuel 51 supplied by the inner combustion reactant nozzle 52. The inner combustion reactant nozzle 52 and the outer combustion reactant nozzle 54 are positioned and configured to supply fuel 51 and CDA 53 at a predetermined angle to the fuel 34 and CDA 38 supplied to the detoxification chamber by the pilot nozzle 30.

[0046] In this example, both the inlet nozzle 40 and the further combustion reactant nozzles 50 (and their component nozzles) are angled at the same angle relative to the pilot nozzle 30, but this is not required, and it should be understood that individual nozzles (and their component nozzles) can be angled separately according to the detoxification requirements.

[0047] During operation, the pilot nozzle 30 supplies fuel 34 and CDA 38 to the abatement chamber to be ignited. The inlet nozzle 40 optionally supplies a mixture of fuel and oxidizer, exhaust flow 45, to the pilot nozzle 30 at a predetermined angle, causing the exhaust flow 45 to converge on a flame boundary extending from the pilot nozzle 30, which triggers ignition of the exhaust flow 45. A further combustion reactant nozzle 50 supplies an annular curtain of fuel 51 and CDA 53, which surrounds the exhaust flow 45 and ignites in the exhaust gas flow 45. This creates a further flame boundary around the exhaust flow 45 exiting the inlet nozzle 40, which similarly converges toward the flame extending from the pilot nozzle 30. This configuration helps reduce heat loss and improve heating near the exhaust flow 45 in the abatement chamber, and helps improve the efficiency of compound breakdown rate within the exhaust flow 45.

[0048] Inlet head assembly - parallel and convergent flow Figure 2 shows an inlet head assembly 10A according to one embodiment. This embodiment is similar to that described in Figure 1 above, except that the inlet nozzle 40A is configured to supply an exhaust flow 45 parallel to the fuel 34 and CDA 38 supplied by the pilot nozzle 30 at the inlet to the abatement chamber, and the fuel 51 and CDA 53 supplied by the further combustion reactant nozzle 50 remain angled with respect to the axial direction AA.

[0049] Inlet head assembly - divergent flow In further embodiments (not shown), the inlet nozzle and / or additional reactant nozzles are configured to be angled away from the pilot nozzle 30, and the discharge flow 45 and / or fuel 51 and CDA 54 are supplied at an angle that diverges away from the fuel 34 and CDA 38 supplied by the pilot nozzle 30.

[0050] Inlet head assembly - omission of further combustion reaction nozzles Figure 3 shows an inlet head assembly 10C according to one embodiment. This embodiment is similar to that described in Figure 1 above, except that the additional combustion reactant nozzles 50 are omitted. Instead, each inlet nozzle 40C comprises a first outer nozzle 60 configured to deliver fuel 51 as an annular curtain surrounding the exhaust flow 45, and a second outer nozzle 62 configured to deliver CDA as an annular curtain surrounding the fuel 51 around the first outer nozzle 60.

[0051] Figure 4 shows the relative performance between the inlet assembly 10C (line 100) and a conventional inlet assembly (line 110) where the inlet nozzle is further separated and does not surround the pilot nozzle. As shown in the figure, when the total fuel amount is set to the same 80%, the DRE of the inlet assembly 10C is approximately 93%, while the DRE of the conventional inlet assembly is approximately 85%. Also, as shown in the figure, the inlet assembly 10C can achieve the same DRE as the conventional inlet assembly with less fuel.

[0052] In some embodiments, the nozzles in the head and burner are in close proximity, allowing the high-energy reducing flame produced to break down perfluoro compounds (PFCs - primarily CF4) to share heat and reactants. This cluster configuration positions each nozzle very close together to maximize the transfer of heat and reactants in order to reduce the fuel and oxygen used in PFC combustion. Thus, this configuration improves the DRE of CF4 while reducing fuel and oxygen during CF4 combustion.

[0053] In some embodiments, a swept inlet nozzle design is used. This inlet nozzle removes bias from the exhaust flow or treatment flow gas, aiding in better mixing of the lance fuel and inlet treatment gas, and allowing for a longer residence time of the resulting mixture before it enters the coaxial flame.

[0054] In some embodiments, the primary function of this configuration is to reduce the space between inlet nozzles, resulting in less heat loss to the inlet flame during CF4 combustion. The inlet flame utilizes excess reactants from adjacent inlet nozzles, leading to higher efficiency and, consequently, reduced fuel and oxygen consumption. Angling the nozzles to reduce the space between inlet flames allows the flames to share heat / reactants during detoxification. The reduced fuel and oxygen usage across the six inlet nozzles lowers maintenance costs while maintaining DRE performance.

[0055] While exemplary embodiments of the present invention have been disclosed in detail with reference to the accompanying drawings, it will be understood that the present invention is not limited to the exact embodiments and that various changes and modifications can be made by those skilled in the art without departing from the concept of the invention as defined by the accompanying claims and equivalents. [Explanation of symbols]

[0056] 10;10A;10B;10C Inlet head assembly 20 Entrance Head 30 Pilot Nozzles 32 Inner nozzle 34,51 fuel 36. Outer nozzle 38,53 Compressed dry air (CDA) 40;40A;40B;40C Inlet Nozzle 45 Discharge stream 50;50B Further combustion reaction nozzle 52; 52B Inner combustion reaction nozzle 52 54; 54B External combustion reaction nozzle 54 60 First outer nozzle 62 Second outer nozzle

Claims

1. An inlet head assembly for a detoxification device for detoxifying discharge flow from a semiconductor processing tool, wherein the inlet head assembly is Entrance head, A pilot nozzle extending into the inlet head and configured to supply at least one pilot combustion reaction logistics to the abatement chamber downstream of the abatement device, A plurality of inlet nozzles, each of which extends into the inlet head at an angle of 10° with respect to the axial direction of the pilot nozzle and is configured to supply a relevant discharge flow for abatement into the abatement chamber in a state pre-mixed with fuel and oxidizer, the plurality of inlet nozzles being positioned around the pilot nozzle, and each of the plurality of inlet nozzles comprising a first outer nozzle configured to supply fuel as an annular curtain surrounding the discharge flow, and a second outer nozzle configured to supply compressed dry air as an annular curtain surrounding the fuel around the first outer nozzle, Equipped with, The plurality of inlet nozzles and the pilot nozzle are positioned adjacent to each other but separated by at least one of flow stability and combustion reactant supply distance. The plurality of inlet nozzles are positioned to surround the pilot nozzle, are positioned circumferentially around the pilot nozzle, are equally spaced circumferentially around the pilot nozzle, and are positioned on a pitch circle around the pilot nozzle. The pilot nozzle is configured to cause combustion of the at least one pilot combustion reaction logistics, and the plurality of inlet nozzles are configured to supply at least one combustion reaction logistics to the exhaust flow and are positioned to propagate the combustion of the combustion reaction logistics supplied by each of the plurality of inlet nozzles from the at least one pilot combustion reaction logistics. The pilot nozzle comprises an inner nozzle configured to supply a first combustion reaction logistics, and an outer nozzle configured to supply a second combustion reaction logistics as an annular curtain surrounding the first combustion reaction logistics. The inlet head assembly comprises a further combustion reaction nozzle extending into the inlet head and configured to supply at least one further combustion reaction logistics to the downstream abatement chamber of the abatement device.

2. An inlet head assembly for a detoxification device for detoxifying discharge flow from a semiconductor processing tool, wherein the inlet head assembly is Entrance head, A pilot nozzle extending into the inlet head and configured to supply at least one pilot combustion reaction logistics to the abatement chamber downstream of the abatement device, A plurality of inlet nozzles, each of which extends into the inlet head and is configured to supply a relevant discharge flow for abatement into the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle, Equipped with, The aforementioned inlet head assembly is Further combustion reaction nozzles are provided, extending into the inlet head and configured to supply at least one further combustion reaction logistics to the downstream abatement chamber of the abatement device, At least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented to be angled with respect to the pilot nozzle, and at least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented to supply at least one of the exhaust flow and the further combustion reaction flow which is angled with respect to the pilot combustion reaction flow. The further combustion reaction nozzle is configured to supply the at least one further combustion reaction flow as an annular curtain surrounding the plurality of discharge flows supplied to the decontamination chamber by the plurality of inlet nozzles. The further combustion reaction nozzle comprises a first combustion reaction nozzle configured to supply a first combustion reaction logistics, and a second combustion reaction nozzle configured to supply a second combustion reaction logistics. The first combustion reaction nozzle is a first annular nozzle configured to supply the first combustion reaction logistics as a first annular curtain surrounding the plurality of discharge flows supplied to the abatement chamber by the plurality of inlet nozzles, The second combustion reaction nozzle is a second annular nozzle surrounding the first annular nozzle, and is configured to supply the second combustion reaction logistics as a second annular curtain surrounding the first annular curtain. An inlet head assembly wherein the further combustion reactant nozzles surround the plurality of inlet nozzles, and / or the further combustion reactant nozzles are positioned concentrically with the pilot nozzles, and / or the first combustion reaction logistics comprise fuel, and the second combustion reaction logistics comprise an oxidizer.

3. The inlet head assembly according to claim 1, wherein the further combustion reaction nozzles are positioned to propagate the combustion of the at least one further combustion reaction logistics from the combustion reaction logistics supplied by each of the plurality of inlet nozzles.

4. The inlet head assembly according to claim 1, wherein at least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented parallel to the pilot nozzle, and at least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented to supply at least one of the exhaust flow and the further combustion reaction flow parallel to the pilot combustion reaction flow.

5. The inlet head assembly according to claim 1, wherein at least one of the plurality of inlet nozzles and the further combustion reactant nozzles is oriented to be angled with respect to the axially oriented pilot nozzle, and is oriented to supply at least one of the exhaust flow and the further combustion reactant flow, which is angled with respect to the axial direction of the pilot combustion reaction flow.

6. The inlet head assembly according to claim 1, wherein at least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented toward the pilot nozzle, and at least one of the plurality of inlet nozzles and the further combustion reaction nozzles is oriented to supply at least one of the exhaust flow and the further combustion reaction flow so as to converge toward the pilot combustion reaction flow.

7. The inlet head assembly according to claim 1, wherein at least one of the plurality of inlet nozzles and the further combustion reactant nozzles is oriented away from the pilot nozzle, and at least one of the plurality of inlet nozzles and the further combustion reactant nozzles is oriented to supply at least one of the exhaust flow and the further combustion reactant flow so as to diverge from the pilot combustion reaction flow.

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