Stage unit and processing system

Abstract

To provide a stage unit and a processing system that are advantageous for accurately positioning an electronic component at a desired position. [Solution] A stage unit 10 includes a base 11, a stage 12 on which an electronic component is placed, a stage movement mechanism 13 that moves the stage 12 relative to the base 11, and a control unit that controls the stage movement mechanism 13 based on a movement command signal to move the stage 12 to an adjustment position indicated by the movement command signal. The control unit obtains the movement amount of the stage 12 that corresponds to the adjustment position indicated by the movement command signal based on a stage movement amount calculation formula that indicates the correspondence between the adjustment position and the movement amount of the stage 12 by the stage movement mechanism 13, and controls the stage movement mechanism 13 to move the stage 12 by the obtained movement amount of the stage 12.

Description

Technical Field

[0001] The present disclosure relates to a stage unit on which electronic components are mounted and a processing system including such a stage unit.

Background Art

[0002] In order to accurately perform processes such as inspection of electronic components, position adjustment of the electronic components is performed.

[0003] Patent Document 1 discloses an apparatus for performing position correction of a conveyed electronic component, and particularly proposes an apparatus that does not require registration of attitude information of the electronic component in advance. Patent Document 2 discloses an apparatus aimed at placing an electronic component with high accuracy with respect to a contact for performing an electrical test. Patent Document 3 discloses an apparatus aimed at suppressing displacement of the mounting position of an electronic component in a direction different from the direction of a moving operation during mounting.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0005] In recent years, miniaturization of electronic components such as capacitors has advanced rapidly, and along with this, for example, the contact portions of electronic components for performing performance tests tend to become smaller. Therefore, strict requirements may be made regarding the arrangement accuracy (alignment accuracy) of electronic components when performing processes such as performance tests. For example, it may be required to accurately move an electronic component on the order of micrometers (μm) and place it at a desired position.

[0006] To position electronic components in a desired location, it is sometimes necessary to move the electronic components along with the stage while the components are mounted on the stage. In this case, the stage movement mechanism is required to move the stage by only a very small distance (for example, on the order of micrometers). However, due to manufacturing and assembly errors of the various mechanical elements that make up the stage movement mechanism, it is not always easy to accurately move the stage by the desired minute distance using the stage movement mechanism.

[0007] This disclosure provides a technology that is advantageous for precisely positioning electronic components at desired locations. [Means for solving the problem]

[0008] One aspect of the present disclosure relates to a stage unit comprising: a base; a stage on which electronic components are placed; a stage movement mechanism for moving the stage relative to the base; and a control unit that controls the stage movement mechanism based on a movement command signal and moves the stage to an adjustment position indicated by the movement command signal, wherein the control unit obtains the amount of stage movement associated with the adjustment position indicated by the movement command signal based on a stage movement amount calculation formula that shows the correspondence between the adjustment position and the amount of stage movement by the stage movement mechanism, and controls the stage movement mechanism to move the stage by the amount of stage movement obtained.

[0009] The formula for calculating the stage movement amount may include a polynomial.

[0010] The formula for calculating the stage movement amount may include a polynomial with a degree of 4 or higher.

[0011] The formula for calculating the stage movement may be determined based on the stage movement amount indicated by the measurement results of a movement measurement sensor that can directly or indirectly measure the stage movement amount.

[0012] The stage movement mechanism may be capable of rotating the stage around a rotation axis that extends in a direction perpendicular to the plane.

[0013] The stage movement mechanism may include a cam and a motor that rotates the cam, and the stage may be moved based on the rotation of the cam.

[0014] Another aspect of this disclosure relates to a processing system comprising the above-mentioned stage unit, a mounting device for placing electronic components on the stage, and an imaging device for acquiring image data of the electronic components before they are placed on the stage, wherein the control unit controls the stage movement mechanism to move the stage to an adjustment position based on a movement command signal obtained as a result of analyzing the image data. [Effects of the Invention]

[0015] According to this disclosure, it is advantageous to accurately position electronic components at desired locations. [Brief explanation of the drawing]

[0016] [Figure 1] Figure 1 is a perspective view showing an example of a stage unit. [Figure 2] Figure 2 is a functional block diagram showing an example of the relationship between a moving measurement sensor, a control unit, and drive motors (X-axis drive motor and Y-axis drive motor). [Figure 3] Figure 3 is a graph showing an example of the ideal state of the rotation angle (horizontal axis) and lift amount (vertical axis) of the cam (see the X-axis drive cam and Y-axis drive cam shown in Figure 1). [Figure 4] Figure 4 is a graph showing an actual measurement example of a cam manufactured to correspond to Figure 3, where the horizontal axis represents the rotation angle of the cam and the vertical axis represents the error in the cam's lift amount. [Figure 5] Figure 5 shows a schematic configuration of an example of a processing system. [Figure 6] Figure 6 shows an example of the processing flow performed by the processing system shown in Figure 5. [Figure 7]FIG. 7 is a diagram showing an example of the relationship between the target movement amount of the stage (horizontal axis) and the movement error amount representing the difference between the actual movement amount and the target movement amount of the stage (vertical axis) when the processing flow shown in FIG. 6 is executed by the processing system (see FIG. 5) including the stage unit shown in FIG. 1 without using the stage movement amount calculation formula. [Figure 8] FIG. 8 is a diagram showing an example of the relationship between the target movement amount of the stage (horizontal axis) and the movement error amount representing the difference between the actual movement amount and the target movement amount of the stage (vertical axis) when the processing flow shown in FIG. 6 is executed by the processing system (see FIG. 5) including the stage unit shown in FIG. 1 using the stage movement amount calculation formula.

Mode for Carrying Out the Invention

[0017] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0018] FIG. 1 is a perspective view showing an example of the stage unit 10.

[0019] The stage unit 10 includes a base 11, a stage 12 on which electronic components are placed, and a stage movement mechanism 13 that moves the stage 12 with respect to the base 11.

[0020] The base 11 shown in FIG. 1 has an upper base portion 11a that is relatively located upward and extends in the horizontal directions (X direction dX and Y direction dY), a lower base portion 11c that is relatively located downward and extends in the horizontal direction, a drive motor mounting plate 11d that is located between the upper base portion 11a and the lower base portion 11c and extends in the horizontal direction, and two side base portions 11b that extend in the height direction (vertical direction) between the upper base portion 11a and the side base portion 11b. The horizontal direction and the height direction are perpendicular to each other.

[0021] One lateral base portion 11b is connected and fixed to one end of the upper base portion 11a in the X direction dX and to one end of the lower base portion 11c in the X direction dX. The other lateral base portion 11b is connected and fixed to the other end of the upper base portion 11a in the X direction dX and to the other end of the lower base portion 11c in the X direction dX. The drive motor mounting plate 11d is connected and fixed to each of the lateral base portions 11b at both ends in the X direction dX. Therefore, the base 11 has an upper inner space (first inner space) surrounded by the upper base portion 11a, the lateral base portions 11b and the drive motor mounting plate 11d, and a lower inner space (second inner space) surrounded by the drive motor mounting plate 11d, the lateral base portions 11b and the lower base portion 11c.

[0022] Stage 12 is provided so as to be movable in the X direction (first direction) dX and the Y direction (second direction) dY by a stage movement mechanism 13, and is also provided so as to be movable (i.e., rotatable) in the rotation direction dR. The rotation direction dR is based on a rotation axis A that extends in the height direction (a direction perpendicular to the horizontal plane) so as to penetrate Stage 12 (particularly the reference mounting position (e.g., the central position of Stage 12)), and Stage 12 is provided so as to be rotatable about rotation axis A. The X direction dX and the Y direction dY are directions that are perpendicular to the rotation axis A and are perpendicular to each other. Note that any direction along the plane (in this example, the horizontal plane) that extends along the X direction dX and the Y direction dY is called the XY direction, and the XY direction does not necessarily have to coincide with the X direction dX or the Y direction dY.

[0023] In this embodiment, the X-direction position, Y-direction position, and rotational position of the stage 12 can be adjusted for each electronic component by the stage movement mechanism 13 in order to position the electronic components placed on the stage 12 in a desired position suitable for inspection of the electronic components by the inspection device 61.

[0024] In this embodiment, one target electronic component is transported from upstream by a mounting device (see reference numeral "46" in Figure 5) and placed on stage 12. After being inspected by an inspection device 61 on stage 12, it is transported downstream from stage 12 by the mounting device. This series of processes is performed sequentially for multiple target electronic components. That is, immediately after the inspection and transport from stage 12 of a preceding electronic component, the next electronic component transported from upstream is placed on stage 12 and inspected.

[0025] The inspection device 61 is capable of performing desired inspections on the electronic components on the stage 12, and any device configuration and processing is possible. In Figure 1, the inspection device 61 is provided above the stage 12, but the installation position and configuration of the inspection device 61 are not limited, and it may be provided, for example, on the second stage support section 42. The inspection device 61 may, for example, capture and acquire an image of the electronic components on the stage 12 and analyze the image to check for any abnormalities that can be seen from the appearance of the electronic components (e.g., cracks or chips in the electronic components). The inspection device 61 may also contact the electronic components on the stage 12, and for example, it may pass an electric current through the electronic components on the stage 12 and measure the state quantity of the electronic components related to the current (e.g., voltage value) to check for any abnormalities in the electrical performance of the electronic components. Furthermore, the inspection device 61 is not required, and only the position adjustment (including orientation adjustment) of the electronic components placed on the stage 12, as described later, may be performed.

[0026] The stage moving mechanism 13 in this embodiment is a position correction mechanism that moves the stage 12 based on the rotation of the drive cams 22 and 32. The drive cams 22 and 32 convert the rotational motion of the drive motors 20 and 30 into linear motion, moving the stage 12 in the X direction dX and the Y direction dY. In other words, the stage moving mechanism 13 can move the stage 12 two-dimensionally along a plane (the horizontal plane in this example), and the stage 12 can be positioned at a desired horizontal position. Furthermore, the stage moving mechanism 13 in this embodiment can move the stage 12 in the rotation direction dR (rotational movement around the rotation axis A in this example), and the stage 12 can be positioned in a desired orientation (direction) with respect to the horizontal. Thus, the stage moving mechanism 13 can move the stage 12 linearly by a desired distance along the X direction dX and the Y direction dY, and can also rotate the stage 12 by a desired amount (desired angle) in the rotation direction dR.

[0027] Therefore, the stage moving mechanism 13 shown in Figure 1 includes an XY moving device that moves the stage 12 in the XY direction relative to the base 11, and a rotational moving device that rotates the stage 12 in the rotational direction dR relative to the base 11.

[0028] The XY moving device includes X-direction drive units (first-direction drive units) 20-25, Y-direction drive units (second-direction drive units) 30-35, a stage X-axis guide unit (first-direction guide unit) 15, and a stage Y-axis guide unit (second-direction guide unit) 16.

[0029] The X-direction drive unit includes an X-axis drive motor (first-direction drive source) 20 and an X-axis movable table (first-direction movable part) 21 which is moved in the X-direction dX together with the stage 12 by the driving force output from the X-axis drive motor 20.

[0030] The Y-direction drive unit includes a Y-axis drive motor (second-direction drive source) 30 and a Y-axis movable table (second-direction movable part) 31 which is moved in the Y-direction dY together with the stage 12 by the driving force output from the Y-axis drive motor 30.

[0031] The X-axis drive motor 20 and the Y-axis drive motor 30 are fixedly supported by the base 11, and even when the stage 12 is moved horizontally in the directions dX and dY and rotationally in the direction dR by the stage movement mechanism 13, the X-axis drive motor 20 and the Y-axis drive motor 30 do not move horizontally in the directions dX and dY and rotationally in the direction dR.

[0032] In the example shown in Figure 1, the X-axis drive motor body 20a of the X-axis drive motor 20 is positioned in the upper inner space of the base 11 and is fixedly supported by the upper base portion 11a. The X-axis drive motor shaft of the X-axis drive motor 20 protrudes upward from the X-axis drive motor body 20a and extends in the height direction so as to pass through the through hole (first through hole) of the upper base portion 11a. Similarly, the Y-axis drive motor body 30a of the Y-axis drive motor 30 is positioned in the upper inner space of the base 11 and is fixedly supported by the upper base portion 11a. The Y-axis drive motor shaft of the Y-axis drive motor 30 protrudes upward from the Y-axis drive motor body 30a and extends in the height direction so as to pass through the through hole (second through hole) of the upper base portion 11a.

[0033] The X-axis drive motor 20 and the Y-axis drive motor 30 are configured to rotate their motor shafts by a desired amount under the control of the control unit (see Figure 2, described later). In this example, the X-axis drive motor 20 and the Y-axis drive motor 30 are configured as servo motors, but the specific configuration of such X-axis drive motor 20 and Y-axis drive motor 30 is not limited.

[0034] An X-axis drive cam 22 is attached to the tip of the X-axis drive motor shaft (particularly the portion located above the upper base portion 11a). The X-axis drive cam 22 rotates integrally with the X-axis drive motor shaft, which is rotationally driven by the X-axis drive motor body 20a, and the axis of rotation of the X-axis drive cam 22 coincides with the axis of rotation of the X-axis drive motor shaft. On the other hand, an X-axis drive cam follower 23 is fixedly provided on the X-axis movable table 21, extending downward (vertically) from the lower surface of the X-axis movable table 21. The X-axis drive cam follower 23 contacts the X-axis drive cam 22 and receives a force acting from the X-axis drive cam 22 in the X direction dX as the X-axis drive cam 22 rotates, and is provided to reciprocate in the X direction dX integrally with the X-axis movable table 21.

[0035] An X-axis drive spring (X-axis drive elastic part) 24 and a table X-axis guide unit 25 are further attached to the X-axis movable table 21.

[0036] The X-axis drive spring 24 in this example is a tension spring in which one end is supported by the X-axis movable table 21 and the other end is supported by the upper base portion 11a via a connecting member. The X-axis drive spring 24 acts an elastic force (restoring force) on the X-axis movable table 21 in the opposite direction (X direction dX) to the direction of the force in the X direction dX that the X-axis movable table 21 receives from the X-axis drive cam 22 via the X-axis drive cam follower 23. In this way, the X-axis drive spring 24 works to ensure contact (tightness) between the X-axis drive cam 22 and the X-axis drive cam follower 23. Note that an elastic body other than a spring may be used instead of the X-axis drive spring 24, or any mechanism other than an elastic force (e.g., magnetic force) may be used to act on the X-axis movable table 21 in the opposite direction (X direction dX) to the direction of the force in the X direction dX that the X-axis movable table 21 receives from the X-axis drive cam 22 (e.g., a mechanism using magnets).

[0037] In the example described above, the X-axis movable table 21, which has been moved by the X-axis drive cam 22, is returned to its original position by the use of an arbitrary mechanism such as a spring (elastic body) or a magnet. However, such an arbitrary mechanism such as a spring (elastic body) or a magnet is not required. For example, if the X-axis drive cam 22 has a structure that allows the X-axis movable table 21 to reciprocate in the X direction dX, then it is unnecessary to install a mechanism to return the X-axis movable table 21 to its original position.

[0038] The table X-axis guide unit 25 in this example is composed of an LM guide (Linear Motion Guide) and includes an LM rail fixedly provided on the upper surface of the upper base portion 11a and an LM block fixedly attached to the lower surface of the X-axis movable table 21 and sliding on the LM rail. The LM rail of the table X-axis guide unit 25 supports the LM block in such a way that it allows the LM block to move freely back and forth in the X direction dX while restricting the LM block's movement in the Y direction dY.

[0039] Similarly, a Y-axis drive cam 32 is attached to the tip of the Y-axis drive motor shaft (particularly the portion located above the upper base portion 11a). The Y-axis drive cam 32 rotates integrally with the Y-axis drive motor shaft, which is rotationally driven by the Y-axis drive motor body 30a, and the axis of rotation of the Y-axis drive cam 32 coincides with the axis of rotation of the Y-axis drive motor shaft. On the other hand, a Y-axis drive cam follower 33 is fixedly provided on the Y-axis movable table 31, extending downward (vertically) from the lower surface of the Y-axis movable table 31. The Y-axis drive cam follower 33 contacts the Y-axis drive cam 32 and receives a force acting from the Y-axis drive cam 32 in the Y direction dY as the Y-axis drive cam 32 rotates, and is provided to reciprocate along the Y direction dY integrally with the Y-axis movable table 31.

[0040] A Y-axis drive spring (Y-axis drive elastic part) 34 and a table Y-axis guide unit 35 are further attached to the Y-axis movable table 31. In this example, the Y-axis drive spring 34 is a tension spring in which one end is supported by the Y-axis movable table 31 and the other end is supported by the upper base part 11a via a connecting member. The Y-axis drive spring 34 acts an elastic force (restoring force) on the Y-axis movable table 31 in the opposite direction (Y-direction dY) to the direction of the force in the Y-direction dY that the Y-axis movable table 31 receives from the Y-axis drive cam 32 via the Y-axis drive cam follower 33. In this way, the Y-axis drive spring 34 works to ensure contact (tightness) between the Y-axis drive cam 32 and the Y-axis drive cam follower 33. In addition, an elastic body other than a spring may be used instead of the Y-axis drive spring 34, or any mechanism other than an elastic force (for example, a magnetic force) may be used to act on the Y-axis movable table 31 in the opposite direction (Y-direction dY) to the direction of the force in the Y-direction dY that the Y-axis movable table 31 receives from the Y-axis drive cam 32.

[0041] In the example described above, the Y-axis movable table 31, which has been moved by the Y-axis drive cam 32, is returned to its original position by the use of an arbitrary mechanism such as a spring (elastic body) or a magnet. However, such an arbitrary mechanism such as a spring (elastic body) or a magnet is not required. For example, if the Y-axis drive cam 32 has a structure that allows the Y-axis movable table 31 to reciprocate in the Y direction dY, then it is unnecessary to install a mechanism to return the Y-axis movable table 31 to its original position.

[0042] The table Y-axis guide unit 35 in this example is composed of LM guides and includes an LM rail fixedly provided on the upper surface of the upper base portion 11a and an LM block fixedly attached to the lower surface of the Y-axis movable table 31 and sliding on the LM rail. The LM rail of the table Y-axis guide unit 35 supports the LM block in such a way that it allows the LM block to move freely back and forth in the Y direction dY while restricting the LM block's movement in the X direction dX.

[0043] The stage X-axis guide unit 15 is attached to the upper base portion 11a and the stage 12, allowing movement of the stage 12 in the X direction dX relative to the upper base portion 11a while restricting movement in the Y direction dY. The stage X-axis guide unit 15 can be positioned between either the upper base portion 11a or the stage 12 and the Y-axis movable table 31. In the example shown in Figure 1, the stage X-axis guide unit 15 is positioned between the stage 12 and the Y-axis movable table 31, and the Y-axis movable table 31 is attached to the stage 12 via the stage X-axis guide unit 15.

[0044] More specifically, the stage X-axis guide unit 15 shown in Figure 1 is composed of LM guides and includes an LM rail fixedly provided on the upper surface of the Y-axis movable table 31, and an LM block fixedly attached to the stage 12 via a first stage support 41, a turntable 71, and a second stage support 42, which slides on the LM rail. The LM rail of the stage X-axis guide unit 15 supports the LM block in such a way that it allows the LM block to move freely back and forth in the X direction dX while restricting the LM block's movement in the Y direction dY.

[0045] The stage Y-axis guide unit 16 is attached to the upper base portion 11a and the stage 12, allowing movement of the stage 12 in the Y direction dY relative to the upper base portion 11a while restricting movement in the X direction dX. The stage Y-axis guide unit 16 can be positioned between either the upper base portion 11a or the stage 12 and the X-axis movable table 21. In the example shown in Figure 1, the stage Y-axis guide unit 16 is positioned between the stage 12 and the X-axis movable table 21, and the X-axis movable table 21 is attached to the stage 12 via the stage Y-axis guide unit 16.

[0046] More specifically, the stage Y-axis guide unit 16 shown in Figure 1 is composed of LM guides and includes an LM rail fixedly provided on the upper surface of the X-axis movable table 21, and an LM block fixedly attached to the stage 12 via a first stage support 41, a turntable 71, and a second stage support 42, which slides on the LM rail. The LM rail of the stage Y-axis guide unit 16 supports the LM block in such a way that it allows the LM block to move freely back and forth in the Y direction dY while restricting the LM block's movement in the X direction dX.

[0047] The rotary moving device includes a θ-axis drive motor (rotation direction drive source) 70, a turntable (rotation support part) 71, and a rotation relay part 72.

[0048] The θ-axis drive motor 70 is fixedly supported by the base 11, and even when the stage 12 is moved in the horizontal direction dX, dY and the rotational direction dR by the stage moving mechanism 13, the θ-axis drive motor 70 does not move in the horizontal direction dX, dY and the rotational direction dR.

[0049] In the example shown in Figure 1, the θ-axis drive motor body 70a of the θ-axis drive motor 70 is positioned in the lower inner space of the base 11 and is fixedly supported by the drive motor mounting plate 11d. The θ-axis drive motor shaft of the θ-axis drive motor 70 protrudes upward from the θ-axis drive motor body and extends in the height direction so as to pass through the through hole in the drive motor mounting plate 11d. A rotating relay part 72 (a second coupling 74 in this example) is fixedly attached to the tip of the θ-axis drive motor shaft (particularly the part located above the drive motor mounting plate 11d).

[0050] The θ-axis drive motor 70 is configured to rotate the motor shaft by a desired amount under the control of the control unit (see reference numeral "50" in Figure 2, described later). The specific configuration of such a θ-axis drive motor 70 is not limited, and for example, the θ-axis drive motor 70 may be configured using a servo motor.

[0051] The turntable 71 is rotated in the rotational direction dR together with the stage 12 by the rotational driving force output from the θ-axis drive motor 70 and transmitted via the rotation relay unit 72.

[0052] In other words, in the example shown in Figure 1, a second stage support 42, which is fixed to the stage 12, is fixedly attached to the upper surface of the turntable 71, and the turntable 71 is fixedly attached to the stage 12 via the second stage support 42. A rotation support shaft extends vertically downward from the lower surface of the turntable 71. Although not visible in Figure 1, the rotation support shaft extends so as to penetrate the stage moving mechanism 13 (for example, the first stage support 41 and the X-axis movable table 21) and the upper base portion 11a, and is connected and fixed to the second stage support 42 at one end (upper end) and to the rotation relay portion 72 (first coupling 73 in this example) at the other end (lower end).

[0053] Therefore, as the θ-axis drive motor shaft of the θ-axis drive motor 70 rotates, the rotating relay unit 72 rotates integrally with the θ-axis drive motor shaft. As the rotating relay unit 72 rotates, the rotating support shaft and the turntable 71 rotate integrally with the rotating relay unit 72, and as a result, the stage 12 rotates integrally with the turntable 71 and the second stage support unit 42.

[0054] In particular, the rotation relay unit 72 of this embodiment transmits the driving force output from the θ-axis drive motor 70 to the rotation support unit (rotation support shaft and turntable 71), and allows the rotation support unit (rotation support shaft and turntable 71) to move horizontally (in the XY direction) relative to the θ-axis drive motor 70. That is, regardless of whether there is a horizontal positional misalignment between the rotation support unit (rotation support shaft and turntable 71) and the θ-axis drive motor 70, the rotation relay unit 72 transmits the rotational driving force from the θ-axis drive motor 70 to the rotation support unit, and consequently allows the second stage support unit 42 and the stage 12 connected to the rotation support unit to rotate in the rotational direction dR.

[0055] The rotating relay unit 72 shown in Figure 1 includes a first coupling 73 fixedly attached to the rotating support shaft, a second coupling 74 fixedly attached to the θ-axis drive motor shaft of the θ-axis drive motor 70, and a turn joint shaft (coupling connection part) 75 connected to the first coupling 73 and the second coupling 74. The turn joint shaft 75 changes its orientation according to the relative horizontal position (XY direction) between the first coupling 73 and the second coupling 74.

[0056] The first coupling 73 moves horizontally as a whole, together with the rotating support shaft, turntable 71, second stage support 42, and stage 12. Therefore, when the stage 12 is moved horizontally (in the XY direction) by the aforementioned XY moving device, the first coupling 73 also moves horizontally as a whole with the stage 12. As a result, the horizontal position (XY direction position) of the first coupling 73 basically always coincides with the horizontal position of the stage 12. On the other hand, the second coupling 74, which is fixedly attached to the θ-axis drive motor 70, does not move horizontally, similar to the θ-axis drive motor 70, and the horizontal position of the second coupling 74 coincides with the horizontal position of the θ-axis drive motor 70.

[0057] Therefore, as the stage 12 moves horizontally, the first coupling 73 moves horizontally, which can cause a horizontal misalignment between the first coupling 73 and the second coupling 74. Even if a misalignment occurs between the first coupling 73 and the second coupling 74 in this way, the turn joint shaft 75 takes an inclined position corresponding to the horizontal positions of the first coupling 73 and the second coupling 74, thereby absorbing the effects of the misalignment. In other words, regardless of the amount of horizontal misalignment between the first coupling 73 and the second coupling 74, the first coupling 73 is properly connected while maintaining its relative position and orientation (direction) with respect to the rotation support shaft, turntable 71, second stage support part 42, and stage 12, and the second coupling 74 is properly connected while maintaining its relative position and orientation (direction) with respect to the θ-axis drive motor 70.

[0058] Since a mechanism for absorbing misalignment between the θ-axis drive motor 70 and the rotation support unit (rotation support shaft and turntable 71) using such a rotation relay unit 72 is already known, a more detailed explanation of the specific configuration example of the rotation relay unit 72 will be omitted.

[0059] When moving the stage 12 by a desired distance in the X direction dX, the X-axis drive motor 20 is driven under the control of the control unit (see reference numeral "50" in Figure 2, described later), and the X-axis drive motor shaft is rotated by an amount of rotation (desired rotation amount) corresponding to the desired distance. As a result, the X-axis drive cam 22 rotates by the desired amount of rotation, moving the X-axis drive cam follower 23 by the desired distance in the X direction dX. As the X-axis drive cam follower 23 is moved in this way, the X-axis movable table 21, the stage Y-axis guide unit 16, and the first stage support part 41 connected to the X-axis drive cam follower 23 are also moved together by the desired distance in the X direction dX. As a result, the stage 12 attached to the first stage support part 41 is also moved by the desired distance in the X direction dX.

[0060] Similarly, when moving the stage 12 by a desired distance in the Y direction dY, the Y-axis drive motor 30 is driven under the control of the control unit, and the Y-axis drive motor shaft is rotated by an amount of rotation (desired rotation amount) corresponding to the desired distance. As a result, the Y-axis drive cam 32 rotates by the desired amount of rotation, moving the Y-axis drive cam follower 33 by the desired distance in the Y direction dY. As the Y-axis drive cam follower 33 is moved in this way, the Y-axis movable table 31, the stage X-axis guide unit 15, and the first stage support part 41 connected to the Y-axis drive cam follower 33 are also moved integrally by the desired distance in the Y direction dY. As a result, the stage 12 attached to the first stage support part 41 is also moved by the desired distance in the Y direction dY.

[0061] Furthermore, when the stage 12 is moved by a desired distance in the rotation direction dR (i.e., rotated by a desired angle around the rotation axis A), the θ-axis drive motor 70 is driven under the control of the control unit, and the θ-axis drive motor shaft is rotated by an amount of rotation (desired rotation amount) corresponding to the desired angle. As a result, the rotation relay unit 72, the rotation support shaft, the turntable 71, and the second stage support unit 42 are rotated by the desired amount, and consequently the stage 12 attached to the second stage support unit 42 is also rotated by the desired amount and moved by a desired distance (i.e., desired angle) in the rotation direction dR.

[0062] The above-mentioned movement drives of stage 12 in the X direction dX, movement drives of stage 12 in the Y direction dY, and movement drives (rotation drives) of stage 12 in the rotation direction dR may be performed simultaneously with each other or at different timings.

[0063] The stage unit 10 of this embodiment is provided such that a movement measurement sensor 37 capable of directly or indirectly measuring the amount of movement of the stage 12 can be detachably installed.

[0064] The motion measurement sensor 37 in this example can be installed facing a stage support extension (stage moving body) 43 fixed to the first stage support 41 so as to move integrally with the first stage support 41 in the X direction dX and Y direction dY, and indirectly measures the amount of movement of the stage 12 by measuring the amount of movement of the stage support extension 43. The motion measurement sensor 37 shown in Figure 1 includes an X direction sensor (first motion measurement sensor) 37x and a Y direction sensor (second motion measurement sensor) 37y. The X direction sensor 37x can measure the amount of movement of the stage support extension 43 in the X direction dX along the horizontal plane (and thus the amount of movement of the stage 12). The Y direction sensor 37y can measure the amount of movement of the stage support extension 43 in the Y direction dY along the horizontal plane (and thus the amount of movement of the stage 12).

[0065] The motion measurement sensor 37 (X-direction sensor 37x and Y-direction sensor 37y) can have any configuration, and for example, the amount of movement of the stage 12 may be measured directly or indirectly using an encoder. When sensors 37x and 37y are configured using optical linear encoders, linear scales extending in the X-direction dX and Y-direction dY may be formed on the stage support extension 43 (particularly the portion facing sensors 37x and 37y). In this case, the X-direction sensor 37x and Y-direction sensor 37y can measure the amount of movement of the stage support extension 43 in the X-direction dX and Y-direction dY by optically reading the linear scale. The scale interval (slit interval) of such a scale is not limited, but corresponds to the minimum amount of movement of the stage support extension 43 (and thus the minimum amount of movement of the stage 12) that the motion measurement sensor 37 can measure. Therefore, the scale interval is determined according to the minimum measurement resolution required for the motion measurement sensor 37, and may be, for example, 1 μm intervals.

[0066] The movement measurement sensor 37 is not limited to the configuration shown in Figure 1, and can have any configuration that can directly or indirectly measure the amount of movement of the stage 12. For example, the movement measurement sensor 37 may directly measure the stage 12 instead of the stage support extension 43, or it may indirectly measure the amount of movement of the stage 12 by measuring the amount of movement of one or more other components that move integrally with the stage 12. As an example, the movement measurement sensor 37 may measure the amount of movement of the first stage support 41, the second stage support 42, and / or the turntable 71 shown in Figure 1.

[0067] The motion measurement sensor 37 may also indirectly measure the amount of movement of the stage 12 in the X direction dX by measuring the amount of movement in the X direction dX of a component that moves integrally with the stage 12 only in the X direction dX (for example, the X-axis movable table 21 and / or the LM block of the stage X-axis guide unit 15). Similarly, the motion measurement sensor 37 may indirectly measure the amount of movement of the stage 12 in the Y direction dY by measuring the amount of movement in the Y direction dY of a component that moves integrally with the stage 12 only in the Y direction dY (for example, the Y-axis movable table 31 and / or the LM block of the stage Y-axis guide unit 16).

[0068] Figure 2 is a functional block diagram showing an example of the relationship between the motion measurement sensor 37, the control unit 50, and the drive motors 63 (X-axis drive motor 20 and Y-axis drive motor 30).

[0069] The drive motor 63 shown in Figure 2 is a servo motor that includes a motor driver 64, a motor drive unit 65, and a motor encoder 66, and is representative of the X-axis drive motor 20 and Y-axis drive motor 30 shown in Figure 1. The motor driver 64 outputs a motor drive signal to the motor drive unit 65 based on the movement drive signal P2 input from the stage movement calculation unit 52 of the control unit 50, and the motor drive unit 65 rotates the motor shaft in accordance with the motor drive signal. On the other hand, the motor encoder 66 detects the rotational speed and rotational angle of the motor drive unit 65 (motor shaft) and outputs a motor detection signal indicating the result of the detection to the motor driver 64. The motor driver 64 can dynamically adjust the rotational speed and rotational angle of the motor drive unit 65, and in particular outputs a motor drive signal to dynamically adjust the rotational speed and rotational angle of the motor drive unit 65 by a feedback control method (full closed-loop control method) based on the motor detection signal.

[0070] The control unit 50 shown in Figure 2 comprises an image analysis unit 51 and a stage movement calculation unit 52. The stage movement calculation unit 52 receives a movement command signal P1 sent from the image analysis unit 51. The movement command signal P1 is obtained based on the results of the analysis of the captured image (image data) of the electronic component to be adjusted, as described later, and indicates the adjustment position (target placement position) of the electronic component. In this example, the image analysis unit 51 is composed of the control unit 50 together with the stage movement calculation unit 52, but it may be provided separately from the control unit 50 (stage movement calculation unit 52), and may be composed of, for example, a part of the imaging device (see Figure 5 described later) (for example, an image processing unit).

[0071] The stage movement calculation unit 52 of the control unit 50 controls the drive motors 63 (X-axis drive motor 20 and Y-axis drive motor 30 in Figure 1) of the stage movement mechanism 13 based on the movement command signal P1, and moves the stage 12 to the adjustment position indicated by the movement command signal P1.

[0072] In particular, the stage movement calculation unit 52 (control unit 50) of this embodiment has a storage unit 53, which stores a stage movement amount calculation formula that shows the correspondence between the adjustment position and the amount of movement of the stage 12 by the stage movement mechanism 13. Based on the stage movement amount calculation formula, the stage movement calculation unit 52 obtains the amount of stage movement corresponding to the adjustment position indicated by the movement command signal P1, and controls the stage movement mechanism 13 (especially the drive motor 63) to move the stage 12 by the obtained amount of stage movement. As a result, the electronic components on the stage 12 are positioned at the desired adjustment position with very high precision.

[0073] In the example shown in Figure 2, the memory unit 53 is included in the stage movement calculation unit 52, but it may be provided separately from the stage movement calculation unit 52. For example, the memory unit 53 may be provided as an external type memory connected to the control unit 50 by wire or wireless, or the memory unit 53 may be connected to the control unit 50 via a network such as the Internet. However, even if the memory unit 53 that stores the stage movement amount calculation formula is provided separately from the stage movement calculation unit 52, the stage movement calculation unit 52 will store and retain the stage movement amount calculation formula obtained from the memory unit 53 and perform processing using the stage movement amount calculation formula.

[0074] In this embodiment, the stage unit 10 undergoes a preparation mode operation to acquire a stage movement calculation formula, and then the main mode operation is performed to move the stage 12 based on the acquired stage movement calculation formula.

[0075] Preparation mode operation is performed by the stage unit 10 with the movement measurement sensor 37 attached. The stage movement amount calculation formula is determined based on the movement amount of the stage 12 indicated by the measurement result of the movement measurement sensor 37 and stored in the memory unit 53. In this mode operation, the stage 12 with the electronic components mounted on it is moved by the amount of movement of the stage 12 calculated based on the stage movement amount calculation formula stored in the memory unit 53 during preparation mode operation, and as a result, the electronic components are positioned in the desired adjustment position.

[0076] In this mode of operation, the moving measurement sensor 37 may be attached to the stage unit 10 or removed from the stage unit 10. For example, the manufacturer or other seller of the stage unit 10 may perform a preparation mode operation of the stage unit 10 using the moving measurement sensor 37, and then provide the purchaser (user) with a stage unit 10 without the moving measurement sensor 37. In this case, it is possible to provide the stage unit 10 to the purchaser at a lower cost.

[0077] The selection and switching between preparation mode operation and main mode operation can be performed in any manner, typically based on input to the control unit 50 by the administrator of the stage unit 10. The control unit 50 has an interface device (not shown) that accepts input of various information, and the administrator can input various information via the interface device.

[0078] The specific procedures for this preparation mode operation and main mode operation are not limited, and typical operating patterns are described below as examples.

[0079] In the preparation mode operation of this example of operation, the movement measurement sensor 37 measures all adjustment positions that can be indicated by the movement command signal P1 (i.e., all possible movement amounts of the stage 12) to measure and acquire the actual position of the stage 12 (i.e., the actual movement amount of the stage 12). The adjustment positions (movement target positions) that can be indicated by the movement command signal P1 can be set, for example, in increments of 1 μm from 0 μm.

[0080] In this way, the actual amount of movement of the stage 12 measured and acquired by the movement measurement sensor 37 is transmitted as a measured movement signal C from the movement measurement sensor 37 to the stage movement calculation unit 52 of the control unit 50. Based on the measured movement signal C from the movement measurement sensor 37, the stage movement calculation unit 52 generates a stage movement calculation formula and stores it in a readable format in the storage unit 53.

[0081] In preparation mode operation, the image analysis unit 51 does not transmit a movement command signal P1 to the stage movement calculation unit 52, and the stage movement calculation unit 52 autonomously outputs a movement drive signal P2 to the drive motor 63 (stage movement mechanism 13) without the movement command signal P1 from the image analysis unit 51. That is, the stage movement calculation unit 52 autonomously outputs a movement drive signal P2 to the drive motor 63 for each of the adjustment positions that can be indicated by the movement command signal P1, and moves the stage 12 via the stage movement mechanism 13. The stage movement calculation unit 52 then generates a stage movement amount calculation formula by associating each of the autonomously output movement drive signals P2 with the corresponding measured movement amount signal C (actual movement amount of the stage 12) from the movement measurement sensor 37.

[0082] The stage movement calculation formula is expressed as an expression that includes a polynomial that reflects the error represented by the difference between the actual movement of the stage 12 and the adjustment position (movement target position) indicated by the input movement command signal P1. Specifically, if the adjustment position (movement target position) indicated by the input movement command signal P1 is represented by "y0", and the error represented by the difference between the actual movement of the stage 12 and the adjustment position is represented by "f(x)", then the stage movement calculation formula can represent the movement amount "yp" of the stage associated with the adjustment position y0 indicated by the movement command signal P1 by the following formula. Note that if the actual movement amount of the stage 12 exceeds the adjustment position, "f(x)" will be a positive value, and if the actual movement amount of the stage 12 does not reach the adjustment position, "f(x)" will be a negative value. yp = y0 - f(x) y0 = x

[0083] The inventors of this case, through repeated trial and error using actual equipment, discovered that the above-mentioned error f(x) can be expressed by a polynomial, and in particular, can be expressed with high accuracy by a polynomial of degree 4 or higher. That is, the error f(x) can be expressed by, for example, the following 4th-degree polynomial. f(x) = a₀ × x 4 +a3×x 3 +a²×x 2 +a1 × x + a0

[0084] Thus, the "stage movement amount yp associated with the adjustment position y0 indicated by the movement command signal P1," calculated based on the stage movement amount calculation formula, is expressed as the difference between the "target movement position" and the "deviation amount (error)" (=y0-f(x)), and is the "movement command amount" in which the "deviation amount" is compensated for relative to the "target movement position."

[0085] This "movement command amount" is reflected in the position adjustment amount included in the movement drive signal P2 sent from the control unit 50 to the stage movement mechanism 13 (drive motor 63 (X-axis drive motor 20 and Y-axis drive motor 30)) during operation in this mode. In other words, during operation in this mode, the stage movement calculation unit 52 of the control unit 50 acquires the "movement command amount (i.e., the amount of movement of the stage 12)" which is associated with the adjustment position indicated by the input movement command signal P1, based on the stage movement amount calculation formula read from the storage unit 53, and outputs a movement drive signal P2 that reflects the acquired "movement command amount". The drive motor 63 (stage movement mechanism 13), which receives the movement drive signal P2 output in this way, drives the stage 12 (and by extension the electronic components on the stage 12) to move by the "movement command amount" included in the movement drive signal P2.

[0086] In the above-described operating mode, the stage movement amount calculation formula is obtained using the measurement results from the movement measurement sensor 37 for all adjustment positions that can be indicated by the movement command signal P1. However, the stage movement amount calculation formula may also be obtained using the measurement results from the movement measurement sensor 37 for only a portion of the adjustment positions that can be indicated by the movement command signal P1.

[0087] In this case, during preparation mode operation, the movement measurement sensor 37 may perform measurements only for a plurality of discretely selected adjustment positions from among all adjustment positions that can be indicated by the movement command signal P1 (i.e., all possible movement amounts of the stage 12) to obtain the actual position of the stage 12 (i.e., the actual movement amount of the stage 12). The actual movement amount of the stage 12 measured and obtained by the movement measurement sensor 37 in this way is transmitted from the movement measurement sensor 37 to the stage movement calculation unit 52 of the control unit 50 as a measured movement amount signal C. Based on the measured movement amount signal C from the movement measurement sensor 37, the stage movement calculation unit 52 generates a stage movement amount calculation formula and stores it in a readable format in the storage unit 53.

[0088] The stage movement calculation formula generated in this way also represents the correspondence between all adjustment positions that can be indicated by the movement command signal P1 and the corresponding movement amount of the stage 12. Therefore, in this mode of operation, the stage movement calculation unit 52 of the control unit 50 can obtain the movement amount of the stage 12 that corresponds to the adjustment position indicated by the movement command signal P1, based on the stage movement calculation formula.

[0089] Figure 3 is a graph showing an example of the ideal state of the rotation angle (horizontal axis) and lift amount (vertical axis) of the cam (see X-axis drive cam 22 and Y-axis drive cam 32 shown in Figure 1). Figure 4 is a graph showing an actual measurement example of a cam manufactured to correspond to Figure 3, where the horizontal axis shows the rotation angle of the cam and the vertical axis shows the error in the cam's lift amount.

[0090] The "cam rotation angle" represented by the horizontal axis in Figures 3 and 4 indicates the rotation angle from the cam's reference position (0°), and a cam rotation angle of "360°" substantially coincides with a cam rotation angle of "0°". The "cam lift amount" represented by the vertical axis in Figure 3 indicates the amount of movement of the cam follower pushed and moved by the cam in accordance with the cam's rotation, and the cam lift amount at a cam rotation angle of "0°" is set to "0 mm". The "cam lift amount error" represented by the vertical axis in Figure 4 indicates the deviation from the cam lift amount in the ideal state, and a cam lift amount error of "0 μm" means that the actually measured cam lift amount matches the ideal cam lift amount.

[0091] Even if a cam is designed and manufactured so that the lift amount increases proportionally with respect to the rotation angle within a certain rotation angle range (0° to 320° in the example shown in Figure 3), the "rotation angle-lift amount" characteristics of the cam that is actually manufactured and assembled into the stage unit 10 usually do not show an ideal proportional relationship due to manufacturing errors, etc. (see Figure 4). In particular, the "rotation angle-lift amount" characteristics of the actual cam can vary from one cam to another, making it difficult to accurately predict the "rotation angle-lift amount" characteristics of each individual cam.

[0092] Thus, the "rotation angle-lift amount" characteristic of the cam is inherently inconsistent due to manufacturing tolerances and other factors. Therefore, the amount of movement of the stage 12, which is moved by the stage moving mechanism 13 equipped with such cams (X-axis drive cam 22 and Y-axis drive cam 32 in Figure 1), will also inherently have errors.

[0093] On the other hand, according to the stage unit 10 of this embodiment as shown in Figures 1 and 2 above, the stage movement mechanism 13 is controlled based on the actual amount of movement of the stage 12 indicated by the measurement result of the movement measurement sensor 37 and the adjustment position (target placement position) indicated by the movement command signal P1. Therefore, the amount of movement of the stage 12 by the stage movement mechanism 13 can be adaptively corrected based on the actual amount of movement of the stage 12, and as a result, the stage 12 (and by extension the electronic components on the stage 12) can be accurately positioned at the desired adjustment position (see Figures 10 and 11 described later).

[0094] Note that the stage unit 10 shown in Figures 1 and 2 is merely an example, and various modifications may be made to the stage unit 10.

[0095] Next, an example of a processing system 1 equipped with the stage unit 10 described above will be explained.

[0096] Figure 5 shows a schematic configuration of an example of processing system 1.

[0097] In the processing system 1 of this embodiment, each electronic component W to be processed is temporarily placed on the stage 12 while being transported to the next stage, moved together with the stage 12 to correct its position, and then processed by the inspection device 61 (for example, performance testing).

[0098] The processing system 1 shown in Figure 5 comprises a pre-stage mounting unit 45 provided at the pre-stage station St1, an imaging device 55 provided at the imaging station St2, and a stage unit 10 and inspection device 61 provided at the adjustment station St3.

[0099] The target electronic component W is placed on the front mounting section 45. The electronic component W on the front mounting section 45 is held by the mounting device 46 and intermittently transported from the front station St1 through the imaging station St2 to the adjustment station St3, where it is placed on the stage 12 of the stage unit 10.

[0100] The mounting device 46 of this embodiment includes a pickup nozzle (component holding nozzle) 47 that holds the electronic component W in a releaseable manner under the control of the control unit 50. The pickup nozzle 47 is a suction nozzle that holds the electronic component W at the nozzle opening by vacuum suction, for example, by making the internal pressure lower than the external pressure, and the electronic component W can be released by making the internal pressure greater than or equal to the external pressure.

[0101] The pickup nozzle 47 is moved so as to be stopped sequentially and intermittently at multiple stations (including stations St1 to S3), and circulates around these multiple stations. In this embodiment, these stations are arranged at equal intervals along a circular track, and the mounting device 46 is equipped with the same number of pickup nozzles 47 as these stations, and each of the multiple pickup nozzles 47 is stopped simultaneously and intermittently at all stations.

[0102] Therefore, when the preceding pickup nozzle 47 holds the electronic component W at the preceding station St1 and moves with the electronic component W to be placed at the imaging station St2, the next pickup nozzle 47 is positioned at the preceding station St1 to hold another electronic component W. In this way, the mounting device 46 holds the electronic components W on the preceding mounting section 45 one at a time and transports them to the imaging station St2.

[0103] On the preceding mounting section 45, only one electronic component W may be placed simultaneously, or multiple electronic components W may be placed simultaneously. If only one electronic component W is placed simultaneously on the preceding mounting section 45, after the electronic component W has been transported from the preceding mounting section 45 toward the imaging station St2 by the preceding pickup nozzle 47 (for example, before the next pickup nozzle 47 is placed toward the preceding station St1), the next electronic component W may be placed on the preceding mounting section 45 by a supply device (not shown). On the other hand, if multiple electronic components W are placed simultaneously on the preceding mounting section 45, after the electronic component W has been transported from the preceding mounting section 45 toward the imaging station St2 by the preceding pickup nozzle 47 (for example, before the next pickup nozzle 47 is placed toward the preceding station St1), the next electronic component W may be moved to a holding position by a moving mechanism (not shown) so that it is positioned in a holding position for being held by the next pickup nozzle 47, or the preceding mounting section 45 may be moved by a moving mechanism (not shown).

[0104] The imaging device 55 acquires image data D of the electronic component W before it is placed on the stage 12 of the stage unit 10 at the imaging station St2, and transmits the image data D to the control unit 50. In the example shown in Figure 5, along with the imaging device 55, the imaging station St2 is provided with an annular illumination device 57 having a light-transmitting portion in the center through which the light used to photograph the electronic component W can pass, and an imaging optical system 56 that guides the light used to photograph the electronic component W to the imaging device (especially an image sensor such as a CMOS) 55. The imaging optical system 56 may include, for example, one or more optical elements (e.g., lenses and mirrors) that refract or reflect light. Therefore, the electronic component W, pickup nozzle 47, imaging optical system 56, and imaging device 55, which are intermittently arranged at the imaging station St2, are located on the same straight line (same vertical line) in the example shown in Figure 5, but they do not necessarily have to be located on the same straight line. For example, the light used to photograph the electronic component W traveling vertically (downward) may be reflected horizontally by the imaging optical system 56, and the imaging device 55 may receive the light traveling horizontally.

[0105] At the imaging station St2, illumination light (e.g., visible light) from the illumination device 57 is shone on the electronic component W, which intermittently stops together with the pickup nozzle 47. The reflected light, which is the image light of the electronic component W, is received by the image sensor of the imaging device 55 via the light-transmitting section of the illumination device 57 and the imaging optical system 56, thereby acquiring image data D of the electronic component W. The image data D may include an image of the illumination device 57 in addition to the image of the electronic component W, or it may not include an image of the illumination device 57.

[0106] The electronic component W, held by the pickup nozzle 47, is moved from the imaging station St2 after undergoing imaging processing at the imaging station St2, intermittently stopped at the adjustment station St3, and placed on the stage 12 of the stage unit 10.

[0107] In this embodiment, the control unit 50 controls the stage movement mechanism 13 (particularly the X-axis drive motor 20, the Y-axis drive motor 30, and the θ-axis drive motor 70) based on image data D. That is, the control unit 50 adjusts the position and orientation of the stage 12 by controlling the stage movement mechanism 13 based on state information indicating the state of the electronic component W obtained by analyzing the image data D. The state information here can include various types of information, and typically includes position information indicating the deviation of the electronic component W's position from a reference position, and orientation information indicating the deviation of the electronic component W's orientation (direction) from a reference orientation. The position information of the electronic component W here can include not only information indicating the shape position of the electronic component W (e.g., external dimensions), but also information indicating the electrode position deviation of the electronic component W. Therefore, by controlling the stage movement mechanism 13 based on the position information of the electronic component W, the control unit 50 can correct not only the shape position of the electronic component W, but also the electrode position deviation of the electronic component W.

[0108] In the example shown in Figure 5, the control unit 50 includes an image analysis unit 51 that analyzes image data D of the electronic component W output from the imaging device 55, and a stage movement calculation unit 52 that controls the stage movement mechanism 13 based on the analysis results of the image data D. The image analysis unit 51 can analyze the image data D using any method to acquire state information such as position information and orientation information of the electronic component W. The stage movement calculation unit 52 controls the stage movement mechanism 13 based on the state information acquired by the image analysis unit 51 and adjusts the position of the stage 12 relative to the base 11 (and consequently the position of the electronic component W on the stage 12).

[0109] As an example, the image analysis unit 51 has reference image data in advance, and by comparing the image data D of the electronic component W acquired by the imaging device 55 with the reference image data, it is possible to acquire state information such as position information and orientation information. The reference image data referred to here is image data that includes an image of the electronic component W arranged at a desired appropriate position and orientation, and may be, for example, image data D acquired by the imaging device 55 while the electronic component W is being held by the pickup nozzle 47 at a desired appropriate position and orientation. In this case, the image analysis unit 51 may identify the position and orientation of the target electronic component W in the image data D (for example, the position and orientation of the whole or a part of the target electronic component W (such as an electrode)) and compare it with the position and orientation of the electronic component W in the reference image data to acquire state information such as position information and orientation information regarding the target electronic component W. Alternatively, the image analysis unit 51 may obtain state information such as position information and orientation information regarding the target electronic component W by comparing the position and orientation of the electronic component W in the image data D of the electronic component W acquired by the imaging device 55 with a reference position and reference orientation in the image data D (for example, the position and orientation that directly or indirectly indicate the pickup nozzle 47).

[0110] In this example, the pickup nozzle 47 places the electronic component W on the stage 12, which is positioned at a predetermined origin, as described later, and then releases the electronic component W from its grip. Subsequently, the position of the stage 12 (and thus the position of the electronic component W) is adjusted by the stage movement mechanism 13 under the control unit 50, and the pickup nozzle 47 picks up the electronic component W on the adjusted stage 12 again and transports it from the adjustment station St3 to the next station.

[0111] Figure 6 shows an example of the processing flow performed by the processing system 1 shown in Figure 5.

[0112] The electronic component W to be processed is placed on the pre-station mounting section 45 of the pre-station St1 and intermittently transported from the pre-station St1 to the imaging station St2 while being held by the pickup nozzle 47 of the mounting device 46.

[0113] Subsequently, the electronic component W is imaged by the imaging device 55 while it is intermittently stopped at the imaging station St2, and a movement command signal P1 is generated based on the analysis results of the captured image (S1 in Figure 6). That is, the image data D of the captured image of the electronic component W acquired by the imaging device 55 is transmitted to the image analysis unit 51 of the control unit 50. The image analysis unit 51 obtains state information of the electronic component W (including position information and orientation information) by analyzing the image data D, derives the difference (target movement amount) between the current position of the electronic component W and the placement target position, and generates a movement command signal P1 that includes information on the difference (target movement amount) and orientation information. The pickup nozzle 47 continues to hold the electronic component W without releasing it at the imaging station St2.

[0114] After being imaged by the imaging device 55, the electronic component W is intermittently transported from the imaging station St2 to the adjustment station St3 while being held by the pickup nozzle 47 (S2).

[0115] Meanwhile, the stage 12 of the stage unit 10 provided at the adjustment station St3 undergoes position adjustment processing by the stage movement mechanism 13 so that it is positioned at the origin position (S3). The "origin position" referred to here is not limited, but as an example, when the stage 12 is positioned at the origin position, the central region of the stage 12 (the region through which the vertically extending central axis passes) may be located directly below the pickup nozzle 47 which is intermittently stopped at the adjustment station St3.

[0116] The electronic component W is then placed on the stage 12, which is positioned at the origin, by the pickup nozzle 47. After that, the pickup nozzle 47, having released its grip on the electronic component W, is moved upward and retracted from the stage 12 (S4).

[0117] Subsequently, the stage movement mechanism 13, under the control of the stage movement calculation unit 52 of the control unit 50, moves the stage 12 together with the electronic component W from the origin position based on the movement command signal P1 (S5). That is, the stage movement calculation unit 52 acquires the amount of movement of the stage 12 that corresponds to the adjustment position indicated by the movement command signal P1 from the image analysis unit 51, based on a stage movement amount calculation formula that shows the correspondence between the adjustment position and the amount of movement of the stage 12 by the stage movement mechanism 13. The stage movement calculation unit 52 then transmits a movement drive signal P2 that reflects the acquired amount of movement of the stage 12 to the X-axis drive motor 20 and the Y-axis drive motor 30 (drive motor 63), and controls the stage movement mechanism 13 to move the stage 12 by the acquired amount of movement of the stage 12.

[0118] Subsequently, the electronic component W is held again on the stage 12 by the pickup nozzle 47 (S6). Then, while being held by the pickup nozzle 47, the electronic component W is intermittently transported from the imaging station St2 to a downstream station (not shown) (S7).

[0119] Figure 7 shows an example of the relationship between the target movement amount of stage 12 (horizontal axis) and the movement error amount (vertical axis), which represents the difference between the target movement amount of stage 12 and the actual movement amount of stage 12, when the processing flow shown in Figure 6 is executed by a processing system 1 (see Figure 5) equipped with the stage unit 10 shown in Figure 1 without using the stage movement amount calculation formula. Figure 8 shows an example of the relationship between the target movement amount of stage 12 (horizontal axis) and the movement error amount (vertical axis), which represents the difference between the target movement amount of stage 12 and the actual movement amount of stage 12, when the processing flow shown in Figure 6 is executed by a processing system 1 (see Figure 5) equipped with the stage unit 10 shown in Figure 1 using the stage movement amount calculation formula.

[0120] As the positional adjustment accuracy of the stage 12 (and consequently the electronic component W) by the stage movement mechanism 13 increases, the amount of movement error (vertical axis) in the graphs of Figures 7 and 8 approaches "0 μm".

[0121] As shown in Figure 7, when the stage 12 is moved from its origin position based on the movement drive signal P2 directly derived from the movement command signal P1, without using a stage movement amount calculation formula that takes into account the actual movement amount of the stage 12 by the stage movement mechanism 13, a relatively large movement error is observed. In the example shown in Figure 7, a maximum movement error (absolute value) of approximately 15 μm was observed. Furthermore, the inventors of this invention conducted similar trials repeatedly and confirmed the occurrence of a maximum movement error (absolute value) of approximately 26 μm.

[0122] On the other hand, as shown in Figures 8 and 11, when the stage 12 is moved from its origin position based on the movement drive signal P2 derived from the movement command signal P1 using a stage movement amount calculation formula that takes into account the actual amount of movement of the stage 12 by the stage movement mechanism 13, the amount of movement error becomes very small. In the example shown in Figure 8, the amount of movement error was "-4μm to +7μm" over the entire target movement amount.

[0123] As described above, according to the processing system 1 (stage unit 10) and processing method of this embodiment, the control unit 50 acquires the amount of movement of the stage 12 that corresponds to the adjustment position indicated by the movement command signal P1, based on a stage movement amount calculation formula that shows the correspondence between the adjustment position indicated by the movement command signal P1 and the amount of movement of the stage 12 by the stage movement mechanism 13. The control unit 50 then controls the stage movement mechanism 13 to move the stage 12 by the amount of movement of the stage 12 acquired in this way. As a result, the electronic component W on the stage 12 can be positioned at the desired position with very high precision.

[0124] Furthermore, the processing system 1 (stage unit 10) and processing method of this embodiment require a moving measurement sensor 37 in preparation mode operation, but do not require a moving measurement sensor 37 in main mode operation. Therefore, it is possible to provide the processing system 1 (stage unit 10) at a low cost to users who only perform main mode operation.

[0125] Furthermore, according to this embodiment, the position of the stage 12 (and by extension, the electronic component W on the stage 12) in this mode of operation can be adjusted accurately in a single operation of the stage 12, and the operation of the stage 12 is not repeated multiple times to adjust the position of a single electronic component W. Therefore, according to this embodiment, the position adjustment of the stage 12 (and by extension, the electronic component W on the stage 12) can be performed quickly, and the processing speed of the entire processing system 1 can also be improved.

[0126] Furthermore, according to this embodiment, if the stage movement calculation unit 52 has a stage movement amount calculation formula, it can use that formula to accurately adjust the position of the stage 12 (and by extension, the electronic components W on the stage 12). Therefore, the processing system 1 (stage unit 10) and processing method of this embodiment are also advantageous in terms of data capacity.

[0127] Thus, the processing system 1 (stage unit 10) and processing method of this embodiment are advantageous in achieving a balanced and overall improvement in position adjustment accuracy, position adjustment processing time, equipment cost, and data capacity.

[0128] [Differentiation] In the above-described embodiment, the stage unit 10 can adjust not only the position of the stage 12 in the X direction dX and Y direction dY, but also the orientation (azimuth) of the stage 12. However, the stage unit 10 does not need to adjust the orientation (azimuth) of the stage 12. Therefore, for example, the θ-axis drive motor 70, rotation relay unit 72, rotation support shaft and / or turntable 71 shown in Figure 1 do not need to be provided.

[0129] Furthermore, in the processing system 1 of the above embodiment, after the electronic component W is placed on the stage 12 which is positioned at the origin, the position of the stage 12 is adjusted based on the movement command signal P1 and the measured movement amount signal C. However, the method of position adjustment is not limited to this. For example, the electronic component W may be placed on the stage 12 after the position adjustment based on the movement command signal P1 and the measured movement amount signal C has been performed, and then the stage 12 may be moved to the origin position together with the electronic component W.

[0130] It should be noted that the embodiments and modifications disclosed herein are illustrative in all respects and should not be construed restrictively. The embodiments and modifications described above may be omitted, substituted, and modified in various ways without departing from the scope and spirit of the appended claims. For example, the embodiments and modifications described above may be combined in whole or in part, and other embodiments may be combined with the embodiments or modifications described above. Furthermore, the effects described herein are illustrative, and other effects may result.

[0131] The technical categories that embody the above-described technical concept are not limited. For example, the above-described technical concept may be embodied by a computer program that causes a computer to execute one or more steps included in a method for manufacturing or using the above-described device. Alternatively, the above-described technical concept may be embodied by a computer-readable, non-transitory recording medium on which such a computer program is recorded. [Explanation of symbols]

[0132] 1 Processing system, 10 Stage unit, 11 Base, 11a Upper base section, 11b Side base section, 11c Lower base section, 11d Drive motor mounting plate, 12 Stage, 13 Stage movement mechanism, 15 Stage X-axis guide unit, 16 Stage Y-axis guide unit, 20 X-axis drive motor, 20a X-axis drive motor body, 21 X-axis movable table, 22 X-axis drive cam, 23 X-axis drive cam follower, 24 X-axis drive spring, 25 Table X-axis guide unit, 30 Y-axis drive motor, 30a Y-axis drive motor body, 31 Y-axis movable table, 32 Y-axis drive cam, 33 Y-axis drive cam follower, 34 Y-axis drive spring, 35 Y-axis guide unit, 37 Movement measurement sensor, 37x X-direction sensor, 37y Y-direction sensor, 41 First stage support section, 42 Second stage support section, 43 Stage support extension section, 45 46 Pre-stage mounting unit, 47 Mounting device, 50 Pickup nozzle, 51 Control unit, 51 Image analysis unit, 52 Stage movement calculation unit, 55 Imaging device, 56 Imaging optical system, 57 Illumination device, 61 Inspection device, 63 Drive motor, 64 Motor driver, 65 Motor drive unit, 66 Motor encoder, 70 θ-axis drive motor, 70a θ-axis drive motor body, 71 Turntable, 72 Rotation relay unit, 73 First coupling, 74 Second coupling, 75 Turn joint shaft, A Rotation axis, C Measured movement amount signal, D Image data, dX X direction, dY Y direction, dR Rotation direction, P1 Movement command signal, P2 Movement drive signal, St1 Pre-stage station, St2 Imaging station, St3 Adjustment station, W Electronic components

Claims

1. Bass and, A stage on which electronic components can be mounted, A stage moving mechanism for moving the stage relative to the base, The system includes a control unit that controls the stage movement mechanism based on a movement command signal and moves the stage to the adjustment position indicated by the movement command signal, The control unit, Based on a stage movement amount calculation formula that shows the correspondence between the adjustment position and the amount of movement of the stage by the stage movement mechanism, the amount of movement of the stage corresponding to the adjustment position indicated by the movement command signal is obtained. The stage movement mechanism is controlled to move the stage by the amount of movement of the stage that has been acquired. The adjustment position and the amount of stage movement, whose correspondence is shown by the stage movement calculation formula, are for the case where the stage is moved from a predetermined origin position. Stage unit.

2. The aforementioned formula for calculating the stage movement amount is a polynomial. The stage unit according to claim 1.

3. The aforementioned formula for calculating the stage movement amount is a polynomial of degree 4 or higher. The stage unit according to claim 1.

4. The stage movement calculation formula is determined based on the stage movement amount indicated by the measurement results of a movement measurement sensor capable of directly or indirectly measuring the stage movement amount. The stage unit according to claim 1.

5. The stage unit according to claim 1, wherein the stage moving mechanism is capable of rotating the stage around a rotation axis extending in a direction perpendicular to the plane.

6. The stage unit according to claim 1, wherein the stage moving mechanism comprises a cam and a motor for rotating the cam, and moves the stage based on the rotation of the cam.

7. A stage unit according to any one of claims 1 to 6, A mounting device for placing electronic components on the aforementioned stage, The system includes an imaging device that acquires image data of the electronic component before it is placed on the stage, The control unit controls the stage movement mechanism to move the stage to the adjustment position based on the movement command signal obtained as a result of the analysis of the image data. Processing system.

Images