Reticle pod with a latch including an inclined surface

Abstract

The reticle pod includes contact surfaces for securing the segments of the reticle pod together. At least one of the contact surfaces is an inclined surface, and when the reticle pods are secured together, a reticle is clamped between reticle contacts provided on the segments of the reticle pod. When the reticle pods are assembled to contain a reticle, a purge gas flow path may be formed within the reticle pod. The height of the reticle contacts and the thickness of the reticle may be such that the reticle pod segments are spaced apart from one another by gaps, the gaps providing the purge gas flow path. The reticle pod may be a stocker pod for transporting and storing reticles.

Description

Technical Field

[0001] Priority This disclosure claims the priority of U.S. Provisional Patent No. 63 / 242,305, filed on September 9, 2021, which is hereby incorporated by reference in its entirety.

[0002] This disclosure relates to a pod for storing and / or transporting a reticle, particularly a pod including a pod segment having a contact surface including an inclined surface.

Background Art

[0003] Reticles are typically transported, processed, and stored within a reticle pod that includes an inner pod and an outer pod. The inner pod is configured to be used during the processing of the reticle in photolithography, such as extreme ultraviolet (EUV) processing. Due to the functions of the inner pod that are suitable for use in reticle processing, such as filters, seal formation, and / or other functions of the inner pod, the inner pod becomes more complex and expensive and may not be very suitable for storing reticles.

Summary of the Invention

[0004] This disclosure relates to a pod for storing and / or transporting a reticle, particularly a pod including a pod segment having a contact surface including an inclined surface.

[0005] The reticle pod may utilize contact surfaces including at least one inclined surface to provide a clamping force for closing the pod and clamping the reticle housed within it. The reticle pod may be held together by the interlocking of first and second inclined surfaces provided on the first and second segments, respectively. The interlocking of the inclined surfaces may hold the first and second segments together so that the reticle is fixed within the reticle housing space formed within the stocker pod and the reticle is clamped by the reticle contacts provided on each of the first and second segments. This improves the clamping of the reticle, allowing the reticle to remain fixed even during movement of the reticle pod or during impact events such as being struck or dropped.

[0006] A reticle pod can be a stocker pod. Stocker pods can enable higher storage densities by being less bulky than conventional reticle pods, and can reduce costs by including only functions for reticle storage, and omitting functions for reticle handling such as filters and pod seals. A stocker pod may include one or more channels through which a purge gas can flow to remove oxygen, water, particulate matter, and other contaminants, protecting the contained reticles and thus improving the overall process yield. The channels may be gaps between segments of the reticle pod. Multiple reticle pods can be used within a stocker pod container to store a large number of reticles, and the stocker pod container provides a suitable environment for reticle storage, including, for example, the flow of purge gas through the stocker pod.

[0007] In one embodiment, the article includes a reticle pod. The reticle pod includes a first reticle pod segment, the first reticle pod includes a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first contact surface. The reticle pod further includes a second reticle pod segment including a plurality of second reticle contacts and a plurality of second contact surfaces. Each of the plurality of latches' first contact surfaces is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. The reticle pod is configured to house a reticle in a reticle housing space such that the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts when the reticle is in the reticle housing space and the first contact surface contacts the second contact surface.

[0008] In one embodiment, when the reticle is in contact with a plurality of first reticle contacts and a plurality of second reticle contacts, the reticle pod defines a purge gas channel from outside the reticle pad through the reticle space. In one embodiment, the purge gas channel is formed by the gap between the first reticle pod segment and the second reticle pod segment. In one embodiment, the gap is in the range of 0.5 to 6 millimeters (mm). In one embodiment, the gap is formed by the respective heights of the plurality of first reticle contacts and the plurality of second reticle contacts and the thickness of the reticle.

[0009] In one embodiment, at least one of the first reticle pod segment and the second reticle pod segment includes a plurality of reticle contact bosses, and at least a portion of the first plurality of reticle contacts or at least a portion of the second plurality of reticle contacts is partially located within the plurality of reticle contact bosses.

[0010] In one embodiment, the plurality of first reticle contacts and the plurality of second reticle contacts comprise a polyetheretherketone (PEEK) material.

[0011] In one embodiment, at least one of the first reticle pod segment and the second reticle pod segment is made of aluminum.

[0012] In one embodiment, both the first contact surface and the second contact surface are inclined surfaces.

[0013] In one embodiment, each of the second contact surfaces is located on the outer surface of the second reticle pod segment. In one embodiment, an opening is provided on the second reticle pod segment, and this opening is configured to allow a portion of the latch member body, including the first contact surface, to pass through the opening, and this opening is positioned adjacent to each of the second contact surfaces.

[0014] In one embodiment, each of the second contact surfaces is positioned on a flange, and each flange protrudes toward the first reticle pod segment when the reticle pod is assembled.

[0015] In one embodiment, each latch includes a channel, a latch member body configured to be movable within the channel and including one of a plurality of first contact surfaces, and a spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latch position. In one embodiment, the angles of each of the first contact surfaces and each of the second contact surfaces, and the coefficients of friction of each of the first and second contact surfaces, are selected to resist the latch body retracting from the latch position when the first contact surface contacts the second contact surface. In one embodiment, the angles of each of the first contact surfaces and each of the second contact surfaces are 30° or less.

[0016] In one embodiment, a method for storing a reticle includes arranging the reticle in a reticle pod. The reticle pod includes a first reticle pod segment, the first reticle pod including a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first contact surface. The reticle pod further includes a second reticle pod segment including a plurality of second reticle contacts and a plurality of second contact surfaces. Each of the plurality of latches' first contact surfaces is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. The reticle pod is configured to house the reticle in a reticle housing space such that the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts when the reticle is in the reticle housing space and the first contact surface contacts the second contact surface.

[0017] In one embodiment, when the reticle is in contact with a plurality of first reticle contacts and a plurality of second reticle contacts, the reticle pod defines a purge gas flow path from outside the reticle pad through the reticle space, and the method further includes supplying a purge gas flow through the purge gas flow path.

[0018] In one embodiment, each latch includes a channel, a latch member body configured to be movable within the channel and including one of a plurality of first contact surfaces, and a spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latched position. Placing the reticle in the article includes pulling each latch member body into the unlocked position, bringing together the first reticle pod segment and the second reticle pod segment so that the reticle contacts a plurality of first reticle contacts and a plurality of second reticle contacts, and releasing each latch member body so that the spring can drive the latch member body toward the latched position.

[0019] In one embodiment, the reticle storage system includes a pod container, a purge gas supply unit, and a plurality of reticle pods, each configured to be housed within the pod container. Each reticle pod includes a first reticle pod segment, the first reticle pod includes a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first contact surface. The reticle pod further includes a second reticle pod segment, which includes a plurality of second reticle contacts and a plurality of second contact surfaces. Each of the plurality of latches' first contact surfaces is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. The reticle pod is configured to house a reticle within a reticle housing space such that the reticle is located within the reticle housing space and the reticle is clamped by a plurality of first reticle contacts and a plurality of second reticle contacts when the first contact surface contacts the second contact surface. [Brief explanation of the drawing]

[0020] [Figure 1] A cross-sectional view of a reticle pod according to one embodiment is shown. [Figure 2] A perspective view of a reticle pod according to one embodiment is shown. [Figure 3] A bottom view of a reticle pod according to one embodiment is shown. [Figure 4] A side view of a reticle pod according to one embodiment is shown. [Figure 5] A schematic diagram of a reticle storage system according to one embodiment is shown. [Figure 6] A cross-sectional view of a reticle pod according to one embodiment is shown. [Modes for carrying out the invention]

[0021] This disclosure relates to a pod for storing and / or transporting a reticle, and more particularly to a pod including a pod segment having contact surfaces including an inclined surface.

[0022] FIG. 1 shows a cross-sectional view of a reticle pod according to an embodiment. The reticle pod 100 includes a first reticle pod segment 102 and a second reticle pod segment 104. The first reticle pod segment 102 includes a latch 106. The latch 106 includes a channel 108, a spring 110, and a latch body 112. The latch body 112 includes a flange 114 and a first contact surface 116. The second reticle pod segment 104 includes a boss 118 and a reticle contact 120. The second reticle pod segment 104 further includes a second contact surface 122. The second reticle pod segment 104 can include an opening 124 disposed near or adjacent to the second contact surface 122. A reticle 126 can be housed in a reticle housing space 128 formed by the first reticle pod segment 102 and the second reticle pod segment 104. A gap 130 can be formed between the first reticle pod segment 102 and the second reticle pod segment 104.

[0023] The reticle pod 100 is a pod for storing a reticle such as the reticle 126. The reticle pod 100 can be one of a plurality of stocker pods included in a reticle storage system, as described below and shown in FIG. 5. In one embodiment, when the reticle 126 is housed in the reticle pod 100, the reticle pod 100 does not form a seal. In one embodiment, the reticle pod 100 can be included in a reticle pod that does not include a filter or other such function used in reticle processing such as photolithography including extreme ultraviolet (EUV) processing, by way of non-limiting example. In one embodiment, the reticle pod 100 includes a filter for a pod used in reticle processing and / or any other suitable function.

[0024] The first reticle pod segment 102 is a segment of the reticle pod 100 configured to define a reticle accommodation space 128 when joined to the second reticle pod segment 104. In one embodiment, the first reticle pod segment 102 forms the lower part of the reticle pod 100 and functions as the base plate of the reticle pod 100. In one embodiment, the first reticle pod segment 102 forms the upper part of the reticle pod 100 and functions as the cover of the reticle pod 100. In one embodiment, the first reticle pod segment 102 can be made mainly of aluminum.

[0025] The latch 106 provides the first contact surface 116 such that the first contact surface 116 can contact the second contact surface 122 provided on the second reticle pod segment 104. The latch 106 can be further configured to allow the first contact surface 116 to move from the latched position to the unlatched position. In the latched position, the first contact surface 116 contacts the second contact surface 122. In the unlatched position, the first contact surface 116 and the second contact surface 122 are not in contact. In one embodiment, the unlatched position may further include positioning the first contact surface 116 such that, for example, by passing through the opening 124, the first reticle pod segment 102 and the second reticle pod segment 104 can be separated from each other.

[0026] In one embodiment, the latch 106 includes a channel 108. The channel 108 can be sized to accommodate at least a portion of the latch body 112. In one embodiment, the channel 108 is oriented in the plane and in the principal direction within the plane of the first reticle pod segment 102. In one embodiment, the channel 108 includes a slot from which a flange 114 can extend toward the second reticle pod segment 104. A spring 110 may be located within the channel 108 and contact the end of the channel 108 and the latch body 112. In one embodiment, the latch 106 includes a latch body 112. The latch body 112 may be configured to be held within the channel 108 so that the latch body can be driven along the channel 108 by a force from the spring 110. The latch body 112 may include a flange 114 extending from the channel 108 to position the first contact surface 116 in contact with the second contact surface 122.

[0027] The latch 106 has a first contact surface 116. The first contact surface 116 is an inclined surface configured to contact a corresponding second contact surface 122. Although only one first contact surface 116 is shown in Figure 1, multiple first contact surfaces 116 can be provided on the first reticle pod segment 102. In one embodiment, each first contact surface 116 can be provided on a separate latch 106. In one embodiment, multiple first contact surfaces 116 can be distributed around the first reticle pod segment 102. In one embodiment, multiple first contact surfaces 116 can be provided on both sides of the first reticle pod segment 102. The latch 106 can be positioned and oriented such that the operation of the latch reduces or completely prevents movement of the first reticle pod segment 102 to the second reticle pod segment 104. The first contact surface 116 can be molded and positioned such that, when the first reticle pod segment 102 and the second reticle pod segment 104 surround the reticle 126 and the first contact surface 116 is in the latched position, at least a portion of the first contact surface 116 contacts at least a portion of the second contact surface 122. In one embodiment, the first contact surface 116 is an inclined surface, as shown in Figure 1, for example. In one embodiment, if the second contact surface 122 is an inclined surface, the first contact surface 116 can have a shape other than an inclined surface, such as a flat surface, a rounded surface, a pin, etc. In one embodiment, the first contact surface 116 and the second contact surface 122 are complementary inclined surfaces. The contact between the first contact surface 116 and the second contact surface 122 can provide a force that pushes the first reticle pod segment 102 and the second reticle pod segment 104 toward each other, and can provide a clamping force to the reticle 126 housed within the reticle pod 100.

[0028] The second reticle pod segment 104 is a segment of the reticle pod 100 configured to define a reticle housing space 128 when joined to the first reticle pod segment 102. In one embodiment, the second reticle pod segment 104 forms the upper part of the reticle pod 100 and functions as a cover for the reticle pod 100. In one embodiment, the second reticle pod segment 104 forms the lower part of the reticle pod 100 and functions as a base plate for the reticle pod 100. In one embodiment, the second reticle pod segment 104 can be made mainly of aluminum.

[0029] Bosses 118 may be formed on the second reticle pod segment 104. Additional bosses 118 may be formed on portions of the second reticle pod segment 104 that are not visible in the diagram of Figure 1. In one embodiment, bosses 118 are provided on each reticle contact 120 contained within the second reticle pod segment 104. Each boss 118 may include one or more mechanical mechanisms for securing the reticle contact 120. The mechanical function may include, as a non-limiting example, a channel into which the reticle contact 120 can be press-fitted. It should be understood that any suitable mechanical connection may be used to hold the reticle contact 120 containing the corresponding mechanism for each boss 118. In one embodiment, instead of bosses 118, the reticle contact 120 may be housed within mechanisms formed on the first reticle pod segment 102 and the second reticle pod segment 104, such as perforations. Figure 1 shows a boss 118 on the second reticle pod segment 104, but it should be understood that embodiments may also include bosses such as boss 118 on the first reticle pod segment 102, in addition to or instead of the boss formed on the second reticle pod segment 104.

[0030] The reticle contact 120 is configured to contact the reticle 126 when the reticle pod 100 is assembled. The reticle contact 120 may, in non-limiting examples, be secured within the boss 118 by any suitable mechanical connection, such as press-fitting. The reticle contact 120 may be one of a plurality of reticle contacts provided in both the first reticle pod segment 102 and the second reticle pod segment 104. When the reticle pod 100 is assembled, at least some of the plurality of reticle contacts clamp the reticle 126, securing it within the reticle housing space 128. The reticle contact 120 can be made of any suitable material for contacting the reticle 126. In non-limiting examples, the reticle contact 120 may include polyetheretherketone (PEEK) material, such as pure PEEK or PEEK containing fillers such as carbon fibers or glass fibers. The reticle contact, including the reticle contact 120, can be sized such that when the reticle 126 is clamped by the reticle contact, the first reticle pod segment 102 and the second reticle pod segment 104 are held apart from each other, forming a gap 130.

[0031] The second contact surface 122 is a contact surface configured to contact the first contact surface 116. In one embodiment, if the first contact surface 116 is an inclined surface, the second contact surface 122 may have a shape other than an inclined surface, such as a flat surface, a rounded surface, a pin, etc. In one embodiment, the first contact surface 116 and the second contact surface 122 are complementary inclined surfaces. The second contact surface 122 may be located in a fixed position on the second reticle pod segment 104. In one embodiment, the second contact surface 122 protrudes directly from the second reticle pod segment 104. In one embodiment, the second contact surface 122 is formed of the same material as the body of the second reticle pod segment 104. The second contact surface 122 may be molded and positioned such that, when the first reticle pod segment 102 and the second reticle pod segment 104 surround the reticle 126 and the first contact surface 116 is in the latched position, at least a portion of the second contact surface 122 contacts at least a portion of the first contact surface 116. In one embodiment, the second contact surface 122 has the same angle as the first contact surface 116.

[0032] In one embodiment, the angles of the first contact surface 116 and the second contact surface 122 are selected based on the coefficient of friction of the contact surfaces of the first contact surface 116 and the second contact surface 122 to limit or prevent the first contact surface from retracting from the latch position. In one embodiment, the angles of the inclined surfaces of the first contact surface 116 and / or the second contact surface 122 may be 30° or less. In one embodiment, the angles of the inclined surfaces of the first contact surface 116 and / or the second contact surface 122 may be 20° or less. In one embodiment, the angles of the inclined surfaces of the first contact surface 116 and / or the second contact surface 122 may be 15° or less.

[0033] The opening 124 is an opening formed in the second reticle pod segment 104, sized such that when the first contact surface 116 is in the unlocked position, the end of the flange 114 including the first contact surface 116 can pass through the opening 124. The opening 124 may be positioned adjacent to or near the second contact surface 122 so that when the first contact surface 116 is in the latched position, for example, when the latch body 112 is driven along the channel 108 by the spring 110, the first contact surface 116 and the second contact surface 122 can contact each other. In one embodiment, the opening 124 may be omitted, and the flange 114 may extend upward outward around the second reticle pod segment 104, with the flange 114 positioned on the flange 114 so that the first contact surface 116 can still contact the second contact surface 122.

[0034] The reticle 126 is a reticle that can be stored in the reticle pod 100. The reticle 126 can be any suitable reticle, such as a reticle that has been or is scheduled to be photolithographed, such as EUV treatment. The reticle 126 can be sized to fit within the reticle storage space 128. In one embodiment, the thickness of the reticle 126 can be such that when the reticle 126 is clamped between reticle contacts, including a reticle contact 120 provided on the first reticle pod segment 102 and the second reticle pod segment 104, the first reticle pod segment 102 and the second reticle pod segment 104 are separated from each other to form a gap 130.

[0035] The reticle containment space 128 may be defined by a first reticle pod segment 102 and a second reticle pod segment 104. The reticle containment space may be sized such that a reticle 126 can be clamped between reticle contacts, including a reticle contact 120 provided on the first reticle pod segment 102 and the second reticle pod segment 104. When the reticle 126 is located within the reticle containment space 128, the reticle 126 may optionally be surrounded by the first reticle pod segment 102 and the second reticle pod segment 104, apart from a gap 130 or another purge gas channel.

[0036] When the reticle 126 is located within the reticle containment space 128, a gap 130 may be formed between the first reticle pod segment 102 and the second reticle pod segment 104. The gap 130 can form at least a portion of a purge gas channel, allowing the supply of purge gas to enter the reticle containment space 128, pass over the surface of the reticle 126, and exit the reticle containment space 128. The purge gas may be, for example, nitrogen or any other suitable gas for purging contaminants from the reticle containment space 128. The purge gas may be supplied from any suitable source, such as a purge gas source connected to a reticle storage system containing the reticle pod 100. In one embodiment, when the reticle 126 is clamped by a reticle contact such as a reticle contact 120, the gap 130 may be formed by the thickness of the reticle 126 and the thickness of the reticle contact such as a reticle contact 120, so that a gap exists. In one embodiment, the gap 130 is formed between the first reticle pod segment 102 and the second reticle pod segment 104 only when the reticle 126 is located within the reticle containment space 128. In one embodiment, the width of the gap 130 may be 0.5 mm to 6 mm. In one embodiment, the width of the gap 130 may be 1.0 mm to 3 mm. In one embodiment, the width of the gap 130 may be 1.0 mm to 1.5 mm. It should be understood that the width of the gap 130 may be selected based on the desired flow characteristics of the purge gas passing through the reticle pod 100.

[0037] Figure 2 shows a perspective view of a reticle pod according to one embodiment. The reticle pod 200 includes a first reticle pod segment 202 and a second reticle pod segment 204. The first reticle pod segment 202 includes a latch 206. The latch 206 includes a channel (not shown), a latch body 208, a slot 210, a flange 212 protruding through the slot 210, and a first contact surface 214 positioned on the flange 212. The second reticle pod segment 204 includes an opening 216 and a second contact surface 218. The second reticle pod segment 204 also includes a boss 220 and a reticle contact 222.

[0038] The reticle pod 200 is a pod configured to house a reticle, for example, the reticle 126 described above and shown in Figure 1. The reticle pod 200 may be used for transporting and / or storing the reticle. In one embodiment, the reticle pod 200 is a stocker pod configured for transporting and storing the reticle.

[0039] The first reticle pod segment 202 forms part of the reticle pod 200. In the embodiment shown in Figure 2, the first reticle pod segment 202 forms the base plate of the reticle pod 200. In another embodiment, the first reticle pod segment 202 may be a cover for the reticle pod 200. The first reticle pod segment 202 includes a latch 206. The latch 206 provides a mechanism for bringing a first contact surface 214 into contact with a second contact surface 218. The latch 206 includes a channel (not shown) formed in the first reticle pod segment. The latch body 208 may be located primarily within the flow path. The latch body 208 can be brought into contact by a spring (not shown), such as the spring 110 described above and shown in Figure 1. The latch body 208 includes a flange 212. A slot 210 may be formed in the first reticle pod segment 202, and this slot 210 is configured to allow the flange 212 to extend from the channel. The flange 212 can extend toward the second reticle pod segment 204 when the reticle pod 200 is assembled. Although one latch 206 is shown in the portion of the reticle pod 200 shown in Figure 2, it should be understood that multiple latches 206, corresponding openings 216 and second contact surfaces 218 may be provided on the reticle pod 200. The first contact surface 214 is provided on the flange 212. In one embodiment, the first contact surface 214 is an inclined surface, for example, as shown in Figure 2. In one embodiment, if the second contact surface 218 is an inclined surface, the first contact surface 214 may have a shape other than an inclined surface, such as a flat surface, a rounded surface, a pin, etc. In one embodiment, the first contact surface 214 and the second contact surface 218 are complementary inclined surfaces. The contact between the first contact surface 214 and the second contact surface 218 can provide a force that pushes the first reticle pod segment 202 and the second reticle pod segment 204 toward each other, thereby providing a clamping force to the reticle housed within the reticle pod 200.

[0040] The second reticle pod segment 204 is another component of the reticle pod 200, configured to be joined to the first reticle pod segment 202. In embodiments such as the one shown in Figure 2, the second reticle pod segment 204 forms the cover of the reticle pod 200. In another embodiment, the second reticle pod segment 204 forms the base plate of the reticle pod 200. The second reticle pod segment 204 includes an opening 216. Although one opening 216 is shown, it should be understood that openings 216 can be provided in each latch 206 included in the first reticle pod segment 202. The opening 216 is an opening through the second reticle pod segment 204, sized and positioned such that when the latch 206 is in the unlocked position and when the first and second reticle pod segments 202, 204 are together, a portion of the first contact surface 214 and flange 212 can pass through the opening 216. The opening 216 may be positioned such that when the latch 206 is moved to the latched position, the first contact surface 214 can contact the second contact surface 218. Such a position of the opening 216 may be adjacent to or near the second contact surface 218. The second contact surface 218 is a contact surface configured to contact the first contact surface 214. In one embodiment, if the first contact surface 214 is an inclined surface, the second contact surface 218 may have a shape other than an inclined surface, such as a flat surface, a rounded surface, a pin, etc. In one embodiment, the first contact surface 214 and the second contact surface 218 are complementary inclined surfaces. When the first contact surface 214 and the second contact surface 218 are in contact with each other, either one or both of the inclined surfaces of the first contact surface 214 or the second contact surface 218 can clamp the reticle within the reticle pod 200 and provide a clamping force to hold the first reticle pod segment 202 to the second reticle pod segment 204.

[0041] As shown in the embodiment of Figure 2, the second reticle pod segment 204 may include a boss 220. The boss 220 may be used to hold a reticle contact 222. The reticle contact 222 is configured to contact a reticle held within the reticle pod 200. The reticle contact 222 can be made of any suitable material for contacting the reticle. In one embodiment, the reticle contact 222 includes PEEK material, for example, pure PEEK material or filled PEEK material. The reticle contact 222 may be held within the reticle pod 200 by any suitable mechanical connection for holding the reticle contact 222 within the reticle pod 200. In the embodiment shown in Figure 2, the boss 220 includes a channel into which the reticle contact 222 can be press-fitted. In one embodiment, the boss 220 can be omitted from the reticle pod 200 while the reticle contact 222 is secured by any other suitable mechanical connection. In a non-limiting example, the reticle contact 222 may be press-fitted into a channel formed in or perforated through a portion of the reticle pod 200, such as a second reticle pod segment 204. Although only one boss 220 and reticle contact 222 are shown in Figure 2, it should be understood that the second reticle pod segment 204 may contain multiple bosses 220 and / or reticle contacts 222. The reticle contact 222 may also be provided on the first reticle pod segment 202. In one embodiment, the reticle contacts 222 may be provided at corresponding positions on the first reticle pod segment 202 and the second reticle pod segment 204 such that the reticle is clamped between the reticle contacts 222 when the reticle pod 200 is assembled with the reticle housed within it.

[0042] Figure 3 shows a bottom view of a reticle pod according to one embodiment. In the bottom view of Figure 3, the first reticle pod segment 300 can be seen. The first reticle pod segment 300 includes a boss 302 and a reticle contact 304. The first reticle pod segment 300 also includes a channel 308, a spring 310, and a latch 306 including a latch body 312. The latch body 312 may include an operating function 314.

[0043] The first reticle pod segment 300 may be part of the reticle pod 100 or reticle pod 200, as described above and shown in Figures 1 and 2. In particular, the first reticle pod segment 300 may be included in the reticle pod 100 or reticle pod 200 as the first reticle pod segment 102 or the first reticle pod segment 202. In the embodiment shown in Figure 3, the first reticle pod segment 300 forms the bottom of the reticle pod, such as the reticle pod 100 or reticle pod 200, as described above and shown in Figures 1 and 2.

[0044] The boss 302 is configured to hold the reticle contact 304. The reticle contact 304 can be held within the boss 302 via any suitable function for forming a mechanical connection. In a non-limiting example, the mechanical connection could be press-fitting of the reticle contact 304 into the boss 302. The reticle contact 304 is configured to contact a reticle, such as the reticle 126 shown above and in Figure 1. The reticle can be clamped between the reticle contact 304 and a reticle contact provided on a second reticle pod segment, such as the reticle contact 120 shown above and in Figure 1. In one embodiment, instead of the boss 302, the reticle contact 304 may be contained within a function formed in the first reticle pod segment 300, such as a perforation. A section of the first reticle pod segment 300 includes one boss 302 and a reticle contact 304, but it should be understood that multiple bosses 302 and reticle contacts 304 may be included in the first reticle pod segment, such as the first reticle pod segment 300. In one embodiment, the reticle contact 304 is formed of or includes any suitable material for contacting the reticle, such as a PEEK material including pure PEEK or PEEK-filled PEEK.

[0045] The latch 306 is provided on the first reticle pod segment 300. The latch 306 may be configured to provide a contact surface, such as the first contact surface 116 shown above and in Figure 1, so that it can contact a second contact surface provided on a second reticle pod segment (not shown), for example, the second contact surface 122 of the second reticle pod segment 104 as described above and in Figure 1. The latch 306 may include a channel 308, a spring 310, and a latch body 312.

[0046] Channel 308 is a channel formed in the first reticle pod segment 300. Channel 308 is sized to hold the latch body 312 within the channel 308 and allow it to slide along the channel 308.

[0047] The spring 310 is positioned within the channel 308 so that it can drive the latch body 312 along the channel 308 and can contact the end of the channel 308 and the latch body 312. The latch body 312 can be sized to be positioned at least partially within the channel 308 so that it can slide along the channel 308 between a latched position and an unlocked position. The latch body 312 may include contact surfaces (not shown), such as the first contact surface 116 described above and shown in Figure 1. In one embodiment, the latch body 312 may include a flange, such as the flange 114 described above and shown in Figure 1.

[0048] An operating function 314 can be formed on the latch body 312 to enable mechanical contact with the latch body 312 and move the latch body 312 to, for example, the unlocked position. In one embodiment, the operating function 314 may be a projection from the latch body such as a peg or post. In one embodiment, the operating function 314 may be a recess formed in the latch body 312, such as a perforated opening. The operating function can engage with part of an automated operating device (not shown), such as a load port or a function near thereto. The automated operating device can move the latch body 312 to a position suitable for assembling or unassembling the reticle pod, including the first reticle pod segment 300. For example, the automated operating device can move the latch body to the unlocked position to enable assembly or unassembling the reticle pod.

[0049] Figure 4 shows a side view of a reticle pod according to one embodiment. The reticle pod 400 includes a first reticle pod segment 402 and a second reticle pod segment 404. The first reticle pod segment 402 includes a latch 406, which includes a channel 408, a latch body 410, and a spring 412. A first contact surface 414 is provided on the latch body 410. The second reticle pod segment includes a flange 416 and a second contact surface 418 provided on the flange 416. The latch 406 further includes an opening 420.

[0050] The reticle pod 400 is a pod configured to house a reticle. The reticle pod 400 may be a stocker pod for storing and / or transporting the reticle. In one embodiment, the reticle pod 400 may provide a purge gas passage, such as a gap 130 as described above and shown in Figure 1.

[0051] The first reticle pod segment 402 is part of the reticle pod 400. In embodiments such as the one shown in Figure 4, the first reticle pod segment 402 functions as a base plate for the reticle pod 400. In another embodiment, the first reticle pod segment 402 functions as a cover for the reticle pod 400. The first reticle pod segment includes a latch 406. The latch 406 includes a channel 408 configured to house a latch body 410. The latch body 410 is in contact with a spring 412 so that the spring 412 can push the latch body 410 toward the latched position. In one embodiment, the latch body 410 may include an operating function such as the operating function 314 described above and shown in Figure 3. The latch body 410 includes a first contact surface 414. The first contact surface 414 is a surface configured to contact the second contact surface 418 to fix the reticle pod 400 together and clamp the reticle within the reticle pod 400. In one embodiment, as shown in Figure 4, the first contact surface 414 is an inclined surface. In one embodiment, if the second contact surface 418 is an inclined surface, the first contact surface can have any suitable shape for contacting the inclined surface of the second contact surface 418, including inclined surfaces, flat surfaces, curved surfaces, pins, etc. In the reticle pod 400, at least one of the first contact surface 414 or the second contact surface 418 is an inclined surface. In one embodiment, for example, as shown in Figure 4, each of the first contact surface 414 and the second contact surface 418 is an inclined surface.

[0052] The second reticle pod segment 404 is another part of the reticle pod 400. In embodiments such as the one shown in Figure 4, the second reticle pod segment 404 functions as a cover for the reticle pod 400. In another embodiment, the second reticle pod segment 404 functions as a base plate for the reticle pod 400. The second reticle pod segment 404 includes a flange 416. The flange 416 protrudes from the second reticle pod segment 404 on the side of the second reticle pod segment 404 facing the first reticle pod segment 402 when the reticle pod 400 is assembled. The flange 416 allows the second contact surface 418 to be positioned so that it can be inserted into the latch 406 when the second reticle pod segment 404 is joined to the first reticle pod segment 402. The second contact surface 418 is a surface configured to contact the first contact surface 414. In one embodiment, the second contact surface 418 is an inclined surface. In one embodiment, if the first contact surface 414 is an inclined surface, the second contact surface can have any suitable shape for contacting the inclined surface of the first contact surface 414, including inclined surfaces, flat surfaces, curved surfaces, pins, etc. In the reticle pod 400, at least one of the first contact surface 414 or the second contact surface 418 is an inclined surface. In one embodiment, for example, as shown in Figure 4, the first contact surface 414 and the second contact surface 418 are each inclined surfaces. Figure 4 shows one pair of first contact surfaces 414 and second contact surfaces 418, but it should be understood that multiple corresponding pairs of first contact surfaces 414 and second contact surfaces 418 can be provided on the reticle pod 400, for example, distributed around the periphery or along specific sides of the first and second reticle pod segments 402 and 404.

[0053] The opening 420 is an opening that allows the second contact surface 418 and at least a portion of the flange 416 to be inserted into the channel 408 so that the first contact surface 414 can contact the second contact surface 418. To close and latch the reticle pod, the latch body 410 is moved to the unlocked position, the second contact surface 418 is inserted into the opening 420, and the latch body 410 is released so that the spring 412 can be driven along the channel 408. The first contact surface 414 and the second contact surface 418 engage with each other, and at least one of the inclined surfaces of the first contact surface 414 or the second contact surface 418 provides a force that clamps the first reticle pod segment 402 and the second reticle pod segment 404 together.

[0054] Figure 5 shows a schematic diagram of a reticle storage system according to one embodiment. The reticle storage system 500 includes a stocker pod container 502, a purge gas source 504, and a plurality of reticle pods 506. Optionally, the reticle storage system 500 may further include an automated reticle transfer device 508.

[0055] The reticle storage system 500 may be used to store reticles after processing, for example, photolithography. A non-limiting example of processing that can be performed on reticles stored in or to be stored in the reticle storage system 500 is EUV processing. The reticle storage system includes a stocker pod container. The stocker pod container 502 is sized to accommodate a number of reticle pods 506. The stocker pod container 502 may be configured to be sealed for at least a portion of the time the reticles are stored in the reticle storage system 500. In one embodiment, a purge gas source 504 may be connected to the stocker pod container 502. The purge gas source 504 may be configured to supply a purge gas into the stocker pod container. The purge gas source 504 may be any suitable gas for purging oxygen, moisture, particulate matter, any other contaminants, etc., from the stocker pod container. In a non-limiting example, the purge gas may be nitrogen gas. The purge gas source 504 could, in non-limiting examples, be a tank containing purge gas, or a connection to a semiconductor manufacturing company's purge system.

[0056] The reticle storage system 500 includes a plurality of reticle pods 506. The reticle pods 506 may conform to any of the embodiments of reticle pods 506 described herein. Each reticle pod 506 may be used to store one reticle.

[0057] In one embodiment, the reticle storage system 500 may include a reticle transfer automation device 508. In one embodiment, the reticle transfer automation device 508 is located inside a stocker pod container 502. The reticle transfer automation device 508 may be configured to interact with the reticle pods with functions such as the operating function 314 described above and shown in Figure 3, for example, to open and close the reticle pod 506. The reticle transfer automation device 508 may be further configured to receive a reticle pod 510, such as an EUV pod, and to transfer reticles from the reticle pod 510 to the reticle pod 506, or vice versa. In one embodiment, the reticle pod 510 may be a complete reticle pod including an outer pod and an inner pod. In one embodiment, the reticle pod 510 may be an inner pod only. In one embodiment, the reticle transfer automation device 508 may be configured to retrieve the reticle pod 506 from inside the stocker pod container 502.

[0058] Figure 6 shows a cross-sectional view of a reticle pod according to one embodiment. The reticle pod 600 includes a first reticle pod segment 602 and a second reticle pod segment 604. The first reticle pod segment 602 and the second reticle pod segment 604 define a reticle housing space 606. A reticle 608 can be held within the reticle housing space 606. The reticle 608 can be held in place by clamping it between a first reticle contact 610 provided on the first reticle pod segment 602 and a second reticle contact 612 provided on the second reticle pod segment 604. The first reticle contact 610 and the second reticle contact 612 can be driven toward each other by the interlocking of first and second contact surfaces (not shown) provided on the first reticle pod segment 602 and the second reticle pod segment 604. The first and second contact surfaces may be any of the corresponding first and second contact surfaces described above and shown in Figures 1 to 4. By driving the reticle contacts 610 and 612 together, the reticle 608 can be clamped. In one embodiment, the first reticle contact 610 and the second reticle contact 612 can be sized and / or positioned such that when the reticle 608 is clamped between the first reticle contact 610 and the second reticle contact 612, a gap 614 is formed between the first reticle pod segment 602 and the second reticle pod segment 604.

[0059] manner Please understand that any of embodiments 1 to 15 can be combined with any of embodiments 16 to 18 or 19. Please understand that any of embodiments 16 to 18 can be combined with embodiment 19.

[0060] Appearance 1. An article, It is a reticle pod, A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches comprising a first reticle pod segment comprising a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Equipped with a reticle pod, Each of the first contact surfaces of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. An article comprising a reticle pod configured to house a reticle within a reticle housing space such that the reticle is located within the reticle housing space and the reticle is clamped by a plurality of first reticle contacts and a plurality of second reticle contacts when a first contact surface contacts a second contact surface.

[0061] Embodiment 2. The article according to Embodiment 1, wherein when the reticle is in contact with a plurality of first reticle contacts and a plurality of second reticle contacts, the reticle pod defines a purge gas channel from outside the reticle pad through the reticle space.

[0062] Embodiment 3. The article according to Embodiment 2, wherein the purge gas flow path is formed by the gap between the first reticle pod segment and the second reticle pod segment.

[0063] Embodiment 4. The article according to Embodiment 3, wherein the gap is in the range of 0.5 to 6 millimeters (mm).

[0064] Embodiment 5. An article according to any one embodiment of Embodiments 3 to 4, wherein the gap is formed by the heights of the plurality of first reticle contacts and the plurality of second reticle contacts and the thickness of the reticle.

[0065] Embodiment 6. The article according to any one embodiment of Embodiments 1 to 5, wherein at least one of the first reticle pod segment and the second reticle pod segment includes a plurality of reticle contact bosses, and at least a portion of the first plurality of reticle contacts or at least a portion of the second plurality of reticle contacts is partially disposed within the plurality of reticle contact bosses.

[0066] Embodiment 7. An article according to any one embodiment of Embodiments 1 to 6, wherein a plurality of first reticle contacts and a plurality of second reticle contacts comprise a polyetheretherketone (PEEK) material.

[0067] Embodiment 8. An article according to any one embodiment of Embodiments 1 to 7, wherein at least one of the first reticle pod segment and the second reticle pod segment comprises aluminum.

[0068] Embodiment 9. An article according to any one embodiment of Embodiments 1 to 8, wherein both the first contact surface and the second contact surface are inclined surfaces.

[0069] Embodiment 10. An article according to any one embodiment of Embodiments 1 to 9, wherein each of the second contact surfaces is positioned on the outer surface of the second reticle pod segment.

[0070] Embodiment 11. The article according to Embodiment 10, wherein an opening is provided on a second reticle pod segment, the opening being configured to allow a portion of the latch member body, including a first contact surface, to pass through the opening, and the opening is positioned adjacent to each of the second contact surfaces.

[0071] Embodiment 12. The article according to any one embodiment of Embodiments 1 to 11, wherein each of the second contact surfaces is positioned on a flange, and each flange protrudes toward the first reticle pod segment when the reticle pod is assembled.

[0072] Embodiment 13. Each of the latches, Channels and A latch member body configured to be movable within a channel, comprising a latch member body including one of a plurality of first contact surfaces, A spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latch position, An article, including any one of embodiments 1 to 12.

[0073] Embodiment 14. The article according to Embodiment 13, wherein the angles of each of the first contact surfaces and each of the second contact surfaces, and the coefficients of friction of each of the first contact surfaces and each of the second contact surfaces are selected to resist the latch body retracting from the latch position when the first contact surfaces contact the second contact surfaces.

[0074] Embodiment 15. An article according to any one embodiment of Embodiments 13 to 14, wherein the angle between each of the first contact surfaces and each of the second contact surfaces is 30° or less.

[0075] Appendix 16. A method for storing a reticle, This includes placing the reticle inside the reticle pod. The reticle pod is A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, wherein each of the plurality of latches comprises a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Includes, Each of the first contact surfaces of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. A method for housing a reticle in a reticle housing space such that the reticle is located within the reticle housing space and the reticle is clamped by a plurality of first reticle contacts and a plurality of second reticle contacts when the first contact surface contacts a second contact surface.

[0076] Embodiment 17. The method according to Embodiment 16, wherein when a reticle is in contact with a plurality of first reticle contacts and a plurality of second reticle contacts, the reticle pod defines a purge gas flow path from outside the reticle pad through the reticle space, and the method further comprises supplying a purge gas flow through the purge gas flow path.

[0077] Embodiment 18. Each of the latches, Channels and A latch member body configured to be movable within a channel and including one of a plurality of first contact surfaces, A spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latch position, Includes, Placing the reticle inside the article is Each of the latch member bodies is pulled to the latch release position, The first reticle pod segment and the second reticle pod segment are brought together so that the reticle is in contact with a plurality of first reticle contacts and a plurality of second reticle contacts, To allow the spring to drive the latch member body to the latched position, each of the latch member bodies is released. The method according to any one embodiment of embodiments 16 to 17, including the method described herein.

[0078] Embodiment 19. A reticle storage system, Pod container and Purge gas supply unit, A plurality of reticle pods, each configured to be housed within a pod container, wherein each reticle pod is A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, wherein each of the plurality of latches comprises a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Reticle pods including Includes, Each of the first contact surfaces of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latched position. One or both of the first and second contact surfaces are inclined surfaces. A reticle storage system comprising a reticle pod configured to house a reticle within a reticle storage space such that the reticle is located within the reticle storage space and is clamped by a plurality of first reticle contacts and a plurality of second reticle contacts when a first contact surface contacts a second contact surface.

[0079] The examples disclosed in this application should be considered in all respects to be illustrative and not limiting. The scope of the invention is indicated by the appended claims rather than the foregoing description, and all modifications that fall within the meaning and scope of equivalence to the claims are intended to be encompassed within the claims.

Claims

1. Articles, It is a reticle pod, A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches comprising a first reticle pod segment comprising a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Equipped with a reticle pod, Each of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latch position. One or both of the first and second contact surfaces are surfaces that are inclined downward in the direction from the latch position to the latch release position. An article wherein the reticle pod is configured to house the reticle within the reticle housing space such that the reticle is located within the reticle housing space and the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts when the first contact surface contacts the second contact surface.

2. Each of the aforementioned latches, Channels and A latch member body configured to be movable within the channel, comprising a latch member body including one of the plurality of first contact surfaces, A spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latch position, The article according to claim 1, including the article described in claim 1.

3. A method for storing reticles, This includes placing the reticle inside the reticle pod. The aforementioned reticle pod is A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, wherein each of the plurality of latches comprises a first reticle pod segment comprising a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Includes, Each of the first contact surfaces of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latch position. One or both of the first and second contact surfaces are surfaces that are inclined downward in the direction from the latch position to the latch release position. A method comprising a reticle pod configured to house a reticle within the reticle housing space such that the reticle is located within the reticle housing space and the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts when the first contact surface contacts the second contact surface.

4. Each of the aforementioned plurality of latches, Channels and A latch member body is configured to be movable within the channel and includes one of the plurality of first contact surfaces, A spring configured to drive the latch member body along the channel so that the latch member body is driven toward the latch position, Includes, Placing the reticle inside the article is Each of the latch member bodies is pulled to the latch release position, The first reticle pod segment and the second reticle pod segment are brought together so that the reticle is in contact with the plurality of first reticle contacts and the plurality of second reticle contacts, To allow the spring to drive the latch member body to the latch position, each of the latch member bodies is released. The method according to claim 3, including the method described in claim 3.

5. A reticle storage system, Pod container and Purge gas supply unit, A plurality of reticle pods, each configured to be housed within the aforementioned pod container, wherein each reticle pod is A first reticle pod segment comprising a plurality of first reticle contacts and a plurality of latches, wherein each of the plurality of latches comprises a first contact surface, A second reticle pod segment including multiple second reticle contacts and multiple second contact surfaces Reticle pods including Includes, Each of the plurality of latches is configured to contact one of the plurality of second contact surfaces when the first contact surface is in the latch position. One or both of the first and second contact surfaces are surfaces that are inclined downward in the direction from the latch position to the latch release position. A reticle storage system comprising a reticle pod configured to house a reticle within the reticle storage space such that the reticle is located within the reticle storage space and the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts when the first contact surface contacts the second contact surface.

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