A conductive ultrathin film installed in an atmospheric pressure electron microscope is used as a secondary electron detector.

The integration of a graphene ultrathin film in the secondary electron detector of atmospheric pressure electron microscopes addresses the collection challenge, improving image clarity and signal quality by amplifying the collected current.

JP7883323B1Active Publication Date: 2026-07-01COXEM CO LTD
View PDF 9 Cites 0 Cited by

Patent Information

Application Number
JP2025079830
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2025-02-02
Filing Date
2025-05-12
Publication Date
2026-07-01
Estimated Expiration
2045-05-12

AI Technical Summary

Technical Problem

Atmospheric pressure electron microscopes face challenges in effectively collecting secondary electrons due to the narrow gap between the microscope tube and the sample, limiting the installation of a secondary electron detector and hindering efficient electron collection.

Method used

A secondary electron detector using a graphene ultrathin film is integrated at the lower end of the microscope tube, where a voltage difference between the film and the sample induces an avalanche effect, amplifying the collected current for clear image display.

Benefits of technology

The graphene ultrathin film effectively collects secondary electrons, enhancing image clarity and signal-to-noise ratio by five times compared to conventional Si3N4 thin films, reducing electron beam degradation and contamination.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007883323000001_ABST
    Figure 0007883323000001_ABST
Patent Text Reader

Abstract

We provide a secondary electron detector for atmospheric pressure electron microscopes. [Solution] The secondary electron detector 100 provided in an atmospheric pressure electron microscope is characterized in that secondary electrons generated when a high-energy electron beam is irradiated onto a sample are collected in a graphene ultrathin film, and when a voltage is applied between the graphene ultrathin film and the sample, ionization of the air or injected gas between the graphene ultrathin film and the sample occurs, which is greatly amplified by the avalanche effect, and the ion current is displayed as an image on a monitor through the amplifier.
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • Atmospheric scanning electron microscope

    JP1981038756A

  • Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for manufacturing the same

    JP2011026194A

  • Charged particle beam device, sample image acquisition method, and program recording medium

    JP2016146362A

  • Scanning electron microscope

    JP2016513349A

  • Sample holding chip for electron microscope observation

    JP2017004785A