A device having a robotic arm with two substrate holding regions.

Abstract

To provide substrate transport automation for suppressing work space volume or the like to minimum.SOLUTION: A device comprises: a drive part; a first robot arm comprising, a first upper arm, a first forearm, and a first end effector; and a second robot arm comprising, a second upper arm, a second forearm, and a second end effector. The first and second upper arms are connected to the drive part at a first rotary shaft, the first and second end effectors have respectively, two substrate holding areas. The first robot arm is configured to extend the first end effector from a first retreat position to a first extension position in a first direction, above the second end effector without moving the second robot arm. The second robot arm is configured to extend the second end effector from a second retreat position to a second extension position, in the first direction below the first end effector, without moving the first robot arm.SELECTED DRAWING: Figure 42

Description

[Technical Field]

[0001] The disclosed embodiment relates to a device having a robotic arm with two substrate holding regions. Background

[0002] Vacuum, atmospheric, and controlled environment processing for applications such as semiconductors, LEDs (Light Emitting Diodes), solar power, MEMS (Micro Electro Mechanical Systems), or other device manufacturing utilize robotic technology and other forms of automation to transport substrates and associated transporters to or from storage, processing, or other locations. Such transport of substrates may involve moving individual substrates or groups of substrates using a single arm transporting one or more substrates, or using multiple arms, each transporting one or more substrates. Much of the manufacturing takes place in clean or vacuum environments where footprint and volume are critical, such as in semiconductor manufacturing. Furthermore, much of the automated transport is implemented when minimizing transport time leads to reduced cycle times and increased throughput and utilization of associated equipment. Therefore, there is a need to provide substrate transport automation that minimizes the footprint and workspace volume required for a given range of transport applications, and minimizes transport time. Summary

[0003] The following abstract is intended to be illustrative only. This abstract is not intended to limit the scope of the claims.

[0004] An example of an exemplary embodiment is: Drive unit and; A first robotic arm comprising a first upper arm, a first forearm, and a first end effector, wherein the first upper arm is connected to the drive unit by a first rotation axis, and the first end effector comprises two substrate holding regions spaced laterally apart; A second robotic arm comprising a second upper arm, a second forearm, and a second end effector, wherein the second upper arm is connected to the drive unit by the first rotation axis, and the second end effector comprises two substrate holding regions spaced laterally apart; It has, The first robot arm is configured to position the first end effector in a first retracted position that overlaps the second end effector, and the first robot arm is configured to extend the first end effector in a first direction above the second end effector from the first retracted position to a first extended position without moving the second robot arm; The second robot arm is configured to position the second end effector in a second retracted position that overlaps the first end effector, and the second robot arm is configured to extend the second end effector from the second retracted position to the second extended position in the first direction below the first end effector without moving the first robot arm.

[0005] Another apparatus, which is an example of an exemplary embodiment, A drive unit equipped with multiple coaxial drive shafts; A first robotic arm comprising a first upper arm, a first forearm, and a first end effector, wherein the first upper arm is connected to a first of a plurality of coaxial drive shafts, the first end effector comprises two substrate holding regions spaced laterally apart, and the first forearm is connected to the first end effector at a first wrist joint offset from the first centerline of the first end effector; A second robotic arm having a second upper arm, a second forearm, and a second end effector, wherein the second upper arm is connected to a second of the plurality of coaxial drive shafts, the second end effector has two substrate holding regions spaced laterally apart, and the second forearm is connected to the second end effector at a second wrist joint offset from the second centerline of the second end effector; Equipped with, The first robot arm is configured to position the first end effector in a first retracted position that overlaps the second end effector, and the first robot arm is configured to extend the first end effector in a first direction above the second end effector from the first retracted position to a first extended position; The second robot arm is configured to position the second end effector in a second retracted position that overlaps the first end effector, and the second robot arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction below the first end effector.

[0006] In one embodiment of an exemplary configuration, the transport device comprises at least one drive unit, a first robotic arm having a first upper arm, a first forearm, and a first end effector, and a second robotic arm having a second upper arm, a second forearm, and a second end effector. The first upper arm is connected to the at least one drive unit on a first rotation axis. The second upper arm is connected to the at least one drive unit on a second rotation axis spaced apart from the first rotation axis. The first and second robotic arms are configured to set the first and second end effectors to a first retracted position in order to stack a plurality of substrates placed on the first and second end effectors at least partially vertically. The first and second robotic arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned. The first and second robot arms are configured to extend their first and second end effectors in at least one second direction along a second path that is not located vertically and is spaced apart from each other. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths. In another embodiment of the exemplary features, a method is provided which includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, wherein the first upper arm and the first forearm have different effective lengths; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, wherein the second upper arm and the second forearm have different effective lengths; and connecting the first upper arm to at least one drive unit on a first rotation axis; and connecting the second upper arm to the at least one drive unit on a second rotation axis spaced apart from the first rotation axis. The first and second robot arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically multiple substrates placed on these end effectors; the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned; and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other. In another embodiment of the exemplary embodiment, a method is provided which includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm into a first retracted position to stack at least partially vertically a plurality of substrates disposed on these end effectors, wherein the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to at least one drive on a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the at least one drive on a second rotation axis spaced apart from the first rotation axis. The method further includes moving the first and second robot arms to move the first and second end effectors from a first retracted position in a first direction along a first parallel path that is at least partially directly above and below them, and moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below each other and is spaced apart from each other, so as to extend them.

[0007] In another embodiment of the exemplary configuration, the transporter comprises a first robotic arm having a first upper arm, a first forearm, and a first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector; and a drive unit connected to the first and second robotic arms. The first upper arm is connected to the drive unit on a first axis of rotation. The second upper arm is connected to the drive unit on a second axis of rotation spaced apart from the first axis of rotation. The drive unit comprises only three motors to rotate the first and second upper arms. The first and second robot arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically multiple substrates placed on these end effectors; the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned; and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other.

[0008] In another aspect of the exemplary embodiment, the method includes setting the first end effector of the first robotic arm and the second end effector of the second robotic arm to a first retracted position to at least partially stack vertically a plurality of substrates disposed on these end effectors. Here, the first robotic arm includes a first upper arm, a first forearm, and the first end effector, the first upper arm is connected to a drive device at a first rotation axis, the second robotic arm includes a second upper arm, a second forearm, and the second end effector, and the second upper arm is connected to the drive device at a second rotation axis spaced from the first rotation axis. The method further includes moving the first and second robotic arms to move the first and second end effectors in a first direction along a first path that is at least partially directly vertically positioned and parallel, from the first retracted position, and moving the first and second robotic arms to move the first and second end effectors to extend in at least one second direction along a second path that is not vertically positioned and is spaced from each other, and rotating the first and second robotic arms together around a third rotation axis spaced from the first and second rotation axes. The moving in the first direction from the first retracted position, the moving to extend the first and second end effectors in the at least one second direction, and the rotating are performed by using only three motors of the drive device.

[0009] In another aspect of the exemplary embodiment, the method includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector; connecting the first upper arm to a drive unit on a first rotation axis; and connecting the second upper arm to the drive unit on a second rotation axis spaced apart from the first rotation axis. The first and second robot arms are configured to set the first and second end effectors to a first retracted position so as to stack at least partially vertically multiple substrates placed on these end effectors; the first and second robot arms are configured to rotate from the first retracted position in a first direction along a first parallel path at least partially directly above and below; and the first and second robot arms are configured to rotate in at least one second direction along a second path that is not located above and below each other and spaced apart. The drive system comprises only three motors to rotate the first and second robot arms to extend the first and second end effectors and to rotate the first and second robot arms around a third axis of rotation spaced apart from the first and second axes of rotation.

[0010] In another aspect of the exemplary embodiment, the apparatus includes a first robotic arm having a first upper arm, a first forearm, and a first end effector, a second robotic arm having a second upper arm, a second forearm, and a second end effector, and a drive device connected to the first and second robotic arms. The first upper arm is connected to the drive device at a first axis of rotation. The second upper arm is connected to the drive device at a second axis of rotation spaced from the first axis of rotation. To rotate the first and second upper arms, the drive device includes five motors. A first one of the motors is connected to the first and second robotic arms to rotate the first and second robotic arms about a third axis of rotation spaced from the first and second axes of rotation, and second and third motors are connected to the first robotic arm to rotate the first upper arm and the first forearm, respectively, and fourth and fifth motors are connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm. The first and second robotic arms are configured to set the first and second end effectors in a first retracted position to at least partially stack a plurality of substrates disposed on these end effectors vertically, and the first and second robotic arms are configured to extend the first and second end effectors in a first direction along a first path that is at least partially directly vertical from the first retracted position, and the first and second robotic arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced from each other.

[0011] In another aspect of the exemplary embodiment, the method includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates disposed on these end effectors, wherein the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis. The method further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path at least partially directly above and below; moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below each other and is spaced apart; and rotating the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation. The movement from the first retracted position in the first direction, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are performed by using five motors of the drive unit. The first motor among the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third rotation axis; the second and third motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively; and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

[0012] In another aspect of the exemplary embodiment, the method includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector; connecting the first upper arm to a drive unit on a first rotation axis; and connecting the second upper arm to the drive unit on a second rotation axis spaced apart from the first rotation axis. The first and second robot arms are configured to set the first and second end effectors to a first retracted position so as to stack at least partially vertically multiple substrates placed on these end effectors; the first and second robot arms are configured to rotate from the first retracted position in a first direction along a first parallel path at least partially directly above and below; and the first and second robot arms are configured to rotate in at least one second direction along a second path that is not located above and below each other and spaced apart. The drive unit comprises five motors for rotating the first and second robot arms to extend the first and second end effectors and for rotating the first and second robot arms around a third axis of rotation spaced apart from the first and second axes of rotation. The first motor among the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third rotation axis; the second and third motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively; and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

[0013] In another embodiment of the exemplary embodiment, the apparatus comprises a first robotic arm having a first upper arm, a first forearm, and a first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector; and a drive unit connected to the first and second robotic arms. The first upper arm is connected to the drive unit on a first axis of rotation. The second upper arm is connected to the drive unit on a second axis of rotation spaced apart from the first axis of rotation. The drive unit comprises four motors for rotating the first and second upper arms. Of the motors, a first motor is connected to the first upper arm, a second motor is connected to the second upper arm, a third motor is connected to the first forearm, a fourth motor is connected to the second forearm, and the third and fourth motors are aligned on a common axis spaced apart from the first and second axes of rotation. The first motor is aligned with the first axis of rotation, and the second motor is aligned with the second axis of rotation. The first and second robot arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically multiple substrates placed on these end effectors, the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other. [Brief explanation of the drawing]

[0014] The aforementioned aspects and other features will be described in the following description, with reference to the attached drawings.

[0015] [Figure 1] Figure 1A is a top view of the conveying device.

[0016] Figure 1B is a side view of the conveying device.

[0017] [Figure 2A] Figure 2A is a schematic diagram of the top view of the conveying device.

[0018] [Figure 2B] Figure 2B is a schematic side view of the conveying device.

[0019] [Figure 3] Figure 3A is a top view of the conveying device.

[0020] Figure 3B is a top view of the conveying device.

[0021] Figure 3C is a top view of the conveying device.

[0022] [Figure 4] Figure 4 is a graph.

[0023] [Figure 5] Figure 5A is a top view of the conveying device.

[0024] Figure 5B is a side view of the conveying device.

[0025] [Figure 6A] Figure 6A is a schematic diagram of the top view of the conveying device.

[0026] [Figure 6B] Figure 6B is a schematic side view of the conveying device.

[0027] [Figure 7] Figure 7A is a top view of the conveying device.

[0028] Figure 7B is a top view of the conveying device.

[0029] Figure 7C is a top view of the conveying device.

[0030] [Figure 8] Figure 8 is a graph.

[0031] [Figure 9] Figure 9 is a schematic side view of the conveying device.

[0032] [Figure 10] Figure 10A is a top view of the conveying device.

[0033] Figure 10B is a side view of the conveying device.

[0034] [Figure 11] Figure 11A is a top view of the conveying device.

[0035] Figure 11B is a side view of the conveying device.

[0036] [Figure 12] Figure 12 is a schematic side view of the conveying device.

[0037] [Figure 13] Figure 13 is a schematic side view of the conveying device.

[0038] [Figure 14] Figure 14A is a top view of the conveying device.

[0039] Figure 14B is a top view of the conveying device.

[0040] Figure 14C is a top view of the conveying device.

[0041] [Figure 15] Figure 15A is a top view of the conveying device.

[0042] Figure 15B is a side view of the conveying device.

[0043] [Figure 16] Figure 16A is a top view of the conveying device.

[0044] Figure 16B is a side view of the conveying device.

[0045] [Figure 17] Figure 17A is a top view of the conveying device.

[0046] Figure 17B is a side view of the conveying device.

[0047] [Figure 18] Figure 18 is a schematic side view of the conveying device.

[0048] [Figure 19] Figure 19 is a schematic side view of the conveying device.

[0049] [Figure 20] Figure 20A is a top view of the conveying device.

[0050] Figure 20B is a top view of the conveying device.

[0051] Figure 20C is a top view of the conveying device.

[0052] [Figure 21] Figure 21A is a top view of the conveying device.

[0053] Figure 21B is a side view of the conveying device.

[0054] [Figure 22] Figure 22A is a top view of the conveying device.

[0055] Figure 22B is a side view of the conveying device.

[0056] [Figure 23] Figure 23 is a schematic side view of the conveying device.

[0057] [Figure 24] Figure 24A is a top view of the conveying device.

[0058] Figure 24B is a top view of the conveying device.

[0059] Figure 24C is a top view of the conveying device.

[0060] [Figure 25] Figure 25A is a top view of the conveying device.

[0061] Figure 25B is a side view of the conveying device.

[0062] [Figure 26] Figure 26A is a top view of the conveying device.

[0063] Figure 26B is a top view of the conveying device.

[0064] Figure 26C is a top view of the conveying device.

[0065] [Figure 27] Figure 27A is a top view of the conveying device.

[0066] Figure 27B is a side view of the conveying device.

[0067] [Figure 28] Figure 28A is a top view of the conveying device.

[0068] Figure 28B is a side view of the conveying device.

[0069] [Figure 29] Figure 29A is a top view of the conveying device.

[0070] Figure 29B is a top view of the conveying device.

[0071] Figure 29C is a top view of the conveying device.

[0072] [Figure 30] Figure 30A is a top view of the conveying device.

[0073] Figure 30B is a side view of the conveying device.

[0074] [Figure 31] Figure 31A is a top view of the conveying device.

[0075] Figure 31B is a side view of the conveying device.

[0076] [Figure 32] Figure 32A is a top view of the conveying device.

[0077] Figure 32B is a top view of the conveying device.

[0078] Figure 32C is a top view of the conveying device.

[0079] Figure 32D is a top view of the conveying device.

[0080] [Figure 33] Figure 33A is a top view of the conveying device.

[0081] Figure 33B is a side view of the conveying device.

[0082] [Figure 34] Figure 34A is a top view of the conveying device.

[0083] Figure 34B is a top view of the conveying device.

[0084] Figure 34C is a top view of the conveying device.

[0085] [Figure 35] Figure 35A is a top view of the conveying device.

[0086] Figure 35B is a side view of the conveying device.

[0087] [Figure 36] Figure 36 is a top view of the conveying device.

[0088] [Figure 37] Figure 37A is a top view of the conveying device.

[0089] Figure 37B is a side view of the conveying device.

[0090] [Figure 38] Figure 38A is a top view of the conveying device.

[0091] Figure 38B is a side view of the conveying device.

[0092] [Figure 39] Figure 39 is a top view of the conveying device.

[0093] [Figure 40] Figure 40A is a top view of the conveying device.

[0094] Figure 40B is a side view of the conveying device.

[0095] [Figure 41] Figure 41 is a top view of the conveying device.

[0096] [Figure 42] Figure 42 is a top view of the conveying device.

[0097] [Figure 43] Figure 43A is a top view of the conveying device.

[0098] Figure 43B is a side view of the conveying device.

[0099] [Figure 44] Figure 44 is a top view of the conveying device.

[0100] [Figure 45] Figure 45 is a top view of the conveying device.

[0101] [Figure 46] Figure 46A is a top view of the conveying device.

[0102] Figure 46B is a side view of the conveying device.

[0103] [Figure 47] Figure 47A is a top view of the conveying device.

[0104] Figure 47B is a side view of the conveying device.

[0105] [Figure 48] Figure 48 is a top view of the conveying device.

[0106] [Figure 49] Figure 49 is a top view of the conveying device.

[0107] [Figure 50] Figure 50A is a top view of the conveying device.

[0108] Figure 50B is a side view of the conveying device.

[0109] [Figure 51] Figure 51 is a top view of the conveying device.

[0110] [Figure 52] Figure 52A is a top view of the conveying device.

[0111] Figure 52B is a side view of the conveying device.

[0112] [Figure 53] Figure 53 is a top view of the conveying device.

[0113] [Figure 54] Figure 54A is a top view of the conveying device.

[0114] Figure 54B is a side view of the conveying device.

[0115] [Figure 55] Figure 55A is a top view of the conveying device.

[0116] Figure 55B is a top view of the conveying device.

[0117] Figure 55C is a top view of the conveying device.

[0118] [Figure 56] Figure 56A is a top view of the conveying device.

[0119] Figure 56B is a side view of the conveying device.

[0120] [Figure 57] Figure 57A is a top view of the conveying device.

[0121] Figure 57B is a top view of the conveying device.

[0122] Figure 57C is a top view of the conveying device.

[0123] [Figure 58] Figure 58A is a top view of the conveying device.

[0124] Figure 58B is a side view of the conveying device.

[0125] [Figure 59] Figure 59A is a top view of the conveying device.

[0126] Figure 59B is a top view of the conveying device.

[0127] Figure 59C is a top view of the conveying device.

[0128] [Figure 60] Figure 60A is a top view of the conveying device.

[0129] Figure 60B is a side view of the conveying device.

[0130] [Figure 61] Figure 61A is a top view of the conveying device.

[0131] Figure 61B is a top view of the conveying device.

[0132] Figure 61C is a top view of the conveying device.

[0133] [Figure 62] Figure 62 is a top view of the conveying device.

[0134] [Figure 63] Figure 63 shows an exemplary pulley.

[0135] [Figure 64] Figure 64 is a top view of the conveying device.

[0136] [Figure 65] Figure 65 is a top view of the conveying device.

[0137] [Figure 66A-B] Figure 66A is a top view of the conveying device.

[0138] Figure 66B is an isometric view of the conveying device.

[0139] [Figure 66C-D] Figure 66C is an end view of the conveying device.

[0140] Figure 66D is a side view of the conveying device.

[0141] [Figure 67A-B] Figure 67A is a top view of the conveying device.

[0142] Figure 67B is an isometric view of the conveying device.

[0143] [Figure 67C-D] Figure 67C is an end view of the conveying device.

[0144] Figure 67D is a side view of the conveying device.

[0145] [Figure 68A] Figure 68A is a top view of the conveying device.

[0146] [Figure 68B] Figure 68B is a top view of the conveying device.

[0147] [Figure 69] Figures 69A-F are top views of the conveying device.

[0148] [Figure 70] Figure 70A-F is a top view of the conveying device.

[0149] [Figure 71] Figure 71A-E is a top view of the conveying device.

[0150] [Figure 72A-B] Figure 72A is a top view of the conveying device, and Figure 72B is a side view of the conveying device.

[0151] [Figure 72C-D] Figure 72C is a top view of the conveying device, and Figure 72D is a side view of the conveying device.

[0152] [Figure 73A-B] Figure 73A is a top view of the conveying device, and Figure 73B is a side view of the conveying device.

[0153] [Figure 73C-D] Figure 73C is a top view of the conveying device, and Figure 73D is a side view of the conveying device.

[0154] [Figure 74A] Figure 74A is a top view of the conveying device.

[0155] [Figure 74B] Figure 74B is a top view of the conveying device.

[0156] [Figure 75] Figures 75A-F are top views of the conveying device.

[0157] [Figure 76A] Figure 76A is a top view of the conveying device.

[0158] [Figure 76B] Figure 76B is a top view of the conveying device.

[0159] [Figure 76C] Figure 76C is a top view of the conveying device.

[0160] [Figure 76D] Figure 76D is a top view of the conveying device.

[0161] [Figure 77A-B] Figure 77A is a top view of the conveying device, and Figure 77B is a side view of the conveying device.

[0162] [Figure 77C-D] Figure 77C is a top view of the conveying device, and Figure 77D is a side view of the conveying device.

[0163] [Figure 78] Figure 78A is a top view of the conveying device, and Figure 78B is a side view of the conveying device.

[0164] [Figure 79A] Figure 79A is a top view of the conveying device.

[0165] [Figure 79B] Figure 79B is a top view of the conveying device.

[0166] [Figure 80] Figure 80A is a top view of the conveying device.

[0167] Figure 80B is a top view of the conveying device. Detailed description of exemplary embodiment.

[0168] Beyond the embodiments disclosed below, other embodiments are possible and can be implemented or performed in various ways. Therefore, it should be understood that the disclosed embodiments are not limited in their application to the structural details and component arrangements described below or shown in the drawings. Where only one embodiment is described herein, the claims relating thereto should not be limited to that embodiment. Furthermore, these claims should not be read restrictively unless there is clear and compelling evidence expressing a definite exclusion, limitation, or waiver.

[0169] Next, referring to Figures 1A and 1B, a top view and a side view, respectively, of the robot 10 having a drive unit 12 and an arm 14. The arm 14 is shown in the retracted position. The arm 14 has an upper arm or a first link 16 that is rotatable around the central rotation axis 18 of the drive unit 12. The arm 14 further has a forearm or a second link 20 that is rotatable around an elbow rotation axis 22. The arm 14 further has an end effector or a third link 24 that is rotatable around a wrist rotation axis 26. The end effector 24 supports the substrate 28. As described, the arm 14 is configured to cooperate with the drive unit 12 so that the substrate 28 is transported along a linear path 32 that coincides with the central rotation axis 18 of the drive unit 12, a radial path 30 that may coincide with (as seen in Figure 1A), or a path parallel to the linear path 32, for example, paths 34, 36, or others. In the illustrated embodiment, the interarticular length of the forearm or second link 20 is greater than the interarticular length of the upper arm or first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in interarticular lengths between the forearm 20 and the upper arm 14. As will be described in more detail below, the lateral offset 38 is maintained substantially constant during extension and contraction of the arm 14, thereby allowing the substrate 28 to move along a linear path without rotation of the substrate 28 or end effector 24 relative to the linear path. This is achieved using the internal structure of the arm 14 without using an additional control axis to control the rotation of the end effector 24 at the wrist 26 relative to the forearm 20, as will be described. In one aspect of the embodiment disclosed with respect to Figure 1A, the center of mass of the third link or end effector 24 may be located on the wrist centerline or rotation axis 26. Alternatively, the center of mass of the third link or end effector 24 may be located along a (38) path 40 offset from the central rotation axis 18. In this way, the moment added as a result of the differently offset mass during extension and contraction of the arm can minimize disturbances to the band constraining the end effector 24 to links 16, 20.Here, the center of mass may be determined with or without the substrate, or somewhere in between. Alternatively, the center of mass of the third link or end effector 24 may be located in any preferred location. In the illustrated embodiment, the substrate transport device 10 transports the substrate 28 using a movable arm assembly 14 coupled to a drive unit 12 on a central rotation axis 18. As can be seen from Figures 3A to 3C, the substrate support 24 is coupled to the arm assembly 14 on a wrist rotation axis 26, and the arm assembly 14 rotates around the central rotation axis 18 during extension and contraction. During extension and contraction, the wrist rotation axis 26 moves along a wrist path 40 which is parallel to the radial path relative to the central rotation axis 18, e.g., paths 30, 34, or 36 and offset therefrom by 38, etc. The substrate support 24 similarly moves parallel to the radial path 30 without rotation during extension and contraction. As will be described in more detail in other embodiments of the disclosed models, when the length of the forearm is shorter than the length of the upper arm, principles and structures may be applied to restrict the end effector to move in substantially purely radial motion. Furthermore, this feature may be applied when multiple substrates are handled by the end effector. Furthermore, this feature may be applied when a second arm for handling one or more additional substrates is connected to a drive unit. Thus, all such modifications may be encompassed.

[0170] Referring similarly to Figures 2A and 2B, partial schematic top and side views of the system 10 are shown, respectively, illustrating the internal configuration used to drive the individual links of the arm 14 shown in Figures 1A and 1B. The drive unit 12 has first and second motors 52, 54 coupled to the housing 60, each having corresponding first and second encoders 56, 58 that drive the first and second shafts 62, 64, respectively. Here, shaft 62 may be coupled to a pulley 66, shaft 64 may be coupled to the upper arm 16, and shafts 62, 64 may be concentric or otherwise arranged. In alternative embodiments, any suitable drive unit may be provided. The housing 60 may be in communication with a chamber 68, and the bellows 70, chamber 68, and the internal parts of the housing 60 isolate the vacuum environment 72 from the atmospheric environment 74. The housing 60 may slide in the z direction on the slide 76 as a movable base, and a lead screw or other suitable vertical or linear z drive device 78 may be provided to selectively move the housing 60 and the arm 14 coupled thereto in the z(80) direction. In the illustrated embodiment, the upper arm 16 is driven by a motor 54 around a central rotation axis 18. Similarly, the forearm is driven by a motor 52 through a band drive device having pulleys 66, 82 and bands 84, 86, such as a conventional circular pulley and band. In an alternative embodiment, any suitable structure may be provided for driving the forearm 20 relative to the upper arm 16. The ratio of pulleys 66 to 82 may be 1:1, 2:1, or any suitable ratio. The third link 24 having an end effector may be constrained by a band drive device having a pulley 88 grounded to the link 16, a pulley 90 grounded to the end effector or the third link 24, and bands 92, 94 constraining the pulleys 88 and 90. As described, the ratio between pulleys 88 and 90 does not have to be constant so that the third link 24 follows a radial path without rotation during the extension and contraction of arm 14. This may be achieved if pulleys 88 and 90 are one or more non-circular pulleys, such as two non-circular pulleys, or if one of pulleys 88 and 90 is circular and the other is non-circular.Alternatively, any suitable coupling device or linkage may be provided to restrict the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one noncircular pulley compensates for the unequal length of the upper arm 16 and forearm 20, thereby causing the end effector 24 to face radially 30 regardless of the position of the first two links 16, 20. This embodiment describes a noncircular pulley 90 and a circular pulley 88. Alternatively, pulley 88 may be noncircular, and pulley 90 may be circular. Alternatively, pulleys 88 and 92 may be noncircular, or any suitable coupling device may be provided to restrict the links of the arm 14 as described. As an example, a noncircular pulley or sprocket is described in U.S. Patent No. 4,865,577, issued September 12, 1989, entitled “Noncircular Drive”. That patent is incorporated herein by reference in its entirety. Alternatively, any suitable coupling device may be provided to restrict the link of arm 14 as described, for example, any suitable variable ratio drive or coupling device, coupling gear or sprocket, cam or other may be used alone or in combination with a suitable linkage or other coupling device. In the illustrated embodiment, the elbow pulley 88 is coupled to the upper arm 16 and is shown as round or circular, while the wrist pulley 90, coupled to the wrist or third link 24, is shown as non-circular. The shape of the wrist pulley is non-circular and may be symmetrical with respect to a line 96 perpendicular to the radial trajectory 30. Line 96 may also coincide with or be parallel to the line between the two pulleys 88, 90 when the forearm 20 and upper arm 16 overlap each other with the wrist axis 26 closest to the shoulder axis 18, as seen, for example, in Figure 3B. The shape of the pulley 90 is such that the bands 92 and 94 remain taut when the arm 14 extends and retracts, and that contact points 98 and 100 are established on opposing sides of the pulley 90, with varying radial distances 102 and 104 from the wrist rotation axis 26.For example, in the orientation shown in Figure 3B, the contact points 98 and 100 of the two bands on the pulley are at equal radial distances 102 and 104 from the wrist rotation axis 26. This is further illustrated in Figure 4, which shows their respective ratios. For the arm 14 to rotate, both of the robot's drive shafts 62 and 64 must move by the same amount in the direction of the arm's rotation. For the end effector 24 to extend and retract radially along a straight path, the two drive shafts 62 and 64 must move in coordination, for example, according to exemplary inverse kinematic equations presented later in this section. Here, the substrate transport device 10 is configured to transport a substrate 28. The forearm 20 is rotatably coupled to the upper arm 16 and rotatable around an elbow axis 22 offset from the central axis 18 by the length of the upper arm link. The end effector 24 is rotatably coupled to the forearm 20 and rotatable around a wrist axis 26 offset from the elbow axis 22 by the length of the forearm link. The wrist pulley 90 is fixed to the end effector 24 and coupled to the elbow pulley 88 using bands 92 and 94. Here, the forearm link length differs from the upper arm link length, and the end effector is constrained to the upper arm by the elbow pulley, wrist pulley, and bands, thereby causing the substrate to move along a linear radial path 30 with respect to the central axis 18. Here, the substrate support 24 is coupled to the upper arm 16 using a substrate support coupling device 92 and is driven around the wrist rotation axis 26 by the relative motion between the forearm 20 and the upper arm 16 around the elbow rotation axis 22. Figures 3A, 3B, and 3C show the extension motion of the robot in Figures 1 and 2. Figure 3A shows a top view of the robot 10 with the arm 14 in its retracted position. Figure 3B shows a partially extended arm 14 with the forearm 20 aligned over the upper arm 16, illustrating that the lateral offset 38 of the end effector corresponds to the difference in inter-joint length between the forearm 20 and the upper arm 16. Figure 3C shows arm 14 in the extended position, although not fully extended.

[0171] Exemplary forward kinematics may be provided. In an alternative aspect, any suitable forward kinematics may be provided to accommodate an alternative structure. The following exemplary equations may be used to determine the position of the end effector as a function of the position of the motors. x2 = l1 cos θ1 + l2 cos θ2 (1.1) y2 = l1 sin θ1 + l2 sin θ2 (1.2) R2 = sqrt(x2 2 + y2 2 ) (1.3) T2 = atan2(y2, x2) (1.4) α3 = asin(d3 / R2) where d3 = l2 - l1 (1.5) α 12 = θ1 - θ2 (1.6) α 12 < π if so, R = sqrt(R2 2 - d3 2 ) + l3, T = T2 + α3, otherwise, R = -sqrt(R2 2 - d3 2 ) + l3, T = T2 - α3 + π (1.7)

[0172] Exemplary inverse kinematics may be provided. In an alternative aspect, any suitable inverse kinematics may be provided to accommodate an alternative structure. The following exemplary equations may be utilized to determine the position of the motors to achieve a specified position of the end effector. x3 = R cos T (1.8) y3 = R sin T (1.9) x2 = x3 - l3 cos T + d3 sin T (1.10) y2 = y3 - l3 sin T - d3 cos T (1.11) R2 = sqrt(x2 2 + y2 2 ) (1.12) T2 = atan2(y2, x2) (1.13) α1 = acos((R2 2 + l1 2 - l2 2 ) / (2R2 l1)) (1.14) α² = a cos((R²) 2 -l1 2 +l2 2 ) / (2R2l2)) (1.15) If R > l3, then θ1 = T2 + α1 and θ2 = T2 - α2; otherwise, θ1 = T2 - α1 and θ2 = T2 + α2 (1.16)

[0173] The following terms may be used in the equations of kinematics. d3 = Lateral offset of the end effector (m) l1 = Interarticular length of the first link (m) l2 = Interarticular length of the second link (m) l3 = Length (m) of the third link with an end effector, measured from the wrist joint to a reference point on the end effector. R = Radial position of the end effector (m) R2 = Radius coordinate of the wrist joint (m) T = Angular position of the end effector (rad) T2 = Angular coordinates of the wrist joint (radians) x² = x-coordinate of the wrist joint (m) x3 = x-coordinate of the end effector (m) y² = y-coordinate of the wrist joint (m) y3 = y-coordinate (m) of the end effector θ1 = Angular position (rad) of the drive shaft connected to the first link. θ2 = Angular position (rad) of the drive shaft connected to the second link.

[0174] The exemplary kinematic equations described above may be used to design a suitable drive mechanism, for example, a band drive mechanism that restricts the orientation of the third link 24 such that the end effector 24 faces radially 30 regardless of the positions of the first two links 16, 20 of the arm 14.

[0175] Referring to Figure 4, the transmission ratio r of the band drive unit that constrains the orientation of the third link 31Plot 120 shows the normalized extension of the arm measured from the center of the robot to the base of the end effector as a function of (R-l3) / l1, i.e., the transfer ratio r 31 This is the angular velocity ω of the pulley attached to the third link. 32 The angular velocity ω of the pulley attached to the first link. 12 It is defined as the ratio to . Both angular velocities are defined with respect to the second link. The figure shows the transfer ratio r for different l2 / l1 (0.5 to 1.0 with an increment of 0.1, and 1.0 to 2.0 with an increment of 0.2). 31 This is shown in the graph. The external shape of the non-circular pulley (one or more) corresponds to the transmission ratio r in Figure 4. 31 The shape may be calculated to achieve this, and examples of the shape are shown in Figures 2A, 54A, and 54B.

[0176] In the disclosed embodiments, a longer reach may be obtained compared to an equal link arm having the same storage volume, while using one or more non-circular pulleys or other suitable devices to restrict the motion of the end effectors. In an alternative embodiment, the first link may be driven by a motor, either directly or via any type of coupling or transmission mechanism. Any suitable transmission ratio can be used. Alternatively, the band drive acting the second link may be replaced by any other mechanism having equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination thereof. Similarly, the band drive restricting the third link may be replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gear, linkage-based mechanism, or any combination thereof. Here, the end effectors may or do not have to be radially oriented. For example, the end effectors may be positioned with any suitable offset relative to the third link and may face any suitable direction. Furthermore, in an alternative embodiment, the third link may support multiple end effectors or substrates. Any suitable number of end effectors and / or material holders can be transported by the third link. Furthermore, in alternative embodiments, the interarticular length of the forearm may be smaller than the interarticular length of the upper arm, as can be seen, for example, from the fact that l2 / l1 < 1 in Figure 4, and as can be seen and explained from Figures 25 to 34 and Figures 43 to 53.

[0177] Next, referring to Figures 5A and 5B, a top view and a side view of robot 150 incorporating some features of robot 10 are shown, respectively. Robot 150 is shown to have a drive unit 12 and an arm 152 shown in the retracted position. Arm 152 has similar features to those of arm 14, except as described herein. For example, the interarticular length of the forearm or second link 158 is greater than the interarticular length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in interarticular lengths between the forearm 158 and the upper arm 154. Referring similarly to Figures 6A and 6B, the drive unit 150 is shown having an internal configuration used to drive the individual links of the arm. In the illustrated embodiment, the upper arm 154 is driven by one motor via a shaft 64, as described with respect to arm 14 in Figures 1 and 2. Similarly, the end effector or third link 162 is constrained to the upper arm 154 by a non-circular pulley mechanism, as described with respect to arm 14 in Figures 1 and 2. An exemplary difference between arm 152 and arm 14 is seen in that the forearm 158 is coupled to shaft 62 and another motor of drive unit 12 via a band mechanism having at least one non-circular pulley. Here, the coupling device or band mechanism may have the features described herein or as described with respect to pulley drive units 88, 90 in Figures 1 and 2. The coupling device or band mechanism has a non-circular pulley 202 coupled to shaft 62 of drive unit 12 and rotatable around axis 18 with shaft 62. The band mechanism of arm 152 has a circular pulley 204 coupled to the upper arm link 158 and rotatable around elbow axis 156. The circular pulley 204 is coupled to the non-circular pulley 202 via bands 206, 208. Here, bands 206 and 208 can be held taut by the shape of the non-circular pulley 202. In an alternative embodiment, any combination of pulleys or other suitable transmission devices may be provided.The pulleys 202 and 204 and the bands 206, 208 cooperate to cause the rotation of the upper arm 154 relative to the pulley 202 (for example, holding the pulley 202 stationary while rotating the upper arm 154) to extend and contract the wrist joint 160 along a straight line (168) that is parallel to and offset from the desired radial path 180 of the end effector. Here, the third link 162 having the end effector is constrained, for example, by a band drive as described with respect to the arm 14, having at least one non-circular pulley, so that the end effector faces radially 180 regardless of the position of the first two links 154, 158. Here, any suitable coupling devices may be provided for constraining the links of the arm 14 as described, for example, one or more suitable variable ratio drives or coupling devices, coupling gears or sprockets, cams or other may be used alone or in combination with a suitable linkage or other coupling device. In the illustrated embodiment, the elbow pulley 204 is connected to the forearm 158 and is shown as round or circular, while the shoulder pulley 202, connected to the shaft 62, is shown as non-circular. The shape of the shaft pulley is non-circular and may be symmetrical with respect to a line 218 perpendicular to the radial trajectory 180. Line 218 may similarly coincide with or be parallel to a line between the two pulleys 202, 204 when the forearm 158 and upper arm 154 overlap each other with the wrist axis 160 closest to the shoulder axis 18, as seen, for example, in Figure 7B. The shape of the pulley 202 is such that the bands 206, 208 remain taut as the arm 152 extends and retracts, establishing contact points 210, 212 on opposing sides of the pulley 202 where the radial distance 214, 216 from the shoulder rotation axis 18 changes. For example, in the orientation shown in Figure 7B, the contact points 210 and 212 of the two bands on the pulley are at equal radial distances 214 and 216 from the shoulder rotation axis 18. This is further illustrated in Figure 8, which shows their respective ratios. For the arm 152 to rotate, both of the robot's drive shafts 62 and 64 must move by the same amount in the direction of the arm's rotation.For the end effector 162 to extend and retract radially along a straight path, the two drive shafts 62 and 64 must move in coordination, for example, according to exemplary inverse kinematic equations presented later in this section. For example, the drive shaft coupled to the upper arm must move according to the inverse kinematic equations presented below, while the other motor is held stationary. Figures 7A, 7B, and 7C illustrate the extension motion of the robot 150 in Figures 5 and 6. Figure 7A shows a top view of the robot with the arm 152 in its retracted position. Figure 7B shows a partially extended arm with the forearm aligned over the upper arm, illustrating that the lateral offset 168 of the end effector 162 corresponds to the difference in inter-joint length between the forearm 158 and the upper arm 154. Figure 7C shows the arm in the extended position, but not fully extended.

[0178] Exemplary forward kinematics may be provided. In alternative embodiments, any suitable forward kinematics may be provided to correspond to alternative structures. The following exemplary equations may be used to determine the position of the end effector as a function of the position of the motor. d1 = l1sin(θ1 - θ2) (2.1) If (θ1-θ2)<π / 2, then θ 21 =θ²-l²asin((d1+d3) / l²), otherwise θ 21 =θ2+l2asin((d1+d3) / l2)+π (2.2) x² = l1cosθ1 + l2cosθ 21 (2.3) y² = l1sinθ1 + l2sinθ 21 (2.4) R2 = sqrt(x2 2 +y2 2 ) (2.5) T2 = atan2(y2, x2) (2.6) If (θ1-θ2) < π / 2, then R = sqrt(R2 2 -d3 2 ) + l3, T = θ², otherwise R = -sqrt(R² 2 -d3 2) + l3, T = θ²(2.7)

[0179] Exemplary inverse kinematics may be provided. In alternative embodiments, any suitable inverse kinematics may be provided to correspond to alternative structures. The following exemplary equations may be used to determine the motor position to achieve a specified position of the end effector. x³ = RcosT (2.8) y³=RsinT (2.9) x² = x³ - l3cosT + d3sinT (2.10) y² = y³ - l³sinT - d³cosT (2.11) R2 = sqrt(x2 2 +y2 2 ) (2.12) T2 = atan2(y2, x2) (2.13) α1 = a cos((R2 2 +l1 2 -l2 2 ) / (2R2l1)) (2.14) If R > l3, then θ1 = T2 + α1 and θ2 = T; otherwise, θ1 = T2 - α1 and θ2 = T (2.15)

[0180] The following terms may be used in the equations of kinematics. d3 = Lateral offset of the end effector (m) l1 = Interarticular length of the first link (m) l2 = Interarticular length of the second link (m) l3 = Length (m) of the third link with an end effector, measured from the wrist joint to a reference point on the end effector. R = Radial position of the end effector (m) R2 = Radius coordinate of the wrist joint (m) T = Angular position of the end effector (rad) T2 = Angular coordinates of the wrist joint (radians) x² = x-coordinate of the wrist joint (m) x3 = x-coordinate of the end effector (m) y² = y-coordinate of the wrist joint (m) y3 = y-coordinate (m) of the end effector θ1 = Angular position (rad) of the drive shaft connected to the first link. θ2 = Angular position (rad) of the drive shaft connected to the second link.

[0181] The above kinematic equations may be used to design a band drive device, in which the rotation of the upper arm 154 controls a second link 158 such that the rotation of the upper arm 154 extends and contracts the wrist joint 160 along a straight line parallel to a desired radial path 180 of the end effector 162.

[0182] Next, referring to Figure 8, the transmission ratio r of the band drive unit that drives the second link. 20 Graph 270 shows 272 as a function of the normalized extension of the arm measured from the center of the robot to the base of the end effector, i.e., (R-l3) / l1. 20 This is the angular velocity ω of the pulley attached to the second link. 21 The angular velocity ω of the pulley attached to the second motor. 01 It is defined as the ratio to . Both angular velocities are defined with respect to the first link. The figure shows the transfer ratio r for different l2 / l1. 20 This is shown in the graph.

[0183] The external shape of the non-circular pulley(s) for the band drive unit driving the second link is shown in Figure 8, with respect to the transmission ratio r 20 The calculation is performed to achieve 272. An example of the pulley's outer shape is shown in Figure 6A, and is explained in Figures 55A and 55B.

[0184] The transmission ratio r of the band drive unit that restricts the orientation of the third link 162 31 The transfer ratio r may be the same as the transfer ratio shown in Figure 4 for the embodiments of Figures 1 and 2. 31 ω is the angular velocity of the pulley attached to the third link. 32 The angular velocity of the pulley attached to the first link, ω 12It is defined as the ratio to . Both angular velocities are defined with respect to the second link. The figure shows the transfer ratio r for different l2 / l1 (0.5 to 1.0 with an increment of 0.1, and 1.0 to 2.0 with an increment of 0.2). 31 This is shown in the graph. The external shape of the non-circular pulley(s) for the band drive unit constraining the third link 162 is shown in the transmission ratio r in Figure 4. 31 It may be calculated to achieve this. An example of the pulley's outer shape is shown in Figure 6A.

[0185] In the embodiments shown, a longer reach may be obtained compared to an equal link arm having the same storage volume, while using a non-circular pulley or other suitable mechanism for constraining the end effector, as described. Compared to the embodiments disclosed in Figures 1 and 2, in the shoulder axis 18, another band drive having a non-circular pulley may be provided in place of the conventional band drive. In the alternative embodiment, the first link may be driven by a motor either directly or via any type of coupling or transmission mechanism, for example, any suitable transmission ratio may be used. Alternatively, the band drive that actsuates the second link and constrains the third link may be replaced by any other mechanism having equivalent functionality, such as a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination thereof. Furthermore, the third link may be constrained to hold the end effector radially via a conventional two-stage band mechanism that synchronizes the third link with a pulley driven by the second motor, as shown in Figure 9. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination thereof. In addition, the end effectors may or may not be radially oriented. For example, the end effectors may be positioned with any suitable offset relative to the third link and may face any suitable direction. In an alternative embodiment, the third link may carry two or more end effectors or substrates. Here, any suitable number of end effectors and / or material holders can be supported by the third link. Furthermore, the interarticular length of the forearm may be smaller than the interarticular length of the upper arm, for example, represented by l2 / l1 < 1 in Figure 8.

[0186] Next, referring to Figure 9, an alternative robot 300 is shown. In robot 300, the third link may be constrained to hold the end effector radially via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor. Robot 300 is shown to have a drive unit 12 and an arm 302. The arm 302 may have an upper arm or a first link 304 coupled to a shaft 64 and rotatable around a central axis or shoulder axis 18. The arm 302 has a forearm or a second link 308 rotatably coupled to the upper arm 304 at an elbow axis 306. Links 304, 308 may be of different lengths as described above. The third link or end effector 312 is rotatably coupled to the second link or forearm 308 at the wrist axis 310, and the end effector 312 can transport the substrate 28 along the radial path without rotation by links 304, 308 having unequal link lengths as described above. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314, 316, the pulley 314 may be circular and the pulley 316 may be non-circular. Here, the circular pulley 314 constrains the third link 312 to hold the end effector 312 radially via a conventional two-stage (318, 320) circular band mechanism which synchronizes the third link 312 with a pulley driven by the shaft 62. The two-stage mechanism 318, 320 has a pulley 314 coupled to an elbow pulley 324 by a band 322. The elbow pulley 324 is connected to the elbow pulley 326, which is connected to the wrist pulley 328 via a band 330. The forearm 308 may further have an elbow pulley 332, which may be circular and may be connected to the shoulder pulley 316 via a band 334. The shoulder pulley 316 may be non-circular and may be connected to the pulley 314 and the shaft 62.

[0187] The disclosed embodiments may further embody a robot having a robotic drive having an additional axis, wherein an arm coupled to the robotic drive may have an independently operable additional end effector having the capability to transport one or more substrates. For example, an arm having two independently operable arm linkages or a “dual arm” configuration may be provided, each independently operable arm may have an end effector configured to support one, two, or any preferred number of substrates. Here, each independently operable arm may have first and second links having different link lengths, and the end effectors coupled to the links and the supported substrates operate and follow the paths described above. Here, the substrate transporter transports the first and second substrates and may have first and second independently operable arm assemblies coupled to a drive on a common rotation axis. The first and second substrate supports are coupled to the first and second arm assemblies on first and second wrist rotation axes, respectively. One or both of the first and second arm assemblies rotate around a common axis of rotation during extension and contraction. The first and second wrist axes of rotation move during extension and contraction along first and second wrist paths that are offset from the radial path relative to the common axis of rotation. The first and second substrate supports move during extension and contraction parallel to the radial path without rotation. Below are modifications of the disclosed embodiment having a plurality of independently operable arms, where alternative embodiments may provide any preferred combination of features.

[0188] Next, referring to Figures 10A and 10B, a top view and a side view of a robot 350 having a dual-arm mechanism are shown, respectively. The robot 350 has an arm 352 having a common upper arm 354 and independently operable forearms 356, 358, each having its own end effectors 360, 362. In the illustrated embodiment, the linkages are both shown in their retracted position. The lateral offset 366 of the end effectors corresponds to the difference in inter-articular length between the upper arm 354 and the forearms 356, 358. In the illustrated embodiment, the upper arms are the same length and may be longer than the forearms. Furthermore, the end effectors 360, 362 are positioned above the forearms 356, 358. Next, referring to Figures 11A and 11B, a top view and a side view of a robot 375 having an alternative arm configuration are shown, respectively. In the illustrated embodiment, the arm 377 may have the features described with respect to Figures 10A and 10B, with the linkages both shown in their retracted positions. In this configuration, a third link having an end effector 382 of the upper linkage is located below the forearm 380 to reduce the vertical spacing between the two end effectors 382, ​​384. A similar effect may be achieved here by lowering the upper end effector 362 in the configurations of Figures 10A and 10B by a step (368). Referring similarly to Figures 12 and 13, the internal configurations of robots 350, 375, respectively, used to drive the individual links of the arms in Figures 10 and 11 are shown. In the illustrated embodiment, the drive unit 390 may have first, second, and third drive motors 392, 394, and 396, which may be a rotor-stator mechanism having position encoders 404, 406, and 408, respectively, that drive concentric shafts 398, 400, and 402, respectively. A Z drive unit 410 may drive the motors vertically. In this case, the motors may be partially or completely housed within a housing 412, and a bellows 414 may seal the internal volume of the housing 412 into a chamber 416, and the internal volume and the inside of the chamber 416 may operate in an isolated environment such as a vacuum or the like.In the illustrated embodiment, a common upper arm 354 is driven by a single motor 396. Each of the two forearms 356, 358 pivots on a common axis 420 at the elbow of the upper arm 354 and is independently driven by motors 394, 396, respectively, through band drives 422, 424, which may each have conventional pulleys. A third link having end effectors 360, 362 is constrained, respectively, by band drives 426, 428, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. Here, the band drives in each linkage may be designed using the methodology described for Figures 1 and 2, and the kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts 398, 400, 402 of the robot must move by the same amount in the direction of arm rotation. For one of the end effectors to extend and retract radially along a linear path, the common upper arm drive shaft and the drive shaft coupled to the forearm associated with the active end effector must move in coordination according to the inverse kinematic equations for Figures 1 and 2. Simultaneously, the drive shaft coupled to the other forearm must rotate synchronously with the common upper arm drive shaft so that the inactive end effector remains retracted. Referring similarly to Figures 14A, 14B, and 14C, the arms of Figures 11A and 11B are shown as the upper and lower linkages extend. Here, the inactive linkages 356, 360 rotate while the active linkages 358, 362 extend. For example, the upper linkages 358, 362 rotate as the lower linkages 356, 360 extend, and the lower linkages 356, 360 rotate as the upper linkages 358, 362 extend. In the embodiments disclosed in Figures 10 and 11, assembly and control can be simplified, in which case the arm mechanism may be used on a coaxial drive unit without motion seals, while still providing a longer reach compared to equilink-length arms with the same storage volume. Here, no bridge is used to support any of the end effectors.In the illustrated embodiment, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector (closer to the wafer than in the equilink mechanism).

[0189] Next, referring to Figures 15A and 15B, a top view and a side view of a robot 450 having a dual-arm mechanism are shown, respectively. The robot 450 has an arm 452 having a common upper arm 454 and independently operable forearms 456, 458, each having its own end effectors 460, 462. In the illustrated embodiment, the linkages are both shown in their retracted position. The lateral offset 466 of the end effectors corresponds to the difference in inter-articular length between the upper arm 454 and the forearms 456, 458. In the illustrated embodiment, the upper arms are the same length and may be longer than the forearms. Furthermore, the end effector 460 is positioned above the forearm 456, and the end effector 462 is positioned above the forearm 458. Similarly, referring to Figures 16A and 16B, a top view and a side view of a robot 475 having an alternative arm configuration are shown, respectively. In this case as well, the linkages are both shown in their retracted position. In this configuration, the third link and end effector 482 of the left linkage are located below the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. A similar effect can be achieved by lowering the upper end effector (468) in the configurations of Figures 15A and 15B. Alternatively, a bridge can be used to support one of the end effectors. The integrated upper arm link 454 may be a single piece, as shown in Figures 15 and 16, or it may be formed by two or more parts 470, 472, as shown in the example in Figures 17A and 17B. Here, the two-part design may be provided as being lighter and using less material, and the left part 472 and the right part 470 may be made of the same component. Here, the two-part design may also have equipment for adjusting the angular offset between the left and right parts. These equipment may be useful when different retraction positions need to be supported. Referring similarly to Figures 18 and 19, the internal configurations used to drive the individual links of the arms in Figures 15 and 16 are shown, respectively. The integrated upper arm 454 is shown to be driven together with the shaft 402 by a single motor.Each of the two forearms 456, 458 is independently driven by a single motor, each via shafts 400, 398, and each via band drives 490, 492 having conventional pulleys. Here, links 456, 458 rotate on separate axes 494, 496, respectively. Third links, having end effectors 460, 462, are constrained, each by band drives 498, 500, each having at least one non-circular pulley to compensate for the unequal length of the upper and lower arms. Here, the band drives 498, 500 in each linkage 456, 460 and 458, 462 are designed using the methodology described for Figures 1 and 2. Here, the kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages 456, 460 and 458, 462 of the dual arms. For arm 452 to rotate, all three drive shafts of the robot, 398, 400, and 402, must move by the same amount in the direction of arm rotation. For one of the end effectors to extend and retract radially along a linear path, the common upper arm drive shaft and the drive shaft coupled to the forearm associated with the active end effector must move in coordination according to the inverse kinematic equations presented with respect to Figures 1 and 2. Simultaneously, the drive shaft coupled to the other forearm must rotate synchronously with the common upper arm drive shaft so that the inactive end effector remains retracted. Referring similarly to Figures 20A, 20B, and 20C, the arms of Figures 16A and 16B are shown with the linkages 458, 462 on the left and 456, 460 on the right extended. Note that while the active linkages 458, 462 extend, the inactive linkages 456, 460 rotate. Here, as the left linkages 458 and 462 extend, the right linkages 456 and 460 rotate, and as the right linkages 456 and 460 extend, the left linkages 458 and 462 rotate.The illustrated embodiment utilizes the advantages of a three-dimensional link design, which is easy to assemble and control, and the advantages of a coaxial drive, for example, which does not have motion seals, while providing a longer reach compared to an equilink arm with the same storage volume. Here, no bridge is used to support either of the end effectors. Here, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector, closer to the wafer than in the case of an equilink mechanism. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge may be longer compared to an equilink arm design. Furthermore, the contraction angle may be more difficult to change compared to a configuration with a common elbow joint, for example, as seen in Figures 10 and 11, and a configuration with independent dual arms, for example, as seen in Figures 21 and 22.

[0190] Next, referring to Figures 21A and 21B, top and side views of a robot 520 having independent dual arms 522 and 524 are shown, respectively. In the illustrated embodiments, linkages 522 and 524 are both shown in their retracted position. Arm 522 has a third link having an independently operable upper arm 526, forearm 528, and end effector 530. Arm 524 has a third link having an independently operable upper arm 532, forearm 534, and end effector 536. In the illustrated embodiments, forearms 528 and 534 are shown longer than upper arms 526 and 532, and end effectors 530 and 536 are positioned above forearms 528 and 534, respectively. Similarly, referring to Figures 22A and 22B, top and side views of a robot 550 having arms of an alternative configuration but similar features to those of robot 520 are shown, with linkages both shown in their retracted position. In this configuration, the third link and end effector 552 of the left linkage are located below the forearm 554 to reduce the vertical distance between the two end effectors. A similar effect can be achieved by lowering the upper end effector in the configuration of Figure 21. Alternatively, a bridge can be used to support one of the end effectors. In Figures 21 and 22, the right upper arm 532 is located below the left upper arm 526. Alternatively, for example, the left upper arm may be located below the right upper arm, in which case one linkage can be nested within the other linkage. Referring similarly to Figure 23, the internal configuration used to drive the individual links of the arms in Figures 21A and 21B is shown. Here, for clarity of illustration, the heights of the links are adjusted to avoid overlapping of components. Each of the two upper arms 526 and 532 is driven independently by a single motor, each through its respective shafts 398 and 402. The forearms 528 and 534 are coupled to a third motor via a shaft 400 through band mechanisms 570 and 572, each having at least one non-circular pulley.The third links 530, 536, each having an end effector, are constrained by band drives 574, 576, each having at least one non-circular pulley. The band drives are designed such that the rotation of one of the upper arms 526, 532 extends and contracts the corresponding linkages 528, 530 and 534, 536 along a straight line, while the other linkage remains stationary. The band drives in each linkage may be designed using the methodology described with respect to Figures 5 and 6, and the kinematic equations presented for Figures 5 and 6 can similarly be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts 398, 400, and 402 of the robot must move by the same amount in the direction of the arm's rotation. For one of the end effectors to extend and retract radially along a linear path, the drive shaft of the upper arm associated with the active end effector must rotate according to the inverse kinematic equations for Figures 5 and 6, while the other two drive shafts must be held stationary. Referring similarly to Figures 24A, 24B, and 24C, the arm of Figure 22 is shown with the left linkage 522 and the right linkage 524 extended. Note that while the active linkage 522 extends, the inactive linkage 524 remains stationary. That is, the left linkage 522 does not move while the right linkage 524 extends, and the right linkage 524 does not move when the left linkage 522 extends. The illustrated embodiment provides a longer reach compared to an equilink arm design having the same storage volume. Here, no bridge is used to support either of the end effectors, and the inactive linkages remain stationary while the active linkages extend. Active linkages can extend or contract more quickly without load, potentially resulting in higher throughput. The illustrated embodiment may be more complex than those shown in Figures 15 and 16, having two additional band drive units with non-circular pulleys instead of conventional ones. One of the wrist joints moves above the lower end effector, as seen in Figure 24.This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge will be longer compared to an equilink arm design.

[0191] Next, referring to Figures 25A and 25B, a top view and a side view of the robot 600 having an arm 602 are shown, respectively. In the illustrated embodiment, the linkages are both shown in their retracted position. The lateral offset 604 of the end effector corresponds to the difference in inter-articular length between the upper arm 606 and the forearms 608, 612. Here, in this embodiment, the forearms 608, 612 are shorter than the common upper arm 606. The internal configuration used to drive the individual links of the arm may be similar to that in Figures 10-13, for example, as in Figure 13, but in this example the forearms are shorter than the common upper arm. Here, the common upper arm is driven by one motor. Each of the two forearms is driven independently by one motor through a band drive with conventional pulleys. The third links 614, 616 having end effectors are constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. The band drive devices within each linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may similarly be used for each of the two linkages of a dual arm. Referring similarly to Figures 26A, 26B, and 26C, the arms of Figures 25A and 25B are shown when the upper linkages 612, 616 are extended. The lateral offset 604 of the end effector corresponds to the difference in inter-articular length between the upper and lower arm joints, and the wrist joint moves along a straight line offset by this difference relative to the trajectory of the center of the wafer. Note that while the active linkages 612, 616 are extended, the inactive linkages 608, 614 rotate. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Here, Figure 26A shows the arm with both linkages in the retracted position. Figure 26B shows the partially extended upper linkages 612, 616 at the position where the wrist joint of the upper linkage is closest to the wafer being transported by the lower linkage. It is observed that the wrist joint of the upper linkage does not move directly over the wafer (although it moves in the plane above the wafer).Figure 26C shows the further extension of the upper linkages 612, 616. The illustrated embodiment may offer ease of assembly and control and may be used on a coaxial or three-axis drive, or other suitable drive, that does not have motion seals. Here, a bridge may not be used to support either of the end effectors. The wrist joint of the upper linkage does not move directly over the wafer on the lower end effector, as is the case with the equilink design (this wrist joint moves in the plane above the wafer on the lower end effector). Here, the inactive arm rotates while the active arm extends. The elbow joint may be more complex, which may result in a larger swivel radius or a shorter reach. Here, the arm may be taller than the arm shown in Figures 30 and 31 and 33 due to the overlap of the forearms 608, 612.

[0192] Next, referring to Figures 27A and 27B, a top view and a side view of a robot 630 having an arm 632 are shown, respectively. The arm 632 may have similar features to those disclosed with respect to Figures 15-19, except that the forearms 638, 640 are shown to have shorter link lengths than the upper arm 636. The linkages are both shown in their retracted positions. The lateral offset 634 of the end effectors 642, 646 corresponds to the difference in inter-articular length between the upper arm 636 and the forearms 638, 640. The integrated upper arm link 636 may be a single part, as shown in Figures 27A and 27B, or the upper arm link may be formed by two or more parts 636', 636'', as shown in the example in Figures 28A and 28B. The two-part design may be lighter using less material, and the left 636' and right 636'' parts may be identical components. For example, if different contraction positions need to be supported, a margin may be provided for adjusting the angular offset between the left 636' and right 636" portions. The internal configuration used to drive the individual links of arm 632 may be similar to those in Figures 15-19, for example, as shown in Figure 19. The common upper arm 636 is driven by one motor. Each of the two forearms 638, 640 is driven independently by one motor through a band drive with a conventional pulley. A third link with end effectors 642, 646 compensates for the effects of the unequal lengths of the upper arm 636 and forearms 638, 640. The band drive may be constrained by a band drive, each having a non-circular pulley. The band drive in each linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may similarly be used for each of the two linkages of the dual arm. Referring similarly to Figures 29A, 29B, and 29C, the arms of Figures 27A and 27B are shown as the upper right linkages 640, 646 are extended. The lateral offset 634 of the end effector corresponds to the difference in inter-articular length between the upper and lower arm joints, and the wrist joint moves along a straight line offset by this difference relative to the trajectory of the center of the wafer.Here, the inactive linkages 638, 642 rotate while the active linkages 640, 646 extend. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Of Figures 29A, 29B, and 29C, Figure 29A shows the arm with both linkages in the retracted position. Figure 29B shows the partially extended right upper linkage 640, 646 at the position where the wrist joint of the right upper linkage 640, 646 is closest to the wafer being transported by the left lower linkage 638, 642. Here, the wrist joint of the right upper linkage 640, 646 does not move directly over the wafer, but rather moves in the plane above the wafer. Figure 29C shows the further extension of the right upper linkage 640, 646. The illustrated embodiment takes advantage of the three-dimensional linkage design, ease of assembly and control, and the benefits of a coaxial drive system that, for example, does not have motion seals. No bridge is used to support either of the end effectors. The wrist joint of the upper linkage does not move directly over the wafer on the lower end effector, as is the case with an equilink design. However, this wrist joint moves in a plane above the wafer on the lower end effector. While the active arms 640, 646 extend, the inactive arms 638, 642 rotate. The contraction angle is more difficult to change compared to configurations with a common elbow joint, as seen, for example, in Figures 25A and 25B, and with independent dual arms, as seen, for example, in Figures 33A and 33B. Furthermore, the arm positions are shown higher than in Figures 30 and 31 and Figures 33A and 33B, because the forearm 640 is shown higher than the forearm 638.

[0193] Next, referring to Figures 30A and 30B, a top view and a side view of the robot 660 having an arm 662 are shown, respectively. The arm 662 may have the features described with respect to Figures 27-29, but as described, it uses a bridge and has two forearms at the same height. The linkages are both shown in their retracted position. The lateral offset 664 of the end effector corresponds to the difference in inter-articular length between the upper arm 666 and the forearms 668, 670. The integrated upper arm link 666 may be a single part, as shown in Figures 30A and 30B, or the upper arm link may be formed by two or more parts 666', 666'', as shown in the example in Figures 31A and 31B. The internal configuration used to drive the individual links of the arm may be identical to that shown for Figures 15–19, in which case the forearms 668, 670 are shorter than the upper arm 666. The common upper arm 666 is driven by one motor. Each of the two forearms 668, 670 is driven independently by one motor through a band drive with conventional pulleys. A third link with end effectors 672, 674 is constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. The band drive within the linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 can similarly be used for each of the two linkages of the dual arm. The third link and end effector 674 has a bridge 680. The bridge 680 has an upper end effector section 682, a lateral offset support section 684 offset from the wrist axis between links 670 and 674, and a lower support section 686 that connects the wrist axis to the offset support section 684. The bridge 680 allows the forearms 668 and 670 to be mounted at the same height while providing clearance for the third link and end effector 672 (which may include a wafer) and the alternating section of the bridge 680, as can be seen below with reference to Figure 32.The bridge 680 further provides a mechanism in which any moving parts, for example, associated with the two wrist joints, are positioned below the wafer surface during transport. Referring similarly to Figures 32A, 32B, 32C, and 32D, the top views of the robot arm in Figures 30A and 30B are shown when the right linkages 670, 674 are extended. The lateral offset 664 of the end effector corresponds to the difference in inter-joint length between the upper arm 666 and the forearm 670, and the wrist joint 690 moves along a straight line offset by this difference relative to the trajectory of the center of the wafer 692. Note that while the active linkages 670, 674 are extended, the inactive linkages 668, 672 rotate. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Of Figures 32A, 32B, 32C, and 32D, Figure 32A shows the arm with both linkages in the contracted position. Figure 32B shows the right linkages 670, 674 partially extended in a position corresponding to the least desirable (or closest to the least desirable) gap between the bridge 680 of the right linkages 670, 674 and the end effector 672 of the left linkages 668, 672. Figure 32C shows the partially extended right-side linkages 670, 674 in the position where the forearm 670 is aligned with the upper arm 66". The lateral offset of the end effector corresponds to the difference in inter-articular length between the upper and lower arm. The axis of the wrist joint 690 moves along a straight line offset by this difference relative to the trajectory of the center of the wafer 692. Figure 32D shows the further extension of the right-side linkages 670, 674. The illustrated embodiment combines the advantages of a side-by-side dual scara arrangement, such as a slim profile resulting in a shallow chamber with a small volume, the advantages of a three-dimensional linkage design, and the advantages of a coaxial drive. The bridge 680 on the right-side linkages 670, 674 is lower, the unsupported length of the bridge 680 between the vertical member 684 and the wrist 690 is shorter than in the case of a conventional coaxial dual scara arm, and all joints are below the end effector.Here, while the active arms 670, 674 extend, the inactive arms 668, 672 rotate. In other embodiments of the disclosed models, as described below, arms that do not exhibit this behavior may be provided with different band drive mechanisms having non-circular pulleys instead of the conventional ones disclosed herein. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described above for Figures 25A, 25B, 27, and 28.

[0194] Next, referring to Figures 33A and 33B, a top view and a side view of the robot 700 having an arm 702 are shown, respectively. The arm 702 may have similar features to the arms shown in Figures 21-23, but the forearm length is shorter than the upper arm length, and the bridge is used as described with respect to bridge 680 as an example, with the forearms positioned at the same height. Both linkages are shown in their retracted positions. In Figures 33A and 33B, the right upper arm 708 is positioned above the left upper arm 706. Alternatively, the left upper arm 706 may be positioned above the right upper arm 708. Similarly, the third link and end effector 716 of the right linkages 712, 716 feature a bridge extending directly above the third link and end effector 714 of the left linkages 710, 714. Alternatively, the third link and end effector 714 of the left linkages 710, 714 may feature a bridge that extends directly above the third link and end effector 716 of the right linkages 712, 716. The internal configuration used to drive the individual links of the arms may be similar to that of the embodiments shown in Figures 21 to 23. Each of the two upper arms 706, 708 is driven independently by one motor. The forearms 710, 712 are coupled to the third motor via a band mechanism, each having at least one non-circular pulley. The third links 714, 716, having end effectors, are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that the rotation of one of the upper arms 706, 708 extends and retracts the corresponding linkage along a straight line, while the other linkage remains stationary. The band drive units within each linkage are designed using the methodology described for the embodiments shown in Figures 5 and 6. The kinematic equations presented for the embodiments shown in Figures 5 and 6 can similarly be used for each of the two linkages of the dual arm. Referring similarly to Figures 34A, 34B, and 34C, the arms of Figures 33A and 33B are shown with the right-side linkages 708, 712, and 716 extended.Here, while the active linkages 712, 716 extend, the inactive linkages 706, 710, 714 remain stationary. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. The illustrated embodiment combines the advantages of a parallel dual-scalar mechanism, such as a slim profile resulting in a shallow chamber with a small volume, and the advantages of a coaxial drive. The bridge on the right linkage is lower, the unsupported length of the bridge is shorter than in the case of existing coaxial dual-scalar arms, and all joints are below the end effector. While the active linkage extends, the inactive linkage remains stationary. The active linkage can extend or retract faster without load, potentially resulting in higher throughput. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to those described for Figures 25, 27, and 28.

[0195] Next, referring to Figures 35A and 35B, a top and side view of a robot 730 having arms 732 with linkages both shown in their retracted positions is shown. Each linkage has dual-holder end-effectors 740, 742. A total of four substrates can be supported, with each end-effector supporting two substrates offset from each other. The internal configuration used to drive the individual links of arm 732 may be identical to that in Figures 10 and 11, e.g., Figure 13. A common upper arm 734 is driven by one motor. Each of the two forearms 736, 738 is driven independently by one motor through a band drive with conventional pulleys. The third links with end-effectors 740, 742 are constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. The illustrated embodiment has forearms longer than the upper arms. Alternatively, the forearm may be shorter. The band drive mechanism within each linkage is designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages of the dual arm. Referring similarly to Figure 36, the arms of Figures 35A and 35B are shown when one of the linkages 738, 742 is extended. Note that while the active linkages 738, 742 are extended, the inactive linkages 736, 740 rotate. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Compared to Figures 37 and 38, the end effector does not need to be shaped to avoid interference with the opposite elbow.

[0196] Next, referring to Figures 37A and 37B, a top view and a side view of the robot having arm 750 are shown, respectively. The linkages are both shown in their retracted position, and each linkage has dual holder end effectors 758, 760. The integrated upper arm link 752 may be a single piece, as shown in Figures 37A and 37B, or the upper arm link may be formed by two or more parts 752', 752'', as shown in the example in Figures 38A and 38B. The internal configuration used to drive the individual links of the arm may be identical to that in Figures 15–19, e.g., Figure 19. The integrated upper arm 752 is driven by one motor. Each of the two forearms 754, 756 is driven independently by one motor through a band drive with conventional pulleys. Third links 758, 760 with end effectors are constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. The illustrated embodiments have forearms longer than the upper arms. Alternatively, the forearms may be shorter. The band drive in each linkage is designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may similarly be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts of the robot must move by the same amount in the direction of arm rotation. For one of the end effector assemblies to extend and retract radially along a straight path, the common upper arm drive shaft and the drive shaft coupled to the forearm associated with the active linkage must move in coordination according to the inverse kinematic equations for Figures 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the common upper arm drive shaft so that the inactive linkage remains retracted. Referring similarly to Figure 39, the arms of Figures 37A and 37B are shown when one linkage 756, 760 extends, while the inactive linkages 754, 758 rotate.For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. The illustrated embodiment does not have a bridge. The upper wrist moves directly above one of the wafers on the lower end effector. Here, the arm and the end effector need to be designed such that the upper elbow passes without touching the lower end effector.

[0197] Next, referring to Figures 40A and 40B, a top view and a side view of a robot 750 having an arm 752 are shown, respectively. The linkages are both shown in their retracted positions, and each linkage has dual holder end effectors 792, 794. The internal configuration used to drive the individual links of the arms may be the same as that shown in Figures 21-23. Each of the two upper arms 784, 786 is driven independently by one motor. The forearms 788, 790 are coupled to a third motor via a band mechanism, each having at least one non-circular pulley. The third links, each having end effectors 792, 794, are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that the rotation of one upper arm extends and retracts the corresponding linkage along a straight line, while the other linkage remains stationary. The illustrated embodiment has forearms longer than upper arms. Alternatively, the forearms may be shorter. The band drive units within each linkage are designed using the methodology described for Figures 5 and 6. The kinematic equations presented for Figures 5 and 6 can similarly be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts of the robot must move by the same amount in the direction of arm rotation. For one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the upper arm associated with the active linkage must rotate according to the inverse kinematic equations for Figures 5 and 6, while the other two drive shafts must remain stationary. Referring similarly to Figure 41, the arms of Figures 40A and 40B are shown when one of the linkages 784, 788, and 794 is extended. Note that while the active linkages 784, 788, and 794 are extended, the inactive linkages 786, 790, and 792 may remain stationary. In other words, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends.Alternatively, the left and right linkages may move simultaneously and independently in the radial direction, for example, as seen in Figure 42, where the right linkage extends slightly independently compared to Figure 41. The movement of the elbow of the upper linkage may be limited due to potential interference with the wafer on the lower end effector. This may limit the reach of the robot, as shown in Figure 41. This limitation may be mitigated by slightly extending the lower linkage to provide additional clearance and achieve full reach, as shown in Figure 42. The illustrated embodiment does not have a bridge. The wrist of the upper linkage may move above the wafer on the lower end effector.

[0198] Next, referring to FIGS. 43A and 43B, a top view and a side view of a robot 810 having an arm 812 are shown respectively. The linkages are both shown in their retracted positions, and each linkage has dual holder end effectors 820, 822. The internal configuration used to drive the individual links of the arm may be the same as that of FIGS. 10 - 13. A common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is independently driven by one motor through a band drive having conventional pulleys. The third link having end effectors 820, 822 is constrained by a band drive each having at least one non - circular pulley to offset the effects of the unequal lengths of the upper arm and the forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives within each linkage are designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. Similarly referring to FIGS. 44 and 45, the arms of FIGS. 43A and 43B when the upper linkages 818, 822 are extended are shown. Note that while the active linkages 818, 822 are extending, the non - active linkages 816, 820 rotate. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. FIGS. 44 and 45 show that the wrist joints 824 of the upper linkages 818, 822 do not move directly above the wafer 826 carried by the lower linkages 816, 820 of the arm. The illustrated embodiment does not have a bridge. Compared with FIGS. 46 and 47, the end effector need not be shaped to avoid interference with the opposite elbow.

[0199] Next, referring to Figures 46A and 46B, a top view and a side view of the robot 840 having an arm 842 are shown, respectively. The linkages are both shown in their retracted positions, and each linkage has dual holder end effectors 850, 852. The integrated upper arm link 844 may be a single part, as shown in Figures 46A and 46B, or the upper arm link may be formed by two or more parts 844', 844'', as shown in the example in Figures 47A and 47B. The internal configuration used to drive the individual links of the arm may be identical to that in Figures 15–19, e.g., Figure 19. The integrated upper arm 844 is driven by one motor. Each of the two forearms 846, 848 is driven independently by one motor through a band drive with conventional pulleys. Third links with end effectors 850, 852 are constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and forearms. In the illustrated embodiments, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer. The band drive in each linkage is designed using the methodology described for Figures 1 and 2. Figure 1 The kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts of the robot must move by the same amount in the direction of arm rotation. For one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the common upper arm 844 and the drive shaft coupled to the forearm associated with the active linkage must move in coordination according to the inverse kinematic equations for Figures 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring similarly to Figures 48 and 49, the arms of Figures 46A and 46B are shown when the upper linkages 848, 852 are extended. Here, the inactive linkages 846, 850 rotate while the active linkages 848, 852 are extended.For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Figures 48 and 49 show that the wrist joint 854 of the upper linkage does not move directly over the wafer 856 being transported by the lower linkage of the arm. The illustrated embodiment does not have a bridge, and the wrist joint of the upper linkage does not move directly over the wafer being transported by the lower linkage. Here, the inactive arm rotates less, and the active arm can move faster when extending or retracting without load.

[0200] Next, referring to Figures 50A and 50B, top and side views of a robot 870 having an arm 872 are shown. The linkages are both shown in their retracted positions, and each linkage has dual holder end effectors 880, 882. The integrated upper arm link 874 may be a single part, as shown in Figures 50A and 50B, or the upper arm link may be formed by two or more parts, as shown in the example in Figures 47A and 47B. The internal configuration used to drive the individual links of the arm may be identical to that in Figures 15-19, e.g., Figure 18. The integrated upper arm 874 is driven by one motor. Each of the two forearms 876, 878 is driven independently by one motor through a band drive with conventional pulleys. A third link with end effectors is constrained by a band drive, each having at least one non-circular pulley to compensate for the effects of the unequal lengths of the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive in each linkage may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages of a dual arm. For the arm to rotate, all three drive shafts of the robot must move by the same amount in the direction of arm rotation. For one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the common upper arm 874 and the drive shaft coupled to the forearm associated with the active linkage must move in coordination according to the inverse kinematic equations for Figures 1 and 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm 874 so that the inactive linkage remains retracted. Referring similarly to Figure 51, the arms of Figures 50A and 50B are shown with one linkage 878, 882 extended. Here, while the active linkages 878 and 882 extend, the inactive linkages 876 and 880 rotate.For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. The illustrated embodiment has shorter short bands and shorter forearm links, which may be more rigid, and the forearms are arranged in parallel to facilitate a shallow chamber. Here, the shorter links may allow the inactive arm to rotate more than in Figures 46 and 47, which may be addressed by longer upper arms. A bridge 884 is provided, and the arms and end effectors may be designed so that the bridge 884 passes over the inactive end effector 880 without touching it during the extension movement. Here, the base of the end effector features an angled shape 886, as shown.

[0201] Next, referring to Figures 52A and 52B, a top view and a side view of the robot 900 having an arm 902 are shown, respectively. The linkages are both shown in their retracted positions, and each linkage has a dual holder end effector. The internal configuration used to drive the individual links of the arm may be the same as that shown in Figures 21 to 23. Each of the two upper arms 904, 906 is driven independently by one motor. The forearms 908, 910 are coupled to a third motor via a band mechanism, each having at least one non-circular pulley. The third links, having end effectors 912, 914, are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that the rotation of one of the upper arms 904, 906 extends and retracts the corresponding linkage along a straight line, while the other linkage remains stationary. In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer. The band drive units within each linkage are designed using the methodology described for Figures 5 and 6. The kinematic equations presented for Figures 5 and 6 may also be used for each of the two linkages of the dual arm. For the arm to rotate, all three drive shafts of the robot must move by the same amount in the direction of arm rotation. For one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the upper arm associated with the active linkage must rotate according to the inverse kinematic equations for Figures 5 and 6, while the other two drive shafts must remain stationary. Referring similarly to Figure 53, the arms of Figures 52A and 52B are shown with one linkage 906, 910, and 914 extended. Note that while the active linkages 906, 910, and 914 extend with the bridge 916, the inactive linkages 904, 908, and 912 remain stationary. In other words, the left linkage does not need to move while the right linkage extends, and the right linkage does not need to move when the left linkage extends, but the linkages may move independently in the radial direction.The illustrated embodiment has a shorter band, a shorter link which may result in greater rigidity, and parallel forearms to facilitate a shallow chamber. Alternatively, the forearms may be longer than the upper arms in a configuration with a bridge.

[0202] Next, referring to Figures 54 and 55, a coupled dual arm 930 with opposing end effectors 938 and 940 is shown. Figures 54A and 54B show a top and side view of the robot with the arms, respectively. The linkages are both shown in their retracted positions, and the lateral offset of the end effectors corresponds to the difference in inter-articular length between the upper arm 932 and the forearms 934 and 936. The integrated upper arm link 932 may be a single part, as shown in Figure 54, or the upper arm link may be formed by two or more parts. For example, a two-part design may be lighter using less material, and the left and right parts may be identical components. The internal configuration used to drive the individual links of the arm may be based on those shown with respect to Figures 18 and 19, or on others. The common upper arm 932 is driven by one motor. Each of the two forearms 934 and 936 is driven independently by one motor through a band drive with conventional pulleys. The third link, having end effectors 938, 940, is constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper arm 932 and the forearms 934, 936. The band drive in each linkage is designed using the methodology described with respect to Figure 1, or otherwise. The kinematic equations presented for Figure 1 can similarly be used for each of the two linkages of the dual arm. Figures 55A–55C show the arms of Figure 54 as the first linkage 934, 938 and the second linkage 936, 940 extend from the contracted position. The lateral offset of the end effectors corresponds to the difference in inter-articular lengths of the upper arm 932 and the forearms 934, 936, and the wrist joints 942, 946 move along a straight line offset by this difference relative to the trajectory of the center of the wafer. Note that while the active linkage extends, the inactive linkage rotates. For example, as the first linkage extends, the second linkage rotates, and as the second linkage extends, the first linkage rotates. Figure 55A shows the arm with both linkages in the retracted position.Figure 55B shows the first linkages 934 and 938 extended. Figure 55C shows the second linkages 936 and 940 extended. Because the forearms move in the same plane and the end effectors move in the same plane, the illustrated arms have a low profile, enabling shallow vacuum chambers with small volume. Since the contraction position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arms may be large, making the arms particularly suitable for applications using multiple process modules where the chamber diameter is determined by the size of the slot valves. Due to their low profile, the arms can replace frog-leg type arms with opposing end effectors. In the illustrated embodiment, the forearms are shorter than the upper arms. Alternatively, the forearms may be longer, in which case, for example, the forearms may be at different heights and overlap.

[0203] Referring to Figures 56 and 57, an independent dual arm 960 having opposing end effectors 970 and 972 is shown. Figures 56A and 56B show a top and side view of the robot having the arms. The linkages are both shown in their retracted position. In Figure 56, the upper arm 962 of the first linkage is positioned above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be positioned above the upper arm of the first linkage. The internal configuration used to drive the individual links of the arms may be based on or different from Figure 23, where each of the two upper arms 962 and 964 may be driven independently by one motor. The forearms 966 and 968 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. The third link having end effectors 970 and 972 is constrained by a band drive unit each having at least one non-circular pulley. The band drive mechanism is designed so that the rotation of one arm extends and contracts the corresponding linkage along a straight line, while the other linkage remains stationary. The band drive mechanism within each linkage is designed using the methodology described for Figure 5. The kinematic equations presented for Figure 5 can similarly be used for each of the two linkages of the dual arm. Figures 57A–57C show the arm of Figure 56 as the first linkages 962, 966, 970 and the second linkages 964, 968, 972 extend from the contracted position. Here, the inactive linkage remains stationary (though not necessarily required) while the active linkage extends. That is, the second linkage does not move while the first linkage extends, and the first linkage does not move while the second linkage extends. Because the forearms move in the same plane and the end effectors move in the same plane, the arms have a thin profile, enabling a shallow vacuum chamber with a small volume.Because the contraction position of the wrist of one linkage is constrained by the wrist of the other linkage, the arm's retraction radius is increased, making the arm particularly suitable for applications using multiple process modules where the chamber diameter is determined by the size of the slot valves. Due to its low profile, the arm can replace a frog-leg type arm with opposing end effectors. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, in which case, for example, the forearms may be at different heights and overlap.

[0204] Next, referring to Figure 58, a coupled dual arm 990 is shown with angularly offset end effectors 998, 1000. Figures 58A and 58B show a top and side view of the robot with the arms. The linkages are both shown in their retracted positions. The lateral offsets 1002, 1004 of the end effectors correspond to the difference in inter-articular length between the upper arm 992 and the forearms 994, 996. The integrated upper arm link 992 may be a single part, as shown in Figure 59, or it may be formed by two or more parts. The internal configuration used to drive the individual links of the arm is based on or different from Figures 18 and 19. Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994, 996 may be driven independently by one motor through a band drive with a conventional pulley. The third link, having end effectors 998, 1000, is constrained by a band drive, each having at least one non-circular pulley to compensate for the unequal lengths of the upper and lower arms. The band drive in each linkage is designed using the methodology described for Figure 1, or otherwise. The kinematic equations presented for Figure 1 can similarly be used for each of the two linkages of the dual arm. Referring similarly to Figures 59A–59C, the arms of Figure 58 are shown as the left linkages 994, 998 and the right linkages 996, 1000 are extended. The lateral offsets 1002, 1004 of the end effectors correspond to the difference in inter-articular length of the upper and lower arms, and the wrist joint moves along a straight line offset by this difference relative to the trajectory of the center of the wafer. Here, the inactive linkage rotates while the active linkage extends. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. Figure 59A shows the arm with both linkages in the retracted position. Figure 59B shows the left linkages 994 and 998 extended. Figure 59C shows the right linkages 996 and 1000 extended. Here, the inactive arm rotates while the active arm extends.In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, in which case, for example, the forearms may be at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

[0205] Next, referring to Figure 60, an independent dual arm 1030 is shown having angularly offset end effectors 1040, 1042. Here, Figures 60A and 60B show a top and side view of the robot having the arms. The linkages are both shown in their retracted positions. In Figure 60, the right upper arm 1034 is positioned below the left upper arm 1032. Alternatively, the left upper arm may be positioned below the right upper arm. The internal configuration used to drive the individual links of the arms may be based on Figure 23. Each of the two upper arms 1032, 1034 may be driven independently by a single motor. The forearms are coupled to a third motor via a band mechanism, each having at least one non-circular pulley. The third link, having end effectors 1040, 1042, is constrained by a band drive unit, each having at least one non-circular pulley. The band drive mechanism is designed such that the rotation of one upper arm 1032, 1034 extends and contracts the corresponding linkage along a straight line, while the other linkage remains stationary. The band drive mechanism within each linkage is designed using the methodology described for Figure 5, or by other means. The kinematic equations presented for Figure 5 can similarly be used for each of the two linkages of the dual arm. Figures 61A–61C show the arms of Figure 60 as the left linkages 1032, 1036, 1040 and then the right linkages 1034, 1038, 1042 extend. Here, while the active linkage extends, the inactive linkage remains stationary (though it is not required to). That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Here, while the active linkage extends, the inactive linkage remains stationary. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, in which case, for example, the forearms may be at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

[0206] As an example relating to Figure 62 or an alternative example, the third link and end effectors 1060, 1062, which may each be called a third link assembly, may be designed such that their centers of mass 1064, 1066 are on or near the linear trajectory of the wrist joints 1068, 1070, respectively, as the corresponding linkage of the arm extends and retracts. This reduces the moment due to the inertial force acting at the center of mass of the third link assembly and the reaction force at the wrist joint, and therefore reduces the load on the band mechanism constraining the third link assembly. Here, the third link assembly may be further designed such that its center of mass is on one side of the wrist joint trajectory when a payload is present and on the other side of the trajectory when a payload is absent. Alternatively, since the best linear tracking performance is usually required with a payload, the third link assembly may be designed such that its center of mass is substantially on the wrist joint trajectory when a payload is present, as shown in Figure 62. In Figure 62, 1L is the linear trajectory of the center of the wrist joint of the left linkage, 2L is the center of the wrist joint of the left linkage at 1070, 3L is the center of mass of the third link assembly of the left linkage at 1066, 4L is the force acting on the third link assembly of the left linkage when the left linkage accelerates at the start of extension motion (or decelerates at the end of contraction motion), and 5L is the inertial force acting at the center of mass of the third link assembly of the left linkage when the left linkage accelerates at the start of extension motion (or decelerates at the end of contraction motion). Similarly, 1R is the linear trajectory of the wrist joint center of the right linkage, 2R is the wrist joint center of the right linkage 1068, 3R is the center of mass of the third link assembly of the right linkage 1064, 4R is the force acting on the third link assembly of the right linkage as the right linkage decelerates at the end of its extension motion (or accelerates at the start of its contraction motion), and 5R is the inertial force acting at the center of mass of the third link assembly of the right linkage as the right linkage decelerates at the end of its extension motion (or accelerates at the start of its contraction motion).In the illustrated embodiment, a dual wafer end effector is provided. In alternative embodiments, any suitable geometric arrangement of end effectors and arms or links may be provided.

[0207] In alternative embodiments, the upper arm in any embodiment of this embodiment can be driven by a motor either directly or via any type of coupling or transmission mechanism. Any transmission ratio may be used. Alternatively, the band drive mechanism that actsuates the second link and constrains the third link can be replaced by any other mechanism having equivalent functionality, such as a belt drive, a cable drive, circular and non-circular gears, a linkage-based mechanism, or any combination thereof. Alternatively, for example, in the dual-arm and quad-arm embodiments of this embodiment, the third link of each linkage can be constrained to maintain the end effector radially via a conventional two-stage band mechanism that synchronizes the third link with a pulley driven by a second motor, similar to the single-arm concept in Figure 9. Alternatively, the two-stage band mechanism can be replaced by any other suitable mechanism, such as a belt drive, a cable drive, a gear drive, a linkage-based mechanism, or any combination thereof. Alternatively, the upper arms in the dual-arm and quad-arm configurations of this embodiment do not have to be coaxially arranged. The upper arms may have separate shoulder joints. The two linkages of the dual-arm and quad-arm do not have to have upper arms and forearms of the same length. The length of the upper arm of one linkage may differ from the length of the upper arm of the other linkage, and the length of the forearm of one linkage may differ from the length of the forearm of the other linkage. The forearm-to-upper arm ratio may differ for the two linkages. In the dual-arm and quad-arm configurations of this embodiment where the link heights of the left and right linkages are different, the left and right linkages can be interchanged. The two linkages of the dual-arm and quad-arm do not have to extend along the same direction. The arms can be configured so that each linkage extends in a different direction. The two linkages in any configuration of this embodiment may consist of more or fewer than three links (first link = upper arm, second link = forearm, third link = link with end effector).In the dual-arm and quad-arm configurations of this embodiment, each linkage may have a different number of links. In the single-arm configuration of this embodiment, the third link can transport multiple end effectors. Any suitable number of end effectors and / or material holders can be transported by the third link. Similarly, in the dual-arm configuration of this embodiment, each linkage can transport any suitable number of end effectors. In either case, the end effectors can be positioned in the same plane, stacked vertically, arranged in a combination of the two, or arranged in any other suitable manner. Furthermore, the configuration of the dual-arm configuration is described, for example, in relation to the pending U.S. Patent Application No. 13 / 670,004, filed November 6, 2012, titled "Robot System with Independent Arms," ​​which is incorporated herein by reference in its entirety, each arm may be independently operable, for example, independently operable in rotation, extension and / or z (vertical). Therefore, all such changes, combinations, and variations are encompassed.

[0208] Referring here to Figure 63, an exemplary pulley graph representation 1100 is shown. The exemplary pulley shape may be for arms with unequal link lengths, as will be discussed later. For example, graph 1100 may show the shape of a wrist pulley where the elbow pulley is circular. Here, the following design example is used in the figure: Re / l2 = 0.2, where Re is the radius of the elbow pulley and l2 is the interarticular length of the forearm. Alternatively, any suitable ratio may be provided. For clarity, the graph shows an extreme design example compared to a pulley for an equal-link arm. The outermost shape 1110 has l2 / l1 = 2, where l2 is the interarticular length of the forearm and l1 is the interarticular length of the upper arm, representing, for example, a longer forearm in this case. For example, the intermediate shape 1112 for equal link lengths has l2 / l1 = 1. The innermost shape 1114 has l2 / l1 = 0.5, representing, for example, a shorter forearm in this case. In the illustrated embodiment, a polar coordinate system 1120 is used. Here, the radial distance is normalized with respect to the radius of the elbow pulley and expressed, for example, as a multiple of the elbow pulley radius. In other words, Rw / Re is shown, where Rw represents the polar coordinate of the wrist pulley and Re represents the elbow pulley. The angular coordinates are in degrees, with zero pointing in the direction along the end effector direction 1122, for example, the end effector points to the right in the figure.

[0209] Next, referring to Figures 64 and 65, two additional configurations of arms 1140 and 1160 having unequal link lengths are shown. Arm 1140 is shown having a forearm 1144 that is longer than the upper arm 1142, here the single-arm configuration may utilize features such as those disclosed in relation to Figures 1-4 and 5-8 or others. In the illustrated embodiment, two end effectors 1146, 1148 supporting their respective substrates 1150, 1152 are firmly connected to each other and oriented in opposite directions. The substrates move along a radial path that coincides with the center 1156 of the robot 1140 and is offset (1154) from the wrist, as shown. Similarly, arm 1160 is shown having a forearm 1164 that is shorter than the upper arm 1162, here the single-arm configuration may utilize features such as those disclosed in relation to Figures 1-4 and 5-8 or others. In the illustrated embodiment, two end effectors 1166, 1168 supporting the respective substrates 1170, 1172 are firmly connected to each other and oriented in opposite directions. The substrates move along a radial path that coincides with the center 1176 of the robot 1160 and is offset (1174) from the wrist, as shown. Features of the disclosed embodiment may be shared with any of the other disclosed embodiments.

[0210] Referring here to Figures 66 and 67, this disclosure describes a dual-arm robot 1310 having a stacked parallel end-effector configuration. This device can be used in combination with transport mechanisms and devices such as those disclosed in U.S. Patent Publication 2013 / 0071218, entitled “Low Variability Robot,” published on March 21, 2013, based on U.S. Patent Application No. 13 / 618,117 filed on September 14, 2012, or in U.S. Patent Application No. 14 / 601,455, entitled “Substrate Transport Platform,” filed on January 21, 2015, both of which are incorporated herein by reference in their entirety. Alternatively, this embodiment may be used in any suitable device or application. The disclosed apparatus may provide robot 1310 with two end effectors that (i) have a small footprint so as to be able to move and rotate within a narrow tunnel, (ii) both end effectors can be used independently or simultaneously to access the same station, and (iii) can be used independently or simultaneously to access a parallel offset station.

[0211] Exemplary embodiments of the robot 1310 are schematically shown in Figures 66A–66D and 67A–67D. The robot may consist of a robot drive unit 1312 having a pivot base 1314 centered on axis 1334, and a robot arm 1316. The robot arm 1316 may feature two linkages, namely a left linkage 1318 and a right linkage 1320. Figures 66A–66D show the robot with both linkages retracted, and Figures 67A–67D show the robot with the left linkage 1318 extended.

[0212] The left linkage 1318 may consist of a left upper arm 1322, a left forearm 1324, and a left end effector 1326. The left upper arm 1322 may be connected to the base via a rotary joint or axis 1336, the left forearm 1324 may be connected to the left upper arm 1322 by another rotary joint or axis 1338, and the left end effector 1326 may be connected to the left forearm 1324 by yet another rotary joint or axis 1340.

[0213] Similarly, the right linkage 1320 may consist of a right upper arm 1328, a right forearm 1330, and a right end effector 1332. The right upper arm 1328 may be connected to the base via a rotary joint or axis 1342, the right forearm 1330 may be connected to the right upper arm 1328 by another rotary joint or axis 1344, and the right end effector 1332 may be connected to the right forearm 1330 by yet another rotary joint or axis 1346.

[0214] The interarticular length of the left forearm may be longer than the interarticular length of the left upper arm. Alternatively, the interarticular length of the left forearm may be equal to the interarticular length of the left upper arm. In yet another alternative, the left forearm and left upper arm may have any other preferred lengths.

[0215] Similarly, the interarticular length of the right forearm may be longer than the interarticular length of the right upper arm. Alternatively, the interarticular length of the right forearm may be equal to the interarticular length of the right upper arm. In yet another alternative, the right forearm and right upper arm may have any other preferred lengths.

[0216] In the examples in Figures 66A–66D and 67A–67D, the interarticular lengths of the left and right upper arms, as well as the left and right forearms, are shown to be the same. Similarly, the dimensions of the left and right end effectors, including length and lateral offset, are also shown to be the same. However, the linkage may feature any preferred dimensions of the upper arms, forearms, and end effectors.

[0217] In order to enable two end effectors to access the parallel offset stations simultaneously, the distance between the joints connecting the left upper arm and the right upper arm to the base may be selected to satisfy the following relationship. D = 2d0 (1)

[0218] Here, D is the center-to-center distance (m) between the parallel offset stations, and d0 is the distance (m) between the joints connecting the left upper arm and the right upper arm to the base.

[0219] Furthermore, in order to enable two end effectors to access the same station simultaneously, the dimensions of the linkage may be selected to satisfy the following relationship. d0 = l2L - l1L + d3L + l2R - l1R + d3R (2)

[0220] The following terms are used in the above equation (2). d3L is the lateral offset (m) of the left end effector, d3R is the lateral offset (m) of the right end effector, l1L is the inter-joint length (m) of the left upper arm, l1R is the inter-joint length (m) of the right upper arm, l2L is the inter-joint length (m) of the left forearm, and l2R is the inter-joint length (m) of the right forearm.

[0221] When the robot arm is symmetric, that is, when the left and right linkages have the same dimensions, equation (2) can be simplified as follows. d0 = 2(l2 - l1 + d3) (3)

[0222] Here, d3 is the lateral offset (m) of the end effector, l1 is the inter-joint length (m) of the upper arm, and l2 is the inter-joint length (m) of the forearm.

[0223] Figures 68A and 68B schematically show exemplary mechanisms 1398 and 1438 that may be used to drive the robot's base and individual links, i.e., the upper arm, forearm, and end effector. As shown in Figures 68A and 68B, the base may be driven by drive shafts 1400 and 1448, for example, T0.

[0224] The left upper arms 1402, 1454 may be actuated by drive shafts T1L 1420, 1440. The left forearms 1406, 1456 may be coupled to another drive shaft T2L 1422, 1442 via a band mechanism having at least one non-circular pulley. The band mechanism may be designed so that the rotation of the left upper arm causes the left wrist joint, i.e., the joint connecting the left end effector to the left forearm, to extend and contract along a straight line parallel to the desired straight path of the left end effector.

[0225] The left end effector 1410 may also be constrained by another band mechanism having at least one non-circular pulley to compensate for the unequal length of the left upper arm and left forearm, so that the left end effector may move along a straight line while maintaining a desired orientation.

[0226] Alternatively, if l1L = l2L, a conventional pulley may be used, as shown in Figure 68B. In this embodiment, the band mechanism connecting the left forearm to shaft T2L is designed such that the diameter of the pulley connected to shaft T2L is twice the diameter of the pulley connected to the left forearm. The band mechanism constraining the left end effector is designed such that the diameter of the pulley attached to the left upper arm is half the diameter of the pulley attached to the left end effector.

[0227] Similarly, the right upper arms 1404, 1450 may be actuated by drive shafts T1R 1424, 1444. The right forearms 1408, 1452 may be coupled to another drive shaft T2R 1426, 1446 via a band mechanism having at least one non-circular pulley. The band mechanism may be designed so that the rotation of the right upper arm causes the right wrist joint, i.e., the joint connecting the right end effector to the right forearm, to extend and contract along a straight line parallel to the desired straight path of the right end effector 1412.

[0228] The right end effector 1412 is constrained by another band mechanism having at least one non-circular pulley that compensates for the unequal length of the right upper arm and right forearm, so that the right end effector may move along a straight line while maintaining a desired orientation.

[0229] Alternatively, if l1R = l2R, a conventional pulley can be used, as shown in Figure 68B. In this embodiment, the band mechanism connecting the right forearm to shaft T2R is designed such that the diameter of the pulley connected to shaft T2R is twice the diameter of the pulley connected to the right forearm. The band mechanism constraining the right end effector is designed such that the diameter of the pulley attached to the right upper arm is half the diameter of the pulley attached to the right end effector.

[0230] For the entire robot arm to rotate, all drive shafts, namely T0, T1L, T2L, T1R, and T2R, must move by the same amount relative to the fixed reference frame in the desired direction of rotation of the arm (or drive shaft T0 may need to move, while the other drive shafts can be considered stationary relative to the base). This is schematically shown in Figures 69A to 69C. In this particular example, the entire robot arm rotates 180 degrees counterclockwise.

[0231] For the left end effector to extend and retract along a straight path, the drive shaft T1L must move by an angle determined based on the inverse kinematic equation of the left linkage while shafts T0 and T2L are stationary. A robot 1500 having a left arm 1502 and a right arm 1504 with the left end effector extended from the initial position in Figure 69A is schematically shown in Figure 69D.

[0232] Similarly, for the right end effector to extend and retract along a straight path, the drive shaft T1R must move by an angle determined based on the inverse kinematic equations of the right linkage while shafts T0 and T2R are stationary. A robot with the right end effector extended from its initial position in Figure 69A is schematically shown in Figure 69E.

[0233] Both the left and right end effectors of the robot may extend and retract simultaneously along a straight path by rotating the drive shafts T1L and T1R in opposite directions and by the same amount, provided that the left and right linkages are of the same dimensions. A robot with both the left and right end effectors extended from the initial position in Figure 69A is schematically shown in Figure 69F.

[0234] With respect to Figures 69D to 69F, the robot can extend and retract each end effector independently or simultaneously relative to the same station. Therefore, the robot can lift and place materials such as semiconductor wafers relative to the same station independently or simultaneously using both end effectors along the linear path 1510.

[0235] The left linkage 1502 and the right linkage 1504 can also be rotated independently. For the left linkage to rotate, the drive shafts T1L and T2L must move by the same amount in the desired rotational direction. Similarly, for the right linkage to rotate, the drive shafts T1R and T2R must move by the same amount in the desired rotational direction.

[0236] When the left and right linkages rotate individually by 180 degrees, the left and right end effectors are offset laterally, as shown in the exemplary diagrams in Figures 70A to 70C. In this particular example, the left linkage 1502 rotates clockwise while the right linkage 1504 rotates counterclockwise (to prevent the risk of collision between the left and right wrist joints). However, the left and right linkages may rotate sequentially and independently in the same direction or in other suitable ways.

[0237] As a result of the individual rotations of the left and right linkages described above, the arm is reconfigured such that the centers of the left and right end effectors are offset laterally by a distance D, provided that the dimensions of the robot satisfy the conditions of equations (1) and (2).

[0238] If the reconstruction of the end effector offset described above by the individual rotations of the left and right linkages follows either before or after the rotation of the entire arm, their movements may be conveniently harmonized to minimize the overall duration.

[0239] When the robot reaches the position shown in Figure 70C, the left end effector may be extended and retracted again along the straight path 1512 by moving the drive shaft T1L while keeping shafts T0 and T2L stationary. Similarly, the right end effector may be extended and retracted along the straight path by moving the drive shaft T1R while keeping shafts T0 and T2R stationary. Finally, both the left and right end effectors of the robot may be extended and retracted simultaneously along the straight path by rotating the drive shafts T1L and T1R in opposite directions and by the same amount, provided that the left and right linkages are of the same dimensions.

[0240] A robot with its left end effector extended from its initial position in Figure 70C is schematically shown in Figure 70D. A robot with its right end effector extended from its initial position in Figure 70C is schematically shown in Figure 70E. A robot with both its left and right end effectors extended from their initial positions in Figure 70C is schematically shown in Figure 70F.

[0241] With respect to Figures 70E to 70F, the robot can extend and retract the end effector relative to the two parallel offset stations. Therefore, the robot can lift and place materials such as semiconductor wafers relative to the two parallel offset stations, either independently or simultaneously.

[0242] For example, if the access paths to the parallel offset station are not parallel, as in paths 1514 or 1516 in Figure 71, the robot may rotate the left and right linkages independently to align the direction of their extension / contraction paths with the access paths to the station. Examples of such situations are schematically shown in Figures 71A to 71C. Assuming the initial position in Figure 71A, the arm may be reconfigured by rotating the left and right linkages, thereby offsetting the end effectors laterally and angularly, as shown in Figure 71B. In this particular example, the angular offset between the left and right end effectors is 30 degrees. From the contracted position in Figure 71B, the left linkage may be extended independently or simultaneously, as shown in Figure 71C.

[0243] The robot may also access stations 180 degrees apart, independently or simultaneously, as shown in the illustrative Figures 71D and 71E. In this particular example, assuming the starting position in Figure 71A, the left and right linkages may first be rotated to the configuration in Figure 71D, and then the left end effector and / or the right end effector may be extended independently or simultaneously, as shown in Figure 71E.

[0244] In Figure 71E, both the left and right linkages are shown extended; however, in an alternative embodiment, only one of the two linkages may be extended. In this configuration, the linkage reach (measured from the center of the robot, represented by the axis of the drive shaft T0) is longer, so this configuration may be used for stations located far from the robot.

[0245] Depending on the number of degrees of freedom required for a particular application, the robot may be driven using a 3- to 5-axis drive mechanism.

[0246] As shown in two examples 1600 and 1700 in Figures 72A and 72B and Figures 72C and 72D, the three-axis drive mechanism may include three independently controlled motors M0, M1, and M2.

[0247] Of Figures 72A to 72D, Figures 72A and 72B show a top view and a side view, respectively, of an exemplary configuration 1600 of the robot drive unit and arm base 1618. Here, motor M0 is directly coupled to shaft T0 1602 to actuate the base 1618, motor M1 1604 is directly attached to shaft T1L 1610 to drive the left upper arm, and motor M2 1606 is directly attached to shaft T2R 1616 which is coupled to the right forearm. Furthermore, two belt mechanisms 1620 and 1622 are utilized, respectively, so that shafts T1L 1610 and T1R 1614 rotate in opposite directions to each other, and shafts T2L 1612 and T2R 1616 rotate in opposite directions to each other. This is similarly achieved by a crossover band mechanism 1620 between shafts T1L and T1R, and another crossover band mechanism 1622 between shafts T2L and T2R.

[0248] Alternatively, the drive unit 1700 may have motors M0 1702, M1 1704, and M2 1706 arranged in the drive unit, and motion may be transmitted from motors M1 and M2 to shafts T1L 1710, T1R 1714, and T2L 1712, T2R 1716, respectively, using band drive units 1720, 1722, as shown in the examples in Figures 72C and 72D.

[0249] In yet another alternative, any suitable combination of direct coupling and banding mechanisms may be employed between the motor and the drive shaft. In general, any suitable means of motion transmission between the motor and the drive shaft that provides the desired motion relationship may be used.

[0250] When the three-axis drive mechanism according to the embodiment shown in Figures 72A to 72D is used, the robot may perform all operations defined in Figures 69 to 71, except for the independent extension and contraction of the left and right linkages (Figures 69D, 69E, 70D, and 70E).

[0251] The 4-axis drive mechanism may comprise four independently controlled motors, as shown in the examples 1800 and 1900 in Figures 73A and 73B. Figures 73A and 73B show a top and side view of the robot drive unit and arm base 1802. Motors M0 1804, M1L 1808, and M1R 1810 may be used to independently actuate shafts T0 1804, T1L 1808, and T1R 1810, respectively. Motor M2 1806 may be used to actuate shafts T2L 1812 and T2R 1814 so that the two shafts rotate in opposite directions. In the particular example in Figures 73A and 73B, this is achieved via a straight band mechanism 1820 between a pulley coupled to motor M2 and shaft T2L, and a crossover band mechanism 1822 between another pulley coupled to motor M2 and shaft T2R.

[0252] Alternatively, any combination of direct coupling and banding mechanisms or any other suitable motion transmission means between the motor and the drive shafts is employed to facilitate the independent operation of shafts T0, T1L, and T1R, as well as the coupled operation of shafts T2L and T2R.

[0253] When such a four-axis drive mechanism is used, the robot may perform all the operations shown in Figures 69 to 71, including independent extension and contraction of the left and right linkages.

[0254] The 5-axis drive unit 1900 may comprise five independently controlled motors M0 1904, M1L 1906, M2L 1908, M1R 1910, and M2R 1912. Each of these motors may be coupled directly to the drive shafts T0, T1L, T2L, T1R, and T2R, respectively, via a band drive unit by extending the examples in Figures 72C and 72D, using a combination of direct coupling and band mechanisms, or in any other preferred method that facilitates the transmission of motion from the motor to the drive shafts. Figure 73C shows a top view of the drive unit 1900 and base 1902, and Figure 73D shows a side view.

[0255] When a 5-axis drive mechanism is used, the robot may perform all the operations shown in Figures 69 to 71. In addition, the left and right linkages can be operated in a completely independent manner, including independent rotation, which is not possible with 3-axis and 4-axis drive mechanisms.

[0256] The internal configuration of another example of the base and linkage of robot 2010 in Figure 66 is schematically shown in Figure 74A. Here again, the base 2012 may be driven by the drive shaft T0.

[0257] The left upper arm 2014 may be actuated by a drive shaft T1L. The left forearm may be actuated by another drive shaft T2L via a band mechanism having a conventional pulley. The left end effector may be constrained by another band mechanism having at least one non-circular pulley to compensate for the unequal length of the left upper arm and left forearm, so that the left end effector may move along a straight line while maintaining a desired orientation. Alternatively, if l1L = l2L, a conventional pulley may be used, as shown in Figure 74B, with an arm 2030 having a base 2032, a left arm 2034, and a right arm 2036.

[0258] Similarly, the right upper arm 2016 may be actuated by drive shaft T1R. The right forearm may be actuated by another drive shaft T2R via a band mechanism having a conventional pulley. The right end effector may be constrained by another band mechanism having at least one non-circular pulley to compensate for the unequal length of the right upper arm and right forearm, so that the right end effector may move along a straight line while maintaining a desired orientation. Alternatively, if l1R = l2R, a conventional pulley may be used as shown in Figure 74B.

[0259] For the entire robotic arm to rotate, all drive shafts, namely T0, T1L, T2L, T1R, and T2R, must move by the same amount relative to the fixed reference frame in the desired direction of rotation of the arm (or drive shaft T0 must move, while the other drive shafts remain stationary relative to the base).

[0260] For the left end effector to extend and contract along a linear path, drive shafts T1L and T2L must move in coordination based on the inverse kinematic equations of the left linkage. Similarly, for the right end effector to extend and contract along a linear path, drive shafts T1R and T2R must move in coordination based on the inverse kinematic equations of the right linkage. An example of the kinematic equations can be found above.

[0261] Both end effectors of the robot can extend and retract along a straight path by simultaneously rotating the drive shafts T1L, T2L, and T1R, T2R in the manner described above for independently extending the left and right end effectors.

[0262] The left and right linkages can also be rotated independently. For the left linkage to rotate, drive shafts T1L and T2L must move by the same amount in the desired rotational direction. Similarly, for the right linkage to rotate, drive shafts T1R and T2R must move by the same amount in the desired rotational direction. As with Figures 68A and 68B, when the left and right linkages rotate 180 degrees independently, the left and right end effectors are offset laterally (see Figures 70A-70C).

[0263] Considering the above-mentioned motor capabilities, a robot having the internal configuration shown in Figures 74A and 74B may perform the same operations outlined in Figures 69 to 71.

[0264] The base and linkage, having the internal configurations shown in Figures 74A and 74B, may be driven by the 3-axis and 5-axis drive mechanisms shown in Figures 72, 73C, and 73D, respectively.

[0265] Another exemplary embodiment of the robot 2100 is shown in Figures 75A and 75B. Figure 75A shows a top view of the robot with both linkages retracted, and Figure 75B shows the robot with both end effectors extended.

[0266] An example of the internal configuration of a robot, 2330, is schematically shown in Figure 76A. In this figure, a base 2332 with linkages 2334 and 2336 with equal-length upper and lower arm and a circular pulley is shown, but unequal-length and non-circular pulleys may also be used.

[0267] The robot may be operated by the drive mechanism described earlier with reference to Figures 72 and 73.

[0268] An alternative internal configuration 2360 of the robot in Figures 75A and 75B is schematically shown in Figure 76B. In this figure, a base 2362 and linkages 2364, 2366 with circular pulleys and upper and lower arms of equal length are shown, but non-circular pulleys of unequal length may be used.

[0269] The robot may be operated by the drive mechanism shown in Figures 72, 73C, and 73D.

[0270] Another exemplary embodiment of robot 2200 is shown in Figures 75C and 75D. Figure 75C shows a top view of the robot with both linkages retracted, and Figure 75D shows the robot with both end effectors extended. Figures 75C and 75D show the linkage of the robot in a left-handed configuration. Alternatively, the linkage may be configured in a right-handed configuration, as shown in Figures 75E and 75F with robot 2300.

[0271] An exemplary internal configuration 2390 of the embodiment shown in Figures 75C and 75D is schematically shown in Figure 76C. Similarly, an exemplary internal configuration 2430 of the embodiment shown in Figures 75E and 75F is schematically shown in Figure 76D. In Figures 76C and 76D, linkages 2394, 2396, 2434, and 2436 are shown with equal-length upper and lower arms and circular pulleys, but unequal-length and non-circular pulleys may be used.

[0272] The robot may be operated by the drive mechanisms shown in Figures 77A-77D, 78A-78B, and 73C and 73D. In Figures 77A and 77B, the drive unit 2500 has a base 2504 driven by motor M0 2502. M1 2506 drives T1l 2510, M2 2508 drives T2r 2516, T1l 2510 and T1r 2514 are constrained by bands, and T2l 2512 and T2r 2516 are constrained by bands. In Figures 77C and 77D, the drive unit 2560 has a base 2562 driven by motor M0 2564. M1 2566 drives T1l 2570, M2 2568 drives T2r 2576, T1l 2570 and T1r 2574 are constrained by band, and T2l 2572 and T2r 2576 are constrained by band. In Figures 78A and 78B, the drive unit 2700 has a base 2702 driven by motor M0 2704. M1l 2706 drives T1l, M1r 2708 drives T1r, and M2 2710 drives T2r 2714 and T2l 2712 by band.

[0273] For example, if the three-axis drive mechanism according to the embodiment in Figure 77 is used, the robot may perform all operations defined in Figures 69 and 70, except for the independent extension and contraction of the left and right linkages (Figures 69D, 69E, 70D, and 70E). The robot cannot simultaneously extend and contract along the non-parallel and opposing paths in Figure 71.

[0274] When a four-axis drive mechanism such as the embodiment shown in Figure 78 is used, the robot may perform all operations shown in Figures 69 and 70, including independent extension and contraction of the left and right linkages. The robot cannot simultaneously extend and contract along the non-parallel and opposing paths shown in Figure 71.

[0275] When a 5-axis drive mechanism is used, the robot may perform all the operations shown in Figures 69 to 71. In addition, the left and right linkages can be operated in a completely independent manner, including independent rotation, which is not possible with 3-axis and 4-axis drive mechanisms.

[0276] This disclosure demonstrates a preferred reach-to-storage volume ratio. Combined with the three-axis drive mechanism shown in Figures 77A and 77B, it also achieves a low profile and low complexity. In addition, this disclosure, when combined with a four-axis drive mechanism, accommodates independent extension of the left and right linkages.

[0277] Alternative internal configurations 2800 and 2830 of the exemplary embodiments shown in Figures 75A to 75D are schematically shown in Figures 79A and 79B, respectively. These figures show bases 2802 and 2832 with linkages 2804, 2806, 2834, and 2836 with equal-length upper and lower arms and circular pulleys, although unequal-length and non-circular pulleys may be used.

[0278] The robot may be operated by the drive mechanism shown in Figures 77, 73C, and 73D.

[0279] Although the left and right linkages are shown with the same dimensions in the figure, the left linkage may have different dimensions from the right linkage, and the drive unit may be configured to reflect the dimensional difference.

[0280] A robotic arm may be designed such that some of its links, such as the upper arm and / or forearm, are below one or both of the end effectors, while the other links are above one or both of the end effectors.

[0281] When the terms “band mechanism” and “band drive system” are used, they refer collectively to means of transmitting motion, force, and / or torque, including bands, belts, cables, gears, or any other suitable mechanism.

[0282] Although the robot's motors are shown throughout the text as being directly attached to the shafts, pulleys, and other driven components in the figures, they may be coupled to the driven components via additional bands, belts, cables, gears, or any suitable mechanism capable of transmitting motion, force, and / or torque.

[0283] Throughout the text, the robot's motors are depicted within the drive unit or base in the drawings, but the motors may also be located within the robot arm, for example, as part of the upper or lower arm, or incorporated into the robot's rotary joints.

[0284] The robot's drive unit may further include a vertical lift mechanism for adjusting the height of the entire robot arm. Alternatively, the drive unit may include two vertical lift mechanisms, one for the left linkage and the other for the right linkage, to independently adjust the heights of the left and right linkages. Here, the end effectors may be stacked or set to the same height, or otherwise positioned independently along the z-axis.

[0285] In alternative embodiments, any number and any type of suitable mechanisms may be used within the robot drive unit and / or robot arm to control the height of the left and right end effectors of the robot.

[0286] The robot may further include a traverser mechanism that allows it to move along the tunnel, for example, if the robot is installed inside the tunnel.

[0287] In another embodiment, the robot may be designed to operate in an inverted configuration, for example, using a support provided from the top rather than the bottom.

[0288] To provide a system with four end effectors capable of rapid material changes, the robot may be combined with another robot of the same or similar type, for example, in an inverted configuration.

[0289] The robot may be designed for operation in special environments, such as a vacuum. This design may include the use of static and / or dynamic seals, as well as other means of isolating some of the robot's components from the operating environment.

[0290] Figure 80A shows a system 2900 having a robot. The robot drive unit 2904 may be configured to be movable relative to the stationary part 2902 of the system, as indicated by arrows 2906 and 2908. For example, the robot drive unit may be on rails, linear bearings, magnetic bearings, or coupled to the stationary part of the system in any preferred way that allows the robot drive unit to move relative to the stationary part of the system. For example, the robot drive unit may be actuated by an electric linear motor having windings in the drive unit, by an electric linear motor having windings in the stationary part of the system, via a magnetic coupling, using a pneumatic or hydraulic actuator, via a ball screw, via a cable or belt, or by any other preferred mechanism that can actuate the robot drive unit relative to the stationary part of the system. As previously mentioned, the robot drive unit may comprise a pivot base and a robot arm. In Figure 80A, the pivot base is actuated relative to the robot drive unit, as indicated by the arrows.

[0291] Figure 80B shows a system 3000 in which the pivot base 3004 is configured to act directly relative to the stationary part 3002 of the system, as indicated by arrows 3006 and 3008 on the sides of the pivot base. When both sides of the pivot base are actuated synchronously by the same amount in the same direction, the entire robot translates in the corresponding direction. When the sides of the pivot base are actuated synchronously by the same amount in opposite directions, the pivot base rotates while its center remains fixed. Any combination of translation and rotation can be achieved by acting the sides of the pivot base accordingly. As an example, the base may be actuated by an electric linear motor having windings in the pivot base, by an electric linear motor having windings in the stationary part of the system, via a magnetic coupling, via a ball screw, via a cable or belt, or by any other suitable mechanism that can actuate the pivot base relative to the stationary part of the system.

[0292] In one embodiment of an exemplary model, the apparatus comprises at least one drive unit, a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, the first upper arm being connected to the at least one drive unit by a first rotation axis, and a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, the second upper arm being connected to the at least one drive unit by a second rotation axis spaced apart from the first rotation axis, wherein the first and second robotic arms at least partially mount the first and second end effectors, and a plurality of substrates disposed on these end effectors. The first and second robot arms are configured to be set in a first retracted position for stacking vertically, and the first and second robot arms are configured to extend their first and second end effectors in a first direction along a first parallel path that is at least partially directly vertically located from the first retracted position, and the first and second robot arms are configured to extend their first and second end effectors in at least one second direction along a second path that is not vertically located and is spaced apart from each other, and the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

[0293] In another embodiment, the device comprises at least one non-circular pulley and a first band connecting the at least one drive unit to the first forearm at a first joint between the first upper arm and the first forearm.

[0294] In another embodiment, the device includes a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0295] In another embodiment, the apparatus includes a case in which the first and second end effectors each have a substantially L-shape.

[0296] In another embodiment, the device comprises a first circular pulley and a first band connecting the at least one drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0297] In another embodiment, the apparatus includes a case where the first path is along a straight line from the first contraction position.

[0298] In another embodiment, the apparatus includes a configuration in which the first and second robot arms are provided with a second retracted position to set the first and second end effectors so that the plurality of substrates placed on these end effectors are not stacked vertically.

[0299] In another embodiment, the apparatus includes a controller configured to control the at least one drive unit to move the first and second robot arms substantially simultaneously along a first path from a first retracted position, and to move the first and second robot arms independently or simultaneously along a second path.

[0300] In another embodiment, the method includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector, wherein the first upper arm and the first forearm have different effective lengths; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, wherein the second upper arm and the second forearm have different effective lengths; connecting the first upper arm to at least one drive unit on a first rotation axis; and connecting the second upper arm to the at least one drive unit on a second rotation axis spaced apart from the first rotation axis; and the first and second robotic arms The robotic arms are configured to set the first and second end effectors to a first retracted position in order to stack at least partially vertically multiple substrates placed on these end effectors, the first and second robotic arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned, and the first and second robotic arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other.

[0301] In another embodiment, the method comprises at least one non-circular pulley on the first axis of rotation and a first band connecting the at least one drive unit to the first forearm at a first joint between the first upper arm and the first forearm.

[0302] In another embodiment, the method includes a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0303] In another embodiment, the method comprises a first circular pulley and a first band connecting the at least one drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0304] In another embodiment, the method includes a case in which the first and second robot arms are configured to provide the first path along a straight line from the first retracted position.

[0305] In another embodiment, the method includes a case in which the first and second robot arms are configured to provide a second retracted position to set the first and second end effectors such that the plurality of substrates placed on these end effectors are not stacked vertically.

[0306] In another embodiment, the method includes connecting the drive unit to a controller configured to control the at least one drive unit to move the first and second robot arms substantially simultaneously from a first retracted position along a first path, and to move the first and second robot arms independently or simultaneously along a second path.

[0307] In another embodiment, the method includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates placed on these end effectors, wherein the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to at least one drive on a first rotation axis, and the second robotic arm comprising a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the at least one drive on a second rotation axis spaced apart from the first rotation axis. The method further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly above and below them, and moving the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path that is not located above and below each other and is spaced apart from each other.

[0308] In another embodiment, the method includes moving the first and second robotic arms with at least one non-circular pulley and a first band connecting the at least one drive unit to the first forearm at a first joint between the first upper arm and the first forearm.

[0309] In another embodiment, the method includes moving the first and second robotic arms with a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0310] In another embodiment, the method for moving the first and second robotic arms involves a first circular pulley and a first band connecting the at least one drive unit to the second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0311] In another embodiment, the method includes a controller that controls the at least one drive unit to move the first and second robot arms substantially simultaneously along the first path from the first retracted position, and to move the first and second robot arms independently or simultaneously along the second path.

[0312] In another embodiment, the apparatus comprises a first robotic arm having a first upper arm, a first forearm, and a first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector; and a drive unit connected to the first and second robotic arms, wherein the first upper arm is connected to the drive unit on a first rotation axis, and the second upper arm is connected to the drive unit on a second rotation axis spaced apart from the first rotation axis; the drive unit comprises only three motors for rotating the first and second upper arms; and the first and second robotic arms are connected to the first and second The end effectors are configured to be set in a first retracted position to stack at least partially vertically multiple substrates placed on these end effectors, the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other.

[0313] In another embodiment, the apparatus includes a case where the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

[0314] In another embodiment, the device comprises at least one non-circular pulley and a first band connecting the drive device to the first forearm at a first joint between the first upper arm and the first forearm.

[0315] In another embodiment, the device includes a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0316] In another embodiment, the apparatus includes a case in which the first and second end effectors each have a substantially L-shape.

[0317] In another embodiment, the device comprises a first circular pulley and a first band connecting the drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0318] In another embodiment, the apparatus includes a case where the first path is along a straight line from the first contraction position.

[0319] In another embodiment, the apparatus includes a configuration in which the first and second robot arms are provided with a second retracted position to set the first and second end effectors so that the plurality of substrates placed on these end effectors are not stacked vertically.

[0320] In another embodiment, the apparatus includes a controller configured to control the drive unit to move the first and second robot arms substantially simultaneously from a first retracted position along a first path, and to move the first and second robot arms independently or simultaneously along a second path.

[0321] In another embodiment, the apparatus includes a case in which the three motors are aligned on a common axis.

[0322] In another embodiment, the apparatus includes a case where the three motors are arranged on three corresponding spaced-apart axes.

[0323] In another embodiment, the apparatus comprises the drive unit and a z-axis motor connected to the drive unit for vertically moving the first and second robot arms.

[0324] In another embodiment, the method includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates placed on these end effectors, wherein the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis. The method further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path at least partially directly above and below; moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below and is spaced apart from each other; and rotating the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation, wherein the movement in the first direction from the first retracted position, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are performed using only three motors of the drive unit.

[0325] In another embodiment, the method includes moving the first and second robotic arms with at least one non-circular pulley and a first band connecting the drive unit to the first forearm at a first joint between the first upper arm and the first forearm.

[0326] In another embodiment, the method includes moving the first and second robotic arms with a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0327] In another embodiment, the method involves moving the first and second robotic arms with a first circular pulley and a first band connecting the drive unit to the second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0328] In another embodiment, the method further includes a controller that controls the motors of the drive unit to move the first and second robot arms substantially simultaneously from the first retracted position along the first path, and to move the first and second robot arms independently or simultaneously along the second path.

[0329] In another embodiment, the method includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, connecting the first upper arm to a drive on a first rotation axis; and connecting the second upper arm to the drive on a second rotation axis spaced apart from the first rotation axis, wherein the first and second robotic arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically a plurality of substrates disposed on these end effectors, and the first and second robotic arms are configured The drive system comprises only three motors for rotating the first and second robot arms to rotate the first and second robot arms to rotate the first and second robot arms to rotate the first and second robot arms to rotate the first and second robot arms to rotate the first and second robot arms to extend the first and second end effectors, and for rotating the first and second robot arms to rotate the first and second robot arms to extend the first and second end effectors, and for rotating the first and second robot arms around a third axis of rotation spaced apart from the first and second axes of rotation.

[0330] In another embodiment, the method includes a case where the first robot arm comprises a first upper arm and a first forearm having different effective lengths, and a case where the second robot arm comprises a second upper arm and a second forearm having different effective lengths.

[0331] In another embodiment, the method comprises at least one non-circular pulley on the first axis of rotation and a first band connecting the drive device to the first forearm at a first joint between the first upper arm and the first forearm.

[0332] In another embodiment, the method includes a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0333] In another embodiment, the method comprises a first circular pulley and a first band connecting the drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0334] In another embodiment, the method includes a case in which the first and second robot arms are configured to provide the first path along a straight line from the first retracted position.

[0335] In another embodiment, the method includes a case in which the first and second robot arms are configured to provide a second retracted position to set the first and second end effectors such that the plurality of substrates placed on these end effectors are not stacked vertically.

[0336] In another embodiment, the method includes connecting the drive unit to a controller configured to control the drive unit to move the first and second robot arms substantially simultaneously from a first retracted position along a first path, and to move the first and second robot arms independently or simultaneously along a second path.

[0337] In another embodiment, the apparatus comprises a first robotic arm having a first upper arm, a first forearm and a first end effector, a second robotic arm having a second upper arm, a second forearm and a second end effector, and a drive unit connected to the first and second robotic arms, wherein the first upper arm is connected to the drive unit on a first rotation axis, and the second upper arm is connected to the drive unit on a second rotation axis spaced apart from the first rotation axis, and the drive unit comprises five motors for rotating the first and second upper arms, the first motor of which is connected to the first and second robotic arms and rotates the first and second robotic arms around a third rotation axis spaced apart from the first and second rotation axes, and the second and third motors are connected to the first robotic arm and each of which rotates the first upper arm and the The first robotic arm rotates the forearm of the first robotic arm, and the fourth and fifth motors are connected to the second robotic arm to rotate the second upper arm and the second forearm, respectively, independently of the first robotic arm. The first and second robotic arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically multiple substrates placed on these end effectors. The first and second robotic arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned above and below the first end effectors. The first and second robotic arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other.

[0338] In another embodiment, the apparatus includes a case where the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

[0339] In another embodiment, the device comprises at least one non-circular pulley and a first band connecting the drive device to the first forearm at a first joint between the first upper arm and the first forearm.

[0340] In another embodiment, the device includes a second band connecting the first end effector to the first joint at the wrist joint of the first end effector relative to the first forearm.

[0341] In another embodiment, the apparatus includes a case in which the first and second end effectors each have a substantially L-shape.

[0342] In another embodiment, the device comprises a first circular pulley and a first band connecting the drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, wherein the first and second pulleys have different diameters.

[0343] In another embodiment, the apparatus includes a case where the first path is along a straight line from the first contraction position.

[0344] In another embodiment, the apparatus includes a configuration in which the first and second robot arms are provided with a second retracted position to set the first and second end effectors so that the plurality of substrates placed on these end effectors are not stacked vertically.

[0345] In another embodiment, the apparatus includes a controller configured to control the drive unit to move the first and second robot arms substantially simultaneously along a first path from a first retracted position, and to move the first and second robot arms independently or simultaneously along a second path.

[0346] In another embodiment, the apparatus comprises the drive unit and a z-axis motor connected to the drive unit for vertically moving the first and second robot arms.

[0347] In another embodiment, the method includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates placed on these end effectors, wherein the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis. The method further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path at least partially directly above and below; moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below each other and is spaced apart; and rotating the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation. The movement from the first retracted position in the first direction, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are performed by using five motors of the drive unit. The first motor among the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third rotation axis; the second and third motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively; and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

[0348] In another embodiment, the method or apparatus includes a case in which the first motor is aligned with the third rotation axis, the second and third motors are aligned with each other on the first rotation axis, and the fourth and fifth motors are aligned with each other on the second rotation axis.

[0349] In another embodiment, the method includes providing a first robotic arm comprising a first upper arm, a first forearm, and a first end effector; providing a second robotic arm comprising a second upper arm, a second forearm, and a second end effector, connecting the first upper arm to a drive on the first rotation axis; and connecting the second upper arm to the drive on the second rotation axis spaced apart from the first rotation axis, wherein the first and second robotic arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically a plurality of substrates disposed on these end effectors; the first and second robotic arms are configured to rotate from the first retracted position in a first direction along a first parallel path at least partially directly vertically positioned above and below, and the first and second robotic arms The drive unit comprises five motors for rotating the first and second robot arms to extend the first and second end effectors in at least one second direction along a second path spaced apart from each other and not located vertically, and for rotating the first and second robot arms to extend the first and second end effectors, and for rotating the first and second robot arms around a third axis of rotation spaced apart from the first and second axes of rotation, the first motor of which is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and third motors are connected to the first robot arm to rotate the first upper arm and first forearm, respectively, and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and second forearm, respectively, independently of the first robot arm.

[0350] In another embodiment, the device comprises a first robotic arm having a first upper arm, a first forearm, and a first end effector; a second robotic arm having a second upper arm, a second forearm, and a second end effector; and a drive unit connected to the first and second robotic arms, wherein the first upper arm is connected to the drive unit on a first rotation axis, and the second upper arm is connected to the drive unit on a second rotation axis spaced apart from the first rotation axis; and the drive unit comprises four motors for rotating the first and second upper arms, of which the first motor is connected to the first upper arm, the second motor is connected to the second upper arm, the third motor is connected to the first forearm, and the fourth motor is connected to the second forearm, and the third and fourth motors are spaced apart from the first and second rotation axes. Aligned on a common axis between them, the first motor is aligned on the first rotation axis, the second motor is aligned on the second rotation axis, the first and second robot arms are configured to set the first and second end effectors to a first retracted position to stack at least partially vertically a plurality of substrates placed on these end effectors, the first and second robot arms are configured to extend the first and second end effectors from the first retracted position in a first direction along a first parallel path that is at least partially directly vertically positioned, and the first and second robot arms are configured to extend the first and second end effectors in at least one second direction along a second path that is not vertically positioned and is spaced apart from each other.

[0351] In one exemplary embodiment, an apparatus is provided comprising at least one processor and at least one non-temporary memory containing computer program code. The at least one memory and the computer program code, together with the at least one processor, cause the apparatus to set a first end effector of a first robot arm and a second end effector of a second robot arm into a first retracted position to stack at least partially vertically a plurality of substrates disposed on the first and second end effectors, wherein the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis, thereby moving the first and second robot arms, the The first and second end effectors are moved from a retracted position in a first direction along a first parallel path that is at least partially directly above and below the first; the first and second robot arms are moved to move these end effectors in a second direction along a second path that is not located above and below the first and second, and spaced apart from each other; and the first and second robot arms are rotated together around a third axis of rotation spaced apart from the first and second axes of rotation. The movement in the first direction from the first retracted position, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are all performed using only three motors in the drive unit.

[0352] According to one exemplary embodiment, an apparatus is provided that includes a machine-readable non-temporary program storage device for specifically implementing a program of machine-executable instructions to perform an operation. The operation includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates arranged on the first and second end effectors. Here, the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis. The operation further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path at least partially directly above and below them; moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below them and is spaced apart from each other; and rotating the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation. The movement from the first retracted position in the first direction, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are performed using only three motors of the drive unit.

[0353] In one exemplary embodiment, a device is provided comprising at least one processor and at least one non-temporary memory containing computer program code. The at least one memory and the computer program code, together with the at least one processor, cause the apparatus to set the first end effector of the first robot arm and the second end effector of the second robot arm in a first retracted position to stack at least partially vertically a plurality of substrates arranged on these end effectors, wherein the first robot arm comprises a first upper arm, a first forearm and the first end effector, the first upper arm being connected to a drive at a first rotation axis, the second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm being connected to a drive at a second rotation axis spaced apart from the first rotation axis, and moves the first and second robot arms to move the first and second end effectors in a first direction along a first parallel path that is at least partially directly vertically positioned above and below the first retracted position, and moves the first and second robot arms to move vertically positioned The movement of the first and second end effectors in at least one second direction along a second path spaced apart from each other, the movement of the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation, the movement of the first robot arms from a first retracted position in a first direction, the movement of the first and second end effectors in at least one second direction, and the rotation are performed by the use of five motors of the drive unit, the first motor of which is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and third motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

[0354] According to one exemplary embodiment, an apparatus is provided that includes a machine-readable non-temporary program storage device for specifically implementing a program of machine-executable instructions to perform an operation. The operation includes setting a first end effector of a first robotic arm and a second end effector of a second robotic arm to a first retracted position to stack at least partially vertically a plurality of substrates arranged on these end effectors. Here, the first robotic arm comprises a first upper arm, a first forearm, and the first end effector, the first upper arm being connected to a drive at a first rotation axis, and the second robotic arm comprises a second upper arm, a second forearm, and the second end effector, the second upper arm being connected to the drive at a second rotation axis spaced apart from the first rotation axis. The operation further includes moving the first and second robot arms to move the first and second end effectors from the first retracted position in a first direction along a first parallel path at least partially directly above and below them; moving the first and second robot arms to move the end effectors in a second direction along a second path that is not located above and below them and is spaced apart from each other; and rotating the first and second robot arms together around a third axis of rotation spaced apart from the first and second axes of rotation. The movement from the first retracted position in the first direction, the movement to extend the first and second end effectors in the at least one second direction, and the rotation are performed by using five motors of the drive unit.The first motor among the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third rotation axis; the second and third motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively; and the fourth and fifth motors are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

[0355] Any combination of one or more computer-readable media may be used as memory. The computer-readable media may be computer-readable signal media or non-temporary computer-readable storage media. Non-temporary computer-readable storage media do not contain propagating signals and may be, for example, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the above. More specific examples (non-exclusive list) of computer-readable storage media include electrical connections having one or more wires, portable computer diskettes, hard disks, random access memory (RAM), read-only memory (ROM), eraseable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disc read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the above.

[0356] It should be clear that the above description is merely illustrative. Various alternatives and variations may be devised by those skilled in the art. Therefore, this embodiment is intended to encompass all such alternatives, variations, and modifications. For example, the features enumerated in the various dependent claims can be combined with each other in any preferred combination. In addition, the features of the various embodiments described above may be selectively combined to form new embodiments. Therefore, this description is intended to encompass all such alternatives, variations, and modifications that fall within the scope of the appended claims.

Claims

1. It is a device, Drive unit and; A first robotic arm comprising a first upper arm, a first forearm, and a first end effector, wherein the first upper arm is connected to the drive unit by a first rotation axis, and the first end effector comprises two substrate holding regions spaced laterally apart; A second robotic arm comprising a second upper arm, a second forearm, and a second end effector, wherein the second upper arm is connected to the drive unit by the first rotation axis, and the second end effector comprises two substrate holding regions spaced laterally apart; It has, The first robot arm is configured to position the first end effector in a first retracted position that overlaps the second end effector, and the first robot arm is configured to extend the first end effector in a first direction above the second end effector from the first retracted position to a first extended position without moving the second robot arm; The second robot arm is configured to position the second end effector in a second retracted position that overlaps the first end effector, and the second robot arm is configured to extend the second end effector from the second retracted position to a second extended position in the first direction below the first end effector without moving the first robot arm; The first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths; The first upper arm and the second upper arm have different effective lengths; The apparatus further comprises a mechanically driven transmission unit that connects the drive unit to the first forearm at a first joint between the first upper arm and the first forearm, so that the drive unit can rotate the first forearm, the transmission unit comprising at least one non-circular pulley and a first band. Device.

2. The apparatus according to claim 1, wherein the first forearm and the second forearm have different effective lengths.

3. The apparatus according to claim 1, wherein the first upper arm and the first forearm have the same effective length.

4. The apparatus according to claim 1, wherein the first end effector has a U-shape, and the first forearm is connected to the first end effector at a position off-center from the center of the U-shape.

5. The apparatus according to claim 1, wherein the first end effector has a V-shape, and the first forearm is connected to the first end effector at a position off-center from the center of the V-shape.

6. The apparatus according to claim 1, wherein when the first and second robot arms are in their respective retracted positions, the first upper arm is positioned between the second upper arm and the second forearm.

7. The apparatus according to claim 6, wherein the first end effector is connected to the underside of the first forearm.

8. The apparatus according to claim 7, wherein the first and second end effectors are connected to the upper side of the second forearm, A device wherein, when the first and second robot arms are in their respective retracted positions, the second end effector is positioned below the first end effector and directly facing the bottom of the first end effector.

9. The apparatus according to claim 1, further comprising a second band connecting the first end effector to the first joint at the wrist joint of the first end effector with respect to the first forearm.

10. The apparatus according to claim 1, further comprising a first circular pulley and a first band, wherein the first band connects the drive unit to a second circular pulley at a first joint between the first upper arm and the first forearm, and the first circular pulley and the second circular pulley have different diameters.

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