Film state measurement method, film state measurement device, and program

Abstract

In this film state measurement method for measuring the state of a film between a first member and a second member lubricated by a lubricating agent, impedance is measured by applying a prescribed voltage to the first member and the second member, the impedance of each of a plurality of layers formed between the first member and the second member is derived by performing fitting of the measured impedance on the basis of equivalent circuits corresponding to each of the plurality of layers between the first member and the second member; and the state of a film between the first member and the second member is measured on the basis of the derived impedances.

Claims

1. A method for measuring the film state between a first member and a second member that are lubricated by a lubricant, An impedance measurement step of measuring impedance by applying a predetermined voltage to the first member and the second member, A derivation step is performed to derive the impedance of each of the multiple layers between the first member and the second member by fitting the impedance measured in the impedance measurement step based on equivalent circuits corresponding to each of the multiple layers formed to be stacked in parallel between the first member and the second member, A film state measurement step is performed to measure the film state between the first member and the second member based on the impedance derived in the derivation step, A method for measuring the state of a film, characterized by having the following features.

2. The film state measurement method according to claim 1, characterized in that the equivalent circuit includes a parallel circuit of pseudocapacitance and resistance corresponding to the lubricant and the film formed on at least one of the first member and the second member, respectively, between the first member and the second member.

3. The equivalent circuit is a circuit in which two parallel circuits of a resistor circuit and a CPE circuit are connected in series. The film state measurement method according to claim 1, characterized in that one of the two parallel circuits corresponds to the lubricant between the first member and the second member, and the other corresponds to a film formed on at least one of the first member and the second member as the first member and the second member operate.

4. The film state measurement method according to claim 3, characterized in that, in the film state measurement step, the presence or absence of a coating formed on at least one surface of the first member and the second member is diagnosed as the film state.

5. The first member and the second member are provided in the bearing device. The first member is a rolling element, The film state measurement method according to claim 1, characterized in that the second member is an inner ring or an outer ring.

6. A device for measuring the film state between a first member and a second member that are lubricated by a lubricant, An impedance measuring means for measuring impedance by applying a predetermined voltage to the first member and the second member, A derivation means for deriving the impedance of each of the multiple layers between the first member and the second member by fitting the impedance measured by the impedance measuring means based on equivalent circuits corresponding to each of the multiple layers formed to be stacked in parallel between the first member and the second member, A film state measuring means for measuring the film state between the first member and the second member based on the impedance derived by the derivation means, A membrane state measuring device characterized by having the following features.

7. On the computer, An impedance measurement step involves measuring the impedance by applying a predetermined voltage to a first member and a second member that are lubricated with a lubricant, A derivation step is performed to derive the impedance of each of the multiple layers between the first member and the second member by fitting the impedance measured in the impedance measurement step based on equivalent circuits corresponding to each of the multiple layers formed to be stacked in parallel between the first member and the second member, A film state measurement step is performed to measure the film state between the first member and the second member based on the impedance derived in the derivation step, A program to execute.

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