Holding device for top-open type substrate containers

Abstract

To provide a top open type substrate container holding device.SOLUTION: A top open type substrate container holding device includes a holding assembly used to be operated to push a substrate actuator, wherein the substrate actuator is provided outside a substrate. The holding assembly includes a holding body, and a pushing actuator, and the pushing actuator includes: a first guide inclined surface which is used for pushing and displacing the substrate corresponding between a second guide inclined surface on an inner surface of a container and the first guide inclined surface by being brought into contact with the second guide inclined surface; and a pushing part which is connected to the first guide inclined surface, correspondingly pushes the substrate actuator according to the degree of pushing displacement of the first guide inclined surface, thereby makes the substrate actuator displace the substrate, and mutually stacks the substrates and positions the substrates.SELECTED DRAWING: Figure 7A

Description

Technical Field

[0001] The present invention provides a holding device, particularly a holding device for a top-open type substrate container that can stably hold a mounted substrate, prevent damage, and adjust the number of mounted substrates of various types.

Background Art

[0002] Sheet-like products related to industrial electronic components, such as circuit boards, wafers, and glass sheet-like semiconductor workpieces, are often housed in containers for protection, mounting, and transportation. Containers for mounting these sheet-like semiconductor workpieces related to electronic component products and semiconductor process-related members require appropriately designed protection means and holding devices for the substrate container. This can prevent damage to the semiconductor workpieces mounted inside the container.

[0003] Common factors that damage the substrate of a substrate workpiece include wear, scratches, particle or dust contamination due to vibration or friction, or shaking, bouncing, and collision or breakage between substrates due to instability of the container or the internal structure of the container.Subsequently, the quality and yield of the substrate deteriorate during the processes of mounting, handling, and transportation, and the substrate of the semiconductor workpiece product is damaged.Therefore, in the industry, there is a very high need to solve the problem of how to stably hold multiple layers of substrates and avoid problems such as vibration, collision, displacement, and friction between substrates.

[0004] Furthermore, according to the current standards for the mounting space design of substrate containers, the number of stacked substrates is limited, and their functions and sizes are single. For different numbers of mounted substrates, it is necessary to newly manufacture molds for substrate containers, which is costly, has low utilization rates, and also lacks the function of securely holding the substrates.

[0005] Furthermore, with conventional substrate containers, when the size or quantity of substrates to be mounted is large, the overall weight becomes relatively heavy. As a result, the gate covering the substrate container may fall during transport due to the concentration of weight at the center of gravity, potentially causing deformation of the gate and adverse effects on airtightness. Therefore, providing an invention that can maintain airtightness even under the condition of mounting a substrate container with a relatively heavy weight is an extremely difficult challenge. [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] In view of the above issues, the top-open type substrate container holding device provided in the present invention stably pushes out and fixes multiple layers of substrates, maintains airtightness, combines the various multi-functionality of a container that can be shared according to various quantities of substrates mounted, and provides a solution to the problems of vibration, movement, and friction between substrates. [Means for solving the problem]

[0007] One embodiment of the present invention is, The present invention provides a top-open type substrate container holding device, comprising a container body and a container gate, the container gate forming a storage space when combined with the container body, the storage space being used to store multiple substrates, the holding device comprising a substrate actuator provided on the outside of the substrate and a holding assembly provided in the storage space that operates to push the substrate actuator, the holding assembly comprising a holding body provided on the inside of the container body and an extrusion actuator provided on the holding body, the extrusion actuator comprising a first guide inclined surface used to push out a second guide inclined surface on the inner surface of the container gate, and an extrusion part corresponding to the substrate actuator and connected to the first guide inclined surface, the first guide inclined surface being pushed out and displaced correspondingly between the first guide inclined surface and the second guide inclined surface in accordance with the contact force of the container gate, and the extrusion part pushing out the substrate actuator in accordance with the degree of extrusion displacement of the first guide inclined surface, thereby the substrate actuator displacing the substrates until multiple substrates are stacked and positioned relative to each other.

[0008] In one embodiment, the holding body includes an inclined guide groove, and the extrusion actuator includes a guide portion connected to the extrusion portion, the guide portion protruding from the inclined guide groove, and the guide portion displaces in the inclined guide groove in response to the contact force of the container gate body, thereby allowing the extrusion actuator to move closer to or away from the holding body.

[0009] In one embodiment, the retaining assembly further includes an elastic member provided between the retaining body and the extrusion actuator, the elastic member being provided such that, in response to the contact force of the container gate body, the guide portion is displaced away from the retaining body along the inclined guide groove, or the guide portion is displaced towards the retaining body along the inclined guide groove, thereby providing an elastic amount of change.

[0010] In one embodiment, the substrate actuator includes a connection portion fixedly connected to the outside of the substrate, an elastic deformation portion connected to the connection portion, and a first fixing portion provided on one side of the elastic deformation portion. The elastic deformation portion corresponds to the position of the extrusion portion and provides a displacement amount for extruding the substrate according to the degree of extrusion displacement of the extrusion portion. The first fixing portion is used to fix a second fixing portion of an adjacent substrate.

[0011] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning section, and the substrate has a substrate positioning member corresponding to the bottom positioning section, and the bottom positioning section is used to position the substrate that is closest to the bottom of the inner surface within the storage space.

[0012] In one embodiment, the bottom of the inner surface of the container body further includes a bottom engaging device, which is used to engage and fix between the substrate closest to the bottom of the inner surface in the storage space and a substrate actuator provided thereon.

[0013] In one embodiment, the upper and lower surfaces of each substrate have stacking fixing parts, and adjacent substrates are stacked and fixed to each other in layers by the stacking fixing parts.

[0014] In one embodiment, the system further includes at least one elastic contact portion, which is provided on the bottom side of the substrate so as to elastically contact and mount a semiconductor workpiece on the substrate.

[0015] In one embodiment, the elastic contact portion includes a fixed end and an elastic contact arm, the fixed end being detachably provided on the bottom side of the substrate, one end of the elastic contact arm being connected to the fixed end, and the other end of the elastic contact arm elastically pressing against the edge surface of the semiconductor workpiece.

[0016] In one embodiment, the inner wall of the container body is provided with an error-proofing member to restrict the orientation of the substrate housed in the storage space.

[0017] Embodiments of the present invention provide a top-open type substrate container holding device, wherein the top-open type substrate container includes a container body and a container gate, the container gate forming a storage space when combined with the container body, and the storage space is used to store a plurality of substrates, the holding device including a frame body for mounting substrates provided in the storage space, a plurality of quick-release members provided on the outside of the frame body, and a plurality of displacement parts providing a displacement space for the holding assembly provided in the storage space, each quick-release member including a contact portion and a shoulder portion, the shoulder portion being connected to both sides of the contact portion, and a plurality of fasteners further provided on the inner wall of the container body, the contact portion contacting the inner wall, and each fastener being fastened to the shoulder portion, thereby fixing the frame body.

[0018] In one embodiment, when the contact portion is compressed and distanced from the inner wall, the shoulder portion separates from the fastener, making the frame body removable.

[0019] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning portion, the frame body includes a frame positioning member corresponding to the bottom positioning portion, the bottom positioning portion positions the frame positioning member to form a height distance between the frame body and the bottom of the inner surface of the container body, and the bottom positioning portion and the fastener are provided at the same horizontal height.

[0020] In one embodiment, the inner wall of the container body is provided with an error-proofing member to restrict the orientation of the frame body housed in the storage space.

[0021] Embodiments of the present invention provide a holding device for a top-open type substrate container, which includes a container body and a container door. The container door is arranged to be combined with the container body and has a storage space for housing a latch mechanism. The holding device includes at least one flattening member provided in the storage space. The flattening member extends and abuts against both opposite inner side walls of the container body as a whole and is provided parallel to the latch mechanism.

[0022] In one embodiment, the flattening member is a carbon rod, and the overall height of the carbon rod is lower than the total depth of the storage space.

Advantages of the Invention

[0023] According to the holding device for the top-open type substrate container according to the present invention, by providing an extrusion actuator and an inclined guide groove, in the process of the container door closing on the container body, a contact force is provided to the extrusion actuator at the same time, so that the extrusion actuator operates and displaces along the direction of the inclined guide groove. As a result, the extrusion part of the extrusion actuator displaces in the direction of the substrate, thereby pushing and fixing the substrate by the substrate actuator. Thereby, the effect of stably fixing the substrates to be loaded and transported can be achieved.

Brief Description of the Drawings

[0024] [Figure 1] It is an external perspective view showing a top-open type substrate container in an embodiment of the present invention. [Figure 2A] It is an exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 2B] It is another exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 3A] It is a perspective view showing a method of attaching a holding assembly in an embodiment of the present invention. [Figure 3B] It is a side view showing a holding assembly in an embodiment of the present invention. [Figure 3C] It is a perspective view showing a container door body and a holding assembly in an embodiment of the present invention. [Figure 4A] It is a perspective view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4B] It is a partially enlarged top view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4C] It is an exploded perspective view schematically showing a substrate, a substrate actuator, and a holding assembly in an embodiment of the present invention. [Figure 4D] It is a perspective view showing an elastic deformation part of a substrate actuator before deformation in an embodiment of the present invention. [Figure 4E] It is a schematic diagram showing a holding assembly before extrusion in an embodiment of the present invention. [Figure 4F] It is a schematic diagram showing a holding assembly after extrusion in an embodiment of the present invention. [Figure 5A] It is a perspective view showing a partially enlarged stacked fixing part of a substrate in an embodiment of the present invention. [Figure 5B] It is a perspective view showing a partially enlarged part of a container body in an embodiment of the present invention. [Figure 5C] It is another perspective view showing a partially enlarged part of a container body in an embodiment of the present invention. [Figure 6A] It is a perspective view schematically showing an assembling method of an elastic abutting part in an embodiment of the present invention. [Figure 6B] It is a perspective view showing an elastic abutting part in an embodiment of the present invention. [Figure 6C] It is a perspective view showing an elastic abutting part from another viewing angle in an embodiment of the present invention. [Figure 7A] It is an exploded perspective view schematically showing a top-open type substrate container in an embodiment of the present invention. [Figure 7B] It is an exploded perspective view schematically showing an attachment state of a frame body in an embodiment of the present invention. [Figure 8A] This is a schematic plan view showing the frame body and quick-release member in an embodiment of the present invention. [Figure 8B] This is a schematic diagram showing a partially enlarged portion of the frame body in an embodiment of the present invention. [Figure 8C] This is a schematic cross-sectional view showing the frame body in an embodiment of the present invention. [Figure 8D] This is a schematic cross-sectional view showing a modified example of the frame body in an embodiment of the present invention. [Figure 8E] This is a schematic cross-sectional view showing another modified example of the frame body in an embodiment of the present invention. [Figure 9] This is an exploded perspective view schematically showing the container door in an embodiment of the present invention. [Modes for carrying out the invention]

[0025] To further explain the technical details of the present invention, the following embodiments will be described together with the drawings. It should be noted that, in the text, terms such as "first," "second," and "third" are used to distinguish differences between parts, and are not used to limit the parts themselves or to indicate a specific order of parts. Also, in the text, unless a specific quantity is specified, the article "one" refers to one part or more than one part.

[0026] To ensure a thorough understanding of the object, features, and effects of the present invention, the present invention will be described in detail below with reference to the attached drawings and specific embodiments.

[0027] Figure 1 is an external perspective view showing a top-open type substrate container according to an embodiment of the present invention. Figure 2A is a schematic exploded perspective view showing a top-open type substrate container according to an embodiment of the present invention. Figure 2B is another exploded perspective view schematically showing another top-open type substrate container according to an embodiment of the present invention, with the viewing angles of the components adjusted for clarity of explanation.

[0028] Please refer to Figures 1, 2A, and 2B simultaneously. The top-open type substrate container 10 to which the top-open type substrate container holding device according to one embodiment of the present invention is applied includes a container body 100 and a container gate 200. The container gate 200 is applied to combine with the container body 100 and forms a storage space 180. The storage space 180 of the container body 100 is used to store multiple substrates 700, and the substrates 700 may be semiconductor workpieces (for example, trays for mounting wafers or printed circuit boards (PCBs)). Of course, the container body 100 is also applicable to storing various types of sheet-like substrates and is suitable for storing and mounting sheet-like products related to industrial electronic components, including, but not limited to, semiconductor workpieces of sheet-like products such as circuit boards, wafers, substrates, and glass. In one embodiment of the present invention, the container gate 200 is located at the upper opening of the container body 100 to seal the upper opening of the container body 100, and the internal space formed by sandwiching the container gate 200 and the container body 100 becomes the storage space 180, which can store multiple stacked piece-shaped substrates 700.

[0029] As shown in Figures 2A and 2B, a substrate 700 can be stored inside the container body 100 of the top-opening type substrate container 10. In this embodiment, the substrate 700 will be described using a tray as an example. The substrate 700 is used to mount and hold sheet-shaped semiconductor workpieces, and each semiconductor workpiece can be placed on a single substrate 700. The number of substrates 700 may be one or more. Multiple substrates 700 can be stacked in alignment with each other, so that the mounted semiconductor workpieces maintain a certain distance from each other and can be held and stored inside the top-opening type substrate container 10. It should be noted that the shape of the substrate 700 shown in the drawings is merely an example, and any device with an arbitrary shape structure for mounting semiconductor workpieces may be a variation of the substrate 700.

[0030] As shown in Figures 2A and 2B, the holding device is applied to a top-open type substrate container 10. The holding device includes a holding assembly 300 provided on the container body 100 and a substrate actuator 400. The substrate actuator 400 is provided on the outside of the substrate 700, and the holding assembly 300 is provided within the storage space 180. The holding assembly 300 is used to push out the substrate actuator 400 to hold the substrate 700. The holding assembly 300 includes a holding body 31 and an extrusion actuator 320. The holding body 310 is provided on the inside of the container body 100, and the extrusion actuator 320 is provided on the holding body 310. The extrusion actuator 320 includes a first guide bevel 322 and an extrusion section 323. See also Figure 3C. The first guide bevel 322 is used to contact the second guide bevel 211 on the inner surface 210 of the container door 200. The first guide slope 322 is displaced by being pushed out in response to the contact force of the container gate body 200, so that it corresponds to each other between the first guide slope 322 and the second guide slope 211. The push-out section 323 is connected to the first guide slope 322, and the push-out section 323 corresponds to the position of the substrate actuator 400. The push-out section 323 pushes out the substrate actuator 400 in response to the degree of the push-out displacement of the first guide slope 322, so that the substrate actuator 400 displaces the substrates 700 until the multiple substrates 700 are stacked and positioned relative to each other. In this embodiment of the present invention, the holding assembly 300 further includes an elastic member 330, which will be described later.

[0031] In one embodiment, there are multiple retaining assemblies 300 (for example, eight), each positioned around the container body 100 and facing one side of the storage space 180. This allows the edges of the substrates 700 to be stably fixed, ensuring that the substrates 700 are not subjected to vibration, shaking, or collision with each other. The number of retaining assemblies 300 can be adjusted according to the needs and is not limited here.

[0032] Please refer to Figures 3A through 3C simultaneously. Figure 3A is a perspective view showing the mounting method of the retaining assembly 300 in an embodiment of the present invention. Figure 3B is a side view showing the retaining assembly 300 in an embodiment of the present invention. Figure 3C is a perspective view showing the container gate and retaining assembly in an embodiment of the present invention.

[0033] The retaining assembly 300 is provided on the inner mounting portion 120 of the container body 100, which faces inward towards the area where the substrate 700 is housed. The inner mounting portion 120 may be, for example, a recessed groove or an engagement groove, and has an engagement structure that engages with and fixes the retaining body 310 of the retaining assembly 300. This stably fixes the retaining assembly 300, while also allowing the retaining assembly 300 to be elastically removed and adjusted.

[0034] Here, the details of the operation of the holding assembly 300 will be explained first. The holding body 310 includes an inclined guide groove 311, and the extrusion actuator 320 includes a guide part 321 connected to the extrusion part 323. Since the guide part 321 protrudes from the inclined guide groove 311, the guide part 321 can move only along the axis of the inclined guide groove 311. Please also refer to Figure 4C. The elastic member 330 is provided between the holding body 310 and the extrusion actuator 320, and because the guide part 321 protrudes from the inclined guide groove 311, the extrusion actuator 320 will not fall even when mounted on the holding body 310. As the container gate 200 closes to the container body 100, the inner surface 210 of the container gate 200 faces the extrusion actuator 320. Therefore, the second guide inclined surface 211 pushes the first guide inclined surface 322 of the extrusion actuator 320 downward. The first guide inclined surface 322 then displaces itself from the first guide inclined surface 322 and the second guide inclined surface 211 in accordance with the contact force of the container gate 200. Simultaneously, the extrusion section 323 is connected to the first guide inclined surface 322, and the extrusion section 323 operates in accordance with the distance the first guide inclined surface 322 has been pushed. The first guide inclined surface 322 is in contact with the second guide inclined surface 211 only at its endpoints. This not only concentrates the points of action but also reduces the contact area, thus avoiding the problem of dust generation due to friction.

[0035] Specifically, the extrusion section 323 corresponds to the position of the substrate actuator 400. Depending on the degree of extrusion displacement of the first guide slope 322, the extrusion section 323 displaces the guide section 321 along the axis in the inclined guide groove 311 (as shown by the arrow direction in Figure 3B) until the guide section 321 is positioned at the closing end 312 in the inclined guide groove 311, thereby causing the extrusion actuator 320 to move away from the holding body 310. The elastic member 330 is arranged to provide an amount of elastic change (elastic stretching) for the guide section 321 to displace along the inclined guide groove 311 away from the holding body 310 in response to the contact force of the container gate body 200. In other words, the guide section 321 of the extrusion actuator 320 undergoes a stroke of being guided and displaced downward in the inclined guide groove 311 of the holding body 310, which gradually stretches the elastic member 330 and causes the extrusion actuator 320 to move slightly away from the holding body 310. At this time, the extrusion actuator 320 moves toward the substrate actuator 400 that is sandwiching the substrate 700.

[0036] Conversely, in the process of the container gate 200 opening relative to the container body 100, the elastic member 330 provides an elastic displacement (elastic return) in which the guide portion 321 moves away from the closing end 312 and moves toward the holding body 310 along the inclined guide groove 311, in accordance with the contact force of the container gate 200. In other words, when the container gate 200 is removed, the elastic member 330 releases the elastic displacement energy, and the guide portion 321 of the extrusion actuator 320 performs a process of being guided upward and displaced in the inclined guide groove 311 of the holding body 310, thereby causing the extrusion actuator 320 to approach the holding body 310 and move away from the substrate actuator 400, releasing the contact with the substrate actuator 400. Simultaneously, when the force on the substrate actuator 400 is released, the deformation of the elastic deformation part 420 is also released, thereby releasing the interference between the first fixing part 410 and the second fixing part 720, and the stacked substrates 700 are no longer fixed to each other. The first fixing part 410 of the substrate actuator 400 attached to the bottommost substrate 700 also no longer interferes with the bottom engaging device 110 at the bottom of the container body 100, making it possible to freely remove multiple substrates 700 one by one or all at once using a machine stand, robot arm, or manual means.

[0037] Thus, the elastic locking and unlocking mechanism for the substrate 700 provides many advantages to the top-open type substrate container 10 equipped with the holding device according to the present invention, including ease of operation, intuitiveness, and low error rate. Operators or automated machines can stably and effectively lock and secure the substrate 700 simply by covering the container entrance body 200, without requiring any additional operating procedures. Furthermore, the substrate 700 can be naturally restored to a non-interference state simply by removing the container entrance body 200.

[0038] The elastic member 330 is provided, for example, on the side of the extrusion actuator 320 opposite to the holding body 310, with one end of the elastic member 330 fixed to the holding body 310 and the other end of the elastic member 330 pressed against the extrusion actuator 320.

[0039] The slope normal vector of the first guide slope 322 is parallel to the slope normal vector of the second guide slope 211, meaning they have the same slope angle. The angle and size of the second guide slope 211 are designed to match those of the first guide slope 322. The slope length of the first guide slope 322 is equal to the displacement stroke length of the inclined guide groove 311. As a result, by providing the second guide slope 211 on the container gate body 200, when the container gate body 200 is pressed vertically against the extrusion actuator 320, the first guide slope 322 can displace synchronously with the extrusion actuator 320 as it displaces along the inclined guide groove 311, thereby ensuring that the extrusion actuator 320 provides a stable downward force.

[0040] The first guide slope 322 of the extrusion actuator 320 and the second guide slope 211 of the container gate body 200 may have other structural configurations. Furthermore, structures that slide together and can contact each other with a smaller contact area are also included within the scope of protection of the present invention.

[0041] The operational relationship between the holding assembly 300 and the substrate actuator 400, and the detailed structure of the substrate actuator 400 will be described next. Please refer to Figures 4A to 4F simultaneously. Figure 4A is a perspective view showing the substrate and substrate actuator in an embodiment of the present invention. Figure 4B is a partially enlarged top view showing the substrate and substrate actuator in an embodiment of the present invention. Figure 4C is a schematic exploded perspective view showing the substrate, substrate actuator, and holding assembly in an embodiment of the present invention. Figure 4D is a perspective view showing the elastically deformed portion of the substrate actuator before deformation in an embodiment of the present invention. Figure 4E is a schematic diagram showing the holding assembly before extrusion in an embodiment of the present invention. Figure 4F is a schematic diagram showing the holding assembly after extrusion in an embodiment of the present invention. Figures 4E and 4F are also cross-sectional views along the line A-A' in Figure 1.

[0042] The substrate actuator 400 is applied as a buffer elastic member for buffering, clamping, and fixing between the extrusion actuator 320 and the substrate 700. The substrate actuator 400 includes a connecting portion 430, an elastically deformable portion 420, and a first fixing portion 410. The connecting portion 430 is fixedly connected to the outside (e.g., edge) of the substrate 700. The connecting portion 430 is located at both ends of the elastically deformable portion 420 and is fixedly connected to the outside of the substrate 700 in a clamping manner. The elastically deformable portion 420 is connected to the connecting portion 430 and is positioned to correspond to the position of the extrusion portion 323. The first fixing portion 410 is provided on one side (e.g., the lower position) of the elastically deformable portion 420 and is used to fix the second fixing portion 720 of the adjacent substrate 700.

[0043] When the extrusion actuator 320 receives the contact force from the container gate 200 and moves away from the holding body 310, and applies a contact force in the direction of the elastic deformation part 420, the elastic deformation part 420 corresponds to the position of the extrusion part 323, and the elastic deformation part 420 elastically deforms the substrate 700 according to the extrusion displacement level of the extrusion part 323, thereby providing the amount of extrusion displacement. In other words, the extrusion part 323 of the extrusion actuator 320 is pressed against the elastic deformation part 420, and the elastic deformation part 420 moves in conjunction with the first fixing part 410 toward the second fixing part 720 of the adjacent substrate 700, and the elastic deformation part 420 receives the maximum contact force and fixes the first fixing part 410 on the second fixing part 720 of the adjacent substrate 700 until the container gate 200 completely closes the container body 100. Since the storage space 180 is used to accommodate multiple substrates 700, the coordinated operation method between the holding assembly 300 and the substrate actuator 400 allows each first fixing part 410 to sequentially fix one substrate at a time to adjacent substrates 700, thereby achieving the effect of positioning multiple substrates 700 by stacking them on top of each other.

[0044] Based on the operating principle described above, the extrusion actuator 320 applies force to the elastically deformable portion 420 of the substrate actuator 400, thereby enabling the positioning of each individual substrate 700 as multiple stacked substrates 700 are connected by the interlocking of the first fixing portion 410 and the second fixing portion 720. When the container gate 200 covers the container body 100, the pushing operation of the extrusion actuator 320 is stopped. The uppermost substrate 700 does not need to have a semiconductor workpiece mounted on it to reduce the risk of substrate damage.

[0045] The elastically deformable portion 420 provides the substrate actuator 400 with excellent deformation elasticity and cushioning effect. Therefore, when the extrusion actuator 320 is about to make contact, the substrate actuator 400 can fix the substrate 700 appropriately and stably.

[0046] As a result, the contact of the extrusion actuator 320 of the holding assembly 300 not only stably fixes the substrates 700 connected and fixed by the substrate actuator 400, but also allows adjacent substrates 700 to be simultaneously contacted and fixed, thus providing the effect of stably locking multiple substrates 700 stacked in layers. Furthermore, each substrate 700 has a corresponding substrate actuator 400, which allows each substrate 700 to be contacted and fixed, so that all substrates 700 in the top-open type substrate container 10 are stably sandwiched and fixed to each other, and friction or collision of the substrates 700 due to shaking or vibration of the container body 100 is prevented.

[0047] The elastically deformable portion 420 can achieve engagement and joining of the first fixing portion 410 and the second fixing portion 720 without requiring an excessive stroke. Furthermore, due to the structural characteristics of the engagement and joining, in addition to horizontal contact and fixing, the engagement structure itself can further provide vertical engagement and fixing, thereby increasing the strength of the contact and fixing.

[0048] Please refer to Figures 5A to 5C. Figure 5A is a perspective view showing a partially enlarged portion of the stacking fixing portion 710 of the substrate 700 in an embodiment of the present invention. Figure 5B is a perspective view showing a partially enlarged portion of the container body 100 in an embodiment of the present invention. Figure 5C is another perspective view showing a partially enlarged portion of the container body 100 in an embodiment of the present invention.

[0049] The inner bottom surface 190 of the container body 100 further includes a bottom positioning member 130, which is used to engage and fix the substrate 700 closest to the inner bottom surface 190 in the storage space 180 with the substrate actuator 400 provided on it. The preferred installation position of the bottom positioning member 130 is the inner edge corner of the storage space 180, thereby allowing each corner of the substrate 700 to be stably fixed and positioned. Furthermore, the installation position and number of bottom positioning members 130 are, of course, not limited, and as long as they can be matched to the shape of the substrate 700, it falls within the technical scope of the present invention. Each substrate 700 has a suitable stacking fixing part 710 on its upper and lower surfaces, and adjacent substrates 700 are stacked and fixed in layers by the stacking fixing parts 710. The stacking fixing portion 710 of the substrate 700 closest to the inner surface bottom portion 190 also fits the bottom positioning member 130, allowing the bottom positioning member 130 to be aligned and fixed to its position.

[0050] The container body 100 further includes a bottom engaging device 110 below the inner mounting portion 120 to which the retaining assembly 300 is attached. The bottom engaging device 110 is positioned to contact the first fixing portion 410 of the substrate actuator 400 corresponding to the substrate 700 located at the bottommost layer, thereby stably holding the substrate 700 at the bottommost layer. The bottom engaging device 110 has a reverse hook structure and, by engaging and fixing with the first fixing portion 410 corresponding to the substrate 700 at the bottommost layer, enhances the stability between all substrates 700 and the container body 100.

[0051] An error-proofing member 170 is provided on the inner wall of the container body 100. The error-proofing member 170 is used to restrict the orientation of the substrate 700 housed in the storage space 180. The error-proofing member 170 is, for example, a protruding columnar structure, which corresponds to the concave structure of the edge of the substrate 700, thereby enabling the substrate 700 to be placed in the container body 100 in the correct orientation.

[0052] The stacking fixing section 710 may have an uneven surface structure, thereby enabling precise positioning and accurate stacking. It should be noted that the stacking fixing section 710 is not limited to an uneven surface structure, but may be any other stackable structure that can be easily conceivable for positioning based on the present invention. Other types of structures and principles other than applied mechanics may be incorporated, for example, by a method of stacking all substrates 700 together using magnetic force, in which multiple substrates 700 can be stacked while aligning them vertically and reducing lateral movement between the substrates 700.

[0053] Please refer to Figures 6A to 6C simultaneously. Figure 6A is a schematic perspective view showing the assembly method of the elastic contact portion 500 in an embodiment of the present invention. Figure 6B is a perspective view showing the elastic contact portion 500 in an embodiment of the present invention. Figure 6C is a perspective view showing the elastic contact portion 500 in an embodiment of the present invention from a different angle.

[0054] The holding device further includes an elastic contact portion 500 provided on the bottom side of the substrate 700 (for example, the bottom side of the edge of the substrate 700). The elastic contact portion 500 is used to elastically contact a semiconductor workpiece 800 mounted on the substrate 700, and is used, for example, to elastically press the edge surface of a semiconductor workpiece 800 mounted on an adjacent substrate 700 in a plane adjacent to the edge of the substrate 700. The elastic contact portion 500 prevents displacement of the semiconductor workpiece 800 by elastically contacting and pressing the semiconductor workpiece 800 mounted on an adjacent substrate 700 below. The uppermost substrate 700 does not need to have a semiconductor workpiece 800 mounted on it, and the elastic contact of the elastic contact portion 500 can sufficiently fix the semiconductor workpiece 800 mounted on an adjacent substrate 700 below by utilizing its pressing force. As a result, when the substrates 700 are stacked in layers, the elastic contact portion 500 can provide contact and fixation for the semiconductor workpieces 800 mounted on the substrates 700, thereby reducing or preventing displacement, vibration, and friction between the substrates 700 and the semiconductor workpieces 800.

[0055] The elastic contact portion 500 includes a fixed end 510 and an elastic contact arm 520. The fixed end 510 is detachably provided adjacent to the bottom side of the edge of the substrate 700, one end of the elastic contact arm 520 is connected to the fixed end 510, and the other end of the elastic contact arm 520 elastically presses against the edge surface of the semiconductor workpiece 800. The elastic contact arm 520 extends from the fixed end 510 toward both ends and elastically contacts the edge surface of the semiconductor workpiece 800. As a result, the horizontal point contact can stably contact the substrate 700 while simultaneously reducing the friction area.

[0056] The structural design and operation of the holding device according to the present invention, which allows for adjustment of the number of different substrates mounted, will now be described. Please refer to Figures 7A to 8E simultaneously. Figure 7A is a schematic exploded perspective view showing a top-open type substrate container in an embodiment of the present invention. Figure 7B is a schematic exploded perspective view showing the mounting state of the frame body in an embodiment of the present invention. Figure 8A is a schematic plan view showing the frame body and quick-release member in an embodiment of the present invention. Figure 8B is a schematic diagram showing a partially enlarged portion of the frame body in an embodiment of the present invention.

[0057] The holding device according to the present invention is applied to a top-open type substrate container 10. Regarding the identical structure, function, and part numbers of the top-open type substrate container 10, substrate actuator 400, and holding assembly 300 used in the present invention, further explanation is omitted here, and only the differences will be described. In this embodiment, only the novel structure of the holding device according to the present invention, which solves the problem that a single-function, size top-open type substrate container 10 lacks applied elasticity due to weight and mounting capacity limitations, will be described. This application solves the problem that when the number of substrates 700 to be mounted is less than a predetermined mounting capacity of the container, the substrates 700 cannot be effectively pressed because there is no filler in the space between the top of the container body 100 and the container opening, making them susceptible to damage from shaking, vibration, and bouncing in the container body 100. Therefore, it is possible to solve the problem that the container body 100 can normally only mount a preset number of substrates 700, and cannot mount more or less than that number.

[0058] First, the detailed structural design of the holding device will be described. The holding device includes a frame body 600, a plurality of quick-release members 610, and a plurality of displacement members 620. The frame body 600 is provided within the storage space 180 and is used to mount the substrate 700. The frame body 600 includes a frame positioning member 631, and the container body 100 includes a support member 140. This support member 140 can be designed to various heights within the storage space 180 and functions as a bottom positioning member for the frame body 600 depending on its mounting position. This allows the frame body 600 to be raised by a certain height from the inner bottom surface 190 of the storage space 180. The frame positioning member 631 and the support member 140 are fixed together to provide weight support and position limiting functions. The support member 140 may also be a protruding structure, and the design of its shape is not limited here. It is used to engage with the frame positioning member 631, thereby limiting the position of the frame body 600. The container body 100 includes a support auxiliary member 160, which can provide weight support and positional constraints so as to fit together with the frame body 600.

[0059] Multiple quick-release members 610 are provided on the outside (e.g., the edge) of the frame body 600, and each quick-release member 610 includes a shoulder portion 612 opposite to the contact portion 611. The shoulder portion 612 is connected to both sides of the contact portion 611. Multiple fasteners 150 are further provided on the inner wall of the container body 100, and the frame body 600 can be fixed by fastening the contact portion 611 to the inner wall and each fastener 150 to the shoulder portion 612. Multiple displacement portions 620 provide displacement space for the retaining assembly 300 provided in the storage space 180, so that there is no need to adjust the original structural features or structure of the container body 100 in correspondence with the frame body 600.

[0060] The inner wall of the container body 100 is provided with a displacement prevention member 170 used to restrict the orientation of the frame body 600 housed in the storage space 180. The displacement prevention member 170 is, for example, a protruding columnar structure, which can accommodate the concave structure at the edge of the frame body 600, thereby allowing the frame body 600 to be installed in the container body 100 in the correct orientation.

[0061] Each quick-release member 610 is provided on the edge of the frame body 600 and includes a displacement structure. The contact portion 611 is connected to the frame body 600 and forms an elastic pressing hook that bends downward and hooks at its end. The end of the pressing hook may have a plane to increase the pressing area against the container body 100. The shoulder portion 612 is located at the end of the contact portion 611 and, since both ends protrude compared to the plane of the pressing hook, its position can be restricted to within the fastener 150 of the container body 100. When the contact portion 611 is compressed and moves away from the inner wall by a certain distance, the shoulder portion 612 moves away from the fastener 150, so that the frame body 600 becomes removable.

[0062] The shoulder portion 612 may have an annular or semi-annular structure. This provides an engagement positioning structure with a deformation buffering function, and also provides a tool-responsive force for releasing the engagement, thereby allowing it to be detached from the fastener 150. The contact portion 611 can be adjusted to increase its hardness depending on its structure or material, so that the frame body 600 does not easily come off due to human error, preventing the occurrence of situations where errors occur in the type and quantity of substrates 700 to be mounted in the subsequent manufacturing process. It should be noted that this embodiment is not limited to the structure or shape of the quick-release member 610 and the fastener 150, and any structure that engages and fixes the frame body 600 within the container body 100 falls within the technical scope of this patent invention.

[0063] The frame body 600 provided in the storage space 180 can be installed in various ways. For example, by including a raised mounting surface 650 for mounting the substrate 700, the mounting surface for mounting the substrate 700 can be made even higher. In other words, the height of the frame body 600 from the inner bottom surface 190 of the storage space 180 can be increased, thereby reducing the number of substrates 700 to be mounted and bringing the mounted substrates 700 closer to the container gate 200.

[0064] Furthermore, in one embodiment, the frame body 600 includes a recessed mounting surface 660 used for mounting the substrate 700, thereby further lowering the mounting plane of the mounted substrate 700 compared to the height of the original mounting mat. In other words, the height of the frame body 600 from the inner bottom surface 190 of the storage space 180 can be reduced, thereby increasing the number of substrates 700 that can be mounted. As a result, the frame body 600 can be more freely applied to substrates 700 of various types, sizes, and thicknesses by various modified forms of the raised mounting surface 650 and recessed mounting surface 660 of the frame body 600, greatly increasing the versatility of the top-open type substrate container 10.

[0065] According to the frame body 600 of the holding device provided in the embodiment of the present invention, when mounting a small amount of substrates 700, the substrates 700 can be brought closer to the container opening, and the overall center of gravity can be raised. This not only enhances safety and stability by preventing the substrates 700 from easily shaking within the frame body 600, but also provides the effect of effectively mounting substrates 700 of different types, sizes, and thicknesses in a container body 100 of a single size.

[0066] The frame body 600 includes a stacking alignment section 640 used to hold and fix the substrate 700, and the substrate 700 is used to mount a semiconductor workpiece 800. As described above, the substrate 700 has stacking fixing sections 710 on its upper and lower surfaces, and the stacking alignment section 640 is designed to match the structural and functional characteristics of the stacking fixing section 710, so that the substrate 700 can be fixed to the frame body 600 and its position can be restricted. The structural features of the frame body 600 are provided on both the front and back surfaces, so that the frame body 600 can be inserted into and fixed to the container body 100 on any surface, while maintaining its structural function, thereby greatly improving ease of use.

[0067] The frame body 600 according to the present invention not only solves the problem that the container body 100 is prone to shaking when transporting only a small number of substrates 700, but also raises the overall center of gravity, so that even when the substrates 700 are very heavy, the top-open type substrate container 10 can be safely and effectively transported and shipped. Furthermore, the frame body 600 according to the present invention solves the problem that in order for the top-open type substrate container 10 to accommodate substrates 700 of various types, sizes, thicknesses, and density specifications, it was necessary to newly manufacture a mold for the top-open type substrate container 10 to fit various types and specifications of substrates 700. With the frame body 600 provided by the present invention, by redesigning only the frame body 600, a top-open type substrate container 10 of a single functional size can be applied to substrates 700 of different types, sizes, thicknesses, and density specifications, thereby significantly reducing production costs and improving utilization efficiency.

[0068] Figure 9 is a schematic exploded perspective view showing the container entrance to which the holding device in this embodiment of the present invention is applied. The holding device of this invention is adapted to a top-open type substrate container 10. Regarding the identical structure, function, and part numbers of the top-open type substrate container 10, substrate actuator 400, and holding assembly 300 used in this invention, we will again omit further explanation and only describe the differences. In this embodiment, we will only describe the novel structure of the holding device according to the present invention, which provides the function of maintaining airtightness even under the conditions of a top-open type substrate container 10 where the container entrance 200 carries a large weight.

[0069] The holding device according to the present invention includes at least one flattening member 240. The container gate body 200 includes a gate body shell 250 and a gate body panel 220. The gate body panel 220 is used to combine with the gate body shell 250 to form a storage space 251. The storage space 251 is used to house a latch mechanism 230. The flattening member 240 is provided within the storage space 251, and the flattening member 240 extends so as to abut against two opposing inner walls of the container gate body 200 (i.e., the two opposing inner walls of the gate body shell 250), and the flattening member 240 is provided parallel to the latch mechanism 230. The flattening member 240 is a carbon rod, and the height of the entire carbon rod is less than the total depth of the storage space 251. The flattening member 240 may be made of a material that is highly rigid, lightweight, and flexible.

[0070] The flattening member 240 provides structural support and force distribution to the gate shell 250 by its extended length, which extends to contact the two opposing inner walls. This, in turn, provides structural reinforcement and an even compression effect to the gate shell 250. The flattening member 240 is provided at the transport position of the adjacent container gate 200, for example, at the ear portions 252 at both ends as shown in Figure 9.

[0071] As a result, by providing a flattening member 240 inside the container gate body 200 of the holding device, the flattening member 240 concentrates its pressure points on the latch mechanism 230 and the locking points of the container body 100 during the loading and transport process, and the large pressure on the ears on both sides can be distributed to the gate body shell 250 due to the extended length of the flattening member 240. Furthermore, this solves the problem that there is a limit to the load weight of the top-open type substrate container 10, and at the same time solves the problem that when the load weight reaches the upper limit, the container gate body 200 of the top-open type substrate container 10 is prone to distortion and deformation during the frequent transport and loading process, which affects airtightness and can lead to the container gate body 200 falling off or being damaged due to deformation and separation.

[0072] Furthermore, since the weight of the flattening member 240 is much lighter than that of the latch mechanism 230, the problem of having to use multiple latch mechanisms 230 to distribute and attach them to various parts of the container gate body 200 in order to stably lock the top-open type substrate container 10 can be solved. In this method, when the top-open type substrate container 10 is moved, the load being lifted is distributed by these multiple latch mechanisms 230, improving the deformation of the gate body. However, since it is necessary to use multiple latch mechanisms 230, not only does the overall weight of the top-open type substrate container 10 increase, but the assembly becomes more complex and the manufacturing cost increases. Also, the design of the container gate body 200 and the multiple latch mechanisms 230 becomes difficult in order to distribute the load. However, according to the flattening member 240 of the present invention, since its weight is much lighter than that of the latch mechanism 230, when a small number of latch mechanisms 230 are maintained, it is possible to solve the problem of the container gate body 200 deforming due to the flattening member 240, and the airtightness of the gate body can also be improved with the lightweight member.

[0073] In one embodiment of the present invention, multiple latch mechanisms 230 can be installed. This allows for an increase in the number of locking positions and adjustment to suit various structures. For example, by installing two latch mechanisms 230, an effective balance between locking and weight distribution can be achieved.

[0074] In one embodiment of the present invention, since there are multiple flattening members 240, the gate body shell 250 can be provided with different positions, different compressive structural support and force distribution. The multiple flattening members 240 are, for example, two, and are fixed to both sides of the gate body shell 250, so that the compression on the edges of the gate body shell 250 is evenly distributed, and the structural support and compression distribution of the ear portions 252 of the gate body shell 250 can be enhanced.

[0075] In one embodiment of the present invention, the extension length of the flattening member 240 extends from one end to the other of the gate shell 250 and is pushed out onto the two opposite inner walls of the container gate 200. This completely distributes the force received across the entire long side of the gate shell 250 and provides structural support to the entire gate shell 250.

[0076] In one embodiment of the present invention, the flattening member 240 and the latch mechanism 230 are arranged in parallel. This provides force distribution and structural support at the locking position near the latch mechanism 230. By arranging the flattening member 240 and the latch mechanism 230 in parallel, the pressure points of the ear portion 252 and the locking pressure points of the latch mechanism 230 can be uniformly distributed in the vicinity, and at the same time, this is also beneficial for the spatial distribution design within the gate body shell 250. Since the flattening member 240 and the latch mechanism 230 are arranged symmetrically, the support structure and pressure distribution can be made symmetrical, thereby preventing displacement and deformation of the container gate body 200.

[0077] In one embodiment of the present invention, the latch mechanism 230 includes a control member 231 and a latch arm 232. The control member 231 controls the latch arm 232 to selectively protrude out of the gate shell 250 or to retract the latch arm 232 so as to lock the container gate 200 to the container body 100, thereby releasing the lock between the container gate 200 and the container body 100. The control member 231 is, for example, a cam, which is driven to protrude or retract the latch arm 232 connected to the cam by rotating the cam. The flattening member 240 and the latch arm 232 of the latch mechanism 230 are arranged in parallel, providing force distribution and structural support near the locked position of the latch arm 232 and the container gate body 200. This also allows for uniform distribution of the pressure points of the ear portion 252 and the locking pressure points of the latch arm 232 in the vicinity, which is beneficial for the spatial distribution design within the gate body shell 250. This reduces the situation in which the flattening member 240 and the latch arm 232 overlap, maintaining the extended length of the flattening member 240 and effectively achieving structural support and force distribution. It should be noted that the number and position of the flattening members 240 and the latch mechanism 230 are not limited to the examples of this embodiment.

[0078] According to the flattening member 240 of the retaining device provided in the embodiment of the present invention, the flattening member 240 distributes the overall load of the container gate body 200, thereby strengthening the flatness of the gate body shell 250. This prevents gaps from forming in the airtight tape between the container gate body 200 and the container body 100, while simultaneously increasing the strength of the container gate body 200 and achieving the effects of flatness and airtightness. Furthermore, since the flattening member 240 can replace some of the latch mechanisms 230, the number of latch mechanisms 230 can be minimized. This reduces the overall weight of the container gate body 200, reduces wear on parts, and lowers production costs.

[0079] Thus, the holding device according to the present invention not only securely and stably fixes substrates mounted in a top-open type substrate container to prevent shaking and collisions of the substrates, but also maintains stability to avoid harm caused by shaking or an excessively low center of gravity when mounting different quantities of substrates, maintains the structural strength and airtightness of the container opening to keep the substrates inside the container opening clean and reduce the risk of them falling, and further provides the effect of protecting the mounted substrate container.

[0080] Although the present invention has shown superior embodiments above, those skilled in the art will find these embodiments merely illustrative and should not be interpreted as limiting the scope of the invention. It should be noted that any equivalent modifications or substitutions of the embodiments are understood to fall within the scope of the invention. Therefore, the scope of protection of the present invention is as defined in the claims, and the attached claims should be interpreted in the broadest sense, as they include all amendments, similar designs and processes, etc. [Explanation of Symbols]

[0081] 10. Top-opening type substrate container 100 Container body 110 Bottom engagement tool 120 Inner mounting section 130 Bottom positioning member 140 Support Members 150 fasteners 160 Support and auxiliary components 170 Positional displacement prevention member 180 storage space 190 Inner surface bottom 200 Container gate body 210 Inner surface 211 Second Guide Slope 220 Gate Panel 230 Latch mechanism 231 Control Member 232 Latch Arm 240 Flattening member 250 portal shells 251 Storage space 252 Ears 300 Retaining Assembly 310 Holding body 311 Inclined guide tank 320 Extrusion Actuator 321 Guide Section 322 First Guide Slope 323 Extrusion section 330 Elastic member 400 circuit board actuators 410 First fixed part 420 Elastic deformation part 430 Connection part 500 Elastic contact area 510 Fixed end 520 Elastic contact arm 600 Frame Body 610 Quick-release component 611 Contact part 612 Shoulder section 620 Displacement section 631 Frame positioning member 640 Stacking Alignment Section 650 Raised mounting surface 660 Recessed mounting surface 700 circuit boards 710 Stacking fixing part 720 Second fixed part 800 Semiconductor Workpieces

Claims

1. A top-opening type substrate container includes a container body and a container gate, the container gate, when combined with the container body, forms a storage space, and the storage space is a holding device for a top-opening type substrate container used to store multiple substrates. The holding device is A frame body for mounting the circuit board is provided in the aforementioned storage space, Multiple quick-release members are provided on the outside of the frame body, The storage space includes a plurality of displacement parts that provide a displacement space for the retaining assembly, Each of the aforementioned quick-release members includes a contact portion and a shoulder portion, The shoulder portion is connected to both sides of the contact portion, The inner wall of the container body is further provided with a plurality of fasteners. The aforementioned contact portion contacts the inner wall, A top-opening type substrate container holding device, characterized in that each fastener is fastened to the shoulder portion to fix the frame body.

2. The retaining device according to claim 1, characterized in that when the contact portion is compressed and distanced from the inner wall, the shoulder portion separates from the fastener, thereby making the frame body removable.

3. The bottom of the inner surface of the container body further includes a bottom positioning portion. The frame body includes a frame positioning member corresponding to the bottom positioning portion, The holding device according to claim 1, characterized in that the bottom positioning portion positions the frame positioning member to form a height distance between the frame body and the inner bottom surface of the container body, and the bottom positioning portion and the fastener are provided at the same horizontal height.

4. The holding device according to claim 1, wherein the inner wall of the container body is provided with a displacement prevention member for restricting the direction of the frame body housed in the storage space.

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