Position measurement system and position measurement method

Abstract

This position measurement system is for use in combination with a robot system that positions a processing device which performs a prescribed process on an object, and comprises: a position measuring device which emits measurement light and receives reflected light of the measurement light; and a control device. The control device controls the position measuring device so as to emit the measurement light on a first reflective member mounted to a mobile body capable of moving while having an object loaded thereon and a second reflective member mounted to the processing device, constructs a reference coordinate system on the basis of reflected light from the first reflective member, and generates position-posture information indicative of the position and posture of the processing device in the reference coordinate system on the basis of reflected light from the second reflective member.

Description

Position measurement system and position measurement method

[0001] The present invention relates to the technical field of a position measurement system and a position measurement method used in, for example, a robot system.

[0002] Robot systems that use robots to perform specific operations are used in a variety of situations. In such robot systems, the technical challenge is to accurately measure and appropriately control at least one of the position and orientation of the robot.

[0003] U.S. Patent No. 8,036,452

[0004] According to a first aspect, there is provided a position measurement system used in conjunction with a robot system having a robot that positions a processing device that performs a predetermined processing on an object in three-dimensional space, the position measurement system comprising: a position measurement device having an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; and a control device, wherein the control device controls the irradiation unit to irradiate the measurement light to each of a plurality of first reflecting members attached to a movable body that can move and on which the object is placed, and to each of a plurality of second reflecting members attached to the processing device; the control device constructs a reference coordinate system based on the reflected light from each of the plurality of first reflecting members received by the light receiving unit; and the position measurement system generates position and orientation information that indicates the position and orientation of the processing device in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members received by the light receiving unit.

[0005] According to a second aspect, there is provided a position measurement system used in a robot system equipped with a robot that positions a processing device that performs a predetermined processing on an object in three-dimensional space, the position measurement system including: a position measurement device having an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; and a control device, wherein the control device controls the irradiation unit to irradiate the measurement light to each of a plurality of first reflecting members attached to a movable body that can move and carry the object, each of a plurality of second reflecting members attached to the processing device, and each of a plurality of fourth reflecting members provided in a processing space where the processing device performs the predetermined processing on the object; the position measurement system constructs a reference coordinate system based on the reflected light received by the light receiving unit from each of the plurality of fourth reflecting members; generates position and orientation information that indicates the position and orientation of the movable body in the reference coordinate system based on the reflected light received by the light receiving unit from each of the plurality of first reflecting members; and generates position and orientation information that indicates the position and orientation of the processing device in the reference coordinate system based on the reflected light received by the light receiving unit from each of the plurality of second reflecting members.

[0006] According to a third aspect, there is provided a position measurement method for measuring the three-dimensional position of a processing device that is moved in three-dimensional space and performs a predetermined process on an object, the position measurement method including: irradiating measurement light from a position measurement device to each of a plurality of first reflecting members attached to a movable body that can move and that carries an object, and receiving the reflected light reflected from each of the plurality of first reflecting members; irradiating measurement light from the position measurement device to each of a plurality of second reflecting members attached to the processing device, and receiving the reflected light reflected from each of the plurality of second reflecting members; acquiring position information of the plurality of first reflecting members in three-dimensional space based on the reflected light from the plurality of first reflecting members; acquiring position information of the plurality of second reflecting members in three-dimensional space based on the reflected light from the plurality of second reflecting members; constructing a reference coordinate system based on the position information of the plurality of first reflecting members; and generating position and orientation information that indicates the position and orientation of the processing device in the reference coordinate system based on the position information of the plurality of second reflecting members.

[0007] According to a fourth aspect, there is provided a position measurement method for measuring the three-dimensional position of a processing device that is moved in a three-dimensional space and performs a predetermined process on an object, the method including: irradiating a measurement light from a position measurement device onto each of a plurality of first reflecting members attached to a movable body that can move with an object placed thereon, and receiving the reflected light reflected from each of the plurality of first reflecting members; irradiating a measurement light from the position measurement device onto each of a plurality of second reflecting members attached to the processing device, and receiving the reflected light reflected from each of the plurality of second reflecting members; irradiating a measurement light from the position measurement device onto each of a plurality of fourth reflecting members provided in a processing space in which the processing device performs a predetermined process on the object, and receiving the reflected light reflected from each of the plurality of fourth reflecting members. A position measurement method is provided that receives reflected light from each of a plurality of fourth reflecting members, acquires position information of the plurality of first reflecting members in three-dimensional space based on the reflected light from the plurality of first reflecting members, acquires position information of the plurality of second reflecting members in three-dimensional space based on the reflected light from the plurality of second reflecting members, constructs a reference coordinate system based on the position information of the plurality of fourth reflecting members, generates position and orientation information indicating the position and orientation of the moving body in the reference coordinate system based on the position information of the plurality of first reflecting members, and generates position and orientation information indicating the position and orientation of the processing device in the reference coordinate system based on the position information of the plurality of second reflecting members.

[0008] The functions and other advantages of the present invention will become apparent from the following detailed description of the preferred embodiments.

[0009] FIG. 1 is a system configuration diagram showing an example of the system configuration of a robot system in this embodiment. FIG. 2 is a perspective view schematically showing an example of the layout of the robot system. FIG. 3 is a side view showing the configuration of a processing robot. FIG. 4 is a side view showing the configuration of a measurement robot. FIG. 5 is a perspective view showing the configuration of a workpiece transportation device. FIG. 6 is a front view showing the appearance of a laser tracker. FIG. 7 is a cross-sectional view showing the configuration of an optical assembly provided in the laser tracker. FIG. 8 is a cross-sectional view showing the configuration of an optical interferometer. FIG. 9 is a block diagram showing the configuration of a tracker control device in this embodiment. FIG. 10 is a block diagram showing the configuration of a robot control device in this embodiment. FIG. 11 is a flowchart showing the operation flow of the robot system. FIG. 12 is a perspective view schematically showing a laser tracker that irradiates measurement light onto a reflector arranged in the workpiece transportation device. FIG. 13 is a perspective view schematically showing a reference coordinate system. FIG. 14 is a perspective view schematically showing a laser tracker that irradiates measurement light onto a reflector arranged in a processing head. FIG. 15 is a side view schematically showing a processing head moving within the processing robot coordinate system. FIG. 16 is a side view schematically showing a processing robot that processes a workpiece. FIG. 17 is a perspective view schematically showing a laser tracker that irradiates a measurement light onto a reflector arranged on a measurement head. FIG. 18 is a side view schematically showing a measurement head that moves within a measurement robot coordinate system. FIG. 19 is a side view schematically showing a measurement robot that measures a workpiece. FIG. 20 is a schematic diagram showing an example in which data conversion processing has not been performed. FIG. 21 is a schematic diagram showing three-dimensional shape data. FIG. 22 shows a workpiece W moving from a first processing space to a second processing space. FIG. 23 shows a workpiece W moving from the first processing space to the second processing space. FIG. 24 is a cross-sectional view showing a workpiece machined by an ideal processing operation and a workpiece machined by a processing operation in which a processing error occurs. FIG. 25(a) is a perspective view showing a reflector arranged on a jig, and FIG. 25(b) is a perspective view showing a reflector arranged on a workpiece.Fig. 26(a) is a perspective view showing an example of a workpiece in which there is no positional deviation relative to the reference coordinate system, Fig. 26(b) shows the positions of multiple reflectors calculated when there is no positional deviation of the workpiece relative to the reference coordinate system, Fig. 26(c) is a perspective view showing an example of a workpiece in which there is a positional deviation relative to the reference coordinate system, and Fig. 26(d) shows the positions of multiple reflectors calculated when there is a positional deviation of the workpiece relative to the reference coordinate system. Figs. 27(a) to 27(f) each show other examples of the reference coordinate system. Fig. 28 is a perspective view showing an example of a characteristic portion of a workpiece.

[0010] Hereinafter, embodiments of a position measurement system and a position measurement method will be described with reference to the drawings. Hereinafter, the position measurement system and the embodiment of the position measurement system will be described using a machining system PSYS used to machine a workpiece W, which is an example of an object.

[0011] (1) Configuration of the Machining System PSYS in the Present Embodiment First, the configuration of the machining system PSYS in the present embodiment will be described.

[0012] (1-1) Overall Configuration of the Processing System PSYS First, the configuration of the processing system PSYS in this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a system configuration diagram showing an example of the system configuration of the processing system PSYS in this embodiment. Figure 2 is a perspective view schematically showing an example of the layout of the processing system PSYS.

[0013] 1, the machining system PSYS includes a robot system RSYS and a position measurement system MSYS. The robot system RSYS is used together with the position measurement system MSYS. The position measurement system MSYS is used together with the robot system RSYS.

[0014] The robot system RSYS includes at least one robot (here, two robots: robot 1 and robot 2), a workpiece transport device 3, and a robot control device 6.

[0015] An end effector, which may be referred to as a processing device, is attached to the robot. The robot uses the end effector attached to the robot to perform a predetermined operation (in other words, a predetermined process) on the workpiece W. In particular, the robot performs the predetermined operation (in other words, a predetermined process) on the workpiece W in a processing space SP where the robot performs the predetermined process on the workpiece W.

[0016] In the example shown in FIG. 1 , a processing head 13, which will be described later with reference to FIG. 3 , is attached to the robot 1 as an end effector. In the following description, the robot 1 to which the processing head 13 is attached will be referred to as a processing robot 1. The processing robot 1 may also be referred to as a processing device. In the example shown in FIG. 1 , a measuring head 23, which will be described later with reference to FIG. 4 , is attached to the robot 2 as an end effector. In the following description, the robot 2 to which the measuring head 23 is attached will be referred to as a measuring robot 2. The measuring robot 2 may also be referred to as a measuring device. The robot system RSYS may include multiple processing robots 1. The robot system RSYS may include multiple measuring robots 2.

[0017] The processing robot 1 is a robot capable of processing a workpiece W. The processing robot 1 is a robot capable of performing a processing operation for processing the workpiece W as at least a part of a predetermined operation. The processing operation may be referred to as processing handling. The configuration of the processing robot 1 will be described later with reference to FIG. 3 .

[0018] The processing robots 1 perform processing operations according to the handling processes assigned to the processing robots 1. For example, the first processing robot 1 may perform a cutting operation as the processing operation according to the first handling process, and the second processing robot 1 may perform a polishing operation as the processing operation according to a second handling process different from the first handling process.

[0019] The processing robot 1 is disposed in a processing space SP. In the processing space SP, the processing robot 1 performs processing operations according to the processing step assigned to the processing robot 1. A single processing robot 1 may be disposed in one processing space SP. Alternatively, multiple processing robots 1 may be disposed in one processing space SP.

[0020] The processing robot 1 processes a workpiece W located in the processing space SP in which the processing robot 1 is located. For example, a first processing robot 1 located in a first processing space SP may process a workpiece W located in the first processing space SP, and a second processing robot 1 located in a second processing space SP different from the first processing space SP may process a workpiece W located in the second processing space SP. In this case, after the first processing robot 1 processes the workpiece W located in the first processing space SP, the workpiece W may be transported from the first processing space SP to the second processing space SP by a workpiece transport device 3 described below, and then the second processing robot 1 may process the workpiece W located in the second processing space SP.

[0021] The measuring robot 2 is a robot capable of measuring the workpiece W. The measuring robot 2 is a robot capable of performing a measurement operation to measure the workpiece W as at least a part of a predetermined operation. The measurement operation may also be referred to as a measurement process. In this embodiment, an example will be described in which the measuring robot 2 is a robot capable of measuring the three-dimensional shape of the workpiece W. That is, in this embodiment, an example will be described in which the measuring robot 2 is a robot capable of performing a measurement operation to measure the three-dimensional shape of the workpiece W. The configuration of the measuring robot 2 will be described later with reference to FIG. 4.

[0022] The measuring robot 2 may be arranged in a processing space SP in which at least one processing robot 1 corresponding to the measuring robot 2 is arranged. In this case, the measuring robot 2 measures the workpiece W located in the processing space SP in which the measuring robot 2 is arranged. For example, a first measuring robot 2 arranged in a first processing space SP may measure the workpiece W located in the first processing space SP, and a second measuring robot 2 arranged in a second processing space SP different from the first processing space SP may measure the workpiece W located in the second processing space SP. In this case, after the first measuring robot 2 measures the workpiece W located in the first processing space SP, the workpiece W may be transported from the first processing space SP to the second processing space SP by a work transport device 3 described later, and then the second measuring robot 2 may measure the workpiece W located in the second processing space SP.

[0023] The measuring robot 2 may measure the workpiece W before the processing robot 1 installed in the same processing space SP starts processing the workpiece W. The measuring robot 2 may measure the workpiece W after the processing robot 1 installed in the same processing space SP starts processing the workpiece W. The measuring robot 2 may measure the workpiece W during at least a part of the period during which the processing robot 1 installed in the same processing space SP is processing the workpiece W. The measuring robot 2 may measure the workpiece W after the processing robot 1 installed in the same processing space SP has finished processing the workpiece W.

[0024] The processing space SP in which the processing robot 1 performs the processing operation may be referred to as a processing space, and the processing space SP in which the measuring robot 2 performs the measurement operation may be referred to as a measurement processing space.

[0025] The workpiece transport device 3 is capable of transporting the workpiece W. For example, the workpiece transport device 3 may transport the workpiece W to a processing space SP in which the processing robot 1 and the measuring robot 2 are arranged. For example, the workpiece transport device 3 may transport the workpiece W to a processing position within the processing space SP where the processing robot 1 can process the workpiece W. For example, the workpiece transport device 3 may transport the workpiece W to a measurement position within the processing space SP where the measuring robot 2 can measure the workpiece W. The measurement position may be the same as or different from the processing position. Alternatively, as described above, the workpiece transport device 3 may transport the workpiece W from a first processing space SP to a second processing space SP different from the first processing space SP.

[0026] The robot control device 6 is capable of controlling the processing robot 1. For example, the robot control device 6 may generate a robot control signal for controlling the processing robot 1 and output the generated robot control signal to the processing robot 1, thereby controlling the processing robot 1. As an example, the robot control device 6 may generate a robot control signal for controlling the processing robot 1 to process the workpiece W. As an example, the robot control device 6 may generate a robot control signal for controlling the processing robot 1 to change at least one of the position and posture of the processing head 13, based on robot control information generated by the tracker control device 5, which will be described later.

[0027] The robot control device 6 can further control the measuring robot 2. For example, the robot control device 6 may generate a robot control signal for controlling the measuring robot 2 and output the generated robot control signal to the measuring robot 2, thereby controlling the measuring robot 2. As an example, the robot control device 6 may generate a robot control signal for controlling the measuring robot 2 so as to measure the workpiece W. As an example, the robot control device 6 may generate a robot control signal for controlling the measuring robot 2 so as to change at least one of the position and posture of the measuring head 23, based on robot control information generated by the tracker control device 5, which will be described later.

[0028] The position measurement system MSYS includes a laser tracker 4 and a tracker control device 5 .

[0029] The laser tracker 4 is a position measurement device (in other words, a position and orientation measurement device) capable of measuring at least one of the position and orientation of a measurement object. Examples of the measurement object include at least one of the processing robot 1, the measurement robot 2, the workpiece transport device 3, the workpiece W, and a reference position set in the processing space SP. To measure at least one of the position and orientation of the measurement object, the laser tracker 4 can irradiate the measurement object with a measurement light ML. The measurement light ML is typically a laser beam, but the measurement light ML may be a light other than a laser beam. Furthermore, the laser tracker 4 can receive reflected light RL from the measurement object irradiated with the measurement light ML. In other words, the laser tracker 4 can receive reflected light RL of the measurement light ML. Light reception information indicating the reception result of the reflected light RL by the laser tracker 4 is output from the laser tracker 4 to the tracker control device 5.

[0030] The tracker control device 5 can control the laser tracker 4 to irradiate the measurement light ML toward the measurement object. As a result, the tracker control device 5 acquires light reception information from the laser tracker 4 that indicates the light reception result of the reflected light RL.

[0031] The tracker control device 5 can further calculate at least one of the position and orientation of the measurement object based on the acquired light reception information. The position of the measurement object may refer to at least one of the position of the measurement object along a first axis (e.g., the X axis), the position of the measurement object along a second axis (e.g., the Y axis) perpendicular to the first axis, and the position of the measurement object along a third axis (e.g., the Z axis) perpendicular to the first and second axes. The orientation of the measurement object may refer to at least one of the amount of rotation of the measurement object around the first axis (e.g., the X axis), the amount of rotation of the measurement object around a second axis (e.g., the Y axis) perpendicular to the first axis, and the amount of rotation of the measurement object around a third axis (e.g., the Z axis) perpendicular to the first and second axes. Furthermore, the position and orientation of the measurement object may respectively refer to the position and orientation of a point (e.g., the center of gravity) inside the measurement object. The position and orientation of the measurement object may respectively refer to the position and orientation of a point on the surface of the measurement object. The position and orientation of the measurement object may be the position and orientation of a point that is fixed in positional relationship with the measurement object and is spaced apart from the measurement object.

[0032] The orientation of the measurement object may be considered to mean at least one of the position of the measurement object in the rotation direction about a first axis (e.g., X-axis), the position of the measurement object in the rotation direction about a second axis (e.g., Y-axis) orthogonal to the first axis, and the position of the measurement object in the rotation direction about a third axis (e.g., Z-axis) orthogonal to the first and second axes. In other words, the orientation of the measurement object may be considered to be an example of the position of the measurement object.

[0033] For example, the tracker control device 5 may calculate at least one of the position and posture of the processing robot 1 based on light reception information indicating the result of receiving the reflected light RL from the processing robot 1. Note that in this embodiment, an example will be described in which the position and posture of a processing head 13 (described later) attached to the processing robot 1 is used as the position and posture of the processing robot 1. For example, the tracker control device 5 may calculate at least one of the position and posture of the measuring head 23 based on light reception information indicating the result of receiving the reflected light RL from the measuring robot 2. Note that in this embodiment, an example will be described in which the position and posture of a measuring head 23 (described later) attached to the measuring robot 2 is used as the position and posture of the measuring robot 2. For example, the tracker control device 5 may calculate at least one of the position and posture of the work transportation device 3 based on light reception information indicating the result of receiving the reflected light RL from the work transportation device 3. As will be described later, since the workpiece W is placed on the workpiece transportation device 3, the process of calculating at least one of the position and posture of the workpiece transportation device 3 based on light reception information indicating the result of receiving the reflected light RL from the workpiece transportation device 3 may be considered equivalent to the process of calculating at least one of the position and posture of the workpiece W placed on the workpiece transportation device 3 based on light reception information indicating the result of receiving the reflected light RL from the workpiece W. For example, the tracker control device 5 may calculate at least one of the position and posture of the workpiece W based on light reception information indicating the result of receiving the reflected light RL from the workpiece W. Since the workpiece W is placed on the workpiece transportation device 3, the process of calculating at least one of the position and posture of the workpiece W based on light reception information indicating the result of receiving the reflected light RL from the workpiece W may be considered equivalent to the process of calculating at least one of the position and posture of the workpiece transportation device 3 on which the workpiece W is placed based on light reception information indicating the result of receiving the reflected light RL from the workpiece W.

[0034] Furthermore, in this embodiment, the tracker control device 5 can construct (in other words, generate, set, or define) a reference coordinate system based on the acquired light reception information. The reference coordinate system is a coordinate system used as a reference in the processing space SP. In this case, the tracker control device 5 may calculate the position of the measurement object in the reference coordinate system as the position of the measurement object. The tracker control device 5 may calculate the orientation of the measurement object in the reference coordinate system as the orientation of the measurement object. For example, the tracker control device 5 may calculate at least one of the following as the position of the measurement object along the X-axis of the reference coordinate system, the Y-axis of the reference coordinate system that is orthogonal to the X-axis of the reference coordinate system, and the Z-axis of the reference coordinate system that is orthogonal to the X-axis and Y-axis of the reference coordinate system. For example, the tracker control device 5 may calculate at least one of the amount of rotation of the measurement object around the X-axis of the reference coordinate system, the Y-axis of the reference coordinate system, and the Z-axis of the reference coordinate system.

[0035] In the following description, unless otherwise specified, the X-axis, Y-axis, and Z-axis refer to the X-axis in the reference coordinate system, the Y-axis in the reference coordinate system, and the Z-axis in the reference coordinate system, respectively.

[0036] The tracker control device 5 can further generate robot control information based on at least one of the position and orientation of the measurement target object calculated by the tracker control device 5. The robot control information may include information that the robot control device 6 can use to control at least one of the processing robot 1 and the measuring robot 2. For example, the robot control information may include information that the robot control device 6 can use to control the position of the processing head 13. For example, the robot control information may include information that the robot control device 6 can use to control the orientation of the processing head 13. For example, the robot control information may be information on at least one of the position and orientation of the processing head 13. In other words, the robot control information may include information that the robot control device 6 can use to drive the processing robot 1 to position the processing head 13. For example, the robot control information may include information that the robot control device 6 can use to control the position of the measuring head 23. For example, the robot control information may include information that the robot control device 6 can use to control the orientation of the measuring robot 2. For example, the robot control information may be information on at least one of the position and orientation of the measuring head 23. In other words, the robot control information may include information that the robot control device 6 can use to drive the measuring robot 2 to position the measuring head 23. The robot control information generated by the tracker control device 5 is output from the tracker control device 5 to the robot control device 6 .

[0037] (1-2) Configuration of Processing Robot 1 Next, the configuration of the processing robot 1 will be described with reference to Fig. 3. Fig. 3 is a side view showing the configuration of the processing robot 1.

[0038] As shown in FIG. 3 , the processing robot 1 includes a base 11 , a robot arm 12 , and a processing head 13 .

[0039] The base 11 is a component that forms the base of the processing robot 1. The base 11 is placed on a support surface SS, such as a floor surface. The base 11 may be fixed to the support surface SS. Alternatively, the base 11 may be movable relative to the support surface SS. As an example, the base 11 may be self-propelled on the support surface SS. In this case, the base 11 may be installed on an automated guided vehicle. Alternatively, an automated guided vehicle may be used as the base 11. Examples of automated guided vehicles include at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). Note that FIG. 3 shows an example in which the base 11 is fixed to the support surface SS.

[0040] The robot arm 12 is attached to the base 11. The robot arm 12 is a device in which a plurality of links 121 are connected via joints 122. An actuator is built into the joint 122. The link 121 may be rotatable around an axis defined by the joint 122 by the actuator built into the joint 122. At least one link 121 may be extendable and contractible along the direction in which the link 121 extends. A device including the device in which a plurality of links 121 are connected via joints 122 and the base 11 may be referred to as the robot arm 12.

[0041] An end effector is attached to the robot arm 12. In the example shown in FIG. 3 , the end effector is attached to a movable part 123 located at the tip of the robot arm 12. The movable part 123 may also be referred to as a processing movable part. The movable part 123 is movable by the movement of the robot arm 12. As a result, the end effector attached to the movable part 123 is also movable by the movement of the robot arm 12. In other words, the robot arm 12 moves the end effector and positions it in three-dimensional space. In other words, the processing robot 1 moves the end effector and positions it in three-dimensional space.

[0042] In this embodiment, a processing head 13, which is an example of an end effector, is attached to the robot arm 12. In this case, the robot arm 12 may be referred to as a processing robot arm 12. The processing head 13 is a processing device capable of processing the workpiece W. The processing head 13 is a processing device capable of performing a processing operation to process the workpiece W.

[0043] The processing head 13 may be a processing device capable of processing the workpiece W by bringing a tool called a processing tool into contact with the workpiece W. In other words, the processing head 13 may be a processing device capable of performing mechanical processing using a tool. The processing head 13 may be a processing device capable of processing the workpiece W by irradiating a processing beam such as processing light onto the workpiece W. As one example, the processing head 13 may be a processing device capable of performing removal processing to remove a portion of the workpiece W by irradiating a processing beam onto the workpiece W. As another example, the processing head 13 may be a processing device capable of performing additional processing to form a shaped object on the workpiece W by irradiating a processing beam onto the workpiece W.

[0044] A reflector 14 is disposed on the processing head 13. Typically, the reflector 14 is attached to the processing head 13. The reflector 14 is a reflective member that reflects light incident on the reflector 14. Typically, the reflector 14 is a retroreflective member that retroreflects light incident on the reflector 14. Note that the reflector 14 may be attached in the vicinity of the processing head 13 in addition to or instead of the processing head 13 itself. For example, the reflector 14 may be attached to the movable part 123.

[0045] The above-mentioned laser tracker 4 irradiates a measuring light ML onto a reflector 14 attached to the machining head 13 in order to measure at least one of the position and orientation of the machining head 13 (i.e., at least one of the position and orientation of the machining robot 1). The reflector 14 reflects the measuring light ML incident on the reflector 14. The laser tracker 4 receives reflected light RL, which is the measuring light ML reflected by the reflector 14. The tracker control device 5 calculates at least one of the position and orientation of the machining head 13 based on light reception information indicating the result of receiving the reflected light RL from the reflector 14.

[0046] In this embodiment, multiple reflectors 14 are arranged on the machining head 13. In particular, at least three reflectors 14 are arranged on the machining head 13. In this case, the relative positions of the multiple reflectors 14 are known, so the tracker control device 5 can calculate the position of the machining head 13 along each of the X-axis, Y-axis, and Z-axis and the amount of rotation of the machining head 13 around each of the X-axis, Y-axis, and Z-axis based on light reception information indicating the results of receiving reflected light RL from each of the at least three reflectors 14. However, two or less reflectors 14 may be arranged on the machining head 13. Even in this case, the tracker control device 5 can calculate the position of the machining head 13 along parts of the X-axis, Y-axis, and Z-axis and / or the amount of rotation of the machining head 13 around parts of the X-axis, Y-axis, and Z-axis based on light reception information indicating the results of receiving reflected light RL from each of the two or less reflectors 14.

[0047] (1-3) Configuration of Measuring Robot 2 Next, the configuration of the measuring robot 2 will be described with reference to Fig. 4. Fig. 4 is a side view showing the configuration of the measuring robot 2.

[0048] As shown in FIG. 4, the measuring robot 2 includes a base 21, a robot arm 22, and a measuring head 23.

[0049] The base 21 is a component that forms the foundation of the measuring robot 2. The base 21 is placed on a support surface SS, such as a floor surface. The base 21 may be fixed to the support surface SS. Alternatively, the base 21 may be movable relative to the support surface SS. As an example, the base 21 may be self-propelled on the support surface SS. In this case, the base 21 may be installed on an automated guided vehicle. Alternatively, an automated guided vehicle may be used as the base 21. An example of an automated guided vehicle is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). Note that FIG. 4 shows an example in which the base 21 is fixed to the support surface SS.

[0050] The robot arm 22 is attached to the base 21. The robot arm 22 is a device in which a plurality of links 221 are connected via joints 222. An actuator is built into the joint 222. The link 221 may be rotatable around an axis defined by the joint 222 by the actuator built into the joint 222. At least one link 221 may be extendable and contractible along the direction in which the link 221 extends. A device including the device in which a plurality of links 221 are connected via joints 222 and the base 21 may be referred to as the robot arm 22.

[0051] An end effector is attached to the robot arm 22. In the example shown in FIG. 4 , the end effector is attached to a movable part 223 located at the tip of the robot arm 22. The movable part 223 may also be referred to as a measurement movable part. The movable part 223 is movable by the movement of the robot arm 22. As a result, the end effector attached to the movable part 223 is also movable by the movement of the robot arm 22. In other words, the robot arm 22 moves the end effector and positions it in three-dimensional space. In other words, the measurement robot 2 moves the end effector and positions it in three-dimensional space.

[0052] In this embodiment, a measurement head 23, which is an example of an end effector, is attached to the robot arm 22. In this case, the robot arm 22 may be referred to as a measuring robot arm 22. The measurement head 23 is a measuring device capable of measuring the workpiece W. The measurement head 23 is a measuring device capable of performing a measurement operation to measure the workpiece W.

[0053] In this embodiment, an example will be described in which the measurement head 23 is a shape measuring device capable of measuring the three-dimensional shape of the workpiece W. That is, in this embodiment, an example will be described in which the measurement head 23 is a shape measuring device capable of performing a measurement operation to measure the three-dimensional shape of the workpiece W. A three-dimensional scanner is an example of such a measurement head 23 capable of measuring the three-dimensional shape of the workpiece W. Another example of the measurement head 23 is a stereo camera.

[0054] Three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W by the measurement head 23 is output from the measurement head 23 to the tracker control device 5. The three-dimensional shape data may also be referred to as three-dimensional shape information or three-dimensional shape measurement results. An example of three-dimensional shape data is point cloud data indicating the three-dimensional shape of the workpiece W. The tracker control device 5 may generate the above-mentioned robot control information based on the three-dimensional shape data.

[0055] A reflector 24 is disposed on the measurement head 23. Typically, the reflector 24 is attached to the measurement head 23. The reflector 24 is a reflective member that reflects light incident on the reflector 24. Typically, the reflector 24 is a retroreflective member that retroreflects light incident on the reflector 24. Note that the reflector 24 may be attached in the vicinity of the measurement head 23 in addition to or instead of the measurement head 23 itself. For example, the reflector 24 may be attached to the movable part 223.

[0056] The above-mentioned laser tracker 4 irradiates a reflector 24 attached to the measurement head 23 with measurement light ML in order to measure at least one of the position and orientation of the measurement head 23 (i.e., at least one of the position and orientation of the measurement robot 2). The reflector 24 reflects the measurement light ML incident on the reflector 24. The laser tracker 4 receives reflected light RL, which is the measurement light ML reflected by the reflector 24. The tracker control device 5 calculates at least one of the position and orientation of the measurement head 23 based on light reception information indicating the reception result of the reflected light RL from the reflector 24.

[0057] In this embodiment, the measurement head 23 is provided with a plurality of reflectors 24. In particular, the measurement head 23 is provided with at least three reflectors 24. In this case, the relative positions of the plurality of reflectors 24 are known, and therefore the tracker control device 5 can calculate the position of the measurement head 23 along each of the X-axis, Y-axis, and Z-axis and the amount of rotation of the measurement head 23 about each of the X-axis, Y-axis, and Z-axis based on light reception information indicating the results of receiving the reflected light RL from each of the at least three reflectors 24. However, two or fewer reflectors 24 may be provided on the measurement head 23. Even in this case, the tracker control device 5 can calculate the position of the measurement head 23 along some of the X-axis, Y-axis, and Z-axis and / or the amount of rotation of the measurement head 23 about some of the X-axis, Y-axis, and Z-axis based on light reception information indicating the results of receiving the reflected light RL from each of the two or fewer reflectors 24.

[0058] (1-5) Configuration of the workpiece transport device 3 Next, the configuration of the workpiece transport device 3 will be described with reference to Fig. 5. Fig. 5 is a side view showing the configuration of the workpiece transport device 3.

[0059] As shown in FIG. 5 , the workpiece transport device 3 includes a transport body 31 and a drive unit 32. The transport body 31 is movable using the power of the drive unit 32, such as a motor. The transport body 31 is a mobile body that can be moved using the power of the drive unit 32, such as a motor. For example, the transport body 31 may move from a first processing space SP in which the first processing robot 1 and the first measuring robot 2 are arranged toward a second processing space SP in which the second processing robot 1 and the second measuring robot 2 are arranged. For example, the transport body 31 may move within the first processing space SP in which the first processing robot 1 and the first measuring robot 2 are arranged. For example, the transport body 31 may move within the second processing space SP in which the second processing robot 1 and the second measuring robot 2 are arranged.

[0060] 5 shows a workpiece transport device 3 equipped with a transport body 31 that can move on the support surface SS. That is, FIG. 5 shows an example in which the workpiece transport device 3 is an automated guided vehicle. Examples of automated guided vehicles include at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). However, the transport body 31 may be movable so as to fly in the space above the support surface SS. In this case, a drone or the like that can fly may be used as the workpiece transport device 3.

[0061] A portion of the transport body 31 is used as a mounting surface 311 on which the workpiece W is placed. In the example shown in FIG. 5 , at least a portion of the upper surface of the transport body 31 is used as the mounting surface 311 on which the workpiece W is placed. The transport body 31 may hold the workpiece W placed on the mounting surface 311. In this case, the transport body 31 may be equipped with a holding member for holding the workpiece W. An example of the holding member is at least one of a jig, a vacuum suction chuck, and an electrostatic suction chuck. Alternatively, the transport body 31 does not need to hold the workpiece W placed on the mounting surface 311. In this case, the workpiece W may be placed on the workpiece W without clamping.

[0062] The transport body 31 may move with the workpiece W placed on the placement surface 311. As a result, the workpiece transport device 3 can transport the workpiece W placed on the placement surface 311. However, the transport body 31 may also move with no workpiece W placed on the placement surface 311.

[0063] A reflector 34 is disposed on the transport body 31. Typically, the reflector 34 is attached to the transport body 31. The reflector 34 is a reflective member that reflects light incident on the reflector 34. Typically, the reflector 34 is a retroreflective member that retroreflects light incident on the reflector 34.

[0064] The reflector 34 may be disposed at a fixed position relative to the workpiece W. In other words, the reflector 34 may be disposed at a position that satisfies the condition that the positional relationship between the reflector 34 and the workpiece W does not change. The reflector 34 may be disposed at a position that satisfies the condition that the positional relationship between the reflector 34 and the workpiece W does not change even when the workpiece W is transported. The position on the transport body 31 is an example of a position that satisfies the condition that the positional relationship between the reflector 34 and the workpiece W does not change. This is because the workpiece W is placed on the workpiece transport device 3, and therefore the workpiece W also moves as the workpiece transport device 3 moves.

[0065] To construct a reference coordinate system, the laser tracker 4 described above irradiates a reflector 34 attached to the carrier body 31 with measurement light ML. The reflector 34 reflects the measurement light ML that is incident on the reflector 34. The laser tracker 4 receives reflected light RL, which is the measurement light ML reflected by the reflector 34. The tracker control device 5 constructs the reference coordinate system based on light reception information that indicates the result of receiving the reflected light RL from the reflector 34. The method for constructing the reference coordinate system will be described in detail later with reference to FIG. 11 etc.

[0066] The above-described laser tracker 4 irradiates the reflector 34 attached to the transport body 31 with measurement light ML in order to measure at least one of the position and posture of at least one of the work transport device 3 and the workpiece W placed on the work transport device 3. In this case, the tracker control device 5 may calculate at least one of the position and posture of at least one of the workpiece transport device 3 and the workpiece W based on light reception information indicating the result of receiving the reflected light RL from the reflector 34.

[0067] In this embodiment, a plurality of reflectors 34 are disposed on the transport body 31. In particular, at least three reflectors 34 are disposed on the transport body 31. In this case, the relative positional relationships between the plurality of reflectors 34 are known, and therefore the tracker control device 5 can calculate at least one position of the work transport device 3 and the workpiece W along each of the X-axis, Y-axis, and Z-axis described above, and at least one rotation amount of the work transport device 3 and the workpiece W around each of the X-axis, Y-axis, and Z-axis described above, based on light reception information indicating the results of receiving reflected light RL from each of the at least three reflectors 34. However, two or less reflectors 34 may be disposed on the transport body 31. Even in this case, the tracker control device 5 can calculate at least one position of the work transport device 3 and the workpiece W along a portion of the X-axis, Y-axis, and Z-axis, and / or at least one rotation amount of the work transport device 3 and the workpiece W around a portion of the X-axis, Y-axis, and Z-axis, based on light reception information indicating the results of receiving reflected light RL from each of the two or less reflectors 34.

[0068] (1-5) Configuration of Laser Tracker 4 Next, the configuration of the laser tracker 4 will be described with reference to Fig. 6. Fig. 6 is a front view showing the appearance of the laser tracker 4.

[0069] As shown in FIG. 6, the laser tracker 4 includes a base 41 and a housing 42 .

[0070] The base 41 is a component that forms the foundation of the laser tracker 4. The base 41 is placed on a support surface SS, such as a floor surface. The base 41 may be fixed to the support surface SS. Alternatively, the base 41 may be movable relative to the support surface SS. As an example, the base 41 may be self-propelled on the support surface SS. In this case, the base 41 may be installed on an automated guided vehicle. Alternatively, an automated guided vehicle may be used as the base 41. An example of an automated guided vehicle is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). Note that FIG. 6 shows an example in which the base 41 is fixed to the support surface SS.

[0071] The housing 42 is attached to the base 41. The housing 42 is a component that houses the optical assembly 43. The housing 42 may be rotatable around a predetermined rotation axis. In the example shown in FIG. 6 , the housing 42 is rotatable around a rotation axis along the Y axis (e.g., an axis extending horizontally) in a tracker coordinate system defined with reference to the laser tracker 4, and a rotation axis along the Z axis (e.g., an axis extending vertically or in the direction of gravity) in the tracker coordinate system. In other words, the housing 42 is rotatable along a pan direction (longitude direction), which is a rotation direction around a rotation axis along the vertical direction or the direction of gravity, and a tilt direction (latitude direction), which is a rotation direction around a rotation axis along the horizontal direction.

[0072] The configuration of the optical assembly 43 is shown in FIG. 7 . Note that FIG. 7 merely shows one example of the configuration of the optical assembly 43, and the configuration of the optical assembly 43 is not limited to the configuration shown in FIG. 7 . The optical assembly 43 may have any configuration capable of measuring at least one of the position and orientation of a measurement object. The optical assembly 43 may have any configuration capable of irradiating the measurement object with measurement light ML and receiving reflected light RL from the measurement object. The optical assembly 43 may have any configuration capable of irradiating each of the above-mentioned reflectors 14, 24, and 34 with measurement light ML and receiving reflected light RL from each of the above-mentioned reflectors 14, 24, and 34.

[0073] As shown in FIG. 7, the optical assembly 43 includes an optical comb interferometer 431 , a beam steering mirror 432 , a camera 433 , and a half mirror 434 .

[0074] The optical comb interferometer 431 emits measurement light ML. The measurement light ML emitted from the optical comb interferometer 431 passes through the half mirror 434, is reflected by the beam steering mirror 432, and is emitted toward the outside of the housing 42 through an opening 421 formed in the housing 42. As a result, the measurement light ML is irradiated onto the measurement object. In other words, the optical comb interferometer 431 irradiates the measurement light ML onto the measurement object via the half mirror 434 and the beam steering mirror 432. Therefore, the optical comb interferometer 431 functions as an irradiation unit that irradiates the measurement light ML onto the measurement object.

[0075] To measure at least one of the position and orientation of the measurement object, the optical comb interferometer 431 irradiates a reflector arranged on the measurement object with the measurement light ML. For example, to measure at least one of the position and orientation of the machining head 13, the optical comb interferometer 431 may irradiate a reflector 14 arranged on the machining head 13 with the measurement light ML. For example, to measure at least one of the position and orientation of the measurement head 23, the optical comb interferometer 431 may irradiate a reflector 24 arranged on the measurement head 23 with the measurement light ML. For example, to measure at least one of the position and orientation of the workpiece transportation device 3, the optical comb interferometer 431 may irradiate a reflector 34 arranged on the workpiece transportation device 3 with the measurement light ML. For example, to measure at least one of the position and orientation of the workpiece W, the optical comb interferometer 431 may irradiate a reflector 34 arranged on the workpiece transportation device 3 (or the workpiece W) with the measurement light ML.

[0076] As described above, since the results of receiving the reflected light RL are used to construct a reference coordinate system, the optical comb interferometer 431 may irradiate the measurement light ML onto a reflector 34 arranged on the work transport device 3, as described in detail later, in order to construct the reference coordinate system.

[0077] The housing 42 rotates along at least one of the pan direction and the tilt direction so that the measurement light ML is irradiated onto a desired reflector arranged on a desired measurement object. Specifically, when the housing 42 rotates along at least one of the pan direction and the tilt direction, the direction in which the measurement light ML is emitted from the housing 42 changes. Therefore, the housing 42 rotates along at least one of the pan direction and the tilt direction so that the measurement light ML is emitted from the housing 42 toward a desired reflector arranged on a desired measurement object. For example, during a period in which the measurement light ML is to be irradiated onto a desired reflector 14 arranged on the processing head 13, the housing 42 may rotate along at least one of the pan direction and the tilt direction so that the measurement light ML is irradiated onto a desired reflector 14 arranged on the processing robot 1. For example, during a period in which the measurement light ML is to be irradiated onto a desired reflector 24 arranged on the measurement head 23, the housing 42 may rotate along at least one of the pan direction and the tilt direction so that the measurement light ML is irradiated onto a desired reflector 24 arranged on the measurement head 23. For example, during the period when the measurement light ML is to be irradiated onto the desired reflector 34 arranged on the work transport device 3, the housing 42 may rotate and move along at least one of the pan direction and tilt direction so that the measurement light ML is irradiated onto the desired reflector 34 arranged on the work transport device 3.

[0078] Note that the laser tracker 4 may rotate and move only a portion of the housing 42 along at least one of the pan direction and the tilt direction so that the measurement light ML is irradiated onto a desired reflector arranged on a desired measurement object. For example, only the beam steering mirror 432 may be housed in the housing 42, and the other elements of the optical assembly 43 may be housed inside the base 41, and the laser tracker 4 may rotate and move only the beam steering mirror 432 relative to the base 41 (i.e., the other elements of the optical assembly 43) along at least one of the pan direction and the tilt direction.

[0079] The reflected light RL from the measurement object enters the housing 42 through an opening 421 formed in the housing 42, is reflected by the beam steering mirror 432, passes through the half mirror 434, and enters the optical comb interferometer 431. The optical comb interferometer 431 receives the reflected light RL that has entered the optical comb interferometer 431. Therefore, the optical comb interferometer 431 functions as a light receiving unit that receives the reflected light RL.

[0080] An example of the configuration of the optical comb interferometer 431 is shown in Fig. 8. As shown in Fig. 8, the optical comb interferometer 431 includes two measurement light sources 4310 (specifically, measurement light source 4310#1 and measurement light source 4310#2), a beam splitter 4311, a beam splitter 4312, a detector 4313, a beam splitter 4314, a mirror 4315, and a detector 4316.

[0081] The measurement light source 4310 can generate the measurement light ML. Below, an example will be described in which the measurement light source 4310 is an optical comb light source. In this case, the measurement light source 4310 generates pulsed light including frequency components equally spaced on the frequency axis as the measurement light ML. Light including frequency components equally spaced on the frequency axis may be referred to as an optical frequency comb. The measurement light sources 4310#1 and #2 each emit two measurement light beams ML that are phase-synchronized with each other and coherent. For example, the measurement light sources 4310#1 and #2 may have different oscillation frequencies. Therefore, the multiple measurement light beams ML emitted by the measurement light sources 4310#1 and #2 each have different pulse frequencies (e.g., the number of pulsed light beams per unit time, which is the reciprocal of the emission period of the pulsed light beams). As an example, the measurement light source 4310#1 may emit measurement light ML#1 having a pulse frequency of 25 GHz as measurement light ML, and the measurement light source 4310#2 may emit measurement light ML#2 having a pulse frequency of 25 GHz + α (e.g., +100 kHz) as measurement light ML.

[0082] The measurement light ML emitted from the measurement light source 4310 is incident on the beam splitter 4311. Specifically, the measurement light ML#1 emitted from the measurement light source 4310#1 and the measurement light ML#2 emitted from the measurement light source 4310#2 are incident on the beam splitter 4311. The beam splitter 4311 emits the measurement light ML#1 and ML#2 incident on the beam splitter 4311 toward the beam splitter 4312.

[0083] The beam splitter 4312 reflects measurement light ML#1-1, which is a part of measurement light ML#1 that is incident on the beam splitter 4312, toward the detector 4313. The beam splitter 4312 emits measurement light ML#1-2, which is another part of measurement light ML#1 that is incident on the beam splitter 4312, toward the beam splitter 4314. The beam splitter 4312 reflects measurement light ML#2-1, which is a part of measurement light ML#2 that is incident on the beam splitter 4312, toward the detector 4313. The beam splitter 4312 emits measurement light ML#2-2, which is another part of measurement light ML#2 that is incident on the beam splitter 4312, toward the beam splitter 4314.

[0084] The measurement beams ML#1-1 and ML#2-1 emitted from the beam splitter 4312 are incident on the detector 4313. The detector 4313 detects (in other words, receives) the measurement beams ML#1-1 and ML#2-1. Specifically, the detector 4313 detects (in other words, receives) interference light generated by the interference between the measurement beams ML#1-1 and ML#2-1. For this reason, the detector 4313 may be equipped with a light-receiving element (a light-receiving unit, typically a photoelectric conversion element) capable of receiving light. The detection result of the detector 4313 (i.e., the light-receiving result of the measurement beams ML#1-1 and ML#2-1) is output to the tracker control device 5 as part of light-receiving information indicating the light-receiving result of the reflected light RL by the laser tracker 4.

[0085] The measurement beams ML#1-2 and ML#2-2 emitted from the beam splitter 4312 are incident on the beam splitter 4314. The beam splitter 4314 emits at least a portion of the measurement beam ML#1-2 incident on the beam splitter 4314 toward a mirror 4315. The beam splitter 4314 emits at least a portion of the measurement beam ML#2-2 incident on the beam splitter 4314 toward a half mirror 434 outside the optical comb interferometer 431.

[0086] Measurement light ML#1-2 emitted from beam splitter 4314 is incident on mirror 4315. Measurement light ML#1-2 incident on mirror 4315 is reflected by the reflective surface of mirror 4315. Specifically, mirror 4315 emits measurement light ML#1-2 incident on mirror 4315 as measurement light ML#1-3, which is its reflected light, toward beam splitter 4314. Measurement light ML#1-3 emitted from mirror 4315 is incident on beam splitter 4314. Beam splitter 4314 emits measurement light ML#1-3 incident on beam splitter 4314 toward beam splitter 4312. Measurement light ML#1-3 emitted from beam splitter 4314 is incident on beam splitter 4312. The beam splitter 4312 emits the measurement beams ML# 1 - 3 incident on the beam splitter 4312 toward the detector 4316 .

[0087] On the other hand, measurement light ML#2-2 emitted from the beam splitter 4314 is irradiated onto the measurement object via the half mirror 434 and the beam steering mirror 432. Reflected light RL generated when measurement light ML#2-2 is irradiated onto the measurement object is incident on the beam splitter 4314 via the beam steering mirror 432 and the half mirror 434. The beam splitter 4314 emits at least a portion of the reflected light RL incident on the beam splitter 4314 toward the beam splitter 4312. The beam splitter 4312 emits at least a portion of the reflected light RL incident on the beam splitter 4312 toward the detector 4316.

[0088] The detector 4316 detects (in other words, receives) the measurement light ML#1-3 and the reflected light RL. Specifically, the detector 4316 detects (in other words, receives) interference light generated by interference between the measurement light ML#1-3 and the reflected light RL. For this reason, the detector 4316 may be equipped with a light-receiving element (light-receiving unit) that can receive light. The detection result of the detector 4316 (that is, the light-receiving result of the measurement light ML#1-3 and the reflected light RL) is output to the tracker control device 5 as part of light-receiving information that indicates the light-receiving result of the reflected light RL by the laser tracker 4.

[0089] The tracker control device 5 calculates at least one of the position and orientation of the measurement object based on the light reception information including the detection results of the detector 4313 and the detection results of the detector 4316. Below, the principle of calculating at least one of the position and orientation of the measurement object based on the light reception information will be described. In particular, for the sake of convenience, the principle of calculating at least one of the position and orientation of the machining head 13 will be described below. However, the following description can be used as an explanation of the principle of calculating at least one of the position and orientation of the measurement head 23 by replacing the terms "machining head 13" and "reflector 14" with "measurement head 23" and "reflector 24," respectively. The following description can be used as an explanation of the principle of calculating at least one of the position and orientation of the work transportation device 3 by replacing the terms "machining head 13" and "reflector 14" with "work transportation device 3" and "reflector 34," respectively. The following explanation can be used as an explanation of the principle of calculating at least one of the position and posture of the workpiece W by replacing the terms "machining head 13" and "reflector 14" with the terms "workpiece W" and "reflector 34", respectively.

[0090] Since the pulse frequency of measurement light ML#1 is different from the pulse frequency of measurement light ML#2, the pulse frequency of measurement light ML#1-1 is different from the pulse frequency of measurement light ML#2-1. Therefore, the interference light between measurement light ML#1-1 and measurement light ML#2-1 is interference light in which pulse light appears in synchronization with the timing when the pulse light constituting measurement light ML#1-1 and the pulse light constituting measurement light ML#2-1 simultaneously enter the detector 4313. Similarly, the pulse frequency of measurement light ML#1-3 is different from the pulse frequency of reflected light RL. Therefore, the interference light between measurement light ML#1-3 and reflected light RL is interference light in which pulse light appears in synchronization with the timing when the pulse light constituting measurement light ML#1-3 and the pulse light constituting reflected light RL simultaneously enter the detector 4316.

[0091] Here, the position (position on the time axis) of the pulsed light that creates the interference light detected by detector 4316 varies depending on the distance between the laser tracker 4 and the reflector 14. This is because the interference light detected by detector 4316 is interference light between reflected light RL that heads toward detector 4316 via reflector 14 and measurement light ML#1-3 that heads toward detector 4316 without passing through reflector 14. On the other hand, the position (position on the time axis) of the pulsed light that creates the interference light detected by detector 4313 does not vary depending on the distance between laser tracker 4 and reflector 14. For this reason, it can be said that the time difference between the pulsed light that creates the interference light detected by detector 4316 and the pulsed light that creates the interference light detected by detector 4313 indirectly indicates the positional relationship between the laser tracker 4 and reflector 14 (typically, the distance between the laser tracker 4 and reflector 14). Therefore, the tracker control device 5 can calculate the distance between the laser tracker 4 and the reflector 14 based on the time difference between the pulsed light that creates the interference light detected by the detector 4316 and the pulsed light that creates the interference light detected by the detector 4313. Furthermore, the orientation of the reflector 14 as seen from the laser tracker 4 coincides with the direction in which the measurement light ML is emitted from the laser tracker 4. The direction in which the measurement light ML is emitted from the laser tracker 4 can be obtained as the amount of rotational movement of the housing 42 in each of the pan direction and the tilt direction. Therefore, the tracker control device 5 can obtain the amount of rotational movement of the housing 42 from the laser tracker 4 as part of the light reception information and calculate the orientation of the reflector 14 as seen from the laser tracker 4 based on the light reception information. As a result, the tracker control device 5 can calculate the position of the reflector 14 in three-dimensional space based on the distance between the laser tracker 4 and the reflector 14 and the orientation of the reflector 14 as seen from the laser tracker 4.

[0092] As described above, since a plurality of reflectors 14 are arranged on the processing robot 1, the tracker control device 5 can calculate the position in three-dimensional space of each of the plurality of reflectors 14. Thereafter, the tracker control device 5 can calculate at least one of the position and the orientation of the processing head 13 in three-dimensional space based on the position of each of the plurality of reflectors 14 in three-dimensional space.

[0093] 7 , reflected light NL of ambient light (or illumination light) by reflector 14, 24, or 34 enters the interior of housing 42 through opening 421 formed in housing 42, is reflected by beam steering mirror 432, is reflected by half mirror 434, and enters camera 433. Camera 433 receives reflected light NL using an imaging element to capture an image of reflector 14, 24, or 34. The image of reflector 14, 24, or 34 captured by camera 433, which is a reflector image, is output to tracker control device 5.

[0094] Based on the reflector image, the tracker control device 5 may track the reflector 14, 24, or 34. Furthermore, based on the reflector image, the tracker control device 5 may control the rotational movement of the housing 42 so that the measurement light ML is irradiated onto the desired reflector 14, 24, or 34.

[0095] (1-6) Configuration of the tracker control device 5 Next, the tracker control device 5 in this embodiment will be described with reference to Fig. 9. Fig. 9 is a block diagram showing the configuration of the tracker control device 5 in this embodiment.

[0096] 9, the tracker control device 5 may include a computing device 51, a storage device 52, a communication device 53, an input device 54, and an output device 55. The computing device 51, the storage device 52, the communication device 53, the input device 54, and the output device 55 may be connected via a data bus 56.

[0097] The arithmetic device 51 includes, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The arithmetic device 51 loads a computer program. For example, the arithmetic device 51 may load a computer program stored in the storage device 52. For example, the arithmetic device 51 may load a computer program stored in a computer-readable, non-transitory storage medium using a storage medium reading device (not shown). The arithmetic device 51 may acquire (i.e., download or load) a computer program from a device (not shown) located outside the tracker control device 5 via the communication device 53. The arithmetic device 51 executes the loaded computer program. As a result, logical functional blocks for executing the operations to be performed by the tracker control device 5 are realized within the arithmetic device 51. In other words, the arithmetic device 51 can function as a controller for realizing logical functional blocks for executing the operations to be performed by the tracker control device 5.

[0098] A computational model that can be constructed by machine learning may be implemented within the computational device 51 by the computational device 51 executing a computer program. An example of a computational model that can be constructed by machine learning is a computational model including a neural network (so-called artificial intelligence (AI)). In this case, learning of the computational model may include learning of parameters of the neural network (e.g., at least one of weights and biases). The computational device 51 may use the computational model to execute operations to be performed by the tracker control device 5. Note that a computational model already constructed by offline machine learning using training data may be implemented in the computational device 51. Furthermore, the computational model implemented in the computational device 51 may be updated by online machine learning on the computational device 51. Alternatively, the computational device 51 may execute operations to be performed by the tracker control device 5 using a computational model implemented in a device external to the computational device 51 (i.e., a device provided outside the tracker control device 5), in addition to or instead of the computational model implemented in the computational device 51.

[0099] 9 shows an example of logical functional blocks realized in the arithmetic device 51. As shown in FIG. 9, a reference coordinate construction unit 511, a position and orientation calculation unit 512, a control information generation unit 513, and a shape data processing unit 514 are realized in the arithmetic device 51. Note that the operations of the reference coordinate construction unit 511, the position and orientation calculation unit 512, the control information generation unit 513, and the shape data processing unit 514 will be described in detail later, but will be briefly outlined here. The reference coordinate construction unit 511 constructs a reference coordinate system based on light reception information acquired from the laser tracker 4. The position and orientation calculation unit 512 calculates at least one of the position and orientation of at least one of the machining head 13, the measurement head 23, the workpiece transport device 3, and the workpiece W based on the light reception information acquired from the laser tracker 4. The control information generation unit 513 generates robot control information that can be used by the robot control device 6 to control at least one of the processing robot 1 and the measuring robot 2, based on at least one of the positions and postures of at least one of the processing head 13, the measuring head 23, the workpiece transport device 3, and the workpiece W. The shape data processing unit 514 performs predetermined data processing on three-dimensional shape data that indicates the measurement results of the three-dimensional shape of the workpiece W by the measuring head 23.

[0100] The storage device 52 can store desired data. For example, the storage device 52 may temporarily store a computer program executed by the arithmetic device 51. The storage device 52 may temporarily store data that the arithmetic device 51 temporarily uses when the arithmetic device 51 is executing a computer program. The storage device 52 may also store data that the tracker control device 5 stores long-term. The storage device 52 may include at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a disk array device. In other words, the storage device 52 may include a non-temporary recording medium.

[0101] The communication device 53 is capable of communicating with devices external to the tracker control device 5 via a communication network. In this embodiment, the communication device 53 is capable of communicating with at least the laser tracker 4 and the robot control device 6 via the communication network. For example, the communication device 53 may communicate with the laser tracker 4 to acquire (i.e., receive) light reception information from the laser tracker 4 that indicates the result of receiving the reflected light RL from the reflector 14, 24, or 34. For example, the communication device 53 may communicate with the robot control device 6 to output (i.e., transmit) the above-mentioned robot control information to the robot control device 6.

[0102] The input device 54 is a device that accepts information input to the tracker control device 5 from outside the tracker control device 5. For example, the input device 54 may include an operation device (for example, at least one of a keyboard, a mouse, and a touch panel) that can be operated by an operator (for example, a user of the machining system PSYS). For example, the input device 54 may include a reading device that can read information recorded as data on a recording medium that can be externally attached to the tracker control device 5.

[0103] The output device 55 is a device that outputs information to the outside of the tracker control device 5. For example, the output device 55 may output information as an image. That is, the output device 55 may include a display device (a so-called display) that can display an image showing the information to be output. For example, the output device 55 may output information as sound. That is, the output device 55 may include an audio device (a so-called speaker) that can output sound. For example, the output device 55 may output information on paper. That is, the output device 55 may include a printing device (a so-called printer) that can print desired information on paper.

[0104] (1-7) Configuration of the Robot Control Device 6 Next, the robot control device 6 in this embodiment will be described with reference to Fig. 10. Fig. 10 is a block diagram showing the configuration of the robot control device 6 in this embodiment.

[0105] 10 , the robot control device 6 may include a calculation device 61, a storage device 62, a communication device 63, an input device 64, and an output device 65. The calculation device 61, the storage device 62, the communication device 63, the input device 64, and the output device 65 may be connected via a data bus 66.

[0106] The arithmetic device 61 includes, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The arithmetic device 61 loads a computer program. For example, the arithmetic device 61 may load a computer program stored in the storage device 62. For example, the arithmetic device 61 may load a computer program stored in a computer-readable, non-transitory storage medium using a storage medium reading device (not shown). The arithmetic device 61 may acquire (i.e., download or load) a computer program from a device (not shown) located outside the robot control device 6 via the communication device 63. The arithmetic device 61 executes the loaded computer program. As a result, logical functional blocks for executing operations to be performed by the robot control device 6 are realized within the arithmetic device 61. In other words, the arithmetic device 61 can function as a controller for realizing logical functional blocks for executing operations to be performed by the robot control device 6.

[0107] A computational model that can be constructed by machine learning may be implemented within the computational device 61 by the computational device 61 executing a computer program. An example of a computational model that can be constructed by machine learning is a computational model including a neural network (so-called artificial intelligence (AI)). In this case, learning of the computational model may include learning of neural network parameters (e.g., at least one of weights and biases). The computational device 61 may use the computational model to execute an operation to be performed by the robot control device 6. The computational device 61 may also be implemented with a computational model that has been constructed by offline machine learning using training data. Furthermore, the computational model implemented in the computational device 61 may be updated by online machine learning on the computational device 61. Alternatively, the computational device 61 may execute an operation to be performed by the robot control device 6 using a computational model implemented in a device external to the computational device 61 (i.e., a device external to the robot control device 6) in addition to or instead of the computational model implemented in the computational device 61.

[0108] 10 shows an example of logical functional blocks realized in the arithmetic device 61. As shown in FIG. 10, a robot control unit 611 is realized in the arithmetic device 61. The robot control unit 611 is capable of controlling at least one of the processing robot 1 and the measuring robot 2. Specifically, the robot control unit 611 may generate a robot control signal for controlling at least one of the processing robot 1 and the measuring robot 2. For example, the robot control unit 611 may generate the robot control signal based on robot control information acquired from the tracker control device 5. Thereafter, the robot control unit 611 may control at least one of the processing robot 1 and the measuring robot 2 by outputting the generated robot control signal to at least one of the processing robot 1 and the measuring robot 2.

[0109] The storage device 62 can store desired data. For example, the storage device 62 may temporarily store a computer program executed by the arithmetic device 61. The storage device 62 may temporarily store data that the arithmetic device 61 temporarily uses when the arithmetic device 61 is executing a computer program. The storage device 62 may also store data that the robot control device 6 stores long-term. The storage device 62 may include at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a disk array device. In other words, the storage device 62 may include a non-temporary recording medium.

[0110] The communication device 63 is capable of communicating with devices external to the robot control device 6 via a communication network. In this embodiment, the communication device 63 is capable of communicating with at least the processing robot 1, the measuring robot 2, and the tracker control device 5 via the communication network. For example, the communication device 63 may acquire (i.e., receive) the above-mentioned robot control information from the tracker control device 5 by communicating with the tracker control device 5. For example, the communication device 63 may output (i.e., transmit) the above-mentioned robot control signal to the processing robot 1 by communicating with the processing robot 1. For example, the communication device 63 may output (i.e., transmit) the above-mentioned robot control signal to the measuring robot 2 by communicating with the measuring robot 2.

[0111] The input device 64 is a device that accepts information input to the robot control device 6 from outside the robot control device 6. For example, the input device 64 may include an operation device (for example, at least one of a keyboard, a mouse, and a touch panel) that can be operated by an operator (for example, a user of the machining system PSYS). For example, the input device 64 may include a reading device that can read information recorded as data on a recording medium that can be externally attached to the robot control device 6.

[0112] The output device 65 is a device that outputs information to the outside of the robot control device 6. For example, the output device 65 may output information as an image. That is, the output device 65 may include a display device (a so-called display) that can display an image showing the information to be output. For example, the output device 65 may output information as sound. That is, the output device 65 may include an audio device (a so-called speaker) that can output sound. For example, the output device 65 may output information on paper. That is, the output device 65 may include a printing device (a so-called printer) that can print desired information on paper.

[0113] (2) Operation of the Machining System PSYS in the Present Embodiment Next, the operation of the machining system PSYS including the robot system RSYS and the position measurement system MSYS in the present embodiment will be described with reference to Fig. 11. Fig. 11 is a flowchart showing the flow of the operation performed by the robot system RSYS and the position measurement system MSYS in the present embodiment in cooperation with each other.

[0114] (2-1) Construction of a Reference Coordinate System: Step S101 As shown in FIG. 11 , the tracker control device 5 included in the position measurement system MSYS first constructs a reference coordinate system to be used as a reference in the first processing space SP (step S101). In this embodiment, an example will be described in which a reference coordinate system is constructed using a reflector 34 arranged on the work transportation device 3. Specifically, the reference coordinate construction unit 511 of the tracker control device 5 constructs a reference coordinate system after the work transportation device 3 on which the workpiece W is placed has moved to the first processing space SP. The reference coordinate system constructed when the work transportation device 3 has moved to the first processing space SP is a coordinate system used as a reference in the machining system PSYS while the workpiece W is located in the first processing space SP. The reference coordinate system constructed when the work transportation device 3 has moved to the first processing space SP is a coordinate system used as a reference in the machining system PSYS while the workpiece W is located in the first processing space SP. The reference coordinate system established when the workpiece transport device 3 moves into the first processing space SP is a coordinate system used as a reference in the processing system PSYS during the period when the processing robot 1 located in the first processing space SP processes the workpiece W located in the first processing space SP. The reference coordinate system established when the workpiece transport device 3 moves into the first processing space SP is a coordinate system used as a reference in the processing system PSYS during the period when the measuring robot 2 located in the first processing space SP measures the workpiece W located in the first processing space SP.

[0115] In particular, in this embodiment, the reference coordinate construction unit 511 may construct the reference coordinate system after the work transportation device 3 that has moved to the first processing space SP has come to a stop within the first processing space SP. In other words, the reference coordinate construction unit 511 may start constructing the reference coordinate system after the work transportation device 3 that has moved to the first processing space SP has come to a stop within the first processing space SP. In this case, the reference coordinate system constructed when the work transportation device 3 comes to a stop at one position within the first processing space SP may be a coordinate system used as a reference in the processing system PSYS during a period in which the work transportation device 3 is located at one position within the first processing space SP. The reference coordinate system constructed when the work transportation device 3 comes to a stop at one position within the first processing space SP may be a coordinate system used as a reference in the processing system PSYS during a period in which the work W is located at one position within the first processing space SP. The reference coordinate system constructed when the workpiece transport device 3 comes to rest at a position within the first processing space SP may be a coordinate system used as a reference in the processing system PSYS during a period in which the processing robot 1 located in the first processing space SP processes the workpiece W located at a position within the first processing space SP. The reference coordinate system constructed when the workpiece transport device 3 comes to rest at a position within the first processing space SP is a coordinate system used as a reference in the processing system PSYS during a period in which the measuring robot 2 located in the first processing space SP measures the workpiece W located at a position within the first processing space SP.

[0116] Alternatively, as will be described in detail later in a modified example, the reference coordinate constructing unit 511 may construct the reference coordinate system while the workpiece transport device 3 is moving within the first processing space SP.

[0117] In order to construct the reference coordinate system, the reference coordinate construction unit 511 controls the laser tracker 4 to irradiate measurement light ML onto each of the multiple reflectors 34 arranged on the workpiece transportation device 3, as shown in Fig. 12. As a result, the laser tracker 4 receives reflected light RL from each of the multiple reflectors 34. The position and orientation calculation unit 512 of the tracker control device 5 calculates the position of each of the multiple reflectors 34 based on light reception information that indicates the result of receiving the reflected light RL from each of the multiple reflectors 34. Note that, as shown in Fig. 12, the position and orientation calculation unit 512 calculates the position of each of the multiple reflectors 34 in the tracker coordinate system that is determined based on the laser tracker 4. For example, the position and orientation calculation unit 512 may calculate the position of each of the multiple reflectors 34 along the X axis of the tracker coordinate system, the position of each of the multiple reflectors 34 along the Y axis of the tracker coordinate system that is orthogonal to the X axis of the tracker coordinate system, and the position of each of the multiple reflectors 34 along the Z axis of the tracker coordinate system that is orthogonal to the X and Y axes of the tracker coordinate system. The tracker coordinate system may be a polar coordinate system with the laser tracker 4 as the origin.

[0118] Thereafter, the reference coordinate construction unit 511 constructs a reference coordinate system based on the respective positions of the multiple reflectors 34. For example, the reference coordinate construction unit 511 may construct the reference coordinate system by specifying an origin O of the reference coordinate system based on the position of at least one of the multiple reflectors 34. For example, the reference coordinate construction unit 511 may construct the reference coordinate system by specifying an X-axis of the reference coordinate system based on the position of at least one of the multiple reflectors 34. For example, the reference coordinate construction unit 511 may construct the reference coordinate system by specifying a Y-axis of the reference coordinate system based on the position of at least one of the multiple reflectors 34. For example, the reference coordinate construction unit 511 may construct the reference coordinate system by specifying a Z-axis of the reference coordinate system based on the position of at least one of the multiple reflectors 34.

[0119] An example of the operation of constructing a reference coordinate system is shown in Fig. 13. As shown in Fig. 13, the reference coordinate constructing unit 511 specifies the position of a first reflector 34#1 of the multiple reflectors 34 as the origin O of the reference coordinate system. Next, as shown in Fig. 13, the reference coordinate constructing unit 511 specifies a linear axis extending from the first reflector 34#1 toward a second reflector 34#2 of the multiple reflectors 34 as the X-axis (or an arbitrary first axis) of the reference coordinate system. Next, as shown in Fig. 13, the reference coordinate constructing unit 511 specifies a linear axis that runs along a plane including the first reflector 34#1, the second reflector 34#2, and the third reflector 34#3 of the multiple reflectors 34, is perpendicular to the specified X-axis, and passes through the origin O as the Y-axis (or an arbitrary second axis) of the reference coordinate system. Next, as shown in Fig. 13, the reference coordinate construction unit 511 designates a linear axis orthogonal to both the designated X-axis and Y-axis as the Z-axis (or any third axis) of the reference coordinate system. As a result, the reference coordinate construction unit 511 can construct the reference coordinate system as shown in Fig. 13.

[0120] As described above, since each of the multiple reflectors 34 used to construct the reference coordinate system is disposed at a fixed position relative to the workpiece W, the reference coordinate system may be considered to be a coordinate system determined based on the workpiece W. The reference coordinate system may be considered to be a coordinate system fixed relative to the workpiece W. The reference coordinate system may be considered to be a coordinate system that satisfies the condition that the positional relationship between the workpiece W and the reference coordinate system is fixed.

[0121] The multiple reflectors 34 used to construct the reference coordinate system may be arranged at any position on the workpiece transportation device 3. However, the multiple reflectors 34 need to be arranged so as to satisfy the conditions that the first reflector 34#1 and the second reflector 34#2 are spaced apart along the first direction, and that at least one of the first reflector 34#1 and the second reflector 34#2 is spaced apart from the third reflector 34#3 along a third direction intersecting the first direction. In other words, the multiple reflectors 34 need to be arranged so as to satisfy the condition that all of the multiple reflectors 34 are not arranged in a straight line.

[0122] The multiple reflectors 34 used to construct the reference coordinate system may be arranged on the workpiece transportation device 3 in a predetermined arrangement pattern that is set in advance from the viewpoint of achieving the purpose of constructing the reference coordinate system. For example, the multiple reflectors 34 may be arranged so as to satisfy the condition that the first reflector 34#1 and the second reflector 34#2 are spaced apart along a first direction, and the first reflector 34#1 and the third reflector 34#3 are spaced apart along a second direction that is perpendicular to the first direction. In other words, the multiple reflectors 34 may be arranged so as to satisfy the condition that a linear axis extending from the first reflector 34#1 toward the second reflector 34#2 and a linear axis extending from the first reflector 34#1 toward the third reflector 34#3 are perpendicular to each other. In this case, the reference coordinate construction unit 511 may designate the linear axis extending from the first reflector 34#1 to the second reflector 34#2 as the X-axis of the reference coordinate system, and designate the linear axis extending from the first reflector 34#1 to the third reflector 34#3 as the Y-axis of the reference coordinate system. In this case, the reference coordinate construction unit 511 can construct the reference coordinate system without specifying a plane including the first reflector 34#1 to the third reflector 34#3. Therefore, when the multiple reflectors 34 are arranged in a predetermined arrangement pattern, the reference coordinate construction unit 511 can more easily construct the reference coordinate system than when the multiple reflectors 34 are arranged in a random arrangement pattern.

[0123] When the plurality of reflectors 34 are arranged in a predetermined arrangement pattern, information about the arrangement pattern of the plurality of reflectors 34 may be known to the reference coordinate construction unit 511. In this case, the reference coordinate construction unit 511 can easily construct a reference coordinate system based on the information about the arrangement pattern of the plurality of reflectors 34.

[0124] The multiple reflectors 34 may be arranged at positions that satisfy the condition that the measurement light ML emitted by the laser tracker 4 is not blocked by the workpiece W. In this case, even when the workpiece W is placed on the workpiece transport device 3, the laser tracker 4 can appropriately irradiate the measurement light ML to the reflectors 34 and appropriately receive the reflected light RL from the reflectors 34. Therefore, even when the workpiece W is placed on the workpiece transport device 3, the reference coordinate construction unit 511 can appropriately construct a reference coordinate system.

[0125] Because the reference coordinate system is constructed based on the positions of each of the multiple reflectors 34 in the tracker coordinate system, the positions of each of the multiple reflectors 34 in the reference coordinate system are determined at the time the reference coordinate system is constructed. In this case, the reference coordinate construction unit 511 may generate a coordinate transformation matrix (reference-tracker) for converting a position in either the tracker coordinate system or the reference coordinate system into a position in the other of the tracker coordinate system or the reference coordinate system, based on the positions of each of the multiple reflectors 34 in the tracker coordinate system and the positions of each of the multiple reflectors 34 in the reference coordinate system. In this case, the operation of constructing the reference coordinate system may include the operation of generating the coordinate transformation matrix (reference-tracker).

[0126] Furthermore, in step S101, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the work transportation device 3 based on the respective positions of the multiple reflectors 34. Specifically, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the work transportation device 3 in the tracker coordinate system based on the respective positions of the multiple reflectors 34 in the tracker coordinate system. Thereafter, the position and orientation calculation unit 512 may use a coordinate transformation matrix (reference-tracker) to convert at least one of the position and orientation of the work transportation device 3 in the tracker coordinate system into at least one of the position and orientation of the work transportation device 3 in the reference coordinate system. As a result, the position and orientation calculation unit 512 can calculate at least one of the position and orientation of the work transportation device 3 in the reference coordinate system. Alternatively, the position and orientation calculation unit 512 may use the coordinate transformation matrix (reference-tracker) to convert the respective positions of the multiple reflectors 34 in the tracker coordinate system into the respective positions of the multiple reflectors 34 in the reference coordinate system. Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the workpiece transport device 3 in the reference coordinate system based on the respective positions of the multiple reflectors 34 in the reference coordinate system.

[0127] However, when the workpiece W transporting device 3 moves to a predetermined position in the processing space SP so as to come to rest in a predetermined attitude, the information on the position and attitude of the workpiece transporting device 3 may be considered to be known information to the tracker control device 5. In this case, the position and attitude calculation unit 512 does not need to calculate at least one of the position and attitude of the workpiece transporting device 3 in step S101.

[0128] Furthermore, in step S101, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the workpiece W based on the respective positions of the multiple reflectors 34. Specifically, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the workpiece W in the tracker coordinate system based on the respective positions of the multiple reflectors 34 in the tracker coordinate system. Thereafter, the position and orientation calculation unit 512 may use a coordinate transformation matrix (reference-tracker) to convert at least one of the position and orientation of the workpiece W in the tracker coordinate system into at least one of the position and orientation of the workpiece W in the reference coordinate system. As a result, the position and orientation calculation unit 512 can calculate at least one of the position and orientation of the workpiece W in the reference coordinate system. Alternatively, the position and orientation calculation unit 512 may use the coordinate transformation matrix (reference-tracker) to convert the respective positions of the multiple reflectors 34 in the tracker coordinate system into the respective positions of the multiple reflectors 34 in the reference coordinate system. Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the workpiece W in the reference coordinate system based on the respective positions of the multiple reflectors 34 in the reference coordinate system.

[0129] When at least one of the position and orientation of the workpiece W is calculated, the multiple reflectors 34 may be arranged on the workpiece transport device 3 so as to surround the workpiece W placed on the workpiece transport device 3. In this case, the position and orientation calculation unit 512 can calculate at least one of the position and orientation of the workpiece W with even greater accuracy compared to when the multiple reflectors 34 are not arranged so as to surround the workpiece W.

[0130] However, when the workpiece W transporting device 3 moves to a predetermined position in the processing space SP so as to stop in a predetermined orientation, information regarding the position and orientation of the workpiece W being transported by the workpiece transporting device 3 may be considered to be known information to the tracker control device 5. In this case, the position and orientation calculation unit 512 does not need to calculate at least one of the position and orientation of the workpiece W in step S101.

[0131] (2-2) Control of At Least One of the Position and Attitude of the Machining Head 13: Step S102 Referring again to FIG. 11 , the tracker control device 5 then calculates at least one of the position and attitude of the machining head 13 attached to the machining robot 1 located in the first processing space SP, and the robot control device 6 controls the position and attitude of the machining robot 1 based on the calculated at least one of the position and attitude of the machining head 13 (Step S102). Specifically, the robot control device 6 controls at least one of the position and attitude of the machining head 13 so that the machining head 13 machines the workpiece W. For example, the robot control device 6 may move and position the machining head 13 from a predetermined standby position to a desired machining start position where machining of the workpiece W begins. In other words, the robot control device 6 may control the position of the machining head 13 so that the position of the machining head 13 is the desired machining start position where the machining head 13 can machine the workpiece W. For example, the robot control device 6 may control the attitude of the machining head 13 so that the machining head 13 assumes a desired machining attitude at which the machining head 13 starts machining the workpiece W. In other words, the robot control device 6 may control the posture of the machining head 13 so that the posture of the machining head 13 becomes a desired machining posture that allows the machining head 13 to machine the workpiece W.

[0132] In order to calculate the position and orientation of the machining head 13, the position and orientation calculation unit 512 of the tracker control device 5 controls the laser tracker 4 to irradiate measurement light ML onto each of the multiple reflectors 14 arranged on the machining head 13, as shown in FIG. 14 . As a result, the laser tracker 4 receives reflected light RL from each of the multiple reflectors 14. The position and orientation calculation unit 512 then calculates the position of each of the multiple reflectors 14 based on light reception information indicating the reception results of the reflected light RL from each of the multiple reflectors 14. Note that, as shown in FIG. 14 , the position and orientation calculation unit 512 calculates the position of each of the multiple reflectors 14 in a tracker coordinate system defined based on the laser tracker 4. For example, the position and orientation calculation unit 512 may calculate the position of each of the multiple reflectors 14 along the X axis of the tracker coordinate system, the position of each of the multiple reflectors 14 along the Y axis of the tracker coordinate system, and the position of each of the multiple reflectors 14 along the Z axis of the tracker coordinate system.

[0133] Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the machining head 13 based on the respective positions of the multiple reflectors 14. Specifically, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the machining head 13 in the tracker coordinate system based on the respective positions of the multiple reflectors 14 in the tracker coordinate system. Thereafter, the position and orientation calculation unit 512 may use a coordinate transformation matrix (reference-tracker) to transform at least one of the position and orientation of the machining head 13 in the tracker coordinate system into at least one of the position and orientation of the machining head 13 in the reference coordinate system. As a result, the position and orientation calculation unit 512 can calculate at least one of the position and orientation of the machining head 13 in the reference coordinate system. Alternatively, the position and orientation calculation unit 512 may use the coordinate transformation matrix (reference-tracker) to transform the respective positions of the multiple reflectors 14 in the tracker coordinate system into the respective positions of the multiple reflectors 14 in the reference coordinate system. Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the machining head 13 in the reference coordinate system based on the respective positions of the multiple reflectors 14 in the reference coordinate system.

[0134] Thereafter, the control information generation unit 513 may determine whether the position of the machining head 13 is the desired machining position based on machining position and posture information indicating at least one of the position and posture of the machining head 13 calculated by the position and posture calculation unit 512. The desired machining position may be set by the control information generation unit 513 based on at least one of the position and posture of the workpiece W in the reference coordinate system calculated in step S101 described above. Alternatively, the desired machining position may be set by a user of the machining system PSYS. Alternatively, if the workpiece transport device 3 that transports the workpiece W moves so as to stop at a predetermined position and in a predetermined posture within the processing space SP, the desired machining position may be set in advance. In either case, because the position and posture calculation unit 512 calculates at least one of the position and posture of the machining head 13 in the reference coordinate system, the control information generation unit 513 uses the desired machining position in the reference coordinate system as the desired machining position.

[0135] Furthermore, in addition to or instead of determining whether the position of the machining head 13 is the desired machining position, the control information generation unit 513 may determine whether the posture of the machining head 13 is the desired machining posture based on the machining position and posture information. The desired machining posture may be set by the control information generation unit 513 based on at least one of the position and posture of the workpiece W in the reference coordinate system calculated in the above-described step S101. Alternatively, the desired machining posture may be set by the user of the machining system PSYS. Alternatively, if the workpiece transport device 3 that transports the workpiece W moves so as to stop at a predetermined position in the processing space SP in a predetermined posture, the desired machining posture may be set in advance. In either case, since the position and posture calculation unit 512 calculates at least one of the position and posture of the machining head 13 in the reference coordinate system, the control information generation unit 513 uses the desired machining posture in the reference coordinate system as the desired machining posture.

[0136] When it is determined that the position of the machining head 13 is not the desired machining position, the control information generator 513 may calculate, based on the machining position and orientation information, a correction amount for the position of the machining head 13 required to change the position of the machining head 13 from the current position to the desired machining position in the reference coordinate system. Specifically, the control information generator 513 may calculate, as the correction amount for the position of the machining head 13, at least one of the movement amount and movement direction of the machining head 13 required to change the position of the machining head 13 from the current position to the desired machining position in the reference coordinate system.

[0137] Information regarding the correction amount for the position of the machining head 13 may be output from the tracker control device 5 to the robot control device 6 as at least part of robot control information that can be used by the robot control device 6 to control the machining robot 1. Information regarding the correction amount for the position of the machining head 13 may be output from the tracker control device 5 to the robot control device 6 as position information for driving the machining robot 1 to position the machining head 13.

[0138] However, the robot control device 6 uses a machining robot coordinate system determined with the machining robot 1 as the reference in order to control the position of the machining head 13. Meanwhile, the control information generation unit 513 calculates the correction amount for the position of the machining head 13 in the reference coordinate system. Therefore, the control information generation unit 513 needs to convert the correction amount for the position of the machining head 13 in the reference coordinate system into the correction amount for the position of the machining head 13 in the machining robot coordinate system. That is, it is necessary to generate a coordinate transformation matrix (machining robot-reference) that can be used to transform the position of either the machining robot coordinate system or the reference coordinate system into the position of the other of the machining robot coordinate system or the reference coordinate system. Specifically, the coordinate transformation matrix (machining robot-reference) may be generated as follows. First, as described above, when the reference coordinate system is constructed, it is possible to generate a coordinate transformation matrix (reference-tracker) that can be used to transform the position of either the tracker coordinate system or the reference coordinate system into the position of the other of the tracker coordinate system or the reference coordinate system. Next, a coordinate transformation matrix (machining robot-tracker) is generated that can be used to transform the position of either the machining robot coordinate system or the tracker coordinate system into the position of the other of the machining robot coordinate system or the tracker coordinate system. For example, the robot control device 6 positions the machining head 13 at a predetermined standby position in the machining robot coordinate system, and the tracker control device 5 controls the laser tracker 4 to calculate, in the tracker coordinate system, the position and attitude of the machining head 13 positioned at the predetermined standby position. Next, the robot control device 6 moves and positions the machining head 13 in the machining robot coordinate system based on a predetermined control signal (i.e., drive information for moving the machining head 13), so that the machining head 13 assumes a desired machining attitude at a desired machining start position, and the tracker control device 5 controls the laser tracker 4 to calculate, in the tracker coordinate system, the position and attitude of the machining head 13 that assumes the desired machining attitude at the desired machining start position. A coordinate transformation matrix (machining robot-tracker) can be generated from at least one set of position and attitude information in the machining robot coordinate system and the tracker coordinate system obtained as described above.As a result, the coordinate transformation matrix (reference-tracker) and the coordinate transformation matrix (machining robot-tracker) are known, and it is possible to obtain the coordinate transformation matrix (machining robot-reference) via the tracker coordinate system. Using this coordinate transformation matrix (machining robot-reference), the control information generator 513 can convert the correction amounts for the position and orientation of the machining head 13 in the reference coordinate system into correction amounts for the position and orientation of the machining head 13 in the machining robot coordinate system.

[0139] Alternatively, even when at least one of the processing robot 1 and the laser tracker 4 moves, the tracker control device 5 can identify the relative positional relationship between the processing robot 1 and the laser tracker 4 based on the amount of movement of at least one of the processing robot 1 and the laser tracker 4. The amount of movement of at least one of the processing robot 1 and the laser tracker 4 may be measured, for example, by an encoder or the like provided in at least one of the processing robot 1 and the laser tracker 4. Alternatively, when at least one of the processing robot 1 and the laser tracker 4 is installed on an automated guided vehicle, the amount of movement of the automated guided vehicle transporting at least one of the processing robot 1 and the laser tracker 4 may be used as the amount of movement of at least one of the processing robot 1 and the laser tracker 4. Therefore, based on information regarding the relative positional relationship between the processing robot 1 and the laser tracker 4, the tracker control device 5 can generate a coordinate transformation matrix (processing robot-tracker) that can be used to transform a position in either the processing robot coordinate system or the tracker coordinate system into a position in the other of the processing robot coordinate system or the tracker coordinate system. As a result, the tracker control device 5 can use the coordinate transformation matrix (reference-tracker) and the coordinate transformation matrix (machining robot-tracker) to generate a coordinate transformation matrix (machining robot-reference) that can be used to transform the position of either the machining robot coordinate system or the reference coordinate system into the position of the other of the machining robot coordinate system or the reference coordinate system. Therefore, the control information generator 513 can use this coordinate transformation matrix (machining robot-reference) to convert the amount of correction for the position of the machining head 13 in the reference coordinate system into the amount of correction for the position of the machining head 13 in the machining robot coordinate system.

[0140] Thereafter, the tracker control device 5 may output information regarding the correction amount of the position of the machining head 13 in the machining robot coordinate system to the robot control device 6 as at least part of the robot control information that the robot control device 6 can use to control the machining robot 1. That is, the tracker control device 5 may output information regarding the movement amount of the machining head 13 in the machining robot coordinate system that is necessary to change the position of the machining head 13 from its current position to a desired machining position in the machining robot coordinate system to the robot control device 6 as at least part of the robot control information. The tracker control device 5 may output information regarding the movement direction of the machining head 13 in the machining robot coordinate system that is necessary to change the position of the machining head 13 from its current position to a desired machining position in the machining robot coordinate system to the robot control device 6 as at least part of the robot control information. As a result, as shown in FIG. 15 , which shows the machining head 13 moving in the machining robot coordinate system based on the robot control information, the robot control device 6 may move the machining head 13 so as to change the position of the machining head 13 from its current position to a desired machining position. Specifically, the robot control device 6 may move the machining head 13 along the movement direction indicated by the robot control information by the movement amount indicated by the robot control information.

[0141] When it is determined that the posture of the machining head 13 is not the desired machining posture, the control information generation unit 513 may calculate, based on the machining position and posture information, a correction amount for the posture of the machining head 13 that is necessary to change the posture of the machining head 13 from the current posture to the desired machining posture in the reference coordinate system. Specifically, based on the machining position and posture information, the control information generation unit 513 may calculate at least one of the movement amount and movement direction of the machining head 13 that is necessary to change the posture of the machining head 13 from the current posture to the desired machining posture in the reference coordinate system.

[0142] Information regarding the correction amount for the attitude of the machining head 13 may be output from the tracker control device 5 to the robot control device 6 as at least part of robot control information that can be used by the robot control device 6 to control the machining robot 1. Information regarding the correction amount for the attitude of the machining head 13 may be output from the tracker control device 5 to the robot control device 6 as position information for driving the machining robot 1 to position the machining head 13.

[0143] However, the robot control device 6 uses a machining robot coordinate system defined with the machining robot 1 as the reference to control the attitude of the machining head 13. Meanwhile, the control information generation unit 513 calculates the amount of correction for the attitude of the machining head 13 in the reference coordinate system. Therefore, the control information generation unit 513 may first convert the amount of correction for the attitude of the machining head 13 in the reference coordinate system into the amount of correction for the attitude of the machining head 13 in the machining robot coordinate system. Specifically, the control information generation unit 513 may use a coordinate transformation matrix (machining robot-reference) to convert the amount of correction for the attitude of the machining head 13 in the reference coordinate system into the amount of correction for the attitude of the machining head 13 in the machining robot coordinate system.

[0144] Thereafter, the tracker control device 5 may output information regarding the correction amount of the attitude of the machining head 13 in the machining robot coordinate system to the robot control device 6 as at least part of the robot control information. In other words, the tracker control device 5 may output information regarding at least one of the movement amount and movement direction of the machining head 13 in the machining robot coordinate system that is necessary to change the attitude of the machining head 13 from the current attitude to the desired machining attitude in the machining robot coordinate system to the robot control device 6 as at least part of the robot control information. As a result, as shown in FIG. 15 which shows the machining head 13 moving in the machining robot coordinate system based on the robot control information, the robot control device 6 may move the machining head 13 so as to change the attitude of the machining head 13 from the current attitude to the desired machining attitude. Specifically, the robot control device 6 may move the machining head 13 by the movement amount indicated by the robot control information along the movement direction indicated by the robot control information.

[0145] After moving the machining head 13, the position and orientation calculation unit 512 may control the laser tracker 4 to again irradiate the measurement light ML onto each of the multiple reflectors 14 arranged on the machining head 13. The position and orientation calculation unit 512 may then again calculate at least one of the position and orientation of the machining head 13 based on light reception information indicating the reception results of the reflected light RL from each of the multiple reflectors 14. The position and orientation calculation unit 512 may then again determine whether the position of the machining head 13 is the desired machining position and whether the orientation of the machining head 13 is the desired machining orientation, based on machining position and orientation information indicating the recalculation results of at least one of the position and orientation of the machining head 13. Thereafter, the tracker control device 5 may repeat the same operation until it is determined that the position of the machining head 13 is the desired machining position and that the orientation of the machining head 13 is the desired machining orientation. As a result, the machining head 13 is positioned at the desired machining position and in the desired machining orientation.

[0146] (2-3) Processing of the Workpiece W: Step S103 Referring again to FIG. 11 , the robot control device 6 then controls the processing robot 1 located in the first processing space SP to process the workpiece W located in the first processing space SP (step S103). For example, as shown in FIG. 16 , which shows an example of the processing robot 1 processing the workpiece W, the robot control device 6 may control the processing robot 1 to process the workpiece W to form a hole. As a result, the processing robot 1 located in the first processing space SP processes the workpiece W located in the first processing space SP. In other words, the processing robot 1 located in the first processing space SP performs a processing operation corresponding to the first processing step assigned to the processing robot 1. The processing robot 1 located in the first processing space SP performs a processing operation corresponding to the first processing step to be performed in the first processing space SP.

[0147] (2-4) Control of At Least One of the Position and Posture of the Measuring Head 23: Step S104 Referring again to FIG. 11 , after the processing robot 1 located in the first processing space SP completes processing of the workpiece W located in the first processing space SP, the tracker control device 5 calculates the position and posture of the measuring robot 2 located in the first processing space SP, and the robot control device 6 controls at least one of the position and posture of the measuring robot 2 (Step S104). That is, the tracker control device 5 calculates the position and posture of the measuring head 23, and the robot control device 6 controls at least one of the position and posture of the measuring robot 2 (Step S104). Specifically, the robot control device 6 controls at least one of the position and posture of the measuring head 23 so that the measuring head 23 measures the workpiece W. For example, the robot control device 6 may control the position of the measuring head 23 so that the measuring head 23 is located at a desired measurement position where the measuring head 23 can measure the workpiece W. That is, the robot control device 6 may control the position of the measuring head 23 so that the measuring head 23 is located at a desired measurement position where the measuring head 23 can measure the workpiece W. For example, the robot control device 6 may control the posture of the measurement head 23 so that the measurement head 23 assumes a desired measurement posture that allows the measurement head 23 to measure the workpiece W. In other words, the robot control device 6 may control the posture of the measurement head 23 so that the posture of the measurement head 23 becomes a desired measurement posture that allows the measurement head 23 to measure the workpiece W.

[0148] In order to control the position and orientation of the measurement head 23, the position and orientation calculation unit 512 controls the laser tracker 4 to irradiate measurement light ML onto each of the multiple reflectors 24 arranged on the measurement head 23, as shown in FIG. 17 . As a result, the laser tracker 4 receives reflected light RL from each of the multiple reflectors 24. The position and orientation calculation unit 512 then calculates the position of each of the multiple reflectors 24 based on light reception information indicating the reception results of the reflected light RL from each of the multiple reflectors 24. Note that, as shown in FIG. 17 , the position and orientation calculation unit 512 calculates the position of each of the multiple reflectors 24 in a tracker coordinate system defined with the laser tracker 4 as the reference. For example, the position and orientation calculation unit 512 may calculate the position of each of the multiple reflectors 24 along the X axis of the tracker coordinate system, the position of each of the multiple reflectors 24 along the Y axis of the tracker coordinate system, and the position of each of the multiple reflectors 24 along the Z axis of the tracker coordinate system.

[0149] Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the measurement head 23 based on the respective positions of the multiple reflectors 24. Specifically, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the measurement head 23 in the tracker coordinate system based on the respective positions of the multiple reflectors 24 in the tracker coordinate system. Thereafter, the position and orientation calculation unit 512 may use a coordinate transformation matrix (reference-tracker) to transform at least one of the position and orientation of the measurement head 23 in the tracker coordinate system into at least one of the position and orientation of the measurement head 23 in the reference coordinate system. As a result, the position and orientation calculation unit 512 can calculate at least one of the position and orientation of the measurement head 23 in the reference coordinate system. Alternatively, the position and orientation calculation unit 512 may use the coordinate transformation matrix (reference-tracker) to transform the respective positions of the multiple reflectors 24 in the tracker coordinate system into the respective positions of the multiple reflectors 24 in the reference coordinate system. Thereafter, the position and orientation calculation unit 512 may calculate at least one of the position and orientation of the measurement head 23 in the reference coordinate system based on the respective positions of the multiple reflectors 24 in the reference coordinate system.

[0150] Thereafter, the control information generation unit 513 may determine whether the position of the measurement head 23 is the desired measurement position based on measurement position and orientation information indicating at least one of the position and orientation of the measurement head 23 calculated by the position and orientation calculation unit 512. The desired measurement position may be set by the control information generation unit 513 based on at least one of the position and orientation of the workpiece W in the reference coordinate system calculated in step S101 described above. Alternatively, the desired measurement position may be set by a user of the machining system PSYS. Alternatively, if the workpiece transport device 3 that transports the workpiece W moves so as to stop at a predetermined position in a predetermined orientation within the processing space SP, the desired measurement position may be set in advance. In either case, because the position and orientation calculation unit 512 calculates at least one of the position and orientation of the measurement head 23 in the reference coordinate system, the control information generation unit 513 uses the desired measurement position in the reference coordinate system as the desired measurement position.

[0151] Furthermore, in addition to or instead of determining whether the position of the measuring head 23 is the desired measurement position, the control information generation unit 513 may determine whether the orientation of the measuring head 23 is the desired measurement orientation based on the measurement position and orientation information. The desired measurement orientation may be set by the control information generation unit 513 based on at least one of the position and orientation of the workpiece W in the reference coordinate system calculated in the above-described step S101. Alternatively, the desired measurement orientation may be set by the user of the machining system PSYS. Alternatively, when the workpiece transport device 3 that transports the workpiece W moves so as to stop at a predetermined position in the processing space SP at a predetermined orientation, the desired measurement orientation may be set in advance. In either case, since the position and orientation calculation unit 512 calculates at least one of the position and orientation of the measuring head 23 in the reference coordinate system, the control information generation unit 513 uses the desired measurement orientation in the reference coordinate system as the desired measurement orientation.

[0152] If it is determined that the position of the measurement head 23 is not the desired measurement position, the control information generating unit 513 may calculate, based on the measurement position and orientation information, a correction amount for the position of the measurement head 23 that is necessary to change the position of the measurement head 23 from the current position to the desired measurement position in the reference coordinate system. Specifically, the control information generating unit 513 may calculate, as the correction amount for the position of the measurement head 23, at least one of the movement amount and movement direction of the measurement head 23 that is necessary to change the position of the measurement head 23 from the current position to the desired measurement position in the reference coordinate system.

[0153] Information regarding the correction amount for the position of the measuring head 23 may be output from the tracker control device 5 to the robot control device 6 as at least part of robot control information that can be used by the robot control device 6 to control the measuring robot 2. Information regarding the correction amount for the position of the measuring head 23 may be output from the tracker control device 5 to the robot control device 6 as position information for driving the measuring robot 2 to position the measuring head 23.

[0154] However, the robot control device 6 uses a measurement robot coordinate system that is determined based on the measurement robot 2 to control the position of the measurement head 23. Meanwhile, the control information generator 513 calculates the amount of correction for the position of the measurement head 23 in the reference coordinate system. Therefore, the control information generator 513 needs to convert the amount of correction for the position of the measurement head 23 in the reference coordinate system into the amount of correction for the position of the measurement head 23 in the measurement robot coordinate system. That is, it is necessary to generate a coordinate transformation matrix (measurement robot-reference) that can be used to transform the position of either the measurement robot coordinate system or the reference coordinate system into the position of the other of the measurement robot coordinate system or the reference coordinate system. Specifically, the coordinate transformation matrix (measurement robot-reference) may be generated as follows. First, as described above, when the reference coordinate system is constructed, it is possible to generate a coordinate transformation matrix (reference-tracker) that can be used to transform the position of either the tracker coordinate system or the reference coordinate system into the position of the other of the tracker coordinate system or the reference coordinate system. Next, a coordinate transformation matrix (measurement robot-tracker) is generated that can be used to transform a position in either the measurement robot coordinate system or the tracker coordinate system into a position in the other of the measurement robot coordinate system or the tracker coordinate system. For example, the robot control device 6 positions the measurement head 23 at a predetermined standby position in the measurement robot coordinate system, and the tracker control device 5 controls the laser tracker 4 to calculate, in the tracker coordinate system, the position and orientation of the measurement head 23 positioned at the predetermined standby position. Next, the robot control device 6 moves and positions the measurement head 23 based on a predetermined control signal (i.e., drive information for moving the measurement head 23) so that the measurement head 23 assumes a desired measurement orientation at a desired measurement start position in the measurement robot coordinate system, and the tracker control device 5 controls the laser tracker 4 to calculate, in the tracker coordinate system, the position and orientation of the measurement head 23 that has assumed the desired measurement orientation at the desired measurement start position. A coordinate transformation matrix (measurement robot-tracker) can be generated from the two sets of position and orientation information in the measurement robot coordinate system and the tracker coordinate system obtained as described above.As a result, the coordinate transformation matrix (reference-tracker) and the coordinate transformation matrix (measurement robot-tracker) are known, and it is possible to obtain the coordinate transformation matrix (measurement robot-reference) via the tracker coordinate system. Using this coordinate transformation matrix (measurement robot-reference), the control information generator 513 can convert the amount of correction for the position of the measurement head 23 in the reference coordinate system into the amount of correction for the position of the measurement head 23 in the measurement robot coordinate system.

[0155] Alternatively, even when at least one of the measurement robot 2 and the laser tracker 4 moves, the tracker control device 5 can identify the relative positional relationship between the measurement robot 2 and the laser tracker 4 based on the amount of movement of at least one of the measurement robot 2 and the laser tracker 4. The amount of movement of at least one of the measurement robot 2 and the laser tracker 4 may be measured, for example, by an encoder or the like provided in at least one of the measurement robot 2 and the laser tracker 4. Alternatively, if at least one of the measurement robot 2 and the laser tracker 4 is installed on an automated guided vehicle, the amount of movement of the automated guided vehicle transporting at least one of the measurement robot 2 and the laser tracker 4 may be used as the amount of movement of at least one of the measurement robot 2 and the laser tracker 4. For this reason, the tracker control device 5 can generate a coordinate transformation matrix (measurement robot-tracker) that can be used to transform a position in either the measurement robot coordinate system or the tracker coordinate system into a position in the other of the measurement robot coordinate system or the tracker coordinate system, based on information regarding the relative positional relationship between the measurement robot 2 and the laser tracker 4. As a result, the tracker control device 5 can use the coordinate transformation matrix (reference-tracker) and the coordinate transformation matrix (measurement robot-tracker) to generate a coordinate transformation matrix (measurement robot-reference) that can be used to transform a position in either the measurement robot coordinate system or the reference coordinate system into a position in the other of the measurement robot coordinate system or the reference coordinate system. Therefore, the control information generator 513 can use this coordinate transformation matrix (measurement robot-reference) to convert the amount of correction for the position of the measurement head 23 in the reference coordinate system into the amount of correction for the position of the measurement head 23 in the measurement robot coordinate system.

[0156] Thereafter, the tracker control device 5 may output information regarding the correction amount of the position of the measuring head 23 in the measurement robot coordinate system to the robot control device 6 as at least part of robot control information that the robot control device 6 can use to control the measurement robot 2. That is, the tracker control device 5 may output information regarding the movement amount of the measuring head 23 in the measurement robot coordinate system that is necessary to change the position of the measuring head 23 from the current position to the desired measurement position in the measurement robot coordinate system to the robot control device 6 as at least part of the robot control information. The tracker control device 5 may output information regarding the movement direction of the measuring head 23 in the measurement robot coordinate system that is necessary to change the position of the measuring head 23 from the current position to the desired measurement position in the measurement robot coordinate system to the robot control device 6 as at least part of the robot control information. As a result, as shown in FIG. 18 which shows the measurement head 23 moving in the measurement robot coordinate system based on the robot control information, the robot control device 6 may move the measurement head 23 so as to change the position of the measurement head 23 from the current position to the desired measurement position. Specifically, the robot control device 6 may move the measurement head 23 by the movement amount indicated by the robot control information along the movement direction indicated by the robot control information.

[0157] If it is determined that the orientation of the measurement head 23 is not the desired measurement orientation, the control information generating unit 513 may calculate, based on the measurement position and orientation information, a correction amount for the orientation of the measurement head 23 that is required to change the orientation of the measurement head 23 from the current orientation to the desired measurement orientation in the reference coordinate system. Specifically, based on the measurement position and orientation information, the control information generating unit 513 may calculate at least one of the movement amount and movement direction of the measurement head 23 that is required to change the orientation of the measurement head 23 from the current orientation to the desired measurement orientation in the reference coordinate system.

[0158] Information regarding the correction amount for the attitude of the measurement head 23 may be output from the tracker control device 5 to the robot control device 6 as at least part of robot control information that can be used by the robot control device 6 to control the measurement robot 2. Information regarding the correction amount for the attitude of the measurement head 23 may be output from the tracker control device 5 to the robot control device 6 as position information for driving the measurement robot 2 to position the measurement head 23.

[0159] However, the robot control device 6 uses a measurement robot coordinate system that is determined based on the measurement robot 2 as a reference to control the posture of the measurement head 23. Meanwhile, the control information generator 513 calculates the amount of correction for the posture of the measurement head 23 in the reference coordinate system. Therefore, the control information generator 513 may first convert the amount of correction for the posture of the measurement head 23 in the reference coordinate system into the amount of correction for the posture of the measurement head 23 in the measurement robot coordinate system. Specifically, the control information generator 513 may use a coordinate transformation matrix (measurement robot-reference) to convert the amount of correction for the posture of the measurement head 23 in the reference coordinate system into the amount of correction for the posture of the measurement head 23 in the measurement robot coordinate system.

[0160] Thereafter, the tracker control device 5 may output information regarding the correction amount for the posture of the measurement head 23 in the measurement robot coordinate system to the robot control device 6 as at least part of the robot control information. That is, the tracker control device 5 may output information regarding at least one of the movement amount and movement direction of the measurement head 23 in the measurement robot coordinate system that is necessary to change the posture of the measurement head 23 from the current posture to the desired measurement posture in the measurement robot coordinate system to the robot control device 6 as at least part of the robot control information. As a result, as shown in FIG. 18 which shows the measurement head 23 moving in the measurement robot coordinate system based on the robot control information, the robot control device 6 may move the measurement head 23 so as to change the posture of the measurement head 23 from the current posture to the desired measurement posture. Specifically, the robot control device 6 may move the measurement head 23 by the movement amount indicated by the robot control information along the movement direction indicated by the robot control information.

[0161] After moving the measurement head 23, the position and orientation calculation unit 512 may control the laser tracker 4 to again irradiate the measurement light ML onto each of the multiple reflectors 24 arranged on the measurement head 23. Thereafter, the position and orientation calculation unit 512 may again calculate at least one of the position and orientation of the measurement head 23 based on light reception information indicating the reception results of the reflected light RL from each of the multiple reflectors 24. Thereafter, the position and orientation calculation unit 512 may again determine whether the position of the measurement head 23 is the desired measurement position and whether the orientation of the measurement head 23 is the desired measurement orientation, based on measurement position and orientation information indicating the recalculation results of at least one of the position and orientation of the measurement head 23. Thereafter, the tracker control device 5 may repeat the same operation until it is determined that the position of the measurement head 23 is the desired measurement position and that the orientation of the measurement head 23 is the desired measurement orientation. As a result, the measurement head 23 is positioned at the desired measurement position in the desired measurement orientation.

[0162] In step S104, the robot control device 6 may roughly move the measurement head 23 so that at least a portion of the workpiece W is included in the measurement field of view of the measurement head 23, without using the robot control information output by the tracker control device 5. In this case, the laser tracker 4 does not need to irradiate each of the multiple reflectors 24 with measurement light ML, and the tracker control device 5 does not need to calculate at least one of the position and orientation of the measurement head 23 based on light reception information indicating the reception results of the reflected light RL from each of the multiple reflectors 24. As a result, the cost required to perform the operation of step S104 can be reduced.

[0163] (2-5) Measurement of the Three-Dimensional Shape of the Workpiece W: Steps S105 to S107 Referring again to FIG. 11 , thereafter, the robot control device 6 controls the measuring robot 2 located in the first processing space SP to measure the workpiece W located in the first processing space SP (step S105). For example, as shown in FIG. 19 which shows an example of the measuring robot 2 measuring the workpiece W, the robot control device 6 controls the measuring robot 2 located in the first processing space SP to measure the three-dimensional shape of the workpiece W located in the first processing space SP. As a result, the measuring robot 2 located in the first processing space SP measures the workpiece W located in the first processing space SP. In other words, the measuring robot 2 located in the first processing space SP performs a measurement operation corresponding to the first processing step assigned to the measuring robot 2. The measuring robot 2 located in the first processing space SP performs a measurement operation corresponding to the first processing step to be performed in the first processing space SP.

[0164] In parallel with or before or after the operation of step S105, the tracker control device 5 calculates at least one of the position and orientation of the measurement head 23 that measures the three-dimensional shape of the workpiece W in step S105 (step S106). That is, the tracker control device 5 calculates at least one of the position and orientation of the measurement head 23 at the time when the measurement head 23 is measuring the three-dimensional shape of the workpiece W in step S105 (step S106). Specifically, as shown in FIG. 19 , the position and orientation calculation unit 512 controls the laser tracker 4 to irradiate measurement light ML to each of the multiple reflectors 24 arranged on the measurement head 23. As a result, the laser tracker 4 receives reflected light RL from each of the multiple reflectors 24. Thereafter, the position and orientation calculation unit 512 calculates the position of each of the multiple reflectors 24 in the tracker coordinate system based on light reception information indicating the light reception results of the reflected light RL from each of the multiple reflectors 24. Thereafter, the position and orientation calculation unit 512 calculates at least one of the position and orientation of the measurement head 23 in the reference coordinate system based on the respective positions of the plurality of reflectors 24 .

[0165] However, if the measurement head 23 has not moved after at least one of the position and orientation of the measurement head 23 is calculated in step S104, the tracker control device 5 may use at least one of the position and orientation of the measurement head 23 calculated in step S104 as at least one of the position and orientation of the measurement head 23 calculated in step S106. In this case, the tracker control device 5 does not need to recalculate at least one of the position and orientation of the measurement head 23 in step S106. On the other hand, to increase the amount of information in the three-dimensional shape data, steps S104 to S106 may be repeated multiple times. This makes it possible to average out the influences of the environment of the processing space SP, such as air fluctuations in the processing space SP, temperature fluctuations in the processing space SP, humidity fluctuations in the processing space SP, pressure fluctuations in the processing space SP, and vibrations occurring in the processing space SP, thereby obtaining more accurate information.

[0166] 11 , the shape data processing unit 514 then performs a data conversion process, which is an example of predetermined data processing, on the three-dimensional shape data indicating the three-dimensional shape of the workpiece W measured in step S105 (step S107). Specifically, the three-dimensional shape data indicates the three-dimensional shape of the workpiece W in a shape measurement coordinate system defined based on the measuring head 23. On the other hand, as described above, in this embodiment, the reference coordinate system constructed in step S101 serves as the coordinate system used as a reference in the machining system PSYS. Therefore, in step S107, the shape data processing unit 514 performs a data conversion process to convert the three-dimensional shape data indicating the three-dimensional shape of the workpiece W in the shape measurement coordinate system into three-dimensional shape data indicating the three-dimensional shape of the workpiece W in the reference coordinate system. Because the data conversion process converts the coordinates of the three-dimensional shape data in this way, the data conversion process may also be referred to as a coordinate conversion process.

[0167] Specifically, because at least one of the position and orientation of the measurement head 23 in the reference coordinate system is calculated in step S106, the tracker control device 5 can identify the relative positional relationship between the reference coordinate system and the shape measurement coordinate system defined with reference to the measurement head 23, based on at least one of the position and orientation of the measurement head 23 in the reference coordinate system. As a result, the tracker control device 5 can generate a coordinate transformation matrix (shape measurement-reference) that can be used to transform the position of either the shape measurement coordinate system or the reference coordinate system into the position of the other of the shape measurement coordinate system or the reference coordinate system, based on at least one of the position and orientation of the measurement head 23 in the reference coordinate system calculated in step S106. Therefore, the shape data processing unit 514 can use this coordinate transformation matrix (shape measurement-reference) to perform data conversion processing to convert three-dimensional shape data indicating the three-dimensional shape of the workpiece W in the shape measurement coordinate system into three-dimensional shape data indicating the three-dimensional shape of the workpiece W in the reference coordinate system.

[0168] An example of the data conversion process is shown schematically in Fig. 20. The left side of Fig. 20 shows three-dimensional shape data that has not been subjected to data conversion process, and the right side of Fig. 20 shows three-dimensional shape data that has been subjected to data conversion process.

[0169] As described above, in this embodiment, the tracker control device 5 manages the three-dimensional shape data indicating the three-dimensional shape of the workpiece W as three-dimensional shape data indicating the three-dimensional shape of the workpiece W in the reference coordinate system. In other words, the tracker control device 5 can manage not only at least one measurement result of the position and orientation of the machining head 13, at least one measurement result of the position and orientation of the measuring head 23, at least one measurement result of the position and orientation of the workpiece transport device 3, and at least one measurement result of the position and orientation of the workpiece W, but also the measurement result of the three-dimensional shape of the workpiece W as measurement results in the reference coordinate system.

[0170] 11 , the tracker control device 5 then determines whether to move the measurement head 23 (step S108). For example, if the measurement head 23 is scheduled to measure the three-dimensional shape of the workpiece W at a position and / or orientation different from the current one, the tracker control device 5 may determine to move the measurement head 23. For example, if the information about the three-dimensional shape of the workpiece W measured by the measurement head 23 at the current position and orientation is insufficient or has defects, the tracker control device 5 may determine to move the measurement head 23.

[0171] The movement of the measurement head 23 may be performed for the purpose of reducing blind spots of the workpiece W that are not included in the measurement field of view. In this case, the more times the measurement head 23 changes its position to measure the three-dimensional shape of the workpiece W, the higher the possibility that blind spots of the workpiece W that are not included in the measurement field of view will be reduced. Similarly, the more times the measurement head 23 changes its posture to measure the three-dimensional shape of the workpiece W, the higher the possibility that blind spots of the workpiece W that are not included in the measurement field of view will be reduced.

[0172] As a result of the determination in step S108, if it is determined that the measuring head 23 should be moved (step S108: Yes), the operations from step S104 to step S107 are performed again.

[0173] Specifically, the robot control device 6 controls at least one of the position and the orientation of the measurement head 23 located in the first processing space SP so that at least one of the position and the orientation of the measurement head 23 changes within the first processing space SP (step S104). That is, the robot control device 6 controls at least one of the position and the orientation of the measurement head 23 so that the measurement robot 2 located in the first processing space SP moves within the first processing space SP (step S104). Specifically, as described above, the position and orientation calculation unit 512 controls the laser tracker 4 to irradiate the measurement light ML to each of the multiple reflectors 24 arranged on the measurement head 23, and the position and orientation calculation unit 512 calculates at least one of the current position and the orientation of the measurement head 23 based on light reception information indicating the reception result of the reflected light RL from the reflectors 24. Thereafter, the robot control device 6 controls the measurement robot 2 to move the measurement head 23 and position the measurement head 23 at the planned next measurement position and orientation. The tracker control device 5 controls the laser tracker 4 to irradiate measurement light ML onto each of the multiple reflectors 24 arranged on the measurement head 23, and calculates at least one of the position and orientation of the measurement head 23 after movement based on light reception information indicating the reception result of reflected light RL from the reflectors 24. At this time, if the position and orientation of the measurement head 23 differ from the planned position and orientation of the measurement head 23, the robot control device 6 controls the measurement robot 2 to correct at least one of the position and orientation of the measurement head 23 based on measurement position and orientation information indicating at least one of the position and orientation of the measurement head 23 calculated by the position and orientation calculation unit 512.

[0174] At least one of the corrections of the position and orientation of the measuring head 23 performed by the robot control device 6 controlling the measuring robot 2 may be omitted. If the accurate position and orientation of the measuring head 23 is acquired when or at the time of measuring the three-dimensional shape of the workpiece W, and there is no problem even if the acquired position and orientation differ slightly from the predetermined measurement position and orientation, the correction operation can be omitted. In this case, the robot control device 6 may roughly move the measuring head 23. For example, the robot control device 6 may roughly move the measuring head 23 along a predetermined movement direction. For example, the robot control device 6 may roughly move the measuring head 23 by a predetermined movement amount. The tracker control device 5 may control the laser tracker 4 to accurately measure the position and orientation of the measuring head 23 at the destination.

[0175] Thereafter, the robot control device 6 controls the measuring robot 2 to measure the workpiece W (step S105). Furthermore, the tracker control device 5 calculates at least one of the position and orientation of the measuring head 23 that measures the three-dimensional shape of the workpiece W in step S105 (step S106). Based on at least one of the position and orientation of the measuring head 23, the tracker control device 5 performs data conversion processing, which is an example of predetermined data processing, on the three-dimensional shape data that indicates the three-dimensional shape of the workpiece W measured in step S105 (step S107).

[0176] It should be noted that when the measurement head 23 moves, the positional relationship between the measurement head 23 and the workpiece W changes. For this reason, the operation of determining whether to move the measurement head 23 in step S108 may be considered equivalent to the operation of determining whether to change the positional relationship between the measurement head 23 and the workpiece W. The operation of controlling at least one of the position and posture of the measurement head 23 in step S104 (that is, the operation of moving the measurement head 23) may be considered equivalent to the operation of changing the positional relationship between the measurement head 23 and the workpiece W.

[0177] In this way, when the measurement head 23 moves within the processing space SP and measures the three-dimensional shape of the workpiece W at multiple positions and / or orientations, the tracker control device 5 performs data conversion processing on each of the multiple three-dimensional shape data.

[0178] As an example, a description will be given of a case in which the measurement head 23 located at a first position measures the workpiece W during a first measurement period, and the measurement head 23 located at a second position different from the first position measures the workpiece W during a second measurement period different from the first measurement period. The first measurement period may be considered to be a period in which the positional relationship between the measurement head 23 and the workpiece W is a first positional relationship. The second measurement period may be considered to be a period in which the positional relationship between the measurement head 23 and the workpiece W is a second positional relationship different from the first positional relationship. In this case, the tracker control device 5 may calculate at least one of the position and orientation of the measurement head 23 during the first measurement period based on light reception information indicating the result of receiving reflected light RL from the reflector 24 of the measurement head 23 during the first measurement period. Thereafter, the tracker control device 5 may perform data conversion processing on three-dimensional shape data indicating the measurement result of the three-dimensional shape of the workpiece W during the first measurement period based on the calculation result of at least one of the position and orientation of the measurement head 23 during the first measurement period. Similarly, the tracker control device 5 may calculate at least one of the position and orientation of the measurement head 23 during the second measurement period based on light reception information indicating the reception results of the reflected light RL from the reflector 24 of the measurement head 23 during the second measurement period. Thereafter, the tracker control device 5 may perform data conversion processing on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W during the second measurement period based on the calculation results of at least one of the position and orientation of the measurement head 23 during the second measurement period.

[0179] As another example, an example will be described in which the measurement head 23 in a first orientation measures the workpiece W during a third measurement period, and the measurement head 23 in a second orientation different from the first orientation measures the workpiece W during a fourth measurement period different from the third measurement period. The third measurement period may be considered to be a period during which the positional relationship between the measurement head 23 and the workpiece W (particularly, the positional relationship including the orientation) is a third positional relationship. The fourth measurement period may be considered to be a period during which the positional relationship between the measurement head 23 and the workpiece W is a fourth positional relationship different from the third positional relationship. In this case, the tracker control device 5 may calculate at least one of the position and orientation of the measurement head 23 during the third measurement period based on light reception information indicating the reception result of the reflected light RL from the reflector 24 of the measurement head 23 during the third measurement period. Thereafter, the tracker control device 5 may perform data conversion processing on three-dimensional shape data indicating the measurement result of the three-dimensional shape of the workpiece W during the third measurement period based on the calculation result of at least one of the position and orientation of the measurement head 23 during the third measurement period. Similarly, the tracker control device 5 may calculate at least one of the position and orientation of the measurement head 23 during the fourth measurement period based on light reception information indicating the reception results of the reflected light RL from the reflector 24 of the measurement head 23 during the fourth measurement period. Thereafter, the tracker control device 5 may perform data conversion processing on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W during the fourth measurement period based on the calculation results of at least one of the position and orientation of the measurement head 23 during the fourth measurement period.

[0180] On the other hand, if it is determined in step S108 that the measuring head 23 should not be moved (step S108: No), the operations from step S104 to step S107 do not need to be performed again.

[0181] (2-7) Combining Measurement Data of the Three-Dimensional Shape of the Workpiece W: Step S109 Thereafter, when the shape data processing unit 514 acquires multiple pieces of three-dimensional shape data in step S107, the shape data processing unit 514 performs a data combining process, which is an example of predetermined data processing, on the multiple pieces of three-dimensional shape data (step S109). The data combining process is data processing for combining (in other words, synthesizing or merging) multiple pieces of three-dimensional shape data. The data combining process is data processing for combining (in other words, synthesizing or merging) multiple pieces of three-dimensional shape data to generate a single piece of three-dimensional shape data.

[0182] Each of the multiple pieces of three-dimensional shape data indicates the three-dimensional shape of the workpiece W in a reference coordinate system. In other words, the coordinate systems for the multiple pieces of three-dimensional shape data are already aligned. This allows the shape data processing unit 514 to easily combine the multiple pieces of three-dimensional shape data. Furthermore, because the laser tracker 4 and tracker control device 5 (i.e., the position measurement system MSYS) accurately measure the position and orientation of the measuring head 23 during measurement of the three-dimensional shape of the workpiece W, there is no need for alignment markers (e.g., AR markers) used in combining (combining) the multiple pieces of three-dimensional shape data.

[0183] The shape data processing unit 514 may combine the plurality of three-dimensional shape data so that a characteristic portion of the three-dimensional shape of the workpiece W indicated by first three-dimensional shape data among the plurality of three-dimensional shape data matches the same characteristic portion of the three-dimensional shape of the workpiece W indicated by second three-dimensional shape data among the plurality of three-dimensional shape data. Examples of characteristic portions include vertices, corners, sides, faces, and portions having characteristic shapes of the workpiece W, as well as examples of machining marks left by the machining head 13.

[0184] As an example, Fig. 21 schematically shows two pieces of three-dimensional shape data. As shown in Fig. 21, the shape data processing unit 514 may combine multiple pieces of three-dimensional shape data so that the machining marks (holes) made by the machining head 13 in the three-dimensional shape of the workpiece W represented by the first three-dimensional shape data shown on the left side of Fig. 21 match the machining marks (holes) made by the machining head 13 in the three-dimensional shape of the workpiece W represented by the second three-dimensional shape data shown on the right side of Fig. 21. As a result, the shape data processing unit 514 can generate a single piece of three-dimensional shape data that is newly generated by combining the multiple pieces of three-dimensional shape data, as shown in the lower part of Fig. 21.

[0185] The robot control device 6 may determine whether the three-dimensional shape of the workpiece W is the desired shape based on the three-dimensional shape data generated in step S109. If it is determined that the three-dimensional shape of the workpiece W is not the desired shape, the processing robot 1 may further process the workpiece W under the control of the tracker control device 5 and the robot control device 6 so that the three-dimensional shape of the workpiece W becomes the desired shape. In other words, the operation of step S103 described above may be performed again.

[0186] (2-8) Movement of Workpiece W: Step S110 Thereafter, the tracker control device 5 may determine whether the workpiece W has moved (step S110). That is, the tracker control device 5 may determine whether the workpiece transport device 3 on which the workpiece W is placed has moved (step S110). In particular, in step S110, the tracker control device 5 may determine whether the workpiece W located in the first processing space SP has moved from the first processing space SP to a second processing space SP different from the first processing space SP. That is, the tracker control device 5 may determine whether the workpiece W has moved from the first processing space SP where a first processing step is performed to the second processing space SP where a second processing step is performed.

[0187] An example of a scene in which a workpiece W located in a first processing space SP is moved from the first processing space SP to a second processing space SP will be described with reference to Fig. 22. Fig. 22 shows an example in which a processing robot 1#1 having a processing head 13#1 attached thereto and a measuring robot 2#1 having a measuring head 23#1 attached thereto are disposed in the first processing space SP#1, and a processing robot 1#2 having a processing head 13#2 attached thereto and a measuring robot 2#2 having a measuring head 23#2 attached thereto are disposed in the second processing space SP#2. In this case, an example of a scene in which a workpiece W located in the first processing space SP#1 is moved from the first processing space SP#1 to the second processing space SP#2 is a scene in which a first processing step performed in the first processing space SP#1 is completed. That is, an example of a situation in which the workpiece W located in the first processing space SP#1 moves from the first processing space SP#1 to the second processing space SP#2 is a situation in which the processing operation to be performed by the processing head 13#1 located in the first processing space SP#1 is completed and the measurement operation to be performed by the measurement head 23#1 located in the first processing space SP#1 is completed. In this case, it is assumed that after the workpiece W moves from the first processing space SP#1 to the second processing space SP#2, a new second processing step to be performed in the second processing space SP#2 is performed. That is, it is assumed that the processing operation to be performed by the processing head 13#2 located in the second processing space SP#2 is performed and the measurement operation to be performed by the measurement head 23#2 located in the second processing space SP#2 is performed.

[0188] The first processing space SP#1 may be considered to be the first processing space in which the processing head 13#1 performs the processing operation. The first processing space SP#1 may be considered to be the first measurement processing space in which the measurement head 23#1 performs the processing operation. The second processing space SP#2 may be considered to be the second processing space in which the processing head 13#2 performs the processing operation. The second processing space SP#2 may be considered to be the second measurement processing space in which the measurement head 23#2 performs the processing operation. In this case, movement of the workpiece W from the first processing space SP#1 to the second processing space SP#2 may be considered to be equivalent to movement of the workpiece W from at least one of the first processing space and the first measurement processing space to at least one of the second processing space and the second measurement processing space.

[0189] After the workpiece W is moved to the second processing space SP#2, the operation of step S101 is performed again. That is, the tracker control device 5 newly constructs (reconstructs) a reference coordinate system (step S101). The reference coordinate system reconstructed here becomes a coordinate system used as a reference in the second processing space SP#2, which is the destination of the workpiece W. Specifically, the reconstructed reference coordinate system is a coordinate system used as a reference in the processing system PSYS while the workpiece transport device 3 is located in the second processing space SP#2. The reconstructed reference coordinate system is a coordinate system used as a reference in the processing system PSYS while the workpiece W is located in the second processing space SP#2. The reconstructed reference coordinate system is a coordinate system used as a reference in the processing system PSYS while the processing robot 1#2 located in the second processing space SP#2 processes the workpiece W located in the second processing space SP#2. The reconstructed reference coordinate system is a coordinate system used as a reference in the processing system PSYS during the period when the measuring robot 2#2 located in the second processing space SP#2 measures the workpiece W located in the second processing space SP#2.

[0190] Thereafter, the second processing step to be performed in the second processing space SP is performed using the reference coordinate system reconstructed in step S101. That is, the robot system RSYS and the position measurement system MSYS cooperate to perform the operations from step S102 to step S109 using the reference coordinate system reconstructed in step S101. In step S101 after the workpiece transport device 3 has moved to the second processing space SP#2, the reference coordinate system in the second processing space SP#2 is reconstructed. However, when attention is paid to the relationship between the reference coordinate system and the workpiece W, the reference coordinate system reconstructed in the second processing space SP#2 is the same as the reference coordinate system constructed in the first processing space SP#1. In other words, in both the first processing space SP#1 and the second processing space SP#2, the reference coordinate system is constructed using the same reflector 34 (for example, reflectors 34#1, 34#2, and 34#3 shown in FIG. 13), so even if the work transport device 3 (i.e., the work W) moves, it is possible to process the work W (measurement processing and machining processing) using the same reference coordinate system. For example, three-dimensional shape data measured in the first processing space SP#1 and converted into data indicating the three-dimensional shape of the work W in the reference coordinate system can be used as is in the second processing space SP#2.

[0191] In the above embodiment, an example in which a single laser tracker 4 is used in the first processing space SP#1 and the second processing space SP#2 has been described, but this is not limiting. For example, as shown in FIG. 23 , two or more laser trackers 4 may be disposed in each of the first processing space SP#1 and the second processing space SP#2. FIG. 23 shows an example in which a first laser tracker 4#1 is disposed in the first processing space SP#1, and a second laser tracker 4#2 different from the first laser tracker 4#1 is disposed in the second processing space SP#2. In this case, the first laser tracker #1 may irradiate the measurement light ML to each of the reflector 14 of the processing head 13#1, the reflector 24 of the measurement head 23#1, and the reflector 34 of the workpiece transport device 3 located in the first processing space SP#1. The tracker control device 5 may construct a reference coordinate system used as a reference in the first processing space SP#1 based on the result of reception of the reflected light RL from the reflector 34 by the first laser tracker 4#1. The tracker control device 5 may calculate at least one of the position and attitude of the processing head 13#1 based on the result of reception of the reflected light RL from the reflector 14 by the first laser tracker 4#1. The tracker control device 5 may calculate at least one of the position and attitude of the measuring head 23#1 based on the result of reception of the reflected light RL from the reflector 24 by the first laser tracker 4#1. Meanwhile, after the workpiece W moves from the first processing space SP#1 to the second processing space SP#2, the second laser tracker #2 may irradiate the measurement light ML to each of the reflector 14 of the processing head 13#2, the reflector 24 of the measuring head 23#2, and the reflector 34 of the workpiece transport device 3 located in the second processing space SP#2. The tracker control device 5 may reconstruct a reference coordinate system used as a reference in the second processing space SP#2 based on the result of the second laser tracker 4#2 receiving the reflected light RL from the reflector 34. The tracker control device 5 may calculate at least one of the position and orientation of the processing head 13#2 based on the result of the second laser tracker 4#2 receiving the reflected light RL from the reflector 14.The tracker control device 5 may calculate at least one of the position and orientation of the measurement head 23#2 based on the result of reception of the reflected light RL from the reflector 24 by the second laser tracker 4#2.

[0192] Furthermore, one or more laser trackers 4 may be disposed in each of two or more processing spaces SP. The laser tracker 4 may be mounted on an automatic guided vehicle (e.g., an AGV), and the laser tracker 4 may move between the multiple processing spaces SP. Even in this case, if a reference coordinate system is constructed by using the reflector 34 disposed on the workpiece transport device 3 in common for all of the laser trackers 4, the multiple laser trackers 4 can share the same reference coordinate system, and information on the position and orientation of the measurement object (e.g., the processing head 13, the measuring head 23, etc.) measured by any of the laser trackers 4 can be expressed on the same reference coordinate system.

[0193] On the other hand, when it is determined in step S110 that the workpiece W has not moved (step S110: No), the machining system PSYS may end the operation shown in Fig. 11. Alternatively, the machining system PSYS may continue to determine whether the workpiece W has moved. In other words, the machining system PSYS may continue to monitor the movement of the workpiece W.

[0194] (3) Technical Effects of the Machining System PSYS in the Present Embodiment As described above, in the present embodiment, the position measurement system MSYS can construct a reference coordinate system. As a result, in the present embodiment, the position measurement system MSYS can manage all of the measurement results of the position of the machining head 13, the measurement results of the attitude of the machining head 13, the measurement results of the position of the measuring head 23, the measurement results of the attitude of the measuring head 23, the measurement results of the position of the workpiece transportation device 3, the measurement results of the attitude of the workpiece W, the measurement results of the attitude of the workpiece W, and the measurement results of the three-dimensional shape of the workpiece W as measurement results in the reference coordinate system. In other words, the position measurement system MSYS can uniformly manage all of the measurement results of the position of the machining head 13, the measurement results of the attitude of the machining head 13, the measurement results of the position of the measuring head 23, the measurement results of the attitude of the measuring head 23, the measurement results of the position of the work transport device 3, the measurement results of the attitude of the work transport device 3, the measurement results of the position of the work W, the measurement results of the attitude of the work W, and the measurement results of the three-dimensional shape of the work W as measurement results in the same coordinate system.

[0195] Furthermore, because a single coordinate system, called the reference coordinate system, is used as the coordinate system used as the reference in the machining system PSYS, the position measurement system MSYS can easily combine multiple pieces of three-dimensional shape data obtained by measuring the workpiece W. As a result, even if the measuring robot 2 measures the three-dimensional shape of the workpiece W multiple times, the position measurement system MSYS can easily generate single three-dimensional shape data that appropriately reflects the results of the multiple measurements by combining the multiple pieces of three-dimensional shape data obtained by the multiple measurements.

[0196] Furthermore, when the workpiece W moves, the position measurement system MSYS reconstructs the reference coordinate system. For example, Fig. 22 shows the workpiece W moving from the first processing space SP#1 to the second processing space SP#2. As shown in Fig. 22, when the workpiece W is located in the first processing space SP#1 (i.e., the workpiece W is located at a first desired position within the first processing space SP#1), the position measurement system MSYS constructs a first reference coordinate system defined based on the workpiece transport device 3 (or the workpiece W) located in the first processing space SP#1. In this case, the tracker control device 5 manages at least one measurement result of the position and posture of the processing robot 1#1 (particularly, the processing head 13#1) located in the first processing space SP#1, at least one measurement result of the position and posture of the measuring robot 2#1 (particularly, the measuring head 23#1) located in the first processing space SP#1, at least one measurement result of the position and posture of the work transport device 3 located in the first processing space SP#1, at least one measurement result of the position and posture of the work W located in the first processing space SP#1, and the measurement result of the three-dimensional shape of the work W located in the first processing space SP#1 as measurement results in the same first reference coordinate system. On the other hand, when the work transport device 3 (or the work W) is located in the second processing space SP#2 (i.e., when the work W is located at a second desired position in the second processing space SP#2 that is different from the first desired position in the first processing space SP#1), the position measurement system MSYS constructs a second reference coordinate system that is determined based on the work transport device 3 (or the work W) located in the second processing space SP#2. In this case, the tracker control device 5 manages at least one measurement result of the position and posture of the processing robot 1#2 (particularly, the processing head 13#2) located in the second processing space SP#2, at least one measurement result of the position and posture of the measuring robot 2#2 (particularly, the measuring head 23#2) located in the second processing space SP#2, at least one measurement result of the position and posture of the work transport device 3 located in the second processing space SP#2, at least one measurement result of the position and posture of the work W located in the second processing space SP#2, and the measurement result of the three-dimensional shape of the work W located in the second processing space SP#2 as measurement results in the same second reference coordinate system.

[0197] Here, both the first reference coordinate system and the second reference coordinate system are constructed using the reflector 34 that is arranged at a fixed position relative to the work transportation device 3 (or the workpiece W). In other words, both the first reference coordinate system and the second reference coordinate system are constructed using the reflector 34 that moves together with the work transportation device 3 (or the workpiece W). For this reason, both the first reference coordinate system and the second reference coordinate system can be said to be coordinate systems that are determined based on the same work transportation device 3 (or the workpiece W). In other words, both the first reference coordinate system and the second reference coordinate system can be said to be coordinate systems constructed on the same work transportation device 3. In this case, it can be said that the second reference coordinate system is a reconstruction of the first reference coordinate system. In other words, in this case, it can be said that the second reference coordinate system is a coordinate system obtained by moving the first reference coordinate system in accordance with the movement of the work transportation device 3. In this case, the position measurement system MSYS does not need to convert the measurement result of the position of the measurement object in one of the first and second reference coordinate systems into the measurement result of the position of the measurement object in the other of the first and second reference coordinate systems in order to compare the measurement result of the position of the measurement object in the first reference coordinate system with the measurement result of the position of the measurement object in the second reference coordinate system. Similarly, the position measurement system MSYS does not need to convert the measurement result of the orientation of the measurement object in one of the first and second reference coordinate systems into the measurement result of the orientation of the measurement object in the other of the first and second reference coordinate systems in order to compare the measurement result of the orientation of the measurement object in the first reference coordinate system with the measurement result of the orientation of the measurement object in the second reference coordinate system. Similarly, in order to compare the measurement results of the three-dimensional shape of the workpiece W in the first reference coordinate system with the measurement results of the three-dimensional shape of the workpiece W in the second reference coordinate system, the position measurement system MSYS does not need to convert the measurement results of the three-dimensional shape of the workpiece W in either the first or second reference coordinate system into the measurement results of the three-dimensional shape of the workpiece W in the other of the first or second reference coordinate system.Therefore, the position measurement system MSYS can appropriately compare the measurement results in the first reference coordinate system with the measurement results in the second reference coordinate system without being affected by conversion errors that occur when converting measurement results in either the first or second reference coordinate system into measurement results in the other of the first or second reference coordinate systems. As a result, the tracker control device 5 can determine whether a problem has occurred in the first processing step using the first reference coordinate system, separately from problems that occur in the second processing step using the second reference coordinate system. Similarly, the tracker control device 5 can determine whether a problem has occurred in the second processing step using the second reference coordinate system, separately from problems that occur in the first processing step using the first reference coordinate system. In other words, the tracker control device 5 can ensure traceability of the measurement objects (the machining head 13, the measuring head 23, the workpiece transport device 3, and the workpiece W) between the first and second reference coordinate systems, and appropriately identify problems specific to the measurement objects in each processing step.

[0198] Furthermore, in this embodiment, the position measurement system MSYS can construct a reference coordinate system using the reflector 34 arranged near the workpiece W. That is, the position measurement system MSYS can construct a reference coordinate system using the reflector 34 arranged at or near the processing position in the processing space SP where the processing robot 1 actually processes the workpiece W and the measuring robot 2 actually measures the workpiece W. Therefore, compared to when the reflector 34 is arranged at a position far away from the processing position, the robot system RSYS can process and measure the workpiece W while reducing the influence of the environment in the processing space SP. For example, the robot system RSYS can process and measure the workpiece W while reducing processing errors or measurement errors caused by the influence of the environment in the processing space SP. Note that, examples of the influence of the environment in the processing space SP include at least one of air fluctuations in the processing space SP, temperature fluctuations in the processing space SP, humidity fluctuations in the processing space SP, pressure fluctuations in the processing space SP, and vibrations occurring in the processing space SP. An example of vibrations occurring in the processing space SP is vibrations occurring in at least one of the processing robot 1, the measuring robot 2, the workpiece transport device 3, the laser tracker 4, and the support surface SS.

[0199] (4) Modifications Next, modifications of the processing system PSYS will be described.

[0200] (4-1) First Modification In the first modification, as shown in FIG. 22 above, when a workpiece W located in the first processing space SP#1 is moved from the first processing space SP#1 to the second processing space SP#2, the tracker control device 5 may be capable of controlling the processing robot 1#2 that processes the workpiece W located in the second processing space SP#2 based on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W that was located in the first processing space SP#1. In other words, the tracker control device 5 may be capable of controlling the processing robot 1#2 that processes the workpiece W located in the second processing space SP#2 based on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W that has been processed by the processing robot 1#1 located in the first processing space SP#1. In other words, the tracker control device 5 may be capable of controlling the processing robot 1#2 that processes the workpiece W located in the second processing space SP#2 based on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W by the measuring robot 2#1 located in the first processing space SP#1.

[0201] Below, we will explain an example in which the tracker control device 5 controls at least one of the position and posture of the processing head 13#2 that processes the workpiece W located in the second processing space SP#2 based on three-dimensional shape data that indicates the measurement results of the three-dimensional shape of the workpiece W by the measuring robot 2#1 located in the first processing space SP#1.

[0202] In this case, the machining system PSYS performs the operations from step S101 to step S109 in Fig. 11 described above while the workpiece W is located in the first processing space SP#1. As a result, in step S109 in Fig. 11, three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W by the measuring robot 2#1 located in the first processing space SP#1 is generated. Note that, for convenience of explanation, hereinafter, the three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W by the measuring robot 2#1 located in the first processing space SP#1 will be referred to as "generated three-dimensional shape data."

[0203] The workpiece W then moves from the first processing space SP#1 to the second processing space SP#2. In this case, the tracker control device 5 first constructs a second reference coordinate system to be used in the second processing space SP#2 (step S101 in FIG. 11 ). Then, the tracker control device 5 controls at least one of the position and orientation of the machining head 13#2 located in the second processing space SP#2 (step S102 in FIG. 11 ). In the first modified example, the tracker control device 5 may use the generated three-dimensional shape data to control at least one of the position and orientation of the machining head 13#2 located in the second processing space SP#2 in step S102.

[0204] As an example, the generated three-dimensional shape data indicates the three-dimensional shape of the workpiece W machined by the machining robot 1#1 in the first processing space SP#1. Therefore, the generated three-dimensional shape data includes information regarding the machined portion of the workpiece W machined by the machining robot 1#1 in the first processing space SP#1. In this case, the tracker control device 5 may set a processing target portion PT of the workpiece W that is in a predetermined positional relationship with the machined portion of the workpiece W machined by the machining robot 1#1 in the first processing space SP#1 based on the first three-dimensional shape data, and control at least one of the position and posture of the machining head 13#2 located in the second processing space SP#2 so as to machine the set processing target portion PT. In other words, the tracker control device 5 may generate robot control information that the robot control device 6 uses to control at least one of the position and posture of the machining head 13#2 located in the second processing space SP#2 so as to machine the processing target portion PT of the workpiece W located in the second processing space SP#2. In particular, the tracker control device 5 may generate robot control information that the robot control device 6 uses to correct default or pre-set command values ​​that specify at least one of the position and posture of the machining head 13#2 located in the second processing space SP#2 so as to machine the portion PT to be machined of the workpiece W located in the second processing space SP#2.

[0205] 24, the operations performed in the first modified example will be described using an example in which a machining robot 1#1 located in a first processing space SP#1 performs a machining operation to form a hole in a first portion PP#1 of a workpiece W located in the first processing space SP#1 as part of a first processing step to be performed in the first processing space SP#1, and then a machining robot 1#2 located in a second processing space SP#2 performs a machining operation to form a hole in a second portion PP#2 of a workpiece W located in the second processing space SP#2 as part of a second processing step to be performed in the second processing space SP#2. Note that the second portion PP#2 is located at a position spaced a predetermined pitch distance P from the first portion PP#1 along a predetermined pitch direction along the surface of the workpiece W (in the example shown in FIG. 24, the horizontal direction of the page).

[0206] The left side of FIG. 24 shows a cross-sectional view of the workpiece W when ideal machining operations are performed in each of the first processing space SP#1 and the second processing space SP#2. In this case, as shown in FIG. 24 , in the first processing space SP#1, the machining robot 1#1 moves the machining head 13#1 to a first position HP#1 based on a first robot control signal generated by the robot control device 6 to control the machining robot 1#1 to machine a first portion PP#1 of the workpiece W. The first robot control signal may include, for example, a command value specifying the first position HP#1 at which the machining head 13#1 should be located. Furthermore, the first robot control signal may include, for example, a command value specifying the orientation of the machining head 13#1 located at the first position HP#1. Then, based on the first robot control signal, the machining robot 1#1 uses the machining head 13#1 located at the first position HP#1 to form a hole in the first portion PP#1 of the workpiece W. Furthermore, in the second processing space SP#2, the processing robot 1#2 moves the processing head 13#2 to a second position HP#2 in accordance with a second robot control signal generated by the robot control device 6 to control the processing robot 1#2 to process a second portion PP#2 of the workpiece W. The second robot control signal may include, for example, a command value specifying the second position HP#2 at which the processing head 13#2 should be located. Furthermore, the second robot control signal may include, for example, a command value specifying the posture of the processing head 13#2 located at the second position HP#2. Thereafter, the processing robot 1#2 forms a hole in the second portion PP#2 of the workpiece W using the processing head 13#2 located at the second position HP#2 based on the second robot control signal.

[0207] On the other hand, the right side of Figure 24 shows a cross-sectional view of the workpiece W when a machining error occurs in the machining operation performed in the first processing space SP#1. Specifically, in Figure 24, in the first processing space SP#1, the machining robot 1#1 moves the machining head 13#1 to the first position HP#1 based on the first robot control signal, as in an ideal machining operation. However, in reality, due to a movement error of the machining head 13#1, the machining head 13#1 is located at a third position HP#3 different from the first position HP#1. Figure 24 shows an example in which the machining head 13#1 is located at the third position HP#3, which is separated from the first position HP#1 by an error amount ΔP along the direction along the surface of the workpiece W (the horizontal direction of the paper in Figure 24). 24, the machining head 13#1 located at a third position HP#3 different from the first position HP#1 forms a hole in a third portion PP#3 of the workpiece W that is different from the first portion PP#1 that the machining head 13#1 is supposed to machine. Specifically, the machining head 13#1 forms a hole in the third portion PP#3 that is separated from the first portion PP#1 by an error amount ΔP along the direction along the surface of the workpiece W (the horizontal direction on the paper in FIG. 24).

[0208] In this case, the control information generator 513 of the tracker control device 5 can recognize, based on the generated three-dimensional shape data indicating the three-dimensional shape of the workpiece W after the third portion PP#3 has been machined, that the third portion PP#3 of the workpiece W, which is different from the first portion PP#1 that the machining head 13#1 was originally supposed to machine, has been erroneously machined in the first processing space SP#1. In this case, the control information generator 513 may generate, based on the generated three-dimensional shape data, robot control information that the robot control device 6 can use to correct the second robot control signal used to control the machining head 13#2 located in the second processing space SP#2.

[0209] 24 , if a machining error occurs in the machining operation, the third portion PP#3 of the workpiece W becomes the machined portion of the workpiece W. In this case, the control information generator 513 may set the fourth portion PP#4 of the workpiece W, which is in a predetermined positional relationship with the third portion PP#3 of the workpiece W, as the machined portion PT to be machined in the second processing space SP#2. As an example, the control information generator 513 may set the fourth portion PP#4, which is located at a predetermined pitch distance P from the third portion PP#3 along a predetermined pitch direction along the surface of the workpiece W (in the example shown in FIG. 24 , the horizontal direction on the paper), as the machined portion PT to be machined in the second processing space SP#2. In other words, the control information generator 513 may set the fourth portion PP#4 of the workpiece W, which satisfies the condition that the positional relationship between the third portion PP#3 and the fourth portion PP#4 is the same as the positional relationship between the first portion PP#1 and the second portion PP#2 to be machined in an ideal machining operation, as the machining target portion PT to be machined in the second processing space SP#2. In this case, the fourth portion PP#4 is spaced apart from the second portion PP#2 by the error amount ΔP along a predetermined pitch direction along the surface of the workpiece W (in the example shown in FIG. 24 , the horizontal direction on the paper).

[0210] Thereafter, the control information generator 513 generates robot control information that the robot control device 6 can use to correct a second robot control signal for controlling the machining robot 1#2 to machine the second portion PP#2 of the workpiece W into a second robot control signal for controlling the machining robot 1#2 to machine the fourth portion PP#4 of the workpiece W. For example, the control information generator 513 may generate robot control information for correcting the second robot control signal so as to move the machining head 13#2 located in the second processing space SP#2 to a fourth position HP#4 where the fourth portion PP#4 of the workpiece W can be machined, rather than to the second position HP#2 where the second portion PP#2 of the workpiece W can be machined. The fourth position HP#4 is a position a predetermined pitch distance P away from the third position HP#3 in a predetermined pitch direction along the surface of the workpiece W (in the example shown in FIG. 24 , the horizontal direction of the paper). The fourth position HP#4 is typically a position that is separated from the second position HP#2 by an error amount ΔP along a predetermined pitch direction along the surface of the workpiece W (in the example shown in Figure 24, the horizontal direction of the paper).

[0211] The robot control device 6 then corrects the second robot control signal based on the robot control information. For example, the robot control device 6 may correct a command value included in the second robot control signal that specifies at least one of the position and orientation of the machining head 13#2. As an example, the robot control device 6 may correct the command value included in the second robot control signal that specifies the position of the machining head 13#2 from a command value specifying the second position HP#2 to a command value specifying the fourth position HP#4. As a result, as shown in FIG. 24 , the machining robot 1#2 moves the machining head 13#2 to the fourth position HP#4 in accordance with the corrected second robot control signal, and uses the machining head 13#2 located at the fourth position HP#4 to form a hole in the fourth portion PP#4 of the workpiece W.

[0212] In this case, even if a machining error occurs in the machining operation, the machining system PSYS can form multiple holes in the workpiece W that are spaced apart by the same pitch distance P. In other words, if a machining error occurs in the machining operation performed in the first processing space SP#1, the machining system PSYS can machine the workpiece W in the second processing space SP#2 so that the machining error is offset by the machining operation performed in the second processing space SP#2. In other words, if a machining error occurs in the machining operation performed as part of the first processing step, the machining system PSYS can perform the second processing step so that the machining error is offset by the machining operation performed as part of the second processing step. Therefore, the machining system PSYS can appropriately machine the workpiece W in a desired processing manner.

[0213] Furthermore, not only when multiple holes are formed in the workpiece W at a predetermined pitch distance P apart as shown in Figure 24, but also when the workpiece W is processed in any processing manner, the processing system PSYS may process the workpiece W in the second processing space SP#2 so that if a processing error occurs in the processing operation performed in the first processing space SP#1, this processing error is offset by the processing operation performed in the second processing space SP#2.

[0214] (4-2) Second Modification In the above description, a plurality of reflectors 34 are arranged on the work transportation device 3. In the second modification, at least one of the plurality of reflectors 34 may be arranged on a member different from the work transportation device 3. In this case, the degree of freedom in arranging the reflector 34 is improved.

[0215] 25( a), when the workpiece W is placed on the workpiece transportation device 3 via a jig 39 which is a holding member for holding the workpiece W, at least one of the plurality of reflectors 34 may be arranged on the jig 39. In this case, some of the plurality of reflectors 34 may be arranged on the jig 39, and other parts of the plurality of reflectors 34 may be arranged on the workpiece transportation device 3. Alternatively, all of the plurality of reflectors 34 may be arranged on the jig 39.

[0216] Even in this case, since the jig 39 on which the reflector 34 is disposed holds the workpiece W, as described above, it can be said that the reflector 34 is disposed at a fixed position relative to the workpiece W. In other words, it can be said that the reflector 34 is disposed at a position that satisfies the condition that the positional relationship between the reflector 34 and the workpiece W does not change even if the workpiece W is transported.

[0217] 25(b), at least one of the plurality of reflectors 34 may be disposed on the workpiece W. In this case, some of the plurality of reflectors 34 may be disposed on the workpiece W, and other parts of the plurality of reflectors 34 may be disposed on at least one of the workpiece transport device 3 and the jig 39. Alternatively, all of the plurality of reflectors 34 may be disposed on the workpiece W.

[0218] Even in this case, since the reflector 34 is disposed on the workpiece W itself, as described above, it can be said that the reflector 34 is disposed at a fixed position relative to the workpiece W. In other words, it can be said that the reflector 34 is disposed at a position that satisfies the condition that the positional relationship between the reflector 34 and the workpiece W does not change even if the workpiece W is transported.

[0219] When at least one reflector 34 is arranged on the workpiece W, the tracker control device 5 may detect a positional deviation of the workpiece W in addition to or instead of constructing a reference coordinate system and calculating the position of the workpiece W as described above, based on the calculation results of the position of the at least one reflector 34 arranged on the workpiece W. In other words, the tracker control device 5 may generate positional deviation information regarding the positional deviation of the workpiece W based on the calculation results of the position of the at least one reflector 34 arranged on the workpiece W. In the following description, for convenience of explanation, the at least one reflector 34 arranged on the workpiece W will be referred to as a "workpiece reflector 34."

[0220] As an example, if a reference coordinate system has already been constructed, the tracker control device 5 may detect a positional deviation of the workpiece W with respect to the reference coordinate system by calculating the relative positional relationship between the reference coordinate system and the workpiece W. Specifically, as described above, the reference coordinate system is constructed based on the positions of multiple reflectors 34, including the workpiece reflector 34. Therefore, at the time the reference coordinate system is constructed, information regarding the position of the workpiece reflector 34 in the reference coordinate system becomes known to the tracker control device 5. In this case, if the position of the workpiece reflector 34 calculated after the reference coordinate system is constructed is the same as the position of the workpiece reflector 34 at the time the reference coordinate system was constructed, the tracker control device 5 may determine that no positional deviation of the workpiece W with respect to the reference coordinate system has occurred. On the other hand, if the position of the workpiece reflector 34 calculated after the reference coordinate system is constructed differs from the position of the workpiece reflector 34 at the time the reference coordinate system was constructed, the tracker control device 5 may determine that a positional deviation of the workpiece W with respect to the reference coordinate system has occurred.

[0221] As another example, since the reference coordinate system is constructed based on the positions of multiple reflectors 34 including the work reflector 34 as described above, at the time the reference coordinate system is constructed, information regarding the position of the work reflector 34 in the reference coordinate system and information regarding the positions of other reflectors 34 other than the work reflector 34 in the reference coordinate system become known to the tracker control device 5. In this case, if the relative positional relationship between the work reflector 34 and the other reflectors 34 calculated after the reference coordinate system is constructed is the same as the relative positional relationship between the work reflector 34 and the other reflectors 34 at the time the reference coordinate system was constructed, the tracker control device 5 may determine that no positional deviation of the workpiece W has occurred with respect to the reference coordinate system. On the other hand, if the relative positional relationship between the work reflector 34 and the other reflectors 34 calculated after the reference coordinate system is constructed differs from the relative positional relationship between the work reflector 34 and the other reflectors 34 at the time the reference coordinate system was constructed, the tracker control device 5 may determine that a positional deviation of the workpiece W has occurred with respect to the reference coordinate system.

[0222] 26(a) shows an example of a workpiece W that is not displaced relative to the reference coordinate system, and FIG. 26(b) shows the positions of the multiple reflectors 34 calculated when there is no displacement of the workpiece W relative to the reference coordinate system. FIG. 26(c) shows an example of a workpiece W that is displaced relative to the reference coordinate system, and FIG. 26(d) shows the positions of the multiple reflectors 34 calculated when there is a displacement of the workpiece W relative to the reference coordinate system. In the example shown in FIGS. 26(a) and 26(b), reflector 34#1 is the workpiece reflector 34, and reflectors 34#2 and 34#3 are other reflectors 34 other than the workpiece reflector 34. As shown in FIGS. 26(a) to 26(d), when there is a displacement of the workpiece W relative to the reference coordinate system, the position of the workpiece reflector 34 moves relative to the origin O of the reference coordinate system and the positions of the other reflectors 34.

[0223] Incidentally, when a positional deviation of the workpiece W with respect to the reference coordinate system occurs, taking into consideration that the position of the workpiece reflector 34 moves relative to the positions of the other reflectors 34 arranged on the workpiece transport device 3, the positional deviation of the workpiece W with respect to the reference coordinate system may be considered equivalent to the positional deviation of the workpiece W with respect to the workpiece transport device 3 on which the workpiece W is placed. When the workpiece W is placed on the workpiece transport device 3 via a jig 39, the positional deviation of the workpiece W with respect to the reference coordinate system may be considered equivalent to the positional deviation of the workpiece W with respect to the jig 39 that holds the workpiece W.

[0224] The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the translation direction along the X-axis of the reference coordinate system. The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the translation direction along the Y-axis of the reference coordinate system. The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the translation direction along the Z-axis of the reference coordinate system. The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the rotation direction about the X-axis of the reference coordinate system. The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the rotation direction about the Y-axis of the reference coordinate system. The positional deviation of the workpiece W relative to the reference coordinate system may include a positional deviation in the rotation direction about the Z-axis of the reference coordinate system.

[0225] The tracker control device 5 may further control at least one of the processing robot 1 and the measuring robot 2 based on the information regarding the positional deviation of the workpiece W. The tracker control device 5 may control at least one of the position and attitude of at least one of the processing head 13 and the measuring head 23 based on the information regarding the positional deviation of the workpiece W. Typically, the tracker control device 5 may control at least one of the processing robot 1 and the measuring robot 2 based on the information regarding the positional deviation of the workpiece W so as to offset the influence of the positional deviation of the workpiece W. The tracker control device 5 may control at least one of the position and attitude of at least one of the processing head 13 and the measuring head 23 based on the information regarding the positional deviation of the workpiece W so as to offset the influence of the positional deviation of the workpiece W.

[0226] For example, even if the workpiece W is misaligned, the tracker control device 5 may control the machining robot 1 so as to machine the workpiece W in the same way as if there was no misalignment of the workpiece W. As an example, even if the workpiece W is misaligned, the tracker control device 5 may generate robot control information that the robot control device 6 can use to move the machining head 13 so as to machine the workpiece W in the same way as if there was no misalignment of the workpiece W. In other words, even if the workpiece W is misaligned, the tracker control device 5 may generate robot control information that the robot control device 6 can use to control at least one of the position and posture of the machining head 13 so as to machine the workpiece W in the same way as if there was no misalignment of the workpiece W.

[0227] For example, even if a positional deviation of the workpiece W occurs, the tracker control device 5 may control the measurement robot 2 so as to measure the workpiece W in the same way as if no positional deviation of the workpiece W occurs. As an example, even if a positional deviation of the workpiece W occurs, the tracker control device 5 may generate robot control information that the robot control device 6 can use to move the measurement head 23 so as to measure the workpiece W in the same way as if no positional deviation of the workpiece W occurs. In other words, even if a positional deviation of the workpiece W occurs, the tracker control device 5 may generate robot control information that the robot control device 6 can use to control at least one of the position and posture of the measurement head 23 so as to measure the workpiece W in the same way as if no positional deviation of the workpiece W occurs.

[0228] The tracker control device 5 may construct a reference coordinate system using only the multiple workpiece reflectors 34 arranged on the workpiece W. In this case, the reference coordinate system is fixed to the workpiece W itself, so that the positional deviation of the workpiece W relative to the reference coordinate system as described above, i.e., the positional deviation of the workpiece W relative to the workpiece transport device 3, does not pose a problem.

[0229] (4-3) Third Modification In the above description, the position measurement system MSYS constructs a reference coordinate system based on the position of the reflector 34 arranged on the work transportation device 3. On the other hand, in the third modification, an example will be described in which the position measurement system MSYS uses, as the reference coordinate system, a coordinate system different from the coordinate system constructed based on the position of the reflector 34 arranged on the work transportation device 3.

[0230] 27( a), the tracker control device 5 may use a machining robot coordinate system defined based on the machining robot 1 as a reference coordinate system. In other words, the tracker control device 5 may use a machining robot coordinate system specific to the machining robot 1 as a reference coordinate system. That is, the tracker control device 5 may manage at least one measurement result of the position and orientation of the machining head 13, at least one measurement result of the position and orientation of the measuring head 23, at least one measurement result of the position and orientation of the workpiece transport device 3, at least one measurement result of the position and orientation of the workpiece W, and the measurement result of the three-dimensional shape of the workpiece W as measurement results in the machining robot coordinate system. In this case, compared to when a coordinate system different from the machining robot coordinate system is used as the reference coordinate system, the tracker control device 5 can relatively easily generate robot control information for controlling at least one of the position and orientation of the machining head 13 moving within the machining robot coordinate system. This is because coordinate conversion of the measurement results is not required to generate robot control information for controlling at least one of the position and orientation of the machining head 13.

[0231] For example, as shown in FIG. 27B , the tracker control device 5 may use a machining head coordinate system defined based on the machining head 13 as a reference coordinate system. In other words, the tracker control device 5 may use a machining head coordinate system that moves as the machining head 13 moves as a reference coordinate system. That is, the tracker control device 5 may manage at least one measurement result of the position and orientation of the workpiece transport device 3, at least one measurement result of the position and orientation of the workpiece W, and the measurement result of the three-dimensional shape of the workpiece W as measurement results in the machining head coordinate system. In this case, the machining head (more specifically, for example, a TCP (Tool Center Point)) may be used as the origin, and at least one measurement result of the position and orientation of the workpiece W and the measurement result of the three-dimensional shape of the workpiece W may be represented in the machining head coordinate system. The tracker control device 5 may then output the position and orientation information represented in the machining head coordinate system to the robot control device 6. Note that since the machining head 13 is one aspect of the processing device, the machining head coordinate system may also be referred to as a processing device coordinate system. The machining head coordinate system may also be referred to as a tool coordinate system (machining tool coordinate system).

[0232] 27( c), the tracker control device 5 may use a measurement robot coordinate system defined based on the measurement robot 2 as a reference coordinate system. In other words, the tracker control device 5 may use a measurement robot coordinate system specific to the measurement robot 2 as a reference coordinate system. That is, the tracker control device 5 may manage at least one measurement result of the position and orientation of the machining head 13, at least one measurement result of the position and orientation of the measurement head 23, at least one measurement result of the position and orientation of the workpiece transport device 3, at least one measurement result of the position and orientation of the workpiece W, and the measurement result of the three-dimensional shape of the workpiece W as measurement results in the measurement robot coordinate system. In this case, compared to when a coordinate system different from the measurement robot coordinate system is used as the reference coordinate system, the tracker control device 5 can relatively easily generate robot control information for controlling at least one of the position and orientation of the measurement head 23 moving within the measurement robot coordinate system. This is because coordinate conversion of the measurement results is not required to generate robot control information for controlling at least one of the position and orientation of the measurement head 23.

[0233] For example, as shown in FIG. 27( d ), the tracker control device 5 may use a shape measurement coordinate system defined based on the measuring head 23 as a reference coordinate system. In other words, the tracker control device 5 may use a shape measurement coordinate system that moves as the measuring head 23 moves as a reference coordinate system. That is, the tracker control device 5 may manage at least one measurement result of the position and orientation of the workpiece transport device 3, at least one measurement result of the position and orientation of the workpiece W, and the measurement result of the three-dimensional shape of the workpiece W as measurement results in the shape measurement coordinate system. In this case, the measurement result of at least one measurement result of the position and orientation of the workpiece W and the measurement result of the three-dimensional shape of the workpiece W may be expressed on the shape measurement coordinate system, with the measuring head as the origin. The tracker control device 5 may then output the position and orientation information expressed on the shape measurement coordinate system to the robot control device 6. Note that, since the measuring head 23 is one aspect of the processing device, the shape measurement coordinate system may also be referred to as a processing device coordinate system.

[0234] 27( e), the tracker control device 5 may use a tracker coordinate system defined based on the laser tracker 4 as a reference coordinate system. In other words, the tracker control device 5 may use a tracker coordinate system specific to the laser tracker 4 as a reference coordinate system. That is, the tracker control device 5 may manage at least one measurement result of the position and orientation of the machining head 13, at least one measurement result of the position and orientation of the measuring head 23, at least one measurement result of the position and orientation of the workpiece transportation device 3, at least one measurement result of the position and orientation of the workpiece W, and the measurement result of the three-dimensional shape of the workpiece W as measurement results in the tracker coordinate system. In this case, compared to when a coordinate system different from the tracker coordinate system is used as the reference coordinate system, the tracker control device 5 can use at least one measurement result of the position and orientation of the measurement object using the laser tracker 4 as at least one measurement result of the position and orientation of the measurement object in the reference coordinate system.

[0235] In this case, the tracker control device 5 may construct a reference coordinate system by also using the position measurement results of the reflector 34 arranged on the work transportation device 3. For example, the tracker control device 5 may construct a reference coordinate system by using the laser tracker 4 to measure the position of one of the reflectors 34 arranged on the work transportation device 3, defining that direction as the reference direction (e.g., the X-axis direction), and defining two axes perpendicular to the X-axis direction as the Y-axis direction and the Z-axis direction, with the position of the laser tracker 4 itself as the origin. Alternatively, the tracker control device 5 may measure the positions of two reflectors 34 and construct a reference coordinate system with the direction of a straight line connecting the positions of the two reflectors 34 as the reference direction. Alternatively, the tracker control device 5 may construct a reference coordinate system using a polar coordinate system with the laser tracker 4 as the origin, with the direction defined by the device origin in the pan direction and the device origin in the tilt direction as the reference direction, for example, in FIG. 6 .

[0236] For example, as shown in FIG. 27( f), the tracker control device 5 may construct a reference coordinate system based on the positions of multiple reflectors 74 (typically, at least three reflectors 74) arranged in the processing space SP. As an example, the tracker control device 5 may construct a reference coordinate system based on the positions of multiple reflectors 74 (typically, at least three reflectors 74) arranged on the support surface SS within the processing space SP. Note that the operation of constructing a reference coordinate system based on the position of the reflector 74 may be the same as the operation of constructing a reference coordinate system based on the position of the reflector 34 in step S101 of FIG. 11, except that the reflector 74 is used instead of the reflector 34. Therefore, a detailed description of the operation of constructing a reference coordinate system based on the position of the reflector 74 will be omitted. In this case, the tracker control device 5 can construct a reference coordinate system using the reflector 74, which is a component independent of any of the processing robot 1, the measuring robot 2, the workpiece transport device 3, the laser tracker 4, and the workpiece W. Therefore, the tracker control device 5 can appropriately manage each measurement result using a reference coordinate system that can be commonly used without being affected by the movements of the processing robot 1, measuring robot 2, workpiece transport device 3, laser tracker 4, and workpiece W.

[0237] It is sufficient that the reflector 74 is disposed in the processing space SP. For example, the reflector 74 may be disposed directly on the support surface SS. For example, the reflector 74 may be disposed on the support surface SS via an appropriate base (support member). For example, the reflector 74 may be disposed directly on the ceiling. For example, the reflector 74 may be disposed on the ceiling via a base. The point is that the reflector 74 is fixedly disposed in the processing space SP so that the measurement light ML from the laser tracker 4 reaches the reflector 74 without being obstructed.

[0238] Alternatively, as in the above embodiment, the tracker control device 5 may construct a reference coordinate system by using a combination of the multiple reflectors 34 provided on the work transportation device 3 and the reflector 74 provided in the processing space SP. In this case, the tracker control device 5 may define the X-axis direction, Y-axis direction, and Z-axis direction using the multiple reflectors 34 provided on the work transportation device 3, and may define the origin position using the reflector 74 provided in the processing space SP.

[0239] The tracker control device 5 may calculate at least one of the position and the attitude of the work transportation device 3 by using a combination of the multiple reflectors 34 provided on the work transportation device 3 and the reflector 74 provided in the processing space SP. For example, the tracker control device 5 may construct a reference coordinate system using the multiple reflectors 34 provided on the work transportation device 3. On the other hand, the tracker control device 5 may calculate the position at which the work transportation device 3 is stopped within the processing space SP using the reflector 74 provided in the processing space SP. Even in this case, the tracker control device 5 can calculate at least one of the position and the attitude of the work transportation device 3 in the reference coordinate system based on the reference coordinate system constructed using the multiple reflectors 34 provided on the work transportation device 3 and the stop position of the work transportation device 3 calculated using the reflector 74 provided in the processing space SP. This is because the attitude of the work transportation device 3 does not pose an issue because the reference coordinate system is constructed using the multiple reflectors 34 provided on the work transportation device 3.

[0240] (4-4) Fourth Modification In the above description, the tracker control device 5 constructs a reference coordinate system based on the position of the reflector 34 arranged on the workpiece transport device 3. On the other hand, in the fourth modification, an example will be described in which, before constructing the reference coordinate system, the measurement head 23 measures the three-dimensional shape of the workpiece W, and the tracker control device 5 constructs the reference coordinate system based on three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W by the measurement head 23.

[0241] Specifically, first, the robot control device 6 roughly moves the measurement head 23 so that at least a part of the workpiece W is included in the measurement field of the measurement head 23. Thereafter, the tracker control device 5 extracts at least one characteristic portion F of the workpiece W based on the three-dimensional shape data.

[0242] 28, an example of the characteristic portion F is a characteristic point FP of the workpiece W. Examples of the characteristic point FP of the workpiece W include at least one of a vertex of the workpiece W, a corner of the workpiece W, a hole formed in the workpiece W (particularly, the center of the hole), and an intersection of a characteristic line FL of the workpiece W and a characteristic surface FS of the workpiece W, which will be described later.

[0243] Another example of the characteristic portion F is a linearly extending characteristic line FL of the workpiece W, as shown in Fig. 28. Examples of the characteristic line FL of the workpiece W include at least one of a side of the workpiece W, a line connecting the centers of two holes formed in the workpiece W, a line extending along the central axis of a cylindrical hole formed in the workpiece W, and an intersection line of two characteristic surfaces FS of the workpiece W, which will be described later.

[0244] Another example of the characteristic portion F is a feature surface FS of the workpiece W that extends in a planar shape, as shown in Fig. 28. An example of the feature surface FS of the workpiece W is the surface of the workpiece W. Note that when the three-dimensional shape data is point cloud data, a surface on which a plurality of points exist may be used as the feature surface FS.

[0245] Thereafter, the position measurement system MSYS constructs a reference coordinate system based on at least one characteristic portion F. For example, the tracker control device 5 may specify a certain characteristic point FP as the origin O of the reference coordinate system. For example, the tracker control device 5 may specify an axis passing through the certain characteristic point FP as one axis of the reference coordinate system. For example, the tracker control device 5 may specify an axis passing through two characteristic points FP as one axis of the reference coordinate system. For example, the tracker control device 5 may specify an axis along a certain characteristic line FL as one axis of the reference coordinate system. For example, the tracker control device 5 may specify an axis perpendicular to the certain characteristic line FL as one axis of the reference coordinate system. For example, the tracker control device 5 may specify an axis along a certain feature plane FS as one axis of the reference coordinate system. For example, the tracker control device 5 may specify an axis perpendicular to the certain feature plane FS as one axis of the reference coordinate system.

[0246] In this case, the position measurement system MSYS can construct a reference coordinate system without using the reflector 34 provided on the work transportation device 3. Therefore, the position measurement system MSYS can appropriately construct a reference coordinate system even if the reflector 34 is not arranged on the work transportation device 3. Furthermore, if the reflector 34 is not arranged on the work transportation device 3, it is possible to reduce the cost required for arranging the reflector 34.

[0247] In addition to or instead of constructing a reference coordinate system, the position measurement system MSYS (e.g., the tracker control device 5) may use the characteristic feature F of the workpiece W to perform 3D matching processing. The 3D matching processing is a process of calculating at least one of the position and orientation of the workpiece W by matching three-dimensional shape data indicating the measurement results of the three-dimensional shape of the workpiece W with model data (e.g., CAD data) indicating the designed three-dimensional shape of the workpiece W. In this case, the tracker control device 5 may match the three-dimensional shape data with the model data so that the characteristic feature F indicated by the three-dimensional shape data matches the same characteristic feature F indicated by the model data. Thereafter, the tracker control device 5 may generate robot control information usable for controlling at least one of the processing robot 1 and the measuring robot 2 based on at least one of the position and orientation of the workpiece W calculated by the 3D matching processing. For example, the tracker control device 5 may generate robot control information usable for controlling at least one of the position and orientation of the processing robot 1 based on at least one of the position and orientation of the workpiece W calculated by the 3D matching processing. For example, the tracker control device 5 may generate robot control information that can be used to control at least one of the position and posture of the measuring robot 2 based on at least one of the position and posture of the workpiece W calculated by the 3D matching process.

[0248] (4-5) Fifth Modification In the above description, the position measurement system MSYS constructs a reference coordinate system under the condition that the work transportation device 3 is stationary within the processing space SP. In other words, the position measurement system MSYS constructs a reference coordinate system based on light reception information indicating the results of receiving light reflected from the reflector 34 attached to the work transportation device 3 that is stationary within the processing space SP. However, the tracker control device 5 may construct a reference coordinate system while the work transportation device 3 is moving within the processing space SP. In other words, the position measurement system MSYS may construct a reference coordinate system based on light reception information indicating the results of receiving light reflected from the reflector 34 attached to the work transportation device 3 that is moving within the processing space SP. In this case, when the work transport device 3 moving within the processing space SP is located at a first position within the processing space SP at a first time, the tracker control device 5 may construct a reference coordinate system used as a reference in the processing system PSYS at the first time based on the result of receiving reflected light RL from the reflector 34 of the work transport device 3 located at the first position. Thereafter, when the work transport device 3 moving within the processing space SP moves from the first position within the processing space SP to a second position within the processing space SP and the work transport device 3 is located at the second position within the processing space SP at a second time, the tracker control device 5 may reconstruct a reference coordinate system used as a reference in the processing system PSYS at the second time based on the result of receiving reflected light RL from the reflector 34 of the work transport device 3 located at the second position. In other words, the tracker control device 5 may reconstruct the reference coordinate system in real time in accordance with the movement of the work transport device 3. Furthermore, the tracker control device 5 may calculate the position of the machining head 13, the attitude of the machining head 13, the position of the measurement head 23, the attitude of the measurement head 23, the position of the work transport device 3, the attitude of the work transport device 3, the position of the work W, and the attitude of the work W using a reference coordinate system that is reconstructed in real time in accordance with the movement of the work transport device 3.

[0249] 11 , the laser tracker 4 may sequentially irradiate the measurement light ML onto the plurality of reflectors 14 arranged on the processing robot 1, the plurality of reflectors 24 arranged on the measurement robot 2, and the plurality of reflectors 34 arranged on the workpiece transport device 3. In other words, the laser tracker 4 may sequentially perform a first irradiation operation of irradiating the measurement light ML onto each of the plurality of reflectors 14, a second irradiation operation of irradiating the measurement light ML onto each of the plurality of reflectors 24, and a third irradiation operation of irradiating the measurement light ML onto each of the plurality of reflectors 34.

[0250] In particular, the laser tracker 4 may repeat the first to third irradiation operations at high speed. However, depending on the constraints on the speed of rotational movement of the housing 42 provided in the laser tracker 4, the laser tracker 4 may not be able to repeat the first to third irradiation operations at the required speed. In this case, the position measurement system MSYS may include multiple laser trackers 4. For example, the position measurement system MSYS may include, as the multiple laser trackers 4, a first laser tracker 4 that performs the first irradiation operation, a second laser tracker 4 that performs the second irradiation operation, and a third laser tracker 4 that performs the third irradiation operation.

[0251] Furthermore, the position measurement system MSYS may include a plurality of first laser trackers 4. For example, the position measurement system MSYS may include, as the plurality of first laser trackers 4, a laser tracker 4 that irradiates the measurement light ML onto the first reflector 14, a laser tracker 4 that irradiates the measurement light ML onto the second reflector 14, and a laser tracker 4 that irradiates the measurement light ML onto the third reflector 14.

[0252] Furthermore, the position measurement system MSYS may include a plurality of second laser trackers 4. For example, the position measurement system MSYS may include, as the plurality of second laser trackers 4, a laser tracker 4 that irradiates the first reflector 24 with the measurement light ML, a laser tracker 4 that irradiates the second reflector 24 with the measurement light ML, and a laser tracker 4 that irradiates the third reflector 24 with the measurement light ML.

[0253] Furthermore, the position measurement system MSYS may include a plurality of third laser trackers 4. For example, the position measurement system MSYS may include, as the plurality of third laser trackers 4, a laser tracker 4 that irradiates the first reflector 34 with the measurement light ML, a laser tracker 4 that irradiates the second reflector 34 with the measurement light ML, and a laser tracker 4 that irradiates the third reflector 34 with the measurement light ML.

[0254] (4-6) Other Modifications In the above description, the robot system RSYS includes the machining robot 1. However, the robot system RSYS does not have to include the machining robot 1. If the robot system RSYS does not include the machining robot 1, the robot system RSYS and the position measurement system MSYS do not have to perform operations related to the machining robot 1. Examples of operations related to the machining robot 1 include the operation of controlling at least one of the position and orientation of the machining head 13 in step S102 of FIG. 11 and at least one of the operations of machining the workpiece W in step S103 of FIG. 11.

[0255] In the above description, the robot system RSYS includes the measuring robot 2. However, the robot system RSYS does not have to include the measuring robot 2. If the robot system RSYS does not include the measuring robot 2, the robot system RSYS and the position measurement system MSYS do not have to perform operations related to the measuring robot 2. Examples of operations related to the measuring robot 2 include at least one of the following: an operation of controlling at least one of the position and orientation of the measuring head 23 in step S104 of FIG. 11 ; an operation of measuring the three-dimensional shape of the workpiece W in step S105 of FIG. 11 ; an operation of measuring at least one of the position and orientation of the measuring head 23 in step S106 of FIG. 11 ; an operation of performing data conversion processing on the three-dimensional shape data in step S107 of FIG. 11 ; an operation of moving the measuring robot 2 in step S108 of FIG. 11 ; and an operation of combining the three-dimensional shape data in step S109 of FIG. 11 .

[0256] In the above description, the tracker control device 5 provided in the position measurement system MSYS and the robot control device 6 provided in the robot system RSYS are described as separate control devices. However, the tracker control device 5 and the robot control device 6 may be configured as an integrated control device. In other words, the position measurement system MSYS and the robot system RSYS may be integrated into a single system, and this single system may include a control device that can function as both the tracker control device 5 and the robot control device 6.

[0257] In the above description, the tracker control device 5 includes a control information generator 513 and outputs robot control information to the robot control device 6. However, this is not limiting, and the tracker control device 5 may output information regarding at least one of the position and orientation of the measurement object to the robot control device 6 instead of the robot control information. In this case, if the coordinate transformation matrix (machining robot-reference) has been calculated using the procedure described above, the robot control device 6 can convert information regarding the position and orientation of the measurement object (e.g., the machining head 13) into information in the machining robot coordinate system and generate the robot control information itself. Also, if the coordinate transformation matrix (measurement robot-reference) has been calculated using the procedure described above, the robot control device 6 can convert information regarding the position and orientation of the measurement object (e.g., the measuring head 23) into information in the measurement robot coordinate system and generate the robot control information itself. Furthermore, the information regarding at least one of the position and orientation of the measurement object output by the tracker control device 5 to the robot control device 6 may be information in the reference coordinate system, information in the machining robot coordinate system, or information in the measurement robot coordinate system. In this way, as described above, at least one of the coordinate transformation matrix (processing robot-reference) and the coordinate transformation matrix (measurement robot-reference) is calculated, so either the tracker control device 5 or the robot control device 6 can convert information regarding the position and posture of the measurement object (e.g., the measurement head 23) into control information in the robot coordinate system.

[0258] In the above description, the tracker control device 5 includes a shape data processing unit 514, which performs predetermined data processing (for example, at least one of data conversion processing and data combination processing) on ​​the three-dimensional shape data measured by the measurement head 23. However, this is not limiting, and the measurement head 23 may have its own control device and perform predetermined data processing on the three-dimensional shape data. In this case, the control device of the measurement head 23 may acquire information on the position and / or orientation of the measurement head 23 (i.e., information on the reference coordinate system) from the position measurement system MSYS, and convert the three-dimensional shape data acquired under the shape measurement coordinate system into three-dimensional shape data under the reference coordinate system.

[0259] (5) Supplementary Notes The following supplementary notes are further disclosed regarding the above-described embodiments: [Supplementary Note 1] A control device used in a robot system that performs a predetermined operation on an object, the robot system comprising a position measurement device, the position measurement device comprising an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light, the control device controlling the position measurement device to irradiate the measurement light to each of a plurality of reference reflecting members that are attached to a movable vehicle and arranged at fixed positions with respect to the object, and constructing a reference coordinate system used as a reference in the robot system based on a light receiving result of the light receiving unit receiving the reference reflected light that is the light reflected from each of the plurality of reference reflecting members. [Supplementary Note 2] The control device according to Supplementary Note 1, wherein the robot system further comprises a measurement robot, the measurement robot comprising a shape measurement device capable of performing a measurement operation to measure the three-dimensional shape of the object, and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, and the control device controls the position measurement device to irradiate the measurement light to each of a plurality of measurement reflecting members arranged on the shape measurement device, and converts the measurement result of the three-dimensional shape of the object by the shape measurement device into shape data indicating the three-dimensional shape of the object in the reference coordinate system based on the light receiving result of the measurement reflected light, which is the reflected light from each of the plurality of measurement reflecting members, by the light receiving unit.[Supplementary Note 3] The shape measurement device performs the measurement operation in a first measurement period, and also performs the measurement operation in a second measurement period different from the first measurement period, and the control device controls the position measurement device to irradiate the measurement light onto each of the plurality of measurement reflecting members in the first measurement period, and controls the position measurement device to irradiate the measurement light onto each of the plurality of measurement reflecting members in the second measurement period, and combines, in the reference coordinate system, a first measurement result of the three-dimensional shape of the object by the shape measurement device in the first measurement period and a second measurement result of the three-dimensional shape of the object by the shape measurement device in the second measurement period, based on a first light reception result by the light receiving unit of the measurement reflected light from each of the plurality of measurement reflecting members in the first measurement period and a second light reception result by the light receiving unit of the measurement reflected light from each of the plurality of measurement reflecting members in the second measurement period. [Supplementary Note 4] The control device according to Supplementary Note 3, wherein the control device converts the first measurement result into first shape data indicating the three-dimensional shape of the object in the reference coordinate system based on the first light receiving result, converts the second measurement result into second shape data indicating the three-dimensional shape of the object in the reference coordinate system based on the second light receiving result, and combines the first shape data with the second shape data to combine the first measurement result with the second measurement result in the reference coordinate system. [Supplementary Note 5] The control device according to Supplementary Note 3 or 4, wherein the first measurement period includes a period in which the shape measurement device is located at a first position, and the second measurement period includes a period in which the shape measurement device is located at a second position different from the first position. [Supplementary Note 6] The control device according to any one of Supplements 3 to 5, wherein the first measurement period includes a period in which the shape measurement device has a first posture, and the second measurement period includes a period in which the shape measurement device has a second posture different from the first posture.[Supplementary Note 7] The control device according to any one of Supplementary Notes 1 to 6, wherein the robot system further comprises a measurement robot, wherein the measurement robot comprises a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, and wherein the control device controls the position measurement device to irradiate the measurement light to each of a plurality of measurement reflecting members arranged on the shape measurement device, calculates measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a light receiving result by the light receiving unit of the measurement reflected light, which is the light reflected from each of the plurality of measurement reflecting members, and generates measurement correction information including at least one of a correction amount for a position of the shape measurement device required to change the position of the shape measurement device to a desired measurement position and a correction amount for an orientation of the shape measurement device required to change the orientation of the shape measurement device to a desired measurement orientation in the reference coordinate system based on the measurement position and orientation information. [Supplementary Note 8] The control device according to Supplementary Note 7, wherein after the measurement robot arm is controlled to move the shape measurement device based on the measurement correction information, the control device again controls the position measurement device to irradiate the measurement light onto each of the plurality of measurement reflecting members, recalculates the measurement position and orientation information based on a light receiving result of the measurement reflected light from each of the plurality of measurement reflecting members by the light receiving unit, and determines at least one of whether the position of the shape measurement device is at the desired measurement position and whether the orientation of the shape measurement device is at the desired measurement orientation in the reference coordinate system based on the recalculated measurement position and orientation information.[Supplementary Note 9] The control device according to any one of Supplementary Notes 1 to 8, wherein the robot system further comprises a measurement robot, wherein the measurement robot comprises a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, and wherein the control device controls the position measurement device to irradiate the measurement light to each of a plurality of measurement reflecting members arranged on the shape measurement device, calculates measurement position and orientation information indicating at least one of the position and orientation of the shape measurement device in the reference coordinate system based on a light receiving result by the light receiving unit of the measurement reflected light, which is the light reflected from each of the plurality of measurement reflecting members, and determines at least one of whether the position of the shape measurement device is a desired measurement position and whether the orientation of the shape measurement device is a desired measurement orientation in the reference coordinate system based on the measurement position and orientation information.[Supplementary Note 10] The control device controls the position measurement device to irradiate the measurement light onto each of the plurality of reference reflecting members during a first period when the object is located at a first object position, constructs a first reference coordinate system to be used as the reference coordinate system during the first period based on a result of reception of the reference reflected light by the light receiving unit during the first period, controls the position measurement device to irradiate the measurement light onto each of the plurality of measurement reflecting members during the first period, converts a measurement result of the three-dimensional shape of the object by the shape measurement device during the first period into the shape data indicating the three-dimensional shape of the object in the first reference coordinate system based on a result of reception of the measurement reflected light by the light receiving unit during the first period, controls the position measurement device to irradiate the measurement light onto each of the plurality of reference reflecting members during a second period when the object is located at a second object position different from the first object position, and constructs a second reference coordinate system to be used as the reference coordinate system during the second period based on a result of reception of the reference reflected light by the light receiving unit during the second period, The control device according to any one of appendixes 2 to 9, wherein the position measurement device is controlled so as to irradiate the measurement light onto each of the plurality of measurement reflecting members during the second period, and based on the light receiving result of the measurement reflected light during the second period by the light receiving unit, the measurement result of the three-dimensional shape of the object by the shape measurement device during the second period is converted into the shape data indicating the three-dimensional shape of the object in the second reference coordinate system.[Supplementary Note 11] The control device according to any one of Supplementary Notes 2 to 10, further comprising: a processing robot; the processing robot comprising: a processing device capable of performing a processing operation to process the object; and a processing robot arm including a processing movable part to which the processing device is attached; and the control device controls the position measurement device to irradiate the measurement light to each of the plurality of measurement reflection members in a third period after the processing robot processes the object located at a third object position; converts a measurement result of the three-dimensional shape of the object by the shape measurement device in the third period based on a reception result of the measurement reflected light by the light receiving unit in the third period into the shape data indicating the three-dimensional shape of the object in the reference coordinate system; and generates, based on the shape data, control information used to control at least one of a position and an attitude of the processing device so as to process the object located at a fourth object position different from the third object position. [Supplementary Note 12] The control device according to Supplementary Note 11, wherein the control device generates, as at least part of the control information, information used to control at least one of a position and an attitude of the processing device so as to process a processing target portion of the object that is in a predetermined positional relationship with a processed position of the object processed by the processing robot in the third period based on the shape data. [Supplementary Note 13] The control device according to Supplementary Note 11 or 12, wherein the control device generates, as at least part of the control information, information used to correct a command value that specifies at least one of a position and an attitude of the processing device in a fourth period in which the processing robot processes the object located at the fourth object position.[Supplementary Note 14] The control device according to any one of Supplementary Notes 1 to 13, wherein the robot system further comprises a processing robot, the processing robot comprising a processing device capable of performing a processing operation to process the object, and a processing robot arm including a processing movable part to which the processing device is attached, and the control device controls the position measurement device to irradiate the measurement light to each of a plurality of processed reflection members arranged on the processing device, calculates processing position and posture information indicating at least one of a position and posture of the processing device in the reference coordinate system based on a light receiving result by the light receiving unit of the processed reflected light, which is the light reflected from each of the plurality of processed reflection members, and generates processing correction information including at least one of a correction amount for a position of the processing device required to change the position of the processing device to a desired processing position and a correction amount for a posture of the processing device required to change the posture of the processing device to a desired processing posture in the reference coordinate system based on the processing position and posture information. [Supplementary Note 15] The control device according to Supplementary Note 14, wherein after the processing robot arm is controlled to move the processing device based on the processing correction information, the control device again controls the position measurement device to irradiate the measurement light onto each of the plurality of processed reflection members, recalculates the processing position and posture information based on the light receiving result of the processed reflection light from each of the plurality of processed reflection members by the light receiving unit, and determines at least one of whether or not the position of the processing device is at the desired processing position and whether or not the posture of the processing device is at the desired processing posture in the reference coordinate system based on the recalculated processing position and posture information.[Supplementary Note 16] The control device according to any one of Supplementary Notes 1 to 15, wherein the robot system further comprises a processing robot, the processing robot comprising a processing device capable of performing a processing operation to process the object, and a processing robot arm including a processing movable part to which the processing device is attached, and the control device controls the position measurement device to irradiate the measurement light to each of a plurality of processed reflection members arranged on the processing device, calculates processing position and posture information indicating at least one of the position and posture of the processing device in the reference coordinate system based on a light receiving result by the light receiving unit of the processed reflection light, which is the reflected light from each of the plurality of processed reflection members, and determines at least one of whether the position of the processing device is a desired processing position and whether the posture of the processing device is a desired processing posture in the reference coordinate system based on the processing position and posture information. [Supplementary Note 17] The control device according to any one of Supplementary Notes 1 to 17, wherein at least one reference reflecting member among the plurality of reference reflecting members is disposed on the object, and the control device generates relative position information regarding a relative positional relationship between the reference coordinate system and the object based on a result of reception of the reference reflected light by the light receiving unit. [Supplementary Note 18] The control device according to Supplementary Note 17, wherein the robot system further includes a processing robot, and the processing robot includes a processing device capable of performing a processing operation to process the object, and a processing robot arm including a processing movable part to which the processing device is attached, and the control device generates control information used to control at least one of a position and an attitude of the processing device to process the object based on the relative position information. [Supplementary Note 19] The control device according to Supplementary Note 17 or 18, wherein the robot system further comprises a measuring robot, the measuring robot comprising a shape measuring device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measuring robot arm including a measuring movable part to which the shape measuring device is attached, and the control device generates control information used to control at least one of a position and an attitude of the shape measuring device so as to measure the object, based on the relative position information.[Supplementary Note 20] The control device according to any one of Supplements 1 to 19, wherein the object is placed on a movable mounting device, and the moving body includes the mounting device. [Supplementary Note 21] The control device according to any one of Supplements 1 to 20, wherein the object is held by a holding member placed on a movable mounting device, and the moving body includes the attachment member. [Supplementary Note 22] The control device according to any one of Supplements 1 to 21, wherein the object is placed on a movable mounting device, and the moving body includes the object. [Supplementary Note 23] A control device used in a robot system that performs a predetermined operation on an object, the robot system comprising: a position measurement device; and a measurement robot; the position measurement device comprising an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; the measurement robot comprising: a shape measurement device that can perform a measurement operation to measure a three-dimensional shape of the object; and a measurement robot arm including a measurement movable unit to which the shape measurement device is attached; the shape measurement device performs the measurement operation in a first measurement period, and also performs the measurement operation in a second measurement period different from the first measurement period; the control device constructs a reference coordinate system used as a reference in the robot system; controls the position measurement device to irradiate the measurement light onto each of a plurality of reflecting members arranged on the shape measurement device in the first measurement period; and controls the position measurement device to irradiate the measurement light onto each of the plurality of reflecting members in the second measurement period; a control device that combines, in the reference coordinate system, a first measurement result of the three-dimensional shape of the object by the shape measurement device during the first measurement period and a second measurement result of the three-dimensional shape of the object by the shape measurement device during the second measurement period, based on a first light reception result by the light receiving unit of the reflected light from each of the plurality of reflecting members during the first measurement period and a second light reception result by the light receiving unit of the reflected light from each of the plurality of reflecting members during the second measurement period.[Supplementary Note 24] A control device used in a robot system that performs a predetermined operation on an object, the robot system comprising: a position measurement device; and a measurement robot; the position measurement device comprising an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; the measurement robot comprising: a shape measurement device that can perform a measurement operation to measure a three-dimensional shape of the object; and a measurement robot arm including a measurement movable unit to which the shape measurement device is attached; the control device constructs a first reference coordinate system that is used as a reference in the robot system during a first period in which the object is located at a first object position; controls the position measurement device to irradiate the measurement light onto each of a plurality of reflecting members arranged on the shape measurement device during the first period; and converts a measurement result of the three-dimensional shape of the object by the shape measurement device during the first period into the shape data that indicates the three-dimensional shape of the object in the first reference coordinate system, based on a result of reception of the reflected light by the light receiving unit during the first period; constructing a second reference coordinate system to be used as a reference in the robot system during a second period in which the object is located at a second object position different from the first object position; controlling the position measurement device to irradiate the measurement light onto each of the plurality of reflecting members during the second period; and converting the measurement results of the three-dimensional shape of the object by the shape measurement device during the second period into the shape data that indicates the three-dimensional shape of the object in the second reference coordinate system, based on the light receiving result of the reflected light by the light receiving unit during the second period.[Supplementary Note 25] A control device used in a robot system that performs a predetermined operation on an object, the robot system comprising: a position measurement device, a measurement robot, and a processing robot; the position measurement device comprising an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; the measurement robot comprising: a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measurement robot arm including a measurement movable unit to which the shape measurement device is attached; the processing robot comprising: a processing device capable of performing a processing operation to process the object, and a processing robot arm including a processing movable unit to which the processing device is attached; the control device constructs a reference coordinate system used as a reference in the robot system; and controls the position measurement device to irradiate the measurement light to each of a plurality of reflecting members arranged on the shape measurement device during a first period after the processing robot processes the object located at a first object position; a control device that converts the measurement result of the three-dimensional shape of the object by the shape measurement device during the first period into the shape data that indicates the three-dimensional shape of the object in the reference coordinate system based on the result of receiving the reflected light by the light receiving unit during the first period, and generates control information based on the shape data that is used to control at least one of the position and attitude of the processing device so as to process the object located at a second object position different from the first object position.[Supplementary Note 26] A control device used in a robot system that performs a predetermined operation on an object, the robot system comprising: a position measurement device; and a processing robot; the position measurement device comprising: an irradiation unit that irradiates measurement light; and a light receiving unit that receives reflected light of the measurement light; the processing robot comprising: a processing device that can perform a processing operation to process the object; and a processing robot arm including a processing movable unit to which the processing device is attached; the control device: constructs a reference coordinate system used as a reference in the robot system; controls the position measurement device to irradiate the measurement light to each of a plurality of processed reflection members arranged on the processing device; calculates processing position and posture information that indicates at least one of a position and posture of the processing device in the reference coordinate system based on a light receiving result of the processed reflected light, which is the light reflected from each of the plurality of processed reflection members, by the light receiving unit; and generates processing correction information based on the processing position and posture information, the processing correction information including at least one of a position correction amount of the processing device that is necessary to change the position of the processing device to a desired processing position and a posture correction amount of the processing device that is necessary to change the posture of the processing device to a desired processing posture in the reference coordinate system. [Supplementary Note 27] The control device controls the position measurement device to irradiate the measurement light to each of a plurality of reference reflecting members arranged at fixed positions relative to the object, and generates relative position information regarding the relative positional relationship between the reference coordinate system and the object based on the light receiving result of the reference reflected light, which is the reflected light from each of the plurality of reference reflecting members, by the light receiving unit, and at least one reference reflecting member of the plurality of reference reflecting members is arranged on the object. The control device described in Supplementary Note 26.[Supplementary Note 28] The control device according to Supplementary Note 26 or 27, wherein after the processing robot arm is controlled to move the processing device based on the processing correction information, the control device again controls the position measurement device to irradiate the measurement light onto each of the plurality of processed reflection members, recalculates the processing position and posture information based on the light receiving result of the processed reflection light from each of the plurality of processed reflection members by the light receiving unit, and determines at least one of whether or not the position of the processing device is at the desired processing position and whether or not the posture of the processing device is at the desired processing posture in the reference coordinate system based on the recalculated processing position and posture information. [Supplementary Note 29] The control device according to any one of Supplementary Notes 26 to 28, wherein the robot system further comprises a measurement robot, wherein the measurement robot comprises a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, and wherein the control device controls the position measurement device to irradiate the measurement light to each of a plurality of measurement reflecting members arranged on the shape measurement device, calculates measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a light receiving result by the light receiving unit of the measurement reflected light that is the light reflected from each of the plurality of measurement reflecting members, and generates measurement correction information including at least one of a correction amount for a position of the shape measurement device required to change the position of the shape measurement device to a desired measurement position and a correction amount for an orientation of the shape measurement device required to change the orientation of the shape measurement device to a desired measurement orientation in the reference coordinate system based on the measurement position and orientation information.[Supplementary Note 30] The control device according to Supplementary Note 29, wherein after the measurement robot arm is controlled to move the shape measurement device based on the measurement correction information, the control device again controls the position measurement device to irradiate the measurement light onto each of the plurality of measurement reflecting members, recalculates the measurement position and orientation information based on a reception result of the measurement reflected light from each of the plurality of measurement reflecting members by the light receiving unit, and determines at least one of whether or not a position of the shape measurement device is at the desired measurement position and whether or not an orientation of the shape measurement device is at the desired measurement orientation in the reference coordinate system based on the recalculated measurement position and orientation information. [Supplementary Note 31] A robot system that performs a predetermined operation on an object, the robot system comprising: the position measurement device; and the control device according to any one of Supplementary Notes 1 to 30. [Supplementary Note 32] The robot system according to Supplementary Note 31, further comprising a measuring robot, wherein the measuring robot comprises a shape measuring device capable of performing a measurement operation to measure a three-dimensional shape of the object, and a measuring robot arm including a measurement movable part to which the shape measuring device is attached. [Supplementary Note 33] The robot system according to Supplementary Note 31 or 32, further comprising a processing robot, wherein the processing robot comprises a processing device capable of performing a processing operation to process the object, and a processing robot arm including a processing movable part to which the processing device is attached.[Supplementary Note 34] A position measurement system used with a robot system equipped with a robot that positions, in three-dimensional space, a processing device that performs a predetermined processing on an object placed on a mobile body, comprising: a position measurement device having an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; and a control device, wherein the control device controls the irradiation unit to irradiate the measurement light to each of a plurality of reflecting members attached to the processing device and to each of a plurality of reflecting members provided in a processing space where the processing device performs the predetermined processing on the object, constructs a reference coordinate system based on the reflected light received by the light receiving unit from each of the plurality of reflecting members provided in the processing space, and generates position and orientation information that indicates a position and orientation of the processing device in the reference coordinate system based on the reflected light received by the light receiving unit from each of the plurality of reflecting members provided in the processing device. [Supplementary Note 35] The position measurement system according to Supplementary Note 34, wherein the plurality of reflecting members arranged in the processing space are provided on the mobile body. [Supplementary Note 36] The position measurement system according to Supplementary Note 34 or 35, wherein the plurality of reflecting members arranged in the processing space are arranged on a support member fixed within the processing space. [Supplementary Note 37] The position measurement system according to any one of Supplementary Notes 34 to 36, wherein the plurality of reflecting members arranged in the processing space are arranged on the object.[Supplementary Note 38] A position measurement system used together with a robot system equipped with a robot that positions a processing device that performs a predetermined process on an object in a three-dimensional space, comprising: a position measurement device having an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; and a control device, wherein the control device controls the irradiation unit to irradiate the measurement light to each of a plurality of first reflecting members attached to a movable body that can move and carries the object, and to each of a plurality of second reflecting members attached to the processing device; constructs a reference coordinate system based on the reflected light from each of the plurality of first reflecting members received by the light receiving unit; and generates position and orientation information that indicates a position and orientation of the processing device in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members received by the light receiving unit. [Supplementary Note 39] The position measurement system described in Supplementary Note 38, wherein the processing device is a shape measurement device that performs a measurement operation to measure the three-dimensional shape of the object, and the control device generates position and orientation information of the shape measurement device in the reference coordinate system during the measurement operation based on the reflected light from each of the multiple second reflecting members arranged on the shape measurement device, and the three-dimensional shape information of the object in the reference coordinate system is generated based on the position and orientation information of the shape measurement device during the measurement operation and a three-dimensional shape measurement result of the object measured by the shape measurement device. [Supplementary Note 40] The position measurement system described in Supplementary Note 39, wherein the shape measurement device performs a first measurement operation to obtain a first three-dimensional shape measurement result when the object and the shape measurement device are in a first positional relationship, and performs a second measurement operation in a second positional relationship different from the first positional relationship to obtain a second three-dimensional shape measurement result, and the control device generates first position and orientation information in the reference coordinate system of the shape measurement device during the first measurement operation, and generates second position and orientation information in the reference coordinate system of the shape measurement device during the second measurement operation, and the three-dimensional shape information of the object in the reference coordinate system is obtained based on the first position and orientation information and the first three-dimensional shape measurement result, and the second position and orientation information and the second three-dimensional shape measurement result.[Supplementary Note 41] The position measurement system described in Supplementary Note 40, wherein the first three-dimensional shape measurement result is converted into first three-dimensional shape information indicating the three-dimensional shape of the object in the reference coordinate system based on the first position and orientation information, the second three-dimensional shape measurement result is converted into second three-dimensional shape information indicating the three-dimensional shape of the object in the reference coordinate system based on the second position and orientation information, and the first three-dimensional shape information and the second three-dimensional shape information are combined to generate three-dimensional shape information of the object in the reference coordinate system. [Supplementary Note 42] The control device converts the first three-dimensional shape measurement result into first three-dimensional shape information indicating the three-dimensional shape of the object in the reference coordinate system based on the first position and orientation information, converts the second three-dimensional shape measurement result into second three-dimensional shape information indicating the three-dimensional shape of the object in the reference coordinate system based on the second position and orientation information, and combines the first three-dimensional shape information and the second three-dimensional shape information to generate three-dimensional shape information of the object in the reference coordinate system. [Supplementary Note 43] The position measurement system according to any one of Supplementary Notes 38 to 42, wherein the processing device is a processing device that processes the object, and the control device generates position and orientation information of the processing device in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members arranged on the processing device. [Supplementary Note 44] The position measurement system described in Supplementary Note 43, wherein the control device generates first preparation position and orientation information of the processing device positioned at a first preparation position by the robot, generates second preparation position and orientation information of the processing device moved to and positioned at a second preparation position by the robot, and generates calibration information for calibrating position control of the processing device by the robot based on drive information of the robot that drove the processing device from the first preparation position to the second preparation position, the first preparation position, the second preparation position, the first preparation position and orientation information, and the second preparation position and orientation information.[Supplementary Note 45] The robots included in the robot system include a first robot to which a processing device that processes the object is attached as the processing device, and a second robot to which a shape measuring device that measures and processes the object is attached as the processing device, wherein the control device generates position and orientation information of the shape measuring device during a measurement operation in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members attached to the shape measuring device, and generates position and orientation information of the processing device in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members attached to the processing device, and the processing of the object is performed by the first robot moving the processing device based on the three-dimensional shape information of the object in the reference coordinate system and the position and orientation information of the processing device in the reference coordinate system, which are generated based on the position and orientation information of the shape measuring device during the measurement operation and a three-dimensional shape measurement result of the object measured by the shape measuring device. [Supplementary Note 46] The position measurement system described in Supplementary Note 45, wherein the mobile body carries the object and moves between a measurement processing space in which the second robot performs the measurement processing using the shape measurement device and a processing processing space in which the first robot performs processing using the processing device, and the control device constructs the reference coordinate system in the measurement processing space and generates position and orientation information of the shape measurement device in the reference coordinate system during measurement operation, reconstructs the reference coordinate system in the processing processing space and generates position and orientation information of the processing device in the reconstructed reference coordinate system, and the processing of the object performed in the processing processing space by the first robot is performed by the first robot moving the processing device based on the three-dimensional shape information of the object in the reconstructed reference coordinate system and the position and orientation information of the processing device in the reconstructed reference coordinate system.[Supplementary Note 47] The position measurement system according to Supplementary Note 46, wherein the position measurement device includes: a first position measurement device that, in the measurement processing space, irradiates the measurement light onto the plurality of first reflecting members attached to the movable body and the plurality of second reflecting members attached to the shape measurement device and receives the reflected light; and a second position measurement device, different from the first position measurement device, that, in the processing processing space, irradiates the measurement light onto the plurality of first reflecting members attached to the movable body and the plurality of second reflecting members attached to the processing device and receives the reflected light. [Supplementary Note 48] The position measurement system according to any one of Supplementary Notes 45 to 47, wherein the robot system includes a first robot system and a second robot system, wherein the movable body carries the object and moves between a first processing space in which the first robot system performs the measurement processing and the processing processing of the object, and a second processing space in which the second robot system performs the measurement processing and the processing processing of the object, and the control device controls the position measurement device to, in the first processing space, irradiate the measurement light onto the plurality of first reflecting members attached to the movable body and receive the reflected light to construct the reference coordinate system, and to, in the second processing space, irradiate the measurement light onto the plurality of first reflecting members attached to the movable body and receive the reflected light to reconstruct the reference coordinate system, and at least one of the measurement processing and the processing processing of the object is performed under the reference coordinate system that is common to the first processing space and the second processing space. [Supplementary Note 49] The position measurement system according to Supplementary Note 48, comprising: a first position measurement device that, in the first processing space, irradiates the measurement light onto the plurality of first reflecting members attached to the movable body and the plurality of second reflecting members attached to the shape measuring device and the processing device used in the first robot system, and receives the reflected light; and a second position measurement device, different from the first position measurement device, that, in the second processing space, irradiates the measurement light onto the plurality of first reflecting members attached to the movable body and the plurality of second reflecting members attached to the shape measuring device and the processing device used in the second robot system, and receives the reflected light.[Supplementary Note 50] The position measurement system according to any one of Supplements 38 to 49, wherein the control device outputs position information to the robot system for driving the robot and positioning the processing device based on the reference coordinate system and the position and orientation information of the processing device in the reference coordinate system. [Supplementary Note 51] The position measurement system according to Supplementary Note 50, wherein the control device converts the position and orientation information of the processing device in the reference coordinate system into position and orientation information of the processing device in a robot coordinate system specific to the robot, and outputs the position information to the robot system for driving the robot and positioning the processing device. [Supplementary Note 52] The position measurement system according to any one of Supplements 38 to 49, wherein the control device constructs a processing device coordinate system based on the processing device based on the position and orientation information of the processing device in the reference coordinate system, and outputs position information to the robot system for driving the robot and positioning the processing device based on position and orientation information of the object in the processing device coordinate system. [Supplementary Note 53] The position measurement system according to any one of Supplements 38 to 52, wherein a third reflecting member is attached to the object, wherein the control device controls the irradiating unit to irradiate the measurement light onto the third reflecting member, and wherein position information of the object in the reference coordinate system is generated based on the reflected light from the plurality of third reflecting members received by the light receiving unit. [Supplementary Note 54] The position measurement system according to any one of Supplements 38 to 53, wherein the reference coordinate system is constructed on the moving body and moves in accordance with movement of the moving body. [Supplementary Note 55] The position measurement system according to any one of Supplements 38 to 54, wherein the reference coordinate system is a position measurement device coordinate system specific to the position measurement device. [Supplementary Note 56] The position measurement system according to any one of Supplementary Notes 38 to 55, wherein a fourth reflecting member is placed in a processing space in which the robot system performs the predetermined processing on the object, the control device controls the irradiation unit to irradiate the measurement light onto the fourth reflecting member, and the reference coordinate system is constructed based on the reflected light from the fourth reflecting member that is received by the light receiving unit.[Appendix 57] The position measurement system described in any one of Appendices 38 to 56, wherein a fourth reflecting member is placed in a processing space where the robot system performs the predetermined processing on the object, the control device controls the irradiation unit to irradiate the measurement light onto the fourth reflecting member, and generates position information of the moving body in the processing space based on the reflected light from the fourth reflecting member received by the light receiving unit and the reflected light from the first reflecting member received by the light receiving unit. [Supplementary Note 58] A position measurement system used in a robot system equipped with a robot that positions a processing device that performs a predetermined processing on an object in a three-dimensional space, comprising: a position measurement device having an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light; and a control device, wherein the control device controls the irradiation unit to irradiate the measurement light to each of a plurality of first reflecting members attached to a movable body that can move on which the object is placed, each of a plurality of second reflecting members attached to the processing device, and each of a plurality of fourth reflecting members provided in a processing space where the processing device performs the predetermined processing on the object; constructs a reference coordinate system based on the reflected light from each of the plurality of fourth reflecting members received by the light receiving unit; generates position and orientation information that indicates a position and orientation of the movable body in the reference coordinate system based on the reflected light from each of the plurality of first reflecting members received by the light receiving unit; and generates position and orientation information that indicates a position and orientation of the processing device in the reference coordinate system based on the reflected light from each of the plurality of second reflecting members received by the light receiving unit. [Supplementary Note 59] The position measurement system according to Supplementary Note 58, wherein the processing device is a shape measurement device that performs a measurement operation to measure a three-dimensional shape of the object, and the control device generates position and orientation information of the shape measurement device in the reference coordinate system during the measurement operation based on the reflected light from each of the plurality of second reflecting members arranged on the shape measurement device, and the three-dimensional shape information of the object in the reference coordinate system is generated based on the position and orientation information of the shape measurement device during the measurement operation and a measurement result of the three-dimensional shape of the object measured by the shape measurement device.[Supplementary Note 60] The position measurement system described in Supplementary Note 59, wherein the shape measurement device performs a first measurement operation to obtain a first three-dimensional shape measur...

Claims

1. A control device used in a robot system that performs a predetermined action on an object, the robot system includes a position measurement device and a measurement robot; the position measurement device includes an irradiation unit that irradiates measurement light and a light receiving unit that receives reflected light of the measurement light, the measuring robot includes a shape measuring device capable of performing a measuring operation to measure the three-dimensional shape of the object, and a measuring robot arm including a measuring movable part to which the shape measuring device is attached, the shape measuring device performs the measurement operation in a first measurement period, and also performs the measurement operation in a second measurement period different from the first measurement period; The control device controlling the position measurement device so that the measurement light is irradiated onto a reflecting member disposed in the shape measurement device during the first measurement period; controlling the position measurement device so as to irradiate the measurement light onto the reflecting member during the second measurement period; Based on a first light receiving result of the light reflected from the reflecting member by the light receiving unit during the first measurement period and a second light receiving result of the light reflected from the reflecting member by the light receiving unit during the second measurement period, a first measurement result of the three-dimensional shape of the object by the shape measuring device during the first measurement period and a second measurement result of the three-dimensional shape of the object by the shape measuring device during the second measurement period are combined in the same coordinate system. Control device.

2. the control device constructs a reference coordinate system used as a reference in the robot system; The same coordinate system is the reference coordinate system The control device according to claim 1 .

3. The control device controlling the position measurement device so as to irradiate the measurement light onto each of a plurality of reflecting members; The reference coordinate system is constructed based on the light receiving results of the reflected light from each of the plurality of reflecting members by the light receiving unit. The control device according to claim 2 .

4. The control device constructing a first reference coordinate system to be used as a reference in the robot system during the first measurement period; converting a measurement result of the three-dimensional shape of the object by the shape measurement device during the first measurement period into the shape data indicating the three-dimensional shape of the object in the first reference coordinate system based on a light receiving result of the reflected light by the light receiving unit during the first measurement period; constructing a second reference coordinate system to be used as a reference in the robot system during the second measurement period; Based on the result of receiving the reflected light by the light receiving unit during the second measurement period, the measurement result of the three-dimensional shape of the object by the shape measuring device during the second measurement period is converted into the shape data indicating the three-dimensional shape of the object in the second reference coordinate system. The control device according to claim 2 .

5. The control device converting the first measurement result into first shape data indicating a three-dimensional shape of the object in a reference coordinate system based on the first light receiving result; converting the second measurement result into second shape data indicating a three-dimensional shape of the object in the reference coordinate system based on the second light receiving result; The first shape data and the second shape data are combined to combine the first measurement result and the second measurement result in the reference coordinate system. The control device according to claim 1 .

6. the first measurement period includes a period during which the shape measurement device is located at a first position, The second measurement period includes a period during which the shape measurement device is located at a second position different from the first position. The control device according to claim 5 .

7. the first measurement period includes a period during which the orientation of the shape measurement device is a first orientation, The second measurement period includes a period during which the orientation of the shape measurement device is a second orientation different from the first orientation. The control device according to claim 6.

8. The control device controlling the position measurement device so that the measurement light is irradiated onto each of the plurality of reflecting members arranged in the shape measurement device during the first measurement period; controlling the position measurement device so that the measurement light is irradiated onto each of the plurality of reflecting members during the second measurement period; a first measurement result of the three-dimensional shape of the object by the shape measuring device during the first measurement period and a second measurement result of the three-dimensional shape of the object by the shape measuring device during the second measurement period based on a first light receiving result of the reflected light by the light receiving unit from each of the plurality of reflecting members during the first measurement period and a second light receiving result of the reflected light by the light receiving unit from each of the plurality of reflecting members during the second measurement period, the first measurement result of the three-dimensional shape of the object by the shape measuring device during the first measurement period and the second measurement result of the three-dimensional shape of the object by the shape measuring device during the second measurement period are combined in a reference coordinate system; The control device according to claim 1 .

9. The control device calculating measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a result of reception of the reflected light from each of the plurality of reflecting members by the light receiving unit; Based on the measurement position and orientation information, measurement correction information is generated, the measurement correction information including at least one of a correction amount for the position of the shape measuring device required to change the position of the shape measuring device to a desired measurement position and a correction amount for the orientation of the shape measuring device required to change the orientation of the shape measuring device to a desired measurement orientation in the reference coordinate system. The control device according to claim 8.

10. The control device after the measurement robot arm is controlled to move the shape measurement device based on the measurement correction information, the position measurement device is again controlled to irradiate the measurement light onto each of the plurality of reflecting members; recalculating the measured position and orientation information based on a result of reception of the reflected light from each of the plurality of reflecting members by the light receiving unit; Based on the recalculated measurement position and orientation information, it is determined whether or not the position of the shape measurement device is at the desired measurement position and whether or not the orientation of the shape measurement device is at the desired measurement orientation in the reference coordinate system. The control device according to claim 9.

11. The control device calculating measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a result of reception of the reflected light from each of the plurality of reflecting members by the light receiving unit; Based on the measurement position and orientation information, it is determined whether or not the position of the shape measurement device is a desired measurement position and whether or not the orientation of the shape measurement device is a desired measurement orientation in the reference coordinate system. The control device according to claim 8.

12. A robot system that performs a predetermined action on an object, The robot system includes: the position measurement device; The control device according to any one of claims 1 to 11. A robot system comprising:

13. A position measurement device for measuring a shape measurement device of a measurement robot, the position measurement device being provided with a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of an object, and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, the position measurement device comprising: The shape measuring device is controlled by the control device according to any one of claims 1 to 11 to measure a reflecting member arranged on the shape measuring device. Position measurement device.

14. A control method for controlling a measuring robot equipped with a shape measurement device capable of performing a measurement operation for measuring a three-dimensional shape of an object, comprising: performing a measurement operation by the shape measurement device during a first measurement period; performing a measurement operation by the shape measurement device during a second measurement period different from the first measurement period; controlling a position measurement device so that a reflection member disposed in the shape measurement device is irradiated with measurement light during the first measurement period; controlling the position measurement device so that the measurement light is irradiated onto the reflecting member during the second measurement period; combining, in a reference coordinate system, a first measurement result of the three-dimensional shape of the object measured by the shape measuring device during the first measurement period and a second measurement result of the three-dimensional shape of the object measured by the shape measuring device during the second measurement period, based on a first light reception result that is a light reception result of the reflected light from the reflecting member during the first measurement period and a second light reception result that is a light reception result of the reflected light from the reflecting member during the second measurement period; Contains Control method.

15. and constructing the reference coordinate system used as a reference by the measurement robot. The control method according to claim 14.

16. Constructing the reference coordinate system includes: controlling the position measurement device so as to irradiate the measurement light onto each of a plurality of reflecting members; constructing the reference coordinate system based on a result of reception of the reflected light from each of the plurality of reflecting members by the light receiving unit; 16. The control method of claim 15, comprising:

17. constructing a first reference coordinate system used as a reference by the measuring robot during the first measurement period; converting a measurement result of the three-dimensional shape of the object by the shape measurement device during the first measurement period into the shape data indicating the three-dimensional shape of the object in the first reference coordinate system based on a light receiving result of the reflected light by the light receiving unit during the first measurement period; constructing a second reference coordinate system used as a reference by the measuring robot during the second measurement period; converting a measurement result of the three-dimensional shape of the object by the shape measurement device during the second measurement period into the shape data indicating the three-dimensional shape of the object in the second reference coordinate system based on a light receiving result of the reflected light by the light receiving unit during the second measurement period; The control method of claim 15 further comprising:

18. The binding step comprises: converting the first measurement result into first shape data indicating a three-dimensional shape of the object in the reference coordinate system based on the first light receiving result; converting the second measurement result into second shape data indicating a three-dimensional shape of the object in the reference coordinate system based on the second light receiving result; combining the first shape data and the second shape data to combine the first measurement result and the second measurement result in the reference coordinate system; The control method of claim 14, comprising:

19. the first measurement period includes a period during which the shape measurement device is located at a first position, The second measurement period includes a period during which the shape measurement device is located at a second position different from the first position.

20. The control method of claim 18.

20. the first measurement period includes a period during which the orientation of the shape measurement device is a first orientation, The second measurement period includes a period during which the orientation of the shape measurement device is a second orientation different from the first orientation.

20. The control method of claim 18.

21. controlling the position measurement device in the first measurement period includes controlling the position measurement device so that the measurement light is irradiated onto each of the plurality of reflective members arranged on the shape measurement device in the first measurement period; controlling the position measurement device in the second measurement period includes controlling the position measurement device to irradiate the measurement light onto each of the plurality of reflecting members in the second measurement period; The combining includes combining, in the reference coordinate system, a first measurement result of the three-dimensional shape of the object by the shape measurement device during the first measurement period and a second measurement result of the three-dimensional shape of the object by the shape measurement device during the second measurement period, based on a first light-reception result by the light-receiving unit of the reflected light from each of the plurality of reflecting members during the first measurement period and a second light-reception result by the light-receiving unit of the reflected light from each of the plurality of reflecting members during the second measurement period. The control method according to claim 14.

22. calculating measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a light receiving result of the light receiving unit receiving the reflected light, which is the light reflected from each of the plurality of reflecting members; generating measurement correction information including at least one of a correction amount for the position of the shape measuring device required to change the position of the shape measuring device to a desired measurement position and a correction amount for the attitude of the shape measuring device required to change the attitude of the shape measuring device to a desired measurement attitude in the reference coordinate system based on the measurement position and attitude information; The control method of claim 21 further comprising:

23. after the measurement robot arm is controlled to move the shape measurement device based on the measurement correction information, the position measurement device is again controlled to irradiate the measurement light onto each of the plurality of reflecting members; recalculating the measured position and orientation information based on a result of reception of the reflected light from each of the plurality of reflecting members by the light receiving unit; determining, based on the recalculated measurement position and orientation information, at least one of whether or not the position of the shape measurement device is at the desired measurement position and whether or not the orientation of the shape measurement device is at the desired measurement orientation in the reference coordinate system; The control method of claim 22 further comprising:

24. calculating measurement position and orientation information indicating at least one of a position and an orientation of the shape measurement device in the reference coordinate system based on a light receiving result of the light receiving unit receiving the reflected light, which is the light reflected from each of the plurality of reflecting members; determining, based on the measurement position and orientation information, at least one of whether the position of the shape measurement device is at a desired measurement position and whether the orientation of the shape measurement device is at a desired measurement orientation in the reference coordinate system; The control method of claim 21 further comprising:

25. A measurement method for measuring a three-dimensional shape of an object using a measurement robot, comprising: The control method according to any one of claims 14 to 24 is used to cause the measuring robot to measure the three-dimensional shape of the object. Measurement method.

26. A position measurement method for measuring a shape measurement device of a measurement robot including a shape measurement device capable of performing a measurement operation to measure a three-dimensional shape of an object and a measurement robot arm including a measurement movable part to which the shape measurement device is attached, comprising: A control method according to any one of claims 14 to 24 is used to measure a reflecting member disposed in the shape measurement device. Position measurement method.