Clean room facility

Abstract

Provided is a clean room facility that appropriately air-conditions clean rooms. A clean room facility (100) comprises: a front room (R2) and a work room (R3) that are clean rooms that are provided inside a large room (R1); an air-handling unit (30) that adjusts the temperature of air supplied to the large room (R1); a chamber (C1) that is provided as a single common space behind the ceilings of the front room (R2) and the work room (R3) and receives air from the large room (R1); air supply fans (1a, 2a, 3a, 4a); and duct shafts (DS1, DS2). The duct shafts (DS1, DS2) include some that do not communicate with the chamber (C1). The duct shafts (DS1, DS2) that do not communicate with the chamber (C1) receive air from the front room (R2) or the work room (R3), and the air is discharged via the duct shafts (DS1, DS2).

Description

Clean Room Facility

[0001] The present invention relates to clean room facilities.

[0002] Clean rooms with high levels of air purity are used in regenerative medicine, pharmaceutical manufacturing, etc. Regarding such clean rooms, for example, Patent Document 1 describes that "the first fan and the second fan can be switched between being controlled based on the detection value of the pressure sensor and being controlled at a constant speed."

[0003] International Publication No. 2022 / 254705

[0004] The technology described in Patent Document 1 makes it possible to switch a given clean room between a positive pressure room and a negative pressure room, but there is room for improvement in terms of air conditioning of the clean room.

[0005] Therefore, an object of the present invention is to provide a clean room facility that properly conditions the air in the clean room.

[0006] In order to solve the above-mentioned problems, the clean room facility of the present invention comprises a plurality of clean rooms set up inside a specified room, a first air handling unit that adjusts the temperature of air supplied to the specified room, a chamber that is set up as a single common space above the ceiling of the plurality of clean rooms and into which air is guided from the specified room, an air supply fan that is set up in each of the plurality of clean rooms and supplies air from the chamber to the clean room, and a duct shaft that is set up on the outside of a side wall of at least one of the clean rooms, the duct shafts including one that is not connected to the chamber, and air is guided from the clean room into the duct shaft that is not connected to the chamber and exhausted via the duct shaft.

[0007] According to the present invention, it is possible to provide a clean room facility that appropriately conditions the air in the clean room.

[0008] FIG. 1 is an explanatory diagram showing the layout of each room in a clean room facility according to the first embodiment. FIG. 2 is a schematic cross-sectional view of a clean room facility according to the first embodiment. FIG. 3 is an explanatory diagram showing an example of processing during sterilization of a work room and an anteroom in a clean room facility according to the first embodiment. FIG. 4 is an explanatory diagram showing another example of processing during sterilization of a work room and an anteroom in a clean room facility according to the first embodiment. FIG. 5 is a schematic cross-sectional view of a clean room facility according to a first modified example of the first embodiment. FIG. 6 is a schematic cross-sectional view of a clean room facility according to a second modified example of the first embodiment. FIG. 7 is a schematic cross-sectional view of a clean room facility according to a second embodiment. FIG. 8 is a schematic cross-sectional view of a clean room facility according to a comparative example.

[0009] First Embodiment Configuration of Clean Room Facility FIG. 1 is an explanatory diagram showing the layout of each room in a clean room facility 100 according to a first embodiment. In FIG. 1, arrows indicate the direction of air flow. The clean room facility 100 is a facility that adjusts the temperature, pressure, cleanliness, etc., of multiple clean rooms, such as antechambers R2 and R4 and workrooms R3 and R5. Such clean room facility 100 is used, for example, for cell culture processing and the production of sterile preparations (vaccines, injections, eye drops, etc.). In the example of FIG. 1, the clean room facility 100 includes a large room R1 (a designated room), as well as antechambers R2 and R4 (clean rooms) and workrooms R3 and R5 (clean rooms).

[0010] The large room R1 is a relatively large room where predetermined pre-processing, analysis, etc. are performed. Although not shown, the large room R1 may also be provided with control panels, monitoring devices, and utility devices for the equipment used in the work rooms R3 and R5. In the following, a case will be described in which the large room R1 is a clean room, but the large room R1 may also be a normal room. A normal room is, for example, a room where cleanliness is not controlled as compared to a clean room.

[0011] As shown in Fig. 1, doors 21 to 23 are provided at predetermined locations (three locations in the example of Fig. 1) in large room R1, which are opened and closed when people enter and exit and when equipment is brought in and out. In addition, air outlets H1 and H2 (first air outlets) are provided in the ceiling of large room R1, from which air whose temperature has been adjusted by air handling unit 30 (first air handling unit: see Fig. 2) is blown out.

[0012] Ducts D1 and D2 are provided at predetermined locations (two corners in FIG. 1 ) in the large room R1. Duct D1 is provided with an inlet H3 (second inlet) through which air is drawn from the large room R1 toward the air handling unit 30 (first air handling unit: see FIG. 2 ). Similarly, the other duct D2 is provided with an inlet H4. As shown in FIG. 1 , a fan F1 is provided at the inlet H3 of duct D1. The fan F1 is a blower that sends air from the large room R1 through the duct D1 to the air handling unit 30 (see FIG. 2 ). Similarly, a fan F2 is provided in the other duct D2. Note that fans F1 and F2 are not essential. If fans F1 and F2 are not provided, for example, a duct D3 may be connected to a wall near fan F1 to serve as a substitute for duct D1, or a configuration may be adopted in which fan F1 is simply not provided.

[0013] Inside the large room R1 (predetermined room), multiple clean rooms are provided: antechambers R2, R4, and workrooms R3, R5. The antechamber R2 is used, for example, as an airlock to prevent sample contamination. The antechamber R2 may also be used for undressing and dressing or for predetermined pretreatment. In the example of FIG. 1 , a door 24 allows people to enter and exit between the antechamber R2 and the large room R1. The cleanliness of the antechamber R2 may be higher than that of the large room R1, or may be equal to that of the large room R1. In other words, the cleanliness of the antechamber R2 is equal to or higher than that of the large room R1.

[0014] The workroom R3 is a clean room where sample preparation and the like are carried out. Examples of such "samples" include, but are not limited to, cells and sterile preparations. Because sample preparation and the like are carried out in the workroom R3, the cleanliness of the workroom R3 is higher than that of the front room R2 and the large room R1. Note that if the large room R1 is a clean room, the cleanliness of the workroom R3 is equal to or higher than that of the front room R2 and the large room R1. In addition, a door 25 allows people to enter and exit between the front room R2 and the workroom R3.

[0015] Regarding the room pressure of each clean room, in order to prevent sample contamination, for example, the room pressure of the antechamber R2 may be set lower than the room pressure of the large room R1 or the working room R3. This prevents dust from entering the working room R3 from the large room R1 via the antechamber R2 when people open and close the doors 24 and 25. It also prevents the sample (aerosol) from leaking from the working room R3 to the large room R1 via the antechamber R2. The room pressures of the large room R1 and the working room R3 may be set equal to each other, or one may be set higher than the other. Furthermore, even if the room pressure of the antechamber R2 is higher than the room pressure of the large room R1 or the working room R3, the antechamber R2 still functions as an airlock. The same applies to the room pressures of the other antechambers R4 and R5.

[0016] 1, the front room R2 is adjacent to another front room R4 via a wall W1. Similarly, the work room R3 is adjacent to another work room R5 via a wall W1. In other words, the front rooms R2 and R4 are separated by the wall W1, and the work rooms R3 and R5 are also separated by the wall W1.

[0017] In addition to the components described above, the clean room facility 100 also includes duct shafts DS1, DS2, DS3, and DS4 shown in FIG. 1. The duct shaft DS1 is a flow path that guides air from the work room R3 to the large room R1 and extends vertically in a cylindrical shape (see also FIG. 2). This duct shaft DS1 is installed in the gap between the work room R3 (a designated clean room) and the large room R1 (a designated room). In the example shown in FIG. 1, the duct shaft DS1 is installed in one corner of the work room R3. From another perspective, the duct shaft DS1 is installed outside the side wall of the work room R3.

[0018] A portion of the side wall of the work chamber R3 may form a portion of the duct shaft DS1. Alternatively, the duct shaft DS1 may be formed by fitting a cylindrical duct (not shown) into the gap between the work chamber R3 and the large room R1. The same applies to the other duct shafts DS2, DS3, and DS4. As shown in FIG. 1 , a fan filter unit 11 is installed in the duct shaft DS1 to exhaust air from the work chamber R3 to the large room R1.

[0019] Another duct shaft DS2 is a flow path that guides air from the front room R2 and the work room R3 to the large room R1 and extends vertically in a cylindrical shape (see also FIG. 2 ). As shown in FIG. 1 , the duct shaft DS2 is provided in the gap between the front room R2 and the work room R3 (i.e., between the clean rooms). From another perspective, the duct shaft DS2 can also be said to be provided in the gap between the work room R3 (a specified clean room) and the large room R1 (a specified room). The duct shaft DS2 is also provided on the outside of the side wall of the front room R2 and on the outside of the side wall of the work room R3. The duct shaft DS2 is equipped with fan filter units 12 and 13 for exhausting air from the work room R3 to the large room R1, as well as a fan filter unit 14 for exhausting air from the front room R2 to the large room R1.

[0020] The front room R4, work room R5, and duct shafts DS3 and DS4 shown in Fig. 1 are arranged approximately symmetrically in a plan view with respect to the front room R2, work room R3, and duct shafts DS1 and DS2, with respect to the wall W1 as the reference, and therefore a description thereof will be omitted. Note that the layout and number of clean rooms in Fig. 1 are merely examples, and are not limited to these, and may be changed by rotating the layout by 90°, for example.

[0021] Figure 2 is a schematic cross-sectional view of the clean room facility 100. Note that Figure 2 is generally a cross-sectional view taken along line II-II in Figure 1, but in order to clearly show the air flow, the air handling unit 30 as well as the ducts D1 and D2 (see also Figure 1) of the large room R1 are also shown in Figure 2.

[0022] As described above, ducts D1 and D2 are vertically extending air ducts through which air exhausted from large room R1 flows. The air flowing from large room R1 through ducts D1 and D3 in sequence and the air flowing from large room R1 through ducts D2 and D4 in sequence join together, and the joined air is directed to the intake side of air handling unit 30 via duct D5.

[0023] 2, clean room facility 100 includes air handling unit 30 (first air handling unit), chambers C1 and C2, temperature sensor 51, and pressure sensors 61 to 64. In addition to the components described above, clean room facility 100 also includes dampers 71 and 72 (first dampers), other dampers 81 to 84 (second dampers), air supply-side fan filter units 1 to 8, and air exhaust-side fan filter units 11 to 18.

[0024] The air handling unit 30 is a device that adjusts the temperature, humidity, etc. of air supplied to the large room R1 (a specified room). As shown in FIG. 2 , the air handling unit 30 includes a filter 31, a cooling coil 32, a fan 33, and an inverter 34. The filter 31 collects dust from the air flowing from the large room R1 toward the cooling coil 32 via a duct D5 or the like. The cooling coil 32 is a heat exchanger that exchanges heat between the air that has passed through the filter 31 and a refrigerant flowing through a heat transfer tube (not shown). It is also possible to provide the heat exchanger with a humidifying function to adjust the humidity of the air supplied to the large room R1. The fan 33 is a blower that sends the air that has undergone heat exchange in the cooling coil 32 into the large room R1 via a duct D6. The inverter 34 drives the motor (not shown) of the fan 33 in a specified manner.

[0025] 2, the air outlet side of the fan 33 is connected to the air outlets H1 and H2 on the ceiling of the large room R1 via a duct D6. A filter 41 is installed in the air outlet H1 to collect dust from the air (similar to the other air outlet H2). Note that if the large room R1 is used as a normal room rather than a clean room, there is no particular need to install the filters 41 and 42.

[0026] The air cooled by air handling unit 30 flows through duct D6 and is then blown out into large room R1 through outlets H1 and H2. As shown in Figure 1, duct D6 is equipped with damper 10. Damper 10 is set to a predetermined opening during a test run of air handling unit 30, for example, and is maintained at the predetermined opening during subsequent air conditioning operation.

[0027] The temperature sensor 51 is a sensor that detects the temperature of the large room R1 and is installed at a predetermined location in the large room R1. The value detected by the temperature sensor 51 is used to control the air handling unit 30. Although not shown, a humidity sensor may be provided in addition to the temperature sensor 51 so that the temperature and humidity of the large room R1 can be adjusted by the air handling unit 30.

[0028] The pressure sensor 61 is a sensor that detects the chamber pressure in the work chamber R3 and is installed in the work chamber R3. The detected value of the pressure sensor 61 is used to control the fan filter units 11 to 13 on the exhaust side of the work chamber R3. Note that the fan filter unit 13 (see FIG. 1) on the far side of the duct shaft DS2 and the fan filter unit 16 (see FIG. 1) on the far side of another duct shaft DS3 are not shown in FIG. 2.

[0029] The pressure sensor 62 is a sensor that detects the chamber pressure in the front chamber R2 and is installed in the front chamber R2. The detected value of the pressure sensor 62 is used to control the fan filter unit 14 on the exhaust side of the front chamber R2, etc. The same applies to the pressure sensor 63 in the front chamber R4 and the pressure sensor 64 in the working chamber R5.

[0030] Chamber C1 shown in Figure 2 is the space above the ceiling of work room R3 and front room R2. In other words, chamber C1 is provided as a common space above the ceiling of multiple clean rooms such as work room R3 and front room R2. Another chamber C2 shown in Figure 2 is the space above the ceiling of front room R4 and work room R5. These two chambers C1 and C2 are adjacent to each other via wall W1. This wall W1 not only separates chambers C1 and C2, but also, as described above, separates front rooms R2 and R4 and work rooms R3 and R5 (see Figure 1).

[0031] The grill G1 shown in FIG. 2 is a component that guides air from the large room R1 to the damper 71 while preventing the damper 71 from being exposed to the large room R1. The grill G1 may be configured with multiple blades (louvers) arranged in parallel at a predetermined interval, or may have a mesh-like configuration. The gaps between the blades of the grill G1 (multiple holes in the case of a mesh-like configuration) function as a "first suction port" through which air is drawn from the large room R1 (a predetermined room) toward the chamber C1. This "first suction port" is located near the chamber C1. The same applies to another grill G2 on the right side of FIG. 2.

[0032] Incidentally, in Figure 2, a grill G1 is illustrated on the left side of the page, and another grill G2 is illustrated on the right side of the page, but the grills G1 and G2 may also be provided on the front side where the doors 24 and 26 (see Figure 1) are provided.

[0033] Damper 71 (first damper) switches communication between large room R1 (a specified room) and chamber C1. This damper 71 is located on the air inlet side of chamber C1, facing grill G1. Similarly, damper 72 is located on the air inlet side of another chamber C2. These dampers 71 and 72 should preferably be non-leak dampers (airtight dampers) that are highly airtight when closed. This prevents sterilization gas from flowing into large room R1 when sterilizing working rooms R3 and R5 or anterooms R2 and R4.

[0034] The dampers 71 and 72 are maintained in an open state during normal use of the clean room facility 100. That is, during normal use of the clean room facility 100, each of the chambers C1 and C2 communicates with the large room R1. Air from the large room R1 is led to the chamber C1 via the grill G1 and the damper 71 (open). Similarly, air from the large room R1 is led to the other chamber C2 via the grill G2 and the damper 72 (open).

[0035] The chamber C1 is configured to include the ceilings of the working chamber R3 and the front chamber R2, an upper plate C1a, and a side plate C1b. The upper plate C1a is higher than the ceilings of the working chamber R3 and the front chamber R2 and is generally parallel to these ceilings. The side plate C1b is a plate that connects the edges of the ceilings of the working chamber R3 and the front chamber R2 to the edges of the upper plate C1a and extends in the vertical direction. The same applies to the other chamber C2.

[0036] Hereinafter, a structure including multiple clean rooms sharing a common chamber will be referred to as a "clean unit." In the example of FIG. 2, a structure including a work chamber R3 and an antechamber R2, which share a chamber C1 above the ceiling, will be referred to as a first clean unit U1. Also, a structure including an antechamber R4 and a work chamber R5, which share a chamber C2 above the ceiling, will be referred to as a second clean unit U2. Note that the first clean unit U1 and the second clean unit U2 are adjacent to each other via a wall W1, but they may also be configured to be separated from each other.

[0037] 2 are devices that supply air from chamber C1 to work room R3 and are embedded in the ceiling of work room R3. Fan filter unit 1 includes an air supply fan 1a and a filter 1b. Air supply fan 1a is a blower that supplies air from chamber C1 to work room R3 (clean room).

[0038] Filter 1b is provided on the outlet side of supply air fan 1a to capture dust particles from the air flowing from supply air fan 1a to work chamber R3. For example, a high-efficiency particulate air filter (HEPA) or an ultra-low penetration air filter (ULPA) may be used as filter 1b. The remaining fan filter units 2 and 3 used to supply air to work chamber R3 are also configured in the same way.

[0039] The fan filter unit 4 is a device that supplies air from the chamber C1 to the front room R2. The fan filter unit 4 includes an air supply fan 4a and a filter 4b, and is embedded in the ceiling of the front room R2. In this way, each of the multiple clean rooms is provided with an air supply fan. The other fan filter units 5 to 8 on the air supply side are configured in the same way.

[0040] The fan filter unit 11 shown in Figure 2 is a device that exhausts air from the work chamber R3 and includes an exhaust fan 11a and a filter 11b. The exhaust fan 11a is a blower that exhausts air from the work chamber R3 and is installed in the duct shaft DS1. That is, an opening is provided in a predetermined location on the duct shaft DS1 facing the work chamber R3, and the fan filter unit 11 is fitted into this opening. The filter 11b collects dust from the air flowing from the work chamber R3 toward the exhaust fan 11a and is provided on the suction side of the exhaust fan 11a. The other fan filter units 12 to 18 on the exhaust side are configured in a similar manner.

[0041] As shown in FIG. 2 , the upper end of the duct shaft DS1 is closed and does not communicate with the chamber C1. The duct shaft DS1 also communicates with the work chamber R3 via an exhaust fan 11a. Air is guided from the work chamber R3 (clean room) into the duct shaft DS1, which does not communicate with the chamber C1, and is then exhausted through the duct shaft DS1. In other words, air is exhausted from the work chamber R3 (clean room) that communicates with the duct shaft DS1 via the duct shaft DS1, which does not communicate with the chamber C1. In the example of FIG. 2 , the destination of the exhaust air from the work chamber R3 via the duct shaft DS1 is the large room R1 (a specified room). The same applies to the exhaust air via the other duct shafts DS2, DS3, and DS4.

[0042] The damper 81 (second damper) shown in FIG. 2 switches between communication and isolation between the duct shaft DS1 and the large room R1 (a specified room). It is located on the side of the duct shaft DS1 facing the large room R1. The damper 82 (second damper) shown in FIG. 2 switches between communication and isolation between the duct shaft DS2 and the large room R1. The same applies to the other dampers 82, 83, and 84. These dampers 81-84 are preferably non-leak dampers (airtight dampers) that are highly airtight when closed. This prevents sterilization gas from flowing into the large room R1, for example, when sterilizing the working rooms R3 and R5 or the anterooms R2 and R4. The dampers 81-84 are maintained in the open state during normal use of the clean room facility 100.

[0043] The fan filter unit 12 shown in Fig. 2 and the fan filter unit 13 shown in Fig. 1 are devices that exhaust air from the work chamber R3 and are installed in the duct shaft DS2. Another fan filter unit 14 is a device that exhausts air from the front chamber R2 and is installed in the duct shaft DS2.

[0044] As described above, the duct shaft DS2 is located in the gap between the work chamber R3 and the front chamber R2. The upper end of this duct shaft DS2 is also closed, so it does not communicate with the chamber C1. The duct shaft DS2 also communicates with the work chamber R3 via the exhaust fan 12a and the front chamber R2 via another exhaust fan 14a. When these exhaust fans 12a-14a are driven, air from the work chamber R3 and the front chamber R2 is exhausted sequentially through the duct shaft DS2 and the damper 82 (open) to the large room R1 (see also FIG. 1). The downward arrow near the damper 82 in FIG. 2 indicates the air flow toward the large room R1.

[0045] The fan filter units 1 to 8 on the intake side and the fan filter units 11 to 18 on the exhaust side are controlled by a control device (not shown). Note that the fan filter units 1 to 8 and 11 to 18 may each have a built-in control device, or multiple fan filter units may be connected to a single control device via wiring.

[0046] The rotation speeds of the exhaust fans 11a, 12a, and 13a (see also FIG. 1 ) are controlled, for example, to maintain the room pressure in the work room R3 at a predetermined set pressure (target pressure). The rotation speeds of the supply fans 1a, 2a, and 3a may be constant or may be adjusted appropriately based on the room pressure in the work room R3. The same applies to the room pressure control of the remaining antechambers R2 and R4 and work room R5. Furthermore, because the clean room facility 100 has a generally symmetrical configuration with respect to the wall W1, a description of the configuration related to air conditioning in the antechamber R4 and work room R5 will be omitted.

[0047] <Comparative Example> Fig. 8 is a schematic cross-sectional view of a clean room facility 200 according to a comparative example. The comparative example of Fig. 8 differs from the first embodiment (see Fig. 2) in that a damper is not provided and that duct shafts DS1 and DS2 communicate with chamber C1 and duct shafts DS3 and DS4 communicate with another chamber C2. The comparative example of Fig. 8 also differs from the first embodiment in that duct shafts DS1 and DS4 do not communicate with large room R1. The comparative example of Fig. 8 also differs from the first embodiment (see Fig. 2) in that duct shaft DS2 communicates with large room R1 through opening A1 and the remaining duct shaft DS3 communicates with large room R1 through another opening A2.

[0048] 8, for example, as the exhaust-side fan filter unit 11 is driven, air that has flowed from the working chamber R3 into the duct shaft DS1 is returned to the chamber C1. As the exhaust-side fan filter units 12 to 14 are driven, some of the air that has flowed into the duct shaft DS2 from the working chamber R3 or the front chamber R2 is exhausted into the large room R1 through the opening A1, but the remaining air is returned to the chamber C1 through the duct shaft DS2.

[0049] As a result, as shown by the white arrows in Figure 8, for example, air that has absorbed heat in work chamber R3 is returned to chamber C1 via duct shaft DS1, and most of this air is then supplied to work chamber R3 by the air supply fan filter units 1-3. When this type of air circulation (closed loop) occurs, the flow of conditioned air (air cooled by air handling unit 30) introduced from large room R1 to chamber C1 is obstructed when it is supplied to work chamber R3. This results in a decrease in the air conditioning efficiency when maintaining work chamber R3 at a predetermined target temperature, making it difficult to maintain the target temperature. The same applies to the air conditioning of the other antechambers R2, R4, and work chamber R5.

[0050] In contrast, in the first embodiment, some of the duct shafts DS1 and DS2 of the clean unit U1 are not connected to the chamber C1. In the example of FIG. 2, neither of the duct shafts DS1 nor DS2 is connected to the chamber C1. The same applies to the duct shafts DS3 and DS4 of the other clean unit U2. This prevents the aforementioned closed-loop flow from occurring. This improves the air conditioning efficiency of the working chambers R3 and R5 and the anterooms R2 and R4. Next, the processes during normal use of the clean room facility 100 and the processes during sterilization will be described in order. The processes during normal use will be described mainly using FIG. 2.

[0051] <Processing During Normal Use> During normal use of the clean room facility 100, the air handling unit 30, the fan filter units 1-8 on the intake side, and the fan filter units 11-18 on the exhaust side are driven in a predetermined manner. Furthermore, the damper 71 on the air inlet side of chamber C1 is open, allowing communication between the large room R1 and chamber C1 through the damper 71 (similar to the other damper 72). Furthermore, the damper 81 on the duct shaft DS1 is open, allowing communication between the duct shaft DS1 and the large room R1 through the damper 81 (similar to the other dampers 82-84). Thus, when air conditioning is performed in clean rooms such as the work rooms R3 and R5 and the antechambers R2 and R4, the dampers 71 and 72 (first dampers) and the dampers 81-84 (second dampers) are maintained in an open state.

[0052] For example, a portion of the air introduced from the large room R1 to the chamber C1 via the damper 71 is introduced to the working room R3, and a portion of the air in the working room R3 is then exhausted to the large room R1 via the duct shaft DS1 and the damper 81. As described above, since the duct shaft DS1 does not communicate with the chamber C1, a closed-loop air flow is hardly generated. Therefore, the working room R3 can be air-conditioned with high efficiency. The same can be said for the air-conditioning of the other antechambers R2, R4, and the working room R5.

[0053] <Sterilization Treatment> For example, there is a possibility that a sample may be spilled while someone is working in work room R3. In addition, to maintain a clean work environment, it is desirable to sterilize each clean room periodically. Therefore, during sterilization, the treatments shown in Figures 3 and 4 are carried out as appropriate.

[0054] Figure 3 is an explanatory diagram showing an example of the process during sterilization of working chamber R3 and anteroom R2. The sterilization gas generator 91 shown in Figure 3 is a device that generates a predetermined sterilization gas (hydrogen peroxide gas, etc.). For example, the sterilization gas generator 91 is placed in working chamber R3, and when the sterilization gas generator 91 is driven with all doors closed, the sterilization gas is generated from the sterilization gas generator 91.

[0055] Furthermore, because chambers C1 and C2 are separated by wall W1, it is not possible for sterilization gas generated by sterilization gas generator 91 to flow from working chamber R3 through chamber C1 into the adjacent chamber C2. Therefore, even during sterilization of working chamber R3 or antechamber R2, there is no problem if the fan filter units 15-18 on the air supply side and the fan filter units 15-18 on the exhaust side of other antechambers R4 and working chamber R5 continue to be driven, and there is no problem if dampers 72, 83, 84 remain open.

[0056] During sterilization of the working chamber R3 and the front chamber R2, the fan filter units 1-4 on the air supply side of the chamber C1 are kept stopped, and the fan filter units 11-14 that exhaust air from the working chamber R3 and the front chamber R2 are also kept stopped. Furthermore, when the working chamber R3 and the front chamber R2 (multiple clean rooms) are being sterilized using sterilizing gas, the damper 71 (first damper) and the dampers 81, 82 (second dampers) are kept closed.

[0057] For example, sterilizing gas filling working chamber R3 flows into chamber C1 through air supply-side fan filter units 1-3, which are inactive, and then flows into front chamber R2 through the remaining air supply-side fan filter unit 4. Furthermore, sterilizing gas filling working chamber R3 flows into duct shaft DS1 through exhaust-side fan filter unit 11, which is inactive, and also flows into duct shaft DS2 through fan filter unit 12, etc. Sterilizing gas also flows from duct shaft DS2 into front chamber R2 through exhaust-side fan filter unit 14. In this way, by operating sterilizing gas generator 91 in one clean room (working chamber R3 in the example of Figure 3), sterilization of working chamber R3, front chamber R2, and duct shafts DS1 and DS2, which share chamber C1, can be performed simultaneously.

[0058] As described above, the damper 71 on the air inlet side of chamber C1 is closed, thereby blocking communication between the large room R1 and chamber C1. This prevents sterilizing gas from leaking from chamber C1 to the large room R1. Furthermore, the damper 81 provided on duct shaft DS1 is also closed, thereby blocking communication between the large room R1 and duct shaft DS1. This prevents sterilizing gas from leaking into the large room R1 via duct shaft DS1. Similarly, this prevents sterilizing gas from leaking into the large room R1 via another duct shaft DS2.

[0059] When sterilizing the first clean unit U1, the sterilization gas generator 91 may be placed in the anterior chamber R2 instead of the example shown in Figure 3. Also, the sterilization gas generator 91 may be placed in both the working chamber R3 and the anterior chamber R2. In short, when sterilizing multiple clean rooms, it is advisable to place the sterilization gas generator 91 in at least one of the multiple clean rooms.

[0060] Furthermore, the air handling unit 30 and fans F1 and F2 can continue to operate even during sterilization of the working chamber R3 and the front chamber R2. This allows the large room R1 to be maintained at a predetermined temperature even during sterilization. Furthermore, for example, if the sterilization gas generator 91 is located in the working chamber R3, the fan filter units 5-8 and 15-18 can continue to operate to air-condition the front chamber R4 and the working chamber R5, which have chamber C2 different from chamber C1 above the ceiling of the working chamber R3, even during sterilization of the working chamber R3. This allows for continuous sample preparation and other tasks to be performed in the front chamber R4 and the working chamber R5.

[0061] FIG. 4 is an explanatory diagram showing another example of the process during sterilization of the working chamber R3 and the anteroom R2. As shown in FIG. 4, a sterilization gas generator 92 may be disposed outside the working chamber R3 (inside or outside the large room R1), and sterilization gas may be supplied from this sterilization gas generator 92 to the working chamber R3 via a hose 93. That is, when sterilizing multiple clean rooms such as the working chamber R3 and the anteroom R2, sterilization gas may be supplied from the sterilization gas generator 92 to at least one of the multiple clean rooms from the outside via the hose 93. This configuration also achieves the same effects as the configuration shown in FIG. 3. Furthermore, in addition to the hose 93 shown in FIG. 4, an exhaust hose (not shown) for exhausting air from the working chamber R3 may be connected to the sterilization gas generator 92. In this case, for example, air detoxified by a catalytic gas (air with a sterilization gas concentration below a predetermined value) may be exhausted via an exhaust hose (not shown). Alternatively, sterilization gas or the like may be circulated via a predetermined pipe or duct instead of a hose.

[0062] Alternatively, a decomposition device (not shown) equipped with a predetermined catalytic filter (not shown) that detoxifies the sterilization gas may be provided separately. Also, a catalytic filter may be provided downstream of the exhaust dampers 81 and 82 to reduce the concentration of the sterilization gas by the catalyst.

[0063] <Effects> According to the first embodiment, for example, because the duct shaft DS1 (see FIG. 2) is not in communication with the chamber C1, it is possible to prevent air from circulating through the duct shaft DS1 and the chamber C1 (creating a closed loop). Therefore, it is possible to properly condition the working chamber R3, and the air conditioning efficiency when cooling the working chamber R3 is improved. The same can be said for the air conditioning of the other front chambers R2, R4, and the working chamber R5.

[0064] Furthermore, for example, by providing a duct shaft DS1 between the work room R3 and the large room R1, it becomes possible to provide a damper 81 on the duct shaft DS1. Therefore, by closing the damper 81 during sterilization of the work room R3, etc., it is possible to prevent sterilization gas from leaking into the large room R1. Furthermore, by installing the exhaust-side fan filter unit 11 inside the duct shaft DS1, it is possible to make the fan filter unit 11 invisible from the large room R1. This improves the design of the clean room facility 100.

[0065] Furthermore, since the anterooms R2 and R4 and the workrooms R3 and R5 are provided inside the large room R1, it becomes easier to, for example, add a new clean room inside the large room R1 or change the layout.

[0066] First Modification of First Embodiment Figure 5 is a schematic cross-sectional view of a clean room facility 100A according to a first modification of the first embodiment. The clean room facility 100A shown in Figure 5 differs from the first embodiment (see Figure 2) in that the duct shaft DS2 communicates with the chamber C1 and the duct shaft DS3 communicates with another chamber C2. The clean room facility 100A shown in Figure 5 also differs from the first embodiment in that dampers are not provided in the duct shafts DS2 and DS3, and neither of the duct shafts DS2 and DS3 communicates with the large room R1. The other configurations are similar to those of the first embodiment, and therefore, overlapping portions will not be described.

[0067] 5, for example, in the first clean unit U1, the duct shaft DS2 is connected to the chamber C1, but the other duct shafts DS1 are not connected to the chamber C1. Therefore, the occurrence of a closed-loop air flow can be suppressed at least in the flow path via the duct shaft DS1. Similarly, the closed-loop air flow hardly occurs in the flow path via the duct shaft DS4 of the second clean unit U2. Therefore, although the air conditioning efficiency is slightly lower than in the first embodiment, the working chamber R3 and the like can be appropriately air-conditioned.

[0068] Furthermore, the air that flows into the duct shaft DS2 from the work chamber R3 is returned (returned) to the chamber C1 via the duct shaft DS2, thereby allowing the highly clean air supplied to the chamber C1 to be reused.

[0069] The combination of communication / non-communication between a given duct shaft and chambers C1, C2 is not limited to the example shown in Figure 5. For example, a configuration is possible in which duct shaft DS1 communicates with chamber C1, another duct shaft DS4 communicates with chamber C2, and the remaining duct shafts DS2, DS3 do not communicate with chambers C1, C2. Even with this configuration, air conditioning of work chamber R3 and the like can be performed appropriately. In short, any configuration is possible as long as at least one duct shaft among the multiple duct shafts DS1, DS2, DS3, and DS4 does not communicate with chambers C1, C2.

[0070] 5 shows an example in which no dampers are installed in the duct shafts DS2 and DS3 communicating with chamber C1, but this is not limiting. That is, dampers (not shown) may be installed in each of the duct shafts DS2 and DS3. In this case, for example, a portion of the air flowing into duct shaft DS2 from work chamber R3 is returned to chamber C1 via duct shaft DS2, and the remaining air is guided to large room R1 via an open damper (not shown). Even with this configuration, clean air can be reused while appropriately conditioning each clean room, such as work chamber R3.

[0071] Second Modification of First Embodiment Fig. 6 is a schematic cross-sectional view of a clean room facility 100B according to a second modification of the first embodiment. The clean room facility 100B shown in Fig. 6 differs from the first embodiment in that the duct shaft DS1 does not have an exhaust-side fan filter unit, but instead has an opening A3 (the same applies to the other duct shafts DS4). Other aspects of the clean room facility 100B are the same as those of the first embodiment, and therefore, a description of the overlapping parts will be omitted.

[0072] As shown in FIG. 6 , an opening A3 is provided on the working chamber R3 side of the duct shaft DS1. Air is then exhausted from the working chamber R3 through the opening A3, the duct shaft DS1, and the damper 81 (open) to the large room R1. The same applies to exhaust through the duct shaft DS4. This configuration also achieves the same effects as the first embodiment. The positions of the openings A3 and A4 are not limited to the example shown in FIG. 6 . Some or all of the exhaust fans 11a to 18a (see FIG. 2 ) described in the first embodiment may be omitted, and openings may be provided in their places. Furthermore, filters may be appropriately installed in each of these openings.

[0073] Second Embodiment The second embodiment differs from the first embodiment in that a first clean unit U3 (see FIG. 7) having a predetermined chamber C3 and a second clean unit U4 (see FIG. 7) having another chamber C4 are provided separately from each other. The second embodiment also differs from the first embodiment in that an air handling unit 9 (see FIG. 7) that individually conditions the air for the second clean unit U4 is provided. Note that the rest of the second embodiment is similar to the first embodiment. Therefore, only the differences from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0074] FIG. 7 is a schematic cross-sectional view of a clean room facility 100C according to a second embodiment. As shown in FIG. 7 , the clean room facility 100C includes a first clean unit U3, a second clean unit U4, and an air handling unit 9 (second air handling unit). The first clean unit U3 includes a working room R3 and an antechamber R2 as clean rooms that share a common chamber C3. Similarly, the second clean unit U4 includes a working room R5 and an antechamber R4 as clean rooms that share a common chamber C4. The first clean unit U3 and the second clean unit U4 are installed inside a large room R1 (a predetermined room). While the example in FIG. 7 shows the first clean unit U3 and the second clean unit U4 separated from each other, the air handling unit 9 (air conditioner) can also be installed in a configuration in which the clean units are separated by a wall W1, as shown in FIGS. 2 , 5 , and 6 .

[0075] The configuration of the first clean unit U3 is similar to that of the first clean unit U1 (see FIG. 2) described in the first embodiment, and therefore will not be described further. The second clean unit U4 has a configuration generally similar to that of the first clean unit U3. However, the second clean unit U4 differs from the first clean unit U3 in that a grill is not provided upstream of the damper 72, and instead a wall W3 is provided. The downstream end of a duct D7, through which air cooled by the air handling unit 9 flows, is inserted into this wall W3. It should be noted that a configuration in which the downstream end of the duct D7 is directly connected to the damper 72 is also possible.

[0076] The second clean unit U4 has a larger air conditioning load than the first clean unit U3. For example, if the heat generation amount of equipment (not shown) installed in the work room R5 or the like is large, or if the set temperature (target temperature) of the work room R5 or the like is lower than that of the work room R3 or the like of the first clean unit U3, the air conditioning load of the second clean unit U4 will often be relatively large. Therefore, in the second embodiment, the air from the large room R1 is additionally cooled by the air handling unit 9 before being supplied to the second clean unit U4.

[0077] The air handling unit 9 is an air conditioner that draws in air from the large room R1 (a specified room), adjusts its temperature, and supplies the temperature-adjusted air to chamber C4 of the second cleaning unit U4. The air handling unit 9 includes a filter 9a, a cooling coil 9b, a fan 9c, and an inverter 9d. The configuration of the air handling unit 9 shown in FIG. 7 is similar to that of another air handling unit 30 for cooling the air in the large room R1, and therefore its description will be omitted. The air drawn into the air handling unit 9 from the large room R1 is cooled to a specified temperature, and the cooled air is then guided to chamber C4 via duct D7 and damper 72 (open).

[0078] As shown in Figure 7, a damper 10a is installed in duct D7. For example, damper 10a is set to a predetermined opening degree during a test run of air handling unit 9, and is maintained at the predetermined opening degree during subsequent air conditioning operation. The opening degree of damper 10a may be adjusted as appropriate based on the air conditioning load of front room R4 and work room R5.

[0079] The first clean unit U3 maintains the working room R3 and the anteroom R2 at a predetermined set temperature by directly supplying the air from the large room R1 (i.e., air cooled by the air handling unit 30). Therefore, there is no particular need to provide an air handling unit for individual air conditioning for the first clean unit U3. While the configuration shown in FIG. 7 illustrates the air handling unit 9 drawing in air from the large room R1, this is not a limitation. For example, the air handling unit 9 may be configured to selectively draw in air from the large room R1 and air from the working room R5 based on temperature information for the large room R1 and temperature information for the working room R5. Specifically, when the air handling unit 9 is performing cooling operation, if the temperature of the working room R5 is lower than the temperature of the large room R1, the air handling unit 9 draws in air from the working room R5. Furthermore, if the temperature of the large room R1 is lower than the temperature of the working room R5, the air handling unit 9 draws in air from the large room R1. This reduces the air conditioning load of the air handling unit 9, thereby achieving energy savings. In the above-described configuration, when the temperatures of the large room R1 and the working room R5 are approximately equal, the air handling unit 9 may draw air into either the large room R1 or the working room R5. Furthermore, in the above-described configuration, if a damper were not provided in the duct connecting the air handling unit 9 and the working room R5, sterilizing gas would flow into the air handling unit 9 via the working room R5 when sterilizing the working room R5. To avoid this situation, it is recommended to provide a damper in the duct connecting the air handling unit 9 and the working room R5. Providing such a damper, for example, a non-leak damper, can effectively prevent sterilizing gas from flowing into the air handling unit 9.

[0080] <Effects> According to the second embodiment, air further cooled by the air handling unit 9 is supplied to the chamber C4 of the second clean unit U4. Therefore, even if the air conditioning load of the second clean unit U4 is greater than that of the first clean unit U3, air conditioning suitable for the usage environment of the second clean unit U4 can be performed individually. In addition, the separate air handling unit 30 can also appropriately air condition the large room R1 and the first clean unit U3.

[0081] <<Modifications>> The clean room facility 100 and the like according to the present invention have been described above in relation to various embodiments. However, the present invention is not limited to these descriptions and various modifications can be made. For example, in each embodiment, a configuration has been described in which a plate member (not shown) is not provided in the gap between the ceiling of the large room R1 (see FIG. 2 ) and the upper plate C1a of the chamber C1. However, this is not limiting. That is, to prevent dust from accumulating on the upper plate C1a of the chamber C1 and to take into consideration the appearance of the upper side of the chamber C1, a plate member (not shown) connecting the ceiling of the large room R1 and the upper plate C1a of the chamber C1 in the vertical direction may be provided along the edge of the chamber C1. Such a configuration is also included in the fact that the first clean unit U1 is located inside the large room R1.

[0082] Furthermore, in each embodiment, a case has been described in which a predetermined gap is provided between the ceiling of the large room R1 and the upper plate C1a of the chamber C1, or between the ceiling of the large room R1 and the upper plate C2a of the chamber C2, but this is not limited to this. For example, the upper plates C1a, C2a may be configured to be integrated with the ceiling of the large room R1. Furthermore, the side walls of the first clean unit U1, etc. may be configured to be integrated with part of the side walls of the large room R1. These configurations are also included in the fact that the first clean unit U1, etc. are present inside the large room R1.

[0083] Furthermore, in each embodiment, the case where the exhaust destination from a clean room such as the working room R3 is the large room R1 has been described, but this is not limited thereto. For example, the exhaust destination from a clean room such as the working room R3 may be a space outside the clean room facility 100. Furthermore, in each embodiment, the case where there are two clean room units (first clean unit U1 and second clean unit U2) has been described, but this is not limited thereto. In other words, a configuration may be such that at least one clean room unit is provided inside the large room R1 (a specified room).

[0084] Furthermore, in each embodiment, dampers 81-84 (second dampers) are provided corresponding to duct shafts DS1, DS2, DS3, and DS4, but this is not a limitation. For example, at least some of dampers 81-84 may be omitted, and a specific duct shaft may communicate with large room R1 via an exhaust port (second exhaust port; not shown). In such a configuration, during sterilization of the clean room, an operator may cover the exhaust port to prevent sterilization gas from entering large room R1 through the exhaust port. Furthermore, in the first embodiment, sterilization gas generators 91 and 92 (see FIGS. 3 and 4) that generate sterilization gas are provided, but this is not a limitation. For example, in addition to the functions of dehumidification and specific gas generation, equipment having an aeration function using a catalyst or the like may be provided. Furthermore, the sterilization gas generators 91 and 92 may also have both of these functions.

[0085] In addition, in each embodiment, the air in the large room R1 (see FIG. 2) is introduced into the air handling unit 30, and the air cooled by the air handling unit 30 is returned to the large room R1. However, this is not limited to this. For example, an air handling unit (not shown) outside the clean room facility may take in outside air, and the air cooled by this air handling unit may be introduced into the large room R1. In this case, the exhaust destination from a specified clean room may be outdoors.

[0086] Furthermore, while the layout of the clean room facility 100 and the like described in each embodiment is merely an example, other layouts may also be configured as follows. That is, the clean room facility may be provided with duct shafts installed in the gaps between the clean rooms among the plurality of clean rooms and / or in the gaps between a predetermined clean room and the large room R1 (predetermined room). Furthermore, one or more duct shafts may be installed on the outside of the side wall of at least one clean room. In such a configuration, the one or more duct shafts may include one that is not connected to a chamber. This allows air to be exhausted from the predetermined clean room to the large room R1 or the like via a duct shaft that is not connected to a chamber, thereby preventing air from circulating in a closed loop.

[0087] 1, the duct shafts DS1, DS2, DS3, and DS4 may be arranged in a straight line along a predetermined side wall facing the large room R1. This allows workers to open the maintenance covers (not shown) of the duct shafts DS1, DS2, DS3, and DS4 to expose the fan filter units 11 to 18, working sequentially along the side wall, making maintenance work easier.

[0088] 5 (first modified example of the first embodiment), for example, a perforated plate or grating may be provided at the upper end (downstream end in the air flow) of the duct shaft DS2. Such a configuration is also included in the matter of the duct shaft DS2 communicating with the chamber C1.

[0089] Furthermore, in the second embodiment (see FIG. 7 ), the air handling unit 9 individually performs air conditioning for the second clean unit U4. However, this is not limited to this. That is, two air handling units 9 (second air handling units) may be installed inside the large room R1 so as to correspond one-to-one with the first clean unit U3 and the second clean unit U4. The air in the large room R1 may then be cooled by each air handling unit 9, and the cooled air may be introduced into the chambers C3 and C4. With this configuration, even if the set temperatures of the first clean unit U3 and the second clean unit U4 are different from those of the large room R1, the air handling units 9 can assist in air conditioning.

[0090] Furthermore, for example, a duct shaft may be provided in the gap between the side wall of the large room R1 and a specified clean room. Such a configuration also falls within the category of providing a duct shaft in the gap between the clean room and the large room R1. This duct shaft may not communicate with the chamber C1, and air may be exhausted from the clean room to the outside of the large room R1 via the duct shaft. Even in such a configuration, air circulation in a closed loop via the duct shaft is suppressed, thereby improving air conditioning efficiency.

[0091] Furthermore, in each embodiment, a configuration has been described in which the damper 71 (see FIG. 2) is hidden by the grill G1 when viewed from inside the large room R1, and another damper 72 (see FIG. 2) is hidden by the grill G2. However, this is not limited to this. That is, the grills G1 and G2 may be omitted as appropriate, leaving the dampers 71 and 72 exposed in the large room R1. Furthermore, in each embodiment, a configuration has been described in which the damper 81 is provided on the large room R1 side of the duct shaft DS1 (the main body of the damper 81 is exposed in the large room R1). However, this is not limited to this. For example, the damper 81 may be installed inside the duct shaft DS1. This hides the damper 81 when viewed from inside the large room R1, improving the design. The same applies to the other dampers 82 to 84.

[0092] Furthermore, when the air conditioning loads of multiple clean rooms, such as the front rooms R2 and R4 and the work rooms R3 and R5, are relatively high, the following configuration is recommended. That is, it is preferable that the air outlets H1 and H2 (first air outlets: see FIG. 1 ) for air whose temperature has been conditioned by the air handling unit 30 (first air handling unit) be located upstream in the air flow direction relative to the air inlets (first air inlets: gaps between the grilles G1 and G2) near the chambers C1 and C2. This allows the conditioned air blown out from the air outlets H1 and H2 to be directly guided to the chamber C1 via the air inlets, thereby allowing cooled air to be sent to the front rooms R2 and R4 and the work rooms R3 and R5.

[0093] Furthermore, for example, a damper 81 (second damper) or a second exhaust port (not shown) may be provided on the duct shaft DS1 (see FIG. 2) to guide air exhausted from the duct shaft DS1 to the large room R1 (a specified room). Furthermore, an intake port H3 (second intake port; see FIG. 1) through which air is drawn from the large room R1 toward the air handling unit 30 (first air handling unit) may be provided on the duct D1 (see FIG. 1). In such a configuration, it is preferable to provide an intake port H3 (second intake port) downstream of the damper 81 (second damper) or the second exhaust port in the air flow direction. This allows air that has absorbed heat in each clean room to be guided directly to the duct D1 via the damper 81, etc. and the intake port H3 in sequence, thereby suppressing the rise in the temperature of the air in the large room R1.

[0094] In addition, in each embodiment, the chambers C1 and C2 (see FIG. 2) are separated by the wall W1, but this is not limiting. That is, the wall W1 may be omitted, and the chambers C1 and C2 may be a single common space.

[0095] Furthermore, in each embodiment, the clean rooms such as the working chambers R3 and R5 and the antechambers R2 and R4 are used as positive pressure rooms, but depending on the application, the clean rooms may also be used as negative pressure rooms.

[0096] In addition, in each embodiment, the clean room facility 100 and the like are described as being used for cell culture processing and pharmaceutical manufacturing, but the present invention is not limited to this. For example, each embodiment can be applied to various fields such as the manufacturing of semiconductors, precision machinery, and liquid crystal panels, the food industry, the cosmetics industry, and experiments using radioactive materials.

[0097] Furthermore, each embodiment has been described in detail to clearly explain the present invention, and is not necessarily limited to having all of the described configurations. Furthermore, it is possible to add, delete, or replace some of the configurations of the embodiments with other configurations. Furthermore, the above-described mechanisms and configurations are those considered necessary for explanation, and do not necessarily represent all of the mechanisms and configurations of the product.

[0098] DESCRIPTION OF SYMBOLS 1, 2, 3, 4, 5, 6, 7, 8 Fan filter unit 1a, 2a, 3a, 4a Air supply fan 9 Air handling unit (second air handling unit) 11, 12, 13, 14, 15, 16, 17, 18 Fan filter unit 11a, 12a, 13a, 14a Exhaust fan 30 Air handling unit (first air handling unit) 71, 72 Damper (first damper) 81, 82, 83, 84 Damper (second damper) 91, 92 Sterilizing gas generator 93 Hose 100, 100A, 100B, 100C Clean room facility C1, C2 Chamber D1, D2 Duct DS1, DS2, DS3, DS4 Duct shaft G1, G2 Grill (first intake port) H1, H2: Outlet (first outlet) H3, H4: Inlet (second inlet) R1: Large room (specified room) R2, R4: Anteroom (clean room) R3, R5: Work room (clean room) U1, U3: First clean unit (clean unit) U2, U4: Second clean unit (clean unit)

Claims

1. A plurality of clean rooms provided inside a predetermined room, a first air handling unit that adjusts the temperature of the air supplied to the predetermined room, a chamber provided as a common space above the ceilings of the plurality of clean rooms and into which air is led from the predetermined room, an air supply fan provided in each of the plurality of clean rooms for supplying air from the chamber to the clean room, a duct shaft provided outside the side wall of at least one of the clean rooms, Among the duct shafts facing the predetermined room, the upper ends of the duct shafts are closed so as not to communicate with the chamber, and a plurality of them are provided with maintenance covers, Air is led from the clean room into the duct shaft that does not communicate with the chamber and exhausted through the duct shaft, A clean room facility in which the exhaust destination when exhausting air from the clean room through the duct shaft is the predetermined room.

2.

3. A first air outlet through which air whose temperature has been adjusted by the first air handling unit is blown out is provided in the ceiling of the predetermined room, A first air inlet through which air from the predetermined room toward the chamber is sucked in is provided near the chamber, The first air outlet is provided upstream of the first air inlet in the air flow direction The clean room facility according to claim 1, characterized in that.

4. A second damper or a second exhaust port for guiding the air exhausted from the duct shaft to the predetermined room is provided in the duct shaft, A second air inlet through which air from the predetermined room toward the first air handling unit is sucked in is provided in the duct, The second air inlet is provided downstream of the second damper or the second exhaust port in the air flow direction The clean room facility according to claim 1, characterized in that.

5. The duct shaft includes those that communicate with the chamber The clean room facility according to claim 1, characterized in that.

6. Comprising a first damper for switching the communication or interruption between the predetermined room and the chamber, and Comprising a second damper for switching the communication or interruption between the duct shaft and the predetermined room, When the air conditioning of the plurality of clean rooms is being performed, the first damper and the second damper are maintained in an open state The clean room facility according to claim 1, characterized in that

7. Comprising a first damper for switching the communication or interruption between the predetermined room and the chamber, and Comprising a second damper for switching the communication or interruption between the duct shaft and the predetermined room, When the sterilization of the plurality of clean rooms is being performed using a sterilizing gas, the first damper and the second damper are maintained in a closed state The clean room facility according to claim 1, characterized in that

8. When sterilizing the plurality of clean rooms, comprising a sterilizing gas generator disposed in at least one of the plurality of clean rooms The clean room facility according to claim 7, characterized in that

9. When sterilizing the plurality of clean rooms, comprising a sterilizing gas generator that supplies sterilizing gas to at least one of the plurality of clean rooms through a hose from the outside The clean room facility according to claim 7, characterized in that

10. At least one clean unit including a plurality of the clean rooms having a common chamber is provided inside the predetermined room, Comprising a second air handling unit that sucks in the air in the predetermined room, adjusts the temperature, and supplies the air with the adjusted temperature to the chamber The clean room facility according to claim 1, characterized in that

11. The predetermined room is a normal room whose cleanliness is not managed The clean room facility according to claim 1, characterized in that