Transportation device and connection method

Abstract

A transportation device for transporting an object to be transported comprises a housing portion, an opening, a gate valve, a robot arm, a first connector unit, a drive unit, and a movement mechanism. The housing portion houses the object to be transported. The opening is connected to a processing device for processing a substrate. The gate valve opens and closes the opening. The robot arm is disposed in the housing portion, has an end effector at a tip, and transports the object to be transported between the robot arm and the processing device through the opening by using the end effector. The first connector unit includes a first connector for receiving an electric power supply to the transportation device from an external device that is provided outside the transportation device. When the first connector unit is to be connected to a second connector unit of the external device, the drive unit advances the first connector unit so as to approach the second connector unit. The movement mechanism moves the transportation device.

Description

Carrying device and connection method

[0001] Various aspects and embodiments of the present disclosure relate to conveying devices and connection methods.

[0002] For example, Patent Document 1 below discloses that "a substrate processing apparatus includes a first chamber, a substrate support, a second chamber, a clamp, a release mechanism, and a lift mechanism. The first chamber includes a sidewall providing an opening, and further includes a movable part movable upward and downward within the first chamber. The substrate support is disposed within the first chamber. The second chamber is disposed within the first chamber, and together with the substrate support, defines a processing space in which a substrate placed on the substrate support is processed. The second chamber is detachable from the first chamber, and can be transported between the interior space of the first chamber and the outside of the first chamber through the opening in the sidewall of the first chamber. The clamp releasably fixes the second chamber to a movable part extending above the second chamber. The release mechanism is configured to release the fixation of the second chamber by the clamp. The lift mechanism is configured to move the movable part upward and downward."

[0003] Furthermore, for example, Patent Document 2 listed below discloses a part replacement system for replacing consumable parts, comprising a part storage device and a part replacement device. The part storage device stores unused consumable parts. The part replacement device is connected to a processing device and the part storage device, and replaces used consumable parts attached to the processing device with unused consumable parts stored in the part storage device. The part replacement device also moves to the position of the processing device on which the consumable part to be replaced is attached and connects to the processing device. The part storage device also moves to the position of the part replacement device connected to the processing device on which the consumable part to be replaced is attached and connects to the part replacement device."

[0004] JP 2022-66828 A JP 2021-176173 A

[0005] The present disclosure provides a carrying device and a connection method that allows the carrying device to be miniaturized.

[0006] One aspect of the present disclosure provides a transport device for transporting an object, the transport device comprising: a storage unit, an opening, a gate valve, a robot arm, a first connector unit, a drive unit, and a movement mechanism. The storage unit is configured to store the object. The opening is configured to be connected to a processing device for processing a substrate. The gate valve is configured to open and close the opening. The robot arm is disposed within the storage unit, has an end effector at its tip, and is configured to transport the object between the processing device and the storage device using the end effector through the opening. The first connector unit includes a first connector for receiving power supply to the transport device from an external device provided outside the transport device. The drive unit is configured to advance the first connector unit so as to approach the second connector unit when connecting the first connector unit to a second connector unit of the external device. The movement mechanism is configured to move the transport device.

[0007] According to various aspects and embodiments of the present disclosure, the transport device can be made compact.

[0008] FIG. 1 is a schematic diagram showing an example of a transporting device according to an embodiment of the present disclosure. FIG. 2 is a side view showing an example of a connector unit driving unit. FIG. 3 is a plan view showing an example of a connector unit driving unit. FIG. 4 is a diagram showing an example of a connector unit. FIG. 5 is a side view showing an example of a connector unit driving unit when the connector unit is advanced. FIG. 6 is a plan view showing an example of a connector unit driving unit when the connector unit is advanced. FIG. 7 is a diagram showing an example of a processing device. FIG. 8 is a flowchart showing an example of a transporting method. FIG. 9 is a flowchart showing an example of a transporting method. FIG. 10 is a flowchart showing an example of a transporting method. FIG. 11 is a diagram showing an example of a transporting process. FIG. 12 is a diagram showing an example of a transporting process. FIG. 13 is a diagram showing an example of a transporting process. FIG. 14 is a diagram showing an example of a transporting process. FIG. 15 is a diagram showing an example of a space between a gate valve of a transporting device and a gate valve of a processing device. FIG. 16 is a diagram showing an example of a process of replacing consumable parts. FIG. 17 is a diagram showing an example of a transporting process. FIG. 18 is a diagram showing an example of a transporting process. FIG. 19 is a plan view showing an example of the state of the connector unit drive unit when the connection between the connector unit of the transporting device and the connector unit of the processing device is released. FIG. 20 is a diagram showing an example of the relationship between the traveling speed of the transporting device and the resistance to climbing over a step. FIG. 21 is a diagram showing an example of the relationship between the traveling speed of the transporting device and the maximum acceleration amplitude. FIG. 22 is a diagram showing an example of the contact state between the surface surrounding the opening of the transporting device and the O-ring. FIG. 23 is a diagram showing an example of an annular member provided around the opening of the transporting device. FIG. 24 is a diagram showing an example of the contact state between the annular member and the O-ring. FIG. 25 is a diagram showing an example of the positional relationship between the surface surrounding the opening of the transporting device and the surface of the processing device on which the O-ring is provided. FIG. 26 is a diagram showing an example of a seal unit provided around the opening of the transporting device. FIG. 27 is a diagram showing an example of the contact state between the seal unit and the O-ring.

[0009] Hereinafter, embodiments of the disclosed carrying device and connection method will be described in detail with reference to the drawings. Note that the disclosed carrying method and connection method are not limited to the following embodiments.

[0010] A transport device used in semiconductor manufacturing equipment to transport objects such as consumable parts may be equipped with a robot arm. Such a transport device requires power to drive the robot arm. If power is supplied to the transport device via a cable, the transport device can only move within the reach of the cable.

[0011] To address this issue, it is possible to supply power to the transport device from a battery installed on the transport device. However, if the battery capacity installed on the transport device is small, the battery needs to be charged frequently, making continuous operation of the transport device difficult. On the other hand, if the battery capacity installed on the transport device is increased, continuous operation of the transport device becomes possible, but the transport device becomes larger. If the transport device becomes larger, the passageway through which the transport device passes must be wider, which increases the footprint of the entire semiconductor manufacturing system.

[0012] Therefore, the present disclosure provides a technique that can reduce the size of the carrying device.

[0013] [Configuration Example of Transporting Device 10] Fig. 1 is a schematic diagram showing an example of a transporting device 10 according to an embodiment of the present disclosure. The transporting device 10 includes a storage unit 11, a cassette 12, a robot arm 13, a moving mechanism 14, and a connector unit driving unit 20. The storage unit 11 stores the cassette 12 and the robot arm 13. An opening 11a is formed in a side wall of the storage unit 11 for carrying in and out consumable parts. The opening 11a is opened and closed by a gate valve G1. The opening 11a is an example of a first opening. A lid 110 is provided on the storage unit 11, and the cassette 12 can be removed from the storage unit 11 by removing the lid 110.

[0014] The cassette 12 can accommodate both unused and used consumable parts 30. The cassette 12 is placed on a stage 121. A drive unit 122 raises and lowers the stage 121. In this embodiment, the unused consumable parts 30 are accommodated in an upper portion of the cassette 12, and the used consumable parts 30 are accommodated in a lower portion of the cassette 12. This prevents particles and the like that fall from the used consumable parts 30 from contaminating the unused consumable parts 30. The consumable parts 30 are an example of transported objects.

[0015] The robot arm 13 has an end effector 130 at the tip of the arm. The robot arm 13 uses the end effector 130 to remove used consumable parts 30 from the processing device through the opening 11a and store them in the cassette 12. The robot arm 13 also uses the end effector 130 to remove unused consumable parts 30 from the cassette 12 and carry them into the processing device through the opening 11a.

[0016] The connector unit driving section 20 controls the forward and backward movement of a connector unit 21 having a plurality of connectors. The plurality of connectors includes a connector for receiving a supply of power from a processing device, a connector for transmitting and receiving electrical signals to and from the processing device, etc. The plurality of connectors also includes a connector for receiving a supply of gas from the processing device to the transport device 10, a connector for exhausting gas from inside the transport device 10 to the processing device, etc.

[0017] A flexible cable for charging battery 151 with the power supplied from the processing device is connected to the connector for receiving power from the processing device. A flexible cable for transmitting electrical signals to control unit 150 is connected to the connector for transmitting and receiving electrical signals to and from the processing device. A flexible hose for sending the supplied gas to each section within the carrying device 10 is connected to the connector for receiving gas from the processing device. A flexible hose for sending gas within the carrying device 10 to the connector for exhausting gas from within the carrying device 10 to the processing device is connected to the connector.

[0018] When the transporting device 10 moves, the connector unit driving section 20 moves the connector unit 21 back toward the transporting device 10 from the surface 11c surrounding the opening 11a. The surface 11c surrounding the opening 11a is an example of an opening surface. On the other hand, when connecting the connector unit 21 to the connector unit of the processing device, the connector unit driving section 20 moves the connector unit 21 forward so as to be away from the transporting device 10 from the surface 11c.

[0019] Here, if the connector unit 21 protrudes from the surface 11c to a position farther from the conveying device 10 when the conveying device 10 moves, the connector unit 21 may come into contact with an obstacle on the movement path of the conveying device 10. If the connector unit 21 comes into contact with an obstacle on the movement path, the connector included in the connector unit 21 may be damaged or an electric leak may occur through the obstacle.

[0020] In contrast, in this embodiment, when the transporting device 10 moves, the connector unit driving section 20 moves the connector unit 21 away from the surface 11c toward the transporting device 10. This prevents damage to or leakage of electrical current from the connector included in the connector unit 21. It also prevents dust and other foreign matter from adhering to the connector included in the connector unit 21.

[0021] The moving mechanism 14 has a main body 140 and wheels 141. A power source, a steering mechanism, and the like are provided within the main body 140. The wheels 141 rotate using the power source within the main body 140, and move the transporting device 10 in a direction controlled by the steering mechanism within the main body 140. Note that the moving mechanism 14 may move the transporting device 10 by a method other than the wheels 141, such as a walking type, as long as it can move the transporting device 10.

[0022] The transporting device 10 includes a control unit 150, a battery 151, and a sensor 152. The sensor 152 senses the surroundings of the transporting device 10 and outputs the sensing results to the control unit 150. The control unit 150 has a storage unit and a processor. The processor is, for example, a central processing unit (CPU) or a digital signal processor (DSP), and controls each unit of the transporting device 10 by reading and executing a program from the storage unit. The control unit 150 moves the transporting device 10 by controlling the movement mechanism 14 using, for example, the sensing results from the sensor 152.

[0023] [Structure of Connector Unit Driving Section 20] Fig. 2 is a side view showing an example of the connector unit driving section 20, and Fig. 3 is a plan view showing an example of the connector unit driving section 20. The connector unit driving section 20 has a connector unit 21, a guide shaft 22, a bearing 23, a spring 24, and a driving section 25. The connector unit 21 has a plurality of positioning pins 210 and a plurality of connectors 211, as shown in Fig. 4, for example. The connector unit 21 is an example of a first connector unit, and the positioning pin 210 is an example of a first positioning mechanism.

[0024] Each positioning pin 210 is inserted into a positioning hole provided in the connector unit on the processing device side, and the connector unit 21 is aligned with the connector unit on the processing device side.

[0025] The plurality of connectors 211 includes, for example, a connector for receiving power from the processing device, and also includes at least one of a connector for transmitting and receiving electrical signals to and from the processing device, a connector for receiving gas from the processing device into the accommodation unit 11, and a connector for exhausting gas from the accommodation unit 11 to the processing device.

[0026] A connector for receiving power from the processing device is an example of a first connector, a connector for transmitting and receiving electrical signals to and from the processing device is an example of a second connector, a connector for receiving gas from the processing device to the transport device 10 is an example of a third connector, and a connector for exhausting gas from within the transport device 10 to the processing device is an example of a fourth connector. The processing device is an example of an external device.

[0027] A plate-like member 212 is provided at the bottom of the connector unit 21. The plate-like member 212 is supported by a support portion 26. The support portion 26 supports the connector unit 21 via the plate-like member 212 so that the connector unit 21 can move in the up and down direction. The support portion 26 is, for example, a ball plunger.

[0028] Two guide shafts 22 are connected to the connector unit 21. The two guide shafts 22 are connected by a connecting portion 221. The two guide shafts 22 are inserted into through holes formed in a bearing 23. A spring 24 is disposed between the bearing 23 and the connecting portion 221. The repulsive force of the spring 24 biases the bearing 23 and the connecting portion 221 in a direction that moves them apart. The bearing 23 is provided with a stopper 230 that prevents the connecting portion 221 and the bearing 23 from coming too close.

[0029] The driving unit 25 drives the cylinder 250. When the driving unit 25 pushes out the cylinder 250, the cylinder 250 pushes out the connecting portion 221 toward the bearing 23. This pushes out the connector unit 21 via the guide shaft 22. When the driving unit 25 pulls back the cylinder 250, the repulsive force of the spring 24 moves the connecting portion 221 in a direction away from the bearing 23, and the connector unit 21 is pulled back via the guide shaft 22.

[0030] The inner diameter of the through hole of the bearing 23 is larger than the outer diameter of the guide shaft 22. The guide shaft 22 is provided with a tapered guide 220, which is inserted into the through hole of the bearing 23 when the connector unit 21 is pulled back, filling the gap between the through hole of the bearing 23 and the guide shaft 22. This makes it possible to suppress rattling between the bearing 23 and the guide shaft 22 while the transport device 10 is moving.

[0031] When the drive unit 25 pushes out the cylinder 250 to push out the connector unit 21, the tapered guide 220 moves away from the through hole of the bearing 23, as shown in Figures 5 and 6. The gap between the through hole of the bearing 23 and the guide shaft 22 allows the connector unit 21 to be displaced in a direction intersecting the guide shaft 22. This allows the positioning pins 210 of the connector unit 21 to be inserted into the positioning holes of the connector unit of the processing device, even if the positions of the connector unit 21 and the connector unit of the processing device are slightly misaligned. This makes it possible to easily connect the connector unit 21 and the connector unit of the processing device.

[0032] [Configuration of Processing Apparatus 40] Figure 7 illustrates an example of the processing apparatus 40. The processing apparatus 40 includes a plasma processing chamber 410, a gas supply 420, a power supply 430, and an exhaust system 440. The processing apparatus 40 also includes a substrate support 411 and a gas inlet. The gas inlet is configured to introduce at least one process gas into the plasma processing chamber 410. The gas inlet includes a showerhead 413. The substrate support 411 is disposed within the plasma processing chamber 410. The showerhead 413 is disposed above the substrate support 411. In one embodiment, the showerhead 413 forms at least a portion of the ceiling of the plasma processing chamber 410. The plasma processing chamber 410 has a plasma processing space 410s defined by the showerhead 413, a sidewall 410e of the plasma processing chamber 410, and the substrate support 411.

[0033] The plasma processing chamber 410 has at least one gas supply port for supplying at least one processing gas to the plasma processing space 410s and at least one gas exhaust port for exhausting gas from the plasma processing space. The plasma processing chamber 410 is grounded. The showerhead 413 and the substrate support 411 are electrically insulated from the housing of the plasma processing chamber 410. An opening 410a is formed in the sidewall 410e of the plasma processing chamber 410, through which consumable parts are loaded into and unloaded from the plasma processing chamber 410. The sidewall 410e of the plasma processing chamber 410 also has another opening 410g, separate from the opening 410a, that is used to load and unload a substrate W into and from the plasma processing chamber 410 via a vacuum transfer chamber (not shown). The opening 410a is opened and closed by a gate valve G2. The opening 410g is opened and closed by a gate valve G3. An O-ring 410d is arranged on a surface 410c surrounding the opening 410a so as to surround the opening 410a. A connector unit 43 including a connector for supplying power and the like to the transport device 10 is provided below the opening 410a. The connector unit 43 is provided with a positioning mechanism that engages with a positioning pin 210 provided on the connector unit 21 of the transport device 10. The opening 410a is an example of a second opening, the connector unit 43 is an example of a second connector unit, and the positioning mechanism provided on the connector unit 43 is an example of a second positioning mechanism.

[0034] The substrate support portion 411 includes a main body portion 4111 and a ring assembly 4112. The main body portion 4111 has a central region 4111a for supporting a substrate W and an annular region 4111b for supporting the ring assembly 4112. A wafer is an example of a substrate W. The annular region 4111b of the main body portion 4111 surrounds the central region 4111a of the main body portion 4111 in a plan view. The substrate W is disposed on the central region 4111a of the main body portion 4111, and the ring assembly 4112 is disposed on the annular region 4111b of the main body portion 4111 so as to surround the substrate W on the central region 4111a of the main body portion 4111. Therefore, the central region 4111a is also called a substrate support surface for supporting the substrate W, and the annular region 4111b is also called a ring support surface for supporting the ring assembly 4112.

[0035] In one embodiment, the main body 4111 includes a base 41110 and an electrostatic chuck 41111. The base 41110 includes a conductive member. The conductive member of the base 41110 can function as a lower electrode. The electrostatic chuck 41111 is disposed on the base 41110. The electrostatic chuck 41111 includes a ceramic member 41111a and an electrostatic electrode 41111b disposed within the ceramic member 41111a. The ceramic member 41111a has a central region 4111a. In one embodiment, the ceramic member 41111a also has an annular region 4111b. Note that another member surrounding the electrostatic chuck 41111, such as an annular electrostatic chuck or an annular insulating member, may also have the annular region 4111b. In this case, the ring assembly 4112 may be disposed on the annular electrostatic chuck or the annular insulating member, or may be disposed on both the electrostatic chuck 41111 and the annular insulating member. Furthermore, at least one RF / DC electrode coupled to an RF (Radio Frequency) power supply 431 and / or a DC (Direct Current) power supply 432 (described later) may be disposed within the ceramic member 41111a. In this case, the at least one RF / DC electrode functions as a lower electrode. When a bias RF signal and / or a DC signal (described later) is supplied to the at least one RF / DC electrode, the RF / DC electrode is also called a bias electrode. Note that the conductive member of the base 41110 and the at least one RF / DC electrode may function as multiple lower electrodes. Furthermore, the electrostatic electrode 41111b may function as the lower electrode. Therefore, the substrate support 411 includes at least one lower electrode.

[0036] The ring assembly 4112 includes one or more annular members. In one embodiment, the one or more annular members include one or more edge rings and at least one cover ring. The edge rings are formed of a conductive or insulating material, and the cover rings are formed of an insulating material.

[0037] The substrate support 411 may also include a temperature adjustment module configured to adjust at least one of the electrostatic chuck 41111, the ring assembly 4112, and the substrate to a target temperature. The temperature adjustment module may include a heater, a heat transfer medium, a flow passage 41110a, or a combination thereof. A heat transfer fluid such as brine or gas flows through the flow passage 41110a. In one embodiment, the flow passage 41110a is formed in the base 41110, and one or more heaters are disposed in the ceramic member 41111a of the electrostatic chuck 41111. The substrate support 411 may also include a heat transfer gas supply configured to supply a heat transfer gas to a gap between the back surface of the substrate W and the central region 4111a.

[0038] Through holes for passing lift pins 44 are formed in the bottom of the plasma processing chamber 410 and the main body 4111 of the substrate support 411. The lift pins 44 are raised and lowered by a drive unit 45 when replacing the ring assembly 4112. This allows the used ring assembly 4112 to be handed over to the robot arm 13 of the transport device 10 and removed from the plasma processing chamber 410. Also, the unused ring assembly 4112 that has been brought into the plasma processing chamber 410 can be received from the robot arm 13 and placed on the electrostatic chuck 41111.

[0039] The shower head 413 is configured to introduce at least one process gas from the gas supply unit 420 into the plasma processing space 410s. The shower head 413 has at least one gas supply port 413a, at least one gas diffusion chamber 413b, and multiple gas inlets 413c. The process gas supplied to the gas supply port 413a passes through the gas diffusion chamber 413b and is introduced into the plasma processing space 410s from the multiple gas inlets 413c. The shower head 413 also includes at least one upper electrode. In addition to the shower head 413, the gas inlet may also include one or more side gas injectors (SGIs) attached to one or more openings formed in the sidewall 410e.

[0040] The gas supply 420 may include at least one gas source 421 and at least one flow controller 422. In one embodiment, the gas supply 420 is configured to supply at least one process gas from a corresponding gas source 421 through a corresponding flow controller 422 to the showerhead 413. Each flow controller 422 may include, for example, a mass flow controller or a pressure-controlled flow controller. Additionally, the gas supply 420 may include one or more flow modulation devices to modulate or pulse the flow rate of the at least one process gas.

[0041] The power source 430 includes an RF power source 431 coupled to the plasma processing chamber 410 via at least one impedance matching circuit. The RF power source 431 is configured to supply at least one RF signal (RF power) to at least one lower electrode and / or at least one upper electrode. This generates a plasma from at least one process gas supplied to the plasma processing space 410s. Therefore, the RF power source 431 can function as at least a part of a plasma generating unit configured to generate a plasma from one or more process gases in the plasma processing chamber 410s. In addition, by supplying a bias RF signal to the at least one lower electrode, a bias potential is generated on the substrate W, thereby attracting ion components in the formed plasma to the substrate W.

[0042] In one embodiment, the RF power supply 431 includes a first RF generator 431a and a second RF generator 431b. The first RF generator 431a is coupled to at least one lower electrode and / or at least one upper electrode via at least one impedance matching circuit and is configured to generate a source RF signal (source RF power) for plasma generation. In one embodiment, the source RF signal has a frequency in the range of 10 MHz to 150 MHz. In one embodiment, the first RF generator 431a may be configured to generate multiple source RF signals having different frequencies. The generated one or more source RF signals are supplied to at least one lower electrode and / or at least one upper electrode.

[0043] The second RF generator 431b is coupled to at least one lower electrode via at least one impedance matching circuit and is configured to generate a bias RF signal (bias RF power). The frequency of the bias RF signal may be the same as or different from the frequency of the source RF signal. In one embodiment, the bias RF signal has a frequency lower than the frequency of the source RF signal. In one embodiment, the bias RF signal has a frequency in the range of 100 kHz to 60 MHz. In one embodiment, the second RF generator 431b may be configured to generate multiple bias RF signals having different frequencies. The generated one or more bias RF signals are supplied to at least one lower electrode. In various embodiments, at least one of the source RF signal and the bias RF signal may be pulsed.

[0044] The power supply 430 may also include a DC power supply 432 coupled to the plasma processing chamber 410. The DC power supply 432 includes a first DC generator 432a and a second DC generator 432b. In one embodiment, the first DC generator 432a is connected to the at least one lower electrode and configured to generate a first DC signal. The generated first bias DC signal is applied to the at least one lower electrode. In one embodiment, the second DC generator 432b is connected to the at least one upper electrode and configured to generate a second DC signal. The generated second DC signal is applied to the at least one upper electrode.

[0045] In various embodiments, at least one of the first and second DC signals may be pulsed. In this case, a sequence of voltage pulses is applied to at least one lower electrode and / or at least one upper electrode. The voltage pulses may have a rectangular, trapezoidal, triangular, or combination thereof pulse waveform. In one embodiment, a waveform generator for generating the sequence of voltage pulses from the DC signal is connected between the first DC generator 432a and at least one lower electrode. Thus, the first DC generator 432a and the waveform generator constitute a voltage pulse generator. When the second DC generator 432b and the waveform generator constitute a voltage pulse generator, the voltage pulse generator is connected to at least one upper electrode. The voltage pulses may have either positive or negative polarity. Furthermore, the sequence of voltage pulses may include one or more positive voltage pulses and one or more negative voltage pulses within one period. The first and second DC generating units 432a and 432b may be provided in addition to the RF power supply 431, or the first DC generating unit 432a may be provided instead of the second RF generating unit 431b.

[0046] The exhaust system 440 may be connected to, for example, a gas exhaust port 410 f provided at the bottom of the plasma processing chamber 410. The exhaust system 440 may include a pressure regulating valve and a vacuum pump. The pressure in the plasma processing space 410 s is regulated by the pressure regulating valve. The vacuum pump may include a turbomolecular pump, a dry pump, or a combination thereof.

[0047] The control unit 41 processes computer-executable instructions that cause the processing device 40 to perform the various steps described in this disclosure. The control unit 41 may be configured to control each element of the processing device 40 to perform the various steps described herein. In one embodiment, part or all of the control unit 41 may be included in the processing device 40. The control unit 41 may include a processing unit 41a1, a storage unit 41a2, and a communication interface 41a3. The control unit 41 is realized, for example, by a computer 41a. The processing unit 41a1 may be configured to read a program from the storage unit 41a2 and execute the read program to perform various control operations. This program may be stored in the storage unit 41a2 in advance or may be acquired via a medium when needed. The acquired program is stored in the storage unit 41a2 and read from the storage unit 41a2 by the processing unit 41a1 and executed. The medium may be various storage media readable by the computer 41a, or may be a communication line connected to the communication interface 41a3. The processing unit 41a1 may be a CPU. The storage unit 41a2 may include a random access memory (RAM), a read only memory (ROM), a hard disk drive (HDD), a solid state drive (SSD), or a combination thereof. The communication interface 41a3 may communicate with the processing device 40 via a communication line such as a local area network (LAN).

[0048] [Transportation Method] Figures 8 to 10 are flowcharts showing an example of a transportation method. The transportation method illustrated in Figures 8 to 10 is realized by the control unit 150 controlling each part of the transportation device 10. An example of the transportation method will be described below with reference to Figures 11 to 19. The transportation method illustrated in Figures 8 to 10 is an example of a connection method.

[0049] First, the transporting device 10 is moved by the moving mechanism 14 to the vicinity of the processing device 40 (step S100). Step S100 is an example of process (a). As a result, as shown in FIG. 11 , for example, the transporting device 10 moves to the vicinity of the processing device 40, and the surface 11c around the opening 11a of the transporting device 10 faces the surface 410c around the opening 410a of the processing device 40.

[0050] Next, the connector unit driving section 20 of the transporting device 10 advances the connector unit 21 (step S101). Step S101 is an example of process (b). In step S101, as shown in FIG. 12 , for example, the connector unit driving section 20 advances the connector unit 21 by using the driving section 25 so that the connector unit 21 approaches the connector unit 43 of the processing device 40, and connects the connector unit 21 and the connector unit 43.

[0051] Next, it is determined whether the connector unit 21 is properly connected (step S102). In step S102, for example, the control unit 150 determines whether the load on the drive unit 25 is within a normal range. Furthermore, for example, the control unit 150 determines whether an electrical signal indicating that the connector unit 21 is properly connected has been received from the processing device 40 via the connector 211 of the connector unit 21. For example, a sensor (not shown) is provided in the connector unit 43 of the processing device 40. When the sensor outputs an electrical signal indicating that the connector unit 21 is properly connected, the control unit 41 of the processing device 40 transmits an electrical signal indicating that the connector unit 21 is properly connected to the transport device 10 via the connector unit 43 and the connector unit 21.

[0052] If the connector unit 21 is not properly connected (step S102: No), the connector unit driving section 20 drives the driving section 25 to move the connector unit 21 backward. The process of properly connecting the connector unit 21 is an example of process (c). Then, the control section 150 controls the moving mechanism 14 to readjust the position of the transport device 10 relative to the processing device 40 (step S103).

[0053] In step S102, it is determined that the connector unit 21 is not connected properly, for example, if the load on the drive unit 25 is not within a normal range, or if an electrical signal indicating that the connector unit 21 is connected properly is not received from the processing device 40. Note that in step S102, if it is determined that the connector unit 21 is not connected properly a predetermined number of times or more, an error is notified to the manager of the transporting device 10, and the transporting method shown in this flowchart ends.

[0054] If the connector unit 21 is connected normally (step S102: Yes), power supply from the processing device 40 to the transporting device 10 begins via the connector unit 21 (step S104). Then, evacuation of the storage unit 11 begins via the connector unit 21 (step S105). In step S105, the control unit 150 of the transporting device 10 sends an electrical signal to the control unit 41 of the processing device 40 via the connector unit 21 and the connector unit 43 to instruct the control unit 41 to evacuation the storage unit 11 using the exhaust system 440. This starts evacuation of the storage unit 11. Evacuation of the storage unit 11 begins via the flexible hose, connector unit 21, connector unit 43, and exhaust system 440 connected to the storage unit 11.

[0055] Next, the driving unit 25 moves the cylinder 250 backward (step S106). In step S106, the driving unit 25 moves the cylinder 250 backward, and thereby the cylinder 250 and the connecting unit 221 are separated from each other, as shown in FIG.

[0056] Next, the transporting device 10 is moved by the moving mechanism 14 so as to approach the processing device 40 (step S107). Step S107 is an example of process (d). In step S107, the transporting device 10 is moved so as to approach the processing device 40. As a result, for example, as shown in FIG. 14 , the surface 11c around the opening 11a of the transporting device 10 and the surface 410c around the opening 410a of the processing device 40 are connected via the O-ring 410d.

[0057] Next, it is determined whether the opening 11a of the transporting device 10 and the opening 410a of the processing device 40 are normally connected (step S108). In step S108, for example, the control unit 150 determines whether an electrical signal indicating that the opening 11a of the transporting device 10 and the opening 410a of the processing device 40 are normally connected is received from the processing device 40 via the connector 211 of the connector unit 21. For example, a sensor (not shown) is provided on the surface 410c surrounding the opening 410a of the processing device 40. When the sensor outputs an electrical signal indicating that the connection is normal, the control unit 41 of the processing device 40 transmits an electrical signal indicating that the opening 11a of the transporting device 10 and the opening 410a of the processing device 40 are normally connected to the transporting device 10 via the connector unit.

[0058] If it is determined that the opening 11a of the carrying device 10 and the opening 410a of the processing device 40 are not normally connected (step S108: No), the moving mechanism 14 moves the carrying device 10 away from the processing device 40 (step S109). Then, the moving mechanism 14 adjusts the position of the carrying device 10 relative to the processing device 40, and the process shown in step S107 is executed again.

[0059] On the other hand, if it is determined that the opening 11a of the conveying device 10 and the opening 410a of the processing device 40 are normally connected (step S108: Yes), it is determined whether the pressure inside the storage unit 11 is normal (step S110). The gas inside the storage unit 11 is exhausted by the exhaust system 440 of the processing device 40 via the connector unit 21 and the connector unit 43, and a pressure sensor is provided in the piping between the connector unit 43 and the exhaust system 440. The control unit 41 of the processing device 40 transmits the measurement value of the pressure sensor to the conveying device 10 via the connector unit 43 and the connector unit 21. In step S110, for example, it is determined whether the control unit 150 has received an electrical signal from the processing device 40 indicating that the pressure inside the storage unit 11 has fallen below a predetermined pressure within a predetermined time after the start of evacuation of the storage unit 11 in step S105.

[0060] If the pressure in the storage section 11 is not normal (step S110: No), an error is notified to the manager of the transporting device 10 or the like (step S111), and the transporting method shown in this flowchart ends.

[0061] On the other hand, if the pressure in the accommodation unit 11 is normal (step S110: Yes), evacuation of the space between the gate valves is started (step S112). In step S112, the control unit 150 of the transporting device 10 sends an electrical signal to the control unit 41 of the processing device 40 via the connector units 21 and 43 to instruct the control unit 41 to use the exhaust system 440 to evacuation the space between the gate valves. As a result, as shown in FIG. 15 , for example, the exhaust system 440 starts exhausting gas from the space 60 between the gate valve G1 of the transporting device 10 and the gate valve G2 of the processing device 40 via the connector units 21 and 43.

[0062] Next, it is determined whether the pressure in the space between the gate valves is normal (step S113). A pressure sensor P is provided in the piping between the connector unit 43 and the exhaust system 440, as shown in FIG. 15, for example. In step S113, the control unit 41 of the processing device 40 transmits the measurement value of the pressure sensor P to the transport device 10 via the connector unit 43 and the connector unit 21. In step S113, for example, the control unit 150 determines whether the pressure in the space 60 between the gate valves G1 and G2 has become equal to or lower than a predetermined pressure within a predetermined time after the start of evacuation of the space 60 between the gate valves G1 and G2 in step S112.

[0063] If the pressure in the space 60 between the gate valves is not normal (step S113: No), the evacuation of the space 60 between the gate valves is stopped (step S114), and the process shown in step S103 is executed. Note that, if it is determined in step S113 that the pressure in the space 60 between the gate valves is not normal a predetermined number of times or more, an error is notified to the manager of the transporting device 10, and the transporting method shown in this flowchart ends.

[0064] On the other hand, if the pressure in the space 60 between the gate valves is normal (step S113: Yes (see FIG. 9 )), the space 60 between the gate valves is purged (step S115). In step S115, as shown in FIG. 15 , for example, an inert gas such as nitrogen gas is supplied from the gas supply unit 420 via the connector unit 43 and the connector unit 21 into the space 60 between the gate valves, thereby purging the space 60. Note that the purging of the space 60 may be performed by alternately repeating the supply of the inert gas into the space 60 and the evacuation of the space 60 multiple times. This allows particles, moisture, and the like in the space 60 between the gate valves to be efficiently removed.

[0065] Next, it is determined whether the difference between the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the space 60 between the gate valves is within a predetermined value (step S116). In step S116, it is determined whether the difference between the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the space 60 between the gate valves is within a predetermined value within a predetermined time period after the start of evacuation of the accommodation unit 11 in step S105. Also in step S116, the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the space 60 between the gate valves are measured by pressure sensors provided in the processing device 40. Then, the control unit 41 of the processing device 40 transmits electrical signals indicating the measurement results to the control unit 150 of the transporting device 10 via the connector units 43 and 21. Based on the received measurement results, the control unit 150 of the transporting device 10 determines whether the difference between the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the space 60 between the gate valves is within a predetermined value.

[0066] If the difference between the pressure in the accommodation section 11 of the transporting device 10 and the pressure in the space 60 between the gate valves is greater than the predetermined value (step S116: No), the process shown in step S111 is executed.

[0067] On the other hand, if the difference between the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the space 60 between the gate valves is equal to or less than the predetermined value (step S116: Yes), the gate valve G1 of the transporting device 10 is opened (step S117). Then, it is determined whether the difference between the pressure in the accommodation unit 11 of the transporting device 10 and the pressure in the plasma processing chamber 410 of the processing device 40 is equal to or less than the predetermined value (step S118). In step S118, the pressure in the plasma processing chamber 410 is measured by a pressure sensor provided in the processing device 40.

[0068] If the difference between the pressure inside the accommodation unit 11 of the transporting device 10 and the pressure inside the plasma processing chamber 410 of the processing device 40 is greater than the predetermined value (step S118: No), the process shown in step S111 is executed.

[0069] On the other hand, if the difference between the pressure in the accommodation unit 11 of the transport device 10 and the pressure in the plasma processing chamber 410 of the processing device 40 is equal to or less than the predetermined value (step S118: Yes), the gate valve G2 of the processing device 40 is opened (step S119). Then, as shown in Fig. 16, for example, the robot arm 13 in the accommodation unit 11 replaces the consumable part (ring assembly 4112 in the example of Fig. 16) (step S120).

[0070] After the replacement of the consumable parts is completed, the gate valve G1 of the transporting device 10 and the gate valve G2 of the processing device 40 are closed (step S121). Then, the evacuation of the space 60 between the gate valves is stopped (step S122). Then, the space 60 between the gate valves is purged (step S123). In step S123, similar to step S115, the supply of the inert gas into the space 60 and the evacuation of the space 60 may be alternately repeated multiple times.

[0071] Next, it is determined whether the pressure in space 60 between the gate valves has reached atmospheric pressure and the concentration of the residual gas in space 60 has fallen below a predetermined value (step S124). A sensor for measuring the concentration of the predetermined gas is provided in the piping between connector unit 43 and exhaust system 440. Control unit 41 of processing device 40 transmits an electrical signal indicating the measurement value of the sensor to conveying device 10 via connector unit 43 and connector unit 21. In step S124, it is determined based on the measurement value received from processing device 40 whether the pressure in space 60 between the gate valves has reached atmospheric pressure and the concentration of the residual gas in space 60 has fallen below a predetermined value.

[0072] If the pressure in the space 60 between the gate valves has not reached atmospheric pressure or the concentration of residual gas in the space 60 is equal to or greater than a predetermined value (step S124: No), the process shown in step S123 is executed again.

[0073] When the pressure in the space 60 between the gate valves reaches atmospheric pressure and the concentration of residual gas in the space 60 becomes less than a predetermined value (step S124: Yes), the driving unit 25 advances the cylinder 250 (step S125 (see FIG. 10)). As a result, the cylinder 250 comes into contact with the connecting unit 221, as shown in FIG. 17, for example.

[0074] Next, the power supply to the transporting device 10 is stopped, and the lock between the connector unit 21 and the connector unit 43 is released (step S126).Then, the transporting device 10 is moved away from the processing device 40 by the moving mechanism 14 (step S127).

[0075] Here, if the connector unit 21 and the connector unit 43 are fixed together, the connector unit 21 and the connector unit 43 may not separate even if the lock between the connector unit 21 and the connector unit 43 is released. In that case, even if the transport device 10 moves away from the processing device 40, the connector unit 21 and the connector unit 43 may remain in contact, as shown in FIG. 18 , for example.

[0076] In such a case, as the transporting device 10 moves away from the processing device 40, the connecting portion 221 and the bearing 23 move closer to each other, as shown in Fig. 19. However, the distance between the connecting portion 221 and the bearing 23 is restricted by the stopper 230 and does not become less than a predetermined distance. Therefore, as the transporting device 10 moves further away from the processing device 40, the connector unit 21 can be separated from the connector unit 43.

[0077] In step S127, the driving unit 25 advances the cylinder 250 in accordance with the movement of the connecting unit 221. As a result, when the connector unit 21 and the connector unit 43 are separated, the connecting unit 221 and the bearing 23 are forcefully separated by the repulsive force of the spring 24, which prevents the cylinder 250 and the connecting unit 221 from colliding with each other.

[0078] Next, the drive unit 25 retracts the cylinder 250 to move the connector unit 21 back to the initial position (step S128). Then, the movement mechanism 14 moves the transport device 10 back to its original position (step S129), and the transport method shown in this flowchart ends.

[0079] [Traveling speed of transport device 10] Figure 20 is a diagram showing an example of the relationship between the traveling speed of the transport device 10 and the resistance to climbing over a step. For example, as shown in Figure 20, when the traveling speed of the transport device 10 is low, the resistance to climbing over a step increases, making it difficult to climb over a step. When the traveling speed of the transport device 10 increases, the resistance to climbing over a step decreases, making it easier to climb over a step. The resistance to climbing over a step is preferably 100 N or less. Therefore, the traveling speed of the transport device 10 is preferably 10 m per minute or more.

[0080] FIG. 21 illustrates an example of the relationship between the traveling speed of the transporting device 10 and the maximum acceleration amplitude. For example, as shown in FIG. 21 , when the traveling speed of the transporting device 10 is high, the maximum acceleration amplitude in the lateral sway direction relative to the traveling direction becomes large, which may cause consumable parts to bounce around inside the cassette 12 during traveling. If consumable parts bounce around inside the cassette 12 during traveling, the consumable parts may become misaligned or damaged. On the other hand, when the traveling speed of the transporting device 10 is low, the maximum acceleration amplitude in the lateral sway direction becomes small, which can prevent consumable parts from bouncing around inside the cassette 12 during traveling. To prevent consumable parts from bouncing around inside the cassette 12 during traveling, the maximum acceleration amplitude in the lateral sway direction is preferably 0.2 G or less. Therefore, the traveling speed of the transporting device 10 is preferably 15 m / min or less. Therefore, to ensure that the step-crossing resistance is 100 N or less and the maximum acceleration amplitude in the lateral sway direction is 0.2 G or less, the traveling speed of the transporting device 10 is preferably 10 m / min or more and 15 m / min or less.

[0081] The above describes an embodiment. As described above, the transport device (transport device 10) in this embodiment is a transport device that transports transported objects (consumable parts 30) and includes a storage unit (storage unit 11), an opening (opening 11a), a gate valve (gate valve G1), a robot arm (robot arm 13), a first connector unit (connector unit 21), a drive unit (drive unit 25), and a movement mechanism (movement mechanism 14). The storage unit is configured to store the transported objects. The opening is configured to be connected to a processing device (processing device 40) that processes a substrate (substrate W). The gate valve opens and closes the opening. The robot arm is disposed within the storage unit, has an end effector (end effector 130) at its tip, and is configured to transport the transported objects between the processing device and the processing device via the opening using the end effector. The first connector unit includes a first connector (connector 211) for receiving power supply to the transport device from an external device provided outside the transport device. The drive unit is configured to move the first connector unit so as to approach the second connector unit (connector unit 43) of the external device when connecting the first connector unit to the second connector unit. The movement mechanism is configured to move the carrying device. This allows the carrying device to be made smaller.

[0082] Moreover, the transport device in the above-described embodiment includes a guide shaft (guide shaft 22) configured to be connected to the first connector unit, a bearing (bearing 23) having an inner diameter larger than the thickness of the guide shaft and configured to support the guide shaft by a through hole through which the guide shaft passes, and a support portion (support portion 26) configured to support the first connector unit so that it can move in the vertical direction. The drive portion moves the first connector unit via the guide shaft. In this way, the drive portion can move the first connector unit.

[0083] In the above-described embodiment, the first connector unit is provided with a first positioning mechanism that engages with a second positioning mechanism provided on the second connector unit, thereby facilitating alignment when connecting the first connector unit and the second connector unit.

[0084] In the above-described embodiment, the first connector unit includes at least one of a second connector (connector 211) for transmitting and receiving electrical signals to and from an external device, a third connector (connector 211) for receiving a supply of gas from the external device into the storage unit, and a fourth connector (connector 211) for exhausting gas from the storage unit to the external device. This allows multiple connectors to be connected together.

[0085] The transport device in the above embodiment also includes a sensor (sensor 152) configured to sense the surroundings of the transport device, and a control unit (control unit 150) configured to move the transport device by controlling the movement mechanism using the sensing results of the sensor, thereby enabling efficient replacement of consumable parts.

[0086] In the above embodiment, when the carrying device moves, the first connector unit retracts toward the carrying device from the opening surface (surface 11c) of the opening. This prevents damage to the connector of the connector unit 21 and electrical leakage. It also prevents dust and other foreign matter from adhering to the connector of the connector unit 21.

[0087] In the above-described embodiment, the transported object is a consumable part used in the processing equipment. In the above-described embodiment, the external device is the processing equipment. This allows the battery of the transport device 10 to be charged when replacing a consumable part of the processing equipment.

[0088] In the above embodiment, the moving mechanism moves the transporting device 10 at a speed of 10 meters per minute or more and 15 meters per minute or less, which makes it easier for the transporting device 10 to overcome steps and prevents consumable parts from bouncing around inside the cassette 12 while the transporting device 10 is moving.

[0089] Furthermore, the connection method in the above-described embodiment is a connection method in a conveying device, and includes steps (a), (b), (c), and (d). In step (a), the conveying device is moved to the vicinity of the processing device by the movement mechanism. In step (b), the drive unit is moved so that the first connector unit approaches the second connector unit of the external device. In step (c), the first connector unit and the second connector unit are connected. In step (d), the movement mechanism is used to move the conveying device to the vicinity of the processing device, and the first opening and the second opening are connected. This allows the conveying device to be made smaller.

[0090] [Others] The technology disclosed in the present application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0091] For example, in the above embodiment, the transporting device 10 transports consumable parts such as the ring assembly 4112 used in the processing device 40, but the objects transported by the transporting device 10 are not limited to consumable parts. The objects transported by the transporting device 10 may be substrates W before being processed by the processing device 40, substrates W after being processed by the processing device 40, etc.

[0092] Furthermore, in the above-described embodiment, the transport device 10 receives a supply of power and the like from the processing device 40 via the connector unit 21, but the disclosed technology is not limited to this. In another embodiment, the transport device 10 may receive a supply of power and the like from a supply device provided in a clean room or the like via the connector unit 21. The supply device is an example of an external device. The supply device is preferably provided near the processing device 40. This allows the transport device 10 to receive a supply of power and the like when replacing consumable parts of the processing device 40.

[0093] In the above-described embodiment, the transport device 10 autonomously travels using the movement mechanism 14, the control unit 150, and the sensor 152, but the disclosed technology is not limited to this. The transport device 10 may be moved by operation by a user. The movement mechanism 14 may be separable from the transport device 10. For example, the transport device 10 may be separable into a first part including the transport device 10, the opening 11a, the gate valve G1, the robot arm 13, the connector unit 21, and the drive unit 25, and a second part including the movement mechanism 14.

[0094] Furthermore, if the surface 11c of the transporting device 10 that is connected to the processing device 40 is scratched, when the opening 11a of the transporting device 10 and the opening 410a of the processing device 40 are connected, the sealing performance of the O-ring 410d will be reduced, as shown in Fig. 22, for example. Therefore, if the surface 11c of the transporting device 10 that is connected to the processing device 40 is scratched, it is necessary to replace the entire housing including the surface 11c. Replacing the entire housing including the surface 11c takes time.

[0095] 23 , for example, an annular member 111 may be provided on a surface 11c around the opening 11a of the carrying device 10. An O-ring 112 is disposed between the annular member 111 and the surface 11c, and the carrying device 10 and the annular member 111 are fixed together with a screw 113. Note that in the annular member 111, there is a gap between the screw 113 and a through-hole 114 into which the screw 113 is inserted, and the annular member 111 may be movable in a direction that crushes the O-ring 112.

[0096] When the opening 11a of the transport device 10 and the opening 410a of the processing device 40 are connected, the annular member 111 and the surface 410c of the processing device 40 approach each other so as to crush the O-ring 410d, as shown in Fig. 24. This allows the annular member 111 to be quickly replaced by removing the screw 113 even if the surface 115 of the annular member 111 is damaged.

[0097] 25, if the surface 11c of the storage unit 11 is inclined with respect to the surface 410c of the processing device 40, the O-ring 410d is not sufficiently crushed when the opening 11a of the transport device 10 and the opening 410a of the processing device 40 are connected. This may result in a decrease in the sealing performance of the O-ring 410d.

[0098] To avoid this, as shown in FIG. 26 , for example, an annular seal unit 116 may be disposed on the surface 11c surrounding the opening 11a of the conveying device 10. The seal unit 116 includes a plurality of annular members 111a-111c, a plurality of O-rings 112a-112c, and a plurality of screws 113a-113c. Hereinafter, the annular members 111a-111c will be referred to collectively without distinction as annular member 111, and the O-rings 112a-112c will be referred to collectively without distinction as O-ring 112. Furthermore, the screws 113a-113c will be referred to collectively without distinction as screws 113.

[0099] An O-ring 112a is disposed between the annular member 111a and the surface 11c, and the conveying device 10 and the annular member 111a are fixed together by a screw 113a. An O-ring 112b is disposed between the annular member 111b and the annular member 111a, and the annular member 111a and the annular member 111b are fixed together by a screw 113b. An O-ring 112c is disposed between the annular member 111c and the annular member 111b, and the annular member 111b and the annular member 111c are fixed together by a screw 113c. There are gaps between the screw 113a and the through-hole of the annular member 111a into which the screw 113a is inserted, between the screw 113a and the through-hole of the annular member 111b into which the screw 113b is inserted, and between the screw 113a and the through-hole of the annular member 111c into which the screw 113c is inserted, and between the screw 113c and the through-hole of the annular member 111c into which the screw 113c is inserted.

[0100] When the opening 11a of the transport device 10 and the opening 410a of the processing device 40 are connected, the annular member 111c and the surface 410c of the processing device 40 approach each other so as to crush the O-ring 410d, as shown in Fig. 27, for example. As a result, even if the surface 115 of the annular member 111c is inclined with respect to the surface 410c of the processing device 40, the O-ring 410d can be sufficiently crushed, as shown in Fig. 27, for example, and a decrease in the sealing performance of the O-ring 410d can be suppressed.

[0101] It should be noted that the disclosed embodiments are illustrative in all respects and should not be considered limiting. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims.

[0102] Furthermore, the following supplementary notes are disclosed regarding the above-described embodiment.

[0103] (Supplementary Note 1) A transport device for transporting an object to be transported, comprising: a storage section configured to store the object to be transported; an opening configured to be connected to a processing device for processing a substrate; a gate valve configured to open and close the opening; a robot arm disposed within the storage section, having an end effector at its tip, and configured to transport the object to and from the processing device using the end effector via the opening; a first connector unit including a first connector for receiving power supply to the transport device from an external device provided outside the transport device; a drive section configured to advance the first connector unit so as to approach the second connector unit when connecting the first connector unit to a second connector unit of the external device; and a movement mechanism configured to move the transport device. (Supplementary Note 2) The transporting device according to Supplementary Note 1, comprising: a guide shaft configured to be connected to the first connector unit; a bearing having an inner diameter larger than a thickness of the guide shaft and configured to support the guide shaft by a through hole through which the guide shaft passes; and a support portion configured to support the first connector unit so that it can move in an up and down direction, wherein the drive portion is configured to move the first connector unit via the guide shaft. (Supplementary Note 3) The transporting device according to Supplementary Note 1 or 2, wherein the first connector unit is provided with a first positioning mechanism that engages with a second positioning mechanism provided on the second connector unit. (Supplementary Note 4) The transporting device according to any one of Supplements 1 to 3, wherein the first connector unit includes at least one of: a second connector for transmitting and receiving electrical signals to and from the external device; a third connector for receiving a supply of gas from the external device to the inside of the storage unit; and a fourth connector for exhausting gas from the inside of the storage unit to the external device. (Supplementary Note 5) The conveying device according to any one of Supplementary Notes 1 to 4, further comprising: an O-ring provided along an outer periphery of the opening; and an annular member disposed along the O-ring.(Supplementary Note 6) The transporting device according to Supplementary Note 5, comprising a seal unit in which the O-ring and the annular member are connected in multiple stages. (Supplementary Note 7) The transporting device according to any one of Supplements 1 to 6, comprising: a sensor configured to sense the periphery of the transporting device; and a control unit configured to move the transporting device by controlling the movement mechanism using the sensing result of the sensor. (Supplementary Note 8) The transporting device according to any one of Supplements 1 to 7, separable into a first part including the storage unit, the opening, the gate valve, the robot arm, the first connector unit, and the drive unit, and a second part including the movement mechanism. (Supplementary Note 9) The transporting device according to any one of Supplements 1 to 8, wherein the first connector unit retracts toward the transporting device relative to the opening plane of the opening when the transporting device moves. (Supplementary Note 10) The transporting device according to any one of Supplements 1 to 9, wherein the transported object is a consumable part used in the processing device. (Supplementary Note 11) The transporting device according to any one of Supplements 1 to 10, wherein the external device is the processing device. (Supplementary Note 12) The conveying device according to any one of Supplementary Notes 1 to 11, wherein the movement mechanism is configured to move the conveying device at a speed of 10 meters per minute or more and 15 meters per minute or less.(Supplementary Note 13) A connection method for a transport device comprising: a storage section configured to store the transported object; a first opening configured to be connected to a second opening of a processing device that processes a substrate; a gate valve configured to open and close the first opening; a robot arm disposed in the storage section, having an end effector at a tip thereof, and configured to transport the transported object to and from the processing device using the end effector via the first opening; a first connector unit including a first connector for receiving power supply to the transport device from an external device provided outside the transport device; a drive section configured to move the first connector unit; and a movement mechanism configured to move the transport device, the method comprising: (a) a step of moving the transport device to the vicinity of the processing device by the movement mechanism; (b) a step of moving the first connector unit forward by the drive section so as to approach a second connector unit of the external device; and (c) a step of connecting the first connector unit and the second connector unit. (d) moving the transport device by the movement mechanism so as to approach the processing device, thereby connecting the first opening and the second opening.

[0104] G1, G2 Gate valve W Substrate 10 Conveying device 11 Storage section 11a Opening 11c Surface 111 Annular member 112 O-ring 113 Screw 114 Through hole 115 Surface 116 Seal unit 12 Cassette 13 Robot arm 14 Moving mechanism 150 Control unit 151 Battery 152 Sensor 20 Connector unit driving section 21 Connector unit 210 Positioning pin 211 Connector 212 Plate-shaped member 22 Guide shaft 220 Tapered guide 221 Connecting section 23 Bearing 230 Stopper 24 Spring 25 Driving section 250 Cylinder 26 Support section 30 Consumable part 40 Processing device 41 Control unit 410a Opening 410c Surface 410d O-ring 411 Substrate support 413: Shower head 420: Gas supply unit 43: Connector unit 430: Power supply 440: Exhaust system 44: Lift pin 45: Drive unit 60: Space

Claims

1. A transport device for transporting objects, A storage section configured to accommodate the transported object, An opening configured to be connected to a processing apparatus for processing substrates, A gate valve configured to open and close the aforementioned opening, A robotic arm is disposed within the housing section, has an end effector at its tip, and is configured to transport the object to be transported between itself and the processing device via the opening, using the end effector. A first connector unit including a first connector for receiving power to the transport device from an external device located outside the transport device, A drive unit configured to advance the first connector unit so that it approaches the second connector unit when connecting the first connector unit to the second connector unit of the external device, A moving mechanism configured to move the transport device, Control unit and Equipped with, Before the opening is connected to the processing apparatus, the control unit controls the drive unit to connect the first connector unit to the second connector unit of the transport device.

2. A guide shaft configured to be connected to the first connector unit, A bearing having an inner diameter larger than the thickness of the guide shaft and configured to support the guide shaft through a through-hole through which the guide shaft passes, Equipped with, The transport device according to claim 1, wherein the drive unit is configured to move the first connector unit via the guide shaft.

3. The transport device according to claim 2, further comprising a support portion configured to support the first connector unit so as to be movable in the vertical direction.

4. The transport device according to claim 1 or 2, wherein the first connector unit is provided with a first positioning mechanism which engages with a second positioning mechanism provided on the second connector unit.

5. The first connector unit described above is A second connector for transmitting and receiving electrical signals with the external device, A third connector for receiving gas from the external device into the housing, and The transport device according to claim 1, further comprising at least one of a fourth connector for exhausting gas from the containment to the external device.

6. An O-ring is provided along the outer circumference of the opening, An annular member arranged along the O-ring and The transport device according to claim 1, comprising:

7. The transport device according to claim 6, comprising a seal unit in which the O-ring and the annular member are connected in multiple stages.

8. A sensor configured to sense the surroundings of the transport device, A control unit is configured to move the transport device by controlling the movement mechanism using the sensing results from the aforementioned sensor. The transport device according to claim 1, comprising:

9. The first part includes the housing section, the opening, the gate valve, the robot arm, the first connector unit, and the drive unit, The transport device according to claim 1, which is separable from a second part including the moving mechanism.

10. The transport device according to claim 1, wherein the first connector unit is retracted toward the transport device side of the opening surface of the opening when the transport device moves.

11. The transport device according to claim 1, wherein the transported object is a consumable part used in the processing device.

12. The transport device according to claim 1, wherein the external device is the processing device.

13. The transport device according to claim 1, wherein the moving mechanism is configured to move the transport device at a speed of 10 m or more and 15 m or less per minute.

14. A storage section configured to accommodate an object to be transported, A first opening, which is configured to be connected to a second opening of a processing apparatus for processing a substrate, A gate valve configured to open and close the first opening, A robotic arm is disposed within the housing section, has an end effector at its tip, and is configured to transport the object to be transported between itself and the processing apparatus using the end effector through the first opening, A first connector unit including a first connector for receiving power to the transport device from an external device located outside the transport device, A drive unit configured to move the first connector unit, A moving mechanism configured to move the transport device and A connection method in a transport device comprising: (a) A step of moving the transport device to the vicinity of the processing device using the moving mechanism, (b) The step of using the drive unit to advance the first connector unit so that it approaches the second connector unit of the external device, (c) A step of connecting the first connector unit and the second connector unit, (d) A step of connecting the first opening and the second opening. Connection methods including

15. A processing apparatus for processing a substrate, A transport device for transporting objects to be transported Equipped with, The transport device is, A storage section configured to accommodate the transported object, An opening configured to be connected to the aforementioned processing apparatus, A gate valve configured to open and close the aforementioned opening, A robotic arm is disposed within the housing section, has an end effector at its tip, and is configured to transport the object to be transported between itself and the processing device via the opening, using the end effector. A first connector unit including a first connector for receiving power to the transport device from an external device located outside the transport device, A drive unit configured to advance the first connector unit so that it approaches the second connector unit when connecting the first connector unit to the second connector unit of the external device, A moving mechanism configured to move the transport device, Control unit and Equipped with, A processing system in which, before the opening is connected to the processing apparatus, the control unit controls the drive unit to connect the first connector unit to the second connector unit.