High efficiency krypton adsorption device and adsorption method

Abstract

The present invention relates to a high-efficiency krypton adsorption device and an adsorption method. According to one aspect of the present invention, a krypton adsorption device may be provided, comprising: a liquid nitrogen storage unit in which liquid nitrogen is stored; an air inlet tube into which air is introduced from the outside; a liquid nitrogen supply unit for supplying liquid nitrogen to the liquid nitrogen storage unit; a krypton collection unit disposed in the liquid nitrogen storage unit and adsorbing krypton contained in the air introduced into the interior through the air inlet tube; a sensing unit for detecting one or more of the temperature of the krypton collection unit and the amount of liquid nitrogen stored in the liquid nitrogen storage unit; and a controller for controlling the liquid nitrogen supply unit to supply the liquid nitrogen to the liquid nitrogen storage unit based on information detected by the sensing unit.

Description

Technology Field

[0001] The present invention relates to a high-efficiency krypton adsorption device and an adsorption method. Background Technology

[0002] Krypton (Kr) is a colorless, odorless inert gas present in the atmosphere at a concentration of 0.00011%, and trace amounts of krypton in the air are utilized in various industries. For example, krypton is used to manufacture LED lamps or krypton lasers, which are then used in the fabrication of semiconductor integrated circuits, microfabrication, and nuclear fusion research.

[0003] Technology for adsorbing krypton from the air is required for use in various industries, but krypton is not adsorbed well by adsorbents such as activated carbon at room temperature. Conventionally, to adsorb krypton, an inert gas, a method was used in which an adsorption module containing an adsorbent was heated to a low temperature, and air was flowed through the low-temperature adsorption module to increase the amount of krypton adsorbed.

[0004] However, conventional technology supplies liquid nitrogen to the Dürr housing the adsorption module to keep it at a low temperature, but since the liquid nitrogen vaporizes and is consumed, there is a problem in that the user must periodically replenish the liquid nitrogen in the Dürr.

[0005] To solve these problems, a method of cooling the adsorption module using electricity instead of liquid nitrogen is also being used. However, this electric cooling method can only cool down to -80℃, which is more than 100℃ higher than cooling using liquid nitrogen, so there is a problem of lower krypton adsorption efficiency. The problem to be solved

[0006] Embodiments of the present invention were invented against the background described above, and aim to provide a high-efficiency krypton adsorption device and adsorption method capable of automatically supplying liquid nitrogen to cool the adsorption unit and continuously adsorbing krypton by replacing one or more adsorption units. means of solving the problem

[0007] According to one aspect of the present invention, a krypton adsorption device may be provided, comprising: a liquid nitrogen storage unit in which liquid nitrogen is stored; an air inlet tube into which air is introduced from the outside; a liquid nitrogen supply unit for supplying liquid nitrogen to the liquid nitrogen storage unit; a krypton collection unit disposed in the liquid nitrogen storage unit and adsorbing krypton contained in the air introduced into the interior through the air inlet tube; a sensing unit for detecting one or more of the temperature of the krypton collection unit and the amount of liquid nitrogen stored in the liquid nitrogen storage unit; and a controller for controlling the liquid nitrogen supply unit to supply the liquid nitrogen to the liquid nitrogen storage unit based on information detected by the sensing unit.

[0008] In addition, a krypton adsorption device may be provided, wherein the sensing unit comprises a plurality of temperature sensing units that sense the temperature of the krypton collection unit.

[0009] Additionally, a krypton adsorption device may be provided, wherein the krypton collection unit comprises an adsorbent that adsorbs the krypton; and a cylinder that accommodates the adsorbent, and the plurality of temperature sensing units are arranged at different heights in the cylinder to measure the temperature of the cylinder.

[0010] In addition, a krypton adsorption device may be provided in which the krypton collection unit is provided in multiple units and the multiple krypton collection units are disposed in the liquid nitrogen storage unit.

[0011] Additionally, a krypton adsorption device may be provided, wherein the liquid nitrogen storage unit comprises a liquid nitrogen supply channel through which the liquid nitrogen is supplied; and a liquid nitrogen storage container in which the liquid nitrogen is stored, and the sensing unit comprises a weight sensing unit that detects the weight of the liquid nitrogen storage container.

[0012] Additionally, the controller may be provided with a krypton adsorption device that controls the liquid nitrogen supply unit so that the liquid nitrogen is supplied to the liquid nitrogen storage unit when the weight of the liquid nitrogen storage container detected by the weight detection unit is less than a preset threshold weight.

[0013] In addition, a krypton adsorption device may be provided, further comprising a replacement module for replacing the krypton collection unit in which the krypton has been adsorbed.

[0014] Additionally, a krypton adsorption device may be provided, wherein the replacement module comprises: a holder configured to be connectable to the krypton collection unit; a moving part for moving the holder; and a mounting part configured to mount the krypton collection unit and being at room temperature.

[0015] Additionally, a krypton adsorption device may be provided, wherein the controller controls the replacement module so that the krypton collection unit is moved to the liquid nitrogen storage unit when the krypton collection unit is mounted on the mounting unit and the temperature of the krypton collection unit is at room temperature.

[0016] Additionally, a krypton adsorption method performed by a krypton adsorption device may be provided, comprising: a liquid nitrogen supply step of receiving liquid nitrogen from a liquid nitrogen supply unit; a liquid nitrogen storage step of storing the liquid nitrogen in a liquid nitrogen storage unit; a liquid nitrogen supply confirmation step of confirming one or more of the temperature of a krypton collection unit that adsorbs krypton and the amount of liquid nitrogen stored in the liquid nitrogen storage unit; a control step of controlling the liquid nitrogen supply unit to supply the liquid nitrogen to the liquid nitrogen storage unit based on the information confirmed in the liquid nitrogen supply confirmation step; and a krypton adsorption step of adsorbing krypton contained in air.

[0017] Additionally, a krypton adsorption method may be provided, wherein the liquid nitrogen supply confirmation step comprises: a temperature sensing step for sensing the temperature of a krypton collection unit disposed in the liquid nitrogen storage unit; and a weight sensing step for sensing the weight of the liquid nitrogen storage unit.

[0018] Additionally, a krypton adsorption method may be provided, further comprising an adsorption unit replacement step in which a krypton collection unit in which krypton is adsorbed is replaced with a krypton collection unit in which the adsorbed krypton is desorbed and the krypton can be re-adsorbed.

[0019] Additionally, a krypton adsorption method may be provided, wherein the adsorption part replacement step comprises: an adsorption part connection step in which a replacement module for moving the krypton collection part is connected to the krypton collection part; an adsorption part movement step in which the krypton collection part moves together with the replacement module as it moves; an adsorption part mounting step in which the krypton collection part is mounted so that the temperature of the krypton collection part reaches room temperature; and an adsorption part replacement step in which the krypton collection part from which the krypton has been detached is replaced with the krypton collection part from which the krypton has been adsorbed. Effects of the invention

[0020] According to one embodiment of the present invention, there is an effect of automatically supplying liquid nitrogen to cool the krypton adsorption unit.

[0021] In addition, krypton can be continuously adsorbed by replacing the adsorption section capable of krypton adsorption with the adsorption section after krypton adsorption is completed. Brief explanation of the drawing

[0022] FIG. 1 is a conceptual diagram of a krypton adsorption device according to one embodiment of the present invention. Figure 2 is a cross-sectional view of the liquid nitrogen automatic supply module of the krypton adsorption device of Figure 1. FIG. 3 is a flowchart of a krypton adsorption method according to one embodiment of the present invention. Specific details for implementing the invention

[0023] Hereinafter, specific embodiments for implementing the technical concept of the present invention will be described in detail with reference to the drawings.

[0024] In addition, in describing the present invention, if it is determined that a detailed description of related known components or functions may obscure the essence of the invention, such detailed description is omitted.

[0025] Furthermore, when it is mentioned that one component is 'connected,' 'supplied,' or 'moved' to another component, it should be understood that while it may be directly connected, supplied, or moved to that other component, there may also be other components present in between.

[0026] The terms used in this specification are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0027] Furthermore, it should be noted in advance that expressions such as "upper side," "lower side," and "side" in this specification are described based on the drawings, and may be expressed differently if the orientation of the object changes. For the same reason, some components in the attached drawings may be exaggerated, omitted, or schematically depicted, and the size of each component does not entirely reflect its actual size.

[0028] Additionally, terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but such components are not limited by such terms. These terms are used solely for the purpose of distinguishing one component from another.

[0029] The meaning of "comprising" as used in the specification is to specify certain characteristics, regions, integers, steps, actions, elements, and / or components, and does not exclude the existence or addition of other specific characteristics, regions, integers, steps, actions, elements, components, and / or groups.

[0030] Hereinafter, the specific configuration of a krypton adsorption device (1) according to one embodiment of the present invention will be described with reference to the drawings.

[0031] Referring to FIGS. 1 and 2, a krypton adsorption device (1) according to one embodiment of the present invention can adsorb and separate krypton contained in the air. Such a krypton adsorption device (1) may include a liquid nitrogen automatic supply module (100) and a replacement module (200).

[0032] The liquid nitrogen automatic supply module (100) is connected to a liquid nitrogen generator and can receive liquid nitrogen from the liquid nitrogen generator, and can efficiently adsorb krypton by automatically supplying liquid nitrogen that has been vaporized and consumed. This liquid nitrogen automatic supply module (100) may include a krypton collection unit (110), a liquid nitrogen storage unit (120), a detection unit (130), and a controller (140).

[0033] The krypton collection unit (110) is placed in the liquid nitrogen storage unit (120) and can adsorb krypton contained in the air flowing from the outside into the inside through the air inlet tube (114). This krypton collection unit (110) can be cooled to an ultra-low temperature (approx. -196°C) by contacting liquid nitrogen. Additionally, the krypton collection unit (110) may be provided in multiple units. The krypton collection unit (110) may include a cylinder (111), an adsorbent (112), a valve unit (113), and an air inlet tube (114).

[0034] The cylinder (111) can provide a space for accommodating an adsorbent (112). This cylinder (111) can be extended in the vertical direction. Additionally, the cylinder (111) can have a circular cross-section. Multiple cylinders (111) may be provided. This cylinder (111) may be made of a material with high thermal conductivity.

[0035] The adsorbent (112) is placed inside the cylinder (111) to adsorb krypton. This adsorbent (112) may be made of a porous material. For example, it may be activated carbon. Additionally, the adsorbent (112) may be in contact with the air inlet tube (114).

[0036] The valve section (113) can regulate air flowing in and out from the outside. This valve section (113) may be positioned on the upper or lower side of the cylinder (111). Additionally, the valve section (113) may be provided in multiple units. The valve section (113) may include an air inlet valve (113A) and an air outlet valve (113B).

[0037] The air inlet valve (113A) can regulate the amount of air introduced from the outside. This air inlet valve (113A) can be positioned on the upper side of the cylinder (111). Additionally, the air inlet valve (113A) can be positioned on the upper side of the liquid nitrogen storage cover (121B).

[0038] The air discharge valve (113B) allows air introduced into the cylinder (111) from the air inlet valve (113A) to pass through the adsorbent (112) and be discharged. This air discharge valve (113B) can regulate the amount of air discharged from the cylinder (111) after krypton adsorption is completed. Additionally, the air discharge valve (113B) may be positioned on the upper side of the cylinder (111).

[0039] The air inlet tube (114) can provide a passage for air to flow from the outside into the cylinder (110). This air inlet tube (114) can be connected to an air flow meter (MFC, mass flow controller, not shown). Additionally, the air inlet tube (114) can be positioned to extend vertically from the center of the cylinder (111).

[0040] A liquid nitrogen storage unit (120) can receive liquid nitrogen and store the supplied liquid nitrogen. This liquid nitrogen storage unit (120) may include a liquid nitrogen storage container (121), a liquid nitrogen supply channel (122), and a liquid nitrogen supply unit (123).

[0041] A liquid nitrogen storage container (121) can store liquid nitrogen supplied from a liquid nitrogen supply device. This liquid nitrogen storage container (121) may include a liquid nitrogen storage housing (121A) and a liquid nitrogen storage cover (121B).

[0042] The liquid nitrogen storage housing (121A) can accommodate liquid nitrogen supplied from one or more krypton collection units (110) and liquid nitrogen generators. This liquid nitrogen storage housing (121A) can be detachably connected to a liquid nitrogen storage cover (121B). Additionally, the liquid nitrogen storage housing (121A) may be made of a material having cold resistance capable of withstanding the cryogenic temperature of liquid nitrogen. A weight sensing unit (132) may be connected to the lower side of the liquid nitrogen storage housing (121A).

[0043] The liquid nitrogen storage cover (121B) can cover the krypton collection unit (110) and liquid nitrogen placed in the liquid nitrogen storage housing (121A) so that they are not exposed to the outside. This liquid nitrogen storage cover (121B) can be detachably connected to the liquid nitrogen storage housing (121A). Additionally, the liquid nitrogen storage cover (121B) may have a groove formed therein so that an air inlet tube (114) can be engaged with the liquid nitrogen storage cover (121B) and exposed to the outside.

[0044] The liquid nitrogen supply channel (122) can provide a passage through which liquid nitrogen generated from a liquid nitrogen generator is supplied to a liquid nitrogen storage container (121). One end of the liquid nitrogen supply channel (122) may be connected to the liquid nitrogen generator, and the other end may be connected to the liquid nitrogen storage housing (121A). Additionally, the liquid nitrogen supply channel (122) may be connected to the upper side of the liquid nitrogen storage housing (121A). The liquid nitrogen supply channel (122) may be made of a material having cold resistance capable of withstanding the ultra-low temperature of liquid nitrogen.

[0045] The liquid nitrogen supply unit (123) can supply liquid nitrogen to the liquid nitrogen storage unit (120). One end of the liquid nitrogen supply unit (123) may be connected to a liquid nitrogen generator, and the other end may be connected to a liquid nitrogen supply channel (122). Additionally, the liquid nitrogen supply unit (123) may provide power for liquid nitrogen to flow into the liquid nitrogen storage unit (120).

[0046] The sensing unit (130) can determine whether liquid nitrogen is being supplied to the liquid nitrogen storage container (121). This sensing unit (130) can be connected to a controller (140). Additionally, the sensing unit (130) can detect one or more of the temperature of the krypton collection unit (110) and the amount of liquid nitrogen stored in the liquid nitrogen storage unit (120). The sensing unit (130) may include a temperature sensing unit (131) and a weight sensing unit (132).

[0047] The temperature sensing unit (131) can detect the temperature of the krypton collection unit (110). This temperature sensing unit (131) can be placed in the cylinder (111) or the liquid nitrogen storage container (121) to measure the temperature of the cylinder (111) or the liquid nitrogen storage container (121). Additionally, the temperature sensing unit (131) may be provided in multiple units. Multiple temperature sensing units (131) may be placed at different heights in the cylinder (111). This temperature sensing unit (131) can be connected to a controller (140) to transmit the measured temperature information to the controller (140).

[0048] The weight sensing unit (132) can detect the weight of the liquid nitrogen storage container (121). This weight sensing unit (132) can be positioned on the lower side of the liquid nitrogen storage container (121). Additionally, the weight sensing unit (132) can be connected to a controller (140) and transmit the measured weight information to the controller (140).

[0049] The controller (140) can control the supply of liquid nitrogen based on information detected by the sensing unit (130). For example, the controller (140) can supply liquid nitrogen to the liquid nitrogen storage container (121) when the temperature at each location of the cylinder (111) measured by the temperature sensing unit (131) rises to a level outside a certain range. Additionally, the controller (140) can control the liquid nitrogen supply unit (123) to supply liquid nitrogen to the liquid nitrogen storage unit (120) when the weight of the liquid nitrogen storage container (121) detected by the weight sensing unit (132) is less than a preset threshold weight. The controller (140) can control the replacement module (200) so that the krypton collection unit (110) is moved to the liquid nitrogen storage unit (120) when the krypton collection unit (110) is mounted on the mounting unit (230) and the temperature of the krypton collection unit (110) is at room temperature. The controller (140) may be implemented by a computing device including a microprocessor, and since the method of implementation is obvious to those skilled in the art, further detailed explanation is omitted.

[0050] The replacement module (200) can replace the krypton collection unit (110) in which krypton has been adsorbed with another krypton collection unit (110) in which krypton can be separated and re-adsorbed. This replacement module (200) can be positioned adjacent to the liquid nitrogen automatic supply module (100). Additionally, the replacement module (200) may include a moving part (210), a holder (220), and a mounting part (230).

[0051] The moving unit (210) can move the holder (220). This moving unit (210) can move the krypton collection unit (110), which is capable of re-adsorbing krypton after the krypton detachment is complete, to the liquid nitrogen storage unit (120). Additionally, the moving unit (210) can move the krypton collection unit (110), which has completed adsorption, from the liquid nitrogen storage container (121) to the mounting unit (230).

[0052] The holder (220) can be connected to the krypton collection unit (110). This holder (220) is connected to the moving unit (210) so that it can move together with the krypton collection unit (110) when the moving unit (210) moves. Additionally, the holder (220) can move up and down so that the krypton collection unit (110) can be moved upward to remove it from the liquid nitrogen storage container (121), and the krypton collection unit (110) can be moved downward to mount the krypton collection unit (110) on the mounting unit (230). Conversely, the holder (220) can move the krypton collection unit (110) downward to connect it to the liquid nitrogen storage container (121).

[0053] The mounting section (230) may provide a space for mounting a krypton collection unit (110) that has been removed from and moved from a liquid nitrogen storage container (121). This mounting section (230) may be placed at room temperature, and the temperature of the mounting section (230) may be room temperature. Additionally, one or more mounting sections (230) may be provided. One or more krypton collection units (110) may be mounted sequentially on one or more of these mounting sections (230).

[0054] The operation and effects of the krypton adsorption device (1) having the configuration described above will be explained below.

[0055] In the krypton adsorption device (1), nitrogen generated from a nitrogen gas generator is liquefied by passing through a liquid nitrogen generator, and the liquid nitrogen is introduced into a liquid nitrogen supply channel (122) and can be stored in a liquid nitrogen storage container (121). The krypton collection unit (110) placed in the liquid nitrogen storage container (121) can be cooled due to the ultra-low temperature of the liquid nitrogen.

[0056] Air is introduced into the cylinder (111) from the outside through the air inlet valve (113A), and krypton contained in the introduced air can be adsorbed by an adsorbent (112) placed in the cylinder (111). This adsorbent (112) can be cooled by liquid nitrogen to efficiently adsorb krypton.

[0057] To determine whether liquid nitrogen is being supplied normally to the liquid nitrogen storage container (121), the temperature sensing unit (131) arranged at regular intervals inside the cylinder (111) can detect temperature changes at different locations within the cylinder (111). Multiple temperature sensing units (131) can detect the temperature of the cylinder (111) as it changes along with the change in the liquid nitrogen level stored in the liquid nitrogen storage container (121). In other words, the temperature sensing unit (131) arranged in the cylinder (111) can detect changes in the liquid nitrogen level.

[0058] Additionally, whether liquid nitrogen is supplied normally to the liquid nitrogen storage container (121) can be determined by detecting the weight of the liquid nitrogen storage container (121). A weight sensing unit (132) placed in the cylinder (111) is positioned below the liquid nitrogen storage container (121) so that it can detect changes in the weight of the liquid nitrogen storage container (121). Based on the information measured by the temperature sensing unit (131) and the weight sensing unit (132), the controller (140) can automatically adjust the supply amount of liquid nitrogen supplied to the liquid nitrogen storage container (121).

[0059] Additionally, the krypton collection unit (110) placed in the liquid nitrogen storage container (121) can be removed from the liquid nitrogen storage container (121) by the moving unit (210) and placed on a mounting unit (230) at room temperature once the adsorption of krypton is completed. After the krypton collected from the krypton collection unit (110) is removed, the krypton collection unit (110) can be moved back to the liquid nitrogen storage container (121) and reused to adsorb krypton.

[0060] Referring to FIG. 3 according to one embodiment of the present invention, a krypton adsorption method (S10) using the krypton adsorption device (1) as described above will be explained. In describing the krypton adsorption method (S10), the differences when compared with the above-described embodiment will be explained mainly, and the same descriptions and reference numerals are taken from the above-described embodiment.

[0061] The krypton adsorption method (S10) is a method of adsorbing krypton contained in the air using a krypton adsorption device (1). This krypton adsorption method (S10) may include a liquid nitrogen supply step (S100) in which liquid nitrogen generated from a liquid nitrogen generator is supplied to a liquid nitrogen automatic supply module (100), a liquid nitrogen storage step (S200) in which the supplied liquid nitrogen is stored in a liquid nitrogen storage unit (120), a liquid nitrogen supply confirmation step (S300) in which the appropriate amount of liquid nitrogen is supplied and the amount of liquid nitrogen stored is checked, a control step (S400) in which the supply of liquid nitrogen is controlled, a krypton adsorption step (S500) in which krypton in the air is adsorbed and the adsorbed krypton is separated, and an adsorption unit replacement step (S600) in which a plurality of krypton collection units (110) are replaced with one another.

[0062] In the liquid nitrogen supply step (S100), liquid nitrogen can be supplied from the liquid nitrogen supply unit (123) to the liquid nitrogen automatic supply module (100). This liquid nitrogen supply step (S100) can automatically replenish liquid nitrogen lost through vaporization.

[0063] The liquid nitrogen storage step (S200) can store the supplied liquid nitrogen in the liquid nitrogen storage unit (120). This liquid nitrogen storage step (S200) can cool the krypton collection unit (110) by storing the liquid nitrogen introduced through the liquid nitrogen supply channel (122) in the liquid nitrogen storage housing (121A). To prevent the vaporization of the stored liquid nitrogen, a liquid nitrogen storage cover (121B) may be placed on the upper part of the liquid nitrogen storage housing (121A).

[0064] The liquid nitrogen supply confirmation step (S300) can confirm whether liquid nitrogen is being supplied and can confirm the amount of liquid nitrogen stored based on information detected by the detection unit (130). This liquid nitrogen supply confirmation step (S300) can confirm one or more of the temperature of the krypton collection unit (110) that adsorbs krypton and the amount of liquid nitrogen stored in the liquid nitrogen storage unit (120). Additionally, the liquid nitrogen supply confirmation step (S300) may include a temperature detection step (S310) and a weight detection step (S320).

[0065] The temperature sensing step (S310) can detect the temperature of the krypton collection unit (110) placed in the liquid nitrogen storage unit (120). This temperature sensing step (S310) can detect the temperature distribution by location of the krypton collection unit (110) by the temperature sensing unit (131).

[0066] The weight detection step (S320) can detect the weight of the liquid nitrogen storage unit (120). In other words, the weight detection step (S320) can detect the weight of the krypton collection unit (110), liquid nitrogen, and liquid nitrogen storage housing (121A) contained in the liquid nitrogen storage unit (120). This weight detection step (S320) can detect the weight based on whether the liquid nitrogen is replenished or vaporized by the weight detection unit (132).

[0067] The control step (S400) can control the liquid nitrogen supply unit (123) to supply liquid nitrogen to the liquid nitrogen storage unit (120) based on the information confirmed in the supply confirmation step (S300). In other words, if the weight of the liquid nitrogen storage unit (120) falls below a certain range compared to the weight when liquid nitrogen is fully supplied, additional liquid nitrogen can be supplied, and if it returns to the weight when liquid nitrogen is fully supplied, the supply of liquid nitrogen can be stopped. For example, if the weight of the liquid nitrogen storage unit (120) decreases by more than 10% from the initial weight, liquid nitrogen can be supplied, and the weight information can be measured and adjusted in units of 0.01 kg. Additionally, if the temperature of the temperature sensor (131) placed in the cylinder (111) rises above a certain range above the temperature when liquid nitrogen is fully supplied, additional liquid nitrogen can be supplied, and if it returns to the temperature when liquid nitrogen is fully supplied, the supply of liquid nitrogen can be stopped. In other words, the control step (S400) can control whether to supply liquid nitrogen and the amount supplied.

[0068] The krypton adsorption step (S500) allows the adsorbent (112) to adsorb krypton contained in the air injected into the cylinder (111).

[0069] The adsorption unit replacement step (S600) allows for the replacement of the krypton collection unit (110) in which krypton adsorption is completed with the krypton collection unit (110) in which krypton has been desorbed and re-adsorbed. In this adsorption unit replacement step (S600), the krypton collection unit (110) can be moved using a replacement module (200). Additionally, the adsorption unit replacement step (S600) may include an adsorption unit connection step (S610), an adsorption unit movement step (S620), an adsorption unit mounting step (S630), and an adsorption unit replacement step (S640).

[0070] In the adsorption unit connection step (S610), the replacement module (200) can be connected to the krypton collection unit (110).

[0071] The adsorption unit movement step (S620) can move the krypton collection unit (110) by moving the replacement module (200) connected to the krypton collection unit (110).

[0072] The adsorption unit mounting step (S630) allows the krypton collection unit (110), which has been removed from and moved from the liquid nitrogen storage unit (120), to be mounted at room temperature. This adsorption unit mounting step (S630) can gradually increase the temperature and pressure of the krypton collection unit (110). In other words, the krypton collection unit (110) can be mounted on the mounting unit (230) so that the temperature of the krypton collection unit (110) reaches room temperature.

[0073] The adsorption unit replacement step (S640) allows for the replacement of the krypton collection unit (110) in which krypton is adsorbed with the krypton collection unit (110) in which krypton is desorbed and re-adsorbed. In other words, by replacing the krypton collection unit (110) of the liquid nitrogen storage unit (120), krypton can be continuously adsorbed and separated.

[0074] Although the embodiments of the present invention have been described above as specific embodiments, they are merely examples and the present invention is not limited thereto, but should be interpreted as having the broadest scope in accordance with the technical concept disclosed in this specification. Those skilled in the art may implement patterns of shapes not specified by combining or substituting the disclosed embodiments, and this also does not deviate from the scope of the present invention. Furthermore, those skilled in the art may easily modify or alter the disclosed embodiments based on this specification, and it is evident that such modifications or alterations also fall within the scope of the rights of the present invention. Explanation of the symbols

[0075] 1: Krypton adsorption device 100: Automatic liquid nitrogen supply module 110: Krypton Collection Unit 111: Cylinder 112: Adsorbent 113: Valve part 113A: Air intake valve 113B: Air exhaust valve 114: Air inlet tube 120: Liquid nitrogen storage unit 121: Liquid nitrogen storage container 121A: Liquid nitrogen storage housing 121B: Liquid nitrogen storage cover 122: Liquid nitrogen supply channel 123: Liquid Nitrogen Supply Unit 130: Detector 131: Temperature Detector 132: Weight sensing unit 140: Controller 200: Replacement module 210: Moving part 220: Holder 230: Mounting part

Claims

Claim 1 A krypton adsorption device comprising: a liquid nitrogen storage unit in which liquid nitrogen is stored; an air inlet tube into which air is introduced from the outside; a liquid nitrogen supply unit for supplying liquid nitrogen to the liquid nitrogen storage unit; a krypton collection unit disposed in the liquid nitrogen storage unit and adsorbing krypton contained in the air introduced into the air inlet tube; a sensing unit for detecting one or more of the temperature of the krypton collection unit and the amount of liquid nitrogen stored in the liquid nitrogen storage unit; a controller for controlling the liquid nitrogen supply unit to supply the liquid nitrogen to the liquid nitrogen storage unit based on information detected by the sensing unit; and a replacement module for replacing the krypton collection unit after the adsorption of krypton is completed, wherein the replacement module comprises: a holder configured to be connectable to the krypton collection unit; a moving unit for moving the holder; and a mounting unit configured to mount the krypton collection unit and which is at room temperature. Claim 2 A krypton adsorption device according to claim 1, wherein the sensing unit comprises a plurality of temperature sensing units that sense the temperature of the krypton collecting unit. Claim 3 In claim 2, the krypton collecting unit comprises an adsorbent that adsorbs the krypton; and a cylinder that accommodates the adsorbent, wherein the plurality of temperature sensing units are arranged at different heights in the cylinder to measure the temperature of the cylinder, a krypton adsorption device. Claim 4 A krypton adsorption device according to claim 1, wherein the krypton collection unit is provided in a plurality of units, and the plurality of krypton collection units are disposed in the liquid nitrogen storage unit. Claim 5 A krypton adsorption device according to claim 1, wherein the liquid nitrogen storage unit comprises a liquid nitrogen supply channel through which the liquid nitrogen is supplied; and a liquid nitrogen storage container in which the liquid nitrogen is stored, and the sensing unit comprises a weight sensing unit that detects the weight of the liquid nitrogen storage container. Claim 6 In claim 5, the controller controls the liquid nitrogen supply unit so that the liquid nitrogen is supplied to the liquid nitrogen storage unit when the weight of the liquid nitrogen storage container detected by the weight sensing unit is less than a preset threshold weight. Claim 7 delete Claim 8 delete Claim 9 A krypton adsorption device according to claim 1, wherein the controller controls the replacement module so that the krypton collection unit is moved to the liquid nitrogen storage unit when the krypton collection unit is mounted on the mounting unit and the temperature of the krypton collection unit is at room temperature. Claim 10 A method for adsorbing krypton by means of a krypton adsorption device comprises: a liquid nitrogen supply step of receiving liquid nitrogen from a liquid nitrogen supply unit; a liquid nitrogen storage step of storing the liquid nitrogen in a liquid nitrogen storage unit; a liquid nitrogen supply confirmation step of confirming one or more of the temperature of a krypton collection unit that adsorbs krypton and the amount of liquid nitrogen stored in the liquid nitrogen storage unit; a control step of controlling the liquid nitrogen supply unit to supply the liquid nitrogen to the liquid nitrogen storage unit based on the information confirmed in the liquid nitrogen supply confirmation step; and a krypton adsorption step of adsorbing krypton contained in air. A krypton adsorption method comprising: a krypton collection unit in which krypton is adsorbed and a krypton collection unit capable of re-adsorbing krypton by desorbing the adsorbed krypton, wherein the adsorption unit replacement step comprises: an adsorption unit connection step in which a replacement module for moving the krypton collection unit is connected to the krypton collection unit; an adsorption unit movement step in which the krypton collection unit moves together with the replacement module as it moves; an adsorption unit mounting step in which the krypton collection unit is mounted so that the temperature of the krypton collection unit reaches room temperature; and an adsorption unit replacement step in which the krypton collection unit in which krypton is desorbed is replaced with the krypton collection unit in which krypton is adsorbed. Claim 11 A krypton adsorption method according to claim 10, wherein the liquid nitrogen supply confirmation step comprises: a temperature sensing step for sensing the temperature of a krypton collection unit disposed in the liquid nitrogen storage unit; and a weight sensing step for sensing the weight of the liquid nitrogen storage unit. Claim 12 delete Claim 13 delete

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