Safety vacuum supply gas cylinder

Abstract

A safety negative pressure gas supply cylinder according to the present invention comprises a cylinder body, a pipeline structure, a first check valve, a second check valve, and an adsorbent. The cylinder body has an opening, and the space inside is used to store gas, and the gas forms a pressure lower than atmospheric pressure inside the cylinder body. The pipeline structure is disposed inside the cylinder body and communicates with the opening, and includes a first pipeline and a second pipeline. The first check valve is disposed in the first pipeline and has a first check valve opening pressure greater than atmospheric pressure. When the pressure of the external filling gas is greater than the opening pressure of the first check valve and the internal pressure, the external filling gas enters the cylinder body. The second check valve is disposed in the second pipeline and has a second check valve opening pressure. When the pressure of the gas inside the cylinder is greater than or equal to the opening pressure of the second check valve and the external ambient pressure, the stored gas flows out of the cylinder body. The adsorbent adsorbs and stores the gas.

Description

Technology Field

[0001] The present invention relates to a safety negative pressure gas supply cylinder, and more particularly to a negative pressure gas supply cylinder that stores gas under negative pressure and operates safely. Background Technology

[0002] Many industrial processes, including semiconductor manufacturing, utilize toxic or hazardous gases. Examples include toxic gases such as AsH3, PH3, and BF3. These gases are typically stored in gas cylinders and used in processes such as ion implantation. To prevent the release of toxic or hazardous gases when the cylinder is opened, the gases are usually stored in the cylinder under negative pressure using an adsorbent to prevent leakage under high-pressure conditions. However, when stored under negative pressure in this manner, the external atmospheric pressure is greater than the negative pressure inside the cylinder; therefore, when the cylinder valve opens, external air easily enters the cylinder, contaminating the stored gas and potentially reacting with it to generate other toxic or hazardous gases. Once the incoming gas reaches equilibrium with the external pressure, the toxic gases begin to diffuse outward, polluting the environment and causing other toxic gas hazards. The problem to be solved

[0003] The present invention discloses a safety negative pressure gas supply cylinder that stores gas under negative pressure and operates it safely, and is equipped with a related pressure setting control mechanism to prevent the risk of leakage and contamination of toxic gas inside the negative pressure gas cylinder. means of solving the problem

[0004] A safety negative pressure gas supply cylinder according to the present invention comprises a cylinder body, a pipeline structure, a first check valve, a second check valve, and an adsorbent. The cylinder body has an opening, and the space inside is used to store gas, and the gas forms a negative pressure inside the cylinder body. The negative pressure is less than atmospheric pressure. The pipeline structure is disposed inside the cylinder body and communicates with the opening, and includes a first pipeline and a second pipeline. The first check valve is disposed in the first pipeline and has a first check valve opening pressure. The first check valve opening pressure is greater than atmospheric pressure. When the pressure of the external filling gas is greater than the opening pressure of the first check valve and the internal pressure, the external filling gas enters the cylinder body through the first pipeline and the first check valve. The second check valve is disposed in the second pipeline and has a second check valve opening pressure. When the pressure of the gas inside the cylinder is greater than or equal to the opening pressure of the second check valve and the external ambient pressure, the stored gas flows out of the cylinder body through the second pipeline and the second check valve. The adsorbent is placed inside the cylinder body to adsorb and store gas.

[0005] In one embodiment of the present invention, the aforementioned safety negative pressure gas supply cylinder further comprises a cylinder valve member disposed over an opening of a cylinder body to close it, and the cylinder valve member comprises a mouth and a channel, and the channel, the mouth, and the internal space of the cylinder body are in communication with each other.

[0006] In an embodiment of the present invention, the above-described opening is intended to communicate with a gas filling device, and external filling gas enters from the gas filling device into the internal space of the cylinder body.

[0007] In one embodiment of the present invention, the above-described opening is for communicating with a vacuum device, and the vacuum device provides an external environmental pressure smaller than the internal pressure.

[0008] In one embodiment of the present invention, the adsorbent is an activated carbon adsorbent.

[0009] In one embodiment of the present invention, the safety negative pressure gas supply cylinder further comprises a first filter and a second filter, wherein the first filter is disposed in a first pipeline and the second filter is disposed in a second pipeline.

[0010] In one embodiment of the present invention, the pipeline structure further includes a main pipeline connected to a channel, and the first pipeline and the second pipeline are each connected to the main pipeline.

[0011] In one embodiment of the present invention, the first check valve is a one-way valve that allows gas to flow into the internal space of the cylinder body; and the second check valve is a one-way valve that allows gas to flow out of the internal space of the cylinder body. Effects of the invention

[0012] By applying a pipeline structure and a first check valve and a second check valve, the present invention can prevent atmospheric gas from contaminating the gas inside the cylinder by coordinating the opening pressure settings of the related check valves, and can prevent toxic gas from leaking out and contaminating the environment.

[0013] To explain the above and other objectives, features, and advantages of the present invention more clearly and easily, they will be described in detail below with reference to specific embodiments and the attached drawings. Brief explanation of the drawing

[0014] FIG. 1 is a schematic perspective view of a safety negative pressure gas supply cylinder according to one embodiment of the present invention. FIG. 2 is a schematic perspective view of a safety negative pressure gas supply cylinder according to another embodiment of the present invention. FIG. 3 is a schematic perspective view of a safety negative pressure gas supply cylinder according to another embodiment of the present invention. Specific details for implementing the invention

[0015] FIG. 1 is a schematic perspective view of a safety negative pressure gas supply cylinder according to an embodiment of the present invention. The safety negative pressure gas supply cylinder of the present invention stores gas in a negative pressure state and supplies the gas stored in a negative pressure state (so-called stored gas). Referring to FIG. 1, the safety negative pressure gas supply cylinder (10) includes a cylinder body (100), a pipeline structure (200), a first check valve (310), and a second check valve (320). The safety negative pressure gas supply cylinder (10) may further include an adsorbent (500), but is not limited thereto.

[0016] The cylinder body (100) has an internal space (1000) for storing gas in a negative pressure state, and the gas forms an internal pressure (P2) inside the cylinder body (100), and the internal pressure (P2) is less than atmospheric pressure (P0). The embodiment illustrated in FIG. 1 is in a state where gas is filled in the safety negative pressure gas supply cylinder (10). The cylinder body (100) is also provided with an opening (105) so that gas can be introduced into or out of the cylinder body (100). Preferably, the embodiment of the present invention further includes a cylinder valve member (600) disposed over the opening (105) of the cylinder body (100) to close it. The cylinder valve member (600) may be a known cylinder valve member and may additionally include a related gas pressure control element and / or a misoperation safety design. The cylinder valve member (600) of the embodiment of the present invention is provided with a mouse (601) and a channel (602), and the channel (602), the mouse (601), and the cylinder body (100) are interconnected, and gas can flow in and out of the cylinder body (100) through the channel (602) and the mouse (601).

[0017] The pipeline structure (200) is disposed inside the cylinder body (100) and communicates with the opening (105), and includes a first pipeline (210) and a second pipeline (220). A first check valve (310) is disposed in the first pipeline (210) and the first check valve opening pressure (P c1 It has the first check valve opening pressure (P c1 ) is greater than or equal to atmospheric pressure (P0), and the pressure of the external filling gas (described later) is the first check valve opening pressure (P c1 When the external filling gas is greater than the internal pressure (P2), the external filling gas flows into the cylinder body (100) through the first pipeline (210) and the first check valve (310). The second check valve (320) is positioned in the second pipeline (220), and the second check valve opening pressure (P c2 It has ). The cylinder internal pressure (P2) is the second check valve opening pressure (P c2 When the pressure is greater than that of the external environment (e.g., when the external environment of the cylinder begins to be exhausted; described later), the stored gas is discharged from the cylinder body (100) through the second pipeline (220) and the second check valve (320). Additionally, the pipeline structure (200) may further include a main pipeline (230) connected to the channel (602), and the first pipeline (210) and the second pipeline (220) are each connected to the main pipeline (230).

[0018] An embodiment of the present invention may further include a first filter (410) and a second filter (420) which are respectively placed in the first pipeline (210) and the second pipeline (220) to filter dust, particles, etc., and prevent them from getting stuck in the pipeline and the check valve. An adsorbent (500) is placed within the cylinder body (100) to adsorb at least a portion of the stored gas, thereby increasing the gas storage capacity of the cylinder body (100). For example, the adsorbent (500) may be in the form of activated carbon particles, blocks such as activated carbon cake, granules, etc. The present invention does not limit the material and form of the adsorbent (500).

[0019] The opening (105) of the cylinder body (100) and the mouth (601) of the cylinder valve member (600) may be in communication with a gas filling device (not shown), and the aforementioned external filling gas may be introduced from the gas filling device into the internal space (1000) of the cylinder body (100). Meanwhile, the opening (105) and the mouth (601) may also be in communication with a vacuum device (not shown), and the vacuum device provides the aforementioned external environmental pressure which is smaller than the internal cylinder pressure (P2).

[0020] FIG. 2 is a schematic perspective view of a safety negative pressure gas supply cylinder according to another embodiment of the present invention. The safety negative pressure gas supply cylinder (10) of this embodiment is in a filled state. The safety negative pressure gas supply cylinder (10) undergoes exhaust treatment (described later) before being filled with gas, and the inside of the cylinder (10) may be in a nearly complete vacuum state before being filled. Next, as shown in FIG. 2, the pressure (P1) of the external filling gas (large arrows indicate the direction of flow) is the first check valve opening pressure (P c1The internal pressure (P2) is set to be greater than the internal pressure (P0), and the mouth (601) of the cylinder valve member (600) is connected to a gas filling device (not shown) to fill with external gas. As filling proceeds, the internal pressure (P2) also gradually increases. When the internal pressure (P2) increases to a preset value, filling can be completed. Finally, the value of the internal pressure (P2) is less than atmospheric pressure (P0), for example, 600 to 700 Torr.

[0021] According to an embodiment of the present invention, the first check valve (310) is a one-way valve that allows gas to flow only into the internal space (1000) (in the direction of the small arrow) of the cylinder body (100), and the second check valve (310) is also a one-way valve so that gas cannot escape from the cylinder body (100) through the first pipeline (210), and on the other hand, since the internal pressure P2 < atmospheric pressure P0, the gas stored inside the cylinder under an atmospheric pressure environment cannot leave the cylinder body through the second pipeline (220), and negative pressure is formed and stored in the internal space (1000).

[0022] FIG. 3 is a schematic perspective view of a safety negative pressure gas supply cylinder according to another embodiment of the present invention. The safety negative pressure gas supply cylinder (10) of this embodiment is in a pumping / use state. As shown in FIG. 3, when using the safety negative pressure gas supply cylinder (10) or vacuum pumping, the external environmental pressure (P3) is set to be lower than the internal pressure (P2). The internal pressure (P2) is the second check valve opening pressure (P c2When the external environmental pressure (P3) is greater than ) and, the stored gas is discharged outside the cylinder body (100) through the second pipeline (220) and the second check valve (320). Specifically, the mouth (601) of the cylinder valve (600) is connected to a vacuum device or process equipment (not shown) to extract the stored gas (the large arrow indicates the pumping direction). As pumping proceeds, the internal pressure (P2) is gradually reduced. The safety negative pressure gas supply cylinder (10) can continuously supply process equipment gas until the internal pressure (P2) is reduced to near a complete vacuum. After all the stored gas is depleted, the safety negative pressure gas supply cylinder (10) can be refilled as shown in the procedure illustrated in FIG. 2.

[0023] In an embodiment of the present invention, the first check valve (310) and the second check valve (320) are unidirectional check valves, and the opening pressure (P) of the first check valve c1 Since the pressure is greater than or equal to atmospheric pressure (P0), even if the cylinder valve member (600) is opened in the atmospheric environment, it is possible to prevent atmospheric environmental gas from flowing into the cylinder body (100), and to prevent the reaction between the atmospheric environmental gas and the gas stored in the safety negative pressure gas supply cylinder (10), thereby preventing toxic or harmful gas from leaking out, and to prevent contamination of the environment and related risks caused by toxic gas.

[0024] Comparison of the present invention and conventional negative pressure cylinders:

[0025] 1. Before filling:

[0026] The internal pressure (P2) of the present invention is close to a negative pressure vacuum or a complete negative pressure vacuum, and P c1 >P0,P c1 + P2 > P0. Atmospheric pressure (P0) is the first check valve opening pressure (P c1 Because it is smaller than ), when the cylinder valve member (600) is opened in the atmosphere, the external environment gas does not flow back into the cylinder (10).

[0027] In contrast, the internal pressure ('P 2' (indicated by ') is close to a negative pressure vacuum or a complete negative pressure vacuum, and P0 > P2. Since the first check valve (310) is not provided in the conventional negative pressure cylinder, the atmospheric pressure (P0) is the internal pressure (P 2' It is much larger than ). If the cylinder valve member is opened in an atmospheric environment, external ambient gas can easily flow back into the cylinder, posing a risk of contamination of the conventional negative pressure cylinder.

[0028] 2. After filling:

[0029] The value of the internal pressure (P2) of the present invention is 600 to 700 Torr, and P c1 >P0,P c1 + P2 > P0. First check valve opening pressure (P c1 Since the sum of the cylinder internal pressure (P2) and the external environment gas does not flow back into the cylinder (10) when the cylinder valve member (600) is opened in the atmospheric environment, it is possible to ensure that the stored gas is not contaminated.

[0030] In comparison, the internal pressure value of conventional negative pressure cylinders is also 600–700 Torr, and P0 > P 2' is. However, conventional negative pressure cylinders do not have a first check valve (310), and atmospheric pressure (P0) is internal pressure (P 2' Since it is greater than ), when the valve member is opened in the atmospheric environment, external ambient gas can easily flow back into the conventional negative pressure cylinder. After the ambient gas and the gas inside the cylinder mix and react, the temperature rises, causing the internal pressure (P 2' ) rises, and finally the internal pressure (P 2' ) becomes higher than atmospheric pressure (P0), and toxic gases overflow and spread, causing environmental pollution and damage.

[0031] 3. After pumping:

[0032] The internal pressure (P2) of the present invention is close to a negative pressure vacuum or a complete negative pressure vacuum, and P c1 >P0,P c1 + P2 > P0. Atmospheric pressure (P0) is the first check valve opening pressure (P c1 Because it is smaller than ), when the cylinder valve member (600) is opened in an atmospheric environment, the external environment gas does not flow back into the cylinder (10).

[0033] In contrast, the internal pressure (P2) of a conventional negative pressure cylinder is exhausted, and after use, the interior becomes a vacuum or close to a complete vacuum, and P0 > P 2' is. Since the first check valve (310) is not provided in the conventional negative pressure cylinder, the atmospheric pressure (P0) is also the internal pressure (P 2' It is much larger than ). When the cylinder valve member is opened in an atmospheric environment, external ambient gas can easily flow back into the conventional negative pressure cylinder, causing the risk of associated contamination and toxic gas leakage.

[0034] Although the present invention has been described by the above embodiments, it is not intended to limit the present invention, and a person skilled in the art to which the present invention belongs may make certain modifications within the spirit and scope of the present invention, and thus the scope of protection of the present invention is determined by the appended claims. Explanation of the symbols

[0035] 10: Safety negative pressure gas supply cylinder 100: Cylinder body 1000: Interior space 105: Frog 200: Pipeline Structure 210: 1st Pipeline 220: 2nd Pipeline 230: Main Pipeline 310: First check valve 320 : Second check valve 410: First filter 420: Second filter 500: Adsorbent 600: Cylinder valve absence 601 : Mouse 602: Channel P0: Atmospheric pressure P1: External filling gas pressure P2: Internal pressure P3: External environmental pressure P c1 : First check valve opening pressure (first opening pressure) P c2 : Second check valve opening pressure (second opening pressure)

Claims

Claim 1 A safety negative pressure gas supply cylinder for storing gas under negative pressure, supplying gas through safety negative pressure operation, and receiving gas from an external source, comprising: a cylinder body having an opening - the internal space of the cylinder body is configured to store gas, and said gas forms an internal pressure less than atmospheric pressure in the internal space of the cylinder body -; a pipeline structure disposed inside the cylinder body and communicating with said opening, and including a first pipeline and a second pipeline; a first check valve disposed in the first pipeline and having a first check valve opening pressure - the first check valve opening pressure is greater than atmospheric pressure, so as to prevent ambient gas from entering the cylinder body when the cylinder body is in a negative pressure state, and when the gas pressure from an external source is greater than the first check valve opening pressure and said internal pressure, the gas from said external source enters the cylinder body through the first pipeline and the first check valve and is filled -; a second check valve disposed in the second pipeline and having a second check valve opening pressure, so as to prevent gas stored in the internal space from leaking into the surrounding environment due to a pressure gradient - said internal pressure is second A safety negative pressure gas supply cylinder characterized by comprising: a check valve opening pressure and an external ambient pressure of the cylinder connected to a vacuum device, wherein the gas stored in the cylinder body flows out of the cylinder body through a second pipeline and a second check valve; and an adsorbent disposed within the cylinder body to adsorb the gas stored in the cylinder body. Claim 2 A safety negative pressure gas supply cylinder according to claim 1, further comprising a cylinder valve member disposed over an opening of the cylinder body and closing it, wherein the cylinder valve member has a mouth and a channel, and the channel, the mouth, and the internal space of the cylinder body are in mutual communication. Claim 3 A safety negative pressure gas supply cylinder according to claim 1, wherein the opening is for communicating with a gas filling device, and external filling gas enters from the gas filling device into the internal space of the cylinder body. Claim 4 A safety negative pressure gas supply cylinder according to claim 1, characterized in that the opening is additionally configured to communicate with a vacuum device. Claim 5 A safety negative pressure gas supply cylinder according to claim 1, characterized in that the adsorbent is an activated carbon adsorbent. Claim 6 A safety negative pressure gas supply cylinder according to claim 1, further comprising a first filter and a second filter, wherein the first filter is disposed in the first pipeline and the second filter is disposed in the second pipeline. Claim 7 A safety negative pressure gas supply cylinder according to claim 2, wherein the pipeline structure further includes a main pipeline connected to the channel, and the first pipeline and the second pipeline are each connected to the main pipeline. Claim 8 A safety negative pressure gas supply cylinder according to claim 1, wherein the first check valve is a one-way valve that allows gas to flow into the internal space of the cylinder body; and the second check valve is a one-way valve that allows gas to flow out of the internal space of the cylinder body.

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