Gas supply system

Abstract

A gas supply system is disclosed. In one embodiment, the gas supply system comprises a plurality of gas distribution modules and a controller connected to the plurality of gas distribution modules and configured to control the operation of each of the plurality of gas distribution modules, wherein each of the plurality of gas distribution modules comprises a housing and a gas distribution device disposed within the housing, and each of the plurality of gas distribution modules may be stacked with other gas distribution modules. Various other embodiments may be possible.

Description

Technology Field

[0001] The initiation concerns the gas supply system. Background Technology

[0002] In process equipment such as semiconductor manufacturing facilities, gas supply devices are essential for stably supplying various types of gases to the process line. Such gas supply devices generally consist of one or more modules for distributing gases and a controller to manage them. Conventionally, a configuration in which a single controller controls a single Valve Manifold Box (VMB) was primarily used, and it was common practice for each VMB to be installed and maintained individually. In this conventional structure, since a single gas distribution device is installed independently, problems arose when multiple VMBs needed to be configured within the same facility space, such as an increased installation footprint, the need to secure space for peripheral components like exhaust systems, and a decrease in the overall system's space efficiency. Accordingly, there is a growing need for technologies that allow multiple VMBs to be controlled by a single controller or integrated into a single space.

[0003] However, the foregoing shall not be interpreted as the applicant acknowledging it as prior art regarding the content described in this document, but shall be interpreted only as related art to the invention described in this document. The problem to be solved

[0004] The objective according to one embodiment is to provide a gas supply system in which a plurality of gas distribution modules can be arranged within a limited installation space so as not to interfere with each other.

[0005] The objective according to one embodiment is to provide a gas supply system that can control a plurality of gas distribution modules collectively by a single controller, while ensuring that the exhaust port of each gas distribution module has an independent exhaust path.

[0006] The objective according to one embodiment is to provide a gas supply system capable of efficiently stacking a plurality of gas distribution modules within an installation space by forming a step using the difference in length in the horizontal or vertical direction between the gas distribution modules.

[0007] The problems to be solved by the gas supply system according to one embodiment are not limited to those mentioned above, and other problems not mentioned will be clearly understood by a person skilled in the art from the description below. means of solving the problem

[0008] In one embodiment, the gas supply system comprises a plurality of gas distribution modules and a controller connected to the plurality of gas distribution modules and configured to control the operation of each of the plurality of gas distribution modules, wherein each of the plurality of gas distribution modules comprises a housing and a gas distribution device disposed within the housing, and each of the plurality of gas distribution modules may be stacked with other gas distribution modules.

[0009] In one embodiment, the plurality of gas distribution modules are arranged in an installation space of the gas supply system, and the installation space includes a first installation area where the housings of the plurality of gas distribution modules are located, and a second installation area where the housings are not located, and the exhaust ports of the plurality of gas distribution modules may be located in the second installation area.

[0010] In one embodiment, when looking at the upper portion of the plurality of gas distribution modules, the housings have a horizontal direction and a vertical direction, and at least two of the housings may have different horizontal lengths or vertical lengths.

[0011] In one embodiment, the plurality of gas distribution modules includes a first gas distribution module comprising a first housing and a first exhaust port, and a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, wherein the first housing may have a longer longitudinal length than the second housing.

[0012] In one embodiment, when the plurality of gas distribution modules are viewed laterally, the front of the first housing and the front of the second housing form the same plane, and the first housing may protrude rearward from the second housing to form a step.

[0013] In one embodiment, the plurality of gas distribution modules includes a first gas distribution module comprising a first housing and a first exhaust port, and a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, wherein the first housing may have a longer transverse length than the second housing.

[0014] In one embodiment, when viewing the plurality of gas distribution modules from the front, the first housing may protrude laterally from the second housing to form a step difference.

[0015] In one embodiment, the first installation area includes an area where the second housing is located on the first housing, the second installation area includes an area where the second housing is not located on the first housing, and the first exhaust port may be located in the second installation area.

[0016] In one embodiment, the plurality of gas distribution modules includes a first gas distribution module disposed on one side of the controller and comprising a first housing and a first exhaust port, a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, a third gas distribution module disposed on the other side of the controller and comprising a third housing and a third exhaust port, and a fourth gas distribution module disposed on the third housing and comprising a fourth housing and a fourth exhaust port, wherein the first housing may have a longer vertical length than the second housing and the third housing may have a longer vertical length than the fourth housing.

[0017] In one embodiment, when the plurality of gas distribution modules are viewed laterally, the front of the first housing and the front of the second housing form the same plane, the front of the third housing and the front of the fourth housing form the same plane, the first housing may protrude rearward from the second housing to form a step, and the third housing may protrude rearward from the fourth housing to form a step.

[0018] In one embodiment, the plurality of gas distribution modules includes a first gas distribution module disposed on one side of the controller and comprising a first housing and a first exhaust port, a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, a third gas distribution module disposed on the other side of the controller and comprising a third housing and a third exhaust port, and a fourth gas distribution module disposed on the third housing and comprising a fourth housing and a fourth exhaust port, wherein the first housing may have a longer horizontal length than the second housing and the third housing may have a longer horizontal length than the fourth housing.

[0019] In one embodiment, when viewing the plurality of gas distribution modules from the front, the first housing may protrude laterally from the second housing to form a step, and the third housing may protrude laterally from the fourth housing to form a step.

[0020] In one embodiment, the first installation area includes an area where the second housing is located on the first housing and an area where the fourth housing is located on the third housing, and the second installation area includes an area where the second housing is not located on the first housing and an area where the fourth housing is not located on the third housing, and the first exhaust port and the third exhaust port may be located in the second installation area.

[0021] In one embodiment, the plurality of gas distribution modules may include a first gas distribution module disposed on one side of the controller and comprising a first housing and a first exhaust port, a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, a third gas distribution module disposed on the second housing and comprising a third housing and a third exhaust port, a fourth gas distribution module disposed on the other side of the controller and comprising a fourth housing and a fourth exhaust port, and a fifth gas distribution module disposed on the fourth housing and comprising a fifth housing and a fifth exhaust port, and a sixth gas distribution module disposed on the fifth housing and comprising a sixth housing and a sixth exhaust port, wherein the first housing has a longer vertical length than the second housing, the second housing has a longer vertical length than the third housing, the fourth housing has a longer vertical length than the fifth housing, and the fifth housing has a longer vertical length than the sixth housing.

[0022] In one embodiment, when the plurality of gas distribution modules are viewed laterally, the front of the first housing, the front of the second housing, and the front of the third housing form the same plane, and the front of the fourth housing, the front of the fifth housing, and the front of the sixth housing form the same plane, and the first housing may be protruded rearward from the second housing to form a step, the second housing may be protruded rearward from the third housing to form a step, the fourth housing may be protruded rearward from the fifth housing to form a step, and the fifth housing may be protruded rearward from the sixth housing to form a step.

[0023] In one embodiment, the plurality of gas distribution modules may include a first gas distribution module disposed on one side of the controller and comprising a first housing and a first exhaust port, a second gas distribution module disposed on the first housing and comprising a second housing and a second exhaust port, a third gas distribution module disposed on the second housing and comprising a third housing and a third exhaust port, a fourth gas distribution module disposed on the other side of the controller and comprising a fourth housing and a fourth exhaust port, and a fifth gas distribution module disposed on the fourth housing and comprising a fifth housing and a fifth exhaust port, and a sixth gas distribution module disposed on the fifth housing and comprising a sixth housing and a sixth exhaust port, wherein the first housing has a longer horizontal length than the second housing, the second housing has a longer horizontal length than the third housing, the fourth housing has a longer horizontal length than the fifth housing, and the fifth housing has a longer horizontal length than the sixth housing.

[0024] In one embodiment, when viewing the plurality of gas distribution modules from the front, the first housing may protrude laterally from the second housing to form a step, the second housing may protrude laterally from the third housing to form a step, the fourth housing may protrude laterally from the fifth housing to form a step, and the fifth housing may protrude laterally from the sixth housing to form a step.

[0025] In one embodiment, the first installation area includes an area where the second housing is located on the first housing, an area where the third housing is located on the second housing, an area where the fifth housing is located on the fourth housing, and an area where the sixth housing is located on the fifth housing; the second installation area includes an area where the second housing is not located on the first housing, an area where the third housing is not located on the second housing, an area where the fifth housing is not located on the fourth housing, and an area where the sixth housing is not located on the fifth housing; and the first exhaust port, the second exhaust port, the fourth exhaust port, and the fifth exhaust port may be located in the second installation area.

[0026] In one embodiment, each of the plurality of gas distribution modules can be stacked in a manner that does not cause positional interference with other gas distribution modules.

[0027] In one embodiment, each of the plurality of gas distribution modules may further include an exhaust port configured to protrude outside the housing.

[0028] In one embodiment, the plurality of gas distribution modules may be stacked in a manner that surrounds the controller.

[0029] In one embodiment, each of the plurality of gas distribution modules may further include an indicator lamp configured to light up when selected or controlled by the controller and to turn off when the selection or control by the controller is released.

[0030] In one embodiment, the controller may include a main operating switch configured to determine whether to activate the operation of all of the plurality of gas distribution modules.

[0031] In one embodiment, each of the plurality of gas distribution modules may include a sub-operation switch configured to determine whether the operation of each of the plurality of gas distribution modules is activated.

[0032] In one embodiment, each of the plurality of gas distribution modules may be provided with at least one of a UVIR sensor configured to detect ultraviolet and infrared rays, a temperature sensor configured to detect a rise in temperature, and a sprinkler for fire suppression. Effects of the invention

[0033] A gas supply system according to one embodiment can efficiently utilize space even in a limited installation space by stacking a plurality of gas distribution modules without interference with each other.

[0034] A gas supply system according to one embodiment can stably secure the exhaust path of each gas distribution module by positioning the exhaust ports of a plurality of gas distribution modules in an installation area that does not interfere with the housing.

[0035] A gas supply system according to one embodiment can form a step by stacking housings with different horizontal or vertical lengths, thereby enabling integrated control of multiple gas distribution modules through a single controller while improving maintenance accessibility.

[0036] The effects of the gas supply system according to one embodiment are not limited to those mentioned above, and other effects not mentioned will be clearly understood by a person skilled in the art from the description below. Brief explanation of the drawing

[0037] The following drawings attached to this specification illustrate a preferred embodiment of the present invention and serve to further enhance understanding of the technical concept of the present invention together with the detailed description of the invention; therefore, the present invention should not be interpreted as being limited only to the matters described in such drawings. FIG. 1 is a block diagram schematically illustrating a gas supply system according to one embodiment. FIG. 2 is a front view of a gas supply system according to one embodiment. Figure 3 is a right-side view of the gas supply system according to Figure 2. FIG. 4 is a front view of a gas supply system according to one embodiment. Figure 5 is a right-side view of the gas supply system according to Figure 4. FIG. 6 is a front view of a gas supply system according to one embodiment. Figure 7 is a right-side view of the gas supply system according to Figure 6. Fig. 8 is a left side view of the gas supply system according to Fig. 6. FIG. 9 is a front view of a gas supply system according to one embodiment. FIG. 10 is a right-side view of a gas supply system according to FIG. 9. FIG. 11 is a left side view of the gas supply system according to FIG. 9. FIG. 12 is a front view of a gas supply system according to one embodiment. FIG. 13 is a right-side view of a gas supply system according to FIG. 12. FIG. 14 is a left side view of a gas supply system according to FIG. 12. FIG. 15 is a front view of a gas supply system according to one embodiment. FIG. 16 is a right-side view of a gas supply system according to FIG. 15. FIG. 17 is a left side view of a gas supply system according to FIG. 15. Specific details for implementing the invention

[0038] Hereinafter, embodiments are described in detail with reference to the attached drawings. However, various modifications may be made to the embodiments, and thus the scope of the patent application is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, and substitutions to the embodiments are included within the scope of the rights.

[0039] The terms used in the embodiments are for illustrative purposes only and should not be interpreted as intended to be limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0040] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the embodiments pertain. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0041] In addition, when describing with reference to the attached drawings, identical components are assigned the same reference numeral regardless of the drawing symbols, and redundant descriptions thereof are omitted. When describing embodiments, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of the embodiment, such detailed description is omitted. The singular form of a noun corresponding to an item may include one or more of the said item unless the relevant context clearly indicates otherwise. In this document, each of phrases such as "A or B," "at least one of A and B," "at least one of A or B," "A, B or C," "at least one of A, B and C," and "at least one of A, B, or C" may include any one of the items listed together in the corresponding phrase, or all possible combinations thereof.

[0042] In addition, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the embodiments. These terms are intended merely to distinguish the components from other components, and the nature, order, or sequence of the components is not limited by these terms. Where it is stated that a component is "connected," "combined," or "connected" to another component, it should be understood that while the component may be directly connected or connected to the other component, another component may also be "connected," "combined," or "connected" between each component.

[0043] In this document, terms such as “substantially,” “approximately,” “generally,” and “about” used to refer to a given parameter, attribute, or condition may include the extent to which a person skilled in the art can understand that the given parameter, attribute, or condition is satisfied with a small degree of variance, such as within acceptable manufacturing tolerances. For example, any specific parameter that is substantially satisfied may be satisfied by at least 90%, at least 95%, or at least 99%.

[0044] Components included in any one embodiment and components having common functions shall be described using the same names in other embodiments. Unless otherwise stated, the description in any one embodiment may also apply to other embodiments, and specific descriptions shall be omitted to the extent of overlap.

[0046] FIG. 1 is a block diagram schematically illustrating a gas supply system according to one embodiment.

[0047] Referring to FIG. 1, the gas supply system (1) may include a plurality of gas distribution modules (10) and a controller (C). The gas supply system (1) according to one embodiment may be used to supply gas used in technical fields such as semiconductor manufacturing processes to a target such as a process device.

[0048] The controller (C) can control the operation of a plurality of gas distribution modules (10) individually or collectively. The controller (C) can ensure that the gas supply system (1) operates stably by monitoring the operating status of each gas distribution module (10) and providing necessary control signals. The controller (C) can control the operation of each of the plurality of gas distribution modules individually or collectively. The controller (C) may include a main operation switch (not shown). The main operation switch provided in the controller (C) can determine whether the operation of all of the plurality of gas distribution modules (10) is activated. For example, a user can turn the power on or off for all of the plurality of gas distribution modules (10) by operating the main operation switch. Since the power of the plurality of gas distribution modules (10) can be turned on or off through the main operation switch provided in the controller (C), flexibility in responding to emergency situations can be improved.

[0049] A plurality of gas distribution modules (10) can each distribute process gas. The plurality of gas distribution modules (10) can be stacked in various forms so that they can be arranged within the installation space without interference with each other.

[0050] Each of the plurality of gas distribution modules (10) may include a sub-operation switch (not shown). The sub-operation switch may be provided inside or outside the housing of each of the plurality of gas distribution modules (10). The number of sub-operation switches may be equal to the number of gas distribution modules (10) so that they are provided in each of the plurality of gas distribution modules (10). The sub-operation switch may determine whether the operation of each of the gas distribution modules (10) is activated.

[0051] The user can control the operation of all of the plurality of gas distribution modules (10) through a main operation switch provided in the controller (C), and control each of the gas distribution modules (10) individually through a sub-operation switch provided in each of the plurality of gas distribution modules (10), thereby improving the convenience of operation of the gas supply system.

[0052] An indicator lamp may be provided inside or outside the housing of each of the gas distribution modules (10). The indicator lamp may be controlled by a controller (C). The indicator lamp may be lit when a gas distribution module equipped with the indicator lamp is selected or controlled by the controller (C). The indicator lamp may be turned off when the selection or control by the controller (C) for a gas distribution module equipped with the indicator lamp is released. By visually exposing the location of the gas distribution module, the indicator lamp may allow the user to easily identify the location of the gas distribution module selected or controlled by the controller (C) among the plurality of gas distribution modules (10).

[0053] Each of the plurality of gas distribution modules (10) may be provided with at least one of a UVIR sensor configured to detect ultraviolet and infrared rays, a temperature sensor configured to detect a rise in temperature, and a sprinkler for fire suppression. The UVIR sensor may include a flare detector that detects both ultraviolet and infrared rays. The temperature sensor may detect temperature changes inside or outside the gas distribution module to detect whether a fire has occurred. The sprinkler may suppress the fire by spraying a fire extinguishing fluid when a fire occurs. Each of the plurality of gas distribution modules (10) may include a configuration capable of preventing or suppressing a rapid rise in temperature or a fire in advance, thereby making it easier to respond to emergency situations.

[0055] Hereinafter, a gas supply system (1) according to one embodiment will be described in detail. The term "horizontal direction" may refer to the X-axis direction shown in the drawing, and the term "vertical direction" may refer to the Y-axis direction shown in the drawing. For example, "horizontal length" may refer to the length in the X-axis direction, and "vertical length" may refer to the length in the Y-axis direction. The term "left" may refer to the -X-axis direction shown in the drawing, and the term "right" may refer to the +X-axis direction shown in the drawing. The term "front" may refer to the -Y-axis direction shown in the drawing, and the term "rear" may refer to the +Y-axis direction shown in the drawing. However, it should be noted that the directions of the above-described terms are merely examples and are not necessarily limited to those directions, and the directions may be changed as needed.

[0057] FIG. 2 is a front view of a gas supply system according to one embodiment. FIG. 3 is a right side view of the gas supply system according to FIG. 2.

[0058] A gas supply system (2) according to one embodiment may include a plurality of gas distribution modules (21, 22) and a controller (C) for controlling the operation of each of the plurality of gas distribution modules (21, 22). Each of the plurality of gas distribution modules (21, 22) may include a gas distribution device for distributing process gas, a housing in which the gas distribution device is placed, and an exhaust port formed protruding from the outside of the housing for gas discharge. All of the plurality of gas distribution modules (21, 22) may be placed within the same installation space. Each of the plurality of gas distribution modules (21, 22) may be stacked within the installation space so as not to cause positional interference with other gas distribution modules (21, 22).

[0059] The installation space may include a first installation area (A1) where housings are placed and a second installation area (A2) where housings are not placed. The exhaust ports of the plurality of gas distribution modules (21, 22) may be located in the second installation area (A2) to ensure exhaust flow. Each housing of the plurality of gas distribution modules (21, 22) may have a horizontal direction (e.g., X-axis direction in FIG. 2) and a vertical direction (e.g., Y-axis direction in FIG. 2) when viewed from above (e.g., +Z-axis direction in FIG. 2). At least two of the housings may have different horizontal lengths or vertical lengths.

[0060] Referring to FIG. 2, a plurality of gas distribution modules (21, 22) according to one embodiment may include a first gas distribution module (21) and a second gas distribution module (22). The first gas distribution module (21) may include a first housing (211) and a first exhaust port (212). The second gas distribution module (22) may include a second housing (221) and a second exhaust port (222). The vertical length of the first housing (211) may be configured to be longer than the vertical length of the second housing (221). Due to this difference in dimensions, the first housing (211) and the second housing (221) may be stacked such that a step is formed in the rearward direction. For example, when viewing the plurality of gas distribution modules (21, 22) laterally (e.g., in the direction of the -X axis of FIG. 2), with reference to FIG. 3, the front of the first housing (211) (e.g., the XZ plane of FIG. 3) and the front of the second housing (221) may form substantially the same plane. The first housing (211) may protrude rearward from the second housing (221) to form a step.

[0061] An installation space according to one embodiment may include a first installation area (A1) where the first housing (211) and the second housing (221) are located, and a second installation area (A2) where the first housing (211) and the second housing (221) are not located. The first installation area (A1) may include an area where the second housing (221) is located on the first housing (211) (e.g., an area where the second housing (221) is located on the upper surface of the first housing (211) in FIG. 3 (e.g., the XY plane in FIG. 3). The second installation area (A2) may include an area where the second housing (221) is not located on the first housing (211). The first exhaust port (212) of the first gas distribution module (21) may be located in the second installation area (A2). That is, the first exhaust port (212) can be positioned on the first housing (211) without causing positional interference with the second housing (221).

[0063] FIG. 4 is a front view of a gas supply system according to one embodiment. FIG. 5 is a right side view of the gas supply system according to FIG. 4.

[0064] A gas supply system (3) according to one embodiment may include a plurality of gas distribution modules (31, 32) and a controller (C) for controlling the operation of each of the plurality of gas distribution modules (31, 32). Each of the plurality of gas distribution modules (31, 32) may include a gas distribution device for distributing process gas, a housing in which the gas distribution device is placed, and an exhaust port formed protruding from the outside of the housing for gas discharge. All of the plurality of gas distribution modules (31, 32) may be placed within the same installation space. Each of the plurality of gas distribution modules (31, 32) may be stacked within the installation space so as not to cause positional interference with other gas distribution modules (31, 32).

[0065] The installation space may include a first installation area (A1) where housings are placed and a second installation area (A2) where housings are not placed. The exhaust ports of the plurality of gas distribution modules (31, 32) may be located in the second installation area (A2) to ensure exhaust flow. Each housing of the plurality of gas distribution modules (31, 32) may have a horizontal direction (e.g., X-axis direction in FIG. 2) and a vertical direction (e.g., Y-axis direction in FIG. 2) when viewed from above (e.g., +Z-axis direction in FIG. 2). At least two of the housings may have different horizontal lengths or vertical lengths.

[0066] Referring to FIGS. 4 and 5, a plurality of gas distribution modules (31, 32) according to one embodiment may include a first gas distribution module (31) and a second gas distribution module (32). The first gas distribution module (31) may include a first housing (311) and a first exhaust port (312). The second gas distribution module (32) may include a second housing (321) and a second exhaust port (322). The horizontal length of the first housing (311) may be configured to be longer than the horizontal length of the second housing (321). Due to this difference in dimensions, the first housing (311) and the second housing (321) may be stacked to form a step in the horizontal direction (e.g., the X-axis direction in FIG. 4). For example, when viewing the plurality of gas distribution modules (31, 32) from the front (e.g., when viewing in the +Y axis direction of FIG. 4), the first housing (311) may protrude laterally from the second housing (321) to form a step.

[0067] An installation space according to one embodiment may include a first installation area (A1) where the first housing (311) and the second housing (321) are located, and a second installation area (A2) where the first housing (311) and the second housing (321) are not located. The first installation area (A1) may include an area where the second housing (321) is located on the first housing (311) (e.g., an area where the second housing (321) is located on the upper surface of the first housing (311) of FIG. 5 (e.g., the XY plane of FIG. 5). The second installation area (A2) may include an area where the second housing (321) is not located on the first housing (311). The first exhaust port (312) of the first gas distribution module (31) may be located in the second installation area (A2). That is, the first exhaust port (312) can be positioned on the first housing (311) without causing positional interference with the second housing (321).

[0069] FIG. 6 is a front view of a gas supply system according to one embodiment. FIG. 7 is a right side view of the gas supply system according to FIG. 6. FIG. 8 is a left side view of the gas supply system according to FIG. 6.

[0070] A gas supply system (4) according to one embodiment may include a plurality of gas distribution modules (41, 42) and a controller (C). The plurality of gas distribution modules (41, 42) may include a first gas distribution module (41), a second gas distribution module (42) disposed on the first gas distribution module (41), a third gas distribution module (43), and a fourth gas distribution module (44) disposed on the third gas distribution module (43). The first gas distribution module (41) and the second gas distribution module (42) may be disposed in a direction opposite to the third gas distribution module (43) and the fourth gas distribution module (44) with respect to the controller (C). For example, the first gas distribution module (41) and the second gas distribution module (42) may be placed on one side of the controller (C) (e.g., the +X-axis direction of FIG. 6), and the third gas distribution module (43) and the fourth gas distribution module (44) may be placed on the other side of the controller (C) (e.g., the -X-axis direction of FIG. 6).

[0071] The first gas distribution module (41) may include a first housing (411) and a first exhaust port (412) formed protruding from the first housing (411). The second gas distribution module (42) may be disposed on the first housing (411). The second gas distribution module (42) may include a second housing (421) and a second exhaust port (422) formed protruding from the second housing (421). The third gas distribution module (43) may include a third housing (431) and a third exhaust port (432) formed protruding from the third housing (431). The fourth gas distribution module (44) may be disposed on the third housing (431). The fourth gas distribution module (44) may include a fourth housing (441) and a fourth exhaust port (442) formed protruding from the fourth housing (441).

[0072] The vertical length of the first housing (411) (e.g., length in the Y-axis direction of FIG. 6) may be configured to be longer than the vertical length of the second housing (421). The vertical length of the third housing (431) may be configured to be longer than the vertical length of the fourth housing (441). Due to these dimensional differences, the first housing (411) and the second housing (421), and the third housing (431) and the fourth housing (441) may be stacked such that a step is formed in the rear, respectively. For example, when viewing a plurality of gas distribution modules (41, 42) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 6), referring to FIG. 7, the front of the first housing (411) (e.g., the XZ plane of FIG. 7) and the front of the second housing (421) may form substantially the same plane. The first housing (411) may protrude rearward from the second housing (421) to form a step. Referring to FIG. 8, the front of the third housing (431) and the front of the fourth housing (441) may form substantially the same plane. The third housing (431) may protrude rearward from the fourth housing (441) to form a step.

[0073] An installation space according to one embodiment may include a first installation area (A1) in which a first housing (411), a second housing (421), a third housing (431), and a fourth housing (441) are located, and a second installation area (A2) in which the first housing (411), the second housing (421), the third housing (431), and the fourth housing (441) are not located. The first installation area (A1) may include an area in which the second housing (421) is located on the first housing (411) (e.g., an area in which the second housing (421) is located on the upper surface of the first housing (411) of FIG. 7 (e.g., the XY plane of FIG. 7)) and an area in which the fourth housing (441) is located on the third housing (431) (e.g., an area in which the fourth housing (441) is located on the upper surface of the third housing (431) of FIG. 8). The second installation area (A2) may include an area where the second housing (421) is not located on the first housing (411) and an area where the fourth housing (441) is not located on the third housing (431). The first exhaust port (412) of the first gas distribution module (41) and the third exhaust port (432) of the third gas distribution module (43) may be located in the second installation area (A2). That is, the first exhaust port (412) may be located on the first housing (411) and the third housing (431), respectively, without causing positional interference with the second housing (421), and without causing positional interference with the fourth housing (441).

[0075] FIG. 9 is a front view of a gas supply system according to one embodiment. FIG. 10 is a right side view of the gas supply system according to FIG. 9. FIG. 11 is a left side view of the gas supply system according to FIG. 9.

[0076] Referring to FIGS. 9 through 11, a gas supply system (5) according to one embodiment may include a plurality of gas distribution modules (51, 52) and a controller (C). The plurality of gas distribution modules (51, 52) may include a first gas distribution module (51), a second gas distribution module (52) disposed on the first gas distribution module (51), a third gas distribution module (53), and a fourth gas distribution module (54) disposed on the third gas distribution module (53). The first gas distribution module (51) and the second gas distribution module (52) may be disposed in a direction opposite to the third gas distribution module (53) and the fourth gas distribution module (54) with respect to the controller (C). For example, the first gas distribution module (51) and the second gas distribution module (52) may be placed on one side of the controller (C) (e.g., the +X-axis direction of FIG. 9), and the third gas distribution module (53) and the fourth gas distribution module (54) may be placed on the other side of the controller (C) (e.g., the -X-axis direction of FIG. 9).

[0077] The first gas distribution module (51) may include a first housing (511) and a first exhaust port (512) formed protruding from the first housing (511). The second gas distribution module (52) may be disposed on the first housing (511). The second gas distribution module (52) may include a second housing (521) and a second exhaust port (522) formed protruding from the second housing (521). The third gas distribution module (53) may include a third housing (531) and a third exhaust port (532) formed protruding from the third housing (531). The fourth gas distribution module (54) may be disposed on the third housing (531). The fourth gas distribution module (54) may include a fourth housing (541) and a fourth exhaust port (542) formed protruding from the fourth housing (541).

[0078] The horizontal length of the first housing (511) (e.g., length in the X-axis direction of FIG. 9) may be configured to be longer than the horizontal length of the second housing (521). The horizontal length of the third housing (531) may be configured to be longer than the horizontal length of the fourth housing (541). Due to these dimensional differences, the first housing (511) and the second housing (521), and the third housing (531) and the fourth housing (541) may be stacked such that a step is formed laterally. The vertical length of the first housing (511) (e.g., length in the Y-axis direction of FIG. 9) may also be configured to be longer than the vertical length of the second housing (521). The vertical length of the third housing (531) may also be configured to be longer than the vertical length of the fourth housing (541). Due to these dimensional differences, the first housing (511) and the second housing (521), and the third housing (531) and the fourth housing (541) can be stacked such that a step is formed laterally. That is, the first housing (511) and the second housing (521), and the third housing (531) and the fourth housing (541) can be stacked such that a step is formed laterally. For example, when viewing a plurality of gas distribution modules (51, 52) from the front (e.g., when viewing in the +Y-axis direction of FIG. 9), referring to FIG. 9, the first housing (511) may protrude laterally more than the second housing (521) to form a step. The third housing (531) may protrude laterally more than the fourth housing (541) to form a step. For example, when viewing the plurality of gas distribution modules (51, 52) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 9), referring to FIG. 10, the front of the first housing (511) (e.g., the XZ plane of FIG. 10) and the front of the second housing (521) may form substantially the same plane. The first housing (511) may protrude rearward from the second housing (521) to form a step.Referring to FIG. 11, the front of the third housing (531) and the front of the fourth housing (541) may form substantially the same plane. The third housing (531) may protrude rearward from the fourth housing (541) to form a step.

[0079] An installation space according to one embodiment may include a first installation area (A1) in which a first housing (511), a second housing (521), a third housing (531), and a fourth housing (541) are located, and a second installation area (A2) in which the first housing (511), the second housing (521), the third housing (531), and the fourth housing (541) are not located. The first installation area (A1) may include an area in which the second housing (521) is located on the first housing (511) (e.g., an area in which the second housing (521) is located on the upper surface of the first housing (511) of FIG. 10 (e.g., the XY plane of FIG. 10)) and an area in which the fourth housing (541) is located on the third housing (531) (e.g., an area in which the fourth housing (541) is located on the upper surface of the third housing (531) of FIG. 11). The second installation area (A2) may include an area where the second housing (521) is not located on the first housing (511) and an area where the fourth housing (541) is not located on the third housing (531). The first exhaust port (512) of the first gas distribution module (51) and the third exhaust port (532) of the third gas distribution module (53) may be located in the second installation area (A2). That is, the first exhaust port (512) may be located on the first housing (511) and the third housing (531), respectively, without causing positional interference with the second housing (521), and without causing positional interference with the fourth housing (541).

[0081] FIG. 12 is a front view of a gas supply system according to one embodiment. FIG. 13 is a right side view of the gas supply system according to FIG. 12. FIG. 14 is a left side view of the gas supply system according to FIG. 12.

[0082] Referring to FIGS. 12 to 14, a gas supply system (6) according to one embodiment may include a plurality of gas distribution modules (61, 62) and a controller (C). The plurality of gas distribution modules (61, 62) may include a first gas distribution module (61), a second gas distribution module (62) disposed on the first gas distribution module (61), a third gas distribution module (63) disposed on the second gas distribution module (62), a fourth gas distribution module (64), a fifth gas distribution module (65) disposed on the fourth gas distribution module (64), and a sixth gas distribution module (66) disposed on the fifth gas distribution module (65). The first gas distribution module (61), the second gas distribution module (62), and the third gas distribution module (63) may be disposed in the opposite direction to the fourth gas distribution module (64), the fifth gas distribution module (65), and the sixth gas distribution module (66) with respect to the controller (C). For example, the first gas distribution module (61), the second gas distribution module (62), and the third gas distribution module (63) may be placed on one side of the controller (C) (e.g., the +X-axis direction of FIG. 12), and the fourth gas distribution module (64), the fifth gas distribution module (65), and the sixth gas distribution module (66) may be placed on the other side of the controller (C) (e.g., the -X-axis direction of FIG. 12).

[0083] The first gas distribution module (61) may include a first housing (611) and a first exhaust port (612) formed protruding from the first housing (611). The second gas distribution module (62) may be disposed on the first housing (611). The second gas distribution module (62) may include a second housing (621) and a second exhaust port (622) formed protruding from the second housing (621). The third gas distribution module (63) may be disposed on the second housing (621). The third gas distribution module (63) may include a third housing (631) and a third exhaust port (632) formed protruding from the third housing (631). The fourth gas distribution module (64) may include a fourth housing (641) and a fourth exhaust port (642) formed protruding from the fourth housing (641). The fifth gas distribution module (65) may be disposed on the fourth housing (641). The fifth gas distribution module (65) may include a fifth housing (651) and a fifth exhaust port (652) formed protruding from the fifth housing (651). The sixth gas distribution module (66) may be disposed on the fifth housing (651). The sixth gas distribution module (66) may include a sixth housing (661) and a sixth exhaust port (662) formed protruding from the sixth housing (661).

[0084] The vertical length of the first housing (611) (e.g., length in the Y-axis direction of FIG. 12) may be configured to be longer than the vertical length of the second housing (621). The vertical length of the second housing (621) may be configured to be longer than the vertical length of the third housing (631). Due to these dimensional differences, the first housing (611) and the second housing (621), and the second housing (621) and the third housing (631) may be stacked such that a step is formed in the rear, respectively. For example, when viewing a plurality of gas distribution modules (61, 62) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 12), referring to FIG. 13, the front of the first housing (611) (e.g., the XZ plane of FIG. 13), the front of the second housing (621) and the front of the third housing (631) may form substantially the same plane. The first housing (611) may protrude rearward from the second housing (621) to form a step. The second housing (621) may protrude rearward from the third housing (631) to form a step.

[0085] The vertical length of the fourth housing (641) (e.g., length in the Y-axis direction of FIG. 12) may be configured to be longer than the vertical length of the fifth housing (651). The vertical length of the fifth housing (651) may be configured to be longer than the vertical length of the sixth housing (661). Due to these dimensional differences, the fourth housing (641) and the fifth housing (651), and the fifth housing (651) and the sixth housing (661) may be stacked such that a step is formed in the rear, respectively. For example, when viewing the plurality of gas distribution modules (61, 62) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 12), referring to FIG. 14, the front of the fourth housing (641) (e.g., the XZ plane of FIG. 14), the front of the fifth housing (651), and the front of the sixth housing (661) may form substantially the same plane. The fourth housing (641) may protrude rearward from the fifth housing (651) to form a step. The fifth housing (651) may protrude rearward from the sixth housing (661) to form a step.

[0086] An installation space according to one embodiment may include a first installation area (A1) where a first housing (611), a second housing (621), a third housing (631), a fourth housing (641), a fifth housing (651), and a sixth housing (661) are located, and a second installation area (A2) where the first housing (611), the second housing (621), the third housing (631), the fourth housing (641), the fifth housing (651), and the sixth housing (661) are not located. The first installation area (A1) may include an area where the second housing (621) is located on the first housing (611) (e.g., an area where the second housing (621) is located on the upper surface of the first housing (611) of FIG. 13 (e.g., the XY plane of FIG. 13), an area where the third housing (631) is located on the second housing (621), an area where the fifth housing (651) is located on the fourth housing (641), and an area where the sixth housing (661) is located on the fifth housing (651).

[0087] The second installation area (A2) may include an area where the second housing (621) is not located on the first housing (611), an area where the third housing (631) is not located on the second housing (621), an area where the fifth housing (651) is not located on the fourth housing (641), and an area where the sixth housing (661) is not located on the fifth housing (651). The first exhaust port (612) of the first gas distribution module (61), the second exhaust port (622) of the second gas distribution module (62), the fourth exhaust port (642) of the fourth gas distribution module (64), and the fifth exhaust port (652) of the fifth gas distribution module (65) may be located in the second installation area (A2). That is, the first exhaust port (612) can be positioned on the first housing (611), the second housing (621), the fourth housing (641), and the fifth housing (651), respectively, without causing positional interference with the second housing (621), without causing positional interference with the third housing (631), without causing positional interference with the fourth exhaust port (642), without causing positional interference with the fifth housing (651), and without causing positional interference with the sixth housing (661).

[0089] FIG. 15 is a front view of a gas supply system according to one embodiment. FIG. 16 is a right side view of the gas supply system according to FIG. 15. FIG. 17 is a left side view of the gas supply system according to FIG. 15.

[0090] Referring to FIGS. 15 to 17, a gas supply system (7) according to one embodiment may include a plurality of gas distribution modules (71, 72) and a controller (C). The plurality of gas distribution modules (71, 72) may include a first gas distribution module (71), a second gas distribution module (72) disposed on the first gas distribution module (71), a third gas distribution module (73) disposed on the second gas distribution module (72), a fourth gas distribution module (74), a fifth gas distribution module (75) disposed on the fourth gas distribution module (74), and a sixth gas distribution module (76) disposed on the fifth gas distribution module (75). The first gas distribution module (71), the second gas distribution module (72), and the third gas distribution module (73) may be disposed in the opposite direction to the fourth gas distribution module (74), the fifth gas distribution module (75), and the sixth gas distribution module (76) with respect to the controller (C). For example, the first gas distribution module (71), the second gas distribution module (72), and the third gas distribution module (73) may be placed on one side of the controller (C) (e.g., in the +X-axis direction of FIG. 15), and the fourth gas distribution module (74), the fifth gas distribution module (75), and the sixth gas distribution module (76) may be placed on the other side of the controller (C) (e.g., in the -X-axis direction of FIG. 15).

[0091] The first gas distribution module (71) may include a first housing (711) and a first exhaust port (712) formed protruding from the first housing (711). The second gas distribution module (72) may be disposed on the first housing (711). The second gas distribution module (72) may include a second housing (721) and a second exhaust port (722) formed protruding from the second housing (721). The third gas distribution module (73) may be disposed on the second housing (721). The third gas distribution module (73) may include a third housing (731) and a third exhaust port (732) formed protruding from the third housing (731). The fourth gas distribution module (74) may include a fourth housing (741) and a fourth exhaust port (742) formed protruding from the fourth housing (741). The fifth gas distribution module (75) may be disposed on the fourth housing (741). The fifth gas distribution module (75) may include the fifth housing (751) and a fifth exhaust port (752) formed protruding from the fifth housing (751). The sixth gas distribution module (76) may be disposed on the fifth housing (751). The sixth gas distribution module (76) may include the sixth housing (761) and a sixth exhaust port (762) formed protruding from the sixth housing (761).

[0092] The horizontal length of the first housing (711) (e.g., length in the X-axis direction of FIG. 15) may be configured to be longer than the horizontal length of the second housing (721). The horizontal length of the second housing (721) may be configured to be longer than the horizontal length of the third housing (731). Due to these dimensional differences, the first housing (711) and the second housing (721), and the second housing (721) and the third housing (731) may be stacked such that a step is formed laterally. The vertical length of the first housing (711) (e.g., length in the Y-axis direction of FIG. 15) may also be configured to be longer than the vertical length of the second housing (721). The vertical length of the second housing (721) may also be configured to be longer than the vertical length of the third housing (731). Due to these dimensional differences, the first housing (711) and the second housing (721), and the second housing (721) and the third housing (731) can be stacked such that a step is formed in the rearward direction, respectively. That is, the first housing (711) and the second housing (721), and the second housing (721) and the third housing (731) can be stacked such that a step is formed in the rearward direction, respectively. For example, when viewing a plurality of gas distribution modules (71, 72) from the front (e.g., in the +Y-axis direction of FIG. 15), referring to FIG. 15, the first housing (711) can be protruded laterally more than the second housing (721) to form a step, and the second housing (721) can be protruded laterally more than the third housing (731) to form a step. For example, when viewing multiple gas distribution modules (71, 72) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 15), with reference to FIG. 16, the front of the first housing (711), the front of the second housing (721), and the front of the third housing (731) may form substantially the same plane. The first housing (711) may protrude rearward from the second housing (721) to form a step. The second housing (721) may protrude rearward from the third housing (731) to form a step.

[0093] The horizontal length of the fourth housing (741) (e.g., length in the X-axis direction of FIG. 15) may be configured to be longer than the horizontal length of the fifth housing (751). The horizontal length of the fifth housing (751) may be configured to be longer than the horizontal length of the sixth housing (761). Due to these dimensional differences, the fourth housing (741) and the fifth housing (751), and the fifth housing (751) and the sixth housing (761) may be stacked such that a step is formed laterally. The vertical length of the fourth housing (741) (e.g., length in the Y-axis direction of FIG. 15) may also be configured to be longer than the vertical length of the fifth housing (751). The vertical length of the fifth housing (751) may also be configured to be longer than the vertical length of the sixth housing (761). Due to these dimensional differences, the fourth housing (741) and the fifth housing (751), and the fifth housing (751) and the sixth housing (761) can be stacked such that a step is formed in the rearward direction, respectively. That is, the fourth housing (741) and the fifth housing (751), and the fifth housing (751) and the sixth housing (761) can be stacked such that a step is formed in the rearward direction, respectively. For example, when viewing a plurality of gas distribution modules (71, 72) from the front (e.g., in the +Y-axis direction of FIG. 15), referring to FIG. 15, the fourth housing (741) can be protruded laterally more than the fifth housing (751) to form a step, and the fifth housing (751) can be protruded laterally more than the sixth housing (761) to form a step. For example, when viewing multiple gas distribution modules (71, 72) laterally (e.g., in the +X-axis direction or -X-axis direction of FIG. 15), with reference to FIG. 17, the front of the fourth housing (741), the front of the fifth housing (751), and the front of the sixth housing (761) may form substantially the same plane. The fourth housing (741) may protrude rearward from the fifth housing (751) to form a step. The fifth housing (751) may protrude rearward from the sixth housing (761) to form a step.

[0094] An installation space according to one embodiment may include a first installation area (A1) where a first housing (711), a second housing (721), a third housing (731), a fourth housing (741), a fifth housing (751), and a sixth housing (761) are located, and a second installation area (A2) where the first housing (711), the second housing (721), the third housing (731), the fourth housing (741), the fifth housing (751), and the sixth housing (761) are not located. The first installation area (A1) may include an area where the second housing (721) is located on the first housing (711) (e.g., an area where the second housing (721) is located on the upper surface of the first housing (711) of FIG. 16 (e.g., the XY plane of FIG. 16), an area where the third housing (731) is located on the second housing (721), an area where the fifth housing (751) is located on the fourth housing (741), and an area where the sixth housing (761) is located on the fifth housing (751).

[0095] The second installation area (A2) may include an area where the second housing (721) is not located on the first housing (711), an area where the third housing (731) is not located on the second housing (721), an area where the fifth housing (751) is not located on the fourth housing (741), and an area where the sixth housing (761) is not located on the fifth housing (751). The first exhaust port (712) of the first gas distribution module (71), the second exhaust port (722) of the second gas distribution module (72), the fourth exhaust port (742) of the fourth gas distribution module (74), and the fifth exhaust port (752) of the fifth gas distribution module (75) may be located in the second installation area (A2). That is, the first exhaust port (712) can be positioned on the first housing (711), the second housing (721), the fourth housing (741), and the fifth housing (751), respectively, without causing positional interference with the second housing (721), without causing positional interference with the third housing (731), without causing positional interference with the fourth exhaust port (742), without causing positional interference with the fifth housing (751), and without causing positional interference with the sixth housing (761).

[0097] In the present disclosure, the number of gas distribution modules is depicted as being up to six, but this is merely an example and the number of gas distribution modules is not limited to six or fewer. For example, it should be noted that the number of gas distribution modules may be seven or more.

[0098] Although the embodiments described above have been explained with reference to limited drawings, those skilled in the art can apply various technical modifications and variations based on the above. For example, appropriate results can be achieved even if the described techniques are performed in a different order than described, and / or the components of the described system, structure, device, circuit, etc. are combined or assembled in a form different from described, or replaced or substituted by other components or equivalents.

[0099] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below.

Claims

Claim 1 A gas supply system comprising: a plurality of gas distribution modules disposed in an installation space of the gas supply system; and a controller connected to the plurality of gas distribution modules and configured to control the operation of each of the plurality of gas distribution modules, wherein each of the plurality of gas distribution modules comprises: a housing; and a gas distribution device disposed within the housing, wherein one of the plurality of gas distribution modules is stacked with another gas distribution module, and when looking at the top of the plurality of gas distribution modules, the housings have a horizontal direction and a vertical direction, and at least two of the housings have different horizontal lengths or vertical lengths, thereby forming a step difference between them, and the installation space comprises a first installation area where at least one of the housings of the plurality of gas distribution modules is located or a second installation area where the at least one housing is not located, wherein the first installation area and the second installation area are partitioned by a step difference formed between the housings, and the exhaust ports of the plurality of gas distribution modules are located in the second installation area. Claim 2 delete Claim 3 delete Claim 4 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises a first gas distribution module including a first housing and a first exhaust port, and a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port, wherein the first housing has a longer longitudinal length than the second housing. Claim 5 A gas supply system according to claim 4, wherein when the plurality of gas distribution modules are viewed laterally, the front of the first housing and the front of the second housing form the same plane, and the first housing protrudes rearward from the second housing to form a step. Claim 6 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises a first gas distribution module including a first housing and a first exhaust port, and a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port, wherein the first housing has a longer transverse length than the second housing. Claim 7 A gas supply system according to claim 6, wherein when viewing the plurality of gas distribution modules from the front, the first housing protrudes laterally from the second housing to form a step. Claim 8 A gas supply system according to claim 4 or 6, wherein the first installation area includes an area where the second housing is located on the first housing, the second installation area includes an area where the second housing is not located on the first housing, and the first exhaust port is located in the second installation area. Claim 9 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises: a first gas distribution module disposed on one side of the controller and including a first housing and a first exhaust port; a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port; a third gas distribution module disposed on the other side of the controller and including a third housing and a third exhaust port; and a fourth gas distribution module disposed on the third housing and including a fourth housing and a fourth exhaust port, wherein the first housing has a longer longitudinal length than the second housing and the third housing has a longer longitudinal length than the fourth housing. Claim 10 A gas supply system according to claim 9, wherein when the plurality of gas distribution modules are viewed laterally, the front of the first housing and the front of the second housing form the same plane, the front of the third housing and the front of the fourth housing form the same plane, the first housing protrudes rearward from the second housing to form a step, and the third housing protrudes rearward from the fourth housing to form a step. Claim 11 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises: a first gas distribution module disposed on one side of the controller and including a first housing and a first exhaust port; a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port; a third gas distribution module disposed on the other side of the controller and including a third housing and a third exhaust port; and a fourth gas distribution module disposed on the third housing and including a fourth housing and a fourth exhaust port, wherein the first housing has a longer transverse length than the second housing and the third housing has a longer transverse length than the fourth housing. Claim 12 A gas supply system according to claim 11, wherein when viewing the plurality of gas distribution modules from the front, the first housing protrudes laterally from the second housing to form a step, and the third housing protrudes laterally from the fourth housing to form a step. Claim 13 A gas supply system according to claim 9 or 11, wherein the first installation area includes an area where the second housing is located on the first housing and an area where the fourth housing is located on the third housing, the second installation area includes an area where the second housing is not located on the first housing and an area where the fourth housing is not located on the third housing, and the first exhaust port and the third exhaust port are located in the second installation area. Claim 14 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises: a first gas distribution module disposed on one side of the controller and including a first housing and a first exhaust port; a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port; a third gas distribution module disposed on the second housing and including a third housing and a third exhaust port; a fourth gas distribution module disposed on the other side of the controller and including a fourth housing and a fourth exhaust port; and a fifth gas distribution module disposed on the fourth housing and including a fifth housing and a fifth exhaust port, and a sixth gas distribution module disposed on the fifth housing and including a sixth housing and a sixth exhaust port, wherein the first housing has a longer longitudinal length than the second housing, the second housing has a longer longitudinal length than the third housing, the fourth housing has a longer longitudinal length than the fifth housing, and the fifth housing has a longer longitudinal length than the sixth housing. Claim 15 A gas supply system according to claim 14, wherein when the plurality of gas distribution modules are viewed laterally, the front of the first housing, the front of the second housing, and the front of the third housing form the same plane, the front of the fourth housing, the front of the fifth housing, and the front of the sixth housing form the same plane, the first housing protrudes rearward from the second housing to form a step, the second housing protrudes rearward from the third housing to form a step, the fourth housing protrudes rearward from the fifth housing to form a step, and the fifth housing protrudes rearward from the sixth housing to form a step. Claim 16 A gas supply system according to claim 1, wherein the plurality of gas distribution modules comprises: a first gas distribution module disposed on one side of the controller and including a first housing and a first exhaust port; a second gas distribution module disposed on the first housing and including a second housing and a second exhaust port; a third gas distribution module disposed on the second housing and including a third housing and a third exhaust port; a fourth gas distribution module disposed on the other side of the controller and including a fourth housing and a fourth exhaust port; and a fifth gas distribution module disposed on the fourth housing and including a fifth housing and a fifth exhaust port, and a sixth gas distribution module disposed on the fifth housing and including a sixth housing and a sixth exhaust port, wherein the first housing has a longer transverse length than the second housing, the second housing has a longer transverse length than the third housing, the fourth housing has a longer transverse length than the fifth housing, and the fifth housing has a longer transverse length than the sixth housing. Claim 17 A gas supply system according to claim 16, wherein when viewing the plurality of gas distribution modules from the front, the first housing protrudes horizontally more than the second housing to form a step, the second housing protrudes horizontally more than the third housing to form a step, the fourth housing protrudes horizontally more than the fifth housing to form a step, and the fifth housing protrudes horizontally more than the sixth housing to form a step. Claim 18 A gas supply system according to claim 14 or 16, wherein the first installation area includes an area where the second housing is located on the first housing, an area where the third housing is located on the second housing, an area where the fifth housing is located on the fourth housing, and an area where the sixth housing is located on the fifth housing, and the second installation area includes an area where the second housing is not located on the first housing, an area where the third housing is not located on the second housing, an area where the fifth housing is not located on the fourth housing, and an area where the sixth housing is not located on the fifth housing, and the first exhaust port, the second exhaust port, the fourth exhaust port, and the fifth exhaust port are located in the second installation area. Claim 19 A gas supply system according to claim 1, wherein each of the plurality of gas distribution modules is stacked in a manner that does not cause positional interference with other gas distribution modules. Claim 20 A gas supply system according to claim 1, wherein each of the plurality of gas distribution modules further includes an exhaust port configured to protrude to the outside of the housing. Claim 21 A gas supply system according to claim 1, wherein the plurality of gas distribution modules are stacked in a manner that surrounds the controller. Claim 22 A gas supply system according to claim 1, wherein each of the plurality of gas distribution modules further comprises an indicator lamp configured to light up when selected or controlled by the controller and to turn off when the selection or control by the controller is released. Claim 23 A gas supply system according to claim 1, wherein the controller comprises a main operating switch configured to determine whether the operation of all of the plurality of gas distribution modules is activated. Claim 24 A gas supply system according to claim 1, wherein each of the plurality of gas distribution modules comprises a sub-operation switch configured to determine whether the operation of each of the plurality of gas distribution modules is activated. Claim 25 A gas supply system according to claim 1, wherein each of the plurality of gas distribution modules is provided with at least one of a UVIR sensor configured to detect ultraviolet and infrared rays, a temperature sensor configured to detect a temperature rise, and a sprinkler for fire suppression.

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