System for automatic inspection of CMP Pad

Abstract

An automatic inspection system is provided that automatically performs weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement of a CMP Pad. An automatic inspection device according to an embodiment of the present invention comprises: a loading unit for loading a CMP Pad (Chemical Mechanical Polishing Pad); a weight measuring unit for measuring the weight of the CMP Pad loaded by the loading unit; a vision inspection unit for receiving the CMP Pad for which weight measurement is completed and performing a vision inspection of the CMP Pad; a thickness inspection unit for receiving the CMP Pad for which vision inspection is completed and performing a thickness inspection of the CMP Pad; a hardness measuring unit for receiving the CMP Pad for which thickness inspection is completed and measuring the hardness of the CMP Pad; and an unloading unit for unloading the CMP Pad for which hardness measurement is completed. By doing so, the transfer and each inspection process (weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement) for the inspection process of the CMP Pad are automated, thereby improving work productivity in the inspection process of the CMP Pad.

Description

Technology Field

[0001] The present invention relates to a system for an inspection process of a CMP Pad (Chemical Mechanical Polishing Pad) used during the processing of semiconductor wafers, and more specifically, to an automatic inspection system that automatically performs weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement of a CMP Pad. Background Technology

[0003] CMP pads are essential materials for processing semiconductor wafers, and the production process is very complex and diverse.

[0004] The existing inspection process for CMP PADs involved a personnel member manually transporting the CMP PAD to measure its weight, placing it on a workbench to inspect for bubbles and foreign matter (vision inspection), and subsequently performing thickness and hardness measurements sequentially.

[0005] These existing inspection processes have the problem of reduced productivity due to low work efficiency, as personnel must directly transport CMP pads and manually perform each step. The problem to be solved

[0007] The present invention has been devised to solve the above-mentioned problems, and the objective of the present invention is to provide an automatic inspection system capable of automating the transfer and each inspection process (weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement) for the inspection process of a CMP PAD. means of solving the problem

[0009] An automatic inspection device according to an embodiment of the present invention for achieving the above objective comprises: a loading unit for loading a CMP Pad (Chemical Mechanical Polishing Pad); a weight measuring unit for measuring the weight of the CMP Pad loaded by the loading unit; a vision inspection unit for receiving the CMP Pad for which the weight measurement is completed and performing a vision inspection of the CMP Pad; a thickness inspection unit for receiving the CMP Pad for which the vision inspection is completed and performing a thickness inspection of the CMP Pad; a hardness measuring unit for receiving the CMP Pad for which the thickness inspection is completed and measuring the hardness of the CMP Pad; and an unloading unit for unloading the CMP Pad for which the hardness measurement is completed.

[0010] And the loading unit may include: a first pad picker that transfers the CMP Pad loaded on the unmanned transport vehicle to a weight measuring unit when the unmanned transport vehicle loaded with the CMP Pad to be inspected reaches a preset position; and a first transfer that allows the first pad picker to move along the first X-axis track and the first Y-axis track, provided that the first X-axis track is extended along the horizontal direction (X-axis) and the first Y-axis track is extended along the vertical direction (Y-axis).

[0011] Additionally, the weight measuring unit may include a load cell for measuring the weight of the CMP Pad; and a shutter provided above the load cell, which remains open when the CMP Pad is placed on the load cell, but changes to a closed state when the load cell measures the weight of the CMP Pad.

[0012] And, according to one embodiment of the present invention, the automatic inspection device may further include an inverter provided between the weight measuring unit and the vision inspection unit to invert the upper and lower sides of the CMP Pad after the weight measurement is completed.

[0013] In addition, when the vision inspection unit performs a vision inspection of the CMP Pad, it can inspect the surface (appearance) of the CMP Pad to determine whether there are bubbles, foreign substances, or scratches.

[0014] And, according to one embodiment of the present invention, the automatic inspection device may further include a conveyor unit that extends from the rear end of the vision inspection unit to the hardness measurement unit, and transfers the CMP Pad that has completed vision inspection to the thickness inspection unit and transfers the CMP Pad that has completed thickness inspection to the hardness measurement unit.

[0015] Additionally, the thickness inspection unit may include a pair of CMMs (Coordinate Measuring Machines) provided on the left and right sides of the conveyor unit, respectively; a second pad picker that transfers a CMP Pad transported through the conveyor unit to the empty CMM among the pair of CMMs and transfers the CMP Pad, for which thickness inspection has been completed, to the conveyor unit; and a second transfer unit that has a second X-axis track extended along the vertical direction (Y-axis) to allow the second pad picker to move left and right along the second X-axis track.

[0016] And the hardness measuring unit may include: a hardness meter that measures the hardness of a CMP Pad placed on the upper side when a CMP Pad transported through the conveyor unit is placed on the upper side; a third pad picker that places a CMP Pad transported through the conveyor unit on the upper side of the hardness meter or transports a CMP Pad for which hardness measurement is completed to an unloading unit; and a third transfer that is provided with a third X-axis track extending along the horizontal direction (X-axis) and a third Y-axis track extending along the vertical direction (Y-axis), so that the third pad picker moves along the third X-axis track and the third Y-axis track.

[0017] Meanwhile, according to another embodiment of the present invention, an automatic inspection system comprises: an automatic inspection device including a loading unit for loading a CMP Pad (Chemical Mechanical Polishing Pad), a weight measuring unit for measuring the weight of the CMP Pad loaded by the loading unit, a vision inspection unit for receiving the CMP Pad for which weight measurement is completed and performing a vision inspection of the CMP Pad, a thickness inspection unit for receiving the CMP Pad for which vision inspection is completed and performing a thickness inspection of the CMP Pad, a hardness measuring unit for receiving the CMP Pad for which thickness inspection is completed and measuring the hardness of the CMP Pad, and an unloading unit for unloading the CMP Pad for which hardness measurement is completed; and a control device for setting a transport route of an unmanned transport vehicle loaded with a CMP Pad to be inspected; wherein, when there are multiple automatic inspection devices, the control device sets an optimal transport route for setting the automatic inspection device that can shorten the inspection waiting time the most by considering the number of CMP Pads loaded and the number of CMP Pads unloaded in each automatic inspection device. Effects of the invention

[0019] As described above, according to the embodiments of the present invention, the transfer and each inspection process (weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement) for the inspection process of a CMP PAD can be automated to improve work productivity in the inspection process of a CMP Pad. Brief explanation of the drawing

[0021] FIG. 1 is a drawing provided for the description of the configuration of an automatic inspection system according to one embodiment of the present invention, FIG. 2 is a block diagram provided for the description of an automatic inspection device according to an embodiment of the present invention, FIG. 3 is a drawing provided for the description of an automatic inspection device according to an embodiment of the present invention, FIG. 4 is a drawing provided for a more detailed description of a loading unit according to an embodiment of the present invention, FIG. 5 is a drawing provided for a more detailed description of a weight measuring unit according to one embodiment of the present invention, FIG. 6 is a drawing provided for a more detailed description of a thickness inspection unit according to one embodiment of the present invention, and FIG. 7 is a drawing provided for a more detailed description of a hardness measuring unit according to one embodiment of the present invention. Specific details for implementing the invention

[0022] The present invention will be described in more detail below with reference to the drawings.

[0023] FIG. 1 is a drawing provided to describe the configuration of an automatic inspection system according to one embodiment of the present invention.

[0024] The automatic inspection system according to the present embodiment can automatically perform transfer for the inspection process of a CMP PAD and each inspection process (weight measurement, bubble and foreign matter inspection, thickness measurement, and hardness measurement).

[0025] To this end, the automatic inspection system may include an automatic inspection device (100) that automatically performs the transfer and inspection process for the inspection process of the CMP PAD, and a control device (200) that sets the transport path of an unmanned transport vehicle (10) loaded with the CMP Pad to be inspected.

[0026] Specifically, when there are multiple automatic inspection devices (100), the control device (200) can set the optimal transport path of the unmanned transport vehicle (10) to set the automatic inspection device (100) that can shorten the inspection waiting time the most as the destination by considering the number of CMP Pads loaded and unloaded in each automatic inspection device (100) when CMP Pads to be inspected are loaded in the unmanned transport vehicle (10).

[0027] Here, the unmanned transport vehicle (10) can transport the CMP Pad to be inspected to a specific automatic inspection device (100) according to the optimal transport path set by the control device (200), or load the inspected CMP Pad and transport it to the next process location.

[0028] FIG. 2 is a block diagram provided for the description of an automatic inspection device (100) according to one embodiment of the present invention, and FIG. 3 is a drawing provided for the description of an automatic inspection device (100) according to one embodiment of the present invention.

[0029] Referring to FIGS. 2 and 3, the automatic inspection device (100) may include a loading unit (110), a weight measuring unit (120), a flipper (130), a vision inspection unit (140), a thickness inspection unit (150), a hardness measuring unit (160), a conveyor unit (170), and an unloading unit (180).

[0030] The loading unit (110) can load (load) the CMP Pad into the interior of the automatic inspection device (100) from the unmanned transport vehicle (10) that transports the CMP Pad to be inspected to a preset point.

[0031] The weight measuring unit (120) can measure the weight of the CMP Pad loaded by the loading unit (110), and the inverter (130) is provided between the weight measuring unit (120) and the vision inspection unit (140) to invert the upper and lower (front and back) sides of the CMP Pad whose weight measurement is completed and transmit it to the vision inspection unit (140).

[0032] The vision inspection unit (140) is provided at the rear end of the inverter (130) and can receive the CMP Pad that has been inverted vertically by the inverter (130) and perform vision inspection of the CMP Pad.

[0033] Specifically, the vision inspection unit (140) is equipped with a line scan camera and can inspect the surface (appearance) of the CMP Pad to determine whether there are bubbles, foreign matter, or scratches.

[0034] The thickness inspection unit (150) is provided at the rear end of the vision inspection unit (140) and can receive the CMP Pad after the vision inspection is completed and perform a thickness inspection of the CMP Pad.

[0035] The hardness measuring unit (160) is provided at the rear end of the thickness inspection unit (150) and can receive the CMP Pad after the thickness inspection is completed and measure the hardness of the CMP Pad.

[0036] The conveyor section (170) is formed to extend from the rear end of the vision inspection section (140) to the hardness measurement section (160), so that the CMP Pad that has completed vision inspection can be transported to the thickness inspection section (150) and the CMP Pad that has completed thickness inspection can be transported to the hardness measurement section (160).

[0037] The unloading unit (180) can unload (detach) the CMP Pad, for which hardness measurement has been completed, to the outside of the automatic inspection device (100) (e.g., a waiting unmanned transport vehicle (10)).

[0038] Here, the CMP Pad has necessary information marked on its upper surface by a laser, and the weight measuring unit (120), vision inspection unit (140), thickness inspection unit (150), and hardness measuring unit (160) can each recognize the information marked by a laser on the CMP Pad that performs inspection or measurement work and record it together with the inspection results.

[0039] FIG. 4 is a drawing provided for a more detailed description of a loading unit (110) according to one embodiment of the present invention.

[0040] Referring to FIG. 4, the loading unit (110) may include a first pad picker (111), a first transfer (112), and a loading control module (not shown).

[0041] The first pad picker (111) can lift the CMP Pad loaded on the unmanned transport vehicle (10) and transfer it to the weight measuring unit (120) when the unmanned transport vehicle (10) loaded with the CMP Pad to be inspected reaches a preset position.

[0042] The first transfer (112) is provided with a first X-axis track extending along the horizontal direction (X-axis) and a first Y-axis track extending along the vertical direction (Y-axis), so that the first pad picker (111) can move along the first X-axis track and the first Y-axis track.

[0043] The loading control module can control the first pad picker (111) and the first transfer (112) to lift the CMP Pad loaded on the unmanned transport vehicle (10) and transfer it to the weight measuring unit (120) by repeating from the initial coordinate to the end coordinate according to each coordinate value to which the first pad picker (111) must move for the loading operation.

[0044] Additionally, the unloading unit (180) may also include an unloading pad picker (not shown), an unloading transfer (not shown), and an unloading control module (not shown).

[0045] In the case of the unloading pad picker and unloading transfer, the configuration is implemented in the same way as the first pad picker (111) and the first transfer (112), so that the CMP Pad with the hardness measurement completed can be unloaded into the waiting unmanned transport vehicle (10).

[0046] The unloading control module can control the unloading pad picker and the unloading transfer to ensure that the CMP Pad, with its hardness measurement completed, is unloaded into the waiting unmanned transport vehicle (10).

[0047] In addition, the unloading control module can classify CMP Pads that are judged to be defective and CMP Pads that are judged to be normal because they do not reach a preset threshold in each inspection process (weight measurement, bubble and foreign matter inspection, thickness measurement and hardness measurement), and unload them to different unmanned transport vehicles (10).

[0048] That is, the unloading control module can classify CMP Pads that are judged to be defective based on the inspection results for each CMP Pad recorded along with the recognition results of laser-marked information, and unload them into an unmanned transport vehicle (10) for collecting defective items.

[0049] FIG. 5 is a drawing provided for a more detailed description of a weight measuring unit (120) according to one embodiment of the present invention.

[0050] Referring to FIG. 5, the weight measuring unit (120) may include a load cell (121) for measuring the weight of the CMP Pad and a shutter (122) provided on the upper side of the load cell (121).

[0051] The shutter (122) is provided on the upper side of the load cell (121) and remains in an open state when the CMP Pad is placed on the load cell (121), but can be changed to a closed state when the load cell (121) measures the weight of the CMP Pad.

[0052] FIG. 6 is a drawing provided for a more detailed description of a thickness inspection unit (150) according to one embodiment of the present invention.

[0053] Referring to FIG. 6, the thickness inspection unit (150) may include a CMM (151) capable of performing a thickness inspection by measuring the physical geometric characteristics of an object, a second pad picker (152) capable of lifting a CMP Pad transported through a conveyor unit (170) and transporting it to the CMM (151), and a second transfer (153) capable of causing the second pad picker (152) to move left and right along a second X-axis track.

[0054] The CMM (151) can be provided in pairs and placed on the left and right sides of the conveyor section (170), respectively.

[0055] The second pad picker (152) moves left and right along the second X-axis track and can lift the CMP Pad, which is being transported via the conveyor section (170), from the front of the thickness inspection section (150) and transport it to the empty CMM (151) among the pair of CMMs (151).

[0056] Additionally, the second pad picker (152) can transfer the CMP Pad, whose thickness inspection has been completed in the CMM (151), to the conveyor unit (170) located at the rear end of the thickness inspection unit (150) so that it can be delivered to the hardness measurement unit (160).

[0057] FIG. 7 is a drawing provided for a more detailed description of a hardness measuring unit (160) according to one embodiment of the present invention.

[0058] Referring to FIG. 7, the hardness measuring unit (160) may include a hardness meter (161), a third pad picker (162), and a third transfer (163).

[0059] The hardness meter (161) can measure the hardness of the CMP Pad placed on the upper side when the CMP Pad, which is transported through the conveyor unit (170) located at the rear end of the thickness inspection unit (150), is placed on the upper side.

[0060] The third pad picker (162) can place the CMP Pad on the upper side of the hardness meter (161) or transfer the CMP Pad, for which hardness measurement has been completed, to the unloading unit (180) via the conveying conveyor unit (170) located at the rear end of the thickness inspection unit (150).

[0061] The third transfer (163) is provided with a third X-axis track extending along the horizontal direction (X-axis) and a third Y-axis track extending along the vertical direction (Y-axis), so that the third pad picker (162) can move along the third X-axis track and the third Y-axis track.

[0062] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above. Various modifications are possible by those skilled in the art without departing from the essence of the invention as claimed in the claims, and such modifications should not be understood individually from the technical spirit or perspective of the present invention. Explanation of the symbols

[0064] 10: Automated Guided Vehicle (AGV) 100: Automatic Inspection Device 110 : Loading section 111 : 1st pad picker 112: 1st Transfer 120: Weight Measuring Unit 121 : Load cell 122 : Shutter 130: Inverter 140: Vision Inspection Unit 150 : Thickness inspection unit 151: CMM (Coordinate Measuring Machine) 152: 2nd Pad Picker 153: 2nd Transfer 160: Hardness measuring unit 161: Hardness tester 162 : 3rd Pad Picker 163 : 3rd Transfer 170: Conveyor section 180: Unloading section 200: Control unit

Claims

Claim 1 A loading unit for loading a CMP Pad (Chemical Mechanical Polishing Pad); a weight measuring unit for measuring the weight of the CMP Pad loaded by the loading unit; a vision inspection unit for receiving the CMP Pad for which weight measurement is completed and performing a vision inspection of the CMP Pad; a thickness inspection unit for receiving the CMP Pad for which vision inspection is completed and performing a thickness inspection of the CMP Pad; a hardness measuring unit for receiving the CMP Pad for which thickness inspection is completed and measuring the hardness of the CMP Pad; and an unloading unit for unloading the CMP Pad for which hardness measurement is completed. An automatic inspection device for a CMP Pad, characterized by comprising: a conveyor unit extending from the rear end of a vision inspection unit to a hardness measurement unit, which transfers a CMP Pad that has completed vision inspection to a thickness inspection unit and transfers a CMP Pad that has completed thickness inspection to a hardness measurement unit; wherein the thickness inspection unit comprises: a pair of CMMs (Coordinate Measuring Machines) provided on the left and right sides of the conveyor unit, respectively; a second pad picker that transfers a CMP Pad transferred through the conveyor unit to an empty CMM among the pair of CMMs and transfers a CMP Pad that has completed thickness inspection from the CMM to the conveyor unit; and a second transfer unit provided with a second X-axis track extending along the horizontal direction (X-axis) to allow the second pad picker to move left and right along the second X-axis track. Claim 2 The automatic inspection device for a CMP Pad according to claim 1, wherein the loading unit comprises: a first pad picker that transfers the CMP Pad loaded on the unmanned transport vehicle (AGV) to a weight measuring unit when the unmanned transport vehicle (AGV) loaded with the CMP Pad to be inspected reaches a preset position; and a first transfer that provides a first X-axis track extending along the horizontal direction (X-axis) and a first Y-axis track extending along the vertical direction (Y-axis) so that the first pad picker moves along the first X-axis track and the first Y-axis track. Claim 3 An automatic inspection device for a CMP Pad according to claim 1, wherein the weight measuring unit comprises: a load cell for measuring the weight of a CMP Pad; and a shutter provided above the load cell, which maintains an open state when the CMP Pad is placed on the load cell, and changes to a closed state when the load cell measures the weight of the CMP Pad. Claim 4 An automatic inspection device for a CMP Pad according to claim 1, further comprising an inverter provided between a weight measuring unit and a vision inspection unit to invert the upper and lower sides of the CMP Pad after weight measurement is completed. Claim 5 An automatic inspection device for a CMP Pad according to claim 1, wherein the vision inspection unit, when performing a vision inspection of the CMP Pad, inspects the surface of the CMP Pad to determine whether there are bubbles, foreign matter, or scratches. Claim 6 delete Claim 7 delete Claim 8 The automatic inspection device for a CMP Pad according to claim 1, wherein the hardness measuring unit comprises: a hardness meter that measures the hardness of a CMP Pad placed on the upper side when a CMP Pad transported through a conveyor unit is placed on the upper side; a third pad picker that places a CMP Pad transported through a conveyor unit on the upper side of the hardness meter or transports a CMP Pad for which hardness measurement is completed to an unloading unit; and a third transfer that is provided with a third X-axis track extending along the horizontal direction (X-axis) and a third Y-axis track extending along the vertical direction (Y-axis), so that the third pad picker moves along the third X-axis track and the third Y-axis track. Claim 9 An automatic inspection device comprising: a loading unit for loading a CMP Pad (Chemical Mechanical Polishing Pad); a weight measuring unit for measuring the weight of the CMP Pad loaded by the loading unit; a vision inspection unit that receives the CMP Pad for which weight measurement is completed and performs a vision inspection of the CMP Pad; a thickness inspection unit that receives the CMP Pad for which vision inspection is completed and performs a thickness inspection of the CMP Pad; a hardness measuring unit that receives the CMP Pad for which thickness inspection is completed and measures the hardness of the CMP Pad; and an unloading unit for unloading the CMP Pad for which hardness measurement is completed; The system includes a control device for setting a return path for an unmanned transport vehicle loaded with CMP Pads to be inspected; wherein, when there are multiple automatic inspection devices, the control device sets an optimal return path to set the automatic inspection device that can minimize the inspection waiting time as the destination by considering the number of CMP Pads loaded and unloaded in each automatic inspection device; and the automatic inspection device further includes a conveyor unit that extends from the rear end of the vision inspection unit to the hardness measurement unit, and transfers CMP Pads that have completed vision inspection to the thickness inspection unit and transfers CMP Pads that have completed thickness inspection to the hardness measurement unit; and the thickness inspection unit includes a pair of CMMs (Coordinate Measuring Machines) provided on the left and right sides of the conveyor unit, respectively; and a second pad picker that transfers CMP Pads transferred through the conveyor unit to the empty CMM among the pair of CMMs and transfers CMP Pads that have completed thickness inspection from the CMM to the conveyor unit. An automatic inspection system for a CMP Pad characterized by including a second transfer that allows a second pad picker to move left and right along the second X-axis track, wherein a second X-axis track is provided that extends along the horizontal direction (X-axis).

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