Positioning system to enable a soft landing for replaceable edge rings in a plasma processing system

Abstract

A positioning system for an edge ring of a plasma processing system includes an arm assembly including an arm support and M lower arms extending radially outwardly from the arm support, where M is an integer greater than two. M upper arms are attached to and extend upwardly from radially outer ends of the M lower arms. M orientation lock sleeves are connected to upper ends of the M upper arms. M lift pins are connected to the M orientation lock sleeves and configured to raise and lower the edge ring.

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