System and method for manufacturing metal nanostructure

Abstract

The present invention relates to a system and a method for manufacturing a metal nanostructure. According to the present invention, the system for manufacturing a metal nanostructure comprises: a heat treatment unit for applying heat treatment to a substrate on which a metal thin film is formed; a measurement unit for measuring spectroscopic data of a nanostructure formed on the substrate as the heat treatment is applied by the heat treatment unit; a classifier, which receives the spectroscopic data measured by the measurement unit, so as to classify the specification of the nanostructure; and a control unit for controlling an operation of the heat treatment unit according to the classification results of the classifier. According to the present invention, when a metal nanostructure is manufactured, the metal nanostructure having a specific specification can be more elaborately manufactured by receiving feedback of spectroscopic measurement data. In addition, spectroscopic characteristics can be analyzed by artificial intelligence, thereby facilitating data analysis of a spectroscopy-based medical device and optical biosensor.

Description

System and method for manufacturing metal nanostructures

[0001] The present invention relates to a system and method for manufacturing a metal nanostructure, and more particularly, to a system and method for manufacturing a metal nanostructure, which classifies the specifications of a nanostructure by measuring spectral data of a nanostructure formed through heat treatment, and manufactures a nanostructure by applying heat treatment until the nanostructure reaches a specific specification.

[0002] Metal nanostructures are a technology that utilizes nanometer-sized metal islands to develop various technological applications. They provide new properties and functions by utilizing materials and material properties at the nano level, and are making innovative progress in various fields.

[0003] In particular, in the bio-medical field, metal nanostructure technology is one of the nanosensor technologies such as biosensors, and research on it is actively being conducted as it is utilized to observe and analyze specific nanometer-sized structures at high resolution in inspection equipment such as scanning electron microscopes and atomic force microscopes.

[0004] When fabricating metal nanostructures, heat treatment technology is generally required, and heat treatment is used to control and optimize the size, shape, structure, and properties of metal nanoparticles.

[0005] However, the fabrication of nanostructures using heat treatment has limitations in that it is difficult to perform the process while understanding the structure and characteristics, and even when manufactured at the same temperature, it is difficult to form a consistent pattern, making it difficult to fabricate precise nanostructures.

[0006] According to the present invention, the present invention provides a system and method for manufacturing a metal nanostructure, which classifies the specifications of a nanostructure by measuring spectral data of a nanostructure formed through heat treatment, and manufactures a nanostructure by applying heat treatment until the nanostructure reaches a specific specification.

[0007] According to one embodiment of the present invention for achieving such a technical task, a system for manufacturing a metal nanostructure includes: a heat treatment unit for applying heat treatment to a substrate on which a metal thin film is formed; a measurement unit for measuring spectral data of a nanostructure formed on the substrate as the heat treatment is applied by the heat treatment unit; a classifier for receiving the spectral data measured by the measurement unit and classifying the specifications of the nanostructure; and a control unit for controlling the operation of the heat treatment unit according to the classification result by the classifier.

[0008] According to another embodiment of the present invention, a method for manufacturing a metal nanostructure includes the steps of: manufacturing a metal nanostructure by applying heat treatment to a substrate on which a metal thin film is formed; measuring spectral data of a nanostructure formed on the substrate as the heat treatment is applied; receiving the measured spectral data and classifying the specifications of the nanostructure; and controlling a heat treatment operation according to the classification result.

[0009] In this way, according to the present invention, when manufacturing a metal nanostructure, feedback of spectroscopic measurement data can be received to more precisely manufacture a metal nanostructure of specific specifications.

[0010] Additionally, the characteristics of spectra can be analyzed using artificial intelligence, facilitating data analysis of spectroscopic-based medical devices and optical biosensors.

[0011] FIG. 1 is a drawing illustrating the configuration of a metal nanostructure manufacturing system according to one embodiment of the present invention.

[0012] Figure 2 is a drawing for explaining a measuring unit according to one embodiment of the present invention.

[0013] FIG. 3 is a drawing for explaining a classifier according to one embodiment of the present invention.

[0014] FIG. 4 is a diagram illustrating an example of a spectroscopic measurement data set according to one embodiment of the present invention.

[0015] FIG. 5 is a diagram illustrating a flow of a method for manufacturing a metal nanostructure according to one embodiment of the present invention.

[0016] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. In this process, the thickness of lines and the sizes of components depicted in the drawings may be exaggerated for clarity and convenience of explanation.

[0017] Furthermore, the terms described below are defined based on their functions within the present invention, and may vary depending on the intent or custom of the user or operator. Therefore, the definitions of these terms should be based on the overall content of this specification.

[0018] FIG. 1 is a diagram illustrating a configuration of a metal nanostructure manufacturing system according to one embodiment of the present invention, FIG. 2 is a diagram for explaining a measurement unit according to one embodiment of the present invention, FIG. 3 is a diagram for explaining a classifier according to one embodiment of the present invention, FIG. 4 is a diagram illustrating an example of a spectroscopic measurement data set according to one embodiment of the present invention, and FIG. 5 is a diagram illustrating a flow of a metal nanostructure manufacturing method according to one embodiment of the present invention.

[0019] As illustrated in FIG. 1, the metal nanostructure manufacturing system (100) includes a heat treatment unit (110), a measurement unit (120), a classifier (130), and a control unit (140).

[0020] The heat treatment unit (110) applies heat treatment to a substrate on which a metal thin film is formed to produce a metal nanostructure.

[0021] For example, the heat treatment unit (110) can be implemented as a hot plate that applies heat to a substrate placed on top.

[0022] The measuring unit (120) measures spectral data of nanostructures formed on the substrate as heat treatment is applied.

[0023] At this time, the measuring unit (120) can measure spectral data at preset time intervals (e.g., every few minutes) while applying heat treatment to the substrate by the heat treatment unit.

[0024] Additionally, the measuring unit (120) may include a light source (121), a probe (122), an optical fiber (123), and a spectrometer (124), as illustrated in FIG. 2.

[0025] The light source (121) generates light.

[0026] The probe (122) projects light generated from a light source (121) onto a nanostructure formed on a substrate and collects spectral data generated when the projected light interacts with the nanostructure.

[0027] The optical fiber (123) transmits the light generated by the light source (121) to the probe (122) and transmits the spectral data collected by the probe (122) to the spectrometer (124).

[0028] The spectrometer (124) measures the characteristics of the received spectral data.

[0029] The classifier (130) receives spectral data measured by the measuring unit (110) and classifies the specifications of the nanostructure.

[0030] At this time, the classifier (130) can determine the specifications of the nanostructure being formed at preset time intervals using a machine learning analysis technique such as multivariable regression, for example, as illustrated in FIG. 3.

[0031] Additionally, the classifier (130) is trained to classify the specifications of the nanostructure corresponding to the input spectroscopic data using a training data set including spectroscopic measurement data of a plurality of nanostructure samples manufactured to have different specifications.

[0032] At this time, the learning data set may include spectroscopic measurement data of multiple nanostructure samples formed by heat treatment at different heat treatment temperatures and times, as illustrated in Fig. 4.

[0033] The control unit (140) controls the operation of the heat treatment unit according to the classification result by the classifier (130).

[0034] More specifically, the control unit (140) controls the heat treatment temperature and heat treatment time by the heat treatment unit (110) according to the specifications of the nanostructure classified by the classifier (130).

[0035] At this time, the control unit (140) stops the heat treatment by the heat treatment unit (110) if the specifications of the nanostructure classified by the classifier (130) satisfy the target specifications.

[0036] Hereinafter, a method for manufacturing a metal nanostructure according to an embodiment of the present invention will be specifically described with reference to FIG. 5.

[0037] FIG. 5 is a diagram illustrating a flow of a method for manufacturing a metal nanostructure according to one embodiment of the present invention.

[0038] As shown in Fig. 5, the heat treatment unit (110) applies heat treatment to a substrate on which a metal thin film is formed to produce a metal nanostructure (S410).

[0039] While the metal nanostructure is being manufactured, the measuring unit (120) measures the spectral data of the nanostructure formed on the substrate as heat treatment is applied (S420).

[0040] More specifically, the measuring unit (120) generates light from a light source (121) and transmits it to a probe (122) through an optical fiber (123).

[0041] Next, the probe (122) projects light generated from a light source (121) onto a nanostructure formed on a substrate, and collects spectral data generated when the projected light interacts with the nanostructure.

[0042] Next, the optical fiber (123) transmits the collected spectral data to the spectrometer (124).

[0043] Finally, the spectrometer (124) measures the characteristics of the collected spectral data.

[0044] Additionally, the measuring unit (120) can measure spectral data at preset time intervals while applying heat treatment to the substrate by the heat treatment unit (110).

[0045] After measuring the spectral data of the nano structure, the classifier (130) receives the measured spectral data and classifies the specifications of the nano structure (S430).

[0046] At this time, the classifier (130) can determine the specifications of the nanostructure being formed at preset time intervals using a machine learning analysis technique such as multivariable regression.

[0047] Next, the control unit (140) controls the operation of the heat treatment unit according to the classification result (S440).

[0048] More specifically, the control unit (140) controls the heat treatment temperature and heat treatment time by the heat treatment unit (110) according to the specifications of the nanostructure classified by the classifier (130).

[0049] At this time, the control unit (140) stops the heat treatment by the heat treatment unit if the specifications of the nanostructure classified by the classifier (130) satisfy the target specifications.

[0050] In this way, according to the present invention, when manufacturing a metal nanostructure, a metal nanostructure of a specific specification can be manufactured more precisely by receiving feedback from spectroscopic measurement data.

[0051] Additionally, the characteristics of spectra can be analyzed using artificial intelligence, facilitating data analysis of spectroscopic-based medical devices and optical biosensors.

[0052] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent embodiments are possible. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the following claims.

Claims

1. A heat treatment unit that applies heat treatment to a substrate on which a metal film is formed; A measuring unit for measuring spectral data of a nanostructure formed on the substrate as heat treatment is applied by the heat treatment unit; A classifier that receives spectral data measured by the above measuring unit and classifies the specifications of the nanostructure; and A system for manufacturing a metal nanostructure using spectral feedback, comprising a control unit that controls the operation of the heat treatment unit according to the classification result by the classifier.

2. In paragraph 1, The above measuring part, A metal nanostructure manufacturing system for measuring spectral data at preset time intervals while applying heat treatment to the substrate by the above heat treatment unit.

3. In paragraph 1, The above classifier is, A metal nanostructure fabrication system, which is pre-trained to classify specifications of nanostructures corresponding to input spectroscopic data using a training data set including spectroscopic measurement data of multiple pre-fabricated nanostructure samples having different specifications.

4. In paragraph 3, The above learning data set is, A system for fabricating metal nanostructures, comprising spectroscopic measurement data of a plurality of nanostructure samples formed by heat treatment at different heat treatment temperatures and times.

5. In paragraph 1, The above control unit, A metal nano-structure manufacturing system that controls the heat treatment temperature and heat treatment time by the heat treatment unit according to the specifications of the nano-structure classified by the above classifier.

6. In paragraph 5, The above control unit, A metal nano-structure manufacturing system that stops heat treatment by the heat treatment unit when the specifications of the nano-structure classified by the above classifier satisfy the target specifications.

7. A step of producing a metal nanostructure by applying heat treatment to a substrate on which a metal film is formed; A step of measuring spectral data of nanostructures formed on a substrate as the above heat treatment is applied; A step of classifying the specifications of the nanostructure by inputting the measured spectral data; and A method for manufacturing a metal nanostructure using spectral feedback, comprising a step of controlling a heat treatment operation according to the above classification results.

8. In paragraph 7, The step of measuring the above spectral data is: A method for fabricating a metal nanostructure, wherein spectral data is measured at preset time intervals while applying heat treatment to the above substrate.

9. In paragraph 7, The step of controlling the heat treatment operation according to the above classification results is: A method for producing a metal nanostructure, wherein the heat treatment temperature and heat treatment time are controlled according to the specifications of the above-mentioned classified nanostructure.

10. In paragraph 7, The step of controlling the heat treatment operation according to the above classification results is: A method for producing a metal nanostructure, wherein the heat treatment is stopped when the specifications of the above-mentioned classified nanostructure satisfy the target specifications.

Images