Position calibration method and apparatus

Abstract

Embodiments of the present application provide a position calibration method and apparatus, an electronic device, and a storage medium. The method comprises: respectively determining position coordinates of a feature point in a first target image and a second target image, wherein the second target image is an image collected by an image collection apparatus when the feature point is at a second position, and the second position is obtained by rotating a target object by a preset angle around a center of rotation when the feature point is at a first position; on the basis of the position coordinates of the feature point in the first target image and the second target image and the preset angle, determining position coordinates of the center of rotation in the first target image and / or the second target image; and on the basis of the position coordinates of the center of rotation in the first target image and / or the second target image and position coordinates corresponding to a center of a field of view of the image collection apparatus, determining corresponding position coordinates when the center of rotation coincides with the center of the field of view. The solution does not require high technical level for operators, and has high precision and high efficiency.

Description

Position calibration method and device

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 18, 2023, with application number 202311736493.0 and invention name “Position Calibration Method and Device”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of semiconductor processing technology, and more specifically to a position calibration method, a position calibration device, an electronic device, and a storage medium. Background Art

[0003] In the manufacturing industry, many devices use a combination of X, Y, and R positioning systems and visual positioning cameras to position and process products. The X, Y, and R positioning system allows the product to be translated along the X and Y axes and rotated about the R axis. In actual calculations, the axis coordinates (coordinates in the XY coordinate system) corresponding to when the R-axis's rotation axis coincides with the center of the camera's field of view are often used. For example, in the semiconductor industry, during the wafer splitting process (where the splitter splits the wafer along the cutting path), visual positioning is used to determine the angle θ° of the wafer's cutting path, and then the R-axis is rotated θ° to level the wafer's cutting path. This operation aims to ensure that the splitter accurately splits along the cutting path during splitting. The axis coordinates corresponding to when the R-axis's rotation axis coincides with the center of the camera's field of view are used to calculate the position of the cut path after rotation. The traditional method involves moving the R-axis into the camera's field of view, rotating it, and visually identifying its axis of rotation. The workpiece's position in the XY coordinate system is then adjusted incrementally until the axis of rotation aligns with the center of the camera's field of view. This method clearly lacks positioning accuracy and relies on subjective judgment. Summary of the Invention

[0004] The present application has been made in view of the above-mentioned problems.

[0005] A first aspect of the present application provides a position calibration method, the method comprising:

[0006] Determining position coordinates of a feature point in a first target image and a second target image, respectively, wherein the first target image is an image captured by an image capture device when the feature point is at a first position, and the second target image is an image captured by the image capture device when the feature point is at a second position, the feature point is an identification point on the target object that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is at the first position;

[0007] determining the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle;

[0008] According to the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device, the position coordinates corresponding to when the rotation center coincides with the field of view center are determined.

[0009] In a possible implementation, respectively determining the position coordinates of feature points in the first target image and the second target image includes:

[0010] Obtaining the physical position coordinates of the target object when the feature point is at the first position, recorded as first physical position coordinates;

[0011] Obtaining the physical position coordinates of the target object when the feature point is at the first target position, recorded as second physical position coordinates, wherein the first target position is the position when the feature point moves from the first position to the point where the feature point coincides with the center of the field of view of the image acquisition device;

[0012] The position coordinates of the feature point in the first target image are determined according to the first physical position coordinates and the second physical position coordinates.

[0013] In a possible implementation, determining the position coordinates of the feature point in the first target image according to the first physical position coordinates and the second physical position coordinates includes:

[0014] A corresponding first position coordinate difference is determined according to the first physical position coordinate and the second physical position coordinate, and the position coordinates of the feature point in the first target image are determined according to the first position coordinate difference and the first physical position coordinate.

[0015] In a possible implementation, when the feature point is located at the first target position, in response to a first position determination instruction input by the user on the first user interface, the physical position coordinates of the target object at the first target position are determined.

[0016] In a possible implementation, respectively determining the position coordinates of the feature points in the first target image and the second target image includes:

[0017] Obtaining the physical position coordinates of the target object when the feature point is at the second position, recorded as third physical position coordinates;

[0018] Obtaining the physical position coordinates of the target object when the feature point is at the second target position, recorded as fourth physical position coordinates, wherein the second target position is the position when the feature point moves from the second position to the point where the feature point coincides with the center of the field of view of the image acquisition device;

[0019] The position coordinates of the feature point in the second target image are determined according to the third physical position coordinates and the fourth physical position coordinates.

[0020] In a possible implementation, determining the position coordinates of the feature point in the second target image according to the third physical position coordinates and the fourth physical position coordinates includes:

[0021] A corresponding second position coordinate difference is determined according to the third physical position coordinate and the fourth physical position coordinate, and the position coordinates of the feature point in the second target image are determined according to the second position coordinate difference and the third physical position coordinate.

[0022] In a possible implementation, when the feature point is located at the second target position, the physical position coordinates of the target object at the second target position are determined in response to a second position determination instruction input by the user on the second user interface.

[0023] In a possible implementation, before determining the physical position coordinates of the feature points in the second target image, the method further includes:

[0024] In response to a rotation instruction input by a user on a third user interface, the target object is controlled to rotate by the preset angle based on the first position so that the feature point reaches the second position, wherein the rotation instruction includes the preset angle.

[0025] In one possible implementation, determining, based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device, the position coordinates corresponding to when the rotation center coincides with the field of view center includes:

[0026] Determining a positional deviation between position coordinates of the rotation center in the first target image and / or the second target image and position coordinates corresponding to the field of view center of the image acquisition device;

[0027] According to the position deviation, position coordinates corresponding to when the rotation center coincides with the field of view center are determined.

[0028] In a possible implementation, determining the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle includes:

[0029] In response to a rotation center determination instruction input by the user on the fourth user interface, the position coordinates of the rotation center in the first target image and / or the second target image are determined based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle.

[0030] In a second aspect of the present application, a position calibration device is further provided, the device comprising:

[0031] a first determining module, configured to respectively determine position coordinates of a feature point in a first target image and a second target image, wherein the first target image is an image captured by an image acquisition device when the feature point is at a first position, and the second target image is an image captured by the image acquisition device when the feature point is at a second position, the feature point is an identification point on a target object in the target image that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is at the first position;

[0032] a second determining module, configured to determine the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle;

[0033] The third determination module is used to determine the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device.

[0034] The third aspect of the present application further provides an electronic device, which includes a processor and a memory, wherein the memory stores computer program instructions, and the computer program instructions are used by the processor to execute the position calibration method introduced in the first aspect above when the processor is running.

[0035] A fourth aspect of the present application further provides a storage medium on which program instructions are stored. The program instructions are used to execute the position calibration method described above when running.

[0036] According to the position calibration method of the embodiment of the present application, the target object containing the feature point can be placed in the first position and the second position respectively, and the position coordinates of the feature point at the first position and the second position can be determined. Then, the coordinates of the rotation center are determined based on the position coordinates of the feature point at these two positions, so that the corresponding physical position when the rotation center coincides with the center of view can be determined. This solution cleverly utilizes the fact that the feature point is two points on a circle with the rotation center as the first position and the second position, and combines it with visual positioning technology, while coordinating with the change in the physical position of the target object to automatically determine the corresponding physical position when the rotation center coincides with the center of view. This solution does not require a high level of technical skills from the operator, has strong applicability, high accuracy, and only requires determining the coordinates of two points, so it is fast and efficient.

[0037] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0039] FIG1 shows a schematic flow chart of a position calibration method according to one aspect of the present application;

[0040] FIG2 shows a schematic diagram of user interfaces (a first user interface and a second user interface) in a position calibration method according to one aspect of the present application;

[0041] FIG3 shows a schematic block diagram of a position calibration device according to an embodiment of the present application; and

[0042] FIG4 shows a schematic block diagram of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solutions and advantages of the present application more apparent, the following is a detailed description of example embodiments of the present application with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present application described in this application, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of this application.

[0044] To at least partially address the above-mentioned issues, embodiments of the present application provide a position calibration method. This position calibration method can be applied, for example, to wafer processing, such as a wafer splitting machine, whose primary function is to split the wafer along the scribe lines after dicing. The splitting machine includes an X-direction motion assembly, a Y-direction motion assembly, an image acquisition device, and a turntable assembly.

[0045] The turntable assembly is mounted on the Y-direction motion assembly. On the one hand, it can rotate (for example, the rotation axis is the θ axis), and on the other hand, it can move with the Y-direction motion assembly. The image acquisition device is mounted on the X-axis motion assembly and can move along the X-direction with the X-direction motion assembly. Before performing wafer splitting, the cutting path needs to be corrected so that the cutting path is parallel to the preset reference direction (for example, the X direction). Before performing the cutting path correction, the position coordinates of the turntable rotation center and the camera center when they coincide with each other are required. In addition, when performing wafer splitting, the wafer is first split along the cutting path parallel to the X direction. After that, the turntable needs to be rotated 90° and the wafer is split again along the cutting path parallel to the Y direction. The calculation of the specific position of the split after rotating 90° (in fact, it is also to determine the position of the cutting path and correct the cutting path) requires the position coordinates when the turntable rotation center and the camera center coincide with each other, that is, the position calibration method provided by this application is required to determine the position coordinates when the turntable rotation center and the camera center coincide with each other.

[0046] It should be noted that the above application scenario is only one application scenario of the position calibration method provided by this application. Other application scenarios are also applicable and fall within the scope of protection of this application.

[0047] Fig. 1 shows a schematic flow chart of a position calibration method 100 according to one aspect of the present application. As shown in Fig. 1 , the method 100 may include the following steps S110, S120, and S130.

[0048] Step S110, respectively determining the physical position coordinates of the feature point in the first target image and the second target image, wherein the first target image is an image captured by the image acquisition device when the feature point is at the first position, and the second target image is an image captured by the image acquisition device when the feature point is at the second position, the feature point is an identification point on the target object that can be distinguished from other points, and the second position is obtained by rotating the target object around the rotation center by a predetermined angle when the feature point is at the first position.

[0049] In step S110, the target object can first be positioned within the field of view of the image acquisition device, and a feature point can be determined within this field of view. For example, if the target object is a wafer, the feature point can be any identifying point on the wafer that is distinguishable from other locations on the wafer. For example, a single black dot in an image can be determined as the feature point. The image acquisition device then captures an image at the current position, i.e., the first position, to obtain a first target image. This allows the position coordinates of the feature point in the first target image to be determined.

[0050] For the second target image, for example, the turntable described above can be used to carry the target object and rotate it from the first position to a preset angle, so that the feature point is located at the second position. Then, the image can be captured by the image acquisition device in the same way to obtain the second target image. In this way, the position coordinates of the feature point in the second target image can be determined.

[0051] It can be understood that in this application, since the feature point is an identifier on the target object, the physical position of the target object does not change, and the position of the feature point will not change either. Therefore, the first position, second position and other related positions of the feature point described in this article have the same meaning as the first position, second position and other related positions of the target object.

[0052] For example, in one embodiment, the above-mentioned position coordinates may be physical position coordinates. Specifically, the various physical position coordinates described in this application may be represented by coordinates in the same world coordinate system. An example of establishing such a world coordinate system is described below. The target object (e.g., a wafer) may be placed on a movable device (e.g., a movable stage, specifically, including an X-direction motion component and a Y-direction motion component).

[0053] The movable stage can translate within a plane (which may be referred to as a "moving plane"), and can also rotate within the moving plane around a fixed rotation axis (such as the rotation axis or rotation center of the turntable described above). The target object (such as a wafer) moves synchronously with the movable stage, so the physical position of the movable stage described herein and the physical position of the target object (such as a wafer) can be considered to be the same, and the two can be represented interchangeably. At the same time, since the feature points are identification points on the target object, for the convenience of calculation, the physical positions of the two will be considered to be the same at the same time. Moreover, when the target object (such as a wafer) is in the field of view of the image acquisition device, the physical positions of the target object (such as a wafer), the image acquisition device, and the movable stage can also be considered to be the same.

[0054] Two mutually perpendicular grating rulers can be provided within the moving range of the movable stage. For example, when the movable stage stops at a predetermined initial physical position, the reading of the grating ruler at this time can be set to 0, and the physical position can be determined as the origin O of the world coordinate system. A first grating ruler can be provided along the first direction through the origin O, and the axis where the first grating ruler is located can be used as the X-axis of the world coordinate system. A second grating ruler is provided perpendicular to the X-axis and through the origin O. The axis where the second grating ruler is located can be used as the Y-axis of the world coordinate system. After the above-mentioned world coordinate system is established, each time the movable stage moves, that is, when the target object (such as a wafer) moves, the corresponding X-axis coordinates and Y-axis coordinates can be read from the first grating ruler and the second grating ruler, and the (X, Y) coordinates can be used to represent the physical position of the target object (such as a wafer). When a target object (e.g., a wafer) is within the field of view of the image acquisition device, the corresponding X-axis coordinates and Y-axis coordinates can be read from both the first and second scales. These (X, Y) coordinates can represent the physical position of the target object (e.g., the wafer) or the physical position of the image acquisition device. In another embodiment, the aforementioned position coordinates can also be pixel coordinates. However, in this case, in order to determine the coordinates of the rotation center and the coordinates when the rotation center coincides with the field of view center, it is necessary to convert the pixel coordinates into physical position coordinates.

[0055] Step S120 , determining the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and a predetermined angle.

[0056] In step S120, since the second position is obtained based on the preset angle of rotation of the first position, the position of the feature point in the first target image and the position of the feature point in the second target image can be regarded as two points on a circle with the rotation center as the center. In this way, since the position coordinates of the two points have been determined (that is, the position coordinates of the feature point in the first target image and the position coordinates of the feature point in the second target image), and the central angle corresponding to the two points is also determined, the position coordinates of the rotation center can be obtained according to simple geometric operations; specifically, the chord length of the points corresponding to the two position coordinates on the circle with the rotation center as the center can be first calculated according to the position coordinates of the feature point in the first target image and the position coordinates of the feature point in the second target image; then the distance (radius) from the rotation center to the feature point can be obtained based on the chord length and the angle of rotation, so that the coordinates of the center of the circle can be determined according to the radius, the position coordinates of the feature point in the first target image and the predetermined angle of rotation, that is, the position coordinates of the rotation center, for example, can be expressed by coordinates (Xr, Yr).

[0057] It can be understood that the first target image and the second target image are images at two different angles with the rotation center as the axis, so the coordinates of the corresponding rotation centers in the first target image and the second target image are the same.

[0058] Exemplarily, the preset angle can be determined based on the physical coordinates before and after the rotation. Specifically, the angle before and after the turntable rotates can be determined based on relevant parameters of the encoder on the driving component that drives the turntable to rotate, and then the preset angle can be determined. Since the calculation of the rotation angle of the driven component (such as the turntable in this application) based on relevant parameters of the encoder is well known to those skilled in the art, it will not be repeated here.

[0059] Step S130 , determining the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device.

[0060] In step S130, the rotation center is the rotation center of the turntable assembly. The first target image and the second target image are obtained by rotating the turntable without translating the turntable assembly. Therefore, the position coordinates of the rotation center in the first target image and the second target image are the same, both (Xr, Yr). Taking the first position corresponding to the first target image as an example, at this first position, the readings on the first grating ruler and the second grating ruler are X1 and Y1, respectively. Therefore, the position coordinates of the corresponding field of view center of the image acquisition device are (X1, Y1). In this way, the position coordinates corresponding to the coincidence of the rotation center and the field of view center can be determined.

[0061] Exemplarily, step S130 determines the position coordinates corresponding to when the rotation center coincides with the center of field of view based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the center of field of view of the image acquisition device, including: determining the position deviation between the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the center of field of view of the image acquisition device; and determining the position coordinates corresponding to when the rotation center coincides with the center of field of view based on the position deviation.

[0062] In one embodiment, when the feature point is in the first position, the coordinates of the image acquisition device's field of view center are the corresponding readings on the first and second grating rulers at that time, expressed as coordinates (X1, Y1). Since the position coordinates of the rotation center have been determined in step S120, the relative position deviation between the rotation center and the field of view center can be determined: Δxr = Xr ± X1, Δyr = Yr ± Y1. It can be understood that whether "+" or "-" is selected in "±" is determined based on the positional relationship between the rotation center and the field of view center. After determining the relative position deviation between the rotation center and the field of view center, Δxr and Δyr can be moved respectively by the X-direction motion component and the Y-direction motion component, so that the rotation center and the field of view center coincide. At this time, the readings on the first and second grating rulers are the position coordinates when the two coincide. This method is more accurate and faster because it uses position deviation rather than specific coordinates.

[0063] According to the position calibration method of the embodiment of the present application, the target object containing the feature point can be placed in the first position and the second position respectively, and the position coordinates of the feature point at the first position and the second position can be determined. Then, the coordinates of the rotation center can be determined based on the position coordinates of the feature point at these two positions, so that the physical position corresponding to when the rotation center (or rotation axis) coincides with the center of the field of view can be determined. This solution cleverly utilizes the fact that the feature point is two points on a circle with the rotation center as the first position and the second position, and combines visual positioning technology with the change in the physical position of the target object to automatically determine the physical position corresponding to when the rotation axis coincides with the center of the field of view. This solution does not require a high level of technical skills from the operator, has strong applicability, high accuracy, and only requires determining the coordinates of two points, so it is fast and efficient.

[0064] Exemplarily, in step S110, the position coordinates of the feature points in the first target image and the second target image are determined respectively, including: obtaining the physical position coordinates of the target object when the feature point is at the first position, recorded as the first physical position coordinates; obtaining the physical position coordinates of the target object when the feature point is at the first target position, recorded as the second physical position coordinates, wherein the first target position is the position when the feature point moves from the first position to the position when the feature point coincides with the center of the field of view of the image acquisition device; and determining the position coordinates of the feature point in the first target image based on the first physical position coordinates and the second physical position coordinates.

[0065] As described above, since the feature point is an identification point on the target object, for the convenience of calculation, the physical positions of the two will be considered the same at the same time. In one embodiment, the target object can be placed within the field of view of the image acquisition device with the help of the X-direction motion component and the Y-direction motion component, and the feature point can be determined within the field of view. The current position can be determined as the first position, and the readings on the first grating ruler and the second grating ruler at this time can be obtained, which can be represented by the coordinates (X1, Y1), that is, the coordinates (X1, Y1) can be considered to be the first physical position coordinates; then, on this basis, the feature point on the target object is made to coincide with the center of the field of view of the image acquisition device with the help of the X-direction motion component and the Y-direction motion component (the position when coincident is the first target position), and the readings on the first grating ruler and the second grating ruler at this time can be represented by the coordinates (X2, Y2), that is, the coordinates (X2, Y2) can be considered to be the second physical position coordinates. In this way, the position coordinates of the feature point in the first target image can be determined based on the first physical position coordinates and the second physical position coordinates.

[0066] Exemplarily, the step of determining the position coordinates of the feature point in the first target image based on the first physical position coordinates and the second physical position coordinates may specifically include determining the corresponding first position coordinate difference based on the first physical position coordinates and the second physical position coordinates, and determining the position coordinates of the feature point in the first target image based on the first position coordinate difference and the first physical position coordinates.

[0067] In the above embodiment, the first physical position coordinates (X1, Y1) and the second physical position coordinates (X2, Y2) have been determined, so that the position coordinates of the feature point in the first target image can be determined as (X3, Y3) based on the first physical position coordinates (X1, Y1) and the second physical position coordinates (X2, Y2), where X3 = X1±Δx1; Y3 = Y1±Δy1.

[0068] In the above technical solution, the position coordinates of the feature point in the first target image are obtained by utilizing the difference between the physical position coordinates of the target object when the feature point is in the first position and the position coordinates when the feature point coincides with the center of the field of view of the image acquisition device. The coordinate difference can more accurately reflect the difference between the two positions, thereby more accurately determining the position coordinates of the feature point in the first target image.

[0069] Exemplarily, when the feature point is located at the first target position, in response to a first position determination instruction input by the user on the first user interface, the physical position coordinates of the target object at the first target position are determined.

[0070] The user can input any instructions described herein, such as a first position determination instruction, a second position determination instruction, and a rotation instruction, etc., to the device for executing the position calibration method 100 (e.g., a host computer system) through an input device. The input device may include, but is not limited to, one or more of the following: a mouse, a keyboard, a touch screen, and a microphone. In one embodiment, a visual interface can be displayed on a display device, including a first user interface. The user can interact with the operable controls in the first user interface through a mouse, a keyboard, etc. to input a first position determination instruction. For example, as shown in Figure 2, the user can input a first position determination instruction by clicking on a first operable control in the user interface, and the first operable control can be displayed as an "acquire" control on the first user interface. The device for executing the position calibration method 100 may include the above-mentioned input device and / or display device, or may be communicatively connected to the above-mentioned input device and / or display device to realize the transmission of information.

[0071] When the feature point is at the first target position (i.e., the position when the feature point moves from the first position to the position when the feature point coincides with the center of the field of view of the image acquisition device), in response to the first position determination instruction input by the user, the device for executing the position calibration method 100 can automatically obtain the readings on the first grating ruler and the second grating ruler, i.e., (X2, Y2). For example, as shown in FIG2 , when the target object is at the first target position, the user clicks the “Get” control to the right of “First Point” on the interface, and the position coordinates “x=41.0603, y=45.2925” when the current feature point coincides with the center of the field of view can be displayed in the interface, and the angular coordinates of the current turntable -55.1990 can also be obtained. Among them, the interface where the “Get” control is located and the interface that displays the position coordinates when the current feature point coincides with the center of the field of view can be the same interface, that is, the first user interface can also be a different interface.

[0072] According to the above technical solution, the physical position coordinates of the feature point at the first target position can be automatically determined according to the user's input instruction and displayed in the first user interface. This can provide intuitive user operation, and is easy to operate and highly interactive.

[0073] Exemplarily, determining the position coordinates of the feature points in the first target image and the second target image respectively includes: obtaining the physical position coordinates of the target object when the feature point is at the second position, recorded as the third physical position coordinates; obtaining the physical position coordinates of the target object when the feature point is at the second target position, recorded as the fourth physical position coordinates, wherein the second target position is the position when the feature point moves from the second position to the position when the feature point coincides with the center of the field of view of the image acquisition device; and determining the position coordinates of the feature point in the second target image based on the third physical position coordinates and the fourth physical position coordinates.

[0074] As described above, since the feature point is an identification point on the target object, the physical positions of the two are considered to be the same at the same time for the convenience of calculation. In one embodiment, the target object can be located within the field of view of the image acquisition device with the help of the X-direction motion component and the Y-direction motion component, and the feature point is again in the first position, and the corresponding readings on the first grating ruler and the second grating ruler are X1, Y1; then on this basis, the turntable is rotated by a preset angle so that the feature point is in the second position, and the readings on the first grating ruler and the second grating ruler at this time are obtained, which can be represented by the coordinates (X4, Y4), that is, the coordinates (X4, Y4) can be considered to be the third physical position coordinates; with the help of the X-direction motion component and the Y-direction motion component, the feature point on the target object is made to coincide with the field of view center of the image acquisition device (the position when coincident is the first target position), and the readings on the first grating ruler and the second grating ruler at this time are obtained, which can be represented by the coordinates (X5, Y5), that is, the coordinates (X5, Y5) can be considered to be the fourth physical position coordinates. In this way, the position coordinates of the feature point in the second target image can be determined according to the third physical position coordinates (X4, Y4) and the fourth physical position coordinates (X5, Y5).

[0075] Exemplarily, determining the position coordinates of the feature point in the second target image based on the third physical position coordinates and the fourth physical position coordinates includes: determining the corresponding second position coordinate difference based on the third physical position coordinates and the fourth physical position coordinates, and determining the position coordinates of the feature point in the second target image based on the second position coordinate difference and the third physical position coordinates.

[0076] In the above embodiment, the position coordinates of the feature point in the second target image are determined to be (X6, Y6) based on the third physical position coordinates (X4, Y4) and the fourth physical position coordinates (X5, Y5), where X6 = X4±Δx2; Y6 = Y4±Δy2.

[0077] According to the above technical solution, the coordinates of the target object at different positions are used to determine the position coordinates of the feature points in the second target image. The algorithm is simple and easy to implement.

[0078] Exemplarily, when the feature point is located at the second target position, in response to a second position determination instruction input by the user on the second user interface, the physical position coordinates of the target object at the second target position are determined.

[0079] When the target object is at the second target position (i.e., the position when the feature point moves from the second position to the position when the feature point coincides with the center of the field of view of the image acquisition device), in response to the second position determination instruction input by the user, the device for executing the position calibration method 100 can automatically obtain the readings on the first grating ruler and the second grating ruler, i.e., (X5, Y5). For example, when the target object is at the second target position, the user clicks the "Get" control to the right of "Second Point" on the interface, and the position coordinates "x=40.8637, y=45.2194" when the current feature point coincides with the center of the field of view can be displayed in the second user interface, and the angular coordinates of the current turntable -39.2320 can also be obtained. Among them, the interface where the "Get" control is located and the interface that displays the position coordinates when the current feature point coincides with the center of the field of view can be the same interface, that is, the first user interface can also be different interfaces. The first user interface and the second user interface can also be the same interface, or different interfaces.

[0080] Exemplarily, determining the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and a predetermined angle includes: in response to a rotation center determination instruction input by the user on a fourth user interface, determining the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and a predetermined angle.

[0081] In one embodiment, in response to a second position determination instruction input by a user on a second user interface, the position coordinates corresponding to when the center of rotation coincides with the center of field of view can be determined simultaneously. In another embodiment, when the target object is located at the second target position, in response to a second position determination instruction input by a user on the second user interface, the physical position coordinates of the target object at the second target position are determined. Furthermore, in response to another position determination instruction input by a user on another interface, the position coordinates corresponding to when the center of rotation coincides with the center of field of view are determined. The another position determination instruction here and the second position determination instruction can be different instructions, and the another interface here can be the same interface as the second user interface or a different interface.

[0082] In one embodiment, when the target object is at the second target position, the user clicks the "Get" control to the right of the "Second Point" on the interface. In addition to displaying coordinates such as "x=40.8637, y=45.2194" in the second user interface, the corresponding position coordinates when the rotation center coincides with the field of view center will also be displayed, "x=40.7014, y=45.9569". At this time, the second interface and the fourth interface are the same interface. Of course, the second interface and the fourth interface can also be different interfaces according to actual needs.

[0083] It should be noted that the interface in the figure is the application of the position calibration method provided in this application to a splitter. The corresponding splitter includes two image acquisition devices, namely the upper and lower CCDs in the figure. This article mainly describes the upper CCD as an example. The lower CCD is similar to the upper CCD and will not be repeated here.

[0084] According to the above technical solution, the physical position coordinates of the target object at the second target position can be automatically determined according to the user's input instruction and displayed in the second user interface. This can provide intuitive operation for the user, and the operation is simple and interactive.

[0085] Exemplarily, before determining the physical position coordinates of the feature point in the second target image in step S110, the method further includes: in response to a rotation instruction input by the user on a third user interface, controlling the target object to rotate by the preset angle based on the first position so that the feature point reaches the second position, wherein the rotation instruction includes the preset angle.

[0086] In one embodiment, the above-mentioned visualization interface may further include a third user interface. The third user interface may be the same user interface as or different from the above-mentioned first user interface and second user interface. Based on the initial physical position, the user can input a rotation instruction through the third user interface. A processing device such as a splitter can automatically control the target object to rotate a preset angle. The third user interface may include an information input control and a third operable control. The user can input a preset angle, such as 20 degrees, in the information input control through a keyboard, etc. After the input is completed, click the third operable control on one side of the information input control to control the target object to rotate a preset angle (20 degrees).

[0087] According to the above technical solution, based on the third user interface, the user can intuitively input a rotation instruction, thereby automatically controlling the rotation of the workpiece to be processed to a preset angle. This method does not require the user to perform complex operations and can ensure the accuracy of the preset rotation angle.

[0088] According to another aspect of the present application, a position calibration device is also provided. FIG3 shows a schematic block diagram of a position calibration device 300 according to an embodiment of the present application. As shown in FIG3 , the device 300 may include a first determination module 310 , a second determination module 320 , and a third determination module 330 .

[0089] The first determination module 310 can be used to determine the position coordinates of the feature point in the first target image and the second target image respectively, wherein the first target image is an image captured by the image acquisition device when the feature point is at the first position, and the second target image is an image captured by the image acquisition device when the feature point is at the second position, the feature point is an identification point on the target object in the target image that can be distinguished from other points, and the second position is the feature point obtained by rotating the target object around the rotation center by a predetermined angle when the feature point is at the first position.

[0090] The second determination module 320 may be configured to determine the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and a predetermined angle.

[0091] The third determination module 330 is used to determine the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device.

[0092] According to another aspect of the present application, an electronic device is also provided. FIG4 shows a schematic block diagram of an electronic device 400 according to one embodiment of the present application. As shown in FIG4 , the electronic device 400 includes a processor 410 and a memory 420. The memory 420 stores computer program instructions, which, when executed by the processor 410, are used to execute the above-described position calibration method 100.

[0093] According to another aspect of the present application, a storage medium is also provided. Program instructions are stored on the storage medium, and when the program instructions are executed, the program instructions are used to execute the above-mentioned position calibration method 100. The storage medium may include, for example, a storage component of a tablet computer, a hard disk of a personal computer, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disc read-only memory (CD-ROM), a USB memory, or any combination of the above storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.

[0094] A person skilled in the art can understand the specific implementation scheme of the above-mentioned panel detection position calibration device, electronic device and storage medium by reading the above-mentioned description of the position calibration method. For the sake of brevity, it will not be repeated here.

[0095] Example:

[0096] Embodiment 1: A position calibration method, comprising:

[0097] Determining position coordinates of a feature point in a first target image and a second target image, respectively, wherein the first target image is an image captured by an image capture device when the feature point is at a first position, and the second target image is an image captured by the image capture device when the feature point is at a second position, the feature point is an identification point on the target object that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is at the first position;

[0098] determining the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle;

[0099] According to the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device, the position coordinates corresponding to when the rotation center coincides with the field of view center are determined.

[0100] Embodiment 2: The method according to embodiment 1, wherein determining the position coordinates of the feature points in the first target image and the second target image respectively comprises:

[0101] Obtaining the physical position coordinates of the target object when the feature point is at the first position, recorded as first physical position coordinates;

[0102] Obtaining the physical position coordinates of the target object when the feature point is at the first target position, recorded as second physical position coordinates, wherein the first target position is the position when the feature point moves from the first position to the point where the feature point coincides with the center of the field of view of the image acquisition device;

[0103] The position coordinates of the feature point in the first target image are determined according to the first physical position coordinates and the second physical position coordinates.

[0104] Embodiment 3: The method according to embodiment 1 or 2, wherein the position coordinates of the feature point in the first target image are determined based on the first physical position coordinates and the second physical position coordinates,

[0105] include:

[0106] A corresponding first position coordinate difference is determined according to the first physical position coordinate and the second physical position coordinate, and the position coordinates of the feature point in the first target image are determined according to the first position coordinate difference and the first physical position coordinate.

[0107] Example 4: A method according to any one of Examples 1-3, wherein when the feature point is located at a first target position, the physical position coordinates of the target object at the first target position are determined in response to a first position determination instruction input by a user on a first user interface.

[0108] Embodiment 5: According to the method described in any one of embodiments 1-4, the step of determining the position coordinates of the feature points in the first target image and the second target image respectively includes:

[0109] Obtaining the physical position coordinates of the target object when the feature point is at the second position, recorded as third physical position coordinates;

[0110] Obtaining the physical position coordinates of the target object when the feature point is at the second target position, recorded as fourth physical position coordinates, wherein the second target position is the position when the feature point moves from the second position to the point where the feature point coincides with the center of the field of view of the image acquisition device;

[0111] The position coordinates of the feature point in the second target image are determined according to the third physical position coordinates and the fourth physical position coordinates.

[0112] Embodiment 6: According to the method described in any one of embodiments 1-5, determining the position coordinates of the feature point in the second target image based on the third physical position coordinates and the fourth physical position coordinates includes:

[0113] A corresponding second position coordinate difference is determined according to the third physical position coordinate and the fourth physical position coordinate, and the position coordinates of the feature point in the second target image are determined according to the second position coordinate difference and the third physical position coordinate.

[0114] Example 7: According to the method introduced in any one of Examples 1-6, when the feature point is located at the second target position, the physical position coordinates of the target object at the second target position are determined in response to a second position determination instruction input by the user on the second user interface.

[0115] Embodiment 8: According to the method described in any one of embodiments 1-7, before determining the physical position coordinates of the feature points in the second target image, the method further includes:

[0116] In response to a rotation instruction input by a user on a third user interface, the target object is controlled to rotate by the preset angle based on the first position so that the feature point reaches the second position, wherein the rotation instruction includes the preset angle.

[0117] Embodiment 9: The method according to any one of embodiments 1-8, wherein determining the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device comprises:

[0118] Determining a positional deviation between position coordinates of the rotation center in the first target image and / or the second target image and position coordinates corresponding to the field of view center of the image acquisition device;

[0119] According to the position deviation, position coordinates corresponding to when the rotation center coincides with the field of view center are determined.

[0120] Embodiment 10: The method according to any one of embodiments 1 to 9, wherein determining the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle includes:

[0121] In response to a rotation center determination instruction input by the user on the fourth user interface, the position coordinates of the rotation center in the first target image and / or the second target image are determined based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle.

[0122] Embodiment 11: A position calibration device, comprising:

[0123] a first determining module, configured to respectively determine position coordinates of a feature point in a first target image and a second target image, wherein the first target image is an image captured by an image acquisition device when the feature point is at a first position, and the second target image is an image captured by the image acquisition device when the feature point is at a second position, the feature point is an identification point on a target object in the target image that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is at the first position;

[0124] a second determining module, configured to determine the position coordinates of the rotation center in the first target image and / or the second target image based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle;

[0125] The third determination module is used to determine the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device.

[0126] Example 12: An electronic device includes a processor and a memory, wherein the memory stores a computer program, and the processor executes the computer program to implement the position calibration method described in any one of Examples 1-10.

[0127] Example 13: A storage medium storing a computer program / instruction, wherein the computer program / instruction, when executed by a processor, implements the position calibration method described in any one of Examples 1-10.

[0128] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely illustrative and are not intended to limit the scope of the present application. Various changes and modifications may be made therein by those skilled in the art without departing from the scope and spirit of the present application. All such changes and modifications are intended to be included within the scope of the present application as required by the appended claims.

[0129] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0130] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units described is merely a logical function division. In actual implementation, other division methods may be used, such as combining or integrating multiple units or components into another device, or ignoring or not performing some features.

[0131] In the description provided herein, a large number of specific details are described. However, it is understood that the embodiments of the present application can be practiced without these specific details. In some instances, well-known methods, structures, and techniques are not shown in detail so as not to obscure the understanding of this description.

[0132] Similarly, it should be understood that in order to streamline the present application and aid in understanding one or more of the various inventive aspects, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, this approach of the present application should not be interpreted as reflecting the intention that the application claimed for protection requires more features than those explicitly recited in each claim. More precisely, as reflected in the corresponding claims, the inventive point is that the corresponding technical problem can be solved with fewer features than all the features of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into the detailed description, with each claim itself serving as a separate embodiment of the present application.

[0133] It will be understood by those skilled in the art that, except where mutually exclusive, all features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all processes or units of any method or apparatus disclosed herein may be combined in any combination. Unless expressly stated otherwise, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) may be replaced by an alternative feature providing the same, equivalent, or similar purpose.

[0134] Furthermore, those skilled in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, combinations of features from different embodiments are intended to be within the scope of this application and to form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.

[0135] The various component embodiments of the present application can be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art will appreciate that a microprocessor or digital signal processor (DSP) can be used in practice to implement some or all of the functions of some modules in the panel detection device according to the embodiment of the present application. The present application can also be implemented as a device program (e.g., a computer program and a computer program product) for executing part or all of the methods described herein. Such a program implementing the present application can be stored on a computer-readable medium, or can have the form of one or more signals. Such a signal can be downloaded from an Internet website, or provided on a carrier signal, or provided in any other form.

[0136] It should be noted that the above embodiments illustrate rather than limit the present application, and that a person skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference symbols placed between brackets should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present application may be implemented by means of hardware comprising several different elements and by means of appropriately programmed computers. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third etc. does not indicate any order. These words may be interpreted as names.

[0137] The above description is merely a specific embodiment or illustration of a specific embodiment of the present application, and the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. The scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A position calibration method, characterized in that: include: Determine the position coordinates of the feature point in the first target image and the second target image respectively, wherein the first target image is an image captured by the image acquisition device when the feature point is at the first position, and the second target image is an image captured by the image acquisition device when the feature point is at the second position, the feature point is an identification point on the target object that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is at the first position; Determine the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle; According to the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device, the position coordinates corresponding to when the rotation center coincides with the field of view center are determined.

2. The method according to claim 1, characterized in that The step of respectively determining the position coordinates of the feature points in the first target image and the second target image comprises: Acquire the physical position coordinates of the target object when the feature point is at the first position, recorded as the first physical position coordinates; Obtaining the physical position coordinates of the target object when the feature point is at the first target position, recorded as second physical position coordinates, wherein the first target position is the position when the feature point moves from the first position to the position when the feature point coincides with the center of the field of view of the image acquisition device; The position coordinates of the feature point in the first target image are determined according to the first physical position coordinates and the second physical position coordinates.

3. The method according to claim 2, characterized in that The step of determining the position coordinates of the feature point in the first target image according to the first physical position coordinates and the second physical position coordinates includes: A corresponding first position coordinate difference is determined according to the first physical position coordinate and the second physical position coordinate, and a position coordinate of a feature point in a first target image is determined according to the first position coordinate difference and the first physical position coordinate.

4. The method according to claim 2, characterized in that When the feature point is located at the first target position, in response to a first position determination instruction input by the user on the first user interface, the physical position coordinates of the target object at the first target position are determined.

5. The method according to claim 1, characterized in that The step of respectively determining the position coordinates of the feature points in the first target image and the second target image comprises: Acquire the physical position coordinates of the target object when the feature point is at the second position, recorded as third physical position coordinates; Obtaining the physical position coordinates of the target object when the feature point is at the second target position, recorded as fourth physical position coordinates, wherein the second target position is the position when the feature point moves from the second position to the position where the feature point coincides with the center of the field of view of the image acquisition device; The position coordinates of the feature point in the second target image are determined according to the third physical position coordinates and the fourth physical position coordinates.

6. The method according to claim 5, characterized in that The step of determining the position coordinates of the feature point in the second target image according to the third physical position coordinates and the fourth physical position coordinates includes: The corresponding second position coordinate difference is determined according to the third physical position coordinate and the fourth physical position coordinate, and the position coordinate of the feature point in the second target image is determined according to the second position coordinate difference and the third physical position coordinate.

7. The method according to claim 5, characterized in that When the feature point is located at the second target position, in response to a second position determination instruction input by the user on the second user interface, the physical position coordinates of the target object at the second target position are determined.

8. The method according to claim 5, characterized in that Before determining the physical position coordinates of the feature points in the second target image, the method further includes: In response to a rotation instruction input by a user on a third user interface, the target object is controlled to rotate by the preset angle based on the first position so that the feature point reaches the second position, wherein the rotation instruction includes the preset angle.

9. The method according to claim 1, characterized in that The step of determining the position coordinates corresponding to when the rotation center coincides with the center of the field of view according to the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the center of the field of view of the image acquisition device comprises: Determine the position deviation between the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device; and determine the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position deviation.

10. The method according to claim 1, characterized in that The determining the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle comprises: In response to a rotation center determination instruction input by the user on the fourth user interface, the position coordinates of the rotation center in the first target image and / or the second target image are determined based on the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle.

11. A position calibration device, characterized in that: include: A first determination module is used to determine the position coordinates of the feature point in the first target image and the second target image respectively, wherein the first target image is an image acquired by the image acquisition device when the feature point is in the first position, and the second target image is an image acquired by the image acquisition device when the feature point is in the second position, the feature point is an identification point on the target object in the target image that can be distinguished from other points, and the second position is obtained by rotating the target object around a rotation center by a predetermined angle when the feature point is in the first position; A second determination module, used to determine the position coordinates of the rotation center in the first target image and / or the second target image according to the position coordinates of the feature point in the first target image, the position coordinates of the feature point in the second target image, and the predetermined angle; The third determination module is used to determine the position coordinates corresponding to when the rotation center coincides with the field of view center based on the position coordinates of the rotation center in the first target image and / or the second target image and the position coordinates corresponding to the field of view center of the image acquisition device.

12. An electronic device comprising a processor and a memory, characterized in that: A computer program is stored in the memory, and the processor executes the computer program to implement the position calibration method as described in any one of claims 1-10.

13. A storage medium storing a computer program / instruction, characterized in that: When the computer program / instructions are executed by a processor, the position calibration method as described in any one of claims 1-10 is implemented.

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