Carrying apparatus

Abstract

Embodiments of the present application disclose a carrying apparatus. The carrying apparatus comprises a housing, a pick-up mechanism, a movement mechanism, and a reader / writer. The reader / writer is provided on a side surface of the housing in a moving direction of the housing, and there is a first preset angle between the center line of a camera lens of the reader / writer and the side surface of the housing on which the reader / writer is mounted, so as to identify tag information provided on the ground. According to the embodiments of the present application, the reader / writer is provided on the side surface of the housing, and there is the first preset angle between the center line of the camera lens of the reader / writer and the side surface of the housing on which the reader / writer is mounted, so that the camera lens of the reader / writer can cover a range of the ground from the side surface of the housing to a housing of a carrying apparatus adjacent thereto. Thus, the tag information provided on the ground is read, so that a worker promptly acquires position information or a process of the carrying apparatus, thereby causing the movement mechanism to drive the housing to move to a corresponding position or process, and then carrying a wafer container to a set position by means of the pick-up mechanism.

Description

Handling device TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer handling, in particular to a handling device. BACKGROUND

[0002] In a semiconductor manufacturing process, in order to improve the transfer efficiency of wafers between different processes, a plurality of wafers are generally placed in a carrier (wafer box), and then the wafer box is transported by a handling device from the current process position to the next process position.

[0003] At present, some wafer box handling devices use radio frequency identification technology (RFID, full name: Radio Frequency Identification), which can identify targets in a non-contact manner through radio frequency signals. Specifically, a semiconductor RFID reader is installed on the wafer box handling device to quickly and accurately identify and track the moving position of the wafer box handling device. During the travel of the wafer box handling device, the semiconductor RFID reader generally reads the tag information (tag) provided on the travel route, and then obtains the position information or process of the current wafer box handling device for management. Since the travel route of the wafer box handling device is relatively narrow, when two or more wafer box handling devices travel side by side, the wafer box handling device will block the read-write field of view of the semiconductor RFID reader of the adjacent wafer box handling device, thereby preventing the staff from obtaining the position information or process of the wafer box handling device. Content of the utility model

[0004] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a handling device to solve the problem that the position information or process of the handling device cannot be obtained when multiple handling devices travel side by side in the prior art.

[0005] The present application provides a handling device, comprising:

[0006] a housing, wherein a storage area for carrying a wafer container is provided on the housing;

[0007] a picking mechanism, wherein the picking mechanism is provided on the housing and is used to pick up the wafer container to a designated position;

[0008] a walking mechanism, wherein the walking mechanism is used to drive the housing to move along a designated route;

[0009] a reader-writer, wherein the reader-writer is provided on the side of the housing along its own travel direction, and a first preset angle exists between the lens center line of the reader-writer and the side of the housing on which the reader-writer is installed, so as to identify the tag information provided on the ground.

[0010] Based on the above-mentioned embodiment of the conveying device, by arranging the reader-writer on the side of the housing and setting a first preset angle between the center line of the lens of the reader-writer and the side of the housing on which the reader-writer is mounted, the lens of the reader-writer can cover the ground surface between the side of the housing and the conveying device housing adjacent to the side of the housing, so as to read the label information arranged on the ground surface, so that the staff can obtain the position information or the process of the conveying device in time, and then the walking mechanism drives the housing to move to the corresponding position or process, and then the picking mechanism conveys the wafer container to the set position.

[0011] In one embodiment of the above-mentioned conveying device, the housing is provided with a mounting assembly, the reader-writer is mounted in the housing through the mounting assembly, and a side portion of the housing is inwardly inclined at a second preset angle to form a reading space, which extends into the housing along the vertical direction, so that the lens of the reader-writer reads the label information arranged on the ground surface through the reading space.

[0012] In one embodiment of the above-mentioned conveying device, the mounting assembly comprises a fixed frame and an adjusting frame, the fixed frame is mounted in the housing, and the adjusting frame is used for fixing the reader-writer, the fixed frame is provided with an arc-shaped hole and a positioning hole, the adjusting frame is provided with a first matching hole and a second matching hole, a first locking rod is arranged in the first matching hole and the positioning hole, and a second locking rod is arranged in the second matching hole, the second locking rod is used for moving along the arc in the arc-shaped hole and locking to adjust the included angle between the adjusting frame and the vertical direction.

[0013] In one embodiment of the above-mentioned conveying device, the storage area is provided with a first limiting member and a second limiting member, the first limiting member and the second limiting member are oppositely arranged to form a limiting space,

[0014] The limiting space is used for limiting the movement of the wafer container in the horizontal and / or vertical direction.

[0015] In one embodiment of the above-mentioned conveying device, the first limiting member comprises a bottom plate and a vertical plate which are perpendicular to each other, side stop plates are arranged on opposite sides of the vertical plate along the length direction of the vertical plate, the bottom plate is provided with an intermediate plate along the length direction of the bottom plate to form a first clamping groove for clamping the edge of the wafer container together with the side stop plates;

[0016] The second limiting member is provided with a second clamping groove on each of the opposite sides along the length direction of the second limiting member.

[0017] In one embodiment of the above-mentioned conveying device, a first sensor is arranged between the first limiting member and the second limiting member, and the first sensor is used for detecting whether the wafer container is in the limiting space;

[0018] The first limiting member and / or the second limiting member is provided with a second sensor along the length direction thereof, and the second sensor is used to detect whether a wafer container is installed on the first limiting member and / or the second limiting member.

[0019] In one embodiment of the above-mentioned conveying device, the storage area is provided with at least two sets of corresponding first limiting members and second limiting members to form at least two limiting spaces.

[0020] In one embodiment of the above-mentioned conveying device, the housing is provided with the read-write device on the opposite sides along the direction of its own movement.

[0021] In one embodiment of the above-mentioned conveying device, the walking mechanism includes a battery module arranged in the housing, and the battery module has a charging port, and the housing is provided with a charging channel along the axis of the charging port, and the charging channel is provided with detachable baffles mounted on the housing at both ends along the axis of the charging channel.

[0022] In one embodiment of the above-mentioned conveying device, the housing is provided with an ultrasonic sensor,

[0023] The outer side of the housing is provided with an elastic anti-collision strip, and the anti-collision strip is electrically connected with the walking mechanism.

[0024] And / or,

[0025] The housing is provided with a laser radar, and the laser radar is used to receive and feedback the space information on the set route.

[0026] The above-mentioned one or more embodiments of the present application have at least one or more of the following beneficial effects:

[0027] By arranging the read-write device on the side of the housing, and there is a first preset angle between the center line of the lens of the read-write device and the side of the housing on which the read-write device is mounted, so that the lens of the read-write device can cover the ground range between the side of the housing and the adjacent conveying device housing, and then read the label information arranged on the ground, so that the staff can obtain the position information or process of the conveying device in time, and then drive the walking mechanism to move the housing to the corresponding position or process, and then move the wafer container to the set position by the picking mechanism.

[0028] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter. BRIEF DESCRIPTION OF DRAWINGS

[0029] The disclosure of the present application will become more apparent from the following description with reference to the attached drawings. It is readily understood by the person skilled in the art that the drawings are only for the purpose of illustration and are not intended to limit the scope of protection of the present application. In addition, similar numbers in the figures are used to represent similar components, wherein:

[0030] Fig. 1 is a structural schematic diagram of a carrying device according to an embodiment of the present application;

[0031] Fig. 2 is a structural schematic diagram of a reader installation position according to an embodiment of the present application;

[0032] Fig. 3 is a structural schematic diagram of an installation assembly according to an embodiment of the present application;

[0033] Fig. 4 is an enlarged view of A in Fig. 2;

[0034] Fig. 5 is a structural schematic diagram of a charging channel according to an embodiment of the present application;

[0035] Fig. 6 is a structural schematic diagram of a gripper according to an embodiment of the present application;

[0036] Fig. 7 is a structural schematic diagram of the inside of the gripper according to an embodiment of the present application.

[0037] Legend of reference signs:

[0038] 1, housing; 11, storage area; 12, battery module; 13, charging channel; 131, detachable baffle; 14, ultrasonic sensor; 15, anti-collision strip; 16, laser radar; 2, picking mechanism; 21, mechanical hand; 22, gripper; 221, transmission unit; 222, clamping unit; 2221,

[0039] clamping part; 223, driving unit; 224, auxiliary support; 3, walking mechanism; 4, reader; 5, installation assembly; 51, reading space; 52, fixing frame; 521, arc-shaped hole; 522, positioning hole; 53, adjusting frame; 531, first matching hole; 532, second matching hole; 6, first limiting member; 61, bottom plate; 62, vertical plate; 63, side baffle; 64, intermediate plate; 65, first clamping groove; 7, second limiting member; 71, limiting space; 72, second clamping groove; 73, first sensor; 74, second sensor; 8, wafer container. DETAILED DESCRIPTION

[0040] Some embodiments of the present application will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application.

[0041] As described in the background, when multiple wafer box handling devices travel side by side on a travel route, due to the narrow width of the travel route, the wafer box handling device will block the read-write field of view of the semiconductor RFID reader-writer of the adjacent wafer box handling device, thereby causing the staff to be unable to obtain the position information or process of the wafer box handling device.

[0042] Therefore, the present application creatively proposes a handling device, which comprises a shell, a picking mechanism, a walking mechanism and a reader-writer. The reader-writer is arranged on the side surface of the shell, and there is a first preset angle between the lens center line of the reader-writer and the side surface of the shell on which the reader-writer is mounted, so that the lens of the reader-writer can cover the ground range between the side surface of the shell and the shell of the adjacent handling device, thereby reading the label information arranged on the ground, so that the staff can obtain the position information or process of the handling device in time, and then the walking mechanism drives the shell to move to the corresponding position or process, and then the picking mechanism carries the wafer container to the designated position.

[0043] The present application will be specifically described through specific embodiments below.

[0044] Referring to FIGS. 1-7, the present application provides a handling device, which comprises a shell 1, a picking mechanism 2, a walking mechanism 3 and a reader-writer 4, the shell 1 is provided with

[0045] a storage area 11 for carrying wafer containers 8, the picking mechanism 2 is arranged on the shell 1 and is used to pick up the wafer containers 8 to the designated position, the walking mechanism 3 is used to drive the shell 1 to move along the designated route; the reader-writer 4 is arranged on the side surface of the shell 1 along its own travel direction, and there is a first preset angle between the lens center line of the reader-writer 4 and the side surface of the shell 1 on which the reader-writer 4 is mounted, so as to identify the label information arranged on the ground.

[0046] It can be understood that, as shown in FIGS. 1 and 2, the designated position includes the storage area 11, and during the handling process, the handling device will carry the wafer containers 8 at a certain process to the storage area 11 through the picking mechanism 2, then move to another process through the walking mechanism 3, and then carry the wafer containers 8 at the storage area 11 to the process through the picking mechanism 2. In addition, the designated route can be the route between wafer processing processes, or can be an arbitrarily designated route according to needs.

[0047] In some examples, the first preset angle is between 0° and 40°, and in the present embodiment, the first preset angle is 22°.

[0048] In the present embodiment, the reader-writer 4 is a semiconductor RFID reader-writer.

[0049] In some examples, the walking mechanism 3 can be an AGV trolley, and the walking mechanism 3 can also be other transport devices that can realize the walking and carrying function.

[0050] It should be noted that the "side surface along its own advancing direction" refers to the side surface as commonly understood, which means that when the observation direction of the observer is the front surface, the left and right surfaces on the front surface are the side surfaces.

[0051] Specifically, when two or more carrying devices travel side by side on a certain set route, even if the width of the set route is narrow, the lens of the reader / writer 4 arranged on the side surface of the shell 1 in the advancing direction has a certain angle with the vertical direction, so that the lens of the reader / writer 4 can cover the ground between the two adjacent carrying devices, thereby reading the label information arranged on the ground, so that the staff can timely obtain the process position of the carrying device, so as to track and manage the wafer boxes carried by the carrying device, thereby better managing the entire production process of the wafer. At the same time, the carrying device itself

[0052] The current position thereof can also be obtained, so as to perform the work corresponding to the current position, such as carrying the wafer container 8 at the position to the storage area 11 of the shell 1 by the picking mechanism 2.

[0053] Further, as shown in FIGS. 2 and 3, in some examples, the shell 1 is provided with a mounting assembly 5, and the reader / writer 4 is mounted in the shell 1 through the mounting assembly 5. The side surface portion of the shell 1 is inclined inwardly by a second preset angle to form a reading space 51, and the reading space 51 extends inwardly along the vertical direction to the shell 1, so that the lens of the reader / writer 4 reads the label information arranged on the ground through the reading space 51.

[0054] In some examples, the second preset angle is between 0° and 40°. In this embodiment, the second preset angle is 22°.

[0055] Specifically, by inclining the side surface portion of the shell 1 inwardly, the maximum width dimension of the carrying device is ensured to be the dimension of the shell 1, so that the problem of collision of the reader / writer 4 does not occur when the carrying device travels side by side. The second preset angle can be consistent with the first preset angle, so as to facilitate the staff to observe whether the lens of the reader / writer 4 is installed correctly; the second preset angle can be smaller than the first preset angle, so that the reading space 51 can be larger to avoid the part of the shell 1 inclined inwardly from blocking the field of view of the lens of the reader / writer 4.

[0056] In some examples, referring to Figures 2 and 3, the mounting assembly 5 includes a fixing frame 52 and an adjusting frame 53. The fixing frame 52 is installed inside the housing 1, and the adjusting frame 53 is used to fix the reader 4. The fixing frame 52 is provided with an arc-shaped hole 521 and a positioning hole 522. The adjusting frame 53 is provided with a first mating hole 531 and a second mating hole 532. A first locking rod passes through the first mating hole 531 and the positioning hole 522, and a second locking rod passes through the second mating hole 532. The second locking rod is used to move along the arc within the arc-shaped hole 521 and lock, so as to adjust the angle between the adjusting frame 53 and the vertical direction.

[0057] It is understandable that the locking methods of the first locking rod and the second locking rod include various methods such as snap-fit ​​and threaded connection. In this example, the threaded connection method is used.

[0058] In this embodiment, both the adjusting bracket 53 and the fixing bracket 52 are right-angle bent plates, and they can also be any other installation structure that can achieve the function of fixed installation. First mating hole 531, second mating hole 531...

[0059] Both the mating hole 532 and the positioning hole 522 are circular through holes.

[0060] Specifically, before or after the handling device is debugged, the angle between the reader 4 and the vertical direction can be adjusted using the mounting component 5. This adjustment adjusts the first preset angle between the reader 4 and the side of the housing 1 on which it is mounted, allowing the reader 4 to quickly and accurately identify the tag information placed on the ground. During adjustment, the mounting bracket 52 is already installed on the housing.

[0061] 1. Inside, the adjustment bracket 53 is equipped with a reader / writer 4; first, align the first mating hole 531 with the positioning hole.

[0062] Align 522, then insert the first locking rod into the first mating hole 531 and the positioning hole 522 to achieve the initial positioning of the adjusting frame 53 and the fixed frame 52; then insert the second locking rod into the second mating hole 532 and the arc-shaped hole 521 respectively, and then move the second rod along the arc in the arc-shaped hole 521, thereby driving the fixed frame 52 to move along the arc, thereby changing the included angle of the fixed frame 52 relative to the vertical direction. Then, fix the angle of the reader 4 relative to the vertical direction by screwing nuts on the first locking rod and the second locking rod respectively.

[0063] It can be understood that the mounting assembly 5 can also be other structures capable of achieving angle adjustment, such as a metal bellows with a set toughness, which can be bent by external force and remain in the bent state unless subjected to a certain external force again. By installing the reader-writer 4 on the metal bellows, the angle of the reader-writer 4 relative to the vertical direction can be adjusted by bending the metal bellows.

[0064] In some examples, as shown in FIGS. 2 and 4, the storage area 11 is provided with a first limiting member 6 and a second limiting member 7, which are oppositely arranged to form a limiting space 71 for limiting the movement of the wafer container 8 in the horizontal and / or vertical directions.

[0065] It can be understood that the first limiting member 6 and the second limiting member 7 can be long strips, triangular prisms, quadrangular prisms, or other polygonal prisms, or be hemispherical, spherical, etc., as long as they can limit the wafer container 8. In the embodiment, the first limiting member 6 and the second limiting member 7 are long strips as a whole.

[0066] Further, in some examples, as shown in FIG. 4, the first limiting member 6 includes mutually

[0067] perpendicular bottom plates 61 and vertical plates 62, the vertical plates 62 are respectively provided with side plates 63 on opposite sides along the length direction thereof, the bottom plates 61 are provided with intermediate plates 64 along the length direction thereof to form first clamping grooves 65 for clamping the edges of the wafer container 8 together with the side plates 63; and the second limiting member 7 is respectively provided with second clamping grooves 72 on opposite sides along the length direction thereof.

[0068] It should be noted that the wafer container 8 generally has edges to be clamped or placed.

[0069] Specifically, when the picking mechanism 2 carries the wafer container 8 to the storage area 11, the picking mechanism 2 places the wafer container 8 on the intermediate plates 64, and then inserts the edges of a corresponding one of the wafer container 8 into the corresponding first clamping grooves 65, while the vertical plates 62 also limit one face of the wafer container 8; and then inserts the edges of the other two corresponding sides of the wafer container 8 into the corresponding second clamping grooves 72, thereby limiting the wafer container 8 in the horizontal direction and ensuring the stability of the wafer container 8 during the movement of the carrying device.

[0070] It can be understood that the first limiting member 6 and the second limiting member 7 can also be respectively arranged in a semi-ring structure, so as to limit the wafer from at least four corners, thereby limiting the wafer container 8 in the horizontal direction.

[0071] Further, in some examples, a first sensor 73 is arranged between the first limiting member 6 and the second limiting member 7, and the first sensor 73 is used to detect whether the wafer container 8 is in the limiting space 71; a second sensor 74 is arranged along the length direction of the first limiting member 6 and / or the second limiting member 7, and the second sensor 74 is used to detect whether the wafer container 8 is installed on the first limiting member 6 and / or the second limiting member 7.

[0072] In the drawings, the radiating cylinders represent the detection direction of the sensors, and in FIG. 4, the first sensor 73 is indicated by indicating the detection direction of the first sensor 73, which is arranged directly below the limiting space 71.

[0073] It should be noted that, in the embodiment, in order to make full use of the space and reduce the moving path of the pickup mechanism 2, the pickup mechanism 2 is arranged at the middle position of the top of the housing 1, and the pickup mechanism 2 is arranged to move along the length direction of the housing 1.

[0074] Each of the two sides (the two sides along the width direction of the housing 1) of the housing 1 is provided with a storage area 11, so as to increase the number of wafer containers 8 carried by the carrying device at a time.

[0075] Further, the storage area 11 is provided with at least two sets of corresponding first limiting members 6 and second limiting members 7, so as to form at least two limiting spaces 71, thereby allowing multiple wafer containers 8 to be placed in the same storage area 11.

[0076] Specifically, when the pickup mechanism 2 carries the wafer container 8 to the storage area 11, the first sensor 73 can timely know whether the wafer container 8 is placed in the corresponding limiting space 71, so as to avoid misplacement; and then the second sensor 74 can also know whether the wafer container 8 is installed in place, so as to avoid abnormal movement or falling of the wafer container 8 during the walking of the carrying device.

[0077] In some examples, the housing 1 is provided with a reader / writer 4 on each of the opposite sides along the walking direction of the housing 1, so as to improve the adaptability of the carrying device during walking. The carrying device can select one side of the reader / writer 4 or both sides of the reader / writer 4 to work according to the needs, so as to read the label information in a narrow space.

[0078] In some examples, referring to FIG. 5, which is a view of one side of the shell 1 with the removable baffle 131 removed, the walking mechanism 3 includes a battery module 12 disposed in the shell 1, the battery module 12 having a charging port, and the shell 1 has a charging passage 13 extending along the axis of the charging port, and the charging passage 13 has a removable baffle 131 mounted to the shell 1 at each end of the charging passage 13. When the carrying device needs to be charged, the removable baffle 131 on either side of the charging passage 13 can be removed to allow the battery module 12 to be charged or removed.

[0079] 131 opened to allow the battery module 12 to be charged or removed by the staff when multiple carrying devices are running side by side.

[0080] Further, in some examples, referring to FIGS. 1 and 2, the shell 1 has an ultrasonic sensor 14 disposed therein, and the shell 1 has an elastic anti-collision strip 15 disposed on the outside thereof, and the anti-collision strip 15 is electrically connected to the walking mechanism 3.

[0081] and / or,

[0082] The shell 1 has a laser radar 16 disposed therein, and the laser radar 16 is used to receive and feedback spatial information on the set route.

[0083] In the present embodiment, a plurality of laser radars 16 are disposed along the periphery of the shell 1 (on the outside of the walking mechanism 3), wherein at least one laser radar 16 is disposed on each side of the shell 1 to sufficiently detect obstacles around the walking mechanism 3, so as to completely receive spatial information on the set route and feedback to the carrying device, so that the walking mechanism 3 can reduce the running speed or stop when the obstacle enters the set range, thereby avoiding collision between the carrying device and the obstacle. At the same time, a plurality of ultrasonic sensors 14 are disposed along the periphery of the shell 1, which can detect obstacles around the carrying device including glass materials, and the walking mechanism 3 can reduce the running speed when the obstacle enters the set range, so that the carrying device can make arrangements for the next step to reduce the occurrence of collision. In addition, at least an anti-collision strip 15 is mounted on the periphery edge of the shell 1, and when the carrying device touches the obstacle, the anti-collision strip 15 can conveniently convert the pressure signal into an electrical signal, causing the corresponding components to short circuit, and thus causing the walking mechanism 3 to brake urgently.

[0084] In some examples, the picking mechanism 2 is a multi-axis robot 21, such as a five-axis robot, a six-axis robot, etc., which can be selected by the user according to the space and gripping requirements. The gripping end of the robot 21 is provided with a gripper 22 for clamping the wafer container 8. In the present embodiment, as shown in FIGS. 1, 6 and 7, the gripper 22 includes a transmission unit 221, a clamping unit 222 and a driving unit 223; the transmission unit 221 is provided with a secondary support 224 at each end along the transmission direction thereof, and the secondary support 224 has at least two mounting surfaces located in the same plane; and the clamping unit 222 includes at least two pairs of clamping portions 2221, one clamping portion 2221 is arranged on each mounting surface, and a first preset clamping angle is formed between the two adjacent clamping portions 2221 on the secondary support 224, so as to adapt to wafer containers 8 in different placement states; and the driving unit 223 is connected with the transmission unit 221 and drives the two secondary supports 224 to move closer to or away from each other, so as to drive each pair of clamping portions 2221 to clamp or open, thereby achieving the picking and placing of the wafer container 8.

[0085] Specifically, after learning the placement state of the wafer container 8, the gripper 22 moves to the side of the wafer container 8 and places a corresponding pair of clamping portions 2221 on the two sides of the wafer container 8 away from each other, and then starts the driving unit 223, thereby driving the two secondary supports 224 to move closer to each other, and then driving the corresponding pair of clamping portions 2221 to clamp the wafer container 8.

[0086] The clamping portions 2221 clamp the wafer container 8, and the gripper 22 moves the wafer container 8 to the corresponding station and releases the pair of clamping portions 2221. When the gripper 22 needs to clamp other wafer containers 8 in different placement states, only a corresponding pair of clamping portions 2221 needs to be selected. Since the mounting surfaces on the secondary supports 224 are located in the same plane, the clamping portions 2221 that do not need to clamp the wafer container 8 are less likely to interfere with the wafer container 8 to be clamped. Meanwhile, the first preset clamping angle is formed between the two adjacent clamping portions 2221 on the secondary support 224, which further reduces the possibility of interference of the clamping portions 2221 that do not need to clamp the wafer container 8 with the wafer container 8 to be clamped.

[0087] In the description of the application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the application. In the description of the application, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0088] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0089] Although the embodiments of the application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the application.

[0090] Type a free content description paragraph here.

Claims

1. A handling device, characterized in that The transport device comprises: a housing, wherein a storage area for carrying a wafer container is arranged on the housing; a picking mechanism arranged on the housing and used for picking up a wafer container to a designated position; a walking mechanism used for driving the housing to move along a designated route; a reader-writer arranged on the side of the housing along the direction of its own travel, and a first preset angle is formed between the center line of the lens of the reader-writer and the side of the housing on which the reader-writer is installed, so as to identify the label information arranged on the ground.

2. The handling device of claim 1, wherein An installation assembly is arranged in the housing, the reader-writer is installed in the housing through the installation assembly, and a part of the side of the housing is inwardly inclined at a second preset angle to form a reading space, which extends into the housing along the vertical direction, so that the lens of the reader-writer reads the label information arranged on the ground through the reading space.

3. The handling device of claim 2, wherein The installation assembly comprises a fixing frame and an adjusting frame, the fixing frame is installed in the housing, the adjusting frame is used for fixing the reader-writer, the fixing frame is provided with an arc-shaped hole and a positioning hole, the adjusting frame is provided with a first matching hole and a second matching hole, a first locking rod is arranged in the first matching hole and the positioning hole, and a second locking rod is arranged in the second matching hole, the second locking rod is used for moving along an arc in the arc-shaped hole and being locked to adjust the included angle between the adjusting frame and the vertical direction.

4. The handling device of claim 1, wherein A first limiting member and a second limiting member are arranged in the storage area, the first limiting member and the second limiting member are oppositely arranged to form a limiting space, and the limiting space is used for limiting the movement of the wafer container in the horizontal and / or vertical directions.

5. The handling device of claim 4, wherein The first limiting member comprises a bottom plate and a vertical plate which are perpendicular to each other, side plates are arranged on the opposite sides of the vertical plate along the length direction of the vertical plate, the bottom plate is provided with an intermediate plate along the length direction of the bottom plate to form a first clamping groove for clamping the edge of the wafer container with the side plates; the second limiting member is provided with a second clamping groove on the opposite sides thereof along the length direction.

6. The handling device of claim 5, wherein A first sensor is arranged between the first limiting member and the second limiting member, and the first sensor is used for detecting whether the wafer container is in the limiting space; a second sensor is arranged on the first limiting member and / or the second limiting member along the length direction thereof, and the second sensor is used for detecting whether the wafer container is installed on the first limiting member and / or the second limiting member.

7. The handling device of claim 5, wherein At least two groups of the first limiting member and the second limiting member which are in one-to-one correspondence are arranged in the storage area to form at least two limiting spaces.

8. The handling device according to any one of claims 1-7, characterized in that, The opposite sides of the housing along the direction of its own travel are both provided with the reader-writer.

9. The handling device according to any one of claims 1-7, characterized in that, The walking mechanism comprises a battery module arranged in the housing, the battery module has a charging port, a charging channel is arranged in the housing along the axis of the charging port, and detachable baffles are arranged at both ends of the charging channel along the axial direction of the charging channel and are installed on the housing.

10. The handling device according to any one of claims 1-7, characterized in that, An ultrasonic sensor is arranged in the housing, an elastic anti-collision strip is arranged on the outside of the housing, and the anti-collision strip is electrically connected with the walking mechanism; and / or, The housing is internally provided with a laser radar, which is used for receiving and feeding back space information on a set route.

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