Lamella lift-out geometry based on sample plane orientation

The scientific instrument adjusts stage tilt and rotation based on sample plane orientation to correct lamella misalignment, enhancing imaging quality and repeatability by maintaining precise alignment during milling and transfer.

WO2026064334A1 Publication Date: 2026-03-26FEI CO
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Patent Information

Application Number
PCT/US2025/046667
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-09-18
Filing Date
2025-09-16
Publication Date
2026-03-26

AI Technical Summary

Technical Problem

Existing scientific instruments face issues with incorrect orientation of lamella during milling and manipulation, leading to poor-quality experiment results due to misalignment between the lamella and the sample stage.

Method used

A scientific instrument is equipped with an adjustment component that adjusts stage tilt and rotation based on the plane orientation of the sample, ensuring the lamella is milled and transferred with a correct orientation, using a manipulator needle to maintain precise alignment with the sample holder.

Benefits of technology

This approach enables precise and accurate positioning of lamella, improving imaging quality and repeatability by ensuring correct orientation during the milling and transfer process.

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Abstract

Systems, methods, or techniques are provided for lamella lift-out based on sample plane orientation. In various embodiments, a method can comprise adjusting, by a scientific instrument, stage tilt and rotation of a sample stage of the scientific instrument based on plane orientation of a sample.
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