Microscope system, control method for microscope system, and control program

Abstract

In the present invention, a stage 10 has a placement surface 10a on which a sample is placed. A head part 20 has an observation optical system and can be inclined with respect to the placement surface 10a. A detection unit provided to a frame part 40 detects the state of inclination of the head part 20 with respect to the placement surface 10a. An objective lens holder 30 can have a plurality of objective lenses 6 attached thereto with the objective lenses 6 being inserted along an observation optical axis. A drive unit for driving the objective lens holder 30 inserts, along the observation optical axis, one of the objective lenses 6 attached to the objective lens holder 30. A control unit provided in the head unit 20 controls the drive unit to drive the objective lens holder 30 according to the detection result of the inclination state.

Description

Microscope system, method for controlling microscope system, and control program

[0001] The disclosure of this specification relates to a microscope system.

[0002] A microscope system having a tilt mechanism capable of tilting a head portion including an objective lens about a swing axis passing through an observation object on a stage is known. The tilt mechanism enables a centric observation in which the observation object is tilted and observed from various angles while keeping the central position of the observation object constant, and is useful for observing a three-dimensional observation object such as an electronic component on a substrate.

[0003] As a technology related to a microscope system having a tilt mechanism enabling tilt observation, several technologies for reducing the risk of collision between the observation object of the head portion with a changed tilt angle and the object are known. For example, in a microscope apparatus capable of observing an observation object by tilting a head portion provided with a lens portion with respect to a stage, a technology of issuing a warning when the tilt angle exceeds a threshold value is known (see, for example, Patent Document 1).

[0004] Japanese Patent Application Laid-Open No. 2015-127773

[0005] In a microscope system having a tilt mechanism and equipped with a revolver to which a plurality of objective lenses can be attached, when the revolver is rotated to switch the objective lens during tilt observation, the objective lens may collide with the specimen (sample). The above-described technology was premised on the fact that only one objective lens was mounted on the microscope, and thus the risk of collision between the objective lens and the specimen when the revolver was rotated during tilt observation at an allowable tilt angle was not considered.

[0006] In view of the above points, an object according to one aspect of the present invention is to reduce the risk caused by the collision between the objective lens and the specimen due to the rotation of the revolver during tilt observation.

[0007] A microscope system according to one aspect of the present invention comprises a stage, a head unit, a detection unit, an objective lens holder, a drive unit, and a control unit. The stage has a mounting surface on which a specimen is placed. The head unit has an observation optical system and can be tilted relative to the mounting surface. The detection unit detects the tilt state of the head unit relative to the mounting surface. The objective lens holder can accommodate multiple objective lenses to be inserted onto the observation optical axis. The drive unit drives the objective lens holder to insert one of the objective lenses attached to the objective lens holder onto the observation optical axis. The control unit controls the drive of the objective lens holder according to the detection result of the tilt state.

[0008] According to the above embodiment, the risk of the objective lens colliding with the specimen due to the rotation of the revolving nosepiece during inclined observation is reduced.

[0009] This diagram shows an example configuration of an observation system including the microscope system according to this embodiment. This diagram shows the front view of the microscope system according to this embodiment. This diagram shows an overview of the internal configuration of the head unit according to this embodiment. This diagram shows an overview of the internal configuration of the objective lens holder according to this embodiment. This diagram shows the external appearance of the objective lens holder according to this embodiment. This diagram shows an overview of the external appearance and internal configuration of the frame unit according to this embodiment. This diagram shows an example of the hardware configuration of the control device. This is a flowchart showing the processing procedure of the drive control method for the objective lens holder according to this embodiment. This is a flowchart showing the processing procedure of a first example of the tilt state detection process. This is a flowchart showing the processing procedure of a second example of the tilt state detection process. This is an example of data for the tilt angle threshold table. This is a flowchart showing the processing procedure of an example of the tilt angle threshold determination process. This is a flowchart showing the processing procedure of a first example of the drive restriction process. This is a flowchart showing the processing procedure of a second example of the drive restriction process. This is a flowchart showing the processing procedure of a third example of the drive restriction process. This is a flowchart showing the processing procedure of a fourth example of the drive restriction process. This is a flowchart showing the processing procedure of a fifth example of the drive restriction process.

[0010] The embodiments will be described in detail below with reference to the drawings.

[0011] Figure 1 shows an example of the configuration of an observation system 2 including a microscope system 1 according to this embodiment. This observation system 2 is configured to include the microscope system 1 and a PC 3. "PC" is an abbreviation for personal computer.

[0012] Figure 1 shows the left side view of the microscope system 1. The microscope system 1 according to this embodiment comprises a stage 10, a head unit 20, an objective lens holder 30, and a frame unit 40.

[0013] The stage 10 has a mounting surface 10a. The specimen to be observed using the microscope system 1 is placed on the mounting surface 10a of the stage 10.

[0014] The head unit 20 has an observation optical system.

[0015] The objective lens holder 30 is mounted on the head unit 20. The objective lens holder 30 can accommodate multiple objective lenses 6. In this embodiment, the objective lens holder 30 has a configuration that allows for the mounting of four objective lenses 6 (objective lenses 6a, 6b, 6c, and 6d). Note that the number of objective lenses 6 that can be mounted on the objective lens holder 30 is not limited to four. The objective lens holder 30 electrically inserts one of the multiple objective lenses 6 mounted on it onto the observation optical axis of the microscope system 1. This objective lens holder 30 is sometimes referred to as an electric revolving nosepiece.

[0016] The frame portion 40 holds the stage 10 and supports the head portion 20 while tilting it with respect to the mounting surface 10a of the stage 10.

[0017] Figure 2 shows the front view of the microscope system 1 according to this embodiment, illustrating the state in which the head portion 20, which is inclined with respect to the mounting surface 10a, is supported by the frame portion 40. As indicated by the dashed arrow in Figure 2, the microscope system 1 according to this embodiment has a tilt mechanism that allows the head portion 20 to be tilted with respect to the mounting surface 10a of the stage 10.

[0018] PC3 is connected to an input device 4 and a display device 5.

[0019] The input device 4 is, for example, a keyboard, mouse, touchpad, or joystick. The PC 3 provides the function of a controller that sends various instructions, which are input by the user of the observation system 2 operating the input device 4, to the microscope system 1.

[0020] The display device 5 is, for example, a liquid crystal display device or an organic EL display device. "EL" is an abbreviation for electro-luminescence. The PC 3 also provides an image processing function to display the image of the specimen obtained by the microscope system 1 on the display device 5.

[0021] The details of the configuration of each part of the microscope system 1 according to this embodiment will be further described below.

[0022] First, the head unit 20 will be described. Figure 3 is a diagram showing an overview of the internal configuration of the head unit 20 according to this embodiment, and depicts the view seen through the inside of the head unit 20 from the left side of the microscope system 1.

[0023] The head unit 20 has an optical illumination system and an observation optical system. The optical illumination system consists of a light source 21a, an illumination system imaging lens 21b, and a half mirror 21c, while the observation optical system consists of an imaging system imaging lens 22a, a projection mirror 22b, and a zoom optical system 22c.

[0024] The light source 21a is, for example, a white light-emitting diode, but may be other. The illumination light emitted from the light source 21a is collimated by the illumination imaging lens 21b, then reflected by the half mirror 21c, and emitted from the head unit 20 to the objective lens holder 30. Subsequently, this illumination light is irradiated onto the specimen placed on the mounting surface 10a of the stage 10 via the objective lens 6 positioned on the observation optical axis of the microscope system 1 by the objective lens holder 30, and is reflected.

[0025] The reflected light from the specimen is focused by the objective lens 6 positioned on the observation optical axis, passes through the half mirror 21c and the imaging lens 22a, is reflected by the projection mirror 22b, and after passing through the zoom optical system 22c, the optical image of the specimen is projected onto the imaging unit 23.

[0026] The imaging unit 23, located in the head unit 20, is an image sensor such as a CCD image sensor or a CMOS image sensor. It captures an optical image of the specimen projected onto the imaging surface and outputs the image data obtained to the PC 3.

[0027] The head unit 20 is further equipped with a Z-focusing mechanism 24. The Z-focusing mechanism 24 is an electrically powered linear motion mechanism that moves the head unit 20 in the Z direction (up and down direction in Figure 3).

[0028] The head unit 20 further includes a first control unit 25. The first control unit 25 controls each component of the head unit 20, such as the imaging unit 23 and the Z-focusing mechanism 24. The first control unit 25 also controls the drive of the objective lens holder 30. Furthermore, the first control unit 25 exchanges various data with the second control unit 42 provided in the frame unit 40, and also with the PC 3. Details of the second control unit 42 will be described later.

[0029] Next, the objective lens holder 30 will be described. Figure 4 is a diagram showing an overview of the internal configuration of the objective lens holder 30 according to this embodiment, depicting the view seen through the inside of the objective lens holder 30 from the left side of the microscope system 1. Figure 5 is a diagram showing the external appearance of the objective lens holder 30 according to this embodiment, a perspective view showing the external appearance of the objective lens holder 30 when it is turned inside out.

[0030] The objective lens holder 30 includes a holder rotation unit 31, a holder drive unit 32, and a hole position detection unit 33.

[0031] In the objective lens holder 30, multiple insertion holes 31a are provided in the holder rotation part 31, and an objective lens 6 can be attached to each of them. Each of the insertion holes 31a is also assigned a hole number.

[0032] In the objective lens holder 30 according to this embodiment, the holder rotating part 31 is provided with four insertion holes 31a, and each of these insertion holes 31a is assigned the hole number "1" to "4" as shown in the hole number indicator 31b. In this embodiment, the objective lens 6 with the highest magnification among the four objective lenses 6 with different magnifications is attached to the insertion hole 31a assigned the smallest hole number "1". Subsequently, each of the objective lenses 6 is attached to the insertion holes 31a assigned the hole numbers "2", "3", and "4", respectively, in order of decreasing magnification. In other words, in this embodiment, each of the objective lenses 6 with different magnifications is attached to the insertion holes 31a, which are assigned hole numbers in ascending order, in order of decreasing magnification.

[0033] The holder drive unit 32 is a drive unit that drives the objective lens holder 30, and by rotating the holder rotation unit 31, it inserts one of the multiple objective lenses 6 attached to the holder rotation unit 31 onto the observation optical axis of the microscope system 1. In this embodiment, the holder drive unit 32 is a stepping motor, and the rotation speed can be controlled by changing the frequency of the pulse signal used to control the amount of rotation, and the torque can be changed by changing the drive current.

[0034] The hole position detection unit 33 detects the hole number assigned to the insertion hole 31a of the holder rotation unit 31 to which the objective lens 6, which is inserted on the observation optical axis, is attached.

[0035] Next, the frame portion 40 will be described. Figure 6 is a diagram showing an overview of the external appearance and internal configuration of the frame portion 40 according to this embodiment, and depicts the frame portion 40 as seen from the left side in the microscope system 1.

[0036] The frame section 40 includes a stage holding section 40a, a frame Z lifting section 40b, and a tilt support section 40c.

[0037] The stage holding unit 40a holds the stage 10.

[0038] The frame Z lifting section 40b moves the stage 10 in the Z direction (up and down direction in Figure 6).

[0039] The tilt support section 40c supports the head section 20 while tilting it with respect to the mounting surface 10a of the stage 10. The tilt support section 40c is equipped with a handle 40d. By gripping the handle 40d and rotating the tilt support section 40c to the left or right in the microscope system 1, the user of the observation system 2 can change the tilt angle of the head section 20 with respect to the mounting surface 10a of the stage 10 (tilt it). In this way, the frame section 40 has a tilt mechanism.

[0040] The inclination angle of the head unit 20 with respect to the mounting surface 10a of the stage 10 corresponds to the inclination angle of the optical axis L1 of the head unit 20 with respect to an axis (Z-axis) perpendicular to the mounting surface 10a of the stage 10. In this embodiment, the inclination angle when the head unit 20 is in an upright state (the optical axis L1 of the head unit 20 is perpendicular to the mounting surface 10a of the stage 10) is defined as 0 degrees (0°). The inclination angle when the head unit 20 is inclined in the +Y direction (the positive direction of the Y-axis) relative to this upright state is defined as the + inclination angle, and the inclination angle when the head unit 20 is in the -Y direction (the negative direction of the Y-axis) relative to the upright state is defined as the - inclination angle.

[0041] In this embodiment, the tilt support portion 40c is capable of tilting the head portion 20 with respect to the installation surface 10a of the stage 10 within a range of -90 degrees to +90 degrees.

[0042] Incidentally, a tilt lock lever 40e is provided on the stage holding portion 40a of the frame portion 40. The tilt lock lever 40e is operated to switch between locking and unlocking of the tilt support portion 40c. When the user of the observation system 2 operates the tilt lock lever 40e to lock the tilt support portion 40c, tilting of the head portion 20 by the tilt support portion 40c is prohibited. At this time, the head portion 20 is fixed in a state without inclination with respect to the installation surface 10a of the stage 10, that is, in a state where the inclination angle with respect to the installation surface 10a is 0 degrees. On the other hand, when the user of the observation system 2 operates the tilt lock lever 40e to unlock the tilt support portion 40c, tilting of the head portion 20 by the tilt support portion 40c becomes possible. At this time, the tilt support portion 40c can be operated to freely tilt the head portion 20 within a predetermined range. Note that the head portion 20 may be configured to be tilted electrically.

[0043] Further, the frame portion 40 includes a detection portion 41 and a second control portion 42 inside the stage holding portion 40a.

[0044] The detection portion 41 detects the inclination state of the stage 10 with respect to the installation surface 10a of the head portion 20. In the microscope system 1 according to the present embodiment, as the detection portion 41, a tilt lock state detection portion 41a and an inclination angle detection portion 41b are provided on the frame portion 40.

[0045] The tilt lock state detection portion 41a detects the lock / unlock setting of the tilt support portion 40c by the tilt lock lever 40e. As described above, since the tilt lock lever 40e switches the state of prohibiting / enabling tilting of the head portion 20, it can be said that the tilt lock state detection portion 41a detects the presence or absence of inclination of the stage 10 with respect to the installation surface 10a of the head portion 20.

[0046] The inclination angle detection portion 41b is, for example, a rotary encoder, and detects the inclination angle of the tilt support portion 40c with respect to the stage holding portion 40a, thereby detecting the inclination angle of the stage 10 with respect to the installation surface 10a of the head portion 20.

[0047] The second control unit 42 controls each component of the frame unit 40, such as the frame Z lifting unit 40b and the detection unit 41. Further, the second control unit 42 exchanges various data with the first control unit 25 provided in the head unit 20, and also exchanges various data with the PC 3.

[0048] Next, the hardware configurations of the first control unit 25 and the second control unit 42 will be described.

[0049] FIG. 7 is a diagram showing an example of the hardware configuration of the control device 50. This control device 50 can be used as the first control unit 25, and can also be used as the second control unit 42. The control device 50 is an example of a computer.

[0050] The control device 50 includes a processor 51, a memory 52, a storage device 53, and an interface circuit 54 as its hardware configuration. These components are connected to each other via a communication bus 55, and it is possible to exchange various data.

[0051] The processor 51 may be, for example, a single processor, a multi-processor, or a multi-core processor. The processor 51 provides the functions as the first control unit 25 or the second control unit 42 by reading and executing the control program stored in the storage device 53.

[0052] The memory 52 is, for example, a semiconductor memory and may include a RAM area and a ROM area. Note that "RAM" is an abbreviation for Random Access Memory, and "ROM" is an abbreviation for Read Only Memory.

[0053] The storage device 53 is, for example, a semiconductor memory such as a flash memory, and a program executed by the processor 51 is stored in advance.

[0054] The interface circuit 54 communicates with other devices and exchanges various data according to the instructions of the processor 51, for example.

[0055] The hardware configuration of the control device 50, which provides the functions of the first control unit 25 and the second control unit 42, is illustrative, and the embodiment is not limited thereto. For example, new configurations may be added to the above-described configuration.

[0056] Next, a method for controlling the drive of the objective lens holder 30 in the microscope system 1 according to this embodiment will be described. This drive control is performed according to the detection result of the detection unit 41 regarding the inclination state of the head unit 20 with respect to the mounting surface 10a of the stage 10.

[0057] Figure 8 is a flowchart showing the processing procedure for the drive control method of the objective lens holder 30 according to this embodiment. In this embodiment, this drive control method is performed by the first control unit 25.

[0058] When the power is turned on and power is supplied to the microscope system 1, a predetermined startup process is performed in the microscope system 1. Once this startup process is completed, the control method shown in Figure 8 is started.

[0059] First, in S101, a process is performed to determine whether an instruction to drive the objective lens holder 30 has been received. This drive instruction is, for example, an instruction input to the PC 3 in response to a predetermined operation instruction from the user of the observation system 2 to the input device 4, and the first control unit 25 receives this drive instruction from the PC 3.

[0060] In the determination process of S101, if it is determined that a drive instruction has been received (the determination result is YES), the tilt state detection process of S102 is performed. On the other hand, in this determination process, if it is determined that a drive instruction has not been received (the determination result is NO), the drive control enters a standby state, and the determination process of S101 is repeated until it is determined that a drive instruction has been received.

[0061] The tilt state detection process involves obtaining detection results from the detection unit 41 regarding the inclination state of the head unit 20 with respect to the mounting surface 10a of the stage 10, and determining whether or not to restrict the driving of the objective lens holder 30 based on these detection results. Details of the tilt state detection process will be described later.

[0062] Following the process in S102, in S103, a process is performed to determine whether the tilt state detection process in S102 has made a decision to restrict the driving of the objective lens holder 30.

[0063] If, in the determination process of S103, it is determined that a decision has been made to implement drive restriction (when the determination result is YES), then the drive restriction process is performed in S104. The drive restriction process is a process that controls the holder drive unit 32 to restrict the drive of the objective lens holder 30. Details of this drive restriction process will be described later.

[0064] On the other hand, if the determination process in S103 determines that no restrictions on driving have been imposed and that free driving is permitted (when the determination result is NO), the process proceeds to S105. Then, in S105, the process is performed to rotate the holder rotating part 31 by controlling the objective lens holder 30 to drive according to the driving instruction determined to have been acquired in the determination process in S101.

[0065] After that, when processing S104 or S105 is completed, the process returns to S101, and the processing from S101 onwards described above is performed again.

[0066] The processing steps described above constitute the method for controlling the drive of the objective lens holder 30 according to this embodiment.

[0067] Next, we will explain in detail the tilt state detection process, which is the process at S102 in the flowchart of Figure 8.

[0068] First, let's explain Figure 9. Figure 9 is a flowchart showing the processing procedure for the first example of tilt state detection processing.

[0069] When the process shown in Figure 9 begins, first, in S201, a process is performed to determine whether the tilt lock lever 40e has been operated and the tilt support unit 40c is locked. This determination is made based on data indicating the result of detection by the tilt lock state detection unit 41a regarding the lock / unlock setting of the tilt support unit 40c. The second control unit 42 acquires this detection result data from the tilt lock state detection unit 41a, and the first control unit 25 receives this detection result data from the second control unit 42.

[0070] As mentioned above, when the tilt support 40c is locked, there is no inclination of the head 20 with respect to the mounting surface 10a of the stage 10. Therefore, in the determination process of S201, if it is determined that the tilt support 40c is locked (when the determination result is YES), the process proceeds to S202, and a decision is made to allow the objective lens holder 30 to move freely.

[0071] On the other hand, if the tilt support part 40c is in an unlocked state, the head part 20 may be tilted with respect to the mounting surface 10a of the stage 10. Therefore, if the objective lens holder 30 is driven in this case, the objective lens 6 to which the objective lens holder 30 is attached may collide with the specimen. Thus, in the determination process of S201, if it is determined that the tilt support part 40c is not locked (it is unlocked) (when the determination result is NO), the process proceeds to S203, and a decision is made to restrict the driving of the objective lens holder 30.

[0072] After the decision is made in S202 or S203 as described above, the process in Figure 9 is terminated, and then the process returns to Figure 8 to perform the process in S103.

[0073] The process described above is the first example of tilt state detection processing.

[0074] Next, Figure 10 will be explained. Figure 10 is a flowchart showing the processing details of the second example of the tilt state detection process.

[0075] When the process shown in Figure 10 begins, first, in S211, a process is performed to acquire the inclination angle of the head unit 20 with respect to the installation surface 10a of the stage 10. This inclination angle data is detected by the inclination angle detection unit 41b, and the second control unit 42 acquires this data from the inclination angle detection unit 41b, and the first control unit 25 receives this data from the second control unit 42.

[0076] Next, in S212, a process is performed to obtain a threshold for the inclination angle that allows the head unit 20 to tilt relative to the installation surface 10a. This threshold data is, for example, data input to the PC 3 in response to a predetermined operation by the user of the observation system 2 to the input device 4, and the first control unit 25 obtains this data from the PC 3.

[0077] In S213, a process is performed to determine whether the tilt angle obtained by the process in S211 is greater than the threshold obtained by the process in S212.

[0078] In the determination process in S213, if it is determined that the tilt angle is greater than the threshold (when the determination result is YES), it is determined that if the objective lens holder 30 is driven, there is a possibility that the attached objective lens 6 will collide with the specimen, and the process proceeds to S214. Then, in S214, a decision is made to restrict the driving of the objective lens holder 30.

[0079] On the other hand, in the determination process in S213, if it is determined that the tilt angle is below the threshold (when the determination result is NO), it is determined that there is no possibility of the mounted objective lens 6 colliding with the specimen even if the objective lens holder 30 is driven, and the process proceeds to S215. Then, in S215, a decision is made to permit the free movement of the objective lens holder 30.

[0080] After the decision is made in S214 or S215 as described above, the process in Figure 10 is terminated, and then the process returns to the process in Figure 8 and the process in S103 is performed.

[0081] The process described above is a second example of tilt state detection processing.

[0082] Incidentally, as mentioned above, the threshold value obtained in the process of S212 in Figure 10 is a threshold value used to determine whether or not there is a possibility of collision between the mounted objective lens 6 and the specimen due to the driving of the objective lens holder 30. Instead of the user of the observation system 2 setting this threshold value, it may be determined based on the objective lens 6 mounted on the objective lens holder 30. More specifically, this threshold value may be determined based on the relationship between the objective lens 6 positioned on the observation optical axis of the microscope system 1 and the objective lens 6 positioned adjacent to the objective lens 6a in the circumferential direction of the circular holder rotation part 31.

[0083] The table shown in Figure 11 will now be explained. Figure 11 shows an example of data for the inclination angle threshold table 60. The inclination angle threshold table 60 is a table that is pre-held in the first control unit 25 (for example, the storage device 53 in the control device 50 in Figure 7).

[0084] In the tilt angle threshold table 60, the column for "objective lens on the observation optical axis" shows the part number of the objective lens 6 positioned on the observation optical axis of the microscope system 1. The column for "adjacent objective lens" shows the part number of the objective lens 6 that is positioned on the observation optical axis of the microscope system 1 in place of the "objective lens on the observation optical axis" by the rotation of the holder rotation unit 31 driven by the holder drive unit 32. In other words, the column for "adjacent objective lens" shows the part numbers of the objective lens 6 that is mounted adjacent to the "objective lens on the observation optical axis" in the rear direction in the rotation direction of the holder rotation unit 31.

[0085] In Figure 11, the letters "3x", "10x", "20x", and "40x" at the end of the part numbers of the objective lenses 6 indicate that the magnifications of the corresponding objective lenses 6 are 3x, 10x, 20x, and 40x, respectively. In this embodiment, the objective lenses 6 attached to the holder rotation part 31 of the objective lens holder 30 are such that the overall length increases and the working distance decreases as the magnification increases.

[0086] Furthermore, in the tilt angle threshold table 60, the "tilt angle threshold" column shows the tilt angle threshold when the objective lenses 6 are arranged in combination with the "objective lens on the observation optical axis" and the "adjacent objective lens". This threshold is the value at which, in the microscope system 1 with each objective lens 6 attached to the objective lens holder 30, no collision between the objective lens 6 and the specimen occurs even when the objective lens holder 30 is driven, and is, for example, a value determined in advance by actual measurement.

[0087] Referring to the tilt angle threshold table 60 in Figure 11, for example, when the "objective lens on the observation optical axis" is "AAAA-BBBB-3x" and the "adjacent objective lens" is "AAAA-BBBB-10x", the "tilt angle threshold" is shown to be "34.0". These data indicate that the tilt angle threshold when driving the objective lens holder 30 to switch the objective lens 6 on the observation optical axis from "AAAA-BBBB-3x" to the adjacently mounted "AAAA-BBBB-10x" is "34.0" degrees.

[0088] Now, let's explain Figure 12. Figure 12 is a flowchart showing an example of the processing procedure for determining the inclination angle threshold.

[0089] The tilt angle threshold determination process is a process that determines the threshold of the tilt angle that is permissible for the tilt of the head unit 20 relative to the installation surface 10a, based on the objective lens 6 attached to the objective lens holder 30, by using the tilt angle threshold table 60. This tilt angle threshold determination process is performed, for example, as process S212 in the tilt state detection process shown in Figure 10.

[0090] When the process shown in Figure 12 is initiated, first, in S301, a process is performed to acquire information on the part numbers of the objective lenses 6 currently positioned on the observation optical axis of the microscope system 1. This part number information is, for example, data input to the PC 3 in response to a predetermined operation by the user of the observation system 2 to the input device 4, and the first control unit 25 acquires this part number information from the PC 3. Alternatively, the first control unit 25 may acquire information on the part numbers of each objective lens 6 attached to the insertion hole 31a of the holder rotation unit 31 from the objective lens holder 30, corresponding to the hole number of the insertion hole 31a.

[0091] In S302, a process is performed to acquire the direction of drive (the rotation direction of the holder rotation part 31) in the drive instruction for the objective lens holder 30, which was determined to have been acquired by the determination process in S101 in Figure 8 described above.

[0092] In S303, a process is performed to acquire part number information for the objective lens 6 currently positioned on the observation optical axis of the microscope system 1 and the objective lens 6 attached to the holder rotating part 31 adjacent to it in the rear direction in the rotational direction of the holder rotating part 31. This part number information is also data that is input to the PC 3 in response to a predetermined operation by the user of the observation system 2 to the input device 4, and the first control unit 25 acquires this part number information from the PC 3. Alternatively, the first control unit 25 may acquire the part number information for each objective lens 6 attached to the insertion hole 31a of the holder rotating part 31 from the objective lens holder 30, corresponding to the hole number of the insertion hole 31a.

[0093] In S304, the process retrieves the "tilt angle threshold" from the tilt angle threshold table 60 when the part number information obtained in the processes of S302 and S304 corresponds to the "objective lens on the observation optical axis" and the "adjacent objective lens," respectively. The tilt angle threshold obtained through this process becomes the threshold obtained in the process of S212 in Figure 10.

[0094] Once the process in S304 is complete, the process in Figure 12 ends, and the process returns to the process in Figure 10, where the process in S213, following S212, is performed.

[0095] The process described above constitutes the tilt angle threshold determination process.

[0096] Next, we will explain the details of the drive restriction process, which is the process at S104 in the flowchart of Figure 8. As mentioned above, the drive restriction process is a process in which the holder drive unit 32 is controlled to restrict the driving of the objective lens holder 30.

[0097] First, let's explain Figure 13. Figure 13 is a flowchart showing the processing procedure for the first example of drive restriction processing.

[0098] When the process shown in Figure 13 begins, in S401, the process of prohibiting the driving of the objective lens holder 30 is performed. Once the process in S401 is completed, the process shown in Figure 13 ends, and the process returns to the process shown in Figure 8, followed by the process in S101, which continues to S104.

[0099] In this first example, the process of stopping the power supply to the holder drive unit 32 that rotates the holder rotating unit 31 is performed, thereby preventing the objective lens holder 30 from being driven without following the drive instruction obtained by the process of S101 in Figure 8. Consequently, the risk of collision between the objective lens 6 and the specimen due to the rotation of the holder rotating unit 31 is reduced.

[0100] Next, Figure 14 will be explained. Figure 14 is a flowchart showing the processing procedure for a second example of the drive restriction process.

[0101] When the process in Figure 14 begins, first, in S411, the drive speed of the objective lens holder 30 is reduced. Next, in S412, under the drive speed reduced by the process in S411, the objective lens holder 30 is controlled to rotate the holder rotating part 31 according to the drive instruction determined to have been acquired by the determination process in S101 in Figure 8. Once the process in S412 is completed, the process in Figure 14 ends, and the process returns to the process in Figure 8, and the process in S101 following S104 is performed.

[0102] In this second example, the drive speed of the objective lens holder 30 is reduced, for example, by lowering the frequency of the pulse signal input to the holder drive unit 32 for controlling the amount of rotation. As a result, the holder rotation unit 31 rotates slowly, giving the user of the microscope system 1 time to take action to avoid a collision between the objective lens 6 and the specimen before the collision occurs. Therefore, the risk of collision between the objective lens 6 and the specimen due to the rotation of the holder rotation unit 31 is reduced.

[0103] Next, Figure 15 will be explained. Figure 15 is a flowchart showing the processing procedure for the third example of the drive restriction process.

[0104] When the process in Figure 15 begins, first, in S421, the drive current of the objective lens holder 30 is reduced. Next, in S422, under the drive current reduced by the process in S421, the objective lens holder 30 is controlled to rotate the holder rotating part 31 according to the drive instruction determined to have been acquired by the determination process in S101 in Figure 8. Once the process in S422 is completed, the process in Figure 15 ends, and the process returns to the process in Figure 8, and the process in S101 following S104 is performed.

[0105] In this third example, reducing the drive current of the objective lens holder 30 reduces the torque of the holder drive unit 32 that rotates the holder rotating part 31 in the objective lens holder 30. In this case, even if the objective lens 6 and the specimen collide, the impact of the collision will be smaller, thus reducing the risk caused by the collision between the objective lens 6 and the specimen due to the rotation of the holder rotating part 31.

[0106] Next, Figure 16 will be explained. Figure 16 is a flowchart showing the processing procedure for the fourth example of the drive restriction process.

[0107] When the process shown in Figure 16 begins, first, in S431, a process is performed to determine whether the direction of drive of the objective lens holder 30, indicated by the drive instruction determined to have been obtained by the determination process in S101 of Figure 8, is the direction of the insertion hole 31a with the smaller hole number.

[0108] In the process of S431, first, the hole number of the insertion hole 31a of the holder rotating part 31 to which the objective lens 6 currently positioned on the observation optical axis is attached is acquired as the first hole number. Next, in the holder rotating part 31, the hole number of the insertion hole 31a adjacent to the insertion hole 31a of the first hole number in the rear direction in the rotation direction indicated by the drive instruction is acquired as the second hole number. Then, it is determined whether the second hole number is smaller than the first hole number.

[0109] Here, the objective lens 6 attached to the first hole number will be referred to as the "first objective lens," and the objective lens 6 attached to the second hole number will be referred to as the "second objective lens." As mentioned above, in this embodiment, objective lenses 6 with different magnifications are attached to the insertion holes 31a, each assigned a hole number, in ascending order of hole number, and in descending order of magnification. Therefore, the case where the second hole number is smaller than the first hole number means that the magnification of the second objective lens is higher than the magnification of the first objective lens. In other words, the judgment condition in S431, "the second hole number is smaller than the first hole number," represents the case where the objective lens 6 positioned on the observation optical axis is switched to an objective lens 6 with a higher magnification.

[0110] As described above, the objective lens 6 used in this embodiment, that is, the objective lens 6 attached to the holder rotation part 31 of the objective lens holder 30, has a longer overall length as the magnification increases. Therefore, when the objective lens 6 positioned on the observation optical axis is switched to a higher magnification objective lens 6, the possibility of collision between the objective lens 6 and the specimen due to the subsequent rotation of the holder rotation part 31 increases. Therefore, when the drive instruction obtained by the determination process in S101 in Figure 8 is determined to be an instruction to switch the objective lens 6 positioned on the observation optical axis to a higher magnification objective lens 6, that is, when the determination result of S431 is YES, the process proceeds to S432. Then, in S432, a process is performed to prohibit the driving of the objective lens holder 30. When the process in S432 is completed, the process in Figure 16 is completed, and thereafter the process returns to Figure 8 and the process in S101 following S104 is performed.

[0111] On the other hand, if the drive instruction determined to have been acquired by the determination process in S101 in Figure 8 is an instruction to switch the objective lens 6 positioned on the observation optical axis to a lower magnification objective lens 6, that is, if the determination result in S431 is NO, the process proceeds to S433. In S433, the objective lens holder 30 is controlled to drive according to the drive instruction determined to have been acquired by the determination process in S101 in Figure 8, and the holder rotation part 31 is rotated. Once the process in S433 is completed, the process in Figure 16 is finished, and then the process returns to Figure 8, and the process in S101 following S104 is performed.

[0112] As described above, in this fourth example of processing, when the drive instruction for the objective lens holder 30 is an instruction to switch the objective lens 6 positioned on the observation optical axis to a higher magnification objective lens 6, the drive of the objective lens holder 30 is prohibited. Therefore, the risk caused by collision between the objective lens 6 and the specimen due to the rotation of the holder rotating part 31 is reduced.

[0113] Next, Figure 17 will be explained. Figure 17 is a flowchart showing the processing procedure for the fifth example of the drive restriction process.

[0114] When the process shown in Figure 17 begins, the process in S441 is performed first. In S441, a process is performed to determine whether the direction of drive of the objective lens holder 30, which is determined to have been acquired by the determination process in S101 in Figure 8, is the direction in which the objective lens 6 with a short working distance is attached.

[0115] In the process of S441, first, the working distance of the objective lens 6 currently positioned on the observation optical axis is acquired as the first working distance. Next, in the holder rotation unit 31, the working distance of the objective lens 6 positioned adjacent to the objective lens 6 with the first working distance in the rear direction in the rotation direction indicated by the drive instruction is acquired as the second working distance. Then, it is determined whether the second working distance is shorter than the first working distance.

[0116] As mentioned above, the objective lenses 6 used in this embodiment, that is, the objective lenses 6 attached to the holder rotation part 31 of the objective lens holder 30, have a longer overall length as the working distance decreases. Therefore, when switching the objective lens 6 positioned on the observation optical axis from one with a long working distance to one with a short working distance, the likelihood of collision between the objective lens 6 and the specimen due to the subsequent rotation of the holder rotation part 31 increases. Thus, when the drive instruction determined to have been obtained by the determination process in S101 in Figure 8 is an instruction to switch the objective lens 6 positioned on the observation optical axis to an objective lens 6 with a shorter working distance, that is, when the determination result of S441 is YES, the process proceeds to S442. In S442, a process is performed to prohibit the driving of the objective lens holder 30. Once the process in S442 is completed, the process in Figure 16 is finished, and then the process returns to Figure 8, and the process in S101 following S104 is performed.

[0117] On the other hand, if the drive instruction determined to have been acquired by the determination process in S101 in Figure 8 is an instruction to switch the objective lens 6 positioned on the observation optical axis to an objective lens 6 with a longer working distance, that is, if the determination result in S441 is NO, the process proceeds to S443. In S443, the objective lens holder 30 is controlled to drive according to the drive instruction determined to have been acquired by the determination process in S101 in Figure 8, and the holder rotation part 31 is rotated. Once the process in S443 is completed, the process in Figure 16 is finished, and then the process returns to Figure 8, and the process in S101 following S104 is performed.

[0118] As described above, in this fifth example, when the drive instruction for the objective lens holder 30 is an instruction to switch the objective lens 6 positioned on the observation optical axis to an objective lens 6 with a shorter working distance, the drive of the objective lens holder 30 is prohibited. Therefore, the risk caused by collision between the objective lens 6 and the specimen due to the rotation of the holder rotating part 31 is reduced.

[0119] The embodiments described above are merely examples to facilitate understanding of the invention, and the present invention is not limited to these embodiments. Modified forms of the embodiments described above and alternative forms that replace the embodiments described above may be included. In other words, the components of the embodiments described above can be modified without departing from the spirit and scope thereof. Furthermore, new embodiments can be implemented by appropriately combining multiple components disclosed in the embodiments. In addition, some components may be deleted from the components shown in the embodiments, or some components may be added to the components shown in the embodiments. Moreover, the processing procedures shown in the embodiments may be performed in a different order, as long as it does not contradict the original. That is to say, the microscope system of the present invention can be modified and changed in various ways without departing from the scope of the claims.

[0120] In this specification, the expression "based on A" does not mean "based solely on A," but rather "based on at least A," and furthermore, "based at least partially on A." That is, "based on A" may also mean based on B in addition to A, or based on a part of A.

[0121] This application is based on Japanese Patent Application No. 2024-191271, filed on October 31, 2024. All of its contents are included herein.

Claims

1. A microscope system comprising: a stage having a mounting surface on which a specimen is placed; a head having an observation optical system and capable of being tilted relative to the mounting surface; a detection unit for detecting the tilt state of the head with respect to the mounting surface; an objective lens holder capable of mounting a plurality of objective lenses to be inserted on the observation optical axis; a drive unit for driving the objective lens holder to insert one of the objective lenses attached to the objective lens holder onto the observation optical axis; and a control unit for controlling the drive of the objective lens holder according to the detection result of the tilt state.

2. The microscope system according to claim 1, characterized in that the head portion has an imaging unit that captures an optical image of the specimen via the observation optical system.

3. The microscope system according to claim 1, characterized in that the objective lens holder is mounted on the head portion.

4. The microscope system according to claim 1, further comprising a frame portion that holds the stage and supports the head portion while tilting it with respect to the mounting surface of the stage.

5. The microscope system according to claim 4, characterized in that the detection unit is provided in the frame portion.

6. The microscope system according to claim 1, characterized in that the detection unit detects the presence or absence of the inclination.

7. The microscope system according to claim 1, characterized in that the detection unit detects the angle of the inclination.

8. The microscope system according to claim 6, characterized in that when the control unit detects that there is an inclination, it controls the drive unit to restrict the driving of the objective lens holder.

9. The microscope system according to claim 7, characterized in that the control unit performs control on the drive unit to restrict the driving of the objective lens holder when the detected angle of inclination is greater than a threshold.

10. The microscope system according to 8 or 9, characterized in that the control restricting the driving of the objective lens holder is a control prohibiting the driving of the objective lens holder.

11. The microscope system according to 8 or 9, characterized in that the objective lens holder is provided with a plurality of insertion holes for mounting the objective lenses, each of which is assigned a hole number, and a plurality of objective lenses with different magnifications are mounted in the insertion holes in ascending order of magnification and ascending order of hole number, and the control that restricts the driving of the objective lens holder is a control that prohibits the driving of the objective lens holder to switch the objective lens inserted on the observation optical axis from a first objective lens mounted in the insertion hole of the objective lens holder assigned a first hole number to a second objective lens mounted in the insertion hole of the objective lens holder assigned a second hole number smaller than the first hole number.

12. The microscope system according to 8 or 9, characterized in that the control restricting the driving of the objective lens holder is a control that prohibits the driving of the objective lens holder, which switches the objective lens inserted in the observation optical system from a first objective lens attached to the objective lens holder and having a first working distance to a second objective lens attached to the objective lens holder and having a second working distance shorter than the first working distance.

13. The microscope system according to claim 8 or 9, characterized in that the control restricting the driving of the objective lens holder is a control that reduces the driving speed of the objective lens holder.

14. The microscope system according to claim 8 or 9, characterized in that the control restricting the driving of the objective lens holder is a control that reduces the driving current of the objective lens holder.

15. The microscope system according to claim 9, characterized in that the control unit determines the threshold based on the objective lens attached to the objective lens holder.

16. The microscope system according to claim 15, wherein the control unit has a table showing the relationship between the objective lens attached to the objective lens holder and the threshold, and the threshold is determined using the table.

17. A method for controlling a microscope system, characterized by detecting the inclination state of a head unit having an observation optical system and capable of being tilted relative to the mounting surface of a stage on which a specimen is placed, and controlling the drive unit to drive an objective lens holder capable of mounting multiple objective lenses to be inserted onto the observation optical axis, thereby inserting one of the objective lenses attached to the objective lens holder onto the observation optical axis, in accordance with the detection result of the inclination state.

18. A control program for a computer to perform the following process: detect the inclination state of a head unit having an observation optical system and capable of being tilted relative to the mounting surface of a stage on which a specimen is placed; drive a drive unit that drives an objective lens holder capable of mounting multiple objective lenses to be inserted onto the observation optical axis, and drives the objective lens holder to insert one of the objective lenses mounted on the objective lens holder onto the observation optical axis, in accordance with the detection result of the inclination state.

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