Cleaning device and cleaning method
By utilizing the design of the cleaning device and method, including the cleaning tank and connecting pipelines, thorough cleaning and drying of the nozzles and covers were achieved, solving the problem of chemical liquid dripping corrosion and improving the cleaning effect of the substrate processing device.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- ACM RES (SHANGHAI) INC
- Filing Date
- 2025-09-23
- Publication Date
- 2026-05-15
AI Technical Summary
During substrate processing, residual chemical liquids on the nozzles and covers drip and corrode components inside the substrate processing device, which is difficult to clean effectively with existing technology.
A cleaning device is provided, including a cleaning tank, a first liquid inlet pipe and a connecting pipe. By introducing cleaning liquid into the cleaning tank and expelling air from the hood during its descent, the hood is immersed in the cleaning liquid. Combined with the air blowing pipe to dry the surface, thorough cleaning and drying are achieved.
It effectively cleans residual chemicals from nozzles and covers, prevents corrosion of components inside the substrate processing unit, and improves cleaning efficiency and drying uniformity.
Smart Images
Figure CN2025123145_15052026_PF_FP_ABST
Abstract
Description
A cleaning device and a cleaning method Technical Field
[0001] This application relates to the field of semiconductor device manufacturing, specifically to a cleaning apparatus and a cleaning method. Background Technology
[0002] In the substrate processing process, a substrate processing device is used to perform wet etching or cleaning processes on the substrate. The substrate processing device mainly processes the substrate by spraying chemical liquid onto the substrate.
[0003] The substrate processing apparatus includes a nozzle that sprays a chemical liquid onto a substrate. To prevent the chemical liquid sprayed onto the substrate from splashing, the substrate processing apparatus also includes a cover disposed on the outer periphery of the nozzle, the cover serving to prevent chemical liquid splashing.
[0004] After the process is completed, chemical residue remains on the cover and nozzles. During the movement of the nozzles and cover, the residual chemical residue drips off and corrodes the components inside the substrate processing apparatus. To prevent the residual chemical residue on the cover and nozzles from dripping and corroding the components inside the substrate processing apparatus, it is necessary to provide a cleaning device to clean the cover and nozzles. Summary of the Invention
[0005] In view of the above-mentioned problems, the purpose of this application is to provide a cleaning device and a cleaning method, which includes a cleaning nozzle and a cover disposed on the outer periphery of the nozzle.
[0006] To achieve the above objectives, this application provides the following technical solution:
[0007] A cleaning device for cleaning a nozzle and a cover disposed around the nozzle, comprising:
[0008] A cleaning tank is used to store cleaning solution;
[0009] The first liquid inlet pipe is installed on the cleaning tank and is used to introduce cleaning liquid into the cleaning tank;
[0010] At least one connecting pipe is provided for connecting the space inside the enclosure above the level of the cleaning fluid to the outside of the cleaning tank, so as to exhaust the air inside the enclosure above the level of the cleaning fluid to the outside of the cleaning tank.
[0011] This application also provides a cleaning method, including:
[0012] Step S01: Introduce cleaning fluid into the cleaning tank;
[0013] Step S02: Control the hood to descend. During the process from the initial contact of the hood with the cleaning fluid to the descent to the preset position, the connecting pipe will expel the air above the liquid level inside the hood, so that the lower part of the hood is immersed in the cleaning fluid.
[0014] Compared with the prior art, this application has the following beneficial effects:
[0015] The cleaning apparatus provided in this application includes a cleaning tank, a first liquid inlet pipe, and at least one connecting pipe. The first liquid inlet pipe supplies cleaning fluid to the cleaning tank. During the process from the initial contact of the cover with the cleaning fluid to its descent to a preset position, the connecting pipe expels air above the liquid level in the cleaning fluid within the cover to the outside of the cleaning tank, allowing the cover to descend to the preset position. When the cover is at the preset position, it is immersed in the cleaning fluid as much as possible, thereby achieving cleaning of the cover and the nozzle.
[0016] Overview of the attached figures
[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1a is a schematic diagram of the cleaning device in Embodiment 1 of this application when the cover is in a preset position.
[0019] Figure 1b is a partial top view of the cleaning device of Embodiment 1 of this application when it is provided with multiple connecting pipes.
[0020] Figure 1c is a schematic diagram of the cleaning device of Embodiment 1 of this application equipped with an exhaust power source.
[0021] Figure 1d is a schematic diagram showing that the cleaning tank of the cleaning device of Embodiment 1 of this application has an overflow port on its side wall.
[0022] Figure 1e is a schematic diagram of the cleaning device of Embodiment 1 of this application when it is equipped with a second air blowing pipeline.
[0023] Figure 2 is a schematic diagram of the cleaning device according to Embodiment 2 of this application.
[0024] Figure 3 is a schematic diagram of the cleaning device according to Embodiment 3 of this application.
[0025] Figure 4 is a schematic diagram of the cleaning device according to Embodiment 4 of this application.
[0026] Figure 5a is a schematic diagram of the cleaning device according to Embodiment 5 of this application.
[0027] Figure 5b is another schematic diagram of the cleaning device according to Embodiment 5 of this application.
[0028] Figure 6 is a schematic diagram of the cleaning device according to Embodiment 6 of this application.
[0029] Figure 7 is a flowchart illustrating the cleaning method of this application.
[0030] Preferred embodiments of this application
[0031] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application will be presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.
[0032] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0033] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0034] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0035] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0036] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.
[0037] Example 1
[0038] Referring to FIG1a, an embodiment of this application provides a cleaning device for cleaning a nozzle 113 and a cover 112 disposed on the outer periphery of the nozzle 113. The cleaning device includes: a cleaning tank 101, a first liquid inlet pipe 102, and at least one connecting pipe 103.
[0039] The cleaning tank 101 is used to store the cleaning solution.
[0040] The first liquid inlet pipe 102 is connected to the cleaning tank 101, and the first liquid inlet pipe 102 is used to introduce cleaning liquid into the cleaning tank 101.
[0041] The connecting pipe 103 is used to connect the space inside the cover 112 above the liquid level with the outside of the cleaning tank 101, thereby venting the air inside the cover 112 above the liquid level to the outside of the cleaning tank 101.
[0042] In one embodiment, the cleaning device further includes a controller 104, which is communicatively connected to a first liquid inlet pipe 102. The controller 104 controls the liquid inlet of the first liquid inlet pipe 102 so that the liquid level in the cleaning tank 101 reaches a preset level. Then, after the cover 112 descends to a preset position in the cleaning tank 101, its lower part is immersed in the cleaning liquid, thereby cleaning the cover 112 and the nozzle 113. When the cover 112 is in the preset position, the part of the cover 112 below the liquid level is its lower part, and the part of the cover 112 above the liquid level is its upper part.
[0043] In actual operation, the cover 112 and nozzle 113 are initially positioned at a higher level. When cleaning the cover 112 and nozzle 113 using the cleaning device, the cover 112 and nozzle 113 are first moved downwards. The selection of the preset liquid level in this application should consider that when the cover 112 descends to the preset position, one end of the connecting pipe 103 should be higher than the preset liquid level of the cleaning solution, ensuring that the cover 112 is immersed in the cleaning solution as much as possible. The cleaning solution in this application can be DIW (deionized water) or other liquids that dissolve residual chemicals.
[0044] Throughout the entire process from the moment the cover 112 first contacts the cleaning fluid until it descends to the preset position, the connecting pipe 103 can continuously or intermittently vent air. Specifically, one end of the connecting pipe 103 is located inside the cover 112, and the other end is located outside the cleaning tank 101. During the descent of the cover 112, the connecting pipe 103 continuously vents air, allowing the cover 112 to descend to the preset position. When the cover 112 is at the preset position, it is immersed in the cleaning fluid as much as possible, thereby achieving the cleaning of both the cover 112 and the nozzle 113.
[0045] Referring to Figure 1b, in an optional embodiment, the cleaning device includes at least two connecting pipes 103, with a reference line drawn through the center of the nozzle 113, and all connecting pipes 103 are spaced apart around the nozzle 113. The connecting pipes 103 are arranged in a ring around the reference line. Air above the liquid level inside the shroud 112 is exhausted to the outside of the cleaning tank 101 through two or more connecting pipes 103, effectively improving the working efficiency of the cleaning device.
[0046] Referring to Figure 1c, optionally, the cleaning device includes an exhaust power source, such as a vacuum generator. The exhaust power source is connected to a connecting pipe 103. The connecting pipe 103 includes a first switching valve 111, which controls the opening and closing of the connecting pipe 103. When the exhaust power source is operating, the first switching valve 111 opens, and the connecting pipe 103 is used to exhaust the air above the liquid level inside the enclosure 112 to the outside of the cleaning tank 101.
[0047] When the air above the liquid level inside the cover 112 is discharged to the outside of the cleaning tank 101 by the exhaust power source, the connecting pipe 103 can exhaust intermittently or continuously during the entire process from the time the cover 112 begins to contact the cleaning liquid to the time it descends to the preset position.
[0048] The first liquid inlet pipe 102 of this application also includes a switch valve (not shown), which is used to control the opening and closing of the first liquid inlet pipe 102. In an optional embodiment, when the liquid level of the cleaning fluid in the cleaning tank 101 reaches a preset level, the switch valve is closed, and the first liquid inlet pipe 102 stops supplying liquid.
[0049] In another optional embodiment, the cleaning device further includes an overflow tank 105, which is disposed on the outer periphery of the cleaning tank 101. The overflow tank 105 is also provided with a drain port 115. During the descent of the shroud 112, the cleaning fluid overflows from the cleaning tank 101 into the overflow tank 105, and is then discharged to the outside of the overflow tank 105 through the drain port 115. Furthermore, when the shroud 112 is immersed in the cleaning fluid, the switch valve is in the open state, the first inlet pipe 102 continuously supplies fluid, and some of the cleaning fluid overflows into the overflow tank 105. The flow of the cleaning fluid in the cleaning tank 101 makes it easier to remove residual chemical liquid on the shroud 112 and the nozzle 113, achieving a better cleaning effect.
[0050] Referring to Figure 1d, in another optional embodiment, an overflow port 114 is provided on the side wall of the cleaning tank 101. The overflow port 114 is located at a preset liquid level. The first liquid inlet pipe 102 continuously supplies liquid, and part of the cleaning liquid is discharged outside the cleaning tank 101 through the overflow port 114. The height of the overflow port 114 does not exceed the end of the connecting pipe 103 located inside the cover 112.
[0051] In one optional embodiment, the cleaning device includes at least two first liquid inlet pipes 102, all of which are spaced apart around the nozzle 113. The at least two first liquid inlet pipes 102 are arranged in a ring around a reference line. Simultaneous liquid inflow through two or more first liquid inlet pipes 102 can accelerate the flow rate of the cleaning fluid, thereby improving the cleaning effect on the nozzle 113 and the cover 112.
[0052] Referring to Figure 1e, in an optional embodiment, the cleaning device includes a first air blowing pipe 108 and a second air blowing pipe 107. The second air blowing pipe 107 is disposed at the bottom of the cleaning tank 101, with one end of the second air blowing pipe 107 above a preset liquid level and the other end connected to an external air source. The first air blowing pipe 108 is disposed outside the cleaning tank 101. Both the first air blowing pipe 108 and the second air blowing pipe 107 are communicatively connected to the controller 104. Optionally, the second air blowing pipe 107 is disposed on the side wall of the cleaning tank 101 or outside the cleaning tank 101.
[0053] After the shroud 112 and nozzle 113 are immersed and cleaned, they are raised to a preset height. The controller 104 then controls the first air blowing pipe 108 to blow dry gas onto the outer surface of the shroud 112 to dry it. The controller 104 also controls the second air blowing pipe 107 to spray dry gas onto the inner surface of the shroud 112 and the surface of the nozzle 113 to dry them. The dry gas used in this application can be nitrogen, an inert gas, or high-purity clean air, etc.
[0054] Optionally, the cleaning device includes at least two second air blowing lines 107, through which dry gas is sprayed toward the inner surface of the hood 112 and the surface of the nozzle 113, thereby improving the drying rate and uniformity of the hood 112 and the nozzle 113.
[0055] Example 2
[0056] Referring to Figure 2, the difference between the cleaning device of this embodiment and the first embodiment is that the second air blowing pipe 107 is connected to the connecting pipe 103.
[0057] The second air blowing line 107 also includes a second switching valve 110. The second switching valve 110 is used to control the opening and closing of the second air blowing line 107.
[0058] After the cover 112 descends to the preset position, the first switch valve 111 is turned off. After the cover 112 and nozzle 113 are soaked and cleaned, the cover 112 and nozzle 113 are raised to the preset height, and the controller 104 controls the second switch valve 110 to open. The second air blowing pipe 107 sprays dry gas toward the inner surface of the cover 112 and the surface of the nozzle 113 through the connecting pipe 103.
[0059] When the cleaning device includes at least two connecting pipes 103, the second blowing pipe 107 sprays dry gas toward the inner surface of the hood 112 and the surface of the nozzle 113 through the two or more connecting pipes 103, thereby improving the drying rate and uniformity of the hood 112 and the nozzle 113.
[0060] Example 3
[0061] Referring to Figure 3, the difference between the cleaning device of this embodiment and the second embodiment is that the cleaning device further includes a second liquid inlet pipe 106.
[0062] One end of the second inlet pipe 106 is above the preset level of the cleaning fluid, and the other end of the second inlet pipe 106 is connected to an external cleaning fluid source. The second inlet pipe 106 is communicatively connected to the controller 104. The second inlet pipe 106 also includes a third switching valve 109, which is used to control the on / off state of the second inlet pipe 106.
[0063] Because one end of the connecting pipe 103 needs to be higher than the preset liquid level of the cleaning fluid in order to exhaust the air above the liquid level inside the cover 112 to the outside of the cleaning tank 101, the cover 112 cannot be completely immersed in the cleaning fluid. In the actual cleaning process, the upper part of the cover 112 and the nozzle 113 cannot be cleaned or is not cleaned thoroughly.
[0064] When the cover 112 is in the preset position, the controller 104 controls the second liquid inlet pipe 106 to spray cleaning fluid onto the inner surface of the upper part of the cover 112 and the surface of the nozzle 113.
[0065] Optionally, the outlet of the first liquid inlet pipe 102 is higher than the preset liquid level. The first liquid inlet pipe 102 is used to introduce cleaning fluid into the cleaning tank 101 so that the liquid level of the cleaning fluid reaches the preset liquid level. It can also be used to introduce cleaning fluid into the outer surface of the upper part of the cleaning fluid spray hood 112, and the cleaning fluid sprayed down falls back into the cleaning tank 101.
[0066] Optionally, when the outlet of the first liquid inlet pipe 102 is inside the cover 112 and above the preset liquid level, the first liquid inlet pipe 102 can also be used to spray cleaning fluid onto the inner surface of the upper part of the cover 112 and the surface of the nozzle 113.
[0067] Example 4
[0068] Referring to Figure 4, the difference between the cleaning device of this embodiment and Embodiment 3 is that the second liquid inlet pipe 106 is connected to the connecting pipe 103. The second air blowing pipe 107 is installed inside the cover 112, with one end of the second air blowing pipe 107 being higher than the preset liquid level of the cleaning liquid, and the other end being connected to an external air source.
[0069] When the cover 112 is in the preset position, the first switch valve 111 is closed and the third switch valve 109 is opened. The controller 104 controls the second liquid inlet pipe 106 to spray cleaning fluid onto the upper inner surface of the cover 112 and the nozzle 113 through the connecting pipe 103.
[0070] After the hood 112 and nozzle 113 have been soaked and cleaned, the hood 112 and nozzle 113 are raised to a preset height. The first switch valve 111 is closed, the third switch valve 109 is closed, the second switch valve 110 is opened, and the controller 104 controls the second air blowing pipe 107 to spray dry gas toward the inner surface of the hood 112 and the surface of the nozzle 113 to dry the hood 112 and nozzle 113.
[0071] Example 5
[0072] Referring to Figure 5a, the difference between the cleaning device of this embodiment and Embodiment 4 is that the second air blowing pipe 107 is connected to the connecting pipe 103.
[0073] In this embodiment, the second liquid inlet pipe 106 and the second air blowing pipe 107 are integrated on the connecting pipe 103.
[0074] During the process from the initial contact of the shroud 112 with the cleaning fluid to its descent to the preset position, the second switch valve 110 is closed, the third switch valve 109 is closed, and the first switch valve 111 is opened, so that the air above the liquid level inside the shroud 112 is discharged to the outside of the cleaning tank 101 through the connecting pipe 103.
[0075] When the cover 112 is in the preset position, the first switch valve 111 is closed, the second switch valve 110 is closed, the third switch valve 109 is opened, and the second liquid inlet pipe 106 sprays cleaning liquid onto the inner surface of the upper part of the cover 112 and the surface of the nozzle 113 through the connecting pipe 103.
[0076] Referring to Figure 5b, after the hood 112 and nozzle 113 have finished soaking and cleaning, the third switch valve 109 is turned off, the first switch valve 111 is turned off, and the second switch valve 110 is turned on. The hood 112 and nozzle 113 are raised to a preset height. The controller 104 controls the second air blowing pipe 107 to spray dry gas toward the inner surface of the hood 112 and the surface of the nozzle 113 through the connecting pipe 103.
[0077] When the cleaning device includes at least two connecting pipes 103, the second liquid inlet pipe 106 sprays cleaning liquid onto the inner surface of the upper part of the cover 112 and the surface of the nozzle 113 through the two or more connecting pipes 103, thereby improving the cleaning rate and uniformity of the cover 112 and the nozzle 113.
[0078] The second air blowing pipe 107 sprays dry gas toward the inner surface of the cover 112 and the surface of the nozzle 113 through two or more connecting pipes 103, thereby improving the drying rate and uniformity of the cover 112 and the nozzle 113.
[0079] Example 6
[0080] Referring to Figure 6, the difference between the cleaning device of this embodiment and Embodiment 1 is that:
[0081] The cleaning device also includes a common conduit 116 and a second liquid inlet conduit 106. One end of the common conduit 116 is higher than a preset liquid level, and the second liquid inlet conduit 106 and the second air blowing conduit 107 are both connected to the other end of the common conduit 116. The second liquid inlet conduit 106 is communicatively connected to the controller 104.
[0082] The second air blowing line 107 also includes a second switching valve 110, which is used to control the opening and closing of the second air blowing line 107. The second liquid inlet line 106 also includes a third switching valve 109, which is used to control the opening and closing of the second liquid inlet line 106.
[0083] When the cover 112 is in the preset position, the second switch valve 110 is closed and the third switch valve 109 is opened. The controller 104 controls the second liquid inlet pipe 106 to spray cleaning fluid onto the upper inner surface of the cover 112 and the surface of the nozzle 113 through the common pipe 116.
[0084] After the hood 112 and nozzle 113 have finished soaking and cleaning, the third switch valve 109 is turned off and the second switch valve 110 is turned on. The hood 112 and nozzle 113 are raised to the preset height. The controller 104 controls the second air blowing pipe 107 to spray dry gas toward the inner surface of the hood 112 and the surface of the nozzle 113 through the common pipe 116.
[0085] Example 7
[0086] Referring to Figure 7, this application also provides a cleaning method, including:
[0087] Step S01: Introduce cleaning fluid into the cleaning tank;
[0088] Step S02: Control the hood to descend. During the process from the initial contact of the hood with the cleaning fluid to the descent to the preset position in the cleaning tank, the connecting pipe will expel the air above the liquid level inside the hood, so that the lower part of the hood is immersed in the cleaning fluid.
[0089] In this application, during the process from the initial contact of the cover 112 with the cleaning fluid to its descent to a preset position within the cleaning tank 101, the connecting pipe 103 discharges the air above the liquid level inside the cover 112 to the outside of the cleaning tank 101, allowing the cover 112 to descend to the preset position. When the cover 112 is in the preset position, it is immersed in the cleaning fluid as much as possible, thereby achieving the cleaning of the cover 112 and the nozzle 113.
[0090] Optionally, after the cover 112 is immersed in the cleaning solution, the cleaning method may further include spraying the cleaning solution onto the inner surface of the upper part of the cover 112 and the surface of the nozzle 113.
[0091] Furthermore, the cleaning method also includes step S03: the cover 112 is raised to a preset height and dry gas is blown onto the inner surface of the cover 112.
[0092] Furthermore, while blowing dry gas onto the inner surface of the cover 112, dry gas is also blown onto the outer surface of the cover 112.
[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A cleaning device for cleaning a nozzle and a cover disposed around the nozzle, characterized in that, include: A cleaning tank is used to store cleaning solution; The first liquid inlet pipe is installed on the cleaning tank and is used to introduce cleaning liquid into the cleaning tank; At least one connecting pipe is provided for connecting the space inside the enclosure above the level of the cleaning fluid to the outside of the cleaning tank, so as to exhaust the air inside the enclosure above the level of the cleaning fluid to the outside of the cleaning tank.
2. The cleaning device according to claim 1, characterized in that, An overflow port is provided on the side wall of the cleaning tank to discharge part of the cleaning liquid outside the cleaning tank.
3. The cleaning device according to claim 1, characterized in that, It also includes an overflow tank for receiving cleaning fluid overflowing from the cleaning tank.
4. The cleaning device according to claim 1, characterized in that, It also includes an exhaust power source, which is connected to the at least one connecting pipe for drawing air above the liquid level inside the hood to the outside of the cleaning tank.
5. The cleaning device according to claim 1, characterized in that, It includes at least two first liquid inlet lines, which are arranged at intervals around the nozzle.
6. The cleaning apparatus according to claim 1, characterized in that, It includes at least two connecting pipes, which are arranged at intervals around the nozzle.
7. The cleaning apparatus according to claim 1, characterized in that, It also includes a first air blowing pipe, which is disposed outside the cleaning tank and is used to blow dry gas onto the outer surface of the cover.
8. The cleaning apparatus according to claim 1, characterized in that, It also includes a second air blowing pipe for blowing dry gas onto the inner surface of the hood after the hood is raised to a preset height.
9. The cleaning apparatus according to claim 8, characterized in that, The second air blowing line is connected to the at least one connecting line, the at least one connecting line includes a first switching valve, the second air blowing line includes a second switching valve, and the first switching valve and the second switching valve are communicatively connected to a controller; The controller is configured to: when the first switch valve is open and the second switch valve is closed, control the connecting pipe to discharge the air above the liquid level inside the hood to the outside of the cleaning tank; when the first switch valve is closed and the second switch valve is open, control the second blowing pipe to spray dry gas toward the inner surface of the hood and the nozzle surface through the at least one connecting pipe.
10. The cleaning apparatus according to claim 9, characterized in that, It also includes a second liquid inlet line; One end of the second liquid inlet pipe is higher than the preset liquid level of the cleaning liquid, and the other end is connected to an external cleaning liquid source. The controller is also configured to control the second liquid inlet pipe to spray cleaning liquid onto the inner surface of the upper part of the cover and the surface of the nozzle when the cover is in a preset position.
11. The cleaning apparatus according to claim 8, characterized in that, It also includes a second liquid inlet pipe, which is connected to the at least one connecting pipe and communicates with a controller. The second air blowing pipe is installed inside the cover, with one end of the second air blowing pipe being higher than the preset liquid level of the cleaning liquid and the other end being connected to an external air source. The controller is configured to: when the hood is in a preset position, control the second liquid inlet pipe to spray cleaning liquid onto the inner surface of the upper part of the hood and the nozzle surface through the at least one connecting pipe; and after the hood is raised to a preset height, control the second air blowing pipe to spray dry gas toward the inner surface of the hood and the nozzle surface.
12. The cleaning apparatus according to claim 11, characterized in that, The second air blowing line is connected to the at least one connecting line; The controller is also configured to control the second blowing line to spray dry gas toward the surface of the shroud and the nozzle surface through the at least one connecting line.
13. The cleaning apparatus according to claim 1, characterized in that, It also includes a common pipeline, a second liquid inlet pipeline, and a second air blowing pipeline; One end of the common pipeline is higher than the preset liquid level of the cleaning fluid, and the second liquid inlet pipeline and the second air blowing pipeline are both connected to the other end of the common pipeline and to a controller. The controller is configured to: when the cover is in a preset position, control the second liquid inlet pipe to spray cleaning liquid onto the inner surface of the upper part of the cover and the nozzle surface; and when the cover is raised to a preset height, control the second air blowing pipe to spray dry gas toward the inner surface of the cover and the nozzle surface.
14. The cleaning apparatus according to claim 1, characterized in that, The outlet of the first liquid inlet pipe is higher than the preset liquid level of the cleaning liquid, and the first liquid inlet pipe is also used to introduce cleaning liquid to spray the outer surface of the upper part of the cover.
15. A cleaning method, characterized in that, include: Step S01: Introduce cleaning fluid into the cleaning tank; Step S02: Control the hood to descend. During the process from the initial contact of the hood with the cleaning fluid to the descent to the preset position in the cleaning tank, the connecting pipe will expel the air above the liquid level inside the hood, so that the lower part of the hood is immersed in the cleaning fluid.
16. The cleaning method according to claim 15, characterized in that, After the cover is immersed in the cleaning solution, the cleaning solution is sprayed onto the inner surface of the upper part of the cover and the surface of the nozzle.
17. The cleaning method according to claim 15, characterized in that, Also includes: Step S03: Raise the cover to a preset height and blow dry gas onto the inner surface of the cover.
18. The cleaning method according to claim 17, characterized in that, Also includes: While blowing dry gas onto the inner surface of the cover, dry gas is also blown onto the outer surface of the cover.