Actuator device

Abstract

In an actuator device for a process chamber (12), in which process material, for example wafers (15), can be treated or processed under process conditions, wherein movable functional components are associated with the process chamber (12), and wherein the actuator device (11) has at least one actuator (18), which is provided with an output element (19) which can be moved by means of the actuator (18) for handling an associated functional component, the actuator (18) has an output chamber (21) which is associated with the process chamber (12), has a longitudinal axis (22) and is within an output housing (23), and in which the output element (19) is movably guidingly accommodated, via which the output chamber (21) is encapsulated in a process-medium-tight manner in relation to the environment in the use state, wherein the actuator (18) also has a drive part (29) arranged outside the output chamber (21), which interacts magnetically with the output element (19) via a magnetic coupling device (30) in such a way that the drive part (29) and the output element (19) are contactlessly motion-coupled by magnetic forces to form a movement unit.

Description

[0001]

[0002] November 14, 2025

[0003] Festo 5E & Co. KG, Ruiter Straße 82, 73734 Esslingen

[0004] Actuator setup

[0005] The invention relates to an actuator device for a process chamber in which process material, for example wafers, can be treated or processed under process conditions, wherein at least one movable functional component is assigned to the process chamber, and wherein the actuator device has at least one actuator which is equipped with an output element which can be moved by means of the actuator for handling an assigned functional component.

[0006] An actuator of the type mentioned above is known, for example, from US 2003 / 0136341 AI, where the actuator described therein is used for so-called "pin lifting" in wafer processing. In this case, a wafer to be processed is located in the process chamber and is placed there on a wafer carrier. The processing or treatment of the wafer takes place in the process chamber. After processing, the wafer must be moved out of the process chamber, which first requires lifting the wafer from the wafer carrier. This is where "pin lifting" comes into play, in which, as a rule, several synchronously controlled pins are moved to the underside of the wafer and lift the wafer from the wafer carrier, so that a handling unit, for example, a robot, can pick up the processed wafer and move it out of the process chamber.

[0007] P 35737 / PCT

[0008] November 14, 2025 Since the pin, which is formed, for example, by or attached to a piston rod of the actuator, protrudes into the process chamber, a process medium-tight seal of the actuator against the environment is required. Bellows, especially those made of metal, are generally used for this purpose, providing a hermetic seal while also being able to accommodate the movement of the actuator's output element.

[0009] However, such metal bellows are relatively expensive and have a limited lifespan due to the large number of cycles, i.e., the unfolding and folding of the bellows body.

[0010] The object of the invention is to create an actuator device of the type mentioned above, which can be used reliably for handling functional components in process chambers, which is robustly designed and is more cost-effective than actuator devices known from the prior art.

[0011] This problem is solved by an actuator device having the features of independent claim 1. Further developments of the invention are described in the dependent claims.

[0012] The actuator device according to the invention is characterized in that the actuator has an output chamber associated with the process chamber, having a longitudinal axis, which has an output housing in which the output element is movably guided and by which the output chamber is encapsulated in the operating state in a process medium-tight manner from the environment, wherein the actuator furthermore has a drive part arranged outside the output chamber, which is connected to the

[0013] P 35737 / PCT

[0014] November 14, 2025 The output element interacts magnetically via a magnetic coupling device in such a way that the drive element and output element are coupled without contact by magnetic forces, forming a motion unit.

[0015] A major advantage is that the actuator's drive component can remain outside the process-medium-tight sealed output chamber, thus being exposed to environmental conditions that are definitely gentler than the process conditions inside the chamber. Only the output element, essentially a "passive rotor," remains in the drive chamber, meaning no actuator drive components are located there. This significantly increases the service life of the actuator compared to prior art actuators. Furthermore, the need for expensive bellows is eliminated, making the actuator overall considerably more cost-effective than prior art actuators.

[0016] In a further development of the invention, the magnetic coupling device has a permanent magnet inner magnet device arranged on the output member and a permanent magnet outer magnet device arranged on the drive part.

[0017] In a particularly preferred manner, the magnetic devices each consist of several magnetic elements arranged one behind the other along the longitudinal axis of the output chamber, wherein a magnetic element of the outer magnetic device is opposite each magnetic element of the inner magnetic device transversely to the longitudinal axis of the output chamber.

[0018] P 35737 / PCT

[0019] November 14, 2025. In a further development of the invention, the magnetic elements are each ring-shaped and arranged coaxially to the longitudinal axis, with the ring-shaped magnetic elements of the outer magnetic assembly concentrically surrounding the ring-shaped magnetic elements of the inner magnetic assembly and the intermediate wall of the output housing. Alternatively, it would also be conceivable to provide plate- or rod-shaped magnetic elements, which are arranged in pairs opposite each other, with one magnetic element of the inner magnetic assembly and one magnetic element of the outer magnetic assembly forming a pair.

[0020] In a further development of the invention, the wear housing is pot-shaped, with a cylindrical base section which is closed at one end by a disc-shaped end wall and has a through-opening at the other end for the passage of part of the driven element. Advantageously, the wall thickness of the cylindrical base section is relatively small, so that the associated magnetic devices can be arranged as close together as possible in order to disturb the magnetic field or the field lines as little as possible.

[0021] Metal material is suitable as a material for the output housing.

[0022] In a particularly preferred configuration, the disc-shaped end wall is integrally connected to the cylindrical base section, especially during the manufacture of the output housing. With this integral connection between the base section and the end wall, it is not necessary to seal the end wall against the base section, as would be the case with separate components. This, in turn, saves costs and improves process reliability.

[0023] P 35737 / PCT

[0024] November 14, 2025. In a further development of the invention, the output member comprises an output piston and an output piston rod connected to the output piston. The output piston carries the internal magnet assembly. The output piston rod extends out of the output chamber through the through-opening.

[0025] In a particularly preferred manner, the magnetic elements of the external magnetic device are received in a magnetic housing which is movably mounted on an outer wall of the output housing, in particular on the base section, relative to the output chamber.

[0026] In a particularly preferred configuration, the actuator is designed as a linear drive which, upon activation, causes the drive element and thus, via the magnetic coupling, also the driven element to move linearly along the longitudinal axis. Alternatively, however, it would also be conceivable for the actuator to be designed as a rotary drive which, upon activation, causes the drive element and thus, via the magnetic coupling, also the driven element to move rotationally around the longitudinal axis.

[0027] When designing the actuator as a linear drive, it is possible to design the linear drive as a fluidically actuated, in particular pneumatically actuated, linear drive.

[0028] In a further development of the invention, a single- or double-acting working cylinder is provided as a pneumatic linear drive, with a cylinder housing concentrically enclosing the output housing, in which the drive part, designed as a drive piston, is guided linearly and which divides an interior space of the cylinder housing into two working chambers, at least one of which is for driving the

[0029] P 35737 / PCT

[0030] November 14, 2025. The drive component can be pressurized with compressed air. It is possible to use a double-acting working cylinder in which both working chambers can be pressurized with compressed air, or alternatively a single-acting working cylinder in which one of the working chambers can be pressurized with compressed air and the other working chamber is equipped with a return spring, whereby when the working chamber is pressurized with compressed air, work is carried out against the spring force of the return spring. Advantageously, the output member is in the retracted position when the compressed air-pressurized working chamber is not pressurized with compressed air.

[0031] In a further development of the invention, the magnet housing of the external magnet device is part of the drive component, i.e., for example, the drive piston.

[0032] As an alternative to a fluidically actuated linear drive, an electric linear drive is also conceivable. Furthermore, manual actuation is also possible.

[0033] In a further development of the invention, a control device is provided for controlling the movement behavior of the drive element. It is possible to control or regulate the working stroke of the drive element. For example, it is possible to specify the end position of the drive element and to control or regulate the travel speed or the force with which the drive element moves into the end position. This can be achieved, for example, via a speed, force, pressure, or similar control or regulation system.

[0034] In a further development of the invention, the functional component is part of the actuator device.

[0035] P 35737 / PCT

[0036] November 14, 2025 The functional component can, for example, be designed as a wafer carrier located in the process chamber for a wafer, which is penetrated by the output member, in particular output piston rod, wherein the output member ensures that the wafer is lifted from the wafer carrier during a linear extension movement.

[0037] As an alternative to designing the functional component as a wafer carrier, it can, for example, be designed as a closing element coupled or connectable to the output member for closing a passage of the process chamber.

[0038] Furthermore, it is possible that the functional component is designed as a weighing plate coupled to the output element and located in the process chamber, whereby a sample to be weighed causes a measurable linear displacement of the output element when placed on the weighing plate. The weight of the sample can then be determined from this measurable linear displacement.

[0039] A preferred embodiment of the invention is shown in the drawing and is explained in more detail below.

[0040] The drawing shows:

[0041] Figure 1 shows a schematic representation of a preferred embodiment of the actuator device according to the invention, wherein the output element is retracted and

[0042] Figure 2 shows the schematic representation of the actuator device of Figure 2, with the output member extended.

[0043] P 35737 / PCT

[0044] November 14, 2025. Figures 1 and 2 show a preferred embodiment of the actuator device 11 according to the invention. The actuator device 11 is described here purely by way of example in the context of wafer processing. However, completely different areas of application for the actuator device 11 are also conceivable.

[0045] In any case, the actuator 11 is assigned to a process chamber 12, of which only a part of the process chamber wall 13 is shown schematically. The process conditions or process atmosphere prevail in the interior 14 of the process chamber 12, which depend on the processing step of the wafer 15 being processed.

[0046] During processing or treatment, the wafer 15 is located on a wafer carrier 16. The wafer carrier 16 has a through-hole 17. Only sections of the wafer 15 and the wafer carrier 16 are shown; that is, the wafer 15 and the wafer carrier 16 extend over a significantly larger area within the process chamber 12, so that, for example, the wafer carrier 16 also has more than one through-hole 17.

[0047] The process chamber 12 is assigned at least one functional component, whereby in the described example, one functional component is provided in the form of the aforementioned wafer carrier 16. The wafer carrier 16 can be part of the actuator assembly 11.

[0048] The actuator assembly 11 has at least one actuator 18, which is shown by way of example in Figures 1 and 2. However, the actuator assembly 11 could also include further actuators (not shown) which are likewise attached to the process chamber wall 13 in a similar manner.

[0049] P 35737 / PCT

[0050] November 14, 2025 The actuator 18 has an output element 19 which can be moved by means of the actuator for handling the associated functional component, i.e. the wafer carrier 16.

[0051] The drive element 19 passes through a chamber wall opening 20 and the associated through-opening 17 in the wafer carrier 16. If several actuators 18 are provided, several drive elements 19 pass through associated chamber wall openings 20 and several associated through-openings 17 of the wafer carrier 16. Such a device for handling the wafer 15 in the process chamber 12 is also referred to as a "pin-lifting device".

[0052] As shown in particular in Figures 1 and 2, the actuator 18 has an output chamber 21 within an output housing 23, which is associated with the process chamber 12 and has a longitudinal axis 22.

[0053] The output housing 23 has a cylindrical base section 24, which is closed at one end by a disc-shaped end wall 25 and has a through-opening 26 at the other end for the passage of part of the output element. Overall, the output housing 23 is a cup- or pot-shaped component, with the end wall 25 being integrally connected to the base section 24. Therefore, no seal is required between the end wall 25 and the base section 24. The through-opening 26 is, for example, framed by a flange section 27, which is connected to the process chamber wall 13 in a process medium-tight manner via an outer end face 28, and is typically screwed and sealed there, but could theoretically also be welded.

[0054] P 35737 / PCT

[0055] November 14, 2025 The actuator 18 further has a drive part 29 arranged outside the output chamber 21, which magnetically interacts with the output member 19 via a magnetic coupling device 30 in such a way that the drive part 29 and the output member 19 are coupled without contact by magnetic forces to form a motion unit.

[0056] The actuator 18 is shown in Figures 1 and 2 as an example of a fluidic, in particular pneumatic, linear drive and is described based on this configuration. However, it is also possible to use other drives, in particular different types of linear drives, for example an electric linear drive.

[0057] The actuator 18 therefore comprises a cylinder housing 31 that concentrically surrounds the output housing 23. The cylinder housing 31 can in turn be connected to the output housing 23, for example in the region of the inner end face 32 of the flange section 27 of the output housing 23. There, the cylinder housing 31 can be connected to the output housing 23, in particular by welding. The passage between the cylinder housing and the outside of the output housing 23 is sealed with a seal 33, in particular in the form of an annular sealing element, for example, a cord sealing ring.

[0058] In the example shown, the linear drive is designed as a single-acting working cylinder, wherein a drive element 29, designed as a drive piston, is linearly movably guided in the cylinder housing 31 and divides the interior of the cylinder housing 31 into two working chambers 34a, 34b, one of which can be pressurized with compressed air. In the example shown and described, the working chamber 34a facing away from the process chamber 12 can be pressurized with compressed air.

[0059] P 35737 / PCT

[0060] For example, on November 14, 2025, via a channel 35 formed in the cylinder wall of the cylinder housing. In the other working chamber 35b, however, a return spring 36 in the form of a compression spring is accommodated, which is supported on one side by the end face of the cylinder housing 31 and on the other side by the drive part 29, which is designed as a drive piston. Venting of the second working chamber 34b is possible via a further channel 37 in the wall of the cylinder housing.

[0061] As already mentioned, an important aspect is the magnetic coupling device 30, which connects the drive element 29 and the output element 19 to each other without contact, forming a single motion unit, through magnetic forces. For this purpose, the magnetic coupling device 30 has a permanent magnet inner magnet 38 arranged on the output element 19 and an outer magnet 39 arranged on the drive element 29.

[0062] As shown by way of example in Figures 1 and 2, the output member 19 is also piston-like and has an output piston 40, which carries the internal magnet assembly 38. The output piston 40 is connected to an output piston rod 41 extending through the through-opening 26. In the described embodiment, this output piston rod 41 simultaneously forms the pin for lifting the wafer 15. The output piston rod 41 can be inserted into the process chamber 12 through the chamber wall opening 20.

[0063] The magnetic devices 38, 39 each consist of several magnetic elements 42, 43 arranged one behind the other along the longitudinal axis 22 of the output chamber 21, wherein each magnetic element 42 of the inner magnetic device 38 is opposite a magnetic element 43 of the outer magnetic device 39 transversely to the longitudinal axis 22. The inner magnetic elements

[0064] P 35737 / PCT

[0065] 14 November 2025 42 are each ring-shaped and arranged coaxially to the longitudinal axis 22, for example they are arranged on a cylindrical piston core 44 of the output piston 40 and thus form the outer ring-shaped end of the output piston 40.

[0066] The output piston 40 is designed to be linearly movable along the inner wall of the cylinder housing 31. No piston seal is necessary here, as the output piston 40 is a passively moving rotor. The outer magnetic elements 43, which concentrically surround the inner magnetic elements 42, are housed in a magnetic housing 45, which is part of the drive element 29, designed as the drive piston. The outer magnetic elements 43 are also ring-shaped. The drive element, i.e., in the described example, the drive piston, thus consists of an annular piston disk 46, which is penetrated by the output housing 23. The piston disk 46 extends over the entire cross-section of the annular interior of the cylinder housing 31 and—as already mentioned—divides the interior into the first and second working chambers 34a and 34b.The drive element 29, i.e., the drive piston, is mounted to move linearly on the outer wall of the output housing 23. The magnet housing 45 adjoins the rear of the piston disk 46 along the longitudinal axis 22 and thus projects into the second working chamber 34b. The passage between the piston disk 46 and the inner wall of the cylinder housing 31 is sealed by a further sealing element 47. Furthermore, the passage between the outer wall of the output housing 23 and the piston disk 46 is also sealed, for example by a sealing element 48.

[0067] P 35737 / PCT

[0068] November 14, 2025 It is advantageous for the actuator 11 to be assigned a control unit (not shown) for controlling the movement behavior of the drive part and thus the movement behavior of the output member. For example, it is possible to provide pressure control or pressure regulation by measuring the actual pressure in the pressurizable working chamber 34a and, using the characteristic values ​​of the return spring 36, calculating the force with which the output member is ultimately pushed upwards, the speed of extension of the output member, or even an acceleration.

[0069] Using wafer processing as an example, the operation of the actuator unit 11 can be described as follows:

[0070] As shown particularly in Figure 1, the output piston rod 41, or rather the pin, is initially in the retracted position. The lower working chamber 34a is not pressurized with compressed air, so the return spring 36 pushes the drive element downwards. The output member 19, coupled via the magnetic coupling device, is therefore also moved downwards.

[0071] To extend the output element or pin in the form of the output piston rod 41, the lower working chamber 34a is now pressurized with compressed air. The pressurization with compressed air causes the drive part 29 to move upwards against the spring force of the return spring, and through the magnetic coupling, the output element 19 located in the hermetically sealed output chamber 21, i.e., the drive piston rod 40, is also moved upwards, so that, as shown in Figure 2, a through-opening 17 in the wafer carrier 16 is penetrated and the end face

[0072] P 35737 / PCT

[0073] November 14, 2025, the end of the pin reaches the underside of the wafer 15 and, in particular in combination with other pins of other actuators, lifts the wafer 15 from the wafer carrier 16.

[0074] As already mentioned, the application of the actuator 11 in wafer processing is purely exemplary. Numerous other applications are conceivable, for example as part of a so-called "gate-valve unit" which can close a passage into the process chamber 12 by means of a closing element coupled to the output member 19.

[0075] Furthermore, the actuator device 11 can also be part of a weighing device, whereby the material to be weighed in the process chamber 12 can be weighed by coupling a weighing plate to the output element.

[0076] P 35737 / PCT

[0077] November 14, 2025

Claims

Claims 1. Actuator device for a process chamber (12) in which process material, for example wafers (15), can be treated or processed under process conditions, wherein the process chamber (12) is assigned at least one movable functional component, and wherein the actuator device (11) comprises at least one actuator (18) which is equipped with a drive element (19) which is movable by means of the actuator (18) for handling an assigned functional component, characterized in that the actuator (18) comprises a drive chamber (21) assigned to the process chamber (12) and having a longitudinal axis (22), which has a drive housing (23) in which the drive element (19) is movably guided and by means of which the drive chamber (21) is encapsulated in the operating state in a process medium-tight manner from the environment, wherein the actuator (18) further comprises a device arranged outside the drive chamber (21). drive part (29) has ,which interacts magnetically with the output member (19) via a magnetic coupling device (30) in such a way that the drive part (29) and the output member (19) are coupled without contact by magnetic forces, forming a motion unit.

2. Actuator device according to claim 1, characterized in that the magnetic coupling device (30) has a permanent magnetic inner magnet device (38) arranged on the output member (19) and a permanent magnetic outer magnet device (39) arranged on the drive part (29). P 35737 / PCT November 14, 2025 3. Actuator device according to claim 1 or 2, characterized in that the magnetic devices (38, 39) each consist of several magnetic elements (42, 43) arranged one behind the other along the longitudinal axis (22) of the output chamber (21), wherein a magnetic element (43) of the outer magnetic device (39) is opposite a respective magnetic element (42) of the inner magnetic device (38) transversely to the longitudinal axis (22).

4. Actuator device according to claim 3, characterized in that the magnetic elements (42, 43) are each ring-shaped and arranged coaxially to the longitudinal axis (22), wherein the ring-shaped magnetic elements (43) of the outer magnetic device (39) concentrically surround the ring-shaped magnetic elements (42) of the inner magnetic device (38) with an intermediate wall of the output housing (23).

5. Actuator device according to one of the preceding claims, characterized in that the output housing (23) is pot-shaped, with a cylindrical base section (24) which is closed at one end by a disc-shaped end wall (25) and has a through-opening (17) at the other end for passing a part of the output member (19).

6. Actuator device according to claim 5, characterized in that the disc-shaped end wall (25) is integrally connected with the cylindrical base section (24), in particular is integrally formed during the manufacture of the output housing (23).

7. Actuator device according to one of the preceding claims, characterized in that the output member (19) has an output piston (40) which drives the internal magnet device (38) P 35737 / PCT November 14, 2025 carries and has an output piston rod (41) connected to the output piston (40) and led out of the output housing (30) through the through-opening (26).

8. Actuator device according to one of claims 3 to 7, characterized in that the magnetic elements (43) of the outer magnetic device (39) are received in a magnetic housing (45) which is movably mounted on an outer wall of the output housing (23), in particular on the base section (24), relative to the output chamber (21).

9. Actuator device according to one of the preceding claims, characterized in that the actuator (18) is designed as a linear drive which, when the drive part (29) is activated and thus also the output member (19) via the magnetic coupling, causes it to move linearly along the longitudinal axis (22).

10. Actuator device according to one of the preceding claims, characterized in that the linear drive is designed as a fluidically actuated, in particular pneumatically actuated, linear drive.

11. Actuator device according to claim 10, characterized in that a single- or double-acting working cylinder is provided as a pneumatic linear drive, with a cylinder housing (31) concentrically enclosing the output housing (23), in which the drive part (29) designed as a drive piston (40) is guided linearly and which divides an interior space of the cylinder housing (31) into two working chambers (34a, 34b), at least one of which can be supplied with compressed air for the purpose of driving the drive part (29). P 35737 / PCT November 14, 2025 12. Actuator device according to one of claims 8 to 11, characterized in that the magnet housing (45) of the outer magnet device (39) is part of the drive part (29).

13. Actuator device according to one of claims 1 to 9 and 12, characterized in that the linear drive is designed as an electric linear drive.

14. Actuator device according to one of the preceding claims, characterized in that the at least one functional component is part of the actuator device (11).

15. Actuator device according to claim 14, characterized in that the at least one functional component is a wafer carrier (16) located in the process chamber (12) for a wafer (15) which is penetrated by the output member (19), in particular output piston rod (41), wherein the output member (19) ensures the lifting of the wafer (15) from the wafer carrier (16) during a linear extension movement. P 35737 / PCT 14 . November 2025

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