Laser component, laser device, and laser system

Abstract

A laser component according to one embodiment of the present invention is provided with: a first optical output unit that outputs first pulsed laser light, and has a first optical resonator and a first laser medium which is disposed in the first optical resonator and to which excitation light is inputted in the optical axis direction; a second optical output unit that outputs second light different from the first pulsed laser light, and has a second laser medium to which the excitation light is inputted; and a laser medium that has a first medium region disposed in the first optical resonator and a second medium region disposed in the second optical output unit. The first laser medium and the second laser medium are a common laser medium, the wavelength regions of the first pulsed laser light and the second light are the same, and the second optical output unit is adjacent to the first optical output unit when viewed in the optical axis direction of the first optical output unit.

Description

Laser components, laser devices, and laser systems

[0001] This invention relates to laser components, laser devices, and laser systems.

[0002] Short pulsed laser light has a high peak value. Such pulsed laser light with a high peak value can strongly interact with materials, potentially causing laser breakdown or laser ablation. Therefore, it is used, for example, in laser ignition systems and laser-induced breakdown spectroscopy, as disclosed in Patent Document 1.

[0003] Patent No. 4590537

[0004] For example, in a laser ignition system such as the one disclosed in Patent Document 1, it is known that the efficiency of laser ignition can be improved if the next pulsed laser beam can be introduced while the effects of the laser breakdown are still present (for example, less than 100 ns after irradiation with pulsed laser light) after the laser breakdown has occurred. Here, laser ignition has been used as an example, but in laser processing and other applications, it may be necessary to irradiate the workpiece with at least two types of light, including pulsed laser light, in addition to the pulsed laser light for processing, for example, by pre-treating the surface of the workpiece with light. In such cases, two laser systems were usually required.

[0005] One aspect of the present invention is to provide a laser component capable of outputting a first pulsed laser beam and a second beam of light different from the first pulsed laser beam, a laser device equipped with the laser component, and a laser system equipped with the laser device.

[0006] [1] A laser component according to one aspect of the present invention is a first optical output unit that outputs a first pulse laser beam, comprising a first optical resonator, the first optical output unit disposed within the first optical resonator and to which excitation light is input in the direction of the optical axis, and a second optical output unit that outputs a second light different from the first pulse laser beam, the second optical output unit to which the excitation light is input, and a laser medium common to the first optical output unit and the second optical output unit, wherein the wavelength ranges of the first pulse laser beam and the second light are the same, and the second optical output unit is adjacent to the first optical output unit when viewed from the direction of the optical axis of the first optical output unit.

[0007] The laser component described in [1] above is capable of outputting a first pulse laser beam and a second beam of light different from the first pulse laser beam.

[0008] [2] In the laser component described in [1] above, the second optical output unit may surround the first optical output unit when viewed from the direction of the optical axis.

[0009] [3] In the laser component described in [1] or [2] above, the second optical output unit has a second optical resonator, the second medium region is arranged within the second optical resonator, and the laser oscillation thresholds of the first optical output unit and the second optical output unit may be different.

[0010] In the laser component described in [3] above, since the laser oscillation thresholds of the first optical output section and the second optical output section are different, the first pulse laser light and the second light can be output at different timings.

[0011] [4] In the laser component described in any of [1] to [3] above, the first optical output unit may have a Q-switching element in the first optical resonator.

[0012] [5] In the laser component described in [4] above, the Q-switch element is a saturable absorber, and the saturable absorber may be bonded to the first medium region. In this case, it is possible to miniaturize the laser component.

[0013] [6] In the laser component described in [4] or [5] above, the second optical output unit has an optical element arranged adjacent to the Q-switch element, and the optical element may be a laser medium or a Q-switch element for generating pulsed laser light having a pulse width longer than the pulse width of the first pulsed laser light.

[0014] [7] In the laser component described in [1] above, the first optical output unit and the second optical output unit have a first reflecting unit and a second reflecting unit common to the first optical output unit and the second optical output unit, the laser medium, the first reflecting unit and the second reflecting unit are arranged in the order of the first reflecting unit, the laser medium and the second reflecting unit along the direction of propagation of the excitation light, the first reflecting unit and the second reflecting unit each have a first reflection region included in the first optical output unit and a second reflection region included in the second optical output unit, the first reflection region of the first reflecting unit and the first reflection region of the second reflecting unit constitute the first optical resonator, the second reflection region of the first reflecting unit and the second reflection region of the second reflecting unit constitute the second optical resonator, and the first optical output unit may have a Q-switch element arranged between the first medium region of the laser medium and the first reflection region of the second reflecting unit.

[0015] [8] In the laser component described in [7] above, the second optical output section is arranged adjacent to the Q-switch element and may have an optical transmittance that transmits the excitation light and the second light.

[0016] [9] In the laser component described in [1] above, the first optical output unit and the second optical output unit have a first reflecting unit common to the first optical output unit and the second optical output unit, the laser medium and the first reflecting unit are arranged in the order of the first reflecting unit and the laser medium along the direction of propagation of the excitation light, the first reflecting unit has a first reflection region included in the first optical output unit and a second reflection region included in the second optical output unit, the first optical output unit has a first reflection region of the first reflecting unit and a second reflecting unit constituting the first optical resonator, and a Q-switching element disposed between the first medium region and the second reflecting unit, and the second optical output unit may have a second reflection region of the first reflecting unit and a third reflecting unit constituting the optical resonator.

[0017]

[10] In the laser component described in [1] above, the first optical output unit has a first reflecting unit, a second reflecting unit that constitutes the first optical resonator with the first reflecting unit, and a Q-switching element, and the first reflecting unit, the first medium region of the laser medium, the Q-switching element, and the second reflecting unit may be arranged in the order of the first reflecting unit, the first medium region of the laser medium, the Q-switching element, and the second reflecting unit along the direction of propagation of the excitation light.

[0018]

[11] In the laser component described in [1] above, the first optical output unit and the second optical output unit have a first reflecting unit and a Q-switching element common to the first optical output unit and the second optical output unit, and the laser medium, the first reflecting unit and the Q-switching element are arranged in the order of the first reflecting unit, the laser medium and the Q-switching element along the direction of propagation of the excitation light, the first reflecting unit has a first reflection region included in the first optical output unit and a second reflection region that is the region surrounding the first reflection region and is included in the second optical output unit, the Q-switching element has a first element region included in the first optical output unit and a second element region that is the region surrounding the first element region and is included in the second optical output unit, and the first optical output unit may have the first reflection region of the first reflecting unit and a second reflecting unit that constitutes the first optical resonator on the side opposite to the first medium region of the laser medium as seen from the Q-switching element.

[0019]

[12] In the laser component according to [1] or [2] above, the second light output unit has a second optical resonator, the second medium region is disposed within the second optical resonator, the first light output unit has a Q-switch element within the first optical resonator, the second light output unit has an optical element disposed adjacent to the Q-switch element, and the optical element may be a laser medium or a Q-switch element for generating a pulsed laser beam having a pulse width longer than the pulse width of the first pulsed laser beam.

[0020]

[13] A laser device according to another aspect of the present invention includes the laser component according to any one of [1] to

[12] above and an excitation light supply unit that outputs the excitation light.

[0021]

[14] In the laser device according to

[13] above, the excitation light may be continuous wave (CW) or pulsed light.

[0022]

[15] In the laser device according to

[13] or

[14] above, the excitation light supply unit may include an end-face-emitting laser.

[0023]

[16] In the laser device according to

[13] or

[14] above, the excitation light supply unit may include a surface-emitting laser.

[0024]

[17] In the laser device according to

[16] above, the surface-emitting laser may be a photonic crystal surface-emitting laser or a vertical cavity surface-emitting laser.

[0025]

[18] In the laser device according to any one of

[13] to

[17] above, the excitation light has first excitation light input to the first light output unit and second excitation light input to the second light output unit, and the excitation light supply unit may have a first excitation light supply unit that outputs the first excitation light and a second excitation light supply unit that outputs the second excitation light.

[0026]

[19] In the laser apparatus described in

[13] or

[14] above, the excitation light supply unit may include a plurality of semiconductor lasers and a beam homogenizer that homogenizes the plurality of laser beams output from the plurality of semiconductor lasers and outputs the excitation light. This makes it possible to supply uniform and high-power excitation light to the first optical output unit and the second optical output unit, respectively.

[0027]

[20] A laser system according to another aspect of the present invention comprises a laser device described in any of

[13] to

[19] above and a control device for controlling the laser device.

[0028] According to the present invention, it is possible to provide a laser component capable of outputting a first pulsed laser beam and a second beam of light different from the first pulsed laser beam, a laser device equipped with the laser component, and a laser system equipped with the laser device.

[0029] Figure 1 is a schematic diagram of a laser device including an optical oscillator (laser component) according to the first embodiment. Figure 2 is a schematic diagram showing the laser light output from the laser device shown in Figure 1. Figure 3(a) is a diagram showing the state of laser output from the optical oscillator, and Figure 3(b) is a diagram showing the state of excitation light incident on the optical oscillator. Figure 4 is a schematic diagram of an optical oscillator according to the second embodiment. Figure 5 is a schematic diagram showing a prototype model of the optical oscillator. Figure 6 is a diagram for explaining a configuration in which multiple excitation beams are incident on the optical oscillator. Figure 7 is a schematic diagram of an optical oscillator according to the third embodiment. Figure 8 is a schematic diagram of an optical oscillator according to the fourth embodiment. Figure 9 is a schematic diagram of another example of an optical oscillator. Figure 10 is a schematic diagram of an optical oscillator according to the fifth embodiment. Figure 11 is a schematic diagram showing the laser light output from the optical oscillator shown in Figure 10. Figure 12 is a schematic diagram showing a modified example of the optical oscillator shown in Figure 10. Figure 13 is a schematic diagram showing another modification of the optical oscillator shown in Figure 10. Figure 14 is a schematic diagram of an example of an excitation light supply unit. Figure 15 is a schematic diagram of an optical oscillator according to the sixth embodiment. Figure 16 is a schematic diagram of an optical oscillator according to the seventh embodiment. Figure 17 is a schematic diagram of a laser device according to the eighth embodiment. Figure 18 is a schematic diagram of the arrangement of the first and second excitation light output from the excitation light supply unit shown in Figure 17. Figure 19(a) is a diagram showing the state of laser output from the optical oscillator, Figure 19(b) is a diagram showing the output state of the first excitation light, and Figure 19(c) is a diagram showing the output state of the second excitation light Lβ. Figure 20 is a schematic diagram showing the general configuration of a laser system according to one embodiment.

[0030] Embodiments of the present invention will be described in detail below with reference to the attached drawings. In the description of the drawings, the same reference numerals are used for identical or equivalent elements, and redundant descriptions are omitted. The dimensional ratios in the drawings do not necessarily correspond to those described.

[0031] (First Embodiment) Figure 1 is a schematic diagram of a laser device 1 according to the first embodiment. In the following description, the x, y, and z axes shown in Figure 1 may also be used. The x, y, and z axes are orthogonal to each other. The laser device 1 shown in Figure 1 includes an optical oscillator (laser component) 10 and an excitation light supply unit 2.

[0032] The optical oscillator 10 includes a laser medium 11 and an optical resonator 12. The optical oscillator 10 outputs a first pulsed laser beam L1 and a second pulsed laser beam (second beam) L2 when it receives excitation light L0 output from the excitation light supply unit 2.

[0033] The excitation light supply unit 2 has a semiconductor laser (semiconductor laser element) that outputs excitation light L0. The excitation wavelength of the excitation light L0 is, for example, 940 nm or 968 nm when the laser medium 11 is Yb:YAG. When the laser medium 11 is Nd:YAG, examples of excitation wavelengths are 808 nm, 869 nm, 885 nm, or 891 nm. In this embodiment, the semiconductor laser is driven by pulse oscillation. Therefore, the excitation light L0 is pulsed light. An example of the pulse width of the excitation light L0 is 1 μs or more and 1 ms or less, and an example of the repetition frequency is 1 Hz to 100 kHz. The excitation light L0 may be single-shot (or isolated) pulsed light, or it may be continuous. The semiconductor laser in the excitation light supply unit 2 may be a surface-emitting laser or an edge-emitting laser. The semiconductor laser in the excitation light supply unit 2 may be driven by continuous oscillation. In this case, the excitation light L0 is a continuous wave (continuous oscillation light). The excitation light supply unit 2 may be configured so that the uniformly generated excitation light L0 is input to the first optical output unit 101 and the second optical output unit 102 of the optical oscillator 10, which will be described later.

[0034] Examples of excitation light sources in the excitation light supply unit 2 include stacked semiconductor lasers, a light source composed of multiple bundled fiber-output semiconductor lasers, a photonic crystal surface-emitting laser (PCSEL), a vertical cavity surface-emitting laser (VCSEL), and the like. The above-described excitation light sources have multiple emission points and can homogenize the excitation distribution or form an excitation distribution corresponding to the output distribution from the laser device 1.

[0035] Figure 14 is a diagram illustrating an example of an excitation light supply unit 2. As shown in Figure 14, the excitation light supply unit 2 may have a plurality of semiconductor lasers 21 and a beam homogenizer 22. The plurality of semiconductor lasers 21 shown in Figure 14 are end-emitting lasers. The beam homogenizer 22 homogenizes the plurality of laser beams output from the plurality of semiconductor lasers 21 and outputs them as excitation light L0. The beam homogenizer 22 homogenizes the plurality of laser beams output from the plurality of semiconductor lasers 21 so that the homogenized excitation light L0 is input to the first optical output unit 101 and the second optical output unit 102 of the optical oscillator 10, which will be described later.

[0036] As shown in Figure 14, an incident optical system 23 may be provided to input multiple laser beams from multiple semiconductor lasers 21 to a beam homogenizer 22. The incident optical system 23 shown in Figure 14 has the same number of optical fibers 23a as the number of semiconductor lasers 21. The incident end of each optical fiber 23a is optically joined to the corresponding semiconductor laser 21. The incident optical system 23 shown in Figure 14 has an output section 23b in which the output ends of the multiple optical fibers 23a are bundled. An example of such an incident optical system 23 is a bundled fiber. As shown in Figure 14, if there are seven semiconductor lasers 21, the output section 23b may be configured so that laser beams are output from each of the six vertices and the center of the hexagon, and the beam homogenizer 22 may be configured to homogenize these seven laser beams. In this way, by providing multiple semiconductor lasers 21, a high-power excitation light L0 can be obtained. Furthermore, if the excitation light supply unit 2 is equipped with a beam homogenizer 22, it is possible to supply homogenized excitation light L0 to the first optical output unit 101 and the second optical output unit 102 of the optical oscillator 10, which will be described later. Figure 14 illustrates a configuration in which the incident optical system 23 is an optical waveguide, but the incident optical system 23 is not limited to an optical waveguide.

[0037] As shown in Figure 1, the optical oscillator 10 has a first optical output unit 101 that outputs a first pulse laser beam L1 and a second optical output unit 102 that outputs a second pulse laser beam L2.

[0038] When viewed from the direction of the optical axis 3a of the first optical output unit 101, the second optical output unit 102 is adjacent to the first optical output unit 101. In the following, unless otherwise specified, the description will be of a configuration in which the second optical output unit 102 is adjacent to the first optical output unit 101 by surrounding it when viewed from the direction of the optical axis 3a.

[0039] The second optical output unit 102 is positioned coaxially with the optical axis 3a of the first optical output unit 101. In other words, the optical axis 3b of the second optical output unit 102 is the same as the optical axis 3a of the first optical output unit 101. The direction of the optical axis 3a is the direction of the z axis.

[0040] An example of an optical oscillator 10 will be described in detail. The optical oscillator 10 includes a laser medium 11, a first reflector 12a, a second reflector 12b, and a Q-switch element 13. The Q-switch element 13 is not limited to any element capable of forming pulses, but in the following, unless otherwise specified, the Q-switch element 13 is a saturable absorber. The first reflector 12a and the second reflector 12b constitute an optical resonator 12. The optical resonator 12 is not limited to a planar resonator. The same applies to the various optical resonators described below.

[0041] The laser medium 11, the first reflector 12a, and the second reflector 12b are arranged coaxially in the order of the first reflector 12a, the laser medium 11, and the second reflector 12b, along the direction of incidence of the excitation light L0 to the optical oscillator 10. The direction of incidence of the excitation light L0 to the optical oscillator 10 corresponds to the direction of propagation of the excitation light L0 and also to the direction of the optical axis 3a. The Q-switch element 13 is arranged coaxially with the laser medium 11 and the second reflector 12b, between the laser medium 11 and the second reflector 12b.

[0042] The laser medium 11 is an optical component that amplifies light by utilizing stimulated emission, forming a population inversion where amplification exceeds absorption in the excited state. The laser medium 11 is also called a gain medium. Various known laser media can be used for the laser medium 11.

[0043] The wavelength of light emitted from the laser medium 11 upon incidence of excitation light L0 is sometimes referred to as the "output wavelength." The wavelengths of the first pulsed laser light L1 and the second pulsed laser light L2 are the output wavelengths.

[0044] The laser medium 11 may be a solid laser medium in which a light-emitting center is added to a solid laser base material.

[0045] Examples of solid-state laser matrix materials include crystals, ceramics, and glass. Examples of crystal materials used as solid-state laser matrix materials include YAG, GGG, LuAG, YSAG, YGAG, and Y ２ O ３ , Sr ２ O ３ Lu ２ O ３ YALO, YVO ４ LuVO ４ In addition to oxide-based materials such as FAP and SFAP, and fluoride-based materials such as YLF, LiSAF, and LiCAF, if nonlinear optical wavelength conversion is required, zinc-based materials such as ZnSe and ZnS, Si-based materials such as quartz, and LN / LT, KTP / RTA, and KTA / RTA may be used in conjunction with self-doubling laser media such as YCOB and GdCOB for wavelength conversion.

[0046] Examples of rare earth elements that act as luminescence centers include Nd, Yb, Tm, Ho, Er, Ce, and Pr. Examples of transition metals that act as luminescence centers include Cr, Ti, and V.

[0047] For example, the laser medium 11 is YAG with Yb or Nd added.

[0048] Examples of the shape of the laser medium 11 include plate-shaped and columnar shapes. In the embodiment shown in Figure 1, the central axis of the laser medium 11 coincides with the z-axis. The laser medium 11 has a first end face 11a and a second end face 11b. The second end face 11b is the opposite side of the first end face 11a in the direction of the z-axis. The first end face 11a and the second end face 11b are perpendicular to the z-axis. An example of the length of the laser medium 11 along the direction of the z-axis is 0.2 mm or more and 100 mm or less.

[0049] The laser medium 11 is a common element for the first optical output unit 101 and the second optical output unit 102. Specifically, the laser medium 11 has a first region (first medium region) 111 included in the first optical output unit 101 and a second region (second medium region) 112 included in the second optical output unit 102. The second region 112 is the region surrounding the first region 111 when viewed from the direction of the optical axis 3a. The laser medium 11 can also be considered to have a first laser medium portion corresponding to the first region 111 and a second laser medium portion corresponding to the second region 112.

[0050] The Q-switch element 13 is composed of, for example, Cr:YAG. The initial transmittance of the Q-switch element 13 is, for example, 10% or more and 90% or less, for example 30%, when the laser medium 11 is Nd:YAG.

[0051] The Q-switch element 13 may be bonded to the second end face 11b of the laser medium 11. In the following description, unless otherwise specified, the Q-switch element 13 is surface-activated bonded to the laser medium 11. Surface-activated bonding is a method in which oxide films or surface deposits on the bonding surfaces of the materials to be bonded are removed by ion beam irradiation or FAB (neutral atom beam) irradiation in a vacuum, and the flat bonding surfaces with exposed constituent atoms are joined together. The above bonding is a direct bonding that utilizes intermolecular bonds. With surface-activated bonding, the laser medium 11 is not limited to ceramics, but can be single crystals or hybrids thereof, and bonding can be performed after applying a reflective coating or the like to at least one of the laser medium 11 and the Q-switch element 13 to be bonded. When a bonded body is formed by bonding the laser medium 11 and the Q-switch element 13, an example of the length in the bonding direction (corresponding to the length in the z-axis direction) of the laser medium 11 and the Q-switch element 13 in the bonded body is 0.5 mm or more and 10 mm or less.

[0052] In the Q-switch element 13, an anti-reflective coating may be formed on the end face opposite to the laser medium 11 for the output wavelength (the wavelengths of the first pulsed laser light L1 and the second pulsed laser light L2).

[0053] The shape of the Q-switch element 13 when viewed from the direction of the optical axis 3a may be the same as the shape of the first region 111 of the laser medium 11. In this case, the size of the Q-switch element 13 when viewed from the direction of the optical axis 3a is smaller than that of the laser medium 11. In this configuration where the size of the Q-switch element 13 is smaller than that of the laser medium 11, a light-transmitting body 14 may be provided around the Q-switch element 13. The light-transmitting body 14 is made of a material that can transmit light having the output wavelength together with the excitation light L0. The light-transmitting body 14 is made of, for example, undoped YAG.

[0054] The light-transmitting body 14 and the Q-switching element 13 may be joined together to form a composite 15. For example, if the Q-switching element 13 is made of Cr:YAG and the light-transmitting body 14 is made of unadded YAG, the composite 15 is manufactured as follows.

[0055] First, a first semi-fired Cr:YAG body to serve as the Q-switch element 13 and a second semi-fired YAG body to serve as the light-transmitting body 14 are prepared. Next, the first semi-fired Cr:YAG body is inserted into the center of the second semi-fired body and fired again in the furnace. This allows the reaction between Cr:YAG and YAG ceramics to proceed, and the boundary is sintered and joined. As a result, a composite of the light-transmitting body 14 and the Q-switch element 13 is obtained.

[0056] Alternatively, the Q-switch element 13 may be placed in the center of the light-transmitting body 14, and the composite 15 may be obtained by focusing pulsed laser light on the boundary between them to join the light-transmitting body 14 and the Q-switch element 13. The method of joining the light-transmitting body 14 and the Q-switch element 13 is not limited to the example method, as long as it can join them according to the materials of the light-transmitting body 14 and the Q-switch element 13.

[0057] As described above, in the embodiment in which the optical resonator 12 has a composite 15, the composite 15 may be surface-activated bonded to the laser medium 11.

[0058] The first reflecting portion 12a has a first region 121a included in the first optical output portion 101 and a second region 122a included in the second optical output portion 102. The second region 122a is the region surrounding the first region 121a when viewed from the direction of the optical axis 3a. The first reflecting portion 12a may be provided on the first end face 11a of the laser medium 11. The first reflecting portion 12a may be a dielectric multilayer film.

[0059] The second reflecting section 12b has a first region 121b included in the first light output section 101 and a second region 122b included in the second light output section 102. The second region 122b is the region surrounding the first region 121b when viewed from the direction of the optical axis 3a.

[0060] The first reflecting section 12a and the second reflecting section 12b constitute an optical resonator 12. The optical resonator 12 has a region that functions as a first optical resonator 12A in the first optical output section 101 and a region that functions as a second optical resonator 12B in the second optical output section 102. Specifically, the first region 121a of the first reflecting section 12a and the first region 121b of the second reflecting section 12b constitute a first optical resonator 12A for outputting the first pulsed laser light L1, and the second region 122a of the first reflecting section 12a and the second region 122b of the second reflecting section 12b constitute a second optical resonator 12B for outputting the second pulsed laser light L2.

[0061] The first reflector 12a only needs to have optical properties that allow it to function as an input coupling mirror (or rear mirror) in the optical resonator 12. For example, the first reflector 12a may be able to transmit the excitation light L0 and have a predetermined reflectivity for the output wavelength light emitted from the laser medium 11 excited by the incident excitation light L0. The predetermined reflectivity may be 40% or more and 90% or less when the laser medium 11 is Nd:YAG.

[0062] The second reflector 12b only needs to have optical properties that allow it to function as an output coupling mirror in the optical resonator 12. For example, the second reflector 12b has a reflectance of several percent or more and 99.9% or less with respect to the output wavelength light emitted from the laser medium 11 excited by the incident excitation light L0.

[0063] As shown in Figure 1, in a configuration in which the optical oscillator 10 has a composite 15, the second reflector 12b may be provided on the surface of the composite 15 opposite to the laser medium 11. In this embodiment, the second reflector 12b is formed on the surface of the composite 15 opposite to the laser medium 11. The second reflector 12b may be a dielectric multilayer film.

[0064] As described above, in the first optical output unit 101 of the optical oscillator 10, the laser medium 11 and the Q-switch element 13 are arranged between the first reflecting unit 12a and the second reflecting unit 12b. Specifically, the first region 111 of the laser medium 11 is arranged between the first region 121a and the first region 121b of the first reflecting unit 12a and the second reflecting unit 12b. In this case, the first optical output unit 101 functions as a laser oscillator. The first optical output unit 101 has the Q-switch element 13 between the first region 121a and the first region 121b. Therefore, the first optical output unit 101 is a passive laser oscillator capable of pulse oscillation by the incidence of excitation light L0. When excitation light L0 is incident on the first optical output unit 101 having such a Q-switch element 13, the first pulsed laser light L1 is output from the first optical output unit 101.

[0065] In the second optical output unit 102, the laser medium 11 is positioned between the first reflecting unit 12a and the second reflecting unit 12b. Specifically, the laser medium 11 is positioned between the second region 122a and the second region 122b of the first reflecting unit 12a and the second reflecting unit 12b. In this case, the second optical output unit 102 also functions as a laser oscillator. Since the second optical output unit 102 does not have a Q-switching element 13, it is a laser oscillator that does not have the function of generating pulsed light by the incidence of excitation light L0. However, since the excitation light L0 is pulsed light, when the excitation light L0 is incident on the second optical output unit 102, a second pulsed laser light L2 is output from the second optical output unit 102.

[0066] As shown in Figure 1, the second optical output unit 102 may have an optical transmittance 14. The optical transmittance 14 functions as a support for the second reflective unit 12b. Since the optical transmittance 14 transmits light, it does not have a pulse generation function. Therefore, even if the second optical output unit 102 has an optical transmittance 14, as described above, the second optical output unit 102 is a laser oscillator that does not have a pulse generation function.

[0067] Viewed from the direction of the optical axis 3a, the second optical output unit 102 is arranged around the first optical output unit 101. Therefore, as shown in Figures 1 and 2, the second pulsed laser beam L2 is output from the optical oscillator 10 so as to surround the first pulsed laser beam L1. In other words, the first pulsed laser beam L1 is output to the central part of the annular second pulsed laser beam L2. Figure 2 is a schematic diagram illustrating the arrangement relationship between the first pulsed laser beam L1 and the second pulsed laser beam L2 (second beam) output from the optical oscillator 10.

[0068] The first optical output section 101 has a Q-switch element 13, while the second optical output section 102 does not have a Q-switch element 13. In the optical oscillator 10, the first optical output section 101 and the second optical output section 102 are substantially separated by the Q-switch element 13.

[0069] The first optical output unit 101 has a Q-switch element 13, while the second optical output unit 102 does not have a Q-switch element 13. Therefore, the laser oscillation thresholds of the first optical output unit 101 and the second optical output unit 102 are different. In other words, the optical oscillator 10 has optical oscillation regions with different laser oscillation thresholds.

[0070] Because the laser oscillation thresholds of the first optical output unit 101 and the second optical output unit 102 are different, the output timing of the first pulsed laser beam L1 associated with laser oscillation in the first optical output unit 101 is different from the output timing of the second pulsed laser beam associated with laser oscillation in the second optical output unit 102. This point will be explained in detail using Figure 3.

[0071] FIGS. 3(a) and 3(b) are schematic diagrams for explaining the output states of the first pulsed laser beam L1 and the second pulsed laser beam L2 accompanying the incidence of the excitation light L0 on the optical oscillator 10, and show the output states of the first pulsed laser beam L1 and the second pulsed laser beam L2 when one pulse of the excitation light L0 is incident on the optical oscillator 10. FIG. 3(a) is a drawing showing the state of the laser output from the optical oscillator 10. The horizontal axis in FIG. 3(a) indicates time t, and the vertical axis indicates the laser output. FIG. 3(b) is a drawing showing the state of the excitation light L0 incident on the optical oscillator 10. The horizontal axis of the graph in FIG. 3(b) indicates time t, and the vertical axis indicates the output of the excitation light L0.

[0072] As shown in FIG. 3(b), assume a case where one pulse of the excitation light L0 is input to the optical oscillator 10 from time t ０ to time t ３ . In this case, laser oscillation occurs in the second light output section 102 at time t ０ delayed by a delay time t ｄ１ . Since the laser oscillation in the second light output section 102 is free-running oscillation rather than pulsed oscillation, as shown in FIG. 3(a), the optical oscillator 10 outputs the second pulsed laser beam L2 until time t ３ . Since the first light output section 101 has the Q-switch element 13, the laser threshold of the first light output section 101 is higher than the laser oscillation threshold of the second light output section 102. Therefore, laser oscillation occurs in the first light output section 101 at time t ０ delayed by a delay time t ｄ１ longer than the delay time t ｄ２ . This laser oscillation is pulsed oscillation (Q-switch oscillation) accompanying the action of the Q-switch element 13, so the first pulsed laser beam L1 having a higher output and a shorter pulse width than the second pulsed laser beam L2 is output from the optical oscillator 10.

[0073] ​​​​For example, when the laser device 1 is applied to a laser ignition system, it is possible to induce laser breakdown with the high-power first pulse laser light L1 output from the laser device 1. Furthermore, in the laser device 1, the second pulse laser light L2 can supply energy to the plasma even before the generated plasma is blown away by disturbances, thus enabling efficient laser ignition.

[0074] In the field of laser ignition, it is known that the efficiency of laser ignition can be improved by inducing laser breakdown with one pulse of laser light and then irradiating the next pulse of laser light within less than 100 ns. In laser device 1, as shown in Figure 3(a), the first pulse of laser light L1 can be output while the second pulse of laser light L2 is being output by free-run oscillation. Therefore, when laser breakdown is induced by the first pulse of laser light L1, the plasma generated by the laser breakdown is continuously irradiated with the second pulse of laser light L2, thereby improving the effectiveness of laser ignition. Furthermore, as shown in Figure 3(a), if the output of the second pulse of laser light L2 is started before the output of the first pulse of laser light L1, a certain amount of energy is supplied to the location where laser breakdown is to be induced (hereinafter referred to as the "predetermined location") by the second pulse of laser light L2 before the first pulse of laser light L1 is irradiated to the predetermined location, so laser breakdown is more likely to occur. In this respect as well, laser ignition can be performed efficiently.

[0075] For example, when generating plasma using a high-power pulsed laser beam in a laser breakdown, one possible configuration (hereinafter referred to as the "reference configuration") for irradiating the next pulsed laser beam before the plasma is blown away by disturbance (e.g., less than 100 ns) is to output pulsed laser beams from two laser devices at predetermined timings. However, the above reference configuration has the following inconveniences: (a) Two laser devices must be prepared. (b) Since pulsed laser beams are output from two laser devices, the optical system for focusing the two pulsed lasers to the same location may become complex. (c) The timing of the pulsed laser beam output from the two laser devices must be adjusted so that after one laser device outputs a pulsed laser beam, the other laser device irradiates with a pulsed laser beam within less than 100 ns.

[0076] In contrast, in the laser device 1, a first optical output unit 101 that outputs a first pulsed laser beam L1 and a second optical output unit 102 that outputs a second pulsed laser beam L2 are coaxially arranged within a single device. Therefore, both the first pulsed laser beam L1 and the second pulsed laser beam L2 are output coaxially from the laser device 1. In this case, the first pulsed laser beam L1 and the second pulsed laser beam L2 can be focused using the same optical system. Furthermore, in the laser device 1, the first pulsed laser beam L1 can be output from the first optical output unit 101 while the second pulsed laser beam L2 is output from the second optical output unit 102. Therefore, the laser device 1 does not have at least the inconveniences described in (a) to (c) above that the above reference embodiment has.

[0077] In laser device 1, a single device can output both a first pulsed laser beam L1 and a second pulsed laser beam L2. Therefore, if applied to various laser systems using laser light, as described later, the manufacturing cost of the laser system can be reduced compared to preparing two separate laser devices.

[0078] In a configuration where the laser medium 11 and the Q-switch element 13 are joined and integrated, a wafer process can be used. As a result, the optical oscillator 10 can be mass-produced, which reduces the manufacturing cost of the optical oscillator 10, and consequently, the manufacturing cost of the laser device 1 is also reduced.

[0079] For example, as shown in Figure 1, if the laser medium 11 and the composite 15 are bonded and integrated, and the first reflecting portion 12a and the second reflecting portion 12b are dielectric multilayer films, then after fabricating a wafer of a size that includes multiple optical oscillators 10, each optical oscillator 10 can be separated from that wafer. As a result, the optical oscillators 10 can be mass-produced as described above.

[0080] When the laser medium 11 and the Q-switch element 13 are integrally joined, the resonator length (length in the z-axis direction) of the optical resonator 12 can be shortened. Therefore, the effect of changes in the optical resonator length due to temperature changes can be reduced. Furthermore, as shown in Figure 1, in a configuration where the laser medium 11 and the Q-switch element 13 are joined, and a first reflective portion 12a is formed on the laser medium 11 and a second reflective portion 12b is formed on the Q-switch element 13, the optical resonator length of the optical resonator 12 is less susceptible to temperature changes. As a result, the resistance of the optical oscillator 10 to changes in ambient temperature can be improved.

[0081] The form of the optical oscillator 10 is not limited to the example shown. Other embodiments of the optical oscillator 10 will be described below.

[0082] (Second Embodiment) Figure 4 is a schematic diagram of an optical oscillator according to the second embodiment. The optical oscillator 10A shown in Figure 4 differs from the optical oscillator 10 mainly in that it has a second optical output unit 102A instead of a second optical output unit 102. In this embodiment as well, the optical axis of the first optical output unit 101 is referred to as optical axis 3a, and the optical axis of the second optical output unit 102A is referred to as optical axis 3b. Optical axes 3a and 3b coincide. The direction of optical axis 3a corresponds to the z-axis direction. The second optical output unit 102A is arranged around the first optical output unit 101 when viewed from the direction of optical axis 3a. The optical oscillator 10A can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10A will be described focusing on the above differences.

[0083] The second optical output unit 102A has the same configuration as the second optical output unit 102, except that it does not have an optical transmissive 14 surrounding the Q-switch element 13. Therefore, the optical oscillator 10A corresponds to the optical oscillator 10 in the case where there is no optical transmissive 14.

[0084] In the optical oscillator 10A without the light-transmitting body 14, the size of the second reflecting portion 12b when viewed from the direction of the optical axis 3a may be the same as in the first embodiment. Therefore, the second reflecting portion 12b has a first region 121b and a second region 122b, similar to the first embodiment. The second reflecting portion 12b may be, for example, a dielectric multilayer film formed on a transparent support. The second reflecting portion 12b may be spaced apart from the Q-switching element 13 in the z-axis direction.

[0085] The second optical output unit 102A has the same configuration as the second optical output unit 102, except that it does not have the light-transmitting body 14. Therefore, the second optical output unit 102A outputs a second pulse laser beam L2 in response to the incidence of excitation light L0, similar to the second optical output unit 102.

[0086] The first optical output unit 101 has the same configuration as in the first embodiment. Therefore, the first optical output unit 101 outputs the first pulsed laser light L1 in response to the incidence of the excitation light L0, similar to the first embodiment.

[0087] Therefore, the optical oscillator 10A and the laser device equipped with the optical oscillator 10A have the same effects and advantages as the laser device 1 described in the first embodiment.

[0088] Figure 5 is a schematic diagram showing a prototype model of the optical oscillator 10A. The optical oscillator 10A shown in Figure 5 will be referred to as optical oscillator 10A-1. Figure 6 is a diagram for explaining a configuration in which multiple excitation beams are incident on the optical oscillator, and is a schematic diagram of the optical oscillator 10A-1 shown in Figure 5 as viewed from the incident side of the excitation beam L0. In Figure 6, the illustration of the support 17, which will be described later, is omitted, and each element is shown as a perspective view to show the arrangement relationship between elements. In Figure 6, hatching is applied to the Q-switch element 13 to clearly indicate the portion of the Q-switch element 13. Using Figures 5 and 6, the optical oscillator 10A-1 will be explained by specifically illustrating the materials, dimensions, etc. of the elements constituting the optical oscillator 10A-1, but the optical oscillator 10A-1 is not limited to the configurations illustrated below.

[0089] The optical oscillator 10A-1 includes a laser medium 11 and a Q-switching element 13. The laser medium 11 and the Q-switching element 13 are arranged coaxially along the optical axis 3a (z-axis).

[0090] The laser medium 11 is Nd:YAG. The Nd doping ratio is 1.1%. The shape of the laser medium 11 as viewed from the direction of the optical axis 3a is circular with a diameter of 8 mm. The length of the laser medium 11 in the direction of the optical axis 3a is 6 mm. Since the laser medium 11 is Nd:YAG, excitation light L0 with a wavelength of 808 nm is supplied to the optical oscillator 10A-1. Light with a wavelength of 1064 nm is emitted from the laser medium 11 excited by such excitation light L0.

[0091] The Q-switch element 13 is Cr:YAG. The initial transmittance of the Q-switch element 13 to light with a wavelength of 1064 nm is 30%. The shape of the Q-switch element 13, as viewed from the direction of the optical axis 3a, is circular with a diameter of 3 mm. The Q-switch element 13 is bonded to the laser medium 11 by surface activation bonding.

[0092] In the Q-switch element 13, an anti-reflective film 16 for light with a wavelength of 1064 nm is formed on the surface opposite to the laser medium 11. The anti-reflective film 16 is a dielectric multilayer film.

[0093] The optical oscillator 10A-1 has a support 17 on which a first reflective portion 12a is formed on one surface. The support 17 is made of sapphire. When viewed from the direction of the optical axis 3a, the shape of the support 17 is a square with sides of 10 mm.

[0094] The first reflective portion 12a is a dielectric multilayer film that has high reflectivity (specifically, reflectivity greater than 99%) for light with a wavelength of 1064 nm and high transmittance (specifically, transmittance greater than 80%) for light with a wavelength of 808 nm (excitation light L0).

[0095] The support 17 is bonded to the laser medium 11 via the first reflective portion 12a by surface activation bonding. The support 17, which is bonded to the laser medium 11 and formed of sapphire, functions as a heat sink. The thickness of the support 17 is 2 mm.

[0096] In the optical oscillator 10A-1, the second reflector 12b is formed on one surface of the support 18. The second reflector 12b is a dielectric multilayer film with a reflectivity of 50% for light with a wavelength of 1064 nm. The support 18 is made of sapphire. An example of the thickness of the support 18 is 2 mm.

[0097] In the configuration shown in Figure 5, the support 18 is positioned such that the second reflective portion 12b faces the Q-switch element 13 and is spaced apart from the Q-switch element 13 along the direction of the optical axis 3a. The distance between the Q-switch element 13 and the second reflective portion 12b is 0.5 mm.

[0098] In the optical oscillator 10A-1, the region where the Q-switch element 13 is located (or the region inside the Q-switch element 13 when viewed from the direction of the optical axis 3a) functions as the first optical output section 101, and the region outside the Q-switch element 13 functions as the second optical output section 102.

[0099] In the optical oscillator 10A-1, seven excitation beams L0 may be incident discretely, as shown in Figure 6. The seven excitation beams L0 are referred to as excitation beams L0a, L0b, L0c, L0d, L0e, L0f, and L0g. Excitation beam L0a is the excitation beam L0 incident along the optical axis 3a. Excitation beam L0a is incident in the region of the laser medium 11 that is joined to the Q-switch element 13 (i.e., the first region 111 of the laser medium 11) when viewed from the direction of the optical axis 3a. Excitation beams L0b to L0g are concentric with excitation beam L0a when viewed from the direction of the optical axis 3a, and are incident discretely in the laser medium 11 along the circumferential direction around the optical axis 3a. The excitation light L0b to L0g is incident on the portion of the laser medium 11 outside the Q-switching element 13 (i.e., the second region 112 of the laser medium 11) when viewed from the direction of the optical axis 3a. A portion of the excitation light L0b to L0g may be incident on the Q-switching element 13.

[0100] When excitation light L0a to L0g is incident on the optical oscillator 10A-1 as shown in Figure 6, the excitation light supply unit 2 shown in Figure 1 may have semiconductor lasers that output each of the excitation light L0a to L0g. When the excitation light supply unit 2 has semiconductor lasers corresponding to each of the excitation light L0a to L0g, the excitation light supply unit 2 may have incident optical systems corresponding to each of the excitation light L0a to L0g in order to input each of the excitation light L0a to L0g to the optical oscillator 10A-1. In the configuration shown in Figure 5, as with the excitation light supply unit 2 shown in Figure 14, the excitation light L0a, L0b, L0c, L0d, L0e, L0f, and L0g may be homogenized by the beam homogenizer 22 and supplied to the optical oscillator 10A-1 as excitation light L0.

[0101] Since the optical oscillator 10A-1 also has a first optical output unit 101 and a second optical output unit 102, it has the same effects and functions as the optical oscillator 10A.

[0102] (Third Embodiment) Figure 7 is a schematic diagram of an optical oscillator according to the third embodiment. The optical oscillator 10B shown in Figure 7 differs from the optical oscillator 10 of the first embodiment in that it has a first optical output unit 101A and a second optical output unit 102B instead of a first optical output unit 101 and a second optical output unit 102. In this embodiment as well, the optical axis of the first optical output unit 101A is referred to as optical axis 3a, and the optical axis of the second optical output unit 102B is referred to as optical axis 3b. Optical axes 3a and 3b coincide. The direction of optical axis 3a corresponds to the z-axis direction. The second optical output unit 102B is arranged around the first optical output unit 101A when viewed from the direction of optical axis 3a. The optical oscillator 10B can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10B will be explained focusing on the above differences.

[0103] The optical oscillator 10B has a common laser medium 11 and a first reflector 12a for the first optical output unit 101A and the second optical output unit 102B.

[0104] The configuration and arrangement of the laser medium 11 and the first reflector 12a are the same as in the first embodiment. The first region 111 of the laser medium 11 and the first region 121a of the first reflector 12a are included in the first optical output unit 101A. The second region 112 of the laser medium 11 and the second region 122a of the first reflector 12a are included in the second optical output unit 102B.

[0105] The first optical output section 101A has a Q-switching element 13 and a second A-reflecting section 1221. The configuration and arrangement of the Q-switching element 13 in the optical oscillator 10B is the same as in the case of the optical oscillator 10. The second A-reflecting section 1221, together with the first region 121a of the first reflecting section 12a, constitutes the first optical resonator 12A. The second A-reflecting section 1221 may be formed on the Q-switching element 13 on the side opposite to the laser medium 11. The second A-reflecting section 1221 may be a dielectric multilayer film. The second A-reflecting section 1221 only needs to have the optical properties that constitute the first optical resonator 12A. In the third embodiment, the second A-reflecting section 1221 corresponds to the first region 121b of the second reflecting section 12b in the first embodiment.

[0106] The first optical output unit 101A, as in the first embodiment, has a first region 111 of the laser medium 11 and a Q-switching element 13 within the first optical resonator 12A, and outputs a first pulsed laser beam L1 when excitation light L0 is incident on it.

[0107] The second optical output section 102B has a second B reflector (third reflector) 1222. The second B reflector 1222 forms the second optical resonator 12B with the second region 122a of the first reflector 12a. The second B reflector 1222 is provided around the Q-switch element 13 when viewed from the direction of the optical axis 3a. The second B reflector 1222 may be formed on the second region 112 of the laser medium 11. Specifically, it may be formed on the second region 112 of the second end face 11b of the laser medium 11. The second B reflector 1222 may be a dielectric multilayer film. The second B reflector 1222 only needs to have optical properties that form the second optical resonator 12B with the second region 122a of the first reflector 12a. The second B reflector 1222 corresponds to the second region 122b of the second reflector 12b in the first embodiment. In other words, the second B reflective portion 1222 is a reflective portion in which the second region 122b of the second reflective portion 12b in the first embodiment is formed at the position of the second region 112.

[0108] In the second optical output unit 102B, the second region 112 of the laser medium 11 is placed within the second optical resonator 12B, which is composed of the second region 122a of the first reflecting unit 12a and the second B reflecting unit 1222, which corresponds to the second region 122b of the second reflecting unit 12b in the first embodiment. Therefore, the second optical output unit 102B outputs a second pulsed laser beam L2 when excitation light L0 is incident on it, similar to the case of the first embodiment.

[0109] Based on the configuration of the optical oscillator 10B described above, the optical oscillator 10B corresponds to the optical oscillator 10A in which the second region 122b of the second reflecting section 12b in the first embodiment is moved to the position of the second region 112. Therefore, the optical oscillator 10B and the laser device equipped therewith have the same effects and advantages as the optical oscillator 10A and the laser device equipped therewith in the second embodiment.

[0110] (Fourth Embodiment) Figure 8 is a schematic diagram of the optical oscillator according to the fourth embodiment. The optical oscillator 10C shown in Figure 8 differs from the optical oscillator 10B according to the third embodiment mainly in that it has a Q-switch element 13A instead of the Q-switch element 13 and does not have a second B reflector 1222. The optical oscillator 10C can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10C will be described focusing on the above differences.

[0111] The optical oscillator 10C has a first optical output unit 101B and a second optical output unit 102C instead of a first optical output unit 101 and a second optical output unit 102. In this embodiment as well, the optical axis of the first optical output unit 101B is referred to as optical axis 3a, and the optical axis of the second optical output unit 102C is referred to as optical axis 3b. Optical axis 3a and optical axis 3b coincide. The direction of optical axis 3a corresponds to the z-axis direction. The second optical output unit 102C is arranged around the first optical output unit 101B when viewed from the direction of optical axis 3a.

[0112] The optical oscillator 10C has a common laser medium 11, a first reflector 12a, and a Q-switch element 13A for the first optical output section 101B and the second optical output section 102C.

[0113] The configuration and arrangement of the laser medium 11 and the first reflector 12a are the same as in the third embodiment. The first region 111 of the laser medium 11 and the first region 121a of the first reflector 12a are included in the first optical output unit 101B. The second region 112 of the laser medium 11 and the second region 122a of the first reflector 12a are included in the second optical output unit 102C.

[0114] The Q-switch element 13A is the same as the Q-switch element 13 of the third embodiment, except that it has a first region 131 included in the first optical output section 101B and a second region 132 included in the second optical output section 102C. The first region 131 of the Q-switch element 13A corresponds to the Q-switch element 13 of the third embodiment. The second region 132 is the region surrounding the first region 131 when viewed from the direction of the optical axis 3a.

[0115] The first optical output unit 101B has a first region 121a of the first reflecting unit 12a and a second A reflecting unit 1221 that constitutes the first optical resonator 12A. The configuration and arrangement of the second A reflecting unit 1221 are the same as in the third embodiment.

[0116] As described above, the first region 131 of the Q-switch element 13A corresponds to the Q-switch element 13 of the third embodiment, and the configuration and arrangement of the second A reflection section 1221 are the same as in the third embodiment. Therefore, the first optical output section 101B outputs the first pulsed laser light L1 when the excitation light L0 is incident on it.

[0117] The second optical output unit 102C is the same as the second optical output unit 102B of the third embodiment, except that it has a second region 132 of the Q-switching element 13A and does not have a second B reflector 1222. Since the second optical output unit 102C does not have a second B reflector 1222, the second optical output unit 102C does not have an optical resonator.

[0118] In the second optical output unit 102C, when excitation light L0 is incident, spontaneous emission light is emitted from the second region 112 of the laser medium 11. Since the second optical output unit 102C does not have an optical resonator, the spontaneous emission light and stimulated emission light resulting from the spontaneous emission light are output from the second optical output unit 102C as the second light L3. The stimulated emission light resulting from the spontaneous emission light includes stimulated emission light that is generated when the spontaneous emission light is reflected by the second region 122a of the first reflector unit 12a and then propagates further within the laser medium 11.

[0119] The second light L3 has the same wavelength as the first pulsed laser light L1. The second light L3 is either continuous light or pulsed light corresponding to the pulse state of the excitation light L0, depending on the timing of spontaneous emission and stimulated emission. Depending on the stimulated emission state from the second region 112 of the laser medium 11, the second light L3 is output from the second region 112 as amplified spontaneous emission (ASE). In this case, the second light L3 has characteristics similar to the light obtained by laser oscillation.

[0120] The optical oscillator 10C with the above configuration outputs a first pulsed laser beam L1 and, instead of the second pulsed laser beam L2, continuously or pulsed, outputs a second light L3 that does not have laser characteristics. Since the second light output unit 102C does not have a Q-switch element, even when the second light L3 is output pulsed, the first pulsed laser beam L1 is output during the output of the second light L3, as in the case shown in Figure 3. The second light L3 is output coaxially with the first pulsed laser beam L1. Therefore, the optical oscillator 10C and the laser device equipped therewith have the same effects and advantages as the optical oscillator 10B and the laser device equipped therewith of the third embodiment.

[0121] (Modification 1) As described in the fourth embodiment, the optical oscillator in which the second optical output section does not have an optical resonator may be the optical oscillator 10D shown in Figure 9. Figure 9 is a schematic diagram of another example of an optical oscillator. The optical oscillator 10D differs from the optical oscillator 10C shown in Figure 8 in that it has a first optical output section 101C instead of a first optical output section 101B and a second optical output section 102D instead of a second optical output section 102C. The configuration of the optical oscillator 10D other than these differences is the same as that of the optical oscillator 10C.

[0122] The optical oscillator 10D has a laser medium 11. A first region 111 of the laser medium 11 is included in the first optical output section 101C. A second region 112 of the laser medium 11 is included in the second optical output section 102D.

[0123] The first optical output unit 101C includes a first reflecting unit 12c, a first region 111 of the laser medium 11, a Q-switching element 13, and a second A reflecting unit 1221. The first reflecting unit 12c corresponds to the first region 121a of the first reflecting unit 12a. The second A reflecting unit 1221 is the same as the second A reflecting unit 1221 of the optical oscillator 10C. Therefore, the first reflecting unit 12c and the second A reflecting unit 1221 constitute the first optical resonator 12A. The Q-switching element 13 is the same as the Q-switching element 13 of the optical oscillator 10 described in the first embodiment, and corresponds to the first region 131 of the Q-switching element 13A of the fourth embodiment. Therefore, the first optical output unit 101C corresponds to the first optical output unit 101B described in the fourth embodiment, and outputs a first pulsed laser beam L1 when excitation light L0 is incident on it.

[0124] The second optical output unit 102D differs from the second optical output unit 102C described in the fourth embodiment in that it does not have the second region 122a of the first reflecting unit 12a and the second region 132 of the Q-switching element 13A. The modified second optical output unit 102D is the second region 112 of the laser medium 11. The second optical output unit 102D outputs the second light L3 in the same way as the optical oscillator 10C. However, since the second optical output unit 102D does not have the second region 122a of the first reflecting unit 12a, stimulated emission does not occur when spontaneously emitted light from the second region 112 of the laser medium 11 is reflected by the second region 122a and passes through the laser medium 11 again. Therefore, the output of the second light L3 from the second optical output unit 102D is smaller than the output of the second light L3 from the second optical output unit 102C of the optical oscillator 10C.

[0125] (Fifth Embodiment) Figure 10 is a schematic diagram of an optical oscillator according to the fifth embodiment. The optical oscillator 10E shown in Figure 10 differs from the optical oscillator 10 in that, when viewed from the z-axis direction, the second optical output unit 102 does not surround the first optical output unit 101. The optical oscillator 10E can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10E will be described focusing on the above differences.

[0126] In the optical oscillator 10E, the first optical output unit 101 and the second optical output unit 102 are arranged in parallel along the y-axis direction. Therefore, in the fifth embodiment, the optical axis 3a of the first optical output unit 101 and the optical axis 3b of the second optical output unit 102 are misaligned.

[0127] The first optical output unit 101, like the optical oscillator 10, includes a first optical resonator 12A, a first region 111 of the laser medium 11 located within the first optical resonator 12A, and a Q-switch element 13. The first optical resonator 12A is composed of a first region 121a of the first reflecting section 12a and a first region 121b of the second reflecting section 12b. The Q-switch element 13 is located between the first region 111 and the first region 121b. Therefore, the first optical output unit 101 outputs a first pulsed laser beam L1, similar to the optical oscillator 10.

[0128] The second optical output unit 102, similar to the optical oscillator 10, includes a second optical resonator 12B, a second region 112 of the laser medium 11 located within the second optical resonator 12B, and an optical transmissive 14. The second optical resonator 12B is composed of a second region 122a of the first reflecting section 12a and a second region 122b of the second reflecting section 12b. The optical transmissive 14 is located between the second region 112 and the second region 122b. Therefore, the second optical output unit 102 outputs a second pulsed laser beam L2, similar to the optical oscillator 10.

[0129] Viewed from the z-axis direction, the first region 121a and the second region 122a of the first reflecting portion 12a are adjacent along the y-axis direction, the first region 111 and the second region 112 of the laser medium 11 are adjacent along the y-axis direction, and the first region 121b and the second region 122b of the second reflecting portion 12b are adjacent along the y-axis direction. Furthermore, the Q-switching element 13 and the light-transmitting body 14 are adjacent along the y-axis direction when viewed from the z-axis direction. Similar to the case of the optical oscillator 10, the light-transmitting body 14 may form a composite 15 together with the Q-switching element 13.

[0130] In the optical oscillator 10E, the first optical output unit 101 and the second optical output unit 102 are arranged in parallel along the y-axis. As shown in Figure 11, when viewed from the z-axis direction, the first pulsed laser beam L1 output from the first optical output unit 101 and the second pulsed laser beam L2 output from the second optical output unit 102 are adjacent along the y-axis.

[0131] The first optical output section 101 and the second optical output section 102 of the optical oscillator 10E are substantially the same as those of the optical oscillator 10, except that they are arranged in parallel along the y-axis. Therefore, the optical oscillator 10E and the laser device equipped therewith have the same effects and advantages as the optical oscillator 10 and the laser device 1 equipped therewith.

[0132] As explained with respect to the optical oscillator 10E, if the optical axes 3a and 3b are misaligned, the arrangement of the first optical output unit 101 and the second optical output unit 102 is not limited, as long as they are arranged so that their focal points coincide when focusing the first pulsed laser light L1 and the second pulsed laser light L2.

[0133] In the fifth embodiment, a modification of the optical oscillator 10 of the first embodiment was described as an example of a configuration in which the second optical output section does not surround the first optical output section. However, in the optical resonators described in the second embodiment, the third embodiment, the fourth embodiment, and Modification 1, the second optical output section does not have to surround the first optical output section.

[0134] For example, as shown in Figure 12, in the optical oscillator 10A described in the second embodiment, the first optical output unit 101 and the second optical output unit 102A may be arranged adjacent to each other along the y-axis. The optical oscillator 10F corresponds to the optical oscillator 10E which does not have an optical transmissive 14.

[0135] As shown in Figure 13, in the optical oscillator 10B described in the third embodiment, the first optical output unit 101A and the second optical output unit 102B may be arranged adjacent to each other along the y-axis.

[0136] (Sixth Embodiment) Figure 15 is a schematic diagram of the optical oscillator 10H according to the sixth embodiment. The optical oscillator 10H shown in Figure 15 differs from the optical oscillator 10 mainly in that it has a second optical output unit 102E instead of a second optical output unit 102. In this embodiment as well, the optical axis of the first optical output unit 101 is referred to as optical axis 3a, and the optical axis of the second optical output unit 102E is referred to as optical axis 3b. Optical axes 3a and 3b coincide. The direction of optical axis 3a corresponds to the z-axis direction. The second optical output unit 102E is arranged around the first optical output unit 101 when viewed from the direction of optical axis 3a. The optical oscillator 10H can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10H will be described focusing on the above differences.

[0137] The second optical output unit 102E has the same configuration as the second optical output unit 102, except that it has a laser medium (optical element) 19A instead of the light transmittance 14. The laser medium 19A may be the same laser medium as the laser medium 11, for example, Nd:YAG. In this case, the laser medium 11 and the laser medium 19A may be a single laser medium.

[0138] Even when the second optical output unit 102E has a laser medium 19A around the Q-switching element 13, the second optical output unit 102E outputs a second pulse laser beam L2 in response to the incidence of excitation light L0, similar to the second optical output unit 102.

[0139] In the optical oscillator 10H, the configuration of the first optical output unit 101 is the same as in the case of the optical oscillator 10. Therefore, the first optical output unit 101 of the optical oscillator 10H outputs a first pulsed laser beam L1 in response to the incidence of excitation light L0.

[0140] Therefore, the optical oscillator 10H has the same effects as the optical oscillator 10.

[0141] Since the laser medium 19A is arranged around the Q-switching element 13, the second optical output unit 102E can output a second pulse laser beam L2 with higher intensity than the second optical output unit 102.

[0142] (Seventh Embodiment) Figure 16 is a schematic diagram of the optical oscillator 10I according to the seventh embodiment. The optical oscillator 10I shown in Figure 16 differs from the optical oscillator 10 mainly in that it has a second optical output unit 102F instead of a second optical output unit 102. In this embodiment as well, the optical axis of the first optical output unit 101 is referred to as optical axis 3a, and the optical axis of the second optical output unit 102F is referred to as optical axis 3b. Optical axes 3a and 3b coincide. The direction of optical axis 3a corresponds to the z-axis direction. The second optical output unit 102F is arranged around the first optical output unit 101 when viewed from the direction of optical axis 3a. The optical oscillator 10I can be applied to the laser device 1 instead of the optical oscillator 10. The optical oscillator 10I will be described focusing on the above differences.

[0143] The second optical output unit 102F has the same configuration as the second optical output unit 102, except that it has a Q-switching element (optical element) 19B instead of an optical transmittance 14.

[0144] The Q-switch element 19B may be the same as the Q-switch element 13, except that it is configured to generate pulsed laser light with a wider pulse width than the pulsed laser light generated using the Q-switch element 13. For example, the Q-switch element 19B is Cr:YAG, and the pulse width may be adjusted by the amount of Cr added.

[0145] Since the second optical output unit 102F has a Q-switching element 19B, it outputs a second pulsed laser beam L2 that has a shorter pulse width than the second optical output unit 102, but a longer pulse width than the first pulsed laser beam L1.

[0146] In the optical oscillator 10I, the configuration of the first optical output unit 101 is the same as in the case of the optical oscillator 10. Therefore, the first optical output unit 101 of the optical oscillator 10I outputs a first pulsed laser beam L1 in response to the incidence of excitation light L0.

[0147] Therefore, the optical oscillator 10I has the same effects as the optical oscillator 10.

[0148] (Eighth Embodiment) Figure 17 is a schematic diagram of the laser device 1A according to the eighth embodiment. The laser device 1A shown in Figure 17 differs from the laser device 1 according to the first embodiment in that it has an excitation light supply unit 2A instead of an excitation light supply unit 2. The laser device 1A will be described focusing on the above difference. The laser device 1A comprises an optical oscillator 10 and an excitation light supply unit 2A. The optical oscillator 10 is the same as in the case of the laser device 1, so the description of the optical oscillator 10 will be omitted.

[0149] In the laser device 1A, the excitation light L0 includes a first excitation light Lα selectively supplied to the first optical output unit 101 and a second excitation light Lβ selectively supplied to the second optical output unit 102. The excitation light supply unit 2A is configured to output the first excitation light Lα and the second excitation light Lβ. The excitation light supply unit 2A is configured to independently control the output timing of the first excitation light Lα and the second excitation light Lβ. For the sake of explanation, the excitation light input to the first optical output unit 101 is referred to as the first excitation light Lα, and the excitation light input to the second optical output unit 102 is referred to as the second excitation light Lβ, but the first excitation light Lα and the second excitation light Lβ are excitation light with the same wavelength as the excitation light L0 described in the first embodiment.

[0150] Figure 18 is a schematic diagram of the arrangement of the first excitation light Lα and the second excitation light Lβ output from the excitation light supply unit 2A. Figure 18 schematically shows the arrangement of the first excitation light Lα and the second excitation light Lβ when viewed from the optical axis 3a (or optical axis 3b).

[0151] In the optical oscillator 10, the second optical output section 102 surrounds the first optical output section 101. Therefore, as shown in Figure 18, the second excitation light Lβ also surrounds the first excitation light Lα. A gap may or may not exist between the first excitation light Lα and the second excitation light Lβ.

[0152] Referring again to Figure 17, an example of the excitation light supply unit 2A will be described based on the configuration shown in Figure 17. As shown in Figure 17, the excitation light supply unit 2A has a first excitation light supply unit 2a and a plurality of second excitation light supply units 2b.

[0153] The first excitation light supply unit 2a outputs a first excitation light Lα that is selectively input to the first optical output unit 101. The first excitation light supply unit 2a may include a semiconductor laser. The second excitation light supply unit 2b outputs a second excitation light Lβ that is selectively input to the second optical output unit 102. The second excitation light supply unit 2b may include a semiconductor laser.

[0154] For example, the first excitation light Lα output by the first excitation light supply unit 2a is the excitation light L0a shown in Figure 6, and the multiple second excitation lights Lβ output by the multiple second excitation light supply units 2b may be the excitation lights L0b to L0g shown in Figure 6.

[0155] Using Figure 19, we will explain an example of operation possible with the laser device 1A. Figures 19(a) to 19(c) are schematic diagrams illustrating the output states of the first pulsed laser beam L1 and the second pulsed laser beam L2 as the first excitation light Lα and the second excitation light Lβ are incident on the optical oscillator 10.

[0156] Figure 19(a) is a diagram showing the laser output state from the optical oscillator 10. In Figure 19(a), the horizontal axis represents time t, and the vertical axis represents the laser output. Figure 19(b) is a diagram showing the output state of the first excitation light Lα. In the graph of Figure 19(b), the horizontal axis represents time t, and the vertical axis represents the output of the first excitation light Lα. Figure 19(c) is a diagram showing the output state of the second excitation light Lβ. In the graph of Figure 19(c), the horizontal axis represents time t, and the vertical axis represents the output of the second excitation light Lβ.

[0157] The excitation light supply unit 2A can output the first excitation light Lα and the second excitation light Lβ individually. Therefore, as shown in Figure 19(b), at time t ０ From time t ７ The first excitation light Lα is output until time t, and input to the first optical output unit 101 of the optical oscillator 10, as shown in Figure 19(c), １ From time t ３ The second excitation light Lβ is output until time t and input to the second optical output unit 102 of the optical oscillator 10, ５ From time t ８ It is possible to output the second excitation light Lβ and input it to the second light output unit 102.

[0158] In the output states of the first excitation light Lα and the second excitation light Lβ shown in Figures 19(b) and 19(c), time t １ Delay time t ｄ１ The time was delayed by only t ２ Then laser oscillation occurs in the second optical output unit 102. Since the laser oscillation in the second optical output unit 102 is free-running oscillation and not pulsed oscillation, as shown in Figure 19(a), at time t ３ The optical oscillator 10 outputs the second pulse laser light L2 until time t. Since the first optical output unit 101 has a Q-switch element 13, the laser threshold of the first optical output unit 101 is higher than the laser oscillation threshold of the second optical output unit 102. Therefore, at time t ０ Therefore, delay time t ｄ１ longer delay time t ｄ２ It is only delayed and time t ３ Later time t ４Laser oscillation occurs in the first optical output unit 101. Since this laser oscillation is a pulse oscillation (Q-switch oscillation) associated with the action of the Q-switch element 13, the first pulse laser beam L1, which has a higher output and a shorter pulse width than the second pulse laser beam L2, is output from the optical oscillator 10.

[0159] In the configuration shown in Figure 19(c), time t ５ is time t ４ It occurs later. That is, after the first pulse laser light L1 is output from the optical oscillator 10, the second excitation light Lβ is input to the second optical output unit 102 again. In this case, time t ５ Delay time t ｄ１ The time was delayed by only t ６ Then laser oscillation occurs in the second optical output unit 102. As mentioned above, the laser oscillation in the second optical output unit 102 is free-running oscillation, so as shown in Figure 19(a), at time t ８ The optical oscillator 10 outputs the second pulse laser light L2 until [a certain point].

[0160] In the eighth embodiment, the excitation light supply unit 2A independently controls the first excitation light Lα and the second excitation light Lβ, enabling the pulse sequences illustrated in Figures 19(a) to (c). Therefore, for example, in LIBS (laser-induced breakdown spectroscopy) analysis, the following effects are achieved.

[0161] First, the output of the second excitation light Lβ causes the second pulsed laser light L2 to be output as a "cleaning pulse" (at time t in Figure 19(a)). ２ ~t ３ This pulse removes oxide films and deposits from the surface of the analyte.

[0162] Next, the first excitation light Lα is driven to output a first pulsed laser beam L1 (Q-switched pulse) with high peak output (at time t ４ ), generating an initial plasma from the cleaned surface.

[0163] After that, a pause period (time t ３ ~t ５ ) and then the second excitation light Lβ is driven again. The second pulsed laser light L2 (at time t) is output as a result. ６(Hereafter) it acts as an "energy injection pulse (reheating pulse)" that injects energy into the plasma that is being generated and stabilizing.

[0164] By temporarily stopping the supply of the second excitation light Lβ (at time t in Figure 19(c) ３ ~t ５ ), the stability of plasma formation during oscillation of the first pulse laser light L1 is improved, and noise in the output spectrum is reduced.

[0165] Furthermore, after laser breakdown by the first pulsed laser light L1, the second excitation light Lβ is resupplied while the plasma is in a stable state (time t ５ This process improves the energy injection efficiency into the plasma. As a result, improved ignition efficiency can be expected in applications such as laser ignition systems.

[0166] The effects of LIBS were explained above. However, since the supply timing of the first excitation light Lα and the second excitation light Lβ can be controlled independently, the output timing of the first pulsed laser light L1 and the second pulsed laser light L2 can be optimized according to the application. For example, in laser processing, by controlling the timing of additional energy supply by the second pulsed laser light L2 after initial ablation by the first pulsed laser light L1, improvements in processing quality can be expected.

[0167] In this embodiment, the case in which the laser device 1A is equipped with an optical oscillator 10 has been described, but the laser device 1A may be equipped with any of the optical oscillators 10A to 10I instead of the optical oscillator 10.

[0168] (Ninth Embodiment) Figure 20 is a schematic diagram of a laser system according to one embodiment. The laser system 4 includes, for example, a plasma generation and energy supply system, a laser ignition system, a laser processing system, a laser measurement system, a laser chemical reaction system, a liquid-based process system, a thrust generation system, a laser medical system, a laser security system, a decommissioning acceleration system using laser light, a quantum control system using laser light, an acceleration system using laser light, a laser nuclear fusion system, a material analysis system, a plasma emission system, a display system utilizing plasma emission, etc. Examples of laser processing systems include laser peening and laser peenforming. Examples of laser measurement systems include a laser-induced breakdown spectroscopy (LIBS) system and a laser-induced photoacoustic effect system. Examples of laser chemical reaction systems include a liquid nanoparticle generation system that generates liquid nanoparticles through chemical reactions caused by plasma generation and energy supply to the plasma, and a liquid gas synthesis system that performs liquid gas synthesis through chemical reactions caused by plasma generation and energy supply to the plasma. Examples of liquid process systems include a laser homogenizer that generates shear stress through cavitation caused by plasma generation and energy supply to the plasma, and separates primary particles from aggregates by the shear stress. Examples of thrust generation systems include systems for space propulsion and systems for material transport including debris. Space propulsion and material transport can be carried out, for example, using laser ablation. Laser systems also relate to application systems that include any of the various laser systems exemplified.

[0169] The laser system 4 includes the laser device 1 described in the first embodiment. The laser device 1 includes an optical oscillator 10 and an excitation light supply unit 2, as described in the first embodiment. The output light L output from the laser device 1 includes a first pulsed laser beam L1 and a second pulsed laser beam L2.

[0170] The laser system 4 includes a control device 5 for controlling the laser device 1. The control device 5 controls the laser device 1 so that it outputs desired output light L (specifically, a first pulsed laser light L1 and a second pulsed laser light L2). The control of the laser device 1 by the control device 5 includes on / off control of the excitation light L0 and the on / off control of the output of the output light L. The control device 5 may, for example, control the excitation light supply unit 2 so that it outputs the desired excitation light L0. The control device 5 may include a power supply unit that supplies power to the laser device 1. The power supply unit may, for example, have a power source that supplies power to the excitation light supply unit.

[0171] The laser system 4 may have an optical system 7 for propagating or focusing the output light L output from the laser device 1 toward the target object 6. In addition to optical elements such as lenses and mirrors, the optical system 7 may include elements depending on the application of the laser system 4. For example, if the laser system 4 is a laser measurement system or a material analysis system, the optical system 7 may include a wavelength conversion element. Alternatively, the laser system 4 may have a wavelength conversion element separately from the optical system 7. Furthermore, if the laser system 4 utilizes light (reflected light, transmitted light, or scattered light) from the target object 6 irradiated with the output light L, such as in a laser measurement system or a material analysis system, it may include a detection unit for detecting the light from the target object 6. The laser system 4 may further include a detection optical system for directing the light from the target object 6 into the detection unit.

[0172] The laser device 1 of the laser system 4 may have any of the optical oscillators 10B to 10I instead of optical oscillator 10. When the laser device 1 has optical oscillators 10C and 10D instead of optical oscillator 10, the output light L includes a first pulsed laser light L1 and a second light L3. The laser system 4 may have a laser device 1A instead of laser device 1. When the laser system 4 has a laser device 1A, the control device 5 may independently control the first excitation light supply unit 2a and the second excitation light supply unit 2b.

[0173] Various embodiments of the present invention have been described above. The present invention is not limited to the various embodiments described herein, and is intended to include the scope set forth in the claims, as well as all modifications within the meaning and scope equivalent to the claims.

[0174] The first optical output section and the second optical output section may each be an optical amplification section. In other words, the laser component according to the present invention may also be an optical amplifier. The Q-switching element is not limited to a saturable absorber. The Q-switching element may be, for example, an electro-optical (EO) element.

[0175] While we have described a case where some of the components of the first and second optical output units are different regions of a common component, the configurations of the first and second optical output units are not limited to the examples provided.

[0176] In a configuration where the excitation light is pulsed light and the first optical output unit has a Q-switching element, the laser component may be controlled so that a single-shot Q-switch oscillation occurs in the first optical output unit (single-pulse mode), or it may be controlled so that multiple Q-switch pulses are generated from the first optical output unit within the excitation time (i.e., burst mode).

[0177] The various optical resonators described in the above embodiments may be stable resonators or unstable resonators.

[0178] The various embodiments and modifications described above may be combined as appropriate without departing from the spirit of the invention.

[0179] The laser components, laser devices, and laser systems according to the present invention can be used in various fields that utilize laser light, such as laser measurement, laser diagnosis, laser control, laser ignition, laser processing, and laser medicine.

[0180] 1, 1A... Laser device, 2, 2A... Excitation light supply unit, 2a... First excitation light supply unit, 2b... Second excitation light supply unit, 3a, 3b... Optical axis, 4... Laser system, 5... Control device, 6... Object, 7... Optical system, 10, 10A to 10I... Optical oscillator (laser component), 11... Laser medium, 12A... First optical resonator, 12B... Second optical resonator, 12a, 12c... First reflector, 12b... Second reflector, 13... Q-switch element (saturable absorber), 14... Light transmitter, 16... Anti-reflective coating, 19A... Laser - Laser medium (optical element), 19B... Q-switch element (optical element), 23... Incident optical system, 101, 101A to 101C... First optical output section, 102, 102A to 102F... Second optical output section, 111... First region (first medium region), 112... Second region (second medium region), 1222... Second B reflection section (third reflection section), L0, L0a to L0g... Excitation light, Lα... First excitation light, Lβ... Second excitation light, L1... First pulsed laser light, L2... Second pulsed laser light (second light), L3... Second light.

Claims

1. A laser component comprising: a first optical output unit that outputs a first pulse laser beam, comprising: a first optical resonator, the first optical output unit disposed within the first optical resonator and to which excitation light is input in the direction of the optical axis; a second optical output unit that outputs a second light different from the first pulse laser beam, the second optical output unit to which the excitation light is input; and a laser medium common to the first optical output unit and the second optical output unit, having a first medium region disposed within the first optical resonator and a second medium region disposed within the second optical output unit, wherein the wavelength ranges of the first pulse laser beam and the second light are the same, and the second optical output unit is adjacent to the first optical output unit when viewed from the direction of the optical axis of the first optical output unit.

2. The laser component according to claim 1, wherein, viewed from the direction of the optical axis, the second optical output unit surrounds the first optical output unit.

3. The laser component according to claim 1, wherein the second optical output unit has a second optical resonator, the second medium region is arranged within the second optical resonator, and the laser oscillation thresholds of the first optical output unit and the second optical output unit are different.

4. The laser component according to claim 1, wherein the first optical output unit has a Q-switching element in the first optical resonator.

5. The laser component according to claim 4, wherein the Q-switching element is a saturable absorber, and the saturable absorber is bonded to the first medium region.

6. The laser component according to claim 4, wherein the second optical output unit has an optical element arranged adjacent to the Q-switch element, and the optical element is a laser medium or a Q-switch element for generating pulsed laser light having a pulse width longer than the pulse width of the first pulsed laser light.

7. The laser component according to claim 1, wherein the first optical output unit and the second optical output unit have a first reflecting unit and a second reflecting unit common to the first optical output unit and the second optical output unit, the laser medium, the first reflecting unit and the second reflecting unit are arranged in the order of the first reflecting unit, the laser medium and the second reflecting unit along the direction of propagation of the excitation light, the first reflecting unit and the second reflecting unit each have a first reflecting region included in the first optical output unit and a second reflecting region included in the second optical output unit, the first reflecting region of the first reflecting unit and the first reflecting region of the second reflecting unit constitute the first optical resonator, the second reflecting region of the first reflecting unit and the second reflecting region of the second reflecting unit constitute the second optical resonator, and the first optical output unit has a Q-switch element disposed between the first medium region of the laser medium and the first reflecting region of the second reflecting unit.

8. The laser component according to claim 7, wherein the second optical output section is arranged adjacent to the Q-switch element and has an optical transmittance that transmits the excitation light and the second light.

9. The laser component according to claim 1, wherein the first optical output unit and the second optical output unit have a first reflecting unit common to the first optical output unit and the second optical output unit, the laser medium and the first reflecting unit are arranged in the order of the first reflecting unit and the laser medium along the direction of propagation of the excitation light, the first reflecting unit has a first reflection region included in the first optical output unit and a second reflection region included in the second optical output unit, the first optical output unit has a first reflection region of the first reflecting unit and a second reflecting unit constituting the first optical resonator, and a Q-switching element disposed between the first medium region and the second reflecting unit, and the second optical output unit has a second reflection region of the first reflecting unit and a third reflecting unit constituting the optical resonator.

10. The laser component according to claim 1, wherein the first optical output unit comprises a first reflecting unit, a second reflecting unit constituting the first reflecting unit and the first optical resonator, and a Q-switching element, and the first reflecting unit, the first medium region of the laser medium, the Q-switching element, and the second reflecting unit are arranged in the order of the first reflecting unit, the first medium region of the laser medium, the Q-switching element, and the second reflecting unit along the direction of propagation of the excitation light.

11. The laser component according to claim 1, wherein the first optical output unit and the second optical output unit have a common first reflector and a Q-switch element for the first optical output unit and the second optical output unit, the laser medium, the first reflector and the Q-switch element are arranged in the order of the first reflector, the laser medium and the Q-switch element along the direction of propagation of the excitation light, the first reflector has a first reflection region included in the first optical output unit and a second reflection region that is the region surrounding the first reflection region and is included in the second optical output unit, the Q-switch element has a first element region included in the first optical output unit and a second element region that is the region surrounding the first element region and is included in the second optical output unit, and the first optical output unit has the first reflection region of the first reflector and a second reflector that constitutes the first optical resonator on the side opposite to the first medium region of the laser medium as seen from the Q-switch element.

12. The laser component according to claim 1, wherein the second optical output unit has a second optical resonator, the second medium region is arranged within the second optical resonator, the first optical output unit has a Q-switch element within the first optical resonator, the second optical output unit has an optical element arranged adjacent to the Q-switch element, and the optical element is a laser medium or a Q-switch element for generating pulsed laser light having a pulse width longer than the pulse width of the first pulsed laser light.

13. A laser device comprising: a laser component according to any one of claims 1 to 12; and an excitation light supply unit that outputs the excitation light.

14. The laser apparatus according to claim 13, wherein the excitation light is a continuous wave or pulsed light.

15. The laser apparatus according to claim 13, wherein the excitation light supply unit includes an end-face emitting laser.

16. The laser apparatus according to claim 13, wherein the excitation light supply unit includes a surface-emitting laser.

17. The laser apparatus according to claim 16, wherein the surface-emitting laser is a photonic crystal surface-emitting laser or a vertical-cavity surface-emitting laser.

18. The laser apparatus according to claim 13, wherein the excitation light comprises a first excitation light input to the first optical output unit and a second excitation light input to the second optical output unit, and the excitation light supply unit comprises a first excitation light supply unit that outputs the first excitation light and a second excitation light supply unit that outputs the second excitation light.

19. The laser apparatus according to claim 13, wherein the excitation light supply unit comprises a plurality of semiconductor lasers and a beam homogenizer that homogenizes the plurality of laser beams output from the plurality of semiconductor lasers to output the excitation light.

20. A laser system comprising: a laser device according to claim 13; and a control device for controlling the laser device.

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