Coupler for a slit valve gate having a rotatable joint

Abstract

A slit valve coupler includes a first interface component configured to couple to a slit valve actuator and a second interface component configured to couple to a slit valve gate. The slit valve coupler further includes a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component. The slit valve coupler further includes one or more clamp members configured to couple the first interface component to the second interface component and to apply a clamping force to the cross-shaped member disposed between the first interface component and the second interface component. The second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to a sealing surface of a slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

Description

Attorney Docket No.: 36119.2892 (L2401PCT)COUPLER FOR A SLIT VALVE GATE HAVING A ROTATABLE JOINTFIELD OF THE DISCLOSURE

[0001] Embodiments of the present disclosure relate generally to the field of substrate processing systems and specifically to a coupler for a slit valve gate, the coupler having a rotatable joint.BACKGROUND OF THE DISCLOSURE

[0002] Substrates are commonly processed in vacuum processing systems. These systems include one or more chambers, each performing substrate processing operations such as etching, chemical vapor deposition or physical vapor deposition, which can include heating or cooling of the substrate, and a plasma to assist the process. Typically, the environment within such processing chambers is maintained at a low sub-atmospheric pressure. Each chamber includes inlets and outlets for an evacuation apparatus and the admission of processing gases, as well as an aperture controlled by a slit valve to admit substrates. Such processing chambers may be in communication with a substrate transfer chamber, and the substrate transfer chamber may also have a valve-controlled aperture through which substrates can be admitted from outside the system.

[0003] The slit valves that open and close the apertures are typically housed within ports that are positioned between adjacent chambers. The ports typically house at least one gate that is coupled to an actuator used to manipulate it. The actuators can be pneumatic actuators that include one or more pistons for moving the gate from an open position (where the gate is not isolating one chamber from the adjacent chamber and the aperture is open) to a closed position (where the gate is isolating one chamber from the adjacent chamber and the aperture is closed) and vice versa.SUMMARY OF THE DISCLOSURE

[0004] The following is a simplified summary of the disclosure in order to provide a basic understanding of some aspects of the disclosure. This summary is not an extensive overview of the disclosure. It is intended to neither identify key or critical elements of the disclosure, nor delineate any scope of the particular implementations of the disclosure or any scope of the claims. Its sole purpose is to present some concepts of the disclosure in a simplified form as a prelude to the more detailed description that is presented later.

[0005] In accordance with at least one embodiment, a slit valve coupler includes a first interface component configured to couple to a slit valve actuator. The slit valve coupler furtherAttorney Docket No.: 36119.2892 (L2401PCT) includes a second interface component configured to couple to a slit valve gate. The slit valve coupler further includes a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component. The slit valve coupler further includes one or more clamp members configured to couple the first interface componentto the second interface component and to apply a clamping forceto the cross-shaped member disposed between the first interface component and the second interface component. The second interface component is configured to self -align, via the rotatable joint, the slit valve gate with respect to a sealing surface of a slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

[0006] In accordance with at least one embodiment, a slit valve includes a slit valve opening including a sealing surface, a slit valve actuator, a slit valve gate configured to seal the slit valve opening, and a coupler coupling the slit valve gate to the slit valve actuator. The coupler includes a first interface component configured to couple to the slit valve actuator. The coupler further includes a second interface component configured to couple to the slit valve gate. The coupler further includes a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component. The coupler further includes one or more clamp members configured to couple the first interface componentto the second interface component and to apply a clamping force to the cross-shaped member disposed between the first interface component and the second interface component. The second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to the sealing surface of the slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

[0007] In accordance with at least one embodiment, a method includes coupling a first interface componentto a slit valve actuator. The method further includes coupling a second interface component to the first interface component by a rotatable joint formed by a cross-shaped member between the first interface component and the second interface component and one or more clamp members to apply a clamping force to the cross-shaped member. The method further includes coupling a slit valve gate to the second interface component. The method further includes aligning the slit valve gate with a sealing surface of a slit valve opening. The second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to the sealing surface of the slit valve opening responsive to a threshold closing force provided by the slit valve actuator.Attorney Docket No.: 36119.2892 (L2401PCT)BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The present disclosure is illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings in which like ref erences indicate similar elements. It should be noted that different references to "an" or "one" embodiment in this disclosure are not necessarily to the same embodiment, and such references mean at least one.

[0009] FIG. 1 illustrates a top schematic of a wafer processing system in accordance with embodiments of the present disclosure.

[0010] FIGS. 2A-2B illustrate perspective views of a slit valve assembly in accordance with embodiments of the present disclosure.

[0011] FIGS. 3A-3B illustrate cutaway views of a coupler for a slit valve gate in accordance with embodiments of the present disclosure.

[0012] FIGS. 4A-4G illustrate perspective view of a coupler for a slit valve gate in accordance with embodiments of the present disclosure.

[0013] FIG. 5 is a flow chart of a method of assembling a coupler for a slit valve gate in accordance with embodiments of the present disclosure.DETAILED DESCRIPTION

[0014] Semiconductor substrates and other substrates are commonly processed in vacuum processing systems and are transferred between one or more chambers through apertures controlled by slit valve assemblies. These slit valve assemblies typically include at least one gate coupled to an actuator used to manipulate the gate. The actuators can be full stroke pneumatic actuators that include one or more pistons for moving the gate from an open position (where the gate is not isolating one chamber from the adjacent chamber) to a closed position (where the gate is isolating one chamber from the adjacent chamber) and vice versa. Other types of actuators may also be used.

[0015] In some embodiments, a slit valve assembly includes a coupler to couple the slit valve gate to the slit valve actuator. The coupler may have a rotatable joint. Typically, the joint is adjusted manually to align the slit valve gate with the sealing surface of the slit valve opening. In some embodiments, a cross-shaped member is used to couple the slit valve gate with the slit valve actuator. The cross-shaped member may enable rotation of the gate with respect to the actuator about one axis or about two axes, etc. For some conventional assemblies, the slit valve gate is manually aligned. When the slit valve gate is in proper alignment, clamps are then tightened onto the cross-shaped member so that the alignment position is held. To tighten the clamps, associated screws may be torqued (e.g., such as by aAttorney Docket No.: 36119.2892 (L2401PCT) technician, etc.). Tightening of the clamps locks the slit valve gate to the cross-shaped member and / or to the slit valve actuator so that the slit valve gate cannot rotate relative to the actuator. The alignment of the gate can thus be preserved.

[0016] The conventional solution described above may have at least some drawbacks. For example, multiple screws are to be torqued to effectively lock the clamps. While torquing the screws, the slit valve gate can inadvertently become misaligned. Additionally, particles may be generated during the torquing of the screws. The generated particles can lead to contamination of substrates. Further, the rigid connection between the slit valve gate and the slit valve actuator of conventional systemscan lead to slit valve seal and / or actuator damage. For example, if the slit valve gate becomes misaligned, such as through mis-handling or other factors, etc., damage to the seal and / or the actuator can occur. Moreover, in the conventional solution, any misalignment of the slit valve gate is to be manually corrected (e.g., by a technician, etc.) which may involve un-torquing and re-torquing the screws to unlock and then re-lock the clamps. This process can be lengthy, leading to undue system down time.

[0017] Aspects and embodiments of the present disclosure address the above-described problems and shortcomings of previous solutions by providing a coupler for a slit valve gate having a rotatablejoint that is self-aligning. In some embodiments, no adjustment of the joint is needed to provide reliable alignment of the slit valve gate to the sealing surface of the slit valve opening. The joint may allow rotation of the slit valve gate with respect to the slit valve actuator about at least two axes so that any rotational misalignment of the slit valve gate can be corrected when the slit valve actuator actuates the slit valve gate to the closed position. Accordingly, the joint may be configured to self-align the slit valve gate. The joint may have sufficient stiffness th at, absent application of torque on a misaligned gate during gate closing, the gate will retain a current alignment. Accordingly, a first time that the gate is used, forces applied on the gate due to any misalignments may cause the gate to become automatically realigned (e.g., self-aligned, etc.). Subsequent openings and closings may not alter the alignment of the gate unless the gate becomes subject to an external force that induces a misalignment. In such a circumstance, the gate would automatically become realigned on a next closing of the gate, and would thereafter retain that realignment state.

[0018] The coupler may be an assembly having various component parts. In some embodiments, an actuator interface component couples to a slit valve actuator. The actuator interface component may be removably coupled to a slit valve actuator or may be integral to the slit valve actuator. In some embodiments, a gate interface component couples to a slit valve gate. In some embodiments, a cross-shaped member may be disposed between theAttorney Docket No.: 36119.2892 (L2401PCT) actuator interface component and the gate interface component. The cross-shaped member may at least partially form a rotatable joint between the actuator interface component and the gate interface component. One or more clamp members may couple the cross-shaped member with the actuator interface component and / or the gate interface component. In some embodiments, the cross-shaped member includes two sets of opposing legs or extensions. For example, a first set of opposing extensions extend along a first axis and a second set of opposing extensions extend along a second axis. The first and second axes may be substantially orthogonal to one another. In some embodiments, the sets of opposing extensions define axes of rotation for the rotatable joint. For example, the rotatable joint may allow for rotation of the interface component(s) about the first axis defined by the first set of opposing extensions of the cross-shaped member and rotation of the interface component(s) about the second axis defined by the second set of opposing extensions of the cross-shaped member.

[0019] The coupler described herein may include one or more clamp members. The clamp members may couple the interface components with the cross-shaped member and / or couple the interface components with each other. In some embodiments, the clamp members apply a clamping force to the cross-shaped member, coupling the interface components with one another via the cross-shaped member. The clamp members may generate a friction force on the cross-shaped member responsive to the clamping. The friction force may resist rotation of the interface components with respect to one another. In this manner, the interface components may not rotate with respect to one another when the clamp members are clamped on the cross-shaped member. However, the friction force may be overcome by a closing force (e.g., for closing the slit valve gate) provided by the slit valve actuator.

[0020] In some embodiments, the gate interface component can rotate with respect to the actuator interface component via the rotatable joint. The gate interface component may rotate to self-align the slit valve gate with respect to a sealing surface of a slit valve opening responsive to actuation of the slit valve gate to the closed position. In some embodiments, when the slit valve gate is misaligned with respect to the sealing surface of the slit valve opening, the gate interface component can self-align the slit valve gate upon closure of the gate. The actuator may actuate the slit valve gate to the closed position. When moving to the closed position, the gate interface component may rotate with respect to the actuator interface component (e.g., about one or more axes, etc.) to correct the misalignment of the slit valve gate (e.g., to align the slit valve gate with the sealing surface of the slit valve opening). The closing force provided by the actuator may overcome friction (e.g., a friction force) in theAttorney Docket No.: 36119.2892 (L2401PCT) rotatable joint between the interface components so that the gate interface component can rotate and properly align the slit valve gate with the sealing surface of the slit valve opening.

[0021] Aspects and embodiments of the present disclosure may result in technological advantages. For example, the slit valve gate coupler described herein maybe capable of selfalignment to a sealing surface of a slit valve opening. The rotatable joint of the coupler may allow rotation of the slit valve gate to correct for misalignment, such as during initial setup, after maintenance procedure(s), and / or during normal operation of the slit valve. Further, hardware components may be reduced and / or simplified when compared to previous solutions. For example, the number of screws used in the coupler may be reduced when compared to previous solutions. Particle generation may also be reduced by reducing the number of screws that are torqued for proper assembly of the coupler. Additionally, manual setup and / or adjustment of the slit valve gate (e.g., such as for alignment, etc.) may be reduced and / or eliminated, lessening the burden on technicians, etc. for slit valve gate setup and adjustment. Moreover, the simplified hardware and components provided in the present disclosure can make setup and adjustment of a slit valve gate faster and more efficient than previous solutions, reducing system downtime and increasing system throughput accordingly.

[0022] FIG. 1 illustrates a top schematic of a substrate processing system 100 in accordance with embodiments of the present disclosure. Substrate processing system 100 may include a factory interface 162 (also referred to as “equipment front end module (EFEM)”), a main frame 150 (also referred to as a transfer chamber), one or more processing chambers 155, and one or more load lock chambers 156 according to embodiments described herein. Main frame 150 may be connected to factory interface 162 via the one or more load lock chambers 156. Substrate carriers 164 maybe detachably connected to a front wall of the factory interface 162. Factory interface 162 may include a factory interface robot 161 for moving substrates 101 (shown dotted for illustration purposes) and / or other objects (such as process kit ring, etc.) between substrate carriers 164 and load lock chambers 156. For instance, factory interface 162 may include one or more load ports, each of which may receive a substrate carrier 164. An overhead track (OHT) may drop a front opening unified pod (FOUP) onto a load port. Factory interface robot 161 may pick substrate 101 from the FOUP and may optionally align substrate 101 in an aligner (not shown). Subsequently, factory interface robot 161 may place substrate 101 in load lock chamber 156. Thereafter, main frame robot 150 (located in main frame 150) may pick substrate 101 from at least one of load lock chambers 156 and hand substrate 101 to at least one of the one or more processing chambers 155.Attorney Docket No.: 36119.2892 (L2401PCT)

[0023] As the manufacturing processes progress, the factory interface robot 161 and the main frame robot 150, working in tandem, may move substrates 101 and / or other objects between the substrate carriers 164 and the processing chambers 155. Various electronic device fabrication processes, e.g., semiconductor device manufacturing processes, such as, e.g., oxidation, thin film deposition, etching, heat treatment, degassing, cool down, etc., may take place within process chambers 155.

[0024] After processingin atleastone of the one ormore processing chambers 155 is complete, processed substrate 101 may be picked by main frame robot 150 and handed over to at least one of load lock chambers 156. Atleast one of load lock chambers 156 may pump its pressure upto atmospheric pressurefollowed by the processed substrate 101 beingpickedby the factory interface robot 161 and placed back into the FOUP. After all substrates from substrate carriers 164 are processed, the OHT (not shown) may pick the FOUP and drop it with a different tool as per the designed manufacturing process.

[0025] Substrate 101 and / or other objects are transferred between one station to an adjacent station (e.g., between main frame 150 to processing chamber 155, between load lock chamber 156 and main frame 150, between factory interface 162 and load lock chamber 156, and the like) via at least one gate that is a part of a slit valve assembly that may be housed in ports 175. A slit valve assembly according to certain embodiments is described in further detail with respect to FIG. 2. Each slit valve (or gate) is able to transition from a closed position to an open position and vice versa. In the closed position, the slit valve (or gate) isolates one station from an adjacent station. In the open position, the slit valve (or gate) does not isolate one station from the adjacent station and objects are transferable from one station to an adjacent station through the open apertures of two opposing sides of ports 175. The slit valve assembly may include a coupler that allows for self-alignment of the slit valve gate as described herein.

[0026] As used herein, the term “station” refers to a chamber in which objects that are transferred through a wafer processing system, such as a wafers, may be stored temporarily. A station, as used herein, may be separated from other portions of the sub strate processing system with at least one gate.

[0027] FIGS. 2A-2B illustrate perspective views of a slit valve assembly in accordance with embodiments of the present disclosure. FIG. 2A shows a perspective view of an assembly 200 A having a slit valve gate 202 coupled to an actuator 204 by a coupler 250. FIG. 2B shows a perspective view of an assembly 200B having a slit valve gate 202 and a coupler 250. Slit valve gate 202 may be configured to seal a slit valve opening (not illustrated), such as one of the ports 175 shown in FIG. 1. A sealing surface may substantially surround the slit valveAttorney Docket No.: 36119.2892 (L2401PCT) opening. The slit valve gate 202 may be actuated to a closed position to contact the sealing surface and seal the slit valve opening. Actuator204 may be apneumatic actuator oran electromechanical actuator. In some embodiments, actuator 204 can actuate the slit valve gate 202 to an open position to open a slit valve opening and / or to a closed position to close a slit valve opening. Actuator 204 maybe controlled by a control signal received from a controller, etc.

[0028] Coupler 250 may mechanically couple the slit valve gate 202 with the actuator 204. In some embodiments, the coupler 250 may form a rotatable joint so that the slit valve gate 202 may rotate with respect to the actuator 204 (e.g., when the slit valve gate 202 is actuated to the closed position, such as to correct a misalignment of the slit valve gate 202, etc.). Rotation of the slit valve gate 202 may be for alignment of the slit valve gate 202 with a sealing surface of a slit valve opening. In some embodiments, the coupler 250 enable the slit valve gate 202 to rotate about two axes. For example, and in some embodiments, the coupler250 may enable rotation of the slit valve gate 202 with respect to the actuator 204 about a first axis 280 A and about a second axis 280B. The axes 280A and 280B may intersect a substrate transfer path through the slit valve opening. The substrate transfer path may substantially extend along the actuation path of the slit valve gate 202. In some embodiments, axis of rotation 280 A vertically intersects the substrate transfer path and the axis of rotation 280B laterally intersects the substrate transfer path.

[0029] In some embodiments, coupler 250 includes components to interface with the slit valve gate 202 and / or the actuator 204. For example, and in some embodiments, coupler 250 includes an actuatorinterface component210 andagate interface component260. The actuator interface component210 may couple to the actuator 204 (e.g., at the end of the actuator shaft, etc.). In some embodiments, the actuator interface component 210 is integral to the actuator 204. For example, the end of the actuator shaft may form the actuator interface component 210. In some embodiments, the actuator interface component 210 is a separate component from the actuator. The actuator interface component 210 may be coupled with the actuator 204 by one or more mechanical fasteners, such as screws or bolts, etc. The gate interface component 260 may couple to the slit valve gate 202. The gate interface component 260 may be coupled with the slit valve gate 202 by one or more mechanical fasteners, such as screws or bolts, etc.

[0030] The coupler 250 may include a cross-shaped member (not illustrated) and / or one or more clamp members (not illustrated) that form the rotatable joint. Further description of these components of the coupler 250 are described herein below.

[0031] In some embodiments, the rotatable joint allows for self-alignment of the slit valve gate 202 with respect to the sealing surface of the slit valve opening. The rotatable joint may allowAttorney Docket No.: 36119.2892 (L2401PCT) the slit valve gate 202 to rotate about axis 280A and / or axis 280B to correct rotational misalignment of the slit valve gate 202 with respect to the sealing surface of the slit valve opening. In some embodiments, the rotatable joint allows for rotation up to approximately five degrees about each axis. In some embodiments, when the actuator 204 actuates the slit valve gate 202 to a closed position (and when the slit valve gate 202 is rotationally misaligned with the sealing surface of the slit valve opening), the closing force provided by the actuator 204 can cause the gate interface component 260 to rotate the slit valve gate 202 about one or both of the axes 280A and / or 280B to correctforthe rotational misalignment. In some embodiments, the gate interface component 260 is rotated with respect to the actuator interface component 210 via the rotatable jointformed by the coupler components (e.g., the clamp members, a crossshaped member, etc.). The gate interface component 260 may rotate about one or more sets of opposing extensions of a cross-shaped member disposed between the interface components responsive to the closing force provided by the actuator 204. Friction force in the coupler 250 may cause the slit valve gate 202 to retain its rotational position after aligning to the sealing surface of the slit valve opening, such as when the slit valve gate 202 is subsequently actuated to the open position and / or re-actuated to the closed position.

[0032] FIGS. 3A-3B illustrate cutaway views of a coupler for a slit valve gate in accordance with embodiments ofthe present disclosure. FIG.3A shows a perspective partial cutaway view of a slit valve assembly 300. FIG. 3B shows a side cutaway view of a slit valve coupler 351. In some embodiments, a gate interface component 360 may be coupled to an actuator interface component s 10 by one or more clamp members (e.g., clamp 350 and clamp 320, etc.) and / or a cross-shaped component 330. A slit valve gate 302 may be coupled with the gate interface component 360. In some embodiments, a first clamp member 320 and a second clamp member 350 clamp onto the cross-shaped member 330. The clamp member 320 may be coupled with the gate interface component 360 and the clamp member 350 may be coupled with the actuator interface component s 10. In some embodiments, the cross-shaped component 330 forms sets of opposing extensions.

[0033] In some embodiments, the interface components (e.g., gate interface component 360 and / or actuator interface component 310) form recesses to at least partially receive the clamp members. For example, the actuator interface component 310 may form a recess to receive the clamp member 320 and the gate interface component 360 may form a recess to receive the clamp member 350. The recesses may allow for rotation of the clamp members and / or the interface components with respect to one another. For example, the recess formed in the gate interface component 360 may allow the gate interface component 360 to rotate with respect toAttorney Docket No.: 36119.2892 (L2401PCT) the actuator interface component s 10 without contacting the clamp member 350. Similarly, the recess formed in the actuator interface component 310 may allow the clamp member 320 (coupled with the gate interface component 360) to rotate with respect to the actuator interface components 10 without contactingthe actuator interface components 10. There may be a space formed between the gate interface component 360 and the actuator interface component 310 to allow for the gate interface component 360 to rotate relative to the actuator interface component 310 without contacting the actuator interface component 310. The recess sizes / depth in 310 and 360 may determine the amount of rotation allowed or limit the rotation to a specified / designed angle. In other words, the rotation angle may be controlled by the sizes / depths of the recesses in the respective components, etc.

[0034] Gate interface component 360 may rotate with respect to actuator interface component 310, such as during self-alignment of the slit valve gate 302. Rotation of the gate interface component 360 may be enabled by the cross-shaped component 330. Clamp member 350 and clamp member 320 may clamp onto legs of the cross-shaped component 330. Bushings 340 may be disposed between the legs of the cross-shaped component 330 and the clamp members and / or the interface components to reduce friction and / or to lessen the amount of generated particles. The bushings 340 may protect the cross-shaped member 330, the clamp members, and / or the interface components from damage, such as from rotation of the gate interface component 360 with respect to the actuator interface component 310.

[0035] FIGS. 4A-4G illustrate perspective views of a coupler for a slit valve gate in accordance with embodiments of the present disclosure. Referringto FIG. 4A, a perspective view 400 Ais shown. In some embodiments, an actuator interface component410 is configured to couple to a slit valve actuator (e.g., actuator 204 of FIGS. 2Aand2B). In some embodiments, the actuator interface component 410 is integrated into the end of an actuator shaft. The actuator interface component 410 may form multiple holes, such as to receive threaded fasteners (e.g, screws, bolts, etc.). In some embodiments, the actuator interfacecomponent41 Ocan be coupled to an actuator by one or more fasteners that may pass through holes 416. The actuator interface component 410 may form holes 414 for receiving fasteners that couple one or more clamp members to the actuator interface component 410. In some embodiments, actuator interface component 410 forms a recess 412 to accept a clamp member. The clamp member may be able to fit at least partially in the recess 412 and may rotate with respect to the interface component 410 without contacting the interface component 410 because of the clearance provided by the recess 412. The clearance between the interface component 410 (e.g., provided by the recess 412) and the clamp member may control the amount of rotation of the clamp member withAttorney Docket No.: 36119.2892 (L2401PCT) respect to the interface component410. In some embodiments, actuator interface component 410 forms a lateral channel 418 to accept a set of opposing extensions of a cross-shaped member. More details regarding the cross-shaped member are described herein below.

[0036] Referring to FIG. 4B, a perspective view 400B is shown. In some embodiments, a first clamp member 420 fits at least partially into the recess 412. In some embodiments, clamp member 420 forms multiple holes 424, such as to receive threaded fasteners. When fully assembled, the clamp member 420 may rotate within the recess formed in the actuator interface component 410 without contacting the actuator interface component 410. In some embodiments, clamp member 420 forms a longitudinal groove 428 to accept a set of opposing extensions of a cross-shaped member. More details regarding the cross-shaped member are described herein below.

[0037] Referring to FIG. 4C, a perspective view 400C is shown. In some embodiments, a cross-shaped member 430 fits at least partially into the lateral groove 418 formed by the actuator interface component 410 and / or at least partially into the longitudinal groove 428 formed by the clamp member 420. The cross-shaped member 430 may include multiple extensions. For example, and in some embodiments, cross-shaped member 430 forms extensions 432A-D. In some embodiments, pairs of extensions 432A-D are opposed to one another. For example, extensions 432A and 432C may be opposed to one another and extensions 432B and 432D may be opposed to one another. The opposed pairs of extensions 432 A-D may define axes of rotation. In some embodiments, extensions 432A and432C define axis 480A and extensions 432B and 432D define axis 480B. Axes 480A and 480B may correspond to axes 280 A and 280B respectively of FIGS. 2 A and 2B. In some embodiments, axis 480A and axis 480B are substantially orthogonal to one another.

[0038] In some embodiments, multiple bushings are disposed on the ends of each of the extensions 432A-D. For example, a bushing 440 A is disposed on extension 432A, a bushing 440B is disposed on extension 432B, a bushing 440C is disposed on extension 432C, and a bushing440D is disposed on extension 432D. The bushings 440 A-D may be made of a suitable bushing material such as Teflon. The bushings 440A-D may reduce the amount of friction between the clamp member(s) and the interface component(s) such as during rotation about axis 480A and / or axis 480B. The bushings 440 A-D and / or the extensions 432 A-D may have a substantially circular profile to enable rotation of the clamp member(s) and / or the interface component(s) about axes 480A and 480B.

[0039] Referring to FIG. 4D, a perspective view 400D is shown. In some embodiments, a clamp member 450 couples to the actuator interface component 410. The clamp member 450Attorney Docket No.: 36119.2892 (L2401PCT) may be coupled to the actuator interface component 410 by multiple fasteners 454. The fasteners 454 may be received by holes 414 of the actuator interface component 410. In some embodiments, the clamp member 450 clamps onto extensions 432B and 432D when the fasteners 454 are tightened. The clamp member 450 may clamp onto the bushings 440B and 440D on the extensions 432B and 432D when the fasteners 454 are tightened. Clamping of the extensions 432B and 432D by the clamp member 450 may couple the cross-shaped member 430 with the actuatorinterface component410. The clamp member 450 may be rigidly coupled to the actuator interface component 410 so thatthe clamp member 450 is rotatably fixed with respect to the actuator interface component 410. For example, when the clamp member 450 is coupled to the actuator interface component 410 (e.g., such as by the fasteners 454, etc.), the clamp member 450 may not rotate with respect to the actuator interface component 410. Clamping of the clamp member 450 onto extensions 432B and 432D may generate a friction force so that the rotatable joint formed by the cross-shaped member 430 and the clamp member(s) may hold a rotational position. The friction force may be overcome by a closing force provided by the slit valve actuator.

[0040] Referring to FIG. 4E, a perspective view of the clamp member 450 is shown. In some embodiments, the clamp member 450 forms multiple holes 455 to receive fasteners, such as fasteners 454, for coupling the clamp member 450 to the actuator interface component410. The clamp member 450 may form one or more alignment pins to properly align the clamp member 450 with the actuator interface component410. The clamp member450 may form grooves 452A and 452B to receive the extensions 432A-D of the cross-shaped member 430. Groove 452A may be along axis 480A and groove 452B may be along axis 480B. In some embodiments, the clamp member 450 includes one or more bushings 458 so thatthe extensions of the cross-shaped member 430 do not directly contact the clamp member 450.

[0041] Referring to FIG. 4F, a perspective view 400F is shown. In some embodiments, a gate interface component 460 is coupled to the clamp member 420, such as by fasteners 464. The fasteners 464 may be accepted by holes 424 of the clamp member 420. In some embodiments, the clamp member 420 clamps onto extensions 432A and 432C of the cross-shaped member 430 when the fasteners 464 are tightened. The clamp member 420 may clamp onto the bushing; 440A and 440C on the extensions 432A and 432C when the fasteners 464 are tightened. Clamping of the extensions 432 A and 432C by the clamp member 420 may couple the crossshaped member 430 with the gate interface component 460. The clamp member 420 may be rigidly coupled to the gate interface component 460 so that the clamp member 420 is fixed to the gate interface component 460. For example, when the clamp member 420 is coupled to theAttorney Docket No.: 36119.2892 (L2401PCT) gate interface component 460 (e.g., such as by the fasteners 464, etc.), the clamp member 420 may not rotate with respect to the gate interface component 460. In some embodiments, the gate interface component 460 and the clamp member 420 may rotate about axes 480A and 480B with respect to the actuator interface component 410 and the clamp member 450. The cross-shaped member 430, the clamp member(s), and / or the interface component(s) may thus form a rotatable joint. Clamping of the clamp member 420 onto extensions 432A and 432C may generate a friction force so that the rotatable joint formed by the cross-shaped member 430 and the clamp member(s) may hold a rotational position. The friction force may be overcome by a closing force provided by the slit valve actuator.

[0042] Referring to FIG. 4G, a perspective view of gate interface component 460 is shown. In some embodiments, gate interface component 460 forms multiple holes 465 to receive fasteners, such as fasteners 464, for coupling the clamp member 420 to the gate interface component 460. The gate interface component 460 may form one or more alignment pins to properly align the clamp member 420 with the gate interface component 460. In some embodiments, the gate interface component 460 forms multiple holes 466 for coupling the gate interface component 460 to a slit valve gate.

[0043] In some embodiments, the gate interface component460 forms a recess 462 Ato receive the clamp member 450. The clamp member 450 may fit at least partially within the recess 462 A. In some embodiments, the gate interface component 460 may rotate with respect to the clamp member 450 (and therefore also the actuator interface component 410, etc.) without contacting the clamp member 450 because of the clearance provided by the recess 462A. The amount of clearance between the clamp member 450 and the gate interface component 460 may limit the amount of rotation of the clamp member 450 with respect to the gate interface component 460. In some embodiments, gate interface component 460 forms a groove 462B to receive the extensions of the cross-shaped member 430. Groove 462B may be along axis 480A. In some embodiments, the gate interface component 460 includes one or more bushings 468 so that the extensions of the cross-shaped member 430 do not directly contact the gate interface component 460.

[0044] FIG. 5 is a flow chart of a method of assembling a coupler for a slit valve gate in accordance with embodiments of the present disclosure. In some embodiments, method 500 may be performed by machinery (e.g., assembly machinery, robotic machinery, etc.) and / or by a technician (e.g., a user, an engineer, an assembler, a human, etc.). In some embodiments, method 500 is performed and / or caused to be performed by processing logic that includes hardware (e.g., circuitry, dedicated logic, programmable logic, microcode, processing device,Attorney Docket No.: 36119.2892 (L2401PCT) etc.), software (such as instructions run on a processing device, a general purpose computer system, or a dedicated machine), firmware, microcode, or a combination thereof.

[0045] For simplicity of explanation, method 500 is depicted and described as a series of operations. However, operations in accordance with this disclosure can occur in various orders and / or concurrently and with other operations notpresen ted and describedherein. Furthermore, in some embodiments, not all illustrated operations are performed to implement method 500 in accordance with the disclosed subject matter. In addition, those skilled in the art will understand and appreciate that method 500 could alternatively be represented as a series of interrelated states via a state diagram or events.

[0046] At bock 510, a first interface component is coupled to a slit valve actuator. The first interface component may be an actuator interface component as described herein. In some embodiments, the first interface component is coupled to the slit valve actuator by one or more fasteners, such as threaded fasteners. The threaded fasteners may be tightened to secure the first interface component to the actuator.

[0047] At block 520, a second interface component is coupled to the first interface component by a rotatable joint formed by a cross-shaped member between the first interface component and the second interface component and one or more clamp members to apply a clamping force to the cross-shaped member. In some embodiments, a first clamp member is coupled to the first interface component. The first clamp member couples the cross-shaped member with the first interface component. In some embodiments, a second clamp member is coupled to the second interface component. The second clamp member couples the cross-shaped member with the second interface component. In some embodiments, the firstand second clamp members clamp onto opposing extensions of the cross-shaped member, forming the rotatable joint between the interface components. The clamp members maybe clamped onto the cross-shaped member by tightening one or more fasteners (e.g., threaded fasteners, etc.).

[0048] At block 530, a slit valve gate is coupled to the second interface component. In some embodiments, the slit valve gate is coupled to the second interface component using multiple fasteners (e.g., threaded fasteners, etc.).

[0049] At block 540, the slit valve gate is aligned with a sealing surface of a slit valve opening In some embodiments, the second interface component is configured to self-align, via the rotatable joint (e.g., formed by the cross-shaped member and / or the clamp member(s), etc.), the slit valve gate with respect to the sealing surface of the slit valve opening. Self alignment of the slit valve gate may be responsive to a threshold closing force provided by the slit valve actuator. In some embodiments, the slit valve actuator is caused to actuate the slit valve gate toAttorney Docket No.: 36119.2892 (L2401PCT) a closed position. The slit valve actuator may provide a closing force that is greater than a threshold force. When the slit valve gate actuates to the closed position, the second interface component is to rotate with respect to the first interface component via the rotatable joint (e.g, formed by the cross-shaped member and / or the clamp member(s), etc.) to correct the misalignment of the slit valve gate.

[0050] In the foregoing description, numerous specific details are set forth, such as specific materials, dimensions, processes parameters, etc., to provide a thorough understanding of the present disclosure. The particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments. The words "example" or "exemplary" are used herein to mean serving as an example, instance, or illustration. Any aspect or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or advantageous over other aspects or designs. Rather, use of the words "example" or "exemplary" is simply intended to present concepts in a concrete fashion. As used in this application, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or". That is, unless specified otherwise, or clear from context, "X includes A or B" is intended to mean any of the natural inclusive permutations. That is, if X includes A; X includes B; or X includes both A and B, then "X includes A or B" is satisfied under any of the foregoing instances. Referencethroughoutthis specification to "an embodiment", “certain embodiments”, or "one embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrase "an embodiment", “certain embodiments”, or "one embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment.

[0051] Embodiments of the present disclosure have been described with reference to specific exemplary embodiments thereof. The specification and drawings are, accordingly, to be regarded in an illustrative ratherthan a restrictive sense. Various modifications of the disclosure in addition to those shown and described herein will become apparent to those skilled in the art and are intended to fall within the scope of the appended claims.

[0052] As used herein, the singular forms "a," "an," and "the" include plural references unless the context clearly indicates otherwise. Thus, for example, reference to "a wafer" includes a single wafer as well as two or more wafers, and the like.

[0053] As used herein, the term “about” in connection with a measured quantity, refers to the normal variations in that measured quantity, as expected by one of ordinary skill in the art in making the measurement and exercising a level of care commensurate with the objective ofAttorney Docket No.: 36119.2892 (L2401PCT) measurement and the precision of the measuring equipment. In certain embodiments, the term “about” includesthe recited number±10%, such that “about 10” would include from 9 to 11.

[0054] Recitation of ranges of valuesherein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein, and each separate value is incorporated into the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The use of any and all examples, or exemplary language (e.g., “such as”) provided herein, is intended merely to illuminate certain materials and methods and does not pose a limitation on scope. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the disclosed materials and methods.

Claims

Attorney Docket No.: 36119.2892 (L2401PCT)CLAIMSWhat is claimed is:1 . A slit valve coupler, comprising: a first interface component configured to couple to a slit valve actuator; a second interface component configured to couple to a slit valve gate; a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component; and one or more clamp members configured to couple the first interface component to the second interface component and to apply a clamping force to the cross-shaped member disposed between the first interface component and the second interface component, wherein the second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to a sealing surface of a slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

2. The slit valve coupler of claim 1, wherein the cross-shaped member comprises: a first set of opposing extensions defining a first axis of rotation; and a second set of opposing extensions defining a second axis of rotation, wherein the second axis of rotation is substantially orthogonal to the first axis of rotation.

3. The slit valve coupler of claim 2, wherein the first axis of rotation vertically intersects a substrate transfer path through the slit valve opening, and wherein the second axis of rotation laterally intersects the substrate transfer path through the slit valve opening.

4. The slit valve coupler of claim 2, wherein a first clamp member of the one or more clamp members couples the cross-shaped member with the first interface component, and wherein a second clamp member of the one or more clamp members couples the cross-shaped member with the second interface component.

5. The slit valve coupler of claim 4, wherein the first clamp member is rotatably fixed with respect to the first interface component, and wherein the second clamp member is configured to rotate about the first axis of rotation and about the second axis of rotation with respect to the first interface component.Attorney Docket No.: 36119.2892 (L2401PCT)6. The slit valve coupler of claim 4, wherein the first interface component forms a first recess to at least partially receive the second clamp member, and wherein the second interface component forms a second recess to at least partially receive the first clamp member.

7. The slit valve coupler of claim 1, further comprising: multiple bushings in contact with the cross-shaped member between the cross-shaped member and the one or more clamp members.

8. The slit valve coupler of claim 1, wherein to self-align the slit valve gate with respect to the sealing surface of the slit valve opening, the slit valve actuator is to actuate the slit valve gate to a closed position, wherein the second interface component is to rotate with respect to the first interface component via the rotatable joint to correct a misalignment of the slit valve gate responsive to the slit valve actuator actuating the slit valve gate to the closed position.

9. The slit valve coupler of claim 1, wherein the rotatable joint is configured to hold a rotational position of the second interface component with respect to the first interface component due to a friction force that can be overcome by the threshold closing force.

10. A slit valve, comprising: a slit valve opening comprising a sealing surface; a slit valve actuator; a slit valve gate configured to seal the slit valve opening; and a coupler coupling the slit valve gate to the slit valve actuator, wherein the coupler comprises: a first interface component configured to couple to the slit valve actuator; a second interface component configured to couple to the slit valve gate; a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component; and one or more clamp members configured to couple the first interface component to the second interface component and to apply a clamping force to the cross-shaped member disposed between the first interface component and the second interface component, wherein the second interface component is configured to selfAttorney Docket No.: 36119.2892 (L2401PCT) align, via the rotatable joint, the slit valve gate with respect to the sealing surface of the slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

11. The slit valve of claim 10, wherein the cross-shaped member comprises: a first set of opposing extensions defining a first axis of rotation; and a second set of opposing extensions defining a second axis of rotation, wherein the second axis of rotation is substantially orthogonal to the first axis of rotation.

12. The slit valve of claim 11, wherein the first axis of rotation vertically intersects a substrate transfer path through the slit valve opening, and wherein the second axis of rotation laterally intersects the substrate transfer path through the slit valve opening.

13. The slit valve of claim 11, wherein a first clamp member of the one or more clamp members couples the cross-shaped member with the first interface component, and wherein a second clamp member of the one or more clamp members couples the cross-shaped member with the second interface component.

14. The slit valve of claim 13, wherein the first clamp member is rotatably fixed with respect to the first interface component, and wherein the second clamp member is configured to rotate about the first axis of rotation and about the second axis of rotation with respect to the first interface component.

15. The slit valve of claim 10, further comprising: multiple bushings in contact with the cross-shaped member between the cross-shaped member and the one or more clamp members.

16. The slit valve of claim 10, wherein to self-align the slit valve gate with respect to the sealing surface of the slit valve opening, the slit valve actuator is to actuate the slit valve gate to a closed position, wherein the second interface component is to rotate with respect to the first interface component via the rotatable joint to correct a misalignment of the slit valve gate responsive to the slit valve actuator actuating the slit valve gate to the closed position.Attorney Docket No.: 36119.2892 (L2401PCT)17. The slit valve of claim 10, wherein the rotatable joint is configured to hold a rotational position of the second interface component with respect to the first interface component due to a friction force that can be overcome by the threshold closing force.

18. A method, comprising: coupling a first interface component to a slit valve actuator; coupling a second interface component to the first interface component by a rotatable joint formed by a cross-shaped member between the first interface component and the second interface component and one or more clamp members to apply a clamping force to the crossshaped member; coupling a slit valve gate to the second interface component; and aligning the slit valve gate with a sealing surface of a slit valve opening, wherein the second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to the sealing surface of the slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

19. The method of claim 18, further comprising: coupling a first clamp member of the one or more clamp members to the first interface component, wherein the first clamp member couples the cross-shaped member with the first interface component; and coupling a second clamp member of the one or more clamp members to the second interface component, wherein the second clamp member couples the cross-shaped member with the second interface component.

20. The method of claim 18, wherein to self-align the slit valve gate with respect to the sealing surface of the slit valve opening comprises: causing the slit valve actuator to actuate the slit valve gate to a closed position, wherein the second interface component is to rotate with respect to the first interface component via the rotatable joint to correct a misalignment of the slit valve gate responsive to the slit valve actuator actuating the slit valve gate to the closed position.

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