Load port

The compact load port design addresses the need for miniaturization by integrating a lifting and reciprocating mechanism, optimizing space and airflow control, thus enhancing storage capacity and cleanliness in semiconductor manufacturing equipment.

WO2026115619A1PCT designated stage Publication Date: 2026-06-04TOKYO ELECTRON LTD
View PDF 6 Cites 0 Cited by

Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2024-11-26
Publication Date
2026-06-04

AI Technical Summary

Technical Problem

There is a demand for miniaturization of load ports in semiconductor manufacturing equipment, particularly in the vertical direction, to optimize space utilization and improve airflow control for maintaining cleanliness.

Method used

A load port design with a lifting mechanism and reciprocating mechanism that allows for a compact vertical dimension, incorporating a lifting mechanism with an actuator extending vertically and a reciprocating mechanism that overlaps with the lifting mechanism, along with a stage for supporting containers, enabling efficient use of space and improved airflow control.

Benefits of technology

The compact design reduces the vertical footprint of the load port, enhances storage capacity, and improves airflow control, ensuring high cleanliness standards without increasing the overall device footprint.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure JP2024041824_04062026_PF_FP_ABST
    Figure JP2024041824_04062026_PF_FP_ABST
Patent Text Reader

Abstract

This load port with a placement surface on which a container is placed comprises: a hoisting mechanism that opens and closes a door of the container and moves up and down; a stage that supports the container on the placement surface; and a reciprocating mechanism that reciprocates the stage forward and backward in a horizontal direction. The hoisting mechanism includes an actuator extending in a vertical direction, and an arm that supports the door and is driven by the actuator. The upper part of the actuator is disposed to overlap with the reciprocating mechanism in the vertical direction.
Need to check novelty before this filing date? Find Prior Art