Sputtering device, use, and method

Abstract

The invention relates to a sputtering device, comprising: a target coupling (104), which is configured for coupling to a tubular target; a magnet system (602), which has a plurality of pole bodies (444) and two actuators (304b), each actuator being configured to influence a spatial position of the plurality of pole bodies (444) relative to one another; a client (302c) per actuator of the two actuators (304b), the client being configured to request information from a server (302s) according to a client-server communication protocol and to control the actuator on the basis thereof.

Description

[0001] HA 2172 DE

[0002] 1

[0003] Description

[0004] Sputer device, use, and procedure

[0005] Various embodiments relate to a sputtering device, a use, and a method.

[0006] In general, a substrate can be treated (processed), for example, coated, so that its chemical and / or physical properties can be modified. Various coating processes can be performed in a vacuum to coat a substrate, one of which is cathode sputtering (also known as sputter deposition), a well-established form of physical vapor deposition (PVD). In sputtering, a plasma-forming gas is ionized by a cathode, which then atomizes the material to be deposited (target material). Tubular cathodes, which themselves contain the target material (then also referred to as tubular targets), are particularly common in this process. A modification of cathode sputtering is sputtering using a magnetron, known as magnetron sputtering.The formation of the plasma is supported by a magnetic field, which influences the ionization rate of the plasma-forming gas. The magnetic field is generated by a magnet system located inside the tube target.

[0007] In cases where the results of magnetron sputtering require high performance, it is often desirable to be able to influence the magnet system and thus the magnetic field it generates during operation from outside the tube target (also referred to as the external environment). This is also known as "online adjustment" or "in-service adjustment," for example, to implement a feedback control system for the sputtering process. However, this is complicated by the specific sources of interference to which the magnet system is exposed, including cooling water inside the tube target, the plasma and the electromagnetic radiation it emits, and the rotation of the tube target. These sources of interference impair communication and power supply to components inside the tube target, such as the communication bus, driver circuits, and other communication devices, and increase the demands placed on them.

[0008] According to various embodiments, these hurdles are addressed from different perspectives, which can be implemented, among other things, by means of a sputtering device, a specific application, and / or a particular method. It has been clearly demonstrated, among other things, that the established communication hierarchy is traditionally based on the concept of a forward-facing control path, in which access to the shared communication bus is controlled by exactly one primary communication participant, to which the driver circuits are subordinate as secondary communication participants (formerly also referred to as a master-slave architecture). According to this communication hierarchy, the primary communication participant acts as a distributor, forwarding the control values ​​received externally to the individual driver circuits, which in turn control the actuators that influence the magnetic system.

[0009] Against this background, it was recognized, among other things, that the primary communication participant must be precisely adapted to the magnetic system being controlled, cannot operate autonomously, and causes a high data load when communicating with the outside world, based on various embodiments. In this context, it was also recognized that there is additional scope to increase flexibility, reduce costs, simplify setup and operation, and lower the data load. (See HA 2172 DE for illustration.)

[0010] 2. It was recognized that a client-server architecture allows for better utilization of the resources of the existing circuits, reduces configuration effort, promotes autonomous operation, and is easier to scale. Furthermore, a configuration file specifying the physical structure of the magnet system can be dispensed with.

[0011] An exemplary implementation of the embodiments provided herein facilitates a system where each client independently registers with the server and becomes active. The server, for example, provides the data that can be retrieved from the server upon request from the client. This eliminates the need for a handshake. The client independently registers with the server, independently uploads its data to a mailbox on the server, and independently retrieves the information provided there. Optionally, the client also independently provides a freshness indicator in the data it delivers. This approach promotes a client-server architecture that, for example, functions without a handshake and / or without acknowledgment messages. Clients are allocated a communication slot, for example, via a time slice, within which the client initiates communication with the server.

[0012] The following are various examples that relate to what is described herein and depicted in the figures.

[0013] Example 1 (e.g., a sputtering device) is configured according to one of the appended claims and / or comprises: a target coupling configured for coupling a tube target; a magnetic system comprising multiple pole bodies and multiple (i.e., two or more) actuators (also referred to as pole actuators), each actuator being configured to influence a spatial position of the multiple pole bodies relative to each other; a client per actuator of the actuators configured to request information from a server according to a client-server communication protocol and to control the actuator based thereon.

[0014] Example 2 is the use of a client-server communication protocol to request information from a server via a client, based on which an actuator is controlled by the client to influence a spatial position of several pole bodies of a magnet system of a sputtering device relative to each other by means of the actuator.

[0015] Example 3 is a method comprising: generating, by means of a client (e.g., each client of several clients), a request directed (e.g., addressed) to a server of a sputtering device for the provision of information about a magnetic system (e.g., a target state of a magnetic system) of the sputtering device, wherein the request is generated according to a client-server communication protocol; controlling, by means of the client (e.g., each client of several clients) and based on the information, an actuator of the magnetic system to influence a spatial position of several pole bodies of the magnetic system relative to each other by means of the actuator; optionally controlling a coating process (e.g., an actuator influencing this process) which is carried out by means of a plasma exposed to a magnetic field generated by means of the magnetic system (e.g., its pole bodies), wherein the plasma preferably contains a (e.g.,a rotating tube target in which the magnet system is arranged, wherein the tube target (also referred to as target tube) further preferably comprises a target material which is supplied to the coating process by atomizing the target material using the plasma. HA 2172 DE.

[0016] 3

[0017] Example 4 (e.g., a computer program) is set up to perform the procedure according to Example 3 when executed by a processor. For example, the computer program has instructions (or at least implementing code segments) that the processor executes, e.g., to implement the client.

[0018] Example 5 (e.g., a computer-readable medium) stores instructions (or at least these implementing code segments) that are set up, when executed by a processor, to cause the processor to perform the procedure according to Example 3, e.g., to implement the client thereof.

[0019] Example 6 (e.g., a control system) comprises one or more processors configured (e.g., by means of the computer program and / or the computer-readable medium according to Examples 4 or 5) to perform the method according to Example 3, e.g., to implement one or more clients and their server. Example 7 (e.g., the control system according to claim 6) is configured according to one of Examples 1 to claim 6 and further comprises a network (e.g., a fieldbus network) with which the one or more clients are communicatively coupled.

[0020] Example 8 (e.g., a magnetic field source) is configured to be arranged in a tube target of a sputtering device and comprises: a magnetic system having multiple pole bodies and multiple (i.e., two or more) actuators, each actuator being configured to influence a spatial position of the multiple pole bodies relative to each other; a control system according to claim 6 or 7, which implements a client for each actuator of the (e.g., two or more) actuators and / or the server, wherein the client is configured to request the information from the server according to the client-server communication protocol and, based thereon, to control the actuator.

[0021] Example 9 is configured according to one of Examples 1 to 8, wherein the magnetic system has two mounting devices (e.g., having flanges or at least bearing journals) between which the pole bodies and / or the actuators are arranged, wherein the mounting devices are configured to mount the magnetic system on a bearing device (e.g., one or more end blocks thereof), preferably the mounting devices are rigidly connected to each other by means of a (e.g., tubular) support (e.g., system support) of the magnetic system. This facilitates the assembly of the magnetic system.

[0022] Example 10 (e.g., a sputtering device) is set up according to one of Examples 1 to 9, where the client implements a model of the magnet system (or at least a part of it) and is configured to control the actuator based on the model. This reduces implementation costs and facilitates scaling as well as autonomous operation. The model can, for example, be implemented using an artificial neural network (also referred to simply as a neural network).

[0023] Example 11 (e.g., a sputtering device) is configured according to one of Examples 1 to 10, further comprising a cylindrical inner region, wherein the target coupling preferably limits (and / or encompasses) the inner region and / or is configured for coupling the tubular target surrounding the inner region. Example 12 (e.g., a sputtering device) is configured according to one of Examples 1 to 11, wherein the target coupling is configured to form a cavity with a tubular target coupled to it, in which the inner region is arranged. HA 2172 DE

[0024] 4

[0025] Example 13 (e.g., a sputtering device) is configured according to one of Examples 1 to 12, further comprising the server, which is preferably arranged in the interior, e.g., in the tube target (if present); and / or wherein the server is mounted on the magnet system (e.g., rigidly on a support thereof), e.g., integrated into it. This reduces costs and minimizes communication interference.

[0026] Example 14 (e.g., a sputtering device) is set up according to one of Examples 1 to 13, wherein the client (e.g., each client) is located in the interior, e.g., in the tube target (if present), and / or wherein the client is mounted on the magnet system (e.g., rigidly on a support thereof), e.g., integrated into it. This reduces costs and minimizes communication interference.

[0027] Example 15 (e.g., a sputtering device) is set up according to one of Examples 1 to 14, and furthermore includes multiple clients, one client per actuator (e.g., two or more actuators), arranged in the interior, e.g., the pipe target. This reduces costs and minimizes communication interference.

[0028] Example 16 (e.g., a sputtering device) is configured according to one of Examples 1 to 15, wherein the target coupling is annular or circular or has at least one mounting ring (e.g., a clamping ring) for coupling the tube target, the mounting ring preferably delimiting and / or encompassing the inner area. Example 17 (e.g., a sputtering device) is configured according to one of Examples 1 to 16, further comprising a (e.g., electrical and / or inductive) signal transmission device configured to mediate communication from the server (e.g., through the target coupling and / or into the inner area), wherein the signal transmission device preferably comprises one or more electromagnetic coils and / or is rigidly connected to (or integrated into) the target coupling. This provides robust communication with the outside world.

[0029] The term "outside world" here refers to electrical components outside the sputtering device or at least outside the target, which, for example, have an external signal source (e.g., control computer of the vacuum system) that is set up to receive sensor data representing a result of the coating process carried out by means of the magnetic system and to transmit the target state based on this data to the server, e.g., by means of the signal transmission device.

[0030] Example 18 (e.g., a sputtering device) is set up according to one of Examples 1 to 17, wherein a rotational axis of the target coupling passes through the signal transmission device. For example, the rotational axis may be transverse or parallel to a gravitational direction. Alternatively or additionally, the rotational axis may lie on a coil axis around which one or more turns of an electromagnetic coil (also called a coil turn) of the signal transmission device are wound.

[0031] Example 19 (e.g., a sputtering device) is configured according to one of Examples 1 to 18, where the client is configured to determine (e.g., update) a (e.g., corrected) target state (e.g., position-related) based on the information and / or the model and to control the actuator according to the (e.g., corrected) target state. This reduces implementation costs and facilitates scaling as well as autonomous operation. This configuration, among other things, allows the client to operate partially autonomously, thus placing demands on the server and the bandwidth of the communication link. HA 2172 DE

[0032] 5

[0033] Example 20 (e.g., a sputtering device) is configured according to one of Examples 1 to 19, where the information represents a target state of the magnet system, e.g., a model of the target state of the magnet system. This reduces implementation costs and facilitates scaling as well as autonomous operation. Intuitively, this configuration, among other things, allows the client to operate partially autonomously, thus placing demands on the server and the bandwidth of the communication link.

[0034] Example 21 (e.g., a sputtering device) is set up according to one of Examples 1 to 20, with the server configured to receive information via the signal switching device. This reduces implementation costs and facilitates scaling as well as autonomous operation. Intuitively, this configuration benefits, among other things, from the server's partially autonomous operation, thus placing demands on both the server and the bandwidth of the communication link.

[0035] Example 22 (e.g., a sputtering device) is set up according to one of Examples 1 to 21, where the information represents a change in the magnet system, e.g., a model of the change in the magnet system. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0036] Example 23 (e.g., a sputtering device) is configured according to one of Examples 1 to 22, where the client is configured to generate an initial message (then also referred to as a request) to the server according to the client-server communication protocol, by which the request is made. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0037] Example 24 (e.g., a sputtering device) is configured according to one of Examples 1 to 23, wherein the client is configured (e.g., time-based (e.g., time-controlled, e.g., time-initiated) and / or recurringly) to generate a second message (then also referred to as a status message) to the server according to the client-server communication protocol. This second message contains at least one piece of information about the spatial position (e.g., showing the current state, e.g., estimated and / or sensor-determined), which preferably results from the control signal. The second message can, for example, be generated repeatedly (e.g., periodically) by the client according to an update scheme implemented by the client. One way to implement the update scheme is a time rule, for example, a clock cycle, in which the second message is generated. The information can, for example, contain or consist of status data and / or a return date.This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0038] In this regard, it should be noted that the status message must be distinguished from an acknowledgment (also referred to as an acknowledgment signal), which is not required by various embodiments described herein. An acknowledgment signal (also referred to as "confirmation" or "acknowledgment") in the context of communications technology refers to feedback sent by the recipient of a message to the sender of the message to confirm that the message has been successfully received. The acknowledgment signal is, for example, linked to the message whose receipt is being confirmed (e.g., by means of a communication session). This applies analogously to other types of acknowledgment, such as confirmation of the consistency (e.g., completeness) and / or timeliness of the message from the recipient to the sender. HA 2172 DE

[0039] 6

[0040] Example 25 (e.g., a sputtering device) is set up according to one of Examples 1 to 24, wherein the information from the server includes at least one indication of the server's status, preferably its availability (e.g., as the server status). This reduces implementation costs and simplifies operation.

[0041] Example 26 (e.g., a sputtering device) is set up according to one of Examples 1 to 25, wherein the information from the server includes at least one indication of the spatial position (e.g., showing the current state, e.g., estimated and / or determined by sensors), e.g., as a result of the control input and / or which is provided by an actuator of the magnetic system immediately adjacent to the actuator. The information can, for example, include or consist of status data. This reduces implementation costs and simplifies operation.

[0042] Example 27 (e.g., a sputtering device) is configured according to one of Examples 1 to 26, wherein the information from the server includes at least one specification for a (e.g., external) requirement for the magnet system. This reduces implementation costs and facilitates scaling as well as autonomous operation. Example 28 (e.g., a sputtering device) is configured according to one of Examples 1 to 27, wherein the information is based on server data stored by the server, the server data preferably representing a state (e.g., actual state and / or target state and / or a deviation between these) of the magnet system, e.g., implemented as a model thereof. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0043] Example 29 (e.g., a sputtering device) is configured according to Example 28, wherein the server is configured to update the server data based on: a communication signal (e.g., a data signal) received by the server, which is preferably transmitted internally (e.g., through the target coupling and / or via the signal switching device) and / or contains a message addressed to the server; and / or a message addressed to the server by a client (e.g., the status message). This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0044] Example 30 (e.g., a sputtering device) is configured according to one of Examples 1 to 29, wherein the server is configured to receive (e.g., transmit) additional information according to a network communication protocol (e.g., by means of a communication signal, e.g., a data signal), preferably mediated by means of the signal switching device and / or through the target coupling. This reduces implementation costs and facilitates communication with the outside world.

[0045] Example 31 (e.g., a sputtering device) is set up according to Example 30, wherein the network communication protocol is configured to structure the additional information according to a fieldbus communication protocol; and / or wherein the network communication protocol is a fieldbus communication protocol. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0046] Example 32 (e.g., a sputtering device) is set up according to one of Examples 1 to 31, and furthermore includes a fieldbus by means of which the information is exchanged and / or with which the server and the HA 2172 DE

[0047] 7

[0048] Client-connected devices; the fieldbus is preferably located indoors. This reduces implementation costs and facilitates scalability as well as autonomous operation.

[0049] Example 33 (e.g., a sputtering device) is set up according to one of Examples 1 to 32, wherein the client-server communication protocol is implemented according to an application-oriented communication layer, the application-oriented communication layer being preferably a session layer, a presentation layer, or an application layer. This reduces implementation costs and facilitates scaling as well as self-contained operation.

[0050] Example 34 (e.g., a sputtering device) is configured according to one of Examples 1 through 33, wherein the client-server communication protocol is configured to structure the information according to a fieldbus communication protocol; and / or wherein the client-server communication protocol is superimposed on the fieldbus communication protocol. This reduces implementation costs and facilitates scalability and autonomous operation. Example 35 (e.g., a sputtering device) is configured according to one of Examples 1 through 34, wherein the client and server are configured to initiate communication with each other on an equal footing (also known as master-master communication). This reduces implementation costs and facilitates scalability and autonomous operation.

[0051] Example 36 (e.g., a sputtering device) is configured according to one of Examples 1 to 35 and further comprises a first circuit by means of which the server is implemented, wherein the first circuit preferably includes a processor and optionally at least one processor-external memory. More preferably, the first circuit can have a first communication interface (e.g., a fieldbus communication interface) configured according to the client-server communication protocol, and / or a second communication interface (e.g., a fieldbus communication interface) configured according to the network communication protocol and / or coupled to the signal switching device. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0052] Example 37 (e.g., a sputtering device) is configured according to one of Examples 1 to 36, and furthermore includes a second circuit (e.g., a processor) per client, by means of which the client is implemented and / or which has a smaller (e.g., non-volatile) data storage capacity than the server. Optionally, the second circuit can include a processor and preferably: a first communication interface (e.g., a fieldbus communication interface) configured according to the client-server communication protocol, and / or a second communication interface (e.g., a driver circuit) configured for controlling the actuator. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0053] Example 38 (e.g., a sputtering device) is set up according to one of Examples 1 to 37, where the client has a lower storage capacity than the server. This reduces costs and power consumption.

[0054] Example 39 (e.g., a sputtering device) is set up according to one of Examples 1 to 38, and furthermore includes one module per actuator, which contains both the actuator and the client. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0055] Example 40 (e.g., a sputtering device) is set up according to one of Examples 1 to 39, furthermore comprising several modules, each of which has one module per actuator, comprising the actuator and the client, wherein HA 2172 DE

[0056] 8. The modules are preferably configured in a similar manner and / or are configured to be interchangeable. This reduces implementation costs and facilitates scaling as well as autonomous operation. Example 41 (e.g., a sputtering device) is configured according to one of Examples 1 to 40, (e.g., the magnet system) further comprising a support system extending along a rotational axis (e.g., comprising a magnet system support and / or a magnet system housing), which is arranged within the interior, wherein the support system preferably comprises a tubular support as the magnet system housing (and / or at least a cavity) in which the server, the pole bodies, the actuator, and / or the client are arranged. This provides a robust design.

[0057] Example 42 (e.g., a sputtering device) is set up according to one of Examples 1 to 41, wherein the server and / or the client are rigidly coupled to the carrier and / or wherein the carrier couples two actuators together. This provides a robust setup.

[0058] Example 43 (e.g., a sputtering device) is set up according to one of Examples 1 to 42, wherein a first section of the client is arranged between the multiple pole bodies and a rotary axis of the target coupling. Alternatively or additionally, the rotary axis is arranged between a second section of the client and the multiple pole bodies. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0059] Example 44 (e.g., a sputtering device) is set up according to one of Examples 1 to 43, with the actuator arranged between the multiple pole bodies and a rotary axis of the target coupling. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0060] Example 45 (e.g. a sputtering device) is set up according to one of Examples 1 to 44, wherein the target coupling is rotatably mounted about an axis of rotation.

[0061] Example 46 (e.g., a sputtering device) is configured according to one of Examples 1 to 45 and further comprises a tubular target in which the inner section is arranged and / or which is coupled to the target coupling. Example 47 (e.g., a sputtering device) is configured according to one of Examples 1 to 46 and further comprises a bearing device (e.g., one end block per target coupling) which has a rotary bearing by means of which the target coupling is rotatably mounted.

[0062] Example 48 (e.g., a sputtering device) is set up according to one of Examples 1 to 47, wherein the actuator (or each actuator) has or consists of an electromechanical actuator, e.g., an electric motor, a stepper motor, or a servo motor. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0063] Example 49 (e.g., a sputtering device) is set up according to one of Examples 1 to 48, wherein the magnetic system has one segment (e.g., magnetic system segment) per actuator, which includes the actuator and multiple magnetic poles, the multiple magnetic poles being provided by at least one of the pole bodies. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0064] Example 50 (e.g., a sputtering device) is set up according to Example 49, wherein the magnet system has several segments (e.g., magnet system segments), one segment per client, wherein the several HA 2172 DE

[0065] 9

[0066] Segments are spatially separated from each other, preferably with immediately adjacent segments being spatially separated. This reduces implementation costs and facilitates scaling as well as autonomous operation.

[0067] Example 51 (e.g., a sputtering device) is set up according to Example 50, wherein the magnet system has several segments, one segment per actuator, the several segments being spatially separated from each other, preferably with immediately adjacent segments being spatially separated. This reduces power consumption and facilitates scaling as well as autonomous operation.

[0068] Example 52 (e.g., a sputtering device) is configured according to one of Examples 1 to 51, wherein the actuator is configured to influence the spatial position of the multiple pole bodies relative to a rotational axis of the target coupling. This increases the range of applications.

[0069] Example 53 (e.g., a sputtering device) is configured according to one of Examples 1 to 52, wherein the actuator is configured to influence the position in response to being controlled, preferably by the client. This provides a compact communication chain.

[0070] Example 54 (e.g. a sputtering device) is set up according to one of Examples 1 to 53, wherein the target coupling preferably: limits the inner area at the end face and / or encompasses at least a section of the inner area and / or projects radially beyond the inner area.

[0071] Example 55 (e.g. a sputtering device) is set up according to one of Examples 1 to 54, wherein the multiple (e.g. two) actuators are arranged one behind the other along a direction away from the target coupling and / or along the axis of rotation of the target coupling.

[0072] Example 56 (e.g. a sputtering device) is set up according to one of Examples 1 to 55, wherein the multiple pole bodies have or consist of multiple permanent magnets.

[0073] Example 57 (e.g. a sputtering device) is set up according to one of Examples 1 to 56, wherein the multiple pole bodies provide multiple magnetic poles.

[0074] Example 58 (e.g. a sputtering device) is set up according to one of Examples 1 to 57, wherein the magnet system is arranged in the interior area.

[0075] Example 59 (e.g., a sputtering device) is set up according to one of Examples 1 to 58, wherein the server and / or the client are fixed in position relative to the axis of rotation of the target coupling. This provides a robust setup.

[0076] Example 60 (e.g., a sputtering device) is configured according to one of Examples 1 to 59, further comprising an additional target coupling which is configured for coupling the tube target surrounding the interior, wherein the magnet system, the server, and / or the client are arranged between the target coupling and the additional target coupling. This provides a robust setup.

[0077] Example 61 is set up according to one of Examples 1 to 60, wherein the magnetic system, the client and / or the server are arranged in the rotatably mounted pipe target. This facilitates autonomous operation. HA 2172 DE

[0078] 10

[0079] Example 62 is a signal switching device and / or configured according to any one of Examples 1 to 61, wherein the signal switching device comprises: a carrier (also referred to as a signal switching carrier) having a first side and a second side opposite the first side; several coils, at least one of which is a first coil facing the first side (e.g., on the first side), and / or at least one of which is a second coil facing the second side (e.g., on the second side); one or more electrical feedthroughs penetrating the carrier from the first side to the second side and electrically coupled to one or more than one (e.g., each) of the several coils; wherein the carrier preferably couples the several coils together (e.g., rigidly).

[0080] Example 63 is a signal transmission device according to Example 62, comprising: one or more coupling devices (e.g., comprising the target coupling and / or a bearing coupling) for coupling a device, preferably a target tube, the support system, and / or a bearing device (e.g., a bearing block thereof), by means of which a rotational axis is provided to the signal transmission device. This facilitates robust signal transmission through and / or into a rotating component (e.g., a target tube). For example, a target cover of a sputtering device can be configured in a cantilever configuration, i.e., not necessarily supported on opposite sides.

[0081] Example 64 is a target tube cover or a signal transmission system comprising: the signal switching device according to one of Examples 62 or 63.

[0082] Example 65 (e.g., a target tube cover) is configured according to one of Examples 1 to 64 and / or comprises: a carrier (e.g., the signal transmission carrier) having a first side (e.g., target side) and a second side opposite the first side (e.g., bearing side); a first coupling device (also referred to as a target coupling) for coupling a target tube (also referred to as a tube target) on the first side, and / or a second coupling device for coupling a bearing device (e.g., a bearing block thereof) on the second side, by means of which an axis of rotation is provided to the carrier; wherein the carrier preferably couples the first coupling device and the second coupling device (e.g., rigidly); several coils, of which at least one first coil is arranged facing the first side (e.g., on the first side), and / or of which at least one second coil is arranged facing the second side (e.g.,on the second side); one or more than one electrical feedthrough which penetrates the carrier from the first side to the second side and is electrically coupled to one or more than one (e.g. each) coil of the several coils.

[0083] Example 66 is a use of one of Examples 62 to 65 for inductive transmission of at least one signal (e.g. into a target tube coupled to the target tube cover), preferably for communication with the server and / or for electrical supply to several electrical components (e.g. of the server, the clients and / or the actuators) arranged in the target tube, for example while the several coils are rotated around a rotary axis.

[0084] Example 67 is the use of a target tube cover (preferably configured according to one of Examples 62 to 66), which has several coils, for inductively transmitting at least one signal (e.g. into a target tube which is coupled to the target tube cover), preferably for communicating with an HA 2172 DE

[0085] 11

[0086] Server that is located in the target tube, for example while the multiple coils are rotated around a rotary axis.

[0087] Example 68 is a method comprising: rotating a target tube cover (preferably configured according to one of Examples 62 to 67), which has a first side, a second side and several coils, of which at least one first coil is arranged on a first side and / or of which at least one second coil is arranged on a second side, about an axis of rotation which passes through the several coils, transmitting at least one signal by means of the several coils to the first side, preferably into a target tube which is coupled to the target tube cover, and / or preferably to the server which is arranged inside the target tube and / or on the first side.

[0088] Example 69 is a method (for example, configured according to Example 68) comprising: controlling an actuator configured to influence the rotation of a target tube cover (for example, configured according to one of the preceding examples) which has a first side, a second side, and several coils, of which at least one first coil is arranged on a first side and / or of which at least one second coil is arranged on a second side, about an axis of rotation passing through the several coils; controlling a communication interface configured to stimulate the transmission of at least one signal by means of the several coils to the first side, preferably into a target tube coupled to the target tube cover, and / or preferably to the server arranged inside the target tube and / or on the first side.

[0089] Example 70 is a computer program that is set up to perform the procedure according to Example 68 or 69.

[0090] Example 71 is a computer-readable medium that stores instructions configured, when executed by a processor, to cause the processor to perform the procedure according to Example 68 or 69. Example 72 is a control device comprising one or more processors configured to perform the procedure according to Example 68 or 69.

[0091] Example 73 is configured according to one of Examples 62 to 72, the target tube cover further comprising: a third coupling device (also referred to as a pole carrier coupling) for coupling a magnetic system (e.g., its carrier system), wherein the first coupling device optionally surrounds the third coupling device in a ring-like manner; preferably a joint which provides the third coupling device with one or more degrees of rotational freedom relative to the carrier, of which preferably at least one first degree of rotational freedom is along the axis of rotation and / or one or more than one second degree of rotational freedom is transverse to the axis of rotation. For example, the third coupling device can be rotatably mounted relative to the first coupling device. This facilitates robust signal transmission through and / or into a rotating component (e.g., a target tube).The second rotational degree of freedom extends the service life, intuitively, because movements arising from deformation of the target are compensated.

[0092] Example 74 is set up according to one of Examples 62 to 73, wherein the electrical connection provides one or more than one signal path (e.g. by means of an electrical line, e.g. a cable) between two coils of the HA 2172 DE

[0093] It provides 12 multiple coils, which are galvanically isolated from the carrier. This promotes robust signal transmission.

[0094] Example 75 is configured according to one of Examples 62 to 74, wherein the first coupling device and / or the second coupling device includes a sealing device. This facilitates robust signal transmission through areas of differing pressure values ​​and / or chemical compositions.

[0095] Example 76 (e.g., a signal transmission system) is configured according to one of Examples 62 to 75 and / or comprises: a bearing device, and several coils, wherein: at least one first coil and at least one second coil are electrically (galvanically) coupled to each other; at least one third coil and at least one fourth coil are arranged one behind the other along a rotational axis of the bearing device, wherein the at least one first coil and the at least one second coil are rotatably mounted by means of the bearing device about the rotational axis relative to the at least one third coil and the at least one fourth coil; wherein preferably the at least one third coil is inductively coupled to the at least one second coil; and / or wherein preferably the at least one first coil is inductively coupled to the at least one fourth coil.

[0096] Example 77 is configured according to Example 76, further comprising: a carrier which is rotatably mounted about the axis of rotation relative to the at least one third coil and the at least one fourth coil by means of the bearing device; the signal transmission system preferably further comprising: one or more than one electrical feedthrough which penetrates the carrier and is electrically coupled to one or more than one (e.g., each) coil of the multiple coils. This facilitates robust signal transmission through and / or into a rotating component (e.g., a target tube).

[0097] Example 78 is configured according to Example 77, further comprising: one or more than one coupling device (e.g., a first coupling device and / or a second coupling device) which are coupled to each other by means of the carrier and / or of which at least one coupling device is configured to be coupled to the bearing device. This facilitates robust signal transmission through and / or into a rotating component (e.g., a target tube).

[0098] Example 79 is configured according to one of Examples 62 to 78, wherein the at least one first coil comprises several first coils (which are, for example, arranged one behind the other along the axis of rotation or concentrically), which preferably differ from one another (e.g., in inductance and / or distance from the at least one second coil). This facilitates separate transmission of the power signal and the data signal. Example 80 is configured according to one of Examples 62 to 79, wherein the at least one second coil comprises several second coils, which are, for example, arranged one behind the other along the axis of rotation or concentrically, which preferably differ from one another (e.g., in inductance and / or distance from the at least one first coil). This facilitates separate transmission of the power signal and the data signal.Example 81 is configured according to one of Examples 62 to 80, wherein the carrier has an opening that penetrates the carrier from the first side to the second side, with the electrical feedthrough being accommodated in the opening. This facilitates robust signal transmission. HA 2172 DE.

[0099] 13

[0100] Example 82 (e.g., a sputtering device) is configured according to one of Examples 1 to 81 and further comprises: the bearing device which provides the axis of rotation and / or is configured, when coupled with the second coupling device, to rotatably mount the target tube cover about the axis of rotation. This facilitates robust signal transmission within the sputtering device, e.g., into a target tube of the sputtering device. Example 83 is configured according to Example 82, wherein the bearing device provides two bearing points for rotatably mounting the target tube, of which: at least one first bearing point is configured as an end block; and / or a second bearing point is configured, coupled with the second coupling device, to rotatably mount the target tube cover about the axis of rotation, preferably facing the second side of the carrier. This facilitates robust signal transmission within the sputtering device, e.g.,into a target tube of the sputtering device. Example 84 is configured according to Example 82 or 83, wherein the bearing device, preferably the second bearing point, has at least one third coil which, when the second coupling device is coupled to the bearing device, is inductively coupled to the at least one second coil or at least faces the second side of the carrier. This facilitates robust signal transmission within the sputtering device, e.g., into a target tube of the sputtering device.

[0101] Example 85 is configured according to one of Examples 82 to 84, further comprising: the magnet system carrier, which has at least a fourth coil which, when the magnet system carrier is coupled to the target tube cover, preferably the third coupling device, is inductively coupled to the at least one first coil or is at least facing the first side of the carrier; preferably a magnet system provided by means of the magnet system carrier, which has several pole bodies and several actuators, wherein the server is electrically coupled to the fourth coil and configured to determine (e.g., store) server data based on a signal from the fourth coil. The server data represents, for example, a target position of at least one of the several pole bodies relative to the magnet system carrier. This facilitates robust signal transmission within the sputtering device, e.g.into a target tube of the sputtering device.

[0102] Example 86 is set up as a sputtering device according to one of Examples 82 to 85, wherein the bearing device, preferably the end block, is set up to supply electrical power and / or a cooling fluid to the target and / or to transmit a rotary motion to the target or at least to the support.

[0103] Example 87 is configured according to one of Examples 62 to 86, further comprising: a target-external signal source configured to provide at least one signal and / or to transmit it by means of the multiple coils, wherein the bearing device (e.g. one or more than one coil thereof) is preferably configured to couple the at least one signal into the coils of the target tube cover.

[0104] Example 88 (e.g., a vacuum arrangement) is configured according to one of Examples 62 to 87 and further comprises: a vacuum chamber in which the axis of rotation is arranged; and preferably a transport device for transporting a substrate along a transport direction which is, for example, transverse to the axis of rotation. Example 89 is configured according to one of Examples 62 to 88, wherein the multiple coils comprise one or more than one coil pair, each coil pair comprising one coil of the at least one first coil and one coil of the at least one second coil, which are electrically conductive (e.g., by means of the electrical feedthrough). HA 2172 DE

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[0106] (e.g., resistively) are coupled to each other; wherein, for example, the coils of each coil pair are identical in their geometry, number of turns and / or inductance; and / or wherein, for example, the coil pairs (e.g., their coils) differ from each other in their geometry, number of turns and / or inductance.

[0107] Example 90 is set up according to one of Examples 62 to 89, wherein the first coupling device, the second coupling device and / or the third coupling device are arranged concentrically to the axis of rotation and / or to each other (or have at least one contour concentric to it).

[0108] Example 91 is configured according to one of Examples 62 to 90, wherein the at least one signal comprises several signals, preferably a power signal for transmitting electrical power (e.g., by means of a power signal) and / or a data signal for controlling an actuator, which differ from one another (e.g., frequency and / or electrical power) and / or are transmitted galvanically separated from one another by means of the several coils. This improves the signal quality, potentially at the expense of the total electrical power output. However, to reduce the total power output, the power signal and data signal can also be transmitted galvanically interacting with each other (e.g., superimposed), for example, if their interaction is acceptable for the signal quality.

[0109] Example 92 is set up according to one of Examples 62 to 91, wherein the at least one signal is a data signal which is generated according to the network communication protocol and / or is addressed to (or at least transmitted to) the server.

[0110] Example 93 is set up according to one of Examples 1 to 92, wherein the magnet system has two spatially separated segments, each of which has one segment comprising the actuator and at least one of the pole bodies for each of the two actuators.

[0111] Example 94 is configured according to one of Examples 1 through 93, where the second message is repeatedly (e.g., regularly) generated by the client and / or according to an (e.g., time-based) update scheme implemented by the client. The update scheme can, for example, be configured to trigger the generation of the second message. The update scheme specifies, for example, a time rule according to which the second message is generated. An exemplary implementation of the time rule is an invariant time interval (e.g., implemented using a timer or a clock) or a variable time interval.

[0112] Example 95 is set up according to one of Examples 1 to 94, where (for example, according to the communication protocol) the second message is generated independently (e.g., unlinked) from the information provided to the client by the server. For example, the timing sequence can be independent.

[0113] Example 96 is set up according to one of Examples 1 to 95, wherein the communication protocol is set up to not send any acknowledgment from the client to the server, for example regarding receipt of the information from the server.

[0114] Example 97 is set up according to one of Examples 1 to 96, with the communication protocol configured not to perform a handshake between the server and the client.

[0115] In this regard, it should be noted that the term "handshake" in the context of communication technology refers to a multi-stage process in which two communication participants exchange various parameters of the HA 2172 DE

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[0117] Communication (also referred to as communication parameters) involves negotiating and agreeing on how data transmission should occur. As a first step, the communicating parties send initial signals to indicate their readiness to establish a connection. These signals contain information about the communication protocols and parameters. As a second step, a communicating party sends an acknowledgment signal (ACK) to confirm that the received information has been understood and that it agrees to proceed with the exchanged parameters. Such a handshake can be omitted depending on the specific implementation.

[0118] Example 98 is configured according to one of Examples 1 to 97, wherein the client is configured to determine an actual state of the spatial position, preferably by means of a sensor of the magnetic system, wherein the control is based on the actual state of the spatial position.

[0119] Example 99 is configured according to one of Examples 1 to 98 and further comprises a control element (e.g., implemented via the client and / or the server) which is configured to determine a (e.g., corrected) target state of the position based on an actual state of the position, wherein the control is based on the target state of the spatial position. The control element can, for example, be configured to update the information (e.g., the target state) based on the information about the spatial position (e.g., actual position), which preferably results from the control, and / or based on a target-externally provided specification. The control element can, for example, be implemented partially or completely via the server.

[0120] Example 100 is configured according to one of Examples 1 to 99, further comprising several sensors, which preferably have one or more than one (e.g. optical) sensor (e.g. position encoder) per actuator of the several actuators and / or one or more than one (e.g. optical) sensor (e.g. distance sensor) per pole body of the several pole bodies, each of which is configured to detect an actual state of the position.

[0121] Example 101 is configured according to one of Examples 1 to 100, furthermore having for one or more than one (e.g. each) pole body of the several pole bodies a (e.g. optical) sensor (e.g. distance sensor) which is configured to detect an actual state of the position (e.g. of the pole body), e.g. by detecting a distance of the pole body from the sensor or another reference.

[0122] Example 102 is set up according to one of Examples 1 to 101, wherein the actual state of the position is determined by sensors, e.g. by means of several sensors, of which a first sensor is set up to detect an actual state of the actuator and a second sensor is set up to detect an actual distance of the pole body (e.g. from the second sensor).

[0123] Example 103 is set up according to one of Examples 1 to 102, wherein the position encoder is an incremental encoder, a resolver (also called a coordinate converter), a potentiometer encoder or an absolute encoder.

[0124] Example 104 is set up according to one of Examples 1 to 103, where the client-server communication protocol is a sessionless communication protocol, e.g., a stateless communication protocol. This saves server resources and thus simplifies the implementation.

[0125] Example 105 is set up according to one of Examples 1 to 104, wherein the target coupling is rotatably mounted about a pivot axis and / or coupled to the magnetic system (e.g., supported by it). HA 2172 DE

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[0127] Example 106 is set up according to one of Examples 1 to 105, wherein the bearing device has a compact end block and a counter bearing, the target coupling being provided by means of the counter bearing. This facilitates communication.

[0128] Example 107 is configured according to one of Examples 1 to 106, wherein the magnetic system extends longitudinally along the axis of rotation and / or wherein the multiple pole bodies are arranged one behind the other along the axis of rotation. Example 108 is configured according to one of Examples 1 to 107, further comprising a communication link (e.g., provided by means of the communication interface, signal switching device, and / or one or more electrical lines) which couples the clients together (e.g., by means of which the information is requested) and / or which is configured to transmit the request for information from the server (e.g., to transmit a message configured for this purpose in accordance with the client-server communication protocol). The communication link is, for example, located near an end section of the magnetic system and / or the target coupling.The communication link is, for example, coupled to the target coupling and / or extends through the target coupling. The communication link can, for example, implement the fieldbus.

[0129] Example 109 is set up according to one of Examples 1 to 108, wherein the request for information from the server involves transmitting an identifier associated with the client (e.g., referencing the client and / or a polarity associated with it) to the server. The identifier can, for example, be a communication identifier (e.g., an address according to the communication protocol).

[0130] Example 110 is set up according to one of Examples 1 to 109, wherein the request for information from the server involves transmitting a state (e.g., current state) of the magnetic system and / or the spatial position to the server.

[0131] Example 111 is configured according to one of Examples 1 to 110, wherein the request for information from the server involves requesting information about a state (e.g., target state) of the magnetic system and / or its spatial position. The requested information can represent the state (e.g., target state) of the magnetic system and / or its spatial position, e.g., expressed in coordinates or a numerical equivalent thereof.

[0132] Example 112 is set up according to one of Examples 1 to 111, where the state (e.g. actual state and / or target state) of the magnetic system represents the spatial position, e.g. expressed in coordinates or a numerical equivalent thereof.

[0133] Example 113 is configured according to one of Examples 1 to 112, where the request for information from the server (e.g., time-controlled) is initiated according to a request scheme that is based, for example, on an identifier assigned to the client (e.g., referencing the client and / or a pole body assigned to it) and / or is determined (e.g., negotiated) by the actuators (e.g., by means of a handshake). HA 2172 DE

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[0135] Example 114 is set up according to one of Examples 1 to 113, wherein the request for information from the server involves requesting information managed by the server (e.g., target state), e.g., about the magnetic system and / or the spatial position.

[0136] Example 115 is set up according to one of Examples 1 to 114, wherein the request for information for each actuator is addressed to the same server; and / or wherein the actuators are assigned (e.g., only) the server. An exemplary implementation of this can be achieved, for example, using the communication protocol, which specifies the same server address for each actuator.

[0137] Example 116 is configured according to one of Examples 1 to 115, comprising multiple clients, each of which has a client configured to receive (e.g., ignore) a request for information from the server originating from an additional client of the multiple clients (e.g., according to a client-server communication protocol) and / or a response from the server (e.g., via the communication link and / or the signaling device).

[0138] Example 117 is configured according to one of Examples 1 to 116, wherein the client is configured to determine whether a message received from the server contains a response to the request for information from the client and / or is addressed to the client, and preferably to ignore the message otherwise.

[0139] They show

[0140] Figure 1 A shows a sputtering device according to various embodiments in a schematic side view or cross-sectional view;

[0141] Figure 1B shows a signal transmission device according to various embodiments in a schematic side view or cross-sectional view;

[0142] Figure 2A shows a sputtering device according to various embodiments in a schematic assembly diagram;

[0143] Figure 2B shows a vacuum arrangement according to various embodiments in a schematic cross-sectional view;

[0144] Figure 3 shows a sputtering device according to various embodiments in a schematic assembly diagram;

[0145] Figures 4A and 4B each show a magnet system according to different embodiments in different schematic views;

[0146] Figure 5 shows the communication according to different embodiments in a schematic communication diagram;

[0147] Figure 6A shows a magnetic system according to various embodiments in a schematic data flow diagram; and

[0148] Figure 6B shows a magnetic system according to various embodiments in a schematic cross-sectional view.

[0149] The following detailed description refers to the accompanying drawings, which form part thereof and in which specific embodiments of the invention are shown for illustration. In this respect, directional terminology such as "top", "bottom", "front", HA 2172 DE

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[0151] The terms "rear," "front," "back," etc., are used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves for illustration and is in no way restrictive. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention. It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be understood in a restrictive sense, and the scope of protection of the present invention is defined by the appended claims.

[0152] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0153] Depending on the specific embodiment, the term "coupled" or "coupling" can be understood as a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), whether direct or indirect. Several elements can be coupled along an interaction chain, along which the interaction can be exchanged. For example, two coupled elements can exchange an interaction, such as a mechanical, hydrostatic, thermal, and / or electrical interaction, like an electrical signal. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) can involve fluid coupling. A coupling of several electrical components (e.g., circuits, communication interfaces, processors, etc.) can also be characterized by a connection between them.The coupling can be characterized by being communicatively coupled, enabling the exchange of information (or at least a signal). According to various embodiments, "coupled" can be understood as a mechanical (e.g., physical) coupling, for example, by means of direct physical contact. A coupling can be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

[0154] The expression "at least one", "at least a", "at least one", and the like, when referring to an element, can be understood as denoting exactly one element or as denoting multiple elements. The "at least one" element can, for example, be exactly one element or multiple elements (e.g., two, three, or more). The "at least one" element can, for example, comprise one or more than one element, or one or more than a group of elements.

[0155] This refers to electrical components and their coupling to one another, whereby it can be understood that this coupling can be communicative. The coupling can be provided, for example, by means of a network, at least one electrical line, resistive coupling, inductive coupling, and / or capacitive coupling. The (e.g., communicative) coupling of HA 2172 DE

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[0157] The components provide a signal path between them, along which at least one signal, such as a data signal, can be exchanged. A resistive coupling can be understood as electrically conductive for direct current (DC). The term "actuator" (e.g., comprising an actuator, also called a motor) can be understood as a transducer designed to influence the state of an entity, such as a process (e.g., a coating process) or a device, in response to a control signal. The actuator can convert a control signal supplied to it (by means of which the control is effected) into mechanical movements and / or changes in physical quantities such as pressure or temperature.An electromechanical (also called electromotive) actuator can, for example, be configured to convert electrical energy into mechanical energy (e.g., through movement) in response to a control signal. Examples of actuator components include: an electric motor as the actuator, a reciprocating piston as the motor, or a drive device of another type as the actuator; a communication interface for receiving the control signal; a processor for processing the control signal; or similar components.

[0158] Regarding the layer-forming process, this section uses sputtering as an example. The term "sputtering" refers to the atomization of a material (also called coating material or target material) using a plasma. The atomized components of the coating material (e.g., individual atoms and / or ions) are separated from one another and can, for example, be deposited elsewhere to form a layer. Sputtering can be performed using a sputtering device, which can have one or more magnet systems (then also called a magnetron). The coating material can be provided by a sputtering target (also referred to simply as a target), which can be, for example, tubular (then also called a tube target or target tube) or plate-shaped (then also called a plate target or planar target).To generate the plasma, a voltage (also called sputtering voltage) can be applied to the sputtering target (also referred to simply as the target), so that the sputtering target operates as the cathode. Even though the sputtering voltage is an alternating voltage, the term cathode is often retained.

[0159] For sputtering, the sputtering target can be arranged in a vacuum processing chamber (also referred to simply as a vacuum chamber), allowing sputtering to take place in a vacuum. The environmental conditions (the process parameters) within the vacuum processing chamber (e.g., process pressure, temperature, gas composition, etc.) can be set or controlled during sputtering. For example, a working gas, referred to as the plasma-forming gas or plasma-forming gas mixture, can be provided within the vacuum processing chamber. The vacuum processing chamber can be configured to be airtight, dustproof, and / or vacuum-tight, allowing a gas atmosphere with a predefined composition (also referred to as the working atmosphere) or a predefined pressure (also referred to as the working pressure or process pressure) to be maintained within the chamber (e.g., according to a setpoint).The vacuum chamber can be set up such that it contains a vacuum (i.e., a pressure less than 0.3 bar) and / or a pressure in a range from approximately 1 mbar to approximately 10 mbar. 3 mbar (in other words, fine vacuum) or less can be provided, e.g., an HA 2172 DE

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[0161] Pressure in a range of approximately 10 3 mbar to approximately 10 7 mbar (in other words, high vacuum) or less can be provided, e.g., a pressure of less than high vacuum, e.g., less than approximately 10 7 mbar (in other words, ultra-high vacuum) can be provided or made available. The lowest pressure achievable in the vacuum chamber is also called the residual vacuum. It can be understood that what is described here for sputtering can apply by analogy to any other coating process, e.g., physical vapor deposition.

[0162] To effectively atomize the target material (also known as sputtering), the target material can be rotated around the magnet system. For this purpose, the target material can be arranged in a tube shape, a so-called tube target, with the magnet system located inside the tube target, allowing the tube target to rotate around the magnet system. The tube target can, for example, consist of a tube on which the target material is attached as a layer to an outer surface of the tube, partially covering the surface. Alternatively, the tube target can also be formed entirely from the target material itself.

[0163] The pipe target can be rotatably mounted at only one or two opposing end sections by means of a target bearing device, the bearing device being able to provide the pipe target with power (e.g., electrical power and cooling fluid).

[0164] According to various embodiments, a storage device can be configured to hold (e.g., guide and / or position) one or more components. For example, the storage device can have one or more bearings per component for holding (e.g., guide and / or position) the component. Each bearing of the storage device can be configured to provide the component with one or more degrees of freedom (e.g., translational or rotational) according to which the component can be moved. Examples of bearings include: radial bearings, thrust bearings, radial-axial bearings, and linear bearings (also called linear guides). Each linear bearing can, for example, provide the component with exactly one translational degree of freedom.

[0165] A degree of freedom can be, for example, a translational degree of freedom or a rotational degree of freedom. Each degree of freedom can be associated with an axis to which it is referenced. For example, a translational degree of freedom can allow linear motion (i.e., displacement) along the axis to which it is assigned. A rotational degree of freedom can, for example, allow rotational motion (i.e., rotation) around the axis to which it is assigned. Among other things, this refers to a bearing device (also called a target bearing device) which may have one or more end blocks for supporting a pipe target.

[0166] If the target storage device has two end blocks, one of the end blocks (the so-called drive end block) can have a drive train coupled to a drive (also called the target drive) for rotating the tubular target (also called the target tube); and the other end block (the so-called media end block) can have a fluid line for supplying and removing cooling fluid (e.g., a water-based mixture) that can be passed through the target. The two end blocks are mounted, for example, suspended from a chamber ceiling (i.e., a chamber cover). HA 2172 DE

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[0168] However, a single end block (also called a compact end block) can also be used, which incorporates the drive train, which may be coupled to a drive device, and the fluid line, thus providing the combined functions of a drive end block and a media end block. The side of the pipe target opposite the compact end block can, for example, cantilever freely (i.e., hang freely), a configuration known as cantilever. In a cantilever configuration, the compact end block can be mounted on a side wall of the vacuum chamber through which the axis of rotation of the pipe target extends. Alternatively, the side of the pipe target opposite the compact end block can be supported by a bearing block (figuratively speaking, a counter-bearing), a configuration known as a bearing block. The bearing block can also be provided by a passive end block.of an end block which neither exchanges energy nor material with the pipe target, but only supports it.

[0169] In general, this can be understood as the movement of an object, e.g., setting the object (e.g., a support) into a rotary motion (also referred to as rotation), which can be achieved by means of a drive device, for example, by the drive device generating a torque that is transmitted to the object. A drive device (also referred to as a drive) can be understood here as a converter designed to convert electrical energy into mechanical energy. A drive device can, for example, consist of an electric motor (e.g., with electrical coils), such as a stepper motor. A drive device can, for example, consist of a compressor and a piston coupled to it. A drive device can, for example, have one or more piezoelectric elements. For example, the drive device can be configured to output the mechanical energy by means of a torque or a rotary motion.A magnetic system has several pole bodies, e.g., magnets (e.g., permanent magnets). The term "pole body" here refers to a body that contains or is formed from a magnetic material (also called magnetic material). The pole body can, for example, be adjacent to or part of a magnetic pole. The magnetic material can be, for example, ferromagnetic or ferrimagnetic. The magnetic material can be hard magnetic material and / or soft magnetic material, or be formed from these. The magnetic material can exhibit magnetic polarization, e.g., magnetization, thus providing a dipole.

[0170] A magnet can be made of a ferromagnetic material, such as a chemical compound (e.g., an alloy) or ferrite. The chemical compound can contain or be composed of a rare-earth metal (such as neodymium, samarium, praseodymium, dysprosium, terbium, and / or gadolinium), iron, cobalt, and / or nickel. For example, a magnet can contain or be composed of at least neodymium, iron, and / or boron, such as a chemical compound thereof. Alternatively or additionally, a magnet can contain or be composed of at least aluminum, nickel, and / or cobalt, such as a chemical compound thereof. Alternatively or additionally, a magnet can contain or be composed of at least samarium and / or cobalt, such as a chemical compound thereof. A magnet can have a coercive field strength greater than approximately 500 kiloamperes per meter (kA / m), for example, greater than approximately 1000 kA / m.

[0171] The pole bodies, e.g., magnets (e.g., permanent magnets), of a magnetic system can be arranged one behind the other in a row (magnetic array). A magnetic system can have several (e.g., at least three) magnet arrays. HA 2172 DE

[0172] 22. Each pair of magnet rows can differ in at least one (i.e., one or more than one) directional component of their magnetization direction (e.g., adjacent magnet rows) and / or can define a forward or backward section of the plasma region.

[0173] Each magnetic pole can, for example, have several pole bodies, e.g., magnets, arranged in a row (then also referred to as a series of magnets or magnetic array), each of which is magnetized or exhibits magnetization. Each magnetic array can, for example, have at least 10 (e.g., at least 100) pole bodies, e.g., magnets, per meter. Each magnetic pole can have one or more magnetic arrays. For example, three magnetic arrays arranged between the ends of the magnetic system can essentially provide the central region of the magnetic system (visually, one array forms the inner pole, and one magnetic array on each side forms the outer pole).

[0174] The hard magnetic material can, for example, be part of one or more permanent magnets (also called permanent magnets) or form their entirety. A permanent magnet (also called a permanent magnet pole body) can be understood as a body made of a hard magnetic material. The hard magnetic material can, for example, consist of a chemical compound and / or an alloy.

[0175] The hard magnetic material can, for example, consist of or be composed of neodymium-iron-boron (I₂Fe₂B) or samarium-cobalt (SmCo₃ and S₂TI₂CO₃). More generally, the hard magnetic material (e.g., any permanent magnet) can consist of or be composed of a rare-earth magnet material (such as neodymium-iron-boron (NdFeB) or samarium-cobalt (SmCo)), a ferrite magnet material (e.g., a hard ferrite magnet material), a bismanol magnet material, and / or an aluminum-nickel-cobalt magnet material.

[0176] The magnetic system may also include a support (also called a pole support) to which the magnets of the magnetic system are attached. The pole support may, for example, be soft magnetic or at least contain or consist of a soft magnetic material (then also called a backplate).

[0177] A soft magnetic material can have a coercive field strength of less than approximately 500 kA / m, e.g., less than approximately 100 kA / m, e.g., less than approximately 10 kA / m, e.g., less than approximately 1 kA / m. The soft magnetic material can be an alloy containing iron, nickel, and / or cobalt, steel, a powder material, and / or a soft ferrite (e.g., containing nickel-tin and / or manganese-tin), or be formed from these materials.

[0178] The term "non-magnetic" can be understood as essentially magnetically neutral, e.g., also slightly paramagnetic or diamagnetic. The term "non-magnetic" can, for example, be understood as having a magnetic permeability of essentially 1, i.e., in the range of approximately 0.9 to approximately 1.1. Examples of non-magnetic materials include: graphite, aluminum, platinum, copper, non-magnetic stainless steel, and ceramics (e.g., oxides).

[0179] Generally, the outer and inner poles can be separated by a distance and / or differ in their magnetization direction and / or in the number of magnets they contain. In the simplest case, the magnetization directions of the outer and inner poles are exactly opposite, e.g., antiparallel. HA 2172 DE

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[0181] In more complex implementations, these can also be at an angle to each other, e.g., including an angle (also referred to as magnetization deviation). For example, the magnetization deviation can be approximately 90° or more (e.g., 120° or more, e.g., 150° or more, e.g., 160° or more, e.g., 170° or more, e.g., approximately 180°).

[0182] In an exemplary implementation, the inner pole can be magnetized towards and / or away from a (e.g., magnetic) pole carrier, and the outer pole can be magnetized away from the (e.g., magnetic) pole carrier and / or towards the target material. Alternatively, the outer pole can be magnetized towards and / or away from the (e.g., magnetic) pole carrier, and the inner pole can be magnetized away from the (e.g., magnetic) pole carrier and / or towards the target material. In an exemplary implementation, the outer and inner poles, e.g., their magnetization directions, can be configured (e.g., aligned and / or arranged) such that they (optionally together with the surrounding magnetic material) provide a tunnel-like to parallel magnetic field line pattern to the target surface.

[0183] The magnetic system can optionally comprise several segments arranged in series and / or spatially separated (e.g., multipole) (also referred to as magnetic system segments or magnetic system groups), each of which, for example, includes a segment of the pole support and several pole bodies coupled to the pole support. Two of the magnetic system segments (also referred to as reversing segments or end pieces) are arranged at the end faces (visually at the magnetic system ends) of the magnetic system. One or more optional magnetic system segments (also referred to as center pieces) are arranged between the end pieces. This description refers to a magnetic system with multiple magnetic system segments by way of example, but the description provided here can also apply to an unsegmented magnetic system, and vice versa.

[0184] The magnetic system can optionally include a support system, which can provide a (e.g., non-magnetic) magnetic system support, a (e.g., non-magnetic) magnetic system housing, a (e.g., segmented and / or magnetic) pole support (e.g., backplate), and / or one or more supports with other functions. The pole support couples the pole bodies together, the magnetic system support couples, for example, several segments (if present) of the pole support together, and the magnetic system housing has a cavity in which the pole bodies are arranged. One exemplary implementation of the support system has a hollow (e.g., tubular) magnetic system support that is coupled to a fluid line of the bearing device and which couples the actuators together. Another implementation of the support system has a hollow (e.g.,A tubular magnet system housing is constructed, in which the actuators and a beam-shaped magnet system support are arranged. The actuators are supported on the magnet system housing by means of this support. Optionally, the magnet system housing can have a fluid line that is coupled to the fluid line of the bearing device. The pole support and / or the magnet system can have a length (extent along the axis of rotation) in a range of approximately 1 m to approximately 6 m, e.g., in a range of approximately 2 m to approximately 5 m.

[0185] The term "enclosure" (also referred to as housing) describes a hollow body that has a cavity for holding an object. As a component of the magnetic system, the enclosure (then also referred to as HA 2172 DE)

[0186] 24

[0187] The enclosure (referred to as a magnetic system housing) must be at least partially non-magnetic, e.g., made of plastic and / or stainless steel. The enclosure can enclose the cavity on four or more sides (e.g., five or more sides, e.g., six sides). The enclosure may have, for example, one or more pairs of walls, the walls of which enclose opposite sides of the cavity. The enclosure may have one or more end caps, which provide one of the walls. An end cap may, for example, be designed to be attached to the rest of the enclosure. In the case of an elongated enclosure, the walls opposite each other along its length and arranged end-to-end may be provided by means of an end cap. The end cap may, for example, be designed to be attached to the rest of the enclosure.The term "encapsulation" refers to a fluid-tight enclosure, i.e., an enclosure that inhibits (e.g., blocks) fluid exchange between the cavity and the environment of the encapsulation.

[0188] The encapsulation can, for example, include a sealing device that seals a gap in the enclosure. Exemplary implementations of the sealing device include: an adhesive seam, a sealing tape, a sealing flange, etc. For example, a positive fit of the enclosure can be fluid-tightly sealed by means of a sealing device to form an encapsulation.

[0189] The term "monolithic" can be understood as a materially bonded connection of two sections that, for example, match in their chemical composition (or at least in their material type). If an object is monolithic, it can be made from a single piece.

[0190] The term "communication" here can refer, depending on the context, to an electrical signal and / or to data (also referred to as information) that is transmitted, for example, by means of the electrical signal (then also referred to as the communication signal), preferably along a signal path. Examples of communication processes include: generating the electrical signal (for example, by means of a signal generator), transmitting the electrical signal; receiving the electrical signal; and / or processing the electrical signal. Communication, e.g., embedding data (data transmission) into the signal (then also referred to as the data signal), can take place according to various embodiments and a communication protocol.

[0191] A communication protocol can be understood as an agreement governing communication between two or more parties. In its simplest form, a communication protocol can be defined as a set of rules that define the syntax, semantics, and synchronization of the communication. The communication protocol(s) used (e.g., one or more network protocols) can be chosen arbitrarily and can (but do not have to) be configured according to the OSI (Open Systems Interconnect) reference model. Any protocols can also be used within the respective protocol layers, which are grouped into a stack (also known as a communication protocol stack). For example, protocols such as Bluetooth or other wireless communication protocols can be used.

[0192] Communication can take place, for example, using one or more messages (also known as message-based communication or packet-based communication). For example, the message to an HA 2172 DE

[0193] 25

[0194] The recipient must be addressed insofar as this is defined by the communication protocol according to which the message is generated. For example, message-based communication may involve generating and / or transmitting a message containing data, such as by means of an electrical signal. The message and / or signal can be generated and / or transmitted according to the communication protocol. The communication protocol may optionally be configured for packet-based communication (also referred to as message-based communication). Each message can contain at least one frame and embedded data (also referred to as payload) to be transmitted via the message.

[0195] As an exemplary implementation of communication, reference is made here to the communication between server and client (also referred to as client-server architecture), which takes place according to the so-called client-server communication protocol and / or is mediated by a fieldbus communication network (and components thereof).

[0196] The client-server communication protocol (also known as "CS-KP") defines the rules and mechanisms according to which communication (also known as information exchange) takes place between the client and the server. Among other things, the CS-KP specifies how the client's request and the corresponding server response are structured and formatted, how data packets are formed, how communication is initiated and terminated, how the receipt of a message is acknowledged, and / or how session information is managed to reliably match requests and responses and ensure reliable communication.

[0197] From various perspectives, a fieldbus communication network can be understood as a network for real-time communication, for example, via a message-based communication protocol. The fieldbus communication network can be implemented in a daisy-chain, star, ring, branch, and / or tree topology, or a combination thereof. The order and priority of numerous messages sent over the fieldbus communication network are defined by the fieldbus communication protocol. Such a fieldbus communication protocol can be configured for distributed real-time control, for example, as standardized by the International Electrotechnical Commission (IEC) 61158 (titled "Digital data communications for measurement and control - Fieldbus for use in industrial control systems," for example, in the version of May 2, 2017).The fieldbus communication protocol can be configured for packet-based communication (also known as message-based communication). Each message can contain at least one frame and embedded data to be transmitted. Packet-based communication can be implemented, for example, using a data signal.

[0198] If the CS-KP is superimposed on a fieldbus communication protocol, a message to be exchanged as a data packet between server and client (also referred to as a CS message) can be structured according to the fieldbus communication protocol. For example, the data packet can be broken down into several data packet components, each of which is transmitted as payload data of the message generated according to the fieldbus communication network (then also referred to as a fieldbus message). This makes it easier to implement more complex client-server communication despite a limited amount of payload data. On the receiver side, payload data from several fieldbus messages is combined to form HA 2172 DE.

[0199] 26. The data packet is reassembled so that the original CS message is preserved. The CS-KP specifies in the payload which fieldbus message contains which part of the CS message.

[0200] An exemplary implementation of the fieldbus network is the so-called CAN (Controller Area Network, also known as CAN bus). What is described here for CAN as an exemplary implementation of the fieldbus network can be applied analogously to any other implementation of the fieldbus network or a network of another type. This also applies analogously to the components configured according to CAN. CAN is internationally standardized in ISO 11898-1 and defines at least layer 2 (i.e., the data link layer) according to the OSI reference model. This applies analogously to the CAN bus, which provides a serial bus system as an exemplary representative of fieldbuses. A bus generally refers to a system for data transmission between multiple participants via a shared transmission path.

[0201] The term electrical "signal" here refers to a time-dependent electrical quantity, examples of which include: electric current, electric voltage, and / or one or more properties thereof. Examples of these properties include: a phase shift (e.g., between voltage and current) and / or relative to a reference, a frequency, duty cycle, DC, peak value, etc. Various implementations of the electrical signal are designed to transmit electrical power (then also referred to as a power signal) and / or data (then also referred to as a data signal). In this context, it should be understood that the transmission of data by means of a data signal refers to logical data transmission as part of communication, which may also involve power transmission. The data signal can be generated and / or processed according to a communication protocol, e.g.,a network communication protocol.

[0202] In this context, the term "signal path" refers to the physical components through which the signal is transmitted, e.g., through which communication takes place and / or power is delivered. The signal path may, for example, include galvanically isolated components that are inductively and / or capacitively coupled, i.e., designed to exchange the signal by means of an inductive and / or capacitive interaction.

[0203] This section uses the example of a communication signal (e.g., a data signal) and a power signal that are generated and / or transmitted separately. This improves data transmission and ensures robust operation. It can be understood that the principles described here can apply analogously to a communication signal and a power signal that are generated and / or transmitted together, e.g., superimposed. For instance, the electrical power to be transmitted and the data to be transmitted can be divided into different frequency ranges, which are then transmitted via the same coil.

[0204] In an exemplary implementation, the power LL of the power signal can be greater than the power Lo of the data signal. For example, the following relation may approximately hold: LL > 10 k-Lo, where k>0, e.g., k>1, e.g., k>2, e.g., k>3, e.g., k>4, e.g., k>5, e.g., k>6. Alternatively or additionally, the frequency FL of the power signal can be lower than the frequency FD of the data signal. For example, the following relation can be approximately satisfied: FD > 10 L FL, where l>0, e.g. I>1, e.g. I>2, e.g. I>3, e.g. I>4, e.g. I>5, e.g. I>6, can be. HA 2172 DE

[0205] 27

[0206] In general, an electrical signal (e.g., the data signal and / or the power signal) can be an analog signal or a digital signal. For example, a frequency FL geared towards power transmission will differ from a frequency FD geared towards data transmission.

[0207] A control signal (e.g., configured as a data signal) can be configured to control a receiver, such as an actuator or at least one circuit (e.g., of the actuator), such as its processor. The control signal can also be configured to transmit data for controlling the actuator (also referred to as control data). Examples of control data include: one or more instructions, one or more values ​​(e.g., a setpoint or at least a change in the setpoint; and / or an actual value), one or more operating parameters, and the like.

[0208] The actual state of an entity (e.g., a device, system, or process) can be understood as its current or sensorily detectable state. The desired state of the entity can be understood as the target state, i.e., a specification. Control can be understood as the intentional influencing of the entity's current state (also referred to as the actual state). The current state can be changed according to the specification (also referred to as the target state), for example, by altering one or more operating parameters (then also referred to as manipulated variables) of the entity, e.g., using an actuator. Regulation can be understood as control, with the additional step of counteracting changes in state caused by disturbances. For this purpose, the actual state is compared with the target state, and the entity is influenced accordingly.By means of an actuator, the deviation of the actual state from the target state is minimized. In contrast to purely forward-directed sequential control, this control system implements a continuous influence of the output variable on the input variable, which is achieved through the so-called control loop (also known as feedback or closed-loop control). In other words, this means that regulation can be used as an alternative or additional to control (or actuation), or alternatively or additionally to control.

[0209] In this context, an assembly device is understood to be a device designed for assembly, for example, for assembly onto a complementary assembly device (also referred to as a counter-assembly device). During assembly, several components are connected to one another (e.g., rigidly) using their respective assembly devices. Assembly can be (e.g., exclusively) positive-locking and / or detachable. The assembly device preferably has a (e.g., planar) mounting surface which, during assembly, rests against a complementary mounting surface of the counter-assembly device. The assembly device can, for example, have one or more (e.g., integral) mounting profiles (e.g.,

[0210] The mounting profile must have a positive locking profile, which is provided, for example, by means of a feature (e.g., a projection or recess) on the mounting device. Examples of the mounting profile include: a thread, a groove (e.g., for keyway retention and / or dovetail groove), a locking lug, a bayonet fitting, a pin, etc. Examples of the feature include: an opening (e.g., a through-hole and / or threaded hole), a bolt (e.g., a threaded bolt).

[0211] In this context, a tenon is understood to be a (for example, cylindrical or cuboid) extension of a component designed to connect it to another component. For example, the tenon can be a stepped HA 2172 DE

[0212] 28

[0213] The end section is provided. The component complementary to the tenon can, for example, have a (e.g., groove-shaped) gap into which the tenon fits (e.g., frictionally). In this case, the tenon can also be referred to as a bung (also called a bung), especially if it closes a complementary bung hole.

[0214] An exemplary implementation of the mounting device is configured as a flange, e.g., a vacuum flange. The flange can be configured for rigid and / or detachable connection to another flange. Two connected flanges form a so-called flange connection. The flange can have a mounting surface (e.g., planar). Optionally, the flange can be penetrated by an opening (also referred to as a flange opening) which is surrounded by the mounting surface, e.g., along a closed path. The flange connection can be configured so that two flanges are arranged with their mounting surfaces facing each other, e.g., in contact. The flange opening of a vacuum chamber housing can open into the interior of the vacuum chamber housing, e.g., adjacent to it. Optionally, the flange can have a groove that surrounds the flange opening, e.g.,The flange opening is circumferentially located along the closed path and / or adjacent to the mounting surface. A seal, such as a metal or plastic gasket, can optionally be accommodated in the groove. Optionally, the flange can have a projection that extends to the mounting surface. For example, the mounting surface can protrude. An exemplary implementation of the mounting device is configured as a coupling device. A coupling device is designed to connect two components (e.g., shafts), one or more of which are rotatably mounted, to each other, for example, by means of a rigid, elastic, movable, and / or detachable connection between the two components. The coupling device is specifically designed to transmit a torque between the two components, for example, by setting them into a rotary motion.An exemplary implementation of the coupling device may, for example, include a clamping device, teeth, or similar for connecting the two components.

[0215] According to various embodiments, a vacuum chamber can be provided by means of a chamber housing in which one or more chambers are provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g., a vacuum pump arrangement (e.g., gas-conducting), to provide a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure when the gas is pumped out. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can enable the removal of some of the gas from the interior of the processing chamber, e.g., from the processing area. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be configured as a vacuum chamber housing.A coating chamber can be set up as a vacuum chamber.

[0216] The term "vacuum pressure" here refers to a negative pressure in the vacuum range (i.e., a pressure of less than 0.3 bar), e.g., a pressure in the range of approximately 10 mbar to approximately 1 mbar (in other words HA 2172 DE).

[0217] 29

[0218] rough vacuum) can be provided or less, e.g. a pressure in a range from approximately 1 mbar to approximately 10 3 mbar (in other words, fine vacuum) or less, e.g., a pressure in a range of approximately 10‰. 3 mbar to approximately 10 7 mbar (in other words, high vacuum) or less, e.g., a pressure of less than high vacuum, e.g., less than approximately 10 7 mbar.

[0219] This section refers to various instances of communication, data processing, and signal processing, which are conceptually distinguished from one another according to their mode of operation, position in the communication chain, and / or their structure, such as "client," "server," control device, driver circuit, and communication interface. These instances (e.g., client or server) can generally be understood as any type of logic-implementing entity that can be provided, for example, by means of a processor or more complex circuitry, and / or can at least execute software stored in a storage medium, firmware, or a combination thereof, and can output communication signals (e.g., data signals) based on this software. The component can, for example, be configured using code segments (e.g., software) to control the operation of a system (e.g., its operating point).to control components of a machine or plant, e.g. at least its kinematic chain or magnetic system.

[0220] The term "processor" can be understood as any type of entity that allows the processing of data or signals. The data or signals can be processed, for example, according to at least one (i.e., one or more than one) specific function performed by the processor. A processor can be an analog circuit, a digital circuit, a mixed-signal circuit, a logic circuit, a microprocessor, a central processing unit (CPU), a graphics processing unit (GPU), a digital signal processor (DSP), a programmable gate array (FPGA), an integrated circuit, or any combination thereof. Any other implementation of the respective functions, which are described in more detail below, can also be understood as a processor or logic circuit.It is understood that one or more of the process steps described in detail herein can be executed (e.g., implemented) by a processor, through one or more specific functions performed by the processor.

[0221] This text refers specifically to the instances "client" and "server" as participants in a communication (also called communication participants), whereby the communication is mediated, for example, by a network to which the server and the client are connected (also referred to as client-server architecture). This client-server architecture is to be distinguished from the classic master-slave architecture, which is implemented at a lower communication layer (e.g., the data link layer or network layer) and restricts network access. Unlike the master-slave architecture, in the client-server architecture all clients are authorized (e.g., equally among themselves and / or with the server) to initiate communication with the server.The implementation of the client-server architecture takes place, for example, on an application-oriented communication layer (such as the session layer, the presentation layer, or the application layer). For instance, a client-server architecture can be implemented using a fieldbus, where all communication participants have equal rights. HA 2172 DE.

[0222] 30

[0223] The term "client" (also referred to as a control device client or simply client) can be understood as an instance configured to initiate communication with a server, for example, to request data (such as resources and / or information) from the server. The client initiates communication with the server and waits for the server's response, which may contain the requested data. The term "server" (also referred to as a control device server) can be understood as an instance configured to respond to communication from the client, for example, to provide the data requested by the client. Optionally, the client can be configured to output a control signal, which is used to actuate a device.

[0224] Client and server can be configured, for example, using code segments (e.g., software) that govern communication and data processing. The software might include a client application, executed by the client's processor, which uses the client's communication interface according to the Client-Server Communication Protocol (CS-KP) to initiate communication with the server. Correspondingly, the software might include a server application, executed by the server's processor, which uses the server's communication interface to receive communication from the client and output the response to the client, all according to the CS-KP.

[0225] The CS-KP manages, for example, the clients' access rights to the shared bus, which each client can use to initiate communication. Furthermore, the CS-KP defines (e.g., encodes) the information that can be requested by the client. For example, the request contains one or more instructions for the server, which are executed by the server, with the result being returned by the server to the client as a response to the request.

[0226] For the sake of clarity, this section refers specifically to one of several clients, illustrating its operation and / or configuration. It should be understood that the descriptions apply analogously to each client. Furthermore, it refers to the client(s) and server, which are provided by separate processors and / or located internally. This configuration promotes robust communication, eases maintenance, reduces costs, and minimizes susceptibility to failure. For the sake of simplicity, a target-internal control system is used, which provides the processors for the clients, the server processor, the actuators, and the network connection(s).In this regard, it can be understood that the server and client can also be provided using the same processor, but this is not necessarily required, and / or can be located outside the interior, but this is not necessarily required.

[0227] A model can be understood as a data-based (e.g., digital and / or virtual) representation of an original, such as a physical object (e.g., a machine) or a process (e.g., a control operation or a process flow). To create the model (the so-called model building, i.e., mapping the original onto the model), the original can be abstracted, parameterized, and / or simplified. The model can, for example, contain physical information (e.g., length, distance, weight, volume, composition, etc.), motion-related information (e.g., position, orientation, direction of movement, acceleration, speed of movement, etc.), logical information (connections, sequence, couplings, HA 2172 DE).

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[0229] Interrelationships, dependencies, etc.), time-related information (e.g., time point, total duration, frequency, period, etc.) and / or functional information (e.g., current intensity, effect, operating point space, force, degrees of freedom, etc.) about the original. The model can, for example, be based on data acquired from the object by means of a sensor and / or processed during model building.

[0230] This refers to a rotational axis, for example, in the specific context of the target coupling, the bearing device, or the pipe target. In this context, it can be understood that the rotational axis of the target coupling is identical to the rotational axis of the pipe target when the latter is coupled to the target coupling and provided by means of the bearing device. The statements regarding the rotational axis in this specific context can therefore be applied analogously to the target coupling, the bearing device, and the pipe target, insofar as these components are present.

[0231] The term "inner area" here refers to a rotationally symmetrical region with respect to the axis of rotation (e.g., of the target coupling and / or the pipe target), which, for example, has the shape of a vertical circular cylinder and is located inside the pipe target during operation. The geometry of the inner area intuitively represents the installation space available within the pipe target (the cavity within it), which can be visualized by considering the geometry (e.g., the diameter) of the target coupling, which is adapted to the inner diameter of the pipe target.

[0232] This refers to multiple actuators of the magnetic system and multiple clients, each of which has one client. It should be understood that the magnetic system can optionally have more than the multiple actuators, e.g., one or more additional actuators, for which a client is not necessarily required. For example, the magnetic system can have multiple pairs of actuators, with each pair having one client configured to control that pair.

[0233] For the sake of simplicity, the term "field state" is used here, e.g., as the target state (then also referred to as the target field state) or as the actual state (then also referred to as the actual field state). The field state intuitively represents the state of the magnetic field generated by the magnetic system, e.g., expressed as the state of the magnetic system. The field state can be expressed, for example, using a model of the magnetic field (or the magnetic system) or as a group of tuples consisting of an identifier and a corresponding value. The value can, for example, represent the position of a pole body, e.g., the target position in the case of the target field state and the actual position in the case of the actual field state. The identifier can, for example, reference the pole body, e.g., by specifying a coordinate of the pole body or a number of the pole body.In this regard, it can be understood that what has been described here can apply by analogy to any other type and metric in which the field state is expressed.

[0234] The term "system" can be understood as a set of interacting entities. This set of interacting entities can, for example, include or be composed of at least one mechanical component, at least one electromechanical transducer (or other types of actuators), at least one electrical component, at least one instruction (e.g., encoded in a storage medium), and / or at least one control device. HA 2172 DE

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[0236] A sensor (also called a detector) can be understood as a transducer designed to qualitatively or quantitatively detect a property of its environment corresponding to the sensor type, such as a physical or chemical property and / or a material composition. The measured quantity is the physical quantity to which the sensor applies its measurement. A sensor can be part of a measurement chain, which includes the necessary infrastructure (e.g., a processor, storage medium, and / or bus system, or similar components). The measurement chain can be configured to control the corresponding sensor (e.g., a water sensor, pressure sensor, and / or actuator sensor), process its detected measurement as an input, and then provide an electrical signal as an output representing the input. The measurement chain can be implemented, for example, by means of a control device.

[0237] The term "control device" can be understood as any type of logic-implementing entity that may, for example, have circuitry and / or a processor capable of executing software stored in a storage medium, firmware, or a combination thereof, and issuing instructions based on that software. The control device may, for example, be configured using code segments (e.g., software) to control the operation of a system (e.g., its operating point), such as a machine or plant, or at least its kinematic chain. The control device may, for example, include or be formed from a programmable logic controller (PLC). The term "processor" can be understood as any type of entity that allows the processing of data or signals. The data or signals may, for example, be processed according to at least one (i.e.,One or more specific functions are handled by a processor. A processor may be an analog circuit, a digital circuit, a mixed-signal circuit, a logic circuit, a microprocessor, a central processing unit (CPU), a graphics processing unit (GPU), a digital signal processor (DSP), a programmable logic gate array (FPGA), an integrated circuit, or any combination thereof. Any other implementation of the respective functions described in more detail below may also be understood as a processor or logic circuit. It is understood that one or more of the procedure steps described in detail herein may be performed (i.e., implemented) by a processor through one or more specific functions executed by the processor.

[0238] Fig. 1 A illustrates a sputtering device according to various embodiments 100a in a schematic side view or cross-sectional view, preferably set up according to Example 1.

[0239] An exemplary implementation of the magnetic system 602 (preferably according to Example 50) has several separate segments 602a, 602b (also referred to as magnetic segments), each segment having several pole bodies. The multiple actuators 304b of the magnetic system 602 have one or more actuators 304b per magnetic segment 602a, 602b, configured to influence the spatial position of the pole bodies of the magnetic segment relative to the axis of rotation 111 according to a control signal. The control signal is supplied to the actuator 304b by a client 302c, which is associated with the magnetic segment, e.g., by means of an identifier of the magnetic segment that the client 302c has stored and / or retrieves from the actuator. HA 2172 DE

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[0241] An exemplary implementation of the sputtering device has several clients 302c, each with one client assigned to magnet segment 602a, 602b. An exemplary implementation of the clients 302c (preferably according to Example 6) is implemented by means of a first control system 302, which is located in the interior space 1061 (then also referred to as the target-internal control system 302) and provides the server 302s.

[0242] An exemplary implementation of the target coupling 104 (preferably according to Example 16) has a clamping ring as a clamping device, which is designed for coupling the pipe target 106. The cylindrical inner region 1061 adjoins the target coupling 104 and is, for example, enclosed at its end face by the target coupling 104 (preferably according to Example 11). The inner region 1061 can, for example, be the cavity formed by the pipe target 106 and the target coupling 104. The axis of rotation 111 of the target coupling 104 extends through the inner region 1061 of the target coupling 104 (preferably according to Example 44).

[0243] Fig.1B illustrates a signal transmission device according to various embodiments 100b in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a.

[0244] An exemplary implementation of the signal transmission carrier 102 is set up at least sectionally (i.e., sectionally or completely) rotationally symmetrical to the axis of rotation 111, e.g. on the first side 1021 facing the interior area 1061 (also referred to as target side 1021) and / or on the second side 102a (also referred to as bearing side 102a).

[0245] An exemplary implementation of the target coupling 104 (preferably according to Example 63 or Example 65) has a sealing surface and / or sealing groove facing the target side 1021. For example, the target coupling 104 (also referred to as the first coupling device 104) can be arranged on the target side 1021 of the carrier 102 and be configured at least sectionally (e.g., sectionally or completely) rotationally symmetrical with respect to the axis of rotation 111. An exemplary implementation of the bearing coupling 108 (preferably according to Example 63 or Example 65) is configured as a body of revolution (e.g., cylindrical) or has at least one rotationally symmetrical outer surface 108m (also referred to as the radial outer surface).

[0246] An exemplary implementation of the target coupling 104 (preferably according to Example 75) has a sealing device 104d, which, for example, has or adjoins a sealing surface and / or a sealing groove. A seal, e.g., a polymer seal, can preferably be accommodated in the sealing groove. Preferably, the target coupling 104 has a clamping device 104k, implemented, for example, by means of a clamping clamp or the like, which is configured, when brought into a first state, to receive a target tube 106 (its position, if present, is shown schematically here), and, when brought into a second state, to press the target tube 106 against the sealing surface 104d.

[0247] A preferred implementation of the target coupling 104 is provided by means of a counter bearing which is opposite a compact end block. In this case, communication can, for example, take place inductively via the counter bearing. HA 2172 DE

[0248] 34

[0249] An exemplary implementation of the bearing coupling 108 has a (e.g. cylindrical) projection (e.g.

[0250] a pin) which is configured to be received in a rotary bearing or to implement at least one plain bearing. The plain bearing can, for example, have two surfaces configured to slide against each other around the axis of rotation 111, and of which a first surface is provided by the cylindrical surface 108m of the bearing coupling 108 (e.g., the projection), and of which a second surface is provided by a bearing point 110 of the target bearing device (here its position, if present, is shown schematically), e.g., by an inner surface of the bearing point 110. Alternatively or additionally, the bearing coupling 108 can, in the assembled state, be at least partially received in a cavity of the target bearing device.

[0251] An exemplary implementation of bearing point 110 is set up as a bearing block. This reduces interfering influences on signal transmission.

[0252] An exemplary implementation of the signal transmission device (e.g., the target tube cover) is monolithically connected to and / or borders on one or more components of the target coupling 104 and / or one or more components of the bearing coupling 108.

[0253] Herein and below, various exemplary implementations of the multiple coils of the signal switching device (also referred to as carrier coils) are explained using the target tube cover as an example, which can apply analogously to any other implementation of the signal switching device.

[0254] An exemplary implementation of the at least one (i.e., one or more than one) first coil 112 of the target tube cover (then also referred to as the target-side carrier coil 112) is arranged on the target side 1021 and / or at least partially integrated into the carrier 102. Alternatively or additionally, the at least one target-side carrier coil 112 has two target-side carrier coils, e.g., a target-side data coil and / or a target-side power coil, as will be explained in more detail later.

[0255] An exemplary implementation of the at least one second coil 114 of the target tube cover (then also referred to as the bearing-side carrier coil 114) is arranged on the bearing side 102a and / or at least partially integrated into the carrier 102. Alternatively or additionally, the at least one bearing-side carrier coil 112 has two bearing-side carrier coils, e.g., a bearing-side data coil and / or a bearing-side power coil, as will be explained in more detail later.

[0256] An exemplary implementation of multiple coils features one or more than one pair of coils (also called a group of two coils or simply a coil pair), e.g., a pair of data coils and / or a pair of power coils. The data coil pair, for example, includes the target-side data coil and / or the bearing-side data coil and / or is resistively coupled. The power coil pair, for example, includes the target-side power coils and / or the bearing-side power coils and / or is resistively coupled.

[0257] An exemplary implementation of the electrical bushing 116 (preferably according to Example 62) couples the coils of each coil pair to each other, e.g., the bearing-side data coil and the target-side data coil to each other, and / or the bearing-side power coil and the target-side power coil to each other, for example, resistively. Alternatively or additionally, the electrical bushing 116 can connect the coil pairs HA 2172 DE

[0258] 35 galvanically separate them from each other, e.g. in such a way that the coil pairs do not have a resistively mediated electrical connection

[0259] They exchange electricity with each other. This improves signal transmission.

[0260] The exemplary implementation of the carrier coil(s) illustrated here (e.g., target-side and / or bearing-side), such as the power coil and / or data coil, is configured as a radial coil, as shown. It should be understood that one or more carrier coils (e.g., target-side and / or bearing-side) can also be configured as cylindrical coils. Cylindrical coils, for example, allow for greater axial bearing clearance and / or can be integrated into a coupling device.

[0261] Fig. 2A illustrates a sputtering device according to various embodiments 200a in a schematic diagram, which includes the signal transmission device 250, e.g., configured according to one of the embodiments 100a to 100b. For example, the first coil of the signal transmission system is implemented by means of the target-side carrier coil 112 and the second coil of the signal transmission system by means of the bearing-side carrier coil 114.

[0262] Regarding the components of embodiments 200a, by means of which the signal transmission system 252 is implemented, it can be understood that these are exemplary, and that what is described here can apply by analogy to components that do not necessarily have to be part of a sputtering device. For example, the signal transmission system can also be provided separately, for instance, for retrofitting an existing sputtering device.

[0263] The sputtering device (e.g., its bearing device, e.g., its bearing point 110) has at least one third coil 314 (e.g., of the signal transmission system). The at least one third coil 314 preferably has a power coil and / or a data coil and can optionally be provided by means of the bearing device (e.g., its bearing point 110).

[0264] The sputtering device (e.g., its magnet system housing 210) has at least one fourth coil 312 (e.g., of the signal transmission system). This at least one fourth coil 312 preferably comprises a power coil and / or a data coil and can optionally be provided by means of the magnet system housing 210 (e.g., its end face).

[0265] An exemplary implementation of the signal transmission system can couple a first control system 302 of the sputtering device 200 (also referred to as the target-internal control system 302) at least sectionally inductively with a second control system 304 of the sputtering device 200 (also referred to as the target-external control system 304), for example by means of the target tube cover 200. The signal transmission system can be configured to transmit at least one signal between the first control system 302 and the target-external control system 304. The target-external control system can have or consist of a target-external signal source.

[0266] An exemplary implementation of the at least one signal can include a power signal, which is transmitted via the power coils of the signal transmission system and is configured to supply electrical power to the first control system 302, which is provided by means of the second circuit 304. Alternatively or additionally, the at least one signal can include a data signal, which is transmitted via the HA 2172 DE

[0267] 36

[0268] Data coils of the signal transmission system are mediated, and by means of the second circuit 304 (e.g. a

[0269] control device) is provided.

[0270] It can be understood that the coils provided herein can optionally be coupled with one or more than one (e.g. passive or active) electronic component (e.g. capacitor, signal amplifier, resonant circuit, etc.) (e.g. as an extension of the signal transmission system), e.g. for resonance enhancement or amplification.

[0271] An exemplary implementation of the target-internal control system 302 provides the server, several clients, and several actuators (e.g., comprising an electric motor), each actuator being configured to influence a spatial distribution of the magnets of the magnet system (then also referred to as a magnet system actuator). An exemplary implementation of the target-external control system 304 provides a signal source (e.g., comprising a control device and / or an electric generator) which is configured, for example, to generate at least one signal (e.g., the power signal and / or the data signal).

[0272] The carrier of the signal transmission system is preferably provided by means of the carrier 102 of the target tube cover 200, by means of which the first coil 112 and the second coil 114 are rigidly coupled to each other. The bearing device of the signal transmission system is preferably implemented by means of the bearing point 110, by means of which the carrier 102, to which, for example, the first coil 112 and / or the second coil 114 are rigidly coupled, is rotatably mounted.

[0273] An exemplary implementation of the magnet system features a (e.g., fluid-tight) magnet system housing 210 in which the target's internal control system 302 and / or the pole bodies are arranged. This can extend the service life of the target's internal control system 302 and / or the pole bodies.

[0274] Figure 2B illustrates a vacuum arrangement 200b according to various embodiments in a schematic cross-sectional view, which includes a vacuum chamber 802, the sputtering device (which is at least partially arranged in the vacuum chamber 802), and a transport system 610. The transport system 610 can, for example, have one or more rotatably mounted transport rollers. The magnet system 602 and an end block 604 of the bearing device are also shown.

[0275] Fig. 3A illustrates a sputtering device according to various embodiments 300a in a schematic diagram, preferably set up according to one of the embodiments 100a to 200b, in which various components of the target-internal control system 302 are shown.

[0276] Server 302s indicates:

[0277] - a first CAN communication interface 352, which is set up to communicate according to a first CAN network protocol by means of the signal switching device 250 and / or with the target external control system;

[0278] - a processor 354, which executes a server application configured to generate a message in response to a request from client 302c addressed to client 302c. Processor 354, for example, has a processor register as its internal storage medium; HA 2172 DE

[0279] 37

[0280] - a processor-external storage medium 356, which is configured to store server data. The storage medium 356 can, for example, have non-volatile memory (e.g., a hard disk) and / or volatile memory (e.g., random access memory); a second CAN communication interface 358 configured for communication according to a second CAN network protocol, which is communicatively coupled with each of the clients.

[0281] Each Client 302c indicates:

[0282] - a CAN communication interface 360 ​​set up for communication according to the second CAN network, which is coupled to the server 302s;

[0283] - a processor 362 that executes a client application configured to generate a message as a request (also called a request message) to the server 302s. The processor 362 includes, for example, a processor register as an internal storage medium; a communication interface that includes a motor driver 364 as a driver circuit for controlling an actuator by means of a control signal, and is optionally configured to read the measuring element 370. The measuring element 370 can optionally be integrated into the actuator, for example, if the actuator has a stepper motor.

[0284] The 602 magnetic system features the following per magnetic segment:

[0285] - a movable segment 404 of the pole carrier (also referred to as pole carrier segment), e.g. a backplate,

[0286] - one or more than one magnet 444, e.g. per magnet row, which is coupled to the pole carrier segment 404;

[0287] - an adjustment device comprising an electric motor 366 as an actuator, which is configured to generate a rotary movement in accordance with the control signal;

[0288] - a gearbox 370 of the adjustment device for transmitting the rotary motion from the electric motor 366 into a translation and for transmitting the translation to the pole carrier segment 404, which changes the position of the pole carrier segment 404 and thus of the magnets 444; a measuring element 368, which has one or more sensors and is configured to provide the status data. The status data can include one or more quantities detected by the measuring element 368, which represent a field state, e.g., the current state of the pole carrier segment 404 (e.g., as the current state). Alternatively or additionally, the status data can represent a current state of the electric motor and / or the gearbox 370.

[0289] Fig. 3B illustrates a sputtering device according to various embodiments 300b in a schematic assembly diagram, preferably set up according to one of the embodiments 100a to 300a, in which various components of the target-internal control system 302 are shown.

[0290] Due to the mechanical coupling 368 (e.g., via the gearbox) between the pole body 444 and the actuator 304b, the actual position of the pole body 444, PosPJst, and the actual position of the actuator 304b, PosSJst, can be linked within the technical tolerances, Toi, for example, according to the relation PosP_lst=f(PosS_lst, Toi). The more precisely the mechanical coupling 368 and / or the bearing device operate, the more

[0291] 38 less is the mechanical play according to which PosP_lst=f(PosS_lst, Toi) deviates from PosPJst=f (PosSJst, Toi = 0).

[0292] Due to the mechanical play, one degree of freedom arises, such that, with an invariant actual position of the actuator 304b (PosSJst = const), the actual position of the pole body 444, PosPJst, can vary within the technical tolerances. Similarly, with an invariant actual position of the pole body 444304b (PosPJst = const), the actual position of the actuator 304b, PosSJst, can vary within the technical tolerances. Examples of triggers for this variation include: an interaction (e.g., mechanical and / or magnetic) 370 with an adjacent magnetic segment 602a (e.g., its movement), vibrations, and actuation of the actuator.

[0293] For example, the magnetic interaction 370 between the magnetic segments can cause a change in the position of a first magnetic segment 602a to trigger a change in the position of the immediately adjacent second magnetic segment 602b, for example, until its mechanical play is exhausted. For example, the play in the bearing arrangement by which the second magnetic segment 602b is supported can allow it to tilt.

[0294] From the perspective of the control loop, the trigger of this variation can be treated as a disturbance variable, which promotes a deviation of the actual state from the target state and which can be counteracted by means of a control element 386.

[0295] The sputtering device includes the control element 386, which is configured to control the actuator 304b based on the status data provided by the measuring element 368.

[0296] An exemplary implementation of the measuring element 368 includes a distance sensor 384 configured to detect a distance as the actual field state, representing the position of the pole body 444, e.g., the distance of the pole support segment 404 from the distance sensor 384. The measuring element 368 also includes a position encoder 382 as a sensor, configured to detect a position as the actual state of the actuator 304b, for example, the rotation angle of the electric motor 366 of the actuator 304b. Examples of the position encoder 382 include: an incremental encoder, a resolver (also called a coordinate converter), a potentiometer encoder, or an absolute encoder. The status data provided by the measuring element 368 includes the distance as the actual field state and the position as the actual state of the actuator.It can be understood that what has been described here applies analogously to any other composition of status data that fulfills this function.

[0297] An exemplary implementation of the control element 386 is at least partially implemented (e.g., a model of its magnetic system) via the server and configured to provide the corrected target field state, based on:

[0298] - on the status data of multiple clients;

[0299] - the target field state provided by the target-external signal source;

[0300] - the model of the magnetic system.

[0301] Control element 386 can, for example, be configured to transmit the corrected target field state to a client in response to a request from that client. HA 2172 DE

[0302] 39

[0303] Figures 4A and 4B each illustrate a magnet system according to various embodiments 400a, 400b in different schematic views with a view of the axis of rotation 111, for example according to claim 1 and / or configured according to one of the embodiments 100a to 300. The axis of rotation 111 extends along the longitudinal extent of the magnet system and along direction 101, which forms a plane with direction 105. The magnet system 602 comprises a plurality of magnets 444 and a support system, which includes several spatially separated pole support segments 404 and / or a magnet system support 442 (also referred to as system support), which may, for example, be arranged in the magnet system housing. An exemplary implementation of the magnet system 602 has, for example, one or more than one row of magnets 150 per pole carrier segment, e.g., several rows of magnets 150 per pole carrier segment 404. For example, the magnet system (e.g.,(per pole carrier segment) have 2 or more magnet rows 150, e.g., 3 or more magnet rows 150. Each magnet row 150 can have several (e.g., three or more) magnets 444, e.g., several magnets 444 arranged one behind the other along direction 101. A magnet 444 of a magnet row 150 can, for example, have a magnetization, e.g., either with a direction (also called magnetization direction) towards or away from the pole carrier. At least two magnet rows 150 per pole carrier can differ from each other in their magnetization direction.

[0304] Examples of components or implementations of the system support include: a tube (e.g., a lance tube), a plate (e.g., a sheet), a profile beam, or similar. Examples of segments or implementations of the pole support include: a plate (e.g., a sheet), a profile beam, or similar. For example, the pole support may have or consist of a segmented beam.

[0305] Furthermore, the magnet system 602 has an adjustment device 150s (e.g., comprising an actuator), which is arranged, for example, (e.g., partially) between the system carrier and the pole carrier segment(s) 404. The adjustment device 150s can be configured to change a spatial distribution of the magnetic field 120 generated by the magnet system 411, e.g., by changing a spatial distribution (e.g., position and / or orientation) of the magnet(s) 444.

[0306] An exemplary implementation of the magnet arrays features two outer magnet arrays 204a magnetized away from the pole support and one inner magnet array 204I magnetized towards the pole support (or vice versa). At least the inner magnet array 204, which is arranged between two outer magnet arrays 204, can be longitudinally extended along the axis of rotation 111.

[0307] Fig. 5 illustrates communication between the sputtering device according to various embodiments 500 in a schematic communication diagram, preferably configured according to embodiments 100a to 400b, in which each CS message is represented by a horizontal arrow indicating the direction of transmission or at least the addressing of the message. It can be understood that each CS message can be transmitted by means of one or more fieldbus messages, or that several CS messages can be transmitted by means of the same fieldbus message.

[0308] An exemplary implementation of the server data can be stored on the 302s server and preferably represent the field state, such as the target state of the magnetic system or a deviation of the actual field state from the target field state. For example, the server data could be a model HA 2172 DE.

[0309] 40 exhibit a spatial distribution of the magnetic field generated by the magnetic system as the target field state.

[0310] An exemplary implementation of the server can be configured to update the server data, for example, based on a target 501 (also referred to as a target-external target 501) transmitted from the target-external control system 304a to the server 302s via the signal relay device. The target-external target 501 can, for example, contain information about the target field state or at least represent it, e.g., a change thereof or an absolute value.

[0311] An exemplary implementation of the desired field state is expressed in spatially coordinated data on the strength of the magnetic field at the location of the coordinates. The description provided here can apply analogously to a differently expressed desired field state, which, for example, is expressed in coordinates as the positions of the pole carrier segments relative to each other or in a suitable coordinate system.

[0312] The communication between server and client preferably takes place in such a way that each message exchange initiated by the client between client and server is treated as an independent transaction (also referred to as sessionless). For example, this can be implemented using a stateless client-server communication protocol.

[0313] If server resources permit, communication between server and client can optionally take place in so-called sessions (also referred to as communication sessions), for example, using session management. Each session can have several phases, such as an initiation phase, an exchange phase, and / or a termination phase. In each of the phases, the client sends a request to the server, which then responds. This division into phases is meant to be exemplary; one or more of these phases are not necessarily required or may be functionally integrated into one of the other phases, for example, if no communication session is used.

[0314] An exemplary implementation of the initiation phase, insofar as a communication session takes place, shows:

[0315] - an initiation 5131 of the communication session 511, which is sent from the client 302c to the server 302s; an acknowledgment 513a of the communication session 511, which is sent from the server 302s to the client 302c, for example specifying the session number and / or other identifiers for this purpose.

[0316] An exemplary implementation of the transaction (e.g., in the exchange phase, insofar as a communication session takes place, or without a session) shows:

[0317] - A 517 request for information (e.g., data) sent by client 302c to server 302s. The 517 request may contain or consist of a request to provide the information; a 519 response to the 517 request, containing the requested information and sent by server 302s to client 302c, based, for example, on the 501 request and / or server data; HA 2172 DE

[0318] 41

[0319] An exemplary implementation of the termination phase, insofar as a communication session takes place, shows:

[0320] - a termination 5231 of the communication session 511, which is sent from the client 302c to the server 302s, for example specifying the session number and / or other identifiers (also referred to as ID) for this; an acknowledgment 523a of the termination 523I, which is sent from the server 302s to the client 302c.

[0321] Optional messages in a communication, e.g., a 511 communication session, indicate:

[0322] - a 503 request about the status, e.g., availability, of server 302s (also called a status request), which is sent from client 302c to server 302s;

[0323] - A response (e.g., positive or negative) to status request 503 as information sent from server 302s to client 302c; a current field state 520, e.g., as a result of controlling an actuator (also referred to as a control intervention), e.g., containing status data, which is sent from client 302c to server 302s. It should be understood that sending the status data does not necessarily have to be linked to the control intervention, but can be triggered alternatively or additionally when a criterion is met. Examples of criteria include: when a time rule is fulfilled, e.g., when a time interval has elapsed, when a signal has been received from a clock, etc. Furthermore, it should be understood that the status data can be sent by a client, e.g., periodically, regardless of whether the client itself triggered the control intervention.

[0324] It can be understood that multiple communication sessions can be combined into one, if desired, or that a single communication session can be split into multiple communication sessions, if desired. Some aspects of this are based on the fact that status data is not only sent as feedback in response to a positional intervention, but is sent more frequently than positional interventions occur. This helps to counteract parasitic interference.

[0325] Fig. 6A illustrates a magnetic system according to various embodiments 600a in a schematic data flow diagram, for example according to claim 1 and / or configured according to one of the embodiments 100a to 500.

[0326] An exemplary implementation of Server 302s and / or Server 302c is implemented using a processor that executes code segments configured to cause the processor to perform the following functions:

[0327] - Sending, via server 302s, information to client 302c in response 519 to client 302c's request 517 to provide the information (also known as "on demand"). The information is based, for example, on server data representing a target field state 631.

[0328] - Sending, via client 302c, the request 517 to server 302s to provide the information (e.g., data), e.g., according to a demand schedule, which can also be periodic, but is not necessarily linked to the transmission of data about the current field state 520; HA 2172 DE

[0329] 42

[0330] - Saving (e.g., updating) status data 625 and / or task data 621, for example, to a storage medium (e.g., an internal processor storage medium) using client 30c;

[0331] - Determine (e.g., update) the status data using client 302c and based on information from server 302s, data 621 (also referred to as task data 621), which indicates whether the status data meets a criterion (also referred to as a requirement criterion) based on response 519 from server 302s, where the requirement scheme can be based on a result of this. The requirement criterion can, for example, represent a target state.

[0332] - Transmitted, by means of the client 302c and according to the task data 621, a control signal 623 (e.g. drive power) to the actuator 404;

[0333] - Saving (e.g., updating) the server 302s to a storage medium (e.g., a processor-external storage medium 356) of its data 631 (also referred to as server data 631), which represents the (e.g., corrected) target field state 631 and / or an actual field state 633. The actual field state 633 is based, for example, on the status data received from the client 302c. The target field state 631 is based, for example, on target-external data 627, which is provided, for example, by the target-external control system 304 as a target-external signal source. The target-external data 627 can, for example, contain a target-external specification for the target field state 631.

[0334] - Optional determination of the corrected target field state 631 (e.g., using the control element 386) based on the actual field state 633 and / or based on the target-external data 627. Optional sending, using the server 302s, of the actual field state 633 to the target-external control system 304.

[0335] Fig. 6B illustrates a magnet system according to various embodiments 600b in a schematic cross-sectional view looking along the axis of rotation 111, for example according to claim 1 and / or configured according to one of the embodiments 100a to 500. Here, the axis of rotation can extend through the client 302c, which provides a compact design. of the data flow

[0336] The following is an exemplary implementation of the communication in which the transmission of control data takes place using data signals of different types, which are converted into each other, for example by means of a processor.

[0337] The exemplary implementation of the target-external control system 304 has a processor (also referred to as the target-external processor) and / or a signal source, which are communicatively coupled. The exemplary implementation of the target-internal control system 302 has the following communicatively coupled components:

[0338] - a processor (also known as the target-internal central processing unit) by which the server is implemented,

[0339] - One processor per client (also referred to as the target-internal processor), by means of which the client is implemented, and one actuator 304b per client. HA 2172 DE

[0340] 43

[0341] An exemplary implementation of the signal source includes an electrical generator (e.g., a power supply unit) configured to generate electrical power, which is transmitted to the power coil of bearing 110 via the power signal. The exemplary implementation of the signal source further includes a control device configured to generate control data, according to which a first-type data signal is generated and transmitted, for example, via a fieldbus network (e.g., a CAN bus). For example, the first-type data signal can contain one or more messages according to a CAN communication protocol.

[0342] An exemplary implementation of the target-external processor is set up (e.g., using a modem or at least one modulator) to convert the first-type data signal into a second-type data signal and feed the second-type data signal to the bearing's data coil. Various electrical parameters of the data signal can be converted into one another, such as frequency, duty cycle, DC, peak value, etc. For example, the target-external processor exchanges data with the target's internal central processing unit using a modem (comprising a modulator and a demodulator).

[0343] An exemplary implementation of (e.g., each) pole actuator 304b is configured to generate a mechanical force in response to a control signal and transmit it to the magnets, e.g., via the pole body segment. For example, the mechanical force can be configured to influence an existing field state, e.g., the spatial distribution of magnets in the magnetic system. The pole actuator 304b can, for example, be configured to generate the mechanical force using the power signal and / or according to the control data.

[0344] An exemplary implementation of the target's internal server (e.g., implementing a modem or at least one demodulator) is configured to receive the second-type data signal from the data coil of the magnetic system carrier 210 and, based on this, to determine (e.g., update) the server data. The server responds to a client using a third-type data signal, which contains at least one message according to the CS-KP (e.g., its payload) containing the information requested by the client, which is based, for example, on the server data and / or confirms the server's availability.

[0345] The client is configured to convert the third-type data signal into a fourth-type data signal as a control signal and to supply the control signal to actuator 304b. Various electrical parameters of the data signal can be converted into one another, such as frequency, duty cycle, DC value, peak value, etc. The third-type data signal can be transmitted, for example, via a fieldbus network (here, a CAN bus is used as an example).

[0346] Exemplary implementation of the client

[0347] One or more clients (e.g., each client) implement a model of the magnet system (e.g., a section thereof). The model increases the autonomy of the magnet system.

[0348] The client determines a specification according to which the actuator is controlled, based on the model and the status data. This allows parts of the computational load to be offloaded to the client, which in turn facilitates parallel actuator actions, since the clients can calculate in parallel, and reduces the duration of the entire HA 2172 DE.

[0349] 44

[0350] The process is shortened. For example, the data sent from the server to the client in response to the request can be shortened.

[0351] Clients transmitted information representing the desired field state.

[0352] The model can, but does not necessarily have to, represent the entire magnet system. For example, each client can store only a model of the segment of the magnet system whose actuator is controlled by the client. This reduces the amount of data the client processes. Alternatively or additionally, the client can have a identifier (also called a segment identifier) ​​that identifies the segment of the magnet system whose actuator is controlled by the client (also called the segment assigned to the client). The latter allows for a uniform setup (e.g., uniform firmware) of the clients, which then differ from each other, for example, only in their segment identifier. A more complex model can then be used by reducing the computational load based on the segment identifier.

[0353] An exemplary implementation of the segment identifier is determined dynamically (also referred to as a dynamic segment identifier). This allows identical hardware and software to be used for each client, thus reducing costs. In essence, the dynamic segment identifier means that fewer static settings need to be provided to the client, for example, fewer (or even no) individual configuration settings that would otherwise have to be implemented using a configuration file, which is time-consuming to modify.

[0354] Implementing various examples of the model:

[0355] - a physical structure of the magnetic system or at least a part thereof; and / or

[0356] - a mapping between the status data of the segment associated with the client and the field state, e.g., the state of the magnetic field generated by the segment; an interaction between several immediately adjacent segments that have the same state as the segment associated with the client with respect to the state of the magnetic field generated by the segments.

[0357] The segment identifier can, for example, be expressed in the form of coordinates that reference the segments as numbers from 1 to N, whose position can be specified in 3D coordinates and / or as a metric distance along the axis of rotation.

[0358] The client regularly requests information from the server, such as the target field state. This information might include a table specifying the segment identifiers and a magnetic field strength as the target field state for each segment identifier. If the client determines that a deviation between the target field state and the actual field state exceeds a threshold, it calculates a setpoint value as a target value, based on the model and the status data.

[0359] Exemplary implementations of the server

[0360] The 302c server acts as an intermediary between two CAN networks, which it connects. The first CAN network is mediated via the signal switching device, while the second CAN network is connected to the clients. The server stores server data, which includes the target field state and optionally the actual field state, and updates this data, for example, the target field state based on HA 2172 DE.

[0361] 45 of the target-external specification 501 and / or the actual field state (if available) based on the status data.

[0362] In response to a client request, the server provides, based on server data, at least information about the target position of the segment assigned to the client, as well as information about the target positions of immediately adjacent segments, thus improving the client's data processing. In some embodiments, the server can be configured as a client of the target external control system. Alternatively or additionally, the server can periodically request the target field state from the target external control system and / or automatically transmit a status message to the target external control system. Example implementation of the status data

[0363] The status data can include additional measurements besides the actual field state, such as voltage applied to clients, current drawn by clients, client status, temperature, error rate, position table, etc. The status message transmitted by the server to the target external control system can be based on the status data and / or the actual field state.

[0364] Exemplary implementations of the model

[0365] According to this implementation, the model is provided by means of a neural network, which implements the interaction of several magnetic segments, e.g., their pole bodies. The neural network can, for example, be trained based on data (e.g., measurement data) that represent several states of the magnetic system, which differ from each other in the position of the magnetic segments relative to one another, and the resulting magnetic field (e.g., its spatial distribution).

[0366] The measurement data can be obtained, for example, by means of a series of measurements, in which the state of the magnetic system is systematically varied (e.g., scanned) and the resulting magnetic field is recorded. In this way, an arbitrarily large amount of training data can be obtained for the neural network, on which the neural network is then trained.

[0367] According to various embodiments, the stepper motors of a segmented magnetic bar are controlled by a client-server architecture in combination with one or more neural networks. A client (e.g., a local control unit of a motor) registers with a central processor that provides the server. The configuration of the magnetic system (e.g.,

[0368] (Magnetic bars). Since all communication participants in the network activate and report independently, fault diagnosis is significantly simpler. For example, no or at least fewer timeouts are required compared to a master-slave architecture.

[0369] Each client (e.g., local control unit) has access to the neural network (e.g., as a control element). For example, each client can run an instance of the neural network locally.

[0370] The client requests not only the target field state (e.g., setpoint) of its assigned magnetic segment from the server, but also the target field states of the immediately adjacent magnetic segments. Based on this, the client determines, for example using a neural network, a corrected target field state (e.g., a setpoint) for the magnetic segment and controls the motor of the magnetic segment accordingly, for example until the target field state is reached within a specified accuracy tolerance. HA 2172 DE

[0371] 4 6 of the artificial neural network

[0372] This text refers, among other things, to an artificial neural network (kNN). The described concepts can be applied analogously if, alternatively or additionally to the kNN, another trainable algorithm is used, such as a support vector machine or a long short-term memory (LSTM). The kNN can have a large number of nodes (figuratively, artificial neurons) and a connection network (the mapping of connections to nodes). In a kNN, the processes for information acquisition and processing are modeled analogously to biological neurons. This is achieved through a number of layers of hidden neurons, dependent on the specific circumstances, and the activation functions that transmit the signals.

[0373] The topology of the algorithm describes the structure of the interconnection network, i.e., how many nodes are distributed across how many layers, and how these layers are interconnected. For example, multiple nodes can be arranged in successive layers, the first layer of which forms the algorithm's input and the last layer its output. The last layer whose output is visible outside the interconnection network is called the output layer. Prior layers are accordingly referred to as hidden layers. Using a graph, the artificial neurons can be represented as nodes and their connections as edges. In this case, the algorithm is exemplified as a set of directed graphs with typed nodes.

[0374] After the algorithm is constructed, it is first trained (also called the training phase), during which it is adapted to the desired behavior (figuratively speaking, it "learns"). Data (the training data) is fed into the algorithm, which it uses to learn how to replicate the desired behavior. An accurate output from the algorithm reinforces what it has learned (i.e., a specific signal path through the network), while an inaccurate output weakens the signal path. In this way, the paths through the network that best describe the desired behavior gradually emerge.

[0375] During the training phase, one or more of the following operations can occur: modifying the connection network (e.g., creating or deleting connections); changing the weight of nodes; modifying the properties (e.g., thresholds) of the nodes; modifying the number of nodes; modifying the activation, propagation, and / or output function.

[0376] During algorithm training (e.g., kNN), the training data is selected according to the desired input parameters. In one example, the incoming training data consists of image data of the detection area, for which the respective target variable (e.g., class or objects to be detected) is known. The training data can be synchronized and / or related to each other, for example, via timestamps or their origin. It should be noted that both the parameters in the algorithm's input vector and the parameters in its output vector are highly application-dependent and must be selected accordingly. the firmware of the client HA 2172 DE

[0377] 47

[0378] The client's firmware is stored at least partially (i.e., partially or completely) in a computer-readable storage medium on the client, such as non-volatile read-only memory and / or a volatile processor register. In the case of a low-cost client, the client's non-volatile storage capacity may be insufficient to hold the client's firmware. In this case, at least a portion of the firmware (e.g., the model) can be stored by the server and transmitted to each client upon startup of the magnetic system. The portion of the firmware stored using the client's non-volatile storage capacity can, for example, contain the client application or at least the segment identifier.Alternatively, the client can operate without non-volatile storage and register with the server using its MAC address as a segment identifier, receiving the complete firmware from the server in response. In some implementations, the client can update its firmware based on server data. For this purpose, the server can receive a firmware update from the client from outside the sputtering device and store it as part of the server data, thus simplifying version control.

[0379] Exemplary implementations of the status message and update scheme

[0380] An exemplary implementation of the status message to the server is repeatedly generated by the client according to an update scheme implemented by the client, and thus independent of the server (e.g., its operation). This ensures that the client sends the status message to the server regardless of whether the server provides the information requested by the client.

[0381] An exemplary implementation of the update scheme is set up to trigger the generation of the status message, e.g., according to a time-based rule (also called a time rule), for example, periodically. The time rule is implemented as an invariant time interval that triggers the generation of the status message upon expiration and is restarted upon expiration. The client thus informs the server about its status periodically according to a client-internal update scheme (referred to as self-initiating).

[0382] Optionally, the generation of the status message to the server can also occur in response to receiving the information requested by the client from the server, but this is not mandatory.

[0383] An exemplary implementation of the status message is sent by the client to the server more frequently than the client's request message to the server. This improves the server's data situation, which facilitates the operation of the magnet system.

[0384] An exemplary implementation of the status message is independent of all other messages (or at least a handshake) exchanged between the server and the client.

[0385] In this regard, it should be noted that the term "handshake" in the context of communication technology refers to a multi-stage process in which two communication participants negotiate various communication parameters (also called communication parameters) and agree on how the data transmission should take place. As a first stage, the communication participants send initial signals to indicate that they are ready to establish a connection. These signals contain, for example, information about the communication protocols and parameters. As a second stage, one communication participant sends an acknowledgment signal (ACK) to confirm that the received information has been understood and this HA 2172 DE

[0386] 48 agrees to proceed with the exchanged parameters. Such a handshake can be performed according to various

[0387] Examples are omitted

[0388] One the

[0389] The position of the pole body does not necessarily have to be determined by a resolver of the measuring element. For example, the measuring element can have an optical distance sensor to determine the position of the pole body. Alternatively or additionally, the position of the actuator and / or the pole body can be determined based on data provided by the motor driver (e.g., via increment losses).

[0390] An exemplary implementation of the measuring element features an incremental encoder as a sensor for detecting changes in position (e.g., a linear movement) and / or changes in angle (e.g., a rotating movement) of the actuator. the transaction

[0391] After the client registers with the server, transactions consist of a request from the client to the server and a response from the server to that request (also known as a request-response transaction). In each request-response transaction, the client sends a request (e.g., containing the demand) to the server and receives a response from the server. No session management takes place.

[0392] An exemplary implementation of the request-response transaction shows:

[0393] The client sends the request to the server (e.g., containing a request ID). If the server responds, it sends a reply to the request, specifying the request ID. This completes the transaction.

[0394] - If the server does not respond, the client will periodically repeat its request without controlling the actuator during this phase.

[0395] When the client receives a response from the server, the client processes that response.

[0396] Exemplary implementations of successive transactions

[0397] While processing the server's first response, the client initiates the next request-response transaction, for example, after processing has begun but before it has finished. If the server responds with a second response before the first response has finished processing, and the second response differs from the first, the client can abort processing the first response and begin processing the second.

[0398] Regardless of the request-response transaction, the client periodically sends status data, which, for example, shows the current state of the client, to the server as a unidirectional transaction, i.e., without sending a request or expecting a response.

[0399] An exemplary implementation of data exchange between client and server only occurs when initiated by the client. This increases efficiency. Nevertheless, the server side maintains a complete overview of the current state of the entire magnet system at all times.

Claims

1. HA 2172 DE 49 Patent claims 1. Sputtering device comprising: • a target coupling (104) which is designed for coupling a pipe target; • a magnetic system (602) comprising several pole bodies (444) and two actuators (304b), each actuator being configured to influence a spatial position of the several pole bodies (444) relative to each other; • one client (302c) per actuator of the two actuators (304b), which is configured to request information from a server (302s) according to a client-server communication protocol and to control the actuator based on that information.

2. Sputtering device according to claim 1, wherein the client (302c) implements a model of the magnet system (602) and is configured to control the actuator based on the model; and wherein the client (302c) is preferably configured to determine a position-related target state based on the information and / or the model and to control the actuator according to the target state.

3. Sputtering device according to one of claims 1 to 2, further comprising: several clients, which have the client (302c) for each actuator of the two actuators (304b); and a communication link by means of which the several clients are communicatively coupled to each other and by means of which the information is requested; and wherein, preferably, the communication link extends through the target coupling and / or implements a fieldbus.

4. Sputtering device according to one of claims 1 to 3, wherein the request for information from the server (302s) for each actuator of the two actuators is addressed to the same server.

5. Sputtering device according to any one of claims 1 to 4, wherein the information represents a target state of the magnet system (602).

6. Sputtering device according to any one of claims 1 to 5, wherein the client (302c) is configured to repeatedly generate a time-based message to the server (302s) according to the client-server communication protocol, which includes at least one indication of the spatial position; the sputtering device preferably further comprising a control element configured to update the information based on the indication of the spatial position. HA 2172 DE 50 7. Sputtering device according to any one of claims 1 to 6, wherein the information from the server (302s) includes at least one indication of the status of the server (302s), preferably of the availability of the server (302s).

8. Sputtering device according to any one of claims 1 to 7, wherein the client-server communication protocol is implemented according to an application-oriented communication layer, wherein the application-oriented communication layer is preferably a session layer, a presentation layer or an application layer.

9. Sputtering device according to any one of claims 1 to 8, wherein the client-server communication protocol is configured to structure the information according to a fieldbus communication protocol.

10. Sputtering device according to any one of claims 1 to 9, further comprising several modules, each comprising a module comprising the actuator and the client (302c) for each actuator, wherein the modules are configured similarly to each other.

11. Using a client-server communication protocol to request information by means of a client (302c) from a server (302s), on the basis of which an actuator is controlled by means of the client (302c) to influence a spatial position of several pole bodies (444) of a magnet system (602) of a sputtering device relative to each other by means of the actuator.

12. Procedure, comprising: • Generating, by means of a client (302c), a request directed to a server (302s) of a sputtering device to provide information about a magnet system (602) of the sputtering device, wherein the request is generated according to a client-server communication protocol; • Control, by means of the client (302c) and based on the information, an actuator of the magnetic system (602) to influence a spatial position of several pole bodies (444) of the magnetic system (602) relative to each other by means of the actuator.

13. A computer program configured, when executed by a processor, to perform the method according to claim 12.

14. Computer-readable medium storing instructions configured, when executed by a processor, to cause the processor to perform the method according to claim 12.

15. Circuit comprising one or more processors configured to perform the method according to claim 12.

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