Methods and systems for removing contaminants in a radiation source
The method of erosion, steam flow, and heating with phase transition effectively addresses inefficiencies in tin removal from EUV sources, ensuring rapid bonding and reducing contamination, thereby enhancing EUV source cleanliness and functionality.
WO2026119463A1PCT designated stage Publication Date: 2026-06-11ASML NETHERLANDS BV
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- ASML NETHERLANDS BV
- Filing Date
- 2025-10-23
- Publication Date
- 2026-06-11
Smart Images
Figure EP2025080675_11062026_PF_FP_ABST
Abstract
A method for cleaning a surface of an element from contaminants adhered thereto is disclosed. The method comprising the following steps: eroding the contaminants to remove a first portion of the contaminants from the surface; directing a flow steam towards the metallic surface to remove a second portion of the contaminants; and heating the element to induce bonding between the surface and remaining contaminants, wherein the remaining contaminants are the contaminants that remain on the surface.
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