Nozzle supply system and component mounting machine

The nozzle supply system addresses the challenge of accurately recognizing the vertical height of the nozzle supply feeder by incorporating a measuring unit to correct its position, ensuring reliable nozzle collection and improved mounting precision.

WO2026126318A1PCT designated stage Publication Date: 2026-06-18FUJI CORP

Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
FUJI CORP
Filing Date
2024-12-10
Publication Date
2026-06-18

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  • Figure JP2024043529_18062026_PF_FP_ABST
    Figure JP2024043529_18062026_PF_FP_ABST
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Abstract

This nozzle supply system comprises a nozzle supply feeder and a measurement unit. The nozzle supply feeder supplies pickup nozzles for picking up components to a component mounting machine from a nozzle station capable of accommodating the pickup nozzles in a planar arrangement. The measurement unit measures, in a state in which the nozzle supply feeder is disposed on a feeder holding base so as to be replaceable with a tape feeder in the component mounting machine, a height position in a vertical direction of an upper surface portion of the nozzle supply feeder on which the nozzle station is provided.
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Description

Nozzle Supply System and Component Mounting Machine 【0001】 This specification discloses technologies related to a nozzle supply system and a component mounting machine. 【0002】 The nozzle exchange unit described in Patent Document 1 is set in the empty slot of the feeder set part of the component mounter. Also, a nozzle station loading part is provided in the cassette case of the nozzle exchange unit, and a disk-shaped rotary nozzle station is loaded in a replaceable manner. Further, a nozzle exchange port is formed at a position corresponding to the uppermost end of the rotary nozzle station on the upper end surface of the cassette case, and the suction nozzle can be exchanged between the rotary nozzle station and the mounting head of the component mounter through the nozzle exchange port. 【0003】 The sensor described in Patent Document 2 detects the height of the upper surface of the nozzle stocker. Specifically, the control unit drives the Z-axis motor to lower the nozzle, and determines whether the nozzle is completely inserted into the hole part and whether the collar part of the nozzle touches the upper surface of the nozzle stocker. Then, the control unit raises the nozzle by a certain amount and registers the position where the nozzle has risen by a certain amount as the Z-axis height of the nozzle shaft or the nozzle at the time of nozzle exchange. 【0004】 International Publication No. 2018 / 185864, Japanese Patent Laid-Open No. 11-145697 【0005】 The nozzle supply feeder is arranged on the feeder holding table of the component mounting machine and supplies the suction nozzle from the nozzle station to the component mounting machine. The suction nozzle is collected by a syringe provided on the mounting head. Therefore, if the vertical height position of the upper surface part of the nozzle supply feeder where the nozzle station is provided cannot be correctly recognized, the syringe may not reach the suction nozzle, and there is a possibility of failure in collecting the suction nozzle. Also, if the above height position cannot be correctly recognized, the syringe may be pushed too far into the suction nozzle, resulting in a possibility of failure in collecting the suction nozzle. 【0006】To attach the nozzle supply feeder to the feeder holder, a certain gap is required between the components, resulting in lower mounting accuracy for the nozzle supply feeder compared to the nozzle station mounted on the base of the component mounting machine. Furthermore, the nozzle supply feeder has many components between the feeder holder and the upper surface where the nozzle station is installed, making it more susceptible to variations in component dimensions compared to the nozzle station mounted on the base of the component mounting machine. 【0007】 In view of these circumstances, this specification discloses a nozzle supply system and a component mounting machine capable of measuring the vertical height position of the upper surface of a nozzle supply feeder on which a nozzle station is provided. 【0008】 This specification discloses a nozzle supply system comprising a nozzle supply feeder and a measuring unit. The nozzle supply feeder supplies suction nozzles for adsorbing parts from a nozzle station capable of housing suction nozzles arranged in a planar manner to a parts mounting machine. The measuring unit measures the vertical height position of the upper surface of the nozzle supply feeder on which the nozzle station is located, with the nozzle supply feeder positioned on a feeder holder in the parts mounting machine so as to be interchangeable with a tape feeder. 【0009】 This specification also discloses a component mounting machine comprising a nozzle supply feeder and a measuring unit. The nozzle supply feeder supplies suction nozzles for picking up components from a nozzle station capable of accommodating suction nozzles arranged in a planar manner to the component mounting machine. The measuring unit measures the vertical height position of the upper surface of the nozzle supply feeder on which the nozzle station is located, with the nozzle supply feeder positioned on a feeder holder in the component mounting machine so as to be interchangeable with a tape feeder. 【0010】Furthermore, this specification discloses a technical concept in which, in claim 6 of the claims initially attached to the application (hereinafter referred to as the "original claims"), "the nozzle supply system described in claim 1" is changed to "the nozzle supply system described in any one of claims 1 to 5". Also, this specification discloses a technical concept in which, in claim 8 of the original claims, "the nozzle supply system described in claim 1" is changed to "the nozzle supply system described in any one of claims 1 to 7". 【0011】 Furthermore, this specification discloses a technical concept in which, in claim 9 of the original claims, "the nozzle supply system described in claim 1" is changed to "the nozzle supply system described in any one of claims 1 to 8". Also, this specification discloses a technical concept in which, in claim 12 of the original claims, "the nozzle supply system described in claim 9" is changed to "the nozzle supply system described in any one of claims 9 to 11". 【0012】 According to the nozzle supply system described above, with the nozzle supply feeder positioned on the feeder holder, the vertical height position of the upper surface of the nozzle supply feeder, where the nozzle station is located, can be measured. The same applies to component mounting machines as described above regarding the nozzle supply system. 【0013】 This is a diagram showing an example of the configuration of production equipment. This is a plan view showing an example of the configuration of a parts mounting machine. This is a side view showing an example of the configuration of a tape feeder. This is a perspective view showing an example of a suction nozzle. This is a perspective view showing an example of the configuration of a nozzle supply feeder. This is a perspective view showing an example of the configuration of a nozzle station. This is a schematic diagram showing an example of the positional relationship between a syringe, a suction nozzle, and a nozzle station when a suction nozzle is collected by a syringe. This is a block diagram showing an example of the configuration of a nozzle supply system. This is a flowchart showing an example of a control procedure by a nozzle supply system. 【0014】1. Embodiment 1-1. Example of the configuration of the substrate processing line WL0 The production equipment includes at least one substrate processing line WL0. In the substrate processing line WL0, a substrate processing machine WM0 performs predetermined substrate processing on the substrate 90 to produce a product substrate 900. The type and number of substrate processing machines WM0 that constitute the substrate processing line WL0 are not limited. As shown in Figure 1, the substrate processing line WL0 of the embodiment includes a plurality of substrate processing machines WM0, which are a printing machine WM1, a printing inspection machine WM2, a component mounting machine WM3, a reflow oven WM4, and a visual inspection machine WM5, and the substrate 90 is transported in the above order by a substrate transport device. 【0015】 The printing press WM1 prints solder onto the mounting positions of the components 91 on the circuit board 90. The printing inspection machine WM2 inspects the printing condition of the solder printed by the printing press WM1. As shown in Figure 2, the component mounting machine WM3 mounts the components 91 onto the circuit board 90 on which the solder has been printed by the printing press WM1. There may be one component mounting machine WM3 or multiple component mounting machines. As shown in Figure 1, if multiple component mounting machines WM3 (three in this figure) are provided, the multiple component mounting machines WM3 can share the task of mounting the components 91. 【0016】 The reflow oven WM4 heats the substrate 90 on which the components 91 have been mounted by the component mounting machine WM3, melts the solder, and performs soldering. The visual inspection machine WM5 inspects the mounting condition of the components 91 mounted by the component mounting machine WM3. In this way, the substrate processing line WL0 can transport the substrate 90 sequentially using multiple substrate processing machines WM0 and produce product substrates 900 by executing production processes including inspection. The substrate processing line WL0 may also be equipped with substrate processing machines WM0 as needed, such as a functional inspection machine, buffer device, substrate supply device, substrate inversion device, shield mounting device, adhesive coating device, and ultraviolet irradiation device. 【0017】Multiple board-to-board work machines WM0 and line management device LC0, which constitute the board-to-board work line WL0, are communicated via a communication unit. Furthermore, line management device LC0 and management device HC0 are communicated via a communication unit. Additionally, management device HC0 and the work area 80 are communicated via a communication unit. The communication unit can connect these components via wired or wireless means, and various communication methods are possible. 【0018】 In this embodiment, a wireless local area network (LAN) is formed by multiple board-handling machines WM0, a line management device LC0, a management device HC0, and a work area 80. Therefore, the multiple board-handling machines WM0 can communicate wirelessly with each other via a communication unit. Furthermore, the multiple board-handling machines WM0 can communicate wirelessly with the line management device LC0 via a communication unit. In addition, the line management device LC0, the management device HC0, and the work area 80 can communicate wirelessly with each other via a communication unit. 【0019】 The line management device LC0 controls multiple board-to-board work machines WM0 that constitute the board-to-board work line WL0 and monitors the operating status of the board-to-board work line WL0. The line management device LC0 stores various control data for controlling the multiple board-to-board work machines WM0. The line management device LC0 transmits control data to each of the multiple board-to-board work machines WM0. In addition, each of the multiple board-to-board work machines WM0 transmits its operating status and production status to the line management device LC0. 【0020】The control device HC0 manages at least one line control device LC0. For example, the operating status and production status of the substrate processing machine WM0 acquired by the line control device LC0 are transmitted to the control device HC0 as needed. The control device HC0 is equipped with a storage device (e.g., a database). The storage device can store various acquired data acquired by the substrate processing machine WM0. For example, various image data captured by the substrate processing machine WM0 are included in the acquired data. Records of operating status (log data) acquired by the substrate processing machine WM0 are also included in the acquired data. The storage device can collect and store various production information related to the production of such product substrates 900. 【0021】 1-2. Example Configuration of Component Mounting Machine WM3 The component mounting machine WM3 mounts components 91 onto a substrate 90. As shown in Figure 2, the component mounting machine WM3 is equipped with a substrate transport device 11, a component supply device 12, a component transfer device 13, a component camera 14, a substrate camera 15, a control device 16, a display device 17, and a nozzle station 18. 【0022】 The substrate transport device 11 is composed of, for example, a belt conveyor and transports the substrate 90 in the transport direction (X-axis direction). The substrate 90 is a circuit board on which various circuits such as electronic circuits, electrical circuits, and magnetic circuits are formed. The substrate transport device 11 carries the substrate 90 into the component mounting machine WM3 and positions the substrate 90 at a predetermined position inside the machine. After the component mounting process of the component mounting machine WM3 is completed, the substrate transport device 11 transports the substrate 90 out of the component mounting machine WM3. 【0023】 The component supply device 12 supplies components 91 to be mounted on the substrate 90. Specifically, the component supply device 12 is equipped with a tape feeder 40 that can be attached and detached along the transport direction (X-axis direction) of the substrate 90. As shown in Figure 3, for example, the tape feeder 40 comprises a feeder body 41, a reel 42, a tape feeding mechanism 43, and a feeder control unit 44. The feeder body 41 is formed in a flat box shape and can be mounted in a slot 12s of a feeder holder 12a capable of holding various feeders. 【0024】The reel 42 is rotatably supported relative to the feeder body 41. A carrier tape containing the components 91 is wound around the reel 42. The tape feeding mechanism 43 feeds the carrier tape in a pitch manner to supply the components 91 in a pickable manner at the supply position PP0 located on the leading edge of the tape feeder 40. The feeder control unit 44 drives and controls the sprocket that feeds the carrier tape in a pitch manner. The component supply device 12 may also be equipped with a tray unit. The tray unit can supply relatively large electronic components (for example, leaded components) compared to chip components, etc., in a state where they are arranged on a tray. 【0025】 The component transfer device 13 comprises a head drive device 13a and a movable table 13b. The head drive device 13a is configured to move the movable table 13b in the X-axis direction and the Y-axis direction (directions perpendicular to the X-axis direction in the horizontal plane) by a linear motion mechanism. A mounting head 20 is detachably (replaceable) attached to the movable table 13b by a clamping member. The mounting head 20 uses at least one suction nozzle 30 to suction and hold the component 91 supplied by the component supply device 12, and mounts the component 91 onto the substrate 90 positioned by the substrate transport device 11. 【0026】 The suction nozzle 30 only needs to be able to adsorb and hold the part 91, and can take various forms. As shown in Figure 4, for example, the suction nozzle 30 comprises a body shaft 31, a flange 32, a nozzle shaft 34, and a nozzle identification code 35. The body shaft 31 is formed in a cylindrical shape. The flange 32 is formed in a disc shape with a larger diameter than the body shaft 31 and is coupled to one end of the body shaft 31 in the axial direction (the lower side of the paper in Figure 4). A recess 33 is formed in a part of the outer edge of the flange 32, recessed toward the center. The recess 33 fixes the rotation angle around the axis when the suction nozzle 30 is held by the mounting head 20. The recess 33 is also used when detecting the rotation angle around the axis when the suction nozzle 30 is held by the mounting head 20. 【0027】The nozzle shaft 34 is formed in the shape of a cylindrical tube that extends axially from the body shaft 31. The nozzle shaft 34 can attract the part 91 by contacting the opening at its tip. The nozzle shaft 34 is configured to move axially back and forth relative to the body shaft 31. Specifically, the nozzle shaft 34 is biased by an elastic member in the direction of advancing from the body shaft 31. When a load is applied to the tip of the nozzle shaft 34 toward the body shaft 31, the nozzle shaft 34 retracts into the body shaft 31 against the elastic force of the elastic member. This reduces the impact or load acting on the part 91 from the suction nozzle 30 during the part 91 suction or mounting process. 【0028】 The nozzle identification code 35 is attached to the upper surface of the flange 32. The nozzle identification code 35 may be a two-dimensional code, for example, and may include unique information such as the type of suction nozzle 30 and individual information. The nozzle identification code 35 can be read by a reading device (for example, a known code reader, substrate camera 15, etc.). Note that there are multiple types of suction nozzles 30, depending on the size, shape, etc., of the part 91 to be suctioned. 【0029】 For example, the suction nozzle 30 is designed so that the nozzle shaft 34 has a larger diameter and the opening at the tip is larger as the size of the object 91 to be suctioned increases. Multiple types of suction nozzles 30 have the same diameter and thickness of at least the flange 32, and are interchangeable for mounting. Furthermore, the nozzle shaft 34 is not limited to a cylindrical shape, and the opening at the tip is not limited to a circular shape. For example, the opening at the tip may be elliptical, and the nozzle shaft 34 may be formed in a tubular shape with a non-circular cross-section to accommodate a non-circular opening. In addition, an insulating material such as rubber may be provided at the tip of the nozzle shaft 34. 【0030】The component camera 14 and the substrate camera 15 can use known imaging devices. The component camera 14 is fixed to the base of the component mounting machine WM3 so that its optical axis is upward in the vertical direction (Z-axis direction perpendicular to the X-axis and Y-axis directions). The component camera 14 can image the component 91 held by the suction nozzle 30 from below. The substrate camera 15 is mounted on the movable table 13b of the component transfer device 13 so that its optical axis is downward in the vertical direction (Z-axis direction). The substrate camera 15 can image the substrate 90 and the like from above. The component camera 14 and the substrate camera 15 perform imaging based on control signals sent from the control device 16. Image data of the images captured by the component camera 14 and the substrate camera 15 is transmitted to the control device 16. 【0031】 The control device 16 is equipped with a known arithmetic unit and memory device, and a control circuit is configured within it. The control device 16 receives information, image data, and other data output from various sensors provided on the component mounting machine WM3. Based on a control program and predetermined mounting conditions set in advance, the control device 16 sends control signals to each device. 【0032】 For example, the control device 16 causes the substrate camera 15 to image the substrate 90 positioned by the substrate transport device 11. The control device 16 processes the image captured by the substrate camera 15 to recognize the positioning state of the substrate 90. The control device 16 also causes the component 91 supplied by the component supply device 12 to be picked up and held by the suction nozzle 30, and causes the component camera 14 to image the component 91 held by the suction nozzle 30. The control device 16 processes the image captured by the component camera 14 to recognize the holding posture of the component 91. 【0033】 The control device 16 moves the suction nozzle 30 upwards towards the planned mounting position, which is predetermined by a control program or the like. The control device 16 also corrects the planned mounting position based on the positioning state of the substrate 90, the holding posture of the component 91, etc., to set the actual mounting position for mounting the component 91. The planned mounting position and the mounting position include not only the position (X-axis coordinate and Y-axis coordinate) but also the rotation angle. 【0034】 The control device 16 corrects the target position (X-axis coordinates and Y-axis coordinates) and rotation angle of the suction nozzle 30 to match the mounting position. The control device 16 lowers the suction nozzle 30 at the corrected rotation angle at the corrected target position and mounts the component 91 onto the substrate 90. The control device 16 repeats the above pick-and-place cycle to perform a mounting process that mounts multiple components 91 onto the substrate 90. The time it takes for the substrate work to be performed on one substrate 90 in the substrate work machine WM0 is called the cycle time. 【0035】 The display device 17 can display various types of information. The display device 17 only needs to be able to display various types of information, and any known display device can be used. Specifically, the display device 17 is equipped with a display unit that displays various data in a way that is easily visible to the operator. Furthermore, for example, the display unit may be configured as a touch panel and function as an input device that accepts various operations from the operator. 【0036】 The nozzle station 18 accommodates multiple suction nozzles 30 in an automatically replaceable manner. Specifically, the nozzle station 18 is detachably mounted on a base in the area between the substrate transport device 11 and the component supply device 12, and adjacent to the component camera 14. The mounting head 20 can move to the nozzle station 18 and exchange the suction nozzle 30 it is holding with the suction nozzle 30 housed in the nozzle station 18. By automatically exchanging the suction nozzles 30, the mounting head 20 can increase the types and number of usable suction nozzles 30, enabling the mounting of multiple types of components 91 with different sizes and other characteristics. 【0037】 1-3. Example of Nozzle Supply Feeder 50 Configuration As previously described, the nozzle station 18 is fixed to the base of the component mounting machine WM3, and the attachment and detachment of the nozzle station 18 is performed by an operator when the component mounting machine WM3 is not in operation. Therefore, it may be difficult for the nozzle station 18 to flexibly supply multiple types of suction nozzles 30 in accordance with changes in the type of product substrate 900 being produced. 【0038】Therefore, the parts supply device 12 can be equipped with a nozzle supply feeder 50. The nozzle supply feeder 50 can be positioned on the feeder holder 12a in the parts mounting machine WM3 in a manner interchangeable with the tape feeder 40, and supplies suction nozzles 30 to the parts mounting machine WM3. The nozzle supply feeder 50 also includes a nozzle station 60 in which the suction nozzles 30 are arranged in a planar manner and can be accommodated. The nozzle station 60 can be detachably attached to the nozzle supply feeder 50. The nozzle supply feeder 50 can also be mounted in a slot 12s of the feeder holder 12a. 【0039】 Specifically, the nozzle supply feeder 50 has an external shape that is generally the same as the tape feeder 40, except for the width dimension (the dimension in the transport direction (X-axis direction) of the substrate 90), and is compatible with the tape feeder 40 in terms of mounting. Therefore, the nozzle supply feeder 50 can be detachably mounted in one or more slots 12s of the feeder holder 12a. When the nozzle supply feeder 50 is mounted in a slot 12s, the mounting head 20 can exchange the suction nozzle 30 with the nozzle station 60, similar to the nozzle station 18. 【0040】 As shown in Figure 5, the nozzle supply feeder 50 has various components assembled to a unit body 51 including side plates. The unit body 51 is formed in a box shape that is flattened in the width direction (X-axis direction) and can be mounted in a slot 12s of the feeder holding base 12a. Specifically, the nozzle supply feeder 50 comprises a nozzle station 60, a unit body 51, a lifting drive unit 52, a restricting drive unit 53, and a unit control unit 54. 【0041】The nozzle station 60 is provided so as to be able to move up and down at the supply position PP0 set at the upper part of the tip side of the unit main body 51. The nozzle station 60 may have various forms as long as the suction nozzles 30 can be arranged and accommodated in a planar manner. As shown in FIG. 6, for example, the nozzle station 60 includes a base body 61, a base plate 62, and a cover plate 65. The base body 61 is formed in a rectangular frame shape in plan view. The base body 61 has a height dimension larger than the length dimension of the tip side of the flange 32 of the suction nozzle 30, and secures a storage space for the nozzle shaft 34 of the suction nozzle 30 inside. 【0042】 The base plate 62 is a storage member that is arranged on a plane and includes a plurality of storage portions (storage holes) capable of accommodating the suction nozzles 30. The base plate 62 is a rectangular plate-like member and is bridged over the upper part of the base body 61. The base plate 62 includes a plurality of stepped storage holes 63 and a plurality of fitting pins 64. The plurality of stepped storage holes 63 are arranged at two-dimensional grid points with substantially equal separation distances except for the outer edge portions in the longitudinal direction of the base plate 62. 【0043】 The diameter of the large-diameter portion at the upper part of the stepped storage hole 63 is larger than the diameter of the flange 32 of the suction nozzle 30. Also, the height dimension of the large-diameter portion at the upper part of the stepped storage hole 63 is slightly larger than the thickness of the flange 32. The diameter of the small-diameter portion at the lower part of the stepped storage hole 63 is smaller than the diameter of the flange 32 and larger than the diameter of the body axis 31. The plurality of fitting pins 64 are arranged at the outer edge portions in the longitudinal direction of the base plate 62 and stand upright upward. 【0044】 The cover plate 65 is a regulating member that regulates the suction nozzles 30 stored in the stepped storage holes 63 from popping out except during automatic replacement. The cover plate 65 is a plate-like member having substantially the same shape and size as the base plate 62, and is arranged so as to be slidable on the upper side of the base plate 62. The cover plate 65 includes a plurality of regulating holes 66 and a plurality of long holes 69. Each of the plurality of regulating holes 66 is arranged above the stepped storage hole 63. 【0045】Each of the plurality of regulating holes 66 has a shape in which a large-diameter arc portion 67 and a small-diameter arc portion 68 are arranged side by side in the longitudinal direction of the cover plate 65. The diameter of the large-diameter arc portion 67 is larger than the diameter of the flange 32. Also, the diameter of the small-diameter arc portion 68 is smaller than the diameter of the flange 32 and larger than the diameter of the body axis 31. Further, even if there is a constricted portion between the large-diameter arc portion 67 and the small-diameter arc portion 68 of the regulating hole 66, it is sufficient that the opening width dimension of the constricted portion is larger than the diameter of the body axis 31. 【0046】 Each of the plurality of long holes 69 is formed along the longitudinal direction of the cover plate 65 and is respectively arranged on the fitting pins 64. Each of the plurality of long holes 69 is fitted with a gap provided so that the fitting pin 64 can move relatively. Thereby, the cover plate 65 can slide in the longitudinal direction with respect to the base plate 62. Also, the fitting pin 64 is expanded in diameter above passing through the long hole 69, and the deviation of the cover plate 65 upward is suppressed. 【0047】 The nozzle station 60 is operated to be in an exchangeable state when the suction nozzle 30 is automatically exchanged. In the exchangeable state of the nozzle station 60, the cover plate 65 is slid, and the large-diameter arc portion 67 of the regulating hole 66 and the stepped accommodation hole 63 overlap vertically. Then, the flange 32 of the suction nozzle 30 to be received descends through the large-diameter arc portion 67 and is placed on the stepped portion of the stepped accommodation hole 63. Also, the flange 32 of the suction nozzle 30 to be delivered ascends from the stepped portion of the stepped accommodation hole 63 through the large-diameter arc portion 67. 【0048】 On the other hand, the nozzle station 60 is operated to be in a regulating state that regulates the protrusion of the suction nozzle 30 held during normal times other than during automatic exchange. In the regulating state of the nozzle station 60, the sliding movement of the cover plate 65 is returned to the original position, and the small-diameter arc portion 68 of the regulating hole 66 and the stepped accommodation hole 63 overlap vertically. Then, the flange 32 is sandwiched and accommodated between the small-diameter portion of the stepped accommodation hole 63 and the periphery of the small-diameter arc portion 68, thereby suppressing the protrusion of the suction nozzle 30. 【0049】As shown in Figure 5, the lifting drive unit 52 and the restricting drive unit 53 are located on the base side of the nozzle station 60. The lifting drive unit 52 drives the nozzle station 60 up and down between an upper exchange position in the vertical direction (Z-axis direction) and a lower standby position in the vertical direction (Z-axis direction) via a known transmission mechanism. The restricting drive unit 53 controls the sliding movement of the cover plate 65 via a known transmission mechanism, switching the suction nozzle 30 at the nozzle station 60 between an exchangeable state and a restricted state. The lifting drive unit 52 and the restricting drive unit 53 can use known drive sources (for example, an electromagnetic solenoid). 【0050】 The lifting drive unit 52 maintains the nozzle station 60 in the standby position when the drive power is lost. In other words, if the nozzle supply feeder 50 equipped on the component mounting machine WM3 is not supplied with drive power for any reason, it will not raise the nozzle station 60 to the replacement position, thus suppressing interference between the nozzle station 60 and the operation of other parts. In addition, the restricting drive unit 53 maintains the nozzle station 60 in the restricted state when the drive power is lost. In other words, even if the nozzle supply feeder 50 is removed from the slot 12s and the drive power is not supplied, the ejection of the suction nozzle 30 is suppressed. 【0051】 The unit control unit 54 is located at the lower base end of the unit body 51. The unit control unit 54 controls the lifting drive unit 52 and the restricting drive unit 53 and monitors the state of the locking mechanism. The unit control unit 54 is communicatively connected to the control device 16 of the component mounting machine WM3 via a connector and performs control according to commands from the control device 16. When the nozzle supply feeder 50 is installed in slot 12s, the supply position PP0 of the suction nozzle 30 is the same as the supply position PP0 of the tape feeder 40 installed in slot 12s. The mounting head 20 can move to the supply position PP0 of the nozzle supply feeder 50 and automatically replace the suction nozzle 30. 【0052】The nozzle supply feeder 50, equipped in slot 12s, raises the nozzle station 60 to the replacement position when the suction nozzle 30 is automatically replaced. This raises the nozzle station 60 to a height where the mounting head 20 can descend and the suction nozzle 30 can be automatically replaced. In addition, the nozzle supply feeder 50 lowers the nozzle station 60 to the standby position and keeps it on standby during normal operation, other than when the suction nozzle 30 is automatically replaced. This prevents interference between the nozzle station 60 and the mounting head 20 and suction nozzle 30, which descend for the suction processing of the part 91. 【0053】 1-4. Example of Nozzle Supply System 70 Configuration As shown in Figure 2, the nozzle supply feeder 50 is positioned on the feeder holder 12a of the component mounting machine WM3 and supplies suction nozzles 30 from the nozzle station 60 to the component mounting machine WM3. As shown in Figure 7, the suction nozzles 30 are collected by a syringe 21 provided on the mounting head 20. Figure 7 is a schematic view of the mounting head 20 from the side, and simulates the positional relationship between the syringe 21, the suction nozzles 30, and the nozzle station 60 when the suction nozzles 30 are collected by the syringe 21. 【0054】 If the control device 16 fails to correctly recognize the vertical (Z-axis) height position HP0 of the upper surface TS0 of the nozzle supply feeder 50 on which the nozzle station 60 is installed, the syringe 21 may not reach the suction nozzle 30, potentially resulting in failure to collect samples from the suction nozzle 30. Furthermore, if the control device 16 fails to correctly recognize the above height position HP0, the syringe 21 may be pushed too far into the suction nozzle 30, potentially leading to failure to collect samples from the suction nozzle 30. 【0055】In order to attach the nozzle supply feeder 50 to the feeder holder 12a, a certain gap is required between the components, and the mounting accuracy of the nozzle supply feeder 50 is lower compared to the nozzle station 18 provided on the base of the component mounting machine WM3. Furthermore, the nozzle supply feeder 50 has many components interposed between the feeder holder 12a and the upper surface TS0 where the nozzle station 60 is provided, and the influence of variations in the dimensions of the components is greater compared to the nozzle station 18 provided on the base of the component mounting machine WM3. 【0056】 Therefore, the production equipment is equipped with a nozzle supply system 70. The nozzle supply system 70 measures the vertical (Z-axis direction) height position HP0 of the upper surface TS0 of the nozzle supply feeder 50, on which the nozzle station 60 is located, when the nozzle supply feeder 50 is positioned on the feeder holder 12a. Specifically, the nozzle supply system 70 comprises a nozzle supply feeder 50 and a measuring unit 71. The nozzle supply system 70 may also include a correction unit 72. As shown in Figure 8, the nozzle supply system 70 of this embodiment comprises a nozzle supply feeder 50, a measuring unit 71, and a correction unit 72. 【0057】 The measurement unit 71 and the correction unit 72 can be provided in various control devices and management devices. For example, at least one of the measurement unit 71 and the correction unit 72 can be provided in the control device 16 of the component mounting machine WM3. At least one of the measurement unit 71 and the correction unit 72 can also be provided in the line management device LC0, the management device HC0, etc. At least one of the measurement unit 71 and the correction unit 72 can also be formed on the cloud. The measurement unit 71 and the correction unit 72 can also be distributed across various control devices, management devices, the cloud, etc. 【0058】As shown in Figure 7, in the nozzle supply system 70 of this embodiment, the measuring unit 71 and the correction unit 72 are provided in the control device 16 of the component mounting machine WM3. Furthermore, the nozzle supply system 70 of this embodiment performs control according to the flowchart shown in Figure 9. The measuring unit 71 performs the processing shown in steps S11 and S14. The correction unit 72 performs the judgment and processing shown in steps S12, S13, S15 and S16. Note that the matters described herein can be selected and applied as appropriate. Also, the matters described herein can be combined as appropriate. 【0059】 As previously described, the nozzle supply feeder 50 includes a nozzle station 60 in which suction nozzles 30 for picking up parts 91 are arranged in a planar manner and can be accommodated. The nozzle supply feeder 50 also supplies the suction nozzles 30 from the nozzle station 60 to the parts mounting machine WM3. The nozzle supply feeder 50 only needs to be able to supply the suction nozzles 30 as described above, and can take various forms. For example, as shown in Figure 1, a maintenance unit 81 capable of performing maintenance work on the suction nozzles 30 is provided in the work area 80. 【0060】 The process of storing the suction nozzles 30 required for production into the nozzle station 60 of the nozzle supply feeder 50 can be carried out using equipment capable of transferring the suction nozzles 30, such as a maintenance unit 81. In this case, if the nozzle station 60 is detachable from the nozzle supply feeder 50, only the nozzle station 60 can be transported to the maintenance unit 81, and the existing maintenance unit 81 can be used as is. Therefore, it is preferable that the nozzle station 60 be detachably provided on the nozzle supply feeder 50. In this embodiment, the nozzle station 60 is detachable from the unit body 51. 【0061】As shown in Figure 1, for example, the nozzle supply feeder 50 is transported to and installed in the component mounting machine WM3 by the transport device TD0. The transport device TD0 only needs to be able to transport the nozzle supply feeder 50 and install it in the component mounting machine WM3, and can take various forms. The transport device TD0 can be a known transport device that travels along a travel path provided along the substrate work line WL0 and can exchange items (e.g., feeders, etc.) with the component mounting machine WM3. 【0062】 Furthermore, the transport device TD0 can also use known automated guided vehicles (AGVs), autonomous mobile robots (AMRs), etc. The component mounting machine WM3 uses the mounting head 20 to take in and use the suction nozzles 30 housed in the nozzle station 60 of the nozzle supply feeder 50 located on the feeder holding base 12a, and can also use the mounting head 20 to store the suction nozzles 30 used in the machine back into the nozzle station 60. 【0063】 1-4-1. Measurement and Correction of Height Position HP0 The measurement unit 71 measures the vertical (Z-axis direction) height position HP0 of the upper surface TS0 of the nozzle supply feeder 50, which is equipped with a nozzle station 60, when the nozzle supply feeder 50 is positioned on the feeder holding base 12a in the component mounting machine WM3 so as to be interchangeable with the tape feeder 40 (step S11 shown in Figure 9). The measurement unit 71 only needs to be able to measure the above height position HP0 and can take various forms. 【0064】For example, the measuring unit 71 can measure the height position HP0 of the nozzle station 60 in the vertical direction (Z-axis direction). Assume that when the nozzle supply feeder 50 is placed on the feeder holder 12a, the inclination angle of the nozzle station 60 with respect to the horizontal plane formed by the X-axis direction and the Y-axis direction as shown in Figures 2 and 5 (hereinafter simply referred to as the horizontal plane) is within the allowable range and the horizontality LN0 is maintained. In this case, the height position HP0 is the same at any point on the nozzle station 60, and the measuring unit 71 can measure the height position HP0 at any one point on the nozzle station 60. 【0065】 However, when the nozzle supply feeder 50 is placed on the feeder holder 12a, it is conceivable that the inclination angle of the nozzle station 60 with respect to the horizontal plane may exceed the allowable range, and the horizontality LN0 may not be maintained. In such cases, the measuring unit 71 may measure the height position HP0 at multiple locations on the nozzle station 60. As shown in Figure 6, for example, the nozzle station 60 is formed in a rectangular shape when viewed in the vertical direction (Z-axis direction). In this case, the measuring unit 71 can measure the height position HP0 at at least three of the four corners of the nozzle station 60. 【0066】 As shown in Figure 6, for example, the measuring unit 71 can measure the height position HP0 at three of the four corners of the nozzle station 60, indicated by arrows A1 to A3. The height position HP0 of other parts of the nozzle station 60 where the height position HP0 is not measured can be interpolated based on the measurement results measured by the measuring unit 71. For example, in the case of linear interpolation, the height position HP0 of the part midway between the corner indicated by arrow A1 and the corner indicated by arrow A2 can be the average value of the measurement results of the corner indicated by arrow A1 and the corner indicated by arrow A2. 【0067】Furthermore, when the upper surface TS0 of the nozzle supply feeder 50 is used as the reference, the mounting accuracy of the nozzle station 60 can be made to be about the same as the mounting accuracy when the nozzle station 18 is mounted on the base of the component mounting machine WM3. The mounting accuracy when the nozzle station 18 is mounted on the base of the component mounting machine WM3 is high enough that it is not necessary to measure the vertical (Z-axis) height position HP0 of the nozzle station 18 during the production of the product substrate 900. Also, when the upper surface TS0 of the nozzle supply feeder 50 is used as the reference, the number of intervening components before the nozzle station 60 is small, and the influence of variations in the dimensions of the intervening components is small. Therefore, the measuring unit 71 can also measure the vertical (Z-axis) height position HP0 of the non-station area AR2, which is the area of ​​the upper surface TS0 of the nozzle supply feeder 50 other than the station area AR1 where the nozzle station 60 is installed. 【0068】 The measuring unit 71 can measure the height position HP0 at any point in the non-station area AR2. Furthermore, the measuring unit 71 may measure the height position HP0 at multiple points in the non-station area AR2, similar to the case of the nozzle station 60. For example, the measuring unit 71 can measure the height position HP0 at multiple points on the planar surface of the non-station area AR2 as shown in Figure 5. The height position HP0 of the nozzle station 60 can then be estimated based on the measurement results of the non-station area AR2 measured by the measuring unit 71. 【0069】 In both the station area AR1 and the non-station area AR2, the measurement unit 71 can measure the height position HP0 using a known sensor. For example, the measurement unit 71 can measure the height position HP0 using a laser sensor LS0. As shown in Figure 2, the laser sensor LS0 in this embodiment is provided on the movable table 13b of the component transfer device 13. As previously described, the movable table 13b can move in the X-axis direction and the Y-axis direction, and the measurement unit 71 can measure the height position HP0 from above the nozzle supply feeder 50 in the vertical direction (Z-axis direction) using the laser sensor LS0. 【0070】In this case, for example, a reflective type laser sensor LS0 can be used. The reflective type laser sensor LS0 emits laser light from its light-emitting section onto the upper surface TS0 of the nozzle supply feeder 50. The laser sensor LS0 then receives the reflected light reflected from the upper surface TS0 of the nozzle supply feeder 50 with a light-receiving element, and can measure the height position HP0 based on the light-receiving position on the light-receiving element. The reflective type laser sensor LS0 can also measure the height position HP0 based on the time required from the emission of the laser light to the reception of the reflected light reflected from the upper surface TS0 of the nozzle supply feeder 50 by the light-receiving element. Thus, when using a reflective type laser sensor LS0, the measurement area (the area from which the laser light is emitted) can be any area that is formed in a planar shape capable of reflecting laser light. 【0071】 The correction unit 72 corrects the descent stop position LP0, which lowers the syringe 21 toward the nozzle station 60 and stops it, according to the measured height position HP0 if the height position HP0 measured by the measurement unit 71 is not within the allowable range (steps S12 and S13 shown in Figure 9). As shown in Figure 7, the syringe 21 is a component provided on the mounting head 20 of the component mounting machine WM3 and is capable of collecting samples from the suction nozzle 30. The raising and lowering of the syringe 21 can be controlled by the control device 16. The allowable range of the height position HP0 is the range in which the syringe 21 can collect samples from the suction nozzle 30 even without the above correction, and can be set in advance based on design values, etc. 【0072】The correction unit 72 calculates the deviation ΔP0 between the reference height position BP0 in the vertical direction (Z-axis direction) of the upper surface TS0 of the nozzle supply feeder 50 and the height position HP0 measured by the measurement unit 71, and can correct the descent stop position LP0 to eliminate the calculated deviation ΔP0. The reference height position BP0 is the reference height position HP0 of the upper surface TS0 of the nozzle supply feeder 50, and can be set in advance based on design values, etc. For example, the reference height position BP0 can be set to the median value of the allowable range of the height position HP0 described above. Furthermore, the correction unit 72 can correct the descent stop position LP0 for each suction nozzle 30 housed in the nozzle station 60. 【0073】 In the example shown in Figure 7, the height position HP0 measured by the measuring unit 71 is displaced vertically (in the Z-axis direction) downward from the reference height position BP0. In this case, the correction unit 72 can set the descent stop position LP0 to a position displaced vertically (in the Z-axis direction) by a deviation ΔP0 from the descent stop position LP0 set based on the reference height position BP0. Conversely, consider the case where the height position HP0 measured by the measuring unit 71 is displaced vertically (in the Z-axis direction) upward from the reference height position BP0. In this case, the correction unit 72 can set the descent stop position LP0 to a position displaced vertically (in the Z-axis direction) by a deviation ΔP0 from the descent stop position LP0 set based on the reference height position BP0. 【0074】 As shown in Figure 2, multiple feeders can be placed on the feeder holder 12a. Therefore, if other feeders are attached to or detached from the feeder holder 12a on which the nozzle supply feeder 50 is placed, the height position HP0 of the upper surface TS0 of the nozzle supply feeder 50 may change. For this reason, it is preferable for the measuring unit 71 to measure the height position HP0 and the correction unit 72 to correct the lowering stop position LP0 not immediately after the nozzle supply feeder 50 is placed on the feeder holder 12a, but before the nozzle supply feeder 50 is actually used. 【0075】Specifically, the measurement unit 71 should measure the height position HP0 before the suction nozzle 30 is replaced between the mounting head 20 and the nozzle station 60 on the component mounting machine WM3. The correction unit 72 should correct the descent stop position LP0 before the suction nozzle 30 is replaced between the mounting head 20 and the nozzle station 60 on the component mounting machine WM3. If the correction amount exceeds the correctable range and the suction nozzle 30 is replaced, the suction nozzle 30 may fail to collect samples, potentially increasing the cycle time. Therefore, the correction unit 72 should restrict the replacement of the suction nozzle 30 if the correction amount of the descent stop position LP0 exceeds the correctable range. In this case, the correction unit 72 can also guide the operator to check the status of the nozzle supply feeder 50. 【0076】 1-4-2. Measurement and Correction of Horizontality LN0 As previously described, when the nozzle supply feeder 50 is placed on the feeder holder 12a, it is conceivable that the inclination angle of the nozzle station 60 with respect to the horizontal plane exceeds the allowable range, and the horizontality LN0 may not be maintained. Therefore, the measurement unit 71 can measure the horizontality LN0 of the upper surface TS0 of the nozzle supply feeder 50 while the nozzle supply feeder 50 is placed on the feeder holder 12a (step S14 shown in Figure 9). 【0077】 The measuring unit 71 only needs to be able to measure the horizontality LN0 and can take various forms. For example, the measuring unit 71 can measure the height position HP0 in the vertical direction (Z-axis direction) at multiple locations on the upper surface TS0 of the nozzle supply feeder 50, and obtain the horizontality LN0 based on the deviation of the height position HP0 at the multiple locations that were measured. As previously described, the upper surface TS0 of the nozzle supply feeder 50 may be the station area AR1 on which the nozzle station 60 is provided, or it may be a non-station area AR2 which is an area other than the station area AR1. 【0078】As shown in Figure 6, for example, let's assume that the measuring unit 71 measures the height position HP0 at three of the four corners of the nozzle station 60, indicated by arrows A1 to A3. Let's also assume that the height position HP0 at the corner indicated by arrow A1 is the same as the height position HP0 at the corner indicated by arrow A2, and that the height position HP0 at the corner indicated by arrow A3 is displaced vertically (in the Z-axis direction) downward by a predetermined deviation compared to the height positions HP0 at the corners indicated by arrows A1 and A2. 【0079】 In this case, the nozzle station 60 is tilted with the corner indicated by arrow A3 rotated downward in the vertical direction (Z-axis direction) by a predetermined deviation, with the axis being the straight line connecting the corner indicated by arrow A1 and the corner indicated by arrow A2. Since the distance between the corner indicated by arrow A1 and the corner indicated by arrow A3 is known, the measuring unit 71 can obtain the tilt angle of the nozzle station 60 with respect to the horizontal plane, that is, the horizontality LN0 of the nozzle station 60, from this distance and the predetermined deviation. 【0080】 The measuring unit 71 can also use the imaging device IM0 to image the upper surface TS0 of the nozzle supply feeder 50 and obtain the horizontality LN0 based on the image of the upper surface TS0 of the nozzle supply feeder 50 that has been imaged. The imaging device IM0 only needs to be able to image the upper surface TS0 of the nozzle supply feeder 50, and any known imaging device can be used. As shown in Figure 2, the imaging device IM0 of the embodiment is provided on the movable table 13b of the component transfer device 13. As previously described, the movable table 13b can move in the X-axis direction and the Y-axis direction, and the imaging device IM0 can image the upper surface TS0 of the nozzle supply feeder 50 from diagonally above the upper surface TS0. 【0081】For example, the imaging device IM0 can image the upper surface of the nozzle station 60 along its longitudinal direction from the corner indicated by arrow A3 on the side of the nozzle station 60 shown in Figure 6. Similar to the previously described example, let's assume that the nozzle station 60 is tilted with the corner indicated by arrow A3 rotated downward in the vertical direction (Z-axis direction) by a predetermined deviation, with the axis being the straight line connecting the corner indicated by arrow A1 and the corner indicated by arrow A2. 【0082】 In this case, for example, the shape of the outer edge of the nozzle station 60 in the image of the nozzle station 60 captured by the imaging device IM0 will differ from the shape of the nozzle station 60 when it is not tilted. Furthermore, the shape of the outer edge of the nozzle station 60 in the image of the nozzle station 60 will also differ depending on the tilt angle of the nozzle station 60. Therefore, the measuring unit 71 can obtain the tilt angle of the nozzle station 60 with respect to the horizontal plane, that is, the horizontality LN0 of the nozzle station 60, based on the shape of the outer edge of the nozzle station 60 in the image of the nozzle station 60. The same applies to the characteristic parts of the upper surface of the nozzle station 60 (for example, the housing part that can accommodate the suction nozzle 30). 【0083】 The correction unit 72 can correct the horizontality LN0 measured by the measurement unit 71 by raising or lowering a predetermined part of the nozzle station 60 using the lifting device LD0 if the LN0 is not within the acceptable range (steps S15 and S16 shown in Figure 9). The acceptable range for horizontality LN0 can be set in advance, in the same way as the acceptable range for height position HP0. The lifting device LD0 only needs to be able to raise or lower a predetermined part of the nozzle station 60, and any known lifting mechanism (linear motion mechanism) can be used. For example, the lifting device LD0 can be a ball screw driven by an electric motor. 【0084】Furthermore, as shown in Figure 6, the nozzle station 60 of the embodiment is formed in a rectangular shape when viewed in the vertical direction (Z-axis direction). In this case, the correction unit 72 can raise and lower at least two of the four corners of the nozzle station 60. In the example described above, the correction unit 72 can correct the horizontality LN0 by raising two corners by a predetermined deviation using the lifting device LD0, as shown by arrows B1 and B2. If the height position HP0 of the corner indicated by arrow A1 and the corner indicated by arrow A2 are different, the correction unit 72 may further raise and lower at least one of the remaining two corners of the nozzle station 60 using the lifting device LD0. 【0085】 Furthermore, the correction unit 72 can correct the horizontality LN0 measured by the measurement unit 71 if the horizontality LN0 measured by the measurement unit 71 is not within the acceptable range, regardless of whether the height position HP0 measured by the measurement unit 71 is within the acceptable range. In addition, the correction unit 72 can also correct the horizontality LN0 if the height position HP0 measured by the measurement unit 71 is not within the acceptable range and the correction amount for the descent stop position LP0 exceeds the range that can be corrected. 【0086】 Furthermore, similar to the case of height position HP0, it is preferable for the measuring unit 71 to measure the horizontality LN0 and the correction unit 72 to correct the horizontality LN0 not immediately after the nozzle supply feeder 50 is placed on the feeder holding base 12a, but before the nozzle supply feeder 50 is actually used. In other words, it is preferable for the measuring unit 71 to measure the horizontality LN0 before the suction nozzle 30 is replaced between the mounting head 20 provided on the component mounting machine WM3 and the nozzle station 60. It is preferable for the correction unit 72 to correct the horizontality LN0 before the suction nozzle 30 is replaced between the mounting head 20 provided on the component mounting machine WM3 and the nozzle station 60. The correction unit 72 should restrict the replacement of the suction nozzle 30 if the amount of horizontality LN0 correction exceeds the range that can be corrected. In this case, the correction unit 72 can also guide the operator to check the status of the nozzle supply feeder 50. 【0087】2. The same applies to the component mounting machine WM3 as to the nozzle supply system 70 described above. Specifically, the component mounting machine WM3 includes a nozzle supply feeder 50 and a measuring unit 71. The component mounting machine WM3 may also include a correction unit 72. Note that redundant explanations have been omitted in this specification. 【0088】 3. An example of the effects of the embodiment: With the nozzle supply system 70, when the nozzle supply feeder 50 is positioned on the feeder holder 12a, the vertical (Z-axis) height position HP0 of the upper surface TS0 of the nozzle supply feeder 50, on which the nozzle station 60 is located, can be measured. The same applies to the component mounting machine WM3 as described above for the nozzle supply system 70. 【0089】 12a: Feeder holder, 20: Mounting head, 21: Syringe, 30: Suction nozzle, 40: Tape feeder, 50: Nozzle supply feeder, 60: Nozzle station, 70: Nozzle supply system, 71: Measurement unit, 72: Correction unit, 91: Parts, TS0: Top surface, AR1: Station area, AR2: Non-station area, HP0: Height position, BP0: Reference height position, ΔP0: Deviation, LP0: Lowering stop position, LS0: Laser sensor, LN0: Horizontalness, IM0: Imaging device, LD0: Lifting device, WM3: Part mounting machine.

Claims

1. A nozzle supply system comprising: a nozzle supply feeder that supplies suction nozzles for picking up parts from a nozzle station capable of housing suction nozzles arranged in a planar manner to a parts mounting machine; and a measuring unit that measures the vertical height position of the upper surface of the nozzle supply feeder on which the nozzle station is located, with the nozzle supply feeder positioned on a feeder holding base in the parts mounting machine so as to be interchangeable with a tape feeder.

2. The nozzle supply system according to claim 1, wherein the nozzle station is detachably provided on the nozzle supply feeder.

3. The nozzle supply system according to claim 1 or 2, wherein the measuring unit measures the vertical height position of the nozzle station.

4. The nozzle supply system according to claim 3, wherein the nozzle station is formed in a rectangular shape when viewed in the vertical direction, and the measuring unit measures the height position at at least three of the four corners of the nozzle station.

5. The nozzle supply system according to claim 1 or 2, wherein the measuring unit measures the vertical height position of the non-station area, which is an area of ​​the upper surface of the nozzle supply feeder other than the station area where the nozzle station is provided.

6. The nozzle supply system according to claim 1, further comprising a correction unit that, when the height position measured by the measuring unit is not within an acceptable range, corrects the descent stop position for lowering and stopping a member provided on the mounting head of the component mounting machine, which is a syringe capable of collecting the suction nozzle, toward the nozzle station, according to the measured height position.

7. The nozzle supply system according to claim 6, wherein the correction unit calculates the deviation between the vertical reference height position of the upper surface of the nozzle supply feeder and the height position measured by the measuring unit, and corrects the lowering stop position to eliminate the calculated deviation.

8. The nozzle supply system according to claim 1, wherein the measuring unit measures the height position using a laser sensor.

9. The nozzle supply system according to claim 1, wherein the measuring unit measures the horizontality of the upper surface of the nozzle supply feeder while the nozzle supply feeder is positioned on the feeder holding base.

10. The nozzle supply system according to claim 9, wherein the measuring unit measures the vertical height position at multiple locations on the upper surface of the nozzle supply feeder, and obtains the horizontality based on the deviation of the measured height positions at the multiple locations.

11. The nozzle supply system according to claim 9, wherein the measuring unit uses an imaging device to image the upper surface of the nozzle supply feeder, and obtains the horizontality based on the image of the upper surface of the nozzle supply feeder that has been imaged.

12. The nozzle supply system according to claim 9, further comprising a correction unit that corrects the horizontality by raising or lowering a predetermined part of the nozzle station using a lifting device when the horizontality measured by the measuring unit does not fall within the acceptable range.

13. The nozzle supply system according to claim 12, wherein the nozzle station is formed in a rectangular shape when viewed in the vertical direction, and the correction unit raises and lowers at least two of the four corners of the nozzle station.

14. The nozzle supply system according to any one of claims 6, 7, 12, and 13, wherein the correction unit performs correction before the suction nozzle is replaced between the mounting head provided on the component mounting machine and the nozzle station.

15. The nozzle supply system according to claim 14, wherein the correction unit restricts the replacement of the suction nozzle when the correction range is exceeded.

16. A component mounting machine comprising: a nozzle supply feeder that supplies suction nozzles for picking up components from a nozzle station capable of housing suction nozzles arranged in a planar manner; and a measuring unit that measures the vertical height position of the upper surface of the nozzle supply feeder on which the nozzle station is located, with the nozzle supply feeder positioned on a feeder holding base interchangeably with a tape feeder.