Temperature maintenance apparatus of device test handler

Abstract

The present invention relates to a temperature maintenance apparatus of a device test handler, which tests whether a device produced in a manufacturing process is good or defective. During a process in which a device loaded onto a vacuum chuck is heated or cooled under test conditions and then transferred to a test unit, even when the test time of the device being tested in the test unit is delayed, the temperature of the device, which has been heated or cooled under the test conditions, can be maintained at a predetermined level. To this end, according to the present invention, vacuum chucks (100), on which devices (32) to be tested are loaded to be aligned, are symmetrically installed on both sides of a main body (20), covers (130) are installed on upper portions of the vacuum chucks (100) to be openable and closable, such that when the devices (32) are loaded and aligned in each vacuum hole of the vacuum chucks (100), the covers (130) open the upper portions of the vacuum chucks (100), and after the alignment of the devices is completed, the covers (130) close the upper portions of the vacuum chucks (100), and when the vacuum chucks (100) reach a test unit (120), the covers (130) open the upper portions of the vacuum chucks (100).

Description

Temperature control device for device test handlers

[0001] The present invention relates to a device test handler for testing whether a device produced in a manufacturing process is a good product or a defective product. More specifically, it relates to a temperature maintenance device for a device test handler that can maintain a constant temperature of a device heated or cooled to test conditions even if the test time of the device being tested in the test section is delayed during the process of transferring a device loaded on a vacuum chuck to a test section after heating or cooling the device to test conditions.

[0002] Generally, in the manufacturing process, devices produced are tested for performance before shipment to determine whether they are good or defective; good devices are shipped, while defective ones are disposed of.

[0003] When performing a performance test of a device as described above, a high temperature or low temperature test is performed depending on the usage environment of the device. At this time, multiple devices are loaded onto a vacuum chuck and aligned, and then the vacuum chuck is heated or cooled to test conditions to perform a performance test of the device in the test section.

[0004] The recent trend in the electronics industry is to manufacture devices at low prices that are lightweight, miniaturized, high-speed, multifunctional, and high-performance. In addition, to improve the performance of integrated circuits, they are being developed into three-dimensional structures such as multi-chip stacked packages.

[0005] Among these multi-chip stacked packages, HBM is a high-performance (RAM) interface for three-dimensional stacked dynamic RAM (DRAM).

[0006] The above HBM is formed by stacking multiple chips sequentially on a wafer, then molding them as a single unit, separating them into individual pieces through a sawing process, and then conducting tests to ship only the products selected as good quality.

[0007] FIG. 1 is a plan view showing a conventional device test handler, comprising a main body (20), a loading section (51) and an unloading section (52) provided on the main body where a FOUP (Front Open Unified Pod) (40) containing a wafer ring frame (30) is located, a wafer ring frame handling member (42) located on one side of the loading section and the unloading section to withdraw or store a wafer ring frame (30) from each FOUP (40), a device loading position (61) and an unloading position (62) located between the loading section, the unloading section and the handling member, a plurality of loading pickers (81) and unloading pickers (82) installed to be reciprocally movable on a gantry (70) installed above the device loading position and the unloading position to handle a device (32), and a loading picker (81) provided on the loading picker (81) such that the loading picker [handles] the wafer ring frame (30) A vision camera (83) for confirming the position of a device (32) attached to a film (31) and causing a plurality of pickers to sequentially hold the device one by one; a first lower camera (84) installed on one side of the device unloading position to confirm and correct the position of the device (32) held by the unloading picker (82); a loading buffer (91) and an unloading buffer (92) that move back and forth along a rail (93) installed on one side of the device loading position and unloading position; a transfer picker (101) that positions the device placed on the loading buffer onto the upper part of the vacuum chuck (100) or unloads the device that has completed testing to the unloading buffer (92); a device alignment unit (110) equipped on the transfer picker that aligns the device by confirming the position of the device as the device (32) is loaded onto the vacuum chuck (100) and notifying the control unit of the coordinate value; and on the vacuum chuck It is configured to include a test unit (120) for testing the suctioned device.

[0008] Accordingly, before loading the device (32) onto the upper surface of the vacuum chuck (100), the vacuum chuck (100) is maintained at room temperature, heated to about 50 to 170°C, or cooled to about 0 to -55°C depending on the test conditions of the device.

[0009] In this state, a loading picker (81) installed on the gantry (70) sequentially picks up devices (32) from a wafer ring frame (30) located at the device loading position (61), then moves along the gantry (70) and sequentially places the devices on the upper part of the loading buffer (91).

[0010] When a plurality of devices (32) are placed on the upper part of the loading buffer (91) and the loading buffer (91) moves along the rail (93) to the point where the vacuum chuck (100) is installed, the transfer picker (101) holds the device (32) to be tested and places it in the vacuum hole of the vacuum chuck (100).

[0011] In this way, when the transfer picker (101) places the device (32) to be tested into the vacuum hole of the vacuum chuck (100), the device is finely moved and vacuum-adsorbed to align it by means of a vacuum device (not shown) installed to be connected to the vacuum hole. Since this operation is described in detail in Patent No. 2270760 previously registered by the applicant, a detailed explanation will be omitted.

[0012] After aligning the device (32) loaded on the vacuum chuck (100) with the operation described above, the vacuum chuck (100) with multiple devices attached moves along the rail (105) to the test section (120), so that the device is tested for a set time in the test section (120).

[0013]

[0014] (Prior Art Literature)

[0015] (Patent Document 0001) Republic of Korea Registered Patent Publication 10-0873670 (Published Dec. 12, 2008)

[0016] (Patent Document 0002) Republic of Korea Registered Patent Publication 10-1697119 (Published Jan. 18, 2017)

[0017] (Patent Document 0003) Republic of Korea Registered Patent Publication 10-2142687 (Published Aug. 07, 2020)

[0018] (Patent Document 0004) Republic of Korea Registered Patent Publication 10-2270760 (Published June 30, 2021)

[0019]

[0020] However, in these conventional device test handlers, if the time taken to test a device loaded on one vacuum chuck in the test section is longer than the time required to complete loading while aligning the device to the vacuum chuck located on the opposite side, the temperature of the vacuum chuck loaded to align the device changes, making it impossible to maintain consistent test results and consequently causing a fatal defect that reduces the test reliability of the device.

[0021] Furthermore, when conducting low-temperature tests on the device, frost forms on the cooled device, which further reduces the reliability of the device's test.

[0022] The present invention has been devised to solve such conventional problems, and its purpose is to improve the structure of the handler so that even if the test time of a device being tested in the test section is delayed, the device can be adsorbed to be aligned with another vacuum chuck and the temperature of the device heated or cooled under test conditions can be maintained at a constant level.

[0023] Another objective of the present invention is to reduce the area of ​​the test handler by installing a cover having a pocket in the device alignment section so that the upper part of the vacuum chuck can be opened and closed.

[0024] Another objective of the present invention is to prevent the phenomenon in which a device adsorbed and aligned to a vacuum chuck becomes contaminated with particles while waiting.

[0025] According to an embodiment of the present invention for achieving the above objective, a temperature maintenance device for a device test handler is provided, characterized in that vacuum chucks, into which a device to be tested is loaded and aligned, are symmetrically installed on both sides of a main body, and a cover is installed on the upper part of each vacuum chuck to be openable and closable, such that when a device is loaded and aligned into each vacuum hole of the vacuum chuck, the cover opens the upper part of the vacuum chuck, and when the alignment of the device is completed, the cover closes the upper part of the vacuum chuck, and when the vacuum chuck reaches the test section, the cover opens the upper part of the vacuum chuck.

[0026] The present invention is provided with a cover having a pocket that can open and close the upper part of the vacuum chuck in each device alignment section. Even if the test time of a device adsorbed to one vacuum chuck in the test section is delayed, the temperature of the device loaded on the vacuum chuck located on the other side is maintained by the pocket formed in the cover, thereby preventing not only the phenomenon of the device's temperature changing but also the phenomenon of frost forming on the device during low-temperature testing, thus maintaining the test reliability of the device.

[0027] In addition, since the cover is installed on the top of each vacuum chuck in a way that allows it to be opened and closed, the effect of reducing the size of the device handler can also be expected.

[0028] FIG. 1 is a plan view showing a conventional device test handler.

[0029] FIG. 2 is a plan view of a test handler to which an embodiment of the present invention is applied.

[0030] FIGS. 3A and 3B are perspective views showing the essential parts of the present invention.

[0031] FIGS. 4a and 4b are longitudinal views of FIGS. 3a and 3b.

[0032] FIGS. 5A and 5B are perspective views of the present invention installed on the upper part of a vacuum chuck.

[0033] FIG. 6 is a plan view showing the operating state of the present invention.

[0034] Hereinafter, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the invention. The present invention may be embodied in various different forms and is not limited to the embodiments described herein. It should be noted that the drawings are schematic and not drawn to scale. The relative dimensions and proportions of parts in the drawings are exaggerated or reduced in size for clarity and convenience in the drawings, and any dimensions are merely illustrative and not limiting. Also, the same reference numerals are used to denote similar features for identical structures, elements, or parts appearing in two or more drawings.

[0035] FIG. 2 is a plan view of a test handler to which an embodiment of the present invention is applied, FIG. 3a and FIG. 3b are perspective views showing the main parts of the present invention, FIG. 4a and FIG. 4b are cross-sectional views of FIG. 3a and FIG. 3b, and parts of the configuration of the present invention that are identical to the configuration of a conventional test handler are omitted from description and are given the same reference numerals.

[0036] In the present invention, a vacuum chuck (100) is symmetrically installed on both sides of a main body (20) to which a device (32) to be tested is loaded and aligned, and a cover (130) having a pocket (131) is installed on the upper part of each vacuum chuck (100) so as to be openable and closable. When loading and aligning a device (32) into each vacuum hole (not shown) of each vacuum chuck (100), the cover (130) opens the upper part of the vacuum chuck (100), and when the alignment of the device is completed, the cover (130) closes the upper part of the vacuum chuck (100), and when the vacuum chuck (100) reaches the test section (120), the cover (130) opens the upper part of the vacuum chuck (100).

[0037] Although the above cover (130) may be formed as a single unit, in order to reduce the stroke caused by the movement of the cover (130), in one embodiment of the present invention, the cover (130) is divided into first and second covers (130a) (130b), and the two divided covers (130a) (130b) are simultaneously closed or opened by means of an opening and closing means.

[0038] In one embodiment of the present invention, a pair of frames (140) with rails (141) fixed on their outer surfaces are fixedly installed parallel to each other on the upper surface of each vacuum chuck (100), and first and second guides (132a) (132b) installed on both sides of first and second covers (130a) (130b) are coupled to each rail (141), so that the two first and second covers (130a) (130b), which are formed by division according to the operation of the opening and closing means, simultaneously close or open the upper surface of the vacuum chuck (100).

[0039] As shown in FIG. 3a and FIG. 3b, the above opening and closing means is such that a pulley (152) on which a belt (151) is wound is fixed to each end of the frame (140), the first cover (130a) is fixed to the upper belt (151) by a first fastener (153a), and the second cover (130b) is fixed to the lower belt (151) by a second fastener (153b). One end of a cylinder (154) is fixed to the upper part of the vacuum chuck (100), and the rod (154a) of the cylinder (154) is fixed to one end of the second cover (130b). Thus, depending on the operation of the cylinder (154), the first and second covers (130a) (130b) simultaneously close or open the upper part of the vacuum chuck (100).

[0040] It is more preferable that the first and second covers (130a) (130b), which are driven by an opening and closing means to close or open the upper part of each vacuum chuck (100) in this manner, further include a cam means such that when the upper part of the vacuum chuck (100) is open, the upper surface of the first and second covers (130a) (130b) is positioned at a point lower than the upper surface of the vacuum chuck (100).

[0041] This is intended to prevent interference caused by the first and second covers (130a) (130b) during the process of handling the device (32) in the device alignment section (110) or opening the first and second covers (130a) (130b) in the test section (120) to test the device (32).

[0042] To this end, in one embodiment of the present invention, as shown in FIG. 4a, a first through hole (133a) is formed in the first guide (132a), and the first cover (130a) is elastically installed by a first elastic member (135a) so that it moves up and down along a first guide rod (134a) fitted into the first through hole (133a), and a first cam follower (136a) is fixed to the lower end of the first guide rod (134a), and the second guide (132b) has a second through hole (133b) formed in it, and the second cover (130b) is elastically installed by a second elastic member (135b) so that it moves up and down along a second guide rod (134b) fitted into the second through hole (133b), and a second cam follower (136b) is fixed to the lower end of the second guide rod (134b). There are first and second cams (137a) (137b) with first and second inclined surfaces (137a-1) (137b-1) formed on each side of the bottom of the frame (140) and are respectively fixed.

[0043] Additionally, at the center of the frame (140), where the first and second covers (130a) (130b) are closed, first and second stoppers (138a) (138b) are fixed so that the first and second cam followers (136a) (136b) are raised to the top dead center while in close contact with the bottom surface of the first and second guides (132a) (132b), thereby enveloping the device (32) loaded so that the pocket (131) formed on the bottom surface of the first and second covers (130a) (130b) is aligned with the top surface of the vacuum chuck (100).

[0044] At this time, if a bearing (139) connected to the upper surface of the first and second stoppers (138a) (138b) is rotatably installed at the lower part of the first and second cam followers (136a) (136b), the operation of the first and second cam followers (136a) (136b) connecting to the first and second stoppers (138a) (138b) is performed smoothly, and at the same time, the generation of noise can be minimized.

[0045] The operation of the present invention is described as follows.

[0046] First, when the vacuum chuck (100) on which the device (32) is loaded is maintained under test conditions, as shown in FIGS. 3b, 4b, and 5b, the rod (154a) of the cylinder (154) is pulled out as much as possible, and the first and second covers (130a) (130b) formed by division open the upper part of the vacuum chuck (100).

[0047] That is, when the cylinder (154) is driven to fully extend the rod (154a), the first cover (130a) is fixed to the upper belt (151) by the first fastener (153a) and the second cover (130b) is fixed to the lower belt (151) by the second fastener (153b). Since the rod (154a) of the cylinder (154) is fixed to the second fastener (153b), the pulley (152) rotates counterclockwise as shown in the direction of the arrow in FIG. 3a. Consequently, the first and second covers (130a) (130b) move along the rail (141) to a position where they are far apart from each other, thereby opening the upper part of the vacuum chuck (100).

[0048] At this time, the first and second cam followers (136a) (136b), which were elastically installed by the first and second elastic members (135a) (135b) by the first and second covers (130a) (130b) and the first and second guide rods (134a) (134b) at the lower part of the first and second guides (132a) (132b), are pushed downward as shown in FIG. 4b by the first and second inclined surfaces (137a-1) (137b-1) of the first and second cams (137a) (137b) fixed to be positioned at both ends of the frame (140). Consequently, the first and second covers (130a) (130b) descend while compressing the first and second elastic members (135a) (135b), and accordingly, the first and second Since the upper surface of the cover (130a) (130b) is positioned below the upper surface of the vacuum chuck (100), interference by the first and second covers (130a) (130b) is prevented when the transfer picker (101) handles the device (32) to be tested.

[0049] In this way, with the first and second covers (130a) (130b) open at the top of the vacuum chuck (100), the transfer picker (101) sequentially holds the device (32) to be tested and places it on the vacuum hole of the vacuum chuck (100), and then aligns the device by vacuum suction while moving it finely by means of a vacuum device (not shown) installed to be connected to the vacuum hole.

[0050] After aligning the device (32) loaded into the vacuum chuck (100) with the operation described above, the cylinder (154) is driven again contrary to the above to pull the rod (154a) that was pulled out as much as possible, so that the first and second covers (130a) (130b) move inward simultaneously to close the upper part of the vacuum chuck (100).

[0051] That is, when the rod (154a) of the cylinder (154) is pulled, the pulley (152) rotates clockwise as shown in FIG. 3b, so the first and second covers (130a) (130b) move inward along the rail (141), thereby closing the upper part of the vacuum chuck (100).

[0052] At this time, as the first and second cam followers (136a) (136b), which were elastically installed by the first and second elastic members (135a) (135b) on the lower part of the first and second guides (132a) (132b) by the first and second covers (130a) (130b) and the first and second guide rods (134a) (134b), move away from the first and second cams (137a) (137b), the first and second cam followers (136a) (136b) and the first and second covers (130a) (130b), which are connected by the first and second guide rods (134a) (134b), rise simultaneously by the restoring force of the first and second elastic members (135a) (135b), and at the same time the first and second covers (130a) (130b) At the closing point, the bottom surface of the first and second cam followers (136a) (136b) is pressed upward by the first and second stoppers (138a) (138b), so that the first and second covers (130a) (130b) wrap around the device (32) that is adsorbed and aligned with the vacuum chuck (100).

[0053] At this time, bearings (139) are rotatably installed on the bottom surfaces of the first and second cam followers (136a) and (136b), respectively, so that the operation is smooth and the generation of noise is minimized.

[0054] After the first and second covers (130a) (130b) close the upper surface of the vacuum chuck (100) through the above operation, the device (32) maintains the temperature of the test conditions, and accordingly, even if the test time is delayed in the test section (120), the vacuum chuck (100) is wrapped by the pockets (131) of the first and second covers (130a) (130b) as shown in FIG. 5b, so the temperature of the device (32) adsorbed to the vacuum chuck (100) can be maintained at the test temperature.

[0055] Meanwhile, after the vacuum chuck (100) is transferred to the test section (120) for testing the device (32) adsorbed on the vacuum chuck (100), the cylinder (154) is reactivated and the upper part of the vacuum chuck (100) is opened as shown in FIG. 6 through the operation as described above, so that the device (32) can be tested for a set time in the test section (120).

[0056] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing the technical concept or essential features.

[0057] Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting, and the scope of the invention as described in the above detailed description is defined by the claims set forth below, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the invention.

[0058]

[0059] [ Explanation of symbols ]

[0060] 20 : Main body 32 : Device

[0061] 100 : Vacuum chuck 120 : Test section

[0062] 130: Cover 130a, 130b: 1st and 2nd covers

[0063] 131: Pocket 132a, 132b: 1st, 2nd Guider

[0064] 133a, 133b: 1st and 2nd through holes 134a, 134b: 1st and 2nd guide rods

[0065] 135a, 135b: 1st and 2nd elastic members 136a, 136b: 1st and 2nd cam followers

[0066] 137a, 137b: 1st and 2nd cams 138a, 138b: 1st and 2nd stoppers

[0067] 140 : Frame 141 : Rail

[0068] 153a, 153b: 1st and 2nd fasteners 154: Cylinder

[0069] 154a : Load

Claims

1. A temperature maintenance device for a device test handler, characterized in that vacuum chucks (100) into which a device (32) to be tested is loaded and aligned are symmetrically installed on both sides of a main body (20), and a cover (130) is installed on the upper part of each vacuum chuck (100) so as to be openable and closable, so that when a device (32) is loaded and aligned into each vacuum hole of the vacuum chuck (100), the cover (130) opens the upper part of the vacuum chuck (100), and when the alignment of the device is completed, the cover (130) closes the upper part of the vacuum chuck (100), and when the vacuum chuck (100) reaches the test section (120), the cover (130) opens the upper part of the vacuum chuck (100).

2. In Claim 1, A temperature maintenance device for a device test handler, characterized in that the above cover (130) is divided into first and second covers (130a) (130b) and the two divided covers (130a) (130b) are simultaneously closed or opened by means of an opening and closing means.

3. In Claim 2, A temperature maintenance device for a device test handler, characterized by fixing a pair of frames (140) with a rail (141) fixed to the upper part of the vacuum chuck (100), and connecting first and second guides (132a) (132b) installed on both sides of first and second covers (130a) (130b) formed by dividing them into two parts to each rail (141), so that the two first and second covers (130a) (130b) formed by dividing them by an opening and closing means simultaneously close or open the upper part of the vacuum chuck (100).

4. In claim 2 or claim 3, A temperature maintenance device for a device test handler, characterized by the above-mentioned opening and closing means, wherein a pulley (152) on which a belt (151) is wound is fixed to each end of the frame (140), the first cover (130a) is fixed to the upper belt (151) by a first fastener (153a), the second cover (130b) is fixed to the lower belt (151) by a second fastener (153b), one end of a cylinder (154) is fixed to the upper part of the vacuum chuck (100), and the rod (154a) of the cylinder (154) is fixed to the second fastener (153b) fixed to the second cover (130b), so that the first and second covers (130a) (130b) simultaneously close or open the upper part of the vacuum chuck (100).

5. In Claim 4, A first through hole (133a) is formed in the first guide (132a), and a first elastic member (135a) is elastically installed so that the first cover (130a) moves up and down along a first guide rod (134a) fitted into the first through hole (133a), and a first cam follower (136a) is fixed to the lower end of the first guide rod (134a). A second through hole (133b) is formed in the second guide (132b), and a second elastic member (135b) is elastically installed so that the second cover (130b) moves up and down along a second guide rod (134b) fitted into the second through hole (133b), and a second cam follower (136b) is fixed to the lower end of the second guide rod (134b), and on both lower sides of the frame (140), the first and second A temperature maintenance device for a device test handler characterized by having each cam (137a) and (137b) fixed.

6. In Claim 5, A temperature maintenance device for a device test handler, characterized by fixing first and second stoppers (138a) (138b), to which the bottom surfaces of first and second cam followers (136a) (136b) are connected, at the lower center of the above frame (140).

7. In Claim 6, A temperature maintenance device for a device test handler, characterized by having a bearing (139) rotatably installed on the lower part of the first and second cam followers (136a) (136b) and connected to the upper surface of the first and second stoppers (138a) (138b), respectively.

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