Light source apparatus and semiconductor test device

Abstract

A light source apparatus and a semiconductor test device. The light source apparatus comprises a laser generator, a converging lens, a discharge lamp chamber, a detection module and an adjustment module; the laser generator is used for emitting a laser beam; after passing through the converging lens, the laser beam enters the discharge lamp chamber; under the excitation of the laser beam, plasma in the discharge lamp chamber provides a lighting beam; the detection module is used for acquiring at least one of spatial information of the plasma and the power of the lighting beam, the spatial information comprising the shape, size and position information of the plasma; on the basis of the at least one of the spatial information and the power of the lighting beam, the adjustment module is used for adjusting at least one of the cross-sectional energy distribution of the laser beam and the position of the discharge lamp chamber. When the laser beam acts on the plasma, a better energy conversion rate is achieved, improving the effective power output by the lighting beam radiating from the plasma.

Description

Light source devices and semiconductor testing equipment

[0001] This application claims priority to Chinese Patent Application No. 202411979130.4, filed on December 27, 2024, entitled "Light Source Device and Semiconductor Testing Equipment", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of semiconductor measurement technology, and in particular to a light source device and a semiconductor testing equipment. Background Technology

[0003] With the increasing precision of semiconductor integrated circuits, higher-precision advanced process inspection equipment is needed to ensure high quality, thus requiring more advanced light sources. Among these, laser-sustained plasma (LSP) sources are a key light source for advanced process inspection equipment. LSP sources can maintain plasma discharge under the action of a laser beam to provide a high-power, broadband illumination beam. The brightness of this illumination beam is far higher than that of traditional xenon lamps, making it more suitable for the optical inspection of high-precision advanced process wafers. However, given the high power of the laser beam in an LSP source, the shape, size, and position of the plasma are affected by the laser beam power, reducing the energy conversion between the plasma and the laser beam, resulting in a decrease in the effective power of the final illumination beam output. Summary of the Invention

[0004] This application provides a light source device and a semiconductor testing equipment, which can improve the effective power of the illumination beam output.

[0005] In a first aspect, this application provides a light source device, which includes a laser generator, a converging lens, a discharge lamp chamber, a detection module, and an adjustment module. The laser generator is used to emit a laser beam, which enters the interior of the discharge lamp chamber after passing through the converging lens. The plasma in the discharge lamp chamber provides an illumination beam under the excitation of the laser beam. The detection module is used to acquire at least one of the spatial information of the plasma and the power of the illumination beam. The spatial information includes the shape, size, and position information of the plasma. The adjustment module is used to adjust at least one of the cross-sectional energy distribution of the laser beam and the position of the discharge lamp chamber according to at least one of the spatial information and the power of the illumination beam.

[0006] In this application, when the light source device is operating, the adjustment module adjusts the cross-sectional energy distribution of the laser beam to ensure the plasma has a symmetrical structure. This guarantees the stability of the flow field within the discharge lamp chamber, reduces laser beam scattering within the chamber, and improves the energy conversion rate when the laser beam interacts with the plasma, thereby increasing the effective power output of the illumination beam. Furthermore, ensuring the plasma is in a symmetrical structure improves the uniformity of heating within the discharge lamp chamber, which is beneficial for extending its service life. When the adjustment module adjusts the position of the laser beam within the discharge lamp chamber, it reduces the deviation between the discharge center of the plasma and the focal point of the laser beam within the chamber, ensuring that the focal point of the laser beam within the chamber coincides as closely as possible with the discharge center of the plasma. This further improves the energy conversion rate when the laser beam interacts with the plasma, thereby increasing the effective power output of the illumination beam radiated from the plasma.

[0007] In conjunction with the first aspect, in one possible implementation, the light source device further includes a lamp housing and a dichroic mirror. The lamp housing houses the dichroic mirror, a converging lens, and a discharge lamp chamber. The dichroic mirror is used to transmit the laser beam so that the laser beam passes through the converging lens and enters the discharge lamp chamber. The dichroic mirror is also used to reflect the illumination beam to the light-emitting window of the lamp housing.

[0008] In conjunction with the first aspect, in one possible implementation, the adjustment module includes an optical shaping device disposed in the transmission optical path between the laser generator and the dichroic mirror, the optical shaping device being used to adjust the cross-sectional energy distribution of the laser beam according to at least one of spatial information and the power of the illumination beam.

[0009] By adjusting the overall cross-sectional energy distribution of the laser beam emitted by the laser generator through optical shaping devices, the laser beam incident into the discharge lamp chamber can effectively ensure that the plasma discharge is in a symmetrical structure, ensuring the stability of the flow field in the discharge lamp chamber, reducing the scattering of the illumination beam, and making the focusing effect of the illumination beam better, thereby helping to improve the effective power output of the illumination beam.

[0010] In conjunction with the first aspect, in one possible implementation, the light source device further includes a beam splitter and a first power detector. The beam splitter is disposed in the transmission optical path between the optical shaping device and the dichroic mirror. The first power detector is disposed on the side of the beam splitter away from the optical shaping device. The beam splitter is used to reflect a portion of the laser beam after passing through the optical shaping device to the dichroic mirror, and to transmit another portion of the laser beam after passing through the optical shaping device into the first power detector. The first power detector is used to detect the power of the laser beam. The optical shaping device is also used to adjust the cross-sectional energy distribution of the laser beam according to the power of the laser beam.

[0011] The optical shaping device can further combine the power of the laser beam with the spatial information of the plasma and the power of the illumination beam to adjust the cross-sectional energy distribution of the laser beam, thereby reducing the influence of laser beam power offset on the cross-sectional energy distribution of the laser beam.

[0012] In conjunction with the first aspect, in one possible implementation, the laser generator is also used to adjust the power of the emitted laser beam based on at least one of spatial information, the power of the illumination beam, and the power of the laser beam.

[0013] When power drift occurs after prolonged operation of the laser generator, the generator can respond promptly to changes in laser beam power and quickly adjust the beam power to ensure the stability of the light source device. Simultaneously, the generator can also adjust the laser beam power based on the spatial information of the plasma and the power of the illumination beam, reducing the impact of excessively high laser beam power on the effective power output of the illumination beam.

[0014] In conjunction with the first aspect, in one possible implementation, the adjustment module further includes a drive unit connected to the discharge lamp chamber, the drive unit being used to drive the discharge lamp chamber to move according to at least one of spatial information, the power of the illumination beam, and the power of the laser beam.

[0015] By adjusting the position of the discharge lamp chamber relative to the converging lens using the driving component, the discharge center of the plasma can be made to coincide as much as possible with the focal point of the laser beam, ensuring that the illumination beam radiated by the plasma has a good focusing effect at the light output window, thereby improving the effective power of the illumination beam output.

[0016] In conjunction with the first aspect, in one possible implementation, the driving element is located outside the lamp housing and on the side of the discharge lamp chamber away from the dichroic mirror.

[0017] The driving component is located on the side of the discharge lamp chamber away from the dichroic mirror, which can reduce the impact of the connection between the driving component and the discharge lamp chamber on the transmission optical path of the laser beam and the transmission optical path of the illumination beam.

[0018] In conjunction with the first aspect, in one possible implementation, the detection module includes a second power detector located outside the light-emitting window, which is used to detect the power of the illumination beam.

[0019] In conjunction with the first aspect, in one possible implementation, the lamp housing is also provided with an observation window, and the detection module also includes an image sensor. The image sensor is used to acquire image information of the plasma through the observation window in order to acquire spatial information through the image information.

[0020] By monitoring changes in the spatial information of the plasma and adjusting the transmission path of the laser beam through at least one of the optical shaping device, driving device, and laser generator, the plasma is kept in a symmetrical structure, thereby ensuring the stability of the flow field inside the discharge lamp.

[0021] Secondly, this application provides a semiconductor testing device, which includes an optical mirror assembly, a sample stage, and a light source device as provided in any implementation of the first aspect, wherein an illumination beam emitted by the light source device is incident on the sample stage via the optical mirror assembly. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0023] Figure 1 is a schematic diagram of a semiconductor testing device provided in an embodiment of this application;

[0024] Figure 2 is a schematic diagram of a light source device provided in an embodiment of this application;

[0025] Figure 3 is a schematic diagram of another light source device provided in an embodiment of this application.

[0026] Explanation of reference numerals in the attached drawings: 100-Light source device; 11-Laser generator; 12-Converging lens; 13-Discharge lamp chamber; 14-Detection module; 15-Adjustment module; 16-Lamp housing; 17-Dichroic mirror; 18-Beam splitter; 19-Light homogenizer; 20-Aperture; 21-Control module; 141-First power detector; 142-Second power detector; 143-Image sensor; 151-Light shaping device; 152-Driver; 161-Light emission window; 162-Observation window; 200-Optical lens group; 300-Sample stage; 1000-Semiconductor testing equipment. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this application clearer, the application will now be described in further detail with reference to the accompanying drawings.

[0028] Please refer to Figure 1, which is a schematic diagram of a semiconductor testing device 1000 provided in an embodiment of this application. This application provides a semiconductor testing device 1000, which includes an optical lens group 200, a sample stage 300, and a light source device 100. The light source device 100 is used to emit an illumination beam, and the sample stage 300 is used to place the workpiece to be tested. The illumination beam emitted by the light source device 100 passes through the optical lens group 200 and is incident on the sample stage 300 for fine testing of the workpiece.

[0029] Among them, the semiconductor testing equipment 1000 can be a semiconductor measurement device used to test the electrical parameters and physical properties of semiconductor devices.

[0030] The light source device 100 can be an LSP light source. The LSP light source can maintain plasma discharge under the action of the laser beam to provide a high-power broadband illumination beam, which can effectively improve the performance of the semiconductor detection device 1000.

[0031] In order to improve the output power of the illumination beam using an LSP light source, this application provides a light source device 100 and a semiconductor detection device 1000 including the light source device 100.

[0032] Please refer to Figure 2, which is a schematic diagram of the structure of a light source device 100 provided in an embodiment of this application. This application provides a light source device 100, which is applied to the semiconductor detection equipment provided in this application. The light source device 100 includes a laser generator 11, a converging lens 12, a discharge lamp chamber 13, a detection module 14, and an adjustment module 15. The laser generator 11 emits a laser beam, which is incident on the interior of the discharge lamp chamber 13 through the converging lens 12. The plasma within the discharge lamp chamber 13 provides an illumination beam under the excitation of the laser beam. The detection module 14 acquires at least one of the spatial information of the plasma and the power of the illumination beam. The spatial information includes the shape, size, and position information of the plasma. The adjustment module 15 adjusts at least one of the cross-sectional energy distribution of the laser beam and the position of the discharge lamp chamber 13 according to at least one of the spatial information and the power of the illumination beam.

[0033] The cross-sectional energy distribution refers to the energy distribution of a laser beam across its cross-section. The cross-sectional energy distribution of a laser beam typically follows a Gaussian distribution, meaning the energy is highest at the center of the beam and gradually decreases towards the edges.

[0034] It should be noted that, in this application, the transmission optical path of the laser beam is shown by the solid arrow in the figure, and the transmission optical path of the illumination beam is shown by the dashed arrow in the figure.

[0035] The plasma discharge process consists of two stages: ignition and sustaining. During ignition, a discharge gas, such as argon or xenon, can be introduced to ignite the plasma using methods such as high-power pulsed laser, DC glow discharge, or radio frequency microwave discharge. The plasma generates excited-state particles, ions, and electrons. During sustaining, a continuous laser is input for power feeding. The high-energy particles and electrons in the ignited plasma absorb the laser power through stimulated absorption and inverse bremsstrahlung processes, thereby sustaining the plasma discharge and providing a high-power broadband light source. In this application, the laser beam emitted by the laser generator 11 is used to sustain the plasma discharge, providing a high-power broadband illumination beam.

[0036] When the light source device 100 is operating, the adjustment module 15 adjusts the cross-sectional energy distribution of the laser beam to ensure a symmetrical structure of the plasma. This guarantees the stability of the flow field within the discharge lamp chamber 13, reduces laser beam scattering within the chamber, and improves the energy conversion rate of the laser beam acting on the plasma, thereby increasing the effective power output of the illumination beam. Furthermore, ensuring a symmetrical plasma structure improves the uniformity of heating within the discharge lamp chamber 13, which is beneficial for extending its service life. When the adjustment module 15 adjusts the position of the laser beam within the discharge lamp chamber 13, it reduces the deviation between the laser beam's focal point and the discharge center of the plasma within the chamber 13, ensuring that the focal point of the laser beam within the chamber 13 coincides as closely as possible with the discharge center of the plasma, thereby increasing the effective power output of the illumination beam radiated from the plasma.

[0037] The converging lens 12 is used to focus the laser beam emitted by the laser generator 11 onto the discharge center within the discharge lamp chamber 13. The converging lens 12 has a hemispherical structure, and the inner wall surface of the hemispherical converging lens 12 is a reflective surface to focus the laser beam.

[0038] In one embodiment, the laser generator 11 is an adjustable laser, which can emit laser beams of different powers. Specifically, the laser generator 11 can increase or decrease the power of the laser beam based on at least one of spatial information and the power of the illumination beam. This allows for timely response to power changes and rapid adjustment of the laser beam power when a power shift occurs after prolonged operation of the laser generator 11, ensuring the stability of the light source device 100.

[0039] In one embodiment, the adjustment module 15 adjusts the laser beam based on either spatial information or the power of the illumination beam. For example, the adjustment module 15 can adjust the cross-sectional energy distribution of the laser beam based on spatial information. When the spatial information of the plasma changes, causing asymmetry in the plasma and resulting in a shift of the plasma relative to one side of the original axis of symmetry, it indicates that the cross-sectional energy of the laser beam is higher on one side of the original axis of symmetry and lower on the other side. The adjustment module 15 lowers the cross-sectional energy on one side of the original axis of symmetry and raises the cross-sectional energy on the other side to maintain a symmetrical structure of the plasma. The adjustment module 15 can also adjust the position of the discharge chamber 13 based on spatial information. When the spatial information of the plasma changes, causing a shift in the position of the plasma discharge center, the position of the discharge chamber 13 in the light source device 100 is adjusted based on the deviation between the discharge center of the plasma and the focal point of the laser beam within the discharge chamber 13, so that the discharge center of the plasma within the discharge chamber 13 substantially coincides with the focal point of the laser beam within the discharge chamber 13. Alternatively, the adjustment module 15 can also adjust the cross-sectional energy distribution of the laser beam or the position of the discharge chamber 13 based on the power of the illumination beam. When a decrease in the power of the illumination beam is detected, one of the cross-sectional energy distribution of the laser beam and the position of the discharge lamp chamber 13 is continuously adjusted until the effective power output of the illumination beam is increased to an optimal value and no longer increases.

[0040] In another embodiment, the adjustment module 15 can also simultaneously adjust the cross-sectional energy distribution of the laser beam based on spatial information and the power of the illumination beam. Specifically, the adjustment module 15 adjusts the cross-sectional energy distribution of the laser beam until the plasma is in a symmetrical structure, and then further adjusts the cross-sectional energy distribution of the laser beam based on the effective power output of the illumination beam until the effective power output of the illumination beam is increased to a relatively optimal value. The adjustment module 15 can also adjust the position of the discharge lamp chamber 13 based on spatial information and the power of the illumination beam. Specifically, when adjusting the position of the discharge lamp chamber 13 in the light source device 100, the spatial information of the plasma is detected in real time. When the discharge lamp chamber 13 is adjusted to be near the original focal point of the laser beam, the discharge lamp chamber 13 is finely adjusted near the original focal point of the laser beam based on the detected power of the illumination beam to prevent the focal point of the laser beam from shifting due to laser beam refraction and to reduce the deviation between the discharge center of the plasma and the focal point of the laser beam.

[0041] In another embodiment, the adjustment module 15 adjusts both the cross-sectional energy distribution and the position of the discharge lamp chamber 13 based on spatial information and the power of the illumination beam. Similarly, by adjusting the cross-sectional energy distribution of the laser beam to ensure the plasma is in a symmetrical structure, the position of the discharge lamp chamber 13 is adjusted in conjunction with spatial information and the power of the illumination beam. This ensures the plasma is in a symmetrical structure, reduces the deviation between the discharge center of the plasma and the focal point of the laser beam, and ensures that the plasma maintained by the laser beam can radiate a high-brightness illumination beam at the discharge center, significantly improving the effective power output of the illumination beam.

[0042] For example, the light source device 100 also includes a lamp housing 16 and a dichroic mirror 17. The lamp housing 16 houses the dichroic mirror 17, a converging lens 12, and a discharge lamp chamber 13. The dichroic mirror 17 is used to transmit the laser beam so that the laser beam enters the discharge lamp chamber 13 after passing through the converging lens 12. The dichroic mirror 17 is also used to reflect the illumination beam to the light-emitting window 161 of the lamp housing 16.

[0043] The laser generator 11 can be disposed outside the lamp housing 16. The laser beam emitted by the laser generator 11 passes through the lamp housing 16 and, after being transmitted by the dichroic mirror 17, illuminates the converging lens 12. The converging lens 12 then focuses the laser beam into the discharge lamp chamber 13. The converging lens 12 can be fitted to the inner wall of the lamp housing 16. The plasma maintained by the laser beam radiates an illumination beam outward from the discharge center. The illumination beam is reflected by the converging lens 12 and the dichroic mirror 17 to the light outlet window 161.

[0044] In one embodiment, the adjustment module 15 includes an optical shaping device 151 and a driving element 152. The optical shaping device 151 is disposed in the transmission optical path between the laser generator 11 and the dichroic mirror 17. The optical shaping device 151 is used to adjust the cross-sectional energy distribution of the laser beam according to at least one of spatial information and the power of the illumination beam, so that the plasma discharge is in a symmetrical structure. The driving element 152 is connected to the discharge lamp chamber 13. The driving element 152 is used to drive the discharge lamp chamber 13 to move relative to the converging lens 12 according to at least one of spatial information and the power of the illumination beam, so that the discharge center of the plasma substantially coincides with the focal point of the laser beam.

[0045] Specifically, the laser beam emitted by the laser generator 11 passes sequentially through the optical shaping device 151, the dichroic mirror 17, and the converging lens 12 before entering the discharge lamp chamber 13. When spatial information and the power of the illumination beam are not obtained, the optical shaping device 151 is used to transmit the laser beam emitted by the laser generator 11.

[0046] When the adjustment module 15 adjusts the cross-sectional energy distribution based on at least one of the spatial information and the power of the illumination beam, the light shaping device 151 specifically performs the adjustment action.

[0047] The light shaping device 151 can adjust the cross-sectional energy distribution to make the plasma have a symmetrical structure within the discharge lamp chamber 13, so that the illumination beam radiated by the plasma has a better focusing effect at the light exit window 161. The light shaping device 151 can also be used to adjust the shape of the laser beam, reduce the speckle of the laser beam, and improve the focusing effect and transmission efficiency of the laser beam.

[0048] The laser beam emitted by the laser generator 11 is adjusted by the optical shaping device 151, so that the laser beam incident into the discharge lamp chamber 13 can effectively ensure that the plasma discharge is in a symmetrical structure, ensure the stability of the flow field in the discharge lamp chamber 13, reduce the scattering of the illumination beam, and make the focusing effect of the illumination beam better, thereby helping to improve the effective power output of the illumination beam.

[0049] Specifically, when the adjustment module 15 adjusts the discharge lamp chamber 13 based on at least one of the spatial information and the power of the illumination beam, the adjustment action is specifically performed by the drive unit 152.

[0050] In one embodiment, the driving element 152 can drive the discharge lamp chamber 13 to reciprocate along the arrangement direction of the dichroic mirror 17 and the discharge lamp chamber 13, wherein the first direction is [missing information]. When the laser beam outputs high power, the spatial information of the plasma will change with respect to the direction of the laser beam (the direction towards the dichroic mirror 17 along the arrangement direction of the dichroic mirror 17 and the discharge lamp chamber 13, as shown in direction A in FIG2). For example, the shape of the plasma may be asymmetrical, the position of the plasma may be offset towards the dichroic mirror 17, and the volume of the plasma may increase. This can easily cause the discharge center of the plasma to deviate from the focal point of the laser beam, resulting in low coupling efficiency of the illumination beam at the light exit window 161. At this time, by driving the discharge lamp chamber 13 to move away from the dichroic mirror 17 along the first direction by the driving element 152, the deviation between the discharge center of the plasma and the focal point of the laser beam is effectively reduced, the coupling efficiency is improved, and thus the effective power of the illumination beam output is improved. In other embodiments, the driving element 152 can drive the discharge lamp chamber 13 to move in any direction, which can be specifically set according to the spatial information of the plasma.

[0051] The driver 152 is disposed outside the lamp housing 16 and located on the side of the discharge lamp chamber 13 opposite to the dichroic mirror 17. This reduces the impact of the connection between the driver 152 and the discharge lamp chamber 13 on the transmission paths of the laser beam and the illumination beam. Specifically, the driver 152 is connected to the discharge lamp chamber 13 via a connector that passes through the lamp housing 16. The connector can be made relatively small to reduce its impact on the transmission paths of the laser beam and the illumination beam.

[0052] By adjusting the position of the discharge lamp chamber 13 relative to the converging lens 12 using the drive component 152, the deviation between the discharge center of the plasma and the focal point of the laser beam is reduced, so that the discharge center of the plasma can coincide with the focal point of the laser beam as much as possible. This ensures that the illumination beam radiated by the plasma has the best focusing effect at the light output window 161, thereby improving the effective power output of the illumination beam.

[0053] Please refer to Figure 3, which is a schematic diagram of another light source device 100 provided in one embodiment of this application. In one embodiment, the light source device 100 further includes a beam splitter 18 and a light homogenizer 19. The beam splitter 18 is disposed in the transmission optical path between the light shaping device 151 and the dichroic mirror 17, and the beam splitter 18 can reflect and transmit the laser beam. The light homogenizer 19 is disposed outside the lamp housing 16. Specifically, the light homogenizer 19 is disposed outside the light output window 161, and the light homogenizer 19 is used to homogenize the illumination beam emitted from the light output window 161. The arrangement of the converging lens 12, the discharge lamp chamber 13, and the dichroic mirror 17 is the same as that in the embodiment shown in Figure 2, and the relative positions between the laser generator 11 and the light shaping device 151 remain unchanged.

[0054] The detection module 14 includes a first power detector 141, a second power detector 142, and an image sensor 143. All three are located outside the lamp housing 16. The first power detector 141 detects the power of the laser beam, and the second power detector 142 detects the power of the illumination beam. For example, the second power detector 142 is located at the output end of the homogenizing device 19, and detects the power of the illumination beam after homogenization. The lamp housing 16 also has an observation window 162, and the image sensor 143 is located outside the observation window 162. The image sensor 143 acquires image information of the plasma through the observation window 162 to obtain spatial information.

[0055] Specifically, the laser beam emitted by the laser generator 11 passes sequentially through the optical shaping device 151, the beam splitter 18, the dichroic mirror 17, and the converging lens 12 before entering the discharge lamp chamber 13. The first power detector 141 is located on the side of the beam splitter 18 opposite to the optical shaping device 151 to prevent it from affecting the transmission path of the laser beam. When the laser beam emitted by the laser generator 11 enters the beam splitter 18 after passing through the optical shaping device 151, part of the laser beam is reflected by the beam splitter 18 to the dichroic mirror 17, and part of the laser beam passes through the beam splitter 18 and enters the first power detector 141, where the power of the laser beam is obtained.

[0056] When the transmission path of the laser beam deviates from the optimal path, the plasma is prone to asymmetry, affecting the stability of the flow field within the discharge lamp chamber 13. In this application, the spatial information changes of the plasma are monitored by an image sensor 143, and the transmission path of the laser beam is adjusted by at least one of the optical shaping device 151, the driving device 152, and the laser generator 11 to ensure that the plasma is in a symmetrical structure, thereby ensuring the stability of the flow field within the discharge lamp chamber 13.

[0057] In this application, the optical shaping device 151 can also adjust the cross-sectional energy distribution of the laser beam according to the power of the laser beam. That is, the optical shaping device 151 can adjust the cross-sectional energy distribution of the laser beam based on at least one of spatial information and the power of the illumination beam, combined with the power of the laser beam. This allows for timely adjustment of the cross-sectional energy distribution when the laser beam power deviates, ensuring a symmetrical structure during plasma discharge and maintaining the stability of the flow field, thereby improving the stability of the illumination beam output. In other embodiments, the optical shaping device 151 can adjust the cross-sectional energy distribution of the laser beam solely based on the power of the laser beam.

[0058] Furthermore, the laser generator 11 can also adjust the power of the laser beam according to the laser beam power. That is, the laser generator 11 can adjust (e.g., increase or decrease) the power of the emitted laser beam based on at least one of the spatial information, the power of the illumination beam, and the power of the laser beam. In this way, when power drift occurs after the laser generator 11 has been operating for a long time, the laser generator 11 can respond promptly to changes in laser beam power and quickly adjust the laser beam power, ensuring the stability of the light source device 100. Simultaneously, the laser generator 11 can also adjust the laser beam power based on the spatial information of the plasma and the power of the illumination beam, reducing the impact of excessively high laser beam power on the effective power output of the illumination beam.

[0059] In other embodiments, the light source device 100 may further include an aperture 20, which is disposed in the transmission optical path between the beam splitter 18 and the dichroic mirror 17. The aperture 20 is used to adjust the size of the laser beam incident on the dichroic mirror 17. Specifically, the spot size of the laser beam incident on the dichroic mirror 17 can be adjusted by replacing apertures 20 with different apertures.

[0060] In one embodiment, the light source device 100 may further include a control module 21. The control module 21 is used to output a feedback signal based on at least one of spatial information, the power of the illumination beam, and the power of the laser beam. The feedback signal includes configuration information of the cross-sectional energy distribution of the laser beam, configuration information of the position of the discharge lamp chamber 13, and configuration information of the laser beam power, enabling the adjustment module 15 to directly adjust at least one of the corresponding configuration information based on the feedback signal. Specifically, the configuration information of the cross-sectional energy distribution of the laser beam is the adjustment amount of the cross-sectional energy distribution to ensure a symmetrical structure during plasma discharge. The configuration information of the position of the discharge lamp chamber 13 is the displacement amount of the discharge lamp chamber 13, ensuring that the discharge center of the plasma substantially coincides with the focal point of the laser beam. The laser beam power configuration information specifically refers to the final output power of the laser beam. For example, if the feedback signal includes configuration information of the cross-sectional energy distribution of the laser beam and configuration information of the discharge lamp chamber 13, then the light shaping device 151 adjusts the cross-sectional energy distribution of the laser beam according to the configuration information of the cross-sectional energy distribution, and the driving device 152 drives the discharge lamp chamber 13 to move according to the configuration information of the discharge lamp chamber 13.

[0061] Specifically, the first power detector 141, the second power detector 142, and the image sensor 143 are all communicatively connected to the input terminal of the control module 21. The laser generator 11, the light shaping device 151, and the driver 152 are all communicatively connected to the output terminal of the control module 21. The power of the laser beam detected by the first power detector 141, the power transmission of the illumination beam detected by the second power detector 142, and the image information acquired by the image sensor 143 are all transmitted to the control module 21. The control module 21 analyzes the power of the laser beam, the power of the illumination beam, and the image information and outputs a feedback signal. At least one of the laser generator 11, the light shaping device 151, and the driver 152 performs an adjustment action based on the feedback signal.

[0062] The control module 21 can output feedback signals based on methods such as proportional-integral-derivative (PID) control, local optimal search control, offline table creation and online table lookup control, and global optimization control.

[0063] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0064] The terms "first," "second," and various numerical designations used herein are merely for descriptive convenience and are not intended to limit the scope of this application.

[0065] It should be understood that in the various embodiments of this application, the order of the above-mentioned processes does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0066] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit it. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A light source device, characterized in that, The device includes a laser generator, a converging lens, a discharge lamp chamber, a detection module, and an adjustment module. The laser generator emits a laser beam, which, after passing through the converging lens, enters the interior of the discharge lamp chamber. The plasma within the discharge lamp chamber provides an illumination beam under the excitation of the laser beam. The detection module acquires at least one of the spatial information of the plasma and the power of the illumination beam. The spatial information includes the shape, size, and position information of the plasma. The adjustment module adjusts at least one of the cross-sectional energy distribution of the laser beam and the position of the discharge lamp chamber based on at least one of the spatial information and the power of the illumination beam.

2. The light source apparatus according to claim 1, wherein The light source device further includes a lamp housing and a dichroic mirror. The lamp housing houses the dichroic mirror, the converging lens, and the discharge lamp chamber. The dichroic mirror is used to transmit the laser beam so that the laser beam enters the discharge lamp chamber after passing through the converging lens. The dichroic mirror is also used to reflect the illumination beam to the light-emitting window of the lamp housing.

3. The light source device according to claim 2, characterized in that, The adjustment module includes an optical shaping device disposed in the transmission optical path between the laser generator and the dichroic mirror. The optical shaping device is used to adjust the cross-sectional energy distribution of the laser beam according to at least one of the spatial information and the power of the illumination beam.

4. The light source device according to claim 2 or 3, characterized in that, The light source device further includes a beam splitter and a first power detector. The beam splitter is disposed in the transmission optical path between the light shaping device and the dichroic mirror. The first power detector is disposed on the side of the beam splitter away from the light shaping device. The beam splitter is used to reflect a portion of the laser beam after passing through the light shaping device to the dichroic mirror, and to transmit another portion of the laser beam after passing through the light shaping device into the first power detector. The first power detector is used to detect the power of the laser beam transmitted through the beam splitter. The light shaping device is also used to adjust the cross-sectional energy distribution of the laser beam according to the power of the laser beam.

5. The light source device according to any one of claims 2-4, characterized in that, The laser generator is also used to adjust the power of the emitted laser beam according to at least one of the spatial information, the power of the illumination beam, and the power of the laser beam.

6. The light source device according to claim 4 or 5, characterized in that, The adjustment module further includes a driving component connected to the discharge lamp chamber. The driving component is used to drive the discharge lamp chamber to move according to at least one of the spatial information, the power of the illumination beam, and the power of the laser beam.

7. The light source device according to claim 6, characterized in that, The driving component is located outside the lamp housing and on the side of the discharge lamp chamber away from the dichroic mirror.

8. The light source device according to claim 1 or 2, characterized in that, The detection module includes a second power detector, which is located outside the light-emitting window and is used to detect the power of the illumination beam.

9. The light source device according to claim 2, characterized in that, The lamp housing is also provided with an observation window, and the detection module further includes an image sensor. The image sensor is used to acquire image information of the plasma through the observation window, so as to acquire spatial information through the image information.

10. A semiconductor testing device, characterized in that, It includes an optical lens assembly, a sample stage, and a light source device as described in any one of claims 1-9, wherein an illumination beam emitted by the light source device is incident on the sample stage via the optical lens assembly.

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